WO2012019332A1 - Mortar feeding device with pressure regulating structure - Google Patents

Mortar feeding device with pressure regulating structure Download PDF

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Publication number
WO2012019332A1
WO2012019332A1 PCT/CN2010/001802 CN2010001802W WO2012019332A1 WO 2012019332 A1 WO2012019332 A1 WO 2012019332A1 CN 2010001802 W CN2010001802 W CN 2010001802W WO 2012019332 A1 WO2012019332 A1 WO 2012019332A1
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WO
WIPO (PCT)
Prior art keywords
pressure
mortar
pump
tank body
adjusting mechanism
Prior art date
Application number
PCT/CN2010/001802
Other languages
French (fr)
Chinese (zh)
Inventor
种宝春
靳永吉
张为强
Original Assignee
中国电子科技集团公司第四十五研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 中国电子科技集团公司第四十五研究所 filed Critical 中国电子科技集团公司第四十五研究所
Priority to GB1301165.5A priority Critical patent/GB2495666B/en
Publication of WO2012019332A1 publication Critical patent/WO2012019332A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/005—Devices for the automatic drive or the program control of the machines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D3/00—Axial-flow pumps
    • F04D3/02—Axial-flow pumps of screw type

Definitions

  • the invention relates to the technical field of a device for spraying a slurry from a storage tank through a pipeline to a cutting steel wire during processing of a semiconductor crystal by using a multi-wire sawing machine from an ingot or an ingot.
  • the multi-wire sawing machine processes semiconductor ingots or ingots into wafers, it has high processing efficiency and high yield, so it is widely used.
  • the unevenness of the mortar flow is gradually exposed, and the unevenness of the mortar flow affects the further improvement of the yield.
  • the main causes of uneven flow are: Fluctuation and pressure changes during the mortar lift of the mortar pump. As the size of the semiconductor ingot or ingot increases, the value of the material itself increases, and the processing cost is reduced or the processing loss is reduced to reduce the economic loss, which has become an urgent problem to be solved.
  • the object of the present invention is to provide a mortar supply device with a pressure adjusting mechanism, which can improve the continuity, reduce the fluctuation, and improve the consistency of the pressure when the mortar used for cutting the multi-wire cutting machine is fed, thereby improving the consistency. Yield and efficiency;
  • the invention is particularly applicable to the improvement of mortar in multi-wire cutting machines in the semiconductor industry. It can also be applied to other industries that need to upgrade high viscosity, high density fluids.
  • the main technical solution of the device of the invention is: a mortar supply device with a pressure regulating mechanism, comprising a motor and a pump, characterized by having a mechanical pressure regulating mechanism, the structure thereof: the outlet of the pump body is connected through the connecting pipe and the tank body, The tank body is provided with a mortar outlet, and the tank body has a mechanical pressure automatic adjustment structure.
  • the mechanical pressure automatic adjustment structure may be: an elastic diaphragm is fixedly mounted on the outer edge of the upper body of the tank, and a cover type pressure sleeve for protecting the elastic diaphragm is arranged above the elastic diaphragm, and the cover type pressure sleeve is sleeved on the tank body, and the cover type The pressure sleeve is connected to the spring return and adjustment mechanism. It has good sealing performance and is very stable and reliable.
  • the mechanical pressure automatic adjustment structure can also be a piston type structure, etc., and the piston rod and the cover type pressure sleeve are twisted.
  • the cap type pressure gland preferably has an inwardly convex spherical crown surface, which is more advantageous for improving the durability and life of the elastic diaphragm and ensuring its normal operation.
  • a face having other shapes is also possible, but it is not as good as an inwardly convex spherical crown.
  • the cap press sleeve can have a long hole that avoids the slurry outlet when sliding axially.
  • the structure of the spring returning and adjusting mechanism may be: the cover type pressing sleeve has at least three guiding holes which are slidingly matched with the guiding columns fixed on the connecting plate of the can body, and the guiding holes are arranged at the lower part of the cover pressing sleeve On the orifice plate, a pressure spring is arranged on the guide post between the guide plate and the limit fixing plate on the guide post.
  • the structure of the spring returning and adjusting mechanism may also be a tension spring type structure or the like.
  • the can body is preferably cylindrical, the bottom is rounded, and the connecting tube is connected to the top of the round table. Its compact size and smoother flow.
  • the pump body has a pump barrel having a cylindrical inner cavity
  • the pump barrel having a cylindrical inner cavity is provided with a runner having a spiral groove auger structure.
  • the inner wheel of the runner having the spiral groove auger structure has a rectangular square, and the rectangular square is provided with a square hole which is matched with the rotating shaft, and the rotating shaft is provided with a rectangular square and a rotating structure having a spiral groove auger structure.
  • the limit structure of the wheel is provided.
  • the bearing body of the pump body is mounted with a bearing for positioning a fixed rotating shaft, and the bearing is respectively fixed by a gland and a bearing washer; the pump barrel having a cylindrical inner cavity is welded to the fixing seat.
  • the positive effect of the present invention is:
  • the present invention solves the problems that people in the prior art have been trying to solve but have not been solved.
  • the continuity of the mortar used for cutting the multi-wire cutting machine can be improved. Reducing volatility and increasing the consistency of pressure will help improve yield and efficiency.
  • the invention is particularly suitable for use in the improvement of mortar in multi-wire cutting machines in the semiconductor industry, and in other industries where high viscosity, high density fluids are required to be lifted.
  • the invention patent applies the spiral groove structure to the grinding wheel of the mortar pump lifting mortar, so that the mortar has continuity in the lifting process, reduces the fluctuation, and increases the device capable of expanding and contracting with the pressure change. Absorb the pressure fluctuations to make the pressure uniform and ensure uniform flow.
  • Figure 1 is a schematic view showing the structure of a preferred embodiment of the present invention.
  • Figure 2 is a plan view of Figure 1.
  • Figure 3 is a cross-sectional view taken along line AA of Figure 2;
  • Fig. 4 is a perspective view showing the structure of the runner 11 having the spiral groove auger structure of Fig. 1.
  • Figure 5 is a cross-sectional view taken along line B-B of the runner 11 of Figure 4;
  • Figure 6 is a cross-sectional view of the rectangular block 13 of Figure 1.
  • the mortar supply device with a pressure adjusting mechanism includes a motor 27 and a pump, and is characterized in that it has a mechanical pressure adjusting mechanism, and the structure thereof: the outlet of the pump body communicates with the tank body 31 through the connecting pipe 33,
  • the tank body 31 is provided with a mortar outlet 37 having a mechanical pressure automatic adjustment structure.
  • the mechanical pressure automatic adjustment structure is: an elastic diaphragm 30 is fastened to the outer edge of the upper surface of the can body 31, and a cover pressure sleeve 22 for protecting the elastic diaphragm 30 is disposed above the elastic diaphragm 30, and the cover pressure sleeve 22 is sleeved on the can body 31.
  • the cover sleeve 22 is connected to the spring return and adjustment mechanism.
  • the cap sleeve 22 has an inwardly convex spherical surface 35.
  • the structure of the spring returning and adjusting mechanism is: the cover type pressing sleeve 22 has a guiding hole which is at least engaged with the guide post 23 fixed on the connecting plate 32 of the can body 31, and the guiding hole is disposed at the lower part of the cover pressing sleeve 22.
  • a pressure spring 24 is disposed on the guide post 23 between the guide plate and the limit fixing plate 25 on the guide post 23.
  • the can body 31 has a cylindrical shape, and the bottom portion has a rounded table shape, and the connecting pipe 33 communicates with the top of the round table.
  • the cap sleeve 22 has a long hole 20 that avoids the slurry outlet when axially sliding.
  • the pump body has a pump barrel 10 having a cylindrical inner cavity, and a pump barrel 10 having a cylindrical groove in the inner cavity is provided with a runner 11 having a spiral groove auger structure.
  • a rectangular block 13 is mounted in the runner 11 having a spiral grooved auger structure, and a rectangular hole is formed in the rectangular block 13 to be coupled with the rotating shaft 12.
  • the rotating shaft 12 is provided with a rectangular block (13) and has a spiral groove auger structure.
  • the limit structure of the runner 11 A bearing for positioning the fixed shaft 12 is mounted in the fixing base 2 of the pump body.
  • the bearing 17 is fixed by the gland 5 and the bearing washers 7, 8 respectively; the pump barrel 10 having a cylindrical inner cavity is welded to the fixing base 2.
  • the frame plate 1 is fastened to the motor 27 by screws, the motor 27 is mounted with the coupling 4 and connected to the rotating shaft 12, and the frame plate 1 is fastened to the fixing base 2 via the bolt 3, and is fixed.
  • the fixing seat 2 is fastened to the bearing housing 6 via a screw 9, and the bearing 17 and the bearing washer 7 and the bearing washer 8 are mounted in the bearing housing 6 and are fixedly connected via the gland 5 and the screw 18.
  • the rotating shaft 12 is fastened to the bearing 17 via the lock nut 19, and the pump barrel 10 having a cylindrical inner cavity is welded to the fixing base 2, and the rectangular block 13 is tightly mounted in the rotating wheel 11, and the rotating shaft 12 passes the nut 11 and the rotating wheel 11 and the rectangular block.
  • the runner 11 is included in the pump barrel 10 whose inner cavity is cylindrical, and forms a cavity 15, and the connecting nozzle 16 is connected to the pump barrel 10 whose inner cavity is cylindrical and communicates with the cavity 15, the connecting pipe 33 Connected to the connecting nozzle 16 and the tapered can body 31, the tapered can body 31 is fastened to the frame plate 1 via the bolt 36 and the nut 21, and the guide post 23 is connected with the bolt 36, and the limiting fixing plate 25 is guided by the screw 26 and the guide.
  • the post 23 is fastened and the compression spring 24 is placed over the guide post 23 and positioned by the retaining plate 25.
  • the cover press sleeve 22 is bored and mounted on the guide post 23 by the lower end surface of the compression spring 24.
  • the elastic diaphragm 30 is fastened and press-fitted to the upper end surface of the tapered can body 31 by the annular pressing sleeve 29 and the screw 26.
  • the cover press sleeve 22 is pressed against the elastic diaphragm 30 by the compression spring 24 and its own weight, and the elastic diaphragm 30 is fastened to the conical tank body 31 via the annular pressure sleeve 28, and the elasticity is strong when the fluid pressure in the tank body is large.
  • the diaphragm 30 is subjected to pressure, deformably expands, and pushes the cover sleeve 22 upward.
  • the compression spring 24 is contracted to store energy by the force of the cover sleeve 22, and when the pressure in the chamber is lowered, the compression spring 24 releases energy.
  • the push cover presser 22 supplements the pressure of the fluid in the tapered can 31.
  • the structure of the present invention is described with specific representative embodiments shown in the drawings.
  • the structure and method of the present invention can effectively lift a mortar of a high viscosity, high density fluid such as a multi-wire cutter to maintain continuity and reduce volatility while ensuring pressure uniformity.
  • the mortar supply device having the pressure compensating structure of the present invention and the method of using the same can be applied to the improvement of the mortar in the multi-wire cutting machine of the semiconductor industry, and can also be applied to other industries which need to raise the high viscosity and high density fluid.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

A mortar feeding device with a pressure regulating structure includes a motor (27) and a pump. An outlet of a pump body is connected to a tank body (31) by connection pipes (33). A mortar outlet (37) and a mechanical pressure automatic regulating structure are provided on the tank body (31). An outer edge of the upper port of the tank body (31) is fastened with an elastic diaphragm (30). A lid type pressure sleeve (22) for protecting the elastic diaphragm (30) is provided on the elastic diaphragm (30), and is fitted on the tank body (31). The lid type pressure sleeve (22) is connected to return springs and an adjusting structure. A pump barrel (10) with a cylindrical inner chamber is provided in the pump body. A runner (11) with spiral grooves is provided in the pump barrel (10). The device improves the continuity of the mortar feeding for the multi-wire cutter, reduces oscillation, improves the pressure consistency, and thus improves yield and efficiency. The device is applicable to lift the mortar in the multi-wire cutter in semiconductor industry, and can be applied in other industries required to lift high viscosity and density fluid.

Description

说 明 书 具有压力调节机构的砂浆供给装置 技术领域  Description Mortar supply device with pressure regulating mechanism
本发明涉及半导体晶体加工过程中， 采用多线锯切割机由晶棒或晶 锭加工成晶片过程中， 将砂浆从储存罐提升经管路喷淋到切割钢线上的 装置技术领域。  The invention relates to the technical field of a device for spraying a slurry from a storage tank through a pipeline to a cutting steel wire during processing of a semiconductor crystal by using a multi-wire sawing machine from an ingot or an ingot.
背景技术 Background technique
由于多线锯切割机加工半导体晶棒或晶锭切割成晶片， 具有加工效 率较高， 成品率较高的特点， 所以得到了广泛使用。 然而， 砂浆流量的 不均匀性逐渐暴露出来， 砂浆流量的不均匀性影响着成品率的进一步提 高。 造成流量的不均匀的主要原因有： 砂浆泵的转轮提升砂浆过程中有 波动性和压力的变化。 随着半导体晶棒或晶锭尺寸的增大， 材料本身价 值的不断提高， 通过提高或保证加工成品率来降低加工成本， 减少经济 损失， 已成为一个急待解决的问题。  Since the multi-wire sawing machine processes semiconductor ingots or ingots into wafers, it has high processing efficiency and high yield, so it is widely used. However, the unevenness of the mortar flow is gradually exposed, and the unevenness of the mortar flow affects the further improvement of the yield. The main causes of uneven flow are: Fluctuation and pressure changes during the mortar lift of the mortar pump. As the size of the semiconductor ingot or ingot increases, the value of the material itself increases, and the processing cost is reduced or the processing loss is reduced to reduce the economic loss, which has become an urgent problem to be solved.
发明内容 Summary of the invention
本发明的目的是提供一种具有压力调节机构的砂浆供给装置， 用该 装置可以将多线切割机切割使用的砂浆供送时提高连续性、 降低波动性， 提高压力的一致性， 有利于提高成品率和效率； 本发明特别适用于半导 体行业的多线切割机中对砂浆的提升。 也可应用于其他的需要将高粘度、 高密度的流体提升的行业中。  The object of the present invention is to provide a mortar supply device with a pressure adjusting mechanism, which can improve the continuity, reduce the fluctuation, and improve the consistency of the pressure when the mortar used for cutting the multi-wire cutting machine is fed, thereby improving the consistency. Yield and efficiency; The invention is particularly applicable to the improvement of mortar in multi-wire cutting machines in the semiconductor industry. It can also be applied to other industries that need to upgrade high viscosity, high density fluids.
本发明装置的主要技术方案是： 一种具有压力调节机构的砂浆供给 装置， 包括电机、 泵， 其特征在于具有机械式压力调节机构， 其结构： 泵体的出口通过连管和罐体连通，罐体上设有砂浆出口， 罐体上具有机械 式压力自动调节结构。  The main technical solution of the device of the invention is: a mortar supply device with a pressure regulating mechanism, comprising a motor and a pump, characterized by having a mechanical pressure regulating mechanism, the structure thereof: the outlet of the pump body is connected through the connecting pipe and the tank body, The tank body is provided with a mortar outlet, and the tank body has a mechanical pressure automatic adjustment structure.
所述的机械式压力自动调节结构可为： 罐体上口外沿安装紧固有弹 性隔膜， 弹性隔膜的上方设有保护弹性隔膜的盖式压套， 盖式压套套在 罐体上， 盖式压套和弹簧复位及调整机构相连。 其密封性很好， 工作非 常稳定、 可靠。  The mechanical pressure automatic adjustment structure may be: an elastic diaphragm is fixedly mounted on the outer edge of the upper body of the tank, and a cover type pressure sleeve for protecting the elastic diaphragm is arranged above the elastic diaphragm, and the cover type pressure sleeve is sleeved on the tank body, and the cover type The pressure sleeve is connected to the spring return and adjustment mechanism. It has good sealing performance and is very stable and reliable.
所述的机械式压力自动调节结构也可活塞式结构等， 活塞杆和盖式 压套绞联。 所述的盖式压套具有向内凸的球冠面较佳， 更有利于提高弹性隔膜 的耐用性和寿命和保证其正常工作。 具有其他形状的面也可， 但不及向 内凸的球冠面为好。 The mechanical pressure automatic adjustment structure can also be a piston type structure, etc., and the piston rod and the cover type pressure sleeve are twisted. The cap type pressure gland preferably has an inwardly convex spherical crown surface, which is more advantageous for improving the durability and life of the elastic diaphragm and ensuring its normal operation. A face having other shapes is also possible, but it is not as good as an inwardly convex spherical crown.
所述的盖式压套可具有轴向滑动时避开浆出口的长条孔。  The cap press sleeve can have a long hole that avoids the slurry outlet when sliding axially.
所述的弹簧复位及调整机构的结构可以为： 盖式压套上具有至少 3 个与固定在罐体连接板上的导柱滑动配合的导孔， 导孔设在盖式压套下 部的导孔板上， 导柱上在导孔板和导柱上的限位固定板之间设有压力弹 簧。  The structure of the spring returning and adjusting mechanism may be: the cover type pressing sleeve has at least three guiding holes which are slidingly matched with the guiding columns fixed on the connecting plate of the can body, and the guiding holes are arranged at the lower part of the cover pressing sleeve On the orifice plate, a pressure spring is arranged on the guide post between the guide plate and the limit fixing plate on the guide post.
所述的弹簧复位及调整机构的结构也可以用拉力弹簧式结构等。 所述的罐体为圆筒状较好， 底部为倒圆台状， 连管和倒圆台的顶部 联通。 其体积紧凑、 浆流更顺畅。  The structure of the spring returning and adjusting mechanism may also be a tension spring type structure or the like. The can body is preferably cylindrical, the bottom is rounded, and the connecting tube is connected to the top of the round table. Its compact size and smoother flow.
所述的泵体最好具有内腔为圆柱形的泵桶， 内腔为圆柱形的泵桶中 设有具有螺旋槽绞龙式结构的转轮。  Preferably, the pump body has a pump barrel having a cylindrical inner cavity, and the pump barrel having a cylindrical inner cavity is provided with a runner having a spiral groove auger structure.
所述的具有螺旋槽绞龙式结构的转轮内安装最好具有有矩形方块， 矩形方块内设有与转轴配合连接的方形孔， 转轴设有矩形方块及具有螺 旋槽绞龙式结构的转轮的限位结构。  Preferably, the inner wheel of the runner having the spiral groove auger structure has a rectangular square, and the rectangular square is provided with a square hole which is matched with the rotating shaft, and the rotating shaft is provided with a rectangular square and a rotating structure having a spiral groove auger structure. The limit structure of the wheel.
所述的泵体的固定座内安装有用于定位固定转轴的轴承， 轴承分别 由压盖、 轴承垫圈固定； 内腔为圆柱形的泵桶与固定座焊接。  The bearing body of the pump body is mounted with a bearing for positioning a fixed rotating shaft, and the bearing is respectively fixed by a gland and a bearing washer; the pump barrel having a cylindrical inner cavity is welded to the fixing seat.
本发明的积极效果是： 本发明解决了现有技术中一直存在的人们想 解决而又一直未能解决的问题； 利用该装置， 可以将多线切割机切割使 用的砂浆供送时提高连续性、 降低波动性， 提高压力的一致性， 有利于 提高成品率和效率。 本发明特别适用于半导体行业的多线切割机中对砂 浆的提升， 也可应用于其他需要将高粘度、 高密度的流体提升的行业中。  The positive effect of the present invention is: The present invention solves the problems that people in the prior art have been trying to solve but have not been solved. With this device, the continuity of the mortar used for cutting the multi-wire cutting machine can be improved. Reducing volatility and increasing the consistency of pressure will help improve yield and efficiency. The invention is particularly suitable for use in the improvement of mortar in multi-wire cutting machines in the semiconductor industry, and in other industries where high viscosity, high density fluids are required to be lifted.
本发明专利将螺旋槽结构应用到砂浆泵提升砂浆的转轮上， 使砂浆 在提升过程中具有连续性， 减小波动性， 同时增加了具有随着压力变化 而体积能够膨胀和收缩的装置来吸收压力的波动， 使压力均匀， 保证流 量均匀。  The invention patent applies the spiral groove structure to the grinding wheel of the mortar pump lifting mortar, so that the mortar has continuity in the lifting process, reduces the fluctuation, and increases the device capable of expanding and contracting with the pressure change. Absorb the pressure fluctuations to make the pressure uniform and ensure uniform flow.
以下结合一个较好的实施例及其附图作详述， 但本实施例不能作为 对本发明的限定。  The following is a detailed description of a preferred embodiment and the accompanying drawings, but this embodiment is not to be construed as limiting the invention.
附图说明 DRAWINGS
图 1为本发明一个较好的实施例的结构示意图。  BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing the structure of a preferred embodiment of the present invention.
图 2为图 1的俯视图。 图 3为图 2中的 A-A旋转剖视图。 Figure 2 is a plan view of Figure 1. Figure 3 is a cross-sectional view taken along line AA of Figure 2;
图 4为图 1中具有螺旋槽绞龙式结构的转轮 11的立体结构示意图。 图 5为图 4中转轮 11的 B-B剖面图。  Fig. 4 is a perspective view showing the structure of the runner 11 having the spiral groove auger structure of Fig. 1. Figure 5 is a cross-sectional view taken along line B-B of the runner 11 of Figure 4;
图 6为图 1中矩形方块 13的剖面图。  Figure 6 is a cross-sectional view of the rectangular block 13 of Figure 1.
图中标号说明 :1-机架板， 2-固定座， 3-螺栓， 4-联轴器， 5-压盖, 6-轴 承座， 7、 8-轴承垫圈， 9-螺钉， 10-内腔为圆柱形的泵桶， 11-具有螺旋槽 绞龙式结构的转轮， 12-转轴， 13-矩形方块， 14-螺母， 15-腔体， 16-连接 嘴， 17-轴承， 18-螺钉， 19-锁母， 20-长条孔， 21-螺母， 22-盖式压套， 23-导柱， 24-压力弹簧， 25-限位固定板， 26-螺钉， 27-电机， 28-螺钉， 29-环形压套， 30-弹性隔膜， 31-罐体， 32-连接板， 33-连管， 34螺旋槽， 35-向内凸的球冠面， 36-螺栓， 37-砂浆出口。  Numbers in the figure: 1-frame plate, 2-mount, 3-bolt, 4-coupling, 5-cap, 6-bearing, 7, 8-bearing washer, 9-screw, 10-in Pump barrel with cylindrical cavity, 11-rotor with spiral groove auger structure, 12-turn shaft, 13-square block, 14-nut, 15-cavity, 16-connector, 17-bearing, 18- Screw, 19-lock female, 20-long hole, 21-nut, 22-cap compression sleeve, 23-column, 24-pressure spring, 25-position fixing plate, 26-screw, 27-motor, 28 -screw, 29-annular compression sleeve, 30-elastic diaphragm, 31-can body, 32-joint plate, 33-joint, 34-spiral groove, 35-inwardly convex spherical crown, 36-bolt, 37-mortar Export.
具体实施方式 Detailed ways
参见图 1〜图 5，该具有压力调节机构的砂浆供给装置，包括电机 27、 泵， 其特征在于具有机械式压力调节机构， 其结构： 泵体的出口通过连 管 33和罐体 31连通， 罐体 31上设有砂浆出口 37, 浆罐上具有机械式压 力自动调节结构。 机械式压力自动调节结构为： 罐体 31上口外沿安装紧 固有弹性隔膜 30， 弹性隔膜 30的上方设有保护弹性隔膜 30的盖式压套 22， 盖式压套 22套在罐体 31上， 盖式压套 22和弹簧复位及调整机构相 连。盖式压套 22具有向内凸的球冠面 35。弹簧复位及调整机构的结构为： 盖式压套 22上具有至少和 3个固定在罐体 31连接板 32上的导柱 23滑 动配合的导孔， 导孔设在盖式压套 22下部的导孔板上， 导柱 23上在导 孔板和导柱 23上的限位固定板 25之间设有压力弹簧 24。罐体 31为圆筒 状， 底部为倒圆台状， 连管 33和倒圆台的顶部联通。 盖式压套 22具有 轴向滑动时避开浆出口的长条孔 20。 所述的泵体具有内腔为圆柱形的泵 桶 10， 内腔为圆柱形的泵桶 10中设有具有螺旋槽绞龙式结构的转轮 11。 具有螺旋槽绞龙式结构的转轮 11内安装有矩形方块 13， 矩形方块 13内 设有与转轴 12配合连接的方形孔， 转轴 12设有矩形方块 （13 ) 及具有 螺旋槽绞龙式结构的转轮 11的限位结构。 泵体的固定座 2内安装有用于 定位固定转轴 12的轴承 17，轴承 17分别由压盖 5、轴承垫圈 7、 8固定； 内腔为圆柱形的泵桶 10与固定座 2焊接。  Referring to FIG. 1 to FIG. 5, the mortar supply device with a pressure adjusting mechanism includes a motor 27 and a pump, and is characterized in that it has a mechanical pressure adjusting mechanism, and the structure thereof: the outlet of the pump body communicates with the tank body 31 through the connecting pipe 33, The tank body 31 is provided with a mortar outlet 37 having a mechanical pressure automatic adjustment structure. The mechanical pressure automatic adjustment structure is: an elastic diaphragm 30 is fastened to the outer edge of the upper surface of the can body 31, and a cover pressure sleeve 22 for protecting the elastic diaphragm 30 is disposed above the elastic diaphragm 30, and the cover pressure sleeve 22 is sleeved on the can body 31. Upper, the cover sleeve 22 is connected to the spring return and adjustment mechanism. The cap sleeve 22 has an inwardly convex spherical surface 35. The structure of the spring returning and adjusting mechanism is: the cover type pressing sleeve 22 has a guiding hole which is at least engaged with the guide post 23 fixed on the connecting plate 32 of the can body 31, and the guiding hole is disposed at the lower part of the cover pressing sleeve 22. On the guide plate, a pressure spring 24 is disposed on the guide post 23 between the guide plate and the limit fixing plate 25 on the guide post 23. The can body 31 has a cylindrical shape, and the bottom portion has a rounded table shape, and the connecting pipe 33 communicates with the top of the round table. The cap sleeve 22 has a long hole 20 that avoids the slurry outlet when axially sliding. The pump body has a pump barrel 10 having a cylindrical inner cavity, and a pump barrel 10 having a cylindrical groove in the inner cavity is provided with a runner 11 having a spiral groove auger structure. A rectangular block 13 is mounted in the runner 11 having a spiral grooved auger structure, and a rectangular hole is formed in the rectangular block 13 to be coupled with the rotating shaft 12. The rotating shaft 12 is provided with a rectangular block (13) and has a spiral groove auger structure. The limit structure of the runner 11 . A bearing for positioning the fixed shaft 12 is mounted in the fixing base 2 of the pump body. The bearing 17 is fixed by the gland 5 and the bearing washers 7, 8 respectively; the pump barrel 10 having a cylindrical inner cavity is welded to the fixing base 2.
其他结构说明如下： 机架板 1通过螺钉紧固安装电机 27， 电机 27 安装联轴器 4与转轴 12连接， 机架板 1经螺栓 3紧固连接固定座 2， 固 定座 2内经螺钉 9紧固连接轴承座 6， 轴承座 6内安装了轴承 17和轴承 垫圈 7和轴承垫圈 8并经压盖 5和螺钉 18固定连接。 转轴 12经锁母 19 与轴承 17紧固连接， 内腔为圆柱形的泵桶 10与固定座 2焊接， 转轮 11 内紧密安装矩形块 13， 转轴 12经螺母 14将转轮 11和矩形块 13安装成 一体， 转轮 11被内腔为圆柱形的泵桶 10包含， 并形成腔体 15， 连接嘴 16与内腔为圆柱形的泵桶 10连接并与腔体 15相通， 连管 33与连接嘴 16和锥形罐体 31连接， 锥形罐体 31经螺栓 36和螺母 21与机架板 1紧 固连接， 导柱 23与螺栓 36连接， 限位固定板 25经螺钉 26与导柱 23紧 固连接， 压簧 24套在导柱 23上， 由固定板 25定位。 盖式压套 22有孔 安装在导柱 23由压簧 24下端面推压。 由环形压套 29及螺钉 26将弹性 隔膜 30紧固压装于锥形罐体 31上端面。 盖式压套 22在压簧 24及自重 作用下， 压在弹性隔膜 30上， 弹性隔膜 30经环形压套 28紧固连接在锥 形罐体 31上， 当罐体内的流体压力大时， 弹性隔膜 30受到压力作用， 可变形膨胀， 推动盖式压套 22向上移动， 压簧 24受到盖式压套 22的作 用力而收缩存储能量， 当腔体内的压力降低时， 压簧 24释放能量， 推压 盖式压套 22补充锥形罐体 31内流体的压力。 The other structure is explained as follows: The frame plate 1 is fastened to the motor 27 by screws, the motor 27 is mounted with the coupling 4 and connected to the rotating shaft 12, and the frame plate 1 is fastened to the fixing base 2 via the bolt 3, and is fixed. The fixing seat 2 is fastened to the bearing housing 6 via a screw 9, and the bearing 17 and the bearing washer 7 and the bearing washer 8 are mounted in the bearing housing 6 and are fixedly connected via the gland 5 and the screw 18. The rotating shaft 12 is fastened to the bearing 17 via the lock nut 19, and the pump barrel 10 having a cylindrical inner cavity is welded to the fixing base 2, and the rectangular block 13 is tightly mounted in the rotating wheel 11, and the rotating shaft 12 passes the nut 11 and the rotating wheel 11 and the rectangular block. 13 is integrally assembled, and the runner 11 is included in the pump barrel 10 whose inner cavity is cylindrical, and forms a cavity 15, and the connecting nozzle 16 is connected to the pump barrel 10 whose inner cavity is cylindrical and communicates with the cavity 15, the connecting pipe 33 Connected to the connecting nozzle 16 and the tapered can body 31, the tapered can body 31 is fastened to the frame plate 1 via the bolt 36 and the nut 21, and the guide post 23 is connected with the bolt 36, and the limiting fixing plate 25 is guided by the screw 26 and the guide. The post 23 is fastened and the compression spring 24 is placed over the guide post 23 and positioned by the retaining plate 25. The cover press sleeve 22 is bored and mounted on the guide post 23 by the lower end surface of the compression spring 24. The elastic diaphragm 30 is fastened and press-fitted to the upper end surface of the tapered can body 31 by the annular pressing sleeve 29 and the screw 26. The cover press sleeve 22 is pressed against the elastic diaphragm 30 by the compression spring 24 and its own weight, and the elastic diaphragm 30 is fastened to the conical tank body 31 via the annular pressure sleeve 28, and the elasticity is strong when the fluid pressure in the tank body is large. The diaphragm 30 is subjected to pressure, deformably expands, and pushes the cover sleeve 22 upward. The compression spring 24 is contracted to store energy by the force of the cover sleeve 22, and when the pressure in the chamber is lowered, the compression spring 24 releases energy. The push cover presser 22 supplements the pressure of the fluid in the tapered can 31.
附图中显示的具有特定代表性实施例描述本发明的结构。 本发明的 结构和方法能够有效的将高粘度、 高密度的流体如多线切割机切割使用 的砂浆进行提升并且保持连续性、 降低波动性， 同时保证压力的一致性。 本发明的具有压力补偿结构的砂浆供给装置及其使用方法能够应用到半 导体行业的多线切割机中对砂浆的提升同时也可应用到其他的需要将高 粘度、 高密度的流体提升的行业。  The structure of the present invention is described with specific representative embodiments shown in the drawings. The structure and method of the present invention can effectively lift a mortar of a high viscosity, high density fluid such as a multi-wire cutter to maintain continuity and reduce volatility while ensuring pressure uniformity. The mortar supply device having the pressure compensating structure of the present invention and the method of using the same can be applied to the improvement of the mortar in the multi-wire cutting machine of the semiconductor industry, and can also be applied to other industries which need to raise the high viscosity and high density fluid.
以上所述仅为本发明的较佳实施例而已， 并不用以限制本发明， 凡 在本发明的精神和原则之内所作的任何修改、 等同替换改进等， 均应包 含在本发明的保护范围之内。  The above is only the preferred embodiment of the present invention, and is not intended to limit the present invention. Any modifications, equivalent alterations, and the like made within the spirit and principles of the present invention should be included in the scope of the present invention. within.

Claims

权 利 要 求 书 Claim
1、 一种具有压力调节机构的砂浆供给装置， 包括电机 （27) 、 泵， 其特征在于具有机械式压力调节机构，其结构：泵体的出口通过连管（33) 和罐体 （31) 连通， 罐体 （31) 上设有砂浆出口 （37) ， 罐体 （31) 上 具有机械式压力自动调节结构。 A mortar supply device having a pressure regulating mechanism, comprising a motor (27) and a pump, characterized by having a mechanical pressure regulating mechanism, the structure of which: the outlet of the pump body passes through the connecting pipe (33) and the tank body (31) Connected, the tank body (31) is provided with a mortar outlet (37), and the tank body (31) has a mechanical pressure automatic adjustment structure.
2、 根据权利要求 1所述的具有压力补偿结构的砂浆供给装置， 其特 征在于所述的机械式压力自动调节结构为： 罐体 （31) 上口外沿安装紧 固有弹性隔膜 （30) ， 弹性隔膜 （30) 的上方设有保护弹性隔膜 （30) 的盖式压套 （22) ， 盖式压套 （22) 套在罐体 （31) 上， 盖式压套 （22) 和弹簧复位及调整机构相连。  2. The mortar supply device with pressure compensation structure according to claim 1, wherein the mechanical pressure automatic adjustment structure is: the outer casing of the tank body (31) is fastened with an elastic diaphragm (30). Above the elastic diaphragm (30) is a cover press sleeve (22) for protecting the elastic diaphragm (30), the cover press sleeve (22) is sleeved on the tank body (31), the cover press sleeve (22) and the spring return Connected to the adjustment mechanism.
3、 根据权利要求 2所述的具有压力调节机构的砂浆供给装置， 其特 征在于所述的盖式压套 （22) 具有向内凸的球冠面 （35) 。  A mortar supply apparatus having a pressure adjusting mechanism according to claim 2, wherein said cover press (22) has an inwardly convex spherical surface (35).
4、 根据权利要求 2所述的具有压力调节机构的砂浆供给装置， 其特 征在于所述的盖式压套（22)具有轴向滑动时避开浆出口的长条孔（20)。  A mortar supply apparatus having a pressure adjusting mechanism according to claim 2, wherein said cover type pressure jacket (22) has a long hole (20) which avoids the slurry outlet when axially sliding.
5、 根据权利要求 2所述的具有压力调节机构的砂浆供给装置， 其特 征在于所述的弹簧复位及调整机构的结构为： 盖式压套 （22) 上具有至 少和 3个固定在罐体 （31) 连接板 （32) 上的导柱 （23) 滑动配合的导 孔， 导孔设在盖式压套 （22) 下部的导孔板上， 导柱 （23) 上在导孔板 和导柱 （23) 上的限位固定板 （25) 之间设有压力弹簧 （24) 。  5. The mortar supply device with a pressure adjusting mechanism according to claim 2, wherein the spring returning and adjusting mechanism has the following structure: the cover press sleeve (22) has at least three fixed to the can body. (31) Guide post (23) on the connecting plate (32) Slidingly fitted through hole, the guide hole is set on the guide plate at the lower part of the cover press (22), the guide post (23) is on the guide plate and A pressure spring (24) is arranged between the limit fixing plates (25) on the guide post (23).
6、 根据权利要求 2所述的具有压力调节机构的砂浆供给装置， 其特 征在于所述的罐体 （31) 为圆筒状， 底部为倒圆台状， 连管 （33) 和倒 圆台的顶部联通。  6. A mortar supply apparatus having a pressure adjusting mechanism according to claim 2, wherein said can body (31) is cylindrical, the bottom is rounded, and the connecting pipe (33) and the top of the round table are provided. Unicom.
7、 根据权利要求 1、 2、 3、 4、 5或 6所述的具有压力调节机构的砂 浆供给装置， 其特征在于所述的泵体具有内腔为圆柱形的泵桶 （10) ， 内腔为圆柱形的泵桶 （10) 中设有具有螺旋槽绞龙式结构的转轮 （11) 。  7. A mortar supply apparatus having a pressure adjusting mechanism according to claim 1, 2, 3, 4, 5 or 6, wherein said pump body has a pump barrel (10) having a cylindrical inner cavity, The pump barrel (10) having a cylindrical cavity is provided with a runner (11) having a spiral groove auger structure.
8、 根据权利要 7所述的具有压力调节机构的砂浆供给装置， 其特征 在于所述的具有螺旋槽绞龙式结构的转轮（11)内安装有矩形方块（13)， 矩形方块 （13) 内设有与转轴 （12) 配合连接的方形孔， 转轴 （12) 设 有矩形方块 （13) 及具有螺旋槽绞龙式结构的转轮 （11) 的限位结构。  8. The mortar supply device with a pressure adjusting mechanism according to claim 7, characterized in that the rotary wheel (11) having a spiral groove auger structure is provided with rectangular squares (13), rectangular squares (13) ) There is a square hole that is connected with the rotating shaft (12). The rotating shaft (12) is provided with a rectangular block (13) and a limiting structure of a rotating wheel (11) having a spiral groove auger structure.
9、 根据权利要求 7所述的具有压力调节机构的砂浆供给装置， 其特 征在于所述的泵体的固定座 （2) 内安装有用于定位固定转轴 （12) 的轴 承 （17) ， 轴承 （17) 分别由压盖 （5 ) 、 轴承垫圈 （7、 8) 固定； 内腔 为圆柱形的泵桶 （10) 与固定座 （2) 焊接。 9. The mortar supply device with a pressure adjusting mechanism according to claim 7, wherein a shaft for positioning the fixed rotating shaft (12) is mounted in the fixing seat (2) of the pump body. The bearing (17) and the bearing (17) are respectively fixed by the gland (5) and the bearing washers (7, 8); the pump barrel (10) whose inner cavity is cylindrical is welded with the fixing seat (2).
PCT/CN2010/001802 2010-08-12 2010-11-10 Mortar feeding device with pressure regulating structure WO2012019332A1 (en)

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