WO2012039533A1 - Structure de graphène, procédé de formation de la structure de graphène, et électrode transparente comprenant la structure de graphène - Google Patents

Structure de graphène, procédé de formation de la structure de graphène, et électrode transparente comprenant la structure de graphène Download PDF

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Publication number
WO2012039533A1
WO2012039533A1 PCT/KR2011/001642 KR2011001642W WO2012039533A1 WO 2012039533 A1 WO2012039533 A1 WO 2012039533A1 KR 2011001642 W KR2011001642 W KR 2011001642W WO 2012039533 A1 WO2012039533 A1 WO 2012039533A1
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Prior art keywords
layer
graphene
graphitizing catalyst
amorphous carbon
forming
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PCT/KR2011/001642
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English (en)
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Ki Bum Kim
Hong Hie Lee
Hyun Mi Kim
Seong Yong Cho
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Snu R&Db Foundation
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/182Graphene
    • C01B32/184Preparation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B1/00Single-crystal growth directly from the solid state
    • C30B1/02Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
    • C30B1/023Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing from solids with amorphous structure
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02436Intermediate layers between substrates and deposited layers
    • H01L21/02439Materials
    • H01L21/02491Conductive materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02436Intermediate layers between substrates and deposited layers
    • H01L21/02494Structure
    • H01L21/02513Microstructure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02524Group 14 semiconducting materials
    • H01L21/02527Carbon, e.g. diamond-like carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02656Special treatments
    • H01L21/02664Aftertreatments
    • H01L21/02667Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022466Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884Manufacture of transparent electrodes, e.g. TCO, ITO
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells

Abstract

La présente invention concerne un procédé de formation de graphène en utilisant une couche de carbone amorphe et une cellule solaire comprenant du graphène formé en utilisant le procédé. Le procédé de formation de graphène comprend : la formation d'une couche de carbone amorphe sur un substrat ; la formation d'une couche de catalyseur de graphitation sur la couche de carbone amorphe ; et le traitement thermique de la couche de carbone amorphe et de la couche de catalyseur de graphitation pour cristalliser la couche de carbone amorphe, de manière à former une couche de graphène sur la couche de catalyseur de graphitation.
PCT/KR2011/001642 2010-09-20 2011-03-09 Structure de graphène, procédé de formation de la structure de graphène, et électrode transparente comprenant la structure de graphène WO2012039533A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0092512 2010-09-20
KR1020100092512A KR101197639B1 (ko) 2010-09-20 2010-09-20 그래핀 구조, 그 제조 방법 및 그래핀 구조를 이용한 투명 전극

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WO2012039533A1 true WO2012039533A1 (fr) 2012-03-29

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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102774065A (zh) * 2012-06-01 2012-11-14 中国科学院宁波材料技术与工程研究所 一种具有石墨烯结构的非晶碳膜及其制备方法
WO2014150586A1 (fr) * 2013-03-15 2014-09-25 Solan, LLC Fabrication de graphène à l'aide de matériaux de fondation dotés de structures favorisées
WO2016066413A1 (fr) * 2014-10-29 2016-05-06 Aixtron Se Procédé de séparation d'une structure de carbone d'une structure de nucléation
US9382118B2 (en) * 2014-11-11 2016-07-05 Hanwha Techwin Co., Ltd. Method of manufacturing graphene
US11127941B2 (en) 2019-10-25 2021-09-21 Lyten, Inc. Carbon-based structures for incorporation into lithium (Li) ion battery electrodes
US11127942B2 (en) 2019-10-25 2021-09-21 Lyten, Inc. Systems and methods of manufacture of carbon based structures incorporated into lithium ion and lithium sulfur (li s) battery electrodes
US11133495B2 (en) 2019-10-25 2021-09-28 Lyten, Inc. Advanced lithium (LI) ion and lithium sulfur (LI S) batteries
US11198611B2 (en) 2019-07-30 2021-12-14 Lyten, Inc. 3D self-assembled multi-modal carbon-based particle
US11309545B2 (en) 2019-10-25 2022-04-19 Lyten, Inc. Carbonaceous materials for lithium-sulfur batteries
US11342561B2 (en) 2019-10-25 2022-05-24 Lyten, Inc. Protective polymeric lattices for lithium anodes in lithium-sulfur batteries
US11398622B2 (en) 2019-10-25 2022-07-26 Lyten, Inc. Protective layer including tin fluoride disposed on a lithium anode in a lithium-sulfur battery
US11489161B2 (en) 2019-10-25 2022-11-01 Lyten, Inc. Powdered materials including carbonaceous structures for lithium-sulfur battery cathodes
US11508966B2 (en) 2019-10-25 2022-11-22 Lyten, Inc. Protective carbon layer for lithium (Li) metal anodes
US11539074B2 (en) 2019-10-25 2022-12-27 Lyten, Inc. Artificial solid electrolyte interface (A-SEI) cap layer including graphene layers with flexible wrinkle areas
US11631893B2 (en) 2019-10-25 2023-04-18 Lyten, Inc. Artificial solid electrolyte interface cap layer for an anode in a Li S battery system
US11735745B2 (en) 2021-06-16 2023-08-22 Lyten, Inc. Lithium-air battery
US11870063B1 (en) 2022-10-24 2024-01-09 Lyten, Inc. Dual layer gradient cathode electrode structure for reducing sulfide transfer

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KR101920718B1 (ko) 2012-07-27 2018-11-21 삼성전자주식회사 그래핀 소자 제조 장치 및 이를 이용한 그래핀 소자 제조 방법
KR101432970B1 (ko) * 2012-07-29 2014-08-21 이장훈 카본블랙을 이용한 그래핀 구조체 제조방법
KR101984695B1 (ko) 2012-08-29 2019-09-03 삼성전자주식회사 그래핀 소자 및 그 제조방법
CN103193224B (zh) * 2013-04-17 2015-07-08 苏州大学 在非金属基底上低温制备石墨烯薄膜的方法
KR101915206B1 (ko) * 2014-11-11 2018-11-05 한화에어로스페이스 주식회사 그래핀의 제조 방법
US10816828B2 (en) 2016-11-02 2020-10-27 Samsung Electronics Co., Ltd. Multi-stack graphene structure and device including the same

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KR20090026568A (ko) * 2007-09-10 2009-03-13 삼성전자주식회사 그라펜 시트 및 그의 제조방법
KR20090065205A (ko) * 2007-12-17 2009-06-22 삼성전자주식회사 그라펜 쉘의 제조방법 및 이로부터 제조된 그라펜 쉘

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US20050271574A1 (en) * 2004-06-03 2005-12-08 Jang Bor Z Process for producing nano-scaled graphene plates
KR20090026568A (ko) * 2007-09-10 2009-03-13 삼성전자주식회사 그라펜 시트 및 그의 제조방법
KR20090065205A (ko) * 2007-12-17 2009-06-22 삼성전자주식회사 그라펜 쉘의 제조방법 및 이로부터 제조된 그라펜 쉘

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102774065A (zh) * 2012-06-01 2012-11-14 中国科学院宁波材料技术与工程研究所 一种具有石墨烯结构的非晶碳膜及其制备方法
CN102774065B (zh) * 2012-06-01 2015-04-29 中国科学院宁波材料技术与工程研究所 一种具有石墨烯结构的非晶碳膜及其制备方法
WO2014150586A1 (fr) * 2013-03-15 2014-09-25 Solan, LLC Fabrication de graphène à l'aide de matériaux de fondation dotés de structures favorisées
WO2016066413A1 (fr) * 2014-10-29 2016-05-06 Aixtron Se Procédé de séparation d'une structure de carbone d'une structure de nucléation
CN107001044A (zh) * 2014-10-29 2017-08-01 艾克斯特朗欧洲公司 从籽晶结构体分离碳结构体的方法
US10563300B2 (en) 2014-10-29 2020-02-18 Aixtron Se Method for separating a carbon structure from a seed structure
CN107001044B (zh) * 2014-10-29 2020-10-27 艾克斯特朗欧洲公司 从籽晶结构体分离碳结构体的方法
TWI718110B (zh) * 2014-10-29 2021-02-11 德商愛思強歐洲公司 將碳結構與晶種結構分離之方法
US9382118B2 (en) * 2014-11-11 2016-07-05 Hanwha Techwin Co., Ltd. Method of manufacturing graphene
US11198611B2 (en) 2019-07-30 2021-12-14 Lyten, Inc. 3D self-assembled multi-modal carbon-based particle
US11299397B2 (en) 2019-07-30 2022-04-12 Lyten, Inc. 3D self-assembled multi-modal carbon-based particles integrated into a continuous electrode film layer
US11398622B2 (en) 2019-10-25 2022-07-26 Lyten, Inc. Protective layer including tin fluoride disposed on a lithium anode in a lithium-sulfur battery
US11127941B2 (en) 2019-10-25 2021-09-21 Lyten, Inc. Carbon-based structures for incorporation into lithium (Li) ion battery electrodes
US11133495B2 (en) 2019-10-25 2021-09-28 Lyten, Inc. Advanced lithium (LI) ion and lithium sulfur (LI S) batteries
US11309545B2 (en) 2019-10-25 2022-04-19 Lyten, Inc. Carbonaceous materials for lithium-sulfur batteries
US11342561B2 (en) 2019-10-25 2022-05-24 Lyten, Inc. Protective polymeric lattices for lithium anodes in lithium-sulfur batteries
US11127942B2 (en) 2019-10-25 2021-09-21 Lyten, Inc. Systems and methods of manufacture of carbon based structures incorporated into lithium ion and lithium sulfur (li s) battery electrodes
US11489161B2 (en) 2019-10-25 2022-11-01 Lyten, Inc. Powdered materials including carbonaceous structures for lithium-sulfur battery cathodes
US11508966B2 (en) 2019-10-25 2022-11-22 Lyten, Inc. Protective carbon layer for lithium (Li) metal anodes
US11539074B2 (en) 2019-10-25 2022-12-27 Lyten, Inc. Artificial solid electrolyte interface (A-SEI) cap layer including graphene layers with flexible wrinkle areas
US11631893B2 (en) 2019-10-25 2023-04-18 Lyten, Inc. Artificial solid electrolyte interface cap layer for an anode in a Li S battery system
US11735740B2 (en) 2019-10-25 2023-08-22 Lyten, Inc. Protective carbon layer for lithium (Li) metal anodes
US11735745B2 (en) 2021-06-16 2023-08-22 Lyten, Inc. Lithium-air battery
US11870063B1 (en) 2022-10-24 2024-01-09 Lyten, Inc. Dual layer gradient cathode electrode structure for reducing sulfide transfer

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KR101197639B1 (ko) 2012-11-07
KR20120030780A (ko) 2012-03-29

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