WO2012065324A1 - 薄膜干燥方法、配向膜干燥方法及显示面板的装造方法 - Google Patents

薄膜干燥方法、配向膜干燥方法及显示面板的装造方法 Download PDF

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Publication number
WO2012065324A1
WO2012065324A1 PCT/CN2010/079533 CN2010079533W WO2012065324A1 WO 2012065324 A1 WO2012065324 A1 WO 2012065324A1 CN 2010079533 W CN2010079533 W CN 2010079533W WO 2012065324 A1 WO2012065324 A1 WO 2012065324A1
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Prior art keywords
alignment film
film
substrate
vacuum chamber
heating
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English (en)
French (fr)
Inventor
贺成明
郑兴科
施翔尹
李为钧
廖炳杰
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Definitions

  • the present invention relates to a method for drying a film, and more particularly to a method for drying an alignment film and a method for mounting a display panel.
  • Liquid crystal display (Liquid Crystal Display, LCD) has been widely used in a variety of electronic products, most of the liquid crystal display is a backlight type liquid crystal display, which is composed of a liquid crystal display panel and a backlight module (backlight Module).
  • the liquid crystal display panel is composed of two transparent substrates and a liquid crystal sealed between the substrates.
  • an alignment film is required to determine the alignment direction of the liquid crystal.
  • the material of the alignment film is liquid polyimide (PI), which can be formed on the substrate of the liquid crystal display panel by coating.
  • PI liquid polyimide
  • the alignment film is heated to evaporate the liquid solvent in the PI, thereby forming a solid alignment film.
  • the substrate coated with the alignment film is supported by a support column provided on the heating plate (supporting Pin) is placed close to the upper side of the heating plate for heating, wherein temperature uniformity of heating and drying speed are important factors affecting the alignment film.
  • the position at which the support column is in contact with the substrate may be inconsistent in temperature, that is, the temperature at which the support column is in contact with the temperature is different from the other positions of the substrate. Therefore, the occurrence of the drying speed of the alignment film on the substrate does not coincide, and the film quality of the alignment film is seriously affected.
  • the main object of the present invention is to provide a method for drying a film, the film comprising a liquid solvent, the method comprising the steps of: forming the film on a substrate; placing the substrate in a vacuum chamber; and reducing the The pressure within the vacuum chamber vaporizes the liquid solvent of the membrane within the vacuum chamber.
  • Another object of the present invention is to provide a method for drying an alignment film, the alignment film comprising a liquid solvent, the method comprising the steps of: forming the alignment film on a substrate; placing the substrate in a vacuum chamber; And reducing the pressure within the vacuum chamber such that the liquid solvent of the alignment film within the vacuum chamber is vaporized.
  • the pressure within the vacuum chamber is reduced to a predetermined vacuum pressure such that the liquid solvent of the alignment film within the vacuum chamber is vaporized.
  • the preset vacuum pressure is 13 Pa or more and 53 Pa or less.
  • the preset vacuum pressure is 26 Pa or more and 53 Pa or less.
  • the temperature of the vacuum chamber is 22 ° C or more and 27 ° C or less.
  • the method further includes the step of: heating the alignment film at a normal pressure after the liquid solvent is vaporized for a predetermined time, and the heating temperature is 80 ° C or more and 100 or less °C.
  • the method further includes the following steps: after heating the alignment film, heating the alignment film at a high temperature, wherein the temperature of the high temperature heating is 220 ° C or more and 230 or less °C.
  • the film drying method of the present invention and the alignment film drying method thereof and the method for mounting the display panel can dry the film under normal temperature conditions without heating, so that the film can be dried under the condition of uniform temperature (normal temperature) to ensure The quality of the film after drying.
  • the film drying method of the present invention and the alignment film drying method therefor and the method for mounting the display panel can dry the film under normal temperature conditions without heating, thereby avoiding a situation in which the heating temperature is inconsistent. Therefore, by the drying method of the present invention, the film (e.g., the alignment film) can have a good film quality after drying, for example, the film can have a uniform thickness. Furthermore, during vacuum drying, residual bubbles on the substrate can be eliminated to ensure film quality on the substrate.
  • FIG. 1 is a cross-sectional view showing a display panel and a backlight module in accordance with an embodiment of the present invention
  • FIG. 2 is a flow chart showing a method of fabricating a display panel in accordance with an embodiment of the present invention
  • FIG. 3 shows a schematic view of a substrate placed in a vacuum chamber in accordance with an embodiment of the present invention
  • FIG. 4 shows a schematic view of a substrate placed on a hot plate in accordance with an embodiment of the present invention.
  • FIG. 1 shows a cross-sectional view of a display panel and a backlight module according to an embodiment of the invention.
  • the film drying method of the present embodiment can be applied to the alignment film (film) 112, 122 of the liquid crystal display panel 100 during the mounting process of the liquid crystal display panel 100.
  • the display panel 100 can be disposed on the backlight module 200, thereby forming a liquid crystal display device.
  • the liquid crystal display panel 100 can include a first substrate 110, a second substrate 120, a liquid crystal layer 130, a first polarizer 140, and a second polarizer 150.
  • the substrate material of the first substrate 110 and the second substrate 120 may be a glass substrate or a flexible plastic substrate.
  • the first substrate 110 may be, for example, a color filter (Color). a glass substrate of Filter, CF) or a substrate of other materials
  • the second substrate 120 may be, for example, a thin film transistor (Thin Film) Transistor, TFT) A glass substrate of a matrix or a substrate of other materials.
  • TFT thin film transistor
  • the color filter and the TFT matrix may also be disposed on the same substrate.
  • the liquid crystal layer 130 is formed between the first substrate 110 and the second substrate 120 .
  • the first polarizer 140 is a side on which the first substrate 110 is disposed, and is opposite to the liquid crystal layer 130 (that is, the light exiting side of the first substrate 110), and the second polarizer 150 is a side on which the second substrate 120 is disposed, and With respect to the liquid crystal layer 130 (that is, the light incident side of the second substrate 120).
  • the first substrate 110 may include a first electrode 111 and a first alignment film 112 .
  • the second substrate 120 may include a second electrode 121 and a second alignment film 122.
  • the first electrode 111 and the second electrode 121 are preferably made of a light-transmitting conductive material such as ITO, IZO, AZO, GZO, TCO or ZnO, and the first electrode 111 and the second electrode 121 may apply a voltage to the liquid crystal layer 130. Liquid crystal molecules 102.
  • the first electrode 111 is, for example, a common electrode
  • the second electrode 121 is, for example, a pixel electrode.
  • FIG. 2 a flow chart of a method of fabricating a display panel in accordance with an embodiment of the present invention is shown.
  • the manufacturing method of the display panel of the present embodiment is performed, first, the first alignment film 112 is formed on the first substrate 110 (step S301), and the second alignment film 122 is formed on the second substrate 120 (step S302).
  • the first electrode 111 is formed on the first substrate 110
  • the second electrode 121 is formed on the second substrate 120.
  • the substrates 110, 120 having the electrodes 111, 121 may be pre-cleaned and pre-baked to clean the surfaces of the substrates 110, 120 (i.e., the surfaces of the electrodes 111, 121).
  • the materials of the first alignment film 112 and the second alignment film 122 may be, for example, polyimide (PI), and the liquid polyimide may be applied to the electrodes 111 on the substrates 110 and 120. And 121, to form the first alignment film 112 and the second alignment film 122, respectively.
  • the first alignment film 112 and the second alignment film 122 before drying include a liquid solvent, which is, for example, ethylene glycol butyl ether (Butyl). Cellosolve, BC) and / or N-methyl-2-pyrrolidone (NMP).
  • FIG. 3 is a schematic view showing the substrate placed in a vacuum chamber according to an embodiment of the invention.
  • the first substrate 110 and/or the second substrate 120 are placed in the vacuum chamber 101 (step S303) to dry the alignment films 112 and 122 on the substrates 110 and 120.
  • the first substrate 110 and the second substrate 120 may be simultaneously placed in the vacuum chamber 101 for vacuum drying; or the first substrate 110 and the second substrate 120 may be separately placed in the vacuum chamber 101. For vacuum drying.
  • the pressure in the vacuum chamber 101 is lowered (step S304), so that the liquid solvent of the first alignment film 112 and/or the second alignment film 122 in the vacuum chamber 101 is vaporized.
  • the alignment films 112, 122 are dried.
  • the air in the vacuum chamber 101 can be drawn to the outside through an air suction device (for example, a pump) to reduce the pressure in the vacuum chamber 101.
  • an air suction device for example, a pump
  • the residual gas on the substrate 110 and/or 120 can be eliminated by the evacuation of the vacuum chamber 101 to reduce defects such as bubbles, and the film quality on the substrates 110, 120 can be ensured.
  • the vaporization temperature of the liquid is proportional to its ambient pressure
  • the pressure (ambient pressure) in the vacuum chamber 101 is lowered, the first alignment film 112 and/or the second alignment film 122 in the vacuum chamber 101
  • the vaporization temperature of the liquid solvent is also lowered.
  • the pressure in the vacuum chamber 101 is reduced to a predetermined vacuum pressure, so that the liquid solvent of the alignment films 112, 122 can be vaporized under normal temperature conditions (for example, 22 to 35 ° C).
  • the effect of drying the alignment films 112 and 122 is achieved by volatilizing the liquid solvent of the alignment films 112 and 122. Therefore, the liquid solvent of the alignment films 112, 122 can be vaporized under normal temperature conditions without heating.
  • the liquid solvent of the alignment films 112 and 122 can be vaporized under normal temperature conditions without heating, that is, the alignment films 112 and 122 can be dried under the condition of uniform temperature (normal temperature), and thus the alignment films 112 and 122 are disposed. It can have a uniform drying speed to improve the inconsistency of the heating temperature of the existing drying method, and to ensure the film quality of the alignment film.
  • the pressure in the vacuum chamber 101 is a preset vacuum pressure, for example, 13 Pa or more and 53 Pa or less.
  • This preset vacuum pressure can be determined depending on the composition of the liquid solvent of the alignment films 112, 122 and the normal temperature conditions (current ambient temperature).
  • the liquid solvent components of the alignment films 112, 122 are BC and NMP, wherein the content of BC is 51%, the content of NMP is 45%, and the vapor pressure of BC (vapor) Pressure) is 266 Pa (Pa), NMP has a vapor pressure of 53 Pa.
  • the preset vacuum pressure may be 26 Pa or more and 53 Pa or less to allow the liquid solvent of the alignment films 112 and 122 to be vaporized at a normal temperature of 22 ° C or more and 27 ° C or less.
  • the alignment films 112 and/or 122 on the substrate 110 and/or 120 may be under normal pressure. It is heated to ensure that the liquid solvent of the alignment films 112, 122 is completely volatilized to achieve a completely dry effect.
  • the alignment film 112 and/or 122 may be heated by the heating plate 102, wherein the substrate 110 and/or 120 is placed on the support column 103 of the heating plate 102, and the heating temperature is 80 ° C or more and less than or equal to 100 ° C.
  • another high temperature heating can be performed under normal pressure to ensure that the liquid solvent of the alignment films 112 and 122 is completely volatilized.
  • the temperature at which the high temperature is heated may be 220 ° C or more and 230 ° C or less.
  • the liquid crystal layer 130 is formed between the first alignment film 112 of the first substrate 110 and the second alignment film 122 of the second substrate 120 (steps). S305), and the liquid crystal display panel 100 is completed.
  • the liquid crystal of the liquid crystal layer 130 may be dropped into the sealant (not shown) on the first substrate 110 by using a liquid crystal dropping method (ODF), and then the second substrate 120 may pass through a pair of positions.
  • An assembly device (not shown) is aligned and assembled on the first substrate 110, and the sealant is cured, thereby forming a liquid crystal layer 130 between the first substrate 110 and the second substrate 120.
  • the film drying method of the present invention can be applied to the process of mounting the liquid crystal display panel 100 to dry the alignment films 112, 122.
  • the film may be formed on the substrate (for example, the first substrate 110 and/or the second substrate 120), and then the substrate having the film to be dried may be placed in the vacuum chamber 101, and then, The pressure in the vacuum chamber 101 can be lowered to a preset vacuum pressure to vaporize the liquid solvent of the film in the vacuum chamber 101 to dry the film.
  • the film drying method of the present invention can also be applied to other forms of film drying.
  • the film drying method of the present invention and the alignment film drying method therefor and the method for mounting the display panel can dry the film under normal temperature conditions without heating, thereby avoiding the case where the heating temperature is inconsistent. Therefore, by the drying method of the present invention, the film (e.g., the alignment film) can have a good film quality after drying, for example, the film can have a uniform thickness. Furthermore, during vacuum drying, residual bubbles on the substrate can be eliminated to ensure film quality on the substrate.

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  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
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Description

薄膜干燥方法、配向膜干燥方法及显示面板的装造方法 技术领域
本发明涉及薄膜的干燥方法，特别是涉及一种配向膜干燥方法及显示面板的装造方法。
 背景技术
液晶显示器(Liquid Crystal Display，LCD)已被广泛应用于各种电子产品中，液晶显示器大部分为背光型液晶显示器，其是由液晶显示面板及背光模块(backlight module)所组成。液晶显示面板是由两片透明基板以及被封于基板之间的液晶所构成。
在液晶显示面板的制程中，需制造一配向膜，用以决定液晶的配向方向。通常，此配向膜的材料为液态的聚酰亚胺(polyimide，PI)，其可通过涂布的方式来形成于液晶显示面板的基板上。接着，此配向膜需进行加热，以蒸发PI中的液态溶剂，因而形成固态的配向膜。
然而，在一般配向膜的加热过程中，涂布有配向膜的基板是利用设置于加热板上的支撑柱(supporting pin)，而被置放于靠近于加热板的上方，以进行加热，其中加热的温度均匀性及干燥速度是影响配向膜的重要因素。而在此加热过程中，支撑柱与基板接触的位置会有温度不一致的情形，亦即支撑柱所接触的位置的温度是不同于基板的其它位置的温度。因此，发生基板上的配向膜的干燥速度不一致的情形，而严重地影响配向膜的薄膜质量。
故，有必要提供一种薄膜干燥方法、配向膜干燥方法及显示面板的装造方法，以解决现有技术所存在的问题。
 技术问题
本发明的主要目的在于提供一种薄膜的干燥方法，所述薄膜包括液态溶剂，所述方法包括如下步骤：形成所述薄膜于基板上；置放所述基板于真空腔室内；以及降低所述真空腔室内的压力，使得所述真空腔室内的所述薄膜的液态溶剂气化。
本发明的另一目的在于提供一种配向膜的干燥方法，所述配向膜包括液态溶剂，所述方法包括如下步骤：形成所述配向膜于基板上；置放所述基板于真空腔室内；以及降低所述真空腔室内的压力，使得所述真空腔室内的所述配向膜的液态溶剂气化。
本发明的又一目的在于提供一种显示装置的制造方法，所述方法包括如下步骤：形成第一配向膜于第一基板上，其中所述第一配向膜包括液态溶剂；形成第二配向膜于第二基板上，其中所述第二配向膜包括所述液态溶剂；置放所述第一基板及/或所述第二基板于真空腔室内；降低所述真空腔室内的压力，使得所述真空腔室内的所述第一配向膜及/或第二配向膜的所述液态溶剂气化；以及在所述液态溶剂气化后，形成液晶层于所述第一配向膜与所述第二配向膜之间。
 技术解决方案
在本发明的一实施例中，所述真空腔室内的压力是被降低至预设真空压力，使得所述真空腔室内的所述配向膜的液态溶剂气化。
在本发明的一实施例中，所述预设真空压力是大于等于13帕且小于等于53帕。
在本发明的一实施例中，所述预设真空压力是大于等于26帕且小于等于53帕。
在本发明的一实施例中，所述真空腔室的温度为大于等于22℃且小于等于27℃。
在本发明的一实施例中，所述方法还包括如下步骤：在所述液态溶剂气化预定时间之后，在常压下加热所述配向膜，其加热温度为大于等于80℃且小于等于100℃。
在本发明的一实施例中，所述方法还包括如下步骤：在加热所述配向膜后，对所述配向膜进行高温加热，其中所述高温加热的温度是大于等于220℃且小于等于230℃。
本发明的薄膜干燥方法及其应用的配向膜干燥方法及显示面板的装造方法可在常温条件下干燥薄膜，而不需加热，因而可在温度一致(常温)的条件下干燥薄膜，以确保干燥后的薄膜质量。
 有益效果
本发明的薄膜干燥方法及其应用的配向膜干燥方法及显示面板的装造方法可在常温条件下干燥薄膜，而不需加热，因而可避免加热温度不一致的情形。因此，通过本发明的干燥方法，薄膜(如配向膜)可在干燥后具有良好的薄膜质量，例如，薄膜可具有一致的厚度。再者，在真空干燥的过程中，基板上残留的气泡可被排除，以确保基板上的薄膜质量。
 附图说明
为让本发明的上述内容能更明显易懂，下文特举优选实施例，并配合所附图式，作详细说明如下：
图1显示依照本发明的一实施例的显示面板与背光模块的剖面示意图；
图2显示依照本发明的一实施例的显示面板的制造方法的方法流程图；
图3显示依照本发明的一实施例的基板置于真空腔室内的示意图；以及
图4显示依照本发明的一实施例的基板置于加热板上的示意图。
 本发明的最佳实施方式
以下各实施例的说明是参考附加的图式，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。
在图中，结构相似的单元是以相同标号表示。
请参照图1，其显示依照本发明的一实施例的显示面板与背光模块的剖面示意图。本实施例的薄膜干燥方法可应用于液晶显示面板100的装造过程中，用以干燥液晶显示面板100的配向膜(薄膜)112、122。当应用本实施例的液晶显示面板100来制造显示装置时，可设置显示面板100于背光模块200上，因而形成液晶显示装置。此液晶显示面板100可包括第一基板110、第二基板120、液晶层130、第一偏光片140及第二偏光片150。第一基板110和第二基板120的基板材料可为玻璃基板或可挠性塑料基板，在本实施例中，第一基板110可例如为具有彩色滤光片(Color Filter，CF)的玻璃基板或其它材质的基板，而第二基板120可例如为具有薄膜晶体管(Thin Film Transistor，TFT)矩阵的玻璃基板或其它材质的基板。值得注意的是，在一些实施例中，彩色滤光片和TFT矩阵亦可配置在同一基板上。
如图1所示，液晶层130是形成于第一基板110与第二基板120之间。第一偏光片140是设置第一基板110的一侧，并相对于液晶层130(亦即为第一基板110的出光侧)，第二偏光片150是设置第二基板120的一侧，并相对于液晶层130(亦即为第二基板120的入光侧)。
如图1所示，在本实施例中，第一基板110可包括第一电极111及第一配向膜112。第二基板120可包括第二电极121及第二配向膜122。第一电极111和第二电极121优选是以透光导电材料所制成，例如：ITO、IZO、AZO、GZO、TCO或ZnO，第一电极111和第二电极121可施加电压于液晶层130的液晶分子102。在本实施例中，第一电极111例如为共同电极，第二电极121例如为像素电极。
请参照图2，其显示依照本发明的一实施例的显示面板的制造方法的方法流程图。当进行本实施例的显示面板的制造方法时，首先，形成第一配向膜112于第一基板110上(步骤S301)，且形成第二配向膜122于第二基板120上(步骤S302)。在步骤S301及S302之前，第一电极111是形成于第一基板110上，第二电极121是形成于第二基板120上。且在步骤S301及S302之前，具有电极111、121的基板110、120可被预清洗以及预烘烤，以清洁基板110、120的表面(亦即电极111、121的表面)。在步骤S301及S302中，第一配向膜112及第二配向膜122的材料可例如为聚酰亚胺(PI)，液态的聚酰亚胺可被涂布于基板110、120上的电极111、121上，以分别形成第一配向膜112及第二配向膜122。此时，干燥前的第一配向膜112及第二配向膜122包括液态溶剂，其例如为乙二醇丁醚(Butyl Cellosolve，BC)及/或N-甲基吡啶-2-吡咯烷酮(N-methyl-2-pyrrolidone，NMP)。
请参照图2及图3，图3显示依照本发明的一实施例的基板置于真空腔室内的示意图。接着，置放第一基板110及/或第二基板120于真空腔室101内(步骤S303)，以干燥基板110、120上的配向膜112、122。此时，第一基板110与第二基板120可同时置放于真空腔室101内来进行真空干燥；或者，第一基板110与第二基板120可各别地置放于真空腔室101内来进行真空干燥。
如图2及图3所示，接着，降低真空腔室101内的压力(步骤S304)，使得真空腔室101内的第一配向膜112及/或第二配向膜122的液态溶剂气化，以干燥配向膜112、122。真空腔室101内的空气可通过一抽气装置(例如泵浦)来抽出至外部，以降低真空腔室101内的压力。同时，通过真空腔室101的抽气，基板110及/或120上的残留气体可被排除，以减少气泡等缺陷，而可确保基板110、120上的薄膜质量。由于液体的气化温度是正比于其环境压力，因此当真空腔室101内的压力(环境压力)被降低时，真空腔室101内的第一配向膜112及/或第二配向膜122的液态溶剂的气化温度亦被降低。在本实施例中，真空腔室101内的压力是被降低至一预设真空压力，而使得配向膜112、122的液态溶剂可在一常温条件(例如22~35℃)下进行气化，以挥发配向膜112、122的液态溶剂，达到干燥配向膜112、122的效果。因此，配向膜112、122的液态溶剂可在常温条件下来进行气化，而不需加热。由于配向膜112、122的液态溶剂可在常温条件下来进行气化，而不需进行加热，亦即配向膜112、122可在温度一致(常温)的条件下进行干燥，因而配向膜112、122可具有一致的干燥速度，以改善现有干燥方法的加热温度不一致的问题，确保配向膜的薄膜质量。
当真空腔室101内的配向膜112、122的液态溶剂在常温条件下进行气化时，真空腔室101内的压力为预设的真空压力，例如大于等于13帕且小于等于53帕。此预设真空压力可依据配向膜112、122的液态溶剂的成份以及常温条件(目前的环境温度)来决定。例如，在本实施例中，配向膜112、122的液态溶剂成份为BC及NMP，其中BC的含量为51%，NMP的含量为45%，BC的蒸气压(vapor pressure)为266帕(Pa)，NMP的蒸气压为53 Pa。此时，此预设真空压力可大于等于26帕且小于等于53帕，以允许配向膜112、122的液态溶剂在大于等于22℃且小于等于27℃的常温条件下进行气化。
请参照图4，其显示依照本发明的一实施例的基板置于加热板上的示意图。在一实施例中，在真空干燥后(步骤S304之后)且真空腔室101内的液态溶剂气化预定时间之后，基板110及/或120上的配向膜112及/或122可在常压下被加热，以确保配向膜112、122的液态溶剂完全地挥发，达到完全干燥的效果。此时，配向膜112及/或122可通过加热板102来进行加热，其中基板110及/或120是放置于加热板102的支撑柱103上，且加热的温度为大于等于80℃且小于等于100℃。接着，可在常压下再进行一次高温加热，以确保配向膜112、122的液态溶剂完全地挥发。此高温加热的温度可为大于等于220℃且小于等于230℃。
如图1及图2所示，在干燥配向膜112、122后，接着，形成液晶层130于第一基板110的第一配向膜112与第二基板120的第二配向膜122之间(步骤S305)，而完成液晶显示面板100。在本实施例中，液晶层130的液晶可先例如利用液晶滴下方式(ODF)来滴在第一基板110上的框胶(未绘示)内，接着，第二基板120可通过一对位组装设备(未绘示)来对位及组装于第一基板110上，并固化此框胶，因而形成液晶层130于第一基板110与第二基板120之间。
因此，本发明的薄膜干燥方法可应用于液晶显示面板100的装造过程中，用以干燥配向膜112、122。当进行薄膜的干燥方法时，薄膜可形成于基板(例如第一基板110及/或第二基板120)上，接着，具有待干燥薄膜的基板可被置放于真空腔室101内，接着，可降低真空腔室101内的压力至预设的真空压力，使得真空腔室101内的薄膜的液态溶剂气化，以干燥此薄膜。然不限于此，本发明的薄膜干燥方法亦可应用于其它形式的薄膜干燥。
由上述可知，本发明的薄膜干燥方法及其应用的配向膜干燥方法及显示面板的装造方法可在常温条件下干燥薄膜，而不需加热，因而可避免加热温度不一致的情形。因此，通过本发明的干燥方法，薄膜(如配向膜)可在干燥后具有良好的薄膜质量，例如，薄膜可具有一致的厚度。再者，在真空干燥的过程中，基板上残留的气泡可被排除，以确保基板上的薄膜质量。
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。
 本发明的实施方式
工业实用性
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Claims (20)

  1. 一种薄膜的干燥方法，所述薄膜包括液态溶剂，其特征在于：所述方法包括如下步骤：
    形成所述薄膜于基板上；
    置放所述基板于真空腔室内，其中所述真空腔室的温度为大于等于22℃且小于等于27℃；以及
    降低所述真空腔室内的压力至预设真空压力，使得所述真空腔室内的所述薄膜的液态溶剂气化，其中所述预设真空压力是大于等于13帕且小于等于53帕。
  2. 根据权利要求1所述的方法，其特征在于：所述预设真空压力是大于等于26帕且小于等于53帕。
  3. 根据权利要求1所述的方法，其特征在于：还包括如下步骤：在所述液态溶剂气化预定时间之后，在常压下加热所述薄膜。
  4. 根据权利要求3所述的方法，其特征在于，在加热所述薄膜的过程中，加热温度为大于等于80℃且小于等于100℃。
  5. 根据权利要求4所述的方法，其特征在于：还包括如下步骤：在加热所述薄膜后，对所述薄膜进行高温加热，其中所述高温加热的温度是大于等于220℃且小于等于230℃。
  6. 一种显示装置的制造方法，其特征在于：所述方法包括如下步骤：
    形成第一配向膜于第一基板上，其中所述第一配向膜包括液态溶剂；
    形成第二配向膜于第二基板上，其中所述第二配向膜包括所述液态溶剂；
    置放所述第一基板及/或所述第二基板于真空腔室内；
    降低所述真空腔室内的压力，使得所述真空腔室内的所述第一配向膜及/或第二配向膜的所述液态溶剂气化；以及
    在所述液态溶剂气化后，形成液晶层于所述第一配向膜与所述第二配向膜之间。
  7. 根据权利要求6所述的方法，其特征在于：所述真空腔室内的压力是被降低至预设真空压力，使得所述真空腔室内的所述薄膜的液态溶剂气化。
  8. 根据权利要求7所述的方法，其特征在于：所述预设真空压力是大于等于13帕且小于等于53帕。
  9. 根据权利要求8所述的方法，其特征在于：所述预设真空压力是大于等于26帕且小于等于53帕。
  10. 根据权利要求6所述的方法，其特征在于：所述真空腔室的温度为大于等于22℃且小于等于27℃。
  11. 根据权利要求6所述的方法，其特征在于：还包括如下步骤：在所述液态溶剂气化预定时间之后，在常压下加热所述配向膜。
  12. 根据权利要求11所述的方法，其特征在于：在加热所述配向膜的过程中，加热温度为大于等于80℃且小于等于100℃。
  13. 根据权利要求12所述的方法，其特征在于：还包括如下步骤：在加热所述配向膜后，对所述配向膜进行高温加热，其中所述高温加热的温度是大于等于220℃且小于等于230℃。
  14. 一种配向膜的干燥方法，所述配向膜包括液态溶剂，其特征在于：所述方法包括如下步骤：
    形成所述配向膜于基板上；
    置放所述基板于真空腔室内；以及
    降低所述真空腔室内的压力，使得所述真空腔室内的所述配向膜的液态溶剂气化。
  15. 根据权利要求14所述的方法，其特征在于：所述真空腔室内的压力是被降低至预设真空压力，使得所述真空腔室内的所述配向膜的液态溶剂气化。
  16. 根据权利要求15所述的方法，其特征在于：所述预设真空压力是大于等于13帕且小于等于53帕。
  17. 根据权利要求16所述的方法，其特征在于：所述预设真空压力是大于等于26帕且小于等于53帕。
  18. 根据权利要求14所述的方法，其特征在于：所述真空腔室的温度为大于等于22℃且小于等于27℃。
  19. 根据权利要求14所述的方法，其特征在于：还包括如下步骤：在所述液态溶剂气化预定时间之后，在常压下加热所述配向膜，其加热温度为大于等于80℃且小于等于100℃。
  20. 根据权利要求19所述的方法，其特征在于：还包括如下步骤：在加热所述配向膜后，对所述配向膜进行高温加热，其中所述高温加热的温度是大于等于220℃且小于等于230℃。
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