WO2012088714A1 - Optical detecting device and method - Google Patents

Optical detecting device and method Download PDF

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Publication number
WO2012088714A1
WO2012088714A1 PCT/CN2010/080620 CN2010080620W WO2012088714A1 WO 2012088714 A1 WO2012088714 A1 WO 2012088714A1 CN 2010080620 W CN2010080620 W CN 2010080620W WO 2012088714 A1 WO2012088714 A1 WO 2012088714A1
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WO
WIPO (PCT)
Prior art keywords
angle
rotating arm
optical detecting
disposed
detecting device
Prior art date
Application number
PCT/CN2010/080620
Other languages
French (fr)
Chinese (zh)
Inventor
蓝永松
黄朱瑜
张胜立
邱国基
官翰文
Original Assignee
财团法人工业技术研究院
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 财团法人工业技术研究院 filed Critical 财团法人工业技术研究院
Priority to PCT/CN2010/080620 priority Critical patent/WO2012088714A1/en
Priority to TW100106498A priority patent/TWI420092B/en
Publication of WO2012088714A1 publication Critical patent/WO2012088714A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

Definitions

  • the present invention relates to an optical system and detection method, and more particularly to an optical detection device and an optical detection method. BACKGROUND OF THE INVENTION
  • the detection of light is generally not excessively destructive to the substance itself, and is therefore advantageous for use as a test for various substances.
  • Surface plasmon resonance microscopy is an optical detection method that has great potential in recent years, and it can be applied to the field of biotechnology.
  • Biotechnology is one of the key national science and technology projects that Taiwan has developed in this century, and drug development is the mainstream of biotechnology.
  • the development of rapid detection methods and effective drug screening is a common goal of all biopharmaceutical technologies, and the surface plasmon resonance imaging technology platform will efficiently select the active ingredients in the extract.
  • This selection technique can also be applied to a variety of receptors, and to develop various therapeutic drugs, such as immunomodulatory drugs, anti-inflammatory drugs, for specific ligands in the targets selected by different receptors. Anti-osteoporosis drugs, anticancer drugs and anti-allergic drugs.
  • surface plasmon resonance technology has recently been widely used in the development of biomolecular sensors, which is an optical method that can achieve non-marking, high sensitivity, small sample, and instant detection methods.
  • Surface plasmon resonance technology utilizes the specific selectivity of biological immunoassays to detect relatively low concentrations of specific molecules in complex mixtures.
  • Ellipsometry is also an optical detection method that uses different polarized light to measure the thickness of the sample and its refractive index for non-destructive measurements. Summary of the invention
  • Embodiments of the present invention provide an optical detecting apparatus adapted to measure a substance to be tested.
  • the optical detecting device includes a first rotating arm, a second rotating arm, a push rod, a light source, and a photodetector.
  • the first rotating arm has a first groove.
  • the second rotating arm is pivotally connected to the first rotating arm via a center of rotation and has a second groove.
  • the push rod has opposite first and second ends, and includes a first bolt disposed at the first end and a second bolt disposed at the second end.
  • the first pin is disposed on the first groove
  • the second pin is disposed on the second groove.
  • the light source is disposed on the first rotating arm.
  • the photodetector is disposed on the second rotating arm, wherein the substance to be tested is adapted to be disposed near the center of rotation.
  • the optical detecting device includes a first rotating arm, a second rotating arm, a light source, a photodetector, a carrier, and a control unit.
  • the second rotating arm is pivotally coupled to the first rotating arm via a center of rotation.
  • the light source is disposed on the first rotating arm.
  • the photodetector is disposed on the second rotating arm, wherein the substance to be tested is adapted to be disposed near the center of rotation.
  • the carrier is disposed on the center of rotation, wherein the carrier has a bearing surface, and the bearing surface is used to carry the substance to be tested.
  • the photodetector has a photosensitive surface
  • the control unit is configured to adjust the angle of the normal vector of the photosensitive surface relative to the extending direction of the second rotating arm according to the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface. .
  • the control unit increments or decrements the angle of the normal of the photosensitive surface with respect to the extending direction of the second rotating arm.
  • Yet another embodiment of the present invention provides an optical detection method comprising the following steps.
  • the above optical detecting device is provided. Place the substance to be tested near the center of rotation.
  • the light source is turned on to illuminate the illumination beam emitted by the light source on the substance to be tested, wherein the substance to be tested reflects the illumination beam into the sensing light.
  • the light detector detects the sensed light. Moving the push rod to slide the first plug and the second plug in the first groove and the second groove respectively, thereby changing an angle at which the illumination beam enters the object to be tested, and simultaneously changing the detected by the photodetector Sensing the angle of reflection of the light.
  • FIG. 1 is an exploded view of an optical detecting device according to an embodiment of the present invention.
  • FIG. 2A is a schematic perspective view of the first rotating arm, the second rotating arm, the push rod, the actuator, and the substrate of FIG. 1.
  • Figure 2B is the back side of the structure of Figure 2A.
  • Fig. 3 is a schematic view showing the optical path of the optical detecting device of Fig. 1.
  • FIG. 4 is a first rotating arm and a second rotation in an optical detecting device according to another embodiment of the present invention.
  • FIG. 5 and FIG. 6 are perspective views of two different viewing angles of a first rotating arm, two rotating arms, a push rod, an actuator, and a substrate in an optical detecting device according to still another embodiment of the present invention.
  • Fig. 7 is a schematic view showing the optical path of an optical detecting device according to still another embodiment of the present invention.
  • FIG. 8 and 9 are schematic diagrams showing optical paths of an optical detecting device according to another embodiment of the present invention.
  • FIG. 10 is a schematic structural view of an optical detecting device according to still another embodiment of the present invention.
  • 11A is a schematic structural view of an optical detecting device according to still another embodiment of the present invention.
  • Fig. 11B is a partial enlarged view of Fig. 11A.
  • Figure 12 is a schematic view showing the structure of an optical detecting device according to another embodiment of the present invention.
  • Figure 13 is a schematic view showing the structure of an optical detecting device according to still another embodiment of the present invention.
  • Figure 14 is a flow chart of an optical detecting method in accordance with an embodiment of the present invention.
  • Figure 15 is a flow chart showing an optical detecting method according to another embodiment of the present invention.
  • FIG. 1 is an exploded view of an optical detecting device according to an embodiment of the present invention.
  • 2A is a perspective view of the first rotating arm, the second rotating arm, the push rod, the actuator, and the substrate in FIG. 1, and
  • FIG. 2B shows the back side of the structure of FIG.
  • Fig. 3 is a schematic view showing the optical path of the optical detecting device of Fig. 1.
  • the optical detecting device 100 of the present embodiment is adapted to measure the substance to be tested 52.
  • the optical detecting device 100 is, for example, a surface plasmon resonance image apparatus, and the substance 52 1 is a water, a liquid, a drug, an organism, a microorganism, or other biochemical.
  • the optical detecting device 100 includes a first rotating arm 110, a second rotating arm 120, a push rod 130, a light source 210, and a photodetector 230.
  • the first rotating arm 110 has a first groove 112.
  • the second rotating arm 120 is via the second rotating arm 120.
  • the rotating center 140 is pivotally connected to the first rotating arm 110 and has a second groove 122.
  • the push rod 130 has opposite first ends 132 and second ends 134, and includes a first plug 136 disposed at the first end 132 and The second pin 138 is disposed on the second end 134.
  • the first pin 136 is slidably disposed on the first groove 112, and the second pin 138 is slidably disposed on the second groove 122.
  • the light source 210 is disposed on the first rotating arm 110.
  • the photodetector 230 is disposed on the second rotating arm 120, and the substance to be tested 52 is adapted to be disposed near the center of rotation 140.
  • the optical detecting device 100 further includes a surface plasmon resonance detecting portion 50 disposed on the rotating center 140 and contacting the substance to be tested 52 to generate a surface plasmon resonance phenomenon.
  • the surface plasmon resonance detecting unit 50 is, for example, a prism type surface plasmon resonance sensing unit.
  • the surface plasmon resonance detecting portion 50 is, for example, a carrier having a bearing surface 59 for carrying the substance to be tested 52.
  • the surface plasmon resonance detecting unit 50 includes a prism 51, a transparent plate 58, a metal film 56, and a plurality of biological probes 54.
  • the bearing surface 59 is located on the center of rotation 140, for example, the metal film 56 is located on the center of rotation 140.
  • the extension line of the center line on the metal film 26 passes through the center of rotation 140, which is, for example, a reference line which passes through the center of the metal film 26 and divides the metal film 26 into two parts. In other words, the center of rotation 140 is aligned with the centerline of the metal film 26.
  • an extension line of a reference line on the metal film 26 passes through the center of rotation, and this reference line is substantially parallel to the center line of the metal film 26, but does not coincide with the center line.
  • the center of rotation 140 is offset from the centerline of the metal film 56.
  • the transparent plate 58 is, for example, a glass plate
  • the metal film 56 is, for example, a gold film
  • the biological probe 54 is disposed on the bearing surface 59, wherein the biological probe 54 can grasp a specific one of the substances to be tested 52. Ingredients are used for measurement.
  • the transparent plate 58 is disposed between the prism 51 and the metal film 56.
  • an index matching oil layer may be disposed between the transparent plate 58 and the prism 51 to achieve better light coupling effect and to avoid reflection loss of light at the interface.
  • the light source 210 is, for example, a light emitting diode (LED) adapted to emit an illumination beam 212 (as shown in FIG. 3).
  • light source 210 can also be a laser emitter.
  • the surface plasmon resonance detecting unit 50 is disposed on the transmission path of the illumination light beam 212, and after the illumination light beam 212 is irradiated onto the surface plasmon resonance detecting unit 50, the sensing light 214 carrying the surface plasmon resonance information is generated, and the light detection is performed.
  • the device 230 is disposed on the transmission path of the sensing light 214.
  • the illumination light 212 is provided with a mask 250, a lens group 260, a band pass filter 270, and a polarizer 220 on a transmission path between the light source 210 and the surface plasmon resonance detecting portion 50. And these components are all disposed on the first rotating arm 110, wherein these components can constitute the illumination optical module 205.
  • the mask 250 has apertures 252 through which the illumination beam 212 passes through the apertures 252.
  • Lens group 260 is used to enhance the collimation of illumination beam 212.
  • Bandpass filter 270 is used to purify the illumination beam 212 such that illumination beam 212 is close to a single wavelength beam.
  • Polarizer 220 is used to cause illumination beam 212 to produce linear polarization, while its polarization direction is ⁇ polarized for carrier surface 59.
  • metal film 56 reflects illumination beam 212 into sensed light 214 such that the sensed light carries surface plasmon resonance information.
  • the sensing light 214 is provided with an imaging optical module 240 on the transmission path between the surface plasmon resonance detecting portion 50 and the photodetector 230 to transmit the sensing light 214 to the light.
  • the detector 230 and the surface of the metal film 56 are formed on the photodetector 230 , wherein the imaging optical module 240 is disposed on the second rotating arm 120 .
  • the imaging optical module 240 is, for example, an imaging lens.
  • the photodetector 230 is, for example, a charge coupled device camera (CCD camera) or a complementary metal oxide semiconductor camera (CMOS camera), so as to photograph the surface plasma on the metal moon Mo 56 Body resonance image.
  • CCD camera charge coupled device camera
  • CMOS camera complementary metal oxide semiconductor camera
  • the incident angle of the illumination beam 212 entering the metal film 56 can be changed, and the resonance angle generated by the substance to be tested 52 can be found by the captured surface plasmon resonance image. In this way, the type and characteristics of the object to be tested can be analyzed.
  • the incident angle ⁇ 1 of the light of the illumination beam 212 on the optical axis can be designed to remain substantially equal to the incoming photodetector.
  • the reflection angle 236 of the light of the sensed light 214 on the optical axis 230 is 230, which can achieve a better measurement effect.
  • the angular bisector E of the optical axis of the illumination beam 212 and the optical axis of the sensed light 214 substantially coincides with the normal to the metal film 56.
  • the optical detecting device 100 may be designed such that when the first pin 136 and the second pin 138 slide in the first groove 112 and the second groove 122, respectively, the first pin 136 to the center of rotation 140 The distance is maintained substantially equal to the distance of the second pin 138 to the center of rotation 140.
  • the triangle formed by the first plug 136, the second post 138, and the center of rotation 140 is always an isosceles triangle, and thus, the first rotation
  • the angle bisector E of the arm 110 and the second rotating arm 120 is kept perpendicular to the bearing surface 59, so that the incident angle ⁇ 1 is maintained at a state substantially equal to the reflection angle ⁇ 2 to achieve a better measurement effect.
  • the optical detecting device 100 further includes a substrate 150 having a plurality of third trenches (in FIG. 1 , the third trench 152 and the third trench 154 are taken as an example, and the push rod 130 further includes a plurality of third plugs (exemplified by the third plug 135 and the third plug 137 in FIG. 2B) are respectively slidably disposed in the third trenches 152, 154, wherein the third trenches 152, 154 are substantially Parallel to the angle bisector E of the first rotating arm 110 and the second rotating arm 120.
  • the third plug 135 is located at the first end 132 of the push rod 130, and the third plug 135 and the first plug 136 are respectively
  • the third pin 137 is located at the second end 134 of the push rod 130, and the third pin 137 and the second pin 138 are respectively located on opposite sides of the push rod 130.
  • the push rod 130 is disposed between the substrate 150 and the first rotating arm 110 and disposed between the substrate 150 and the second rotating arm 120 .
  • the first trench 112 is substantially parallel to the optical axis of the illumination beam 212
  • the second trench 122 is substantially parallel to the optical axis of the sensed light 214.
  • the optical detecting device 100 further includes an actuator 180 coupled to the push rod 130 to drive the push rod 130 to move the first plug 136 and the second plug 138 in the first groove 112 and the second, respectively. Sliding in the groove 122.
  • the actuator 180 is, for example, a linear motor, but the invention is not limited thereto.
  • the optical detecting device 100 of the present embodiment can maintain the incident angle ⁇ 1 of the optical axis of the illumination beam 252 substantially equal to the reflection angle ⁇ 2 of the optical axis of the sensing light 214 by a relatively simple mechanism, and thus the embodiment The optical detecting device 100 can combine both lower manufacturing cost and better measurement accuracy. Further, since the optical detecting device 100 of the present embodiment drives the push rod 130 by the actuator 180, the optical detecting device 100 can continuously perform real time measurement. For example, the substance to be tested 52 is, for example, a flowing liquid, and as the liquid continuously flows, the optical detecting device 100 can instantly monitor changes in the characteristics of the liquid at different times. However, in other embodiments, the optical detection device may also not include the actuator 180, but the user moves the push rod 130 by hand.
  • FIG. 4 is a perspective view showing a first rotating arm, a second rotating arm, a push rod, an actuator, and a substrate in an optical detecting device according to another embodiment of the present invention.
  • the optical detecting device of the present embodiment is similar to the optical detecting device 100 of FIG. 1, and the difference between the two is as follows.
  • the substrate 150 is located at the push rod 130a and the first Between the rotating arms 110, and the substrate 150 is located between the push rod 130a and the second rotating arm 120.
  • the push rod 130a does not have the third plug 135, 137 in FIG. 2B, and the first plug 136 and the second plug 138 of the push rod 130a are respectively disposed outside the first groove 112 and the second groove 122.
  • first plug 136 is slidably disposed on the first trench 112 through the substrate 150 via the third trench 152 .
  • the second plug 138 is slidably disposed on the second trench 122 through the substrate 150 via the third trench 154 .
  • FIG. 5 and 6 are perspective views of two different viewing angles of a first rotating arm, a second rotating arm, a push rod, an actuator, and a substrate in an optical detecting device according to still another embodiment of the present invention.
  • the optical detecting device of this embodiment is similar to the optical detecting device 100 of Figure 1, and the differences between the two are as follows.
  • the optical detecting device of the embodiment further includes a slide rail 160 disposed on the substrate 150, wherein the push rod 130b is non-rotatably slidably disposed on the slide rail 160, and the slide rail 160 is substantially parallel to the first
  • the angle between the rotating arm 110 and the second rotating arm 120 is bisector E.
  • the slide rail 160 and the first rotating arm 110 are respectively disposed on opposite sides of the substrate 150, and the slide rail 160 and the second rotating arm 120 are respectively disposed on opposite sides of the substrate 150.
  • the optical detecting device further includes a sliding portion 170, and the push rod 130b is slidably disposed on the sliding rail 160 through the sliding portion 170.
  • the substrate 150 has at least one third trench (in the FIG. 5, two third trenches 152b and 154b are taken as an example), and the sliding portion 170 and the push rod 130b are respectively disposed on the opposite sides of the substrate 150. side.
  • the optical detecting device further includes at least one connecting portion 135b (in the present embodiment, two connecting portions are exemplified), one connecting portion 135b passes through the third groove 154b, and the other is actuated in FIG.
  • the connecting portion that is blocked by 180 and passes through the third groove 152b, and both connecting portions are connected to the sliding portion 170 and the push rod 130b.
  • the two connecting portions are adapted to move in the third groove 152b and the third groove 154b, respectively.
  • the actuator 180 is coupled to the sliding portion 170 to urge the sliding portion 170 to slide on the slide rail, thereby driving the push rod 130b to move up and down.
  • the first rotating arm 110 and the second rotating arm 120 can be rotated while maintaining the incident angle ⁇ 1 substantially equal to the reflection angle ⁇ 2 (refer to Fig. 3).
  • Fig. 7 is a schematic view showing the optical path of an optical detecting device according to still another embodiment of the present invention.
  • the optical detecting device of the present embodiment is similar to the optical detecting device of FIGS. 1 and 3, and the difference between the two is that the surface plasmon resonance detecting portion 50c of the optical detecting device of the present embodiment is a grating type surface plasmon resonance sensing portion. .
  • the surface of the surface plasmon resonance detecting portion 50c has a grating structure 54c which can grasp the substance to be tested 52.
  • the state of the bearing surface 59c of the surface plasmon resonance detecting portion 50c that is, the angle bisector E of the first rotating arm 110 and the second rotating arm 120 (please refer to FIG. 1) is maintained on the normal line of the bearing surface 59c. .
  • FIG. 8 and 9 are schematic diagrams showing optical paths of an optical detecting device according to another embodiment of the present invention. In both embodiments, only the optical path is illustrated for illustration, while the remaining mechanisms (eg, the first rotating arm 110, The second rotating arm 120, the push rod 130, the substrate 150, and the actuator 180 are the same as those in FIG. 1, so the related mechanism is referred to FIG. 1, and the drawing is not repeated here.
  • the optical detecting device of this embodiment is an ellipsometer, which can be used to measure the thickness of the object to be tested 52d, wherein the object to be tested 52d is, for example, a film.
  • the light source 210d is, for example, a laser beam
  • the illumination beam 212d emitted by the light source 210d is, for example, a single-wavelength laser beam.
  • the light source may also be provided with a multi-wavelength source (eg, a white light source) with a bandpass filter on the transmission path of the illumination beam to obtain a single wavelength beam.
  • the optical detecting device further includes a first polarizer 222d and a second polarizer 242d.
  • the illumination beam 212d emitted from the light source 210d is irradiated on the substance to be tested 52d.
  • the first polarizer 222d is disposed on the transmission path of the illumination beam 212d, and is located at the light source 210d and the substance to be tested is directed to the photodetector 230d.
  • the second polarizer 242d is disposed on the transmission path of the sensing light 214d and located between the substance to be tested 52d and the photodetector 230d.
  • the light source 210d and the first polarizer 222d are disposed on the first rotating arm 110 (please refer to FIG.
  • the optical detecting means may further include a phase retarder 224d, such as a quarter wave plate, in which case the optical detecting means may measure by a null elliposmeter.
  • the optical detecting device of the present embodiment is similar to the optical detecting device of FIG. 8, and the difference between the two is that the optical detecting device of FIG. 9 does not use the phase retarder 224d of FIG. 8, so the optical detecting of FIG.
  • the device can be measured using a photometric ellipsometer.
  • the optical detecting device of the present invention is not limited to a surface plasmon resonance imager, an ellipsometer or an elliptical imager.
  • the optical detecting device may be any other optical axis and sensing light that require illumination of the illumination beam.
  • FIG. 10 is a schematic structural view of an optical detecting device according to still another embodiment of the present invention.
  • the optical detecting device 100e of the present embodiment is partially similar to the optical detecting device 100 of FIG.
  • Elements of similar or identical parts are denoted by the same reference numerals, and their detailed functions and actions It will not be repeated here.
  • the differences between the two are as follows.
  • the mechanism for driving the rotation of the first rotating arm 110e and the second rotating arm 120e is not limited to the mechanism of the foregoing embodiment, and may be any mechanism for driving the first rotating arm 110e and the second rotating arm 120e to rotate.
  • the first rotating arm 110e and the second rotating arm 120e are adapted to rotate at an equal angle, that is, regardless of how the first rotating arm 110e and the second rotating arm 120e rotate, the first rotating arm 110e is perpendicular to The angle of the angle bisector E of the bearing surface 59 is always maintained at a state substantially equal to the angle between the second rotating arm 120e and the angle bisector E.
  • the optical detecting device 100e includes a control unit 310, and the photodetector 230 has a photosensitive surface 234e.
  • the photodetector 230 has a photodetecting element 232e, and the photoreceptor 232e is, for example, a photosensitive surface of the image detecting component 232e, wherein the image detecting component 232e is, for example, a charge coupled device (CCD) or Complementary metal oxide semiconductor sensor (CMOS sensor).
  • the control unit 310 is configured to adjust the extending direction of the normal vector V2 of the photosensitive surface 234e relative to the second rotating arm according to the angle ⁇ ⁇ of the inverse vector of the normal vector VI of the second rotating arm 120e and the bearing surface.
  • the angle ⁇ 2 (in the present embodiment, the direction parallel to the optical axis 124 of the imaging optical module 240).
  • the control unit 310 gives the angle ⁇ 2—the initial third angle when the angle ⁇ ⁇ is the first angle, and increases the angle ⁇ ⁇ from the first angle to the first angle.
  • the angle ⁇ 2 is decreased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the fourth angle is smaller than the third angle.
  • the angle ⁇ 2 is increased from the fourth angle to the third angle.
  • the control unit 310 when the angle ⁇ ⁇ is increased by a first angle, gives the angle ⁇ 2—the initial third angle when the angle ⁇ ⁇ is the first angle, when the angle ⁇ ⁇ is When the first angle is incremented to a second angle, the angle ⁇ 2 is increased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the third angle is smaller than the fourth angle.
  • the angle ⁇ ⁇ is decreased from the second angle to the first angle
  • the angle ⁇ 2 is decreased from the fourth angle to the third angle.
  • the normal vector of the surface of the object is defined as a vector that is pointed by the object into the object and perpendicular to the surface.
  • the angle between the vector and the straight line (or the arm) is defined as the smaller of the angles between the vector and the straight line (or the arm) which are equal to 180 degrees. And when the vector and the straight line (or the arm) are perpendicular to each other, the angle between the two is 90 degrees.
  • the object plane for example, the bearing surface 59 and the optical axis are not perpendicular, which causes the image of the 7-plane 59 detected by the photodetector 230 to have a perspective distortion, which may also be called trapezoidal distortion ( Keystone distortion ).
  • the angle ⁇ ⁇ is increased, but ⁇ 2 is maintained at 0 degrees, and the image detected by the photodetector 230 on the bearing surface 59 is detected by the photodetector 230 as the angle ⁇ ⁇ increases.
  • Image compression deformation was detected.
  • the software needs to correct the image to correct the factors of perspective distortion and image compression, and then compare the data of different measurement points measured by different angles ⁇ .
  • the resolution of the image is greatly reduced, which affects the accuracy of the measurement. This problem is more serious when ⁇ is larger.
  • the control unit 310 when the angle ⁇ is increased by a first angle, gives the angle ⁇ 2 - the initial third angle when the angle ⁇ ⁇ is the first angle, when the clip When the angle ⁇ ⁇ is increased from the first angle to the second angle, the angle ⁇ 2 is decreased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the fourth angle is smaller than the third angle.
  • the angle ⁇ 2 is increased from the fourth angle to the third angle.
  • the control unit 310 when the angle ⁇ ⁇ is increased by a first angle, gives the angle ⁇ 2—the initial third angle when the angle ⁇ ⁇ is the first angle, when the angle ⁇ ⁇ is When the first angle is incremented to a second angle, the angle ⁇ 2 is increased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the third angle is smaller than the fourth angle.
  • the angle ⁇ ⁇ is decreased from the second angle to the first angle
  • the angle ⁇ 2 is decreased from the fourth angle to the third angle. In this way, the degree of perspective distortion and image compression can be effectively reduced, thereby effectively improving the problem of the reduced image resolution. As a result, the measurement accuracy and reliability of the optical detecting device 100e of the embodiment can be greatly improved.
  • the angle ⁇ ⁇ is increased from a smaller first angle to a larger second angle, and at this time the angle ⁇ 2 is decreased from a larger initial third angle to a smaller fourth angle.
  • the angle ⁇ ⁇ decreases from a larger first angle to a smaller second angle, while the angle ⁇ 2 increases from a smaller third angle to a larger fourth angle.
  • the angle ⁇ ⁇ is increased from a smaller first angle to a larger second angle, and at this time the angle ⁇ 2 is increased from a smaller initial third angle to Big fourth angle.
  • the angle ⁇ ⁇ decreases from a larger first angle to a smaller second angle, and at this time the angle ⁇ 2 decreases from a larger third angle to a smaller fourth angle.
  • the first angles in the different situations described above may not be identical or completely different from each other.
  • the second angles of the four cases may not be identical or completely different from each other.
  • the same is true for the third and fourth angles in different situations.
  • Case 1 and Case 2 occur when the angle ⁇ 2 is excessively large for the angle ⁇ ⁇
  • Case 3 and Case 4 occur when the angle ⁇ 2 is insufficient for the angle ⁇ ⁇ , and the compensation effect is insufficient. It refers to the effect of reducing the degree of perspective distortion and image compression by the change of the angle ⁇ 2.
  • the optical detecting device 100e further includes an actuator 320 connected to the photodetector 230 for driving the photosensitive surface 234e to rotate, wherein the actuator 320 is electrically connected to the control unit 310 and controlled Unit 310 is adapted to command actuator 320 to drive photosensitive surface 234e to rotate.
  • the control unit 310 is, for example, a control circuit that drives the photosensitive surface 234e to rotate by a telecommunication command actuator 320.
  • the photodetector 230 is pivotally connected to the second rotating arm 120e.
  • the actuator 320 is, for example, a motor that drives the photodetector 230 to rotate, and the photodetector 230 drives the photosensitive surface 234e to rotate.
  • the actuator 320 is located between the photodetector 230 and the second rotating arm 120e, that is, after the actuator 320 is disposed on the second rotating arm 120e, and then the photodetector 230 is disposed. Actuator 320.
  • the photodetector 230 may be disposed between the actuator 320 and the second rotating arm 120e, that is, after the photodetector 230 is disposed on the second rotating arm 123e, Actuator 320.
  • the photosensitive surface 234e has a center line 235e passing through the center of the photosensitive surface 234e, and the center line 235e falls on the photosensitive surface 234e, and the photosensitive surface 234e rotates around the center line 235e.
  • the rotation axis of the actuator 320 can be located on the extension line of the center line 235e of the photosensitive surface 234e, and the center line 235e of the photosensitive surface 234e is perpendicular to the first A plane of rotation of the rotating arm 110e and the second rotating arm 120e.
  • the center line 235e of the photosensitive surface 234e can be further intersected with the optical axis 124 of the imaging optical module 240, which also contributes to enhancing the imaging effect of the image.
  • the center line 235e and the optical axis 124 are substantially perpendicular to each other.
  • the variation range of the included angle ⁇ ⁇ falls within a range of more than 0 degrees and less than 90 degrees
  • the variation range of the included angle ⁇ 2 falls within the range of 0 degrees to 70 degrees.
  • the range of the angle ⁇ ⁇ and the angle ⁇ 2 may be related to the magnification of the optical detecting device 100e.
  • the photosensitive surface 234e may also be a reference line around the center of the photosensitive surface 234e that is offset from the photosensitive surface 234e. Turning, this reference line is, for example, parallel to the center line 235e but does not coincide.
  • the axis of rotation of the actuator 320 may also be an extension line located on the reference line.
  • the optical sensing device 100e further includes a hollow light-shielding elastic sleeve 330 connected to the imaging optical module 240 and the photodetector 230, wherein the hollow shading elastic sleeve is disposed in the embodiment, in order to avoid the interference of the external stray light on the optical detection result.
  • the cartridge 330 seals the sensing light 214 between the imaging optical module 240 and the photodetector 230 in the hollow shading elastic sleeve 330.
  • the hollow shading elastic sleeve 330 surrounds the optical axis 124 of the imaging optical module 240 and closely connects the imaging optical module 240 and the photodetector 230 without light leakage.
  • the control unit 310 finds the normal vector V2 of the photosensitive surface 234e with respect to the extending direction of the second rotating arm 120e according to the angle ⁇ between the second rotating arm 120e and the inverse vector of the normal vector VI of the bearing surface 59 in a look-up manner. Corresponding angle ⁇ 2. Specifically, it can be experimentally found that when the angle ⁇ ⁇ is a certain value, the optimum angle ⁇ 2 can be used to obtain the best detection effect, and the ⁇ ⁇ value and the ⁇ 2 value at this time are obtained. Recorded in the form. Then, after a series of experiments, the correspondence between various ⁇ values and the best ⁇ 2 values is established, and the correspondence is recorded in the table.
  • control unit 310 can drive the second rotating arm 124 to a specific angle ⁇ through the actuator, and find the corresponding ⁇ 2 value by looking up the table, and make the photosensitive surface 234e rotates to this angle.
  • Fig. 11A is a schematic structural view of an optical detecting apparatus according to still another embodiment of the present invention
  • Fig. 11B is a partially enlarged view of Fig. 11A.
  • the optical detecting device 100f of the present embodiment is similar to the optical detecting device 100e of FIG. 10, and the difference between the two is as follows.
  • the optical detecting device 100f further includes a substrate 150f, wherein the first rotating arm 110e and the second rotating arm 120e are pivotally disposed on the substrate 150f through the rotating center 140.
  • the control unit 31 Of is an institutional control unit.
  • the control unit 310f includes a curved groove 312f and a restriction plug 314f.
  • the curved groove 312f is disposed on the substrate 150f, and the limiting pin 314f is connected to the photodetector 230, for example, to the photodetector 230 through the rotating disk 316f of the control unit 310f. Further, the restricting pin 314f is slidably disposed in the curved groove 312f.
  • the trajectory of the curved groove 312f forces the limiting pin 314f to slide in the curved groove 312f, thereby driving the photosensitive surface 234e to rotate, that is, by rotating the rotating disk 316f to thereby perform light detection.
  • Turbo 230 Turn.
  • the angle ⁇ ⁇ and the angle ⁇ 2 can have an appropriate correspondence, thereby improving the accuracy of the optical detection result.
  • FIG. 12 is a schematic structural view of an optical detecting device according to another embodiment of the present invention. Please refer to the figure
  • the optical detecting device 100h of the present embodiment is similar to the optical detecting device 100e of FIG. 10, and the difference between the two is that the optical detecting device 100h of the present embodiment replaces the hollow shading in FIG. 10 with the light-shielding housing 330h. Elastic sleeve 330.
  • the light shielding housing 330h covers the transmission path of the sensing light 214 between the imaging optical module 240 and the photodetector 230, and covers the imaging optical module 240 and at least a portion of the photodetector 230 (in FIG. The entire photodetector 230 is covered as an example). As a result, external stray light is less likely to enter the photodetector 230 to cause interference with the measurement results.
  • Fig. 10, Fig. 11A and Fig. 12 can also be applied to the above Fig. 1, Fig. 2A, Fig.
  • optical detecting devices of 2B, 4, 5 and 6 an embodiment will be described below as a representative.
  • FIG. 13 is a schematic structural view of an optical detecting device according to still another embodiment of the present invention. Please refer to the figure
  • the optical detecting device 100 g of the present embodiment is a combination of the optical detecting device 100 of FIG. 1 and the optical detecting device 100 e of FIG. 10 , wherein the same reference numerals as those of FIGS. 1 and 10 represent the same or similar components, and their functions are used. It will not be repeated here.
  • the actuator 320 is connected to the photodetector 230 to drive the photodetector 230 to rotate along with the rotation of the second rotating arm 120.
  • the manner of rotation and the amount of rotation refer to FIG.
  • the photodetector 230 is disposed between the actuator 320 and the second rotating arm 120.
  • control unit 310 is electrically coupled to actuator 180 and actuator 320.
  • control unit 310 commands the actuator 180 to push the second rotating arm 120 to a certain angle, it also knows which angle the photodetector 230 should rotate by looking up the table, and commands the actuator 320 to detect the light. The detector 230 is rotated to this angle.
  • FIG. 14 is a flow chart of an optical detecting method in accordance with an embodiment of the present invention.
  • the optical detecting method of the present embodiment is applied to the optical detecting device of Figs. 1 to 9, and the following is an example of the optical detecting device 100 of Fig. 1.
  • step S110 is performed, which is to provide the optical detecting device 100 described above.
  • step S120 is performed to place the substance to be tested 52 near the center of rotation 140.
  • step S130 the light source 210 is turned on, so that the illumination beam 212 (shown in FIG.
  • step S140 is performed to detect the sensing light 214 with the photodetector 230.
  • step S150 the push rod 130 is moved to make the first plug 136 and the second plug 138 Sliding in the first trench 112 and the second trench 122 respectively, thereby changing the angle at which the illumination beam 212 enters the substance to be tested 52, and simultaneously changing the reflection angle of the sensing light 214 detected by the photodetector 230.
  • Figure 15 is a flow chart of an optical detecting method according to another embodiment of the present invention.
  • the optical detecting method of this embodiment is similar to the optical detecting method of FIG. 14, and the difference between the two is that step S150 of FIG. 14 is slightly different from step S150' of FIG. 15, and the optical detecting of the embodiment is different.
  • the method can be applied to the optical detecting devices 100e, 100f, 100g, 100h of FIGS. 10 to 13.
  • step S150 of the embodiment when the angle at which the illumination beam 212 is incident on the substance to be tested 52 is changed, and the reflection angle of the sensing light 214 detected by the photodetector 230 is changed, according to the second rotating arm
  • the angle between the 120e and the inverse vector of the normal vector VI of the bearing surface 59 adjusts the angle of the normal vector V2 of the photosensitive surface 234e with respect to the extending direction of the second rotating arm 120e.
  • the angle ⁇ ⁇ is increased from a first angle to a second angle
  • the angle ⁇ 2 is correspondingly decreased from a third angle to a fourth angle, wherein the first angle, the second angle, the third angle, and the The four angles are all greater than 0 degrees and less than 90 degrees.
  • the angle ⁇ 2 when the angle ⁇ ⁇ is decreased from the second angle to the first angle, the angle ⁇ 2 is correspondingly increased from the fourth angle to the third angle.
  • the angle ⁇ ⁇ when the angle ⁇ ⁇ is increased from a first angle to a second angle, the angle ⁇ 2 is correspondingly increased from a third angle to a fourth angle, wherein the first angle, The second angle, the third angle, and the fourth angle are both greater than 0 degrees and less than 90 degrees.
  • the angle ⁇ ⁇ when the angle ⁇ ⁇ is decreased from the second angle to the first angle, the angle ⁇ 2 is correspondingly decreased from the fourth angle to the third angle.
  • the optical detecting device and the optical detecting method of the embodiment of the present invention since the first pin and the second pin slide in the first groove and the second groove respectively, the first pin is rotated The distance of the center is maintained substantially equal to the distance of the second pin to the center of rotation, so the position of the angle bisector of the first rotating arm and the second rotating arm is maintained regardless of the angle at which the first rotating arm and the second rotating arm are rotated. change. In this way, a better optical measurement effect can be achieved.
  • the optical detecting device can maintain the incident angle of the optical axis of the illumination beam substantially equal to the reflection angle of the optical axis of the sensing light by a relatively simple mechanism, and thus the implementation of the present invention
  • the optical detecting device of the example can have both lower manufacturing cost and better measurement accuracy.
  • the optical detecting device of the embodiment of the present invention drives the push rod by the actuator, the optical detecting device can continuously perform the instantaneous measurement.
  • the normal vector of the photosensitive surface can be made relative to The angle of the extending direction of the second rotating arm is increased or decreased, so that the perspective distortion and image compression of the image formed in the photodetector can be effectively reduced, thereby improving the detection of the optical detecting device and the optical detecting method. Accuracy.

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Abstract

An optical detecting device and method for detecting a substance to be detected are disclosed. The optical detecting device (100) comprises a first rotating arm (110), a second rotating arm (120), a pushing bar (130), a light source (210) and an optical detector (230). The first rotating arm (110) has a first groove (112) and the second rotating arm (120) has a second groove (122), and the second rotating arm (120) is pivoted to the first rotating arm (110) via a rotating center (140). The pushing bar (130) comprises a first pin (136) and a second pin (138), the first pin (136) is slideably arranged in the first groove (112) and the second pin (138) is slideably arranged in the second groove (122). When the first pin (136) and the second pin (138) respectively slide in the first groove (112) and the second groove (122), the distance between the first pin (136) and the rotating center (140) is kept substantially same to the distance between the second pin (138) and the rotating center (140). The light source (210) is arranged on the first rotating arm (110), the optical detector (230) is arranged on the second rotating arm (120), and the substance to be detected is fit for being arranged near the rotating center (140).

Description

光学检测装置及光学检测方法 技术领域  Optical detecting device and optical detecting method
本发明是有关于一种光学系统与检测方法， 且特别是有关于一种光学检 测装置与光学检测方法。 背景技术 利用光的检测通常不会对物质本身造成过多的破坏性， 因此有利于用来作为 各种物质的检测。  The present invention relates to an optical system and detection method, and more particularly to an optical detection device and an optical detection method. BACKGROUND OF THE INVENTION The detection of light is generally not excessively destructive to the substance itself, and is therefore advantageous for use as a test for various substances.
表面等离子体共振显微术为近年来极具潜力的一种光学检测方法， 其可 应用于生物科技领域中。 生物科技是台湾在这个世纪里首要发展的国家科技 的重点项目之一， 而药物开发更是生物科技的主流。 开发快速检测方式与有 效的药物筛选是所有生物制药技术的共同目标， 而表面等离子体共振影像技 术平台将可有效率地 选萃取物中的有效成分。 此 选技述也可被应用于各 种接受器上， 并针对不同接受器所筛选出来的标的物中的特异性配基来开发 各种治疗性的药物， 例如免疫调解药物、 抗发炎药物、 抗骨质疏^^药物、 抗 癌药物及抗过敏药物等。  Surface plasmon resonance microscopy is an optical detection method that has great potential in recent years, and it can be applied to the field of biotechnology. Biotechnology is one of the key national science and technology projects that Taiwan has developed in this century, and drug development is the mainstream of biotechnology. The development of rapid detection methods and effective drug screening is a common goal of all biopharmaceutical technologies, and the surface plasmon resonance imaging technology platform will efficiently select the active ingredients in the extract. This selection technique can also be applied to a variety of receptors, and to develop various therapeutic drugs, such as immunomodulatory drugs, anti-inflammatory drugs, for specific ligands in the targets selected by different receptors. Anti-osteoporosis drugs, anticancer drugs and anti-allergic drugs.
此外， 表面等离子体共振技术近来来被大量应用在发展生物分子感测器 上， 这是一种利用光学的方式便可达到非标记、 高敏感度、 少量样本、 即时 的检测方法。 表面等离子体共振技术利用生物免疫分析的特殊选择性， 可以 在复杂的混合物中侦测到相当低浓度的特定分子。  In addition, surface plasmon resonance technology has recently been widely used in the development of biomolecular sensors, which is an optical method that can achieve non-marking, high sensitivity, small sample, and instant detection methods. Surface plasmon resonance technology utilizes the specific selectivity of biological immunoassays to detect relatively low concentrations of specific molecules in complex mixtures.
椭圓偏光术也为一种光学检测方法， 其利用不同偏振光来量测样品厚度 及其折射率， 而可达到非破坏性的量测。 发明内容  Ellipsometry is also an optical detection method that uses different polarized light to measure the thickness of the sample and its refractive index for non-destructive measurements. Summary of the invention
本发明的实施例提供一种光学检测装置， 适于量测待测物质。 光学检测 装置包括第一旋转臂、 第二旋转臂、 推杆、 光源及光侦测器。 第一旋转臂具 有第一沟槽。第二旋转臂经由旋转中心与第一旋转臂枢接，且具有第二沟槽。 推杆具有相对的第一端与第二端， 且包括配置于第一端的第一栓及配置于第 二端的第二栓。 第一栓滑设于第一沟槽， 且第二栓滑设于第二沟槽。 当第一 栓与第二栓分别在第一沟槽与第二沟槽中滑动时， 第一栓至旋转中心的距离 维持实质上等于第二栓至旋转中心的距离。 光源配置于第一旋转臂上。 光侦 测器配置于第二旋转臂上， 其中待测物质适于配置于旋转中心附近。 Embodiments of the present invention provide an optical detecting apparatus adapted to measure a substance to be tested. The optical detecting device includes a first rotating arm, a second rotating arm, a push rod, a light source, and a photodetector. The first rotating arm has a first groove. The second rotating arm is pivotally connected to the first rotating arm via a center of rotation and has a second groove. The push rod has opposite first and second ends, and includes a first bolt disposed at the first end and a second bolt disposed at the second end. The first pin is disposed on the first groove, and the second pin is disposed on the second groove. When the first pin and the second pin slide in the first groove and the second groove, respectively, the distance from the first pin to the center of rotation is maintained substantially equal to the distance of the second pin to the center of rotation. The light source is disposed on the first rotating arm. The photodetector is disposed on the second rotating arm, wherein the substance to be tested is adapted to be disposed near the center of rotation.
本发明的另一实施例提出一种光学检测装置， 适于量测待测物质。 此光 学检测装置包括第一旋转臂、 第二旋转臂、 光源、 光侦测器、 承载器及控制 单元。 第二旋转臂经由旋转中心与第一旋转臂枢接。 光源配置于第一旋转臂 上。光侦测器配置于第二旋转臂上，其中待测物质适于配置于旋转中心附近。 承载器配置于旋转中心上， 其中承载器具有承载面， 且承载面用以承载待测 物质。 光侦测器具有感光面， 且控制单元用以根据第二旋转臂与承载面的法 向量的反向量的夹角， 来调整感光面的法向量相对于第二旋转臂的延伸方向 的夹角。 当第二旋转臂与承载面的法向量的反向量的夹角递增或递减时， 控 制单元使感光面的法向量相对于第二旋转臂的延伸方向的夹角递增或递减。  Another embodiment of the present invention provides an optical detecting apparatus adapted to measure a substance to be tested. The optical detecting device includes a first rotating arm, a second rotating arm, a light source, a photodetector, a carrier, and a control unit. The second rotating arm is pivotally coupled to the first rotating arm via a center of rotation. The light source is disposed on the first rotating arm. The photodetector is disposed on the second rotating arm, wherein the substance to be tested is adapted to be disposed near the center of rotation. The carrier is disposed on the center of rotation, wherein the carrier has a bearing surface, and the bearing surface is used to carry the substance to be tested. The photodetector has a photosensitive surface, and the control unit is configured to adjust the angle of the normal vector of the photosensitive surface relative to the extending direction of the second rotating arm according to the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface. . When the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface is incremented or decremented, the control unit increments or decrements the angle of the normal of the photosensitive surface with respect to the extending direction of the second rotating arm.
本发明的又一实施例提出一种光学检测方法， 其包括下列步骤。 提供上 述光学检测装置。 将待测物质置于旋转中心附近。 开启光源， 以使光源所发 出的照明光束照射在待测物质上， 其中待测物质将照明光束反射成感测光。 以光侦测器侦测感测光。 移动推杆， 以使第一栓与第二栓分别在第一沟槽与 第二沟槽中滑动， 进而改变照明光束入射待测物质的角度， 且同时改变光侦 测器所侦测到的感测光的反射角度。  Yet another embodiment of the present invention provides an optical detection method comprising the following steps. The above optical detecting device is provided. Place the substance to be tested near the center of rotation. The light source is turned on to illuminate the illumination beam emitted by the light source on the substance to be tested, wherein the substance to be tested reflects the illumination beam into the sensing light. The light detector detects the sensed light. Moving the push rod to slide the first plug and the second plug in the first groove and the second groove respectively, thereby changing an angle at which the illumination beam enters the object to be tested, and simultaneously changing the detected by the photodetector Sensing the angle of reflection of the light.
为让本发明的上述特征能更明显易懂， 下文特举实施例， 并配合所附图 式作详细说明 ¾口下。 附图说明  In order to make the above features of the present invention more comprehensible, the following embodiments are described in detail with reference to the accompanying drawings. DRAWINGS
图 1为本发明的一实施例的光学检测装置的分解图。  1 is an exploded view of an optical detecting device according to an embodiment of the present invention.
图 2A为图 1中的第一旋转臂、 第二旋转臂、 推杆、 致动器及基板的立 体示意图。  2A is a schematic perspective view of the first rotating arm, the second rotating arm, the push rod, the actuator, and the substrate of FIG. 1.
图 2B为图 2A的结构的背面。  Figure 2B is the back side of the structure of Figure 2A.
图 3为图 1的光学检测装置的光路示意图。  Fig. 3 is a schematic view showing the optical path of the optical detecting device of Fig. 1.
图 4为本发明的另一实施例的光学检测装置中的第一旋转臂、 第二旋转 臂、 推杆、 致动器及基板的立体示意图。 4 is a first rotating arm and a second rotation in an optical detecting device according to another embodiment of the present invention; A schematic view of the arm, push rod, actuator and substrate.
图 5与图 6为本发明的又一实施例的光学检测装置中的第一旋转臂、 二旋转臂、 推杆、 致动器及基板的两个不同视角的立体示意图。  5 and FIG. 6 are perspective views of two different viewing angles of a first rotating arm, two rotating arms, a push rod, an actuator, and a substrate in an optical detecting device according to still another embodiment of the present invention.
图 7为本发明的再一实施例的光学检测装置的光路示意图。  Fig. 7 is a schematic view showing the optical path of an optical detecting device according to still another embodiment of the present invention.
图 8与图 9为本发明的另二实施例的光学检测装置的光路示意图。 图 10为本发明的又一实施例的光学检测装置的结构示意图。  8 and 9 are schematic diagrams showing optical paths of an optical detecting device according to another embodiment of the present invention. FIG. 10 is a schematic structural view of an optical detecting device according to still another embodiment of the present invention.
图 11A为本发明的再一实施例的光学检测装置的结构示意图。  11A is a schematic structural view of an optical detecting device according to still another embodiment of the present invention.
图 11B为图 11A的局部放大图。  Fig. 11B is a partial enlarged view of Fig. 11A.
图 12为本发明的另一实施例的光学检测装置的结构示意图。  Figure 12 is a schematic view showing the structure of an optical detecting device according to another embodiment of the present invention.
图 13为本发明的又一实施例的光学检测装置的结构示意图。  Figure 13 is a schematic view showing the structure of an optical detecting device according to still another embodiment of the present invention.
图 14为本发明的一实施例的光学检测方法的流程图。  Figure 14 is a flow chart of an optical detecting method in accordance with an embodiment of the present invention.
图 15为本发明的另一实施例的光学检测方法的流程图。  Figure 15 is a flow chart showing an optical detecting method according to another embodiment of the present invention.
主要元件符号说明  Main component symbol description
50、 50c: 表面等离子体共振检测部  50, 50c: Surface plasmon resonance detection unit
51 : 棱镜  51 : Prism
52、 52d: 待测物质  52, 52d: substance to be tested
54: 生物探针  54: Biological probe
54c: 光栅结构  54c: grating structure
56: 金属膜  56: Metal film
58: 透明板  58: transparent board
59、 59c: 载面  59, 59c: surface
100、 , 100e、 100f、 100g、 100h: 光学检测装置  100, , 100e, 100f, 100g, 100h: optical detection device
110、 , l lOe: 第一旋转臂  110, , l lOe: first rotating arm
112: 第一沟槽  112: first groove
120、 , 120e: 第二旋转臂  120, 120e: second rotating arm
122: 第二沟槽  122: second groove
124: 光轴  124: optical axis
130、 , 130a, 130b: 推杆  130, , 130a, 130b: putter
132: 第一端  132: first end
134: 第二端 135、 137: 第三栓 134: second end 135, 137: third bolt
135b: 连接部  135b: Connection
136: 第一栓  136: First bolt
138: 第二栓  138: second bolt
140: 旋转中心  140: Rotation Center
150、 150f: 基板  150, 150f: substrate
152、 152b, 154、 154b: 第三沟槽 152, 152b, 154, 154b: third groove
160: 滑轨 160: slide rail
170: 滑动部  170: sliding part
180、 320: 致动器  180, 320: actuator
210、 210d: 光源  210, 210d: light source
212、 212d: 照明光束  212, 212d: illumination beam
214、 214d: 感测光  214, 214d: sensing light
220: 偏振器  220: polarizer
222d: 第一偏振器  222d: first polarizer
224d: 相位延迟器  224d: phase retarder
230、 230d: 光侦测器  230, 230d: Light detector
232e: 影像侦测元件  232e: Image detection component
234e: 感光面  234e: Photosensitive surface
235e: 中心线  235e: centerline
240: 成像光学模块  240: Imaging Optical Module
242d: 第二偏振器  242d: second polarizer
250: 遮片  250: matte
252: 孔  252: Hole
260: 透镜组  260: Lens group
270: 带通滤光器  270: Bandpass filter
310、 310f: 控制单元  310, 310f: Control unit
312f: 曲线形沟槽  312f: curved groove
314f: 限制栓  314f: Limiting the bolt
316f: 旋转盘 330: 中空遮光弹性套筒 316f: rotating disk 330: Hollow shading elastic sleeve
330h: 遮光壳体  330h: light-shielding housing
E: 角平分线  E: angle bisector
S110 ~ S150、 S150': 步骤  S110 ~ S150, S150': Steps
VI、 V2: 法向量  VI, V2: normal vector
Θ1 : 入射角  Θ1 : Angle of incidence
Θ2: 反射角  Θ 2: Reflection angle
φ1、 φ2: 夹角 具体实施方式  Φ1, φ2: angled embodiment
图 1为本发明的一实施例的光学检测装置的分解图。 图 2Α为图 1中的 第一旋转臂、 第二旋转臂、 推杆、 致动器及基板的立体示意图， 而图 2Β绘 示图 2Α的结构的背面。 图 3为图 1的光学检测装置的光路示意图。 请参照 图 1、 图 2Α、 图 2Β及图 3 , 本实施例的光学检测装置 100适于量测待测物 质 52。 在本实施例中， 光学检测装置 100 例如为表面等离子体共振影像仪 ( surface plasmon resonance image apparatus ) , 而待则物质 52 1"列 ^口为水、 液 体、 药物、 有机体、 微生物体或其他生化物质。 光学检测装置 100包括第一 旋转臂 110、 第二旋转臂 120、 推杆 130、 光源 210及光侦测器 230。 第一旋 转臂 110具有第一沟槽 112。 第二旋转臂 120经由旋转中心 140与第一旋转 臂 110枢接， 且具有第二沟槽 122。 推杆 130具有相对的第一端 132与第二 端 134, 且包括配置于第一端 132的第一栓 136及配置于第二端 134的第二 栓 138。第一栓 136滑设于第一沟槽 112,且第二栓 138滑设于第二沟槽 122。 光源 210配置于第一旋转臂 110上，光侦测器 230配置于第二旋转臂 120上， 且待测物质 52适于配置于旋转中心 140附近。  1 is an exploded view of an optical detecting device according to an embodiment of the present invention. 2A is a perspective view of the first rotating arm, the second rotating arm, the push rod, the actuator, and the substrate in FIG. 1, and FIG. 2B shows the back side of the structure of FIG. Fig. 3 is a schematic view showing the optical path of the optical detecting device of Fig. 1. Referring to FIG. 1, FIG. 2, FIG. 2, and FIG. 3, the optical detecting device 100 of the present embodiment is adapted to measure the substance to be tested 52. In this embodiment, the optical detecting device 100 is, for example, a surface plasmon resonance image apparatus, and the substance 52 1 is a water, a liquid, a drug, an organism, a microorganism, or other biochemical. The optical detecting device 100 includes a first rotating arm 110, a second rotating arm 120, a push rod 130, a light source 210, and a photodetector 230. The first rotating arm 110 has a first groove 112. The second rotating arm 120 is via the second rotating arm 120. The rotating center 140 is pivotally connected to the first rotating arm 110 and has a second groove 122. The push rod 130 has opposite first ends 132 and second ends 134, and includes a first plug 136 disposed at the first end 132 and The second pin 138 is disposed on the second end 134. The first pin 136 is slidably disposed on the first groove 112, and the second pin 138 is slidably disposed on the second groove 122. The light source 210 is disposed on the first rotating arm 110. The photodetector 230 is disposed on the second rotating arm 120, and the substance to be tested 52 is adapted to be disposed near the center of rotation 140.
在本实施例中， 光学检测装置 100还包括表面等离子体共振检测部 50, 其配置于旋转中心 140上， 且接触待测物质 52, 以产生表面等离子体共振现 象。在本实施例中，表面等离子体共振检测部 50例如为棱镜式表面等离子体 共振感测部。此外，表面等离子体共振检测部 50例如为承载器， 其具有承载 面 59, 而承载面 59用以承载待测物质 52。 具体而言， 表面等离子体共振检 测部 50包括棱镜 51、 透明板 58、 金属膜 56及多个生物探针 54。 在本实施 例中， 承载面 59位于旋转中心 140上， 例如是金属膜 56位于旋转中心 140 上。此外，在本实施例中，金属膜 26上的中心线的延伸线通过旋转中心 140, 此中心线例如是通过金属膜 26的中心且将金属膜 26等分成两部分的参考线。 换言之，旋转中心 140对准金属膜 26的中心线设置。然而，在其他实施例中， 也可以是金属膜 26上的一参考线的延伸线通过旋转中心，且此参考线实质上 平行于金属膜 26 的中心线， 但不与此中心线重合。 换言之， 旋转中心 140 偏离金属膜 56的中心线设置。 在本实施例中， 透明板 58例如为玻璃板， 金 属膜 56例如为金薄膜， 而生物探针 54配置于承载面 59上， 其中生物探针 54则可抓取待测物质 52中的特定成分以供量测用。 在本实施例中， 透明板 58配置于棱镜 51与金属膜 56之间。 此外， 透明板 58与棱镜 51之间可设有 折射率匹配油层， 以达到更佳的光耦合效果， 且可避免光在界面上的反射损 失。 In the present embodiment, the optical detecting device 100 further includes a surface plasmon resonance detecting portion 50 disposed on the rotating center 140 and contacting the substance to be tested 52 to generate a surface plasmon resonance phenomenon. In the present embodiment, the surface plasmon resonance detecting unit 50 is, for example, a prism type surface plasmon resonance sensing unit. Further, the surface plasmon resonance detecting portion 50 is, for example, a carrier having a bearing surface 59 for carrying the substance to be tested 52. Specifically, the surface plasmon resonance detecting unit 50 includes a prism 51, a transparent plate 58, a metal film 56, and a plurality of biological probes 54. In this implementation In the example, the bearing surface 59 is located on the center of rotation 140, for example, the metal film 56 is located on the center of rotation 140. Further, in the present embodiment, the extension line of the center line on the metal film 26 passes through the center of rotation 140, which is, for example, a reference line which passes through the center of the metal film 26 and divides the metal film 26 into two parts. In other words, the center of rotation 140 is aligned with the centerline of the metal film 26. However, in other embodiments, it is also possible that an extension line of a reference line on the metal film 26 passes through the center of rotation, and this reference line is substantially parallel to the center line of the metal film 26, but does not coincide with the center line. In other words, the center of rotation 140 is offset from the centerline of the metal film 56. In the present embodiment, the transparent plate 58 is, for example, a glass plate, the metal film 56 is, for example, a gold film, and the biological probe 54 is disposed on the bearing surface 59, wherein the biological probe 54 can grasp a specific one of the substances to be tested 52. Ingredients are used for measurement. In the present embodiment, the transparent plate 58 is disposed between the prism 51 and the metal film 56. In addition, an index matching oil layer may be disposed between the transparent plate 58 and the prism 51 to achieve better light coupling effect and to avoid reflection loss of light at the interface.
在本实施例中，光源 210例如为发光二极体 ( light emitting diode, LED ) , 其适于发出照明光束 212 (如图 3所绘示） 。 然而， 在其他实施例中， 光源 210也可以是激光发射器。 表面等离子体共振检测部 50配置于照明光束 212 的传递路径上，照明光束 212在照射于表面等离子体共振检测部 50后，产生 携带有表面等离子体共振资讯的感测光 214, 且光侦测器 230配置于感测光 214的传递路径上。 具体而言， 在本实施例中， 照明光 212于光源 210与表 面等离子体共振检测部 50之间的传递路径上设有遮片 250、 透镜组 260、 带 通滤光器 270及偏振器 220, 且这些元件均配置于第一旋转臂 110上， 其中 这些元件可构成照明光学模块 205。  In this embodiment, the light source 210 is, for example, a light emitting diode (LED) adapted to emit an illumination beam 212 (as shown in FIG. 3). However, in other embodiments, light source 210 can also be a laser emitter. The surface plasmon resonance detecting unit 50 is disposed on the transmission path of the illumination light beam 212, and after the illumination light beam 212 is irradiated onto the surface plasmon resonance detecting unit 50, the sensing light 214 carrying the surface plasmon resonance information is generated, and the light detection is performed. The device 230 is disposed on the transmission path of the sensing light 214. Specifically, in the embodiment, the illumination light 212 is provided with a mask 250, a lens group 260, a band pass filter 270, and a polarizer 220 on a transmission path between the light source 210 and the surface plasmon resonance detecting portion 50. And these components are all disposed on the first rotating arm 110, wherein these components can constitute the illumination optical module 205.
遮片 250具有孔 252,而照明光束 212经由孔 252通过遮片 250。透镜组 260则用以提升照明光束 212的准直性。 带通滤光器 270则是用以纯化照明 光束 212的颜色， 以使照明光束 212接近于单波长光束。 偏振器 220则用以 使照明光束 212产生线性偏振， 而其偏振方向对于承载面 59而言为 Ρ偏振。 当具 Ρ偏振的照明光束 212经由棱镜 51及透明板 58而照射于金属膜 56时， 生物探针 54所抓取到的待测物质 52会改变金属膜 56的表面等离子体共振状 态。 此外， 金属膜 56会将照明光束 212反射成感测光 214, 以使感测光携带 表面等离子体共振资讯。感测光 214于表面等离子体共振检测部 50与光侦测 器 230之间的传递路径上设有成像光学模块 240, 以使感测光 214传递至光 侦测器 230,并将金属膜 56面成像于光侦测器 230上，其中成像光学模块 240 配置于第二旋转臂 120上。 在本实施例中， 成像光学模块 240例如为成像镜 头。 光侦测器 230例如为电荷耦合元件摄影机 ( charge coupled device camera, CCD camera ) 或互补式金氧半导体摄影机 ( complementary metal oxide semiconductor camera, CMOS camera ) , 以才白摄金属月莫 56上的表面等离子体 共振影像。 此外， 通过第一旋转臂 110与第二旋转臂 120的转动， 可变化照 明光束 212入射金属膜 56的入射角，进而通过拍摄到的表面等离子体共振影 像找到待测物质 52所产生的共振角， 如此便可分析出待测物的种类与特性。 The mask 250 has apertures 252 through which the illumination beam 212 passes through the apertures 252. Lens group 260 is used to enhance the collimation of illumination beam 212. Bandpass filter 270 is used to purify the illumination beam 212 such that illumination beam 212 is close to a single wavelength beam. Polarizer 220 is used to cause illumination beam 212 to produce linear polarization, while its polarization direction is Ρpolarized for carrier surface 59. When the illumination beam 212 having the polarization is irradiated to the metal film 56 via the prism 51 and the transparent plate 58, the substance to be tested 52 captured by the biological probe 54 changes the surface plasmon resonance state of the metal film 56. In addition, metal film 56 reflects illumination beam 212 into sensed light 214 such that the sensed light carries surface plasmon resonance information. The sensing light 214 is provided with an imaging optical module 240 on the transmission path between the surface plasmon resonance detecting portion 50 and the photodetector 230 to transmit the sensing light 214 to the light. The detector 230 and the surface of the metal film 56 are formed on the photodetector 230 , wherein the imaging optical module 240 is disposed on the second rotating arm 120 . In the present embodiment, the imaging optical module 240 is, for example, an imaging lens. The photodetector 230 is, for example, a charge coupled device camera (CCD camera) or a complementary metal oxide semiconductor camera (CMOS camera), so as to photograph the surface plasma on the metal moon Mo 56 Body resonance image. In addition, by the rotation of the first rotating arm 110 and the second rotating arm 120, the incident angle of the illumination beam 212 entering the metal film 56 can be changed, and the resonance angle generated by the substance to be tested 52 can be found by the captured surface plasmon resonance image. In this way, the type and characteristics of the object to be tested can be analyzed.
由于金属膜 56的反射符合反射定律，因此无论第一旋转臂 110如何转动 而使光源 210转动，可设计使照明光束 212在光轴上的光线的入射角 Θ1保持 实质上等于进入光侦测器 230的感测光 214在光轴上的光线的反射角 Θ2,这 样能够达到较佳的量测效果。换言之，无论光源 210如何转动，照明光束 212 的光轴与感测光 214的光轴的角平分线 E实质上与金属膜 56的法线重合。 为了达到这样的效果， 可将光学检测装置 100设计成当第一栓 136与第二栓 138分别在第一沟槽 112与第二沟槽 122中滑动时， 第一栓 136至旋转中心 140的距离维持实质上等于第二栓 138至旋转中心 140的距离。 也就是说， 无论第一旋转臂 110与第二旋转臂 120如何转动， 第一栓 136、 第二柱 138 及旋转中心 140所构成的三角形始终都是等腰三角形， 如此一来， 第一旋转 臂 110与第二旋转臂 120的角平分线 E保持与承载面 59垂直， 进而使入射 角 Θ1保持在实质上等于反射角 Θ2的状态， 以达到较佳的量测效果。  Since the reflection of the metal film 56 conforms to the law of reflection, regardless of how the first rotating arm 110 rotates to rotate the light source 210, the incident angle Θ1 of the light of the illumination beam 212 on the optical axis can be designed to remain substantially equal to the incoming photodetector. The reflection angle 236 of the light of the sensed light 214 on the optical axis 230 is 230, which can achieve a better measurement effect. In other words, regardless of how the light source 210 rotates, the angular bisector E of the optical axis of the illumination beam 212 and the optical axis of the sensed light 214 substantially coincides with the normal to the metal film 56. In order to achieve such an effect, the optical detecting device 100 may be designed such that when the first pin 136 and the second pin 138 slide in the first groove 112 and the second groove 122, respectively, the first pin 136 to the center of rotation 140 The distance is maintained substantially equal to the distance of the second pin 138 to the center of rotation 140. That is, regardless of how the first rotating arm 110 and the second rotating arm 120 rotate, the triangle formed by the first plug 136, the second post 138, and the center of rotation 140 is always an isosceles triangle, and thus, the first rotation The angle bisector E of the arm 110 and the second rotating arm 120 is kept perpendicular to the bearing surface 59, so that the incident angle Θ1 is maintained at a state substantially equal to the reflection angle Θ2 to achieve a better measurement effect.
在本实施例中， 光学检测装置 100还包括基板 150, 其具有多个第三沟 槽（在图 1中是以第三沟槽 152与第三沟槽 154为例， 且推杆 130还包括多 个第三栓（在图 2B中是以第三栓 135与第三栓 137为例 ) , 分别滑设于这 些第三沟槽 152、 154中， 其中这些第三沟槽 152、 154实质上平行于第一旋 转臂 110与第二旋转臂 120的角平分线 E。 在本实施例中， 第三栓 135位于 推杆 130的第一端 132, 且第三栓 135与第一栓 136分别位于推杆 130的相 对两侧。 此外， 第三栓 137位于推杆 130的第二端 134, 且第三栓 137与第 二栓 138分别位于推杆 130的相对两侧。 再者， 在本实施例中， 推杆 130配 置于基板 150与第一旋转臂 110之间， 且配置于基板 150与第二旋转臂 120 之间。 在本实施例中， 第一沟槽 112实质上平行于照明光束 212的光轴， 且第 二沟槽 122实质上平行于感测光 214的光轴。 当第一栓 136与第二栓 138分 别逐渐往第一沟槽 112的靠近旋转中心 140的一端与第二沟槽 122的靠近旋 转中心 140的一端滑动时（此时第三栓 135、 137及推杆 130往图式的上方移 动） ， 第一旋转臂 110与第二旋转臂 120之间的夹角逐渐变大。 当第一旋转 臂 110与第二旋转臂 120之间的夹角产生变化时， 第一旋转臂 110与第二旋 转臂 120的角平分线 E与承载面 59的夹角维持不变（在本实施例中是以夹 角维持在 90度为例） 。 In the embodiment, the optical detecting device 100 further includes a substrate 150 having a plurality of third trenches (in FIG. 1 , the third trench 152 and the third trench 154 are taken as an example, and the push rod 130 further includes a plurality of third plugs (exemplified by the third plug 135 and the third plug 137 in FIG. 2B) are respectively slidably disposed in the third trenches 152, 154, wherein the third trenches 152, 154 are substantially Parallel to the angle bisector E of the first rotating arm 110 and the second rotating arm 120. In this embodiment, the third plug 135 is located at the first end 132 of the push rod 130, and the third plug 135 and the first plug 136 are respectively The third pin 137 is located at the second end 134 of the push rod 130, and the third pin 137 and the second pin 138 are respectively located on opposite sides of the push rod 130. In the embodiment, the push rod 130 is disposed between the substrate 150 and the first rotating arm 110 and disposed between the substrate 150 and the second rotating arm 120 . In the present embodiment, the first trench 112 is substantially parallel to the optical axis of the illumination beam 212, and the second trench 122 is substantially parallel to the optical axis of the sensed light 214. When the first pin 136 and the second pin 138 are gradually slid toward the end of the first groove 112 near the rotation center 140 and the end of the second groove 122 near the rotation center 140 (the third pin 135, 137 and The push rod 130 moves upward (the figure), and the angle between the first rotating arm 110 and the second rotating arm 120 gradually becomes larger. When the angle between the first rotating arm 110 and the second rotating arm 120 changes, the angle between the angle bisector E of the first rotating arm 110 and the second rotating arm 120 and the bearing surface 59 remains unchanged (in this In the embodiment, the angle is maintained at 90 degrees as an example).
通过使推杆 130上下移动，便能够使入射角 Θ1产生变化，进而找到待测 物质 52的共振角。 在本实施例中， 光学检测装置 100还包括致动器 180, 连 接至推杆 130, 以驱使推杆 130移动而使第一栓 136与第二栓 138分别在第 一沟槽 112与第二沟槽 122中滑动。如此一来，入射角 Θ1会维持在实质上等 于反射角 Θ2的状态，便能达到较佳的光学量测效果。致动器 180例如为线性 马达， 但本发明不以此为限。 本实施例的光学检测装置 100通过较简易的机 构作动，就能够使照明光束 252的光轴的入射角 Θ1维持与感测光 214的光轴 的反射角 Θ2实质上相等，因此本实施例的光学检测装置 100能够兼具较低的 制造成本与较佳的量测准确性。 此外， 本实施例的光学检测装置 100由于通 过致动器 180驱动推杆 130, 因此光学检测装置 100可不断地作即时（real time )量测。 举例而言， 待测物质 52例如为流动的液体， 而随着液体不断地 流动， 光学检测装置 100可即时监控液体的特性在不同时间的变化。 然而， 在其他实施例中， 光学检测装置也可不包括致动器 180, 而是使用者用手移 动推杆 130。  By moving the push rod 130 up and down, the incident angle Θ1 can be changed to find the resonance angle of the substance 52 to be tested. In the present embodiment, the optical detecting device 100 further includes an actuator 180 coupled to the push rod 130 to drive the push rod 130 to move the first plug 136 and the second plug 138 in the first groove 112 and the second, respectively. Sliding in the groove 122. As a result, the incident angle Θ1 is maintained at a state substantially equal to the reflection angle Θ2, and a better optical measurement effect can be achieved. The actuator 180 is, for example, a linear motor, but the invention is not limited thereto. The optical detecting device 100 of the present embodiment can maintain the incident angle Θ1 of the optical axis of the illumination beam 252 substantially equal to the reflection angle Θ2 of the optical axis of the sensing light 214 by a relatively simple mechanism, and thus the embodiment The optical detecting device 100 can combine both lower manufacturing cost and better measurement accuracy. Further, since the optical detecting device 100 of the present embodiment drives the push rod 130 by the actuator 180, the optical detecting device 100 can continuously perform real time measurement. For example, the substance to be tested 52 is, for example, a flowing liquid, and as the liquid continuously flows, the optical detecting device 100 can instantly monitor changes in the characteristics of the liquid at different times. However, in other embodiments, the optical detection device may also not include the actuator 180, but the user moves the push rod 130 by hand.
图 4为本发明的另一实施例的光学检测装置中的第一旋转臂、 第二旋转 臂、 推杆、 致动器及基板的立体示意图。 请参照图 4, 本实施例的光学检测 装置与图 1的光学检测装置 100类似， 而两者的差异如下所述， 在本实施例 的光学检测装置中，基板 150位于推杆 130a与第一旋转臂 110之间，且基板 150位于推杆 130a与第二旋转臂 120之间。 此外， 推杆 130a不具有图 2B中 的第三栓 135、 137, 而推杆 130a的第一栓 136与第二栓 138除了分别滑设 于第一沟槽 112与第二沟槽 122之外，还分别滑设于这些第三沟槽 152、 154。 换言之，第一栓 136经由第三沟槽 152穿过基板 150而滑设于第一沟槽 112, 且第二栓 138经由第三沟槽 154穿过基板 150而滑设于第二沟槽 122。 4 is a perspective view showing a first rotating arm, a second rotating arm, a push rod, an actuator, and a substrate in an optical detecting device according to another embodiment of the present invention. Referring to FIG. 4, the optical detecting device of the present embodiment is similar to the optical detecting device 100 of FIG. 1, and the difference between the two is as follows. In the optical detecting device of the embodiment, the substrate 150 is located at the push rod 130a and the first Between the rotating arms 110, and the substrate 150 is located between the push rod 130a and the second rotating arm 120. In addition, the push rod 130a does not have the third plug 135, 137 in FIG. 2B, and the first plug 136 and the second plug 138 of the push rod 130a are respectively disposed outside the first groove 112 and the second groove 122. They are also slidably disposed on the third grooves 152, 154, respectively. In other words, the first plug 136 is slidably disposed on the first trench 112 through the substrate 150 via the third trench 152 . The second plug 138 is slidably disposed on the second trench 122 through the substrate 150 via the third trench 154 .
图 5与图 6为本发明的又一实施例的光学检测装置中的第一旋转臂、 第 二旋转臂、 推杆、 致动器及基板的两个不同视角的立体示意图。 请参照图 5 与图 6, 本实施例的光学检测装置与图 1的光学检测装置 100类似， 而两者 的差异如下所述。 在本实施例的光学检测装置中， 光学检测装置还包括滑轨 160, 配置于基板 150上， 其中推杆 130b不可转动地滑设于滑轨 160上， 且 滑轨 160实质上平行于第一旋转臂 110与第二旋转臂 120的角平分线 E。 具 体而言， 在本实施例中， 滑轨 160与第一旋转臂 110分别设于基板 150的相 对两侧， 且滑轨 160与第二旋转臂 120分别设于基板 150的相对两侧。 光学 检测装置还包括滑动部 170,且推杆 130b通过滑动部 170滑设于滑轨 160上。  5 and 6 are perspective views of two different viewing angles of a first rotating arm, a second rotating arm, a push rod, an actuator, and a substrate in an optical detecting device according to still another embodiment of the present invention. Referring to Figures 5 and 6, the optical detecting device of this embodiment is similar to the optical detecting device 100 of Figure 1, and the differences between the two are as follows. In the optical detecting device of the embodiment, the optical detecting device further includes a slide rail 160 disposed on the substrate 150, wherein the push rod 130b is non-rotatably slidably disposed on the slide rail 160, and the slide rail 160 is substantially parallel to the first The angle between the rotating arm 110 and the second rotating arm 120 is bisector E. Specifically, in the embodiment, the slide rail 160 and the first rotating arm 110 are respectively disposed on opposite sides of the substrate 150, and the slide rail 160 and the second rotating arm 120 are respectively disposed on opposite sides of the substrate 150. The optical detecting device further includes a sliding portion 170, and the push rod 130b is slidably disposed on the sliding rail 160 through the sliding portion 170.
在本实施例中， 基板 150具有至少一第三沟槽（在图 5中是以两个第三 沟槽 152b与 154b为例），滑动部 170与推杆 130b分别设于基板 150的相对 两侧。 此外， 光学检测装置还包括至少一连接部 135b (在本实施例中是以两 个连接部为例 ) , 一个连接部 135b穿过第三沟槽 154b, 而另一个图 5中被 致动器 180遮挡到而没绘出的连接部通过第三沟槽 152b,且两个连接部皆连 接滑动部 170与推杆 130b。 此外， 两个连接部适于分别在第三沟槽 152b与 第三沟槽 154b中移动。 致动器 180连接至滑动部 170, 以驱使滑动部 170在 滑轨上滑动， 进而带动推杆 130b上下移动。如此一来，便能够使第一旋转臂 110与第二旋转臂 120转动，并同时维持入射角 Θ1实质上等于反射角 Θ2 (请 参照图 3 ) 。  In this embodiment, the substrate 150 has at least one third trench (in the FIG. 5, two third trenches 152b and 154b are taken as an example), and the sliding portion 170 and the push rod 130b are respectively disposed on the opposite sides of the substrate 150. side. Further, the optical detecting device further includes at least one connecting portion 135b (in the present embodiment, two connecting portions are exemplified), one connecting portion 135b passes through the third groove 154b, and the other is actuated in FIG. The connecting portion that is blocked by 180 and passes through the third groove 152b, and both connecting portions are connected to the sliding portion 170 and the push rod 130b. Further, the two connecting portions are adapted to move in the third groove 152b and the third groove 154b, respectively. The actuator 180 is coupled to the sliding portion 170 to urge the sliding portion 170 to slide on the slide rail, thereby driving the push rod 130b to move up and down. In this way, the first rotating arm 110 and the second rotating arm 120 can be rotated while maintaining the incident angle Θ1 substantially equal to the reflection angle Θ2 (refer to Fig. 3).
图 7为本发明的再一实施例的光学检测装置的光路示意图。 本实施例的 光学检测装置与图 1及图 3的光学检测装置类似， 而两者的差异在于本实施 例的光学检测装置的表面等离子体共振检测部 50c为光栅式表面等离子体共 振感测部。具体而言，表面等离子体共振检测部 50c的表面具有光栅结构 54c, 其可抓取待测物质 52。 此外， 表面等离子体共振检测部 50c的承载面 59c也 的状态， 亦即第一旋转臂 110与第二旋转臂 120 (请参照图 1 )的角平分线 E 维持在承载面 59c的法线上。  Fig. 7 is a schematic view showing the optical path of an optical detecting device according to still another embodiment of the present invention. The optical detecting device of the present embodiment is similar to the optical detecting device of FIGS. 1 and 3, and the difference between the two is that the surface plasmon resonance detecting portion 50c of the optical detecting device of the present embodiment is a grating type surface plasmon resonance sensing portion. . Specifically, the surface of the surface plasmon resonance detecting portion 50c has a grating structure 54c which can grasp the substance to be tested 52. Further, the state of the bearing surface 59c of the surface plasmon resonance detecting portion 50c, that is, the angle bisector E of the first rotating arm 110 and the second rotating arm 120 (please refer to FIG. 1) is maintained on the normal line of the bearing surface 59c. .
图 8与图 9为本发明的另二实施例的光学检测装置的光路示意图。 在这 两个实施例中， 仅绘示出光路来说明， 而其余的机构（例如第一旋转臂 110、 第二旋转臂 120、 推杆 130、 基板 150、 致动器 180 )均与图 1相同， 因此相 关机构请参照图 1 , 在此不再重复绘制。请参照图 8, 本实施例的光学检测装 置为椭圓仪，其可用以量测待测物 52d的厚度，其中待测物 52d例如为薄膜。 在本实施例中， 光源 210d例如为激光光束， 其所发出的照明光束 212d例如 为单波长激光光束。 在另一实施例中， 光源也可以釆用多波长光源 （例如白 色光源）搭配在照明光束的传递路径上设置带通滤光器来获得单波长光束。 8 and 9 are schematic diagrams showing optical paths of an optical detecting device according to another embodiment of the present invention. In both embodiments, only the optical path is illustrated for illustration, while the remaining mechanisms (eg, the first rotating arm 110, The second rotating arm 120, the push rod 130, the substrate 150, and the actuator 180 are the same as those in FIG. 1, so the related mechanism is referred to FIG. 1, and the drawing is not repeated here. Referring to FIG. 8, the optical detecting device of this embodiment is an ellipsometer, which can be used to measure the thickness of the object to be tested 52d, wherein the object to be tested 52d is, for example, a film. In the present embodiment, the light source 210d is, for example, a laser beam, and the illumination beam 212d emitted by the light source 210d is, for example, a single-wavelength laser beam. In another embodiment, the light source may also be provided with a multi-wavelength source (eg, a white light source) with a bandpass filter on the transmission path of the illumination beam to obtain a single wavelength beam.
在本实施例中， 光学检测装置还包括第一偏振器 222d及第二偏振器 242d。 光源 210d所发出的照明光束 212d照射在待测物质 52d上， 第一偏振 器 222d配置于照明光束 212d的传递路径上， 且位于光源 210d与待测物质 射向光侦测器 230d。 第二偏振器 242d配置于感测光 214d的传递路径上， 且 位于待测物质 52d与光侦测器 230d之间。 在本实施例中， 光源 210d与第一 偏振器 222d配置于第一旋转臂 110 (请参照图 1 )上， 待测物质 52d配置于 旋转中心 140 (请参照图 1 )附近， 且第二偏振器 242d与光侦测器 230d配置 于第二旋转臂 120 (请参照图 1 )上。 在本实施例中， 通过第一旋转臂 110 与第二旋转臂 120的旋转，可使照明光束 212d入射待测物 52d的入射角改变， 于待测物 52d的表面， 如此便能够达到较佳的量测效果。 在本实施例中， 光 学检测装置可还包括相位延迟器 224d, 例如为四分之一波片， 此时光学检测 装置可釆用归零式消光法（ null elliposmeter )来作量测。 请参照图 9, 本实施 例的光学检测装置与图 8的光学检测装置类似， 而两者的差异在于图 9的光 学检测装置不釆用图 8的相位延迟器 224d, 因此图 9的光学检测装置可釆用 相位调制光度量测法（ photometric ellipsometer )来作量测。  In this embodiment, the optical detecting device further includes a first polarizer 222d and a second polarizer 242d. The illumination beam 212d emitted from the light source 210d is irradiated on the substance to be tested 52d. The first polarizer 222d is disposed on the transmission path of the illumination beam 212d, and is located at the light source 210d and the substance to be tested is directed to the photodetector 230d. The second polarizer 242d is disposed on the transmission path of the sensing light 214d and located between the substance to be tested 52d and the photodetector 230d. In this embodiment, the light source 210d and the first polarizer 222d are disposed on the first rotating arm 110 (please refer to FIG. 1), and the substance to be tested 52d is disposed near the rotating center 140 (refer to FIG. 1), and the second polarization The 242d and the photodetector 230d are disposed on the second rotating arm 120 (please refer to FIG. 1). In this embodiment, by the rotation of the first rotating arm 110 and the second rotating arm 120, the incident angle of the illumination beam 212d incident on the object to be tested 52d can be changed on the surface of the object to be tested 52d, so that a better one can be achieved. The measurement effect. In the present embodiment, the optical detecting means may further include a phase retarder 224d, such as a quarter wave plate, in which case the optical detecting means may measure by a null elliposmeter. Referring to FIG. 9, the optical detecting device of the present embodiment is similar to the optical detecting device of FIG. 8, and the difference between the two is that the optical detecting device of FIG. 9 does not use the phase retarder 224d of FIG. 8, so the optical detecting of FIG. The device can be measured using a photometric ellipsometer.
本发明的光学检测装置不限定为表面等离子体共振影像仪、 椭圓仪或椭 圓影像仪， 在其他实施例中， 光学检测装置可以是其他任何需使照明光束的 光轴与感测光的光轴的角平分线不随着照明光束的入射角的改变而改变的光 学仪器。  The optical detecting device of the present invention is not limited to a surface plasmon resonance imager, an ellipsometer or an elliptical imager. In other embodiments, the optical detecting device may be any other optical axis and sensing light that require illumination of the illumination beam. An optical instrument in which the angular bisector of the optical axis does not change as the angle of incidence of the illumination beam changes.
图 10 为本发明的又一实施例的光学检测装置的结构示意图。 请参照图 10, 本实施例的光学检测装置 100e与图 1的光学检测装置 100有部分类似。 两者类似或相同的部分的元件以相同的标号表示出， 而其详细的功用与作动 在此不再重述。 此外， 两者不同之处如下所述。 在本实施例的光学检测装置FIG. 10 is a schematic structural view of an optical detecting device according to still another embodiment of the present invention. Referring to FIG. 10, the optical detecting device 100e of the present embodiment is partially similar to the optical detecting device 100 of FIG. Elements of similar or identical parts are denoted by the same reference numerals, and their detailed functions and actions It will not be repeated here. In addition, the differences between the two are as follows. Optical detecting device in this embodiment
100e中， 驱使第一旋转臂 110e与第二旋转臂 120e转动的机构不限制为前述 实施例的机构， 其可以是任何形式的可驱使第一旋转臂 110e 与第二旋转臂 120e旋转的机构。 在本实施例中， 第一旋转臂 110e与第二旋转臂 120e适于 等角度反向旋转， 也即无论第一旋转臂 110e与第二旋转臂 120e如何旋转， 第一旋转臂 110e与垂直于承载面 59的角平分线 E的夹角始终维持在实质上 等于第二旋转臂 120e与角平分线 E的夹角的状态。 In the 100e, the mechanism for driving the rotation of the first rotating arm 110e and the second rotating arm 120e is not limited to the mechanism of the foregoing embodiment, and may be any mechanism for driving the first rotating arm 110e and the second rotating arm 120e to rotate. In this embodiment, the first rotating arm 110e and the second rotating arm 120e are adapted to rotate at an equal angle, that is, regardless of how the first rotating arm 110e and the second rotating arm 120e rotate, the first rotating arm 110e is perpendicular to The angle of the angle bisector E of the bearing surface 59 is always maintained at a state substantially equal to the angle between the second rotating arm 120e and the angle bisector E.
光学检测装置 100e包括控制单元 310,且光侦测器 230具有感光面 234e。 具体而言， 光侦测器 230具有影像侦测元件 232e, 而感光面 234e例如为影 像侦测元件 232e 的感光面， 其中影像侦测元件 232e 例如为电荷耦合元件 ( charge coupled device, CCD )或互补式金氧半导体感测器 ( complementary metal oxide semiconductor sensor, CMOS sensor ) 。 控制单元 310用以才艮据第 二旋转臂 120e与承载面的法向量 VI的反向量（ inverse vector ) 的夹角 φΐ , 来调整感光面 234e的法向量 V2相对于第二旋转臂的延伸方向（在本实施例 中即平行于成像光学模块 240的光轴 124的方向）的夹角 φ2。 举例而言， 当 夹角 φΐ由一第一角度递增时，控制单元 310在夹角 φΐ为第一角度时给夹角 φ2—初始的第三角度， 当夹角 φΐ由第一角度递增至一第二角度时， 夹角 φ2 由一第三角度递减至一第四角度， 其中第一角度小于第二角度， 且第四角度 小于第三角度。 或者， 当夹角 φΐ从第二角度递减至第一角度时， 夹角 φ2从 第四角度递增至第三角度。  The optical detecting device 100e includes a control unit 310, and the photodetector 230 has a photosensitive surface 234e. Specifically, the photodetector 230 has a photodetecting element 232e, and the photoreceptor 232e is, for example, a photosensitive surface of the image detecting component 232e, wherein the image detecting component 232e is, for example, a charge coupled device (CCD) or Complementary metal oxide semiconductor sensor (CMOS sensor). The control unit 310 is configured to adjust the extending direction of the normal vector V2 of the photosensitive surface 234e relative to the second rotating arm according to the angle φ 反 of the inverse vector of the normal vector VI of the second rotating arm 120e and the bearing surface. The angle φ2 (in the present embodiment, the direction parallel to the optical axis 124 of the imaging optical module 240). For example, when the angle φ 递增 is increased by a first angle, the control unit 310 gives the angle φ2—the initial third angle when the angle φ ΐ is the first angle, and increases the angle φ ΐ from the first angle to the first angle. In the second angle, the angle φ2 is decreased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the fourth angle is smaller than the third angle. Alternatively, when the angle φ 递 is decreased from the second angle to the first angle, the angle φ2 is increased from the fourth angle to the third angle.
在另一实施例中， 也可以是当夹角 φΐ 由一第一角度递增时， 控制单元 310在夹角 φΐ为第一角度时给夹角 φ2—初始的第三角度，当夹角 φΐ由第一 角度递增至一第二角度时， 夹角 φ2 由一第三角度递增至一第四角度， 其中 第一角度小于第二角度， 且第三角度小于第四角度。 或者， 当夹角 φΐ 从第 二角度递减至第一角度时， 夹角 φ2从第四角度递减至第三角度。  In another embodiment, when the angle φ 递增 is increased by a first angle, the control unit 310 gives the angle φ2—the initial third angle when the angle φ ΐ is the first angle, when the angle φ ΐ is When the first angle is incremented to a second angle, the angle φ2 is increased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the third angle is smaller than the fourth angle. Alternatively, when the angle φ 递 is decreased from the second angle to the first angle, the angle φ2 is decreased from the fourth angle to the third angle.
在本说明书中， 物体的表面的法向量定义为由所述物体内指向所述物体 夕卜， 且垂直于所述表面的向量。 此外， 在本说明书中， 向量与直线（或臂） 的夹角定义为所述向量与所述直线（或所述臂） 的两个相加起来等于 180度 的夹角中较小的那一个， 而当所述向量与所述直线 (或所述臂 )互相垂直时， 则两者的夹角为 90度。 静态时， 物平面例如承载面 59 与光轴不为垂直， 会造成光侦测器 230 所侦测到的 7 载面 59的影像有透视变形 （ perspective distortion ) , 其也可称 为梯形失真 ( keystone distortion ) 。 动态扫瞄时， £设夹角 φΐ增力口但 φ2维 持为 0度， 光侦测器 230所侦测到承载面 59的影像会随着夹角 φΐ增加而造 成光侦测器 230所侦测到影像压缩变形。 此时， 需透过软体修正影像以修正 透视变形与影像压缩的因素后， 才能将不同夹角 φΐ 所测得的不同量测点的 数据作比较。 然而， 透过软体修正影像后， 影像的解析度会大为降低， 这会 影响到量测的准确性， 这种问题在 φΐ 越大时越为严重。 然而， 在本实施例 的光学检测装置 100e中， 当夹角 φΐ由一第一角度递增时， 控制单元 310在 夹角 φΐ为第一角度时给夹角 φ2—初始的第三角度， 当夹角 φΐ由第一角度 递增至一第二角度时， 夹角 φ2 由一第三角度递减至一第四角度， 其中第一 角度小于第二角度， 且第四角度小于第三角度。 或者， 当夹角 φΐ 从第二角 度递减至第一角度时， 夹角 φ2从第四角度递增至第三角度。 在另一实施例 中， 也可以是当夹角 φΐ由一第一角度递增时， 控制单元 310在夹角 φΐ为第 一角度时给夹角 φ2—初始的第三角度， 当夹角 φΐ由第一角度递增至一第二 角度时， 夹角 φ2 由一第三角度递增至一第四角度， 其中第一角度小于第二 角度， 且第三角度小于第四角度。 或者， 当夹角 φΐ 从第二角度递减至第一 角度时， 夹角 φ2 从第四角度递减至第三角度。 如此一来， 则可有效降低透 视变形与影像压缩的程度， 进而有效改善上述影像解析度降低的问题。 如此 一来， 本实施例的光学检测装置 100e的量测准确度与可靠度便可大为提升。 In the present specification, the normal vector of the surface of the object is defined as a vector that is pointed by the object into the object and perpendicular to the surface. Further, in the present specification, the angle between the vector and the straight line (or the arm) is defined as the smaller of the angles between the vector and the straight line (or the arm) which are equal to 180 degrees. And when the vector and the straight line (or the arm) are perpendicular to each other, the angle between the two is 90 degrees. When it is static, the object plane, for example, the bearing surface 59 and the optical axis are not perpendicular, which causes the image of the 7-plane 59 detected by the photodetector 230 to have a perspective distortion, which may also be called trapezoidal distortion ( Keystone distortion ). In the dynamic scanning, the angle φ ΐ is increased, but φ2 is maintained at 0 degrees, and the image detected by the photodetector 230 on the bearing surface 59 is detected by the photodetector 230 as the angle φ ΐ increases. Image compression deformation was detected. In this case, the software needs to correct the image to correct the factors of perspective distortion and image compression, and then compare the data of different measurement points measured by different angles φΐ. However, after the image is corrected by the software, the resolution of the image is greatly reduced, which affects the accuracy of the measurement. This problem is more serious when φΐ is larger. However, in the optical detecting device 100e of the present embodiment, when the angle φ is increased by a first angle, the control unit 310 gives the angle φ2 - the initial third angle when the angle φ ΐ is the first angle, when the clip When the angle φ 递增 is increased from the first angle to the second angle, the angle φ2 is decreased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the fourth angle is smaller than the third angle. Alternatively, when the angle φ 递 is decreased from the second angle to the first angle, the angle φ2 is increased from the fourth angle to the third angle. In another embodiment, when the angle φ 递增 is increased by a first angle, the control unit 310 gives the angle φ2—the initial third angle when the angle φ ΐ is the first angle, when the angle φ ΐ is When the first angle is incremented to a second angle, the angle φ2 is increased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the third angle is smaller than the fourth angle. Alternatively, when the angle φ 递 is decreased from the second angle to the first angle, the angle φ2 is decreased from the fourth angle to the third angle. In this way, the degree of perspective distortion and image compression can be effectively reduced, thereby effectively improving the problem of the reduced image resolution. As a result, the measurement accuracy and reliability of the optical detecting device 100e of the embodiment can be greatly improved.
以下以表格来帮助说明上述四种 φΐ及 φ2的递增、 递减的情况:  The following table is used to help illustrate the above-mentioned four increments and decrements of φΐ and φ2:
Figure imgf000014_0001
Figure imgf000014_0001
在情况 1 中， 夹角 φΐ从较小的第一角度递增至较大的第二角度， 而此 时夹角 φ2从较大的初始的第三角度递减至较小的第四角度。 在情况 2中， 夹角 φΐ从较大的第一角度递减至较小的第二角度， 而此时夹角 φ2从较小的 第三角度递增至较大的第四角度。 在情况 3中， 夹角 φΐ从较小的第一角度 递增至较大的第二角度， 而此时夹角 φ2从较小的初始的第三角度递增至较 大的第四角度。 在情况 4中， 夹角 φΐ从较大的第一角度递减至较小的第二 角度， 而此时夹角 φ2从较大的第三角度递减至较小的第四角度。 上述不同 情况中的第一角度可以彼此不完全相同或完全不同。 同理， 这四种情况中的 第二角度也可以彼此不完全相同或完全不同。 以此类推， 不同情况中的第三 角度与第四角度也是如此。其中，情况 1与情况 2是发生在夹角 φ2对夹角 φΐ 的补偿效果过大时， 而情况 3与情况 4是发生在夹角 φ2对夹角 φΐ的补偿效 果不足时， 而此补偿效果是指经由夹角 φ2 的变化来降低透视变形与影像压 缩的程度的效果。 In case 1, the angle φ 递增 is increased from a smaller first angle to a larger second angle, and at this time the angle φ 2 is decreased from a larger initial third angle to a smaller fourth angle. In case 2, the angle φ 递 decreases from a larger first angle to a smaller second angle, while the angle φ2 increases from a smaller third angle to a larger fourth angle. In case 3, the angle φ 递增 is increased from a smaller first angle to a larger second angle, and at this time the angle φ2 is increased from a smaller initial third angle to Big fourth angle. In case 4, the angle φ 递 decreases from a larger first angle to a smaller second angle, and at this time the angle φ2 decreases from a larger third angle to a smaller fourth angle. The first angles in the different situations described above may not be identical or completely different from each other. Similarly, the second angles of the four cases may not be identical or completely different from each other. And so on, the same is true for the third and fourth angles in different situations. Among them, Case 1 and Case 2 occur when the angle φ2 is excessively large for the angle φ 补偿, and Case 3 and Case 4 occur when the angle φ2 is insufficient for the angle φ 补偿, and the compensation effect is insufficient. It refers to the effect of reducing the degree of perspective distortion and image compression by the change of the angle φ2.
在本实施例中， 光学检测装置 100e还包括致动器 320, 其连接至光侦测 器 230, 且用以驱使感光面 234e旋转， 其中致动器 320电性连接至控制单元 310 ,且控制单元 310适于命令致动器 320驱使感光面 234e旋转。具体而言， 控制单元 310 例如为控制电路， 其通过电讯号命令致动器 320 驱使感光面 234e旋转。 在本实施例中， 光侦测器 230枢接于第二旋转臂 120e上， 致动 器 320例如为马达， 其驱使光侦测器 230转动， 而光侦测器 230带动感光面 234e旋转。在本实施例中，致动器 320位于光侦测器 230与第二旋转臂 120e 之间， 亦即第二旋转臂 120e上先配置致动器 320后，再将光侦测器 230配置 于致动器 320上。 然而， 在其他实施例中， 也可以是光侦测器 230位于致动 器 320与第二旋转臂 120e之间，亦即第二旋转臂 123e上先配置光侦测器 230 后， 再配置致动器 320。  In this embodiment, the optical detecting device 100e further includes an actuator 320 connected to the photodetector 230 for driving the photosensitive surface 234e to rotate, wherein the actuator 320 is electrically connected to the control unit 310 and controlled Unit 310 is adapted to command actuator 320 to drive photosensitive surface 234e to rotate. Specifically, the control unit 310 is, for example, a control circuit that drives the photosensitive surface 234e to rotate by a telecommunication command actuator 320. In this embodiment, the photodetector 230 is pivotally connected to the second rotating arm 120e. The actuator 320 is, for example, a motor that drives the photodetector 230 to rotate, and the photodetector 230 drives the photosensitive surface 234e to rotate. In this embodiment, the actuator 320 is located between the photodetector 230 and the second rotating arm 120e, that is, after the actuator 320 is disposed on the second rotating arm 120e, and then the photodetector 230 is disposed. Actuator 320. However, in other embodiments, the photodetector 230 may be disposed between the actuator 320 and the second rotating arm 120e, that is, after the photodetector 230 is disposed on the second rotating arm 123e, Actuator 320.
感光面 234e具有通过感光面 234e的中心的中心线 235e,此中心线 235e 落在感光面 234e上， 且感光面 234e绕此中心线 235e旋转。 为了使影像的成 像效果更为良好， 在本实施例中， 可使致动器 320的旋转轴位于感光面 234e 的中心线 235e的延伸线上，且使感光面 234e的中心线 235e垂直于第一旋转 臂 110e与第二旋转臂 120e的旋转平面。 此外， 可再进一步使感光面 234e的 中心线 235e与成像光学模块 240的光轴 124相交，如此也有助于提升影像的 成像效果。 在本实施例中， 中心线 235e与光轴 124实质上互相垂直。 此外， 在本实施例中， 夹角 φΐ的变动范围是落在大于 0度且小于 90度的范围内， 且夹角 φ2的变动范围是落在 0度至 70度的范围内。此外，夹角 φΐ与夹角 φ2 的范围可相关于光学检测装置 100e的放大倍率。 然而， 在其他实施例中， 感 光面 234e也可以是绕着感光面 234e上偏离感光面 234e的中心的参考线旋 转， 此参考线例如与中心线 235e平行但不重合。 此外， 致动器 320的旋转轴 也可以是位于此参考线的延伸线上。 The photosensitive surface 234e has a center line 235e passing through the center of the photosensitive surface 234e, and the center line 235e falls on the photosensitive surface 234e, and the photosensitive surface 234e rotates around the center line 235e. In order to make the imaging effect of the image better, in this embodiment, the rotation axis of the actuator 320 can be located on the extension line of the center line 235e of the photosensitive surface 234e, and the center line 235e of the photosensitive surface 234e is perpendicular to the first A plane of rotation of the rotating arm 110e and the second rotating arm 120e. In addition, the center line 235e of the photosensitive surface 234e can be further intersected with the optical axis 124 of the imaging optical module 240, which also contributes to enhancing the imaging effect of the image. In the present embodiment, the center line 235e and the optical axis 124 are substantially perpendicular to each other. Further, in the present embodiment, the variation range of the included angle φ 是 falls within a range of more than 0 degrees and less than 90 degrees, and the variation range of the included angle φ2 falls within the range of 0 degrees to 70 degrees. Further, the range of the angle φ ΐ and the angle φ 2 may be related to the magnification of the optical detecting device 100e. However, in other embodiments, the photosensitive surface 234e may also be a reference line around the center of the photosensitive surface 234e that is offset from the photosensitive surface 234e. Turning, this reference line is, for example, parallel to the center line 235e but does not coincide. In addition, the axis of rotation of the actuator 320 may also be an extension line located on the reference line.
为了避免外界的杂散光对光学检测结果的干扰， 在本实施例中， 光学模 测装置 100e还包括中空遮光弹性套筒 330,连接成像光学模块 240与光侦测 器 230, 其中中空遮光弹性套筒 330将成像光学模块 240与光侦测器 230之 间的感测光 214密闭于中空遮光弹性套筒 330中。 换言之， 中空遮光弹性套 筒 330环绕成像光学模块 240的光轴 124, 且不漏光地紧密连接成像光学模 块 240与光侦测器 230。 如此一来， 外界的杂散光便不会射入光侦测器 230 中以造成对量测结果的干扰。当光侦测器 230转动以带动感光面 234e转动时， 中空遮光弹性套筒 330随之变形，而有保持此过程杂散光不跑到光侦测器上。  In the present embodiment, the optical sensing device 100e further includes a hollow light-shielding elastic sleeve 330 connected to the imaging optical module 240 and the photodetector 230, wherein the hollow shading elastic sleeve is disposed in the embodiment, in order to avoid the interference of the external stray light on the optical detection result. The cartridge 330 seals the sensing light 214 between the imaging optical module 240 and the photodetector 230 in the hollow shading elastic sleeve 330. In other words, the hollow shading elastic sleeve 330 surrounds the optical axis 124 of the imaging optical module 240 and closely connects the imaging optical module 240 and the photodetector 230 without light leakage. As a result, external stray light does not enter the photodetector 230 to cause interference with the measurement results. When the photodetector 230 rotates to drive the photosensitive surface 234e to rotate, the hollow shading elastic sleeve 330 is deformed, and the stray light does not run to the photodetector while the process is maintained.
控制单元 310以查表的方式根据第二旋转臂 120e与承载面 59的法向量 VI的反向量的夹角 φΐ , 来找到感光面 234e的法向量 V2相对于第二旋转臂 120e的延伸方向的对应的夹角 φ2。具体而言，可先经由实验得知， 当夹角 φΐ 的大小为某个值时， 釆用何种大小的夹角 φ2可得到最佳的检测效果， 并将 此时的 φΐ值与 φ2值记录于表格中。 然后， 再经过一连串的实验建立了各种 φΐ值与最佳的 φ2值的对应关系， 并将此对应关系记录与表格中。 而当光学 检测装置 100e出厂后使用时，控制单元 310可透过致动器将第二旋转臂 124 驱动至特定的夹角 φΐ , 且以查表的方式找到对应的 φ2值， 并使感光面 234e 旋转至此角度。  The control unit 310 finds the normal vector V2 of the photosensitive surface 234e with respect to the extending direction of the second rotating arm 120e according to the angle φΐ between the second rotating arm 120e and the inverse vector of the normal vector VI of the bearing surface 59 in a look-up manner. Corresponding angle φ2. Specifically, it can be experimentally found that when the angle φ ΐ is a certain value, the optimum angle φ2 can be used to obtain the best detection effect, and the φ ΐ value and the φ 2 value at this time are obtained. Recorded in the form. Then, after a series of experiments, the correspondence between various φΐ values and the best φ2 values is established, and the correspondence is recorded in the table. When the optical detecting device 100e is used after being shipped from the factory, the control unit 310 can drive the second rotating arm 124 to a specific angle φΐ through the actuator, and find the corresponding φ2 value by looking up the table, and make the photosensitive surface 234e rotates to this angle.
图 11A为本发明的再一实施例的光学检测装置的结构示意图， 而图 11B 为图 11A的局部放大图。请参照图 11A与图 11B, 本实施例的光学检测装置 100f类似于图 10的光学检测装置 100e, 而两者的差异如下所述。 在本实施 例中， 光学检测装置 100f还包括基板 150f, 其中第一旋转臂 110e与第二旋 转臂 120e通过旋转中心 140枢设于基板 150f上。 在本实施例中， 控制单元 31 Of为机构式控制单元。 具体而言， 控制单元 310f包括曲线形沟槽 312f及 限制栓 314f。 曲线形沟槽 312f设于基板 150f上， 限制栓 314f连接至光侦测 器 230,例如是透过控制单元 310f的旋转盘 316f连接至光侦测器 230。此外， 限制栓 314f滑设于曲线形沟槽 312f中。 当第二旋转臂 120e旋转时， 曲线形 沟槽 312f的轨迹迫使限制栓 314f在曲线形沟槽 312f中滑动， 进而带动感光 面 234e旋转， 也即通过带动旋转盘 316f旋转而进而使光侦测器 230随之旋 转。 当曲线形沟槽 312f的轨迹经过适当的设计后，夹角 φΐ与夹角 φ2便能够 有适当的对应关系， 进而提升光学检测结果的正确性。 Fig. 11A is a schematic structural view of an optical detecting apparatus according to still another embodiment of the present invention, and Fig. 11B is a partially enlarged view of Fig. 11A. Referring to FIGS. 11A and 11B, the optical detecting device 100f of the present embodiment is similar to the optical detecting device 100e of FIG. 10, and the difference between the two is as follows. In the embodiment, the optical detecting device 100f further includes a substrate 150f, wherein the first rotating arm 110e and the second rotating arm 120e are pivotally disposed on the substrate 150f through the rotating center 140. In the present embodiment, the control unit 31 Of is an institutional control unit. Specifically, the control unit 310f includes a curved groove 312f and a restriction plug 314f. The curved groove 312f is disposed on the substrate 150f, and the limiting pin 314f is connected to the photodetector 230, for example, to the photodetector 230 through the rotating disk 316f of the control unit 310f. Further, the restricting pin 314f is slidably disposed in the curved groove 312f. When the second rotating arm 120e rotates, the trajectory of the curved groove 312f forces the limiting pin 314f to slide in the curved groove 312f, thereby driving the photosensitive surface 234e to rotate, that is, by rotating the rotating disk 316f to thereby perform light detection. Turbo 230 Turn. When the trajectory of the curved groove 312f is properly designed, the angle φ ΐ and the angle φ 2 can have an appropriate correspondence, thereby improving the accuracy of the optical detection result.
图 12 为本发明的另一实施例的光学检测装置的结构示意图。 请参照图 FIG. 12 is a schematic structural view of an optical detecting device according to another embodiment of the present invention. Please refer to the figure
12, 本实施例的光学检测装置 100h类似于图 10的光学检测装置 100e, 而两 者的差异在于在本实施例的光学检测装置 100h中是以遮光壳体 330h来取代 图 10中的中空遮光弹性套筒 330。 遮光壳体 330h包覆成像光学模块 240与 光侦测器 230之间的感测光 214的传递路径， 且包覆部分成像光学模块 240 与至少部分光侦测器 230 (图 12中是以包覆整个光侦测器 230为例）。 如此 一来，外界的杂散光便较不会射入光侦测器 230中以造成对量测结果的干扰。 12, the optical detecting device 100h of the present embodiment is similar to the optical detecting device 100e of FIG. 10, and the difference between the two is that the optical detecting device 100h of the present embodiment replaces the hollow shading in FIG. 10 with the light-shielding housing 330h. Elastic sleeve 330. The light shielding housing 330h covers the transmission path of the sensing light 214 between the imaging optical module 240 and the photodetector 230, and covers the imaging optical module 240 and at least a portion of the photodetector 230 (in FIG. The entire photodetector 230 is covered as an example). As a result, external stray light is less likely to enter the photodetector 230 to cause interference with the measurement results.
图 10、 图 11A与图 12的实施例的 ^既念也可应用于上述图 1、 图 2A、 图 The embodiment of Fig. 10, Fig. 11A and Fig. 12 can also be applied to the above Fig. 1, Fig. 2A, Fig.
2B、 图 4、 图 5及图 6的光学检测装置中， 以下举出一实施例作为代表来说 明。 In the optical detecting devices of 2B, 4, 5 and 6, an embodiment will be described below as a representative.
图 13 为本发明的又一实施例的光学检测装置的结构示意图。 请参照图 FIG. 13 is a schematic structural view of an optical detecting device according to still another embodiment of the present invention. Please refer to the figure
13 , 本实施例的光学检测装置 100g为图 1的光学检测装置 100及图 10的光 学检测装置 100e的综合体， 其中与图 1及图 10相同标号的元件代表相同或 类似的元件， 其功用在此不再重述。 在光学检测装置 100g 中， 致动器 320 连接至光侦测器 230以驱使光侦测器 230随着第二旋转臂 120的旋转而旋转， 其中旋转的方式与旋转的量请参照图 10的实施例，在此不再重述。在本实施 例中， 光侦测器 230配置于致动器 320与第二旋转臂 120之间。 此外， 控制 单元 310电性连接至致动器 180与致动器 320。 当控制单元 310命令致动器 180将第二旋转臂 120推动至某特定角度时，也通过查表而得知光侦测器 230 应转动至何种角度， 并命令致动器 320将光侦测器 230旋转至此角度。 13 . The optical detecting device 100 g of the present embodiment is a combination of the optical detecting device 100 of FIG. 1 and the optical detecting device 100 e of FIG. 10 , wherein the same reference numerals as those of FIGS. 1 and 10 represent the same or similar components, and their functions are used. It will not be repeated here. In the optical detecting device 100g, the actuator 320 is connected to the photodetector 230 to drive the photodetector 230 to rotate along with the rotation of the second rotating arm 120. The manner of rotation and the amount of rotation refer to FIG. The embodiment will not be repeated here. In the present embodiment, the photodetector 230 is disposed between the actuator 320 and the second rotating arm 120. In addition, control unit 310 is electrically coupled to actuator 180 and actuator 320. When the control unit 310 commands the actuator 180 to push the second rotating arm 120 to a certain angle, it also knows which angle the photodetector 230 should rotate by looking up the table, and commands the actuator 320 to detect the light. The detector 230 is rotated to this angle.
图 14为本发明的一实施例的光学检测方法的流程图。 请参照图 14, 本 实施例的光学检测方法适用于图 1至图 9的光学检测装置， 而以下是釆用图 1的光学检测装置 100为例来说明。 首先， 执行步骤 S110, 其为提供上述光 学检测装置 100。 接着， 执行步骤 S120, 将待测物质 52置于旋转中心 140 附近。 然后， 执行步骤 S130, 开启光源 210, 以使光源 210所发出的照明光 束 212 (如图 3所绘示 )照射在待测物质 52上， 其中待测物质 52将照明光 束 212反射成感测光 214。 之后， 执行步骤 S140, 以光侦测器 230侦测感测 光 214。 再来， 执行步骤 S150, 移动推杆 130, 以使第一栓 136与第二栓 138 分别在第一沟槽 112与第二沟槽 122中滑动， 进而改变照明光束 212入射待 测物质 52的角度，且同时改变光侦测器 230所侦测到的感测光 214的反射角 度。通过使推杆 130上下移动，便能够使入射角 Θ1产生变化， 进而找到待测 物质 52 的共振角。 以上步骤中所产生的机构连动及步骤的细节请参照图 1 至图 9的实施例， 再此不再重述。 Figure 14 is a flow chart of an optical detecting method in accordance with an embodiment of the present invention. Referring to Fig. 14, the optical detecting method of the present embodiment is applied to the optical detecting device of Figs. 1 to 9, and the following is an example of the optical detecting device 100 of Fig. 1. First, step S110 is performed, which is to provide the optical detecting device 100 described above. Next, step S120 is performed to place the substance to be tested 52 near the center of rotation 140. Then, in step S130, the light source 210 is turned on, so that the illumination beam 212 (shown in FIG. 3) emitted by the light source 210 is irradiated on the substance to be tested 52, wherein the substance to be tested 52 reflects the illumination beam 212 into the sensed light. 214. Thereafter, step S140 is performed to detect the sensing light 214 with the photodetector 230. Then, in step S150, the push rod 130 is moved to make the first plug 136 and the second plug 138 Sliding in the first trench 112 and the second trench 122 respectively, thereby changing the angle at which the illumination beam 212 enters the substance to be tested 52, and simultaneously changing the reflection angle of the sensing light 214 detected by the photodetector 230. By moving the push rod 130 up and down, the incident angle Θ1 can be changed, and the resonance angle of the substance to be tested 52 can be found. For details of the mechanism linkage and steps generated in the above steps, please refer to the embodiment of FIG. 1 to FIG. 9, and the description thereof will not be repeated.
图 15为本发明的另一实施例的光学检测方法的流程图。 请参照图 15 , 本实施例的光学检测方法与图 14的光学检测方法类似，而两者的差异在于图 14的步骤 S150与图 15的步骤 S150'略有不同， 且本实施例的光学检测方法 可应用于图 10至图 13的光学检测装置 100e、 100f、 100g、 100h。 在本实施 例的步骤 S150，中， 当改变照明光束 212入射待测物质 52的角度， 且改变光 侦测器 230所侦测到的感测光 214的反射角度的同时，根据第二旋转臂 120e 与承载面 59的法向量 VI的反向量的夹角， 来调整感光面 234e的法向量 V2 相对于第二旋转臂 120e的延伸方向的夹角。 当夹角 φΐ从一第一角度递增至 一第二角度时， 使夹角 φ2对应地从一第三角度递减至一第四角度， 其中第 一角度、 第二角度、 第三角度与第四角度皆大于 0度且小于 90度。 或者， 当 夹角 φΐ从第二角度递减至第一角度时，使夹角 φ2对应地从第四角度递增至 第三角度。 在另一实施例中， 也可以是当夹角 φΐ 从一第一角度递增至一第 二角度时， 使夹角 φ2对应地从一第三角度递增至一第四角度， 其中第一角 度、 第二角度、 第三角度与第四角度皆大于 0度且小于 90度。 或者， 当夹角 φΐ从第二角度递减至第一角度时， 使夹角 φ2对应地从第四角度递减至第三 角度。 上述步骤的详细细节与功用请参照图 10至图 12的实施例， 在此不再 重述。 此外， 当釆用图 13的光学检测装置 100g时， 步骤 S150'中的改变照 明光束 212入射待测物质 52的角度且改变光侦测器 230所侦测到的感测光 214的反射角度可由移动推杆 130来达成，详细的细节与功用请参照图 13的 实施例， 在此不再重述。 Figure 15 is a flow chart of an optical detecting method according to another embodiment of the present invention. Referring to FIG. 15, the optical detecting method of this embodiment is similar to the optical detecting method of FIG. 14, and the difference between the two is that step S150 of FIG. 14 is slightly different from step S150' of FIG. 15, and the optical detecting of the embodiment is different. The method can be applied to the optical detecting devices 100e, 100f, 100g, 100h of FIGS. 10 to 13. In step S150 of the embodiment, when the angle at which the illumination beam 212 is incident on the substance to be tested 52 is changed, and the reflection angle of the sensing light 214 detected by the photodetector 230 is changed, according to the second rotating arm The angle between the 120e and the inverse vector of the normal vector VI of the bearing surface 59 adjusts the angle of the normal vector V2 of the photosensitive surface 234e with respect to the extending direction of the second rotating arm 120e. When the angle φ 递增 is increased from a first angle to a second angle, the angle φ 2 is correspondingly decreased from a third angle to a fourth angle, wherein the first angle, the second angle, the third angle, and the The four angles are all greater than 0 degrees and less than 90 degrees. Alternatively, when the angle φ 递 is decreased from the second angle to the first angle, the angle φ2 is correspondingly increased from the fourth angle to the third angle. In another embodiment, when the angle φ 递增 is increased from a first angle to a second angle, the angle φ2 is correspondingly increased from a third angle to a fourth angle, wherein the first angle, The second angle, the third angle, and the fourth angle are both greater than 0 degrees and less than 90 degrees. Alternatively, when the angle φ 递 is decreased from the second angle to the first angle, the angle φ2 is correspondingly decreased from the fourth angle to the third angle. For detailed details and functions of the above steps, please refer to the embodiment of FIG. 10 to FIG. 12, which will not be repeated here. In addition, when the optical detecting device 100g of FIG. 13 is used, changing the angle of the illumination beam 212 entering the substance to be tested 52 in step S150' and changing the reflection angle of the sensing light 214 detected by the photodetector 230 may be The pusher 130 is moved to achieve the details. For details and functions, please refer to the embodiment of FIG. 13, which will not be repeated here.
综上所述， 在本发明的实施例的光学检测装置及光学检测方法中， 由于 当第一栓与第二栓分别在第一沟槽与第二沟槽中滑动时， 第一栓至旋转中心 的距离维持实质上等于第二栓至旋转中心的距离， 因此无论第一旋转臂与第 二旋转臂旋转至何种角度， 第一旋转臂与第二旋转臂的角平分线的位置维持 不变。 如此一来， 便可达到较佳的光学量测效果。 此外， 本发明的实施例的光学检测装置通过较简易的机构作动， 就能够 使照明光束的光轴的入射角维持与感测光的光轴的反射角实质上相等， 因此 本发明的实施例的光学检测装置能够兼具较低的制造成本与较佳的量测准确 性。 再者， 本发明的实施例的光学检测装置由于通过致动器驱动推杆， 因此 光学检测装置可不断地作即时量测。 In summary, in the optical detecting device and the optical detecting method of the embodiment of the present invention, since the first pin and the second pin slide in the first groove and the second groove respectively, the first pin is rotated The distance of the center is maintained substantially equal to the distance of the second pin to the center of rotation, so the position of the angle bisector of the first rotating arm and the second rotating arm is maintained regardless of the angle at which the first rotating arm and the second rotating arm are rotated. change. In this way, a better optical measurement effect can be achieved. Further, the optical detecting device according to the embodiment of the present invention can maintain the incident angle of the optical axis of the illumination beam substantially equal to the reflection angle of the optical axis of the sensing light by a relatively simple mechanism, and thus the implementation of the present invention The optical detecting device of the example can have both lower manufacturing cost and better measurement accuracy. Furthermore, since the optical detecting device of the embodiment of the present invention drives the push rod by the actuator, the optical detecting device can continuously perform the instantaneous measurement.
再者， 在本发明的实施例的光学检测装置及光学检测方法中， 当第二旋 转臂与承载面的法向量的反向量的夹角递增或递减时， 可使感光面的法向量 相对于第二旋转臂的延伸方向的夹角递增或递减， 如此一来， 便可有效降低 在光侦测器中所成的像的透视变形与影像压缩， 进而提升光学检测装置与光 学检测方法的检测准确度。  Furthermore, in the optical detecting device and the optical detecting method of the embodiment of the present invention, when the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface is increased or decreased, the normal vector of the photosensitive surface can be made relative to The angle of the extending direction of the second rotating arm is increased or decreased, so that the perspective distortion and image compression of the image formed in the photodetector can be effectively reduced, thereby improving the detection of the optical detecting device and the optical detecting method. Accuracy.
虽然本发明已以实施例揭露如上， 然其并非用以限定本发明， 任何所属 技术领域中具有通常知识者， 在不脱离本发明的精神和范围内， 当可作些许 的更动与润饰， 故本发明的保护范围当视后附的权利要求所界定者为准。  Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and those skilled in the art can make some modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

Claims

权利要求书 Claim
1. 一种光学检测装置， 适于量测待测物质， 所述光学检测装置包括： 第一旋转臂， 具有第一沟槽； An optical detecting device, which is adapted to measure a substance to be tested, the optical detecting device comprising: a first rotating arm having a first groove;
第二旋转臂， 经由旋转中心与所述第一旋转臂枢接， 且具有第二沟槽； 推杆， 具有相对的第一端与第二端， 且包括配置于所述第一端的第一栓 及配置于所述第二端的第二栓， 其中所述第一栓滑设于所述第一沟槽， 且所 述第二栓滑设于所述第二沟槽， 当所述第一栓与所述第二栓分别在所述第一 沟槽与所述第二沟槽中滑动时， 所述第一栓至所述旋转中心的距离维持实质 上等于所述第二栓至所述旋转中心的距离；  a second rotating arm pivotally connected to the first rotating arm via a center of rotation and having a second groove; a push rod having opposite first and second ends, and including a first end disposed at the first end a second plug that is disposed at the second end, wherein the first pin is disposed on the first groove, and the second pin is disposed on the second groove, when the first When a pin and the second pin slide in the first groove and the second groove, respectively, the distance of the first pin to the center of rotation is maintained substantially equal to the second pin to the The distance of the center of rotation;
光源， 配置于所述第一旋转臂上； 以及  a light source disposed on the first rotating arm;
光侦测器， 配置于所述第二旋转臂上， 其中所述待测物质适于配置于所 述旋转中心附近。  The photodetector is disposed on the second rotating arm, wherein the substance to be tested is adapted to be disposed near the center of rotation.
2.如权利要求 1所述的光学检测装置，还包括基板，具有多个第三沟槽， 且所述推杆还包括多个第三栓， 分别滑设于所述第三沟槽中， 其中所述第三 沟槽实质上平行于所述第一旋转臂与所述第二旋转臂的角平分线。  The optical detecting device of claim 1 , further comprising a substrate having a plurality of third trenches, and wherein the push rod further comprises a plurality of third plugs respectively slidably disposed in the third trenches Wherein the third groove is substantially parallel to an angle bisector of the first rotating arm and the second rotating arm.
3.如权利要求 1所述的光学检测装置，还包括基板，具有两个第三沟槽， 其中所述第一栓与所述第二栓分别滑设于所述第三沟槽， 且所述第三沟槽实 质上平行于所述第一旋转臂与所述第二旋转臂的角平分线。  The optical detecting device of claim 1 , further comprising a substrate having two third grooves, wherein the first plug and the second plug are respectively slidably disposed on the third groove, and The third groove is substantially parallel to an angle bisector of the first rotating arm and the second rotating arm.
4. 如权利要求 1所述的光学检测装置， 还包括：  4. The optical detecting apparatus according to claim 1, further comprising:
基板； 以及  Substrate;
滑轨，配置于所述基板上，其中所述推杆不可转动地滑设于所述滑轨上， 且所述滑轨实质上平行于所述第一旋转臂与所述第二旋转臂的角平分线。  a slide rail disposed on the substrate, wherein the push rod is non-rotatably slidably disposed on the slide rail, and the slide rail is substantially parallel to the first rotating arm and the second rotating arm Angle bisector.
5. 如权利要求 4所述的光学检测装置，其中所述滑轨与所述第一旋转臂 分别设于所述基板的相对两侧， 且所述滑轨与所述第二旋转臂分别设于所述 基板的相对两侧， 所述光学检测装置还包括滑动部， 且所述推杆通过所述滑 动部滑设于所述滑轨上。  The optical detecting device according to claim 4, wherein the slide rail and the first rotating arm are respectively disposed on opposite sides of the substrate, and the sliding rail and the second rotating arm are respectively disposed On the opposite sides of the substrate, the optical detecting device further includes a sliding portion, and the push rod is slidably disposed on the sliding rail through the sliding portion.
6. 如权利要求 5所述的光学检测装置，其中所述基板具有至少一第三沟 槽， 所述滑动部与所述推杆分别设于所述基板的相对两侧， 所述光学检测装 置还包括连接部， 所述连接部穿过所述第三沟槽， 并连接所述滑动部与所述 推杆， 且所述连接部适于在所述第三沟槽中移动。 The optical detecting device according to claim 5, wherein the substrate has at least one third groove, and the sliding portion and the push rod are respectively disposed on opposite sides of the substrate, and the optical detecting device Further including a connecting portion that passes through the third groove and connects the sliding portion with the a push rod, and the connecting portion is adapted to move in the third groove.
7. 如权利要求 6所述的光学检测装置，还包括致动器， 其连接至所述滑 动部， 以驱使所述滑动部在所述滑轨上滑动。  7. The optical detecting apparatus according to claim 6, further comprising an actuator coupled to the sliding portion to urge the sliding portion to slide on the slide rail.
8. 如权利要求 1所述的光学检测装置，还包括致动器， 其连接至所述推 杆， 以驱使所述推杆移动而使所述第一栓与所述第二栓分别在所述第一沟槽 与所述第二沟槽中滑动。  8. The optical detecting apparatus of claim 1, further comprising an actuator coupled to the push rod to urge the push rod to move to cause the first plug and the second plug to be respectively The first trench and the second trench slide.
9. 如权利要求 1所述的光学检测装置，其中当所述第一栓与所述第二栓 分别逐渐往所述第一沟槽的靠近所述旋转中心的一端与所述第二沟槽的靠近 所述旋转中心的一端滑动时， 所述第一旋转臂与所述第二旋转臂之间的夹角 逐渐变大， 所述光学检测装置还包括承载器， 配置于所述旋转中心上， 所述 承载器具有承载面， 所述承载面用以承载所述待测物质， 当所述第一旋转臂 与所述第二旋转臂之间的夹角产生变化时， 所述第一旋转臂与所述第二旋转 臂的角平分线与所述承载面的夹角维持不变。  9. The optical detecting device according to claim 1, wherein the first plug and the second plug gradually extend toward an end of the first groove near the center of rotation and the second groove, respectively When the one end of the rotating center slides, the angle between the first rotating arm and the second rotating arm gradually becomes larger, and the optical detecting device further includes a carrier disposed on the rotating center The carrier has a bearing surface, the bearing surface is configured to carry the substance to be tested, and when the angle between the first rotating arm and the second rotating arm changes, the first rotation The angle between the angle bisector of the arm and the second rotating arm and the bearing surface remains unchanged.
10. 如权利要求 9所述的光学检测装置， 其中当所述第一旋转臂与所述 第二旋转臂之间的夹角产生变化时， 所述第一旋转臂与所述第二旋转臂的角 平分线保持与所述承载面垂直。  10. The optical detecting device according to claim 9, wherein the first rotating arm and the second rotating arm are changed when an angle between the first rotating arm and the second rotating arm is changed The corner bisector remains perpendicular to the bearing surface.
11. 如权利要求 1所述的光学检测装置， 还包括表面等离子体共振检测 部， 其配置于所述旋转中心上， 且接触所述待测物质， 以产生表面等离子体 共振现象。  11. The optical detecting apparatus according to claim 1, further comprising a surface plasmon resonance detecting portion disposed on the rotation center and contacting the substance to be tested to generate a surface plasmon resonance phenomenon.
12. 如权利要求 11所述的光学检测装置，其中所述表面等离子体共振检 测部为棱镜式表面等离子体共振感测部。  The optical detecting device according to claim 11, wherein the surface plasmon resonance detecting portion is a prism type surface plasmon resonance sensing portion.
13. 如权利要求 11所述的光学检测装置，其中所述表面等离子体共振检 测部为光栅式表面等离子体共振感测部。  The optical detecting device according to claim 11, wherein the surface plasmon resonance detecting portion is a grating type surface plasmon resonance sensing portion.
14. 如权利要求 11所述的光学检测装置，其中所述光源适于发出照明光 束， 所述表面等离子体共振检测部配置于所述照明光束的传递路径上， 所述 照明光束在照射于所述表面等离子体共振检测部后， 产生携带有表面等离子 体共振资讯的感测光， 且所述光侦测器配置于所述感测光的传递路径上。  The optical detecting device according to claim 11, wherein the light source is adapted to emit an illumination beam, the surface plasmon resonance detecting portion is disposed on a transmission path of the illumination beam, and the illumination beam is irradiated After the surface plasmon resonance detecting unit is described, the sensing light carrying the surface plasmon resonance information is generated, and the photodetector is disposed on the transmission path of the sensing light.
15. 如权利要求 14所述的光学检测装置，还包括偏振器， 配置于所述照 明光束的传递路径上，且位于所述光源与所述表面等离子体共振检测部之间。  The optical detecting device according to claim 14, further comprising a polarizer disposed on a transmission path of the illumination beam and located between the light source and the surface plasmon resonance detecting portion.
16. 如权利要求 14所述的光学检测装置，还包括带通滤光器， 其配置于 所述照明光束的传递路径上， 且位于所述光源与所述表面等离子体共振检测 部之间。 16. The optical detecting device of claim 14, further comprising a band pass filter configured to The transmission path of the illumination beam is located between the light source and the surface plasmon resonance detecting portion.
17. 如权利要求 14所述的光学检测装置，其中所述光源为发光二极体或 激光发射器。  17. The optical detection device of claim 14, wherein the light source is a light emitting diode or a laser emitter.
18. 如权利要求 1所述的光学检测装置， 还包括：  18. The optical detecting device of claim 1, further comprising:
第一偏振器， 其中所述光源适于发出照明光束， 且所述照明光束照射在 所述待测物质上， 所述第一偏振器配置于所述照明光束的传递路径上， 且位 于所述光源与所述待测物质之间； 以及  a first polarizer, wherein the light source is adapted to emit an illumination beam, and the illumination beam is irradiated on the substance to be tested, the first polarizer is disposed on a transmission path of the illumination beam, and is located at the a light source and the substance to be tested;
第二偏振器， 其中所述待测物质将所述照明光束反射成感测光， 所述感 测光射向所述光侦测器， 所述第二偏振器配置于所述感测光的传递路径上， 且位于所述待测物质与所述光侦测器之间。  a second polarizer, wherein the object to be tested reflects the illumination beam into a sensed light, the sensed light is directed to the photodetector, and the second polarizer is disposed on the sensed light On the transmission path, between the substance to be tested and the photodetector.
19. 如权利要求 1所述的光学检测装置， 还包括：  19. The optical detection device of claim 1, further comprising:
承载器， 配置于所述旋转中心上， 其中所述承载器具有承载面， 且所述 承载面用以承载所述待测物质； 以及  a carrier disposed on the center of rotation, wherein the carrier has a bearing surface, and the bearing surface is configured to carry the substance to be tested;
控制单元， 其中所述光侦测器具有感光面， 且所述控制单元用以根据所 述第二旋转臂与所述承载面的法向量的反向量的夹角， 来调整所述感光面的 法向量相对于所述第二旋转臂的延伸方向的夹角， 当所述第二旋转臂与所述 承载面的法向量的反向量的夹角递增或递减时， 所述控制单元使所述感光面 的法向量相对于所述第二旋转臂的延伸方向的夹角递增或递减。  a control unit, wherein the photodetector has a photosensitive surface, and the control unit is configured to adjust the photosensitive surface according to an angle between an inverse vector of a normal vector of the second rotating arm and the bearing surface The angle between the normal vector and the extending direction of the second rotating arm, when the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface is increasing or decreasing, the control unit makes the The angle of the normal of the photosensitive surface with respect to the extending direction of the second rotating arm is increased or decreased.
20. 如权利要求 19所述的光学检测装置，其中当所述第二旋转臂与所述 承载面的法向量的反向量的夹角从第一角度递增至第二角度时， 所述控制单 元使所述感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从 第三角度递减至第四角度， 或者当所述第二旋转臂与所述承载面的法向量的 反向量的夹角从所述第二角度递减至所述第一角度时， 所述控制单元使所述 感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从所述第四 角度递增至所述第三角度， 其中所述第一角度、 所述第二角度、 所述第三角 度与所述第四角度皆大于 0度且小于 90度。  20. The optical detecting apparatus according to claim 19, wherein the control unit is incremented when an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface is increased from a first angle to a second angle Correlating an angle of a normal vector of the photosensitive surface with respect to an extending direction of the second rotating arm from a third angle to a fourth angle, or a normal vector of the second rotating arm and the bearing surface When the angle of the inverse vector decreases from the second angle to the first angle, the control unit correspondingly makes the angle of the normal vector of the photosensitive surface relative to the extending direction of the second rotating arm The fourth angle is incremented to the third angle, wherein the first angle, the second angle, the third angle, and the fourth angle are both greater than 0 degrees and less than 90 degrees.
21. 如权利要求 19所述的光学检测装置，其中当所述第二旋转臂与所述 承载面的法向量的反向量的夹角从第一角度递增至第二角度时， 所述控制单 元使所述感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从 第三角度递增至第四角度， 或者当所述第二旋转臂与所述承载面的法向量的 反向量的夹角从所述第二角度递减至所述第一角度时， 所述控制单元使所述 感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从所述第四 角度递减至所述第三角度， 其中所述第一角度、 所述第二角度、 所述第三角 度与所述第四角度皆大于 0度且小于 90度。 The optical detecting device according to claim 19, wherein the control unit is incremented when an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface is increased from a first angle to a second angle Correlating the normal angle of the photosensitive surface with respect to the extending direction of the second rotating arm The third angle is incremented to a fourth angle, or when the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface is decreased from the second angle to the first angle, the control unit Decreasing an angle of a normal vector of the photosensitive surface relative to an extending direction of the second rotating arm from the fourth angle to the third angle, wherein the first angle and the second angle The third angle and the fourth angle are both greater than 0 degrees and less than 90 degrees.
22. 如权利要求 19所述的光学检测装置，还包括致动器， 连接至所述光 侦测器， 且用以驱使所述感光面旋转， 其中所述致动器电性连接至所述控制 单元， 且所述控制单元适于命令所述致动器驱使所述感光面旋转。  22. The optical detection device of claim 19, further comprising an actuator coupled to the photodetector and configured to drive the photosensitive surface to rotate, wherein the actuator is electrically coupled to the a control unit, and the control unit is adapted to command the actuator to drive the photosensitive surface to rotate.
23. 如权利要求 22所述的光学检测装置，其中所述感光面位于所述致动 器与所述第二旋转臂之间。  23. The optical detection device of claim 22, wherein the photosensitive surface is between the actuator and the second rotating arm.
24. 如权利要求 22所述的光学检测装置，其中所述致动器位于所述感光 面与所述第二旋转臂之间。  24. The optical detection device of claim 22, wherein the actuator is located between the photosensitive surface and the second rotating arm.
25. 如权利要求 19所述的光学检测装置，其中所述控制单元以查表的方 式根据所述第二旋转臂与所述承载面的法向量的反向量的夹角， 来找到所述 感光面的法向量相对于所述第二旋转臂的延伸方向的对应的夹角。  25. The optical detecting apparatus according to claim 19, wherein said control unit finds said photosensitive light in a table lookup manner according to an angle between said second rotating arm and an inverse vector of a normal vector of said bearing surface The corresponding angle of the normal of the face relative to the direction of extension of the second rotating arm.
26. 如权利要求 19所述的光学检测装置，还包括基板， 其中所述第一旋 转臂与所述第二旋转臂通过所述旋转中心枢设于所述基板上， 所述控制单元 包括：  The optical detection device of claim 19, further comprising a substrate, wherein the first rotating arm and the second rotating arm are pivotally disposed on the substrate through the rotating center, and the control unit comprises:
曲线形沟槽， 设于所述基板上； 以及  a curved groove disposed on the substrate;
限制栓， 连接至所述光侦测器， 且滑设于所述曲线形沟槽中， 当所述第 二旋转臂旋转时， 所述曲线形沟槽的轨迹迫使所述限制栓在所述曲线形沟槽 中滑动， 进而带动所述感光面旋转。  a limiting bolt connected to the photodetector and slidably disposed in the curved groove, the trajectory of the curved groove forcing the limiting pin to be in the Sliding in the curved groove, thereby driving the photosensitive surface to rotate.
27. 如权利要求 19所述的光学检测装置，其中所述光源适于发出照明光 束， 所述待测物质配置于所述照明光束的传递路径上， 所述照明光束在照射 于所述待测物质后， 产生携带有待测物质的资讯的感测光， 所述光侦测器配 置于所述感测光的传递路径上， 所述光学检测装置还包括：  27. The optical detecting device according to claim 19, wherein the light source is adapted to emit an illumination beam, the substance to be tested is disposed on a transmission path of the illumination beam, and the illumination beam is irradiated to the to-be-tested After the substance is generated, the sensing light carrying the information of the substance to be tested is generated, and the photodetector is disposed on the transmission path of the sensing light, and the optical detecting device further includes:
成像光学模块， 配置于所述感测光的传递路径上， 且位于所述光侦测器 与所述待测物质之间； 以及  An imaging optical module disposed on the transmission path of the sensing light and located between the photodetector and the substance to be tested;
中空遮光弹性套筒， 连接所述成像光学模块与所述光侦测器， 其中所述 中空遮光弹性套筒将所述成像光学模块与所述光侦测器之间的所述感测光密 闭于所述中空遮光弹性套筒中， 且当所述光侦测器转动以带动所述感光面转 动时， 所述中空弹性套筒随之变形。 a hollow light-shielding elastic sleeve connecting the imaging optical module and the photodetector, wherein the hollow light-shielding elastic sleeve optically senses the sensing between the imaging optical module and the photodetector Closed in the hollow light-shielding elastic sleeve, and when the photodetector rotates to drive the photosensitive surface to rotate, the hollow elastic sleeve is deformed accordingly.
28. 如权利要求 27所述的光学检测装置，其中所述感光面具有通过所述 感光面的中心的中心线， 所述感光面绕所述中心线旋转， 且所述中心线与所 述成像光学模块的光轴相交。  The optical detecting apparatus according to claim 27, wherein said photosensitive surface has a center line passing through a center of said photosensitive surface, said photosensitive surface is rotated about said center line, and said center line and said image forming The optical axes of the optical modules intersect.
29. 如权利要求 19所述的光学检测装置，其中所述光源适于发出照明光 束， 所述待测物质配置于所述照明光束的传递路径上， 所述照明光束在照射 于所述待测物质后， 产生携带有待测物质的资讯的感测光， 所述光侦测器配 置于所述感测光的传递路径上， 所述光学检测装置还包括：  The optical detecting device according to claim 19, wherein the light source is adapted to emit an illumination beam, the substance to be tested is disposed on a transmission path of the illumination beam, and the illumination beam is irradiated to the to-be-tested After the substance is generated, the sensing light carrying the information of the substance to be tested is generated, and the photodetector is disposed on the transmission path of the sensing light, and the optical detecting device further includes:
成像光学模块， 配置于所述感测光的传递路径上， 且位于所述光侦测器 与所述待测物质之间； 以及  An imaging optical module disposed on the transmission path of the sensing light and located between the photodetector and the substance to be tested;
遮光壳体， 包覆所述成像光学模块与所述光侦测器之间的所述感测光的 传递路径， 且包覆部分所述成像光学模块与至少部分所述光侦测器。  a light shielding housing covering a transmission path of the sensing light between the imaging optical module and the photodetector, and covering part of the imaging optical module and at least a portion of the photodetector.
30. 如权利要求 19所述的光学检测装置，其中所述感光面具有通过所述 感光面的中心的中心线， 所述感光面绕所述中心线旋转， 且所述中心线垂直 于所述第一旋转臂与所述第二旋转臂的旋转平面。  30. The optical detecting apparatus according to claim 19, wherein the photosensitive surface has a center line passing through a center of the photosensitive surface, the photosensitive surface is rotated about the center line, and the center line is perpendicular to the a plane of rotation of the first rotating arm and the second rotating arm.
31. 如权利要求 19所述的光学检测装置，其中所述第二旋转臂与所述承 载面的法向量的反向量的夹角的变动范围是落在大于 0度且小于 90度的范围 内， 且所述感光面的法向量相对于所述第二旋转臂的延伸方向的夹角的变动 范围是落在 0度至 70度的范围内。  The optical detecting device according to claim 19, wherein a variation range of an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface falls within a range of more than 0 degrees and less than 90 degrees And a variation range of an angle of a normal vector of the photosensitive surface with respect to an extending direction of the second rotating arm is in a range of 0 to 70 degrees.
32. 一种光学检测装置， 适于量测待测物质， 所述光学检测装置包括： 第一旋转臂；  32. An optical detecting device, configured to measure a substance to be tested, the optical detecting device comprising: a first rotating arm;
第二旋转臂， 经由旋转中心与所述第一旋转臂枢接；  a second rotating arm pivotally connected to the first rotating arm via a center of rotation;
光源， 配置于所述第一旋转臂上；  a light source disposed on the first rotating arm;
光侦测器， 配置于所述第二旋转臂上， 其中所述待测物质适于配置于所 述旋转中心附近；  a photodetector disposed on the second rotating arm, wherein the substance to be tested is adapted to be disposed near the center of rotation;
承载器， 配置于所述旋转中心上， 其中所述承载器具有承载面， 且所述 承载面用以承载所述待测物质； 以及  a carrier disposed on the center of rotation, wherein the carrier has a bearing surface, and the bearing surface is configured to carry the substance to be tested;
控制单元， 其中所述光侦测器具有感光面， 且所述控制单元用以根据所 述第二旋转臂与所述承载面的法向量的反向量的夹角， 来调整所述感光面的 法向量相对于所述第二旋转臂的延伸方向的夹角， 当所述第二旋转臂与所述 承载面的法向量的反向量的夹角递增或递减时， 所述控制单元使所述感光面 的法向量相对于所述第二旋转臂的延伸方向的夹角递增或递减。 a control unit, wherein the photodetector has a photosensitive surface, and the control unit is configured to adjust the photosensitive surface according to an angle between an inverse vector of a normal vector of the second rotating arm and the bearing surface The angle between the normal vector and the extending direction of the second rotating arm, when the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface is increasing or decreasing, the control unit makes the The angle of the normal of the photosensitive surface with respect to the extending direction of the second rotating arm is increased or decreased.
33. 如权利要求 32所述的光学检测装置，其中当所述第二旋转臂与所述 承载面的法向量的反向量的夹角从第一角度递增至第二角度时， 所述控制单 元使所述感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从 第三角度递减至第四角度， 或者当所述第二旋转臂与所述承载面的法向量的 反向量的夹角从所述第二角度递减至所述第一角度时， 所述控制单元使所述 感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从所述第四 角度递增至所述第三角度， 其中所述第一角度、 所述第二角度、 所述第三角 度与所述第四角度皆大于 0度且小于 90度。  33. The optical detecting apparatus according to claim 32, wherein the control unit is incremented when an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface is increased from a first angle to a second angle Correlating an angle of a normal vector of the photosensitive surface with respect to an extending direction of the second rotating arm from a third angle to a fourth angle, or a normal vector of the second rotating arm and the bearing surface When the angle of the inverse vector decreases from the second angle to the first angle, the control unit correspondingly makes the angle of the normal vector of the photosensitive surface relative to the extending direction of the second rotating arm The fourth angle is incremented to the third angle, wherein the first angle, the second angle, the third angle, and the fourth angle are both greater than 0 degrees and less than 90 degrees.
34. 如权利要求 32所述的光学检测装置，其中当所述第二旋转臂与所述 承载面的法向量的反向量的夹角从第一角度递增至第二角度时， 所述控制单 元使所述感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从 第三角度递增至第四角度， 或者当所述第二旋转臂与所述承载面的法向量的 反向量的夹角从所述第二角度递减至所述第一角度时， 所述控制单元使所述 感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从所述第四 角度递减至所述第三角度， 其中所述第一角度、 所述第二角度、 所述第三角 度与所述第四角度皆大于 0度且小于 90度。  34. The optical detecting apparatus of claim 32, wherein the control unit is incremented when an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface is increased from a first angle to a second angle Increasing an angle of a normal vector of the photosensitive surface with respect to an extending direction of the second rotating arm from a third angle to a fourth angle, or a normal vector of the second rotating arm and the bearing surface When the angle of the inverse vector decreases from the second angle to the first angle, the control unit correspondingly makes the angle of the normal vector of the photosensitive surface relative to the extending direction of the second rotating arm The fourth angle is decreased to the third angle, wherein the first angle, the second angle, the third angle, and the fourth angle are both greater than 0 degrees and less than 90 degrees.
35. 如权利要求 32所述的光学检测装置，还包括致动器， 连接至所述光 侦测器， 且用以驱使所述感光面旋转， 其中所述致动器电性连接至所述控制 单元， 且所述控制单元适于命令所述致动器驱使所述感光面旋转。  35. The optical detection device of claim 32, further comprising an actuator coupled to the photodetector and configured to drive the photosensitive surface to rotate, wherein the actuator is electrically coupled to the a control unit, and the control unit is adapted to command the actuator to drive the photosensitive surface to rotate.
36. 如权利要求 35所述的光学检测装置，其中所述感光面位于所述致动 器与所述第二旋转臂之间。  The optical detecting device of claim 35, wherein the photosensitive surface is located between the actuator and the second rotating arm.
37. 如权利要求 35所述的光学检测装置，其中所述致动器位于所述感光 面与所述第二旋转臂之间。  37. The optical detection device of claim 35, wherein the actuator is located between the photosensitive surface and the second rotating arm.
38. 如权利要求 32所述的光学检测装置，其中所述控制单元以查表的方 式根据所述第二旋转臂与所述承载面的法向量的反向量的夹角， 来找到所述 感光面的法向量相对于所述第二旋转臂的延伸方向的对应的夹角。  38. The optical detecting apparatus according to claim 32, wherein said control unit finds said photosensitive light in a table lookup manner according to an angle between said second rotating arm and an inverse vector of a normal vector of said bearing surface The corresponding angle of the normal of the face relative to the direction of extension of the second rotating arm.
39. 如权利要求 32所述的光学检测装置，还包括基板， 其中所述第一旋 转臂与所述第二旋转臂通过所述旋转中心枢设于所述基板上， 所述控制单元 包括： 39. The optical detecting apparatus of claim 32, further comprising a substrate, wherein the first rotation The rotating arm and the second rotating arm are pivotally disposed on the substrate through the rotating center, and the control unit comprises:
曲线形沟槽， 设于所述基板上； 以及  a curved groove disposed on the substrate;
限制栓， 连接至所述光侦测器， 且滑设于所述曲线形沟槽中， 当所述第 二旋转臂旋转时， 所述曲线形沟槽的轨迹迫使所述限制栓在所述曲线形沟槽 中滑动， 进而带动所述感光面旋转。  a limiting bolt connected to the photodetector and slidably disposed in the curved groove, the trajectory of the curved groove forcing the limiting pin to be in the Sliding in the curved groove, thereby driving the photosensitive surface to rotate.
40. 如权利要求 32所述的光学检测装置，其中所述光源适于发出照明光 束， 所述待测物质配置于所述照明光束的传递路径上， 所述照明光束在照射 于所述待测物质后， 产生携带有待测物质的资讯的感测光， 所述光侦测器配 置于所述感测光的传递路径上， 所述光学检测装置还包括：  The optical detecting device according to claim 32, wherein the light source is adapted to emit an illumination beam, the substance to be tested is disposed on a transmission path of the illumination beam, and the illumination beam is irradiated to the to-be-tested After the substance is generated, the sensing light carrying the information of the substance to be tested is generated, and the photodetector is disposed on the transmission path of the sensing light, and the optical detecting device further includes:
成像光学模块， 配置于所述感测光的传递路径上， 且位于所述光侦测器 与所述待测物质之间； 以及  An imaging optical module disposed on the transmission path of the sensing light and located between the photodetector and the substance to be tested;
中空遮光弹性套筒， 连接所述成像光学模块与所述光侦测器， 其中所述 中空遮光弹性套筒将所述成像光学模块与所述光侦测器之间的所述感测光密 闭于所述中空遮光弹性套筒中， 且当所述光侦测器转动以带动所述感光面转 动时， 所述中空弹性套筒随之变形。  a hollow light-shielding elastic sleeve connecting the imaging optical module and the photodetector, wherein the hollow light-shielding elastic sleeve seals the sensing light between the imaging optical module and the photodetector In the hollow light-shielding elastic sleeve, when the photodetector rotates to drive the photosensitive surface to rotate, the hollow elastic sleeve is deformed accordingly.
41. 如权利要求 40所述的光学检测装置，其中所述感光面具有通过所述 感光面的中心的中心线， 所述感光面绕所述中心线旋转， 且所述中心线与所 述成像光学模块的光轴相交。  41. The optical detecting apparatus of claim 40, wherein the photosensitive surface has a center line passing through a center of the photosensitive surface, the photosensitive surface is rotated about the center line, and the center line and the imaging The optical axes of the optical modules intersect.
42. 如权利要求 32所述的光学检测装置，其中所述光源适于发出照明光 束， 所述待测物质配置于所述照明光束的传递路径上， 所述照明光束在照射 于所述待测物质后， 产生携带有待测物质的资讯的感测光， 所述光侦测器配 置于所述感测光的传递路径上， 所述光学检测装置还包括：  The optical detecting device according to claim 32, wherein the light source is adapted to emit an illumination beam, the substance to be tested is disposed on a transmission path of the illumination beam, and the illumination beam is irradiated to the to-be-tested After the substance is generated, the sensing light carrying the information of the substance to be tested is generated, and the photodetector is disposed on the transmission path of the sensing light, and the optical detecting device further includes:
成像光学模块， 配置于所述感测光的传递路径上， 且位于所述光侦测器 与所述待测物质之间； 以及  An imaging optical module disposed on the transmission path of the sensing light and located between the photodetector and the substance to be tested;
遮光壳体， 包覆所述成像光学模块与所述光侦测器之间的所述感测光的 传递路径， 且包覆部分所述成像光学模块与至少部分所述光侦测器。  a light shielding housing covering a transmission path of the sensing light between the imaging optical module and the photodetector, and covering part of the imaging optical module and at least a portion of the photodetector.
43. 如权利要求 32所述的光学检测装置，其中所述感光面具有通过所述 感光面的中心的中心线， 所述感光面绕所述中心线旋转， 且所述中心线垂直 于所述第一旋转臂与所述第二旋转臂的旋转平面。 43. The optical detecting apparatus of claim 32, wherein the photosensitive surface has a center line passing through a center of the photosensitive surface, the photosensitive surface is rotated about the center line, and the center line is perpendicular to the a plane of rotation of the first rotating arm and the second rotating arm.
44. 如权利要求 32所述的光学检测装置，其中所述第二旋转臂与所述承 载面的法向量的反向量的夹角的变动范围是落在大于 0度且小于 90度的范围 内， 且所述感光面的法向量相对于所述第二旋转臂的延伸方向的夹角的变动 范围是落在 0度至 70度的范围内。 44. The optical detecting apparatus according to claim 32, wherein a variation range of an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface falls within a range of more than 0 degrees and less than 90 degrees And a variation range of an angle of a normal vector of the photosensitive surface with respect to an extending direction of the second rotating arm is in a range of 0 to 70 degrees.
45. 如权利要求 32所述的光学检测装置，其中所述承载器为表面等离子 体共振检测部， 以产生表面等离子体共振现象。  The optical detecting device according to claim 32, wherein the carrier is a surface plasma resonance detecting portion to generate a surface plasmon resonance phenomenon.
46. —种光学检测方法， 包括：  46. An optical detection method, including:
提供如权利要求 1所述的光学检测装置；  Providing the optical detecting device of claim 1;
将待测物质置于所述旋转中心附近；  Place the substance to be tested near the center of rotation;
开启所述光源，以使所述光源所发出的照明光束照射在所述待测物质上， 其中所述待测物质将所述照明光束反射成感测光；  Turning on the light source to illuminate an illumination beam emitted by the light source on the substance to be tested, wherein the substance to be tested reflects the illumination beam into sensing light;
以所述光侦测器侦测所述感测光； 以及  Detecting the sensed light with the photodetector;
移动所述推杆， 以使所述第一栓与所述第二栓分别在所述第一沟槽与所 述第二沟槽中滑动， 进而改变所述照明光束入射所述待测物质的角度， 且同 时改变所述光侦测器所侦测到的所述感测光的反射角度。  Moving the push rod to slide the first plug and the second plug in the first groove and the second groove respectively, thereby changing the incident light of the illumination beam into the test substance Angle, and simultaneously changing the angle of reflection of the sensed light detected by the photodetector.
47. 如权利要求 46所述的光学检测方法，其中当所述第一栓与所述第二 栓分别逐渐往所述第一沟槽的靠近所述旋转中心的一端与所述第二沟槽的靠 近所述旋转中心的一端滑动时， 所述第一旋转臂与所述第二旋转臂之间的夹 角逐渐变大， 当所述第一栓与所述第二栓分别逐渐往所述第一沟槽的远离所 述旋转中心的一端与所述第二沟槽的远离所述旋转中心的一端滑动时， 所述 第一旋转臂与所述第二旋转臂之间的夹角逐渐变小， 所述光学检测装置还包 括承载器， 配置于所述旋转中心上， 所述承载器具有承载面， 所述承载面用 以承载所述待测物质， 当所述第一旋转臂与所述第二旋转臂之间的夹角产生 变化时， 所述第一旋转臂与所述第二旋转臂的角平分线与所述承载面的夹角 维持不变。  The optical detecting method according to claim 46, wherein the first plug and the second plug gradually extend toward an end of the first groove near the center of rotation and the second groove, respectively When the one end of the rotating center slides, the angle between the first rotating arm and the second rotating arm gradually becomes larger, when the first plug and the second plug gradually go to the When an end of the first groove away from the center of rotation slides with an end of the second groove away from the center of rotation, an angle between the first rotating arm and the second rotating arm gradually changes The optical detecting device further includes a carrier disposed on the rotating center, the carrier has a bearing surface, and the bearing surface is configured to carry the material to be tested, when the first rotating arm and the When the angle between the second rotating arms changes, the angle between the angle bisector of the first rotating arm and the second rotating arm and the bearing surface remains unchanged.
48. 如权利要求 47所述的光学检测方法，其中当所述第一旋转臂与所述 第二旋转臂之间的夹角产生变化时， 所述第一旋转臂与所述第二旋转臂的角 平分线保持与所述承载面垂直。  48. The optical detecting method according to claim 47, wherein the first rotating arm and the second rotating arm are changed when an angle between the first rotating arm and the second rotating arm is changed The corner bisector remains perpendicular to the bearing surface.
49. 如权利要求 46所述的光学检测方法，还包括利用所述光学检测装置 的表面等离子体共振检测部接触所述待测物质， 并产生表面等离子体共振现 象。 49. The optical detecting method according to claim 46, further comprising: contacting a substance to be tested with a surface plasmon resonance detecting portion of the optical detecting device, and generating surface plasmon resonance Elephant.
50. 如权利要求 49所述的光学检测方法，其中所述表面等离子体共振检 测部为棱镜式表面等离子体共振感测部。  The optical detecting method according to claim 49, wherein the surface plasmon resonance detecting portion is a prism type surface plasmon resonance sensing portion.
51. 如权利要求 49所述的光学检测方法，其中所述表面等离子体共振检 测部为光栅式表面等离子体共振感测部。  The optical detecting method according to claim 49, wherein the surface plasmon resonance detecting portion is a grating type surface plasmon resonance sensing portion.
52. 如权利要求 46所述的光学检测方法，其中所述光学检测装置还包括 承载器， 配置于所述旋转中心上， 所述承载器具有承载面， 且所述承载面用 以承载所述待测物质， 所述光侦测器具有感光面， 且所述光学检测方法还包 括根据所述第二旋转臂与所述承载面的法向量的反向量的夹角， 来调整所述 感光面的法向量相对于所述第二旋转臂的延伸方向的夹角， 当所述第二旋转 臂与所述承载面的法向量的反向量的夹角递增或递减时， 使所述感光面的法 向量相对于所述第二旋转臂的延伸方向的夹角递增或递减  The optical detecting method according to claim 46, wherein the optical detecting device further comprises a carrier disposed on the rotation center, the carrier has a bearing surface, and the bearing surface is configured to carry the The photodetector has a photosensitive surface, and the optical detecting method further comprises adjusting the photosensitive surface according to an angle between an inverse vector of a normal vector of the second rotating arm and the bearing surface The angle of the normal vector relative to the extending direction of the second rotating arm, when the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface is increasing or decreasing, the photosensitive surface is made Increasing or decreasing the angle of the normal vector relative to the direction of extension of the second rotating arm
53. 如权利要求 52所述的光学检测方法，其中当所述第二旋转臂与所述 承载面的法向量的反向量的夹角从第一角度递增至第二角度时， 使所述感光 面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从第三角度递减 至第四角度， 或者当所述第二旋转臂与所述承载面的法向量的反向量的夹角 从所述第二角度递减至所述第一角度时， 使所述感光面的法向量相对于所述 第二旋转臂的延伸方向的夹角对应地从所述第四角度递增至所述第三角度， 其中所述第一角度、 所述第二角度、 所述第三角度与所述第四角度皆大于 0 度且小于 90度。  53. The optical detection method of claim 52, wherein the sensitization is made when an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface is increased from a first angle to a second angle The angle of the normal vector of the face relative to the extending direction of the second rotating arm is correspondingly decreased from the third angle to the fourth angle, or when the second rotating arm is opposite to the normal vector of the bearing surface When the angle decreases from the second angle to the first angle, the angle between the normal vector of the photosensitive surface and the extending direction of the second rotating arm is correspondingly increased from the fourth angle to The third angle, wherein the first angle, the second angle, the third angle, and the fourth angle are both greater than 0 degrees and less than 90 degrees.
54. 如权利要求 52所述的光学检测方法，其中当所述第二旋转臂与所述 承载面的法向量的反向量的夹角从第一角度递增至第二角度时， 所述控制单 元使所述感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从 第三角度递增至第四角度， 或者当所述第二旋转臂与所述承载面的法向量的 反向量的夹角从所述第二角度递减至所述第一角度时， 所述控制单元使所述 感光面的法向量相对于所述第二旋转臂的延伸方向的夹角对应地从所述第四 角度递减至所述第三角度， 其中所述第一角度、 所述第二角度、 所述第三角 度与所述第四角度皆大于 0度且小于 90度。  54. The optical detection method of claim 52, wherein the control unit is incremented when an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface is increased from a first angle to a second angle Increasing an angle of a normal vector of the photosensitive surface with respect to an extending direction of the second rotating arm from a third angle to a fourth angle, or a normal vector of the second rotating arm and the bearing surface When the angle of the inverse vector decreases from the second angle to the first angle, the control unit correspondingly makes the angle of the normal vector of the photosensitive surface relative to the extending direction of the second rotating arm The fourth angle is decreased to the third angle, wherein the first angle, the second angle, the third angle, and the fourth angle are both greater than 0 degrees and less than 90 degrees.
55. 如权利要求 52所述的光学检测方法，其中根据所述第二旋转臂与所 述承载面的法向量的反向量的夹角来调整所述感光面的法向量相对于所述第 二旋转臂的延伸方向的夹角的步骤包括以查表的方式根据所述第二旋转臂与 所述^ ^载面的法向量的反向量的夹角， 来找到所述感光面的法向量相对于所 述第二旋转臂的延伸方向的对应的夹角。 55. The optical detecting method according to claim 52, wherein a normal vector of the photosensitive surface is adjusted according to an angle between an inverse of the second rotating arm and a normal vector of the bearing surface with respect to the first The step of the angle of the extending direction of the two rotating arms includes finding the normal vector of the photosensitive surface according to the angle between the second rotating arm and the inverse vector of the normal vector of the carrier surface in a look-up manner A corresponding angle with respect to the direction in which the second rotating arm extends.
56. 如权利要求 52所述的光学检测方法，其中所述光学检测装置还包括 基板， 其中所述第一旋转臂与所述第二旋转臂通过所述旋转中心枢设于所述 基板上， 且根据所述第二旋转臂与所述承载面的法向量的反向量的夹角来调 整所述感光面的法向量相对于所述第二旋转臂的延伸方向的夹角的步骤包 括：  The optical detecting method according to claim 52, wherein the optical detecting device further comprises a substrate, wherein the first rotating arm and the second rotating arm are pivotally disposed on the substrate through the rotating center, And the step of adjusting an angle of a normal vector of the photosensitive surface with respect to an extending direction of the second rotating arm according to an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface includes:
当所述第二旋转臂旋转时， 利用所述基板上的曲线形沟槽的轨迹迫使连 接至所述光侦测器的限制栓在所述曲线形沟槽中滑动， 进而带动所述感光面 旋转。  When the second rotating arm rotates, the trajectory of the curved groove on the substrate is used to force the limiting bolt connected to the photodetector to slide in the curved groove, thereby driving the photosensitive surface Rotate.
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