WO2012113713A1 - Dispositif de superposition de faisceaux laser d'une pluralité de sources de lumière laser dans un plan de travail - Google Patents

Dispositif de superposition de faisceaux laser d'une pluralité de sources de lumière laser dans un plan de travail Download PDF

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Publication number
WO2012113713A1
WO2012113713A1 PCT/EP2012/052713 EP2012052713W WO2012113713A1 WO 2012113713 A1 WO2012113713 A1 WO 2012113713A1 EP 2012052713 W EP2012052713 W EP 2012052713W WO 2012113713 A1 WO2012113713 A1 WO 2012113713A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser
holder
laser light
receptacle
modules
Prior art date
Application number
PCT/EP2012/052713
Other languages
German (de)
English (en)
Inventor
Vitalij Lissotschenko
Manfred Jarczynski
Frank KUBACKI
Udo Fornahl
Ulrich JENTSCH
Dirk Walter BOGS
Original Assignee
Limo Patentverwaltung Gmbh & Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Limo Patentverwaltung Gmbh & Co. Kg filed Critical Limo Patentverwaltung Gmbh & Co. Kg
Publication of WO2012113713A1 publication Critical patent/WO2012113713A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G02B19/0066—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED in the form of an LED array
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02251—Out-coupling of light using optical fibres
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/02208—Mountings; Housings characterised by the shape of the housings
    • H01S5/02212—Can-type, e.g. TO-CAN housings with emission along or parallel to symmetry axis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02253—Out-coupling of light using lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/023—Mount members, e.g. sub-mount members
    • H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
    • H01S5/02326—Arrangements for relative positioning of laser diodes and optical components, e.g. grooves in the mount to fix optical fibres or lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar

Definitions

  • the present invention relates to a device for superposing laser beams of a plurality of laser light sources in a working plane according to the preamble of claim 1.
  • propagation direction of the laser radiation means mean propagation direction of the laser radiation, especially if this is not a plane wave or at least partially divergent or convergent.
  • laser beam, light beam, sub-beam or beam is, unless expressly stated otherwise, not an idealized beam of geometric optics meant, but a real
  • Light beam such as a laser beam with a Gaussian profile or a modified Gaussian profile or a top hat profile, the no infinitesimal small, but an extended
  • Beam cross-section has.
  • a device of the type initially known From US 2010/0158058 A1 a device of the type initially known.
  • a plurality of laser modules are provided, each having a laser diode and converging optical means.
  • the laser modules are on cylindrical contact surfaces on a common bracket
  • the laser light of a plurality of two-dimensionally arranged in a plane laser diodes of prism-like optical means is deflected to the entrance surface of a light guide rod.
  • the laser beams of the individual laser diodes on the entrance surface overlap at least partially.
  • a disadvantage here is that on the one hand only the laser light of a comparatively small number of laser diodes can be superimposed.
  • the device is less suitable to couple the laser light of the plurality of laser diodes in an optical fiber, because their
  • Entrance surface significantly smaller than the entrance surface of the
  • a device for introducing laser light of a plurality of laser light sources into a working plane is known.
  • a plurality of laser diodes is provided, the laser light is focused in each case by a coupling optics on the end of an optical fiber and coupled into this.
  • the laser light of the plurality of laser diodes is then transported by the comparatively thick bundle of the optical fibers in the vicinity of a work area. There it emerges from the multitude of
  • the problem underlying the present invention is to provide a device of the type mentioned, by a plurality of laser light sources outgoing laser beams can bring more effective in a working plane or overlay in the working plane and / or the simpler one
  • the connecting means are designed such that the adjustment of a laser module
  • the holder may be a common holder for all laser light sources, in particular, all directions may differ from each other, under each of which the laser beams are emitted from the laser light sources.
  • Laser beams are superimposed in a desired region of the working plane, for example, the entrance surface of a
  • Optical fiber corresponds. If appropriate, however, optical means may additionally be arranged between the holder and the working plane in order, for example, to focus the individual laser beams on the incident surface of the optical fiber.
  • inventive device thus allows the effective coupling the laser light of a plurality of laser light sources in a single optical fiber.
  • the optical means one or more
  • Focusing lenses comprise, which can focus the emanating from the respective laser light source laser beam to an area in the working plane, such as on the entrance surface of an optical fiber. At this time, the direction of the laser beams from the mount and the distance of the focus area from the mount are predetermined by the optical means.
  • the holder comprises a plurality of receptacles for the laser light sources or for the laser modules. In these shots, the laser light sources
  • the laser modules are reproducibly introduced.
  • a first of the receptacles has a first insertion direction, in which a first of the laser light sources or a first of the laser modules in the first
  • a second of the receptacles has a second insertion direction in which a second of the laser light sources or a second of the laser modules can be introduced into the second receptacle, wherein the first and the second insertion direction differ from each other.
  • the Einbringraumen all recordings can be introduced, and that a second of the receptacles has a second insertion direction in which a second of the laser light sources or a second of the laser modules can be introduced into the second receptacle, wherein the first and the second insertion direction differ from each other.
  • Laser light source or held in the first recording first laser module emit a laser beam in a first direction and held in the second recording second laser light source or a second laser module supported in the second receptacle emitting a laser beam in a second direction, wherein the first and the second direction are different from each other.
  • directions of all laser beams may differ from each other.
  • the first direction of the first segment is the first direction of the first segment
  • Insertion direction and the second direction of the second insertion direction correspond. In this way, by introduction direction of the
  • Laser light sources or the laser modules in the recordings of the holder set the direction under which the laser beams leave the holder.
  • the Holder has threaded means which cooperate in each case with the threaded means of the insertable into the receptacle laser module.
  • the thread means can be a simple and reproducible
  • Adjustment of the laser module results automatically by the connection with the holder.
  • the screwing-in direction can specify the direction under which the laser beams leave the holder.
  • the holder it can be provided that the holder,
  • each of the receptacles clamping means, each of which can hold the insertable into one of the receptacles laser module.
  • a clamping sleeve can be arranged in each of the receptacles. Such a clamping sleeve can also be a precise positioning in the lateral or radial direction and a precise directional accuracy
  • clamping means can thus automatically result in an adjustment of the laser module by its connection to the holder.
  • each of the receptacles and / or each of the laser modules comprise at least one stop which predetermines the insertion depth of the laser module into the receptacle, wherein in particular clamping means are provided which form a portion of the receptacle and / or a portion of
  • the holder is formed or that the holder is curved, for example, is formed as a portion of a spherical shell. Training as a section of a ball socket can ensure that the
  • Distances from the laser modules to the overlap point in the working plane is the same for each of the laser modules.
  • first direction and / or the first insertion direction include a first angle with the normal on the plate-shaped holder and the second direction and / or the second insertion direction a second angle with the normal on the plate-shaped holder, wherein the first and the second angle differ from each other.
  • the directions in which the laser beams leave the holder thus differ in their angle to the normal on the plate-shaped holder.
  • the holder has at least one cooling channel for a cooling medium. In this way, a common cooling for the majority of the laser light sources can be ensured with simple means.
  • the images are arranged on or in the holder in the form of a two-dimensional array. This also results in a corresponding arrangement of
  • the laser light source may be a laser diode or comprise a laser diode, in particular be a TO-chopped laser diode or comprise a TO-chopped laser diode.
  • Fig. 1 is a schematic perspective view of a
  • Figure 2 is a section along the arrows II - II in Fig. 1.
  • Fig. 3 is a section along the arrows III - III in Fig. 1;
  • FIG. 5 shows a perspective view of a laser module for a device according to the invention
  • Fig. 6 is a schematic perspective view of another
  • Device comprises a holder 1, which is plate-shaped and extends substantially in an XY plane.
  • the holder in the X direction and the Y direction is essentially the same extent and has an approximately square outline with rounded corners in the XY plane.
  • the Holder 1 In the perpendicular Z-direction or transverse direction, the Holder 1 has a comparatively small thickness and is considerably less expanded than in the X direction or the Y direction.
  • the holder 1 consists in particular of a good heat-conducting material, such as metal or ceramic.
  • the holder 1 has a plurality of receptacles 2, which are formed, for example, as extending through the holder 1 approximately in the Z direction or approximately in the transverse direction bores. These holes are provided in particular with a thread serving as an internal thread.
  • the images 2 are as a two-dimensional array in an X-Y plane over the
  • Bracket 1 distributed. It is quite possible that the entire surface of the holder 1 extending in the X-Y plane is uniformly provided with receivers 2. But there is also the possibility that the shots 2 are distributed unevenly over the bracket.
  • a laser module 3 is introduced in each case.
  • a plurality of the receptacles 2 is not provided with a laser module 3.
  • FIG. 1 is intended only schematically to clarify the structure of the device, so that it can certainly be provided to provide each of the receptacles 2 with a laser module 3.
  • a serving for cooling medium such as water (see Fig. 2 and 3).
  • Fig. 1 shows that of different Laser modules 3 outgoing laser beams 5, the holder 1 in different, partially deviating from the Z direction
  • the optical fiber 7 may be, for example, a
  • Multimode fiber with a fiber core diameter of 1.5 mm and a numerical aperture of 0.22 act. However, it is quite possible to use other optical fibers.
  • FIG. 5 shows an exemplary embodiment of a laser module 3.
  • This comprises a housing 8 and a TO-clipped laser diode held in the housing 8 and serving as laser light source 9.
  • the laser diode can emit light of a wavelength of 405 nm, for example. However, it is quite possible that laser diodes are used which emit light of other, for example, shorter or longer wavelength.
  • the laser module 3 comprises a focusing lens serving as an optical means 10, which can focus the laser light emanating from the laser diode to a point in the working plane 6.
  • the housing 8 is provided on its outer side with a thread 11 serving as external thread, which is screwed into the internal thread of a receptacle 2.
  • the housing 8 has a radially outward
  • FIG. 2 shows, for a plurality of laser modules 3 recorded side by side in different directions in the Y direction, that the first, central laser module 3a emits a first laser beam 5a, which extends in the Z direction, whereas the second, external laser modules 3b, second laser beams 5b send, which extend at an angle not equal to 0 ° to the Z direction.
  • the second laser beams 5b are directed somewhat from outside to inside, so that they meet in the working plane 6 with the first laser beam 5a and can be coupled together with this into the optical fiber 7.
  • Laser beams 5b arranged third laser beams 5c are less strongly tilted towards the Z direction than the second, outer
  • Fig. 2 shows only five laser beams 5a, 5b, 5c. However, in each case one laser beam 5 should emanate from each of the laser modules 3 in each case.
  • Fig. 3 shows that even when in the X direction side by side in
  • the first, middle laser module 3a emits a parallel to the Z-direction laser beam 5a, whereas further outwardly arranged laser modules 3 towards the Z-direction at an angle not equal to 0 ° extending laser beams 5 emits, which is slightly inward are directed and meet in the working plane 6 with the first laser beam 5a.
  • FIG. 4 illustrates that the different receptacles 2 a, 2 b, 2 c specify different directions 14 a, 14 b, 14 c, among which the 4 not shown laser beams can leave the holder.
  • the bore or the internal thread of a first receptacle 2a is aligned so that after
  • Receiving 2a results in a first insertion direction, which is inclined at a first angle to the Z-direction or against the normal on the underside of the holder 1. This first
  • Insertion direction corresponds to the first direction 14a under which the laser beam, not shown in FIG. 4, can leave the first receptacle 2a.
  • a second receptacle 2b is aligned so that after screwing the corresponding laser module 3 into the second receptacle 2b results in a second insertion direction, which is inclined by a second angle ß against the Z direction.
  • This second insertion direction corresponds to the second direction 14b under which the laser beam, not shown in FIG. 4, can leave the second receptacle 2b.
  • a third insertion direction corresponds to the third direction 14c below that not shown in Figure 4
  • Laser beam can leave the third recording 2c.
  • the corresponding laser module 3 can be unscrewed from the receptacle 2 and replaced by a new laser module 3.
  • the laser module 3 is held by clamping means in the receptacle 2.
  • a non-illustrated clamping sleeve can be introduced or integrated into the receptacle 2, which positions the laser module 3 in the receptacle 2 exactly.
  • such a clamping sleeve on the one hand ensure precise positioning in the lateral or radial direction.
  • lateral For example, lateral
  • Position accuracies in the range of 0.1 to 5 ⁇ can be achieved.
  • the laser module 3 would not have to be clamped over the circumference, but could for example be locked from an end face - clearly similar to the mounting of a cartridge in a drum turret.
  • These clamping means may be formed in particular as a clamping claw or clamping ring.
  • Fig. 6 is an embodiment of an inventive
  • the holder 1 according to FIG. 6 likewise comprises a plurality of receptacles, of which three receptacles 2 a, 2 b, 2 c are shown by way of example.
  • a Laser module 3a, 3b, 3c arranged in each case.
  • the laser beam 5a of the centrally arranged laser module 3a leaves this substantially in the Z direction, whereas the laser beams 5b, 5c of the two other laser modules 3b, 3c enclose an angle not equal to 0 ° with the Z direction.
  • FIG. 6 shows that the laser beams 5a, 5b, 5c emanating from different laser modules 3a, 3b, 3c overlap in the working plane 6 in such a way that together they form a non-imaged laser beam 5a
  • Optical fiber can be coupled.
  • optical means 10 for each of the laser modules 3a, 3b, 3c can be made the same or can
  • Focusing lenses of the optical means 10 have the same focal length.
  • the laser modules 3a, 3b, 3c are thus interchangeable.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)

Abstract

L'invention concerne un dispositif de superposition de faisceaux laser (5a, 5b, 5c) d'une pluralité de sources de lumière laser (9) dans un plan de travail (6), comprenant une pluralité de modules laser (3, 3a, 3b) dotés de respectivement une source de lumière laser (9) et de moyens optiques (10) et un support commun (1) pour au moins deux des modules laser (3, 3a, 3b). Les faisceaux laser (5a, 5b) partant d'une première et d'une deuxième source de faisceau laser (9) sont superposés ou peuvent être superposés dans le plan de travail (6), et le dispositif comprend des moyens de liaison pour la liaison de chacun des modules laser (3, 3a, 3b) au support (1), lesdits moyens étant configurés de telle manière que la liaison au support (1) permet d'obtenir automatiquement l'ajustage d'un module laser (3, 3a, 3b).
PCT/EP2012/052713 2011-02-25 2012-02-16 Dispositif de superposition de faisceaux laser d'une pluralité de sources de lumière laser dans un plan de travail WO2012113713A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011012511.6 2011-02-25
DE102011012511A DE102011012511A1 (de) 2011-02-25 2011-02-25 Vorrichtung zur Überlagerung von Laserstrahlen einer Mehrzahl von Laserlichtquellen in einer Arbeitsebene

Publications (1)

Publication Number Publication Date
WO2012113713A1 true WO2012113713A1 (fr) 2012-08-30

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ID=45688490

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/052713 WO2012113713A1 (fr) 2011-02-25 2012-02-16 Dispositif de superposition de faisceaux laser d'une pluralité de sources de lumière laser dans un plan de travail

Country Status (2)

Country Link
DE (1) DE102011012511A1 (fr)
WO (1) WO2012113713A1 (fr)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
JPWO2016186048A1 (ja) * 2015-05-21 2017-11-02 三菱電機株式会社 レーザ光源装置およびレーザ光源装置の組み立て方法

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US4914272A (en) * 1987-09-14 1990-04-03 Sony Corporation Laser beam soldering apparatus and soldering method using the same
DE4301689A1 (de) 1993-01-22 1994-07-28 Deutsche Forsch Luft Raumfahrt Leistungsgesteuertes fraktales Lasersystem
DE10040875A1 (de) 2000-08-18 2002-03-21 3M Espe Ag Kegelstumpfförmige Sammeloptik
EP1228834A1 (fr) * 2001-01-31 2002-08-07 Svein Andersen Dispositif de traitement superficiel d'éléments revêtus
JP2003035876A (ja) * 2001-07-24 2003-02-07 Ricoh Co Ltd マルチビーム走査装置及び画像形成装置
EP1998418A1 (fr) * 2007-05-30 2008-12-03 iie Gesellschaft für innovative Industrieelektronik mbH Module laser

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US4826269A (en) * 1987-10-16 1989-05-02 Spectra Diode Laboratories, Inc. Diode laser arrangement forming bright image
DE19964339B4 (de) * 1998-09-24 2009-09-17 Emerson Electric Co. Laserdiodenanordnung
US6700138B2 (en) * 2002-02-25 2004-03-02 Silicon Bandwidth, Inc. Modular semiconductor die package and method of manufacturing thereof
DE10235713A1 (de) * 2002-07-31 2004-02-19 Friedrich-Schiller-Universität Jena Vorrichtung zur Pumpanregung eines Lasermediums über Laserdioden-Stapel
DE502005007859D1 (de) * 2004-10-06 2009-09-17 Limo Patentverwaltung Gmbh Laseranordnung
DE102009037979A1 (de) * 2009-08-18 2011-02-24 Georg Meyndt Vorrichtung zum Koppeln von Diodenlasern

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Publication number Priority date Publication date Assignee Title
US4914272A (en) * 1987-09-14 1990-04-03 Sony Corporation Laser beam soldering apparatus and soldering method using the same
DE4301689A1 (de) 1993-01-22 1994-07-28 Deutsche Forsch Luft Raumfahrt Leistungsgesteuertes fraktales Lasersystem
DE10040875A1 (de) 2000-08-18 2002-03-21 3M Espe Ag Kegelstumpfförmige Sammeloptik
EP1228834A1 (fr) * 2001-01-31 2002-08-07 Svein Andersen Dispositif de traitement superficiel d'éléments revêtus
JP2003035876A (ja) * 2001-07-24 2003-02-07 Ricoh Co Ltd マルチビーム走査装置及び画像形成装置
EP1998418A1 (fr) * 2007-05-30 2008-12-03 iie Gesellschaft für innovative Industrieelektronik mbH Module laser
US20100158058A1 (en) 2007-05-30 2010-06-24 Ekkehard Kress Laser module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016186048A1 (ja) * 2015-05-21 2017-11-02 三菱電機株式会社 レーザ光源装置およびレーザ光源装置の組み立て方法

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