WO2012067438A3 - Procédé et appareil utilisables en vue du transfert de graphène - Google Patents

Procédé et appareil utilisables en vue du transfert de graphène Download PDF

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Publication number
WO2012067438A3
WO2012067438A3 PCT/KR2011/008779 KR2011008779W WO2012067438A3 WO 2012067438 A3 WO2012067438 A3 WO 2012067438A3 KR 2011008779 W KR2011008779 W KR 2011008779W WO 2012067438 A3 WO2012067438 A3 WO 2012067438A3
Authority
WO
WIPO (PCT)
Prior art keywords
graphene
substrate film
catalyst metal
film
layer
Prior art date
Application number
PCT/KR2011/008779
Other languages
English (en)
Other versions
WO2012067438A2 (fr
Inventor
Duk-Hwa Na
Jong-Hyuk Yoon
Young-Il Song
Dong-Kwan Won
Original Assignee
Samsung Techwin Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Techwin Co., Ltd. filed Critical Samsung Techwin Co., Ltd.
Priority to US13/988,250 priority Critical patent/US9315001B2/en
Priority to CN201180055772XA priority patent/CN103221335A/zh
Publication of WO2012067438A2 publication Critical patent/WO2012067438A2/fr
Publication of WO2012067438A3 publication Critical patent/WO2012067438A3/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation
    • C01B32/186—Preparation by chemical vapour deposition [CVD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
    • B32B37/025—Transfer laminating
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/194—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H19/00—Changing the web roll
    • B65H19/22—Changing the web roll in winding mechanisms or in connection with winding operations
    • B65H19/29—Securing the trailing end of the wound web to the web roll
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
    • Y10T156/1702—For plural parts or plural areas of single part

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

La présente invention concerne un procédé et un appareil utilisables en vue du transfert de graphène. Ledit procédé de transfert de graphène comprend les opérations suivantes : une opération de synthèse du graphène comprenant une étape consistant à former au moins une couche de graphène sur au moins une surface d'un film métallique catalyseur; une opération de fixation à un film de substrat comprenant les étapes consistant à mettre en contact une première surface adhésive du film de substrat avec au moins une couche de graphène et à comprimer le film métallique catalyseur et le film de substrat au moyen d'un premier cylindre; et une opération de séparation du film de substrat comprenant une étape consistant à séparer le film de substrat du film métallique catalyseur de façon à ce qu'au moins une couche de graphène soit séparée du film métallique catalyseur en même temps que le film de substrat.
PCT/KR2011/008779 2010-11-19 2011-11-17 Procédé et appareil utilisables en vue du transfert de graphène WO2012067438A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US13/988,250 US9315001B2 (en) 2010-11-19 2011-11-17 Method and apparatus for transferring graphene
CN201180055772XA CN103221335A (zh) 2010-11-19 2011-11-17 用于转移石墨烯的方法和设备

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100115736A KR101793684B1 (ko) 2010-11-19 2010-11-19 그래핀 전사장치
KR10-2010-0115736 2010-11-19

Publications (2)

Publication Number Publication Date
WO2012067438A2 WO2012067438A2 (fr) 2012-05-24
WO2012067438A3 true WO2012067438A3 (fr) 2012-09-20

Family

ID=46084526

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/008779 WO2012067438A2 (fr) 2010-11-19 2011-11-17 Procédé et appareil utilisables en vue du transfert de graphène

Country Status (4)

Country Link
US (1) US9315001B2 (fr)
KR (1) KR101793684B1 (fr)
CN (1) CN103221335A (fr)
WO (1) WO2012067438A2 (fr)

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JP5691524B2 (ja) * 2011-01-05 2015-04-01 ソニー株式会社 グラフェン膜の転写方法および透明導電膜の製造方法
US8561880B2 (en) * 2012-02-11 2013-10-22 International Business Machines Corporation Forming metal preforms and metal balls
KR101915195B1 (ko) * 2012-06-13 2018-11-05 한화에어로스페이스 주식회사 그래핀 제조 장치 및 이를 이용한 그래핀 제조 방법
EP2679540A1 (fr) * 2012-06-29 2014-01-01 Graphenea, S.A. Procédé de fabrication d'une monocouche de graphène sur substrats isolants
PL224447B1 (pl) * 2012-08-25 2016-12-30 Advanced Graphene Products Spółka Z Ograniczoną Odpowiedzialnością Sposób oddzielania grafenu od ciekłej matrycy formującej
KR101359949B1 (ko) * 2012-11-15 2014-02-10 (주)피엔티 탄소 전극 형성 장치 및 방법
KR101980711B1 (ko) * 2012-11-16 2019-08-28 엘지전자 주식회사 그래핀 전자파 차단판, 이의 제조방법 및 이를 이용하는 전자기기 및 전자레인지의 도어
EP2928700B1 (fr) * 2012-12-07 2018-09-12 Aixtron Se Procédé et appareil permettant de transférer des films parmi des substrats
US9096050B2 (en) 2013-04-02 2015-08-04 International Business Machines Corporation Wafer scale epitaxial graphene transfer
US9337274B2 (en) 2013-05-15 2016-05-10 Globalfoundries Inc. Formation of large scale single crystalline graphene
CN103342472A (zh) * 2013-07-11 2013-10-09 常州二维碳素科技有限公司 一种转移石墨烯薄膜的方法
CN103407809B (zh) * 2013-08-12 2015-10-14 中国科学院重庆绿色智能技术研究院 一种石墨烯转移设备
CN103833030B (zh) * 2014-01-16 2016-01-06 中国科学院青岛生物能源与过程研究所 一种大面积转移cvd石墨烯膜的方法
KR101945409B1 (ko) * 2014-03-14 2019-02-07 한화에어로스페이스 주식회사 그래핀 제조 장치
EP3224870A1 (fr) * 2014-11-04 2017-10-04 SABIC Global Technologies B.V. Transfert direct de multiples couches de graphène sur de multiples substrats cibles
KR101870643B1 (ko) * 2016-01-28 2018-06-25 주식회사 참트론 그래핀의 전사방법
WO2018160732A1 (fr) * 2017-02-28 2018-09-07 Massachusetts Institute Of Technology Systèmes et procédés pour impression par transfert électromécanique de matériaux bidimensionnels
CN107618249B (zh) * 2017-08-03 2019-11-12 无锡格菲电子薄膜科技有限公司 生长有石墨烯薄膜的基底的自动覆膜方法及其设备
US10717653B2 (en) * 2017-11-08 2020-07-21 Vaon, Llc Graphene production by the thermal release of intrinsic carbon
KR102187910B1 (ko) * 2020-07-02 2020-12-07 국방과학연구소 그래핀/유연 기재 제조방법
CN111960407B (zh) * 2020-09-11 2024-03-26 深圳市合尔为科技有限公司 卷料贴合转移装置以及生产线
CN115818631B (zh) * 2022-11-21 2023-08-29 中国铝业股份有限公司 一种石墨烯剥离系统

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Also Published As

Publication number Publication date
WO2012067438A2 (fr) 2012-05-24
KR101793684B1 (ko) 2017-11-03
US9315001B2 (en) 2016-04-19
KR20120054383A (ko) 2012-05-30
US20130233480A1 (en) 2013-09-12
CN103221335A (zh) 2013-07-24

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