WO2012105785A3 - 기판 지지용 보트 및 이를 사용한 지지유닛 - Google Patents
기판 지지용 보트 및 이를 사용한 지지유닛 Download PDFInfo
- Publication number
- WO2012105785A3 WO2012105785A3 PCT/KR2012/000714 KR2012000714W WO2012105785A3 WO 2012105785 A3 WO2012105785 A3 WO 2012105785A3 KR 2012000714 W KR2012000714 W KR 2012000714W WO 2012105785 A3 WO2012105785 A3 WO 2012105785A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- boat
- support unit
- same
- supporting substrate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
- H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
기판 지지용 보트 및 이를 사용한 지지유닛이 개시된다. 본 발명에 따른 기판 지지용 보트 및 이를 사용한 지지유닛은 복수의 제 1 및 제 2 지지핀에 의하여 기판의 전체면이 균일하게 지지되므로, 기판의 처리시 기판이 자중에 의하여 처지는 것이 방지된다. 그러므로, 기판을 처리 하여도, 기판의 특성 변화가 없으므로, 기판의 처리공정의 신뢰성이 향상되는 효과가 있다.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013551915A JP6006734B2 (ja) | 2011-02-01 | 2012-01-31 | 基板支持用ボートおよびこれを用いた支持ユニット |
CN201280010669.8A CN103392228B (zh) | 2011-02-01 | 2012-01-31 | 基板支撑用的晶舟以及使用该晶舟的支撑单元 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2011-0010132 | 2011-02-01 | ||
KR20110010132 | 2011-02-01 | ||
KR1020110030216A KR101284105B1 (ko) | 2011-04-01 | 2011-04-01 | 기판 지지용 보트 |
KR10-2011-0030216 | 2011-04-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012105785A2 WO2012105785A2 (ko) | 2012-08-09 |
WO2012105785A3 true WO2012105785A3 (ko) | 2012-11-29 |
Family
ID=46603197
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2012/000714 WO2012105785A2 (ko) | 2011-02-01 | 2012-01-31 | 기판 지지용 보트 및 이를 사용한 지지유닛 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6006734B2 (ko) |
CN (1) | CN103392228B (ko) |
TW (1) | TWI600105B (ko) |
WO (1) | WO2012105785A2 (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016002978A1 (ko) * | 2014-06-30 | 2016-01-07 | 주식회사 테라세미콘 | 보트 |
CN205608389U (zh) * | 2016-05-11 | 2016-09-28 | 重庆京东方光电科技有限公司 | 一种缓存装置及设有该缓存装置的涂胶显影机 |
CN106216317A (zh) * | 2016-08-10 | 2016-12-14 | 宁夏高创特能源科技有限公司 | 一种平面靶材清洗防护用模块化组合插片花篮 |
CN108103481B (zh) * | 2018-01-25 | 2023-07-18 | 无锡盈芯半导体科技有限公司 | 衬底自动挟式石英舟 |
CN208157378U (zh) * | 2018-04-09 | 2018-11-27 | 深圳市捷佳伟创新能源装备股份有限公司 | 一种pevcd卧式石墨舟结构 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100554631B1 (ko) * | 2002-07-15 | 2006-02-22 | 샤프 가부시키가이샤 | 기판용 카세트 |
KR100600515B1 (ko) * | 2005-01-20 | 2006-07-13 | (주)상아프론테크 | 크로스바 설치용 연결구가 구비된 기판 적재용 카세트 |
JP3977481B2 (ja) * | 1997-04-11 | 2007-09-19 | 淀川ヒューテック株式会社 | 基板用トレイカセット |
KR20100064504A (ko) * | 2008-12-05 | 2010-06-15 | 주식회사 에스에프에이 | 기판 보관용 카세트 및 그를 구비한 기판 보관용 카세트 시스템 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3977491B2 (ja) * | 1997-07-16 | 2007-09-19 | 淀川ヒューテック株式会社 | 基板用カセット |
JP2001127147A (ja) * | 1999-10-27 | 2001-05-11 | Kanegafuchi Chem Ind Co Ltd | 熱処理用キャリア |
JP2001223262A (ja) * | 2000-02-07 | 2001-08-17 | Kanegafuchi Chem Ind Co Ltd | 熱処理用キャリア |
CN100344513C (zh) * | 2005-03-04 | 2007-10-24 | 友达光电股份有限公司 | 基板搬运架 |
US7822324B2 (en) * | 2006-08-14 | 2010-10-26 | Applied Materials, Inc. | Load lock chamber with heater in tube |
JP4317883B2 (ja) * | 2007-04-18 | 2009-08-19 | 国立大学法人東北大学 | 支持ピンの製造方法、支持ピン、熱処理装置および基板焼成炉 |
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2012
- 2012-01-31 CN CN201280010669.8A patent/CN103392228B/zh active Active
- 2012-01-31 WO PCT/KR2012/000714 patent/WO2012105785A2/ko active Application Filing
- 2012-01-31 JP JP2013551915A patent/JP6006734B2/ja active Active
- 2012-01-31 TW TW101103044A patent/TWI600105B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3977481B2 (ja) * | 1997-04-11 | 2007-09-19 | 淀川ヒューテック株式会社 | 基板用トレイカセット |
KR100554631B1 (ko) * | 2002-07-15 | 2006-02-22 | 샤프 가부시키가이샤 | 기판용 카세트 |
KR100600515B1 (ko) * | 2005-01-20 | 2006-07-13 | (주)상아프론테크 | 크로스바 설치용 연결구가 구비된 기판 적재용 카세트 |
KR20100064504A (ko) * | 2008-12-05 | 2010-06-15 | 주식회사 에스에프에이 | 기판 보관용 카세트 및 그를 구비한 기판 보관용 카세트 시스템 |
Also Published As
Publication number | Publication date |
---|---|
TWI600105B (zh) | 2017-09-21 |
TW201243984A (en) | 2012-11-01 |
CN103392228A (zh) | 2013-11-13 |
CN103392228B (zh) | 2016-09-21 |
WO2012105785A2 (ko) | 2012-08-09 |
JP6006734B2 (ja) | 2016-10-12 |
JP2014511558A (ja) | 2014-05-15 |
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