WO2012128459A3 - Cassette de plaquettes solaires - Google Patents

Cassette de plaquettes solaires Download PDF

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Publication number
WO2012128459A3
WO2012128459A3 PCT/KR2012/000410 KR2012000410W WO2012128459A3 WO 2012128459 A3 WO2012128459 A3 WO 2012128459A3 KR 2012000410 W KR2012000410 W KR 2012000410W WO 2012128459 A3 WO2012128459 A3 WO 2012128459A3
Authority
WO
WIPO (PCT)
Prior art keywords
disposed
end plates
wafer cassette
assembly slot
solar wafer
Prior art date
Application number
PCT/KR2012/000410
Other languages
English (en)
Korean (ko)
Other versions
WO2012128459A2 (fr
Inventor
이강성
천준환
Original Assignee
(주)상아프론테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)상아프론테크 filed Critical (주)상아프론테크
Priority to JP2013558775A priority Critical patent/JP5671160B2/ja
Publication of WO2012128459A2 publication Critical patent/WO2012128459A2/fr
Publication of WO2012128459A3 publication Critical patent/WO2012128459A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

La présente invention a trait à une cassette de plaquettes solaires. La cassette de plaquettes solaires inclut : des première et seconde plaques d'extrémité qui sont disposées de manière à être en face l'une de l'autre, une distance prédéterminée étant fixée entre ces dernières ; et une pluralité de barres de support qui sont disposées de façon fixe sur les deux extrémités des première et seconde plaques d'extrémité de manière à supporter les surfaces latérales et les surfaces inférieures de la pluralité de plaquettes solaires qui sont reçues entre les première et seconde plaques d'extrémité. Une fente d'assemblage (111) permettant d'assembler chacune des barres de support (130) est formée dans une surface intérieure d'au moins une plaque d'extrémité parmi les première et seconde plaques d'extrémité (110, 120). De même, une ouverture d'accès (111a) et une ouverture de guidage (111b) sont formées dans la partie extérieure et dans la partie intérieure de la fente d'assemblage (111), respectivement. Un crochet (111c) est disposé sur un bord intérieur de l'ouverture de guidage (111b). Un bloc d'assemblage de type étagé (140) inséré dans la fente d'assemblage (111) à travers l'ouverture d'accès (111a) est disposé sur une extrémité correspondant à la fente d'assemblage (111) de chacune des barres de support (130).
PCT/KR2012/000410 2011-03-24 2012-01-18 Cassette de plaquettes solaires WO2012128459A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013558775A JP5671160B2 (ja) 2011-03-24 2012-01-18 太陽電池ウェーハカセット

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110026153A KR101035552B1 (ko) 2011-03-24 2011-03-24 솔라웨이퍼 카세트
KR10-2011-0026153 2011-03-24

Publications (2)

Publication Number Publication Date
WO2012128459A2 WO2012128459A2 (fr) 2012-09-27
WO2012128459A3 true WO2012128459A3 (fr) 2012-11-15

Family

ID=44366278

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/000410 WO2012128459A2 (fr) 2011-03-24 2012-01-18 Cassette de plaquettes solaires

Country Status (3)

Country Link
JP (1) JP5671160B2 (fr)
KR (1) KR101035552B1 (fr)
WO (1) WO2012128459A2 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012174432A2 (fr) * 2011-06-15 2012-12-20 Entegris, Inc. Support de traitement de cellules solaires
CN104368560A (zh) * 2014-11-05 2015-02-25 东晶锐康晶体（成都）有限公司 一种大片晶片提篮
KR101564605B1 (ko) 2015-01-22 2015-11-02 (주)상아프론테크 웨이퍼 보관용 카세트
US9972740B2 (en) 2015-06-07 2018-05-15 Tesla, Inc. Chemical vapor deposition tool and process for fabrication of photovoltaic structures
US9748434B1 (en) 2016-05-24 2017-08-29 Tesla, Inc. Systems, method and apparatus for curing conductive paste
US9954136B2 (en) 2016-08-03 2018-04-24 Tesla, Inc. Cassette optimized for an inline annealing system
US10115856B2 (en) 2016-10-31 2018-10-30 Tesla, Inc. System and method for curing conductive paste using induction heating
DE102017204910B4 (de) * 2017-03-23 2018-10-04 Singulus Technologies Ag Trägerkassette und Trägerkassettenstapel
KR102038750B1 (ko) * 2017-11-08 2019-11-26 주식회사 월덱스 상압소결 실리콘 카바이드 웨이퍼 캐리어 및 결합구조와 그 결합방법
CN110444497B (zh) * 2019-08-12 2021-08-20 常州皓晟精密机械有限公司 一种太阳能光伏电池片、硅片承载盒
CN112151428A (zh) * 2020-09-28 2020-12-29 北京市塑料研究所 硅片承载装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08107080A (ja) * 1994-09-30 1996-04-23 Toshiba Ceramics Co Ltd 縦型ウェ−ハボ−ト
JP2004134800A (ja) * 2002-10-09 2004-04-30 Foxsemicon Intergated Technology Inc 基板支持用スロット棒および基板用カセット
JP2007324219A (ja) * 2006-05-30 2007-12-13 Covalent Materials Corp 縦型ウエハボート
KR20100106132A (ko) * 2009-03-23 2010-10-01 엠파워(주) 웨이퍼 케리어

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07115123A (ja) * 1993-10-15 1995-05-02 Micro Gijutsu Kenkyusho:Kk 基板収納用ラック
JPH09213645A (ja) * 1996-01-29 1997-08-15 Sumitomo Sitix Corp ウェーハ支持装置及びその製造方法
JPH09293685A (ja) * 1996-02-28 1997-11-11 Asahi Glass Co Ltd 縦型ウエハボート
JPH09266177A (ja) * 1996-03-28 1997-10-07 Tekunisuko:Kk ウェーハボート
JP3479201B2 (ja) * 1997-03-28 2003-12-15 東芝セラミックス株式会社 組立式ウエハ用ボート及びその取付治具
US6056123A (en) * 1997-12-10 2000-05-02 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
JP3798136B2 (ja) * 1997-12-24 2006-07-19 信越石英株式会社 基盤熱処理用支持治具
JP2000040667A (ja) * 1998-07-21 2000-02-08 Toshiba Ceramics Co Ltd ウエハボート
JP3544481B2 (ja) * 1998-11-25 2004-07-21 東芝セラミックス株式会社 半導体製造用炭化珪素質組立ウェーハボート
JP4328468B2 (ja) * 1999-04-15 2009-09-09 インテグレイティッド マテリアルズ インク ウェーハ処理用シリコン固定具の製造方法
JP2000323423A (ja) * 1999-05-13 2000-11-24 Kokusai Electric Co Ltd ウェハ保持用ボート
US6378538B1 (en) * 1999-12-13 2002-04-30 Advanced Micro Devices, Inc. Durable, multi-piece rotor for spray acid tools
KR100410982B1 (ko) * 2001-01-18 2003-12-18 삼성전자주식회사 반도체 제조장치용 보트
US6811040B2 (en) * 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08107080A (ja) * 1994-09-30 1996-04-23 Toshiba Ceramics Co Ltd 縦型ウェ−ハボ−ト
JP2004134800A (ja) * 2002-10-09 2004-04-30 Foxsemicon Intergated Technology Inc 基板支持用スロット棒および基板用カセット
JP2007324219A (ja) * 2006-05-30 2007-12-13 Covalent Materials Corp 縦型ウエハボート
KR20100106132A (ko) * 2009-03-23 2010-10-01 엠파워(주) 웨이퍼 케리어

Also Published As

Publication number Publication date
JP2014509788A (ja) 2014-04-21
KR101035552B1 (ko) 2011-05-23
WO2012128459A2 (fr) 2012-09-27
JP5671160B2 (ja) 2015-02-18

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