TW201226880A - Optical detection apparatus and optical detection method - Google Patents

Abstract

An optical detection apparatus adapted to measure a substance to be measured is provided. The optical detection apparatus includes a first rotation arm, a second rotation arm, a light source, an optical detector, a carrier, and a control unit. The second rotation arm is pivotally connected to the first rotation arm through a rotation center. The light source is disposed on the first rotation arm. The optical detector is disposed on the second rotation arm. The substance to be measured is adapted to be disposed adjacent to the rotation center. The carrier is disposed on the rotation center, and has a carrying surface. The carrying surface is for carrying the substance to be measured. The optical detector has a light sensing surface. The control unit is for adjusting an included angle between a normal vector of the light sensing surface and an extending direction of the second rotation arm according to an included angle between the second rotation arm and an inverse vector of a normal vector of the carrying surface. An optical detection method is also provided.

Description

* - J8TW 36089twf.doc/n VI. Description of the Invention: [Technical Field of the Invention] The present invention is an L-county system and detection method, and particularly relates to an optical detection device and an optical detection method. [Prior Art] Optical detection is a method of detecting substances by the interaction of light and matter. Since the detection of light does not usually cause excessive destructiveness to the substance itself, this is advantageous as a detection of various substances. Surface plasma resonance microscopy is an optical detection method with great potential in recent years, which can be applied in the field of biotechnology. Biotechnology is one of the key national science and technology projects that Taiwan has developed in the past century, and medicine and development are biotechnology. The development of rapid detection methods and effective drug screening is the common goal of all biological (four) technologies, and the singapore image technology platform will be able to efficiently screen the active ingredients in the extract. The screening technique can also be applied to various receptors, and various therapeutic drugs such as immunomodulatory drugs, anti-inflammatory drugs, and anti-inflammatory drugs are developed for specific ligands in the targets selected by different receptors. Osteoporosis drugs, anticancer drugs and anti-allergic drugs. In addition, surface plasmon resonance technology has recently been widely used in the development of biomolecular sensors, which is an optical method that can achieve non-marking, high sensitivity, small sample, and instant detection methods. Surface plasma resonance technology utilizes the specific selectivity of biological immunoassays to detect relatively low concentrations of specific molecules in complex mixtures. 201226880 * 36089twf.doc/n [Summary content]

The embodiment of the invention proposes an optical detecting device adapted to measure a substance to be tested. The optical inspection device includes a first rotating arm, a second rotating arm, a light source, a light ray, an enchantment and a control unit. The second rotating arm is pivotally coupled to the first to fourth rotating arms via a center of rotation. The light source is disposed on the first rotating arm. The photodetector is disposed on the second rotating arm, and the towel to be tested f is adapted to be disposed near the center of rotation. The carrier is disposed on the center of rotation, wherein the carrier has a bearing surface & is loaded to carry the substance to be tested. The 贞(4) has a photosensitive surface, and the control unit adjusts the angle between the normal vector of the photosensitive surface and the extending direction of the second rotating arm according to the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface. When the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface is incremented or decremented, the control unit increments or decrements the angle of the normal of the photosensitive surface with respect to the extending direction of the second rotating arm. Another embodiment of the present invention provides an optical detecting method comprising the following steps. The above optical detecting device is provided. Place the substance to be tested near the center of rotation. The light source is turned on to illuminate the illumination beam emitted by the light source on the substance to be tested, wherein the substance to be tested reflects the illumination beam into the sensed light. The light detector detects the sensed light. Changing the angle of the illumination beam incident on the substance to be tested and simultaneously changing the reflection angle of the sensing light detected by the photodetector, and adjusting the sensitization according to the angle of deviation of the inverse vector of the normal vector of the first rotating arm and the bearing surface The normal vector of the face relative to the direction of extension of the second rotating arm 201226880 x-, *„vw„8TW 36089twf.doc/n The extension of the lost-angle arm ^ ^ t — (4) The normal vector of the arm and the wearing surface The inverse vector of the second and second days, 'increasing or decrementing the normal angle of the photosensitive surface relative to the second rotational direction. It is easy to understand, and the following is specifically implemented. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded view of an optical detecting apparatus according to an embodiment of the present invention, in order to make the above-described features of the present invention more exemplified and in conjunction with the accompanying drawings. FIG. f2A is a perspective view of the first-rotating arm, the second rotating arm, the push rod L and the substrate in Fig. 1, and Fig. 2B shows the back surface of the structure of Fig. 2A. 3 is a schematic view of the optical path of the optical detecting device of FIG. Referring to FIG. 1 , FIG. 2A, FIG. 2B and FIG. 3, the optical detecting device of the present embodiment is adapted to Dong Jianlin. In the actual towel, the optical inspection position is, for example, a surface plasm〇n (10) (10) (10) (3) image apparatus, and the substance to be tested 52 is, for example, water, a liquid, a drug, an organism, a microorganism, or other biochemicals. substance. The optical detecting device 1 includes a first rotating arm 110, a second rotating arm 12A, a push rod 丨3, a light source 21A, and a photodetector 230. The first rotating arm 110 has a first groove 112. The second rotating arm 120 is pivotally coupled to the first rotating arm 11 via the center of rotation 14' and has a second groove 122. The push rod 13 has an opposite first end 132 and a second end 134' and includes a first plug 136 disposed at the first end 132 and a second plug 138 disposed at the second end 134. The first pin 136 is slidably disposed on the first groove 112 ′ and the second pin 138 is slidably disposed on the second groove 122 . The light source 210 is disposed on the first rotating arm 110, and the light detecting device 230 is disposed on the second rotating arm 120 201226880 r^^, ^ 8TW 36089twf.doc / n, and the substance to be tested 52 is adapted to be disposed in the rotating center i4 〇 nearby. In the present embodiment, the optical detecting device 1A further includes surface plasma resonance spectrometry. 50, which is disposed on the center of rotation 14 , and contacts the substance to be tested to generate a surface plasma resonance phenomenon. In the present embodiment, the surface plasma/vibration detecting portion 50 is, for example, a 稜鏡-type surface plasma resonance sensing portion. Further, the surface plasma resonance detecting portion 5 is, for example, a carrier having a bearing surface portion, and the bearing surface 59 is for carrying the substance to be tested 52. Specifically, the surface plasma vibration detecting unit 50 includes a crucible 51, a transparent plate %, a metal film 56, and a plurality of biocylinder needles 54. In the present embodiment, the bearing surface 59 is located at the center of rotation 14, for example, the base metal film 56 is located at the center of rotation 14〇. Further, the center line of the present metal grating 26, the extension line of the line passes through the center of rotation. This center line is, for example, a reference line which passes through the center of the metal film 26 and divides the metal film 26 into two parts. In other words, the center of rotation 140 is aligned with the centerline of the metal genus 26. However, in other embodiments, it may be gold, 26, the extension line of a reference line passes through the center of rotation, and the reference line is flat on the center line of the metal film 26, but not The center lines coincide. The 'rotation center 14' of the second meeting is offset from the center line of the metal film 56. In the present example, the 'transparent plate 58 is, for example, a glass plate, and the metal film 56 is, for example, gold,' and the bioprobe 54 is disposed on the bearing surface 59, wherein the bioprobe can grasp a specific one of the substances to be tested 52. Ingredients are used for measurement. In the example of the present invention, the transparent plate 58 is disposed between the crucible 51 and the metal film 56. Between the transparent plate 58 and the 稜鏡μ, an index matching oil layer ' can be provided with a better U effect and the reflection loss of light on the interface can be avoided. In this embodiment, the light source 210 is, for example, a light-emitting diode (light 201226880 -------- 8FW 36089 twf. doc/n emitting diode, LmD ), which is adapted to emit an illumination beam 212 (as depicted in FIG. 3 ). Show). However, in other embodiments, the light source 21A may also be a laser shot. The surface electro-polymerization resonance detecting unit 50 is disposed on the transmission path of the illumination light beam 212. After the illumination light beam 212 is irradiated onto the surface plasma resonance detecting unit 50, the sensing light 214 carrying the surface plasma resonance information is generated, and the light detection is performed. The device 230 is disposed on the transmission path of the sensing light 214. Specifically, in the present embodiment, the illumination beam 212 is provided with a mask 25 〇, a lens group 26 〇, a band pass filter 270, and a polarization on a transmission path between the light source 210 and the surface plasma resonance detecting portion 50. The device 220 is disposed on the first rotating arm 110, wherein the components can constitute the illumination optical module 2〇5. The mask 250 has apertures 252' and the illumination beam 212 passes through the apertures 250 through the apertures 252. Lens group 260 is used to enhance the collimation of illumination beam 212. Bandpass filter 270 is used to purify the illumination beam 212 such that illumination beam 212 is close to a single wavelength beam. Polarizer 220 is used to cause illumination beam 212 to produce linear polarization, while its polarization direction is P-polarized for bearing surface 59. When the P-polarized illumination beam 212 is irradiated to the metal film 56 via the prism 51 and the transparent plate 58, the substance to be tested 52 captured by the bioprobe 54 changes the surface plasma resonance state of the metal film 56. In addition, metal film 56 reflects illumination beam 212 into sensed light 214 such that the sensed light carries surface plasma resonance information. The sensing light 214 is provided with an imaging optical module 240 ′ on the transmission path between the surface plasma resonance detecting unit 50 and the photodetector 230 to transmit the sensing light 214 to the photodetector 230 and to the metal film. The 56 surface is imaged on the photodetector 230, wherein the imaging optical module 240 is disposed on the second rotating arm 120. In the present embodiment, the imaging optics 201226880 to 36089 twf.doc/n module 240 is, for example, an imaging lens. The photodetector 230 is, for example, a charge coupled device camera (CCD camera) or a complementary metal oxide semiconductor camera (CMOS camera) to capture a surface plasma resonance image on the metal film 56. . In addition, by the rotation of the first rotating arm 110 and the second rotating arm 120, the incident angle of the incident light beam 212 incident on the metal film 56 can be changed, and the resonance angle generated by the substance to be tested 52 can be found by the captured surface plasma resonance image. In this way, the type and characteristics of the object to be tested can be analyzed. Since the reflection of the metal film 56 conforms to the law of reflection, regardless of how the first rotating arm 110 rotates to rotate the light source 210, the incident angle q of the light of the illumination beam 212 on the optical axis can be designed to remain substantially equal to the incoming light detection. The reflection angle 264 of the light of the sense light 214 of the device 230 on the optical axis can achieve a better measurement effect. In other words, regardless of how the light source 21 turns "the optical axis of the illumination beam 212 and the angular bisector E of the optical axis of the sensed light 214 are consistently coincident with the normal to the metal film 56. In order to achieve such a effect, the optical detecting device 1〇〇 can be designed such that when the first pin 136 and the second pin 138 slide in the first groove 112 and the second groove 122, respectively, the first pin 136 is The distance of the center of rotation 140 is maintained substantially equal to the distance of the second pin 138 to the center of rotation 140. That is to say, no matter how the first rotating arm 110 and the second rotating arm 120 rotate, the triangle formed by the first plug 136, the second column 138 and the rotating center 140 is always an isosceles triangle, so that the first rotation The angle bisector of the arm 110 and the second rotating arm 12〇 is perpendicular to the bearing surface 59, so that the incident angle Θ1 is maintained substantially equal to 201226880 r ji?^vv〇8TW 36089twf.d〇c/n reflection angle Θ2 State to achieve better measurement results. In the present embodiment, the optical detecting device 100 further includes a substrate 150 having a plurality of third trenches (in the example of the third trench 152 and the third trench 154 in FIG. 1) and the push rod 130 further includes a plurality of third plugs (exemplified by the third plug 135 and the third plug 137 in FIG. 2B) are respectively slidably disposed in the second grooves 152, 154, wherein the third grooves 丨%, 154 are substantially The upper bisector E is parallel to the first rotating arm 110 and the second rotating arm 12A. In this embodiment, the third plug 135 is located at the first end 132 of the push rod 13〇, and the second plug 135 is first The bolts 130 are respectively located on opposite sides of the push rod 13〇. Further, the third plug 137 is located at the second end 134 of the push rod 13〇, and the second plug 137 and the second plug 138 are respectively located on opposite sides of the push rod 13〇. In this embodiment, the push rod 13 is disposed between the substrate 15 and the first rotation, and is disposed between the substrate 150 and the second rotating arm 12A. In this embodiment, the first groove (1) substantially parallel to the axis ' of the illumination beam 12 and the second groove 122 is substantially parallel to the sense of the sensed light 214, the jin 136 and the second test 138 gradually move toward the first groove The groove 112 = the one end of the suspected rotation, and the rotation of the second groove 122, the first rotating arm 110 and the second rotating arm 120 =it when the first rotating arm 11G and the second rotating arm 120 are two = raw The first-rotating arm 110 and the second rotating arm 12 are in the middle of the clamp _^1=loss _ unchanged (in this embodiment, the push-and-dry 130 is moved up and down, so that the incident angle can be generated 201226880 a *~~w8TW 36089twf The .doc/n is fluoresced to find the resonance angle of the substance to be tested 52. In the present embodiment, the optical detecting apparatus 100 further includes an actuator 18A connected to the push rod 13A to drive the push rod 130 to move. The first pin 136 and the second pin 138 are respectively slid in the first groove 112 and the second groove 122. Thus, the incident angle Θ1 is maintained at a state equal to the reflection angle 02, which is better. The effect of measuring the light in winter is as follows. The actuating device 18 is, for example, a linear motor, but the invention is not limited thereto. The optical detecting device 1 of the present embodiment can make the illumination beam 252 by a relatively simple mechanism _acting ' The incident angle Θ1 of the optical axis is maintained substantially equal to the reflection angle θ2 of the optical axis of the sensing light 214, and thus The optical detecting device 100 of the embodiment can have both a low manufacturing cost and a good measurement accuracy. Further, since the optical detecting device 1 of the present embodiment drives the push rod 丨3〇 by the actuator 180, The optical detecting device 1 can be continuously measured for real time. For example, the substance to be tested 52 is, for example, a flowing liquid, and as the liquid continuously flows, the optical detecting device 100 can instantly monitor the characteristics of the liquid. Changes in different times. However, in other embodiments, the optical detecting device may not include the actuator 180, but instead allows the user to move the push rod 130 by hand. Fig. 4 is a perspective view showing the first rotating arm, the second rotating arm, the push rod, the actuator, and the substrate in the optical detecting device according to another embodiment of the present invention. Referring to FIG. 4, the optical detecting device of the present embodiment is similar to the optical detecting device 100 of FIG. 1, and the difference between the two is as follows. In the optical detecting device of the present embodiment, the substrate 150 is located at the push rod 130a and the first Between the rotating arms 110' and the substrate 15 is located between the push rod 13A and the second rotating arm 12A. In addition, the 'push rod 13〇a does not have the third pin 135, 137 in FIG. 2B, and the first pin 136 and the second pin 138 of the push pin 11 201226880 _ , rji77w88TW 36089twf.doc / n bar 130a are respectively slid in the first A trench 112 and a second trench 122 are further slidably disposed on the third trenches 152, 154, respectively. And the first plug 136 is slidably disposed on the first trench 112 through the substrate 150 via the third trench 152, and the second plug 138 is slid through the substrate 150 via the third trench 154. Trench 丨 22. Fig. 5 and Fig. 6 are perspective views showing two different viewing angles of a first rotating arm, a second rotating arm, a push rod, an actuator and a substrate in an optical detecting device according to still another embodiment of the present invention. Referring to Fig. 5 and Fig. 6, the optical detecting device of this embodiment is similar to the optical detecting device 1() of Fig. 1, and the difference between the two is as follows. In the optical detecting device of the embodiment, the optical detecting device further includes a slide rail 160 disposed on the substrate 150, wherein the push rod i3〇b is non-rotatably slidably disposed on the slide rail 160, and the slipper 160 is substantially parallel to the slide rail 160. The angle between the first rotating arm 110 and the second rotating arm 120 is bisector E. Specifically, in the embodiment, the slide rail 160 and the first rotating arm 11 are respectively disposed on opposite sides of the substrate 150, and the slide rail 160 and the second rotating arm 12 are respectively disposed on opposite sides of the substrate 150. . The optical detecting device further includes a sliding portion 170, and the push rod 130b is slidably disposed on the sliding handle 16 through the sliding portion 170. In the present embodiment, the substrate 150 has at least one third trench (in FIG. 5, two second trenches 152b and 154b are taken as an example), and the sliding portion and the push rod 130b are respectively disposed on opposite sides of the substrate 150. . Further, the optical detecting device further includes at least one connecting portion 135b (in the present embodiment, taking two connecting portions as an example), one connecting portion 135b passes through the third groove 154b, and the other is actuated in FIG. The connecting portion that is blocked by 180 and passes through the third groove 152b, and the two connecting portions are connected to the sliding portion 170 and the push rod

S 12 36089twf.doc/n 201226880 ..... «rw 130b. Further, the two connecting portions are adapted to move in the third groove 15 and the groove 154b, respectively. The actuator 18 is connected to the sliding portion 17 (), and the sliding portion 170 slides on the sliding portion, thereby driving the push rod n〇b to move up and down, so that the first rotating arm 11 and the second rotation can be made. Arming 'and maintaining the incident angle 1 is substantially equal to the reflection θ2 (see Figure 3). ~,,,

Figure 7 is a schematic illustration of the optical path of an optical detecting device according to still another embodiment of the present invention. The optical detecting device of this embodiment is similar to the optical detecting device of Figs. 1 and 3, and the difference between the two is that the surface plasma resonance detecting portion 50e of the optical detecting device is a grating type surface acoustic vibration sensing portion. Specifically, the surface of the surface plasma resonance detecting portion 5A has a grating structure 54c' which can grasp the (four) 52 to be tested. Further, the bearing surface 59c of the wire plasma resonance detecting portion 5〇c is also maintained in a state substantially perpendicular to the angle bisector E of the optical axis of the illumination beam 212 and the optical axis of the sensing light 214, that is, the first rotating arm 11 〇 and the second rotating arm 120 (please refer to the angle bisector e of Fig. n to maintain the normal line of the bearing surface 59c. Fig. 8 and Fig. 9 are optical path diagrams of the optical detecting device according to another embodiment of the present invention. In both embodiments, only the optical path is illustrated, and the remaining mechanisms (eg, the first rotating arm 110, the second rotating arm 12, the push rod 130, the substrate 150, and the actuator 180) are shown in FIG. 1 is the same, so the related mechanism will not be repeatedly drawn here with reference to FIG. 1. Referring to FIG. 8, the optical detecting device of the seventh embodiment is an ellipsometer, which can be used to measure the thickness of the object to be tested 52d, in which the object to be tested 52d is, for example, a film. In the present embodiment, the light source 21〇d is, for example, a laser beam, and the illumination beam emitted by the light source 21〇 is, for example, 13 201226880 one-...^8TW 36089twf.doc/n single-wavelength laser beam. In an embodiment, the light source can also adopt a multi-wavelength light source (for example, a white light source). A band pass filter is disposed on the transmission path of the illumination beam to obtain a single wavelength beam. In this embodiment, the optical detecting device further includes a first polarizer 222d and a second polarizer 242d. The light source 21〇d emits The illumination beam 212d is irradiated on the substance to be tested 52d, and the first polarizer 222d is disposed on the transmission path of the illumination beam 212d, and is located between the light source 21〇d and the substance to be tested 52d. The substance to be tested 52d reflects the illumination beam 212d into The sensing light 214d is directed to the photodetector 230d. The second polarizer 242d is disposed on the transmission path of the sensing light 214d and is located between the substance to be tested 52d and the photodetector 230d. The light source 21〇d and the first polarizer 222d are disposed on the first rotating arm 110 (please refer to the figure, the substance to be tested 52d is disposed at the center of rotation 140 (please refer to the vicinity of the figure 且, and the second polarizer 242d and the light) The detector 230d is disposed on the second rotating arm 12〇 (please refer to FIG. 1). In this embodiment, the illumination beam 212d can be incident on the object through the rotation of the first rotating arm 11〇 and the second rotating arm 120. The incident angle of the object 52d changes, and further The optical axis of the illumination beam 212d and the angle bisector E of the optical axis of the sensing light 214 (1 is substantially perpendicular to the surface of the object to be tested 5 2 d, so that the monthly measurement is sufficient to achieve a better measurement effect. In this embodiment The optical detecting device may further include a phase retarder 224d, for example, a quarter-wave plate. At this time, the detecting device may adopt a return-to-zero extinction method (rib 11 dlipolmete O for speculation. Referring to FIG. 9, the present embodiment The optical detecting device of the example is similar to the optical detecting device of FIG. 8, and the difference between the two is that the optical detecting shake of FIG. 9 does not use the phase retarder 224d of FIG. 8, so the optical detecting crack of FIG. 9 is 201226880 rDiyyuu «8TW 36089twf. Doc/n is set to use the phase „weekly photometric method ((10) eg. (10). For example, to measure. The optical detecting skirt of the present invention is not limited to the surface electro-convergence resonance image expanding device or the imager, and in other embodiments, the optical detecting device & 2 疋 any other optical axis of the wire minus the measuring light of the (four) beam The crying knife line* is an optical instrument that changes with the change of the human beam of the Lang beam. FIG. 10 is a structural diagram of the prior art detecting device of the embodiment of the present invention. Referring to Fig. 10, the optical detecting device 100e of the present embodiment is partially similar to the optical inspection device (10). The elements of the same or the same are denoted by the same reference numerals, and the detailed functions and the examples of the operation are "repeated. In addition, the difference between the two is as follows. In this embodiment, the teaching method is as follows. In 100e, the mechanism for driving the rotation of the first rotating arm 110e and the second 5B arm I20e is not limited to the mechanism of the foregoing embodiment, which can drive the first rotating arm 11〇e and the second rotating arm. _: a rotating mechanism. In this embodiment, the first rotating arm 110e and the first traveling arm 12〇e are adapted to rotate at an equal angle, that is, regardless of the first rotating arm and the second rotating arm 12〇e Rotation, the angle between the first rotating arm li〇e and the sag; the angle bisector e of the bearing surface 59 is always maintained at substantially the same angle as the angle between the two rotating arms 12〇e and the angle bisector e. The optical detecting device 10e includes a control unit 310, and the photodetector/photosensitive surface 234e. Specifically, the photodetector 230 has a photo element 232e' and the photosensitive surface 234e is, for example, an image detecting element. 232e, a salty surface, wherein the image detecting element 232e is, for example, a charge coupled element 15 8TW 3 6089 twf.doc/n 201226880 (charge coupled device, CCD) or a complementary metal oxide semiconductor sensor (CMOS sensor). The control unit 310 is used according to the second rotating arm i2〇e and the bearing surface The angle φ ΐ ' of the inverse vector of the normal vector VI adjusts the direction of extension of the normal vector V2 of the photosensitive surface 234e with respect to the second rotating arm (in this embodiment, parallel to the optical axis of the imaging optical module 24A) The angle φ2 of the direction of 124. For example, when the angle w is incremented by a first angle, the control unit 310 gives the angle φ2 - the initial third angle when the angle ψ 1 is the first angle, when the angle (1) is from the first angle When increasing to a second angle, the angle φ2 is decreased from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the fourth angle is smaller than the third angle. When the angle ^ is decreased from the second angle to the second angle At one angle, the four angles are increased to the third angle. In another embodiment, the control unit + + & ^ ^ - the initial third angle when the clip is incremented, when the angle is Cool When the angle is angled, the angle φ2 is determined by the third angle & ^ first angle is smaller than the second angle, and the first angle f angle is fine = where the central angle ml you _ & brother - the angle is smaller than the fourth angle. When the angle is decremented to the second to the first, the angle is from the fourth. In the present specification, the normal vector pointing out of the object is defined by the object in the specification, the vector and the The vector of the surface. In addition, the angle between the quantity and the straight line (or (four), fpf) is defined as the smaller of the angles of the two phases of 201226880 rDiyyuu»8TW 36089twf.doc/n which are added to the angle of 180 degrees. When the vector and the linear arm are perpendicular to each other, the angle between the two is 9 degrees. In static state, the object plane such as the bearing surface 59 and the light #, _ causes the bearing surface 59 detected by the photodetector 230: two: (perspective distortion) > ^ , .t , 冉 is keystone chstomon . When the eyebrows are dynamically scanned, it is assumed that the angle φ1 is increased as the degree of light. The image detected by the light source 231 is detected by the photodetector 230 as the angle cplU is detected. The body correction image is used to correct the perspective distortion and image compression. "The data of different measurement points measured by different angles φ1 is compared with L 'by software correction, and the image center is reduced." This will affect the accuracy of the measurement. Sexuality's problem is more serious at 2nd and 2nd. However, in the actual situation, when the angle of the flame is increased from a first angle, the control unit 310 is at an angle φ1 ^ When the angle cp2 is set - the initial third angle: angle = Γί: angle, the angle φ2 is from a third angle = to a fourth angle, wherein the first angle is smaller than the second angle,

St three angles. Or: when the angle Φ ΐ decreases from the second degree to the first angle, the angle φ2 increases from the fourth angle to the third angle. In one embodiment, 'may also be when the angle of loss φ1* - the first degree ^, (4) early 兀 310 when the angle φ1 is the first angle, the angle of the initial angle of the declination is 'when the angle φ ΐ is from the first angle When increasing to a two-two angle, the lost angle (10) is incremented from a third angle to a fourth angle, wherein the first angle is smaller than the second angle, and the third limb is smaller than the fourth angle. Alternatively, when the clip is reduced from the second angle to the first angle from the second angle, the angle is decreased from the fourth angle to the third angle. In this way, the degree of perspective distortion and image compression can be effectively reduced, thereby effectively improving the problem of reduced image resolution. Thus, the measurement accuracy and reliability of the optical detecting device 10e of the present embodiment can be greatly improved. The following table is used to help explain the above-mentioned four kinds of increments and decrements of φΐ and φ2: φΐ ω2 first angle second angle second angle fourth angle case 1 small large (initial angle large) small case 2 small size large situation 3 Small size (small initial angle) large case 4 size

In case 1, the angle φ 递增 is increased from a smaller first angle to a larger second angle, while the angle φ 2 is now reduced from a larger initial third angle to a smaller fourth angle. In case 2, the angle φι is decreased from the larger first angle to the smaller second angle, and at this time the angle φ2 is increased from the smaller second angle to the larger fourth angle. In case 3, the angle φ1 is increased from a smaller first angle to a larger second angle, while the angle φ2 is incremented from a smaller initial third angle to a larger fourth angle. In case 4, the angle φ 递 decreases from a larger first angle to a smaller second angle, and at this time the angle Φ2 decreases from a larger third angle to a smaller fourth angle.

18 S 201226880 j. ^7uu〇8TW 36089twf.doc/n degrees. The first angles in the different situations described above may not be identical or completely different from one another. Similarly, the second angles of the four cases may not be identical or completely different from each other. By analogy, the third and fourth angles in different situations are also the same. Wherein, case i and case 2 occur when the angle Φ2 has an excessive compensation effect on the angle cpl, and case 3 and case 4 are hair, and when the angle φ2 is insufficient for the compensation effect of the angle φ ,, the compensation effect is private. The change in the angle φ2 reduces the effect of the perspective distortion and the degree of image compression. In the present embodiment, the 'optical detection device 1 〇〇e further includes an actuator 320' that is connected to the light anger $ 23 〇 and is used to drive the photosensitive surface 234e to rotate, wherein the actuator 320 is electrically connected to the control The unit 31 is adapted and the control unit 310 is adapted to command the actuator 32 to drive the photosensitive surface 23 to rotate. Specifically, δ, the control unit 310 is, for example, a control circuit that drives the photosensitive surface 234e to rotate by the electrical command actuator 320. In this embodiment, the photodetector 230 is pivotally connected to the second rotating arm 12 as above. The actuator 32 is, for example, a motor, which drives the photodetector 230 to rotate, and the photodetector 23 〇 drives the photosensitive surface. 234e rotates. In this embodiment, the actuator 320 is located between the photodetector 230 and the second rotating arm 120e, that is, after the actuator 320 is disposed on the second rotating arm 12〇e, the photodetector 230 is further disposed. It is disposed on the actuator 320. However, in other embodiments, the photodetector 230 may be located between the actuator 320 and the second rotating arm 12〇e, that is, after the photodetector 230 is disposed on the second rotating arm 123e, The actuator 320 is configured. The photosensitive surface 234e has a center line 235e' passing through the center of the photosensitive surface 234e, and the center line 235e falls on the photosensitive surface 234e, and the photosensitive surface 234e 19 201226880 rji^-yuu68TW 36089twf.doc/n rotates around the center line 235e. In order to make the imaging effect of the image better, in the present embodiment, the rotation axis of the actuator 320 can be located on the extension line of the center line 235e of the photosensitive surface 234e, and the center line 235e of the photosensitive surface 234e is perpendicular to the first The rotation plane of the rotating arm 11〇e and the second rotating arm 12〇e. In addition, the center line 235e of the photosensitive surface 234e can be further intersected with the optical axis 124 of the imaging optical module 240. This also contributes to enhancing the image forming effect of the image. In the present embodiment, the centerline 235e and the optical axis 124 are substantially perpendicular to each other. Further, in the present embodiment, the variation range of the included angle φ1 falls within a range of more than 0 degrees and less than 90 degrees, and the variation range of the included angle φ2 falls within the range of 0 to 70 degrees. Further, the range of the 'inflammation angle φ ΐ and the angle 2 can be related to the magnification of the optical detecting device 100e. However, in other embodiments, the photosensitive surface 234e may also be rotated about a reference line offset from the center of the photosensitive surface 234e on the photosensitive surface 234e, which is, for example, parallel to the center line 235e but not coincident. Further, the rotation axis of the actuator 32A may be an extension line located on the reference line. In order to avoid the interference of the external stray light on the optical detection result, in the present embodiment, the optical sensing device 10e further includes a hollow light-shielding elastic sleeve 330 connected to the imaging optical module 24 and the photodetector 23 The hollow light-shielding elastic sleeve 330 seals the sensing light 214 between the imaging optical module 240 and the photodetector 23A in the hollow light-shielding elastic sleeve 33A. In other words, the hollow light-shielding elastic sleeve 330 surrounds the optical axis 124 of the imaging optical module 24, and is closely connected to the imaging optical module 24 and the photodetector 230 without light leakage. As a result, external stray light will not enter the photodetector to cause interference with the measurement results. When the photodetector 23 is rotated to drive

S 20 201226880 ^Diyyuus8TW 36089twf.doc/n When the photosensitive surface 234e is rotated, the hollow light-shielding elastic sleeve 33 is deformed, and the stray light does not run to the photodetector while keeping the process. The control unit 31 finds the normal vector V2 of the photosensitive surface 234e with respect to the second rotating arm 12〇e according to the angle φ1 between the second rotating arm 12〇e and the inverse vector of the normal vector VI of the bearing surface 59 in a table lookup manner. The corresponding angle φ2 of the extending direction. Specifically, it can be experimentally found that when the angle φ ΐ is a certain value, the angle φ2 of which size is used can obtain the best φ detection effect, and the φ ΐ value and the φ 2 value at this time are recorded in In the table. Then, after a series of experiments, the correspondence between various Μ values and the best φ2 values is established, and the correspondence is recorded in the table. When the optical k measuring device 10e is used after leaving the factory, the control unit 31 can drive the second rotating arm 124 to a specific angle through the actuator, and find the corresponding φ2 value by looking up the table. The photosensitive surface 23 is rotated to this angle as it is. 1 and 11 are schematic views showing the configuration of an optical detecting apparatus according to still another embodiment of the present invention, and Fig. 11A is a partially enlarged view of Fig. 11A. Referring to Fig. 11A and Fig. 11A, the optical detecting device 100f of the present embodiment is similar to Fig. 1 for the optical detecting device 100e, and the difference between the two is as follows. In the present embodiment, the optical detecting device 100f further includes a substrate salt, wherein the first rotating #110e and the second rotating arm 12〇6 are disposed on the substrate 150f through the center of rotation. In this embodiment, the control unit is a mechanical control unit. Specifically, the control unit includes a curved groove 312f and a limit pin 314f. The curved groove 312f is disposed on the substrate window, and the limit detection is connected to the photodetector 230, for example, to the optical detector 23() via the rotating disk 316f of the control unit 3. In addition, the limit slip is set in the curve 201226880 36089twf.doc/n-shaped groove 3l2f. When the ##丝 further drives the salty u u 仕 仕 仕 仕 仕 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Rotate. When the curved groove 31 is played, the field is again. In the angle between the angle 1 and the angle φ2, the correctness of the detection result of the lifting wire can be determined. schematic diagram. The structure of the optical detecting device of the embodiment is similar to that of Fig. 2, Fig. 2, the optical detecting device of the present embodiment 1

The difference between iGGe and * of the embodiment is that in the preliminary detecting device 100h of Fig. 10, the hollow light-shielding elastic sleeve 330 is replaced by the light-shielding casing 330h. The light-shielding shell 330h is wrapped into a road scale to transmit the sensing light 214 between the module 240 and the photodetector 23A, and covers part of the imaging optical module 240 and at least part of the photodetector, FIG. For example, the entire photodetector 230 is covered. In this way, the stray light of the boundary is less likely to enter the photodetector 230 to cause interference with the measurement result.

The concept of the embodiment of FIG. 10, FIG. 11A and FIG. 12 can also be applied to the optical detecting device of the above-mentioned FIG. 1 , 1SI, the middle, FIG. 2A, FIG. 2B, FIG. 4, FIG. 5 and FIG. As a representative to explain. _ FIG. 3 is a structure of an optical detecting device according to still another embodiment of the present invention. Referring to FIG. 13, the optical detecting device 100g of the present embodiment is a combination of the optical detecting device 100 of FIG. 1 and the optical detecting device 100e of FIG. 10, wherein the same elements as those of FIGS. 1 and 10 represent the same or similar elements. Its function is not repeated here. In the optical detecting device 100g

S 22 201226880 χ vi ^ ^ vuu8TW 36089twf. doc / n, the actuating 320 is connected to the photodetector 230 to drive the optical predator 230 to rotate the rotation of the first rotating arm 120, wherein the rotation is performed in a manner Please refer to the embodiment of FIG. 10 for the amount of rotation, which will not be repeated here. In the present embodiment, the photodetector 230 is disposed between the actuator 320 and the second rotating arm 12A. Further, the control unit 310 is electrically connected to the actuator 18A and the actuator 320. When the control unit 31 commands the actuator 18() to push the second rotating arm 12' to a certain angle, the photodetector 23 is also known by looking up the table.

Turn to the angle and command the actuator 32 to rotate the photodetector 23 to this angle. Fig. 14 is a flow chart showing an optical detecting method according to an embodiment of the present invention. Referring to Fig. 14, the optical detecting method of the present embodiment is applied to the optical inspection apparatus of Figs. 1 to 9 and is described below by taking the optical inspection apparatus 1 as an example. First, step S110 is executed to provide the above-described optical detecting device 1GG. Next, step S12Q is performed to place the substance to be tested 52 near the (four) towel 140. In other words, step S13Q is performed to turn on the light source 21〇' to cause the illumination beam 212 (shown in FIG. 3) emitted by the light source 210 to be incident on the object to be tested, wherein the substance to be tested 52 senses the illumination beam 212. 214. Thereafter, the step sl4 is performed to the photosensor 23 〇 = axis 4. Then, step (10) is performed to move the push rod (10), the static 122 ^ 36 and the first check 138 are respectively changed in the first groove 112 and the second 彳: sliding 'to change the illumination beam 212 incident on the substance to be tested 52 simultaneously. The reflex of the sensed light 214 detected by the photodetector 230 causes the incident angle to be generated by moving the push rod (10) up and down, and (4) the common angle of the incident angle f. For details of the mechanism linkage and steps generated in the above steps 23 201226880, please refer to the figure, and we will not repeat them here. 1 to 9 of Fig. 9 is a flow chart of an optical detecting method of another embodiment of the present invention

It can be applied to the optical detecting devices 1〇〇e l〇〇f i〇〇g, i〇〇h of FIGS. 10 to 13 . In step S150 of the embodiment, when the angle of the illumination beam 212 incident on the substance to be tested 52 is changed, and the reflection angle of the φ sensing light 214 detected by the photodetector 23 is changed, according to the second rotation The angle between the arm 12〇e and the inverse vector of the normal vector VI of the bearing surface 59 adjusts the angle of the normal vector V2 of the photosensitive surface 234e with respect to the extending direction of the second rotating arm 120e. When the angle φ 递增 is increased from a first angle to a second angle, the angle φ2 is correspondingly decreased from a third angle to a fourth angle, wherein the first angle, the second angle, the third angle, and the fourth angle are both Greater than twist and less than 90 degrees. Alternatively, when the angle φ 递 is decreased from the second angle to the first angle, the angle φ2 is correspondingly increased from the fourth angle to the third angle. In another embodiment, when the angle φ 递增 is increased from a first angle to a second angle, the angle φ2 is correspondingly increased from a third angle to a fourth angle, wherein the first angle The second angle, the third angle, and the fourth angle are both greater than 0 degrees and less than 90 degrees. Alternatively, when the angle φ 递 is decreased from the second angle to the first angle, the angle φ2 is correspondingly decreased from the fourth angle to the third angle. For details and functions of the above steps, please refer to the embodiment of FIG. 10 to FIG. 12, which will not be repeated here. Further, when the optical detecting device 100g of Fig. 13 is employed, the step

S 24 201226880 r^iyyuu68TW 36089twf.d〇c/n In step S150', the angle of the illumination beam 212 incident on the substance to be tested 52 is changed and the reflection angle of the sensing light 214 detected by the photodetector 230 is changed. The rod 130 is used for the details. For details and functions, please refer to the embodiment of FIG. 13 , which will not be repeated here. In summary, in the optical detecting device and the optical detecting method of the embodiment of the present invention, since the first plug and the second plug slide in the first groove and the second groove, respectively, the first pin is rotated. The distance of the center is maintained substantially equal to the distance of the second pin to the center of rotation, so the position of the angle bisector of the first rotating arm and the second rotating arm is maintained regardless of the angle at which the first rotating arm and the second rotating arm are rotated. change. In this way, a better optical measurement can be achieved. Further, the optical detecting device of the embodiment of the present invention can maintain the incident angle of the optical axis of the illumination beam substantially equal to the reflection angle of the optical axis of the sensed light by a relatively simple mechanism, and thus the embodiment of the present invention The optical detecting device can combine both lower manufacturing cost and better measurement accuracy. Further, since the optical detecting device of the embodiment of the present invention drives the pusher by the actuator, the optical detecting device can continuously perform the instantaneous measurement. Furthermore, in the optical detecting device and the optical detecting method of the embodiment of the present invention, when the angle between the second rotating arm and the inverse vector of the normal vector of the bearing surface is increased or decreased, the normal vector of the photosensitive surface can be made relative to the first The angle of the extending direction of the two rotating arms is increased or decreased, so that the perspective distortion and image compression of the image formed in the photodetector can be effectively reduced, thereby improving the detection accuracy of the optical detecting device and the optical detecting method. . Although the present invention has been disclosed in the above embodiments, it is not intended to limit the scope of the present invention, and it is intended to be within the spirit and scope of the present invention. The scope of protection of the present invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded view of an optical detecting apparatus according to an embodiment of the present invention. 2A is a perspective view of the first rotating arm, the second rotating arm, the push rod, the actuator, and the substrate of FIG. 1. Figure 2B is the back side of the structure of Figure 2A. 3 is a schematic view of the optical path of the optical detecting device of FIG. 1. 4 is a perspective view showing a first rotating arm, a second rotating arm, a push rod, an actuator, and a substrate in an optical detecting device according to another embodiment of the present invention. 5 and 6 are perspective views of two different viewing angles of a first rotating arm, a second rotating arm, a push rod, an actuator, and a substrate in an optical detecting apparatus according to still another embodiment of the present invention. Fig. 7 is a view showing the optical path of the optical detecting device of the re-embodiment of the present invention. 8 and 9 are schematic views of optical paths of an optical detecting device according to another embodiment of the present invention. - Figure 1G is a schematic view of the structure of an optical detecting device of still another embodiment of the present invention. Fig. 11A is a schematic view showing the configuration of an optical detecting apparatus according to still another embodiment of the present invention. Fig. 11B is a partial enlarged view of Fig. 11A. 201226880 J^MyyuusSTW 36089twf.doc/n FIG. 12 is a schematic view showing the configuration of an optical detecting apparatus according to another embodiment of the present invention. Fig. 13 is a view showing the configuration of an optical detecting apparatus according to still another embodiment of the present invention. Figure 14 is a flow chart of an optical detecting method in accordance with an embodiment of the present invention. Figure 15 is a flow chart showing an optical detecting method according to another embodiment of the present invention. [Main component symbol description] 50, 50c: surface plasma resonance detecting portion 51: 稜鏡52, 52d: substance to be tested 54: biological probe 54c: grating structure 56: metal film 5 8: transparent plate 59, 59c: bearing Surfaces 100, 100e, 100f, 100g, 100h: optical detecting devices 110, 110e: first rotating arm 112: first grooves 120, 120e: second rotating arm 122: second groove 124: optical axes 130, 130a, 130b: putter 27 36089twf.doc/n 201226880

J: ^177UU 〇 8TW 132: first end 134: second end 135, 137: third plug 135b: connecting portion 136: first plug 138: second plug 140: center of rotation 150, 150f: substrate 152, 152b, 154, 154b: third groove 160: slide rail 170: sliding portion 180, 320: actuator 210, 210d: light source 212, 212d: illumination beam 214, 214d: sensing light 220: polarizer 222d · · first polarization 224d: phase retarder 230, 230d: photodetector 232e: image detecting element 234e: photosensitive surface 235e: center line 240: imaging optical module 242d: second polarizer

S 28 201226880 myytX)ii8TW 36089twf.doc/n 250 : mask 252 : hole 260 : lens group 270 : band pass filter 310 , 310f : control unit 312f : curved groove 314f : restriction pin 316f : rotating disk 330 : Hollow shading elastic sleeve 330h: light shielding housing E: angle bisector S110~S150, S150': step VI, V2: normal vector Θ1: incident angle Θ2: reflection angle φ ΐ, φ2 : angle 29

Claims (1)

201226880 P51990088TW 36089twf.doc/n VII. Patent application scope: 1. An optical detecting device suitable for measuring a substance to be tested, the light wind detecting device comprising: a thousand first rotating arm; a second rotating arm, via a rotating center The first rotating arm is pivotally connected; the light source 'is disposed on the first rotating arm; the photodetector is disposed on the second rotating arm, wherein the to-be-substance is adapted to be disposed near the rotating center a carrier disposed on the rotation center, wherein the carrier has a bearing surface L and the bearing is closed to carry the object to be tested f; and the control unit has a photosensitive surface And controlling the angle of the photosensitive surface according to the angle between the second rotating arm and the inverse 1 of the normal of the bearing surface, when the second ΐ:==; An optical detecting device according to the first item, wherein the angle is from the central angle of the inverse vector of the "normal vector of the orbital surface" or the Said second rotating arm and to said first angle 6 When the angle of the reverse 1 is decremented from the second angle, the control unit causes the normal vector S 30 36 〇 89 twf. doc / n 201226880 r3 iyyuu » 8TW of the photosensitive surface to extend relative to the second rotating arm The angle of the direction is correspondingly increased from the fourth angle to the third angle, wherein the first angle, the second angle, the second angle, and the fourth angle are both greater than a degree and less than 90 3. The optical detecting device of claim 1, wherein when an angle between the second rotating arm and an inverse vector of a normal vector of the bearing surface is increased from a first angle to a first angle The control unit increases the angle of the normal vector of the photosensitive surface relative to the extending direction of the second rotating arm from the second angle to the fourth angle, or when the second rotating arm disk carries the bearing The reverse declination of the normal vector of the face is decremented from the second angle to the first - xiao lin, the angle of the normal vector of the sinus light relative to the extending direction of the second rotating arm Correspondingly from the fourth angle Decreasing to the third angle, wherein the _ angle, the second angle, the third angle, and the fourth angle are both greater than and less than 90 degrees. 4. As disclosed in the patent application (4) The optical inspection device further includes an actuation II, which is connected to the series of light, and the rotation of the photosensitive surface is rotated. The cap is actuated to connect the H button to the control element, and the The control unit is adapted to instruct the actuation H to drive the photosensitive surface to rotate. 5. The optical inspection apparatus according to claim 4, wherein the photosensitive surface is located in the actuator and the Between the second rotating arms. The optical inspection device of claim 4, wherein the actuating jaw is located between the photosensitive surface and the second rotating arm. 7. The wire detecting device according to claim 5, wherein the control unit according to the second rotating arm and the bearing is in a table lookup manner. An angle between the inverse vectors of the normal vectors of the f-plane to find a corresponding angle in the normal direction of the photosensitive surface with respect to the extending direction of the second rotating arm. 8. The optical detecting device of claim 1, further comprising a substrate, wherein the first rotating arm and the second rotating arm are pivotally disposed on the substrate through the square rotation center. The control unit includes: a curved groove disposed on the substrate; and a limiting bolt connected to the photodetector and slidably disposed in the curved groove, when the second rotating arm When rotating, the curved groove of the curved groove forces the limiting pin to slide in the curved groove, thereby driving the photosensitive surface to rotate. 9. The optical detecting device of claim 1, wherein the light source is adapted to emit an illumination beam, and the substance to be tested is disposed on a transmission path of the illumination beam, the illumination beam being illuminated After the test is performed, the sensed light carrying the information of the substance to be tested is generated, and the photodetector is disposed on the transmission path of the sensed light, and the optical detecting device further includes: the imaging optical module Arranging on the transmission path of the sensing light, and lying between the photodetector and the substance to be tested; and a hollow shading elastic sleeve connecting the imaging optical module and the light detecting The hollow light-shielding elastic sleeve seals the sensing light between the imaging optical module and the photodetector in the hollow shading elastic sleeve, and when the photodetector When the rotation is rotated to drive the photosensitive surface to rotate, the hollow elastic sleeve is deformed accordingly. The optical detecting device according to claim 9, wherein the photosensitive surface has a center line passing through a center of the photosensitive surface, and the photosensitive The face rotates about the centerline and the centerline intersects the optical axis of the imaging optics module. 11. The optical detecting device of claim 1, wherein the light source is adapted to emit an illumination beam, and the substance to be tested is disposed on a transmission path of the illumination beam. Detecting the substance to be tested and then generating a sensing light carrying the information of the substance to be tested, the photodetector being disposed on the transmission path of the sensing light, the optical detecting insertion further comprising: , , &lt; imaging An optical module disposed on the transmission path of the sensing light and located between the photodetector and the substance to be tested; and a light shielding body that covers the imaging optical module and the light The transmission path of the sensing light between the crying is measured, and the imaging optical module is covered with at least part of the photodetector. The optical detecting device of claim 1, wherein the photosensitive surface has a center line passing through a center of the photosensitive surface, the residual light surface is rotated around the center line, and the center The line is perpendicular to a plane of rotation of the first rotating arm and the second rotating arm. 13. The optical detection skirt according to claim 1, wherein a variation range of a declination of an inverse vector of the normal vector of the second rotating arm and the bearing surface is greater than 0 degrees and less than 90 degrees. Within a range of degrees, the range of variation of the normal angle of the residual surface relative to the extending direction of the second rotating arm is in the range of 0 to 70 degrees. 33 201226880 .38TW 36089twf.doc/n - and /, a younger brother, and includes a second type of 栓 栓 一 一 , , , , , , , , , , , , , The second slip is disposed on the second groove, and the second plug is held by the first groove and the second pin respectively. The distance from the second pin to the center of rotation of the center of rotation. (4) For the optical detection device described in the second item of the package 2, there is also a 4-channel groove, and the putter also includes a plurality of the first: In the third groove, wherein the third groove is formed by the first rotating arm and the second rotating arm, and the optical detecting device according to claim 14 of the patent application, further including a substrate Having two third grooves, the first detecting and the lowering pins are respectively slidably disposed on the third groove, and the third groove is mounted on the first rotating arm and the first The second flat wire of the two rotating arms includes: 1:7. The optical detecting device according to claim 14 of the patent scope, and the substrate; and the heart slippery portion are disposed on the substrate, and the towel is pushed The rod is not sighed on the slide rail, and the slide rail is substantially parallel to the angle bisector of the a-turn arm and the second swivel arm. The optical detecting device of claim 17, wherein the slide rail and the first rotating arm are respectively disposed on opposite sides of the substrate, and The slide rail and the second rotating arm are respectively disposed on opposite sides of the substrate, and the optical detecting device further includes a sliding portion, and the push rod is slidably disposed on the sliding rail through the sliding portion. The optical detecting device of claim 18, wherein the substrate has at least one third groove, and the sliding portion and the push rod are respectively disposed on opposite sides of the substrate, The optical detecting device further includes a connecting portion that passes through the third groove and connects the sliding portion with the push rod 'and the connecting portion is adapted to move in the third groove. The optical detecting device of claim 19, further comprising an actuating jaw </ RTI> connected to the sliding portion to drive the sliding of the sliding rail. The optical detecting device of claim 14, further comprising an actuation H coupled to the turn to drive the lever to move The first detecting and the second plug are slid in the first groove and the second groove, respectively. The optical detecting device of claim 14, wherein the first plug and the second plug gradually approach the end of the second end and the second groove respectively. The first rotating arm and the second rotating arm are the same as the second rotating arm, and the optical detecting device further includes a carrier, which is provided on the center of the field, and the bearing has Carrying surface, so carrying the substance to be tested, when the angle between the first rotating arm and the second 35 201226880 . . -^STW 36089twf.doc/n rotating arm changes The angle bisector of the two rotating arms and the bearing: the turning arm and the 23rd, such as the Shenshi main dung brake Meng Guzhe, remain unchanged. For example, as described in the 22nd paragraph of the patent scope of the patent, when the first-rotational second rotating arm $ detecting device is formed, the first rotating arm and the second rotating arm are at an angle The resulting deformation is perpendicular to the bearing surface. The angle bisector of 疋锝# is maintained 24. As described in the scope of the patent application, the carrier is a surface resonance resonance phenomenon. To generate surface electricity '25. The optical detection device of claim 24, wherein the carrier is in contact with the substance to be tested. The surface surface resonance detecting portion of the optical portion described in the '^ /, 26. Shishen% patent range item 24 is a 稜鏡-type surface electro-convergence resonance sensing JZK Λ 27. Patent application No. 24 The optical detecting device, The surface (four) resonance detecting portion is a grating type surface (four) resonance sensing portion. 28. The optical detecting device of claim 24, wherein the light source is adapted to emit an illumination beam, and the surface plasma resonance detecting portion is disposed on a transmission path of the illumination beam, wherein the illumination beam is After the surface plasma resonance detecting portion is irradiated, the sensing light carrying the surface plasma resonance information is generated and the photodetector is disposed on the transmission path of the sensing light. The optical detecting device of claim 28, further comprising a polarizer 'disposed on the transmission path of the illumination beam, and located at the light source and the wire Φ electric material recording department (5). 30. The optical detecting device according to claim 28, wherein the optical detecting device comprises a band pass filter and an optical device disposed on the transmission path of the illumination beam, and located at the system and the surface. Between the resonance detection units. 31. The optical detecting device of claim 28, wherein the light source is a light emitting diode or a laser emitter. The optical detecting device of the fourth aspect of the invention, further comprising: a first-polarized person, wherein the light source is adapted to emit an illumination beam, and the illumination beam is irradiated on the substance to be tested And the __polarizer is disposed on the transmission path of the illumination beam and located between the photo-detecting substances; and the K-ji, the first-polarizer, wherein the substance to be tested reflects the illumination beam The sensed light is sensed by the wire, and the second polarizer is disposed on the transmission path 1 of the Lianqian light, and between the spot_X and the photodetector. 33. An optical detecting method comprising: providing an optical detecting device as described in the scope of claim 2; placing a substance to be tested near the center of rotation; turning on the light source to cause the light source to emit Irradiating an illumination beam on the substance to be tested, wherein the substance to be tested irradiates the sensing light; the beam is opposite to the sensing light by the photodetector; and 37 ^ 3 8T W 36089twf. Doc/n 201226880 Change the illumination beam incident to the test a qualitative angle, and changing a reflection angle of the sensed light detected by the photodetector, according to a central angle of an inverse vector of a normal vector of the second rotating arm and the H-plane Adjusting an angle between a normal vector of the photosensitive surface and a direction of the second rotating arm, when the second rotation is opposite to or decreasing from the angle of the reverse 塁 in the normal direction of the bearing surface The angle between the normal direction of the photosensitive surface and the extending direction of the second rotating arm is increased or decreased. 34. The optical detecting method according to claim 33 of the patent application, The inverse of the inverse vector of the normal vector of the two rotating arms and the bearing surface: when the angle is increased from the first angle to the second angle, the normal vector of the sensing wire is compared with the extending direction of the two rotating arms Correspondingly decreasing from the third degree to the fourth angle 'or when the second rotating arm and the inverse vector of the inverse vector of the normal vector are decremented from the two angles to the first degree The normal vector of the photosensitive surface is relatively cool with respect to the direction of the L of the second rotating arm. The fourth angle is incremented to the third angle 'where the first angle, the second angle, and the fourth angle of the third angle disc are both greater than a degree and less than 9 degrees. The optical detection method according to Item 33 of the method of the invention, wherein the first-to-test of the inverse vector of the normal vector of the carrier surface of the bearing surface is increased to the second degree, The control unit increases the angle i of the normal i with respect to the extending direction of the second rotating arm from a third angle to a fourth angle, or when the second rotating arm=the carrying The control unit makes the normal direction of the photosensitive surface S 38 201226880 .36089 twf.doc/n relative to the second rotation when the second angle of the vector vector is transferred to the first angle An angle of the extending direction of the arm correspondingly decreases from the fourth angle to the third angle, wherein the first angle, the second angle, the third angle, and the fourth angle are both greater than 0 degrees Really less than 90 degrees. 36. The optical detection method of claim 33, wherein the normal vector of the photosensitive surface is adjusted according to an angle between an inverse vector of a normal vector of the second rotating arm and the bearing surface Second rotating arm The step of extending the angle of the direction includes finding the normal vector of the photosensitive surface relative to the second rotating arm according to the angle between the second rotation and the inverse vector of the normal vector of the bearing surface in a look-up manner The corresponding missing angle of the extension direction. The optical detecting method of claim 33, wherein the optical detecting device further comprises a substrate, wherein the first rotating arm and the second rotating arm are pivoted through the rotating center And the step of adjusting the inverse vector of the normal vector of the second rotating arm and the bearing surface on the substrate=the step of adjusting the deviation of the normal vector of the photosensitive surface with respect to the armor direction of the second rotating arm The method includes: when the second rotating arm rotates, the curved shape on the substrate is used to make the limit detection connected to the photodetector slide in the curve and then drive The photosensitive surface is rotated. The method for detecting the prior art described in the 33rd patent of the patent, the vertical rotation has a first-order, and the optical detection device further includes a push rod, :/, the first and second ends of the disciple And including a second plug disposed at the second end of the first end == 39 38TW 36〇89 twf.doc/n 201226880, the first slid is disposed in the second slot, and The second pin is disposed on the second groove, and when the second pin is in the first groove and the second groove respectively, the first The distance from the center of the rotation is substantially the distance from the first pin to the rotation center, and the angle of the illumination beam is changed and the sensed light detected by the photodetector is changed The step of reflecting the angle includes: the said first plug and the second plug respectively change the photodetector in the detected St:=== The optical detecting method according to Item 38, wherein the second inspection is gradually moved to the two ends of the center of the Wei-trench, respectively, as described in 2J: the proximity of the two grooves The angle between the rotations gradually becomes larger, and the distance between the arm and the second rotating arm toward the first groove: two turns: the second pin is gradually separated from the rotation and the middle of the groove And the second groove of the second rotating arm; the arm and the bearing H further comprise a measuring device bearing surface, the bearing surface is centered on the said carrier has a rotating arm and a The second rotation test substance 'when the change angle of the first-rotating arm and the first portion changes, the first angle remains unchanged. (4) Reading and Wei Qian's loss ^8TW 36089twf.doc/n 201226880 (4) 39 tons of optical _ method, i-time 'the first-rotating arm and the second rotating arm two = with the bearing surface vertical. In the j-month, the optical detection method of 33 items in the middle of the ten-footed green, the bearing 4 surface (four) resonance detection part, _ quality, and the surface electro-convergence phenomenon. _4th object to be tested 42. : The medium-speed surface t-resonance detecting unit described in item 41 of the patent application scope is a prism type table = ^' method. Ling's mother-in-law,, 43. The surface money resonance detecting unit described in Gwangju, as described in claim 41, is a grating type surface.