WO2012070546A1 - Transfer device and method for producing resin pattern - Google Patents
Transfer device and method for producing resin pattern Download PDFInfo
- Publication number
- WO2012070546A1 WO2012070546A1 PCT/JP2011/076833 JP2011076833W WO2012070546A1 WO 2012070546 A1 WO2012070546 A1 WO 2012070546A1 JP 2011076833 W JP2011076833 W JP 2011076833W WO 2012070546 A1 WO2012070546 A1 WO 2012070546A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- transfer
- transferred
- flexible
- resin
- pressure roller
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/026—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C37/006—Degassing moulding material or draining off gas during moulding
Definitions
- the present invention relates to a transfer device and a resin pattern manufacturing method, and more particularly, to a transfer device and a resin pattern manufacturing method capable of stably and continuously forming a flexible mold made of resin.
- a nanoimprint method in which a fine concavo-convex structure on the surface of a nanometer is used to transfer the fine concavo-convex structure to a resist or a resin using a mold.
- This nanoimprint method has recently been attracting attention because it has a shorter processing time than conventional methods using photolithography and etching, requires less equipment costs and material costs to form a fine relief structure, and is excellent in productivity. Collecting.
- manufacturing methods using photolithography and etching are generally good at single-wafer processes based on rigid (ie, rigid) substrates such as silicon wafers and quartz substrates, whereas nanoimprints are rigid substrates. It is characterized by good compatibility with a roll-to-roll process using a flexible substrate such as a resin film as well as a single-wafer process using as a base material.
- the roll-to-roll process requires a roll-shaped mold, but it is very difficult to form a nano-order pattern into a roll shape.
- a method of wrapping the material around a transfer roll and substituting it is proposed.
- the nickel mold used here can be produced by forming a resist pattern on a rigid substrate such as a silicon wafer using photolithography and then replicating the resist pattern by nickel electroforming.
- a replica may be obtained from the etched fine pattern by nickel electroforming.
- defects such as scratches and dirt on the mold become defects in the transferred product, and therefore it is necessary to replace the mold as soon as it occurs. Therefore, a mold that can be obtained at a lower cost than a nickel mold is required.
- the nanoimprint mold used in the roll-to-roll process can be wound around the transfer roll, has excellent durability, and is inexpensive. For this reason, a resin-made flexible mold in which a pattern is once nanoimprinted on a film from an expensive flat master made of a material such as quartz or silicon is used (Patent Document 1).
- a resin film coated with a photocurable resin and a mold are fixed between stages that are parallel plates and spaced apart, with the pattern surface and the photocurable resin coated surface facing each other, and one stage on the other side
- UV light is applied to form a pattern on the resin film, or a resin film coated with a photo-curable resin and the master of the mold
- the method is such that the photo-curing resin application surface is placed so as to face each other, a pressure roll is pressed against the resin film, scanned, and then irradiated with UV light to form a pattern on the resin film.
- in-plane pressing unevenness can be suppressed by lowering the roughness of the stage surface, but as the mold area increases, it is necessary to increase the pressing pressure, which increases the size of the device, etc. There's a problem. Further, when transferring by the mold, air existing between the convex portions of the mold tends to remain on the surface of the resin pattern as bubbles, which may cause a pattern defect. As a method of preventing bubbles from remaining, a method of transferring under reduced pressure has been proposed. Similarly, as the mold size increases, the size of the chamber in which the mold is accommodated increases, and a large-capacity vacuum pump is required. There is a problem such as becoming overhanging. In the case of the latter method, pressing unevenness of the pressure roll becomes a cause of transfer failure.
- the unevenness from the mold (not shown) is transferred to the resin 3 applied on the film 1 which becomes the base material after the transfer.
- the height of the film was indicated by H), and the height was not uniform depending on the location, and there was a risk of uneven film thickness.
- the present invention has been made in view of such conventional problems, and an object of the present invention is to provide a transfer apparatus and a resin pattern manufacturing method capable of stably and continuously forming a resin-made flexible mold. To do.
- the present invention provides a transfer member having rigidity or flexibility, a transfer member having rigidity or flexibility, and at least one of the transfer member and the transfer member.
- Application means for applying a curable resin to a predetermined area transfer means for transferring the transfer member and the transferred member to each other with the curable resin interposed therebetween; and a curing means for curing the curable resin;
- the transfer apparatus includes a peeling unit that peels the transferred transfer member and the transferred member from each other, and at least one of the transfer member and the transferred member has flexibility.
- the transfer means is a member that is pressed against one of the transfer member or one of the members to be transferred while having flexibility against the other member of the transfer member or the member to be transferred.
- a pressure roller that feeds and scans in parallel, and a tension generating means that pulls the one flexible member with a predetermined tension from the pressure roller toward a diagonal direction forward from the scanning direction. It is characterized by.
- the transfer member is a member provided with a mold having a concavo-convex pattern on the surface.
- the pressure roller then feeds and scans in parallel with the other member of the transfer member or the member to be transferred while pressing against one of the members having flexibility among the transfer member or the member to be transferred. At this time, one member having flexibility is pulled with a predetermined tension from the pressure roller toward the diagonally forward direction from the scanning direction.
- the resin is not yet transferred. Air leaks out of the gap. For this reason, even if it does not process in a pressure-reduced environment, a bubble does not remain on the resin side.
- the concavo-convex pattern is transferred to the curable resin by pressing the concavo-convex pattern of the transfer member against the curable resin. Thereafter, the pattern shape can be maintained by curing the curable resin and releasing the mold.
- the present invention includes a transfer member having rigidity or flexibility, a transfer member having rigidity or flexibility, and at least one of the transfer member and the transfer member.
- the transfer apparatus includes a peeling unit that peels the transferred transfer member and the transferred member from each other, and at least one of the transfer member and the transferred member has flexibility. And the peeling means is against the other member of the transfer member or the member to be transferred while pressing against the flexible member of the transfer member or the member to be transferred.
- a pressure roller that scans back in parallel; and tension generating means for pulling the one flexible member with a predetermined tension from the pressure roller toward the front oblique direction with the pressure roller as a fulcrum.
- the transfer member is a member provided with a mold having a concavo-convex pattern on the surface. Then, while pressing against the flexible member of the transfer member or the member to be transferred with the pressure roller, the scanning is performed in parallel with the other member of the transfer member or the member to be transferred. At this time, one member having flexibility is pulled with a predetermined tension from the pressure roller toward the diagonally forward direction from the scanning direction. By comprising in this way, the flexible member in a transfer member or a to-be-transferred member can be smoothly peeled from a fixed position little by little from the other member in a transfer member or a to-be-transferred member.
- the present invention is an invention of a transfer device, and comprises a reversing means for reversing either the transfer member or the transfer target member.
- the present invention is an invention of a transfer device, and has the flexibility so that one of the flexible members is bent at a corner of one end of the other member.
- a first elevating roll that holds one end of one member at a position higher than the height of the corner portion is provided.
- the present invention (Claim 5) is an invention of a transfer device, and includes a second lifting roll for holding the one flexible member in the oblique direction.
- the present invention is an invention of a transfer device, wherein a feeding side guide roll having a first tension sensor that guides a feeding side of the one flexible member, and the flexibility A winding-side guide roll that guides a winding side of one member having a second tension sensor, a feeding roll that feeds out the one flexible member, and one flexible member A take-up roll that winds up the member, drives the feeding roll based on the tension detected by the first tension sensor, and moves the take-up roll based on the tension detected by the second tension sensor. It is characterized by being driven.
- the present invention is an invention of a transfer device, wherein the curing means is configured to include a light irradiation mechanism in which ultraviolet light emitting elements are arranged in a straight line.
- the ultraviolet light emitting elements are arranged in a straight line, it is cheaper than arranging the ultraviolet light emitting elements on one side. Further, if the scanning is performed at a constant speed, unevenness in the amount of irradiation light does not occur in the scanning direction.
- the curing means can be based on heat or the like.
- the present invention is an invention of a transfer apparatus, wherein a length measuring means for measuring the unwinding dimension of the one flexible member, and an unwinding dimension measured by the length measuring means. And a cutting means for cutting the one flexible member.
- the present invention cures a predetermined area of a predetermined area of a transfer member having rigidity or flexibility or a predetermined area of a transfer target member having rigidity or flexibility.
- the transfer member and the transferred member are transferred after the transfer resin and the transferred member are transferred to each other with the curable resin interposed therebetween, and the curable resin is cured.
- the pressure roller is fed and scanned in parallel to the transfer member or the other member of the transferred member while pressing, and the flexible roller is used as a fulcrum for the one member having flexibility. Run Toward the front oblique direction than the direction wherein the traction with a predetermined tension.
- the present invention cures a predetermined area of a predetermined area of a transfer member having rigidity or flexibility or a predetermined area of a transfer target member having rigidity or flexibility.
- the transfer member and the transferred member are transferred after the transfer resin and the transferred member are transferred to each other with the curable resin interposed therebetween, and the curable resin is cured.
- a resin pattern manufacturing method in which a resin pattern is created by peeling each other from each other, and in the peeling step, a pressure roller is applied to one of the transfer member or one of the members to be transferred that has flexibility.
- the pressure roller is scanned back in parallel with the transfer member or the other member of the member to be transferred while pressing, and the flexible roller is used as a fulcrum for the one member having flexibility. From ⁇ direction toward a diagonally forward direction, characterized in that pulling a predetermined tension.
- the transfer member or the other member of the transferred member is pressed against the flexible member of the transfer member or the transferred member with the pressure roller. Since one of the flexible members is pulled with a predetermined tension from the scanning direction toward the front oblique direction with the pressure roller as a fulcrum, the transfer member or the covered member is scanned. One of the members of the transfer member or the member to be transferred that is flexible can be pressed little by little against the other member of the transfer member, and air can be discharged from a slight gap where the resin has not yet been transferred. Push it out. For this reason, even if it does not process in a pressure-reduced environment, a bubble does not remain on the resin side.
- the front view of the transfer apparatus which is embodiment of this invention AA arrow cross-sectional view in FIG.
- the top view of the transfer device which is an embodiment of the present invention
- Conceptual diagram of transcription of the present invention The figure which shows each processing process of a transfer device Diagram showing each processing step of transfer device (details of transfer) Diagram showing each processing step of transfer device (details of peeling)
- the figure explaining the diversity of embodiment of this invention Example of application to roll-to-roll nanoimprint transfer system Example of flexible substrate having multiple application areas
- FIG. 1 is a front view of a transfer apparatus according to an embodiment of the present invention
- FIG. 2 is a sectional view taken along the line AA in FIG. 1, and FIG.
- a mode in which a transfer member is a rigid mold and a transfer target member is a flexible substrate 9 will be described.
- a feeding roll 11 wound with a flexible base 9 and a feeding-side guide roll 13 for guiding the flexible base 9 to the upper right are provided at the left end of the transfer device 10.
- a winding roll 15 for winding the flexible base material 9 and a winding side guide roll 17 for guiding the flexible base material 9 are attached to the upper left of the transfer apparatus 10 at the right end.
- the feeding-side guide roll 13 and the winding-side guide roll 17 are attached so that the height in the Z-axis direction is the same. Therefore, when the flexible base material 9 is passed, the flexible base material 9 is stretched horizontally in the Y-axis direction between the feeding side guide roll 13 and the winding side guide roll 17. It has become.
- the feeding side guide roll 13 and the winding side guide roll 17 are provided with tension sensors 19 and 21, respectively, and torque control is performed on a motor (not shown) for driving the feeding roll 11 based on the tension detected by the tension sensor 19. Is supposed to do. On the other hand, torque control is performed on a motor (not shown) for driving the take-up roll 15 based on the tension detected by the tension sensor 21. Thereby, the tension of the flexible base material 9 can be adjusted.
- a vacuum suction stage 20 that can be evacuated from a vacuum pump (not shown) is disposed at the center of the transfer device 10.
- a plurality of small holes are formed on one surface of the vacuum suction stage 20, and outside air is sucked to the vacuum pump side through the small holes.
- the vacuum suction stage 20 is rotatable about the horizontal axis 25, and the rigid mold member 23 can be placed from above while being opened around the horizontal axis 25.
- the mounted rigid mold member 23 is fixed to the vacuum suction stage 20 by suction in a small hole of the vacuum suction stage 20.
- a flexible base material 9 is sandwiched between the upper and lower sides of the Z-axis direction on the left and right sides of the vacuum suction stage 20 and the rigid mold member 23 when tilted horizontally, and is movable up and down in the Z-axis direction.
- One lifting rolls 27a and 27b and second lifting rolls 29a and 29b are provided, respectively.
- a pressure roller 31 is disposed horizontally below the rigid mold member 23 with the flexible base material 9 interposed therebetween so as to be movable horizontally at a constant speed in the Y-axis direction.
- a UV irradiation lamp 33 in which ultraviolet light emitting elements such as LEDs (not shown) are linearly arranged in the X-axis direction as shown in FIG.
- the UV irradiation lamp 33 is provided as an irradiation mechanism, and is movable horizontally at a constant speed in the Y-axis direction.
- a resin application area 35 is formed on the left side of the vacuum suction stage 20 and the first elevating rolls 27a and 27b of the rigid mold member 23 when it is tilted horizontally.
- the nozzle 37 is positioned and controlled by an XYZ axis robot 39.
- the winding guide roll 17 is provided with a length meter (not shown) so that the moving distance of the flexible base material 9 can be measured.
- the flexible base material 9 is sent to the cutting stage 40 shown in FIG. 3 so that the flexible base material 9 can be cut by a film cutter (not shown).
- FIG. 4 is a conceptual diagram of transfer according to the present invention.
- a rigid mold member 23 having a pattern portion 43 with an uneven pattern is placed on a vacuum suction stage 20 (not shown).
- the rigid mold member 23 is sucked by the vacuum suction stage 20. It is in the state.
- the material of the rigid mold member 23 is quartz, silicon, nickel or the like.
- a photocurable resin 47 is applied to the resin application area 35 of the flexible substrate 9 by a resin application nozzle 37.
- a thermoplastic resin or a thermosetting resin film can be used as a material of the flexible substrate 9.
- a photocurable composition that can be photocured by photoradical polymerization can be used as a material of the photocurable resin 47.
- a method for applying the photocurable resin 47 die coating, bar coating, blade coating, knife coating, roll coating, spray coating, ink jet, or the like can be used.
- a thermosetting resin that can be thermoset by thermal radical polymerization can also be used.
- a linear infrared heater or the like in the X-axis direction is provided as a heating device, and the infrared heater may be scanned horizontally at a constant speed in the Y-axis direction. .
- the surface of the rigid mold member 23 may be subjected to a surface treatment in advance in order to improve releasability.
- This surface treatment preferably includes a compound having a fluoroalkyl group (which may have an etheric oxygen atom), a silicone chain, or a long-chain alkyl group having 4 to 24 carbon atoms. It is particularly preferable to include a compound having
- the resin application area 35 of the flexible base material 9 is wider than the entire pattern portion 43 of the rigid mold member 23 and is narrower than the outer shape of the rigid mold member 23. That is, as shown in FIG. 4A, the resin application area 35 is formed inside the flexible substrate 9, and the rigid mold member 23 is formed outside the surface of the resin application area 35. .
- FIG. 4C shows the transfer process.
- the pressure roller 31 is moved in the positive direction along the Y axis while pressing the pressure roller 31 with a predetermined pressure in the Z axis direction from below.
- the right end side of the flexible base material 9 is pulled obliquely downward to the right with a constant tension.
- the photo-curable resin 47 is cured by UV irradiation, but any side of the rigid mold member 23 side and the flexible substrate 9 side can be used as long as ultraviolet rays can be transmitted. May be irradiated.
- the photocurable resin 47 of the flexible substrate 9 is peeled from the rigid mold member 43.
- the pressure roller 31 is pressed from below at a predetermined pressure in the Z-axis direction, and is moved in the Y-axis negative direction as opposed to the transfer step of FIG.
- the right end side of the flexible base material 9 is pulled obliquely downward to the right with a constant tension.
- the position of the peeling portion is kept constant and the peeling speed is kept constant.
- the peeling is gradually performed, so that smooth peeling is possible.
- FIG. 5A shows a resin base material passing process.
- the first elevating rolls 27a and 27b and the second elevating rolls 29a and 29b are opened, and the flexible base 9 is horizontally disposed in the Y-axis direction between the feeding side guide roll 13 and the take-up side guide roll 17. Are in a balanced state with a predetermined tension.
- the resin application nozzle 37 applies resin to the resin application area 35 while being moved by the XYZ axis robot 39.
- one end of the flexible base material 9 is fixed by the first elevating rolls 27a and 27b, while the tension is kept constant by the tension sensor 19 on the other end side, so that the coating film thickness is uniform. Kept.
- the surface of the photocurable resin 47 of the flexible base 9 is opened with the first lifting rolls 27a and 27b and the second lifting rolls 29a and 29b opened.
- the flexible base material 9 is moved in the positive direction of the Y-axis to a position where it meets the surface of the rigid mold member 23.
- the first elevating rolls 27a and 27b and the second elevating rolls 29a and 29b are closed again.
- the flexible base material 9 is not pressed against the rigid mold member 23 at once, but is pressed gradually by scanning the pressure roller 31.
- the first elevating rolls 27a and 27b are raised in FIG. 6A, while the second elevating rolls 29a and 29b are lowered.
- the flexible base material 9 is bent into a “ ⁇ ” shape (“L” shape) at the bottom corner of the rigid mold member 23.
- the pressure roller 31 is moved at a constant speed in the positive direction of the Y axis while pressing the pressure roller 31 from below with a predetermined pressure. At this time, the right end side of the flexible base material 9 is pulled obliquely downward to the right with a constant tension by the tension sensor 21 of the rewinding guide roller 17.
- the UV irradiation lamp 33 that is linear in the X-axis direction is scanned horizontally at a constant speed in the Y-axis direction, thereby causing ultraviolet rays. Is irradiated to cure the photocurable resin 47. Unlike the arrangement of the UV irradiation lamp 33 on one surface, the UV irradiation lamp 33 is inexpensive because it is configured in a straight line in the X-axis direction. Further, by scanning at a constant speed, there is no unevenness in the amount of irradiation light in the Y-axis direction.
- the cured photocurable resin 47 is peeled from the rigid mold member 23.
- the flexible substrate 9 is not peeled off from the rigid mold member 23 at once, but is peeled off while scanning the pressure roller 31.
- the pressure roller 31 is moved in the Y-axis negative direction so that the pressure roller 31 is a fulcrum in order to gradually peel the flexible substrate 9.
- the right end side of the flexible base material 9 is pulled obliquely downward to the right with a constant tension by the tension sensor 21 of the rewinding guide roller 17.
- the second elevating rolls 29a and 29b are raised, and the first elevating rolls 27a and 27b are lowered.
- the flexible substrate 9 is sent to the cutting stage 40 in FIG.
- the resin pattern 100 composed of the flexible substrate 9 and the photocurable resin 47 thus completed can make the film thickness of the photocurable resin 47 uniform.
- the photocurable resin may be applied to either the mold side or the substrate side as shown in FIG.
- the photocurable resin 47 is applied on the flexible base material 9 that is a base material.
- the photocurable resin 147 may be applied to the base material 109 side as in the present embodiment, or may be applied to the mold 123 side.
- the member to be transferred is the flexible base material 9 and the transfer member is the rigid mold member 23 has been described.
- the member to which the pressure roller 31 is applied may be a transfer member having flexibility, that is, a flexible mold.
- the member to be transferred may be flexible or rigid.
- the member to which the pressure roller 31 is applied is a flexible transfer member, that is, a flexible member, as in the transfer process. It may be a mold. In this case, the member to be transferred may be flexible or rigid.
- the transfer member may be a flexible member, that is, a flexible mold.
- the transferred member may be flexible or rigid (second embodiment).
- the pressure roller 31 is applied to the flexible mold.
- the photocurable resin 147 may be applied to the base material 109 side or may be applied to the mold 123 side.
- the rigid transfer member may be a glass plate.
- thermoplastic resin or a thermosetting resin film or a metal sheet having flexibility as a base material, and a resin pattern formed by nanoimprinting on one side thereof can be used as a flexible mold.
- the base material is preferably a thermoplastic resin or thermosetting resin film that transmits ultraviolet rays.
- the UV irradiation lamp 33 irradiates from the lower side of the flexible substrate 9, but if ultraviolet rays can pass, as shown in FIG. Irradiation may be performed from below the base material 109 or from above the mold 123.
- the first embodiment is suitable when a flexible thermoplastic resin or a thermosetting resin film is used as a substrate and quartz, silicon, metal, or the like having high rigidity is used as a mold.
- the second embodiment is suitable when a resin mold is used as a flexible mold and a glass plate, a thermoplastic resin, or a thermosetting resin film is used as a base material.
- the transfer portion is conventionally configured in a drum type as shown in FIG.
- a single-wafer mold 100 (for example, three sheets) is used by being attached to a cylindrical transfer drum 50.
- a plurality of resin application areas 35 can be formed on the flexible substrate 9.
- the resin mold 200 having three resin application areas 35 ⁇ / b> A, 35 ⁇ / b> B, and 35 ⁇ / b> C is generated, and the resin mold 200 is wound around the transfer drum 50, so that the mounting operation can be easily completed.
- the transfer apparatus and the resin pattern manufacturing method of the present invention are useful for manufacturing a resin pattern using a mold for nanoimprinting (particularly, a mold having a maximum dimension of any one of the width, height, and pitch of the protrusions of 950 nm or less). is there.
- a mold for nanoimprinting particularly, a mold having a maximum dimension of any one of the width, height, and pitch of the protrusions of 950 nm or less.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
またナノインプリントにおいて、モールドの傷や汚れ等の欠陥は転写品の欠陥となるため、発生したら直ちにモールドを交換する必要がある。したがってニッケルモールドより安価に得られるモールドが求められる。 The nickel mold used here can be produced by forming a resist pattern on a rigid substrate such as a silicon wafer using photolithography and then replicating the resist pattern by nickel electroforming. In this case, after forming the resist pattern, a replica may be obtained from the etched fine pattern by nickel electroforming.
In nanoimprinting, defects such as scratches and dirt on the mold become defects in the transferred product, and therefore it is necessary to replace the mold as soon as it occurs. Therefore, a mold that can be obtained at a lower cost than a nickel mold is required.
例えば、平行平板で一定の間隔をおいたステージ間に、光硬化性樹脂を塗布した樹脂フィルムとモールドを、パターン面と光硬化性樹脂塗布面が向かい合う状態で固定し、一方のステージを反対側のステージに精密に平行を維持したまま押し当てた後、UV光を照射して、パターンを樹脂フィルム上に形成する方法や、光硬化性樹脂を塗布した樹脂フィルムとモールドの原盤をパターン面と光硬化性樹脂塗布面が向かい合うように重ね合わせて設置し、樹脂フィルムに対して加圧ロールを押し当て走査させた後、UV光を照射して、パターンを樹脂フィルム上に形成するといった方法が挙げられる。 By the way, in order to manufacture a flexible mold made of resin, various methods have been proposed.
For example, a resin film coated with a photocurable resin and a mold are fixed between stages that are parallel plates and spaced apart, with the pattern surface and the photocurable resin coated surface facing each other, and one stage on the other side After pressing against the stage precisely and in parallel, UV light is applied to form a pattern on the resin film, or a resin film coated with a photo-curable resin and the master of the mold The method is such that the photo-curing resin application surface is placed so as to face each other, a pressure roll is pressed against the resin film, scanned, and then irradiated with UV light to form a pattern on the resin film. Can be mentioned.
後者の方法の場合、加圧ロールの押しムラが転写不良の要因となる。 In the case of the former method, in-plane pressing unevenness can be suppressed by lowering the roughness of the stage surface, but as the mold area increases, it is necessary to increase the pressing pressure, which increases the size of the device, etc. There's a problem. Further, when transferring by the mold, air existing between the convex portions of the mold tends to remain on the surface of the resin pattern as bubbles, which may cause a pattern defect. As a method of preventing bubbles from remaining, a method of transferring under reduced pressure has been proposed. Similarly, as the mold size increases, the size of the chamber in which the mold is accommodated increases, and a large-capacity vacuum pump is required. There is a problem such as becoming overhanging.
In the case of the latter method, pressing unevenness of the pressure roll becomes a cause of transfer failure.
そして加圧ローラで転写部材又は被転写部材の内の可撓性を有する一方の部材に対し押し当てつつ転写部材又は被転写部材の内の他方の部材に対して平行に送り走査する。そして、この際には可撓性を有する一方の部材をこの加圧ローラを支点として走査方向より前方斜め方向に向けて所定の張力で牽引する。
このように、転写部材又は被転写部材の内の他方の部材に対し転写部材又は被転写部材の内の可撓性を有する一方の部材を少しずつ押しつけていくと樹脂のまだ転写されていないわずかの隙間から空気が外部に漏れ出ていく。このため、減圧環境下で処理しなくても樹脂側に気泡が残ることは無い。
なお、本発明において、転写部材の凹凸パターンを硬化性樹脂に押し付けることにより、当該凹凸パターンが、硬化性樹脂に転写される。この後、硬化性樹脂を硬化させて、モールドを離型することにより、パターン形状を保持することができる。 The transfer member is a member provided with a mold having a concavo-convex pattern on the surface.
The pressure roller then feeds and scans in parallel with the other member of the transfer member or the member to be transferred while pressing against one of the members having flexibility among the transfer member or the member to be transferred. At this time, one member having flexibility is pulled with a predetermined tension from the pressure roller toward the diagonally forward direction from the scanning direction.
As described above, when one of the transfer member or the member to be transferred is pressed against the other member of the transfer member or the member to be transferred little by little, the resin is not yet transferred. Air leaks out of the gap. For this reason, even if it does not process in a pressure-reduced environment, a bubble does not remain on the resin side.
In the present invention, the concavo-convex pattern is transferred to the curable resin by pressing the concavo-convex pattern of the transfer member against the curable resin. Thereafter, the pattern shape can be maintained by curing the curable resin and releasing the mold.
そして、加圧ローラで転写部材又は被転写部材の内の可撓性を有する一方の部材に対し押し当てつつ転写部材又は被転写部材の内の他方の部材に対して平行に戻り走査する。そして、この際には可撓性を有する一方の部材をこの加圧ローラを支点として走査方向より前方斜め方向に向けて所定の張力で牽引する。
このように構成することで、転写部材又は被転写部材の内の他方の部材より転写部材又は被転写部材の内の可撓性を有する一方の部材を一定の位置より少しずつ円滑に剥離できる。 The transfer member is a member provided with a mold having a concavo-convex pattern on the surface.
Then, while pressing against the flexible member of the transfer member or the member to be transferred with the pressure roller, the scanning is performed in parallel with the other member of the transfer member or the member to be transferred. At this time, one member having flexibility is pulled with a predetermined tension from the pressure roller toward the diagonally forward direction from the scanning direction.
By comprising in this way, the flexible member in a transfer member or a to-be-transferred member can be smoothly peeled from a fixed position little by little from the other member in a transfer member or a to-be-transferred member.
図1~図3において、転写装置10の左端には、可撓性基材9の捲回されている繰り出しロール11とその右上にこの可撓性基材9を案内する繰り出し側ガイドロール13とが取り付けられている。一方、この転写装置10の右端には可撓性基材9を巻き取る巻き取りロール15とその左上にこの可撓性基材9を案内する巻き取り側ガイドロール17とが取り付けられている。 First, as a first embodiment, a mode in which a transfer member is a rigid mold and a transfer target member is a
In FIGS. 1 to 3, at the left end of the
図4に本発明の転写の概念図を示す。図4(A)において、図示しない真空吸着ステージ20上には凹凸のパターンの施されたパターン部43を有する剛性モールド部材23が載置され、この剛性モールド部材23は真空吸着ステージ20に吸着された状態である。剛性モールド部材23の材質は石英、シリコン、ニッケル等である。 Next, the operation of the embodiment of the present invention will be described.
FIG. 4 is a conceptual diagram of transfer according to the present invention. In FIG. 4A, a
なお、光硬化性樹脂47の代わりに、熱ラジカル重合により熱硬化しうる熱硬化性樹脂を用いることもできる。その際には、UV照射ランプ33の代わりに、X軸方向に直線状の赤外ヒーター等を加熱装置として備え、この赤外ヒーターをY軸方向に向けて水平に一定速度で走査すればよい。 Moreover, as a material of the
Instead of the
その後、図6(B)のように、加圧ローラ31の走査は終了する。 In addition, since the bottom corner portion of the
Thereafter, as shown in FIG. 6B, the scanning of the
この場合、被転写部材は可撓性であっても剛性であってもよい。 In the present embodiment, the case where the member to be transferred is the
In this case, the member to be transferred may be flexible or rigid.
この場合、被転写部材は可撓性であっても剛性であってもよい。 Further, similarly, in the peeling process of the present embodiment, as shown in FIG. 8D, the member to which the
In this case, the member to be transferred may be flexible or rigid.
そして、被転写部材は可撓性であっても剛性であってもよい(第2の実施形態)。この場合は、可撓性モールドに加圧ローラ31を当てることになる。そして、図8(A)の塗布工程に示すように、光硬化性樹脂147は基材109側に塗布されてもよいし、モールド123側に塗布されてもよい。剛性の被転写部材は、ガラス板であってもよい。 That is, in another embodiment of the present invention, the transfer member may be a flexible member, that is, a flexible mold.
The transferred member may be flexible or rigid (second embodiment). In this case, the
なお、2010年11月22日に出願された日本特許出願2010-260387号の明細書、特許請求の範囲、図面及び要約書の全内容をここに引用し、本発明の明細書の開示として、取り入れるものである。 INDUSTRIAL APPLICABILITY The transfer apparatus and the resin pattern manufacturing method of the present invention are useful for manufacturing a resin pattern using a mold for nanoimprinting (particularly, a mold having a maximum dimension of any one of the width, height, and pitch of the protrusions of 950 nm or less). is there.
The entire contents of the specification, claims, drawings and abstract of Japanese Patent Application No. 2010-260387 filed on November 22, 2010 are cited herein as disclosure of the specification of the present invention. Incorporated.
10 転写装置
11 繰り出しロール
13 繰り出し側ガイドロール
15 巻き取りロール
17 巻き取り側ガイドロール
19、21 テンションセンサー
20 真空吸着ステージ
23 剛性モールド部材
27a、27b 第1昇降ロール
29a、29b第2昇降ロール
31 加圧ローラ
33 UV照射ランプ
35 樹脂塗布エリア
37 樹脂塗布用ノズル
39 XYZ軸型ロボット
40 切断ステージ
43 パターン部
47、147 光硬化性樹脂
50 転写ドラム
100、200 樹脂モールド DESCRIPTION OF
Claims (10)
- 剛性若しくは可撓性を有する転写部材と、
剛性若しくは可撓性を有する被転写部材と、
前記転写部材又は前記被転写部材のいずれかの少なくとも一箇所の所定エリアに対し硬化性樹脂を塗布する塗布手段と、
前記転写部材と前記被転写部材とを前記硬化性樹脂を介在して互いに転写する転写手段と、
前記硬化性樹脂を硬化させる硬化手段と、
前記転写された前記転写部材と前記被転写部材とを互いに剥離する剥離手段とを備えた転写装置であって、
前記転写部材及び前記被転写部材のいずれか少なくとも一方の部材は可撓性を有する部材であり、
前記転写手段は、
前記転写部材又は前記被転写部材の内の可撓性を有する一方の部材に対し押し当てつつ前記転写部材又は前記被転写部材の内の他方の部材に対して平行に送り走査する加圧ローラと、
前記可撓性を有する一方の部材を該加圧ローラを支点として前記走査方向より前方斜め方向に向けて所定の張力で牽引する張力発生手段を有することを特徴とする転写装置。 A transfer member having rigidity or flexibility;
A member to be transferred having rigidity or flexibility;
Application means for applying a curable resin to at least one predetermined area of either the transfer member or the transferred member;
Transfer means for transferring the transfer member and the transferred member to each other via the curable resin;
Curing means for curing the curable resin;
A transfer device comprising a peeling means for peeling the transferred transfer member and the transferred member from each other;
At least one of the transfer member and the transferred member is a flexible member,
The transfer means includes
A pressure roller that feeds and scans in parallel with the transfer member or the other member of the transferred member while pressing against the flexible member of the transfer member or the transferred member; ,
A transfer device comprising tension generating means for pulling the one flexible member with a predetermined tension from the pressure roller toward a diagonally forward direction from the scanning direction. - 剛性若しくは可撓性を有する転写部材と、
剛性若しくは可撓性を有する被転写部材と、
前記転写部材又は前記被転写部材のいずれかの少なくとも一箇所の所定エリアに対し硬化性樹脂を塗布する塗布手段と、
前記転写部材と前記被転写部材とを前記硬化性樹脂を介在して互いに転写する転写手段と、
前記硬化性樹脂を硬化させる硬化手段と、
前記転写された前記転写部材と前記被転写部材とを互いに剥離する剥離手段とを備えた転写装置であって、
前記転写部材及び前記被転写部材のいずれか少なくとも一方の部材は可撓性を有する部材であり、
前記剥離手段は、
前記転写部材又は前記被転写部材の内の可撓性を有する一方の部材に対し押し当てつつ前記転写部材又は前記被転写部材の内の他方の部材に対して平行に戻り走査する加圧ローラと、
前記可撓性を有する一方の部材を該加圧ローラを支点として前記走査方向より前方斜め方向に向けて所定の張力で牽引する張力発生手段を有することを特徴とする転写装置。 A transfer member having rigidity or flexibility;
A member to be transferred having rigidity or flexibility;
Application means for applying a curable resin to at least one predetermined area of either the transfer member or the transferred member;
Transfer means for transferring the transfer member and the transferred member to each other via the curable resin;
Curing means for curing the curable resin;
A transfer device comprising a peeling means for peeling the transferred transfer member and the transferred member from each other;
At least one of the transfer member and the transferred member is a flexible member,
The peeling means includes
A pressure roller that scans back against the transfer member or the other member of the transfer member while being pressed against one of the transfer member or the flexible member of the transfer member. ,
A transfer device comprising tension generating means for pulling the one flexible member with a predetermined tension from the pressure roller toward a diagonally forward direction from the scanning direction. - 前記転写部材又は前記被転写部材のいずれかを反転させる反転手段を備えたことを特徴とする請求項1又は請求項2記載の転写装置。 3. The transfer apparatus according to claim 1, further comprising a reversing unit for reversing either the transfer member or the member to be transferred.
- 前記可撓性を有する一方の部材が前記他方の部材の一端の角部で折曲されるように該可撓性を有する一方の部材の一端を該角部の高さよりも高い位置に保持する第1昇降ロールを備えたことを特徴とする請求項1~3のいずれか一項に記載の転写装置。 One end of the one flexible member is held at a position higher than the height of the corner so that the one flexible member is bent at the corner of one end of the other member. The transfer device according to any one of claims 1 to 3, further comprising a first lifting roll.
- 前記可撓性を有する一方の部材を前記斜め方向に向けて保持する第2昇降ロールを備えたことを特徴とする請求項1~4のいずれか一項に記載の転写装置。 The transfer device according to any one of claims 1 to 4, further comprising a second lifting roll for holding the one flexible member in the oblique direction.
- 前記可撓性を有する一方の部材の繰り出し側を案内し第1のテンションセンサーを有する繰り出し側ガイドロールと、
前記可撓性を有する一方の部材の巻き取り側を案内し第2のテンションセンサーを有する巻き取り側ガイドロールと、
前記可撓性を有する一方の部材を繰り出しする繰り出しロールと、
前記可撓性を有する一方の部材を巻き取りする巻き取りロールとを備え、
前記第1のテンションセンサーで検出した張力を基に前記繰り出しロールを駆動し、
前記第2のテンションセンサーで検出した張力を基に前記巻き取りロールを駆動することを特徴とする請求項1~5のいずれか一項に記載の転写装置。 A feeding-side guide roll that guides a feeding side of the one flexible member and has a first tension sensor;
A winding-side guide roll that guides the winding side of one of the flexible members and has a second tension sensor;
A feeding roll for feeding out one of the flexible members;
A winding roll for winding the one member having flexibility,
Driving the feeding roll based on the tension detected by the first tension sensor;
The transfer device according to any one of claims 1 to 5, wherein the winding roll is driven based on a tension detected by the second tension sensor. - 前記硬化手段は、紫外線発光素子を直線状に配列したUV照射機構を備えたことを特徴とする請求項1~6のいずれか一項に記載の転写装置。 The transfer device according to any one of claims 1 to 6, wherein the curing means includes a UV irradiation mechanism in which ultraviolet light emitting elements are linearly arranged.
- 前記可撓性を有する一方の部材の巻き出し寸法を計測する測長手段と、
該測長手段で計測された巻き出し寸法を基に前記可撓性を有する一方の部材を切断する切断手段を備えたことを特徴とする請求項1~7のいずれか一項に記載の転写装置。 A length measuring means for measuring the unwinding dimension of the one flexible member;
The transfer according to any one of claims 1 to 7, further comprising a cutting means for cutting the one flexible member based on the unwinding dimension measured by the length measuring means. apparatus. - 剛性若しくは可撓性を有する転写部材の所定エリア、又は、剛性若しくは可撓性を有する被転写部材の所定エリアの内のいずれかの所定エリアに対し硬化性樹脂を塗布し、
前記転写部材と前記被転写部材とを前記硬化性樹脂を介在して互いに転写し、
前記硬化性樹脂を硬化させた後に、
前記転写された前記転写部材と前記被転写部材とを互いに剥離させることで樹脂パターンを作成する樹脂パターン製造方法であって、
前記転写の工程において、
前記転写部材又は前記被転写部材の内の可撓性を有する一方の部材に対し加圧ローラを押し当てつつ該加圧ローラを前記転写部材又は前記被転写部材の内の他方の部材に対して平行に送り走査し、
前記可撓性を有する一方の部材を該加圧ローラを支点として前記走査方向より前方斜め方向に向けて所定の張力で牽引することを特徴とする樹脂パターン製造方法。 Applying a curable resin to a predetermined area of the transfer member having rigidity or flexibility, or to a predetermined area of the predetermined area of the transfer target member having rigidity or flexibility,
The transfer member and the transferred member are transferred to each other with the curable resin interposed therebetween,
After curing the curable resin,
A resin pattern manufacturing method for creating a resin pattern by peeling the transferred member and the transferred member from each other,
In the transfer step,
The pressure roller is pressed against the other member of the transfer member or the member to be transferred while pressing the pressure roller against the flexible member of the transfer member or the member to be transferred. Scan in parallel,
A method for producing a resin pattern, wherein the one flexible member is pulled with a predetermined tension from the pressure roller toward a front oblique direction with respect to the scanning direction. - 剛性若しくは可撓性を有する転写部材の所定エリア、又は、剛性若しくは可撓性を有する被転写部材の所定エリアの内のいずれかの所定エリアに対し硬化性樹脂を塗布し、
前記転写部材と前記被転写部材とを前記硬化性樹脂を介在して互いに転写し、
前記硬化性樹脂を硬化させた後に、
前記転写された前記転写部材と前記被転写部材とを互いに剥離させることで樹脂パターンを作成する樹脂パターン製造方法であって、
前記剥離の工程において、
前記転写部材又は前記被転写部材の内の可撓性を有する一方の部材に対し加圧ローラを押し当てつつ該加圧ローラを前記転写部材又は前記被転写部材の内の他方の部材に対して平行に戻り走査し、
前記可撓性を有する一方の部材を該加圧ローラを支点として前記走査方向より前方斜め方向に向けて所定の張力で牽引することを特徴とする樹脂パターン製造方法。 Applying a curable resin to a predetermined area of the transfer member having rigidity or flexibility, or to a predetermined area of the predetermined area of the transfer target member having rigidity or flexibility,
The transfer member and the transferred member are transferred to each other with the curable resin interposed therebetween,
After curing the curable resin,
A resin pattern manufacturing method for creating a resin pattern by peeling the transferred member and the transferred member from each other,
In the peeling step,
The pressure roller is pressed against the other member of the transfer member or the member to be transferred while pressing the pressure roller against the flexible member of the transfer member or the member to be transferred. Scan back in parallel,
A method for producing a resin pattern, wherein the one flexible member is pulled with a predetermined tension from the pressure roller toward a front oblique direction with respect to the scanning direction.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012545751A JPWO2012070546A1 (en) | 2010-11-22 | 2011-11-21 | Transfer apparatus and resin pattern manufacturing method |
KR1020137012067A KR20130133184A (en) | 2010-11-22 | 2011-11-21 | Transfer device and method for producing resin pattern |
CN2011800550330A CN103210474A (en) | 2010-11-22 | 2011-11-21 | Transfer device and method for producing resin pattern |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010260387 | 2010-11-22 | ||
JP2010-260387 | 2010-11-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2012070546A1 true WO2012070546A1 (en) | 2012-05-31 |
Family
ID=46145888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2011/076833 WO2012070546A1 (en) | 2010-11-22 | 2011-11-21 | Transfer device and method for producing resin pattern |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPWO2012070546A1 (en) |
KR (1) | KR20130133184A (en) |
CN (1) | CN103210474A (en) |
TW (1) | TW201228845A (en) |
WO (1) | WO2012070546A1 (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014010517A1 (en) * | 2012-07-10 | 2014-01-16 | 旭硝子株式会社 | Imprint method, and imprinting device |
JP2014054735A (en) * | 2012-09-11 | 2014-03-27 | Toshiba Mach Co Ltd | Transfer device and molded material |
JP2014203897A (en) * | 2013-04-02 | 2014-10-27 | キヤノン株式会社 | Imprint device, imprint method and method of manufacturing article |
JP2014213552A (en) * | 2013-04-26 | 2014-11-17 | 株式会社日立産機システム | Nanoimprint method and apparatus therefor |
JP2014213551A (en) * | 2013-04-26 | 2014-11-17 | 株式会社日立産機システム | Nanoimprint method and apparatus therefor |
JP2014226877A (en) * | 2013-05-24 | 2014-12-08 | パナソニック株式会社 | Fine pattern formation method and fine pattern formation device |
WO2015072572A1 (en) * | 2013-11-18 | 2015-05-21 | Scivax株式会社 | Mold release device and mold release method |
KR20150127092A (en) * | 2013-03-15 | 2015-11-16 | 캐논 나노테크놀로지즈 인코퍼레이티드 | Nano imprinting with reusable polymer template with metallic or oxide coating |
JP2018140577A (en) * | 2017-02-28 | 2018-09-13 | 東芝機械株式会社 | Transfer apparatus and transfer method |
JP2019174755A (en) * | 2018-03-29 | 2019-10-10 | 株式会社オーク製作所 | Exposure apparatus |
CN110320765A (en) * | 2018-03-29 | 2019-10-11 | 株式会社Orc制作所 | Exposure device |
JP2021028933A (en) * | 2019-08-09 | 2021-02-25 | Aiメカテック株式会社 | Microstructure transfer device and microstructure transfer method |
JP7475646B2 (en) | 2020-04-24 | 2024-04-30 | Aiメカテック株式会社 | Microstructure transfer device and microstructure transfer method |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102929100B (en) * | 2012-11-22 | 2014-11-19 | 南昌欧菲光纳米科技有限公司 | Device and method for implementing alignment reel-to-reel UV (ultraviolet) forming |
WO2016181831A1 (en) * | 2015-05-13 | 2016-11-17 | 凸版印刷株式会社 | Method for producing relief patterned body, device for producing same, and sticker |
KR101877772B1 (en) * | 2016-12-30 | 2018-07-13 | 주식회사 에스에프에이 | Imprinting apparatus |
JP6397553B1 (en) | 2017-10-25 | 2018-09-26 | 東芝機械株式会社 | Transfer device |
CN109709766B (en) | 2017-10-25 | 2023-06-16 | 东芝机械株式会社 | Transfer printing device |
KR102165656B1 (en) * | 2017-10-25 | 2020-10-14 | 시바우라 기카이 가부시키가이샤 | Transfer apparatus and transfer method |
JP7245973B2 (en) * | 2019-02-04 | 2023-03-27 | パナソニックIpマネジメント株式会社 | PATTERN FORMATION METHOD AND APPARATUS |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63293010A (en) * | 1987-05-26 | 1988-11-30 | Bridgestone Corp | Method of taking-out vulcanized rubber product from mold |
JP2001058352A (en) * | 1999-06-14 | 2001-03-06 | Dainippon Printing Co Ltd | Contact transfer method and apparatus and transfer mold |
JP2004288783A (en) * | 2003-03-20 | 2004-10-14 | Hitachi Ltd | Nano printing apparatus and microstructure transfer method |
JP2008290330A (en) * | 2007-05-24 | 2008-12-04 | Oji Paper Co Ltd | Device and method for producing nanoimprint sheet |
JP2008310917A (en) * | 2007-06-18 | 2008-12-25 | Ricoh Co Ltd | Multi-layer optical disc, and recording and reproducing method thereof |
WO2009148138A1 (en) * | 2008-06-05 | 2009-12-10 | 旭硝子株式会社 | Mold for nanoimprinting, process for producing the same, and processes for producing molded resin having fine rugged structure on surface and for producing wire-grid polarizer |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004333616A (en) * | 2003-05-01 | 2004-11-25 | Fuji Photo Film Co Ltd | Apparatus and method for transferring photosensitive resin |
-
2011
- 2011-11-21 WO PCT/JP2011/076833 patent/WO2012070546A1/en active Application Filing
- 2011-11-21 KR KR1020137012067A patent/KR20130133184A/en not_active Application Discontinuation
- 2011-11-21 CN CN2011800550330A patent/CN103210474A/en active Pending
- 2011-11-21 JP JP2012545751A patent/JPWO2012070546A1/en not_active Withdrawn
- 2011-11-22 TW TW100142711A patent/TW201228845A/en unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63293010A (en) * | 1987-05-26 | 1988-11-30 | Bridgestone Corp | Method of taking-out vulcanized rubber product from mold |
JP2001058352A (en) * | 1999-06-14 | 2001-03-06 | Dainippon Printing Co Ltd | Contact transfer method and apparatus and transfer mold |
JP2004288783A (en) * | 2003-03-20 | 2004-10-14 | Hitachi Ltd | Nano printing apparatus and microstructure transfer method |
JP2008290330A (en) * | 2007-05-24 | 2008-12-04 | Oji Paper Co Ltd | Device and method for producing nanoimprint sheet |
JP2008310917A (en) * | 2007-06-18 | 2008-12-25 | Ricoh Co Ltd | Multi-layer optical disc, and recording and reproducing method thereof |
WO2009148138A1 (en) * | 2008-06-05 | 2009-12-10 | 旭硝子株式会社 | Mold for nanoimprinting, process for producing the same, and processes for producing molded resin having fine rugged structure on surface and for producing wire-grid polarizer |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014010517A1 (en) * | 2012-07-10 | 2014-01-16 | 旭硝子株式会社 | Imprint method, and imprinting device |
JP2014054735A (en) * | 2012-09-11 | 2014-03-27 | Toshiba Mach Co Ltd | Transfer device and molded material |
KR102170524B1 (en) * | 2013-03-15 | 2020-10-27 | 캐논 나노테크놀로지즈 인코퍼레이티드 | Nano imprinting with reusable polymer template with metallic or oxide coating |
KR20150127092A (en) * | 2013-03-15 | 2015-11-16 | 캐논 나노테크놀로지즈 인코퍼레이티드 | Nano imprinting with reusable polymer template with metallic or oxide coating |
JP2016514903A (en) * | 2013-03-15 | 2016-05-23 | キャノン・ナノテクノロジーズ・インコーポレーテッド | Nanoimprinting with reusable polymer templates with metal or oxide coatings |
JP2014203897A (en) * | 2013-04-02 | 2014-10-27 | キヤノン株式会社 | Imprint device, imprint method and method of manufacturing article |
JP2014213551A (en) * | 2013-04-26 | 2014-11-17 | 株式会社日立産機システム | Nanoimprint method and apparatus therefor |
JP2014213552A (en) * | 2013-04-26 | 2014-11-17 | 株式会社日立産機システム | Nanoimprint method and apparatus therefor |
JP2014226877A (en) * | 2013-05-24 | 2014-12-08 | パナソニック株式会社 | Fine pattern formation method and fine pattern formation device |
WO2015072572A1 (en) * | 2013-11-18 | 2015-05-21 | Scivax株式会社 | Mold release device and mold release method |
JP2018140577A (en) * | 2017-02-28 | 2018-09-13 | 東芝機械株式会社 | Transfer apparatus and transfer method |
JP2019174755A (en) * | 2018-03-29 | 2019-10-10 | 株式会社オーク製作所 | Exposure apparatus |
CN110320765A (en) * | 2018-03-29 | 2019-10-11 | 株式会社Orc制作所 | Exposure device |
JP7040981B2 (en) | 2018-03-29 | 2022-03-23 | 株式会社オーク製作所 | Exposure device |
TWI816763B (en) * | 2018-03-29 | 2023-10-01 | 日商鷗爾熙製作所股份有限公司 | Exposure device |
JP2021028933A (en) * | 2019-08-09 | 2021-02-25 | Aiメカテック株式会社 | Microstructure transfer device and microstructure transfer method |
JP7475646B2 (en) | 2020-04-24 | 2024-04-30 | Aiメカテック株式会社 | Microstructure transfer device and microstructure transfer method |
Also Published As
Publication number | Publication date |
---|---|
JPWO2012070546A1 (en) | 2014-05-19 |
CN103210474A (en) | 2013-07-17 |
TW201228845A (en) | 2012-07-16 |
KR20130133184A (en) | 2013-12-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2012070546A1 (en) | Transfer device and method for producing resin pattern | |
US7654815B2 (en) | Belt-shaped mold and nanoimprint system using the belt-shaped mold | |
JP6032492B2 (en) | Fine pattern forming method and fine pattern forming apparatus | |
US20140252679A1 (en) | Large-scale imprint apparatus and method | |
EP2848391B1 (en) | Transfer method and thermal nanoimprint device | |
JP6421980B2 (en) | Imprint device | |
JP5499668B2 (en) | Imprint mold and pattern forming method using the mold | |
JP6774178B2 (en) | Equipment for processing substrates and manufacturing methods for articles | |
WO2011114855A1 (en) | Sheet-mold transfer/positioning device | |
WO2011111546A1 (en) | Apparatus for detecting position of sheet-like mold, transfer apparatus and transfer method | |
JP6694101B1 (en) | Fine structure transfer apparatus and fine structure transfer method | |
JP2010269580A (en) | Imprint apparatus and manufacturing method for article | |
WO2011105484A1 (en) | Transfer system and transfer method | |
JP2013038117A (en) | Transfer head for transferring micropattern and method for forming micropattern using the same | |
CN109521642A (en) | The method of imprinting apparatus and manufacture display panel | |
WO2011114854A1 (en) | Transfer device | |
JP2007073696A (en) | Pattern forming method, pattern forming apparatus and pattern-formed film | |
JP2016197672A (en) | Imprint method and imprint device | |
JP2015159179A (en) | Method and device for producing film-shaped mold, and film-shaped mold | |
TW201334948A (en) | Imprinting apparatus and imprinting method | |
JP2008194976A (en) | Manufacturing method of shaped body for optical sheet, manufacturing device of shaped body for optical sheet, and shaped body for optical sheet | |
US20190105830A1 (en) | Apparatus for manufacturing molded body assembly | |
JP7104577B2 (en) | Flattening layer forming apparatus, flattening layer manufacturing method, and article manufacturing method | |
JP5931650B2 (en) | Transfer apparatus and transfer method | |
KR102574036B1 (en) | Imprinting apparatus and method of imprinting using the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 11843840 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2012545751 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20137012067 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 11843840 Country of ref document: EP Kind code of ref document: A1 |