WO2012057002A1 - Electrode wire for solar cell, substrate thereof, and substrate manufacturing method - Google Patents

Electrode wire for solar cell, substrate thereof, and substrate manufacturing method Download PDF

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Publication number
WO2012057002A1
WO2012057002A1 PCT/JP2011/074220 JP2011074220W WO2012057002A1 WO 2012057002 A1 WO2012057002 A1 WO 2012057002A1 JP 2011074220 W JP2011074220 W JP 2011074220W WO 2012057002 A1 WO2012057002 A1 WO 2012057002A1
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Prior art keywords
solar cell
electrode wire
grain boundary
cold rolling
flat
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PCT/JP2011/074220
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French (fr)
Japanese (ja)
Inventor
健児 岡本
伸 及川
貴志郎 赤壁
真人 三井
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三菱伸銅株式会社
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Priority claimed from JP2010241952A external-priority patent/JP2012094743A/en
Priority claimed from JP2010262228A external-priority patent/JP2012114260A/en
Application filed by 三菱伸銅株式会社 filed Critical 三菱伸銅株式会社
Publication of WO2012057002A1 publication Critical patent/WO2012057002A1/en

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/02Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/02Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • C23C2/022Pretreatment of the material to be coated, e.g. for coating on selected surface areas by heating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/02Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • C23C2/024Pretreatment of the material to be coated, e.g. for coating on selected surface areas by cleaning or etching
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/023Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/05Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
    • H01L31/0504Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module
    • H01L31/0512Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module made of a particular material or composition of materials

Definitions

  • the present invention relates to an electrode wire for solar cells, a substrate thereof, and a method for producing the substrate, and more particularly, for a solar cell formed of a pure copper thin plate slit material having good adhesion to plating applied to the surface.
  • the present invention relates to a flat substrate for an electrode wire and a method for producing the same.
  • Solar cells are usually soldered to a semiconductor substrate formed of a silicon semiconductor having a PN junction and a solder band formed so as to cross a plurality of surface electrodes provided linearly on the surface of the semiconductor substrate.
  • a connecting electrode wire is provided, and a plurality of solar cells are connected in series to obtain a desired electromotive force.
  • one surface (lower surface) of the connecting electrode wire is soldered to the surface electrode of one solar cell, and the other surface (upper surface) is soldered to the back electrode of a relatively large area of the adjacent solar cell. Made by doing.
  • the manufacturing method of the flat electrode material used as the base material for the electrode wire for connection is to roll a copper wire having a round cross section such as tough pitch Cu, oxygen-free Cu, phosphorus deoxidized Cu, high purity Cu (99.9999% or more). After rolling, flat rolling such as tough pitch Cu, oxygen-free Cu, phosphorus deoxidized Cu, high purity Cu (99.9999% or more) in a rolling mill, hot rolling, cold rolling, annealing There is a slit processing method of cutting with a slitter, and the electrode wire for connection is manufactured by performing solder plating on the surface of the formed flat electrode material.
  • Patent Document 1 discloses rolling of pure copper in which the base material before plating of the electrode wire for solar cells in which the surface of the base material is subjected to molten solder plating contains 99.90 mass% or more of Cu.
  • the peak intensities by X-ray diffraction of the crystal orientation ⁇ 100>, ⁇ 114>, ⁇ 112> in the rolling direction are expressed as P ⁇ 100>, P ⁇ 114>, P ⁇ 112>, respectively.
  • the peak intensity ratio PR (%) (P ⁇ 114> + P ⁇ 112>) ⁇ 100 / (P ⁇ 100> + P ⁇ 114> + ⁇ 112>) is 50 to 90%, which is superior to the conventional one.
  • a method of manufacturing an electrode wire for solar cells and a base material having plastic deformability is disclosed.
  • Patent Document 2 in a solder plating wire for a solar cell in which a part or all of the surface of a conductor formed in a rectangular shape is coated with solder plating, a 0.2% proof stress value in a conductor tensile test is 90 MPa or less.
  • a solar cell solder-plated wire that has a conductor crystal grain size of 20 ⁇ m or more and 300 ⁇ m or less and is less likely to warp or break the solar cell when the connecting lead wire is joined even when the solar cell is thinned.
  • Patent Document 1 a pure copper plate containing 99.90 mass% or more of Cu is finally rolled at various rolling reductions, slit in a linear shape along the rolling direction, and then softened and annealed to produce a base material.
  • an electrode wire base material for solar cells with excellent plastic deformability there is no solution for improving the adhesion between the flat electrode material that is the base material and the solder plating applied to the surface.
  • Patent Document 2 discloses a solar cell solder-plated wire that is less likely to warp or break the solar cell when the connecting lead wire is joined even when the solar cell is thinned. There is no disclosure regarding the adhesion to the solder plating applied to the surface.
  • the present invention provides a flat substrate for a solar cell electrode wire before plating formed with a slit material of a pure copper thin plate having good adhesion to the plating applied to the surface, a manufacturing method thereof, and durability.
  • An object is to provide an excellent electrode wire for solar cells.
  • the present inventors have performed a pure copper sheet containing 99.90% by mass or more of Cu by hot rolling, intermediate cold rolling, annealing, and final cold rolling to obtain a pure copper sheet material.
  • Produce slit the thin plate with a cutting machine, further subject to final annealing to produce a flat substrate, and manufacture a solar cell electrode wire with a part or all of its surface plated with solder
  • the measurement is such that the azimuth difference between adjacent measurement points is 15 ° or more measured by the EBSD method with a scanning electron microscope with a backscattered electron diffraction image system within a depth of 10 ⁇ m from the surface of the flat substrate.
  • the ratio (L ⁇ / L) of the total special grain boundary length L ⁇ of the special grain boundary to the total grain boundary length L of the crystal grain boundary (L ⁇ / L) when the point boundary is regarded as the crystal grain boundary is 40 to 90%.
  • the solar cell electrode wire is incorporated into solar cell panels, etc. It is possible to prevent cracking of the rectangular-shaped substrate during processing, crack resistance and found that long-term reliability is improved increased.
  • the arithmetic average roughness Ra of the surface of the flat substrate is 0.05 to 0.3 ⁇ m
  • the maximum height Rz is 0.5 to 2.5 ⁇ m
  • the root mean square roughness Rq and the maximum height are 0.06 to 1.1, adhesion to solder plating applied to a part or all of the surface of the flat substrate is improved, and the electrode wire for solar cells is severe. It has also been found that the durability is improved without peeling of the solder plating even under use conditions.
  • the flat substrate before plating of the electrode wire for solar cell of the present invention is a flat substrate before plating of the electrode wire for solar cell in which a part or all of the surface is solder-plated, Cu Is made of a pure copper thin plate slit material containing 99.90% by mass or more, the arithmetic average roughness Ra of the surface is 0.05 to 0.3 ⁇ m, and the maximum height Rz is 0.5 to 2.5 ⁇ m.
  • the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1, and EBSD by a scanning electron microscope with a backscattered electron diffraction imaging system within a depth of 10 ⁇ m from the surface.
  • Special grain boundary with respect to the total grain boundary length L of the grain boundary when the difference in orientation between adjacent measurement points measured by the method is considered to be a crystal grain boundary.
  • the ratio of grain boundary length L ⁇ (L ⁇ / L) is 40 to 90%.
  • a special grain boundary is a crystal having a crystal value of 3 ⁇ ⁇ ⁇ 29 with a ⁇ value defined crystallographically based on CSL theory (Kronberg et.al.:Trans. Met. Soc. AIME, 185, 501 (1949)).
  • the ratio (L ⁇ / L) of the special grain boundary length L ⁇ with respect to the total grain boundary length L of this grain boundary is such that the orientation difference between adjacent measurement points is 15 ° or more by orientation analysis by backscattered electron diffraction.
  • the arithmetic average roughness Ra of the surface of the rectangular substrate is less than 0.05 ⁇ m
  • the maximum height Rz is less than 0.5 ⁇ m
  • the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / If Rz) is less than 0.06, the adhesion with the solder plating applied to a part or all of the surface is deteriorated.
  • Arithmetic average roughness Ra of the surface of the rectangular substrate exceeds 0.3 ⁇ m, or maximum height Rz exceeds 2.5 ⁇ m, or ratio of root mean square roughness Rq to maximum height Rz (Rq / If Rz) exceeds 1.1, adhesion to solder plating applied to a part or all of the surface, particularly heat-resistant peelability, is deteriorated, which is inconvenient.
  • the present inventors perform hot rolling, intermediate cold rolling, annealing, and final cold rolling on a pure copper plate containing 99.90% by mass or more of Cu to produce a pure copper thin plate material, and cut the thin plate material.
  • a pure copper plate containing 99.90% by mass or more of Cu When making an electrode wire for a solar cell in which a part or all of its surface is subjected to solder plating, it is processed into a rectangular shape before plating.
  • the substrate is formed of a pure copper sheet slit material containing 99.90% by mass or more of Cu, and is a rectangular substrate with a step size of 0.5 ⁇ m by an EBSD method using a scanning electron microscope with a backscattered electron diffraction image system.
  • the average orientation difference between all pixels in a crystal grain when measuring the orientation of all pixels within the measurement area of the surface of the surface and considering the boundary where the orientation difference between adjacent pixels is 5 ° or more as the grain boundary Ratio of crystal grain area whose angle is less than 4 ° 80% to 95% of the measurement area, and if the area average GAM of the crystal grains existing in the measurement area is less than 4 °, a hard and brittle Cu—Sn alloy layer on the surface after solder plating, It was found that the Cu 6 Sn 5 layer was difficult to be formed and the 0.2% yield strength increase after solder plating was small.
  • the Cu-Sn alloy layer is important for improving the solder plating adhesion, but it is hard and brittle.
  • the shrinkage of the electrode wire material causes a bending stress in the semiconductor substrate and causes a crack.
  • the arithmetic average roughness Ra of the surface of the flat substrate is 0.05 to 0.3 ⁇ m
  • the maximum height Rz is 0.5 to 2.5 ⁇ m
  • the root mean square roughness Rq and the maximum height are 0.06 to 1.1, adhesion to solder plating applied to a part or all of the surface of the flat substrate is improved, and the electrode wire for solar cells is severe. It has also been found that the durability is improved without peeling of the solder plating even under use conditions.
  • the flat substrate before plating of the electrode wire for solar cell of the present invention is a flat substrate before plating of the electrode wire for solar cell in which a part or all of the surface is solder-plated, Cu Is made of a pure copper thin plate slit material containing 99.90% by mass or more, the arithmetic average roughness Ra of the surface is 0.05 to 0.3 ⁇ m, and the maximum height Rz is 0.5 to 2.5 ⁇ m.
  • the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1, and the step size is 0 by the EBSD method using a scanning electron microscope with a backscattered electron diffraction image system.
  • the area ratio of crystal grains having an average misorientation of less than 4 ° is It is 80 to 95% of the measurement area, and the area average GAM of crystal grains existing in the measurement area is less than 4 °.
  • the arithmetic average roughness Ra of the surface of the rectangular substrate is less than 0.05 ⁇ m, or the maximum height Rz is less than 0.5 ⁇ m, or the ratio of the root mean square roughness Rq to the maximum height Rz (Rq If / Rz) is less than 0.06, the adhesion with the solder plating applied to a part or all of the surface is deteriorated.
  • Arithmetic average roughness Ra of the surface of the rectangular substrate exceeds 0.3 ⁇ m, or maximum height Rz exceeds 2.5 ⁇ m, or ratio of root mean square roughness Rq to maximum height Rz (Rq / If Rz) exceeds 1.1, adhesion to solder plating applied to a part or all of the surface, particularly heat-resistant peelability, is deteriorated, which is inconvenient.
  • the azimuth of all the pixels within the measurement area of the surface is measured with a step size of 0.5 ⁇ m by an EBSD method using a scanning electron microscope with a backscattered electron diffraction image system, and the azimuth difference between adjacent pixels is 5
  • the boundary that is greater than or equal to ° is regarded as a crystal grain boundary
  • the area ratio of crystal grains having an average orientation difference between all the pixels in the crystal grains of less than 4 ° is less than 80% of the measured area, and is 0.2. If there is no effect on% proof stress and the measured area exceeds 95% or the area average GAM of the crystal grains existing in the measured area is 4 ° or more, the adhesion with the solder plating deteriorates.
  • the area average GAM of the crystal grains existing within the measurement area meant in the present invention is calculated by the following method.
  • GAM is the average value of misorientation between adjacent measurement points (pixels) in the same crystal grain.
  • equation (1) the difference in orientation at the boundary i between adjacent measurement points
  • equation (2) the boundary between pixels in the crystal grain is When m exist, the GAM value of this crystal grain is expressed by the equation (2).
  • the manufacturing method of the rectangular base material before plating of the electrode wire material for solar cells of the present invention includes hot rolling, intermediate cold rolling, annealing, and final cold rolling to a pure copper plate containing 99.90% by mass or more of Cu.
  • the thin plate is slit by a cutting machine to form a flat rectangular substrate, and the flat rectangular substrate is finally annealed to plate the flat electrode substrate for solar cell electrode wire.
  • the intermediate cold rolling is performed at a rolling reduction of 50 to 70%
  • the final cold rolling is performed at a rolling reduction of 50 to 70%
  • the final annealing is performed at 200 to 400 ° C. For 150 to 240 minutes.
  • the rolling reduction of intermediate cold rolling is less than 50% or more than 70%, the effect is insufficient, and if the final annealing temperature is less than 200 ° C. or the time is less than 150 minutes, the total special grain boundary length of the special grain boundary
  • the ratio of L ⁇ (L ⁇ / L) is less than 40%, and the ratio of all special grain boundary lengths L ⁇ of special grain boundaries (L ⁇ / L) even when the temperature exceeds 400 ° C or the time exceeds 240 minutes. Is less than 40%, which may adversely affect the crack resistance of the flat substrate.
  • the arithmetic average roughness Ra of the surface of the flat substrate is 0.05 to 0.3 ⁇ m, and the maximum height Rz is 0.
  • the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1.
  • the rolling reduction of the final cold rolling is less than 50%, the surface roughness of the optimally selected rolling work roll is not reflected in the surface roughness of the pure copper sheet as the rolled material, and the surface of the flat base material is arithmetic If the average roughness Ra, maximum height Rz, root mean square roughness Rq and maximum height Rz ratio (Rq / Rz) cannot fall within the predetermined range, and the rolling reduction exceeds 70% In addition to saturation of the effect, there is a possibility of adversely affecting the yield strength of the flat substrate. Further, by setting the reduction ratio of the final cold rolling to 50 to 70%, there is a secondary effect that subsequent slit processing becomes easy and burrs are hardly generated on the slit processed material.
  • the manufacturing method of the flat base material before plating of the electrode wire for solar cells of this invention is hot rolling, intermediate
  • the thin plate is slit by a cutting machine to form a flat rectangular substrate, and the flat rectangular substrate is finally annealed to plate the flat electrode substrate for solar cell electrode wire.
  • the rolling reduction of the intermediate cold rolling is performed at 50 to 70%
  • the rolling reduction of the final cold rolling is performed at 50 to 70%
  • the final annealing is performed at 700 to 900 ° C. It is characterized by being held for 5 to 60 seconds.
  • the boundary within the crystal grains when the boundary where the orientation difference between adjacent pixels is 5 ° or more is regarded as the crystal grain boundary.
  • the boundary where the orientation difference between adjacent pixels is 5 ° or more is regarded as a crystal grain boundary
  • the average orientation difference between all the pixels in the crystal grain is 4 °.
  • the area ratio of the crystal grains that are less than the average area and the area average GAM of the crystal grains existing in the measurement area are within a predetermined range.
  • the substrate effect is insufficient, and if the final annealing temperature is less than 700 ° C. or the time is less than 5 seconds, the orientation difference between adjacent pixels
  • the area ratio of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° is less than 80% of the measured area.
  • the annealing temperature exceeds 900 ° C. or the time exceeds 60 seconds, the area ratio of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° exceeds 95% of the measurement area.
  • the area average GAM of the crystal grains existing in the measurement area is 4 ° or more.
  • the arithmetic average roughness Ra of the surface of the flat substrate is 0.05 to 0.3 ⁇ m, and the maximum height Rz is 0.
  • the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1.
  • the rolling reduction of the final cold rolling is less than 50%, the surface roughness of the optimally selected rolling work roll is not reflected in the surface roughness of the pure copper sheet as the rolled material, and the surface of the flat base material is arithmetic If the average roughness Ra, maximum height Rz, root mean square roughness Rq and maximum height Rz ratio (Rq / Rz) cannot fall within the predetermined range, and the rolling reduction exceeds 70% In addition to saturation of the effect, there is a possibility of adversely affecting the yield strength of the flat substrate. Further, by setting the reduction ratio of the final cold rolling to 50 to 70%, there is a secondary effect that subsequent slit processing becomes easy and burrs are hardly generated on the slit processed material.
  • the electrode wire for solar cell of the present invention has a solder plating of 40 to 150 ⁇ m on part or all of the surface of the flat substrate before plating of the electrode wire for solar cell produced by the production method of the present invention. It was manufactured by applying to thickness. In this case, when the plating thickness is less than 40 ⁇ m, the plating adhesion is insufficient, and when the plating thickness exceeds 150 ⁇ m, the proof stress of the solar cell electrode wire is increased, which adversely affects the warpage of the silicon cell.
  • the solder plating is preferably performed continuously immediately after the final annealing of the flat base material from the viewpoint of reducing the manufacturing cost and the fluctuation in the proof stress of the electrode wire for solar cells.
  • a large-diameter winding drum is provided on the downstream side, and the rectangular base material immediately after the final annealing is passed through a solder plating bath adjusted to a temperature about 50 to 100 ° C. higher than the melting point of the solder alloy. From the viewpoint of production cost, it is preferable to wind the film while pulling it with a proper tension, thereby immersing the flat substrate in a solder plating bath and pulling it up. In this case, tension is applied to the flat base material, and the proof stress of the solar cell electrode wire after solder plating is increased, so care must be taken in adjusting the tension.
  • FIG. 1 shows a cross section of a solar cell electrode wire according to the present invention.
  • a solar cell electrode wire 1 has a rectangular base 2 having a square cross section formed of pure copper containing 99.90% by mass or more of Cu.
  • a solder plating layer 3 applied to a part or all of the surface of the flat substrate 2 to a thickness of 40 to 150 ⁇ m.
  • the rectangular substrate 2 has a Cu content of 99.90% by mass or more, preferably 99.99% by mass or more.
  • Impurities include As, Sb, Bi, Pb, S, Fe, O, P, etc.
  • O and P are small amounts and the plastic deformability is lowered, so the amount of O is preferably 0 to 500 ppm. Is 0 to 100 ppm, and the amount of P is desirably regulated to 0 to 150 ppm, preferably 0 to 50 ppm.
  • Tappitch copper, oxygen-free copper, and phosphorus deoxidized copper are suitable materials because they satisfy the above components.
  • the flat substrate 2 is obtained by subjecting a pure copper plate containing 99.90% by mass or more of Cu to hot rolling, intermediate cold rolling, annealing, and final cold rolling in this order to form a pure copper thin plate. It is manufactured by slitting with a cutting machine to form a flat base material, and the flat base material is finally annealed.
  • the arithmetic average roughness Ra of the surface is 0.05 to 0.3 ⁇ m, and the maximum height Rz is 0.5 to 2.5 ⁇ m, and the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1.
  • the arithmetic average roughness Ra of the surface of the flat substrate 2 is less than 0.05 ⁇ m, the maximum height Rz is less than 0.5 ⁇ m, or the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz ) Is less than 0.06, the adhesiveness with solder plating or molten solder plating applied to a part or all of the surface is deteriorated.
  • the arithmetic average roughness Ra of the surface of the flat substrate 2 exceeds 0.3 ⁇ m, or the maximum height Rz exceeds 2.5 ⁇ m, or the ratio of the root mean square roughness Rq to the maximum height Rz (Rq If / Rz) exceeds 1.1, adhesion to solder plating applied to a part or all of the surface, particularly heat-resistant peelability, deteriorates.
  • the thickness of the solder plating layer 3 is 40 to 150 ⁇ m. If the plating thickness is less than 40 ⁇ m, the adhesion of the plating is insufficient, and if the plating thickness exceeds 150 ⁇ m, the yield strength of the solar cell electrode wire is increased. It has an adverse effect on warpage.
  • Solder plating includes Sn-based solder or Sn-based alloy solder containing 0.1% by mass or more of at least one element selected from Pb, In, Bi, Sb, Ag, Zn, Ni, and Cu as a second component. To do.
  • the solder plating is particularly preferably a molten solder plating from the viewpoint of manufacturing cost and equipment, and a Sn—Pb alloy having a melting point of about 130 to 300 ° C., a Sn— (0.5 to 5 mass%) Ag alloy, Sn- (0.5-5% by mass) Ag- (0.3-1.0% by mass) Cu alloy, Sn- (0.3-1.0% by mass) Cu alloy, Sn- (1.0- 5.0 mass%) Ag- (5-8 mass%) In alloy, Sn- (1.0-5.0 mass%) Ag- (40-50 mass%) Bi alloy, Sn- (40-50 mass%) %) Bi alloy, Sn- (1.0-5.0 mass%) Ag- (40-50 mass%) Bi- (5-8 mass%) In alloy, etc. are used.
  • Pb-free Sn—Ag alloy, Sn—Ag—Cu alloy, Sn—Cu alloy, Sn—Ag—In alloy are used from the viewpoint of pollution prevention.
  • a solder material such as a Sn—Ag—Bi alloy is particularly preferable.
  • P of about 50 to 200 ppm, Ga of several to several tens of ppm, Gd of several to several tens of ppm, and Ge of several to several tens of ppm are used. More seeds can be added.
  • the alloy structure of the flat substrate 2 has the following embodiment.
  • the ratio (L ⁇ / L) of the total special grain boundary length L ⁇ of the special grain boundary to the thickness L is 40 to 90%.
  • the flat substrate of the second embodiment within the measurement area of the surface of the flat substrate 2 with a step size of 0.5 ⁇ m by the EBSD method using a scanning electron microscope with a backscattered electron diffraction image system.
  • the area ratio of the grains is 80 to 95% of the measurement area, and the area average GAM of the crystal grains existing in the measurement area is less than 4 °.
  • the orientations of all the pixels within the measurement area of the surface of the flat substrate 2 are measured with a step size of 0.5 ⁇ m and adjacent to each other.
  • a boundary having an orientation difference between pixels of 5 ° or more is regarded as a grain boundary
  • an area ratio of crystal grains having an average orientation difference between all pixels in the crystal grain of less than 4 ° is 80% of the measurement area.
  • the area average GAM of crystal grains existing within the measurement area as used in the present invention is calculated by the following method.
  • GAM is the average value of misorientation between adjacent measurement points (pixels) in the same crystal grain.
  • the flat substrate 2 of the first embodiment is a pure copper sheet that is obtained by subjecting a pure copper sheet containing 99.90% by mass or more of Cu to hot rolling, intermediate cold rolling, annealing, and final cold rolling in this order. It is manufactured by slitting a thin plate with a cutting machine to make a flat base material, and final annealing the flat base material.
  • the rolling reduction of the intermediate cold rolling is performed at 50 to 70%, and the final cold It is important that the rolling reduction of the hot rolling is performed at 50 to 70% and the final annealing is performed at 200 to 400 ° C. for 150 to 240 minutes.
  • the rolling reduction of intermediate cold rolling is less than 50% or more than 70%, the effect is insufficient, and if the final annealing temperature is less than 200 ° C. or the time is less than 150 minutes, the total special grain boundary length of the special grain boundary
  • the ratio of L ⁇ (L ⁇ / L) is less than 40%, and the ratio of the total special grain boundary length L ⁇ of the special grain boundary (L ⁇ / L) even if the temperature exceeds 400 ° C. or the time exceeds 240 minutes. Is less than 40%, which may adversely affect the crack resistance of the flat substrate.
  • the flat substrate 2 of the second embodiment is a pure copper sheet obtained by subjecting a pure copper plate containing 99.90% by mass or more of Cu to hot rolling, intermediate cold rolling, annealing, and final cold rolling in this order.
  • the thin plate is slit by a cutting machine to form a flat substrate, and the flat substrate is finally annealed.
  • the rolling reduction of the intermediate cold rolling is performed at 50 to 70%, It is important that the rolling reduction of the final cold rolling is performed at 50 to 70% and the final annealing is performed at 700 to 900 ° C. for 5 to 60 seconds.
  • the boundary in which the orientation difference between adjacent pixels is 5 ° or more is regarded as the crystal grain boundary.
  • the average orientation difference between all the pixels in the crystal grain is 4 when the boundary where the orientation difference between adjacent pixels is 5 ° or more is regarded as the grain boundary.
  • the area ratio of crystal grains that are less than 0 ° and the area average GAM of crystal grains existing in the measurement area are within a predetermined range.
  • the rolling reduction ratio of intermediate cold rolling is less than 50% or more than 70%
  • the above-mentioned base ratio for keeping the area ratio of the crystal grains whose average orientation difference is less than 4 ° and the area average GAM within a predetermined range If the atmosphere temperature of the final annealing is less than 700 ° C or the time is less than 5 seconds, the boundary where the orientation difference between adjacent pixels is 5 ° or more is regarded as a grain boundary.
  • the area ratio of the crystal grains is less than 80% of the measured area, and the atmosphere temperature of the final annealing exceeds 900 ° C., or the time Exceeds 60 seconds, the area ratio of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° exceeds 95% of the measurement area, or the crystal grains existing within the measurement area
  • the area average GAM is 4 ° or more.
  • the rolling reduction of the final cold rolling is common to both the embodiments, and the arithmetic average roughness Ra of the surface of the flat substrate is 0 by performing the rolling reduction of the final cold rolling at 50 to 70%. .05 to 0.3 ⁇ m, the maximum height Rz is 0.5 to 2.5 ⁇ m, and the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1. It becomes.
  • the rolling reduction of the final cold rolling is less than 50%, the surface roughness of the optimally selected rolling work roll is not reflected in the surface roughness of the pure copper sheet as the rolled material, and the surface of the flat base material is arithmetic If the average roughness Ra, maximum height Rz, root mean square roughness Rq and maximum height Rz ratio (Rq / Rz) cannot fall within the predetermined range, and the rolling reduction exceeds 70% In addition to saturation of the effect, there is a possibility of adversely affecting the yield strength of the flat substrate. Further, by setting the reduction ratio of the final cold rolling to 50 to 70%, there is a secondary effect that subsequent slit processing becomes easy and burrs are hardly generated in the slit processed material.
  • the flat substrate 2 is formed to a predetermined length.
  • a winding drum having a large diameter is provided on the downstream side of the solder plating bath, rather than the method of performing solder plating on this short base material, and the flat base material 2 is 50 to 100 ° C. above the melting point of the solder alloy. It is manufactured by passing it through a solder plating bath adjusted to a relatively high temperature, winding it with an appropriate tension while pulling it, and continuously immersing and pulling up the flat substrate 2 in the solder plating bath. It is preferable from the viewpoint of cost.
  • FIG. 2 is a schematic view of a solar cell provided with a connection lead 14 obtained by cutting the solar cell electrode wire 1 of the present invention into a predetermined length.
  • the solar cell 11 is formed of a silicon semiconductor having a PN junction.
  • a connecting lead wire 14 soldered to a plurality of surface electrodes 13 linearly provided on the surface of the semiconductor substrate 12.
  • On the back surface of the semiconductor substrate 12, 40 to 80 mm 2 A plurality of back electrodes having a large surface to the extent are provided.
  • solder bands arranged perpendicular to the surface electrodes 13 are formed so as to be electrically connected to the plurality of linear surface electrodes 13. .
  • the connecting lead wire 14 is placed on the semiconductor substrate 12 so that the plating layer 3 of the solar cell electrode wire 1 is in contact with the solder band, and is soldered to the surface of the semiconductor substrate 12.
  • the plate is subjected to hot rolling, intermediate cold rolling (the rolling reduction is shown in Table 1) and annealing in this order to produce an oxygen-free copper sheet and a tough pitch copper sheet, and then the final cold rolling (rolling ratio) Are shown in Table 1) to obtain an oxygen-free copper thin plate and a tough pitch copper thin plate having a thickness of 0.15 mm.
  • the oxygen-free copper thin plate and the tough pitch copper thin plate were slit with a cutting machine to obtain a flat rectangular plate having a width of 2 mm. Furthermore, these flat rectangular sheets were subjected to final annealing by batch treatment under the conditions shown in Table 1, and the flat rectangular substrates before plating of Examples 1 to 6 and Comparative Examples 1 to 6 were obtained.
  • the measurement results are shown in Tables 2 and 3.
  • the surface roughness Ra, Rz, and Rq were measured using a scanning confocal laser microscope LEXT OLS-3000 manufactured by Olympus Co., Ltd. on the surface of the sample cut out from each of the rectangular strips. Irradiation was performed, the distance was measured from the reflected light, and the distance was continuously measured while the laser light was scanned linearly along the surface of the sample.
  • the ratio (L ⁇ / L) of the total special grain boundary length L ⁇ of the special grain boundary to the total grain boundary length L of the crystal grain boundary was determined by the following method. First, the sample cut out from each rectangular substrate was mechanically polished using water-resistant abrasive paper and diamond abrasive grains, and then final polished using a colloidal silica solution. Next, using an EBSD measuring apparatus (HITACHI: S4300-SE, EDAX / TSL, OIM Data Collection) and analysis software (EDAX / TSL: OIM Data Analysis ver.
  • the yield strength was determined by a tensile test in which a tensile test piece having a length of 150 mm was collected from each flat base material and pulled in the length direction (rolling direction) by a method specified in JISZ2241.
  • each flat rectangular substrate before plating in Examples 1 to 6 and Comparative Examples 1 to 6 was passed through a molten solder plating bath while being pulled with a tension of about 10 MPa on the downstream side of the molten solder plating bath.
  • Molten solder plating was applied to produce a solar cell electrode wire.
  • the molten solder plating bath had a solder composition of Sn-3.0% Ag-0.5Cu (melting point: 218 ° C.) and a bath temperature of 300 ° C.
  • the plating adhesion, plating heat release resistance, and crack resistance of each sample after the molten solder plating were measured. Table 3 shows the measurement results.
  • the plating adhesion was measured by a plating adhesion test defined in JIS H8504. The dimensions of the test piece were 2 mm in width, 5 mm in length, and 0.15 mm in thickness. The surface of the test piece after the thermal shock was applied was observed with a 4 ⁇ magnifier, and the presence or absence and degree of peeling of the film were examined. . The case where no delamination due to thermal shock was observed over the entire surface of the test piece was rated as “ ⁇ ”, and the case where a layer delamination was observed in part was marked as “X”.
  • a plating peeling test was carried out using a cellophane adhesive tape defined in Z1522, and the case where peeling of the plating layer was not observed by visual observation was evaluated as “ ⁇ ”, and the case where it was recognized as “X”.
  • crack resistance For crack resistance, the crack resistance at the time of assembling and processing a solar cell panel or the like, which was solder-connected to a silicon cell having a length of 150 mm ⁇ width 150 mm and a thickness of 200 ⁇ m, was examined. A sample in which no crack was observed was rated as ⁇ , and a sample in which a crack was recognized was marked as ⁇ .
  • the flat substrate of the solar cell electrode wire before plating of the present invention has excellent crack resistance and adheres to the solder plating applied to the surface thereof. It can be seen that the properties are good.
  • an oxygen-free copper plate (Cu: 99.96%, O: 5 ppm, P: 0 ppm) and tough pitch copper (Cu: 99.92%, O made by Mitsubishi Materials Corporation) having a thickness of 3.0 mm. : 300 ppm, P: 0 ppm), hot rolling, intermediate cold rolling (the rolling reduction is shown in Table 4) and annealing in this order to produce an oxygen-free copper sheet and a tough pitch copper sheet, Final cold rolling (the rolling reduction is shown in Table 4) was performed to obtain an oxygen-free copper sheet and a tough pitch copper sheet having a thickness of 0.15 mm.
  • the oxygen-free copper thin plate and the tough pitch copper thin plate were slit with a cutting machine to obtain a flat rectangular plate having a width of 2 mm. Further, these flat rectangular sheets were subjected to final annealing under the conditions shown in Table 4, and the flat rectangular substrates before plating of Examples 11 to 16 and Comparative Examples 11 to 16 were obtained.
  • the surface roughness Ra, Rz, Rq was measured using a scanning confocal laser microscope LEXT OLS-3000 manufactured by Olympus Corporation on the surface of the sample cut out from each flat substrate, and the laser light was irradiated under the condition of 100 times the objective lens. Irradiation was performed, the distance was measured from the reflected light, and the distance was continuously measured while the laser light was scanned linearly along the surface of the sample.
  • the area ratio of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° was determined as follows.
  • a 2 mm ⁇ 2 mm sample collected from a flat substrate was immersed in 10% sulfuric acid for 10 minutes, then washed with water and sprinkled by air blow, and then the sprinkled sample was flat milled by Hitachi High-Technologies Corporation (ion milling) )
  • the apparatus was subjected to surface treatment at an acceleration voltage of 5 kV, an incident angle of 5 °, and an irradiation time of 1 hour.
  • the sample surface was observed with a scanning electron microscope S-3400N manufactured by Hitachi High-Technologies Corporation equipped with an EBSD system manufactured by TSL.
  • the observation conditions were an acceleration voltage of 25 kV and a measurement area of 150 ⁇ m ⁇ 150 ⁇ m (including 1000 or more crystal grains). From the observation results, the area ratio with respect to the total measurement area of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° was obtained under the following conditions. At a step size of 0.5 ⁇ m, the orientation of all pixels within the measurement area range was measured, and a boundary where the orientation difference between adjacent pixels was 5 ° or more was regarded as a crystal grain boundary. Next, for each crystal grain surrounded by the crystal grain boundary, the average value of the orientation difference between all the pixels in the crystal grain is calculated, and the area of the crystal grain whose average value is less than 4 ° is calculated.
  • the ratio of the area of the crystal grains having an average orientation difference of less than 4 ° in the crystal grains in the total crystal grains was determined.
  • what connected 2 pixels or more was made into the crystal grain.
  • the measurement location was changed by this method and measurement was performed 5 times, and the average value of the respective area ratios was defined as the area ratio.
  • the area average GAM of the crystal grains existing within the measurement area was determined as follows. As a pre-treatment, a 2 mm ⁇ 2 mm sample collected from a flat substrate was immersed in 10% sulfuric acid for 10 minutes, then washed with water and sprinkled by air blow, and then the sprinkled sample was flat milled by Hitachi High-Technologies Corporation (ion milling) ) The apparatus was subjected to surface treatment at an acceleration voltage of 5 kV, an incident angle of 5 °, and an irradiation time of 1 hour. Next, the surface of the sample was observed with a scanning electron microscope S-3400N manufactured by Hitachi High-Technologies Corporation equipped with an EBSD system manufactured by TSL.
  • the observation conditions were an acceleration voltage of 25 kV and a measurement area of 150 ⁇ m ⁇ 150 ⁇ m (including 1000 or more crystal grains). From the observation results, the average value of the orientation difference between adjacent pixels in the same crystal grain was determined as follows. At a step size of 0.5 ⁇ m, the orientation of all pixels within the measurement area range was measured, and a boundary where the orientation difference between adjacent pixels was 5 ° or more was regarded as a crystal grain boundary. Next, for each crystal grain surrounded by the crystal grain boundary, the area average GAM of the crystal grain was calculated by the above equation (3). In addition, what connected 2 pixels or more was made into the crystal grain. The 0.2% proof stress was obtained by a tensile test in which a tensile test piece having a length of 150 mm was sampled from each rectangular base material and pulled in the length direction (rolling direction) by the method specified in JIS Z2241.
  • the plating adhesion, plating heat release resistance, and 0.2% proof stress of each sample after the molten solder plating were measured. Table 3 shows the measurement results.
  • the plating adhesion was measured by a plating adhesion test defined in JIS H8504. The dimensions of the test piece were 2 mm in width, 5 mm in length, and 0.15 mm in thickness. The surface of the test piece after the thermal shock was applied was observed with a 4 ⁇ magnifier, and the presence or absence and degree of peeling of the film were examined. . The case where no delamination due to thermal shock was observed over the entire surface of the test piece was rated as “ ⁇ ”, and the case where a layer delamination was observed in part was marked as “X”.
  • a plating peeling test was carried out using a cellophane adhesive tape defined in Z1522, and the case where peeling of the plating layer was not observed by visual observation was evaluated as “ ⁇ ”, and the case where it was recognized as “X”.
  • the 0.2% proof stress was obtained by a tensile test in which a tensile test piece having a length of 150 mm was taken from each electrode wire and pulled in the length direction (rolling direction) by the method specified in JIS Z2241.
  • the flat base material of the solar cell electrode wire before plating formed with the slit material of the pure copper thin plate of the present invention has good adhesion to the solder plating, It can be seen that the 0.2% yield strength increase is small even after solder plating. Moreover, it turns out that the electrode wire for solar cells manufactured by the manufacturing method of this invention is excellent in durability.
  • the present invention provides a flat base material for a solar cell electrode wire before plating formed of a pure copper thin plate slit material having good adhesion to the plating applied to the surface, and has excellent durability. It can be used for battery electrode wires.

Abstract

Provided is a pre-coating straight-angle substrate of an electrode wire for a solar cell having superior resistance to cracking and being formed of slit materials of pure copper plate which has desirable adhesion with a coating applied on the obverse face thereof. The substrate is formed of slit materials of pure copper thin plate containing 99.90mass% or more copper, with an obverse face arithmetical mean deviation (Ra) of 0.05-0.3μm, an obverse face maximum height (Rz) of 0.05-2.5μm, a ratio (Rq/Rz) of a root mean square (Rq) to the maximum height (Rz) of the obverse face of 0.06-1.1, and a ratio (Lσ/L) of a total special grain boundary length (Lσ) of a special grain boundary to a total length of a crystalline grain boundary (L), as measured with EBSD by a scanning electron microscope with backscatter electron diffraction pattern system attached within a depth of 10μm from the obverse surface, of 40-90%.

Description

太陽電池用電極線材、その基材および基材の製造方法ELECTRODE WIRE FOR SOLAR CELL, ITS SUBSTRATE, AND METHOD FOR PRODUCING SUBSTRATE
 本発明は、太陽電池用電極線材、その基材および基材の製造方法に関し、特に詳しくは、表面に施されるめっきとの密着性が良好な純銅薄板のスリット材で形成された太陽電池用電極線材用の平角状基材およびその製造方法に関する。
 本願は、2010年10月28日に出願された特願2010-241952号及び2010年11月25日に出願された特願2010-262228号に基づき優先権を主張し、その内容をここに援用する。
TECHNICAL FIELD The present invention relates to an electrode wire for solar cells, a substrate thereof, and a method for producing the substrate, and more particularly, for a solar cell formed of a pure copper thin plate slit material having good adhesion to plating applied to the surface. The present invention relates to a flat substrate for an electrode wire and a method for producing the same.
This application claims priority based on Japanese Patent Application No. 2010-241952 filed on October 28, 2010 and Japanese Patent Application No. 2010-262228 filed on November 25, 2010, the contents of which are incorporated herein by reference. To do.
 太陽電池は、通常はPN接合を有するシリコン半導体で形成された半導体基板と、半導体基板の表面に線状に設けられた複数の表面電極に交叉するように形成されたはんだ帯にはんだ付けされた接続用電極線材を備えており、所望の起電力を得るためには、複数の太陽電池を直列に接続して使用される。直列接続は、一つの太陽電池の表面電極に接続用電極線材の一方の表面(下面)をはんだ付けし、他方の表面(上面)を隣接する太陽電池の比較的大きな領域の裏面電極にはんだ付けすることによってなされる。 Solar cells are usually soldered to a semiconductor substrate formed of a silicon semiconductor having a PN junction and a solder band formed so as to cross a plurality of surface electrodes provided linearly on the surface of the semiconductor substrate. A connecting electrode wire is provided, and a plurality of solar cells are connected in series to obtain a desired electromotive force. In series connection, one surface (lower surface) of the connecting electrode wire is soldered to the surface electrode of one solar cell, and the other surface (upper surface) is soldered to the back electrode of a relatively large area of the adjacent solar cell. Made by doing.
 接続用電極線材の基材となる平角電極材の製造方法は、タフピッチCu、無酸素Cu、リン脱酸Cu、高純度Cu(99.9999%以上)などの丸形断面の銅線を圧延して平坦状に潰す圧延加工方法、タフピッチCu、無酸素Cu、リン脱酸Cu、高純度Cu(99.9999%以上)などの純銅板を圧延機にて熱間圧延、冷間圧延、焼鈍後にスリッターにより切断するスリット加工方法があり、何れも形成された平角電極材の表面にはんだめっきを施して接続用電極線材が製造されている。 The manufacturing method of the flat electrode material used as the base material for the electrode wire for connection is to roll a copper wire having a round cross section such as tough pitch Cu, oxygen-free Cu, phosphorus deoxidized Cu, high purity Cu (99.9999% or more). After rolling, flat rolling such as tough pitch Cu, oxygen-free Cu, phosphorus deoxidized Cu, high purity Cu (99.9999% or more) in a rolling mill, hot rolling, cold rolling, annealing There is a slit processing method of cutting with a slitter, and the electrode wire for connection is manufactured by performing solder plating on the surface of the formed flat electrode material.
 しかし、近年、半導体基板の薄板化に伴って、接続用電極線材を半導体基板にろう付けする際、半導体基板にクラックが入るという問題が生じている。これは接続用電極線材の平角基材となる銅の熱膨張率が半導体基板に比して大きく、ろう付け後の冷却収縮の際に電極線材の収縮が半導体基板に曲げ応力を発生させるからである。 However, in recent years, with the thinning of the semiconductor substrate, when the connecting electrode wire is brazed to the semiconductor substrate, there is a problem that the semiconductor substrate is cracked. This is because the thermal expansion coefficient of copper, which is a flat base material for connecting electrode wires, is larger than that of a semiconductor substrate, and the shrinkage of the electrode wires generates bending stress in the semiconductor substrate during cooling shrinkage after brazing. is there.
 これらの問題点を解決するために、特許文献1では、基材の表面に溶融はんだめっきが施された太陽電池用電極線材のめっき前の基材がCuを99.90mass%以上含む純銅の圧延材で形成され、圧延方向の結晶方位<100>、<114>、<112>のX線回折によるピーク強度をそれぞれP<100>、P<114>、P<112>と表すとき、結晶方位のピーク強度比PR(%)=(P<114>+P<112>)・100/(P<100>+P<114>+<112>)が50~90%とされた、従来よりも優れた塑性変形能を備えた太陽電池用電極線材および基材の製造方法が開示されている。 In order to solve these problems, Patent Document 1 discloses rolling of pure copper in which the base material before plating of the electrode wire for solar cells in which the surface of the base material is subjected to molten solder plating contains 99.90 mass% or more of Cu. When the peak intensities by X-ray diffraction of the crystal orientation <100>, <114>, <112> in the rolling direction are expressed as P <100>, P <114>, P <112>, respectively. The peak intensity ratio PR (%) = (P <114> + P <112>) · 100 / (P <100> + P <114> + <112>) is 50 to 90%, which is superior to the conventional one. A method of manufacturing an electrode wire for solar cells and a base material having plastic deformability is disclosed.
 特許文献2では、平角状に形成された導体の表面の一部又は全部にはんだめっきが被覆された太陽電池用はんだめっき線において、導体の引張り試験における0.2%耐力値が90MPa以下であり、かつ導体の結晶粒径が20μm以上300μm以下であり、太陽電池を薄板化した場合でも接続用リード線の接合時に太陽電池の反りもしくは破損が生じにくい太陽電池用はんだめっき線が開示されている。 In Patent Document 2, in a solder plating wire for a solar cell in which a part or all of the surface of a conductor formed in a rectangular shape is coated with solder plating, a 0.2% proof stress value in a conductor tensile test is 90 MPa or less. In addition, there is disclosed a solar cell solder-plated wire that has a conductor crystal grain size of 20 μm or more and 300 μm or less and is less likely to warp or break the solar cell when the connecting lead wire is joined even when the solar cell is thinned. .
特開2009-16593号公報JP 2009-16593 A 特開2008-140787号公報JP 2008-140787 A
 特許文献1には、Cuを99.90mass%以上含む純銅板を種々の圧下率で最終圧延し、圧延方向に沿って線状にスリットした後、軟化焼鈍して基材を製造し、従来よりも優れた塑性変形能を備えた太陽電池用電極線基材についての開示はあるが、基材となる平角電極材とその表面に施されるはんだめっきとの密着性の向上についての解決策は開示されていない。
 特許文献2では、太陽電池を薄板化した場合でも接続用リード線の接合時に太陽電池の反りもしくは破損が生じにくい太陽電池用はんだめっき線が開示されているが、基材となる平角電極線とその表面に施されるはんだめっきとの密着性に関しての開示はなされていない。
In Patent Document 1, a pure copper plate containing 99.90 mass% or more of Cu is finally rolled at various rolling reductions, slit in a linear shape along the rolling direction, and then softened and annealed to produce a base material. Although there is a disclosure of an electrode wire base material for solar cells with excellent plastic deformability, there is no solution for improving the adhesion between the flat electrode material that is the base material and the solder plating applied to the surface. Not disclosed.
Patent Document 2 discloses a solar cell solder-plated wire that is less likely to warp or break the solar cell when the connecting lead wire is joined even when the solar cell is thinned. There is no disclosure regarding the adhesion to the solder plating applied to the surface.
 本発明は、表面に施されるめっきとの密着性が良好である純銅薄板のスリット材で形成されためっき前の太陽電池用電極線材の平角状基材およびその製造方法、並びに、耐久性に優れた太陽電池用電極線材を提供することを目的とする。 The present invention provides a flat substrate for a solar cell electrode wire before plating formed with a slit material of a pure copper thin plate having good adhesion to the plating applied to the surface, a manufacturing method thereof, and durability. An object is to provide an excellent electrode wire for solar cells.
 本発明者らは上記の事情を鑑みて鋭意検討の結果、Cuを99.90質量%以上含む純銅板に熱間圧延、中間冷間圧延、焼鈍、最終冷間圧延を施して純銅薄板材を作製し、その薄板材を切断機にてスリット加工し、更に最終焼鈍を施して平角状基材を作製し、その表面の一部又は全てにはんだめっきが施された太陽電池用電極線材を製造するに際して、平角状基材の表面から深さ10μm以内における後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて測定した、隣接する測定点間の方位差が15°以上となる測定点間を結晶粒界とみなした場合の、結晶粒界の全粒界長さLに対する特殊粒界の全特殊粒界長さLσの比率(Lσ/L)が40~90%であると、その太陽電池用電極線材を太陽電池パネルなどへ組込み成型加工する際の平角状基材の亀裂の発生を防ぐことができ、耐クラック性が増して長期信頼性が向上することを見出した。 As a result of intensive studies in view of the above circumstances, the present inventors have performed a pure copper sheet containing 99.90% by mass or more of Cu by hot rolling, intermediate cold rolling, annealing, and final cold rolling to obtain a pure copper sheet material. Produce, slit the thin plate with a cutting machine, further subject to final annealing to produce a flat substrate, and manufacture a solar cell electrode wire with a part or all of its surface plated with solder When measuring, the measurement is such that the azimuth difference between adjacent measurement points is 15 ° or more measured by the EBSD method with a scanning electron microscope with a backscattered electron diffraction image system within a depth of 10 μm from the surface of the flat substrate. The ratio (Lσ / L) of the total special grain boundary length Lσ of the special grain boundary to the total grain boundary length L of the crystal grain boundary (Lσ / L) when the point boundary is regarded as the crystal grain boundary is 40 to 90%. The solar cell electrode wire is incorporated into solar cell panels, etc. It is possible to prevent cracking of the rectangular-shaped substrate during processing, crack resistance and found that long-term reliability is improved increased.
 また、平角状基材の表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比Rq/Rzが0.06~1.1であると、平角状基材の表面の一部又は全てに施されるはんだめっきとの密着性が向上し、太陽電池用電極線材の厳しい使用条件化でもはんだめっきが剥離せずに耐久性が向上することも見出した。 In addition, the arithmetic average roughness Ra of the surface of the flat substrate is 0.05 to 0.3 μm, the maximum height Rz is 0.5 to 2.5 μm, and the root mean square roughness Rq and the maximum height are When the ratio Rq / Rz of Rz is 0.06 to 1.1, adhesion to solder plating applied to a part or all of the surface of the flat substrate is improved, and the electrode wire for solar cells is severe. It has also been found that the durability is improved without peeling of the solder plating even under use conditions.
 即ち、本発明の太陽電池用電極線材のめっき前の平角状基材は、表面の一部又は全てにはんだめっきが施された太陽電池用電極線材のめっき前の平角状基材であり、Cuを99.90質量%以上含む純銅薄板のスリット材で形成され、表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06~1.1であり、表面から深さ10μm以内における後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて測定した、隣接する測定点間の方位差が15°以上となる測定点間を結晶粒界とみなした場合の、結晶粒界の全粒界長さLに対する特殊粒界の全特殊粒界長さLσの比率(Lσ/L)が40~90%であることを特徴とする。 That is, the flat substrate before plating of the electrode wire for solar cell of the present invention is a flat substrate before plating of the electrode wire for solar cell in which a part or all of the surface is solder-plated, Cu Is made of a pure copper thin plate slit material containing 99.90% by mass or more, the arithmetic average roughness Ra of the surface is 0.05 to 0.3 μm, and the maximum height Rz is 0.5 to 2.5 μm. The ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1, and EBSD by a scanning electron microscope with a backscattered electron diffraction imaging system within a depth of 10 μm from the surface. Special grain boundary with respect to the total grain boundary length L of the grain boundary when the difference in orientation between adjacent measurement points measured by the method is considered to be a crystal grain boundary. The ratio of grain boundary length Lσ (Lσ / L) is 40 to 90%. The features.
 この場合、平角状基材の表面から深さ10μm以内における後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて測定した結晶粒界の全粒界長さLに対する特殊粒界の全特殊粒界長さLσの比率(Lσ/L)が40%未満であると、耐クラック性が低下し、90%を超えると効果が飽和し製造コストもかかり過ぎ不都合となる。
 特殊粒界とは、結晶学的にCSL理論(Kronberg et.al.:Trans. Met. Soc. AIME, 185, 501 (1949))に基づき定義されるΣ値で3≦Σ≦29を有する結晶粒界(対応粒界)であって、当該粒界における固有対応部位格子方位欠陥Dqが Dq≦15°/Σ1/2 (D.G.Brandon:Acta.Metallurgica. Vol.14,p1479,1966)を満たす結晶粒界である。
 この結晶粒界の全粒界長さLに対する特殊粒界長さLσの比率(Lσ/L)は、後方散乱電子線回折による方位解析により、隣接する測定点間の方位差が15°以上となる測定点間を結晶粒界として、結晶粒界の全粒界長さLを測定し、隣接する結晶粒の界面が特殊粒界を構成する結晶粒界の位置を決定し、特殊粒界の全特殊粒界長さLσと、測定した結晶粒界の全粒界長さLとから算出される。
In this case, all of the special grain boundaries with respect to the total grain boundary length L of the grain boundaries measured by the EBSD method with a scanning electron microscope with a backscattered electron diffraction image system within a depth of 10 μm from the surface of the flat substrate. When the ratio (Lσ / L) of the special grain boundary length Lσ is less than 40%, the crack resistance is lowered, and when it exceeds 90%, the effect is saturated and the production cost is excessively increased.
A special grain boundary is a crystal having a crystal value of 3 ≦ Σ ≦ 29 with a Σ value defined crystallographically based on CSL theory (Kronberg et.al.:Trans. Met. Soc. AIME, 185, 501 (1949)). A crystal that is a grain boundary (corresponding grain boundary) and has an inherent corresponding site lattice orientation defect Dq at the grain boundary satisfying Dq ≦ 15 ° / Σ 1/2 (DGBrandon: Acta. Metallurgica. Vol. 14, p1479, 1966) It is a grain boundary.
The ratio (Lσ / L) of the special grain boundary length Lσ with respect to the total grain boundary length L of this grain boundary is such that the orientation difference between adjacent measurement points is 15 ° or more by orientation analysis by backscattered electron diffraction. Measure the total grain boundary length L of the crystal grain boundary, and determine the position of the crystal grain boundary where the interface between adjacent crystal grains constitutes the special grain boundary. It is calculated from the total special grain boundary length Lσ and the total grain boundary length L of the measured grain boundary.
 また、平角状基材の表面の算術平均粗さRaが0.05μm未満、或いは、最大高さRzが0.5μm未満、或いは、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06未満であると、その表面の一部又は全てに施されるはんだめっきとの密着性が悪くなる。平角状基材の表面の算術平均粗さRaが0.3μmを超える、或いは、最大高さRzが2.5μmを超える、或いは、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が1.1を超えると、その表面の一部又は全てに施されるはんだめっきとの密着性、特に、耐熱剥離性が悪くなり不都合となる。 Also, the arithmetic average roughness Ra of the surface of the rectangular substrate is less than 0.05 μm, the maximum height Rz is less than 0.5 μm, or the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / If Rz) is less than 0.06, the adhesion with the solder plating applied to a part or all of the surface is deteriorated. Arithmetic average roughness Ra of the surface of the rectangular substrate exceeds 0.3 μm, or maximum height Rz exceeds 2.5 μm, or ratio of root mean square roughness Rq to maximum height Rz (Rq / If Rz) exceeds 1.1, adhesion to solder plating applied to a part or all of the surface, particularly heat-resistant peelability, is deteriorated, which is inconvenient.
 本発明者らは、さらに、Cuを99.90質量%以上含む純銅板に熱間圧延、中間冷間圧延、焼鈍、最終冷間圧延を施して純銅薄板材を作製し、その薄板材を切断機にてスリット加工し、更に最終焼鈍を施して平角状基材を作製し、その表面の一部又は全てにはんだめっきが施された太陽電池用電極線材を製造するに際して、めっき前の平角状基材がCuを99.90質量%以上含む純銅薄板のスリット材で形成され、後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて、ステップサイズ0.5μmにて平角状基材の表面の測定面積内の全ピクセルの方位を測定し、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、前記測定面積の80~95%であり、前記測定面積内に存在する結晶粒の面積平均GAMが4°未満であると、はんだめっき後に、その表面に硬くて脆いCu-Sn合金層、主にCuSn層が形成されにくく、はんだめっき後の0.2%耐力の上昇が少ないことを見出した。
 Cu-Sn合金層は、はんだめっき密着性を向上させる上で重要なものであるが、硬くて脆く、その形成量が多いとはんだめっき後の太陽電池用電極線材の0.2%耐力が上昇し、ろう付け後の冷却収縮の際に、電極線材の収縮が半導体基板に曲げ応力を発生させ、クラックを発生させる要因となる。
Further, the present inventors perform hot rolling, intermediate cold rolling, annealing, and final cold rolling on a pure copper plate containing 99.90% by mass or more of Cu to produce a pure copper thin plate material, and cut the thin plate material. When making an electrode wire for a solar cell in which a part or all of its surface is subjected to solder plating, it is processed into a rectangular shape before plating. The substrate is formed of a pure copper sheet slit material containing 99.90% by mass or more of Cu, and is a rectangular substrate with a step size of 0.5 μm by an EBSD method using a scanning electron microscope with a backscattered electron diffraction image system. The average orientation difference between all pixels in a crystal grain when measuring the orientation of all pixels within the measurement area of the surface of the surface and considering the boundary where the orientation difference between adjacent pixels is 5 ° or more as the grain boundary Ratio of crystal grain area whose angle is less than 4 ° 80% to 95% of the measurement area, and if the area average GAM of the crystal grains existing in the measurement area is less than 4 °, a hard and brittle Cu—Sn alloy layer on the surface after solder plating, It was found that the Cu 6 Sn 5 layer was difficult to be formed and the 0.2% yield strength increase after solder plating was small.
The Cu-Sn alloy layer is important for improving the solder plating adhesion, but it is hard and brittle. If the amount of the Cu-Sn alloy layer is large, the 0.2% proof stress of the electrode wire for solar cells after solder plating increases. However, during the cooling shrinkage after brazing, the shrinkage of the electrode wire material causes a bending stress in the semiconductor substrate and causes a crack.
 また、平角状基材の表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比Rq/Rzが0.06~1.1であると、平角状基材の表面の一部又は全てに施されるはんだめっきとの密着性が向上し、太陽電池用電極線材の厳しい使用条件化でもはんだめっきが剥離せずに耐久性が向上することも見出した。 In addition, the arithmetic average roughness Ra of the surface of the flat substrate is 0.05 to 0.3 μm, the maximum height Rz is 0.5 to 2.5 μm, and the root mean square roughness Rq and the maximum height are When the ratio Rq / Rz of Rz is 0.06 to 1.1, adhesion to solder plating applied to a part or all of the surface of the flat substrate is improved, and the electrode wire for solar cells is severe. It has also been found that the durability is improved without peeling of the solder plating even under use conditions.
 即ち、本発明の太陽電池用電極線材のめっき前の平角状基材は、表面の一部又は全てにはんだめっきが施された太陽電池用電極線材のめっき前の平角状基材であり、Cuを99.90質量%以上含む純銅薄板のスリット材で形成され、表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06~1.1であり、後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて、ステップサイズ0.5μmにて表面の測定面積内の全ピクセルの方位を測定し、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、前記測定面積の80~95%であり、前記測定面積内に存在する結晶粒の面積平均GAMが4°未満であることを特徴とする。 That is, the flat substrate before plating of the electrode wire for solar cell of the present invention is a flat substrate before plating of the electrode wire for solar cell in which a part or all of the surface is solder-plated, Cu Is made of a pure copper thin plate slit material containing 99.90% by mass or more, the arithmetic average roughness Ra of the surface is 0.05 to 0.3 μm, and the maximum height Rz is 0.5 to 2.5 μm. The ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1, and the step size is 0 by the EBSD method using a scanning electron microscope with a backscattered electron diffraction image system. When measuring the orientation of all the pixels within the measurement area of the surface at 5 μm and considering the boundary where the orientation difference between adjacent pixels is 5 ° or more as the grain boundary, between all the pixels in the crystal grain The area ratio of crystal grains having an average misorientation of less than 4 ° is It is 80 to 95% of the measurement area, and the area average GAM of crystal grains existing in the measurement area is less than 4 °.
 この場合、平角状基材の表面の算術平均粗さRaが0.05μm未満、或いは、最大高さRzが0.5μm未満、或いは、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06未満であると、その表面の一部又は全てに施されるはんだめっきとの密着性が悪くなる。平角状基材の表面の算術平均粗さRaが0.3μmを超える、或いは、最大高さRzが2.5μmを超える、或いは、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が1.1を超えると、その表面の一部又は全てに施されるはんだめっきとの密着性、特に、耐熱剥離性が悪くなり不都合となる。 In this case, the arithmetic average roughness Ra of the surface of the rectangular substrate is less than 0.05 μm, or the maximum height Rz is less than 0.5 μm, or the ratio of the root mean square roughness Rq to the maximum height Rz (Rq If / Rz) is less than 0.06, the adhesion with the solder plating applied to a part or all of the surface is deteriorated. Arithmetic average roughness Ra of the surface of the rectangular substrate exceeds 0.3 μm, or maximum height Rz exceeds 2.5 μm, or ratio of root mean square roughness Rq to maximum height Rz (Rq / If Rz) exceeds 1.1, adhesion to solder plating applied to a part or all of the surface, particularly heat-resistant peelability, is deteriorated, which is inconvenient.
 また、後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて、ステップサイズ0.5μmにて表面の測定面積内の全ピクセルの方位を測定し、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、測定面積の80%未満では、0.2%耐力に関する効果がなく、測定面積の95%を超える、或いは、測定面積内に存在する結晶粒の面積平均GAMが4°以上であると、はんだめっきとの密着性が悪くなる。
 ここで、本発明で意味する測定面積内に存在する結晶粒の面積平均GAMとは、次の手法により算出したものである。
 GAMは同一結晶粒内における隣接する測定点(ピクセル)間のミスオリエンテーションの平均値であり、隣接測定点の境界iにおける方位差を(1)式とすると、結晶粒内にピクセル間の境界がm個存在する場合、この結晶粒のGAM値は(2)式で表される。
Further, the azimuth of all the pixels within the measurement area of the surface is measured with a step size of 0.5 μm by an EBSD method using a scanning electron microscope with a backscattered electron diffraction image system, and the azimuth difference between adjacent pixels is 5 When the boundary that is greater than or equal to ° is regarded as a crystal grain boundary, the area ratio of crystal grains having an average orientation difference between all the pixels in the crystal grains of less than 4 ° is less than 80% of the measured area, and is 0.2. If there is no effect on% proof stress and the measured area exceeds 95% or the area average GAM of the crystal grains existing in the measured area is 4 ° or more, the adhesion with the solder plating deteriorates.
Here, the area average GAM of the crystal grains existing within the measurement area meant in the present invention is calculated by the following method.
GAM is the average value of misorientation between adjacent measurement points (pixels) in the same crystal grain. When the difference in orientation at the boundary i between adjacent measurement points is expressed by equation (1), the boundary between pixels in the crystal grain is When m exist, the GAM value of this crystal grain is expressed by the equation (2).
Figure JPOXMLDOC01-appb-M000001
Figure JPOXMLDOC01-appb-M000001
Figure JPOXMLDOC01-appb-M000002
Figure JPOXMLDOC01-appb-M000002
 個々の結晶粒におけるGAMの値を(GAM)、各結晶粒の面積をSとすると、測定範囲内にM個の結晶粒が存在する場合、面積平均GAMは(3)式で表される。 When the value of the GAM in individual grains (GAM) k, the area of each crystal grain and S k, if there are M grain within the measurement range, area average GAM is expressed by equation (3) The
Figure JPOXMLDOC01-appb-M000003
Figure JPOXMLDOC01-appb-M000003
 更に、本発明の太陽電池用電極線材のめっき前の平角状基材の製造方法は、Cuを99.90質量%以上含む純銅板に熱間圧延、中間冷間圧延、焼鈍、最終冷間圧延をこの順で施して純銅薄板とし、当該薄板を切断機にてスリット加工して平角状基材とし、当該平角状基材を最終焼鈍して太陽電池用電極線材のめっき前の平角状基材を製造する方法において、前記中間冷間圧延の圧下率を50~70%にて実施し、前記最終冷間圧延の圧下率を50~70%にて実施し、前記最終焼鈍を200~400℃で150~240分間実施することを特徴とする。 Furthermore, the manufacturing method of the rectangular base material before plating of the electrode wire material for solar cells of the present invention includes hot rolling, intermediate cold rolling, annealing, and final cold rolling to a pure copper plate containing 99.90% by mass or more of Cu. Are made in this order to form a pure copper thin plate, and the thin plate is slit by a cutting machine to form a flat rectangular substrate, and the flat rectangular substrate is finally annealed to plate the flat electrode substrate for solar cell electrode wire. The intermediate cold rolling is performed at a rolling reduction of 50 to 70%, the final cold rolling is performed at a rolling reduction of 50 to 70%, and the final annealing is performed at 200 to 400 ° C. For 150 to 240 minutes.
 この場合、中間冷間圧延の圧下率を50~70%にて実施することにより、特殊粒界の全特殊粒界長さLσの比率(Lσ/L)を成長させる素地をつくり、最終焼鈍を200~400℃で150~240分間実施することにより、特殊粒界の全特殊粒界長さLσの比率(Lσ/L)が40~90%の範囲に成長される。この場合、連続焼鈍では、ライン速度の関係から、上述の時間と温度にて最終焼鈍を実施することは難しく、バッチ処理にて最終焼鈍を実施することが好ましい。
 中間冷間圧延の圧下率が50%未満、或いは、70%を超えると効果は不足し、最終焼鈍の温度が200℃未満、或いは、時間が150分未満では特殊粒界の全特殊粒界長さLσの比率(Lσ/L)は40%未満となり、温度が400℃を超える、或いは、時間が240分間を超えても特殊粒界の全特殊粒界長さLσの比率(Lσ/L)は40%未満となり、平角状基材の耐クラック性にも悪影響を及ぼす可能性がある。
In this case, by carrying out the rolling reduction of the intermediate cold rolling at 50 to 70%, a substrate for growing the ratio (Lσ / L) of the total special grain boundary length Lσ of the special grain boundaries is created, and the final annealing is performed. By carrying out the treatment at 200 to 400 ° C. for 150 to 240 minutes, the ratio (Lσ / L) of the total special grain boundary length Lσ of the special grain boundaries is grown in the range of 40 to 90%. In this case, in the continuous annealing, it is difficult to carry out the final annealing at the above-mentioned time and temperature because of the line speed, and it is preferable to carry out the final annealing by batch processing.
If the rolling reduction of intermediate cold rolling is less than 50% or more than 70%, the effect is insufficient, and if the final annealing temperature is less than 200 ° C. or the time is less than 150 minutes, the total special grain boundary length of the special grain boundary The ratio of Lσ (Lσ / L) is less than 40%, and the ratio of all special grain boundary lengths Lσ of special grain boundaries (Lσ / L) even when the temperature exceeds 400 ° C or the time exceeds 240 minutes. Is less than 40%, which may adversely affect the crack resistance of the flat substrate.
 また、最終冷間圧延の圧下率を50~70%にて実施することにより、平角状基材の表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06~1.1となる。
 最終冷間圧延の圧下率が50%未満では、最適に選択された圧延ワークロールの表面粗さが被圧延物である純銅薄板の表面粗さに反映されず、平角状基材の表面の算術平均粗さRa、最大高さRz、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)を上記の所定の範囲内に収めることが出来ず、圧下率が70%を超えると、効果が飽和するばかりでなく、平角状基材の耐力に悪影響を及ぼす可能性がある。また、最終冷間圧延の圧下率を50~70%とすることにより、その後のスリット加工が容易になり、スリット加工材にバリが発生し難くなるという副次的効果もある。
Further, by carrying out the rolling reduction of the final cold rolling at 50 to 70%, the arithmetic average roughness Ra of the surface of the flat substrate is 0.05 to 0.3 μm, and the maximum height Rz is 0. The ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1.
When the rolling reduction of the final cold rolling is less than 50%, the surface roughness of the optimally selected rolling work roll is not reflected in the surface roughness of the pure copper sheet as the rolled material, and the surface of the flat base material is arithmetic If the average roughness Ra, maximum height Rz, root mean square roughness Rq and maximum height Rz ratio (Rq / Rz) cannot fall within the predetermined range, and the rolling reduction exceeds 70% In addition to saturation of the effect, there is a possibility of adversely affecting the yield strength of the flat substrate. Further, by setting the reduction ratio of the final cold rolling to 50 to 70%, there is a secondary effect that subsequent slit processing becomes easy and burrs are hardly generated on the slit processed material.
 また、本発明の太陽電池用電極線材のめっき前の平角状基材の製造方法は、Cuを99.90質量%以上含む純銅板に熱間圧延、中間冷間圧延、焼鈍、最終冷間圧延をこの順で施して純銅薄板とし、当該薄板を切断機にてスリット加工して平角状基材とし、当該平角状基材を最終焼鈍して太陽電池用電極線材のめっき前の平角状基材を製造する方法において、前記中間冷間圧延の圧下率を50~70%にて実施し、前記最終冷間圧延の圧下率を50~70%にて実施し、前記最終焼鈍を700~900℃の雰囲気に5~60秒間保持して行なうことを特徴とする。 Moreover, the manufacturing method of the flat base material before plating of the electrode wire for solar cells of this invention is hot rolling, intermediate | middle cold rolling, annealing, and final cold rolling to the pure copper plate which contains 99.90 mass% or more of Cu. Are made in this order to form a pure copper thin plate, and the thin plate is slit by a cutting machine to form a flat rectangular substrate, and the flat rectangular substrate is finally annealed to plate the flat electrode substrate for solar cell electrode wire. The rolling reduction of the intermediate cold rolling is performed at 50 to 70%, the rolling reduction of the final cold rolling is performed at 50 to 70%, and the final annealing is performed at 700 to 900 ° C. It is characterized by being held for 5 to 60 seconds.
 この場合、中間冷間圧延の圧下率を50~70%にて実施することにより、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合と測定面積内に存在する結晶粒の面積平均GAMを所定内の範囲に収める素地をつくり、最終焼鈍を700~900℃での雰囲気に5~60秒間保持することにより、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合と測定面積内に存在する結晶粒の面積平均GAMを所定内の範囲に収める。
 中間冷間圧延の圧下率が50%未満、或いは、70%を超えると素地効果は不足し、最終焼鈍の温度が700℃未満、或いは、時間が5秒未満では、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、測定面積の80%未満となり、最終焼鈍の温度が900℃を超える、或いは、時間が60秒を超えると、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、測定面積の95%を超える、或いは、測定面積内に存在する結晶粒の面積平均GAMが4°以上となる。
In this case, by carrying out the rolling reduction of the intermediate cold rolling at 50 to 70%, the boundary within the crystal grains when the boundary where the orientation difference between adjacent pixels is 5 ° or more is regarded as the crystal grain boundary. Create a substrate that keeps the area ratio of crystal grains whose average orientation difference between all pixels is less than 4 ° and the area average GAM of crystal grains in the measurement area within the specified range, and final annealing at 700-900 ° C When the boundary where the orientation difference between adjacent pixels is 5 ° or more is regarded as a crystal grain boundary, the average orientation difference between all the pixels in the crystal grain is 4 °. The area ratio of the crystal grains that are less than the average area and the area average GAM of the crystal grains existing in the measurement area are within a predetermined range.
If the rolling reduction of the intermediate cold rolling is less than 50% or more than 70%, the substrate effect is insufficient, and if the final annealing temperature is less than 700 ° C. or the time is less than 5 seconds, the orientation difference between adjacent pixels When the boundary where the angle is 5 ° or more is regarded as the crystal grain boundary, the area ratio of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° is less than 80% of the measured area. When the annealing temperature exceeds 900 ° C. or the time exceeds 60 seconds, the area ratio of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° exceeds 95% of the measurement area. Alternatively, the area average GAM of the crystal grains existing in the measurement area is 4 ° or more.
 また、最終冷間圧延の圧下率を50~70%にて実施することにより、平角状基材の表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06~1.1となる。
 最終冷間圧延の圧下率が50%未満では、最適に選択された圧延ワークロールの表面粗さが被圧延物である純銅薄板の表面粗さに反映されず、平角状基材の表面の算術平均粗さRa、最大高さRz、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)を上記の所定の範囲内に収めることが出来ず、圧下率が70%を超えると、効果が飽和するばかりでなく、平角状基材の耐力に悪影響を及ぼす可能性がある。また、最終冷間圧延の圧下率を50~70%とすることにより、その後のスリット加工が容易になり、スリット加工材にバリが発生し難くなるという副次的効果もある。
Further, by carrying out the rolling reduction of the final cold rolling at 50 to 70%, the arithmetic average roughness Ra of the surface of the flat substrate is 0.05 to 0.3 μm, and the maximum height Rz is 0. The ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1.
When the rolling reduction of the final cold rolling is less than 50%, the surface roughness of the optimally selected rolling work roll is not reflected in the surface roughness of the pure copper sheet as the rolled material, and the surface of the flat base material is arithmetic If the average roughness Ra, maximum height Rz, root mean square roughness Rq and maximum height Rz ratio (Rq / Rz) cannot fall within the predetermined range, and the rolling reduction exceeds 70% In addition to saturation of the effect, there is a possibility of adversely affecting the yield strength of the flat substrate. Further, by setting the reduction ratio of the final cold rolling to 50 to 70%, there is a secondary effect that subsequent slit processing becomes easy and burrs are hardly generated on the slit processed material.
 更に、本発明の太陽電池用電極線材は、本発明の製造方法により製造された太陽電池用電極線材のめっき前の平角状基材の表面の一部又は全てに、はんだめっきを40~150μmの厚さに施すことにより製造されたことを特徴とする。
 この場合、めっき厚が40μm未満であるとめっき密着性が不足し、めっき厚が150μmを超えると太陽電池用電極線材の耐力が大きくなり、シリコンセルの反りに悪影響を及ぼす。
Furthermore, the electrode wire for solar cell of the present invention has a solder plating of 40 to 150 μm on part or all of the surface of the flat substrate before plating of the electrode wire for solar cell produced by the production method of the present invention. It was manufactured by applying to thickness.
In this case, when the plating thickness is less than 40 μm, the plating adhesion is insufficient, and when the plating thickness exceeds 150 μm, the proof stress of the solar cell electrode wire is increased, which adversely affects the warpage of the silicon cell.
 また、はんだめっきは、製造コストおよび太陽電池用電極線材の耐力の変動を少なくする観点から、平角状基材の最終焼鈍がなされた直後に連続して施されることが好ましく、はんだめっき浴の下流側に大径の巻き取りドラムを設けておき、最終焼鈍が施された直後の平角状基材をはんだ合金の融点より50~100℃程度高い温度に調整されたはんだめっき浴に通し、適切な張力を掛けて引っ張りながら巻き取り、これにより平角状基材をはんだめっき浴に連続的に浸漬し、引き上げる方法により行われることが製造コストの観点から好ましい。この場合、平角状基材に張力が掛かり、はんだめっき後の太陽電池用電極線材の耐力が上昇するので張力の調整に注意を要する。 Also, the solder plating is preferably performed continuously immediately after the final annealing of the flat base material from the viewpoint of reducing the manufacturing cost and the fluctuation in the proof stress of the electrode wire for solar cells. A large-diameter winding drum is provided on the downstream side, and the rectangular base material immediately after the final annealing is passed through a solder plating bath adjusted to a temperature about 50 to 100 ° C. higher than the melting point of the solder alloy. From the viewpoint of production cost, it is preferable to wind the film while pulling it with a proper tension, thereby immersing the flat substrate in a solder plating bath and pulling it up. In this case, tension is applied to the flat base material, and the proof stress of the solar cell electrode wire after solder plating is increased, so care must be taken in adjusting the tension.
 本発明により、表面に施されるめっきとの密着性が良好である純銅薄板のスリット材で形成されためっき前の太陽電池用電極線材の平角状基材およびその製造方法、並びに、耐久性に優れた太陽電池用電極線材が提供される。 According to the present invention, a flat substrate of a solar cell electrode wire formed by a slit material of a pure copper thin plate having good adhesion to the plating applied to the surface, a manufacturing method thereof, and durability An excellent electrode wire for solar cell is provided.
本発明の太陽電池用電極線材のめっき前の平角状基材の横断面図である。It is a cross-sectional view of the flat base material before plating of the solar cell electrode wire of the present invention. 本発明の太陽電池用電極線材を所定の長さに切断した接続用リードを備えた太陽電池の概略図である。It is the schematic of the solar cell provided with the connection lead which cut | disconnected the electrode wire for solar cells of this invention by predetermined length.
 以下、図面を参照に、本発明の太陽電池用電極線材、その基材と製造方法の実施形態について説明する。
<合金組成及び表面性状、はんだめっき層>
 図1は、本発明の太陽電池用電極線材の横断面を示しており、太陽電池用電極線材1はCuを99.90質量%以上含む純銅で形成された方形断面を有する平角状基材2と、この平角状基材2の表面の一部又は全てに40~150μmの厚さに施されたはんだめっき層3とからなる。
DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of an electrode wire for a solar cell, a base material thereof, and a manufacturing method thereof will be described with reference to the drawings.
<Alloy composition and surface properties, solder plating layer>
FIG. 1 shows a cross section of a solar cell electrode wire according to the present invention. A solar cell electrode wire 1 has a rectangular base 2 having a square cross section formed of pure copper containing 99.90% by mass or more of Cu. And a solder plating layer 3 applied to a part or all of the surface of the flat substrate 2 to a thickness of 40 to 150 μm.
 平角状基材2は、Cu含有量が99.90質量%以上であり、好ましくは99.99質量%以上のものがよい。また、不純物としては、As、Sb、Bi、Pb、S、Fe、O、Pなどが含まれるが、特にO、Pは微量で塑性変形能が低下するため、O量は0~500ppm、好ましくは0~100ppmとし、P量は0~150ppm、好ましくは0~50ppmに規制することが望ましい。タプピッチ銅、無酸素銅、リン脱酸銅は上記成分を満足するため好適な素材である。 The rectangular substrate 2 has a Cu content of 99.90% by mass or more, preferably 99.99% by mass or more. Impurities include As, Sb, Bi, Pb, S, Fe, O, P, etc. In particular, O and P are small amounts and the plastic deformability is lowered, so the amount of O is preferably 0 to 500 ppm. Is 0 to 100 ppm, and the amount of P is desirably regulated to 0 to 150 ppm, preferably 0 to 50 ppm. Tappitch copper, oxygen-free copper, and phosphorus deoxidized copper are suitable materials because they satisfy the above components.
 この平角状基材2は、上記のCuを99.90質量%以上含む純銅板に熱間圧延、中間冷間圧延、焼鈍、最終冷間圧延をこの順で施して純銅薄板とし、その薄板を切断機にてスリット加工して平角状基材とし、その平角状基材を最終焼鈍することにより製造され、その表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06~1.1である。 The flat substrate 2 is obtained by subjecting a pure copper plate containing 99.90% by mass or more of Cu to hot rolling, intermediate cold rolling, annealing, and final cold rolling in this order to form a pure copper thin plate. It is manufactured by slitting with a cutting machine to form a flat base material, and the flat base material is finally annealed. The arithmetic average roughness Ra of the surface is 0.05 to 0.3 μm, and the maximum height Rz is 0.5 to 2.5 μm, and the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1.
 平角状基材2の表面の算術平均粗さRaが0.05μm未満、或いは、最大高さRzが0.5μm未満、或いは、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06未満であると、その表面の一部又は全てに施されるはんだめっき又は溶融はんだめっきとの密着性が悪くなる。平角状基材2の表面の算術平均粗さRaが0.3μmを超える、或いは、最大高さRzが2.5μmを超える、或いは、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が1.1を超えると、その表面の一部又は全てに施されるはんだめっきとの密着性、特に、耐熱剥離性が悪くなる。 The arithmetic average roughness Ra of the surface of the flat substrate 2 is less than 0.05 μm, the maximum height Rz is less than 0.5 μm, or the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz ) Is less than 0.06, the adhesiveness with solder plating or molten solder plating applied to a part or all of the surface is deteriorated. The arithmetic average roughness Ra of the surface of the flat substrate 2 exceeds 0.3 μm, or the maximum height Rz exceeds 2.5 μm, or the ratio of the root mean square roughness Rq to the maximum height Rz (Rq If / Rz) exceeds 1.1, adhesion to solder plating applied to a part or all of the surface, particularly heat-resistant peelability, deteriorates.
 はんだめっき層3の厚みは、40~150μmであり、めっき厚が40μm未満であるとめっき密着性が不足し、めっき厚が150μmを超えると太陽電池用電極線材の耐力が大きくなり、シリコンセルの反りに悪影響を及ぼす。
 はんだめっきは、Sn系はんだ、または第2成分としてPb、In、Bi、Sb、Ag、Zn、Ni、Cuから選択される少なくとも1種の元素を0.1質量%以上含むSn系合金はんだとする。
The thickness of the solder plating layer 3 is 40 to 150 μm. If the plating thickness is less than 40 μm, the adhesion of the plating is insufficient, and if the plating thickness exceeds 150 μm, the yield strength of the solar cell electrode wire is increased. It has an adverse effect on warpage.
Solder plating includes Sn-based solder or Sn-based alloy solder containing 0.1% by mass or more of at least one element selected from Pb, In, Bi, Sb, Ag, Zn, Ni, and Cu as a second component. To do.
 また、はんだめっきは、製造コストおよび設備面から、溶融はんだめっきであることが特に好ましく、融点が130~300℃程度のSn-Pb合金、Sn-(0.5~5質量%)Ag合金、Sn-(0.5~5質量%)Ag-(0.3~1.0質量%)Cu合金、Sn-(0.3~1.0質量%)Cu合金、Sn-(1.0~5.0質量%)Ag-(5~8質量%)In合金、Sn-(1.0~5.0質量%)Ag-(40~50質量%)Bi合金、Sn-(40~50質量%)Bi合金、Sn-(1.0~5.0質量%)Ag-(40~50質量%)Bi-(5~8質量%)In合金などが使用される。Pbは人体に有害であり、自然環境を汚染するおそれがあるので、汚染防止の観点からはPbフリーのSn-Ag合金、Sn-Ag-Cu合金、Sn-Cu合金、Sn-Ag-In合金、Sn-Ag-Bi合金などのはんだ材が特に好ましい。
 また、各はんだ材において、溶融はんだ自体の酸化防止のため、50~200ppm程度のP、数~数10ppmのGa、数~数10ppmのGd、数~数10ppmのGeの内から1種または2種以上を添加することができる。
The solder plating is particularly preferably a molten solder plating from the viewpoint of manufacturing cost and equipment, and a Sn—Pb alloy having a melting point of about 130 to 300 ° C., a Sn— (0.5 to 5 mass%) Ag alloy, Sn- (0.5-5% by mass) Ag- (0.3-1.0% by mass) Cu alloy, Sn- (0.3-1.0% by mass) Cu alloy, Sn- (1.0- 5.0 mass%) Ag- (5-8 mass%) In alloy, Sn- (1.0-5.0 mass%) Ag- (40-50 mass%) Bi alloy, Sn- (40-50 mass%) %) Bi alloy, Sn- (1.0-5.0 mass%) Ag- (40-50 mass%) Bi- (5-8 mass%) In alloy, etc. are used. Since Pb is harmful to the human body and may contaminate the natural environment, Pb-free Sn—Ag alloy, Sn—Ag—Cu alloy, Sn—Cu alloy, Sn—Ag—In alloy are used from the viewpoint of pollution prevention. A solder material such as a Sn—Ag—Bi alloy is particularly preferable.
In each solder material, in order to prevent oxidation of the molten solder itself, one or two of P of about 50 to 200 ppm, Ga of several to several tens of ppm, Gd of several to several tens of ppm, and Ge of several to several tens of ppm are used. More seeds can be added.
<合金組織>
 平角状基材2の合金組織について、次の実施形態がある。
 第1実施形態の平角状基材では、平角状基材の表面から深さ10μm以内における後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて測定した結晶粒界の全粒界長さLに対する特殊粒界の全特殊粒界長さLσの比率(Lσ/L)が40~90%である。
<Alloy structure>
The alloy structure of the flat substrate 2 has the following embodiment.
In the rectangular substrate of the first embodiment, the total grain boundary length of the grain boundaries measured by the EBSD method with a scanning electron microscope with a backscattered electron diffraction image system within a depth of 10 μm from the surface of the rectangular substrate. The ratio (Lσ / L) of the total special grain boundary length Lσ of the special grain boundary to the thickness L is 40 to 90%.
 平角状基材2の表面から深さ10μm以内における後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて測定した結晶粒界の全粒界長さLに対する特殊粒界の全特殊粒界長さLσの比率(Lσ/L)が40%未満であると耐クラック性が低下し、90%を超えると効果が飽和し、製造コストもかかり過ぎ不都合である。 All special grains of the special grain boundary with respect to the total grain boundary length L of the grain boundary measured by the EBSD method with a scanning electron microscope with a backscattered electron diffraction image system within a depth of 10 μm from the surface of the flat substrate 2 If the ratio of the field length Lσ (Lσ / L) is less than 40%, the crack resistance is lowered, and if it exceeds 90%, the effect is saturated and the production cost is too high.
 また、第2実施形態の平角状基材では、後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて、ステップサイズ0.5μmにて平角状基材2の表面の測定面積内の全ピクセルの方位を測定し、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、前記測定面積の80~95%であり、前記測定面積内に存在する結晶粒の面積平均GAMが4°未満である。 Further, in the flat substrate of the second embodiment, within the measurement area of the surface of the flat substrate 2 with a step size of 0.5 μm by the EBSD method using a scanning electron microscope with a backscattered electron diffraction image system. A crystal whose average orientation difference between all pixels in a crystal grain is less than 4 ° when the orientation of all pixels is measured and a boundary where the orientation difference between adjacent pixels is 5 ° or more is regarded as a grain boundary. The area ratio of the grains is 80 to 95% of the measurement area, and the area average GAM of the crystal grains existing in the measurement area is less than 4 °.
 ここで、後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて、ステップサイズ0.5μmにて平角状基材2の表面の測定面積内の全ピクセルの方位を測定し、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、測定面積の80%未満では、0.2%耐力に対する効果がなく、測定面積の95%を超える、或いは、測定面積内に存在する結晶粒の面積平均GAMが4°以上となると、はんだめっきとの密着性が悪くなる。
 本発明で意味する測定面積内に存在する結晶粒の面積平均GAMとは、次の手法により算出したものである。
 GAMは同一結晶粒内における隣接する測定点(ピクセル)間のミスオリエンテーションの平均値であり、隣接測定点の境界iにおける方位差を(1)式とすると、結晶粒内にピクセル間の境界がm個存在する場合、この結晶粒のGAM値は(2)式で表される。
Here, by the EBSD method using a scanning electron microscope with a backscattered electron diffraction image system, the orientations of all the pixels within the measurement area of the surface of the flat substrate 2 are measured with a step size of 0.5 μm and adjacent to each other. When a boundary having an orientation difference between pixels of 5 ° or more is regarded as a grain boundary, an area ratio of crystal grains having an average orientation difference between all pixels in the crystal grain of less than 4 ° is 80% of the measurement area. If it is less than%, there is no effect on 0.2% proof stress, and if it exceeds 95% of the measurement area, or if the area average GAM of the crystal grains present in the measurement area is 4 ° or more, the adhesion with the solder plating is Deteriorate.
The area average GAM of crystal grains existing within the measurement area as used in the present invention is calculated by the following method.
GAM is the average value of misorientation between adjacent measurement points (pixels) in the same crystal grain. When the difference in orientation at the boundary i between adjacent measurement points is expressed by equation (1), the boundary between pixels in the crystal grain is When m exist, the GAM value of this crystal grain is expressed by the equation (2).
Figure JPOXMLDOC01-appb-M000004
Figure JPOXMLDOC01-appb-M000004
Figure JPOXMLDOC01-appb-M000005
Figure JPOXMLDOC01-appb-M000005
 個々の結晶粒におけるGAMの値を(GAM)、各結晶粒の面積をSとすると、測定範囲内にM個の結晶粒が存在する場合、面積平均GAMは(3)式で表される。 When the value of the GAM in individual grains (GAM) k, the area of each crystal grain and S k, if there are M grain within the measurement range, area average GAM is expressed by equation (3) The
Figure JPOXMLDOC01-appb-M000006
Figure JPOXMLDOC01-appb-M000006
<製造方法>
 第1実施形態の平角状基材2は、Cuを99.90質量%以上含む純銅板に熱間圧延、中間冷間圧延、焼鈍、最終冷間圧延をこの順で施して純銅薄板とし、その薄板を切断機にてスリット加工して平角状基材とし、その平角状基材を最終焼鈍して製造されるが、中間冷間圧延の圧下率を50~70%にて実施し、最終冷間圧延の圧下率を50~70%にて実施し、最終焼鈍を200~400℃で150~240分間実施することが重要である。
<Manufacturing method>
The flat substrate 2 of the first embodiment is a pure copper sheet that is obtained by subjecting a pure copper sheet containing 99.90% by mass or more of Cu to hot rolling, intermediate cold rolling, annealing, and final cold rolling in this order. It is manufactured by slitting a thin plate with a cutting machine to make a flat base material, and final annealing the flat base material. The rolling reduction of the intermediate cold rolling is performed at 50 to 70%, and the final cold It is important that the rolling reduction of the hot rolling is performed at 50 to 70% and the final annealing is performed at 200 to 400 ° C. for 150 to 240 minutes.
 この場合、中間冷間圧延の圧下率を50~70%にて実施することにより、特殊粒界の全特殊粒界長さLσの比率(Lσ/L)を成長させる素地をつくり、最終焼鈍を200~400℃で150~240分間実施することにより、特殊粒界の全特殊粒界長さLσの比率(Lσ/L)が40~90%の範囲に成長する。この場合、連続焼鈍ではライン速度の関係から、上述の時間と温度にて最終焼鈍を実施することは難しく、バッチ処理にて最終焼鈍を実施することが好ましい。
 中間冷間圧延の圧下率が50%未満、或いは、70%を超えると効果は不足し、最終焼鈍の温度が200℃未満、或いは、時間が150分未満では特殊粒界の全特殊粒界長さLσの比率(Lσ/L)は40%未満となり、温度が400℃を超える、或いは、時間が240分間を超えても特殊粒界の全特殊粒界長さLσの比率(Lσ/L)は40%未満となり、平角状基材の耐クラック性にも悪影響を及ぼす可能性がある。
In this case, by carrying out the rolling reduction of the intermediate cold rolling at 50 to 70%, a substrate for growing the ratio (Lσ / L) of the total special grain boundary length Lσ of the special grain boundaries is created, and the final annealing is performed. By carrying out the treatment at 200 to 400 ° C. for 150 to 240 minutes, the ratio (Lσ / L) of the total special grain boundary length Lσ of the special grain boundaries grows in the range of 40 to 90%. In this case, in the continuous annealing, it is difficult to perform the final annealing at the above-described time and temperature because of the line speed, and it is preferable to perform the final annealing by batch processing.
If the rolling reduction of intermediate cold rolling is less than 50% or more than 70%, the effect is insufficient, and if the final annealing temperature is less than 200 ° C. or the time is less than 150 minutes, the total special grain boundary length of the special grain boundary The ratio of Lσ (Lσ / L) is less than 40%, and the ratio of the total special grain boundary length Lσ of the special grain boundary (Lσ / L) even if the temperature exceeds 400 ° C. or the time exceeds 240 minutes. Is less than 40%, which may adversely affect the crack resistance of the flat substrate.
 一方、第2実施形態の平角状基材2は、Cuを99.90質量%以上含む純銅板に熱間圧延、中間冷間圧延、焼鈍、最終冷間圧延をこの順で施して純銅薄板とし、その薄板を切断機にてスリット加工して平角状基材とし、その平角状基材を最終焼鈍して製造されるが、中間冷間圧延の圧下率を50~70%にて実施し、最終冷間圧延の圧下率を50~70%にて実施し、最終焼鈍を700~900℃で5~60秒間実施することが重要である。 On the other hand, the flat substrate 2 of the second embodiment is a pure copper sheet obtained by subjecting a pure copper plate containing 99.90% by mass or more of Cu to hot rolling, intermediate cold rolling, annealing, and final cold rolling in this order. The thin plate is slit by a cutting machine to form a flat substrate, and the flat substrate is finally annealed. The rolling reduction of the intermediate cold rolling is performed at 50 to 70%, It is important that the rolling reduction of the final cold rolling is performed at 50 to 70% and the final annealing is performed at 700 to 900 ° C. for 5 to 60 seconds.
 この場合、中間冷間圧延の圧下率を50~70%にて実施することにより、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合と測定面積内に存在する結晶粒の面積平均GAMを所定内の範囲に収める素地をつくり、最終焼鈍を700~900℃の雰囲気に5~60秒間保持して行なうことにより、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合と測定面積内に存在する結晶粒の面積平均GAMを所定内の範囲に収める。 中間冷間圧延の圧下率が50%未満、或いは、70%を超えると、前述した平均方位差が4°未満である結晶粒の面積割合と面積平均GAMを所定内の範囲に収めるための素地をつくる効果(素地効果)は不足し、最終焼鈍の雰囲気温度が700℃未満、或いは、時間が5秒未満では、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、測定面積の80%未満となり、最終焼鈍の雰囲気温度が900℃を超える、或いは、時間が60秒を超えると、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、測定面積の95%を超える、或いは、測定面積内に存在する結晶粒の面積平均GAMが4°以上となる。 In this case, by carrying out the rolling reduction of the intermediate cold rolling at 50 to 70%, the boundary in which the orientation difference between adjacent pixels is 5 ° or more is regarded as the crystal grain boundary. Create a substrate that keeps the area ratio of crystal grains whose average orientation difference between all pixels is less than 4 ° and the area average GAM of crystal grains in the measurement area within a predetermined range, and the final annealing is 700-900 ° C By maintaining the atmosphere for 5 to 60 seconds, the average orientation difference between all the pixels in the crystal grain is 4 when the boundary where the orientation difference between adjacent pixels is 5 ° or more is regarded as the grain boundary. The area ratio of crystal grains that are less than 0 ° and the area average GAM of crystal grains existing in the measurement area are within a predetermined range. When the rolling reduction ratio of intermediate cold rolling is less than 50% or more than 70%, the above-mentioned base ratio for keeping the area ratio of the crystal grains whose average orientation difference is less than 4 ° and the area average GAM within a predetermined range If the atmosphere temperature of the final annealing is less than 700 ° C or the time is less than 5 seconds, the boundary where the orientation difference between adjacent pixels is 5 ° or more is regarded as a grain boundary. In the case where the average orientation difference between all the pixels in the crystal grains is less than 4 °, the area ratio of the crystal grains is less than 80% of the measured area, and the atmosphere temperature of the final annealing exceeds 900 ° C., or the time Exceeds 60 seconds, the area ratio of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° exceeds 95% of the measurement area, or the crystal grains existing within the measurement area The area average GAM is 4 ° or more.
 最終冷間圧延の圧下率は、両実施形態とも共通であり、最終冷間圧延の圧下率を50~70%にて実施することにより、平角状基材の表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06~1.1となる。
 最終冷間圧延の圧下率が50%未満では、最適に選択された圧延ワークロールの表面粗さが被圧延物である純銅薄板の表面粗さに反映されず、平角状基材の表面の算術平均粗さRa、最大高さRz、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)を上記の所定の範囲内に収めることが出来ず、圧下率が70%を超えると、効果が飽和するばかりでなく、平角状基材の耐力に悪影響を及ぼす可能性がある。また、最終冷間圧延の圧下率を50~70%とすることにより、その後のスリット加工が容易になり、スリット加工材にバリが発生し難くなるという副次的効果もある。
The rolling reduction of the final cold rolling is common to both the embodiments, and the arithmetic average roughness Ra of the surface of the flat substrate is 0 by performing the rolling reduction of the final cold rolling at 50 to 70%. .05 to 0.3 μm, the maximum height Rz is 0.5 to 2.5 μm, and the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0.06 to 1.1. It becomes.
When the rolling reduction of the final cold rolling is less than 50%, the surface roughness of the optimally selected rolling work roll is not reflected in the surface roughness of the pure copper sheet as the rolled material, and the surface of the flat base material is arithmetic If the average roughness Ra, maximum height Rz, root mean square roughness Rq and maximum height Rz ratio (Rq / Rz) cannot fall within the predetermined range, and the rolling reduction exceeds 70% In addition to saturation of the effect, there is a possibility of adversely affecting the yield strength of the flat substrate. Further, by setting the reduction ratio of the final cold rolling to 50 to 70%, there is a secondary effect that subsequent slit processing becomes easy and burrs are hardly generated in the slit processed material.
 この様にして製造された平角状基材2の表面の一部又は全てに40~150μmの厚さに施されたはんだめっき層3を形成するには、平角状基材2を所定長さに切断した後、この短尺基材にはんだめっきを施す方法よりも、はんだめっき浴の下流側に大径の巻き取りドラムを設けておき、平角状基材2をはんだ合金の融点より50~100℃程度高い温度に調整されたはんだめっき浴に通し、適切な張力を掛けて引っ張りながら巻き取り、これにより平角状基材2をはんだめっき浴に連続的に浸漬し、引き上げる方法により行われることが製造コストの観点から好ましい。この場合、平角状基材2に張力が掛かり、はんだめっき後の太陽電池用電極線材1の耐力が上昇するので張力の調整に注意を要する。
 なお、第2実施形態の平角状基材においては、連続焼鈍が可能であり、連続焼鈍による最終焼鈍が施された直後の平角状基材をはんだめっき浴に通して連続的にめっきするとよい。 
In order to form the solder plating layer 3 having a thickness of 40 to 150 μm on a part or all of the surface of the flat substrate 2 manufactured in this way, the flat substrate 2 is formed to a predetermined length. After cutting, a winding drum having a large diameter is provided on the downstream side of the solder plating bath, rather than the method of performing solder plating on this short base material, and the flat base material 2 is 50 to 100 ° C. above the melting point of the solder alloy. It is manufactured by passing it through a solder plating bath adjusted to a relatively high temperature, winding it with an appropriate tension while pulling it, and continuously immersing and pulling up the flat substrate 2 in the solder plating bath. It is preferable from the viewpoint of cost. In this case, tension is applied to the flat rectangular base material 2, and the proof stress of the solar cell electrode wire 1 after solder plating is increased, so care must be taken in adjusting the tension.
In addition, in the flat base material of 2nd Embodiment, continuous annealing is possible and it is good to plate continuously the flat base material just after the final annealing by continuous annealing was passed through a solder plating bath.
<太陽電池の概略構成>
 図2は、本発明の太陽電池用電極線材1を所定の長さに切断した接続用リード14を備えた太陽電池の概略図であり、この太陽電池11は、PN接合を有するシリコン半導体で形成された半導体基板12と、半導体基板12の表面に線状に設けられた複数の表面電極13にはんだ付けされた接続用リード線14を備えている。半導体基板12の裏面には、40~80mm
程度の大形表面の裏面電極が複数個設けられている。接続用リード線14がはんだ付けされる前の半導体基板12には、複数の線状表面電極13に導通するように、これらの表面電極13に直交して配置されたはんだ帯が形成されている。太陽電池用電極線材1のめっき層3をはんだ帯に当接するように接続用リード線14を半導体基板12に載置し、半導体基板12の表面にはんだ付けされる。
<Schematic configuration of solar cell>
FIG. 2 is a schematic view of a solar cell provided with a connection lead 14 obtained by cutting the solar cell electrode wire 1 of the present invention into a predetermined length. The solar cell 11 is formed of a silicon semiconductor having a PN junction. And a connecting lead wire 14 soldered to a plurality of surface electrodes 13 linearly provided on the surface of the semiconductor substrate 12. On the back surface of the semiconductor substrate 12, 40 to 80 mm 2
A plurality of back electrodes having a large surface to the extent are provided. On the semiconductor substrate 12 before the connecting lead wires 14 are soldered, solder bands arranged perpendicular to the surface electrodes 13 are formed so as to be electrically connected to the plurality of linear surface electrodes 13. . The connecting lead wire 14 is placed on the semiconductor substrate 12 so that the plating layer 3 of the solar cell electrode wire 1 is in contact with the solder band, and is soldered to the surface of the semiconductor substrate 12.
 厚さ3.0mmの三菱マテリアル株式会社製の無酸素銅板(Cu:99.96%、O:5ppm、P:0ppm)およびタフピッチ銅(Cu:99.92%、O:300ppm、P:0ppm)板に、熱間圧延、中間冷間圧延(圧下率は表1に示す)、焼鈍をこの順で施して無酸素銅薄板およびタフピッチ銅薄板を作製し、次に、最終冷間圧延(圧下率は表1に示す)を実施して厚み0.15mmの無酸素銅薄板およびタフピッチ銅薄板を得た。次に、これらの無酸素銅薄板およびタフピッチ銅薄板を切断機にてスリット加工し、幅2mmの平角状薄板とした。更に、これらの平角状薄板を表1に示す条件にてバッチ処理で最終焼鈍を施し、実施例1~6、比較例1~6のめっき前の平角状基材を得た。 An oxygen-free copper plate (Cu: 99.96%, O: 5 ppm, P: 0 ppm) and tough pitch copper (Cu: 99.92%, O: 300 ppm, P: 0 ppm) manufactured by Mitsubishi Materials Corporation with a thickness of 3.0 mm The plate is subjected to hot rolling, intermediate cold rolling (the rolling reduction is shown in Table 1) and annealing in this order to produce an oxygen-free copper sheet and a tough pitch copper sheet, and then the final cold rolling (rolling ratio) Are shown in Table 1) to obtain an oxygen-free copper thin plate and a tough pitch copper thin plate having a thickness of 0.15 mm. Next, the oxygen-free copper thin plate and the tough pitch copper thin plate were slit with a cutting machine to obtain a flat rectangular plate having a width of 2 mm. Furthermore, these flat rectangular sheets were subjected to final annealing by batch treatment under the conditions shown in Table 1, and the flat rectangular substrates before plating of Examples 1 to 6 and Comparative Examples 1 to 6 were obtained.
Figure JPOXMLDOC01-appb-T000007
Figure JPOXMLDOC01-appb-T000007
 これらの平角状基材の表面粗さRa、Rz、Rq/Rz、結晶粒界の全粒界長さLに対する特殊粒界の全特殊粒界長さLσの比率(Lσ/L)、耐力を測定した。測定結果を表2、表3に示す。
 表面粗さRa、Rz、Rqは、各平角状条材から切出した試料の表面をオリンパス株式会社製の走査型共焦点レーザ顕微鏡LEXT OLS-3000を用い、対物レンズ100倍の条件でレーザ光を照射して、その反射光から距離を測定し、そのレーザ光を試料の表面に沿って直線的にスキャンしながら距離を連続的に測定することにより求めた。
The surface roughness Ra, Rz, Rq / Rz, the ratio of the total special grain boundary length Lσ of the special grain boundary to the total grain boundary length L of the grain boundary (Lσ / L), the proof stress It was measured. The measurement results are shown in Tables 2 and 3.
The surface roughness Ra, Rz, and Rq were measured using a scanning confocal laser microscope LEXT OLS-3000 manufactured by Olympus Co., Ltd. on the surface of the sample cut out from each of the rectangular strips. Irradiation was performed, the distance was measured from the reflected light, and the distance was continuously measured while the laser light was scanned linearly along the surface of the sample.
 結晶粒界の全粒界長さLに対する特殊粒界の全特殊粒界長さLσの比率(Lσ/L)は、次の方法により求めた。
 先ず、各平角状基材から切出した試料について、耐水研磨紙、ダイヤモンド砥粒を用いて機械研磨を行った後、コロイダルシリカ溶液を用いて仕上げ研磨を行った。
 次に、EBSD測定装置(HITACHI社製:S4300-SE,EDAX/TSL社製:OIM Data Collection)と、解析ソフト(EDAX/TSL社製:OIM Data Analysis ver.5.2)を使用し、試料表面の測定範囲内の個々の測定点(ピクセル)に電子線を照射し、後方散乱電子線回折による方位解析により、ステップサイズ0.5μmにて測定した隣接する測定点間の方位差が15°以上となる測定点間を結晶粒界として特殊粒界を特定し、その長さを算出することにより、特殊粒界長さ比率の解析を行った。
 測定範囲における結晶粒界の全粒界長さLを測定し、隣接する結晶粒の界面が特殊粒界を構成する結晶粒界の位置を決定すると共に、特殊粒界の全特殊粒界長さLσと、上記測定した結晶粒界の全粒界長さLとの粒界長比率Lσ/Lを求め、特殊粒界長さ比率とした。
 耐力は、各平角状基材から長さ150mmの引張試験片を採取し、JISZ2241に規定の方法により、長さ方向(圧延方向)に引っ張る引張試験により求めた。
The ratio (Lσ / L) of the total special grain boundary length Lσ of the special grain boundary to the total grain boundary length L of the crystal grain boundary was determined by the following method.
First, the sample cut out from each rectangular substrate was mechanically polished using water-resistant abrasive paper and diamond abrasive grains, and then final polished using a colloidal silica solution.
Next, using an EBSD measuring apparatus (HITACHI: S4300-SE, EDAX / TSL, OIM Data Collection) and analysis software (EDAX / TSL: OIM Data Analysis ver. 5.2), a sample Irradiation of individual measurement points (pixels) within the measurement range of the surface with an electron beam, and an azimuth difference between adjacent measurement points measured at a step size of 0.5 μm by azimuth analysis by backscattered electron diffraction is 15 °. The special grain boundary length ratio was analyzed by specifying a special grain boundary with the above measurement points as crystal grain boundaries and calculating the length.
Measure the total grain boundary length L of the grain boundary in the measurement range, determine the position of the crystal grain boundary where the interface of adjacent crystal grains constitutes the special grain boundary, and the total special grain boundary length of the special grain boundary A grain boundary length ratio Lσ / L between Lσ and the total grain boundary length L of the crystal grain boundary measured above was determined to obtain a special grain boundary length ratio.
The yield strength was determined by a tensile test in which a tensile test piece having a length of 150 mm was collected from each flat base material and pulled in the length direction (rolling direction) by a method specified in JISZ2241.
 次に、実施例1~6、比較例1~6のめっき前の各平角状基材に、溶融はんだめっき浴の下流側で10MPa程度の張力を掛けて引っ張りながら、溶融はんだめっき浴に通して溶融はんだめっきを施し、太陽電池用電極線材を作製した。溶融はんだめっき浴は、はんだ組成がSn-3.0%Ag-0.5Cu(融点:218℃)であり、浴温を300℃とした。 Next, each flat rectangular substrate before plating in Examples 1 to 6 and Comparative Examples 1 to 6 was passed through a molten solder plating bath while being pulled with a tension of about 10 MPa on the downstream side of the molten solder plating bath. Molten solder plating was applied to produce a solar cell electrode wire. The molten solder plating bath had a solder composition of Sn-3.0% Ag-0.5Cu (melting point: 218 ° C.) and a bath temperature of 300 ° C.
 これらの溶融はんだめっき後の各試料のめっき密着性、めっき耐熱剥離性、耐クラック性を測定した。測定結果を表3に示す。
 めっき密着性は、JIS H8504に規定されるめっき密着性試験にて測定した。試験片の寸法は幅2mm、長さ5mm、厚さ0.15mmとし、熱衝撃を加えた後の試験片の表面を4倍の拡大鏡で観察し、皮膜の剥離の有無及び程度を調べた。試験片の全面にわたり熱衝撃による層状剥離が認められなかった場合を○、一部に層状剥離が認められた場合を×とした。
The plating adhesion, plating heat release resistance, and crack resistance of each sample after the molten solder plating were measured. Table 3 shows the measurement results.
The plating adhesion was measured by a plating adhesion test defined in JIS H8504. The dimensions of the test piece were 2 mm in width, 5 mm in length, and 0.15 mm in thickness. The surface of the test piece after the thermal shock was applied was observed with a 4 × magnifier, and the presence or absence and degree of peeling of the film were examined. . The case where no delamination due to thermal shock was observed over the entire surface of the test piece was rated as “◯”, and the case where a layer delamination was observed in part was marked as “X”.
 めっき耐熱剥離性は、各試験片(幅2mm、長さ5mm、厚さ0.15mm)を105℃の恒温槽(大気雰囲気)中で500時間保持した後に、曲げ軸が圧延方向に対し平行方向となる90°W曲げ(R=0.6、ただしRは曲げ半径(mm))を行い、曲げ加工部表面について、JIS
Z1522に規定されるセロハン粘着テープを使用してめっき剥離試験を実施し、目視によりめっき層の剥離が認められなかったものを○、認められたものを×とした。
 耐クラック性は、縦150mm×横150mm、厚さ200μmのシリコンセルにはんだ接続したものの太陽電池パネルなどへ組み成型加工する際の耐クラックを調べた。クラックが認められなかったものを○、認められたものを×とした。
Plating heat-resistant peelability is determined by holding each test piece (width 2 mm, length 5 mm, thickness 0.15 mm) in a constant temperature bath (atmosphere) at 105 ° C. for 500 hours, and then the bending axis is parallel to the rolling direction. 90 ° W bending (R = 0.6, where R is the bending radius (mm)).
A plating peeling test was carried out using a cellophane adhesive tape defined in Z1522, and the case where peeling of the plating layer was not observed by visual observation was evaluated as “◯”, and the case where it was recognized as “X”.
For crack resistance, the crack resistance at the time of assembling and processing a solar cell panel or the like, which was solder-connected to a silicon cell having a length of 150 mm × width 150 mm and a thickness of 200 μm, was examined. A sample in which no crack was observed was rated as ◯, and a sample in which a crack was recognized was marked as ×.
Figure JPOXMLDOC01-appb-T000008
Figure JPOXMLDOC01-appb-T000008
 表1、表2、表3の結果より、本発明のめっき前の太陽電池用電極線材の平角状基材は、優れた耐クラック性を有し、その表面に施されるはんだめっきとの密着性が良好であることがわかる。 From the results of Table 1, Table 2, and Table 3, the flat substrate of the solar cell electrode wire before plating of the present invention has excellent crack resistance and adheres to the solder plating applied to the surface thereof. It can be seen that the properties are good.
 また、前述と同様に、厚さ3.0mmの三菱マテリアル株式会社製の無酸素銅板(Cu:99.96%、O:5ppm、P:0ppm)およびタフピッチ銅(Cu:99.92%、O:300ppm、P:0ppm)板に、熱間圧延、中間冷間圧延(圧下率は表4に示す)、焼鈍をこの順で施して無酸素銅薄板およびタフピッチ銅薄板を作製し、次に、最終冷間圧延(圧下率は表4に示す)を実施して厚み0.15mmの無酸素銅薄板およびタフピッチ銅薄板を得た。次に、これらの無酸素銅薄板およびタフピッチ銅薄板を切断機にてスリット加工し、幅2mmの平角状薄板とした。更に、これらの平角状薄板を表4に示す条件にて最終焼鈍を施し、実施例11~16、比較例11~16のめっき前の平角状基材を得た。 In addition, as described above, an oxygen-free copper plate (Cu: 99.96%, O: 5 ppm, P: 0 ppm) and tough pitch copper (Cu: 99.92%, O made by Mitsubishi Materials Corporation) having a thickness of 3.0 mm. : 300 ppm, P: 0 ppm), hot rolling, intermediate cold rolling (the rolling reduction is shown in Table 4) and annealing in this order to produce an oxygen-free copper sheet and a tough pitch copper sheet, Final cold rolling (the rolling reduction is shown in Table 4) was performed to obtain an oxygen-free copper sheet and a tough pitch copper sheet having a thickness of 0.15 mm. Next, the oxygen-free copper thin plate and the tough pitch copper thin plate were slit with a cutting machine to obtain a flat rectangular plate having a width of 2 mm. Further, these flat rectangular sheets were subjected to final annealing under the conditions shown in Table 4, and the flat rectangular substrates before plating of Examples 11 to 16 and Comparative Examples 11 to 16 were obtained.
 これらの平角状基材の表面粗さRa、Rz、Rq/Rz、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合、測定面積内に存在する結晶粒の面積平均GAM、0.2%耐力を測定した。測定結果を表5、表6に示す。 The surface roughness Ra, Rz, Rq / Rz of these rectangular substrates, the area ratio of crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 °, and the crystal grains present in the measurement area Area average GAM, 0.2% yield strength was measured. The measurement results are shown in Tables 5 and 6.
 表面粗さRa、Rz、Rqは、各平角状基材から切出した試料の表面をオリンパス株式会社製の走査型共焦点レーザ顕微鏡LEXT OLS-3000を用い、対物レンズ100倍の条件でレーザ光を照射して、その反射光から距離を測定し、そのレーザ光を試料の表面に沿って直線的にスキャンしながら距離を連続的に測定することにより求めた。 The surface roughness Ra, Rz, Rq was measured using a scanning confocal laser microscope LEXT OLS-3000 manufactured by Olympus Corporation on the surface of the sample cut out from each flat substrate, and the laser light was irradiated under the condition of 100 times the objective lens. Irradiation was performed, the distance was measured from the reflected light, and the distance was continuously measured while the laser light was scanned linearly along the surface of the sample.
 結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合は、次のように求めた。
 前処理として、平角状基材から採取した2mm×2mmの試料を10%硫酸に10分間浸漬した後、水洗、エアブローにより散水した後に、散水後の試料を日立ハイテクノロジーズ社製フラットミリング(イオンミリング)装置で、加速電圧5kV、入射角5°、照射時間1時間にて表面処理を施した。
 次に、TSL社製EBSDシステム付の日立ハイテクノロジーズ社製走査型電子顕微鏡S-3400Nで試料表面を観察した。観察条件は、加速電圧25kV、測定面積150μm×150μm(結晶粒を1000個以上含む)とした。
 観察結果より、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の全測定面積に対する面積割合は次の条件にて求めた。
 ステップサイズ0.5μmにて、測定面積範囲内の全ピクセルの方位を測定し、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした。次に、結晶粒界で囲まれた個々の結晶粒について、結晶粒内の全ピクセル間の方位差の平均値を計算し、平均値が4°未満の結晶粒の面積を算出し、それを全測定面積で割って、全結晶粒に占める結晶粒内の平均方位差が4°未満の結晶粒の面積の割合を求めた。なお、2ピクセル以上が連結しているものを結晶粒とした。
 この方法にて測定箇所を変更して5回測定を行い、それぞれの面積割合の平均値を面積割合とした。
The area ratio of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° was determined as follows.
As a pre-treatment, a 2 mm × 2 mm sample collected from a flat substrate was immersed in 10% sulfuric acid for 10 minutes, then washed with water and sprinkled by air blow, and then the sprinkled sample was flat milled by Hitachi High-Technologies Corporation (ion milling) ) The apparatus was subjected to surface treatment at an acceleration voltage of 5 kV, an incident angle of 5 °, and an irradiation time of 1 hour.
Next, the sample surface was observed with a scanning electron microscope S-3400N manufactured by Hitachi High-Technologies Corporation equipped with an EBSD system manufactured by TSL. The observation conditions were an acceleration voltage of 25 kV and a measurement area of 150 μm × 150 μm (including 1000 or more crystal grains).
From the observation results, the area ratio with respect to the total measurement area of the crystal grains in which the average orientation difference between all the pixels in the crystal grains is less than 4 ° was obtained under the following conditions.
At a step size of 0.5 μm, the orientation of all pixels within the measurement area range was measured, and a boundary where the orientation difference between adjacent pixels was 5 ° or more was regarded as a crystal grain boundary. Next, for each crystal grain surrounded by the crystal grain boundary, the average value of the orientation difference between all the pixels in the crystal grain is calculated, and the area of the crystal grain whose average value is less than 4 ° is calculated. Dividing by the total measurement area, the ratio of the area of the crystal grains having an average orientation difference of less than 4 ° in the crystal grains in the total crystal grains was determined. In addition, what connected 2 pixels or more was made into the crystal grain.
The measurement location was changed by this method and measurement was performed 5 times, and the average value of the respective area ratios was defined as the area ratio.
 測定面積内に存在する結晶粒の面積平均GAMは次のように求めた。
 前処理として、平角状基材から採取した2mm×2mmの試料を10%硫酸に10分間浸漬した後、水洗、エアブローにより散水した後に、散水後の試料を日立ハイテクノロジーズ社製フラットミリング(イオンミリング)装置で、加速電圧5kV、入射角5°、照射時間1時間にて表面処理を施した。
 次に、TSL社製EBSDシステム付きの日立ハイテクノロジーズ社製走査型電子顕微鏡S-3400Nでその試料表面を観察した。観察条件は、加速電圧25kV、測定面積150μm×150μm(結晶粒を1000個以上含む)とした。
 観察結果より、同一結晶粒内の隣接するピクセル間の方位差の平均値は次のようにして求めた。
 ステップサイズ0.5μmにて、測定面積範囲内の全ピクセルの方位を測定し、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした。次に、結晶粒界で囲まれた個々の結晶粒について、結晶粒の面積平均GAMを前述の数3の式にて計算して求めた。なお、2ピクセル以上が連結しているものを結晶粒とした。
 0.2%耐力は、各平角状基材から長さ150mmの引張試験片を採取し、JIS Z2241に規定の方法により、長さ方向(圧延方向)に引っ張る引張試験により求めた。
The area average GAM of the crystal grains existing within the measurement area was determined as follows.
As a pre-treatment, a 2 mm × 2 mm sample collected from a flat substrate was immersed in 10% sulfuric acid for 10 minutes, then washed with water and sprinkled by air blow, and then the sprinkled sample was flat milled by Hitachi High-Technologies Corporation (ion milling) ) The apparatus was subjected to surface treatment at an acceleration voltage of 5 kV, an incident angle of 5 °, and an irradiation time of 1 hour.
Next, the surface of the sample was observed with a scanning electron microscope S-3400N manufactured by Hitachi High-Technologies Corporation equipped with an EBSD system manufactured by TSL. The observation conditions were an acceleration voltage of 25 kV and a measurement area of 150 μm × 150 μm (including 1000 or more crystal grains).
From the observation results, the average value of the orientation difference between adjacent pixels in the same crystal grain was determined as follows.
At a step size of 0.5 μm, the orientation of all pixels within the measurement area range was measured, and a boundary where the orientation difference between adjacent pixels was 5 ° or more was regarded as a crystal grain boundary. Next, for each crystal grain surrounded by the crystal grain boundary, the area average GAM of the crystal grain was calculated by the above equation (3). In addition, what connected 2 pixels or more was made into the crystal grain.
The 0.2% proof stress was obtained by a tensile test in which a tensile test piece having a length of 150 mm was sampled from each rectangular base material and pulled in the length direction (rolling direction) by the method specified in JIS Z2241.
 次に、実施例1~6、比較例1~6の最終焼鈍が施された直後の各平角状基材に、溶融はんだめっき浴の下流側で10MPa程度の張力を掛けて引っ張りながら、溶融はんだめっき浴に通して溶融はんだめっきを施し、太陽電池用電極線材を作製した。溶融はんだめっき浴は、はんだ組成がSn-3.0%Ag-0.5%Cu(融点:218℃)であり、浴温を300℃とした。 Next, while each of the rectangular base materials immediately after the final annealing in Examples 1 to 6 and Comparative Examples 1 to 6 was applied with a tension of about 10 MPa on the downstream side of the molten solder plating bath, the molten solder was pulled. It passed through the plating bath and was subjected to molten solder plating to produce a solar cell electrode wire. The molten solder plating bath had a solder composition of Sn-3.0% Ag-0.5% Cu (melting point: 218 ° C.) and a bath temperature of 300 ° C.
 これらの溶融はんだめっき後の各試料のめっき密着性、めっき耐熱剥離性、0.2%耐力を測定した。測定結果を表3に示す。
 めっき密着性は、JIS H8504に規定されるめっき密着性試験にて測定した。試験片の寸法は幅2mm、長さ5mm、厚さ0.15mmとし、熱衝撃を加えた後の試験片の表面を4倍の拡大鏡で観察し、皮膜の剥離の有無及び程度を調べた。試験片の全面にわたり熱衝撃による層状剥離が認められなかった場合を○、一部に層状剥離が認められた場合を×とした。
 めっき耐熱剥離性は、各試験片(幅2mm、長さ5mm、厚さ0.15mm)を105℃の恒温槽(大気雰囲気)中で500時間保持した後に、曲げ軸が圧延方向に対し平行方向となる90°W曲げ(R=0.6、ただしRは曲げ半径(mm))を行い、曲げ加工部表面について、JIS
Z1522に規定されるセロハン粘着テープを使用してめっき剥離試験を実施し、目視によりめっき層の剥離が認められなかったものを○、認められたものを×とした。
 0.2%耐力は、各電極線材から長さ150mmの引張試験片を採取し、JIS Z2241に規定の方法により、長さ方向(圧延方向)に引っ張る引張試験により求めた。
The plating adhesion, plating heat release resistance, and 0.2% proof stress of each sample after the molten solder plating were measured. Table 3 shows the measurement results.
The plating adhesion was measured by a plating adhesion test defined in JIS H8504. The dimensions of the test piece were 2 mm in width, 5 mm in length, and 0.15 mm in thickness. The surface of the test piece after the thermal shock was applied was observed with a 4 × magnifier, and the presence or absence and degree of peeling of the film were examined. . The case where no delamination due to thermal shock was observed over the entire surface of the test piece was rated as “◯”, and the case where a layer delamination was observed in part was marked as “X”.
Plating heat-resistant peelability is determined by holding each test piece (width 2 mm, length 5 mm, thickness 0.15 mm) in a constant temperature bath (atmosphere) at 105 ° C. for 500 hours, and then the bending axis is parallel to the rolling direction. 90 ° W bending (R = 0.6, where R is the bending radius (mm)).
A plating peeling test was carried out using a cellophane adhesive tape defined in Z1522, and the case where peeling of the plating layer was not observed by visual observation was evaluated as “◯”, and the case where it was recognized as “X”.
The 0.2% proof stress was obtained by a tensile test in which a tensile test piece having a length of 150 mm was taken from each electrode wire and pulled in the length direction (rolling direction) by the method specified in JIS Z2241.
Figure JPOXMLDOC01-appb-T000010
Figure JPOXMLDOC01-appb-T000010
Figure JPOXMLDOC01-appb-T000011
Figure JPOXMLDOC01-appb-T000011
Figure JPOXMLDOC01-appb-T000012
Figure JPOXMLDOC01-appb-T000012
 表4、表5、表6の結果より、本発明の純銅薄板のスリット材で形成されためっき前の太陽電池用電極線材の平角状基材は、はんだめっきとの密着性が良好であり、はんだめっき後も0.2%耐力の上昇が少ないことがわかる。また、本発明の製造方法により製造された太陽電池用電極線材は耐久性に優れていることがわかる。 From the results of Table 4, Table 5, and Table 6, the flat base material of the solar cell electrode wire before plating formed with the slit material of the pure copper thin plate of the present invention has good adhesion to the solder plating, It can be seen that the 0.2% yield strength increase is small even after solder plating. Moreover, it turns out that the electrode wire for solar cells manufactured by the manufacturing method of this invention is excellent in durability.
 以上、本発明の実施形態の製造方法について説明したが、本発明はこの記載に限定されることはなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。 As mentioned above, although the manufacturing method of embodiment of this invention was demonstrated, this invention is not limited to this description, A various change can be added in the range which does not deviate from the meaning of this invention.
 本発明は、表面に施されるめっきとの密着性が良好である純銅薄板のスリット材で形成されためっき前の太陽電池用電極線材の平角状基材が提供され、耐久性に優れた太陽電池用電極線材に利用することができる。 The present invention provides a flat base material for a solar cell electrode wire before plating formed of a pure copper thin plate slit material having good adhesion to the plating applied to the surface, and has excellent durability. It can be used for battery electrode wires.
 1 太陽電池用電極線材
 2 平角状基材
 3 はんだめっき層
 11 太陽電池
 12 半導体基板
 13 線状表面電極
 14 接続用リード
DESCRIPTION OF SYMBOLS 1 Solar cell electrode wire 2 Flat base material 3 Solder plating layer 11 Solar cell 12 Semiconductor substrate 13 Linear surface electrode 14 Lead for connection

Claims (5)

  1.  表面の一部又は全てにはんだめっきが施された太陽電池用電極線材のめっき前の平角状基材であり、Cuを99.90質量%以上含む純銅薄板のスリット材で形成され、表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06~1.1であり、表面から深さ10μm以内における後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて測定した、隣接する測定点間の方位差が15°以上となる測定点間を結晶粒界とみなした場合の、結晶粒界の全粒界長さLに対する特殊粒界の全特殊粒界長さLσの比率(Lσ/L)が40~90%であることを特徴とする太陽電池用電極線材のめっき前の平角状基材。 It is a flat rectangular base material before plating of an electrode wire for a solar cell in which a part or all of the surface is solder-plated, and is formed of a pure copper thin plate slit material containing 99.90% by mass or more of Cu, and the surface arithmetic The average roughness Ra is 0.05 to 0.3 μm, the maximum height Rz is 0.5 to 2.5 μm, and the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0. .06 to 1.1, and the azimuth difference between adjacent measurement points measured by the EBSD method using a scanning electron microscope with a backscattered electron diffraction image system within a depth of 10 μm from the surface is 15 ° or more. The ratio (Lσ / L) of the total special grain boundary length Lσ of the special grain boundary to the total grain boundary length L of the crystal grain boundary (Lσ / L) when the interval between the measurement points is regarded as the crystal grain boundary is 40 to 90% A flat substrate before plating of a solar cell electrode wire.
  2.  表面の一部又は全てにはんだめっきが施された太陽電池用電極線材のめっき前の平角状基材であり、Cuを99.90質量%以上含む純銅薄板のスリット材で形成され、表面の算術平均粗さRaが0.05~0.3μmであり、最大高さRzが0.5~2.5μmであり、二乗平均平方根粗さRqと最大高さRzの比率(Rq/Rz)が0.06~1.1であり、後方散乱電子回折像システム付の走査型電子顕微鏡によるEBSD法にて、ステップサイズ0.5μmにて表面の測定面積内の全ピクセルの方位を測定し、隣接するピクセル間の方位差が5°以上である境界を結晶粒界とみなした場合の、結晶粒内の全ピクセル間の平均方位差が4°未満である結晶粒の面積割合が、前記測定面積の80~95%であり、前記測定面積内に存在する結晶粒の面積平均GAMが4°未満であることを特徴とする太陽電池用電極線材のめっき前の平角状基材。 It is a flat rectangular base material before plating of an electrode wire for a solar cell in which a part or all of the surface is solder-plated, and is formed of a pure copper thin plate slit material containing 99.90% by mass or more of Cu, and the surface arithmetic The average roughness Ra is 0.05 to 0.3 μm, the maximum height Rz is 0.5 to 2.5 μm, and the ratio of the root mean square roughness Rq to the maximum height Rz (Rq / Rz) is 0. .06 to 1.1, the orientation of all pixels within the measurement area of the surface is measured with an EBSD method using a scanning electron microscope with a backscattered electron diffraction image system, with a step size of 0.5 μm, and adjacent to each other. When the boundary where the orientation difference between the pixels is 5 ° or more is regarded as a crystal grain boundary, the area ratio of the crystal grains where the average orientation difference between all the pixels in the crystal grain is less than 4 ° is the measurement area. 80-95%, existing within the measurement area A flat substrate before plating of an electrode wire for a solar cell, wherein the area average GAM of crystal grains is less than 4 °.
  3.  Cuを99.90質量%以上含む純銅板に熱間圧延、中間冷間圧延、焼鈍、最終冷間圧延をこの順で施して純銅薄板とし、当該薄板を切断機にてスリット加工して平角状基材とし、当該平角状基材を最終焼鈍して太陽電池用電極線材のめっき前の平角状基材を製造する方法において、前記中間冷間圧延の圧下率を50~70%にて実施し、前記最終冷間圧延の圧下率を50~70%にて実施し、前記最終焼鈍を200~400℃で150~240分間実施することを特徴とする太陽電池用電極線材のめっき前の平角状基材の製造方法。 A pure copper sheet containing 99.90% by mass or more of Cu is subjected to hot rolling, intermediate cold rolling, annealing, and final cold rolling in this order to form a pure copper sheet, and the sheet is slitted with a cutting machine to have a rectangular shape. In the method of manufacturing a flat base material before plating of a solar cell electrode wire by subjecting the flat base material to final annealing, the intermediate cold rolling is performed at a reduction rate of 50 to 70%. The rectangular shape before plating of the electrode wire for a solar cell, wherein the rolling reduction of the final cold rolling is performed at 50 to 70%, and the final annealing is performed at 200 to 400 ° C. for 150 to 240 minutes. A method for producing a substrate.
  4.  Cuを99.90質量%以上含む純銅板に熱間圧延、中間冷間圧延、焼鈍、最終冷間圧延をこの順で施して純銅薄板とし、当該薄板を切断機にてスリット加工して平角状基材とし、当該平角状基材を最終焼鈍して太陽電池用電極線材のめっき前の平角状基材を製造する方法において、前記中間冷間圧延の圧下率を50~70%にて実施し、前記最終冷間圧延の圧下率を50~70%にて実施し、前記最終焼鈍を700~900℃の雰囲気に5~60秒間保持して行なうことを特徴とする太陽電池用電極線材のめっき前の平角状基材の製造方法。 A pure copper sheet containing 99.90% by mass or more of Cu is subjected to hot rolling, intermediate cold rolling, annealing, and final cold rolling in this order to form a pure copper sheet, and the sheet is slitted with a cutting machine to have a rectangular shape. In the method of manufacturing a flat base material before plating of a solar cell electrode wire by subjecting the flat base material to final annealing, the intermediate cold rolling is performed at a reduction rate of 50 to 70%. The plating of a solar cell electrode wire, wherein the rolling reduction of the final cold rolling is performed at 50 to 70%, and the final annealing is performed in an atmosphere of 700 to 900 ° C. for 5 to 60 seconds. The manufacturing method of the previous flat base material.
  5.  請求項3又は4に記載の製造方法により製造された太陽電池用電極線材のめっき前の平角状基材の表面の一部又は全てにはんだめっきを40~150μmの厚さに施すことにより製造された太陽電池用電極線材。 It is manufactured by applying solder plating to a thickness of 40 to 150 μm on a part or all of the surface of the flat substrate before plating of the electrode wire for solar cell manufactured by the manufacturing method according to claim 3 or 4. Solar cell electrode wire.
PCT/JP2011/074220 2010-10-28 2011-10-20 Electrode wire for solar cell, substrate thereof, and substrate manufacturing method WO2012057002A1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008140787A (en) * 2006-10-10 2008-06-19 Hitachi Cable Ltd Solder plating wire for solar cell and its manufacturing method
JP2009016593A (en) * 2007-07-05 2009-01-22 Neomax Material:Kk Electrode wire for solar cell, its base material, and manufacturing method of base material

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008140787A (en) * 2006-10-10 2008-06-19 Hitachi Cable Ltd Solder plating wire for solar cell and its manufacturing method
JP2009016593A (en) * 2007-07-05 2009-01-22 Neomax Material:Kk Electrode wire for solar cell, its base material, and manufacturing method of base material

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