WO2012134146A1 - Appareil pour inspecter la vision à l'aide d'une vision stéréo et d'un modèle de grille - Google Patents

Appareil pour inspecter la vision à l'aide d'une vision stéréo et d'un modèle de grille Download PDF

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Publication number
WO2012134146A1
WO2012134146A1 PCT/KR2012/002219 KR2012002219W WO2012134146A1 WO 2012134146 A1 WO2012134146 A1 WO 2012134146A1 KR 2012002219 W KR2012002219 W KR 2012002219W WO 2012134146 A1 WO2012134146 A1 WO 2012134146A1
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WO
WIPO (PCT)
Prior art keywords
unit
vision
inspection object
grid pattern
inspection
Prior art date
Application number
PCT/KR2012/002219
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English (en)
Korean (ko)
Inventor
박찬화
김성현
구자명
Original Assignee
주식회사 미르기술
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Publication date
Application filed by 주식회사 미르기술 filed Critical 주식회사 미르기술
Publication of WO2012134146A1 publication Critical patent/WO2012134146A1/fr

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2545Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/081Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0815Controlling of component placement on the substrate during or after manufacturing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N2021/95638Inspecting patterns on the surface of objects for PCB's

Definitions

  • the present invention relates to a vision inspection apparatus, and more particularly, by performing a vision inspection using a plaid together with a stereo vision, the vision using a stereo vision and a plaid that can quickly and accurately measure the height of the inspection object It relates to an inspection apparatus.
  • SMT Surface Mounting Technology
  • PCB printed circuit board
  • SMD surface-mounting components
  • Surface mount lines consist of equipment such as surface mounters and vision inspection equipment.
  • the surface mounter is a device for mounting surface-mounted parts on a printed circuit board.
  • the surface mounter receives various surface-mounted parts supplied in the form of tape, stick, and tray from a feeder and places them on the mounting position on the printed circuit board. Perform.
  • the vision inspection apparatus inspects the mounting state of the surface mount component before or after the soldering process of the surface mount component is completed and transfers the printed circuit board to the next process according to the inspection result.
  • a typical vision inspection apparatus includes a lighting unit to which light is irradiated using a lamp or the like, a camera unit for photographing image information of various components mounted on an inspection unit and reflecting light from the lighting unit. It comprises a half mirror for transmitting the shape of the inspection object to the camera unit while being reflected on the inspection object.
  • the lighting unit is arranged in the housing by arranging a plurality of lamps in a plurality, when the illumination of the inspection object to supply power to the plurality of lamps to irradiate light.
  • All of the above inspection methods measure the two-dimensional shadow shape and calculate the three-dimensional height by using a trigonometric function.
  • the conventional vision inspection apparatus includes an illumination unit 110 to which light is irradiated using a lamp and the like, and an image of various components installed on the inspection object by being installed on the illumination unit 110. And a half mirror 130 for reflecting the light from the illumination unit 110 to capture information and transmitting the shape of the inspection object to the camera while reflecting light from the illumination unit 110.
  • the lighting unit 110 is arranged in the housing 140 by arranging a plurality of lamps, and, when irradiating the light to the inspection object to supply power to the plurality of lamps to irradiate light.
  • a half mirror provided for capturing an image while reflecting light is disposed in front of the central camera unit, thereby preventing a clearer image.
  • the present invention has been made to solve the above problems, to provide a vision inspection apparatus capable of measuring the height of the inspection object quickly and accurately.
  • Still another object of the present invention is to provide a vision inspection apparatus capable of improving the uniformity of light irradiated onto a surface of an inspection object.
  • Still another object of the present invention is to provide a vision inspection apparatus capable of capturing a clearer image by removing a half mirror disposed in front of a central camera unit.
  • Vision inspection apparatus for achieving the above object is to determine the good or bad of the inspection object by comparing the photographed image with the pre-input target image after taking the inspection object assembled or mounted during the assembly of the parts with the camera
  • An apparatus for vision inspection comprising: a stage unit for fixing or transferring an inspection object to an inspection position, an illumination unit positioned at an upper portion of the stage unit and providing illumination to the inspection object, and positioned at a center of the illumination unit
  • a central camera unit for acquiring a two-dimensional shape of the camera, a side camera unit disposed in a plurality of sides of the central camera unit, a grid pattern irradiation unit disposed in the side of the central camera unit, and an image photographed by the central camera unit
  • a vision processor which reads out and determines whether the inspection object is good or bad; And a control unit for controlling the grid pattern irradiation unit and the camera unit, wherein two predetermined cameras of the side camera unit photograph the inspection object to measure the height of the inspection object, and one of the grid pattern ir
  • the grid pattern irradiation unit comprises any one of a liquid crystal panel or a micromirror module.
  • the height measured by the irradiated grid pattern is configured to have a resolution larger than the height of the inspection object measured by the two cameras.
  • the plurality of grid pattern irradiation units are disposed.
  • a light diffusing unit is disposed in front of the lighting unit.
  • the lighting unit may include a horizontal lighting unit for irradiating light in a vertically downward direction and an inclined lighting unit for irradiating light in an oblique direction.
  • the plurality of grid pattern irradiation units are disposed to face each other with respect to the central camera unit.
  • the side camera portions are disposed to face each other with respect to the center camera portion.
  • the light diffusing unit may be disposed in front of both the horizontal lighting unit and the inclined lighting unit.
  • a positioning camera unit for checking the position of the inspection object may be disposed at one side of the central camera unit.
  • the positioning lighting unit and the half mirror may be disposed in front of the positioning camera unit.
  • the angle between the central camera portion and the grid pattern irradiation portion on the side view is 25 degrees to 45 degrees.
  • the height of the inspection object can be calculated quickly and accurately.
  • the uniformity of the light irradiated on the surface of the inspection object can be improved.
  • Fig. 1A is a perspective view showing a state in which a lattice pattern is irradiated to the part.
  • FIG.1 (b) is a top view which shows the state which irradiated the grid with a component.
  • FIG. 2 is a side cross-sectional view of a conventional vision inspection apparatus.
  • FIG. 3 is a schematic side view of a vision inspection apparatus according to the present invention.
  • FIG. 4 is a schematic plan view of a vision inspection apparatus according to the present invention.
  • 5 is a conceptual diagram showing the relationship between the period of the lattice pattern and the height of the parts.
  • FIG 3 is a schematic side view of a vision inspection apparatus according to the present invention
  • Figure 4 is a schematic plan view of the vision inspection apparatus according to the present invention.
  • the vision inspection apparatus after taking the inspection object 5 assembled or mounted in the assembly process of the part with a camera and compares the photographed image with the previously input target image ( 5) A vision inspection apparatus for discriminating good or bad of 5), the stage unit 10 for fixing or conveying the inspection object 5 to the inspection position, and the upper portion of the stage unit 10, the inspection An illumination unit 20 for providing illumination to the object 5, a central camera unit 30 positioned at the center of the illumination unit 20 to obtain a two-dimensional shape of the inspection object 5, and the central camera unit A side camera portion disposed in plural on the side of 30, lattice pattern irradiation portions 50-2, 50-4, 50-6, and 50-8 disposed on the side of the central camera portion 30; The image taken by the central camera unit 30 is read and the Vision control unit 60 for determining a defect, and the control unit 70 for controlling the stage unit 10, the grid pattern irradiation unit and the camera unit, two cameras of the side of the predetermined camera unit ( 5) photographing to measure the height of the test object
  • Vision inspection apparatus of the present invention is installed to perform the vision inspection before moving to the next process through the conveyor of the preceding equipment, when inspecting the surface-mounted parts of the printed circuit board after the surface mounting work in the surface mounting line .
  • Such vision inspection apparatus can be installed in a manner that is arranged in the space formed between the conveyor of the line, trailing equipment and the conveyor, can also be used in the form of a single table without being connected to the line, trailing equipment.
  • the stage unit 10 is a component that provides a space in which the inspected object 5 to be inspected is seated, and a position adjusting unit (not shown) and a high position for adjusting and fixing the position of the inspected object 5. It may be configured to include a government (not shown).
  • the lighting unit 20 is installed on the upper portion of the stage unit 10 continuously or intermittently along the circumferential direction around the central camera unit 30.
  • the lighting unit 20 is a component that provides illumination to the inspection object 5 in order to secure accurate image information of the inspection object 5, by placing a plurality of lamps or LED bulbs to the inspection object (5) ) Can be arranged to illuminate from side to side.
  • the lighting unit 20 includes a horizontal lighting unit 22 and the inclined lighting unit 23.
  • the horizontal lighting unit 22 is installed on the upper portion of the stage 10 serves to provide the light incident to the inspection object (5) perpendicularly.
  • the inclined light unit 23 is disposed at the side of the vertical light unit 22 to provide light in the oblique direction.
  • the central camera unit 30 is a component for photographing the inspection object 5 in a plan view, and preferably, may be provided as a charge coupled device (CCD) camera.
  • CCD charge coupled device
  • the degree of deformation of the pattern can be measured the height of the inspection object.
  • a half mirror is disposed in front of the center camera unit, and reflects the light from the lighting unit, and is configured to capture an image through the camera.
  • the center camera unit 30 No half mirror is placed in front.
  • a plurality of side camera units 40-2, 40-4, 40-6, and 40-8 are arranged symmetrically with respect to the center camera unit 30 on the side of the central camera unit 30, thereby providing an image. Eliminate blind spots and take pictures quickly.
  • the four side camera parts 40-2, 40-4, 40-6, and 40-8 are symmetrically arranged with respect to the center camera part 30, such as a substrate. Examine the lifting and uninsertion of the parts placed on the inspection object.
  • the grid pattern irradiation unit 50-2, 50- to compensate for the limitation of the resolution as described above. 4, 50-6, 50-8 to measure the height by capturing the grid pattern is irradiated by the central camera unit 30 to measure the finer height.
  • the height measured by the grid pattern irradiated by the grid pattern irradiation unit 50-2, 50-4, 50-6, 50-8 is the height of the inspection object measured by the two cameras (stereo vision) It is configured to have a higher resolution (more detailed height measurement).
  • the grid pattern irradiation unit (50-2, 50-4, 50-6, 50-8) is a configuration for measuring the height by irradiating the grid pattern on the inspection object 5, a liquid crystal panel or a digital micromirror display ( DMD: Digital Micromirror Display and light source.
  • DMD Digital Micromirror Display and light source.
  • the shadow of the grid-shaped shadow is irradiated onto the inspection object 5 under the control of the control unit 70, and the degree of deformation of the grid-shaped shadow through the central camera unit 30, We can calculate the height of.
  • the grid pattern irradiation unit 50-2, 50-4, 50-6, 50-8 also has four grid pattern irradiation units 50-2, 50-4, 50-6, centered on the central camera unit 30. 50-8) are arranged symmetrically, and configured to irradiate the grid 5 to the inspection object 5 selectively.
  • the arrangement angle a between the grid pattern irradiation unit 50-2, 50-4, 50-6, 50-8 and the central camera unit 30 is arranged in an angle range of 25 degrees to 45 degrees. .
  • the angle (a) When the angle (a) is smaller than 25 degrees, the degree of deformation of the grid pattern according to the height of the component is small, which may cause an error in the height calculation.
  • the angle (a) is larger than 45 degrees, the grid pattern irradiation unit ( 50-2, 50-4, 50-6, 50-8), the difference in the width of the grid pattern irradiated on the near and far sides is too large, which may cause errors in the height calculation.
  • the vision processor 60 calculates the image information of the inspection object (5) obtained from the camera unit through a mathematical process, and compares the good or bad of the inspection object (5) by comparing it with a reference value input in advance To judge.
  • controller 70 is a component including a motion controller for controlling the driving and operation of the stage unit 10, the first and second camera units, and is provided to control the driving of the entire vision inspection apparatus according to the present invention. Can be.
  • the controller 70 is responsible for physical control such as photographing position control of the vision inspection apparatus, processing of photographed images, and lighting unit control according to a system control program, as well as performing inspection task and data calculation task.
  • control unit 70 is in charge of the overall control of the vision inspection apparatus, such as output device control for outputting the work contents and inspection results to the monitor and input device control for the operator to input the settings and all the details.
  • the light diffusion unit 25 such as a light diffusion plate is disposed in front of the illumination unit 20, so that the light from the illumination unit 20 is evenly irradiated to the entire area of the inspection object.
  • the light diffusion unit 25 is configured to be bent in a side cross-section so that the light diffusion unit 25 can be disposed in front of both the horizontal light unit 22 and the inclined light unit 23.
  • a positioning camera unit 80 for checking the position of the inspection object.
  • the positioning lighting unit 84 and the half mirror 82 is disposed in front of the positioning camera unit 80.
  • the configuration for positioning is accommodated in the housing of the separate positioning camera unit 80, thereby reducing the housing diameter of the central camera unit 30 It can be reduced and management is easy even in case of accessory failure.
  • FIG. 5 is a conceptual diagram illustrating an operation principle of a vision inspection apparatus using a stereo vision and a plaid according to the present invention.
  • a straight line connecting the points a, b, c and d conceptually shows the height that can be measured by stereo vision.
  • the height that can be measured by stereo vision has a resolution of 500 micrometers, all heights from 0 to 500 micrometers are recognized as the same height, and another height from 500 to 1000 micrometers To be recognized.
  • the stereo vision method primarily measures the approximate height of the component.
  • the height of the hexahedral component illustrated in FIG. 5 is 1680 micrometers, the height of the component is primarily measured in the range of 1500 and 2000 micrometers through stereo vision.
  • the grid pattern is examined to determine that the height from point d to point R is 180 micrometers.
  • the total height of the part is 1500 + 180, measured 1680 micrometers.
  • the lattice pattern matching the first lattice pattern on the left side in FIG. 1 is 1-1 lattice pattern on the right side. It is not possible to determine whether the lattice 1 or 3-1 lattice pattern, that is, whether the lattice pattern on the upper surface of the part and the lattice pattern on the bottom surface coincide after several cycles (lattice spacing).
  • the stereo vision and the plaid is measured according to the requirements of the height inspection device, respectively, once the stereo vision and the plaid, or the stereo vision is taken once, the plaid is measured by moving the upper surface of the inspection object more accurate height measurement It may be configured to enable.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Operations Research (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un appareil pour inspecter la vision, destiné à photographier avec un appareil photo un objet d'inspection, qui est assemblé ou monté dans un processus d'assemblage de pièces, et ensuite comparer l'image photographiée avec une image d'objet qui est entrée par avance pour déterminer si l'objet d'inspection est satisfaisant ou défectueux, et comprenant : une partie d'étage pour fixer ou transférer l'objet d'inspection vers une position d'inspection ; une partie d'éclairage qui est positionnée sur la partie supérieure de la partie d'étage, pour apporter de la lumière sur l'objet d'inspection ; une partie centrale d'appareil photo qui est positionnée au centre de la partie d'éclairage, pour obtenir une forme bidimensionnelle de l'objet d'inspection ; des parties latérales d'appareil photo qui sont agencées dans une pluralité sur la partie latérale de la partie centrale d'appareil photo ; une pluralité de parties d'irradiation de modèles de grilles qui est agencée sur la partie latérale de la partie centrale d'appareil photo, entre les appareils photos sur la partie latérale d'appareil photo ; une partie de traitement de la vision pour lire l'image qui est photographiée par la partie centrale d'appareil photo pour déterminer si l'objet d'inspection est satisfaisant ou défectueux ; et une partie de commande pour commander la partie d'étage, la partie d'irradiation de modèles de grilles et la partie d'appareil photo, deux appareils photos prédéterminés des parties latérales d'appareil photo photographiant l'objet d'inspection pour mesurer la hauteur de l'objet d'inspection, et une des unités d'irradiation de modèles de grilles irradiant un modèle de grille pour mesurer la hauteur.
PCT/KR2012/002219 2011-03-31 2012-03-27 Appareil pour inspecter la vision à l'aide d'une vision stéréo et d'un modèle de grille WO2012134146A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110029558A KR101245622B1 (ko) 2011-03-31 2011-03-31 스테레오 비전과 격자 무늬를 이용한 비전검사장치
KR10-2011-0029558 2011-03-31

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WO2012134146A1 true WO2012134146A1 (fr) 2012-10-04

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103226005A (zh) * 2013-03-22 2013-07-31 中国计量学院 一种采用网状面结构光测量堆放物重量的系统及方法
CN103292700A (zh) * 2013-05-28 2013-09-11 吉林大学 机器视觉测量系统空间一般位置姿态计量基准
EP3306266A4 (fr) * 2015-06-08 2018-04-25 Koh Young Technology Inc. Appareil de mesure de forme tridimensionnelle
CN109753982A (zh) * 2017-11-07 2019-05-14 北京京东尚科信息技术有限公司 障碍点检测方法、装置和计算机可读存储介质

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KR101632410B1 (ko) * 2014-12-11 2016-06-21 프로미스 주식회사 윈도우패널 검사장치
KR102018896B1 (ko) * 2017-11-20 2019-09-06 인곡산업 주식회사 엔드밀 치핑을 검사하는 비전검사장치 플랫폼
KR102127169B1 (ko) * 2018-12-28 2020-06-26 주식회사 유라코퍼레이션 차량 내 분실물 알림 시스템 및 그 방법

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KR100406843B1 (ko) * 2001-04-06 2003-11-21 (주) 인텍플러스 색정보를 이용한 실시간 3차원 표면형상 측정방법 및 장치
JP2007333591A (ja) * 2006-06-15 2007-12-27 Daiichi Jitsugyo Viswill Co Ltd 検査用照明装置
KR101000047B1 (ko) * 2008-04-18 2010-12-09 주식회사 미르기술 비전 검사 시스템

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103226005A (zh) * 2013-03-22 2013-07-31 中国计量学院 一种采用网状面结构光测量堆放物重量的系统及方法
CN103226005B (zh) * 2013-03-22 2015-06-10 中国计量学院 一种采用网状面结构光测量堆放物重量的系统及方法
CN103292700A (zh) * 2013-05-28 2013-09-11 吉林大学 机器视觉测量系统空间一般位置姿态计量基准
EP3306266A4 (fr) * 2015-06-08 2018-04-25 Koh Young Technology Inc. Appareil de mesure de forme tridimensionnelle
US10302423B2 (en) 2015-06-08 2019-05-28 Koh Young Technology Inc. Three-dimensional shape measurement apparatus
CN109753982A (zh) * 2017-11-07 2019-05-14 北京京东尚科信息技术有限公司 障碍点检测方法、装置和计算机可读存储介质

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KR20120111196A (ko) 2012-10-10

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