WO2012101922A1 - Alignment apparatus and reflection characteristic measurement system - Google Patents

Alignment apparatus and reflection characteristic measurement system Download PDF

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Publication number
WO2012101922A1
WO2012101922A1 PCT/JP2011/078985 JP2011078985W WO2012101922A1 WO 2012101922 A1 WO2012101922 A1 WO 2012101922A1 JP 2011078985 W JP2011078985 W JP 2011078985W WO 2012101922 A1 WO2012101922 A1 WO 2012101922A1
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WO
WIPO (PCT)
Prior art keywords
reflection characteristic
characteristic measuring
measurement
alignment
light receiving
Prior art date
Application number
PCT/JP2011/078985
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French (fr)
Japanese (ja)
Inventor
義幸 長嶋
Ikushi NAKAMURA (中村 育志)
Original Assignee
コニカミノルタセンシング株式会社
中村 美智子
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by コニカミノルタセンシング株式会社, 中村 美智子 filed Critical コニカミノルタセンシング株式会社
Priority to JP2012554640A priority Critical patent/JP5534044B2/en
Publication of WO2012101922A1 publication Critical patent/WO2012101922A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8483—Investigating reagent band

Definitions

  • the present invention relates to a technique of an alignment apparatus as a measurement object to which a reflection characteristic measurement apparatus can be attached.
  • a reflection characteristic measuring device that measures reflected light obtained by irradiating light onto a measurement object and measures the reflection characteristics of the measurement object is known.
  • the reflection characteristic measuring apparatus is stationary, and the measurement object is measured while moving the reflection characteristic measuring apparatus while performing the spot measurement for measuring the reflection characteristic of the measurement object in a minute region. It is possible to perform scan measurement that continuously measures the reflection characteristics of an object.
  • an apparatus that aligns with a measurement target is used to eliminate a positional shift of the reflection characteristic measurement apparatus with respect to a minute region to be measured.
  • the reflection characteristic measuring device described in Patent Document 1 has a shape in which the alignment device is integrally configured to be rotatable with respect to the measurement device main body, and a minute region is formed using the alignment device. Spot measurement can be performed as a measurement target.
  • a guide device that guides the movement of the reflection characteristic measurement device is used in order to prevent the displacement of the reflection characteristic measurement device with respect to the measurement object that occurs when the reflection characteristic measurement device is moved.
  • the reflection characteristic measuring device can be placed on the guide device and moved to prevent the reflection characteristic measuring device from being displaced due to the movement of the reflection characteristic measuring device.
  • the reflection characteristic measuring device described in Patent Document 1 is configured so as not to be separated from the alignment device, when the reflection characteristic measuring device is placed on a guide device for scanning measurement, the reflection characteristic measuring device An alignment device is interposed between the guide device and the guide device, and the alignment device can be an obstacle to scan measurement. Therefore, it is desirable that the alignment device used for spot measurement can be removed during scan measurement.
  • the reflection characteristic measuring device is configured to be removable from the alignment device.
  • Patent Document 3 it is attached to be rotatable around the lower rear surface of the measuring device main body. Possible measurement position indicator plates are described.
  • the reflection characteristic measuring device is positioned at a position away from the light receiving unit that receives the reflected light in the reflection characteristic measuring device, the micro area to be measured and the light receiving unit In the meantime, a positional deviation occurred during the measurement.
  • the present invention provides a technique that can be easily attached and can improve the alignment accuracy with respect to the measurement object when performing measurement using an alignment apparatus that can be attached to and detached from the reflection characteristic measurement apparatus. With the goal.
  • the invention of claim 1 is used in combination with a reflection characteristic measuring apparatus having a light receiving unit that receives reflected light obtained by irradiating light to a measurement object, and is a minute object to be measured.
  • An alignment device for aligning the position of the light receiving unit of the reflection characteristic measurement device with respect to a region, a first member that can attach and detach the reflection property measurement device, and a second member that supports the first member; A first state in which the first member and the second member overlap each other and a second state in which one end of the first member and the second member is connected and the other end is open can be taken.
  • the first member and the second member are connected to each other, and the first member has a positioning part for positioning the mounted reflection characteristic measuring device, and the positioning part includes:
  • the reflection characteristic measuring device is the first member. When worn, it is positioned on the first member so as to be located closer to the light receiving portion than the intermediate position between the connecting portion and the light receiving portion.
  • the first member in the alignment apparatus according to the first aspect of the invention, in the mounted state of the reflection characteristic measuring device, the first member is located on the other end side opposite to the one end.
  • An opening for arranging the light receiving portion of the reflection characteristic measuring device is provided, and the first member is formed along the opening with the fixing member for fixing the reflection characteristic measuring device to the first member as the positioning portion.
  • the fixing member has a protrusion protruding toward the inside of the opening
  • the reflection characteristic measuring device includes The notch part provided around the light receiving part of the reflection characteristic measuring apparatus and the projection part are fitted to each other and attached to the first member.
  • the first member in the alignment apparatus according to the first aspect of the invention, in the mounted state of the reflection characteristic measuring device, the first member is located on the other end side opposite to the one end.
  • the light receiving portion of the reflection characteristic measuring apparatus is disposed, and the first member has two positioning members provided at a predetermined interval as the positioning portion, and at least one of the two positioning members. Is provided at a position closer to the light receiving portion than an intermediate position between the light receiving portion and the connecting portion when the reflection characteristic measuring device is attached to the first member.
  • the invention according to claim 5 is the alignment apparatus according to claim 4, wherein the positioning member is any one of a protrusion and a hole provided in the first member.
  • the second member slips on a surface opposite to the surface facing the first member.
  • the anti-slip member is provided on the one end side of the second member.
  • the invention of claim 7 is a reflection characteristic measurement system, which is equipped with a reflection characteristic measurement device having a light receiving part for receiving reflected light obtained by irradiating light to a measurement object, and the reflection characteristic identification device.
  • An alignment device that can be attached to the reflection characteristic measuring device, the second member that supports the first member, the first member, and the second member. And the first member and the second member so that one end of each of the first member and the second member is connected and the other end is open.
  • a connecting portion that connects the member, the first member has a positioning portion that positions the mounted reflection characteristic measuring device, and the positioning portion includes the first reflection characteristic measuring device.
  • the invention according to claim 8 is the reflection characteristic measurement system according to claim 7, further comprising a guide device that guides the reflection characteristic measurement device so as to be movable, and the alignment device is included in the reflection characteristic measurement device. It is possible to perform measurement performed by mounting and measurement performed by mounting the guide device on the reflection characteristic measuring device.
  • the invention according to claim 9 is the reflection characteristic measurement system according to the invention according to claim 8, wherein the guide device is in a state in which the reflection characteristic measurement device without the alignment device is attached to the guide device. And a measurement aperture facing the light receiving portion.
  • the present invention it is possible to accurately position the light receiving unit of the reflection characteristic measuring device with respect to the measurement object, and thus it is possible to accurately measure the desired measurement object.
  • 1 is a top external view of a reflection characteristic measuring apparatus according to a first embodiment of the present invention.
  • 1 is a bottom external view of a reflection characteristic measuring apparatus according to a first embodiment of the present invention.
  • It is a system diagram containing a reflection characteristic measuring apparatus. It is an external view of the alignment apparatus which can attach or detach the reflection characteristic measuring apparatus which concerns on 1st Embodiment of this invention. It is a figure which shows the state which mounted
  • FIG. 1 and 2 are external views of a reflection characteristic measuring apparatus 1A according to the first embodiment of the present invention.
  • FIG. 1 is a top external view of the reflection characteristic measuring apparatus 1A
  • FIG. 2 is a bottom external view of the reflection characteristic measuring apparatus 1A.
  • the reflection characteristic measuring apparatus 1A shown in FIGS. 1 and 2 is obtained by irradiating a measurement object (also referred to as “measurement object” or simply “sample”) from the inside of the reflection characteristic measurement apparatus 1A main body. It has a function of receiving reflected light and measuring the reflection characteristics of the measurement object based on the reflected light.
  • the reflection characteristic measuring apparatus 1A includes, for example, a spectrocolorimeter, a color meter, a gloss meter, a densitometer, and the like.
  • the light irradiation to the specific object and the reception of the reflected light are performed through the light receiving opening 3 provided on the lower surface side (see FIG. 2) of the reflection characteristic measuring apparatus 1A. That is, the reflected light reflected from the measurement object is guided from the light receiving opening 3 to the inside of the reflection characteristic measuring apparatus 1A, and is used for measuring the reflection characteristic in the reflection characteristic measuring apparatus 1A. Since the reflected light is guided from the light receiving opening 3 to the inside of the reflection characteristic measuring apparatus 1A, the light receiving opening 3 is also referred to as a “light receiving part” in the reflection characteristic measuring apparatus 1A.
  • FIG. 3 is a system diagram including the reflection characteristic measuring apparatus 1A.
  • the reflection characteristic measurement apparatus 1A includes an alignment apparatus 10A, a white calibration table 30, a scanning guide apparatus (also simply referred to as “guide apparatus”) 50, and an illuminance measurement apparatus.
  • An attachment (simply referred to as “illuminance attachment”) 70 can be attached to perform measurement in various modes. Then, the measurement information acquired by the reflection characteristic measuring apparatus 1A is transmitted to the personal computer (PC) 200 via the communication line.
  • the reflection characteristic measuring apparatus 1A equipped with the accessory parts is also referred to as a reflection characteristic measuring system.
  • FIG. 4 is an external view of an alignment apparatus 10A to which the reflection characteristic measuring apparatus 1A can be attached and detached.
  • 5 and 6 are views showing a state in which the reflection characteristic measuring apparatus 1A is mounted on the alignment apparatus 10A.
  • FIG. 6 uses the reflection characteristic measurement apparatus 1A mounted on the alignment apparatus 10A.
  • FIG. 5 shows a state diagram when spot measurement is performed.
  • an alignment apparatus 10A having a shape as shown in FIG. 4 is employed.
  • the reflection characteristic measurement device 1A is attached to the alignment device 10A in an open state (also referred to as “open state”), the state shown in FIG. 5 is obtained.
  • the reflection characteristic measuring apparatus 1A When actually measuring the reflection characteristics, the reflection characteristic measuring apparatus 1A is pressed down from above by the user, and is changed to the closed state (also referred to as “closed state”) shown in FIG. Then, in the closed state, the measurement button 2 provided on the side surface of the reflection characteristic measuring apparatus 1A is pressed, and spot measurement is executed.
  • the closed state also referred to as “closed state”.
  • FIG. 7 is a diagram illustrating a state where the reflection characteristic measuring apparatus 1 ⁇ / b> A is mounted on the guide apparatus 50.
  • a guide device 50 having a linear measurement opening 51 as shown in FIG. 7 is employed as the guide device 50.
  • the reflection characteristic measurement device 1 ⁇ / b> A is mounted on the guide device 50, the light receiving portion of the reflection characteristic measurement device 1 ⁇ / b> A faces the measurement opening 51 of the guide device 50.
  • a protrusion (not shown) provided on the reflection characteristic measuring device 1A is fitted into the guide groove 52 of the guide device 50, so that the reflection characteristic is measured.
  • the measuring apparatus 1A can be moved linearly along the guide groove 52.
  • the measurement button 2 is pressed while moving the reflection characteristic measuring apparatus 1A.
  • the guide device 50 that can move the reflection characteristic measuring apparatus 1A linearly is illustrated, but the movement path (movement locus) of the reflection characteristic measuring apparatus 1A may be curvilinear.
  • the measurement opening provided in the guide device has a curved shape along the movement path.
  • the guide device 50 by performing the scan measurement using the guide device 50, it is possible to prevent the positional deviation of the reflection characteristic measurement device 1A from the measurement object that occurs when the reflection characteristic measurement device 1A is moved.
  • the reflection characteristic measurement device 1A is mounted on the guide device 50 so that the moving direction of the reflection characteristic measurement device 1A at the time of scan measurement matches the longitudinal direction of the reflection characteristic measurement device 1A. It will be.
  • the moving direction of the reflection characteristic measuring apparatus 1A at the time of scan measurement is perpendicular to the longitudinal direction of the reflection characteristic measuring apparatus 1A.
  • the inclination generated in the reflection characteristic measuring apparatus 1A when the reflection characteristic measuring apparatus 1A is moved can be reduced, the movement operation of the reflection characteristic measuring apparatus 1A during the scan measurement can be stabilized.
  • FIG. 8 is a bottom external view of the alignment apparatus 10A.
  • the alignment apparatus 10A is used to prevent the light receiving unit of the reflection characteristic measuring apparatus 1A from being displaced with respect to the minute area to be measured. Used.
  • the alignment device 10 ⁇ / b> A includes an upper member (first member) 11 that can attach and detach the reflection characteristic measuring device 1 ⁇ / b> A, and a lower member (second member) 12 that supports the upper member 11. It consists of
  • the upper member 11 and the lower member 12 are rotatably connected by a connecting portion (also referred to as a “hinge portion”) 13 on one end side of each other.
  • a connecting portion also referred to as a “hinge portion”
  • the upper member 11 and the lower member 12 are in a closed state (first state) where they overlap each other, and an open state in which one end of each of the upper member 11 and the lower member 12 is connected and the other end is opened ( It is possible to transition between the second state).
  • a biasing member such as a spring is incorporated inside the connecting portion 13 and is always open in a normal state where no force is applied from the outside.
  • the upper member 11 of the alignment apparatus 10A has a shape in which the bottom surface convex portion 7 of the reflection characteristic specifying device 1A is substantially fitted on the one end side, and on the other end side, the reflection characteristic measuring apparatus 1A has a shape. It has a circular opening 15 in which the light receiving part is arranged. Further, the upper member 11 has a fixing member 16 for fixing the reflection characteristic measuring apparatus 1A to the alignment apparatus 10A along the opening 15.
  • the substantially annular fixing member 16 provided along the opening 15 has a plurality of protrusions 17 protruding toward the inside (inward) of the opening 15.
  • the light receiving part of the reflection characteristic measuring apparatus 1A is fitted into the opening 15 when the bottom surface convex portion 7 of the reflection characteristic measuring apparatus 1A is fitted to the one end side. In this state, the reflection characteristic measuring device 1A and the alignment device 10A are fixed by the fixing member 16.
  • the reflection characteristic measuring apparatus 1A (see FIG. 2) has an attachment member 5 for attaching the reflection characteristic measuring apparatus 1A to the alignment apparatus 10A around the light receiving opening 3.
  • the attachment member 5 is provided with a plurality of notches 6, and when the reflection characteristic measuring device 1 ⁇ / b> A is mounted on the alignment device 10 ⁇ / b> A, the plurality of notches 6 are provided on the alignment device 10 ⁇ / b> A.
  • the plurality of protrusions 17 provided on the fixing member 16 are respectively fitted.
  • the fixing member 16 of the alignment apparatus 10A functions as a positioning unit that positions the reflection characteristic measurement apparatus 1A attached to the alignment apparatus 10A.
  • the reflection characteristic measurement apparatus 1A is connected to the alignment apparatus 10A. On the other hand, it is fixed in the vicinity of the opening 15 into which the light receiving portion is fitted.
  • the fixing member 16 that functions as a positioning portion is provided on the other end side of the upper member 11 that is different from the one end side where the connecting portion 13 is present.
  • the fixing member 16 is positioned on the other end side. Will be done. According to this, it becomes possible to improve the positioning accuracy with respect to the measurement object as compared with the case where positioning is performed on one end side where the connecting portion 13 exists. Further, since the periphery of the light receiving opening 3 is positioned by the concentric fixing member 16, the alignment accuracy can be further increased.
  • the positioning mode of the present embodiment is such that, in the upper member 11, when the position of the light receiving unit when the reflection characteristic measuring device 1 ⁇ / b> A is mounted on the upper member 11 is used as the reference position, the reference position is more than the position of the connecting unit 13. It can also be expressed as being positioned by the fixing member 16 at a position close to. Further, the positioning mode of the present embodiment is a position on the light receiving unit side with respect to the intermediate point between the position of the light receiving unit when the reflection characteristic measuring apparatus 1A is mounted on the upper member 11 and the position of the connecting unit 13. It can also be expressed as being positioned by the fixing member 16.
  • the lower member 12 of the alignment apparatus 10A has a measurement opening 14 and a knob portion 19 on the other end side, and is disposed on a base such as a desk.
  • the measurement object is disposed on the base, and the lower member 12 is further disposed on the measurement object.
  • the measurement object is disposed between the base and the lower member 12.
  • the measurement opening 14 defines a minute region to be measured in spot measurement, and is provided at a position facing the position of the light receiving unit of the reflection characteristic measuring apparatus 1A attached to the upper member 11 in the closed state.
  • the position of the measurement object and the alignment device 10 ⁇ / b> A is set so that the measurement object is accommodated in the measurement opening 14 when performing spot measurement. Will be adjusted.
  • the knob portion 19 is used for position adjustment between the measurement object and the alignment device 10A.
  • the knob part 19 By providing the knob part 19 on the lower member 12, the knob part 19 can be operated with the hand opposite to the hand operating the reflection characteristic measuring apparatus 1A while operating the reflection characteristic measuring apparatus 1A.
  • the position adjustment can be easily performed. Further, in the position adjustment using the knob portion 19, the position of the measurement object and the alignment device 10A can be finely adjusted.
  • the lower member 12 is provided with a non-slip member 20 on the ground contact surface with the base.
  • a pressing force acts directly below the connecting portion 13, so that the anti-slip member 20 is located at one end of the lower member 12 where the connecting portion 13 exists, that is, directly below the connecting portion 13. It is preferable to be provided.
  • all of the lower member 12 is configured using a permeable member. According to the configuration using the transmissive member, the measurement object overlapped with the lower member 12 can be visually recognized, so that the position adjustment between the measurement object and the alignment device 10A is facilitated.
  • FIG. 9 is a flowchart showing a procedure when spot measurement is performed.
  • FIG. 10 is a diagram showing the white calibration table 30.
  • the reflection characteristic measuring device 1A when performing spot measurement, in step SP11, the reflection characteristic measuring device 1A is placed on the white calibration table 30 with no accessory attached. As shown in FIG. 10, the white calibration table 30 has a white calibration plate (white plate) 31. The reflection characteristic measuring apparatus 1A is disposed on the white calibration table 30 so that the light receiving part of the reflection characteristic measuring apparatus 1A is aligned with the white plate 31.
  • step SP12 the reflection characteristic of the white calibration plate 31 is measured, and the white calibration of the reflection characteristic measuring apparatus 1A is performed.
  • the reflection characteristic measuring device 1A is mounted on the alignment device 10A.
  • step SP14 the alignment device 10A is placed on the sample, and alignment is performed to align the measurement opening 14 of the alignment device 10A with a portion to be measured in the sample.
  • step SP15 the reflection characteristic measuring device 1A is pressed from above, and the light receiving opening 3 of the reflection characteristic measuring device 1A is brought into close contact with the measurement opening 14.
  • step SP16 the measurement button 2 is pressed in a state where the light receiving opening 3 is in close contact with the measurement opening 14, and the reflection characteristic is measured.
  • step SP17 the measurement data is transmitted from the reflection characteristic measuring apparatus 1A to the PC.
  • step SP18 the measurement result is displayed on the PC.
  • the reflection characteristic measuring device 1A is mounted on the alignment device 10A (step SP13), and the reflection characteristic of the measurement object is determined. Measured (steps SP14 to SP18).
  • FIG. 11 is a flowchart illustrating a procedure for performing scan measurement.
  • step SP21 when performing scan measurement, in step SP21, the reflection characteristic measuring device 1A is mounted on the white calibration table 30 in a state in which no accessory is mounted, as in step SP11.
  • step SP22 as in step SP12, the reflection characteristic of the white calibration plate 31 is measured, and the white calibration of the reflection characteristic measuring apparatus 1A is performed.
  • the guide device 50 is positioned and arranged on the color patch to be measured.
  • step SP24 the reflection characteristic measuring device 1A is mounted on the guide device 50.
  • step SP25 the reflection characteristic is measured while moving the reflection characteristic measuring apparatus 1A.
  • step SP26 measurement data is transmitted from the reflection characteristic measuring apparatus 1A to the PC, as in step SP17.
  • step SP27 the measurement result is displayed on the PC as in step SP18.
  • the reflection characteristic measurement device 1A is mounted on the guide device 50 (step SP24), and the reflection characteristic of the measurement object is measured. (Steps SP25 to SP27).
  • the alignment device 10A irradiates the measurement object with light, and receives the reflected light obtained from the reflection characteristic measurement device 1A having the light receiving unit, and the detachable upper member 11;
  • the lower member 12 that supports the upper member 11, the closed state in which the upper member 11 and the lower member 12 overlap each other, one end of the upper member 11 and the lower member 12 are connected, and the other end is opened.
  • a connecting portion 13 that connects the upper member 11 and the lower member 12 is provided so as to be in an open state.
  • the upper member 11 includes a positioning unit that positions the mounted reflection characteristic measuring device 1A. The positioning unit receives light when the reflection characteristic measuring device is mounted on the upper member 11 in the upper member 11. Positioning is performed at a position closer to the light receiving part than an intermediate position between the part and the connecting part 13.
  • an alignment apparatus 10A it is possible to improve the alignment accuracy with respect to the measurement object as compared with the case where the positioning is performed on the one end side where the connecting portion 13 of the upper member 11 is present. It is possible to accurately measure the measurement object.
  • the alignment apparatus 10B according to the second embodiment is configured such that a reflection characteristic measurement apparatus 1B larger than the reflection characteristic measurement apparatus 1A of the first embodiment can be mounted on the upper member.
  • 12 and 13 are external views of a reflection characteristic measuring apparatus 1B according to the second embodiment of the present invention.
  • FIG. 12 is a top external view of the reflection characteristic measuring apparatus 1B
  • FIG. 13 is a bottom external view of the reflection characteristic measuring apparatus 1B.
  • FIG. 14 is an external view of an alignment apparatus 10B to which the reflection characteristic measuring apparatus 1B can be attached and detached.
  • 15 and 16 are views showing a state in which the reflection characteristic measuring apparatus 1B is mounted on the alignment apparatus 10B.
  • FIG. 16 uses the reflection characteristic measurement apparatus 1B mounted on the alignment apparatus 10B. It is a state diagram when performing spot measurement.
  • the reflection characteristic measuring apparatus 1B includes a display unit 101 that displays information such as a measurement mode on the upper surface of the housing and an operation button 102, and a power switch 103 and a measurement button on the side of the housing. 104.
  • the reflection characteristic measuring apparatus 1 ⁇ / b> B includes a light receiving opening 105 that functions as a light receiving portion, a positioning groove 106 formed in the vicinity of the light receiving opening 105, and a light receiving opening 106.
  • a positioning projection 107 formed at one end away from the positioning groove, and a substantially D-shaped engaging recess 108 formed between the positioning groove 106 and the positioning projection 107.
  • an engagement hole 109 (see FIG. 18) that is partially opened in the lateral direction is provided on a side surface of the engagement recess 108.
  • the reflection characteristic measuring apparatus 1B of the present embodiment Since the reflection characteristic measuring apparatus 1B of the present embodiment has the display unit 101, it is a large casing as compared with the reflection characteristic measuring apparatus 1A of the first embodiment. For this reason, when performing spot measurement using the reflection characteristic measuring apparatus 1B, the reflection characteristic measuring apparatus does not have the opening 15 provided in the alignment apparatus 10A of the first embodiment, that is, in the upper member 111. An alignment apparatus 10B having a shape as shown in FIG. 14 that does not have a portion surrounding the light receiving portion 1B is used.
  • FIG. 15 shows an open state when the reflection characteristic measuring device 1B is attached to the alignment device 10B. Since the alignment device 10B does not have the opening 15 and does not have a member constituting the alignment device 10B around the light receiving portion, the alignment device 10B can be used to surround the light receiving portion. Visibility can be improved.
  • the reflection characteristic measuring apparatus 1B When actually measuring the reflection characteristic, the reflection characteristic measuring apparatus 1B is pressed from the upper part by the user, and is changed to the closed state shown in FIG. In the closed state, the measurement button 104 provided on the side surface of the reflection characteristic measuring apparatus 1B is pressed, and spot measurement is performed.
  • FIG. 17 is a bottom external view of the alignment apparatus 10B.
  • FIG. 18 is a schematic diagram showing a state in which a part of the engaging member 115 enters the engaging hole 109 and the reflection characteristic measuring device 1B and the alignment device 10B are engaged.
  • the alignment device 10 ⁇ / b> B includes an upper member (first member) 111 to which the reflection characteristic measuring device 1 ⁇ / b> B can be attached and detached, and a lower member (second member) 112 that supports the upper member 111. It consists of
  • the upper member 111 and the lower member 112 are rotatably connected by a connecting portion (also referred to as a “hinge portion”) 113 on one end side of each other.
  • a connecting portion also referred to as a “hinge portion”
  • the upper member 111 and the lower member 112 are in a closed state (first state) where they overlap each other, and an open state in which one end of the upper member 111 and the lower member 112 is connected and the other end is opened ( It is possible to transition between the second state).
  • an urging member such as a spring is incorporated inside the connecting portion 113 and is always open in a normal state where no force is applied from the outside.
  • the upper member 111 of the alignment device 10B has a substantially D-shaped engagement member 115 that engages the reflection characteristic measurement device 1B near the center.
  • the engaging member 115 When the reflection characteristic measuring apparatus 1B is mounted on the alignment apparatus 10B, the engaging member 115 has a substantially D-shaped linear portion that coincides with the engaging recess 108 (see FIG. 13) of the reflection characteristic measuring apparatus 1B. Fit in the state. Then, when the lever 118 connected to the engagement member 115 is rotated clockwise in FIG. 17 with the engagement member 115 fitted in the engagement recess 108 of the reflection characteristic measuring apparatus 1B, the engagement member 115 rotates. By rotating around the shaft 110 and a part of the engagement member 115 enters the engagement hole 109 on the side surface of the engagement recess 108 (see FIG. 18), the reflection characteristic measuring device 1B and the alignment device 10B are connected. Engaged.
  • the upper member 111 has a positioning projection 116 and a positioning hole 117.
  • the positioning protrusion 116 and the positioning hole 117 function as a positioning unit that positions the reflection characteristic measuring apparatus 1B.
  • the positioning protrusion 116 is fitted into the positioning groove 106 of the reflection characteristic measuring apparatus 1B, and the positioning hole 117. Is fitted with the positioning projection 107 of the reflection characteristic measuring apparatus 1B.
  • the positioning protrusion 116 and the positioning hole 117 are provided at a predetermined distance (interval) from each other in the upper member 111. That is, the positioning hole 117 is provided in the vicinity of the position where the reflection characteristic measuring device 1B and the upper member 111 are engaged, and the positioning groove 106 into which the positioning protrusion 116 is fitted is received by the reflection characteristic measuring device 1B. It is provided in the vicinity of the part 105.
  • the reflection characteristic measuring apparatus 1B When the positioning protrusion 116 is fitted in the positioning groove 106 of the reflection characteristic measuring apparatus 1B and the positioning hole 117 is fitted in the positioning protrusion 107 of the reflection characteristic measuring apparatus 1B, the reflection characteristic measuring apparatus 1B is positioned. It will be positioned with respect to the alignment apparatus 10B.
  • the positioning protrusion 116 that functions as a positioning portion in the alignment device 10B is provided on the other end side of the upper member 111 that is different from the one end side where the coupling portion 113 exists.
  • the positioning is also performed on the other end side. According to this, it is possible to improve the alignment accuracy with respect to the measurement object as compared with the case where the positioning is performed only on one end side where the connecting portion 113 exists. That is, the positioning accuracy can be increased by positioning both the vicinity of the position where the upper member 111 and the reflection characteristic measuring apparatus 1B are fixed and the vicinity of the light receiving unit 105.
  • the positioning mode of the present embodiment is such that, in the upper member 111, when the position of the light receiving unit when the reflection characteristic measuring device 1B is mounted on the upper member 111 is used as the reference position, the reference position is more than the position of the connecting unit 113. It can also be expressed as being positioned by the positioning unit at a position close to. Further, the positioning mode of the present embodiment is a position on the light receiving unit side with respect to the intermediate point between the position of the light receiving unit when the reflection characteristic measuring apparatus 1B is mounted on the upper member 111 and the position of the connecting unit 113. It can also be expressed as being positioned by the positioning unit.
  • the positioning protrusion 116 and the positioning hole 117 are also referred to as positioning members, and any of the protrusion (convex portion) and the hole (concave portion) may be selected for the positioning member.
  • the reflection characteristic measuring apparatus 1B is provided with a groove (hole) corresponding to the projection.
  • the reflection characteristic measuring apparatus 1B A projection corresponding to the hole is provided.
  • the lower member 112 of the alignment apparatus 10B has a measurement opening 114 on the other end side, and is disposed on a base such as a desk.
  • the measurement opening 114 defines a minute region to be measured for spot measurement, and is provided at a position facing the position of the light receiving unit of the reflection characteristic measuring apparatus 1B attached to the upper member 111 in the closed state.
  • spot measurement is performed on an object that is contained in the measurement opening 114
  • the positions of the measurement object and the alignment device 10A are adjusted so that the measurement object is contained in the measurement opening 114. Will be adjusted.
  • an anti-slip member 119 is provided on the ground contact surface with the base.
  • a pressing force acts directly below the connecting portion 113, so that the anti-slip member 119 is located at one end of the lower member 112 where the connecting portion 113 exists, that is, directly below the connecting portion 113. It is preferable to be provided.
  • a lever 118 connected to the engaging member 115 is provided on the grounding surface side of the lower member 112. By rotating the lever 118, it is possible to select an engaged state in which the reflection characteristic measuring device 1B and the alignment device 10B are engaged and a released state of the engaged state.
  • the peripheral portion of the measurement opening 114 is preferably configured using a permeable member. According to the configuration using the permeable member, the measurement object overlapped with the lower member 112 can be visually recognized, so that the position adjustment between the measurement object and the alignment device 10B becomes easy.
  • the alignment device 10B includes the upper member 111 that can attach and detach the reflection characteristic measurement device 1B having the light receiving unit that receives the reflected light obtained by irradiating the measurement object, and the upper member. 111, a closed state in which the upper member 111 and the lower member 112 overlap each other, and an open state in which one end of each of the upper member 111 and the lower member 112 is connected and the other end is opened.
  • the connecting part 113 that connects the upper member 111 and the lower member 112 is provided.
  • the upper member 111 includes a positioning unit that positions the mounted reflection characteristic measuring apparatus 1B. The positioning unit receives light when the reflection characteristic measuring apparatus is mounted on the upper member 111 in the upper member 111. Positioning is performed at a position closer to the light receiving unit than an intermediate position between the coupling part and the coupling part 113.
  • an alignment apparatus 10B it is possible to improve the alignment accuracy with respect to the measurement object as compared with the case where positioning is performed on one end side of the upper member 111 where the connecting portion 113 exists. It becomes possible to accurately measure a desired measurement object.
  • FIG. 19 is a diagram showing a state in which the illuminance attachment 70 is attached to the reflection characteristic measuring apparatus 1A.
  • an illuminance attachment 70 can be attached to the reflection characteristic measuring apparatus 1A as an accessory.
  • the illuminance attachment 70 is an accessory used for measuring the characteristics of ambient light (environmental light), and includes a diffusion plate 71 and a holder 72.
  • a protrusion (not shown) similar to the protrusion 17 provided on the fixing member 16 of the alignment apparatus 10A is provided inside the holder 72, and the illuminance attachment 70 is attached to the reflection characteristic measuring apparatus 1A. At this time, the protrusion is fitted into a notch 6 provided in the attachment member 5. Then, the illuminance attachment 70 can be attached to the reflection characteristic measuring apparatus 1A by rotating the holder in a state where the protrusion and the notch 6 are fitted.
  • the attachment mechanism for the alignment device 10A in the reflection characteristic measuring apparatus 1A also functions as a bayonet-type attachment mechanism, it can be shared with the attachment mechanism of other accessory parts. As described above, by using a common attachment mechanism for each accessory part, the number of parts can be reduced as compared with the case where a plurality of attachment mechanisms are provided, and the external shape of the reflection characteristic measuring apparatus 1A is simplified. can do.
  • FIG. 20 is an operation flowchart when illuminance measurement is performed.
  • step SP31 the reflection characteristic measurement device 1A is mounted on the white calibration table 30 with no accessory attached.
  • step SP32 the reflection characteristic of the white calibration plate 31 is measured, and the white calibration of the reflection characteristic measuring apparatus 1A is performed.
  • the illuminance attachment 70 is attached to the reflection characteristic measuring apparatus 1A.
  • step SP34 the reflection characteristic measuring apparatus 1A is held upward by, for example, a measurer.
  • step SP35 the measurement button 2 is pressed and illuminance measurement is performed.
  • step SP36 measurement data is transmitted from the reflection characteristic measuring apparatus 1A to the PC.
  • step SP37 the measurement result is displayed on the PC.
  • the illuminance attachment 70 is attached to the reflection characteristic measuring apparatus 1A (step SP33), and illuminance measurement is performed (step SP34). To SP37).

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Abstract

The alignment apparatus of the present invention may have a reflection characteristic measurement apparatus attached thereto or detached therefrom, said reflection characteristic measurement apparatus comprising a light-receiving part for receiving reflected light obtained by irradiating a measurement target. The alignment apparatus comprises: an upper-side member (11) which may have the reflection characteristic measurement apparatus attached thereto or detached therefrom; a lower-side member (12) which supports the upper-side member (11); and a connecting part (13) for connecting the upper-side member (11) with the lower-side member (12) in order to achieve a closed state in which the upper-side member (11) and the lower-side member (12) overlap each other, and an open state in which one end of the upper-side member (11) and one end of the lower-side member (12) are connected with each other and the other ends are open. The upper-side member (11) comprises a positioning part for positioning the attached reflection characteristic measurement apparatus, the positioning part carrying out the positioning in a position closer to the light-receiving part than to an intermediate position between the light-receiving part and the connecting part (13) of the reflection characteristic measurement apparatus (1A) when the reflection characteristic measurement apparatus (1A) is attached to the upper-side member (11).

Description

位置合わせ装置および反射特性測定システムAlignment apparatus and reflection characteristic measurement system
　本発明は、反射特性測定装置を装着可能な測定対象の位置合わせ装置の技術に関する。 The present invention relates to a technique of an alignment apparatus as a measurement object to which a reflection characteristic measurement apparatus can be attached.
　測定対象物に光を照射して得られる反射光を測定し、測定対象物の反射特性を測定する反射特性測定装置が知られている。 A reflection characteristic measuring device that measures reflected light obtained by irradiating light onto a measurement object and measures the reflection characteristics of the measurement object is known.
　このような反射特性測定装置を用いては、例えば、反射特性測定装置を静止させて、微小領域における測定対象物の反射特性を測定するスポット測定と、反射特性測定装置を移動させつつ、測定対象物の反射特性を連続的に測定するスキャン測定とを行うことができる。 By using such a reflection characteristic measuring apparatus, for example, the reflection characteristic measuring apparatus is stationary, and the measurement object is measured while moving the reflection characteristic measuring apparatus while performing the spot measurement for measuring the reflection characteristic of the measurement object in a minute region. It is possible to perform scan measurement that continuously measures the reflection characteristics of an object.
　一般的に、スポット測定を行う際には、測定対象となる微小領域に対して、反射特性測定装置の位置ずれをなくすために、測定対象に位置合わせをする装置（ターゲットマスク）が用いられる。例えば、特許文献１に記載の反射特性測定装置は、測定装置本体に対し、位置合わせ装置が、軸回転可能に一体的に構成された形状となっており、位置合わせ装置を用いて微小領域を測定対象とした、スポット測定を行うことができる。 Generally, when spot measurement is performed, an apparatus (target mask) that aligns with a measurement target is used to eliminate a positional shift of the reflection characteristic measurement apparatus with respect to a minute region to be measured. For example, the reflection characteristic measuring device described in Patent Document 1 has a shape in which the alignment device is integrally configured to be rotatable with respect to the measurement device main body, and a minute region is formed using the alignment device. Spot measurement can be performed as a measurement target.
　一方、スキャン測定では、反射特性測定装置を移動させる際に生じる測定対象物に対する反射特性測定装置の位置ずれを防ぐため、反射特性測定装置の移動を案内するガイド装置が用いられる。すなわち、スキャン測定の際には、反射特性測定装置をガイド装置上に載せて移動させることにより、反射特性測定装置の移動によって生じる測定の際の反射特性測定装置の位置ずれを防止することができる（例えば、特許文献２）。 On the other hand, in the scan measurement, a guide device that guides the movement of the reflection characteristic measurement device is used in order to prevent the displacement of the reflection characteristic measurement device with respect to the measurement object that occurs when the reflection characteristic measurement device is moved. In other words, during the scan measurement, the reflection characteristic measuring device can be placed on the guide device and moved to prevent the reflection characteristic measuring device from being displaced due to the movement of the reflection characteristic measuring device. (For example, patent document 2).
　しかし、特許文献１に記載の反射特性測定装置は、位置合わせ装置と分離不可能に構成されているため、当該反射特性測定装置をスキャン測定するためのガイド装置に載せた場合、反射特性測定装置とガイド装置との間に位置合わせ装置が介在することになり、当該位置合わせ装置がスキャン測定の障害となり得る。そこで、スポット測定を行う際に使用する位置合わせ装置は、スキャン測定時には取り外せることが望ましい。 However, since the reflection characteristic measuring device described in Patent Document 1 is configured so as not to be separated from the alignment device, when the reflection characteristic measuring device is placed on a guide device for scanning measurement, the reflection characteristic measuring device An alignment device is interposed between the guide device and the guide device, and the alignment device can be an obstacle to scan measurement. Therefore, it is desirable that the alignment device used for spot measurement can be removed during scan measurement.
　従来においても、反射特性測定装置を位置合わせ装置から取り外し可能に構成された装置が知られており、例えば、特許文献３には、測定装置本体の後面下部を中心として回動可能に取り付けることができる測定位置指示板が記載されている。 Conventionally, there is known a device in which the reflection characteristic measuring device is configured to be removable from the alignment device. For example, in Patent Document 3, it is attached to be rotatable around the lower rear surface of the measuring device main body. Possible measurement position indicator plates are described.
米国特許第５６９１８１７号明細書US Pat. No. 5,691,817 米国特許第７４６６４１６号明細書US Pat. No. 7,466,416 特開昭６３－３０５２２５JP-A-63-305225
　しかしながら、従来の着脱可能な位置合わせ装置では、反射特性測定装置において反射光を受光する受光部から離れた位置において反射特性測定装置が位置決めされているため、測定対象となる微小領域と受光部との間には、測定の際に位置ずれが生じていた。 However, in the conventional detachable alignment apparatus, since the reflection characteristic measuring device is positioned at a position away from the light receiving unit that receives the reflected light in the reflection characteristic measuring device, the micro area to be measured and the light receiving unit In the meantime, a positional deviation occurred during the measurement.
　特に、スキャン測定との併用に適するマウス形状の測定装置および横型の測定装置では、位置合わせ装置に取り付けたときに受光部から連結部までの距離が長くなるため、さらに位置ずれの影響が大きくなるという問題がある。 In particular, in mouse-shaped measuring devices and horizontal measuring devices that are suitable for combined use with scan measurement, the distance from the light receiving unit to the connecting unit becomes longer when attached to the alignment device, which further increases the influence of misalignment. There is a problem.
　そこで、本発明は、反射特性測定装置に着脱可能な位置合わせ装置を用いて測定を行う場合において、取り付けが容易で、測定対象物に対する位置合わせ精度を向上させることが可能な技術を提供することを目的とする。 Therefore, the present invention provides a technique that can be easily attached and can improve the alignment accuracy with respect to the measurement object when performing measurement using an alignment apparatus that can be attached to and detached from the reflection characteristic measurement apparatus. With the goal.
　上記の課題を解決するため、請求項１の発明は、測定対象物に光を照射して得られる反射光を受光する受光部を有する反射特性測定装置と組み合わせて用いられ、測定対象となる微小領域に対して前記反射特性測定装置の受光部の位置を合わせるための位置合わせ装置であって、前記反射特性測定装置を着脱可能な第１部材と、前記第１部材を支持する第２部材と、前記第１部材と前記第２部材とが互いに重なった第１状態と、前記第１部材および前記第２部材の互いの一端が連結され、他端が開いた第２状態とを取り得るように、前記第１部材と前記第２部材とを連結する連結部とを備え、前記第１部材は、装着された前記反射特性測定装置の位置決めを行う位置決め部を有し、前記位置決め部は、前記反射特性測定装置が前記第１部材に装着されたときに、前記受光部と前記連結部との中間位置よりも前記受光部に近い位置となるように前記第１部材に配置される。 In order to solve the above-described problems, the invention of claim 1 is used in combination with a reflection characteristic measuring apparatus having a light receiving unit that receives reflected light obtained by irradiating light to a measurement object, and is a minute object to be measured. An alignment device for aligning the position of the light receiving unit of the reflection characteristic measurement device with respect to a region, a first member that can attach and detach the reflection property measurement device, and a second member that supports the first member; A first state in which the first member and the second member overlap each other and a second state in which one end of the first member and the second member is connected and the other end is open can be taken. The first member and the second member are connected to each other, and the first member has a positioning part for positioning the mounted reflection characteristic measuring device, and the positioning part includes: The reflection characteristic measuring device is the first member. When worn, it is positioned on the first member so as to be located closer to the light receiving portion than the intermediate position between the connecting portion and the light receiving portion.
　また、請求項２の発明は、請求項１の発明に係る位置合わせ装置において、前記反射特性測定装置の装着状態において、前記第１部材は、前記一端とは反対の前記他端側において、前記反射特性測定装置の前記受光部を配置させる開口を有し、前記第１部材は、前記反射特性測定装置を前記第１部材に固定するための固定用部材を前記位置決め部として、前記開口に沿って有している。 According to a second aspect of the present invention, in the alignment apparatus according to the first aspect of the invention, in the mounted state of the reflection characteristic measuring device, the first member is located on the other end side opposite to the one end. An opening for arranging the light receiving portion of the reflection characteristic measuring device is provided, and the first member is formed along the opening with the fixing member for fixing the reflection characteristic measuring device to the first member as the positioning portion. Have.
　また、請求項３の発明は、請求項２の発明に係る位置合わせ装置において、前記固定用部材は、前記開口の内側に向けて突出した突起部を有し、前記反射特性測定装置は、当該反射特性測定装置の前記受光部の周囲に設けられた切り欠き部と前記突起部とを嵌合させて、前記第１部材に装着される。 According to a third aspect of the present invention, in the alignment apparatus according to the second aspect of the present invention, the fixing member has a protrusion protruding toward the inside of the opening, and the reflection characteristic measuring device includes The notch part provided around the light receiving part of the reflection characteristic measuring apparatus and the projection part are fitted to each other and attached to the first member.
　また、請求項４の発明は、請求項１の発明に係る位置合わせ装置において、前記反射特性測定装置の装着状態において、前記第１部材は、前記一端とは反対の前記他端側において、前記反射特性測定装置の前記受光部を配置させ、前記第１部材は、所定間隔を有して設けられた２つの位置決め用部材を前記位置決め部として有し、前記２つの位置決め用部材のうち少なくとも一方は、前記反射特性測定装置が前記第１部材に装着されたときに、前記受光部と前記連結部との中間位置よりも前記受光部に近い位置に設けられる。 According to a fourth aspect of the present invention, in the alignment apparatus according to the first aspect of the invention, in the mounted state of the reflection characteristic measuring device, the first member is located on the other end side opposite to the one end. The light receiving portion of the reflection characteristic measuring apparatus is disposed, and the first member has two positioning members provided at a predetermined interval as the positioning portion, and at least one of the two positioning members. Is provided at a position closer to the light receiving portion than an intermediate position between the light receiving portion and the connecting portion when the reflection characteristic measuring device is attached to the first member.
　また、請求項５の発明は、請求項４の発明に係る位置合わせ装置において、前記位置決め用部材は、前記第１部材に設けられた突起および穴のいずれかである。 Further, the invention according to claim 5 is the alignment apparatus according to claim 4, wherein the positioning member is any one of a protrusion and a hole provided in the first member.
　また、請求項６の発明は、請求項１から請求項５のいずれかの発明に係る位置合わせ装置において、前記第２部材は、前記第１部材と対向する面とは反対の面において、滑り止め部材を有し、当該滑り止め部材は、前記第２部材の前記一端側に設けられる。 According to a sixth aspect of the present invention, in the alignment apparatus according to any one of the first to fifth aspects, the second member slips on a surface opposite to the surface facing the first member. The anti-slip member is provided on the one end side of the second member.
　また、請求項７の発明は、反射特性測定システムであって、測定対象物に光を照射して得られる反射光を受光する受光部を有する反射特性測定装置と、当該反射特性特定装置を装着可能な位置合わせ装置とを備え、前記位置合わせ装置は、前記反射特性測定装置を着脱可能な第１部材と、前記第１部材を支持する第２部材と、前記第１部材と前記第２部材とが互いに重なった第１状態と、前記第１部材および前記第２部材の互いの一端が連結され、他端が開いた第２状態とを取り得るように、前記第１部材と前記第２部材とを連結する連結部とを有し、前記第１部材は、装着された前記反射特性測定装置の位置決めを行う位置決め部を有し、前記位置決め部は、前記反射特性測定装置が前記第１部材に装着されたときに、前記受光部と前記連結部との中間位置よりも前記受光部に近い位置となるように前記第１部材に配置される。 Further, the invention of claim 7 is a reflection characteristic measurement system, which is equipped with a reflection characteristic measurement device having a light receiving part for receiving reflected light obtained by irradiating light to a measurement object, and the reflection characteristic identification device. An alignment device that can be attached to the reflection characteristic measuring device, the second member that supports the first member, the first member, and the second member. And the first member and the second member so that one end of each of the first member and the second member is connected and the other end is open. A connecting portion that connects the member, the first member has a positioning portion that positions the mounted reflection characteristic measuring device, and the positioning portion includes the first reflection characteristic measuring device. When mounted on a member, the light receiving unit and the Than the intermediate position between the imaging unit is disposed on the first member so as to be located closer to the light receiving portion.
　また、請求項８の発明は、請求項７の発明に係る反射特性測定システムにおいて、前記反射特性測定装置を移動可能にガイドするガイド装置をさらに備え、前記位置合わせ装置を前記反射特性測定装置に装着して行う測定と、前記ガイド装置を前記反射特性測定装置に装着して行う測定とが可能である。 The invention according to claim 8 is the reflection characteristic measurement system according to claim 7, further comprising a guide device that guides the reflection characteristic measurement device so as to be movable, and the alignment device is included in the reflection characteristic measurement device. It is possible to perform measurement performed by mounting and measurement performed by mounting the guide device on the reflection characteristic measuring device.
　また、請求項９の発明は、請求項８の発明に係る反射特性測定システムにおいて、前記ガイド装置は、前記位置合わせ装置を未装着の前記反射特性測定装置が前記ガイド装置に装着された状態で、前記受光部と対向する測定開口を有する。 The invention according to claim 9 is the reflection characteristic measurement system according to the invention according to claim 8, wherein the guide device is in a state in which the reflection characteristic measurement device without the alignment device is attached to the guide device. And a measurement aperture facing the light receiving portion.
　本発明によれば、測定対象物に対して、反射特性測定装置の受光部を精度良く位置合わせすることが可能になり、ひいては、所望の測定対象物を精度良く測定することが可能になる。 According to the present invention, it is possible to accurately position the light receiving unit of the reflection characteristic measuring device with respect to the measurement object, and thus it is possible to accurately measure the desired measurement object.
本発明の第１実施形態に係る反射特性測定装置の上面外観図である。1 is a top external view of a reflection characteristic measuring apparatus according to a first embodiment of the present invention. 本発明の第１実施形態に係る反射特性測定装置の下面外観図である。1 is a bottom external view of a reflection characteristic measuring apparatus according to a first embodiment of the present invention. 反射特性測定装置を含むシステム図である。It is a system diagram containing a reflection characteristic measuring apparatus. 本発明の第１実施形態に係る反射特性測定装置を着脱可能な位置合わせ装置の外観図である。It is an external view of the alignment apparatus which can attach or detach the reflection characteristic measuring apparatus which concerns on 1st Embodiment of this invention. 反射特性測定装置を位置合わせ装置に装着した状態を示す図である。It is a figure which shows the state which mounted | wore the position alignment apparatus with the reflection characteristic measuring apparatus. 反射特性測定装置を位置合わせ装置に装着した状態を示す図である。It is a figure which shows the state which mounted | wore the position alignment apparatus with the reflection characteristic measuring apparatus. 反射特性測定装置をガイド装置に装着した状態を示す図である。It is a figure which shows the state which mounted | wore the guide apparatus with the reflection characteristic measuring apparatus. 位置合わせ装置の下面外観図である。It is a lower surface external view of the alignment apparatus. スポット測定を行う場合の手順を示すフローチャートである。It is a flowchart which shows the procedure in the case of performing spot measurement. 白色校正台を示す図である。It is a figure which shows a white calibration stand. スキャン測定を行う場合の手順を示すフローチャートである。It is a flowchart which shows the procedure in the case of performing a scan measurement. 本発明の第２実施形態に係る反射特性測定装置の上面外観図である。It is an upper surface external view of the reflection characteristic measuring apparatus which concerns on 2nd Embodiment of this invention. 本発明の第２実施形態に係る反射特性測定装置の下面外観図である。It is a lower surface external view of the reflection characteristic measuring apparatus which concerns on 2nd Embodiment of this invention. 本発明の第２実施形態に係る反射特性測定装置を着脱可能な位置合わせ装置の外観図である。It is an external view of the alignment apparatus which can attach or detach the reflection characteristic measuring apparatus which concerns on 2nd Embodiment of this invention. 反射特性測定装置を位置合わせ装置に装着した状態を示す図である。It is a figure which shows the state which mounted | wore the position alignment apparatus with the reflection characteristic measuring apparatus. 反射特性測定装置を位置合わせ装置に装着した状態を示す図である。It is a figure which shows the state which mounted | wore the position alignment apparatus with the reflection characteristic measuring apparatus. 位置合わせ装置の下面外観図である。It is a lower surface external view of the alignment apparatus. 反射特性測定装置を位置合わせ装置に装着した際の、係合部材の状態を示す模式図である。It is a schematic diagram which shows the state of an engaging member at the time of mounting | wearing a position alignment apparatus with a reflection characteristic measuring apparatus. 本発明の第１実施形態に係る反射特性測定装置に照度アタッチメントを取り付けた状態を示す図である。It is a figure which shows the state which attached the illumination intensity attachment to the reflection characteristic measuring apparatus which concerns on 1st Embodiment of this invention. 照度測定を行う場合の手順を示すフローチャートである。It is a flowchart which shows the procedure in the case of performing illumination intensity measurement.
　以下、本発明の各実施形態について図面を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　＜１．第１実施形態＞
　　［概要］
　図１および図２は、本発明の第１実施形態に係る反射特性測定装置１Ａの外観図である。ここで、図１は、反射特性測定装置１Ａの上面外観図であり、図２は、反射特性測定装置１Ａの下面外観図である。 <1. First Embodiment>
[Overview]
1 and 2 are external views of a reflection characteristic measuring apparatus 1A according to the first embodiment of the present invention. Here, FIG. 1 is a top external view of the reflection characteristic measuring apparatus 1A, and FIG. 2 is a bottom external view of the reflection characteristic measuring apparatus 1A.
　図１および図２に示される反射特性測定装置１Ａは、当該反射特性測定装置１Ａ本体の内部から測定対象物（「被測定物」または単に「試料」とも称する）に光を照射して得られる反射光を受光し、当該反射光に基づいて、測定対象物の反射特性を測定する機能を有している。なお、反射特性測定装置１Ａとしては、例えば、分光測色計、色彩計、光沢計、および濃度計等が含まれる。 The reflection characteristic measuring apparatus 1A shown in FIGS. 1 and 2 is obtained by irradiating a measurement object (also referred to as “measurement object” or simply “sample”) from the inside of the reflection characteristic measurement apparatus 1A main body. It has a function of receiving reflected light and measuring the reflection characteristics of the measurement object based on the reflected light. The reflection characteristic measuring apparatus 1A includes, for example, a spectrocolorimeter, a color meter, a gloss meter, a densitometer, and the like.
　特定対象物への光の照射および反射光の受光は、反射特性測定装置１Ａの下面側（図２参照）に設けられた受光開口３を介して行われる。すなわち、測定対象物において反射した反射光は、受光開口３から反射特性測定装置１Ａの内部に導かれ、反射特性測定装置１Ａにおいて反射特性の測定に用いられる。なお、反射光は、受光開口３から反射特性測定装置１Ａの内部に導かれるため、受光開口３は、反射特性測定装置１Ａにおける「受光部」とも称される。 The light irradiation to the specific object and the reception of the reflected light are performed through the light receiving opening 3 provided on the lower surface side (see FIG. 2) of the reflection characteristic measuring apparatus 1A. That is, the reflected light reflected from the measurement object is guided from the light receiving opening 3 to the inside of the reflection characteristic measuring apparatus 1A, and is used for measuring the reflection characteristic in the reflection characteristic measuring apparatus 1A. Since the reflected light is guided from the light receiving opening 3 to the inside of the reflection characteristic measuring apparatus 1A, the light receiving opening 3 is also referred to as a “light receiving part” in the reflection characteristic measuring apparatus 1A.
　また、このような反射特性測定装置１Ａには、種々の付属部品（付属装置）を取り付けることができる。図３は、反射特性測定装置１Ａを含むシステム図である。 Moreover, various accessory parts (attached devices) can be attached to the reflection characteristic measuring apparatus 1A. FIG. 3 is a system diagram including the reflection characteristic measuring apparatus 1A.
　具体的には、図３に示されるように、反射特性測定装置１Ａには、位置合わせ装置１０Ａ、白色校正台３０、スキャン用ガイド装置（単に「ガイド装置」とも称する）５０、および照度測定用アタッチメント（単に「照度アタッチメント」とも称する）７０を取り付けて様々な態様で測定を行うことができる。そして、反射特性測定装置１Ａによって取得された測定情報は、通信線路を介して、パーソナルコンピュータ（ＰＣ）２００へと送信される。なお、付属部品を装着した反射特性測定装置１Ａは、反射特性測定システムとも称される。 Specifically, as shown in FIG. 3, the reflection characteristic measurement apparatus 1A includes an alignment apparatus 10A, a white calibration table 30, a scanning guide apparatus (also simply referred to as “guide apparatus”) 50, and an illuminance measurement apparatus. An attachment (simply referred to as “illuminance attachment”) 70 can be attached to perform measurement in various modes. Then, the measurement information acquired by the reflection characteristic measuring apparatus 1A is transmitted to the personal computer (PC) 200 via the communication line. The reflection characteristic measuring apparatus 1A equipped with the accessory parts is also referred to as a reflection characteristic measuring system.
　以下では、位置合わせ装置１０Ａを用いた場合の測定手法と、ガイド装置５０を用いた場合の測定手法とについて説明する。 Hereinafter, a measurement method using the alignment device 10A and a measurement method using the guide device 50 will be described.
　位置合わせ装置１０Ａを用いた場合、すなわち位置合わせ装置１０Ａに反射特性測定装置１Ａを装着した場合は、反射特性測定装置１Ａを静止させて、微小領域における測定対象物の反射特性を測定するスポット測定を行うことができる。図４は、反射特性測定装置１Ａを着脱可能な位置合わせ装置１０Ａの外観図である。また、図５および図６は、反射特性測定装置１Ａを位置合わせ装置１０Ａに装着した状態を示す図であり、特に図６は、位置合わせ装置１０Ａに装着された反射特性測定装置１Ａを用いて、スポット測定を行っているときの状態図を示している。 When the alignment apparatus 10A is used, that is, when the reflection characteristic measurement apparatus 1A is mounted on the alignment apparatus 10A, the reflection characteristic measurement apparatus 1A is stopped and spot measurement is performed to measure the reflection characteristic of the measurement object in a minute region. It can be performed. FIG. 4 is an external view of an alignment apparatus 10A to which the reflection characteristic measuring apparatus 1A can be attached and detached. 5 and 6 are views showing a state in which the reflection characteristic measuring apparatus 1A is mounted on the alignment apparatus 10A. In particular, FIG. 6 uses the reflection characteristic measurement apparatus 1A mounted on the alignment apparatus 10A. FIG. 5 shows a state diagram when spot measurement is performed.
　本実施形態の位置合わせ装置１０Ａとしては、図４に示されるような形状の位置合わせ装置１０Ａが採用される。当該位置合わせ装置１０Ａに、反射特性測定装置１Ａが開いた状態（「開状態」とも称する）で装着されると、図５に示される状態となる。 As the alignment apparatus 10A of the present embodiment, an alignment apparatus 10A having a shape as shown in FIG. 4 is employed. When the reflection characteristic measurement device 1A is attached to the alignment device 10A in an open state (also referred to as “open state”), the state shown in FIG. 5 is obtained.
　実際に反射特性を測定する際には、使用者によって反射特性測定装置１Ａが上部から押さえつけられて、図６に示される閉じた状態（「閉状態」とも称する）へと遷移させられる。そして、当該閉状態において反射特性測定装置１Ａの側面に設けられた測定ボタン２が押下され、スポット測定が実行される。 When actually measuring the reflection characteristics, the reflection characteristic measuring apparatus 1A is pressed down from above by the user, and is changed to the closed state (also referred to as “closed state”) shown in FIG. Then, in the closed state, the measurement button 2 provided on the side surface of the reflection characteristic measuring apparatus 1A is pressed, and spot measurement is executed.
　このように位置合わせ装置１０Ａを用いてスポット測定を行うことによれば、測定対象となる微小領域に対する、反射特性測定装置の受光部の位置ずれを防止することができる。 By performing spot measurement using the alignment apparatus 10A in this way, it is possible to prevent the light receiving unit of the reflection characteristic measurement apparatus from being displaced with respect to the minute region to be measured.
　一方、ガイド装置５０を用いた場合、すなわち位置合わせ装置１０Ａを未装着の反射特性測定装置１Ａをガイド装置５０に装着した場合は、反射特性測定装置１Ａを移動させつつ、移動経路に沿って配置された測定対象物としてのカラーパッチの反射特性を連続的に測定するスキャン測定を行うことができる。図７は、反射特性測定装置１Ａをガイド装置５０に装着した状態を示す図である。 On the other hand, when the guide device 50 is used, that is, when the reflection characteristic measurement device 1A not attached with the alignment device 10A is attached to the guide device 50, the reflection property measurement device 1A is moved and arranged along the movement path. It is possible to perform scan measurement that continuously measures the reflection characteristics of the color patch as the measured object. FIG. 7 is a diagram illustrating a state where the reflection characteristic measuring apparatus 1 </ b> A is mounted on the guide apparatus 50.
　ガイド装置５０としては、例えば、図７に示されるような直線状の測定開口５１を有するガイド装置５０が採用される。反射特性測定装置１Ａをガイド装置５０に装着すると、反射特性測定装置１Ａの受光部は、ガイド装置５０の測定開口５１に対向することになる。また、反射特性測定装置１Ａをガイド装置５０に装着すると、反射特性測定装置１Ａに設けられた突部（不図示）がガイド装置５０のガイド溝５２に嵌合されることになるので、反射特性測定装置１Ａをガイド溝５２に沿って直線的に移動させることが可能になる。実際にスキャン測定を行う際には、反射特性測定装置１Ａを移動させつつ、測定ボタン２が押下される。なお、ここでは、反射特性測定装置１Ａを直線的に移動可能なガイド装置５０を例示したが、反射特性測定装置１Ａの移動経路（移動軌跡）は曲線的であってもよい。この場合、ガイド装置に設けられる測定開口は、移動経路に沿った曲線状のものとなる。 As the guide device 50, for example, a guide device 50 having a linear measurement opening 51 as shown in FIG. 7 is employed. When the reflection characteristic measurement device 1 </ b> A is mounted on the guide device 50, the light receiving portion of the reflection characteristic measurement device 1 </ b> A faces the measurement opening 51 of the guide device 50. Further, when the reflection characteristic measuring device 1A is mounted on the guide device 50, a protrusion (not shown) provided on the reflection characteristic measuring device 1A is fitted into the guide groove 52 of the guide device 50, so that the reflection characteristic is measured. The measuring apparatus 1A can be moved linearly along the guide groove 52. When actually performing the scan measurement, the measurement button 2 is pressed while moving the reflection characteristic measuring apparatus 1A. Here, the guide device 50 that can move the reflection characteristic measuring apparatus 1A linearly is illustrated, but the movement path (movement locus) of the reflection characteristic measuring apparatus 1A may be curvilinear. In this case, the measurement opening provided in the guide device has a curved shape along the movement path.
　このように、ガイド装置５０を用いてスキャン測定を行うことによれば、反射特性測定装置１Ａを移動させる際に生じる測定対象物に対する反射特性測定装置１Ａの位置ずれを防ぐことができる。 As described above, by performing the scan measurement using the guide device 50, it is possible to prevent the positional deviation of the reflection characteristic measurement device 1A from the measurement object that occurs when the reflection characteristic measurement device 1A is moved.
　また、本実施形態では、スキャン測定の際の反射特性測定装置１Ａの移動方向と、反射特性測定装置１Ａの長手方向とが一致するように、反射特性測定装置１Ａがガイド装置５０に装着されることになる。 In the present embodiment, the reflection characteristic measurement device 1A is mounted on the guide device 50 so that the moving direction of the reflection characteristic measurement device 1A at the time of scan measurement matches the longitudinal direction of the reflection characteristic measurement device 1A. It will be.
　これによれば、スキャン測定の際の反射特性測定装置１Ａの移動方向と、反射特性測定装置１Ａの長手方向とが垂直となるように、反射特性測定装置１Ａを装着可能なガイド装置５０に比べて、反射特性測定装置１Ａの移動の際に反射特性測定装置１Ａにおいて発生する傾きを低減することができるので、スキャン測定の際の反射特性測定装置１Ａの移動動作を安定させることができる。 According to this, as compared with the guide device 50 to which the reflection characteristic measuring apparatus 1A can be mounted, the moving direction of the reflection characteristic measuring apparatus 1A at the time of scan measurement is perpendicular to the longitudinal direction of the reflection characteristic measuring apparatus 1A. In addition, since the inclination generated in the reflection characteristic measuring apparatus 1A when the reflection characteristic measuring apparatus 1A is moved can be reduced, the movement operation of the reflection characteristic measuring apparatus 1A during the scan measurement can be stabilized.
　　［位置合わせ装置の構成について］
　次に、本実施形態における位置合わせ装置１０Ａの構成について詳述する。図８は、位置合わせ装置１０Ａの下面外観図である。 [Registration device configuration]
Next, the configuration of the alignment apparatus 10A in the present embodiment will be described in detail. FIG. 8 is a bottom external view of the alignment apparatus 10A.
　上述のように、微小領域における測定対象物の反射特性を測定するスポット測定では、測定対象の微小領域に対する、反射特性測定装置１Ａの受光部の位置ずれを防止するために、位置合わせ装置１０Ａが用いられる。 As described above, in the spot measurement for measuring the reflection characteristic of the measurement object in the minute area, the alignment apparatus 10A is used to prevent the light receiving unit of the reflection characteristic measuring apparatus 1A from being displaced with respect to the minute area to be measured. Used.
　図４に示されるように、位置合わせ装置１０Ａは、反射特性測定装置１Ａを着脱可能な上側部材（第１部材）１１と、当該上側部材１１を支持する下側部材（第２部材）１２とで構成されている。 As shown in FIG. 4, the alignment device 10 </ b> A includes an upper member (first member) 11 that can attach and detach the reflection characteristic measuring device 1 </ b> A, and a lower member (second member) 12 that supports the upper member 11. It consists of
　上側部材１１と下側部材１２とは、互いの一端側において、連結部（「ヒンジ部」とも称する）１３によって回動可能に連結されている。これにより、上側部材１１と下側部材１２とは、互いに重なった閉状態（第１状態）と、上側部材１１および下側部材１２の互いの一端が連結され、他端が開いた開状態（第２状態）との間で遷移可能となる。なお、連結部１３の内部には、バネ等の付勢部材が組み込まれており、外部から力が加わらない通常の状態では、常に開状態となる。 The upper member 11 and the lower member 12 are rotatably connected by a connecting portion (also referred to as a “hinge portion”) 13 on one end side of each other. As a result, the upper member 11 and the lower member 12 are in a closed state (first state) where they overlap each other, and an open state in which one end of each of the upper member 11 and the lower member 12 is connected and the other end is opened ( It is possible to transition between the second state). It should be noted that a biasing member such as a spring is incorporated inside the connecting portion 13 and is always open in a normal state where no force is applied from the outside.
　位置合わせ装置１０Ａの上側部材１１は、上記一端側において、反射特性特定装１Ａの底面凸部７がほぼ嵌まり込む形状をしており、また上記他端側においては、反射特性測定装置１Ａの受光部を配置する円形の開口１５を有している。また、上側部材１１は、当該開口１５に沿って、反射特性測定装置１Ａを位置合わせ装置１０Ａに固定するための固定用部材１６を有している。開口１５に沿って設けられた略環状の固定用部材１６は、開口１５の内側（内方）に向けて突出した複数の突起部１７を有している。反射特性測定装置１Ａを位置合わせ装置１０Ａに装着する際には、上記一端側に反射特性測定装置１Ａの底面凸部７を嵌め込むと、開口１５に反射特性測定装置１Ａの受光部が嵌め込まれた状態となり、この状態で、固定用部材１６によって反射特性測定装置１Ａと位置合わせ装置１０Ａとが固定されることになる。 The upper member 11 of the alignment apparatus 10A has a shape in which the bottom surface convex portion 7 of the reflection characteristic specifying device 1A is substantially fitted on the one end side, and on the other end side, the reflection characteristic measuring apparatus 1A has a shape. It has a circular opening 15 in which the light receiving part is arranged. Further, the upper member 11 has a fixing member 16 for fixing the reflection characteristic measuring apparatus 1A to the alignment apparatus 10A along the opening 15. The substantially annular fixing member 16 provided along the opening 15 has a plurality of protrusions 17 protruding toward the inside (inward) of the opening 15. When mounting the reflection characteristic measuring apparatus 1A to the alignment apparatus 10A, the light receiving part of the reflection characteristic measuring apparatus 1A is fitted into the opening 15 when the bottom surface convex portion 7 of the reflection characteristic measuring apparatus 1A is fitted to the one end side. In this state, the reflection characteristic measuring device 1A and the alignment device 10A are fixed by the fixing member 16.
　具体的には、反射特性測定装置１Ａ（図２参照）は、受光開口３の周囲に、当該反射特性測定装置１Ａを位置合わせ装置１０Ａに取り付けるための取付用部材５を有している。当該取付用部材５には、切り欠き部６が複数設けられており、反射特性測定装置１Ａを位置合わせ装置１０Ａに装着する際には、複数の当該切り欠き部６が、位置合わせ装置１０Ａの固定用部材１６に設けられた複数の突起部１７にそれぞれ嵌合される。そして、切り欠き部６と突起部１７とが嵌合した状態で、固定用部材１６のレバー１８を回転方向にスライドさせると、突起部１７と切り欠き部６との位置がずれることになり、切り欠き部同士の間の箇所に突起部１７が係合して、反射特性測定装置１Ａと位置合わせ装置１０Ａとは互いに固定される。 Specifically, the reflection characteristic measuring apparatus 1A (see FIG. 2) has an attachment member 5 for attaching the reflection characteristic measuring apparatus 1A to the alignment apparatus 10A around the light receiving opening 3. The attachment member 5 is provided with a plurality of notches 6, and when the reflection characteristic measuring device 1 </ b> A is mounted on the alignment device 10 </ b> A, the plurality of notches 6 are provided on the alignment device 10 </ b> A. The plurality of protrusions 17 provided on the fixing member 16 are respectively fitted. Then, when the lever 18 of the fixing member 16 is slid in the rotation direction in a state where the notch 6 and the protrusion 17 are fitted, the positions of the protrusion 17 and the notch 6 are shifted, The protrusion 17 is engaged with a portion between the notches, and the reflection characteristic measuring device 1A and the alignment device 10A are fixed to each other.
　このように、位置合わせ装置１０Ａの固定用部材１６は、位置合わせ装置１０Ａに装着された反射特性測定装置１Ａの位置決めを行う位置決め部として機能し、反射特性測定装置１Ａは、位置合わせ装置１０Ａに対して、受光部を嵌め込む開口１５付近において固定されることになる。 Thus, the fixing member 16 of the alignment apparatus 10A functions as a positioning unit that positions the reflection characteristic measurement apparatus 1A attached to the alignment apparatus 10A. The reflection characteristic measurement apparatus 1A is connected to the alignment apparatus 10A. On the other hand, it is fixed in the vicinity of the opening 15 into which the light receiving portion is fitted.
　すなわち、位置決め部として機能する固定用部材１６は、上側部材１１において、連結部１３が存在する一端側とは異なる他端側に設けられており、位置合わせ装置１０Ａでは、当該他端側において位置決めが行われることになる。これによれば、連結部１３が存在する一端側において位置決めを行う場合よりも、測定対象物に対する位置合わせ精度を向上させることが可能になる。また、受光開口３の周囲を同心円状の固定用部材１６で位置決めをするため、さらに位置合わせ精度を高くすることができる。 That is, the fixing member 16 that functions as a positioning portion is provided on the other end side of the upper member 11 that is different from the one end side where the connecting portion 13 is present. In the positioning device 10A, the fixing member 16 is positioned on the other end side. Will be done. According to this, it becomes possible to improve the positioning accuracy with respect to the measurement object as compared with the case where positioning is performed on one end side where the connecting portion 13 exists. Further, since the periphery of the light receiving opening 3 is positioned by the concentric fixing member 16, the alignment accuracy can be further increased.
　なお、本実施形態の位置決め態様は、上側部材１１において、反射特性測定装置１Ａを上側部材１１に装着したときの受光部の位置を基準位置とした場合、連結部１３の位置よりも当該基準位置に近い位置で固定用部材１６によって位置決めされるとも表現できる。また、本実施形態の位置決め態様は、反射特性測定装置１Ａが上側部材１１に装着されたときの受光部の位置と、連結部１３の位置との間の中間地点よりも受光部側の位置で固定用部材１６によって位置決めされるとも表現できる。 The positioning mode of the present embodiment is such that, in the upper member 11, when the position of the light receiving unit when the reflection characteristic measuring device 1 </ b> A is mounted on the upper member 11 is used as the reference position, the reference position is more than the position of the connecting unit 13. It can also be expressed as being positioned by the fixing member 16 at a position close to. Further, the positioning mode of the present embodiment is a position on the light receiving unit side with respect to the intermediate point between the position of the light receiving unit when the reflection characteristic measuring apparatus 1A is mounted on the upper member 11 and the position of the connecting unit 13. It can also be expressed as being positioned by the fixing member 16.
　位置合わせ装置１０Ａの下側部材１２は、上記他端側において、測定開口１４とつまみ部１９とを有し、机等の土台上に配置される。なお、測定の際には、土台の上に測定対象物が配置され、測定対象物の上に下側部材１２がさらに配置されることになる。換言すれば、測定の際には、土台と下側部材１２との間に測定対象物が挟まれて配置されることになる。 The lower member 12 of the alignment apparatus 10A has a measurement opening 14 and a knob portion 19 on the other end side, and is disposed on a base such as a desk. In the measurement, the measurement object is disposed on the base, and the lower member 12 is further disposed on the measurement object. In other words, at the time of measurement, the measurement object is disposed between the base and the lower member 12.
　測定開口１４は、スポット測定において測定対象となる微小領域を規定し、上側部材１１に装着される反射特性測定装置１Ａの受光部の位置と、閉状態において対向する位置に設けられる。 The measurement opening 14 defines a minute region to be measured in spot measurement, and is provided at a position facing the position of the light receiving unit of the reflection characteristic measuring apparatus 1A attached to the upper member 11 in the closed state.
　スポット測定は、測定開口１４内に収まった物体について行われるため、スポット測定を行う際には、測定開口１４内に測定対象物が収まるように、測定対象物と位置合わせ装置１０Ａとの位置を調整することになる。 Since the spot measurement is performed on an object that is accommodated in the measurement opening 14, the position of the measurement object and the alignment device 10 </ b> A is set so that the measurement object is accommodated in the measurement opening 14 when performing spot measurement. Will be adjusted.
　つまみ部１９は、測定対象物と位置合わせ装置１０Ａとの位置調整に用いられる。下側部材１２につまみ部１９を設けることによれば、反射特性測定装置１Ａを操作しつつ、反射特性測定装置１Ａを操作する手とは反対の手でつまみ部１９を操作することができるので、位置調整を容易に行うことができる。また、つまみ部１９を用いた位置調整では、測定対象物と位置合わせ装置１０Ａとの位置の微調整を行うことができる。 The knob portion 19 is used for position adjustment between the measurement object and the alignment device 10A. By providing the knob part 19 on the lower member 12, the knob part 19 can be operated with the hand opposite to the hand operating the reflection characteristic measuring apparatus 1A while operating the reflection characteristic measuring apparatus 1A. The position adjustment can be easily performed. Further, in the position adjustment using the knob portion 19, the position of the measurement object and the alignment device 10A can be finely adjusted.
　また、図８に示されるように、下側部材１２において、土台との接地面には、滑り止め部材２０が設けられている。スポット測定の際には、連結部１３の真下に押さえつける力が働くことになるので、当該滑り止め部材２０は、下側部材１２において連結部１３が存在する一端側、すなわち連結部１３の真下に設けられることが好ましい。このように、下側部材１２における土台との接地面に、滑り止め部材２０を設けることによれば、測定の際の位置合わせ装置１０Ａのブレを抑制することができる。 Further, as shown in FIG. 8, the lower member 12 is provided with a non-slip member 20 on the ground contact surface with the base. At the time of spot measurement, a pressing force acts directly below the connecting portion 13, so that the anti-slip member 20 is located at one end of the lower member 12 where the connecting portion 13 exists, that is, directly below the connecting portion 13. It is preferable to be provided. Thus, by providing the anti-slip member 20 on the ground contact surface of the lower member 12 with the base, it is possible to suppress blurring of the alignment device 10A during measurement.
　また、下側部材１２の全ては、透過性の部材を用いて構成されることが好ましい。透過性の部材を用いて構成することによれば、下側部材１２に重なった測定対象物を視認することができるので、測定対象物と位置合わせ装置１０Ａとの位置調整が容易になる。 Moreover, it is preferable that all of the lower member 12 is configured using a permeable member. According to the configuration using the transmissive member, the measurement object overlapped with the lower member 12 can be visually recognized, so that the position adjustment between the measurement object and the alignment device 10A is facilitated.
　　［測定手順について］
　次に、スポット測定を行う場合の動作工程、およびスキャン測定を行う場合の動作工程についてそれぞれ説明する。図９は、スポット測定を行う場合の手順を示すフローチャートである。図１０は、白色校正台３０を示す図である。 [Measurement procedure]
Next, an operation process for performing spot measurement and an operation process for performing scan measurement will be described. FIG. 9 is a flowchart showing a procedure when spot measurement is performed. FIG. 10 is a diagram showing the white calibration table 30.
　図９に示されるように、スポット測定を行う場合は、ステップＳＰ１１において、付属部品未装着の状態で、反射特性測定装置１Ａが白色校正台３０の上に載せられる。図１０に示されるように、白色校正台３０は、白色校正板（白色板）３１を有している。反射特性測定装置１Ａは、反射特性測定装置１Ａの受光部を白色板３１に合わせるように、白色校正台３０の上に配置される。 As shown in FIG. 9, when performing spot measurement, in step SP11, the reflection characteristic measuring device 1A is placed on the white calibration table 30 with no accessory attached. As shown in FIG. 10, the white calibration table 30 has a white calibration plate (white plate) 31. The reflection characteristic measuring apparatus 1A is disposed on the white calibration table 30 so that the light receiving part of the reflection characteristic measuring apparatus 1A is aligned with the white plate 31.
　ステップＳＰ１２では、白色校正板３１の反射特性が測定され、反射特性測定装置１Ａの白色校正が行われる。 In step SP12, the reflection characteristic of the white calibration plate 31 is measured, and the white calibration of the reflection characteristic measuring apparatus 1A is performed.
　次のステップＳＰ１３では、反射特性測定装置１Ａが位置合わせ装置１０Ａに装着される。 In the next step SP13, the reflection characteristic measuring device 1A is mounted on the alignment device 10A.
　ステップＳＰ１４では、位置合わせ装置１０Ａを試料上に載せ、試料において測定対象とする部分に、位置合わせ装置１０Ａの測定開口１４を合わせる位置合わせを行う。 In step SP14, the alignment device 10A is placed on the sample, and alignment is performed to align the measurement opening 14 of the alignment device 10A with a portion to be measured in the sample.
　ステップＳＰ１５では、反射特性測定装置１Ａを上部から押さえて、反射特性測定装置１Ａの受光開口３を測定開口１４に密着させる。 In step SP15, the reflection characteristic measuring device 1A is pressed from above, and the light receiving opening 3 of the reflection characteristic measuring device 1A is brought into close contact with the measurement opening 14.
　ステップＳＰ１６では、受光開口３を測定開口１４に密着させた状態で、測定ボタン２が押下され、反射特性の測定が行われる。 In step SP16, the measurement button 2 is pressed in a state where the light receiving opening 3 is in close contact with the measurement opening 14, and the reflection characteristic is measured.
　ステップＳＰ１７では、反射特性測定装置１ＡからＰＣへと測定データが送信される。ステップＳＰ１８では、ＰＣに測定結果が表示される。 In step SP17, the measurement data is transmitted from the reflection characteristic measuring apparatus 1A to the PC. In step SP18, the measurement result is displayed on the PC.
　このように、スポット測定を行う場合は、白色校正（ステップＳＰ１１，ＳＰ１２）を行った後で、反射特性測定装置１Ａを位置合わせ装置１０Ａに装着し（ステップＳＰ１３）、測定対象物の反射特性が測定される（ステップＳＰ１４～ＳＰ１８）。 In this way, when performing spot measurement, after performing white calibration (steps SP11 and SP12), the reflection characteristic measuring device 1A is mounted on the alignment device 10A (step SP13), and the reflection characteristic of the measurement object is determined. Measured (steps SP14 to SP18).
　次に、スキャン測定を行う場合の手順について説明する。図１１は、スキャン測定を行う場合の手順を示すフローチャートである。 Next, the procedure for performing scan measurement will be described. FIG. 11 is a flowchart illustrating a procedure for performing scan measurement.
　図１１に示されるように、スキャン測定を行う場合は、ステップＳＰ２１において、上記ステップＳＰ１１と同様、付属部品未装着の状態で、反射特性測定装置１Ａが白色校正台３０の上に載せられる。 As shown in FIG. 11, when performing scan measurement, in step SP21, the reflection characteristic measuring device 1A is mounted on the white calibration table 30 in a state in which no accessory is mounted, as in step SP11.
　ステップＳＰ２２では、上記ステップＳＰ１２と同様、白色校正板３１の反射特性が測定され、反射特性測定装置１Ａの白色校正が行われる。 In step SP22, as in step SP12, the reflection characteristic of the white calibration plate 31 is measured, and the white calibration of the reflection characteristic measuring apparatus 1A is performed.
　次のステップＳＰ２３では、測定対象物となるカラーパッチ上にガイド装置５０を位置合わせして配置する。 In the next step SP23, the guide device 50 is positioned and arranged on the color patch to be measured.
　ステップＳＰ２４では、反射特性測定装置１Ａがガイド装置５０に装着される。 In step SP24, the reflection characteristic measuring device 1A is mounted on the guide device 50.
　ステップＳＰ２５では、反射特性測定装置１Ａを移動させつつ、反射特性の測定が行われる。 In step SP25, the reflection characteristic is measured while moving the reflection characteristic measuring apparatus 1A.
　ステップＳＰ２６では、上記ステップＳＰ１７と同様、反射特性測定装置１ＡからＰＣへと測定データが送信される。 In step SP26, measurement data is transmitted from the reflection characteristic measuring apparatus 1A to the PC, as in step SP17.
　ステップＳＰ２７では、上記ステップＳＰ１８と同様、ＰＣに測定結果が表示される。 In step SP27, the measurement result is displayed on the PC as in step SP18.
　このように、スキャン測定を行う場合は、白色校正（ステップＳＰ２１，ＳＰ２２）を行った後で、反射特性測定装置１Ａをガイド装置５０に装着し（ステップＳＰ２４）、測定対象物の反射特性が測定される（ステップＳＰ２５～ＳＰ２７）。 Thus, when performing scan measurement, after performing white calibration (steps SP21 and SP22), the reflection characteristic measurement device 1A is mounted on the guide device 50 (step SP24), and the reflection characteristic of the measurement object is measured. (Steps SP25 to SP27).
　以上のように、本実施形態に係る位置合わせ装置１０Ａは、測定対象物に光を照射し、得られる反射光を受光する受光部を有する反射特性測定装置１Ａを着脱可能な上側部材１１と、上側部材１１を支持する下側部材１２と、上側部材１１と下側部材１２とが互いに重なった閉状態と、上側部材１１および下側部材１２の互いの一端が連結され、他端が開いた開状態とを取り得るように、上側部材１１と下側部材１２とを連結する連結部１３とを備えている。そして、上側部材１１は、装着された反射特性測定装置１Ａの位置決めを行う位置決め部を有し、当該位置決め部は、上側部材１１において、反射特性測定装置が上側部材１１に装着されたときの受光部と連結部１３との中間位置よりも、受光部に近い位置で位置決めを行う。 As described above, the alignment device 10A according to the present embodiment irradiates the measurement object with light, and receives the reflected light obtained from the reflection characteristic measurement device 1A having the light receiving unit, and the detachable upper member 11; The lower member 12 that supports the upper member 11, the closed state in which the upper member 11 and the lower member 12 overlap each other, one end of the upper member 11 and the lower member 12 are connected, and the other end is opened. A connecting portion 13 that connects the upper member 11 and the lower member 12 is provided so as to be in an open state. The upper member 11 includes a positioning unit that positions the mounted reflection characteristic measuring device 1A. The positioning unit receives light when the reflection characteristic measuring device is mounted on the upper member 11 in the upper member 11. Positioning is performed at a position closer to the light receiving part than an intermediate position between the part and the connecting part 13.
　このような位置合わせ装置１０Ａによれば、上側部材１１の連結部１３が存在する一端側において位置決めを行う場合よりも、測定対象物に対する位置合わせ精度を向上させることが可能になり、ひいては、所望の測定対象物を精度良く測定することが可能になる。 According to such an alignment apparatus 10A, it is possible to improve the alignment accuracy with respect to the measurement object as compared with the case where the positioning is performed on the one end side where the connecting portion 13 of the upper member 11 is present. It is possible to accurately measure the measurement object.
　＜２．第２実施形態＞
　次に、本発明の第２実施形態について説明する。第２実施形態に係る位置合わせ装置１０Ｂは、その上側部材の上に、第１実施形態の反射特性測定装置１Ａよりも大きな反射特性測定装置１Ｂを装着できるように構成される。図１２および図１３は、本発明の第２実施形態に係る反射特性測定装置１Ｂの外観図である。ここで、図１２は、反射特性測定装置１Ｂの上面外観図であり、図１３は、反射特性測定装置１Ｂの下面外観図である。図１４は、反射特性測定装置１Ｂを着脱可能な位置合わせ装置１０Ｂの外観図である。また、図１５および図１６は、反射特性測定装置１Ｂを位置合わせ装置１０Ｂに装着した状態を示す図であり、特に図１６は、位置合わせ装置１０Ｂに装着された反射特性測定装置１Ｂを用いて、スポット測定を行っているときの状態図である。 <2. Second Embodiment>
Next, a second embodiment of the present invention will be described. The alignment apparatus 10B according to the second embodiment is configured such that a reflection characteristic measurement apparatus 1B larger than the reflection characteristic measurement apparatus 1A of the first embodiment can be mounted on the upper member. 12 and 13 are external views of a reflection characteristic measuring apparatus 1B according to the second embodiment of the present invention. Here, FIG. 12 is a top external view of the reflection characteristic measuring apparatus 1B, and FIG. 13 is a bottom external view of the reflection characteristic measuring apparatus 1B. FIG. 14 is an external view of an alignment apparatus 10B to which the reflection characteristic measuring apparatus 1B can be attached and detached. 15 and 16 are views showing a state in which the reflection characteristic measuring apparatus 1B is mounted on the alignment apparatus 10B. In particular, FIG. 16 uses the reflection characteristic measurement apparatus 1B mounted on the alignment apparatus 10B. It is a state diagram when performing spot measurement.
　図１２に示されるように、反射特性測定装置１Ｂは、筐体上面において測定モード等の情報を表示する表示部１０１と、操作ボタン１０２とを有し、筐体側面において電源スイッチ１０３と測定ボタン１０４とを有している。 As shown in FIG. 12, the reflection characteristic measuring apparatus 1B includes a display unit 101 that displays information such as a measurement mode on the upper surface of the housing and an operation button 102, and a power switch 103 and a measurement button on the side of the housing. 104.
　また、図１３に示されるように、反射特性測定装置１Ｂは、筐体下面において、受光部として機能する受光開口１０５と、受光開口１０５の近傍に形成された位置決め用溝１０６と、受光開口１０６から離れた一端に形成された位置決め用突起１０７と、位置決め用溝１０６と位置決め用突起１０７との間に形成された略Ｄ字形状の係合用凹部１０８とを有している。また、係合用凹部１０８の側面には、一部に横方向に空いた係合用穴１０９（図１８参照）が設けられている。 As shown in FIG. 13, the reflection characteristic measuring apparatus 1 </ b> B includes a light receiving opening 105 that functions as a light receiving portion, a positioning groove 106 formed in the vicinity of the light receiving opening 105, and a light receiving opening 106. A positioning projection 107 formed at one end away from the positioning groove, and a substantially D-shaped engaging recess 108 formed between the positioning groove 106 and the positioning projection 107. Further, an engagement hole 109 (see FIG. 18) that is partially opened in the lateral direction is provided on a side surface of the engagement recess 108.
　本実施形態の反射特性測定装置１Ｂは、表示部１０１を有しているため、第１実施形態の反射特性測定装置１Ａに比べて大きな筐体となっている。このため、反射特性測定装置１Ｂを用いてスポット測定を行う際には、上記第１実施形態の位置合わせ装置１０Ａに設けられた開口１５を有さない、すなわち、上側部材１１１において反射特性測定装置１Ｂの受光部を囲む部分を有さない、図１４に示されるような形状の位置合わせ装置１０Ｂが用いられる。 Since the reflection characteristic measuring apparatus 1B of the present embodiment has the display unit 101, it is a large casing as compared with the reflection characteristic measuring apparatus 1A of the first embodiment. For this reason, when performing spot measurement using the reflection characteristic measuring apparatus 1B, the reflection characteristic measuring apparatus does not have the opening 15 provided in the alignment apparatus 10A of the first embodiment, that is, in the upper member 111. An alignment apparatus 10B having a shape as shown in FIG. 14 that does not have a portion surrounding the light receiving portion 1B is used.
　図１５には、位置合わせ装置１０Ｂに反射特性測定装置１Ｂを装着したときの開状態の態様が示されている。位置合わせ装置１０Ｂは、開口１５を有さず、受光部周囲において位置合わせ装置１０Ｂを構成する部材を有していないことから、このような位置合わせ装置１０Ｂを用いることによれば、受光部周囲の視認性を向上させることができる。 FIG. 15 shows an open state when the reflection characteristic measuring device 1B is attached to the alignment device 10B. Since the alignment device 10B does not have the opening 15 and does not have a member constituting the alignment device 10B around the light receiving portion, the alignment device 10B can be used to surround the light receiving portion. Visibility can be improved.
　実際に反射特性を測定する際には、使用者によって反射特性測定装置１Ｂが上部から押さえつけられて、図１６に示される閉状態へと遷移させられる。そして、当該閉状態において反射特性測定装置１Ｂの側面に設けられた測定ボタン１０４が押下され、スポット測定が実行される。 When actually measuring the reflection characteristic, the reflection characteristic measuring apparatus 1B is pressed from the upper part by the user, and is changed to the closed state shown in FIG. In the closed state, the measurement button 104 provided on the side surface of the reflection characteristic measuring apparatus 1B is pressed, and spot measurement is performed.
　ここで、本実施形態における位置合わせ装置１０Ｂの構成について詳述する。図１７は、位置合わせ装置１０Ｂの下面外観図である。図１８は、係合部材１１５の一部が係合用穴１０９に入って、反射特性測定装置１Ｂと位置合わせ装置１０Ｂとが係合された状態を示す模式図である。 Here, the configuration of the alignment apparatus 10B in the present embodiment will be described in detail. FIG. 17 is a bottom external view of the alignment apparatus 10B. FIG. 18 is a schematic diagram showing a state in which a part of the engaging member 115 enters the engaging hole 109 and the reflection characteristic measuring device 1B and the alignment device 10B are engaged.
　図１４に示されるように、位置合わせ装置１０Ｂは、反射特性測定装置１Ｂを着脱可能な上側部材（第１部材）１１１と、当該上側部材１１１を支持する下側部材（第２部材）１１２とで構成されている。 As shown in FIG. 14, the alignment device 10 </ b> B includes an upper member (first member) 111 to which the reflection characteristic measuring device 1 </ b> B can be attached and detached, and a lower member (second member) 112 that supports the upper member 111. It consists of
　上側部材１１１と下側部材１１２とは、互いの一端側において、連結部（「ヒンジ部」とも称する）１１３によって回動可能に連結されている。これにより、上側部材１１１と下側部材１１２とは、互いに重なった閉状態（第１状態）と、上側部材１１１および下側部材１１２の互いの一端が連結され、他端が開いた開状態（第２状態）との間で遷移可能となる。なお、連結部１１３の内部には、バネ等の付勢部材が組み込まれており、外部から力が加わらない通常の状態では、常に開状態となる。 The upper member 111 and the lower member 112 are rotatably connected by a connecting portion (also referred to as a “hinge portion”) 113 on one end side of each other. As a result, the upper member 111 and the lower member 112 are in a closed state (first state) where they overlap each other, and an open state in which one end of the upper member 111 and the lower member 112 is connected and the other end is opened ( It is possible to transition between the second state). It should be noted that an urging member such as a spring is incorporated inside the connecting portion 113 and is always open in a normal state where no force is applied from the outside.
　位置合わせ装置１０Ｂの上側部材１１１は、中央付近において反射特性測定装置１Ｂを係合させる略Ｄ字形状の係合部材１１５を有している。反射特性測定装置１Ｂを位置合わせ装置１０Ｂに装着する際には、当該係合部材１１５は、反射特性測定装置１Ｂの係合用凹部１０８（図１３参照）に略Ｄ字形状の直線部分が一致した状態で嵌め込まれる。そして、係合部材１１５を反射特性測定装置１Ｂの係合用凹部１０８に嵌め込んだ状態で、係合部材１１５と繋がったレバー１１８を図１７において時計方向に回転させると、係合部材１１５は回転軸１１０を中心として回転し、係合部材１１５の一部が係合用凹部１０８の側面にある係合用穴１０９に入り込むことにより（図１８参照）、反射特性測定装置１Ｂと位置合わせ装置１０Ｂとが係合される。 The upper member 111 of the alignment device 10B has a substantially D-shaped engagement member 115 that engages the reflection characteristic measurement device 1B near the center. When the reflection characteristic measuring apparatus 1B is mounted on the alignment apparatus 10B, the engaging member 115 has a substantially D-shaped linear portion that coincides with the engaging recess 108 (see FIG. 13) of the reflection characteristic measuring apparatus 1B. Fit in the state. Then, when the lever 118 connected to the engagement member 115 is rotated clockwise in FIG. 17 with the engagement member 115 fitted in the engagement recess 108 of the reflection characteristic measuring apparatus 1B, the engagement member 115 rotates. By rotating around the shaft 110 and a part of the engagement member 115 enters the engagement hole 109 on the side surface of the engagement recess 108 (see FIG. 18), the reflection characteristic measuring device 1B and the alignment device 10B are connected. Engaged.
　またさらに、上側部材１１１は、位置決め用突起１１６と位置決め用穴１１７とを有している。位置決め用突起１１６および位置決め用穴１１７は、反射特性測定装置１Ｂの位置決めを行う位置決め部として機能する。 Furthermore, the upper member 111 has a positioning projection 116 and a positioning hole 117. The positioning protrusion 116 and the positioning hole 117 function as a positioning unit that positions the reflection characteristic measuring apparatus 1B.
　具体的には、反射特性測定装置１Ｂが位置合わせ装置１０Ｂに装着された際には、当該位置決め用突起１１６は、反射特性測定装置１Ｂの位置決め用溝１０６と嵌合され、当該位置決め用穴１１７は、反射特性測定装置１Ｂの位置決め用突起１０７と嵌合される。位置決め用突起１１６と位置決め用穴１１７とは、上側部材１１１において互いに所定の距離（間隔）を有して設けられている。つまり、位置決め用穴１１７は、反射特性測定装置１Ｂと上側部材１１１が係合される位置の近傍に設けられ、位置決め用突起１１６が嵌合する位置決め用溝１０６は、反射特性測定装置１Ｂの受光部１０５の近傍に設けられている。位置決め用突起１１６が反射特性測定装置１Ｂの位置決め用溝１０６と嵌合され、位置決め用穴１１７が反射特性測定装置１Ｂの位置決め用突起１０７と嵌合されると、反射特性測定装置１Ｂは、位置合わせ装置１０Ｂに対して位置決めされることになる。 Specifically, when the reflection characteristic measuring apparatus 1B is mounted on the alignment apparatus 10B, the positioning protrusion 116 is fitted into the positioning groove 106 of the reflection characteristic measuring apparatus 1B, and the positioning hole 117. Is fitted with the positioning projection 107 of the reflection characteristic measuring apparatus 1B. The positioning protrusion 116 and the positioning hole 117 are provided at a predetermined distance (interval) from each other in the upper member 111. That is, the positioning hole 117 is provided in the vicinity of the position where the reflection characteristic measuring device 1B and the upper member 111 are engaged, and the positioning groove 106 into which the positioning protrusion 116 is fitted is received by the reflection characteristic measuring device 1B. It is provided in the vicinity of the part 105. When the positioning protrusion 116 is fitted in the positioning groove 106 of the reflection characteristic measuring apparatus 1B and the positioning hole 117 is fitted in the positioning protrusion 107 of the reflection characteristic measuring apparatus 1B, the reflection characteristic measuring apparatus 1B is positioned. It will be positioned with respect to the alignment apparatus 10B.
　このように、位置合わせ装置１０Ｂにおいて位置決め部として機能する位置決め用突起１１６が、上側部材１１１において、連結部１１３が存在する一端側とは異なる他端側に設けられており、位置合わせ装置１０Ｂでは、当該他端側においても位置決めが行われることになる。これによれば、連結部１１３が存在する一端側においてのみ位置決めを行う場合よりも、測定対象物に対する位置合わせ精度を向上させることが可能になる。すなわち、上側部材１１１と反射特性測定装置１Ｂとを固定する位置の近傍と、受光部１０５の近傍との両方において位置決めを行うことにより、位置合わせ精度を高くすることができる。 As described above, the positioning protrusion 116 that functions as a positioning portion in the alignment device 10B is provided on the other end side of the upper member 111 that is different from the one end side where the coupling portion 113 exists. The positioning is also performed on the other end side. According to this, it is possible to improve the alignment accuracy with respect to the measurement object as compared with the case where the positioning is performed only on one end side where the connecting portion 113 exists. That is, the positioning accuracy can be increased by positioning both the vicinity of the position where the upper member 111 and the reflection characteristic measuring apparatus 1B are fixed and the vicinity of the light receiving unit 105.
　なお、本実施形態の位置決め態様は、上側部材１１１において、反射特性測定装置１Ｂを上側部材１１１に装着したときの受光部の位置を基準位置とした場合、連結部１１３の位置よりも当該基準位置に近い位置で位置決め部によって位置決めされるとも表現できる。また、本実施形態の位置決め態様は、反射特性測定装置１Ｂが上側部材１１１に装着されたときの受光部の位置と、連結部１１３の位置との間の中間地点よりも受光部側の位置で位置決め部によって位置決めされるとも表現できる。 The positioning mode of the present embodiment is such that, in the upper member 111, when the position of the light receiving unit when the reflection characteristic measuring device 1B is mounted on the upper member 111 is used as the reference position, the reference position is more than the position of the connecting unit 113. It can also be expressed as being positioned by the positioning unit at a position close to. Further, the positioning mode of the present embodiment is a position on the light receiving unit side with respect to the intermediate point between the position of the light receiving unit when the reflection characteristic measuring apparatus 1B is mounted on the upper member 111 and the position of the connecting unit 113. It can also be expressed as being positioned by the positioning unit.
　また、位置決め用突起１１６および位置決め用穴１１７は、それぞれ位置決め用部材とも称され、当該位置決め用部材においては、突起（凸部）および穴（凹部）のいずれを選択してもよい。位置決め用部材として突起を選択した場合は、反射特性測定装置１Ｂでは、当該突起に対応した溝（穴）が設けられ、位置決め用部材として穴を選択した場合は、反射特性測定装置１Ｂでは、当該穴に対応した突起が設けられることになる。 The positioning protrusion 116 and the positioning hole 117 are also referred to as positioning members, and any of the protrusion (convex portion) and the hole (concave portion) may be selected for the positioning member. When the projection is selected as the positioning member, the reflection characteristic measuring apparatus 1B is provided with a groove (hole) corresponding to the projection. When the hole is selected as the positioning member, the reflection characteristic measuring apparatus 1B A projection corresponding to the hole is provided.
　位置合わせ装置１０Ｂの下側部材１１２は、上記他端側において、測定開口１１４を有し、机等の土台上に配置される。 The lower member 112 of the alignment apparatus 10B has a measurement opening 114 on the other end side, and is disposed on a base such as a desk.
　測定開口１１４は、スポット測定の測定対象となる微小領域を規定し、上側部材１１１に装着される反射特性測定装置１Ｂの受光部の位置と、閉状態において対向する位置に設けられる。 The measurement opening 114 defines a minute region to be measured for spot measurement, and is provided at a position facing the position of the light receiving unit of the reflection characteristic measuring apparatus 1B attached to the upper member 111 in the closed state.
　スポット測定は、測定開口１１４内に収まった物体について行われるため、スポット測定を行う際には、測定開口１１４内に測定対象物が収まるように、測定対象物と位置合わせ装置１０Ａとの位置を調整することになる。 Since spot measurement is performed on an object that is contained in the measurement opening 114, when performing spot measurement, the positions of the measurement object and the alignment device 10A are adjusted so that the measurement object is contained in the measurement opening 114. Will be adjusted.
　また、図１７に示されるように、下側部材１１２において、土台との接地面には、滑り止め部材１１９が設けられている。スポット測定の際には、連結部１１３の真下に押さえつける力が働くことになるので、当該滑り止め部材１１９は、下側部材１１２において連結部１１３が存在する一端側、すなわち連結部１１３の真下に設けられることが好ましい。 Further, as shown in FIG. 17, in the lower member 112, an anti-slip member 119 is provided on the ground contact surface with the base. When spot measurement is performed, a pressing force acts directly below the connecting portion 113, so that the anti-slip member 119 is located at one end of the lower member 112 where the connecting portion 113 exists, that is, directly below the connecting portion 113. It is preferable to be provided.
　また、下側部材１１２の接地面側には、係合部材１１５と繋がったレバー１１８が設けられている。当該レバー１１８を回転させることによって、反射特性測定装置１Ｂと位置合わせ装置１０Ｂとを係合した係合状態と、係合状態の解除状態とを選択することができる。 Also, a lever 118 connected to the engaging member 115 is provided on the grounding surface side of the lower member 112. By rotating the lever 118, it is possible to select an engaged state in which the reflection characteristic measuring device 1B and the alignment device 10B are engaged and a released state of the engaged state.
　また、下側部材１１２において、少なくとも測定開口１１４の周辺部分は、透過性の部材を用いて構成されることが好ましい。透過性の部材を用いて構成することによれば、下側部材１１２に重なった測定対象物を視認することができるので、測定対象物と位置合わせ装置１０Ｂとの位置調整が容易になる。 Further, in the lower member 112, at least the peripheral portion of the measurement opening 114 is preferably configured using a permeable member. According to the configuration using the permeable member, the measurement object overlapped with the lower member 112 can be visually recognized, so that the position adjustment between the measurement object and the alignment device 10B becomes easy.
　以上のように、本実施形態に係る位置合わせ装置１０Ｂは、測定対象物を照射して得られる反射光を受光する受光部を有する反射特性測定装置１Ｂを着脱可能な上側部材１１１と、上側部材１１１を支持する下側部材１１２と、上側部材１１１と下側部材１１２とが互いに重なった閉状態と、上側部材１１１および下側部材１１２の互いの一端が連結され、他端が開いた開状態とを取り得るように、上側部材１１１と下側部材１１２とを連結する連結部１１３とを備えている。そして、上側部材１１１は、装着された反射特性測定装置１Ｂの位置決めを行う位置決め部を有し、当該位置決め部は、上側部材１１１において、反射特性測定装置が上側部材１１１に装着されたときの受光部と連結部１１３の中間位置よりも受光部に近い位置で位置決めを行う。 As described above, the alignment device 10B according to the present embodiment includes the upper member 111 that can attach and detach the reflection characteristic measurement device 1B having the light receiving unit that receives the reflected light obtained by irradiating the measurement object, and the upper member. 111, a closed state in which the upper member 111 and the lower member 112 overlap each other, and an open state in which one end of each of the upper member 111 and the lower member 112 is connected and the other end is opened. The connecting part 113 that connects the upper member 111 and the lower member 112 is provided. The upper member 111 includes a positioning unit that positions the mounted reflection characteristic measuring apparatus 1B. The positioning unit receives light when the reflection characteristic measuring apparatus is mounted on the upper member 111 in the upper member 111. Positioning is performed at a position closer to the light receiving unit than an intermediate position between the coupling part and the coupling part 113.
　このような位置合わせ装置１０Ｂによれば、上側部材１１１の、連結部１１３が存在する一端側において位置決めを行う場合よりも、測定対象物に対する位置合わせ精度を向上させることが可能になり、ひいては、所望の測定対象物を精度良く測定することが可能になる。 According to such an alignment apparatus 10B, it is possible to improve the alignment accuracy with respect to the measurement object as compared with the case where positioning is performed on one end side of the upper member 111 where the connecting portion 113 exists. It becomes possible to accurately measure a desired measurement object.
　＜３．変形例＞
　以上、この発明の実施の形態について説明したが、この発明は、上記に説明した内容に限定されるものではない。 <3. Modification>
Although the embodiments of the present invention have been described above, the present invention is not limited to the contents described above.
　例えば、上記第１実施形態では、反射特性測定装置１Ａの受光開口３の周囲に設けられた取付用部材５に、位置合わせ装置１０Ａを装着する場合を例示したが、他の付属部品を装着する態様としてもよい。図１９は、反射特性測定装置１Ａに照度アタッチメント７０を取り付けた状態を示す図である。 For example, in the first embodiment, the case where the alignment device 10A is mounted on the mounting member 5 provided around the light receiving opening 3 of the reflection characteristic measuring device 1A is illustrated, but other accessory components are mounted. It is good also as an aspect. FIG. 19 is a diagram showing a state in which the illuminance attachment 70 is attached to the reflection characteristic measuring apparatus 1A.
　具体的には、図１９に示されるように、付属部品として照度アタッチメント７０を反射特性測定装置１Ａに取り付けることができる。照度アタッチメント７０は、周辺光（環境光）の特性を測定する際に用いられる付属部品であり、拡散板７１とホルダ７２とで構成されている。 Specifically, as shown in FIG. 19, an illuminance attachment 70 can be attached to the reflection characteristic measuring apparatus 1A as an accessory. The illuminance attachment 70 is an accessory used for measuring the characteristics of ambient light (environmental light), and includes a diffusion plate 71 and a holder 72.
　ホルダ７２の内側には、位置合わせ装置１０Ａの固定用部材１６に設けられた突起部１７と同様の突起部（不図示）が設けられており、照度アタッチメント７０を反射特性測定装置１Ａに装着する際には、当該突起部が取付用部材５に設けられた切り欠き部６に嵌合される。そして、突起部と切り欠き部６とを嵌合させた状態でホルダを回転させることにより、照度アタッチメント７０を反射特性測定装置１Ａに装着することができる。 A protrusion (not shown) similar to the protrusion 17 provided on the fixing member 16 of the alignment apparatus 10A is provided inside the holder 72, and the illuminance attachment 70 is attached to the reflection characteristic measuring apparatus 1A. At this time, the protrusion is fitted into a notch 6 provided in the attachment member 5. Then, the illuminance attachment 70 can be attached to the reflection characteristic measuring apparatus 1A by rotating the holder in a state where the protrusion and the notch 6 are fitted.
　このように、反射特性測定装置１Ａにおける位置合わせ装置１０Ａに対する取付機構は、バヨネット式の取付機構としても機能するので、他の付属部品の取付機構と共通化することができる。このように、各付属部品の取付機構を共通化することによれば、取付機構を複数設ける場合に比べて、部品点数を削減することができるとともに、反射特性測定装置１Ａの外観形状をシンプルにすることができる。 Thus, since the attachment mechanism for the alignment device 10A in the reflection characteristic measuring apparatus 1A also functions as a bayonet-type attachment mechanism, it can be shared with the attachment mechanism of other accessory parts. As described above, by using a common attachment mechanism for each accessory part, the number of parts can be reduced as compared with the case where a plurality of attachment mechanisms are provided, and the external shape of the reflection characteristic measuring apparatus 1A is simplified. can do.
　ここで、照度アタッチメント７０を用いて照度測定を行う場合の動作工程について説明する。図２０は、照度測定を行う場合の動作フローチャートである。 Here, an operation process in the case of performing illuminance measurement using the illuminance attachment 70 will be described. FIG. 20 is an operation flowchart when illuminance measurement is performed.
　図２０に示されるように、照度測定を行う場合は、ステップＳＰ３１において、付属部品未装着の状態で、反射特性測定装置１Ａが白色校正台３０の上に載せられる。 As shown in FIG. 20, when illuminance measurement is performed, in step SP31, the reflection characteristic measurement device 1A is mounted on the white calibration table 30 with no accessory attached.
　ステップＳＰ３２では、白色校正板３１の反射特性が測定され、反射特性測定装置１Ａの白色校正が行われる。 In step SP32, the reflection characteristic of the white calibration plate 31 is measured, and the white calibration of the reflection characteristic measuring apparatus 1A is performed.
　次のステップＳＰ３３では、反射特性測定装置１Ａに照度アタッチメント７０が装着される。 In the next step SP33, the illuminance attachment 70 is attached to the reflection characteristic measuring apparatus 1A.
　ステップＳＰ３４では、反射特性測定装置１Ａが例えば測定者によって、上向きに保持される。 In step SP34, the reflection characteristic measuring apparatus 1A is held upward by, for example, a measurer.
　ステップＳＰ３５では、測定ボタン２が押下され、照度測定が行われる。 In step SP35, the measurement button 2 is pressed and illuminance measurement is performed.
　ステップＳＰ３６では、反射特性測定装置１ＡからＰＣへと測定データが送信される。ステップＳＰ３７では、ＰＣに測定結果が表示される。 In step SP36, measurement data is transmitted from the reflection characteristic measuring apparatus 1A to the PC. In step SP37, the measurement result is displayed on the PC.
　このように、照度測定を行う場合は、白色校正（ステップＳＰ３１，ＳＰ３２）を行った後で、照度アタッチメント７０を反射特性測定装置１Ａに装着し（ステップＳＰ３３）、照度測定が行われる（ステップＳＰ３４～ＳＰ３７）。 Thus, when performing illuminance measurement, after performing white calibration (steps SP31 and SP32), the illuminance attachment 70 is attached to the reflection characteristic measuring apparatus 1A (step SP33), and illuminance measurement is performed (step SP34). To SP37).
　１Ａ，１Ｂ　反射特性測定装置
　２，１０４　測定ボタン
　３，１０５　受光開口（受光部）
　５　取付用部材
　１０Ａ，１０Ｂ　位置合わせ装置
　１１，１１１　上側部材
　１２，１１２　下側部材
　１３，１１３　連結部
　１４，１１４　測定開口
　１６　固定用部材
　１７　突起部
　１１６　位置決め用突起（位置決め用部材）
　１１７　位置決め用穴（位置決め用部材） 1A, 1B Reflection characteristic measuring device 2,104 Measurement button 3,105 Light receiving aperture (light receiving portion)
DESCRIPTION OF SYMBOLS 5 Mounting member 10A, 10B Positioning apparatus 11, 111 Upper member 12, 112 Lower member 13, 113 Connection part 14,114 Measurement opening 16 Fixing member 17 Protrusion part 116 Positioning protrusion (positioning member)
117 Positioning hole (positioning member)

Claims (9)

  1. 　測定対象物に光を照射して得られる反射光を受光する受光部を有する反射特性測定装置と組み合わせて用いられ、測定対象となる微小領域に対して前記反射特性測定装置の受光部の位置を合わせるための位置合わせ装置であって、
    　前記反射特性測定装置を着脱可能な第１部材と、
    　前記第１部材を支持する第２部材と、
    　前記第１部材と前記第２部材とが互いに重なった第１状態と、前記第１部材および前記第２部材の互いの一端が連結され、他端が開いた第２状態とを取り得るように、前記第１部材と前記第２部材とを連結する連結部と、
    を備え、
    　前記第１部材は、装着された前記反射特性測定装置の位置決めを行う位置決め部を有し、
    　前記位置決め部は、前記反射特性測定装置が前記第１部材に装着されたときに、前記受光部と前記連結部との中間位置よりも前記受光部に近い位置となるように前記第１部材に配置された位置合わせ装置。     It is used in combination with a reflection characteristic measuring device having a light receiving unit that receives reflected light obtained by irradiating light to the measurement object, and the position of the light receiving unit of the reflection characteristic measuring device with respect to a minute region to be measured An alignment device for alignment,
    A first member to which the reflection characteristic measuring device can be attached and detached;
    A second member that supports the first member;
    A first state in which the first member and the second member overlap each other and a second state in which one end of each of the first member and the second member is connected and the other end is open can be taken. A connecting portion for connecting the first member and the second member;
    With
    The first member has a positioning portion for positioning the mounted reflection characteristic measuring device,
    The positioning portion is positioned on the first member so that when the reflection characteristic measuring device is attached to the first member, the positioning portion is closer to the light receiving portion than an intermediate position between the light receiving portion and the connecting portion. Arranged alignment device.
  2. 　前記反射特性測定装置の装着状態において、前記第１部材は、前記一端とは反対の前記他端側において、前記反射特性測定装置の前記受光部を配置させる開口を有し、
    　前記第１部材は、前記反射特性測定装置を前記第１部材に固定するための固定用部材を前記位置決め部として、前記開口に沿って有している請求項１に記載の位置合わせ装置。     In the mounted state of the reflection characteristic measurement device, the first member has an opening for disposing the light receiving unit of the reflection characteristic measurement device on the other end side opposite to the one end.
    The alignment device according to claim 1, wherein the first member has a fixing member for fixing the reflection characteristic measuring device to the first member as the positioning portion along the opening.
  3. 　前記固定用部材は、前記開口の内側に向けて突出した突起部を有し、
    　前記反射特性測定装置は、当該反射特性測定装置の前記受光部の周囲に設けられた切り欠き部と前記突起部とを嵌合させて、前記第１部材に装着される請求項２に記載の位置合わせ装置。     The fixing member has a protrusion protruding toward the inside of the opening,
    The said reflection characteristic measuring apparatus is mounted | worn with a said 1st member by fitting the notch part provided in the circumference | surroundings of the said light-receiving part of the said reflection characteristic measuring apparatus, and the said projection part. Alignment device.
  4. 　前記反射特性測定装置の装着状態において、前記第１部材は、前記一端とは反対の前記他端側において、前記反射特性測定装置の前記受光部を配置させ、
    　前記第１部材は、所定間隔を有して設けられた２つの位置決め用部材を前記位置決め部として有し、
    　前記２つの位置決め用部材のうち少なくとも一方は、前記反射特性測定装置が前記第１部材に装着されたときに、前記受光部と前記連結部との中間位置よりも前記受光部に近い位置に設けられる請求項１に記載の位置合わせ装置。     In the mounted state of the reflection characteristic measuring device, the first member is arranged on the other end side opposite to the one end, and the light receiving unit of the reflection characteristic measuring device is disposed,
    The first member has two positioning members provided at a predetermined interval as the positioning portion,
    At least one of the two positioning members is provided at a position closer to the light receiving unit than an intermediate position between the light receiving unit and the connecting unit when the reflection characteristic measuring device is attached to the first member. The alignment apparatus according to claim 1, wherein
  5. 　前記位置決め用部材は、前記第１部材に設けられた突起および穴のいずれかである請求項４に記載の位置合わせ装置。 The alignment device according to claim 4, wherein the positioning member is one of a protrusion and a hole provided in the first member.
  6. 　前記第２部材は、前記第１部材と対向する面とは反対の面において、滑り止め部材を有し、
    　当該滑り止め部材は、前記第２部材の前記一端側に設けられる請求項１から請求項５のいずれかに記載の位置合わせ装置。     The second member has a non-slip member on a surface opposite to the surface facing the first member,
    The alignment device according to any one of claims 1 to 5, wherein the anti-slip member is provided on the one end side of the second member.
  7. 　測定対象物に光を照射して得られる反射光を受光する受光部を有する反射特性測定装置と、
    　当該反射特性特定装置を装着可能な位置合わせ装置と、
    を備え、
    　前記位置合わせ装置は、
    　　前記反射特性測定装置を着脱可能な第１部材と、
    　　前記第１部材を支持する第２部材と、
    　　前記第１部材と前記第２部材とが互いに重なった第１状態と、前記第１部材および前記第２部材の互いの一端が連結され、他端が開いた第２状態とを取り得るように、前記第１部材と前記第２部材とを連結する連結部と、
    を有し、
    　　前記第１部材は、装着された前記反射特性測定装置の位置決めを行う位置決め部を有し、
    　　前記位置決め部は、前記反射特性測定装置が前記第１部材に装着されたときに、前記受光部と前記連結部との中間位置よりも前記受光部に近い位置となるように前記第１部材に配置された反射特性測定システム。     A reflection characteristic measuring device having a light receiving portion for receiving reflected light obtained by irradiating light onto a measurement object;
    An alignment device capable of mounting the reflection characteristic specifying device;
    With
    The alignment device includes:
    A first member to which the reflection characteristic measuring device can be attached and detached;
    A second member that supports the first member;
    A first state in which the first member and the second member overlap each other and a second state in which one end of each of the first member and the second member is connected and the other end is open can be taken. A connecting portion for connecting the first member and the second member;
    Have
    The first member has a positioning portion for positioning the mounted reflection characteristic measuring device,
    The positioning portion is positioned on the first member so that when the reflection characteristic measuring device is attached to the first member, the positioning portion is closer to the light receiving portion than an intermediate position between the light receiving portion and the connecting portion. Arranged reflection characteristic measurement system.
  8. 　前記反射特性測定システムは、前記反射特性測定装置を移動可能にガイドするガイド装置をさらに備え、
    　前記位置合わせ装置を前記反射特性測定装置に装着して行う測定と、
    　前記ガイド装置を前記反射特性測定装置に装着して行う測定とが可能である請求項７に記載の反射特性測定システム。     The reflection characteristic measurement system further includes a guide device that guides the reflection characteristic measurement device to be movable,
    Measurement performed by attaching the alignment device to the reflection characteristic measurement device;
    The reflection characteristic measurement system according to claim 7, wherein the measurement can be performed by attaching the guide device to the reflection characteristic measurement apparatus.
  9. 　前記ガイド装置は、前記位置合わせ装置を未装着の前記反射特性測定装置が前記ガイド装置に装着された状態で、前記受光部と対向する測定開口を有する請求項８に記載の反射特性測定システム。 The reflection characteristic measurement system according to claim 8, wherein the guide device has a measurement opening facing the light receiving unit in a state where the reflection characteristic measurement device not attached with the alignment device is attached to the guide device.
PCT/JP2011/078985 2011-01-27 2011-12-15 Alignment apparatus and reflection characteristic measurement system WO2012101922A1 (en)

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WO2014083798A1 (en) * 2012-11-30 2014-06-05 コニカミノルタ株式会社 Reflection properties measuring device and manufacturing method for polarizing plates used in same
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