WO2012019332A1 - Dispositif d'alimentation en mortier avec structure de régulation de pression - Google Patents

Dispositif d'alimentation en mortier avec structure de régulation de pression Download PDF

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Publication number
WO2012019332A1
WO2012019332A1 PCT/CN2010/001802 CN2010001802W WO2012019332A1 WO 2012019332 A1 WO2012019332 A1 WO 2012019332A1 CN 2010001802 W CN2010001802 W CN 2010001802W WO 2012019332 A1 WO2012019332 A1 WO 2012019332A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
mortar
pump
tank body
adjusting mechanism
Prior art date
Application number
PCT/CN2010/001802
Other languages
English (en)
Chinese (zh)
Inventor
种宝春
靳永吉
张为强
Original Assignee
中国电子科技集团公司第四十五研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 中国电子科技集团公司第四十五研究所 filed Critical 中国电子科技集团公司第四十五研究所
Priority to GB1301165.5A priority Critical patent/GB2495666B/en
Publication of WO2012019332A1 publication Critical patent/WO2012019332A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/005—Devices for the automatic drive or the program control of the machines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D3/00—Axial-flow pumps
    • F04D3/02—Axial-flow pumps of screw type

Definitions

  • the invention relates to the technical field of a device for spraying a slurry from a storage tank through a pipeline to a cutting steel wire during processing of a semiconductor crystal by using a multi-wire sawing machine from an ingot or an ingot.
  • the multi-wire sawing machine processes semiconductor ingots or ingots into wafers, it has high processing efficiency and high yield, so it is widely used.
  • the unevenness of the mortar flow is gradually exposed, and the unevenness of the mortar flow affects the further improvement of the yield.
  • the main causes of uneven flow are: Fluctuation and pressure changes during the mortar lift of the mortar pump. As the size of the semiconductor ingot or ingot increases, the value of the material itself increases, and the processing cost is reduced or the processing loss is reduced to reduce the economic loss, which has become an urgent problem to be solved.
  • the object of the present invention is to provide a mortar supply device with a pressure adjusting mechanism, which can improve the continuity, reduce the fluctuation, and improve the consistency of the pressure when the mortar used for cutting the multi-wire cutting machine is fed, thereby improving the consistency. Yield and efficiency;
  • the invention is particularly applicable to the improvement of mortar in multi-wire cutting machines in the semiconductor industry. It can also be applied to other industries that need to upgrade high viscosity, high density fluids.
  • the main technical solution of the device of the invention is: a mortar supply device with a pressure regulating mechanism, comprising a motor and a pump, characterized by having a mechanical pressure regulating mechanism, the structure thereof: the outlet of the pump body is connected through the connecting pipe and the tank body, The tank body is provided with a mortar outlet, and the tank body has a mechanical pressure automatic adjustment structure.
  • the mechanical pressure automatic adjustment structure may be: an elastic diaphragm is fixedly mounted on the outer edge of the upper body of the tank, and a cover type pressure sleeve for protecting the elastic diaphragm is arranged above the elastic diaphragm, and the cover type pressure sleeve is sleeved on the tank body, and the cover type The pressure sleeve is connected to the spring return and adjustment mechanism. It has good sealing performance and is very stable and reliable.
  • the mechanical pressure automatic adjustment structure can also be a piston type structure, etc., and the piston rod and the cover type pressure sleeve are twisted.
  • the cap type pressure gland preferably has an inwardly convex spherical crown surface, which is more advantageous for improving the durability and life of the elastic diaphragm and ensuring its normal operation.
  • a face having other shapes is also possible, but it is not as good as an inwardly convex spherical crown.
  • the cap press sleeve can have a long hole that avoids the slurry outlet when sliding axially.
  • the structure of the spring returning and adjusting mechanism may be: the cover type pressing sleeve has at least three guiding holes which are slidingly matched with the guiding columns fixed on the connecting plate of the can body, and the guiding holes are arranged at the lower part of the cover pressing sleeve On the orifice plate, a pressure spring is arranged on the guide post between the guide plate and the limit fixing plate on the guide post.
  • the structure of the spring returning and adjusting mechanism may also be a tension spring type structure or the like.
  • the can body is preferably cylindrical, the bottom is rounded, and the connecting tube is connected to the top of the round table. Its compact size and smoother flow.
  • the pump body has a pump barrel having a cylindrical inner cavity
  • the pump barrel having a cylindrical inner cavity is provided with a runner having a spiral groove auger structure.
  • the inner wheel of the runner having the spiral groove auger structure has a rectangular square, and the rectangular square is provided with a square hole which is matched with the rotating shaft, and the rotating shaft is provided with a rectangular square and a rotating structure having a spiral groove auger structure.
  • the limit structure of the wheel is provided.
  • the bearing body of the pump body is mounted with a bearing for positioning a fixed rotating shaft, and the bearing is respectively fixed by a gland and a bearing washer; the pump barrel having a cylindrical inner cavity is welded to the fixing seat.
  • the positive effect of the present invention is:
  • the present invention solves the problems that people in the prior art have been trying to solve but have not been solved.
  • the continuity of the mortar used for cutting the multi-wire cutting machine can be improved. Reducing volatility and increasing the consistency of pressure will help improve yield and efficiency.
  • the invention is particularly suitable for use in the improvement of mortar in multi-wire cutting machines in the semiconductor industry, and in other industries where high viscosity, high density fluids are required to be lifted.
  • the invention patent applies the spiral groove structure to the grinding wheel of the mortar pump lifting mortar, so that the mortar has continuity in the lifting process, reduces the fluctuation, and increases the device capable of expanding and contracting with the pressure change. Absorb the pressure fluctuations to make the pressure uniform and ensure uniform flow.
  • Figure 1 is a schematic view showing the structure of a preferred embodiment of the present invention.
  • Figure 2 is a plan view of Figure 1.
  • Figure 3 is a cross-sectional view taken along line AA of Figure 2;
  • Fig. 4 is a perspective view showing the structure of the runner 11 having the spiral groove auger structure of Fig. 1.
  • Figure 5 is a cross-sectional view taken along line B-B of the runner 11 of Figure 4;
  • Figure 6 is a cross-sectional view of the rectangular block 13 of Figure 1.
  • the mortar supply device with a pressure adjusting mechanism includes a motor 27 and a pump, and is characterized in that it has a mechanical pressure adjusting mechanism, and the structure thereof: the outlet of the pump body communicates with the tank body 31 through the connecting pipe 33,
  • the tank body 31 is provided with a mortar outlet 37 having a mechanical pressure automatic adjustment structure.
  • the mechanical pressure automatic adjustment structure is: an elastic diaphragm 30 is fastened to the outer edge of the upper surface of the can body 31, and a cover pressure sleeve 22 for protecting the elastic diaphragm 30 is disposed above the elastic diaphragm 30, and the cover pressure sleeve 22 is sleeved on the can body 31.
  • the cover sleeve 22 is connected to the spring return and adjustment mechanism.
  • the cap sleeve 22 has an inwardly convex spherical surface 35.
  • the structure of the spring returning and adjusting mechanism is: the cover type pressing sleeve 22 has a guiding hole which is at least engaged with the guide post 23 fixed on the connecting plate 32 of the can body 31, and the guiding hole is disposed at the lower part of the cover pressing sleeve 22.
  • a pressure spring 24 is disposed on the guide post 23 between the guide plate and the limit fixing plate 25 on the guide post 23.
  • the can body 31 has a cylindrical shape, and the bottom portion has a rounded table shape, and the connecting pipe 33 communicates with the top of the round table.
  • the cap sleeve 22 has a long hole 20 that avoids the slurry outlet when axially sliding.
  • the pump body has a pump barrel 10 having a cylindrical inner cavity, and a pump barrel 10 having a cylindrical groove in the inner cavity is provided with a runner 11 having a spiral groove auger structure.
  • a rectangular block 13 is mounted in the runner 11 having a spiral grooved auger structure, and a rectangular hole is formed in the rectangular block 13 to be coupled with the rotating shaft 12.
  • the rotating shaft 12 is provided with a rectangular block (13) and has a spiral groove auger structure.
  • the limit structure of the runner 11 A bearing for positioning the fixed shaft 12 is mounted in the fixing base 2 of the pump body.
  • the bearing 17 is fixed by the gland 5 and the bearing washers 7, 8 respectively; the pump barrel 10 having a cylindrical inner cavity is welded to the fixing base 2.
  • the frame plate 1 is fastened to the motor 27 by screws, the motor 27 is mounted with the coupling 4 and connected to the rotating shaft 12, and the frame plate 1 is fastened to the fixing base 2 via the bolt 3, and is fixed.
  • the fixing seat 2 is fastened to the bearing housing 6 via a screw 9, and the bearing 17 and the bearing washer 7 and the bearing washer 8 are mounted in the bearing housing 6 and are fixedly connected via the gland 5 and the screw 18.
  • the rotating shaft 12 is fastened to the bearing 17 via the lock nut 19, and the pump barrel 10 having a cylindrical inner cavity is welded to the fixing base 2, and the rectangular block 13 is tightly mounted in the rotating wheel 11, and the rotating shaft 12 passes the nut 11 and the rotating wheel 11 and the rectangular block.
  • the runner 11 is included in the pump barrel 10 whose inner cavity is cylindrical, and forms a cavity 15, and the connecting nozzle 16 is connected to the pump barrel 10 whose inner cavity is cylindrical and communicates with the cavity 15, the connecting pipe 33 Connected to the connecting nozzle 16 and the tapered can body 31, the tapered can body 31 is fastened to the frame plate 1 via the bolt 36 and the nut 21, and the guide post 23 is connected with the bolt 36, and the limiting fixing plate 25 is guided by the screw 26 and the guide.
  • the post 23 is fastened and the compression spring 24 is placed over the guide post 23 and positioned by the retaining plate 25.
  • the cover press sleeve 22 is bored and mounted on the guide post 23 by the lower end surface of the compression spring 24.
  • the elastic diaphragm 30 is fastened and press-fitted to the upper end surface of the tapered can body 31 by the annular pressing sleeve 29 and the screw 26.
  • the cover press sleeve 22 is pressed against the elastic diaphragm 30 by the compression spring 24 and its own weight, and the elastic diaphragm 30 is fastened to the conical tank body 31 via the annular pressure sleeve 28, and the elasticity is strong when the fluid pressure in the tank body is large.
  • the diaphragm 30 is subjected to pressure, deformably expands, and pushes the cover sleeve 22 upward.
  • the compression spring 24 is contracted to store energy by the force of the cover sleeve 22, and when the pressure in the chamber is lowered, the compression spring 24 releases energy.
  • the push cover presser 22 supplements the pressure of the fluid in the tapered can 31.
  • the structure of the present invention is described with specific representative embodiments shown in the drawings.
  • the structure and method of the present invention can effectively lift a mortar of a high viscosity, high density fluid such as a multi-wire cutter to maintain continuity and reduce volatility while ensuring pressure uniformity.
  • the mortar supply device having the pressure compensating structure of the present invention and the method of using the same can be applied to the improvement of the mortar in the multi-wire cutting machine of the semiconductor industry, and can also be applied to other industries which need to raise the high viscosity and high density fluid.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

Dispositif d'alimentation en mortier avec structure de régulation de pression, comportant un moteur (27) et une pompe. Une sortie d'un corps de pompe est reliée à un corps (31) de réservoir par des conduites (33) de liaison. Une sortie (37) de mortier et une structure mécanique de régulation automatique de la pression sont installées sur le corps (31) de réservoir. Un bord extérieur de l'orifice supérieur du corps (31) de réservoir est équipé d'une membrane élastique (30). Un manchon (22) à pression formant couvercle, destiné à protéger la membrane élastique (30), est placé sur la membrane élastique (30) et monté sur le corps (31) de réservoir. Le manchon (22) à pression formant couvercle est relié à des ressorts de rappel et à une structure de réglage. Un cylindre (10) de pompe comportant une chambre intérieure cylindrique est aménagé dans le corps de pompe. Un rotor (11) doté de rainures spirales est placé dans le cylindre (10) de pompe. Le dispositif améliore la continuité de l'alimentation en mortier d'un appareil de découpe multi-fils, réduit les oscillations, améliore la régularité de la pression et améliore ainsi la productivité et le rendement. Le dispositif est applicable pour élever le mortier dans l'appareil de découpe multi-fils dans l'industrie des semiconducteurs, et peut être appliqué dans d'autres secteurs où il est nécessaire de hisser des fluides de viscosité et de densité élevées.
PCT/CN2010/001802 2010-08-12 2010-11-10 Dispositif d'alimentation en mortier avec structure de régulation de pression WO2012019332A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1301165.5A GB2495666B (en) 2010-08-12 2010-11-10 Mortar supplying apparatus having a pressure adjusting mechanism

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201010251675.5A CN101934559B (zh) 2010-08-12 2010-08-12 具有压力调节机构的砂浆供给装置
CN201010251675.5 2010-08-12

Publications (1)

Publication Number Publication Date
WO2012019332A1 true WO2012019332A1 (fr) 2012-02-16

Family

ID=43388251

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2010/001802 WO2012019332A1 (fr) 2010-08-12 2010-11-10 Dispositif d'alimentation en mortier avec structure de régulation de pression

Country Status (3)

Country Link
CN (1) CN101934559B (fr)
GB (1) GB2495666B (fr)
WO (1) WO2012019332A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103252841B (zh) * 2013-04-22 2015-05-13 三一汽车制造有限公司 用于防止外加剂过量添加的装置及搅拌站
CN103991142B (zh) * 2014-05-22 2016-02-24 海润光伏科技股份有限公司 砂浆定量周转系统
CN105201185B (zh) * 2014-06-27 2017-08-29 李伟 一种脉冲恒流砂浆出浆工艺及其设备
CN107639756B (zh) * 2017-10-31 2023-07-28 河南省博宇新能源有限公司 开方机砂浆搅拌喷淋系统

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19516753A1 (de) * 1995-05-06 1996-11-07 Applitec Vertrieb Service Verfahren und Vorrichtung zum Anreichern von zu verspritzendem Putz oder Mörtel mit Druckluft
CN2378550Y (zh) * 1999-04-27 2000-05-17 周忠元 活塞式水泥砂浆泵
EP1065033A2 (fr) * 1999-07-02 2001-01-03 m-tec mathis technik gmbh Procédé et dispositif pour la préparation de matériaux liants , en particulier d'un mélange pour matériau de construction sec ou pulvérulent
JP2008081289A (ja) * 2006-09-28 2008-04-10 Sinto Brator Co Ltd 粉粒体供給用開閉弁
CN201089117Y (zh) * 2007-08-30 2008-07-23 宁波科宁达工业有限公司 多线切割机喷砂装置
CN201433869Y (zh) * 2009-06-16 2010-03-31 郑州知信机电科技开发有限公司 一种压力可控砂浆泵
CN201502514U (zh) * 2009-08-18 2010-06-09 赵大洋 一种气动隔膜泵的稳压装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6605597B1 (en) * 1999-12-03 2003-08-12 Cv Therapeutics, Inc. Partial or full A1agonists-N-6 heterocyclic 5′-thio substituted adenosine derivatives

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19516753A1 (de) * 1995-05-06 1996-11-07 Applitec Vertrieb Service Verfahren und Vorrichtung zum Anreichern von zu verspritzendem Putz oder Mörtel mit Druckluft
CN2378550Y (zh) * 1999-04-27 2000-05-17 周忠元 活塞式水泥砂浆泵
EP1065033A2 (fr) * 1999-07-02 2001-01-03 m-tec mathis technik gmbh Procédé et dispositif pour la préparation de matériaux liants , en particulier d'un mélange pour matériau de construction sec ou pulvérulent
JP2008081289A (ja) * 2006-09-28 2008-04-10 Sinto Brator Co Ltd 粉粒体供給用開閉弁
CN201089117Y (zh) * 2007-08-30 2008-07-23 宁波科宁达工业有限公司 多线切割机喷砂装置
CN201433869Y (zh) * 2009-06-16 2010-03-31 郑州知信机电科技开发有限公司 一种压力可控砂浆泵
CN201502514U (zh) * 2009-08-18 2010-06-09 赵大洋 一种气动隔膜泵的稳压装置

Also Published As

Publication number Publication date
GB2495666A (en) 2013-04-17
CN101934559B (zh) 2013-04-17
GB2495666B (en) 2016-02-03
CN101934559A (zh) 2011-01-05
GB201301165D0 (en) 2013-03-06

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