WO2012128371A1 - Rare-earth magnetic powder, method for manufacturing same, compound of same, and bond magnet of same - Google Patents

Rare-earth magnetic powder, method for manufacturing same, compound of same, and bond magnet of same Download PDF

Info

Publication number
WO2012128371A1
WO2012128371A1 PCT/JP2012/057645 JP2012057645W WO2012128371A1 WO 2012128371 A1 WO2012128371 A1 WO 2012128371A1 JP 2012057645 W JP2012057645 W JP 2012057645W WO 2012128371 A1 WO2012128371 A1 WO 2012128371A1
Authority
WO
WIPO (PCT)
Prior art keywords
rare earth
magnet powder
powder
earth magnet
magnet
Prior art date
Application number
PCT/JP2012/057645
Other languages
French (fr)
Japanese (ja)
Inventor
本蔵 義信
御手洗 浩成
松岡 浩
千里 三嶋
健児 野口
洋幸 土井
Original Assignee
愛知製鋼株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 愛知製鋼株式会社 filed Critical 愛知製鋼株式会社
Publication of WO2012128371A1 publication Critical patent/WO2012128371A1/en

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C28/00Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/16Metallic particles coated with a non-metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • B32B15/013Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of an iron alloy or steel, another layer being formed of a metal other than iron or aluminium
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/002Ferrous alloys, e.g. steel alloys containing In, Mg, or other elements not provided for in one single group C22C38/001 - C22C38/60
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/005Ferrous alloys, e.g. steel alloys containing rare earths, i.e. Sc, Y, Lanthanides
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/12Ferrous alloys, e.g. steel alloys containing tungsten, tantalum, molybdenum, vanadium, or niobium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047Alloys characterised by their composition
    • H01F1/053Alloys characterised by their composition containing rare earth metals
    • H01F1/055Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • H01F1/0571Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes
    • H01F1/0572Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes with a protective layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047Alloys characterised by their composition
    • H01F1/053Alloys characterised by their composition containing rare earth metals
    • H01F1/055Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • H01F1/0571Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes
    • H01F1/0575Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together
    • H01F1/0578Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together bonded together

Definitions

  • the present invention relates to a rare earth magnet powder excellent in oxidation resistance, a manufacturing method thereof, a compound using the rare earth magnet powder, and a bonded magnet.
  • Rare earth magnets Since rare earth magnets exhibit extremely high magnetic properties, they are being used in various appliances such as electric appliances and automobiles that are desired to be energy-saving and lightweight.
  • Rare earth magnets include a dense magnet made of a sintered body of a rare earth magnet powder (referred to as “magnet powder” as appropriate) or a dense molded body, and a bonded magnet in which the magnet powder is solidified with a binder resin. Recently, bond magnets having a high degree of freedom in molding and suitable for manufacturing light and thin parts tend to be used frequently.
  • the magnet powder constituting the bonded magnet is mainly composed of iron and rare earth elements, it is easily oxidized by oxygen and moisture during the manufacturing process and during transportation as well as during the use of the bonded magnet. Such oxidation degrades the magnet powder and reduces the magnetic properties of the bonded magnet.
  • Patent Document 1 it is proposed to form a passive film that suppresses oxidation on a magnet powder, unlike the coating described above.
  • Patent Document 1 only describes that the oxidation treatment is performed at an oxygen concentration of 1 to 20% and an atmospheric temperature of 60 to 200 ° C. It is not described at all whether the oxidation treatment should be performed.
  • FIG. 1 in Patent Document 1 shows that no demagnetization occurs over a long period of time by forming a passive film.
  • FIG. 2 of the same publication shows that the coercive force of the magnet powder subjected to the oxidation treatment is reduced to about 2/3 or less of the coercivity of the magnet powder not subjected to the oxidation treatment.
  • the contents described in the above-mentioned Patent Document 1 are clearly doubtful, merely describe desired contents, and are substantially equivalent to not making any effective technical proposal.
  • the present invention has been made under such circumstances. That is, an object is to provide a realistic rare earth magnet powder having excellent oxidation resistance. Moreover, it aims at providing the manufacturing method of the magnet powder, the compound and bond magnet using the rare earth magnet powder together.
  • the rare earth magnet powder of the present invention is composed of powder particles in which R 2 TM 14 B 1 type crystals, which are tetragonal compounds of rare earth elements (R), boron (B), and transition elements (TM), are aggregated.
  • the rare earth magnet powder is characterized in that the powder particles have a passive film covering the outer surface.
  • the rare earth magnet powder of the present invention (referred to as “magnet powder” as appropriate) is composed of powder particles whose outer surface is coated with a chemically stable passive film.
  • the magnet powder of the present invention is prevented from being oxidized and exhibits excellent oxidation resistance. For this reason, not only the storage and handling properties of the magnet powder itself of the present invention are improved, but also bond magnets using this magnet powder exhibit excellent environmental resistance and high magnetic properties over a long period of time. It can be used stably and its range of use can be further expanded.
  • the passive film of the present invention is a dense oxide film having a high oxygen shielding property (in other words, a low oxygen permeability), although details of its composition and form are not necessarily clear at present. it is conceivable that. More specifically, the passive film according to the present invention is considered to be a passive oxide film made of an oxide of R and / or TM inferred from the composition of the magnet powder.
  • the passive oxide film has an oxide of such a metal element (for example, Al 2). It is possible to consist of O 3 ).
  • such a metal element may exist from the beginning of the master alloy, or may be supplied later by diffusion treatment or the like, and any of them may be used.
  • the passive oxide film is not limited to a single oxide, but may be a composite oxide film composed of a plurality of oxides.
  • the passive film made of an oxide film is formed at a relatively low cost and is thin, so that it hardly affects the magnetic properties of the magnet powder.
  • the passive film of the present invention is not limited in its composition, structure, form, etc., but it is preferable that the film has a certain film thickness in order to exhibit chemically stable and excellent oxygen shielding properties over a long period of time. is there. Specifically, the thickness of the passive film is preferably 30 nm or more, 40 nm or more, and more preferably 50 nm or more.
  • the passive film is a dense film excellent in oxygen shielding property unlike a simple oxide film, its film thickness is unlikely to be excessive in the first place. If it dares to say, it is preferable that the film thickness of a passive film is about 300 nm or less further about 200 nm or less.
  • the present invention can also be grasped as a method for producing the rare earth magnet powder described above. That is, the present invention includes an oxidation process in which powder particles in which R 2 TM 14 B 1 type crystals, which are tetragonal compounds of R, B, and TM, are aggregated are heated in an oxidizing atmosphere, and the oxidizing process includes the oxidizing atmosphere. And a first oxidation step for bringing the oxidizing atmosphere to a second treatment temperature higher than the first treatment temperature, and a method for producing a rare earth magnet powder comprising: But you can.
  • the oxidizing atmosphere is specified by, for example, the oxygen concentration.
  • the oxygen concentration is expressed, for example, as a volume% of oxygen contained in the mixed gas when the entire mixed gas is in a standard state (1 atm, 20 ° C.).
  • this oxygen concentration is calculated
  • the present invention can also be grasped as a compound using the above-mentioned rare earth magnet powder. That is, the present invention may be a compound for a rare earth bonded magnet characterized by comprising the above rare earth magnet powder and a binder resin capable of binding powder particles of the rare earth magnet powder.
  • this invention can be grasped
  • the rare earth element referred to in this specification is one or more of yttrium (Y), lanthanoid and actinoid. Among them, lanthanum (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), samarium (Sm), gadolinium (Gd), terbium (Tb), dysprosium (Dy), holmium (Ho), erbium ( Typical examples are Er), thulium (TM element), and lutetium (Lu). These rare earth elements (R) may be one kind or two or more kinds.
  • Nd is typical, but Pr may also be included. This is because even if a part of Nd in the magnet raw material or the diffusion raw material is replaced with Pr, there is little influence on the magnetic properties, and a mixed rare earth raw material (zidymium) mixed with Nd and Pr is available at a relatively low cost.
  • coercive force improving elements such as Dy, Tb, or Ho are rare elements and are expensive, it is preferable to suppress their use. Therefore, it is preferable that the magnet raw material (mother alloy) or the diffusion raw material used for the production of the magnet powder does not contain Dy, Tb and Ho.
  • TM is particularly preferably at least one of 3d transition element or 4d transition element.
  • the 3d transition element is atomic number 21 (Sc) to atomic number 29 (Cu)
  • the 4d transition element is atomic number 39 (Y) to atomic number 47 (Ag).
  • TM is preferably any of group 8 iron (Fe), cobalt (Co), or nickel (Ni), and more preferably Fe. Further, a part of boron can be substituted with carbon (C).
  • the powder particles according to the present invention may contain “modified element” which is an element effective for improving the characteristics in addition to R, B and TM described above.
  • modify element an element effective for improving the characteristics in addition to R, B and TM described above.
  • the combination of each element is arbitrary, and the content thereof is usually very small.
  • the rare earth magnet powder of the present invention may also contain “unavoidable impurities” that are difficult to remove due to cost or technical reasons.
  • “Rare earth magnet powder” as used herein includes both anisotropic rare earth magnet powder and isotropic rare earth magnet powder.
  • the hydrogen-treated particles obtained by subjecting the magnet alloy to hydrogenation treatment the diffusion-treated particles obtained by subjecting the hydrogenation treatment to diffusion treatment, and the hydrogen-treated particles.
  • it means any one of the oxidation-treated particles obtained by subjecting the diffusion-treated particles to the oxidation treatment, the coating-treated particles obtained by subjecting these particles to resin coating, or a plurality or all of them. The same applies to the constituent particles when simply called “magnet powder”.
  • the “average particle diameter” as used herein is specified by the volume sphere equivalent diameter (VMD) obtained by measuring the sample powder with a HELOS & RODOS laser diffraction particle size distribution measuring device.
  • VMD volume sphere equivalent diameter
  • x to y in the present specification includes the lower limit value x and the upper limit value y unless otherwise specified.
  • a new numerical range such as “ab” can be configured by arbitrarily combining various lower limit values or upper limit values described in this specification.
  • any numerical value included in the numerical value range described in the present specification can be used as an upper limit value or a lower limit value for setting a new numerical value range.
  • Sample No. 3 is a graph obtained by measuring the surface of oxidized powder particles (Sample No. 1-3) by Auger electron spectroscopy. It is the graph which measured the surface of the powder particle which has not been oxidized by the Auger electron spectroscopy.
  • Sample No. 7 is a graph showing the relationship between the amount of demagnetization (flux loss) and the elapsed time of bond magnets according to 1-1 to 1-6.
  • Sample No. 2-1 sample no. It is a graph which shows the relationship between the demagnetization amount of the bonded magnet concerning 2-2, and elapsed time.
  • Sample No. 3 is a graph showing the relationship between the amount of demagnetization and the elapsed time of bond magnets according to 3-1 to 3-4.
  • Example 6 is a graph showing the relationship between the Auger spectrum peak ratio (Nd-MNN / O) and the depth on the surface of powder particles (Sample No. 8-1 and Sample No. 8-2).
  • This is an SAED related to the particle surface of an oxidation-treated powder (Sample No. 8-1). It is a figure which shows the intensity distribution of the radial direction based on the SAED.
  • 3 is a TEM image obtained by observing the particle surface of powder particles (Sample No. 8-1).
  • the present invention will be described in more detail with reference to embodiments of the invention.
  • the contents described in this specification including the following embodiments can be applied not only to the rare earth magnet powder according to the present invention, but also to a manufacturing method thereof, a compound using the magnet powder, and a bonded magnet.
  • One or more configurations arbitrarily selected from the present specification may be added to the configuration of the present invention described above.
  • the structure related to the manufacturing method can be a structure related to an object if understood as a product-by-process. Note that which embodiment is the best depends on the target, required performance, and the like.
  • the passive film according to the present invention has, for example, a magnetic powder having an oxygen concentration of 0.1 to 20% by volume when the mixed gas total pressure is in a standard state (1 atm, 20 ° C.) as described above. It can be obtained by heating in an oxidizing atmosphere. Even if the oxygen concentration is too low or too high, it is difficult to stably form a dense passive oxide film having excellent oxygen shielding properties.
  • the oxygen concentration is more preferably 0.1 to 7%, 1 to 6%, and more preferably 2 to 5%.
  • a rotary furnace rotary kiln furnace or the like
  • a rotary mixer Heenschel mixer or the like
  • the control of the oxidizing atmosphere can be performed, for example, by introducing oxygen into the furnace in a vacuum atmosphere or an inert gas atmosphere while controlling the flow rate.
  • the treatment pattern (or heat pattern) of the oxidation step is, for example, a treatment temperature of about 80 to 200 ° C., more preferably about 90 to 170 ° C., and a treatment time of about 0.5 to 5 hours, further about 1 to 4 hours. preferable.
  • Specific processing conditions may be appropriately adjusted according to the composition near the surface of the powder particles, the environmental resistance required for the bonded magnet, and the like.
  • the oxidizing atmosphere does not need to be constant during processing, and may be changed during processing.
  • the oxidation atmosphere may be set to a second treatment temperature higher than the first treatment temperature (second oxidation step).
  • the oxygen concentration in the oxidizing atmosphere may substantially change in response to the change in the processing temperature. For example, when only a certain amount of oxygen is introduced into a closed processing furnace at the beginning of the treatment, the oxygen concentration can be substantially reduced as the oxidation process proceeds. In such a case, the formation of a passive oxide film can be promoted by raising the temperature of the oxidizing atmosphere in the latter half of the oxidation step.
  • the oxygen concentration in the oxidizing atmosphere can be adjusted arbitrarily by controlling the flow rate of the introduced gas, the oxygen concentration in the first half of the oxidation process is relatively low and the oxygen concentration in the second half is relatively high. Also good.
  • the formation of the oxide film gradually proceeds to stably form a dense and uniform passive oxide film on the surface of the powder particles.
  • the passive oxide film is formed. It is also conceivable that the film thickness can be easily secured.
  • the oxidizing atmosphere may be changed stepwise, or the oxidizing atmosphere may be changed continuously.
  • the powder particles forming the passive film consist of an aggregate of fine R 2 TM 14 B 1 type crystals, and particles obtained by subjecting a magnet alloy (mother alloy) to hydrogenation treatment can be The particle
  • the hydrogenation treatment includes a disproportionation step in which a magnet alloy (mother alloy) absorbs hydrogen to cause a disproportionation reaction, and recombination that dehydrogenates and recombines the mother alloy after the disproportionation step.
  • a magnet alloy mother alloy
  • recombination that dehydrogenates and recombines the mother alloy after the disproportionation step.
  • this hydrogenation treatment include the HDDR method (hydrogenation-decomposition) (or disposition) -deposition-recombination, the d-HDDR method (dynamic-HDDR), and the like.
  • the d-HDDR method a rare earth anisotropic magnet powder having particularly high magnetic properties can be obtained.
  • the d-HDDR method comprises a low-temperature hydrogenation process, a high-temperature hydrogenation process, a controlled exhaust process, and a forced exhaust process.
  • the above disproportionation process is a high-temperature hydrogenation process
  • the recombination process is a controlled exhaust process.
  • the hydrogen pressure is reduced in the low temperature range below the temperature at which the hydrogenation / disproportionation reaction occurs so that the hydrogenation / disproportionation reaction in the next process (high-temperature hydrogenation process) proceeds slowly. This is a step for sufficiently dissolving hydrogen.
  • the high-temperature hydrogenation step is a step of causing a hydrogenation / disproportionation reaction to the magnet alloy.
  • the controlled exhaust process is a process in which the tissue that has undergone the three-phase decomposition in the high-temperature hydrogenation process is recombined.
  • the forced exhaust process is a process for removing hydrogen remaining in the magnet alloy and completing the dehydrogenation process. Details of these steps are described in JP-A-2006-28602.
  • Diffusion treatment is performed by mixing a mixed raw material (mixed powder) obtained by mixing a magnetic raw material (magnet powder) with a diffusion raw material, for example, at an anti-oxidation atmosphere (vacuum atmosphere or inert atmosphere, etc.) at 400 to 900 ° C. ).
  • a mixed raw material mixed powder obtained by mixing a magnetic raw material (magnet powder) with a diffusion raw material, for example, at an anti-oxidation atmosphere (vacuum atmosphere or inert atmosphere, etc.) at 400 to 900 ° C. ).
  • an R—Cu alloy, an R—Cu—Al alloy, an R—TM alloy or the like is suitable. Thereby, the coercive force of the magnet powder can be increased while suppressing the use of rare elements such as Dy and Ga.
  • R—Cu based alloys and R—Cu—Al based alloys are preferable from the viewpoint of cost or resources, and the diffusion raw material has a Cu content of 1 to 47 at%, further 6 to 39 at%, when the whole is 100 at%, It is preferable that the remaining rare earth element and inevitable impurities are included.
  • the diffusion raw material contains Al, it is preferable that Cu is 5 to 27 at%, Al: 20 to 55 at% when the entire diffusion raw material is 100 at%, and the remaining rare earth element and inevitable impurities.
  • the diffusion raw material may include Co, Ni, Si, Mn, Cr, Mo, Ti, V, Ga, Zr, Ge, Fe, or the like instead of Cu or Al.
  • the total amount of these elements is preferably 5 to 64 at% with respect to 100 at% of the entire diffusion raw material.
  • an R-TM alloy specifically, an Nd-Co alloy.
  • the magnet raw material to be subjected to the diffusion treatment usually has R of 11 to 15 at%, but preferably has a theoretical composition. Specifically, R is 11.6 to 12.7 at%, 11.7 to 12.5 at%, 11.8 to 12.4 at%, further 11.9 to 12.3 at%, and B is 5. It is preferably 5 to 7 at%, more preferably 5.9 to 6.5 at%.
  • a magnet raw material having a theoretical composition a magnet powder with high magnetization (residual magnetic flux density) can be obtained. Accordingly, if a magnetic material having a theoretical composition is subjected to a diffusion treatment, a magnet powder having high magnetization and high coercive force can be obtained.
  • the powder particles after such diffusion treatment are Cu: 0.05-2 at%, 0.05-1 at%, 0.05-0.8 at%, 0.2-0. It is preferably 8 at%, more preferably 0.3 to 0.7 at%. Further, when the whole powder particle is 100 at%, Al is preferably 0.1 to 5 at%, more preferably 0.5 to 3.0 at%.
  • Magnet raw materials include titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), nickel (Ni), chromium (Cr), manganese as a modifying element such as coercive force.
  • Mn molybdenum
  • Mo molybdenum
  • Hf hafnium
  • W tungsten
  • Ta tantalum
  • Al aluminum
  • Al gallium
  • Si silicon
  • Zn zinc
  • These modifying elements are preferably 3 at% or less in total when the final powder particles as a whole are 100 at%.
  • Ga is an element that is particularly effective for improving the coercive force. Therefore, it is preferable that the powder particles contain 0.05 to 1 at% Ga when the whole is 100 at%. Further, since Nb is an element effective for improving the residual magnetic flux density, it is preferable that the powder particles contain 0.05 to 0.6% Nb when the whole is 100 at%. Of course, it is more preferable that the powder particles contain both at the same time. Since Co is an element effective for improving the magnet powder or the Curie point of the magnet, and hence the heat resistance thereof, it is preferable that the powder particles contain 0.1 to 10 at% Co when the total is 100 at%.
  • a compound as a raw material for a bonded magnet can be obtained by heat-kneading the magnetic powder of the present invention with a binder resin. If this compound is compression molded or injection molded, a bonded magnet can be obtained.
  • the binder resin is preferably a thermoplastic resin such as polyphenylene sulfide (PPS) or polyamide (PA) such as nylon.
  • the binder resin is preferably a thermosetting resin, such as an epoxy resin, or a binder resin.
  • the magnet powder constituting the compound or bonded magnet may be a mixed magnet powder obtained by mixing a plurality of types of magnet powder.
  • the magnet powder of the present invention may be a composite rare earth magnet powder obtained by mixing a magnet powder having a large average particle diameter (coarse powder) and a magnet powder having a small average particle diameter (fine powder).
  • the coarse powder is preferably an R-TM-B magnet powder and the fine powder is preferably an Sm—Fe—N magnet powder.
  • Permanent magnets (bonded magnets, etc.) according to the present invention are excellent in environmental resistance, stably exhibit high magnetic properties, and are used in severe environments of high temperature and high humidity as well as equipment used in normal temperatures. It is also suitable for equipment.
  • Each magnetic raw material shown in Table 1 was prepared as follows. Master alloys prepared for each composition of the magnet raw materials shown in Table 1 were obtained by the strip cast (SC) method. This mother alloy was held in an Ar gas atmosphere at 1140 ° C. for 10 hours to homogenize the structure (homogenization heat treatment step). After cooling this to room temperature, hydrogen pulverization was performed in a hydrogen atmosphere at a hydrogen pressure of 0.13 MPa to obtain a mother alloy powder.
  • the mother alloy powder was subjected to hydrogenation (d-HDDR) to obtain a rare earth anisotropic magnet powder.
  • This hydrogenation treatment was performed as follows. First, 15 g of the mother alloy powder was put in a processing furnace and exposed to a low temperature hydrogen atmosphere at room temperature ⁇ 0.1 MPa for 1 hour (low temperature hydrogenation step). Subsequently, the powder after the low-temperature hydrogenation step was exposed to a high-temperature hydrogen atmosphere of 780 ° C. ⁇ 0.03 MPa for 30 minutes (high-temperature hydrogenation step). Thereafter, the atmosphere was heated to 840 ° C. over 5 minutes, and the powder of the high-temperature hydrogenation process was exposed to a high-temperature hydrogen atmosphere of 840 ° C.
  • each magnet powder (magnet raw material) having an average particle size of 100 to 120 ⁇ m.
  • the average particle diameter is the sample No. 1-1 to 1-6 and sample no. 2-1 and 2-2 are 105 ⁇ m, sample no. 3-1 to 3-4 were 117 ⁇ m.
  • Diffusion raw materials having the respective compositions shown in Table 1 were prepared as follows.
  • Raw material alloys (ingots) prepared for the respective compositions of the diffusion raw materials shown in Table 1 were obtained by the book mold method. This raw material alloy was pulverized with hydrogen and further pulverized with a dry ball mill to obtain a powdery raw material (hydride) having an average particle size of 6 ⁇ m. Thus, a powdery diffusion raw material was obtained.
  • a diffusion raw material was added to the magnet raw material and mixed in an inert gas atmosphere to obtain a mixed raw material (mixing step).
  • the mixing ratio shown in Table 1 is the mass ratio of the diffusion raw material when the entire mixed raw material is 100 mass%.
  • This mixed raw material was heated in a vacuum atmosphere of 10 ⁇ 1 Pa at 800 ° C. for 1 hour (diffusion process). Following this, the mixed raw material was rapidly cooled (second cooling step). In this manner, a diffusion-treated magnet powder (referred to as “diffusion magnet powder” as appropriate) was obtained.
  • Oxidation treatment Diffusion magnet powder was put into a cylindrical reactor. While rotating the reaction furnace, the diffusion magnet powder was heated in an oxidizing atmosphere (oxidation step). Adjustment of the oxidizing atmosphere was performed by mixing an inert gas (Ar gas) and oxygen gas at a desired ratio before introduction into the reaction furnace, and introducing the obtained mixed gas into the reaction furnace. The oxygen concentration in the oxidizing atmosphere was controlled to 2 to 3% for all samples. The processing temperature and processing time at this time were performed in various patterns shown in Table 1. In addition, when performing this oxidation process by 2 steps, the 2nd oxidation process was performed after the 1st oxidation process. In this way, an oxidized magnetic powder (referred to as “oxidized magnet powder” as appropriate) was obtained.
  • oxidized magnet powder referred to as “oxidized magnet powder” as appropriate
  • a coating solution was prepared by dissolving 0.39 g of epoxy resin in 1.56 g of methyl ethyl ketone (MEK).
  • MEK methyl ethyl ketone
  • This coating liquid and the oxidized magnet powder (130 g) subjected to the coupling treatment were mixed, and then evacuated and dried.
  • the dried magnet powder was further heated in vacuum at 100 ° C. for 2 hours.
  • a magnet powder (first magnet powder) uniformly coated with an epoxy resin whose surface was cured was obtained.
  • Comparative Sample Magnet powders (Sample Nos. 1-6, 2-2, and 3-4) that were not subjected to the above-described oxidation treatment were also prepared as comparative samples. This magnet powder is also referred to as a first magnet powder for convenience.
  • the time-dependent change of magnetic flux was measured for the bonded magnet in an air atmosphere at 120 ° C. Specifically, the measurement was performed as follows. First, the magnetized bonded magnet was exposed to an air atmosphere at 120 ° C. for 1 hr (initial demagnetization). The bonded magnet was cooled to room temperature, and the amount of magnetic flux ⁇ 1 was measured using a flux meter. Each time a predetermined time passed, it was cooled to room temperature, and the magnetic flux amount ⁇ t of the bond magnet at that time was similarly measured.
  • the ratio (( ⁇ t ⁇ 1) / ⁇ 1) of the demagnetization component ( ⁇ t ⁇ 1) to ⁇ 1 is expressed as a percentage, and is defined as the demagnetization rate (Flux-loss:%) after a predetermined time.
  • the history of demagnetization rates of various bonded magnets is shown in Figs. Table 1 also shows the demagnetization rates after 1000 hours of various bonded magnets.
  • Example 2> ⁇ Production and measurement of sample> As shown in Table 2, magnet powders were produced in which the magnet raw material, diffusion treatment, oxidation treatment, or resin coating was variously changed with respect to Example 1. The oxidation treatment in this example was performed by controlling the oxygen concentration in the mixed gas composed of Ar gas and oxygen gas to 5%. Other processing conditions were the same as in Example 1. Using the magnet powder according to each sample shown in Table 2, the same bonded magnet as in Example 1 was manufactured. The demagnetization rate after 1000 hours of each bonded magnet was measured. At this time, the test environment for exposing the bonded magnet was not 120 ° C. but in an air atmosphere of 150 ° C. Except this, the measurement was performed in the same manner as in Example 1. Table 2 shows the demagnetization factor thus obtained.
  • Table 2 shows the following.
  • the demagnetization rate of the bonded magnet was improved and its environmental resistance was improved by using the magnet powder subjected to the oxidation treatment according to the present invention.
  • sample no. From 4-1 to 4-3, it can be seen that the demagnetization rate becomes smaller and improved as the number of oxidation processes is increased.
  • the demagnetization factor can be sufficiently improved by performing only one-step oxidation treatment (only one of the first oxidation process and the second oxidation process).
  • sample no. Considering the results of 1-1, 1-2 and 1-6 together, it can also be seen that the oxidation treatment temperature can be freely adjusted within the range of 80 to 200 ° C., more preferably 90 to 190 ° C.
  • sample No. From 4-1 to 6-2 even when the mixing ratio and type of the diffusion raw material were changed, the demagnetization rate was similarly improved by the oxidation treatment.
  • Sample No. From 7-1 to 7-4 even when the diffusion treatment was not performed, the demagnetization rate was similarly improved by the oxidation treatment regardless of the presence or absence of the resin coating.
  • Example 3> ⁇ Production of sample> Sample No.
  • An oxidation-untreated powder (sample No. 8-2) produced in the same manner as in 4-5 was prepared.
  • FIG. 5 shows the result of analyzing the peak ratio (Nd-MNN / O) of the Nd and O Auger spectrum obtained in this way from the outermost surface of the powder particle to the depth direction. Note that Nd-MNN on the high energy side was adopted as the peak value of the Auger spectrum related to Nd.
  • FIG. 5 shows that in the case of the unoxidized powder, the peak ratio increases as it becomes deeper from the outermost surface, and O relatively decreases with respect to Nd.
  • the peak ratio was almost constant even at a position deep from the outermost surface, and O and Nd were present in a stable ratio. From this, it was found that at least Nd and O exist at a stable ratio by the oxidation treatment, and a new Nd—O film that was not present before the oxidation treatment was formed on the particle surface.
  • FIG. 6A shows a limited-field electron diffraction pattern (SAED) obtained by observing the particle surface of the oxidized powder with a transmission electron microscope (TEM).
  • SAED limited-field electron diffraction pattern
  • TEM transmission electron microscope
  • FIG. 7 showing a TEM image relating to the coating. That is, in this TEM image, a portion in which atoms are regularly arranged (long-range order portion / crystalline portion) and a portion without such regularity (short-range order portion / amorphous portion) are observed. It can be seen that there is at least an amorphous portion. However, the crystalline part is also very fine with a size of about 0.5 to 20 nm, and is made of a so-called nanocrystal. Since sharp diffraction indicating ⁇ -Fe is observed in FIG. 6B, at least a part of the crystalline portion in the TEM image is considered to be ⁇ -Fe. Further, when the TEM image of FIG.
  • the crystalline portion of 0.5 to 20 nm (especially 2 to 7 nm) made of ⁇ -Fe is almost uniformly fine in the amorphous portion made of Nd and O. It can be seen that they are dispersed.
  • the film (passive film) obtained by the oxidation treatment according to this example is a composite oxide film mainly composed of Nd, Fe, and O, and is substantially amorphous.
  • it is considered to be composed of a crystalline material composed of ultrafine crystals at the nano level, or further composed of a composite material in which they are mixed.
  • the coating is composed of a very fine and dense structure.
  • such a film is called a passive film or a passive oxide film.
  • the “oxide film” in the present specification is sufficient if oxygen is contained in the film, and it does not matter that a specific oxide is formed in the film.
  • the passive film according to the present invention is substantially amorphous or has an amorphous-like structure and is a very dense composite film. Therefore, it can be said that the passive film according to the present invention is preferably a composite film composed of at least R (particularly Nd), TM (particularly Fe) and O. Further, it can be said that the passive film according to the present invention is preferably an amorphous film.

Abstract

A rare-earth magnetic powder for obtaining a bond magnet having exceptional environmental resistance is provided. This rare-earth magnetic powder is characterized in comprising: pulverulent particles obtained by aggregation of R2TM14B1 crystals that are tetragonal compounds of a rare-earth element (R), boron (B), and a transition metal (TM); the outer surface of the pulverulent particles being covered by a passive state film. The magnetic properties of a bond magnet manufactured using the pulverulent particles are not readily degraded by oxidation or moisture even in severe environments because the bond magnet comprises pulverulent particles covered by the passive state film. Specifically, a bond magnet having highly exceptional environmental resistance is obtained using this rare-earth magnetic powder.

Description

希土類磁石粉末、その製造方法、そのコンパウンドおよびそのボンド磁石Rare earth magnet powder, manufacturing method thereof, compound thereof and bond magnet thereof
 本発明は、耐酸化性に優れた希土類磁石粉末、その製造方法、その希土類磁石粉末を用いたコンパウンドおよびボンド磁石に関する。 The present invention relates to a rare earth magnet powder excellent in oxidation resistance, a manufacturing method thereof, a compound using the rare earth magnet powder, and a bonded magnet.
 希土類磁石は、非常に高い磁気特性を発揮するため、省エネルギー化や軽量化が望まれる電化製品や自動車等の各種機器へ利用されつつある。希土類磁石には、希土類磁石粉末(適宜「磁石粉末」という。)の焼結体や緻密な成形体からなる緻密磁石と、磁石粉末をバインダー樹脂で固めたボンド磁石とがある。最近では、成形自由度が高く軽薄部品の製造に適したボンド磁石が多用される傾向にある。 Since rare earth magnets exhibit extremely high magnetic properties, they are being used in various appliances such as electric appliances and automobiles that are desired to be energy-saving and lightweight. Rare earth magnets include a dense magnet made of a sintered body of a rare earth magnet powder (referred to as “magnet powder” as appropriate) or a dense molded body, and a bonded magnet in which the magnet powder is solidified with a binder resin. Recently, bond magnets having a high degree of freedom in molding and suitable for manufacturing light and thin parts tend to be used frequently.
 ところで、ボンド磁石を構成する磁石粉末は、鉄や希土類元素を主成分とするため、その製造過程や搬送中は勿論、ボンド磁石の使用中にも、酸素や水分によって酸化され易い。このような酸化は、磁石粉末を劣化させ、ボンド磁石の磁気特性を低下させる。 By the way, since the magnet powder constituting the bonded magnet is mainly composed of iron and rare earth elements, it is easily oxidized by oxygen and moisture during the manufacturing process and during transportation as well as during the use of the bonded magnet. Such oxidation degrades the magnet powder and reduces the magnetic properties of the bonded magnet.
 このような酸化を抑止するために、磁石粉末やボンド磁石の表面に、樹脂やメッキなどのコーティングを施すことが考えられる。しかし、いずれもコスト高である上、十分な酸化防止効果が得られず、実用化には至っていない。 In order to suppress such oxidation, it is conceivable to coat the surface of the magnet powder or bonded magnet with resin or plating. However, all of them are expensive and a sufficient antioxidant effect cannot be obtained, so that they have not been put into practical use.
特開平4-87305号公報JP-A-4-87305
 上記の特許文献1では、上述したコーティング等と異なり、酸化を抑止する不動態被膜を磁石粉末に形成することが提案されている。しかし、特許文献1には、酸素濃度:1~20%、雰囲気温度:60~200℃で酸化処理を行うことしか記載されておらず、具体的にどのような試料に対して、どのような酸化処理を施せばいいのか、全く記載されていない。 In the above-mentioned Patent Document 1, it is proposed to form a passive film that suppresses oxidation on a magnet powder, unlike the coating described above. However, Patent Document 1 only describes that the oxidation treatment is performed at an oxygen concentration of 1 to 20% and an atmospheric temperature of 60 to 200 ° C. It is not described at all whether the oxidation treatment should be performed.
 しかも、特許文献1にある図1には、不動態被膜を形成することにより、長期にわたり減磁が全く生じないことが示されている。また同公報の図2には、酸化処理をした磁石粉末の保磁力が、その酸化処理をしない磁石粉末の保磁力の約2/3以下にまで低下することが示されている。ところが、当該分野の技術常識からして、記載されている条件下での処理ではそのようなことはいずれも到底考えられない。つまり、上記の特許文献1の記載内容は明らかに疑わしく、単なる希望的内容を述べたものに過ぎず、実質的には有効な技術的提案を何らしていないに等しい。 Moreover, FIG. 1 in Patent Document 1 shows that no demagnetization occurs over a long period of time by forming a passive film. FIG. 2 of the same publication shows that the coercive force of the magnet powder subjected to the oxidation treatment is reduced to about 2/3 or less of the coercivity of the magnet powder not subjected to the oxidation treatment. However, based on the common general technical knowledge in the field, such a situation cannot be considered at all in the processing under the described conditions. In other words, the contents described in the above-mentioned Patent Document 1 are clearly doubtful, merely describe desired contents, and are substantially equivalent to not making any effective technical proposal.
 本発明は、このような事情の下で為されたものである。すなわち、耐酸化性に優れる現実的な希土類磁石粉末を提供することを目的とする。また、その磁石粉末の製造方法と、その希土類磁石粉末を用いたコンパウンドおよびボンド磁石も併せて提供することを目的とする。 The present invention has been made under such circumstances. That is, an object is to provide a realistic rare earth magnet powder having excellent oxidation resistance. Moreover, it aims at providing the manufacturing method of the magnet powder, the compound and bond magnet using the rare earth magnet powder together.
 本発明者はこの課題を解決すべく鋭意研究し試行錯誤を重ねた結果、特定雰囲気下で酸化処理した磁石粉末の粉末粒子の表面に、その磁石粉末の耐酸化性を大きく向上させ得る不動態被膜が形成されることを新たに見出した。この成果をさらに発展させることにより、以降に述べる本発明を完成するに至った。 As a result of intensive research and trial and error to solve this problem, the inventor has obtained a passive state that can greatly improve the oxidation resistance of the magnet powder on the surface of the powder particle of the magnet powder oxidized in a specific atmosphere. It was newly found that a film is formed. By further developing this result, the present invention described below has been completed.
《希土類磁石粉末》
(1)本発明の希土類磁石粉末は、希土類元素(R)とホウ素(B)と遷移元素(TM)との正方晶化合物であるRTM14型結晶が集合した粉末粒子により構成される希土類磁石粉末であって、前記粉末粒子は、外表面を被覆する不動態被膜を有することを特徴とする。
<Rare earth magnet powder>
(1) The rare earth magnet powder of the present invention is composed of powder particles in which R 2 TM 14 B 1 type crystals, which are tetragonal compounds of rare earth elements (R), boron (B), and transition elements (TM), are aggregated. The rare earth magnet powder is characterized in that the powder particles have a passive film covering the outer surface.
(2)本発明の希土類磁石粉末(適宜「磁石粉末」という。)は、外表面が化学的に安定な不動態被膜で被覆された粉末粒子からなる。この不動態被膜により、本発明の磁石粉末は酸化が抑止され、優れた耐酸化性を発現する。このため、本発明の磁石粉末自体の保管性や取扱性が向上することは勿論のこと、この磁石粉末を用いたボンド磁石等は優れた耐環境性を発現し、高い磁気特性を長期間にわたり安定的に発揮し、その利用範囲が一層拡大し得る。 (2) The rare earth magnet powder of the present invention (referred to as “magnet powder” as appropriate) is composed of powder particles whose outer surface is coated with a chemically stable passive film. By this passive film, the magnet powder of the present invention is prevented from being oxidized and exhibits excellent oxidation resistance. For this reason, not only the storage and handling properties of the magnet powder itself of the present invention are improved, but also bond magnets using this magnet powder exhibit excellent environmental resistance and high magnetic properties over a long period of time. It can be used stably and its range of use can be further expanded.
(3)ここで本発明の不動態被膜は、現状、その組成や形態等の詳細が必ずしも明らかではないが、酸素遮蔽性の高い(換言すると、酸素透過性の低い)緻密な酸化被膜であると考えられる。具体的にいえば、本発明に係る不動態被膜は、磁石粉末の組成から推察して、Rおよび/またはTMの酸化物からなる不動態酸化被膜であると考えられる。勿論、粉末粒子が、RやTM以外の金属元素(例えば、典型金属元素であるAl、Ga、Zn等)を有する場合、不動態酸化被膜がそのような金属元素の酸化物(例えば、Al)からなることはあり得る。ちなみに、このような金属元素は、母合金の段階から原始的に存在する場合もあれば、拡散処理等によって後発的に供給される場合もあり、いずれでもよい。さらに不動態酸化被膜は、単種の酸化物のみからなる場合にかぎらず、複数種の酸化物からなる複合酸化被膜であってもよい。 (3) The passive film of the present invention is a dense oxide film having a high oxygen shielding property (in other words, a low oxygen permeability), although details of its composition and form are not necessarily clear at present. it is conceivable that. More specifically, the passive film according to the present invention is considered to be a passive oxide film made of an oxide of R and / or TM inferred from the composition of the magnet powder. Of course, when the powder particles have a metal element other than R or TM (for example, Al, Ga, Zn, etc., which are typical metal elements), the passive oxide film has an oxide of such a metal element (for example, Al 2). It is possible to consist of O 3 ). Incidentally, such a metal element may exist from the beginning of the master alloy, or may be supplied later by diffusion treatment or the like, and any of them may be used. Further, the passive oxide film is not limited to a single oxide, but may be a composite oxide film composed of a plurality of oxides.
 なお、酸化被膜からなる不動態被膜は、比較的安価に形成され、また薄く形成されるので磁石粉末の磁気特性にほとんど影響を及ぼさない。 Note that the passive film made of an oxide film is formed at a relatively low cost and is thin, so that it hardly affects the magnetic properties of the magnet powder.
(4)本発明の不動態被膜は、その組成、構造、形態等を問わないが、化学的に安定で長期にわたって優れた酸素遮蔽性を発現するには、ある程度の膜厚を有すると好適である。具体的にいうと、不動態被膜の膜厚は、30nm以上、40nm以上さらには50nm以上であると好ましい。 (4) The passive film of the present invention is not limited in its composition, structure, form, etc., but it is preferable that the film has a certain film thickness in order to exhibit chemically stable and excellent oxygen shielding properties over a long period of time. is there. Specifically, the thickness of the passive film is preferably 30 nm or more, 40 nm or more, and more preferably 50 nm or more.
 ちなみに不動態被膜は、単なる酸化被膜とは異なり、酸素遮蔽性に優れる緻密な被膜であるため、その膜厚はそもそも過大にはなり難い。敢えていうなら、不動態被膜の膜厚は300nm以下さらには200nm以下程度であると好ましい。 Incidentally, since the passive film is a dense film excellent in oxygen shielding property unlike a simple oxide film, its film thickness is unlikely to be excessive in the first place. If it dares to say, it is preferable that the film thickness of a passive film is about 300 nm or less further about 200 nm or less.
 なお、不動態被膜の膜厚は、粉末粒子の表面をオージェ電子分光分析法(AES:Auger Electron Spectroscopy)により観察して得られた深さ(Depth)-強度(Intensity)に関するグラフから特定した。具体的には、先ず、そのグラフ上の最大強度(Imax)を特定し、さらにその15%の強度(Is=0.15×Imax)を求める。この強度IsとなるラインLsと、前記グラフとの交点Psを求める。このPsの深さ(Ds)を、本明細書でいう粉末粒子の表面に形成される被膜の「膜厚」とする。この様子を図1Aおよび図1Bに例示した。図1Aの場合ならImax=69300、Is=10400、Ds=104nmとなり、本発明でいう膜厚は104nmとして特定される。ちなみに図1Bの場合ならImax=67100、Is=10100、Ds=22.5nmとなり、その膜厚は22.5nmとして特定される。 In addition, the film thickness of the passive film was specified from the graph regarding the depth (Depth) -intensity obtained by observing the surface of the powder particle by Auger Electron Spectroscopy (AES). Specifically, first, the maximum intensity (Imax) on the graph is specified, and the 15% intensity (Is = 0.15 × Imax) is obtained. The intersection point Ps between the line Ls which becomes the intensity Is and the graph is obtained. The depth (Ds) of Ps is defined as the “film thickness” of the coating film formed on the surface of the powder particles in this specification. This is illustrated in FIGS. 1A and 1B. In the case of FIG. 1A, Imax = 69300, Is = 10400, Ds = 104 nm, and the film thickness referred to in the present invention is specified as 104 nm. Incidentally, in the case of FIG. 1B, Imax = 67100, Is = 10100, Ds = 22.5 nm, and the film thickness is specified as 22.5 nm.
《希土類磁石粉末の製造方法》
 本発明は、上述した希土類磁石粉末の製造方法としても把握できる。すなわち本発明は、RとBとTMとの正方晶化合物であるRTM14型結晶が集合した粉末粒子を酸化雰囲気中で加熱する酸化工程を備え、該酸化工程は、前記酸化雰囲気を第一処理温度にする第一酸化工程と、該酸化雰囲気を該第一処理温度よりも高い第二処理温度にする第二酸化工程と、を少なくとも有することを特徴とする希土類磁石粉末の製造方法でもよい。
《Rare earth magnet powder manufacturing method》
The present invention can also be grasped as a method for producing the rare earth magnet powder described above. That is, the present invention includes an oxidation process in which powder particles in which R 2 TM 14 B 1 type crystals, which are tetragonal compounds of R, B, and TM, are aggregated are heated in an oxidizing atmosphere, and the oxidizing process includes the oxidizing atmosphere. And a first oxidation step for bringing the oxidizing atmosphere to a second treatment temperature higher than the first treatment temperature, and a method for producing a rare earth magnet powder comprising: But you can.
 なお、酸化雰囲気は、例えば、酸素濃度により特定される。酸化雰囲気が混合ガスからなる場合、その酸素濃度は、例えば、混合ガス全体を標準状態(1気圧、20℃)としたとき、その混合ガス中に含まれる酸素の体積%で表される。そしてこの酸素濃度は、例えば、処理炉に取り付けられた酸素濃度計 (泰榮電器株式会社製OXYMAN ガルバニ電池式酸素濃度計)により求められる。 Note that the oxidizing atmosphere is specified by, for example, the oxygen concentration. When the oxidizing atmosphere is composed of a mixed gas, the oxygen concentration is expressed, for example, as a volume% of oxygen contained in the mixed gas when the entire mixed gas is in a standard state (1 atm, 20 ° C.). And this oxygen concentration is calculated | required, for example with the oxygen concentration meter (OXYMAN galvanic cell type oxygen concentration meter made from a Taiho Electric Co., Ltd.) attached to the processing furnace.
《コンパウンドおよびボンド磁石》
(1)本発明は、さらに上述の希土類磁石粉末を用いたコンパウンドとしても把握できる。すなわち本発明は、上述の希土類磁石粉末と、該希土類磁石粉末の粉末粒子を結着させ得るバインダー樹脂と、からなることを特徴とする希土類ボンド磁石用コンパウンドでもよい。
<Compound and bonded magnet>
(1) The present invention can also be grasped as a compound using the above-mentioned rare earth magnet powder. That is, the present invention may be a compound for a rare earth bonded magnet characterized by comprising the above rare earth magnet powder and a binder resin capable of binding powder particles of the rare earth magnet powder.
(2)また本発明は、上述の希土類磁石粉末やコンパウンドからなるボンド磁石としても把握できる。すなわち本発明は、上述の希土類磁石粉末と、該希土類磁石粉末の粉末粒子を結着するバインダー樹脂と、からなることを特徴とする希土類異方性ボンド磁石でもよい。 (2) Moreover, this invention can be grasped | ascertained also as a bonded magnet which consists of the above-mentioned rare earth magnet powder and a compound. That is, the present invention may be a rare earth anisotropic bonded magnet comprising the above rare earth magnet powder and a binder resin that binds the powder particles of the rare earth magnet powder.
《その他》
(1)本明細書でいう希土類元素は、イットリウム(Y)、ランタノイドおよびアクチノイドの一種以上である。その中でも、ランタン(La)、セリウム(Ce)、プラセオジム(Pr)、ネオジム(Nd)、サマリウム(Sm)、ガドリニウム(Gd)、テルビウム(Tb)、ジスプロシウム(Dy)、ホルミウム(Ho)、エルビウム(Er)、ツリウム(TM元素)、ルテチウム(Lu)が代表的である。これら希土類元素(R)は一種でも二種以上でもよい。
<Others>
(1) The rare earth element referred to in this specification is one or more of yttrium (Y), lanthanoid and actinoid. Among them, lanthanum (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), samarium (Sm), gadolinium (Gd), terbium (Tb), dysprosium (Dy), holmium (Ho), erbium ( Typical examples are Er), thulium (TM element), and lutetium (Lu). These rare earth elements (R) may be one kind or two or more kinds.
 ここでRとしては、特にNdが代表的であるが、Prを含んでもよい。磁石原料や拡散原料中のNdの一部がPrに置換されても、磁気特性への影響は少なく、NdとPrの混在した混合希土類原料(ジジム)は比較的安価に入手可能だからである。なお、Dy、TbまたはHoなどの保磁力向上元素は、稀少元素で高価なため使用が抑制されると好ましい。そこで磁石粉末の製造に使用する磁石原料(母合金)または拡散原料は、Dy、TbおよびHoを含まないと好適である。 Here, as R, Nd is typical, but Pr may also be included. This is because even if a part of Nd in the magnet raw material or the diffusion raw material is replaced with Pr, there is little influence on the magnetic properties, and a mixed rare earth raw material (zidymium) mixed with Nd and Pr is available at a relatively low cost. In addition, since coercive force improving elements such as Dy, Tb, or Ho are rare elements and are expensive, it is preferable to suppress their use. Therefore, it is preferable that the magnet raw material (mother alloy) or the diffusion raw material used for the production of the magnet powder does not contain Dy, Tb and Ho.
 TMは、特に3d遷移元素または4d遷移元素の1種以上であると好ましい。3d遷移元素は原子番号21(Sc)~原子番号29(Cu)であり、4d遷移元素は原子番号39(Y)~原子番号47(Ag)である。中でもTMは、8族の鉄(Fe)、コバルト(Co)またはニッケル(Ni)のいずれか、さらにいえばFeであると好適である。また、ホウ素の一部を炭素(C)に置換することも可能である。 TM is particularly preferably at least one of 3d transition element or 4d transition element. The 3d transition element is atomic number 21 (Sc) to atomic number 29 (Cu), and the 4d transition element is atomic number 39 (Y) to atomic number 47 (Ag). Among them, TM is preferably any of group 8 iron (Fe), cobalt (Co), or nickel (Ni), and more preferably Fe. Further, a part of boron can be substituted with carbon (C).
(2)本発明に係る粉末粒子は、上述したR、BおよびTM以外に、その特性改善に有効な元素である「改質元素」を含み得る。改質元素には種々あり、各元素の組合せは任意であり、通常、その含有量は微量である。当然ながら本発明の希土類磁石粉末は、コスト的または技術的な理由等によって除去困難な「不可避不純物」をも含み得る。 (2) The powder particles according to the present invention may contain “modified element” which is an element effective for improving the characteristics in addition to R, B and TM described above. There are various kinds of modifying elements, the combination of each element is arbitrary, and the content thereof is usually very small. Of course, the rare earth magnet powder of the present invention may also contain “unavoidable impurities” that are difficult to remove due to cost or technical reasons.
(3)本明細書でいう「希土類磁石粉末」には、異方性希土類磁石粉末と等方性希土類磁石粉末の両方が含まれる。また単に「粉末粒子」というときは、適宜、磁石合金に水素化処理を施した得られたままの水素処理粒子、その水素化処理に拡散処理を施して得られた拡散処理粒子、水素処理粒子または拡散処理粒子に酸化処理を施して得られた酸化処理粒子、それらの粒子に樹脂コーティング処理した被覆処理粒子のいずれか、または、それらの複数若しくは全部を意味する。これは単に「磁石粉末」というときの構成粒子についても同様である。 (3) “Rare earth magnet powder” as used herein includes both anisotropic rare earth magnet powder and isotropic rare earth magnet powder. In addition, when simply referred to as “powder particles”, the hydrogen-treated particles obtained by subjecting the magnet alloy to hydrogenation treatment, the diffusion-treated particles obtained by subjecting the hydrogenation treatment to diffusion treatment, and the hydrogen-treated particles. Alternatively, it means any one of the oxidation-treated particles obtained by subjecting the diffusion-treated particles to the oxidation treatment, the coating-treated particles obtained by subjecting these particles to resin coating, or a plurality or all of them. The same applies to the constituent particles when simply called “magnet powder”.
(4)本明細書でいう「平均粒径」は、サンプル粉末をHELOS&RODOSレーザ回折式粒子径分布測定装置により測定し、その結果得られた体積球相当径(VMD)により特定される。 (4) The “average particle diameter” as used herein is specified by the volume sphere equivalent diameter (VMD) obtained by measuring the sample powder with a HELOS & RODOS laser diffraction particle size distribution measuring device.
(5)本明細書でいう「x~y」は、特に断らない限り、下限値xおよび上限値yを含む。また、本明細書に記載した種々の下限値または上限値を任意に組合わせて、「a~b」のような新たな数値範囲を構成し得る。さらに、本明細書に記載した数値範囲内に含まれる任意の数値を、新たな数値範囲を設定するための上限値または下限値とすることもできる。 (5) “x to y” in the present specification includes the lower limit value x and the upper limit value y unless otherwise specified. Further, a new numerical range such as “ab” can be configured by arbitrarily combining various lower limit values or upper limit values described in this specification. Furthermore, any numerical value included in the numerical value range described in the present specification can be used as an upper limit value or a lower limit value for setting a new numerical value range.
酸化処理した粉末粒子(試料No.1-3)の表面をオージェ電子分光分析法により測定したグラフである。3 is a graph obtained by measuring the surface of oxidized powder particles (Sample No. 1-3) by Auger electron spectroscopy. 酸化処理していない粉末粒子の表面をオージェ電子分光分析法により測定したグラフである。It is the graph which measured the surface of the powder particle which has not been oxidized by the Auger electron spectroscopy. 試料No.1-1~1-6に係るボンド磁石の減磁量(フラックスロス)と経過時間との関係を示すグラフである。Sample No. 7 is a graph showing the relationship between the amount of demagnetization (flux loss) and the elapsed time of bond magnets according to 1-1 to 1-6. 試料No.2-1および試料No.2-2に係るボンド磁石の減磁量と経過時間との関係を示すグラフである。Sample No. 2-1, sample no. It is a graph which shows the relationship between the demagnetization amount of the bonded magnet concerning 2-2, and elapsed time. 試料No.3-1~3-4に係るボンド磁石の減磁量と経過時間との関係を示すグラフである。Sample No. 3 is a graph showing the relationship between the amount of demagnetization and the elapsed time of bond magnets according to 3-1 to 3-4. 粉末粒子(試料No.8-1と試料No.8-2)の表面に係るオージェスペクトルのピーク比(Nd-MNN/O)と深さの関係を示すグラフである。6 is a graph showing the relationship between the Auger spectrum peak ratio (Nd-MNN / O) and the depth on the surface of powder particles (Sample No. 8-1 and Sample No. 8-2). 酸化処理粉末(試料No.8-1)の粒子表面に係るSAEDである。This is an SAED related to the particle surface of an oxidation-treated powder (Sample No. 8-1). そのSAEDに基づく動径方向の強度分布を示す図である。It is a figure which shows the intensity distribution of the radial direction based on the SAED. 粉末粒子(試料No.8-1)の粒子表面を観察して得たTEM像である。3 is a TEM image obtained by observing the particle surface of powder particles (Sample No. 8-1).
 発明の実施形態を挙げて本発明をより詳しく説明する。なお、以下の実施形態を含めて本明細書で説明する内容は、本発明に係る希土類磁石粉末のみならず、その製造方法、その磁石粉末を用いたコンパウンドやボンド磁石にも適用され得る。上述した本発明の構成に、本明細書中から任意に選択した一つまたは二つ以上の構成を付加し得る。この際、製造方法に関する構成は、プロダクトバイプロセスとして理解すれば物に関する構成ともなり得る。なお、いずれの実施形態が最良であるか否かは、対象、要求性能等によって異なる。 The present invention will be described in more detail with reference to embodiments of the invention. The contents described in this specification including the following embodiments can be applied not only to the rare earth magnet powder according to the present invention, but also to a manufacturing method thereof, a compound using the magnet powder, and a bonded magnet. One or more configurations arbitrarily selected from the present specification may be added to the configuration of the present invention described above. At this time, the structure related to the manufacturing method can be a structure related to an object if understood as a product-by-process. Note that which embodiment is the best depends on the target, required performance, and the like.
《酸化工程》
(1)本発明に係る不動態被膜は、例えば、上述したように混合ガス全圧を標準状態(1気圧、20℃)としたとき、磁石粉末を酸素濃度が0.1~20体積%の酸化雰囲気中で加熱することにより得られる。この酸素濃度が過小でも過大でも、緻密で酸素遮蔽性に優れる不動態酸化被膜は安定的に形成され難い。酸素濃度は0.1~7%、1~6%さらには2~5%であるとより好ましい。
<Oxidation process>
(1) The passive film according to the present invention has, for example, a magnetic powder having an oxygen concentration of 0.1 to 20% by volume when the mixed gas total pressure is in a standard state (1 atm, 20 ° C.) as described above. It can be obtained by heating in an oxidizing atmosphere. Even if the oxygen concentration is too low or too high, it is difficult to stably form a dense passive oxide film having excellent oxygen shielding properties. The oxygen concentration is more preferably 0.1 to 7%, 1 to 6%, and more preferably 2 to 5%.
 このような不動態酸化被膜を各粉末粒子の表面に均一に形成するには、例えば、酸化雰囲気を制御できる回転炉(ロータリーキルン炉等)もしくは回転混合機(ヘンシェルミキサ等)を用いると好ましい。酸化雰囲気の制御は、例えば、真空雰囲気または不活性ガス雰囲気の炉内へ、流量制御しつつ酸素を導入することで行える。 In order to uniformly form such a passive oxide film on the surface of each powder particle, it is preferable to use, for example, a rotary furnace (rotary kiln furnace or the like) or a rotary mixer (Henschel mixer or the like) that can control the oxidizing atmosphere. The control of the oxidizing atmosphere can be performed, for example, by introducing oxygen into the furnace in a vacuum atmosphere or an inert gas atmosphere while controlling the flow rate.
(2)酸化工程の処理パターン(またはヒートパターン)は、例えば、処理温度は80~200℃さらには90~170℃程度で、処理時間は0.5~5時間さらには1~4時間程度が好ましい。具体的な処理条件は、粉末粒子の表面近傍の組成やボンド磁石に要求される耐環境性等に応じて適宜調整されるとよい。 (2) The treatment pattern (or heat pattern) of the oxidation step is, for example, a treatment temperature of about 80 to 200 ° C., more preferably about 90 to 170 ° C., and a treatment time of about 0.5 to 5 hours, further about 1 to 4 hours. preferable. Specific processing conditions may be appropriately adjusted according to the composition near the surface of the powder particles, the environmental resistance required for the bonded magnet, and the like.
 また酸化雰囲気は、処理中一定である必要はなく、処理途中に変更してもよい。例えば、酸化雰囲気を第一処理温度とした後(第一酸化工程)、酸化雰囲気を第一処理温度よりも高温の第二処理温度にしてもよい(第二酸化工程)。また、この処理温度の変化に対応して、酸化雰囲気の酸素濃度が実質的に変化してもよい。例えば、処理当初に密閉した処理炉内へ一定量の酸素しか導入しない場合、酸化工程の進行と共に酸素濃度が実質的に低下し得る。このような場合、酸化工程の後半で、酸化雰囲気の温度を上昇させることにより不動態酸化被膜の形成を促進し得る。 Also, the oxidizing atmosphere does not need to be constant during processing, and may be changed during processing. For example, after the oxidation atmosphere is set to the first treatment temperature (first oxidation step), the oxidation atmosphere may be set to a second treatment temperature higher than the first treatment temperature (second oxidation step). Further, the oxygen concentration in the oxidizing atmosphere may substantially change in response to the change in the processing temperature. For example, when only a certain amount of oxygen is introduced into a closed processing furnace at the beginning of the treatment, the oxygen concentration can be substantially reduced as the oxidation process proceeds. In such a case, the formation of a passive oxide film can be promoted by raising the temperature of the oxidizing atmosphere in the latter half of the oxidation step.
 これとは逆に、導入ガスの流量制御等により酸化雰囲気の酸素濃度を任意に調整できる場合、酸化工程の前半の酸素濃度を相対的に低く、その後半の酸素濃度を相対的に高くしてもよい。これにより、酸化工程の前半では、酸化被膜の形成が緩やかに進行して粉末粒子の表面上に緻密で均一な不動態酸化被膜が安定的に形成され、酸化工程の後半では、不動態酸化被膜の膜厚確保が容易になり得ることも考えられる。いずれにしろ酸化工程は、そのように、酸化雰囲気を段階的に変化させても、さらには連続的に酸化雰囲気を変化させてもよい。 On the contrary, if the oxygen concentration in the oxidizing atmosphere can be adjusted arbitrarily by controlling the flow rate of the introduced gas, the oxygen concentration in the first half of the oxidation process is relatively low and the oxygen concentration in the second half is relatively high. Also good. As a result, in the first half of the oxidation process, the formation of the oxide film gradually proceeds to stably form a dense and uniform passive oxide film on the surface of the powder particles. In the second half of the oxidation process, the passive oxide film is formed. It is also conceivable that the film thickness can be easily secured. In any case, in the oxidation step, the oxidizing atmosphere may be changed stepwise, or the oxidizing atmosphere may be changed continuously.
《粉末粒子》
(1)不動態被膜を形成する粉末粒子は、微細なRTM14型結晶の集合体からなり、磁石合金(母合金)に水素化処理を施して得たままの粒子でも、それに拡散原料を拡散させた拡散処理後の粒子でもよい。
<Powder particles>
(1) The powder particles forming the passive film consist of an aggregate of fine R 2 TM 14 B 1 type crystals, and particles obtained by subjecting a magnet alloy (mother alloy) to hydrogenation treatment can be The particle | grains after the diffusion process which made the diffusion raw material diffuse may be sufficient.
(2)水素化処理は、磁石合金(母合金)に吸水素させ不均化反応を生じさせる不均化工程と、この不均化工程後の母合金から脱水素して再結合させる再結合工程とからなる。この水素化処理には、HDDR法(hydrogenation-decomposition (もしくはdisproportionation)-desorption-recombination)、d-HDDR法(dynamic-HDDR)等がある。d-HDDR法によれば、特に高い磁気特性の希土類異方性磁石粉末が得られる。 (2) The hydrogenation treatment includes a disproportionation step in which a magnet alloy (mother alloy) absorbs hydrogen to cause a disproportionation reaction, and recombination that dehydrogenates and recombines the mother alloy after the disproportionation step. Process. Examples of this hydrogenation treatment include the HDDR method (hydrogenation-decomposition) (or disposition) -deposition-recombination, the d-HDDR method (dynamic-HDDR), and the like. According to the d-HDDR method, a rare earth anisotropic magnet powder having particularly high magnetic properties can be obtained.
 d-HDDR法は、低温水素化工程と、高温水素化工程と、制御排気工程と、強制排気工程からなり、前述の不均化工程は高温水素化工程に、再結合工程は制御排気工程に対応する。ちなみに、低温水素化工程は、次工程(高温水素化工程)での水素化・不均化反応が緩やかに進むように、水素化・不均化反応を生じる温度以下の低温域で水素圧をかけて水素を十分固溶させる工程である。高温水素化工程は、磁石合金に対して水素化・不均化反応をさせる工程である。制御排気工程は、高温水素化工程で三相分解した組織を再結合反応をさせる工程である。強制排気工程は、磁石合金中に残留した水素を取除き、脱水素化処理を完了させる工程である。これら各工程の詳細は特開2006-28602号公報等に記載されている。 The d-HDDR method comprises a low-temperature hydrogenation process, a high-temperature hydrogenation process, a controlled exhaust process, and a forced exhaust process. The above disproportionation process is a high-temperature hydrogenation process, and the recombination process is a controlled exhaust process. Correspond. By the way, in the low-temperature hydrogenation process, the hydrogen pressure is reduced in the low temperature range below the temperature at which the hydrogenation / disproportionation reaction occurs so that the hydrogenation / disproportionation reaction in the next process (high-temperature hydrogenation process) proceeds slowly. This is a step for sufficiently dissolving hydrogen. The high-temperature hydrogenation step is a step of causing a hydrogenation / disproportionation reaction to the magnet alloy. The controlled exhaust process is a process in which the tissue that has undergone the three-phase decomposition in the high-temperature hydrogenation process is recombined. The forced exhaust process is a process for removing hydrogen remaining in the magnet alloy and completing the dehydrogenation process. Details of these steps are described in JP-A-2006-28602.
(3)拡散処理は、磁石原料(磁石粉末)に拡散原料を混合した混合原料(混合粉末)を、例えば400~900℃さらには600~850℃の酸化防止雰囲気(真空雰囲気または不活性雰囲気等)で加熱処理してなされる。 (3) Diffusion treatment is performed by mixing a mixed raw material (mixed powder) obtained by mixing a magnetic raw material (magnet powder) with a diffusion raw material, for example, at an anti-oxidation atmosphere (vacuum atmosphere or inert atmosphere, etc.) at 400 to 900 ° C. ).
 拡散原料には、R-Cu系合金、R-Cu-Al系合金、R-TM系合金等が好適である。これにより、Dy、Ga等の稀少な元素の使用を抑止しつつ、磁石粉末の保磁力を高めることができる。中でもR-Cu系合金やR-Cu-Al系合金がコスト的または資源的に好ましく、拡散原料は、全体を100at%としたときに、Cuが1~47at%さらには6~39at%と、残部である希土類元素と、不可避不純物とからなると好適である。また拡散原料がAlを含む場合、拡散原料全体を100at%としたときにCuが5~27at%、Al:20~55at%と、残部である希土類元素と、不可避不純物とからなると好適である。 As the diffusion raw material, an R—Cu alloy, an R—Cu—Al alloy, an R—TM alloy or the like is suitable. Thereby, the coercive force of the magnet powder can be increased while suppressing the use of rare elements such as Dy and Ga. Among them, R—Cu based alloys and R—Cu—Al based alloys are preferable from the viewpoint of cost or resources, and the diffusion raw material has a Cu content of 1 to 47 at%, further 6 to 39 at%, when the whole is 100 at%, It is preferable that the remaining rare earth element and inevitable impurities are included. When the diffusion raw material contains Al, it is preferable that Cu is 5 to 27 at%, Al: 20 to 55 at% when the entire diffusion raw material is 100 at%, and the remaining rare earth element and inevitable impurities.
 なお拡散原料は、そのCuやAlに替え、またはCuやAlと共に、Co、Ni、Si、Mn、Cr、Mo、Ti、V、Ga、Zr、Ge、Feなどを含んでもよい。これらの元素の総量は、拡散原料全体を100at%として5~64at%であると好ましい。CuおよびAlを置換したものとして、R-TM系合金があり、具体的にはNd-Co系合金などがある。 The diffusion raw material may include Co, Ni, Si, Mn, Cr, Mo, Ti, V, Ga, Zr, Ge, Fe, or the like instead of Cu or Al. The total amount of these elements is preferably 5 to 64 at% with respect to 100 at% of the entire diffusion raw material. As an alternative to Cu and Al, there is an R-TM alloy, specifically, an Nd-Co alloy.
 ところで、拡散処理が施される磁石原料は、通常Rが11~15at%であるが、理論近傍組成であると好ましい。具体的には、Rが11.6~12.7at%、11.7~12.5at%、11.8~12.4at%さらには11.9~12.3at%であり、Bが5.5~7at%さらには5.9~6.5at%であると好ましい。理論近傍組成の磁石原料を用いることにより高磁化(残留磁束密度)の磁石粉末が得られる。従って、理論近傍組成の磁石原料に拡散処理を施せば、高磁化かつ高保磁力の磁石粉末が得られることになる。 Incidentally, the magnet raw material to be subjected to the diffusion treatment usually has R of 11 to 15 at%, but preferably has a theoretical composition. Specifically, R is 11.6 to 12.7 at%, 11.7 to 12.5 at%, 11.8 to 12.4 at%, further 11.9 to 12.3 at%, and B is 5. It is preferably 5 to 7 at%, more preferably 5.9 to 6.5 at%. By using a magnet raw material having a theoretical composition, a magnet powder with high magnetization (residual magnetic flux density) can be obtained. Accordingly, if a magnetic material having a theoretical composition is subjected to a diffusion treatment, a magnet powder having high magnetization and high coercive force can be obtained.
 このような拡散処理後の粉末粒子は、全体を100at%とすれば、Cu:0.05~2at%、0.05~1at%、0.05~0.8at%、0.2~0.8at%さらには0.3~0.7at%であると好ましい。またその粉末粒子全体を100at%としたときに、Al:0.1~5at%さらには0.5~3.0at%であると好ましい。 The powder particles after such diffusion treatment are Cu: 0.05-2 at%, 0.05-1 at%, 0.05-0.8 at%, 0.2-0. It is preferably 8 at%, more preferably 0.3 to 0.7 at%. Further, when the whole powder particle is 100 at%, Al is preferably 0.1 to 5 at%, more preferably 0.5 to 3.0 at%.
(4)磁石原料は、保磁力等の改質元素として、TMであるチタン(Ti)、バナジウム(V)、ジルコニウム(Zr)、ニオブ(Nb)、ニッケル(Ni)、クロム(Cr)、マンガン(Mn)、モリブデン(Mo)、ハフニウム(Hf)、タングステン(W)、タンタル(Ta)などの他、アルミニウム(Al)、ガリウム(Ga)、ケイ素(Si)、亜鉛(Zn)、スズ(Sn)などを含んでもよい。これら改質元素は、最終的な粉末粒子全体を100at%としたとき、合計で3at%以下であると好ましい。 (4) Magnet raw materials include titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), nickel (Ni), chromium (Cr), manganese as a modifying element such as coercive force. (Mn), molybdenum (Mo), hafnium (Hf), tungsten (W), tantalum (Ta), etc., as well as aluminum (Al), gallium (Ga), silicon (Si), zinc (Zn), tin (Sn) ) Or the like. These modifying elements are preferably 3 at% or less in total when the final powder particles as a whole are 100 at%.
 改質元素の中でもGaは、保磁力の向上に特に効果的な元素であるので、粉末粒子は全体を100at%としたときに0.05~1at%のGaを含むと好ましい。またNbは、残留磁束密度の向上に有効な元素であるので、粉末粒子は全体を100at%としたときに0.05~0.6%のNbを含むと好ましい。勿論、粉末粒子は両者を同時に含むと一層好ましい。Coは、磁石粉末または磁石のキュリー点向上ひいてはその耐熱性の向上に有効な元素であるので、粉末粒子は全体を100at%としたときに0.1~10at%のCoを含むと好ましい。 Among the reforming elements, Ga is an element that is particularly effective for improving the coercive force. Therefore, it is preferable that the powder particles contain 0.05 to 1 at% Ga when the whole is 100 at%. Further, since Nb is an element effective for improving the residual magnetic flux density, it is preferable that the powder particles contain 0.05 to 0.6% Nb when the whole is 100 at%. Of course, it is more preferable that the powder particles contain both at the same time. Since Co is an element effective for improving the magnet powder or the Curie point of the magnet, and hence the heat resistance thereof, it is preferable that the powder particles contain 0.1 to 10 at% Co when the total is 100 at%.
《コンパウンドおよびボンド磁石》
(1)本発明の磁石粉末をバインダー樹脂と加熱混練することによりボンド磁石の原料となるコンパウンドが得られる。このコンパウンドを圧縮成形または射出成形すればボンド磁石が得られる。
<Compound and bonded magnet>
(1) A compound as a raw material for a bonded magnet can be obtained by heat-kneading the magnetic powder of the present invention with a binder resin. If this compound is compression molded or injection molded, a bonded magnet can be obtained.
 射出成形の場合、バインダー樹脂は、熱可塑性樹脂であるポリフェニレンスルファイド(PPS)、ナイロン等のポリアミド(PA)等が好ましい。圧縮成形の場合、バインダー樹脂は、熱硬化性樹脂であるエポキシ樹脂等をバインダー樹脂等が好ましい。 In the case of injection molding, the binder resin is preferably a thermoplastic resin such as polyphenylene sulfide (PPS) or polyamide (PA) such as nylon. In the case of compression molding, the binder resin is preferably a thermosetting resin, such as an epoxy resin, or a binder resin.
(2)コンパウンドまたはボンド磁石を構成する磁石粉末は、複数種の磁石粉末を混合した混合磁石粉末であってもよい。例えば本発明の磁石粉末は、平均粒径の粗い磁石粉末(粗粉末)と平均粒径の細かい磁石粉末(微粉末)とを混合した複合希土類磁石粉末でもよい。具体的には、粗粉末がR-TM-B系磁石粉末で、微粉末がSm-Fe-N系磁石粉末であると好ましい。 (2) The magnet powder constituting the compound or bonded magnet may be a mixed magnet powder obtained by mixing a plurality of types of magnet powder. For example, the magnet powder of the present invention may be a composite rare earth magnet powder obtained by mixing a magnet powder having a large average particle diameter (coarse powder) and a magnet powder having a small average particle diameter (fine powder). Specifically, the coarse powder is preferably an R-TM-B magnet powder and the fine powder is preferably an Sm—Fe—N magnet powder.
《用途》
 本発明に係る永久磁石(ボンド磁石等)は、耐環境性に優れ、高磁気特性を安定して発揮し、常温域で使用される機器は勿論のこと、高温多湿の厳しい環境下で使用される機器にも適している。
<Application>
Permanent magnets (bonded magnets, etc.) according to the present invention are excellent in environmental resistance, stably exhibit high magnetic properties, and are used in severe environments of high temperature and high humidity as well as equipment used in normal temperatures. It is also suitable for equipment.
 実施例を挙げて本発明をより具体的に説明する。 The present invention will be described more specifically with reference to examples.
<実施例1>
《試料の製造》
 表1に示す各試料を次のようにして製造した。
<Example 1>
<Production of sample>
Each sample shown in Table 1 was manufactured as follows.
(1)磁石原料
 表1に示す各磁石原料を次のようにして用意した。表1に示す磁石原料の各組成に調製した母合金をストリップキャスト(SC)法により得た。この母合金を1140℃のArガス雰囲気中に10時間保持して組織を均質化させた(均質化熱処理工程)。これを室温まで冷却した後、水素圧力0.13MPaの水素雰囲気中で水素粉砕して母合金粉末とした。
(1) Magnet raw material Each magnetic raw material shown in Table 1 was prepared as follows. Master alloys prepared for each composition of the magnet raw materials shown in Table 1 were obtained by the strip cast (SC) method. This mother alloy was held in an Ar gas atmosphere at 1140 ° C. for 10 hours to homogenize the structure (homogenization heat treatment step). After cooling this to room temperature, hydrogen pulverization was performed in a hydrogen atmosphere at a hydrogen pressure of 0.13 MPa to obtain a mother alloy powder.
 この母合金粉末に水素化処理(d-HDDR)を施して希土類異方性磁石粉末を得た。この水素化処理は次のようにして行った。先ず、母合金粉末15gを処理炉に入れて、室温×0.1MPaの低温水素雰囲気に1時間さらした(低温水素化工程)。これに続けて780℃×0.03MPaの高温水素雰囲気に、低温水素化工程後の粉末を30分間さらした(高温水素化工程)。この後、5分間かけてその雰囲気を840℃へ昇温し、840℃×0.03MPaの高温水素雰囲気に高温水素化工程の粉末を60分間さらした(組織安定化工程)。こうして反応速度を調整しつつ、三相(α-Fe、RH、FeB)に分解する順変態を生じさせた粉末を得た(不均化工程)。この後、処理炉内から水素を連続的に排気し、処理炉内を840℃×5~1kPaの雰囲気に90分間して、順変態後の合金内にRTM14型結晶を生成する逆変態を生じさせた(制御排気工程/再結合工程)。 The mother alloy powder was subjected to hydrogenation (d-HDDR) to obtain a rare earth anisotropic magnet powder. This hydrogenation treatment was performed as follows. First, 15 g of the mother alloy powder was put in a processing furnace and exposed to a low temperature hydrogen atmosphere at room temperature × 0.1 MPa for 1 hour (low temperature hydrogenation step). Subsequently, the powder after the low-temperature hydrogenation step was exposed to a high-temperature hydrogen atmosphere of 780 ° C. × 0.03 MPa for 30 minutes (high-temperature hydrogenation step). Thereafter, the atmosphere was heated to 840 ° C. over 5 minutes, and the powder of the high-temperature hydrogenation process was exposed to a high-temperature hydrogen atmosphere of 840 ° C. × 0.03 MPa for 60 minutes (structure stabilization process). In this way, while adjusting the reaction rate, a powder in which a forward transformation that decomposes into three phases (α-Fe, RH 2 , Fe 2 B) was generated was obtained (disproportionation step). Thereafter, hydrogen is continuously exhausted from the inside of the processing furnace, and the inside of the processing furnace is placed in an atmosphere of 840 ° C. × 5 to 1 kPa for 90 minutes to produce R 2 TM 14 B type 1 crystals in the alloy after forward transformation. The reverse transformation was generated (controlled exhaust process / recombination process).
 こうして得た粉末を急冷した(第1冷却工程)。この粉末を不活性ガス雰囲気中で乳鉢で解砕後、粒度調整して、平均粒径が100~120μmの各磁石粉末(磁石原料)を得た。なお、平均粒径は、具体的にいうと、試料No.1-1~1-6と試料No.2-1および2-2とが105μm、試料No.3-1~3-4が117μmであった。 The powder thus obtained was rapidly cooled (first cooling step). This powder was crushed in an inert gas atmosphere in a mortar and then adjusted in particle size to obtain each magnet powder (magnet raw material) having an average particle size of 100 to 120 μm. Specifically, the average particle diameter is the sample No. 1-1 to 1-6 and sample no. 2-1 and 2-2 are 105 μm, sample no. 3-1 to 3-4 were 117 μm.
(2)拡散原料
 表1に示す各組成の拡散原料を次のようにして用意した。表1に示す拡散原料の各組成に調製した原料合金(鋳塊)をブックモールド法により得た。この原料合金を水素粉砕した後、さらに乾式のボールミルで粉砕して平均粒経6μmの粉末状の原料(水素化物)を得た。こうして粉末状の拡散原料を得た。
(2) Diffusion raw materials Diffusion raw materials having the respective compositions shown in Table 1 were prepared as follows. Raw material alloys (ingots) prepared for the respective compositions of the diffusion raw materials shown in Table 1 were obtained by the book mold method. This raw material alloy was pulverized with hydrogen and further pulverized with a dry ball mill to obtain a powdery raw material (hydride) having an average particle size of 6 μm. Thus, a powdery diffusion raw material was obtained.
(3)拡散処理
 拡散原料を磁石原料に加え不活性ガス雰囲気中で混合して混合原料を得た(混合工程)。表1に示した混合割合は、混合原料全体を100質量%としたときにおける拡散原料の質量割合である。この混合原料を10-1Paの真空雰囲気中で800℃×1時間加熱した(拡散工程)。これに続けて混合原料を急冷した(第2冷却工程)。こうして拡散処理された磁石粉末(適宜「拡散磁石粉末」という。)を得た。
(3) Diffusion treatment A diffusion raw material was added to the magnet raw material and mixed in an inert gas atmosphere to obtain a mixed raw material (mixing step). The mixing ratio shown in Table 1 is the mass ratio of the diffusion raw material when the entire mixed raw material is 100 mass%. This mixed raw material was heated in a vacuum atmosphere of 10 −1 Pa at 800 ° C. for 1 hour (diffusion process). Following this, the mixed raw material was rapidly cooled (second cooling step). In this manner, a diffusion-treated magnet powder (referred to as “diffusion magnet powder” as appropriate) was obtained.
(4)酸化処理
 拡散磁石粉末を筒状の反応炉に入れた。この反応炉を回転させながら、拡散磁石粉末を酸化雰囲気中で加熱した(酸化工程)。酸化雰囲気の調整は、反応炉への導入前に不活性ガス(Arガス)と酸素ガスを所望の比率で混合し、得られた混合ガスを反応炉内へ導入することにより行った。そして酸化雰囲気内の酸素濃度は、いずれの試料も2~3%に制御した。このときの処理温度と処理時間は、表1に示す種々のパターンで行った。なお、この酸化処理を2ステップで行う場合、第一酸化工程の後に第二酸化工程を行った。こうして酸化処理した磁石粉末(適宜「酸化磁石粉末」という。)を得た。
(4) Oxidation treatment Diffusion magnet powder was put into a cylindrical reactor. While rotating the reaction furnace, the diffusion magnet powder was heated in an oxidizing atmosphere (oxidation step). Adjustment of the oxidizing atmosphere was performed by mixing an inert gas (Ar gas) and oxygen gas at a desired ratio before introduction into the reaction furnace, and introducing the obtained mixed gas into the reaction furnace. The oxygen concentration in the oxidizing atmosphere was controlled to 2 to 3% for all samples. The processing temperature and processing time at this time were performed in various patterns shown in Table 1. In addition, when performing this oxidation process by 2 steps, the 2nd oxidation process was performed after the 1st oxidation process. In this way, an oxidized magnetic powder (referred to as “oxidized magnet powder” as appropriate) was obtained.
(5)樹脂コーティング
 ヘキサン0.65g中へチタネート系カップリング剤0.33gを均一に分散させたカップリング液を調製した。このカップリング液と酸化磁石粉末130gとを混合した後、真空排気して、乾燥させた(カップリング処理)。これにより、表面がカップリング剤で被覆された磁石粉末を得た。
(5) Resin coating A coupling liquid in which 0.33 g of titanate coupling agent was uniformly dispersed in 0.65 g of hexane was prepared. The coupling liquid and 130 g of the oxidized magnet powder were mixed and then evacuated and dried (coupling treatment). This obtained the magnet powder by which the surface was coat | covered with the coupling agent.
 次にエポキシ樹脂0.39gをメチルエチルケトン(MEK)1.56gに溶解させたコーティング液を調製した。このコーティング液とカップリング処理した酸化磁石粉末(130g)とを混合した後、真空排気して、乾燥させた。この乾燥後の磁石粉末をさらに真空中で100℃×2時間加熱した。こうして、表面が硬化したエポキシ樹脂で均一にコーティングされた磁石粉末(第一磁石粉末)を得た。 Next, a coating solution was prepared by dissolving 0.39 g of epoxy resin in 1.56 g of methyl ethyl ketone (MEK). This coating liquid and the oxidized magnet powder (130 g) subjected to the coupling treatment were mixed, and then evacuated and dried. The dried magnet powder was further heated in vacuum at 100 ° C. for 2 hours. Thus, a magnet powder (first magnet powder) uniformly coated with an epoxy resin whose surface was cured was obtained.
(6)比較試料
 比較試料として、上述した酸化処理のみ行わない磁石粉末(試料No.1-6、2-2および3-4)も用意した。この磁石粉末も便宜上、第一磁石粉末と呼ぶ。
(6) Comparative Sample Magnet powders (Sample Nos. 1-6, 2-2, and 3-4) that were not subjected to the above-described oxidation treatment were also prepared as comparative samples. This magnet powder is also referred to as a first magnet powder for convenience.
《コンパウンドの製造》
 第一磁石粉末124gとSmFeNからなる希土類磁石粉末(第二磁石粉末)21.9gとエポキシ(固形)樹脂4.1gとを、小型ロッキングミキサにより混合し、得られた混合物をラボプラストミル(東洋精機製)で10分間加熱混練(110℃)した。これを室温まで冷却した後、粒度調整してコンパウンドを得た。
<Production of compound>
124 g of the first magnet powder, 21.9 g of rare earth magnet powder (second magnet powder) composed of SmFeN and 4.1 g of epoxy (solid) resin were mixed with a small rocking mixer, and the resulting mixture was subjected to Laboplast Mill (Toyo And kneading (110 ° C.) for 10 minutes. After cooling to room temperature, the particle size was adjusted to obtain a compound.
《ボンド磁石の製造》
 コンパウンドを成形型のキャビティへ投入し、配向磁場中(1.5T)で温間成形(150℃×1t/cm (98MPa))して14mm角の立方体状の成形体を得た。この成形体をArガス中で150℃×1時間加熱して(キュア処理)、バインダー樹脂であるエポキシ樹脂を硬化させた。これを4.5Tのパルス磁場中で着磁してボンド磁石を得た。
<Manufacture of bonded magnets>
The compound was put into a cavity of a mold and warm-molded (150 ° C. × 1 t / cm 2 (98 MPa)) in an orientation magnetic field (1.5 T) to obtain a 14 mm square cubic compact. This molded body was heated in Ar gas at 150 ° C. for 1 hour (curing treatment) to cure the epoxy resin as the binder resin. This was magnetized in a 4.5 T pulse magnetic field to obtain a bonded magnet.
《表面観察》
 試料No.1-3の酸化磁石粉末の粒子表面およびその酸化処理前の粒子表面を、オージェ電子分光分析法(AES)により観察した結果を、それぞれ図1Aおよび図1Bに示した。なお、AESによる深さ方向分析は、粒子表面をアルゴンイオンエッチングをしつつ行った。
<< Surface observation >>
Sample No. The results of observing the particle surface of the 1-3 oxidized magnet powder and the particle surface before the oxidation treatment by Auger electron spectroscopy (AES) are shown in FIGS. 1A and 1B, respectively. In addition, the depth direction analysis by AES was performed while performing argon ion etching on the particle surface.
《磁束の経時劣化》
 ボンド磁石を120℃の大気雰囲気中において磁束の経時変化を測定した。具体的には次のようにして測定した。先ず、着磁後のボンド磁石を120℃の大気雰囲気中に1hr曝した(初期減磁)。このボンド磁石を室温まで冷却し、その磁束量φ1をフラックスメーターを用いて測定した。所定時間経過するごとに室温まで冷却して、その時々のボンド磁石の磁束量φtを同様に測定した。その減磁分(φt-φ1)のφ1に対する割合((φt-φ1)/φ1)を百分率で表し、所定時間経過後の減磁率(Flux-loss:%)とした。各種ボンド磁石の減磁率の経緯を図2~4に示した。また各種ボンド磁石の1000時間経過後の減磁率を表1に併せて示した。
<Degradation of magnetic flux over time>
The time-dependent change of magnetic flux was measured for the bonded magnet in an air atmosphere at 120 ° C. Specifically, the measurement was performed as follows. First, the magnetized bonded magnet was exposed to an air atmosphere at 120 ° C. for 1 hr (initial demagnetization). The bonded magnet was cooled to room temperature, and the amount of magnetic flux φ1 was measured using a flux meter. Each time a predetermined time passed, it was cooled to room temperature, and the magnetic flux amount φt of the bond magnet at that time was similarly measured. The ratio ((φt−φ1) / φ1) of the demagnetization component (φt−φ1) to φ1 is expressed as a percentage, and is defined as the demagnetization rate (Flux-loss:%) after a predetermined time. The history of demagnetization rates of various bonded magnets is shown in Figs. Table 1 also shows the demagnetization rates after 1000 hours of various bonded magnets.
《評価》
(1)不動態酸化被膜の膜厚
 先ず、図1Bからわかるように、酸化処理前の粉末粒子の表面にも酸素(O)は存在する。しかし、その深さ(厚さ)は高々23nm程度に過ぎない。しかも、表面近傍におけるO量の変化は急激であり、安定域が存在しない。このことから、酸化処理前の粉末粒子の表面近傍には、未だ安定した酸化被膜が形成されていないと考えられる。
<Evaluation>
(1) Thickness of Passive Oxide Film First, as can be seen from FIG. 1B, oxygen (O) is also present on the surface of the powder particles before the oxidation treatment. However, the depth (thickness) is only about 23 nm at most. In addition, the change in the amount of O in the vicinity of the surface is abrupt and there is no stable region. From this, it is considered that a stable oxide film has not yet been formed in the vicinity of the surface of the powder particles before the oxidation treatment.
 次に、図1Aから、酸化処理をした粉末粒子の表面には、0~104nmの深さ(厚さ)にわたりOが十分に存在していることがわかる。さらに、その途中(38~75nm)には、強度(Intensity)の変化率が緩やかになるOの安定域が存在する。このような表面近傍におけるO量の分布から、粉末粒子の表面には安定した酸化被膜が形成されていると考えられる。 Next, it can be seen from FIG. 1A that O is sufficiently present over a depth (thickness) of 0 to 104 nm on the surface of the oxidized powder particles. Further, in the middle (38 to 75 nm), there is a stable region of O in which the rate of change in intensity is moderate. From the distribution of the amount of O in the vicinity of the surface, it is considered that a stable oxide film is formed on the surface of the powder particles.
(2)ボンド磁石の耐環境性(減磁率)
 表1および図2~4の結果から、酸化処理した試料(ボンド磁石)はいずれも、長期経過後の減磁率(フラックスロス)が低減しており、耐環境性に優れることがわかった。また磁石原料または拡散原料の組成より程度差はあるが、酸化処理を2ステップ(第一酸化工程と第二酸化工程)で行う方がボンド磁石の減磁率が向上することがわかった。
(2) Environmental resistance (demagnetization factor) of bonded magnet
From the results of Table 1 and FIGS. 2 to 4, it was found that all the oxidized samples (bond magnets) had a reduced demagnetization factor (flux loss) after a long period of time and were excellent in environmental resistance. It was also found that the demagnetization rate of the bonded magnet is improved when the oxidation treatment is performed in two steps (the first oxidation step and the second oxidation step), although there is a slight difference from the composition of the magnet raw material or the diffusion raw material.
 以上のことから、本実施例のような酸化処理された磁石粉末の粉末粒子の表面には、本発明に係る耐酸化性に優れる不動態酸化被膜が形成されていることが確認できた。 From the above, it was confirmed that a passive oxide film having excellent oxidation resistance according to the present invention was formed on the surface of the powder particles of the magnet powder subjected to the oxidation treatment as in this example.
<実施例2>
《試料の製造と測定》
 表2に示すように、磁石原料、拡散処理、酸化処理または樹脂コーティングを、実施例1に対して種々変更した磁石粉末を製造した。なお、本実施例の酸化処理は、Arガスと酸素ガスからなる混合ガス中の酸素濃度を5%に制御して行った。それ以外の処理条件等については実施例1の場合と同様に行った。表2に示す各試料に係る磁石粉末を用いて、実施例1の場合と同様なボンド磁石を製造した。各ボンド磁石の1000時間経過後の減磁率を測定した。この際、ボンド磁石を曝す試験環境は120℃ではなく、150℃の大気雰囲気中とした。これ以外は実施例1と同様にして測定した。こうして得られた減磁率を表2に併せて示した。
<Example 2>
<Production and measurement of sample>
As shown in Table 2, magnet powders were produced in which the magnet raw material, diffusion treatment, oxidation treatment, or resin coating was variously changed with respect to Example 1. The oxidation treatment in this example was performed by controlling the oxygen concentration in the mixed gas composed of Ar gas and oxygen gas to 5%. Other processing conditions were the same as in Example 1. Using the magnet powder according to each sample shown in Table 2, the same bonded magnet as in Example 1 was manufactured. The demagnetization rate after 1000 hours of each bonded magnet was measured. At this time, the test environment for exposing the bonded magnet was not 120 ° C. but in an air atmosphere of 150 ° C. Except this, the measurement was performed in the same manner as in Example 1. Table 2 shows the demagnetization factor thus obtained.
《評価》
 表2から次のことがわかる。先ず、いずれの試料についても、本発明に係る酸化処理を施した磁石粉末を用いることにより、ボンド磁石の減磁率が改善され、その耐環境性が向上した。特に、試料No.4-1~4-3から、酸化処理を多段化するほど、減磁率がより小さくなり改善されることがわかる。もっとも、1ステップの酸化処理(第一酸化工程または第二酸化工程の一方のみ)を行うだけでも、減磁率が十分に改善されることが明らかとなった。この際、試料No.1-1、1-2および1-6の結果も併せて考慮すると、酸化処理温度は80~200℃さらには90~190℃の範囲内で自在に調整可能であることもわかる。
<Evaluation>
Table 2 shows the following. First, for any sample, the demagnetization rate of the bonded magnet was improved and its environmental resistance was improved by using the magnet powder subjected to the oxidation treatment according to the present invention. In particular, sample no. From 4-1 to 4-3, it can be seen that the demagnetization rate becomes smaller and improved as the number of oxidation processes is increased. However, it has been clarified that the demagnetization factor can be sufficiently improved by performing only one-step oxidation treatment (only one of the first oxidation process and the second oxidation process). At this time, sample no. Considering the results of 1-1, 1-2 and 1-6 together, it can also be seen that the oxidation treatment temperature can be freely adjusted within the range of 80 to 200 ° C., more preferably 90 to 190 ° C.
 また試料No.4-4と試料No.4-5から、樹脂コーティングがされていない場合でも、酸化処理により減磁率の低減効果が同様に得られることが明らかである。 Sample No. 4-4 and sample no. From 4-5, it is clear that even when the resin coating is not applied, the effect of reducing the demagnetization rate can be obtained similarly by the oxidation treatment.
 さらに試料No.4-1~6-2から、拡散原料の混合割合やその種類等を変化させても、酸化処理によって減磁率は同様に改善された。また試料No.7-1~7-4から、拡散処理を行わない場合でも、樹脂コーティングの有無に拘わらず、やはり、酸化処理によって減磁率は同様に改善された。 Furthermore, sample No. From 4-1 to 6-2, even when the mixing ratio and type of the diffusion raw material were changed, the demagnetization rate was similarly improved by the oxidation treatment. Sample No. From 7-1 to 7-4, even when the diffusion treatment was not performed, the demagnetization rate was similarly improved by the oxidation treatment regardless of the presence or absence of the resin coating.
<実施例3>
《試料の製造》
 試料No.4-4と同様に製造した酸化処理粉末(試料No.8-1)と、試料No.4-5と同様に製造した酸化未処理粉末(試料No.8-2)を用意した。
<Example 3>
<Production of sample>
Sample No. The oxidation-treated powder (sample No. 8-1) produced in the same manner as in 4-4, An oxidation-untreated powder (sample No. 8-2) produced in the same manner as in 4-5 was prepared.
《測定および評価》
(1)両磁石粉末の粒子表面をAESにより分析した。これにより得られたNdとOのオージェスペクトルのピーク比(Nd-MNN/O)を、粉末粒子の最表面から深さ方向に分析した結果を図5に示した。なお、Ndに係るオージェスペクトルのピーク値には高エネルギー側のNd-MNNを採用した。
<Measurement and evaluation>
(1) The particle surfaces of both magnet powders were analyzed by AES. FIG. 5 shows the result of analyzing the peak ratio (Nd-MNN / O) of the Nd and O Auger spectrum obtained in this way from the outermost surface of the powder particle to the depth direction. Note that Nd-MNN on the high energy side was adopted as the peak value of the Auger spectrum related to Nd.
 図5から、酸化未処理粉末の場合、最表面から深くなるほどピーク比が増加しており、相対的にOがNdに対して減少していることがわかる。逆に、酸化処理粉末の場合、最表面から深い位置でも、ピーク比がほぼ一定であり、OとNdが安定した割合で存在していた。このことから、酸化処理によって、少なくともNdとOが安定した比率で存在し、酸化処理前には無かった新たなNd-O被膜が、粒子表面に形成されることがわかった。 FIG. 5 shows that in the case of the unoxidized powder, the peak ratio increases as it becomes deeper from the outermost surface, and O relatively decreases with respect to Nd. On the contrary, in the case of the oxidation-treated powder, the peak ratio was almost constant even at a position deep from the outermost surface, and O and Nd were present in a stable ratio. From this, it was found that at least Nd and O exist at a stable ratio by the oxidation treatment, and a new Nd—O film that was not present before the oxidation treatment was formed on the particle surface.
(2)酸化処理粉末の粒子表面を透過型電子顕微鏡(TEM)で観察して得られた制限視野電子回折図形(SAED)を図6Aに示した。また、それに基づく動径方向の強度分布を図6Bに示した。先ず、図6AのSAEDにはハロー状の領域が存在し、図6Bの強度分布にもブロード状のピークが存在している。これら各々から、酸化処理によって粒子表面に新たにできた被膜は、非晶質状になっていると考えられる。 (2) FIG. 6A shows a limited-field electron diffraction pattern (SAED) obtained by observing the particle surface of the oxidized powder with a transmission electron microscope (TEM). In addition, the radial intensity distribution based thereon is shown in FIG. 6B. First, the SAED in FIG. 6A has a halo region, and the intensity distribution in FIG. 6B also has a broad peak. From each of these, the film newly formed on the particle surface by the oxidation treatment is considered to be amorphous.
 このことは、その被膜に係るTEM像を示す図7からもわかる。すなわち、このTEM像中には、原子が規則的に配列した部分(長距離秩序部分/結晶質部分)と、そのような規則性のない部分(短距離秩序部分/非晶質部分)が観察され、少なくとも非晶質部分が存在することがわかる。もっとも、その結晶質部分も、サイズが0.5~20nm程度で非常に微細であり、いわゆるナノ結晶からなる。なお、α-Feを示すシャープな回折が図6Bに観られることから、そのTEM像中の結晶質部分の少なくとも一部はα-Feと考えられる。さらに図7のTEM像を詳細に観察すると、α-Feからなる0.5~20nm(特に2~7nm)サイズの結晶質部分が、NdとOからなる非晶質部分中にほぼ均一に微細分散していることがわかる。 This can also be seen from FIG. 7 showing a TEM image relating to the coating. That is, in this TEM image, a portion in which atoms are regularly arranged (long-range order portion / crystalline portion) and a portion without such regularity (short-range order portion / amorphous portion) are observed. It can be seen that there is at least an amorphous portion. However, the crystalline part is also very fine with a size of about 0.5 to 20 nm, and is made of a so-called nanocrystal. Since sharp diffraction indicating α-Fe is observed in FIG. 6B, at least a part of the crystalline portion in the TEM image is considered to be α-Fe. Further, when the TEM image of FIG. 7 is observed in detail, the crystalline portion of 0.5 to 20 nm (especially 2 to 7 nm) made of α-Fe is almost uniformly fine in the amorphous portion made of Nd and O. It can be seen that they are dispersed.
 総合的に考慮すると、本実施例に係る酸化処理により得られた被膜(不動態被膜)は、主にNd、FeおよびOからなる複合酸化被膜であり、実質的に非晶質からなるか、またはナノレベルの超微細な結晶からなる結晶質からなるか、さらにはそれらが混在した複合質からなると考えられる。いずれにしても、その被膜が非常に微細で緻密な組織から構成されていることは確かである。 Considering comprehensively, the film (passive film) obtained by the oxidation treatment according to this example is a composite oxide film mainly composed of Nd, Fe, and O, and is substantially amorphous. Alternatively, it is considered to be composed of a crystalline material composed of ultrafine crystals at the nano level, or further composed of a composite material in which they are mixed. In any case, it is certain that the coating is composed of a very fine and dense structure.
 このような緻密な被膜が磁石粉末の粒子表面に形成されることにより、上述したような減磁率の低減効果が得られたと考えられる。このような被膜を本発明では不動態被膜さらには不動態酸化被膜と呼んでいる。なお、本明細書でいう「酸化被膜」は、被膜中に酸素が含まれていれば十分であり、具体的な酸化物が被膜中に形成されていることまでは問わない。 It is considered that the effect of reducing the demagnetization factor as described above was obtained by forming such a dense coating on the particle surface of the magnet powder. In the present invention, such a film is called a passive film or a passive oxide film. The “oxide film” in the present specification is sufficient if oxygen is contained in the film, and it does not matter that a specific oxide is formed in the film.
<本発明の考察>
 以上を踏まえて考察すると、本発明に係る不動態被膜は、実質的に非晶質であるか、非晶質類似の構造からなり、非常に緻密な複合被膜になっていると考えられる。そこで本発明に係る不動態被膜は、少なくともR(特にNd)、TM(特にFe)およびOからなる複合被膜であると好適であるといえる。また、本発明に係る不動態被膜は、非晶質被膜であると好適であるといえる。
<Consideration of the present invention>
Considering the above, it is considered that the passive film according to the present invention is substantially amorphous or has an amorphous-like structure and is a very dense composite film. Therefore, it can be said that the passive film according to the present invention is preferably a composite film composed of at least R (particularly Nd), TM (particularly Fe) and O. Further, it can be said that the passive film according to the present invention is preferably an amorphous film.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002

Claims (11)

  1.  希土類元素(以下「R」と表す。)とホウ素(B)と遷移元素(以下「TM」と表す。)との正方晶化合物であるRTM14型結晶が集合した粉末粒子により構成される希土類磁石粉末であって、
     前記粉末粒子は、外表面を被覆する不動態被膜を有することを特徴とする希土類磁石粉末。
    Consists of powder particles in which R 2 TM 14 B type 1 crystals, which are tetragonal compounds of rare earth elements (hereinafter referred to as “R”), boron (B), and transition elements (hereinafter referred to as “TM”) are assembled. Rare earth magnet powder,
    The rare earth magnet powder, wherein the powder particles have a passive film covering an outer surface.
  2.  前記不動態被膜は、前記Rおよび/またはTMの酸化物からなる不動態酸化被膜である請求項1に記載の希土類磁石粉末。 The rare earth magnet powder according to claim 1, wherein the passive film is a passive oxide film made of the oxide of R and / or TM.
  3.  前記不動態被膜は、膜厚が30nm以上である請求項1または2に記載の希土類磁石粉末。 The rare earth magnet powder according to claim 1 or 2, wherein the passive film has a thickness of 30 nm or more.
  4.  RとBとTMとの正方晶化合物であるRTM14型結晶が集合した粉末粒子を酸化雰囲気中で加熱する酸化工程を備え、
     該酸化工程は、前記酸化雰囲気を第一処理温度にする第一酸化工程と、
     該酸化雰囲気を該第一処理温度よりも高い第二処理温度にする第二酸化工程と、
     を少なくとも有することを特徴とする希土類磁石粉末の製造方法。
    Comprising an oxidation step of heating powder particles in which R 2 TM 14 B type 1 crystals, which are tetragonal compounds of R, B, and TM, are gathered in an oxidizing atmosphere;
    The oxidation step includes a first oxidation step in which the oxidizing atmosphere is set to a first treatment temperature;
    A second oxidation step for bringing the oxidizing atmosphere to a second treatment temperature higher than the first treatment temperature;
    A method for producing a rare earth magnet powder characterized by comprising:
  5.  請求項1~3のいずれかに記載の希土類磁石粉末と、
     該希土類磁石粉末の粉末粒子を結着させ得るバインダー樹脂と、
     からなることを特徴とする希土類ボンド磁石用コンパウンド。
    Rare earth magnet powder according to any one of claims 1 to 3,
    A binder resin capable of binding powder particles of the rare earth magnet powder;
    A rare earth bonded magnet compound characterized by comprising:
  6.  前記希土類磁石粉末は、平均粒径の異なる2種以上からなる複合希土類磁石粉末である請求項5に記載の希土類ボンド磁石用コンパウンド。 The rare earth magnet powder according to claim 5, wherein the rare earth magnet powder is a composite rare earth magnet powder composed of two or more kinds having different average particle diameters.
  7.  請求項1~3のいずれかに記載の希土類磁石粉末と、
     該希土類磁石粉末の粉末粒子を結着するバインダー樹脂と、
     からなることを特徴とする希土類ボンド磁石。
    Rare earth magnet powder according to any one of claims 1 to 3,
    A binder resin that binds the powder particles of the rare earth magnet powder;
    A rare earth bonded magnet characterized by comprising:
  8.  前記希土類磁石粉末は、平均粒径の異なる2種以上からなる複合希土類磁石粉末である請求項7に記載の希土類ボンド磁石。 The rare earth bonded magnet according to claim 7, wherein the rare earth magnet powder is a composite rare earth magnet powder composed of two or more kinds having different average particle diameters.
  9.  前記不動態被膜は、非晶質部分を含む請求項1~3のいずれかに記載の希土類磁石粉末。 4. The rare earth magnet powder according to claim 1, wherein the passive film contains an amorphous part.
  10.  前記不動態被膜は、前記非晶質部分中に結晶質部分が分散してなる請求項9に記載の希土類磁石粉末。 10. The rare earth magnet powder according to claim 9, wherein the passive film has a crystalline part dispersed in the amorphous part.
  11.  前記非晶質部分は、前記Rと酸素(O)からなり、
     前記結晶質部分は、前記TMからなる請求項10に記載の希土類磁石粉末。
    The amorphous part is composed of R and oxygen (O),
    The rare earth magnet powder according to claim 10, wherein the crystalline portion is made of the TM.
PCT/JP2012/057645 2011-03-23 2012-03-23 Rare-earth magnetic powder, method for manufacturing same, compound of same, and bond magnet of same WO2012128371A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-063658 2011-03-23
JP2011063658A JP2014132599A (en) 2011-03-23 2011-03-23 Rare earth magnet powder, method for manufacturing the same, compound thereof, and bond magnet thereof

Publications (1)

Publication Number Publication Date
WO2012128371A1 true WO2012128371A1 (en) 2012-09-27

Family

ID=46879508

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2012/057645 WO2012128371A1 (en) 2011-03-23 2012-03-23 Rare-earth magnetic powder, method for manufacturing same, compound of same, and bond magnet of same

Country Status (2)

Country Link
JP (1) JP2014132599A (en)
WO (1) WO2012128371A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022100371A (en) * 2018-09-06 2022-07-05 大同特殊鋼株式会社 Rare earth sintered magnet and manufacturing method thereof

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105839006B (en) * 2015-01-29 2020-08-11 户田工业株式会社 Method for producing R-T-B-based rare earth magnet powder, and bonded magnet
CN108220732B (en) * 2016-12-22 2019-12-31 有研稀土新材料股份有限公司 Alloy material, bonded magnet and method for modifying rare earth permanent magnet powder
WO2019131668A1 (en) * 2017-12-28 2019-07-04 日立化成株式会社 Method for manufacturing rare-earth metal bond magnet, and rare-earth metal bond magnet
CN108122656B (en) * 2017-12-31 2020-06-19 包头市英思特稀磁新材料股份有限公司 Rare earth permanent magnetic material
CN108231396B (en) * 2017-12-31 2020-05-15 圣航粉末冶金河北有限公司 Compression molding process of bonded rare earth permanent magnet material
JP7298804B1 (en) * 2022-12-26 2023-06-27 株式会社レゾナック Method for manufacturing magnetic compact and method for manufacturing anisotropic bonded magnet

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06302418A (en) * 1993-02-19 1994-10-28 Sumitomo Metal Ind Ltd Bond-type permanent magnet and its manufacture
JP2002144328A (en) * 2000-11-08 2002-05-21 Seiko Epson Corp Method for manufacturing kneaded mixture, kneaded mixture, molding and sintered material
JP2004055989A (en) * 2002-07-23 2004-02-19 Nichia Chem Ind Ltd Resin magnet
JP2004186214A (en) * 2002-11-29 2004-07-02 Nichia Chem Ind Ltd Bonding magnet
JP2006287044A (en) * 2005-04-01 2006-10-19 Neomax Co Ltd Compound for rare earth system nanocomposite magnet, and its manufacturing method
JP2009224378A (en) * 2008-03-13 2009-10-01 Nissan Motor Co Ltd Magnet molding

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06302418A (en) * 1993-02-19 1994-10-28 Sumitomo Metal Ind Ltd Bond-type permanent magnet and its manufacture
JP2002144328A (en) * 2000-11-08 2002-05-21 Seiko Epson Corp Method for manufacturing kneaded mixture, kneaded mixture, molding and sintered material
JP2004055989A (en) * 2002-07-23 2004-02-19 Nichia Chem Ind Ltd Resin magnet
JP2004186214A (en) * 2002-11-29 2004-07-02 Nichia Chem Ind Ltd Bonding magnet
JP2006287044A (en) * 2005-04-01 2006-10-19 Neomax Co Ltd Compound for rare earth system nanocomposite magnet, and its manufacturing method
JP2009224378A (en) * 2008-03-13 2009-10-01 Nissan Motor Co Ltd Magnet molding

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022100371A (en) * 2018-09-06 2022-07-05 大同特殊鋼株式会社 Rare earth sintered magnet and manufacturing method thereof
JP7320102B2 (en) 2018-09-06 2023-08-02 大同特殊鋼株式会社 Rare earth sintered magnet and manufacturing method thereof

Also Published As

Publication number Publication date
JP2014132599A (en) 2014-07-17

Similar Documents

Publication Publication Date Title
JP4830024B2 (en) Composite magnetic material for magnet and manufacturing method thereof
WO2012128371A1 (en) Rare-earth magnetic powder, method for manufacturing same, compound of same, and bond magnet of same
CN109964290B (en) Method for producing R-T-B sintered magnet
CN109983553B (en) Method for producing R-T-B sintered magnet
JP4805998B2 (en) Permanent magnet and permanent magnet motor and generator using the same
JP5501828B2 (en) R-T-B rare earth permanent magnet
EP2979279B1 (en) Permanent magnet, and motor and generator using the same
CN108695034B (en) R-T-B sintered magnet
WO2018163967A1 (en) Magnetic powder containing sm-fe-n crystal grains, sintered magnet produced from same, method for producing said magnetic powder, and method for producing said sintered magnet
WO2009107397A1 (en) Process for producing r-fe-b rare-earth sintered magnet and rare-earth sintered magnet produced by the process
JP2018093202A (en) R-t-b based permanent magnet
JP2019102708A (en) R-t-b based permanent magnet
US11404207B2 (en) Method for manufacturing R-T-B permanent magnet
WO2018096733A1 (en) Rare earth-iron-nitrogen system magnetic powder and method for producing same
JP6500387B2 (en) Method of manufacturing high coercivity magnet
JP2018127716A (en) Rare-earth-iron-nitrogen based magnetic powder and method for producing the same
WO2003085683A1 (en) Composite rare earth anisotropic bonded magnet, compound for composite rare earth anisotropic bonded magnet and method for preparation thereof
JPH07272913A (en) Permanent magnet material, and its manufacture and permanent magnet
JP2008060241A (en) High resistance rare-earth permanent magnet
JP7035682B2 (en) RTB-based sintered magnet
JP7035683B2 (en) RTB-based sintered magnet
WO2004030000A1 (en) Method for producing r-t-b based rare earth element permanent magnet
JP6623998B2 (en) Method for producing RTB based sintered magnet
JP2003168602A (en) Anisotropic rare earth bonded magnet and its manufacturing method
JP7108258B2 (en) Iron nitride magnetic material

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12760048

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12760048

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP