KR20130133184A - Transfer device and method for producing resin pattern - Google Patents

Abstract

Provided are a transfer device and a resin pattern manufacturing method capable of stably and continuously forming a flexible mold made of a resin. In the state where the resin application area 35 of the flexible base material 9 and the rigid mold member 23 were replaced, the pressure roller 31 is moved to the Y-axis forward direction while pressing the pressure roller 31 at a predetermined pressure in the Z-axis direction from below. At this time, the right end side of the flexible base 9 is pulled toward the right inclined downward with a constant tension. In this state, if the photocurable resin 47 of the flexible base material 9 is pressed against the rigid mold member 23 little by little, it has not yet been transferred between the convex portion and the convex portion of the rigid mold member 23. Air is pushed out of the gap of the outside. Therefore, even if the present transfer device 10 is not placed under a reduced pressure environment, bubbles do not remain on the photocurable resin 47 side.

Description

TRANSFER DEVICE AND METHOD FOR PRODUCING RESIN PATTERN}

TECHNICAL FIELD The present invention relates to a transfer apparatus and a resin pattern manufacturing method, and more particularly, to a transfer apparatus and a resin pattern manufacturing method capable of stably and continuously forming a flexible mold made of a resin.

Conventionally, the nanoimprint method which transfers this fine uneven structure to resist or resin using the mold in which the fine uneven structure of nanometer order was formed in the surface is known. This nanoimprint method has recently attracted attention because the processing time is shorter than the conventional manufacturing method using photolithography and etching, the device cost and material cost required for forming the fine concavo-convex structure are minimized, and the productivity is also excellent.

In addition, the photolithography and etching methods generally feature sheet-fed processes based on rigid (i.e., rigid) substrates such as silicon wafers and quartz substrates, whereas nanoimprints are based on rigid substrates. It is a characteristic that not only the sheet | leaf process but the coordination with the roll-to-roll process based on flexible substrates, such as a resin film, are favorable.

On the other hand, the roll-to-roll process requires a roll-shaped mold, but since it is very difficult to form a nano-order pattern in a roll form, a method of winding a thin, bent nickel mold, which is about 0.2 mm thick, by using a transfer roll, etc. Is being proposed.

The nickel mold used here can be manufactured by forming a resist pattern using photolithography on rigid substrates, such as a silicon wafer, and taking the replication by nickel electroforming. In addition, in this case, after forming a resist pattern, you may obtain replication by nickel electroforming from the etched fine pattern.

In addition, in the nanoimprint, defects such as scratches and stains of the mold become defects of the transfer article, and therefore, it is necessary to replace the mold as soon as they occur. Therefore, a mold obtained cheaper than a nickel mold is required.

Therefore, it is desired that the mold for nanoimprint used in the roll-to-roll process can be wound on a transfer roll, which is excellent in durability and inexpensive. Therefore, using a flexible mold made of a resin made of a material such as quartz or silicon and having a nanoimprint pattern on the film once from the disk of the flat plate has been performed (Patent Document 1).

International Publication No. 2009/148138

By the way, in order to manufacture a flexible mold made of resin, various methods have been proposed.

For example, between the parallel flat and spaced stages, the resin film and mold coated with the photocurable resin are fixed in a state where the pattern surface and the photocurable resin coated surface face each other, and one stage is precisely placed on the opposite stage. After pressing firmly while maintaining parallelism, the pattern is formed on the resin film by irradiating UV light, or the resin film coated with the photocurable resin and the disc of the mold face each other so that the pattern surface and the photocurable resin coated surface face each other. After superimposing and installing, pressing a pressure roll with respect to a resin film and scanning, the method of irradiating UV light and forming a pattern on a resin film, etc. are mentioned.

In the case of the former method, in-plane press unevenness can be suppressed by lowering the roughness of the surface of the stage. However, when the area of the mold is large, it is necessary to increase the press pressure, resulting in a problem that the apparatus becomes large. . Moreover, when it transfers by the mold, the air which exists between the convex part and convex part of a mold is easy to remain on the surface of a resin pattern as a bubble, and there existed a possibility that it might become a pattern defect. A method of transferring under reduced pressure has been proposed as a method of not remaining bubbles. However, if the mold size increases, the chamber size for accommodating it increases, and a large capacity vacuum pump is required. have.

In the latter method, the pressing unevenness of the pressing roll is a cause of poor transfer.

As shown in FIG. 11, the unevenness from the mold (not shown) is transferred to the resin 3 applied on the film 1 serving as the substrate after the transfer, but the residual film portion of the resin 3 is caused by this unevenness (drawings) The height of the residual film is represented by H), and the height does not become uniform depending on the place, which may cause film thickness nonuniformity.

This invention is made | formed in view of such a conventional subject, and an object of this invention is to provide the transfer apparatus and resin pattern manufacturing method which can stably continuously shape a flexible mold made of resin.

Accordingly, the present invention (claim 1) relates to a rigid or flexible transfer member, a transfer member having rigidity or flexibility, and a curable resin with respect to at least one predetermined area of the transfer member or transfer member. Application means for applying a film, transfer means for transferring the transfer member and the transfer member to each other via the curable resin, curing means for curing the curable resin, the transferred transfer member and the transfer member A transfer apparatus comprising peeling means for peeling each other, wherein at least one of the transfer member and the transfer member is a member having flexibility, and the transfer means is flexible among the transfer member or the transfer member. While pressing firmly against one of the members having a parallel to the other of the transfer member or the transfer member And a transmission scan the one-side member having a pressure roller and said flexible, characterized in that by the pressure roller as a supporting point with a tension generating means toward the front oblique direction from the scanning direction of traction at a predetermined tension.

The transfer member is a member having a mold having a concavo-convex pattern applied to its surface.

Then, the pressing roller is pressed against the one member having flexibility in the transfer member or the transfer member, and is conveyed and scanned in parallel with the other member among the transfer member or the transfer member. At this time, one member having flexibility is pulled at a predetermined tension from the scanning direction toward the forward inclined direction with the pressure roller as the supporting point.

In this way, when one of the transfer member or the transfer member is flexibly pressed against the other member of the transfer member or the transfer member, air leaks to the outside from a slight gap where the resin has not yet been transferred. Therefore, even if it does not process in a pressure-reduced environment, air bubbles do not remain on the resin side.

Moreover, in this invention, the said uneven | corrugated pattern is transferred to curable resin by pressing the uneven | corrugated pattern of a transfer member to curable resin. Thereafter, the pattern shape can be maintained by curing the curable resin and releasing the mold.

Moreover, this invention (claim 2) is hard with respect to at least one predetermined area of the transfer member which has rigidity or flexibility, the transfer member which has rigidity or flexibility, and the said transfer member or said transfer member. Application means for applying a resin, transfer means for transferring the transfer member and the transfer member to each other via the curable resin, curing means for curing the curable resin, the transferred transfer member and the transfer target A transfer apparatus comprising peeling means for peeling members from each other, wherein at least one of the transfer member and the transfer member is a member having flexibility, and the peeling means is flexible among the transfer member or the transfer member. Returning in parallel with the other member of the said transfer member or the said to-be-transmitted member, pressing firmly with respect to the one member which has sex. And a tension generating means for pulling the flexible roller to scan, and the one member having the flexibility as a supporting point with a predetermined tension from the scanning direction toward the forward inclined direction.

The transfer member is a member having a mold having a concavo-convex pattern applied to its surface.

Then, the pressing roller is pressed against the one member having flexibility in the transfer member or the transfer member, and is scanned in parallel with the other member in the transfer member or the transfer member. At this time, one member having flexibility is pulled at a predetermined tension from the scanning direction toward the forward inclined direction with the pressure roller as the supporting point.

By configuring in this way, one member which has more flexibility among the transfer member or the to-be-transfer member than the other member of a transfer member or the to-be-transfer member can be peeled smoothly little by little from a fixed position.

In addition, the present invention (claim 3) is an invention of a transfer apparatus, and comprises a reversing means for inverting either the transfer member or the transfer member.

Thereby, the installation work of a transfer member or a transfer member can be performed easily.

In addition, the present invention (claim 4) is an invention of a transfer apparatus, wherein one end of one member having flexibility is higher than the height of the corner portion so that the one member having the flexibility is bent at the corner portion of one end of the other member. It comprised with the 1st lifting roll holding in a position.

Since the flexible one member is bent at the corner of one end of the other member, the transfer is completely performed from the transfer start point, and it is possible to prevent the close side of the pressure roller from being peeled off during the pressure roller scan.

Moreover, this invention (claim 5) was comprised in the invention of the transfer apparatus, Comprising: The 2nd lifting roll which hold | maintains the said flexible member toward the said inclination direction was comprised.

Moreover, this invention (claim 6) is invention of the transfer apparatus, The feeding side guide roll which guides the feeding side of the said one member which has the said flexibility, and has a 1st tension sensor, and the winding side of the one member which has the said flexibility And a winding-up guide roll having a second tension sensor, a feeding roll for feeding the one member having the flexibility, and a winding roll for winding the one member having the flexibility, wherein the first tension sensor is provided. The feeding roll is driven based on the tension detected by, and the winding roll is driven based on the tension detected by the second tension sensor.

Moreover, this invention (claim 7) is invention of the transfer apparatus, Comprising: The said hardening means comprised the light irradiation mechanism which arranged the ultraviolet light emitting element in linear form.

Since the ultraviolet light emitting elements are arranged in a straight line, it is inexpensive unlike the arrangement of the ultraviolet light emitting elements on one surface. In addition, when scanning at a constant speed, no deviation occurs in the amount of irradiation light in the scanning direction. Moreover, the hardening means can also be based on heat.

Moreover, this invention (claim 8) is invention of the transfer apparatus, Comprising: The measuring means which measures the unwinding dimension of the said one member which has said flexibility, and the one which has the said flexibility based on the unwinding dimension measured by the measuring means. It comprised by the cutting means which cut | disconnects a member.

Moreover, this invention (claim 9) apply | coats curable resin to the predetermined area of the predetermined area of the transfer member which has rigidity or flexibility, or the predetermined area of the transfer member which has rigidity or flexibility, A resin pattern manufacturing method for producing a resin pattern by transferring a transfer member and the transfer member to each other via the curable resin, and curing the curable resin, then peeling the transfer member and the transfer member from each other. In the transfer step, the pressing roller is transferred in parallel to the transfer member or the other member of the transfer member while pressing the pressing roller against the flexible member of the transfer member or the transfer member. Scanning, and the said one member which has the said flexibility is made into the said support roller the support point Traction is carried out from the scanning direction toward the front oblique direction with a predetermined tension.

Moreover, this invention (claim 10) apply | coats curable resin to the predetermined area of the predetermined area of the transfer member which has rigidity or flexibility, or the predetermined area of the transfer member which has rigidity or flexibility, A resin pattern manufacturing method for producing a resin pattern by transferring a transfer member and the transfer member to each other via the curable resin, and curing the curable resin, then peeling the transfer member and the transfer member from each other. For example, in the peeling step, the pressing roller is returned in parallel to the transfer member or the other member of the transfer member while pressing the pressing roller against the flexible member of the transfer member or the transfer member. Scanning, and the said one member which has the said flexibility is made into the said support roller the support point Traction is carried out from the scanning direction toward the front oblique direction with a predetermined tension.

As described above, according to the present invention, the pressing roller is pressed against the transfer member or the transfer member in a flexible manner while being pressed against the transfer member or the transfer member in parallel to the other member of the transfer member, thereby providing flexibility. Since the one member having the pressure roller is used as a supporting point to be pulled at a predetermined tension from the scanning direction toward the forward inclined direction, the member having the transfer member or the transfer member has flexibility with respect to the other member. One member can be pressed little by little, and air is pushed outward from the some gap which resin has not yet transferred. Therefore, even if it does not process in a pressure-reduced environment, air bubbles do not remain on the resin side.

1 is a front view of a transfer apparatus as an embodiment of the present invention.
FIG. 2 is a sectional view seen from a direction AA in FIG. 1. FIG.
3 is a plan view of the transfer apparatus as an embodiment of the present invention.
4 is a conceptual diagram of the transfer of the present invention.
5 is a diagram illustrating respective processing steps of the transfer apparatus.
FIG. 6 is a diagram (details of transfer) showing respective processing steps of the transfer apparatus. FIG.
7 is a diagram (detail of peeling) showing respective treatment steps of the transfer apparatus.
It is a figure explaining the diversity of embodiment of this invention.
9 is an application example of a roll-to-roll type nanoimprint transfer system.
10 is an example of a flexible substrate having a plurality of coating areas.
It is a figure which shows the state of the base material after the conventional transfer.

Hereinafter, embodiments of the present invention will be described. The front view of the transfer apparatus which is embodiment of this invention is shown in FIG. 1, the sectional drawing seen from the arrow direction A-A in FIG. 1 is shown in FIG.

First, as a 1st Embodiment, the form whose transfer member is a rigid mold and the to-be-transfer member is the flexible base material 9 is demonstrated.

1 to 3, a feeding side guide roll for guiding the flexible substrate 9 on the feeding roll 11 on which the flexible substrate 9 is wound and the right side thereof on the left end of the transfer device 10. (13) is attached. On the other hand, the winding roll 15 which winds up the flexible base material 9, and the winding side guide roll 17 which guides this flexible base material 9 on the left side are attached to the right end of this transfer apparatus 10. As shown in FIG. .

The feeding side guide roll 13 and the winding side guide roll 17 are attached so that the height of the Z-axis direction becomes the same. Therefore, when paper has passed through the flexible substrate 9, the flexible substrate 9 is spread out horizontally in the Y-axis direction between the feeding side guide roll 13 and the winding side guide roll 17. .

The feeding side guide roll 13 and the winding side guide roll 17 are provided with tension sensors 19 and 21, respectively, and are shown for driving the feeding roll 11 based on the tension detected by the tension sensor 19. Torque control is performed for a motor that is not used. On the other hand, torque control is performed with respect to the motor which is not shown for driving the winding rolls 15 based on the tension detected by the tension sensor 21. This makes it possible to adjust the tension of the flexible base 9.

In the center part of the transfer apparatus 10, the vacuum adsorption stage 20 which can be evacuated from the vacuum pump which is not shown in figure is arrange | positioned and formed. A plurality of small holes are formed on one side of the vacuum suction stage 20, and outside air is sucked to the vacuum pump side through the small holes.

The vacuum suction stage 20 is capable of freely rotating around the horizontal axis 25, and is capable of mounting the rigid mold member 23 from above in the open state around the horizontal axis 25. . The mounted rigid mold member 23 is fixed to the vacuum adsorption stage 20 by suction in the small pores of the vacuum adsorption stage 20.

The left and right sides of the vacuum suction stage 20 and the rigid mold member 23 when laid horizontally can sandwich the flexible substrate 9 between the upper and lower sides in the Z axis direction, and can freely move up and down in the Z axis direction. The first 1st lifting rolls 27a and 27b and the 2nd lifting rolls 29a and 29b are arrange | positioned, respectively.

On the lower side of the rigid mold member 23 with the flexible base 9 interposed therebetween, the pressing roller 31 is formed so as to be able to move freely at a constant speed horizontally toward the Y axis direction. Moreover, UV irradiation lamp which arrange | positioned ultraviolet light emitting elements, such as LED which is not shown in the X-axis direction in linear form, in the lower side between the flexible base material 9 of the rigid mold member 23 as shown in FIG. 33) is provided as a light irradiation mechanism, and this UV irradiation lamp 33 can move freely at a constant speed horizontally toward the Y axis direction.

A resin coating area 35 is formed in the left side between the vacuum adsorption stage 20 and the first lifting rolls 27a and 27b of the rigid mold member 23 when horizontally laid, and the resin is placed in this area. The resin application nozzle 37 to be applied is controlled to be positioned by the XYZ axis robot 39.

On the winding-up guide roll 17, the measurement system not shown is arrange | positioned, and the moving distance of the flexible base material 9 can be measured. And the flexible base material 9 is conveyed to the cutting stage 40 shown in FIG. 3 at the stage by which transfer of predetermined length is complete | finished, and can cut the flexible base material 9 by the film cutter which is not shown in figure. It is supposed to be.

Next, operation | movement of embodiment of this invention is demonstrated.

4 shows a transfer conceptual diagram of the present invention. In Fig. 4A, the rigid mold member 23 having the pattern portion 43 on which the uneven pattern is applied is placed on the vacuum adsorption stage 20, which is not shown, and the rigid mold member 23 is vacuum suctioned. It is in the state adsorbed to the stage 20. The material of the rigid mold member 23 is quartz, silicon, nickel or the like.

On the other hand, the photocurable resin 47 is apply | coated to the resin coating area 35 of the flexible base material 9 by the nozzle 37 for resin coating. As a material of the flexible base material 9, a thermoplastic resin or a thermosetting resin film can be used here.

As the material of the photocurable resin 47, a photocurable composition which can be photocured by photoradical polymerization can be used. As a method of apply | coating the photocurable resin 47, it is possible with a die coat, a bar coat, a blade coat, a knife coat, a roll coat, a spray coat, an inkjet, etc.

Instead of the photocurable resin 47, a thermosetting resin which can be thermally cured by thermal radical polymerization can also be used. In that case, instead of the UV irradiation lamp 33, a linear infrared heater etc. are provided as a heating apparatus in a X-axis direction, and this infrared heater may be scanned at a constant speed horizontally toward a Y-axis direction.

The surface of the rigid mold member 23 may be surface-treated in advance in order to improve mold release property. In this surface treatment, it is preferable to contain the compound which has a fluoroalkyl group (it may have an ether oxygen atom), a silicone chain, or a C4-C24 long chain alkyl group, and contains the compound which has a fluoroalkyl group. Is particularly preferred.

In FIG. 4B, after the rigid mold member 23 is placed on the vacuum adsorption stage 20 (not shown), the vacuum adsorption stage 20 is inverted and replaced with the flexible substrate 9. Thus, since the rigid mold member 23 needs to be reversed after mounting, the operation is easy.

At this time, the resin coating area 35 of the flexible base material 9 is wider than the whole pattern part 43 of the rigid mold member 23, and is arrange | positioned narrower than the external shape of the rigid mold member 23. As shown in FIG. That is, as shown in FIG. 4A, the resin coating area 35 is formed inside the flexible base 9, and the rigid mold member 23 is formed outside the surface of the resin coating area 35. It is.

4C is a transfer step. Thus, in the state which replaced the resin coating area 35 of the flexible base material 9 and the rigid mold member 23, it moves to the Y-axis positive direction, pressing the pressure roller 31 at a predetermined pressure in the Z-axis direction from below. Let's do it. At this time, the right end side of the flexible base 9 is pulled toward the right inclined downward with a constant tension.

In this state, when the photocurable resin 47 on the flexible base material 9 is pressurized little by little with respect to the rigid mold member 23, it has not yet been transferred between the convex part and the convex part of the rigid mold member 23. Air leaks from the gap between the outside. Therefore, even if the present transfer device 10 is not placed under a reduced pressure environment, bubbles do not remain on the photocurable resin 47 side.

In addition, as shown in FIG.4 (D), if the photocurable resin 47 is hardened by UV irradiation, but ultraviolet rays are permeable, either of the rigid mold member 23 side and the flexible base material 9 side You may investigate from the.

Thereafter, as shown in FIG. 4E, the photocurable resin 47 of the flexible substrate 9 is peeled off from the rigid mold member 43. In this process, the pressing roller 31 is moved from the lower side in the Y-axis negative direction as opposed to the transfer step of FIG. 4C while pressing the pressure roller 31 at a predetermined pressure in the Z-axis direction. At this time, the right end side of the flexible base 9 is pulled toward the right inclined downward with a constant tension. Thereby, the position of a peeling part is kept constant and peeling rate is kept constant, As a result, since peeling is made gradually, smooth peeling is possible.

Next, each processing process of the transfer apparatus will be described in detail with reference to Figs. 5, 6 and 7. 5 (A) is a resin substrate passing step. The 1st lifting rolls 27a and 27b and the 2nd lifting rolls 29a and 29b are opened, respectively, and the flexible base material 9 is Y between the feeding side guide roll 13 and the winding side guide roll 17. In FIG. It is pulled in a balanced state at a predetermined tension horizontally in the axial direction.

Next, in the resin application | coating process of FIG. 5 (B), the 1st lifting rolls 27a and 27b and the 2nd lifting rolls 29a and 29b are closed, respectively. In this state, the resin coating nozzle 37 applies resin to the inside of the resin coating area 35 while being moved by the XYZ axis robot 39. At this time, one end of the flexible base material 9 is fixed by the first lifting rolls 27a and 27b, while the other end has a constant tension with the tension sensor 19, so that the coating film thickness is kept uniform. do.

Next, in the sheet conveying process of FIG. 5C, the photocurable resin of the flexible base material 9 in the state which opened the 1st lifting rolls 27a and 27b and the 2nd lifting rolls 29a and 29b, respectively. 47) The flexible substrate 9 is moved in the Y-axis forward direction to the position where the surface is joined with the surface of the rigid mold member 23.

Next, in the transfer process of FIG. 5D, the 1st lifting rolls 27a and 27b and the 2nd lifting rolls 29a and 29b are closed again. At this time, rather than pressurizing the flexible base material 9 to the rigid mold member 23 at once, it presses a little by little by scanning the pressure roller 31. FIG.

That is, as shown in the detailed explanatory drawing of the transfer process of FIG. 6, first, the 1st lifting rolls 27a and 27b are raised in FIG. 6 (A), and the 2nd lifting rolls 29a and 29b are lowered. . As the first lifting rolls 27a and 27b rise, the flexible base 9 is bent into a "<" ruler ("L" ruler) at the bottom edge of the rigid mold member 23.

In this state, the pressure roller 31 is moved at a constant speed in the Y-axis positive direction while pressing the pressure roller 31 at a predetermined pressure in the Z-axis direction from below. At this time, the right end side of the flexible base material 9 is pulled toward the right inclined downward by a constant tension by the tension sensor 21 of the rewinding guide roller 17.

In this state, when the photocurable resin 47 of the flexible base material 9 is pressed against the rigid mold member 23 little by little with the pressure roller 31, between the convex part and the convex part of the rigid mold member 23 Air leaks out of some gap that has not yet been transferred.

Moreover, in this way, in the bottom edge part of the rigid mold member 23, by bending with the "<" ruler (the "L" ruler), transfer is completely performed from the transfer start point, and the It can prevent that the Y-axis negative direction side peels when seen from the pressure roller 31 at the time of movement to a Y-axis positive direction.

Thereafter, the scanning of the pressure roller 31 is finished as shown in Fig. 6B.

Next, in the UV irradiation process of FIG. 5E, as shown in FIG. 2, the UV irradiation lamp 33 which is linear in an X-axis direction is irradiated at a constant speed horizontally toward a Y-axis direction, and an ultraviolet-ray is irradiated and a sight The chemical resin 47 is cured. The UV irradiation lamp 33 is inexpensive because it is constructed in a straight line in the X axis direction, unlike the arrangement on one surface. In addition, by scanning at a constant speed, no variation occurs in the amount of irradiation light in the Y-axis direction.

Next, in the peeling process of FIG. 5 (F), the cured photocurable resin 47 is peeled from the rigid mold member 23. At this time, the flexible substrate 9 is peeled off while scanning the pressure roller 31 instead of peeling the flexible substrate 9 from the rigid mold member 23 at once in the same manner as in the transfer step.

That is, as shown in the detailed explanatory drawing of the peeling process of FIG. 7, in order to peel the flexible base material 9 gradually, the pressure roller 31 is moved to the Y-axis negative direction so that the pressure roller 31 may be a support point. At this time, the right end side of the flexible base material 9 is pulled toward the right inclined downward by a constant tension by the tension sensor 21 of the rewinding guide roller 17. Thereafter, the second lifting rolls 29a and 29b are raised and the first lifting rolls 27a and 27b are lowered when the pressure roller 31 is completely returned. And the flexible base material 9 is conveyed to the cutting stage 40 in FIG.7 (C).

As described above, high precision transfer is performed on the photocurable resin 47 on the flexible base 9. The resin pattern 100 which consists of the flexible base material 9 and the photocurable resin 47 thus completed can make the film thickness of the photocurable resin 47 uniform.

In addition, photocurable resin may be apply | coated to either the mold side and the base material side as shown to FIG. 8 (A). In this embodiment, it demonstrated by apply | coating photocurable resin 47 on the flexible base material 9 which is a base material. However, as shown in the application | coating process of FIG. 8 (A), the photocurable resin 147 may be apply | coated to the base material 109 side like this embodiment, and may be apply | coated to the mold 123 side.

Moreover, in this embodiment, the case where the transfer member is the flexible base material 9 and the transfer member is the rigid mold member 23 was demonstrated. However, as shown to the transfer process of FIG. 8 (B), the member which the pressure roller 31 touches may be a transfer member which has flexibility, ie, a flexible mold.

In this case, the transfer member may be flexible or rigid.

In addition, in the peeling process of this embodiment similarly to the transfer process, as shown to FIG. 8 (D), the member which the pressure roller 31 touches may be a transfer member which has flexibility, ie, a flexible mold.

In this case, the transfer member may be flexible or rigid.

That is, in another embodiment of the present invention, the transfer member may be a member having flexibility, that is, a flexible mold.

The transfer member may be flexible or rigid (second embodiment). In this case, the pressure roller 31 comes into contact with the flexible mold. And as shown to the application | coating process of FIG. 8 (A), the photocurable resin 147 may be apply | coated to the base material 109 side, and may be apply | coated to the mold 123 side. The rigid transfer member may be a glass plate.

As the flexible mold, a thermoplastic resin or a thermosetting resin film or a metal sheet having flexibility and a resin pattern formed by nanoimprint on one side thereof can be used. It is preferable that it was based on the resin film.

In addition, in the UV irradiation process of this embodiment, it demonstrated as irradiating with the UV irradiation lamp 33 from the lower side of the flexible base material 9, However, if an ultraviolet-ray can pass, as shown to FIG. 8 (C), Either irradiated from below the base material 109 or irradiated from above the mold 123 may be sufficient.

1st Embodiment is suitable when using a flexible thermoplastic resin or a thermosetting resin film as a base material, and using high rigidity quartz, silicon, a metal, etc. as a mold. 2nd Embodiment is suitable when using a resin mold as a flexible mold, and using a glass plate, a thermoplastic resin, or a thermosetting resin film as a base material.

Next, the case where the resin mold 100 manufactured by this transfer apparatus 10 is applied to the nano imprint transfer system of the roll-to-roll system not shown is demonstrated. The transfer portion is conventionally configured in a drum type as shown in FIG. In FIG. 9, the mold 100 of the sheet | leaf was stuck to the cylindrical transfer drum 50 (for example, 3 sheets), and was used.

However, when the three resin molds 100 are independent in this way, it is necessary to finely adjust the position of each resin mold 100. Moreover, it is troublesome because it performs three places of attachment work.

On the other hand, in embodiment of this invention, as shown in FIG. 10, the resin coating area 35 of several sheets can be formed on the flexible base material 9. As shown in FIG. According to such a structure, for example, the resin mold 200 which has three resin application areas 35A, 35B, 35C is produced | generated, and the sticking operation | work is simply carried out by winding this resin mold 200 to the transfer drum 50. FIG. Can be terminated.

Industrial availability

The transfer apparatus and the resin pattern manufacturing method of this invention are useful for manufacture of the resin pattern using the mold for nanoimprint (in particular, the mold whose largest dimension of the width, height, and pitch of a convex part is 950 nm or less).

In addition, all the content of the JP Patent application 2010-260387, the claim, drawing, and the abstract for which it applied on November 22, 2010 is referred here, and it introduces as an indication of the specification of this invention.

9: flexible base material
10: transfer device
11: feeding roll
13: feeding side guide roll
15: winding roll
17: winding side guide roll
19, 21: tension sensor
20: vacuum adsorption stage
23: rigid mold member
27a, 27b: first lifting roll
29a, 29b: second lifting roll
31: pressure roller
33: UV irradiation lamp
35: resin coating area
37: nozzle for resin application
39: XYZ axis robot
40: cutting stage
43: pattern part
47, 147: photocurable resin
50: transfer drum
100, 200: resin mold

Claims (10)

A transfer member having rigidity or flexibility,
Transfer member having rigidity or flexibility,
Application means for applying a curable resin to at least one predetermined area of the transfer member or the transfer member;
Transfer means for transferring the transfer member and the transfer member to each other via the curable resin;
Curing means for curing the curable resin,
A transfer apparatus comprising peeling means for separating the transferred member and the transferred member from each other,
At least one of the transfer member and the transfer member is a member having flexibility,
Wherein the transfer means comprises:
A pressure roller which conveys and scans in parallel to the transfer member or the other member of the transfer member while pressing firmly against the flexible member of the transfer member or the transfer member;
And said tension generating means for pulling said flexible member with a predetermined tension from said scanning direction toward said forward tilting direction with said pressure roller as a supporting point. A transfer member having rigidity or flexibility,
Transfer member having rigidity or flexibility,
Application means for applying a curable resin to at least one predetermined area of the transfer member or the transfer member;
Transfer means for transferring the transfer member and the transfer member to each other via the curable resin;
Curing means for curing the curable resin,
A transfer apparatus comprising peeling means for separating the transferred member and the transferred member from each other,
At least one of the transfer member and the transfer member is a member having flexibility,
The peeling means comprises:
A pressing roller which presses against the one member having flexibility among the transfer member or the transfer member and performs a return scan in parallel with the other member of the transfer member or the transfer member;
And said tension generating means for pulling said flexible member with a predetermined tension from said scanning direction toward said forward tilting direction with said pressure roller as a supporting point. 3. The method according to claim 1 or 2,
And a reversing means for reversing either the transfer member or the transfer member. The method according to any one of claims 1 to 3,
And a first lifting roll for holding one end of the flexible one member at a position higher than the height of the corner portion such that the one member having the flexibility is bent at the corner portion of the one end of the other member. Transfer device. The method according to any one of claims 1 to 4,
And a second lifting roll for holding the flexible one member in the inclined direction. 6. The method according to any one of claims 1 to 5,
A feeding side guide roll which guides the feeding side of the one member having the flexibility and has a first tension sensor;
A winding side guide roll for guiding the winding side of the one member having the flexibility and having a second tension sensor;
An feeding roll for feeding out one member having the flexibility;
It is equipped with the winding roll which winds up the one member which has the said flexibility,
Driving the feeding roll based on the tension detected by the first tension sensor;
And the winding roll is driven based on the tension detected by the second tension sensor. 7. The method according to any one of claims 1 to 6,
The said hardening means was equipped with the UV irradiation mechanism which arranged the ultraviolet light emitting element in linear form. The transfer apparatus characterized by the above-mentioned. The method according to any one of claims 1 to 7,
Measurement means for measuring the unwinding dimension of the one member having the flexibility,
And a cutting means for cutting the one member having the flexibility based on the unwinding dimension measured by the measuring means. Curable resin is apply | coated to the predetermined area of the transfer area which has rigidity or flexibility, or the predetermined area of the transfer area which has rigidity or flexibility,
The transfer member and the transfer member are transferred to each other via the curable resin,
After curing the curable resin,
As the resin pattern manufacturing method which manufactures a resin pattern by peeling the said transfer member and said to-be-transferred member mutually,
In the transfer step,
The press roller is conveyed and scanned in parallel to the transfer member or the other member of the transfer member while pressing the press roller against the flexible member of the transfer member or the transfer member,
A method for producing a resin pattern, wherein the one member having the flexibility is pulled at a predetermined tension from the scanning direction toward the front inclined direction with the pressure roller as a supporting point. Curable resin is apply | coated to the predetermined area of the transfer area which has rigidity or flexibility, or the predetermined area of the transfer area which has rigidity or flexibility,
The transfer member and the transfer member are transferred to each other via the curable resin,
After curing the curable resin,
As the resin pattern manufacturing method which manufactures a resin pattern by peeling the said transfer member and said to-be-transferred member mutually,
In the peeling process,
Returning the pressing roller in parallel with the transfer member or the other member of the transfer member while pressing the pressing roller against the flexible member of the transfer member or the transfer member,
A method for producing a resin pattern, wherein the one member having the flexibility is pulled at a predetermined tension from the scanning direction toward the front inclined direction with the pressure roller as a supporting point.

Images