JP5931650B2 - Transfer apparatus and transfer method - Google Patents

Description

The present invention relates to a transfer equipment contact and transfer method, in particular, it relates to also transfer the fine transfer pattern.

Recently, a quartz substrate or the like in an electron beam lithography to form an ultra fine transfer pattern (fine transfer pattern) to produce a mold (mold), and pressing the mold at a predetermined pressure to HiNaru form, A nanoimprint technique for transferring a transfer pattern formed on the mold has been researched and developed (for example, see Non-Patent Document 1).

  Conventionally, a transfer device 301 as shown in FIG. 15 is known. The transfer device 301 includes a vibration isolation table 302, a base (substrate holding chuck) 303, a transfer unit 305, and a mold support unit 307.

  The base 303 is provided integrally with the vibration isolation table 302, and holds the plate-shaped object 309 by, for example, vacuum suction.

  The transfer unit 305 includes a pair of rollers 311A and 311B that are rotated by a servo motor (not shown) around the central axes C15a and C15b extending in a direction orthogonal to the paper surface of FIG. 15, and the pair of rollers 311A and 311A. A roller driving unit 315 for moving and positioning 311B in the vertical direction by a servo motor 313 and an ultraviolet ray generator 317 are provided.

  Further, the transfer unit 305 (the pair of rollers 311A and 311B and the ultraviolet ray generator 317) is horizontally oriented with respect to the vibration isolation table 302 (left and right direction in FIG. 15) by a drive device (not shown) including a servo motor. It can be moved and positioned freely.

  The mold 323 supported by the mold support unit 307 is formed in a thin plate shape, and has a fine transfer pattern (not shown) on one surface in the thickness direction (the surface below the mold 323 in FIG. 15). ) Is formed.

  The mold support part 307 includes a first chuck part 319 and a second chuck part 321.

  The first chuck portion (mold holder) 319 is separated from one end (the right end in FIG. 15) of the base 303 to the side (the right side in FIG. 15) in the vicinity of the upper surface of the vibration isolation table 302. Then, one end (the right end in FIG. 15) of the mold 323 is grasped and held.

  The second chuck portion 321 is separated from the other end (left end in FIG. 15) of the base 303 to the side (left side in FIG. 15) on the upper side of the vibration isolation table 302. The second chuck portion 321 includes a mold holding body 325, a rotation support body 327, a support column 329, and a support column support body 331.

  The mold holder 325 is configured to grip and hold the other end of the mold 323. The rotation support body 327 supports the mold holding body 325. The mold holding body 325 supported by the rotation support body 327 rotates about the axis C15c extending in the direction orthogonal to the paper surface of FIG. Yes.

  The support column 329 supports the rotation support body 327. The rotation support body 327 supported by the support column 329 is moved and positioned with respect to the support column 329 by a servo motor (not shown).

  The support column 329 is provided integrally with the support column support 331. The column support 331 is moved and positioned in the horizontal direction (left and right in FIG. 15) with respect to the vibration isolation table 302 by a servo motor (not shown).

  Next, the case where the transfer device 301 is used to transfer a fine transfer pattern of the mold 323 to the molding object 309 will be described.

  First, in the initial state, the mold 323 is supported by the mold support portion 307, the molded body 309 is installed on the base 303, and the rollers 311 A and 311 B are separated from the right end of the base 303 to the right side.

  In the initial state, the middle portion of the mold 323 in the left-right direction is wound around the lower portion of the roller 311A, and the distance between the lower end of the roller 311A and the upper surface of the base 303 in the vertical direction is the thickness of the mold 323. And the thickness of the molded body 309.

  In the initial state, the mold 323 extends in the horizontal direction between the roller 311A and the first chuck portion 319 (the mold 323 located on the right side of the roller 311A extends in the horizontal direction). The mold 323 extends obliquely upward between the roller 311A and the second chuck portion 321 (the mold 323 located on the left side of the roller 311A extends obliquely upward).

  Further, in the initial state, the mold 323 has a predetermined tension and is not loosened, has a predetermined width in a direction orthogonal to the paper surface of FIG. 15, and is installed on the mold 323 and the base 303. It is in a non-contact state with the molded object 309 being formed.

  From the initial state, the transfer unit 305 (each of the rollers 311A and 311B and the ultraviolet ray generator 317) is moved to the left, and the molded body 309 cooperates with the roller 311A (the roller 311B is a backup roller) and the base 303. The mold 323 is sandwiched and pressed, and the ultraviolet ray generator 317 irradiates the molded body 309 with ultraviolet rays, so that the molded body 309 (the ultraviolet curable resin 333 of the molded body 309) is formed on the mold 323. Transfer the transfer pattern.

  When the transfer is completed, the transfer unit 305 (each of the rollers 311A and 311B and the ultraviolet ray generator 317) moves away from the left end of the base 303 to the left side.

  When the transfer unit 305 (each of the rollers 311A and 311B) is moved from right to left, for example, in accordance with the change in the form of the mold 323 (the tension of the mold 323 is made constant so that the mold 323 does not become slack, etc.) Therefore, the rotation support body 327 is moved and positioned in the vertical direction with respect to the column 329, and the column support body 331 is moved and positioned with respect to the vibration isolation table 302 in the left-right direction.

  As a patent document related to the above conventional technique, for example, Patent Document 1 can be listed.

JP 2010-280065 A

Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 25 (2001) 192-199

  By the way, in the conventional transfer apparatus 301, the transfer unit 305 is moved from the right side to the left side, and the object to be molded 309 and the mold 323 are sandwiched and transferred by the roller 311A and the base 303. There is a problem that fine bubbles may be generated in the entrained molded object 309.

  As a method for preventing air entrainment, it is conceivable to extremely slow the moving speed of the rollers 311A and 311B. However, this method has a problem that the transfer speed becomes slow. Slow transfer speed makes it unsuitable for mass production.

  In view of this, a method is conceivable in which the rollers 311A and 311B, the base 303 and the like are placed in a vacuum atmosphere to perform transfer.

  However, in this method, since the transfer (movement of the rollers 311A and 311B) is performed after the vacuum atmosphere is generated, the generation of the vacuum atmosphere and the transfer cannot be performed at the same time, and the transfer efficiency is lowered. is there.

  Furthermore, when the molded body becomes large (for example, the size becomes 1 m × 1 m or more), the rollers 311A, 311B, the base 303 and the like become large and it is difficult to install them in a vacuum atmosphere.

  The present invention has been made in view of the above problems, and in a transfer apparatus and transfer method for transferring a fine transfer pattern formed on a sheet-shaped mold to a molded body, the molded body at the time of transfer It is an object of the present invention to provide a device capable of eliminating the generation of fine bubbles and enabling efficient transfer.

The invention according to claim 1 is a transfer device for transferring a fine transfer pattern formed on a mold to a molded object, and a vacuum bonding unit that bonds the mold and the molded object in a vacuum atmosphere. a transfer device having a transfer unit that transfers the mold fine transfer pattern on the molded product of the molded body which has been conveyed in a state of being bonded by the vacuum bonding portion.

  The invention according to claim 2 is the transfer apparatus according to claim 1, wherein the mold is formed in a sheet shape, and includes a mold raw fabric installation portion and a mold winding portion, and the mold includes the mold The mold original fabric installation portion is extended from the mold original fabric to the mold winding portion with a predetermined tension, and the vacuum bonding portion includes the mold original fabric installation portion and the mold The mold extending between the take-up portion is installed on the mold original fabric installation portion side, and the transfer portion extends between the mold original fabric installation portion and the mold take-up portion. It is the transfer apparatus installed in the mold winding part side of a mold.

  According to a third aspect of the present invention, in the transfer device according to the first or second aspect, the transfer unit includes a pressing unit that sandwiches and presses the mold and the workpiece, and is pressed by the pressing unit. A curing unit that cures the molded object of the molded body that has been formed, and a separation unit that separates the mold that is adhered to the molded body by being cured by the curing unit from the molded body. The transfer device is configured.

According to a fourth aspect of the present invention, in the transfer device according to the third aspect, the transfer unit includes a molded body holding body that holds the molded body. 1, and the first roller performs the transfer between the molding object held by the molding object holder and the mold attached to the molding object. For this purpose, the mold is sandwiched in cooperation with the molded object holder, and the mold is rotated with the center axis as the center of rotation and moved relative to the molded object holder, so that the sandwiched mold and the molded object are The separation part is configured to include a second roller and a third roller, and the second roller is formed by the pressing part. the molded body after the pressing has been performed curing at Re name of the curing unit Ttsui and the mold is wound with the mold in order to release from the molded body, by relatively moving the central axis with respect to the rotation in the rotational center the holding body, wherein the molded body A mold that is attached to a molded body that is installed in a holding body is configured to peel from the molded body, and the third roller is wound around the second roller and the second roller. The mold extending from is wound so as to be separated from the molded body held by the molded body holding body, rotated around a central axis as a center of rotation, and The transfer device is configured to move relatively with the second roller.

According to a fifth aspect of the present invention, in the transfer device according to the first aspect, the transfer unit includes a pressing unit that sandwiches and presses the mold and the molding target, and the target that is pressed by the pressing unit. A curing part that cures the molded object of the molded body, and a separation part that separates the mold that is pressed by the pressing part and cured by the cured part to adhere to the molded body from the molded body. The transfer unit is configured to include a molding target setting unit that sets the molding target, and the pressing unit is configured to include a first roller, The first roller cooperates with the molding target holder for transferring the molding target held by the molding target holder and the mold attached to the molding target. To be molded by rotating around the center axis of rotation By moving relatively with respect to a holding body, it is comprised so that the site | part of the said mold and the said to-be-molded body which has pinched | interposed may be moved, and the said isolation | separation part is 2nd roller and 3rd and a roller is constituted, the second roller is pressing the name of Re the object shaping the mold in which the clinging to the molded body after the curing is made at said curing unit in the pressing section The mold is wound around the mold so as to be separated from the body, and is rotated around the central axis to move relative to the body to be molded. The mold attached to the body is configured to be peeled off from the object to be molded, and the third roller is wound around the second roller and extends from the second roller. The molded object holder It is wound away from the object to be held and is configured to rotate around a central axis and move relative to the object holder together with the second roller. It is a transfer device.

  According to a sixth aspect of the present invention, in the transfer device according to the fourth or fifth aspect, the third roller has a small diameter for avoiding contact of a fine transfer pattern of the mold wound around the third roller. This is a transfer device in which a portion is formed.

The invention according to claim 7 is a transfer method for transferring a fine transfer pattern formed on a mold to a molded object, and a vacuum bonding step of bonding the mold and the molded object in a vacuum atmosphere; And a transfer step of transferring a fine transfer pattern of the sheet-like mold onto a molding object of the molding body that has been conveyed in the state of being bonded in the vacuum bonding step.

  According to the present invention, in a transfer device and a transfer method for transferring a fine transfer pattern formed on a sheet-shaped mold to a molded object, generation of fine bubbles in the molded object is eliminated during transfer. There is an effect that the transfer can be performed efficiently.

1 is a diagram illustrating a schematic configuration of a transfer device according to an embodiment of the present invention. It is a figure which shows schematic structure of the vacuum bonding part of the transfer apparatus which concerns on embodiment of this invention. It is a figure which shows schematic structure of the transfer part of the transfer apparatus which concerns on embodiment of invention. It is an IV-IV arrow line view in FIG. It is a VV arrow line view in FIG. It is a figure which shows operation | movement of the transfer apparatus which concerns on embodiment of this invention. It is a figure which shows operation | movement of the transfer apparatus which concerns on embodiment of this invention. It is a figure which shows operation | movement of the transfer apparatus which concerns on embodiment of this invention. It is a figure which shows operation | movement of the transfer apparatus which concerns on embodiment of this invention. It is a figure which shows operation | movement of the transfer apparatus which concerns on embodiment of this invention. It is a figure which shows operation | movement of the transfer apparatus which concerns on embodiment of this invention. It is a figure which shows operation | movement of the transfer apparatus which concerns on embodiment of this invention. It is a figure which shows operation | movement of the transfer apparatus which concerns on embodiment of this invention. It is a figure explaining transcription | transfer. It is a figure which shows the conventional transfer apparatus.

  The transfer device 1 according to the embodiment of the present invention is configured to transfer a fine transfer pattern M1 formed on one surface in the thickness direction of a sheet (thin plate) mold (mold) M into a sheet (thin plate). ) Is transferred to the molded object W (see FIG. 14), and includes a vacuum bonding unit 3 and a transfer unit 5 (see FIG. 1).

  Here, for convenience of explanation, one horizontal direction is the X-axis direction, another horizontal direction that is orthogonal to the X-axis direction is the Y-axis direction, and the X-axis direction and the Y-axis direction. A vertical direction orthogonal to the Z axis direction.

  The vacuum bonding unit 3 bonds the mold M and the workpiece W in a vacuum atmosphere (in a vacuum environment).

  The transfer unit 5 is set apart from the vacuum bonding unit 3 apart from the vacuum bonding unit 3, and the sheet-like mold M and the molding target that are conveyed in the state of being bonded by the vacuum bonding unit 3. By pressing the body W and curing the molding W1 of the molding W, the fine transfer pattern M1 of the sheet-like mold M is transferred to the molding W1.

  In addition, the to-be-molded body W (refer FIG.14 (b)) to which the fine transfer pattern was transcribe | transferred is used as optical elements, such as a light-guide plate and an optical filter, for example.

  The fine transfer pattern M1 of the sheet-like mold M is formed with unevenness whose pitch and height are, for example, about the wavelength of visible light. The transfer pattern M1 formed on the mold M is transferred to the molding target W by the transfer, so that the transfer pattern W2 having the opposite form to the transfer pattern M1 formed on the mold M is formed on the molding target W. It has become.

  The sheet-like mold M is composed of a sheet-like base material (mold base material) M2 and a transfer pattern forming body M3.

  The sheet-like mold base M2 is formed in a plate shape from a resin material such as PET resin that can transmit ultraviolet rays.

  The transfer pattern formed body M3 on which the fine transfer pattern M1 is formed is, for example, a cured ultraviolet curable resin that can transmit ultraviolet rays (other resin such as a thermosetting resin or a thermoplastic resin may be used). It is formed in a thin film shape. The transfer pattern forming body M3 has a mold base M2 on one surface in the thickness direction of the sheet-like mold base M2 such that the thickness direction thereof coincides with the thickness direction of the mold base M2. Are integrally provided.

  Further, the sheet-shaped mold M has flexibility. More specifically, the sheet-like mold M can be regarded as a rigid body with little elastic deformation even when a tensile force in a direction orthogonal to the thickness direction is applied. It is designed to facilitate turning-up deformation (deformation caused by a moment around an axis extending in a direction perpendicular to the thickness direction). Therefore, the mold M can be easily wound around the outer periphery of the roller with the thickness direction coinciding with the radial direction of the cylindrical roller.

  The vacuum bonding unit 3 positions the molding target W and the mold M in a vacuum atmosphere in a state where the molding target W is separated from the mold M, and maintains the vacuum atmosphere while holding the molding target W. It is configured such that the vacuum atmosphere is brought to atmospheric pressure after the molding W1 of the molding W is brought into contact with the fine transfer pattern M1 of the mold M relatively close to the mold M.

  In addition, the transfer apparatus 1 is provided with a mold original fabric installation part 7 and a mold winding part 9. The mold M is stretched with a predetermined tension from the mold original fabric (unwinding roll) 11 installed in the mold original fabric installation portion 7 to the mold winding portion 9 (winding roll 13), and is in the form of a sheet (plate-like) ) To extend.

  The vacuum bonding unit 3 is installed on the mold original fabric installation unit 7 side of the mold M extending in a sheet shape between the mold original fabric installation unit 7 and the mold winding unit 9.

  The transfer unit 5 is installed on the mold winding unit 9 side of the mold M extending in a sheet shape between the mold raw fabric installation unit 7 and the mold winding unit 9.

  A sheet-like mold (a flat sheet-like mold) M having a flat plate shape between the mold original fabric installation portion 7 and the mold winding portion 9 has a longitudinal direction (the mold original fabric installation portion 7 and the mold). A predetermined tension is applied, for example, in a horizontal direction (X-axis direction) that wraps the winding portion 9 with each other. Thereby, a flat plate shape is maintained. Although not shown in FIGS. 6 to 13, the fine transfer pattern M <b> 1 is formed on the lower surface of the flat sheet-like mold M (see FIG. 1 and the like).

  A mold original fabric (fabric mold) 11 is a roll-shaped mold M before being used for transfer. The mold raw fabric 11 is formed by winding a sheet-shaped mold M on the outer periphery of a columnar core so that the circumferential direction of the outer periphery and the longitudinal direction of the sheet-shaped mold M coincide with each other. Alternatively, it is formed in a cylindrical shape.

  The wound-up mold M (winding roll 13) wound up by the mold winding unit 9 is a mold M used for transfer, and is in the form of a roll in the same manner as the mold original fabric 11.

  The mold original fabric 11 installed in the mold original fabric installation portion 7 has a central axis (for example, an axis extending in the horizontal Y-axis direction; an axis extending in a direction perpendicular to the paper surface of FIG. 1 and the like) C1. Rotate around the center of rotation. The wound mold M (winding roll 13) wound up by the mold winding unit 9 is also rotated around the central axis (axis extending in the Y-axis direction) C2.

  The transfer unit 5 includes a pressing unit 15 that sandwiches and presses the mold M and the molding target W, a curing unit 17 that cures the molding W1 of the molding target W pressed by the pressing unit 15, and a pressing unit. 15 is separated from the molding body W by the mold M that is pressed by the curing unit 17 and cured by the curing unit 17, and the molding body installation section (the molding target) on which the molding body W is installed. A molded body holding body) 21.

  The pressing portion 15 is configured to include a first roller 23. The first roller 23 is formed in a cylindrical shape. The first roller 23 is provided with a molded body holder 21 for transferring the molded body W held by the molded body holder 21 and the mold M attached to the molded body W. It is designed to pinch together. And the 1st roller 23 is pinched | interposed by rotating centering on the central axis C3 extended in the Y-axis direction, and moving in the X-axis direction relatively with respect to the to-be-molded body holding body 21. It is comprised so that the site | part of the mold M and the to-be-molded body W may be moved.

  The separation unit 19 includes a second roller 25 and a third roller 27. The second roller 25 is formed in a cylindrical shape. The mold M is wound around the second roller 25 in order to separate the mold M attached to the molded body W after being pressed by the pressing portion 15 and cured by the curing portion 17 from the molded body W. It is supposed to be. The second roller 25 rotates in synchronization with the first roller 23 around the central axis C4 parallel to the first roller 23 as a rotation center, and is relatively relative to the molded object holding body 21. By moving in the X-axis direction, the mold M attached to the molding target W installed on the molding target holder 21 is peeled off from the molding target W.

  The third roller 27 is also formed in a columnar shape and is configured so that the mold M is wound thereon. For example, the third roller 27 is separated from the molded object holding body 21 in the Z-axis direction than the second roller 25. .

  A mold M wound around the second roller 25 and extending from the second roller 25 (the other side in the longitudinal direction of the mold M extending from the second roller 25) is wound around the third roller 27. Is wound away from the molding target W held by the molding target holder 21.

  The third roller 27 rotates around the center axis C5 parallel to the center axis C4 of the second roller 25 in synchronization with the second roller 25, with respect to the molded object holding body 21. The second roller 25 is relatively moved.

  Furthermore, the second roller 25 and the third roller 27 are configured to move relative to the molded object holder 21 together with the first roller 23. Even if the first roller 23, the second roller 25, and the third roller 27 move, the positional relationship between the central axes C3, C4, and C5 is always constant.

  The third roller 27 is formed with a small-diameter portion 29 for avoiding contact with the fine transfer pattern M1 of the wound mold M (see FIG. 5).

  In the mold M installed in the transfer device 1, the vacuum bonding part 3 side mold part M4 and the anti-vacuum bonding part side mold part M5 are parallel to each other.

  The vacuum bonding part 3 side mold part M4 extends in a flat plate shape from the second roller 25 through the first roller 23 and the vacuum bonding part 3 to a predetermined location beyond the vacuum bonding part 3. It is a part (extending to the left from the 2nd roller 25).

  The anti-vacuum bonding part side mold part M5 is a part extending from the third roller 27 in a flat plate shape (extending to the right from the third roller 27).

  By the way, the fine transfer pattern M1 of the transfer pattern forming body M3 is the surface of the transfer pattern forming body M3 (one surface in the thickness direction and opposite to the surface in contact with the mold base M2). Is formed. The fine transfer pattern M1 of the transfer pattern formed body M3 is generated by transferring a fine transfer pattern formed on a master mold (not shown).

  The mold base M2 is formed in, for example, a long rectangular plate shape (band plate shape). The width dimension of the mold base M2 (the width dimension similar to that of the conventional mold 323) is considerably larger than the thickness dimension of the mold base M2, and the length dimension of the mold base M2 is the mold. It is considerably larger than the width dimension of the base material M2.

  The transfer pattern forming body M3 is also formed in a rectangular plate shape, for example. The transfer pattern forming body M3 is provided on the mold base M2 such that the width direction coincides with the width direction of the mold base M2, and the length direction coincides with the length direction of the mold base M2. Yes.

  Further, a plurality of transfer pattern forming bodies M3 are provided intermittently at predetermined intervals in the length direction of the mold base M2. The transfer pattern forming body M3 may be provided continuously in the length direction of the mold base M2. The width dimension of the transfer pattern forming body M3 is narrower than the width dimension of the mold base M2.

  A part where the transfer pattern forming body M3 is not present is formed on a part of the mold base M2 so as to continuously extend in the longitudinal direction of the mold base M2. For example, because the width dimension of the transfer pattern forming body M3 is narrower than the width dimension of the mold base M2, the mold base M2 is formed at both ends in the width direction of the mold M (mold base M2). The site | part (base-material edge part site | part) 31 which is only formed is formed (refer FIG. 5).

  The to-be-molded body W is provided with a base material (base material for the to-be-molded body) W3 and a molding target W1.

  The sheet-shaped substrate for molding W3 is formed in a plate shape with a resin material such as PET resin, for example. The molding object W1 formed by transferring the fine transfer pattern M1 of the sheet-like mold M is, for example, an ultraviolet curable resin (may be other resins such as a thermosetting resin or a thermoplastic resin). It is formed in a thin film shape.

  The base material for molding W3 is formed in, for example, a rectangular plate shape. The width dimension of the substrate for molding W3 is substantially the same as the width dimension of the mold substrate M2, and the length of the substrate for molding W3 is the same as that of the sheet-like mold substrate M2. It is slightly larger than the length of one transfer pattern forming body M3 provided intermittently.

  The molding object W1 is also provided in a rectangular plate shape. The workpiece W1 is molded on one surface in the thickness direction of the sheet-shaped substrate W3 so that the thickness direction coincides with the thickness direction of the substrate W3. It is provided on the body substrate W3. Moreover, as for the to-be-molded product W1, the width direction corresponds with the width direction of the base material W3 for to-be-molded bodies, and the length direction corresponds to the length direction of the base material W3 for to-be-molded bodies. The width dimension of the molding target W1 is approximately the same as the width dimension of the molding target substrate W3, and the length dimension of the molding target W1 is intermittently provided on the sheet-like molding base material M2. It is about the same as the length of one transfer pattern forming body M3.

  The fine transfer pattern W2 of the molding W1 is formed on the surface of the molding W1 (one surface in the thickness direction, opposite to the surface in contact with the substrate for molding W3). It has come to be.

  When the molding object W1 is an ultraviolet curable resin or a thermosetting resin, the molding object (uncured resin) W1 before the fine transfer pattern M1 of the mold M is transferred is liquid or fluid. It has become. The molded object W1 is cured when the transfer is performed, and the molded object W1 is cured at the end of the transfer.

  The molded object holder 21 is formed, for example, in a rectangular flat plate shape, and includes a plane (one surface in the thickness direction; upper surface; molded object installation surface) 33 for holding the molded object W. ing. The to-be-molded body W has the entire back surface (the one surface in the thickness direction of the to-be-molded substrate W3 opposite to the surface on which the to-be-molded object W1 is provided) The body holder 21 is brought into surface contact with the molding body installation surface 33 and is held by the molding body holder 21 by, for example, vacuum suction.

  The to-be-molded body W installed on the to-be-molded body holding body 21 has the width direction and the length direction corresponding to the width direction and the length direction of the to-be-molded body holding body 21.

  The outer diameter of the first roller 23, the outer diameter of the second roller 25, and the outer diameter of the third roller 27 are substantially equal to each other, and the length (width) of the first roller 23 and the second roller The length (width) of the roller 25 and the length (width) of the third roller 27 are substantially equal to each other.

The width dimension of the first roller 23 is larger than the width dimension of the molding target W held by the molding target holder 21. Extending direction of the axis C1 of the first roller 23 (the width direction; Y-axis Direction) is consistent with the width direction of the molded body W held by the holding body 21, a first roller The center in the width direction of 23 and the center in the width direction of the molding target W held by the molding target holder 21 coincide with each other.

  Further, the first roller 23 is movable and positionable in a direction (Z-axis direction) orthogonal to the molding target installation surface 33 of the molding target holder 21.

  When the first roller 23 sandwiches the mold M and the molding target W held by the molding target holder 21 in cooperation with the molding target holder 21, the center of the first roller 23 The distance between the axis C3 and the molding target installation surface 33 is approximately equal to or slightly smaller than the sum of the radius of the first roller 23, the thickness of the mold M, and the thickness of the molding target W. . As a result, the above-described sandwiching is performed.

  The width direction of the mold M sandwiched between the first rollers 23 and the width direction of the first roller 23 coincide with each other, and the width direction of the mold M sandwiched between the first rollers 23 is the same. The center and the center in the width direction of the first roller 23 are substantially coincident with each other.

  When the first roller 23 sandwiches the mold M and the molding target W held by the molding target holder 21 in cooperation with the molding target holder 21, the mold M The roller 23 is in contact with the first roller 23 at one bus bar (a bus bar extending in the Y-axis direction).

That is, the mold M in contact with the first roller 23 is the back surface of the mold base M2 (the other surface in the thickness direction opposite to the surface on which the transfer pattern forming body M3 is provided). surface) is in contact with the outer periphery of the first roller 23, the site to which this contact is adapted to linearly shape extending in the Y-axis direction.

  The second roller 25 is positioned on the opposite side of the vacuum bonding unit 3 with the first roller 23 therebetween in the X-axis direction, and the central axis C4 of the second roller 25 is the first roller 23 is parallel to the central axis C3.

  The center in the width direction of the second roller 25 and the center in the width direction of the molding target W held by the molding target holding body 21 coincide with each other.

  The second roller 25 is movable and positionable in the direction (Z-axis direction) perpendicular to the molding target installation surface 33 of the molding target holder 21 together with the first roller 23.

  When the first roller 23 sandwiches the mold M and the molding target W held by the molding target holder 21 in cooperation with the molding target holder 21, the center of the second roller 25 is Similarly to the case of the first roller 23, the distance between the axis C4 and the molding target installation surface 33 is the sum of the radius of the second roller 25, the thickness of the mold M, and the thickness of the molding target W. Is almost equal to or slightly smaller.

  The center in the width direction of the third roller 27 and the center in the width direction of the molding target W held by the molding target holding body 21 coincide with each other.

  In addition, the third roller 27 can be moved and positioned in the direction (Z-axis direction) perpendicular to the molding target installation surface 33 of the molding target holder 21 together with the first roller 23 and the second roller 25. Yes.

  The mold M is wound around the second roller 25 about a half circumference, and the third roller 27 is also wound around a half circumference.

  The mold M wound around the second roller 25 is the back surface of the mold base M2 (the other surface in the thickness direction opposite to the surface on which the transfer pattern forming body M3 is provided). ) Is in surface contact with the outer periphery of the second roller 25.

  The mold M wound around the third roller 27 is such that the surface of the mold base M2 (one surface in the thickness direction and provided with the transfer pattern forming body M3) is the third roller. 27 side.

The other side (the first roller 23 side; the left side in FIG. 1) in the longitudinal direction (X-axis direction) of the mold M wound around the second roller 25 and extending from the second roller 25 is to be molded. slightly away from the body mounting surface 33 (thickness about separation of the molded body W), it is parallel with the molded body mounting surface 33, the length direction of the one end side of the holding body 21 (the vacuum bonding Align Part 3 side).

  The third roller 27 is located on the opposite side of the molded body holding body 21 in the Z-axis direction, for example, with the second roller 25 interposed therebetween. The second roller 25 and the third roller 27 overlap each other when viewed from the direction (Z-axis direction) orthogonal to the molding target installation surface 33.

  The other side in the longitudinal direction of the mold M which is wound around the second roller 25 and extends from the second roller 25 is wound around the third roller 27 about a half circumference. When viewed from the extending direction of the central axes C4 and C5 of the second roller 25 and the third roller 27, the part of the mold M that is wound around the second roller 25 and the third roller 27 is as follows: It is “S” -shaped or inverted “S” -shaped.

  The positional relationship between the central axis C4 of the second roller 25 and the central axis C5 of the third roller 27 with respect to the central axis C3 of the first roller 23 is always constant, and the second roller 25 and the third roller 27 are constant. Together with the first roller 23, it can be moved and positioned in a direction (Z-axis direction) orthogonal to the molded object setting surface 33 of the molded object holder 21.

  The mold M (anti-vacuum bonding part side mold part M5) extending from the third roller 27 is parallel to the mold M (vacuum bonding part side mold part M4) extending from the second roller 25. It has become.

That is, the thickness direction of the mold M (M4) extending from the second roller 25 and the thickness direction of the mold M extending from the third roller 27 coincide with each other. The length direction of the mold M (M5) extending from the roller 25 and the length direction of the mold M extending from the third roller 27 are opposite to each other.

  Further, the distance (dimension in the Z-axis direction) between the mold M (M5) extending from the third roller 27 and the workpiece holder 21 is the diameter of the second roller 25 and the third roller. It is slightly larger than the sum of the diameter of 27.

  Each roller (the first roller 23, the second roller 25, and the third roller 27), as already understood, is attached to the workpiece holder 21 even in the longitudinal direction (X-axis direction) of the workpiece W. It is relatively free to move. That is, each of the rollers 23, 25, and 27 is positioned in the longitudinal direction of the molded body holder 21 and slightly away from one end in the longitudinal direction of the molded body holder 21 (see FIG. 13). It moves between a position slightly separated from the other end in the longitudinal direction of the body 21 (see FIG. 6 and the like).

  A workpiece W is placed on the workpiece holder 21, the mold M is wound around the rollers 23, 25 and 27, and the first roller 23 is perpendicular to the workpiece placement surface 33 (Z Axial direction) is separated from the molding target installation surface 33 by a distance of about the sum of the thickness of the molding target W and the thickness of the mold M (distance for transfer), and each of the rollers 23, 25, 27 is In a state (initial state) located slightly away from the other end in the longitudinal direction of the molded body holder 21, as shown in FIG. 6, it extends from the first roller 23 to the left side of FIG. The mold M is positioned right above the workpiece holder 21, and the mold M extending from the third roller 27 to the right in FIG. 6 is separated from the workpiece holder 21.

  That is, when the initial state is viewed from a direction (Z-axis direction) orthogonal to the molding target installation surface 33, the part of the mold M extending from the first roller 23 is the same as the molding target installation surface 33. The part of the mold M that overlaps and extends from the third roller 27 (second roller 25) is separated from the molding target installation surface 33 on the right side.

  When the rollers 23, 25, 27 move from the initial state to one end side in the longitudinal direction of the molded object holder 21 (left side in FIG. 6 and FIG. 11), the first roller 23 and the molded object holder 21 are moved. The portion between the mold M and the molded body W sandwiched between (the linear portion extending in the width direction of the molded body holding body 21) moves from the right side toward the left side ( (See FIG. 12). At this time, naturally, no slip occurs between the rollers 23, 25, 27 and the mold M and between the mold M and the molding target W. Further, the first roller 23 and the second roller 25 form a rolling pair with respect to the molding target W installed on the molding target holder 21 with the mold M interposed therebetween.

  In addition, when the molding target W1 of the molding target W is an ultraviolet curable resin, an ultraviolet ray generator 35 for curing the molding target W1 is provided. The ultraviolet ray generator 35 is provided between the first roller 23 and the second roller 25 and is moved and positioned together with the rollers 23, 25, and 27. Then, in the vicinity of where the first roller 23 and the molded body holding body 21 sandwich the molded body W and the mold M, the molded object W1 of the molded body W is cured, and the fineness of the mold M is increased. A simple transfer pattern M1 is transferred to the molding target W.

  That is, when the rollers 23, 25, and 27 are moving, the object to be molded W is passed through the mold M on the rear side of the first roller 23 (the other end in the longitudinal direction of the object holder 21). The molded product W1 is irradiated with ultraviolet rays emitted from the ultraviolet ray generator 35, and the molding W1 is cured in order from the right side to the left side.

  Further, when the rollers 23, 25, and 27 are moving, the second roller 25 and the third roller 27 that are located on the rear side of the ultraviolet ray generator 35 are used as the molded object holder 21. The mold M sticking to the to-be-formed body W being held is taken up, and the mold M is peeled off from the to-be-formed body W.

  Here, the transfer device 1 will be described in more detail. The transfer device 1 includes a base body 37.

  The transfer unit 5 is provided with a vibration isolation table 39 as shown in FIG. The vibration isolation table 39 is provided integrally with the base body 37 above the base body 37.

  The molded object holder 21 is provided integrally with the vibration isolation table 39 on the upper surface of the vibration isolation table 39.

  A lift pin 41 is provided on the molded body holder 21. The lift pin 41 is moved in the Z-axis direction by an actuator such as a pneumatic cylinder (not shown) under the control of a control device (not shown) (a control device configured with a CPU).

  When the lift pin 41 is positioned below, the lift pin 41 is buried in the molded body holding body 21. When the lift pin 41 is positioned upward, the lift pin 41 protrudes upward from the molding target installation surface 33 of the molding target holding body 21.

  Above the vibration isolation table 39, a column 43, a lower column holder (not shown), and an upper column holder 45 are provided. The column 43, the lower column holder, and the upper column holder 45 are integrated. The lower support holders (supports 43 and upper support bodies 45) are supported by the vibration isolation table 39 via linear guide bearings (not shown) so as to move relative to the vibration isolation table 39 in the X-axis direction. It has become.

  Further, the lower support holder (support 43 and upper support 45) is attached to the vibration isolation table 39 (molded object support 21) under the control of a control device by an actuator such as a servo motor (not shown) or a ball screw. On the other hand, it is moved and positioned in the X-axis direction.

A movable body 49 is supported on the support 43 through a linear guide bearing 47. Mobile 49 is adapted to move against the posts 43 in the Z-axis direction. Further, the moving body 49 is moved and positioned in the Z-axis direction with respect to the column 43 (the vibration isolation table 39 and the molded object holding body 21) under the control of the control device by an actuator such as a servo motor 51 and a ball screw 53. It has become so.

A roller support 55 is integrally provided on the moving body 49, and the roller support 55 supports the rollers 23, 25, and 27 in a rotatable manner. As a result, the rollers 23, 25, and 27 can be moved and positioned with respect to the workpiece holder 21 in the X- axis direction and the Z-axis direction.

  The rollers 23, 25, 27 are rotated by an actuator such as a servo motor (not shown). However, the roller support 55 supports the rollers 23, 25, 27 in a free state. It may be a configuration.

  The roller support 55 is integrally provided with an ultraviolet ray generator 35.

  In addition, instead of or in addition to moving and positioning the lower column support body (support column 43 and upper column support body 45), the molded object support body 21 is configured to move and position with respect to the vibration isolation table 39. It may be.

  The mold original fabric installation portion 7 and the mold winding portion 9 are provided on the base body 37. Guide rollers 57 </ b> A to 57 </ b> D around which the mold M is wound are provided between the mold original fabric installation unit 7 and the vacuum bonding unit 3. The guide roller 57B is a dancer roller, and is moved and positioned in the Z-axis direction. Further, the guide rollers 57C and 57D are arranged so that the mold M is unfolded horizontally between the guide rollers 57C and 57D and the first roller 23. It can be moved and positioned in the Z-axis direction.

  A guide roller 59 that can be moved and positioned in the Z-axis direction is provided between the third roller 27 and the mold winding unit 9, and the mold M is interposed between the third roller 27 and the guide roller 59. It is designed to expand horizontally.

  Next, the vacuum bonding unit 3 will be described.

  The vacuum bonding part 3 is provided with a lower table 61 as shown in FIG. The lower table 61 is provided integrally with the base body 37 above the base body 37.

  A molded object mounting body (substrate stage) 63 is provided on the upper side of the lower table 61. On the upper surface of the molded body placing body 63, the molded body W is integrally installed in the same manner as the molded body holding body 21.

  The to-be-molded body mounting body 63 is supported on the lower table 61 by a guide rod 65 and a linear guide bearing 67, and is Z with respect to the lower table 61 under the control of a control device by an actuator such as a cylinder 68. It can be moved and positioned in the axial direction.

  A lift pin 69 is provided on the molded object mounting body 63. The lift pin 69 is moved in the Z-axis direction by an actuator such as a pneumatic cylinder (not shown) under the control of a control device (not shown).

  When the lift pin 69 is positioned below, the lift pin 69 is buried in the molded object mounting body 63. When the lift pin 69 is positioned upward, the lift pin 69 protrudes upward from the upper surface 33 of the molded object mounting body 63.

  An upper table 71 is provided above the lower table 61. The upper table 71 is positioned above the molding target mounting body 63. The lower surface of the upper table 71 is flat.

  The upper table 71 is supported on the lower table 61 by a guide rod 73 and a linear guide bearing 75, and is controlled in the Z-axis direction with respect to the lower table 61 under the control of a control device by an actuator such as a cylinder (not shown). It can be moved and positioned freely.

  When the upper table 71 is positioned at the ascending end, the upper table 71 is positioned away from the mold M above the mold M extending horizontally between the guide rollers 57C and 57D and the first roller 23. It is supposed to be.

  When the upper table 71 is positioned at the descending end, the lower surface of the upper table 71 comes into surface contact with the mold M extending horizontally between the guide rollers 57C and 57D and the first roller 23. ing.

  In the Y-axis direction, as shown in FIG. 4, the mold M extending horizontally between the guide rollers 57 </ b> C and 57 </ b> D and the first roller 23 rather than the distance between the left and right guide rods 73. The width dimension is smaller, and the center of the distance between the left and right guide rods 73 coincides with the center of the mold M.

  A first cylindrical body 77 and a second cylindrical body 79 are provided on the upper side of the lower table 61. The first cylindrical body 77 stands up from the upper surface of the lower table 61 and is provided integrally with the lower table 61. The molded body mounting body 63 is provided inside the first cylindrical body 77.

  The second cylindrical body 79 is provided outside the first cylindrical body 77 so as to surround the first cylindrical body 77, and is supported on the first cylindrical body 77 by a linear guide bearing (not shown). In addition, the actuator can be moved and positioned in the Z-axis direction with respect to the first cylindrical body 77 under the control of a control device by an actuator such as a cylinder (not shown).

  In the Y-axis direction, as shown in FIG. 4, the width dimension of the mold M extending horizontally between the guide rollers 57 </ b> C and 57 </ b> D and the first roller 23 is equal to that of the second cylindrical body 79. The dimension is larger than the dimension in the Y-axis direction, and the center of the second cylindrical body 79 and the center of the mold M coincide with each other.

  When the second cylindrical body 79 is located at the descending end, the second cylindrical body 79 is formed of the mold M extending horizontally between the guide rollers 57C and 57D and the first roller 23. On the lower side, it is separated from the mold M by a predetermined distance.

  A mold in which the upper end of the second cylindrical body 79 extends horizontally between the guide rollers 57C and 57D and the first roller 23 when the second cylindrical body 79 is located at the rising end. It comes in contact with M.

  More specifically, the upper table 71 is positioned at the lower end and the second cylindrical body 79 is positioned at the upper end, so that the upper table 71 and the second cylindrical body 79 (of the second cylindrical body 79). A mold chamber M (only a portion of the mold base M2 on which the transfer pattern forming body M3 is not formed) is sandwiched between the “b” -shaped upper surface) and a vacuum chamber (closed space) 81 (see FIG. 8, etc.) is generated. It has come to be.

  The air in the closed space 81 is extracted by the vacuum pump 83 under the control of the control device.

  Further, on the upper side of the lower table 61, a transport roller 85 that supports the weight of the molded body W attached to the mold M and transports the molded body W together with the mold M is provided.

  The transport roller 85 is supported on the lower table 61 by a linear guide bearing (not shown), and can be moved and positioned in the Z-axis direction with respect to the lower table 61 under the control of a control device by an actuator such as a cylinder (not shown). It has become.

  The conveyance roller 85 is moved between a lower end position shown in FIG. 1 and an upper end position shown in FIG. 9 in the Z-axis direction under the control of a control device by an actuator such as a cylinder (not shown). In addition, the to-be-molded body installation body 63 is provided with a rectangular through-hole (not shown) through which the transport roller 85 can pass.

Further, between the vacuum bonding unit 3 and the transfer unit 5, similarly to the conveyance roller 85, a conveyance unit 87 including a conveyance roller 89 that supports the weight of the molding target W is provided.

  Next, the operation of the transfer device 1 will be described.

  As an initial state, as shown in FIG. 6, it is assumed that the mold M extends in a plate shape and stops between the mold original fabric installation portion 7 and the mold winding portion 9.

  In the vacuum bonding unit 3, the upper table 71 is raised, the molded object mounting body 63 is lowered, the lift pin 69 is lowered, and the second cylindrical body 79 is lowered, The conveyance roller 85 is lowered. Further, the transfer pattern forming body M3 (fine transfer pattern M1) of the mold M is opposed to the upper surface of the molding object mounting body 63.

  In the transfer unit 5, the rollers 23, 25, 27 are located on the mold winding unit 9 side in the X-axis direction, away from the molded body holder 21, and positioned for transfer in the Z-axis direction. Has been made. Further, the lift pin 41 is lowered, and the ultraviolet ray generator 35 does not emit ultraviolet rays.

  In the initial state, the molding target W is placed on the lift pins 69 protruding from the upper surface of the molding target mounting body 63 using a robot (not shown) or the like. At this time, the molded object W1 of the molded object W is in an uncured state and faces the mold M.

  Subsequently, under the control of the control device, the upper table 71 is lowered, the second cylindrical body 79 is raised, the lift pins 69 are lowered, and the molding body W is held by the molding body mounting body 63 ( (See FIG. 7). Thereby, the to-be-molded body W is in surface contact with the upper surface of the to-be-molded body mounting body 63. Further, the lower surface of the upper table 71 is in surface contact with the upper surface of the mold M, and the “B” -shaped upper surface of the second cylindrical body 79 is in surface contact with the lower surface of the mold M, so that the upper table 71 and the second cylinder are in contact with each other. The mold M is sandwiched between the shaped bodies 79. Then, a vacuum chamber 81 is formed, and the molding target W, the molding target mounting body 63, and the lower surface of the mold M (surface on which the fine transfer pattern M1 is provided) exist in the vacuum chamber 81. Yes.

  Subsequently, after the inside of the vacuum chamber 81 is evacuated by the vacuum pump 83, the molding target mounting body 63 is raised, and the molding target W1 of the molding target W is brought into contact with the mold M (see FIG. 8). Thereby, although it is a small force, the to-be-molded body W sticks to the mold M.

  If the inside of the vacuum chamber 81 is evacuated, holding of the molding body W on the molding body mounting body 63 (holding by vacuum suction) does not work, and the molding body W moves. A clamp device using a screw, a cylinder, or the like may be separately provided on the molding target mounting body 63 to hold the molding target W.

  Subsequently, the inside of the vacuum chamber 81 is returned to the atmospheric pressure, the upper table 71 is raised, the second cylindrical body 79 is lowered, the molded object mounting body 63 is lowered, and the conveying roller 85 is raised (FIG. 9). As a result, the upper table 71, the second cylindrical body 79, and the molded body placing body 63 are separated from the mold M and the molded body W, and the conveying roller 85 is in contact with the molded body W, so that the mold M and the molded body. W is placed on the transport roller 85.

  Subsequently, the mold winding unit 9 winds up the mold M by a predetermined length (see FIGS. 10 and 11), and positions the molding target W attached to the mold M at the molding target holder 21. The molded body W is held by the molded body holding body 21 (see FIG. 11).

  Subsequently, ultraviolet rays are emitted from the ultraviolet ray generator 35, and the rollers 23, 25, 27 are moved to the vacuum bonding unit 3 side in the X-axis direction (see FIG. 12). As a result, the fine transfer pattern W2 is transferred to the molding object W1 of the molding object W, and the mold M is peeled off from the molding object W (see FIGS. 13 and 14B).

  Subsequently, the lift pins 41 are raised (see FIG. 13), and the molding target W on which the fine transfer pattern W2 is transferred is carried out by a robot or the like.

  Subsequently, the lift pin 41 is lowered, and the rollers 23, 25, and 27 are returned to the mold winding unit 9 side to return to the initial state described above.

In the above description, the transfer unit 5 is adapted to the operation after finishing the operation of the allowed section 3 I vacuum bonding engagement, the operation of the vacuum bonding engagement it was 3 and the transfer unit 5 is operating It shall be done in parallel. That is, when the transfer to the molded body W has been made by the transfer unit 5, and performs at the allowed part 3 I vacuum bonding if the bonding to the mold M of the next molded body W.

  According to the transfer device 1, since the vacuum bonding unit 3 is provided separately from the transfer unit 5, it is possible to eliminate the generation of fine bubbles in the molding target W during transfer and perform transfer efficiently. Can do.

  That is, in the vacuum bonding unit 3, the mold M and the workpiece W are bonded together in a vacuum atmosphere, and the bonded product is transferred to the transfer unit 5 to perform transfer, thereby continuously bonding. Transfer can be performed (bonding and transfer can be performed concurrently in a vacuum atmosphere), and transfer can be performed efficiently.

  Moreover, in the vacuum bonding part 3, since it is only necessary to perform bonding, even if the molded object W is large (for example, even if the width dimension is 1 m or more and the length dimension is 1 m or more, A vacuum atmosphere can be easily generated (even if the width dimension is about 1 m to 2 m and the length dimension is about 1 m to 2 m), and air entrainment during transfer can be eliminated.

  Moreover, according to the transfer apparatus 1, since the mold original fabric installation part 7 and the mold winding part 9 are provided, the exchange of the mold M can be performed accurately and easily.

  More specifically, the size of the molded body 309 shown in FIG. 15 is 1 m (1000 mm) in length dimension (dimension in the horizontal direction in FIG. 15) and width dimension (dimension in the direction perpendicular to the paper surface in FIG. 15). It is often about 1.5m. The mold 323 is also enlarged in accordance with the size of the molded body 309.

  Further, in the transfer device 301 shown in FIG. 15, it is necessary to remove the mold 323 from the transfer device 301 and install a new mold 323 every time transfer is performed once or several times. However, since the mold 323 is large, it is difficult to handle and difficult to install in the transfer device 301 (when the mold 323 is installed in the chuck portions 319 and 321 of the transfer device 301, It is often installed bent.)

  On the other hand, the transfer apparatus 1 is provided with the mold original fabric installation part 7 and the mold winding part 9, so when replacing the mold M, the mold winding part 9 molds a predetermined length. It is only necessary to take up M and pull out a new part of the mold M (a part not used for transfer) from the mold original fabric installation part 7, and it becomes unnecessary to remove the mold M from the transfer device 1 and install it again. The mold M can be exchanged accurately and easily.

  Further, since the mold M can be exchanged quickly, the mold exchange time required by the transfer device 301 can be used for the transfer to the workpiece W, and the transfer can be performed efficiently.

  Further, according to the transfer device 1, the small diameter portion 29 for avoiding contact of the fine transfer pattern M 1 of the wound mold M is formed on the third roller 27. It is possible to prevent the fine transfer pattern M1 from being crushed, and the mold M can be reused.

  Moreover, according to the transfer apparatus 1, since the mold M can be peeled off from the to-be-molded body W with the 2nd roller 25 and the 3rd roller 27, each 1st-3rd roller 23,25,27. 1 to the other end (from the right to the left in FIG. 1) in the longitudinal direction of the workpiece holder 21, transfer of the fine transfer pattern onto the workpiece W and the workpiece The mold M can be peeled off from the molded body W, and transfer can be performed efficiently.

  Further, according to the transfer device 1, the mold M wound around the rollers 23, 25 and 27 and extending from the rollers 23, 25 and 27 (the part M4 and the part M5) are parallel to each other. Therefore, it is necessary to adjust the length of the mold M that is stretched between the mold original fabric installation portion 7 and the mold winding portion 9 even if the rollers 23, 25, and 27 are moved for transfer. The configuration of the transfer apparatus 1 can be simplified because it is almost eliminated.

  Further, in the conventional transfer device 301, the position of the roller 311A is changed, so that the bonding angle (an object to be molded 309 shown in FIG. 15 and the roller 311A and the second chuck portion 321 is stretched obliquely. However, in the transfer apparatus 1, the bonding angle can be made constant regardless of the positions of the rollers 23, 25, and 27, and more uniform transfer can be performed. .

DESCRIPTION OF SYMBOLS 1 Transfer apparatus 3 Vacuum bonding part 5 Transfer part 7 Mold original fabric installation part 9 Mold winding part 15 Press part 17 Curing part 19 Separation part 21 Molding object holder 23 First roller 25 Second roller 27 Third Roller C3 Center axis of first roller C4 Center axis of second roller C5 Center axis of third roller M Mold M1 Fine transfer pattern W Molded object

Claims (7)

In a transfer device for transferring a fine transfer pattern formed on a mold to a molding object,
A vacuum bonding part for bonding the mold and the molded body in a vacuum atmosphere;
A transfer unit that transfers a fine transfer pattern of the mold to a molded object of the molded body that has been conveyed in a state of being bonded in the vacuum bonding unit;
A transfer device comprising: The transfer device according to claim 1,
The mold is formed in a sheet shape,
It has a mold original fabric installation part and a mold winding part,
The mold extends from the mold original fabric installed in the mold original fabric installation portion to the mold winding portion with a predetermined tension, and extends.
The vacuum bonding part is installed on the mold original fabric installation part side of the mold extending between the mold original fabric installation part and the mold winding part,
The transfer device, wherein the transfer unit is installed on the mold winding unit side of a mold extending between the mold original fabric installation unit and the mold winding unit. In the transfer device according to claim 1 or 2,
The transfer section is cured by the pressing section that sandwiches and presses the mold and the molded body, the curing section that cures the molded object of the molded body that is pressed by the pressing section, and the curing section. And a separation unit that separates the mold attached to the molded body from the molded body. The transfer device according to claim 3, wherein
The transfer unit is configured to include a molded body holding body that holds the molded body,
The pressing portion includes a first roller, and the first roller includes a molding body that is held by the molding body holder and a mold that is attached to the molding body. In order to perform the transfer, it is sandwiched in cooperation with the molded object holder, and is rotated relative to the molded object holder by rotating around a central axis as a center of rotation. Configured to move a portion of the mold and the molded body,
The separation unit is configured and a second roller and a third roller, said second roller, said after curing at pressed Re name of the cured portion with the pressing portion is made By winding the mold to separate the mold attached to the molded body from the molded body, rotating around a central axis as a center of rotation, and moving relative to the molded body holder, It is configured to peel off the mold attached to the molded body installed in the molded body holding body from the molded body,
The third roller is wound around the second roller so that the mold extending from the second roller is separated from the molded body held by the molded body holding body. The transfer device is configured to rotate about a central axis as a center of rotation and move relative to the workpiece holder together with the second roller. The transfer device according to claim 1,
The transfer unit is pressed by the pressing unit that sandwiches and presses the mold and the molded body, a curing unit that cures the molded object of the molded body that is pressed by the pressing unit, and the pressing unit. A separation part that separates the mold that is adhered to the molded body by being cured in the cured part from the molded body;
The transfer unit is configured to include a molding target installation unit that sets the molding target,
The pressing portion includes a first roller, and the first roller includes a molding body that is held by the molding body holder and a mold that is attached to the molding body. In order to perform the transfer, it is sandwiched in cooperation with the molded object holder, and is rotated relative to the molded object holder by rotating around a central axis as a center of rotation. Configured to move a portion of the mold and the molded body,
The separation unit is configured and a second roller and a third roller, said second roller, said after curing at pressed Re name of the cured portion with the pressing portion is made By winding the mold to separate the mold attached to the molded body from the molded body, rotating around a central axis as a center of rotation, and moving relative to the molded body holder, It is configured to peel off the mold attached to the molded body installed in the molded body holding body from the molded body,
The third roller is wound around the second roller so that the mold extending from the second roller is separated from the molded body held by the molded body holding body. The transfer device is configured to rotate about a central axis as a center of rotation and move relative to the workpiece holder together with the second roller. In the transfer device according to claim 4 or 5,
The transfer device, wherein the third roller is formed with a small-diameter portion for avoiding contact with a fine transfer pattern of the wound mold. In a transfer method for transferring a fine transfer pattern formed on a mold to a molding object,
A vacuum bonding step of bonding the mold and the molded body in a vacuum atmosphere;
A transfer step of transferring a fine transfer pattern of the sheet-like mold to the molded object of the molded body that has been conveyed in the state of being bonded in the vacuum bonding step;
Transfer method and having a.

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