WO2012088714A1 - Dispositif et procédé de détection optique - Google Patents

Dispositif et procédé de détection optique Download PDF

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Publication number
WO2012088714A1
WO2012088714A1 PCT/CN2010/080620 CN2010080620W WO2012088714A1 WO 2012088714 A1 WO2012088714 A1 WO 2012088714A1 CN 2010080620 W CN2010080620 W CN 2010080620W WO 2012088714 A1 WO2012088714 A1 WO 2012088714A1
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WO
WIPO (PCT)
Prior art keywords
angle
rotating arm
optical detecting
disposed
detecting device
Prior art date
Application number
PCT/CN2010/080620
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English (en)
Chinese (zh)
Inventor
蓝永松
黄朱瑜
张胜立
邱国基
官翰文
Original Assignee
财团法人工业技术研究院
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 财团法人工业技术研究院 filed Critical 财团法人工业技术研究院
Priority to PCT/CN2010/080620 priority Critical patent/WO2012088714A1/fr
Priority to TW100106498A priority patent/TWI420092B/zh
Publication of WO2012088714A1 publication Critical patent/WO2012088714A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

Definitions

  • the present invention relates to an optical system and detection method, and more particularly to an optical detection device and an optical detection method. BACKGROUND OF THE INVENTION
  • the detection of light is generally not excessively destructive to the substance itself, and is therefore advantageous for use as a test for various substances.
  • Surface plasmon resonance microscopy is an optical detection method that has great potential in recent years, and it can be applied to the field of biotechnology.
  • Biotechnology is one of the key national science and technology projects that Taiwan has developed in this century, and drug development is the mainstream of biotechnology.
  • the development of rapid detection methods and effective drug screening is a common goal of all biopharmaceutical technologies, and the surface plasmon resonance imaging technology platform will efficiently select the active ingredients in the extract.
  • This selection technique can also be applied to a variety of receptors, and to develop various therapeutic drugs, such as immunomodulatory drugs, anti-inflammatory drugs, for specific ligands in the targets selected by different receptors. Anti-osteoporosis drugs, anticancer drugs and anti-allergic drugs.
  • surface plasmon resonance technology has recently been widely used in the development of biomolecular sensors, which is an optical method that can achieve non-marking, high sensitivity, small sample, and instant detection methods.
  • Surface plasmon resonance technology utilizes the specific selectivity of biological immunoassays to detect relatively low concentrations of specific molecules in complex mixtures.
  • Ellipsometry is also an optical detection method that uses different polarized light to measure the thickness of the sample and its refractive index for non-destructive measurements. Summary of the invention
  • Embodiments of the present invention provide an optical detecting apparatus adapted to measure a substance to be tested.
  • the optical detecting device includes a first rotating arm, a second rotating arm, a push rod, a light source, and a photodetector.
  • the first rotating arm has a first groove.
  • the second rotating arm is pivotally connected to the first rotating arm via a center of rotation and has a second groove.
  • the push rod has opposite first and second ends, and includes a first bolt disposed at the first end and a second bolt disposed at the second end.
  • the first pin is disposed on the first groove
  • the second pin is disposed on the second groove.
  • the light source is disposed on the first rotating arm.
  • the photodetector is disposed on the second rotating arm, wherein the substance to be tested is adapted to be disposed near the center of rotation.
  • the optical detecting device includes a first rotating arm, a second rotating arm, a light source, a photodetector, a carrier, and a control unit.
  • the second rotating arm is pivotally coupled to the first rotating arm via a center of rotation.
  • the light source is disposed on the first rotating arm.
  • the photodetector is disposed on the second rotating arm, wherein the substance to be tested is adapted to be disposed near the center of rotation.
  • the carrier is disposed on the center of rotation, wherein the carrier has a bearing surface, and the bearing surface is used to carry the substance to be tested.
  • the photodetector has a photosensitive surface
  • the control unit is configured to adjust the angle of the normal vector of the photosensitive surface relative to the extending direction of the second rotating arm according to the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface. .
  • the control unit increments or decrements the angle of the normal of the photosensitive surface with respect to the extending direction of the second rotating arm.
  • Yet another embodiment of the present invention provides an optical detection method comprising the following steps.
  • the above optical detecting device is provided. Place the substance to be tested near the center of rotation.
  • the light source is turned on to illuminate the illumination beam emitted by the light source on the substance to be tested, wherein the substance to be tested reflects the illumination beam into the sensing light.
  • the light detector detects the sensed light. Moving the push rod to slide the first plug and the second plug in the first groove and the second groove respectively, thereby changing an angle at which the illumination beam enters the object to be tested, and simultaneously changing the detected by the photodetector Sensing the angle of reflection of the light.
  • FIG. 1 is an exploded view of an optical detecting device according to an embodiment of the present invention.
  • FIG. 2A is a schematic perspective view of the first rotating arm, the second rotating arm, the push rod, the actuator, and the substrate of FIG. 1.
  • Figure 2B is the back side of the structure of Figure 2A.
  • Fig. 3 is a schematic view showing the optical path of the optical detecting device of Fig. 1.
  • FIG. 4 is a first rotating arm and a second rotation in an optical detecting device according to another embodiment of the present invention.
  • FIG. 5 and FIG. 6 are perspective views of two different viewing angles of a first rotating arm, two rotating arms, a push rod, an actuator, and a substrate in an optical detecting device according to still another embodiment of the present invention.
  • Fig. 7 is a schematic view showing the optical path of an optical detecting device according to still another embodiment of the present invention.
  • FIG. 8 and 9 are schematic diagrams showing optical paths of an optical detecting device according to another embodiment of the present invention.
  • FIG. 10 is a schematic structural view of an optical detecting device according to still another embodiment of the present invention.
  • 11A is a schematic structural view of an optical detecting device according to still another embodiment of the present invention.
  • Fig. 11B is a partial enlarged view of Fig. 11A.
  • Figure 12 is a schematic view showing the structure of an optical detecting device according to another embodiment of the present invention.
  • Figure 13 is a schematic view showing the structure of an optical detecting device according to still another embodiment of the present invention.
  • Figure 14 is a flow chart of an optical detecting method in accordance with an embodiment of the present invention.
  • Figure 15 is a flow chart showing an optical detecting method according to another embodiment of the present invention.
  • FIG. 1 is an exploded view of an optical detecting device according to an embodiment of the present invention.
  • 2A is a perspective view of the first rotating arm, the second rotating arm, the push rod, the actuator, and the substrate in FIG. 1, and
  • FIG. 2B shows the back side of the structure of FIG.
  • Fig. 3 is a schematic view showing the optical path of the optical detecting device of Fig. 1.
  • the optical detecting device 100 of the present embodiment is adapted to measure the substance to be tested 52.
  • the optical detecting device 100 is, for example, a surface plasmon resonance image apparatus, and the substance 52 1 is a water, a liquid, a drug, an organism, a microorganism, or other biochemical.
  • the optical detecting device 100 includes a first rotating arm 110, a second rotating arm 120, a push rod 130, a light source 210, and a photodetector 230.
  • the first rotating arm 110 has a first groove 112.
  • the second rotating arm 120 is via the second rotating arm 120.
  • the rotating center 140 is pivotally connected to the first rotating arm 110 and has a second groove 122.
  • the push rod 130 has opposite first ends 132 and second ends 134, and includes a first plug 136 disposed at the first end 132 and The second pin 138 is disposed on the second end 134.
  • the first pin 136 is slidably disposed on the first groove 112, and the second pin 138 is slidably disposed on the second groove 122.
  • the light source 210 is disposed on the first rotating arm 110.
  • the photodetector 230 is disposed on the second rotating arm 120, and the substance to be tested 52 is adapted to be disposed near the center of rotation 140.
  • the optical detecting device 100 further includes a surface plasmon resonance detecting portion 50 disposed on the rotating center 140 and contacting the substance to be tested 52 to generate a surface plasmon resonance phenomenon.
  • the surface plasmon resonance detecting unit 50 is, for example, a prism type surface plasmon resonance sensing unit.
  • the surface plasmon resonance detecting portion 50 is, for example, a carrier having a bearing surface 59 for carrying the substance to be tested 52.
  • the surface plasmon resonance detecting unit 50 includes a prism 51, a transparent plate 58, a metal film 56, and a plurality of biological probes 54.
  • the bearing surface 59 is located on the center of rotation 140, for example, the metal film 56 is located on the center of rotation 140.
  • the extension line of the center line on the metal film 26 passes through the center of rotation 140, which is, for example, a reference line which passes through the center of the metal film 26 and divides the metal film 26 into two parts. In other words, the center of rotation 140 is aligned with the centerline of the metal film 26.
  • an extension line of a reference line on the metal film 26 passes through the center of rotation, and this reference line is substantially parallel to the center line of the metal film 26, but does not coincide with the center line.
  • the center of rotation 140 is offset from the centerline of the metal film 56.
  • the transparent plate 58 is, for example, a glass plate
  • the metal film 56 is, for example, a gold film
  • the biological probe 54 is disposed on the bearing surface 59, wherein the biological probe 54 can grasp a specific one of the substances to be tested 52. Ingredients are used for measurement.
  • the transparent plate 58 is disposed between the prism 51 and the metal film 56.
  • an index matching oil layer may be disposed between the transparent plate 58 and the prism 51 to achieve better light coupling effect and to avoid reflection loss of light at the interface.
  • the light source 210 is, for example, a light emitting diode (LED) adapted to emit an illumination beam 212 (as shown in FIG. 3).
  • light source 210 can also be a laser emitter.
  • the surface plasmon resonance detecting unit 50 is disposed on the transmission path of the illumination light beam 212, and after the illumination light beam 212 is irradiated onto the surface plasmon resonance detecting unit 50, the sensing light 214 carrying the surface plasmon resonance information is generated, and the light detection is performed.
  • the device 230 is disposed on the transmission path of the sensing light 214.
  • the illumination light 212 is provided with a mask 250, a lens group 260, a band pass filter 270, and a polarizer 220 on a transmission path between the light source 210 and the surface plasmon resonance detecting portion 50. And these components are all disposed on the first rotating arm 110, wherein these components can constitute the illumination optical module 205.
  • the mask 250 has apertures 252 through which the illumination beam 212 passes through the apertures 252.
  • Lens group 260 is used to enhance the collimation of illumination beam 212.
  • Bandpass filter 270 is used to purify the illumination beam 212 such that illumination beam 212 is close to a single wavelength beam.
  • Polarizer 220 is used to cause illumination beam 212 to produce linear polarization, while its polarization direction is ⁇ polarized for carrier surface 59.
  • metal film 56 reflects illumination beam 212 into sensed light 214 such that the sensed light carries surface plasmon resonance information.
  • the sensing light 214 is provided with an imaging optical module 240 on the transmission path between the surface plasmon resonance detecting portion 50 and the photodetector 230 to transmit the sensing light 214 to the light.
  • the detector 230 and the surface of the metal film 56 are formed on the photodetector 230 , wherein the imaging optical module 240 is disposed on the second rotating arm 120 .
  • the imaging optical module 240 is, for example, an imaging lens.
  • the photodetector 230 is, for example, a charge coupled device camera (CCD camera) or a complementary metal oxide semiconductor camera (CMOS camera), so as to photograph the surface plasma on the metal moon Mo 56 Body resonance image.
  • CCD camera charge coupled device camera
  • CMOS camera complementary metal oxide semiconductor camera
  • the incident angle of the illumination beam 212 entering the metal film 56 can be changed, and the resonance angle generated by the substance to be tested 52 can be found by the captured surface plasmon resonance image. In this way, the type and characteristics of the object to be tested can be analyzed.
  • the incident angle ⁇ 1 of the light of the illumination beam 212 on the optical axis can be designed to remain substantially equal to the incoming photodetector.
  • the reflection angle 236 of the light of the sensed light 214 on the optical axis 230 is 230, which can achieve a better measurement effect.
  • the angular bisector E of the optical axis of the illumination beam 212 and the optical axis of the sensed light 214 substantially coincides with the normal to the metal film 56.
  • the optical detecting device 100 may be designed such that when the first pin 136 and the second pin 138 slide in the first groove 112 and the second groove 122, respectively, the first pin 136 to the center of rotation 140 The distance is maintained substantially equal to the distance of the second pin 138 to the center of rotation 140.
  • the triangle formed by the first plug 136, the second post 138, and the center of rotation 140 is always an isosceles triangle, and thus, the first rotation
  • the angle bisector E of the arm 110 and the second rotating arm 120 is kept perpendicular to the bearing surface 59, so that the incident angle ⁇ 1 is maintained at a state substantially equal to the reflection angle ⁇ 2 to achieve a better measurement effect.
  • the optical detecting device 100 further includes a substrate 150 having a plurality of third trenches (in FIG. 1 , the third trench 152 and the third trench 154 are taken as an example, and the push rod 130 further includes a plurality of third plugs (exemplified by the third plug 135 and the third plug 137 in FIG. 2B) are respectively slidably disposed in the third trenches 152, 154, wherein the third trenches 152, 154 are substantially Parallel to the angle bisector E of the first rotating arm 110 and the second rotating arm 120.
  • the third plug 135 is located at the first end 132 of the push rod 130, and the third plug 135 and the first plug 136 are respectively
  • the third pin 137 is located at the second end 134 of the push rod 130, and the third pin 137 and the second pin 138 are respectively located on opposite sides of the push rod 130.
  • the push rod 130 is disposed between the substrate 150 and the first rotating arm 110 and disposed between the substrate 150 and the second rotating arm 120 .
  • the first trench 112 is substantially parallel to the optical axis of the illumination beam 212
  • the second trench 122 is substantially parallel to the optical axis of the sensed light 214.
  • the optical detecting device 100 further includes an actuator 180 coupled to the push rod 130 to drive the push rod 130 to move the first plug 136 and the second plug 138 in the first groove 112 and the second, respectively. Sliding in the groove 122.
  • the actuator 180 is, for example, a linear motor, but the invention is not limited thereto.
  • the optical detecting device 100 of the present embodiment can maintain the incident angle ⁇ 1 of the optical axis of the illumination beam 252 substantially equal to the reflection angle ⁇ 2 of the optical axis of the sensing light 214 by a relatively simple mechanism, and thus the embodiment The optical detecting device 100 can combine both lower manufacturing cost and better measurement accuracy. Further, since the optical detecting device 100 of the present embodiment drives the push rod 130 by the actuator 180, the optical detecting device 100 can continuously perform real time measurement. For example, the substance to be tested 52 is, for example, a flowing liquid, and as the liquid continuously flows, the optical detecting device 100 can instantly monitor changes in the characteristics of the liquid at different times. However, in other embodiments, the optical detection device may also not include the actuator 180, but the user moves the push rod 130 by hand.
  • FIG. 4 is a perspective view showing a first rotating arm, a second rotating arm, a push rod, an actuator, and a substrate in an optical detecting device according to another embodiment of the present invention.
  • the optical detecting device of the present embodiment is similar to the optical detecting device 100 of FIG. 1, and the difference between the two is as follows.
  • the substrate 150 is located at the push rod 130a and the first Between the rotating arms 110, and the substrate 150 is located between the push rod 130a and the second rotating arm 120.
  • the push rod 130a does not have the third plug 135, 137 in FIG. 2B, and the first plug 136 and the second plug 138 of the push rod 130a are respectively disposed outside the first groove 112 and the second groove 122.
  • first plug 136 is slidably disposed on the first trench 112 through the substrate 150 via the third trench 152 .
  • the second plug 138 is slidably disposed on the second trench 122 through the substrate 150 via the third trench 154 .
  • FIG. 5 and 6 are perspective views of two different viewing angles of a first rotating arm, a second rotating arm, a push rod, an actuator, and a substrate in an optical detecting device according to still another embodiment of the present invention.
  • the optical detecting device of this embodiment is similar to the optical detecting device 100 of Figure 1, and the differences between the two are as follows.
  • the optical detecting device of the embodiment further includes a slide rail 160 disposed on the substrate 150, wherein the push rod 130b is non-rotatably slidably disposed on the slide rail 160, and the slide rail 160 is substantially parallel to the first
  • the angle between the rotating arm 110 and the second rotating arm 120 is bisector E.
  • the slide rail 160 and the first rotating arm 110 are respectively disposed on opposite sides of the substrate 150, and the slide rail 160 and the second rotating arm 120 are respectively disposed on opposite sides of the substrate 150.
  • the optical detecting device further includes a sliding portion 170, and the push rod 130b is slidably disposed on the sliding rail 160 through the sliding portion 170.
  • the substrate 150 has at least one third trench (in the FIG. 5, two third trenches 152b and 154b are taken as an example), and the sliding portion 170 and the push rod 130b are respectively disposed on the opposite sides of the substrate 150. side.
  • the optical detecting device further includes at least one connecting portion 135b (in the present embodiment, two connecting portions are exemplified), one connecting portion 135b passes through the third groove 154b, and the other is actuated in FIG.
  • the connecting portion that is blocked by 180 and passes through the third groove 152b, and both connecting portions are connected to the sliding portion 170 and the push rod 130b.
  • the two connecting portions are adapted to move in the third groove 152b and the third groove 154b, respectively.
  • the actuator 180 is coupled to the sliding portion 170 to urge the sliding portion 170 to slide on the slide rail, thereby driving the push rod 130b to move up and down.
  • the first rotating arm 110 and the second rotating arm 120 can be rotated while maintaining the incident angle ⁇ 1 substantially equal to the reflection angle ⁇ 2 (refer to Fig. 3).
  • Fig. 7 is a schematic view showing the optical path of an optical detecting device according to still another embodiment of the present invention.
  • the optical detecting device of the present embodiment is similar to the optical detecting device of FIGS. 1 and 3, and the difference between the two is that the surface plasmon resonance detecting portion 50c of the optical detecting device of the present embodiment is a grating type surface plasmon resonance sensing portion. .
  • the surface of the surface plasmon resonance detecting portion 50c has a grating structure 54c which can grasp the substance to be tested 52.
  • the state of the bearing surface 59c of the surface plasmon resonance detecting portion 50c that is, the angle bisector E of the first rotating arm 110 and the second rotating arm 120 (please refer to FIG. 1) is maintained on the normal line of the bearing surface 59c. .
  • FIG. 8 and 9 are schematic diagrams showing optical paths of an optical detecting device according to another embodiment of the present invention. In both embodiments, only the optical path is illustrated for illustration, while the remaining mechanisms (eg, the first rotating arm 110, The second rotating arm 120, the push rod 130, the substrate 150, and the actuator 180 are the same as those in FIG. 1, so the related mechanism is referred to FIG. 1, and the drawing is not repeated here.
  • the optical detecting device of this embodiment is an ellipsometer, which can be used to measure the thickness of the object to be tested 52d, wherein the object to be tested 52d is, for example, a film.
  • the light source 210d is, for example, a laser beam
  • the illumination beam 212d emitted by the light source 210d is, for example, a single-wavelength laser beam.
  • the light source may also be provided with a multi-wavelength source (eg, a white light source) with a bandpass filter on the transmission path of the illumination beam to obtain a single wavelength beam.
  • the optical detecting device further includes a first polarizer 222d and a second polarizer 242d.
  • the illumination beam 212d emitted from the light source 210d is irradiated on the substance to be tested 52d.
  • the first polarizer 222d is disposed on the transmission path of the illumination beam 212d, and is located at the light source 210d and the substance to be tested is directed to the photodetector 230d.
  • the second polarizer 242d is disposed on the transmission path of the sensing light 214d and located between the substance to be tested 52d and the photodetector 230d.
  • the light source 210d and the first polarizer 222d are disposed on the first rotating arm 110 (please refer to FIG.
  • the optical detecting means may further include a phase retarder 224d, such as a quarter wave plate, in which case the optical detecting means may measure by a null elliposmeter.
  • the optical detecting device of the present embodiment is similar to the optical detecting device of FIG. 8, and the difference between the two is that the optical detecting device of FIG. 9 does not use the phase retarder 224d of FIG. 8, so the optical detecting of FIG.
  • the device can be measured using a photometric ellipsometer.
  • the optical detecting device of the present invention is not limited to a surface plasmon resonance imager, an ellipsometer or an elliptical imager.
  • the optical detecting device may be any other optical axis and sensing light that require illumination of the illumination beam.
  • FIG. 10 is a schematic structural view of an optical detecting device according to still another embodiment of the present invention.
  • the optical detecting device 100e of the present embodiment is partially similar to the optical detecting device 100 of FIG.
  • Elements of similar or identical parts are denoted by the same reference numerals, and their detailed functions and actions It will not be repeated here.
  • the differences between the two are as follows.
  • the mechanism for driving the rotation of the first rotating arm 110e and the second rotating arm 120e is not limited to the mechanism of the foregoing embodiment, and may be any mechanism for driving the first rotating arm 110e and the second rotating arm 120e to rotate.
  • the first rotating arm 110e and the second rotating arm 120e are adapted to rotate at an equal angle, that is, regardless of how the first rotating arm 110e and the second rotating arm 120e rotate, the first rotating arm 110e is perpendicular to The angle of the angle bisector E of the bearing surface 59 is always maintained at a state substantially equal to the angle between the second rotating arm 120e and the angle bisector E.
  • the optical detecting device 100e includes a control unit 310, and the photodetector 230 has a photosensitive surface 234e.
  • the photodetector 230 has a photodetecting element 232e, and the photoreceptor 232e is, for example, a photosensitive surface of the image detecting component 232e, wherein the image detecting component 232e is, for example, a charge coupled device (CCD) or Complementary metal oxide semiconductor sensor (CMOS sensor).
  • the control unit 310 is configured to adjust the extending direction of the normal vector V2 of the photosensitive surface 234e relative to the second rotating arm according to the angle ⁇ ⁇ of the inverse vector of the normal vector VI of the second rotating arm 120e and the bearing surface.
  • the angle ⁇ 2 (in the present embodiment, the direction parallel to the optical axis 124 of the imaging optical module 240).
  • the control unit 310 gives the angle ⁇ 2—the initial third angle when the angle ⁇ ⁇ is the first angle, and increases the angle ⁇ ⁇ from the first angle to the first angle.
  • the angle ⁇ 2 is decreased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the fourth angle is smaller than the third angle.
  • the angle ⁇ 2 is increased from the fourth angle to the third angle.
  • the control unit 310 when the angle ⁇ ⁇ is increased by a first angle, gives the angle ⁇ 2—the initial third angle when the angle ⁇ ⁇ is the first angle, when the angle ⁇ ⁇ is When the first angle is incremented to a second angle, the angle ⁇ 2 is increased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the third angle is smaller than the fourth angle.
  • the angle ⁇ ⁇ is decreased from the second angle to the first angle
  • the angle ⁇ 2 is decreased from the fourth angle to the third angle.
  • the normal vector of the surface of the object is defined as a vector that is pointed by the object into the object and perpendicular to the surface.
  • the angle between the vector and the straight line (or the arm) is defined as the smaller of the angles between the vector and the straight line (or the arm) which are equal to 180 degrees. And when the vector and the straight line (or the arm) are perpendicular to each other, the angle between the two is 90 degrees.
  • the object plane for example, the bearing surface 59 and the optical axis are not perpendicular, which causes the image of the 7-plane 59 detected by the photodetector 230 to have a perspective distortion, which may also be called trapezoidal distortion ( Keystone distortion ).
  • the angle ⁇ ⁇ is increased, but ⁇ 2 is maintained at 0 degrees, and the image detected by the photodetector 230 on the bearing surface 59 is detected by the photodetector 230 as the angle ⁇ ⁇ increases.
  • Image compression deformation was detected.
  • the software needs to correct the image to correct the factors of perspective distortion and image compression, and then compare the data of different measurement points measured by different angles ⁇ .
  • the resolution of the image is greatly reduced, which affects the accuracy of the measurement. This problem is more serious when ⁇ is larger.
  • the control unit 310 when the angle ⁇ is increased by a first angle, gives the angle ⁇ 2 - the initial third angle when the angle ⁇ ⁇ is the first angle, when the clip When the angle ⁇ ⁇ is increased from the first angle to the second angle, the angle ⁇ 2 is decreased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the fourth angle is smaller than the third angle.
  • the angle ⁇ 2 is increased from the fourth angle to the third angle.
  • the control unit 310 when the angle ⁇ ⁇ is increased by a first angle, gives the angle ⁇ 2—the initial third angle when the angle ⁇ ⁇ is the first angle, when the angle ⁇ ⁇ is When the first angle is incremented to a second angle, the angle ⁇ 2 is increased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the third angle is smaller than the fourth angle.
  • the angle ⁇ ⁇ is decreased from the second angle to the first angle
  • the angle ⁇ 2 is decreased from the fourth angle to the third angle. In this way, the degree of perspective distortion and image compression can be effectively reduced, thereby effectively improving the problem of the reduced image resolution. As a result, the measurement accuracy and reliability of the optical detecting device 100e of the embodiment can be greatly improved.
  • the angle ⁇ ⁇ is increased from a smaller first angle to a larger second angle, and at this time the angle ⁇ 2 is decreased from a larger initial third angle to a smaller fourth angle.
  • the angle ⁇ ⁇ decreases from a larger first angle to a smaller second angle, while the angle ⁇ 2 increases from a smaller third angle to a larger fourth angle.
  • the angle ⁇ ⁇ is increased from a smaller first angle to a larger second angle, and at this time the angle ⁇ 2 is increased from a smaller initial third angle to Big fourth angle.
  • the angle ⁇ ⁇ decreases from a larger first angle to a smaller second angle, and at this time the angle ⁇ 2 decreases from a larger third angle to a smaller fourth angle.
  • the first angles in the different situations described above may not be identical or completely different from each other.
  • the second angles of the four cases may not be identical or completely different from each other.
  • the same is true for the third and fourth angles in different situations.
  • Case 1 and Case 2 occur when the angle ⁇ 2 is excessively large for the angle ⁇ ⁇
  • Case 3 and Case 4 occur when the angle ⁇ 2 is insufficient for the angle ⁇ ⁇ , and the compensation effect is insufficient. It refers to the effect of reducing the degree of perspective distortion and image compression by the change of the angle ⁇ 2.
  • the optical detecting device 100e further includes an actuator 320 connected to the photodetector 230 for driving the photosensitive surface 234e to rotate, wherein the actuator 320 is electrically connected to the control unit 310 and controlled Unit 310 is adapted to command actuator 320 to drive photosensitive surface 234e to rotate.
  • the control unit 310 is, for example, a control circuit that drives the photosensitive surface 234e to rotate by a telecommunication command actuator 320.
  • the photodetector 230 is pivotally connected to the second rotating arm 120e.
  • the actuator 320 is, for example, a motor that drives the photodetector 230 to rotate, and the photodetector 230 drives the photosensitive surface 234e to rotate.
  • the actuator 320 is located between the photodetector 230 and the second rotating arm 120e, that is, after the actuator 320 is disposed on the second rotating arm 120e, and then the photodetector 230 is disposed. Actuator 320.
  • the photodetector 230 may be disposed between the actuator 320 and the second rotating arm 120e, that is, after the photodetector 230 is disposed on the second rotating arm 123e, Actuator 320.
  • the photosensitive surface 234e has a center line 235e passing through the center of the photosensitive surface 234e, and the center line 235e falls on the photosensitive surface 234e, and the photosensitive surface 234e rotates around the center line 235e.
  • the rotation axis of the actuator 320 can be located on the extension line of the center line 235e of the photosensitive surface 234e, and the center line 235e of the photosensitive surface 234e is perpendicular to the first A plane of rotation of the rotating arm 110e and the second rotating arm 120e.
  • the center line 235e of the photosensitive surface 234e can be further intersected with the optical axis 124 of the imaging optical module 240, which also contributes to enhancing the imaging effect of the image.
  • the center line 235e and the optical axis 124 are substantially perpendicular to each other.
  • the variation range of the included angle ⁇ ⁇ falls within a range of more than 0 degrees and less than 90 degrees
  • the variation range of the included angle ⁇ 2 falls within the range of 0 degrees to 70 degrees.
  • the range of the angle ⁇ ⁇ and the angle ⁇ 2 may be related to the magnification of the optical detecting device 100e.
  • the photosensitive surface 234e may also be a reference line around the center of the photosensitive surface 234e that is offset from the photosensitive surface 234e. Turning, this reference line is, for example, parallel to the center line 235e but does not coincide.
  • the axis of rotation of the actuator 320 may also be an extension line located on the reference line.
  • the optical sensing device 100e further includes a hollow light-shielding elastic sleeve 330 connected to the imaging optical module 240 and the photodetector 230, wherein the hollow shading elastic sleeve is disposed in the embodiment, in order to avoid the interference of the external stray light on the optical detection result.
  • the cartridge 330 seals the sensing light 214 between the imaging optical module 240 and the photodetector 230 in the hollow shading elastic sleeve 330.
  • the hollow shading elastic sleeve 330 surrounds the optical axis 124 of the imaging optical module 240 and closely connects the imaging optical module 240 and the photodetector 230 without light leakage.
  • the control unit 310 finds the normal vector V2 of the photosensitive surface 234e with respect to the extending direction of the second rotating arm 120e according to the angle ⁇ between the second rotating arm 120e and the inverse vector of the normal vector VI of the bearing surface 59 in a look-up manner. Corresponding angle ⁇ 2. Specifically, it can be experimentally found that when the angle ⁇ ⁇ is a certain value, the optimum angle ⁇ 2 can be used to obtain the best detection effect, and the ⁇ ⁇ value and the ⁇ 2 value at this time are obtained. Recorded in the form. Then, after a series of experiments, the correspondence between various ⁇ values and the best ⁇ 2 values is established, and the correspondence is recorded in the table.
  • control unit 310 can drive the second rotating arm 124 to a specific angle ⁇ through the actuator, and find the corresponding ⁇ 2 value by looking up the table, and make the photosensitive surface 234e rotates to this angle.
  • Fig. 11A is a schematic structural view of an optical detecting apparatus according to still another embodiment of the present invention
  • Fig. 11B is a partially enlarged view of Fig. 11A.
  • the optical detecting device 100f of the present embodiment is similar to the optical detecting device 100e of FIG. 10, and the difference between the two is as follows.
  • the optical detecting device 100f further includes a substrate 150f, wherein the first rotating arm 110e and the second rotating arm 120e are pivotally disposed on the substrate 150f through the rotating center 140.
  • the control unit 31 Of is an institutional control unit.
  • the control unit 310f includes a curved groove 312f and a restriction plug 314f.
  • the curved groove 312f is disposed on the substrate 150f, and the limiting pin 314f is connected to the photodetector 230, for example, to the photodetector 230 through the rotating disk 316f of the control unit 310f. Further, the restricting pin 314f is slidably disposed in the curved groove 312f.
  • the trajectory of the curved groove 312f forces the limiting pin 314f to slide in the curved groove 312f, thereby driving the photosensitive surface 234e to rotate, that is, by rotating the rotating disk 316f to thereby perform light detection.
  • Turbo 230 Turn.
  • the angle ⁇ ⁇ and the angle ⁇ 2 can have an appropriate correspondence, thereby improving the accuracy of the optical detection result.
  • FIG. 12 is a schematic structural view of an optical detecting device according to another embodiment of the present invention. Please refer to the figure
  • the optical detecting device 100h of the present embodiment is similar to the optical detecting device 100e of FIG. 10, and the difference between the two is that the optical detecting device 100h of the present embodiment replaces the hollow shading in FIG. 10 with the light-shielding housing 330h. Elastic sleeve 330.
  • the light shielding housing 330h covers the transmission path of the sensing light 214 between the imaging optical module 240 and the photodetector 230, and covers the imaging optical module 240 and at least a portion of the photodetector 230 (in FIG. The entire photodetector 230 is covered as an example). As a result, external stray light is less likely to enter the photodetector 230 to cause interference with the measurement results.
  • Fig. 10, Fig. 11A and Fig. 12 can also be applied to the above Fig. 1, Fig. 2A, Fig.
  • optical detecting devices of 2B, 4, 5 and 6 an embodiment will be described below as a representative.
  • FIG. 13 is a schematic structural view of an optical detecting device according to still another embodiment of the present invention. Please refer to the figure
  • the optical detecting device 100 g of the present embodiment is a combination of the optical detecting device 100 of FIG. 1 and the optical detecting device 100 e of FIG. 10 , wherein the same reference numerals as those of FIGS. 1 and 10 represent the same or similar components, and their functions are used. It will not be repeated here.
  • the actuator 320 is connected to the photodetector 230 to drive the photodetector 230 to rotate along with the rotation of the second rotating arm 120.
  • the manner of rotation and the amount of rotation refer to FIG.
  • the photodetector 230 is disposed between the actuator 320 and the second rotating arm 120.
  • control unit 310 is electrically coupled to actuator 180 and actuator 320.
  • control unit 310 commands the actuator 180 to push the second rotating arm 120 to a certain angle, it also knows which angle the photodetector 230 should rotate by looking up the table, and commands the actuator 320 to detect the light. The detector 230 is rotated to this angle.
  • FIG. 14 is a flow chart of an optical detecting method in accordance with an embodiment of the present invention.
  • the optical detecting method of the present embodiment is applied to the optical detecting device of Figs. 1 to 9, and the following is an example of the optical detecting device 100 of Fig. 1.
  • step S110 is performed, which is to provide the optical detecting device 100 described above.
  • step S120 is performed to place the substance to be tested 52 near the center of rotation 140.
  • step S130 the light source 210 is turned on, so that the illumination beam 212 (shown in FIG.
  • step S140 is performed to detect the sensing light 214 with the photodetector 230.
  • step S150 the push rod 130 is moved to make the first plug 136 and the second plug 138 Sliding in the first trench 112 and the second trench 122 respectively, thereby changing the angle at which the illumination beam 212 enters the substance to be tested 52, and simultaneously changing the reflection angle of the sensing light 214 detected by the photodetector 230.
  • Figure 15 is a flow chart of an optical detecting method according to another embodiment of the present invention.
  • the optical detecting method of this embodiment is similar to the optical detecting method of FIG. 14, and the difference between the two is that step S150 of FIG. 14 is slightly different from step S150' of FIG. 15, and the optical detecting of the embodiment is different.
  • the method can be applied to the optical detecting devices 100e, 100f, 100g, 100h of FIGS. 10 to 13.
  • step S150 of the embodiment when the angle at which the illumination beam 212 is incident on the substance to be tested 52 is changed, and the reflection angle of the sensing light 214 detected by the photodetector 230 is changed, according to the second rotating arm
  • the angle between the 120e and the inverse vector of the normal vector VI of the bearing surface 59 adjusts the angle of the normal vector V2 of the photosensitive surface 234e with respect to the extending direction of the second rotating arm 120e.
  • the angle ⁇ ⁇ is increased from a first angle to a second angle
  • the angle ⁇ 2 is correspondingly decreased from a third angle to a fourth angle, wherein the first angle, the second angle, the third angle, and the The four angles are all greater than 0 degrees and less than 90 degrees.
  • the angle ⁇ 2 when the angle ⁇ ⁇ is decreased from the second angle to the first angle, the angle ⁇ 2 is correspondingly increased from the fourth angle to the third angle.
  • the angle ⁇ ⁇ when the angle ⁇ ⁇ is increased from a first angle to a second angle, the angle ⁇ 2 is correspondingly increased from a third angle to a fourth angle, wherein the first angle, The second angle, the third angle, and the fourth angle are both greater than 0 degrees and less than 90 degrees.
  • the angle ⁇ ⁇ when the angle ⁇ ⁇ is decreased from the second angle to the first angle, the angle ⁇ 2 is correspondingly decreased from the fourth angle to the third angle.
  • the optical detecting device and the optical detecting method of the embodiment of the present invention since the first pin and the second pin slide in the first groove and the second groove respectively, the first pin is rotated The distance of the center is maintained substantially equal to the distance of the second pin to the center of rotation, so the position of the angle bisector of the first rotating arm and the second rotating arm is maintained regardless of the angle at which the first rotating arm and the second rotating arm are rotated. change. In this way, a better optical measurement effect can be achieved.
  • the optical detecting device can maintain the incident angle of the optical axis of the illumination beam substantially equal to the reflection angle of the optical axis of the sensing light by a relatively simple mechanism, and thus the implementation of the present invention
  • the optical detecting device of the example can have both lower manufacturing cost and better measurement accuracy.
  • the optical detecting device of the embodiment of the present invention drives the push rod by the actuator, the optical detecting device can continuously perform the instantaneous measurement.
  • the normal vector of the photosensitive surface can be made relative to The angle of the extending direction of the second rotating arm is increased or decreased, so that the perspective distortion and image compression of the image formed in the photodetector can be effectively reduced, thereby improving the detection of the optical detecting device and the optical detecting method. Accuracy.

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Abstract

La présente invention a pour objet un dispositif de détection optique et un procédé pour la détection d'une substance à détecter. Le dispositif de détection optique (100) comprend un premier bras rotatif (110), un second bras rotatif (120), une barre de poussée (130), une source de lumière (210) et un détecteur optique (230). Le premier bras rotatif (110) possède une première rainure (112) et le second bras rotatif (120) possède une seconde rainure (122), et le second bras rotatif (120) est monté pivotant sur le premier bras rotatif (110) par l'intermédiaire d'un centre pivotant (140). La barre de poussée (130) comporte une première broche (136) et une seconde broche (138), la première broche (136) est engagée de façon coulissante dans la première rainure (112), et la seconde broche (138) est engagée de façon coulissante dans la seconde rainure (122). Quand la première broche (136) et la seconde broche (138) coulissent respectivement dans la première rainure (112) et dans la seconde rainure (122), la distance entre la première broche (136) et le centre pivotant (140) est conservée sensiblement identique à la distance entre la seconde broche (138) et le centre pivotant (140). La source de lumière (210) est disposée sur le premier bras rotatif (110), le détecteur optique (230) est disposé sur le second bras rotatif (120), et la substance à détecter est ajustée pour se disposer à proximité du centre pivotant (140).
PCT/CN2010/080620 2010-12-31 2010-12-31 Dispositif et procédé de détection optique WO2012088714A1 (fr)

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TW100106498A TWI420092B (zh) 2010-12-31 2011-02-25 光學檢測裝置及光學檢測方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110596052A (zh) * 2019-09-05 2019-12-20 北京化工大学 一种小型多角度扫描表面等离子体共振生化分析仪

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI600896B (zh) * 2015-07-08 2017-10-01 國立屏東科技大學 生物晶片檢測輔助模組
KR102522899B1 (ko) * 2016-02-05 2023-04-19 (주)테크윙 전자부품 적재상태 점검장치
TWI720166B (zh) * 2017-03-27 2021-03-01 聯華電子股份有限公司 用於在半導體製造設備控制系統中的製程控制方法
CN110346303A (zh) * 2019-08-05 2019-10-18 东莞南玻太阳能玻璃有限公司 一种防眩光玻璃反光亮度测量仪

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05180697A (ja) * 1991-12-28 1993-07-23 Shimadzu Corp 偏光測定装置の調整方法
EP1468651A1 (fr) * 2003-04-18 2004-10-20 General Electric Company Méthode et appareil pour équiliber un bras non-équilibré statiquement dans un système à rayons x
CN101051022A (zh) * 2007-04-06 2007-10-10 华南师范大学 一种椭偏测量装置
CN100477963C (zh) * 2005-08-08 2009-04-15 韩国威泰有限公司 组合式全景和计算机断层摄影设备
CN100480681C (zh) * 2005-12-16 2009-04-22 浙江大学 基于近红外光谱的植物生长信息获取装置
CN201434829Y (zh) * 2009-07-15 2010-03-31 长沙楚天科技有限公司 采用底光源的自动灯检机图像同步跟踪采集装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI259277B (en) * 2004-12-28 2006-08-01 Hon Hai Prec Ind Co Ltd Optical detector and detecting method
TWM388639U (en) * 2007-06-15 2010-09-11 King Yuan Electronics Co Ltd Automatic optical inspection device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05180697A (ja) * 1991-12-28 1993-07-23 Shimadzu Corp 偏光測定装置の調整方法
EP1468651A1 (fr) * 2003-04-18 2004-10-20 General Electric Company Méthode et appareil pour équiliber un bras non-équilibré statiquement dans un système à rayons x
CN100477963C (zh) * 2005-08-08 2009-04-15 韩国威泰有限公司 组合式全景和计算机断层摄影设备
CN100480681C (zh) * 2005-12-16 2009-04-22 浙江大学 基于近红外光谱的植物生长信息获取装置
CN101051022A (zh) * 2007-04-06 2007-10-10 华南师范大学 一种椭偏测量装置
CN201434829Y (zh) * 2009-07-15 2010-03-31 长沙楚天科技有限公司 采用底光源的自动灯检机图像同步跟踪采集装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110596052A (zh) * 2019-09-05 2019-12-20 北京化工大学 一种小型多角度扫描表面等离子体共振生化分析仪
CN110596052B (zh) * 2019-09-05 2021-02-19 北京化工大学 一种小型多角度扫描表面等离子体共振生化分析仪

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