GB2495666A - Mortar feeding device with pressure regulating structure - Google Patents

Mortar feeding device with pressure regulating structure Download PDF

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Publication number
GB2495666A
GB2495666A GB1301165.5A GB201301165A GB2495666A GB 2495666 A GB2495666 A GB 2495666A GB 201301165 A GB201301165 A GB 201301165A GB 2495666 A GB2495666 A GB 2495666A
Authority
GB
United Kingdom
Prior art keywords
text
adjusting mechanism
mortar
pressure adjusting
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB1301165.5A
Other versions
GB201301165D0 (en
GB2495666B (en
Inventor
Baochun Chong
Yongji Jin
Weiqiang Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Semiconductor Equipment Institute
Original Assignee
Beijing Semiconductor Equipment Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Semiconductor Equipment Institute filed Critical Beijing Semiconductor Equipment Institute
Publication of GB201301165D0 publication Critical patent/GB201301165D0/en
Publication of GB2495666A publication Critical patent/GB2495666A/en
Application granted granted Critical
Publication of GB2495666B publication Critical patent/GB2495666B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D3/00Axial-flow pumps
    • F04D3/02Axial-flow pumps of screw type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00Accessories specially adapted for use with machines or devices of the preceding groups
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/005Devices for the automatic drive or the program control of the machines

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

A mortar feeding device with a pressure regulating structure includes a motor (27) and a pump. An outlet of a pump body is connected to a tank body (31) by connection pipes (33). A mortar outlet (37) and a mechanical pressure automatic regulating structure are provided on the tank body (31). An outer edge of the upper port of the tank body (31) is fastened with an elastic diaphragm (30). A lid type pressure sleeve (22) for protecting the elastic diaphragm (30) is provided on the elastic diaphragm (30), and is fitted on the tank body (31). The lid type pressure sleeve (22) is connected to return springs and an adjusting structure. A pump barrel (10) with a cylindrical inner chamber is provided in the pump body. A runner (11) with spiral grooves is provided in the pump barrel (10). The device improves the continuity of the mortar feeding for the multi-wire cutter, reduces oscillation, improves the pressure consistency, and thus improves yield and efficiency. The device is applicable to lift the mortar in the multi-wire cutter in semiconductor industry, and can be applied in other industries required to lift high viscosity and density fluid.

Description

I
Mortar Supplying Apparatus Having a Pressure Adjusting Mechanism
FIELD OF INVENTION
The present invention relates to the technical field of the apparatus for lifting mortar from storage tank to spray on cutting steel wires through pipelines during the process of machining crystal bars or crystal ingots into wafers by using multi-wire sawing cutting nuchines in the process of machining semiconductor crystals.
BACKGROUND OF INVENTION
Multi-wire sawing cutting machines are widely used to cut semiconductor cr stal bars or crystal ingots into wafers because of the higher machining efficiency and higher rate of finished products. However, the inhomogeneity of mortar flOw rate emerges gradually which affects further increase of rate of finished products. The main reasons for the inhomogeneity of the flow rate are: fluctuations and pressure changes occurred in the process of lifting mortar by a runner of a mortar pump. With the increase of the sizes of semiconductor crystal bars or crystal ingots and the values of materials per se, it has become a pressing problem to decrease machining costs and reduce economic losses by increasing or ensuring the rate of finished products.
SUMMARY OF INVENTION
The object for the present inventon is to provide a mortar supplying apparatus having a pressure adjusting mechanism. The apparatus may he used to improve continuity, reduce fluctuations, and improve the consistency of the pressure of the providing of mortar used during cutting of multi-wire cutting machines, and the apparatus pro'ided may facilitate the improvements of the rate of finished products and the efficiency. The preitr invention is particular suitable for lifting mortar by multi-wire cutting machines in the semiconductor industry, and may also he used in other industries which need to lift fluids with high viscosity and high density.
The principal technical solution of the present invention is: a mortar supplying apparatus having a pressure adjusting mechanism, comprising a motor, a pump, characterized by that the apparatus is provided with a mechanical pressure adjusting mechanism, of which the structure is: a pump exit is communicated with a tank through a tube, a mortar exit is disposed on the tank, the tank is provided with a mechanical automatic pressure adjusting mechanism.
The structure of said mechanical automatic pressure adjusting mechanism may be: that an elastic diaphragm is fastened along the outer edge of the top of the tank, a cover type pressing sleeve for protecting the elastic diaphragm is disposed ahove the elastic diaphragm, the cover type pressing sleeve is sleeved on the tank, the cover type pressing sleeve is connected to a spring returning and adjusting mechanism. The mechanism provided has good tightness and it The structure of said mechanical pressure automatic adjusting mechanism may also he a piston-type structure etc., in which a cylinder rod is hinged to the cover type pressing sleeve.
Said cover type pressing sleeve is preferred to be provided with an inward spherical crown surface, which further facilitates the improvements of the durability and life of the elastic diaphragm and ensures its normal work. The surface may also he of other shapes, hut the shape of inward spherical crown surface is preferred.
Said cover type pressing sleeve may have a longitudinal hole avoiding the mortar exit during axial slides.
The structure of said spring returning and adjusting mechanism may be: that at least three guide holes slidahly fit with guide poles fixed on a junction plate of the tank are provided on the cover type pressing sleeve, the guide holes are disposed on the guide plate positioned in the lower pt of the cover type pressing sleeve, a pressure spring is disposed on the guide pole, betrveen the guide plate and a stopping fixed plate of the guide pole.
The structure of said spring returning and adjusting mechanism may also be a tension spring structure.
Said tank is preferred to be cylindrical and its bottom is of the shape of an inverted truncated cone, a tube is communicated with die top of the inverted truncated cone. The tank is compact in volume so that the mortar flow is smoother.
Said pump is preferred to be provided with a working barrel having a cylindrical inner cavity, arid a runner with a spiral groove auger structure is disposed in the working barrel having a cylindrical inner cavity.
A rectangular box is preferred to he installed inside said runner with a spiral groove auger structure, a square hole fittingly connectable the shaft is disposed in the rectangular hox, the shaft is pro\TkIetI with a stopping structure of the rectangular hox and the runner with a spiral groove auger structure.
A bearing used for positioning and fixing the shaft is installed in a holder of said pump, the bearing is fixed by a gland and bearing washers respectively; the working barrel having a cylindrical inner cavity is welded to the holder.
The positive effects of the present invention are as follows: the problems existing in the prior art that people have been unable to solve are solved by the present invention; using this apparatus may improve the continuity, reduce the fluctuations, and improve the consistency of the pressure during providing mortar used for the cutting of multi-wire cutting machines, the apparatus facilitate the enhancement of the rate of finished products and the efficiency. The present invention is particular suitable for lifting mortar by multi-wire cutting machines in the semiconductor industry, and may also he used in other industries which need to lift fluids with high viscosity and high density.
The present invention applies the spiral groove structure to the runner for lifting mortar of the mortar pump, so as to allow the improvement of continuity and the reduction of fluctuations during mortar lifting. In the meantime, the present invention adds a device of which the volume may inflate and deflate along with the changes of pressures so as to absorb the fluctuations of pressures, ensure uniform pressure and uniform flow rate.
The present invention is explained in detail by reference to a preferred embodiment taken Wtth the accompanying drawtngs, and such an embodiment is not a limitation of the present invention.
BRIEF DESCRIPTION OF DRAWINGS
Figure 1 is a structural schematic diagram of a preferred embodiment of the present invention.
Figure 2 is a top view of Figure 1.
Figure 3 is a revolved sectional view of Figure 2 taken along line A-A.
Figure 4 is a stereo structure schematic diagram of the runner 11 with a spiral groove auger structure of Figure 1.
Figure 5 is a sectional view of the runner t I of Figure 4 taken along line B-B.
Figure 6 is a sectional view of the rectangular box 13 of Figure 1.
Description of numerals in the figures: 1-machine frame plate, 2-holder, 3-bolt, 4-shaft joint, 5-gland, 6-hearing seat, 7, B-bearing washers, 9-screw, 10-working barrel having cylindrical inner cavIty, 11-runner with a spiral groove auger structure, 12-shaft, 13-rectangular box, 14-nut, 15-cavity, 16-connector, 17-hearing, 13-screw, 19-locknut, 20-longitudinal hole, 21-nut, 22-cover type pressing sleeve, 23-guide pole, 24-pressure spring, 25-stopping fixed plate, 26-screw, 27-motor, 28-screw, 29-annular pressing sleeve, 30-elastic diaphragm, 31-tank, 32-junction plate, 33-tube, 34-sprial groove, 35-inward spherical crown surface, 36-bolt, 37-mortar exit.
DETAILED DESCRIPTION
Referring to Figure 1 to Figure 5, the mortar supplying apparatus having a pressure adjusting mechanism, comprises a motor 27, a pump, wherein the apparatus is provided with a mechanical pressure adjusting mechanism, of which the structure is: a pump exit is communicated with a tank 31 through a tube 33, a mortar exit 37 is disposed on the tank 31, the mortar tank is provided with a mechanical automatic pressure adjusting mechanism. The mechanical automatic pressure adjusting mechanism comprises: an elastic diaphragm 30 is fastened along the outer edge of top of tank 31, a cover type pressing sleeve 22 for protecting the elastic diaphragm 30 is disposed above the elastic diaphragm 30, the cover type pressing sleeve 22 is sleeved on the tank 31, the cover type pressing sleeve 22 is connected to a spring returning and adjusting mechanism. The cover type pressing sleeve 22 is provided with an inward spherical crown surface 35. The structure of the spring returning and adjusting mechanism is that: guide holes slidably fit with at least three guide poles 23 fixed on a junction plate 32 of the tank 31 are disposed on the cover type pressing sleeve 22, the guide holes are disposed on the guide plate located at lower part of the cover type pressing sleeve 22, a pressure spring 24 is disposed on the guide pole 23 between the guide plate and a stopping fixed plate 25 of the guide pole 23. The tank 31 is cylindrical and its bottom is of the shape of an inverted truncated cone, a tube 33 is communicated with the top of the inverted truncated cone. A longitudinal hole 20 avoiding the mortar exit 37 during axial slides is disposed on the cover type pressing sleeve 22. Said pump has *a working barrel with a cylindrical inner cavity 10, and a runner with a spiral groove auger structure 1! is disposed in the working barrel having cylindrical inner cavity 10. A rectangular box 13 is installed in the runner \vith a spiral groove auger structure 11, a square hole fittingly connectable to a shaft 12 is disposed in the rectangular box 13, the shaft 12 is provided with a stopping structure for the rectangular box 13 and runner with a spiral groove auger structure 11. A bearing 17 for positioning and fixing the shaft 12 is installed in a holder 2 of the pump, a hearing 17 is fixed by a gland S and bearing washers 7, 8 respectively; the working harrel having cylindrical inner cavity tO is welded to the holder 2.
Other structure is explained as follows: a machine frame plate I is fastened to the motor 27 by screws, the motor 27 installed with a shaft joint 4 is connected to the shaft 12, the machine frame plate I is fastened to the holder 2 through bolt 3, in the holder 2 a bearing seat 6 is fastened through screw, the hearing 17 and the bearing washers 7, 8 are installed in a bearing seat 6 that are fixedly connected by the gland 5 and screw 18. The shaft 12 is connected with the bearing 17 through locknut 19, the working barrel having cylindrical inner cavity f 0 is welded to the holder 2, in the runner Ii the rectangular box 13 is fittingly installed, the runner It and the rectangular box 13 are integrally installed through nut 14 by the shaft 12, the runner 11 is contained in the working barrel having cylindrical inner cavity 10 to form a cavity 15, a connector 16 is connected to the working barrel having cylindrical inner cavity 10 and commurucated with cavity 15, the tuhe 33 is connected to the connector 16 and the tapered tank 31, the tank 31 is fastened to the machine frame plate 1 through bolt 36 and nut 21, the guide pole 23 is connected to bolt 36, a stopping fixed plate 25 is fastened to the guide pole 23 through screw 26, the pressure spring 24 is sleeved with the guide pole 23 and are positioned by the stopping fixed plate 25. The cover type pressing sleeve 22 with holes is installed on the guide pole 23 and is pressed by the surface of the lower end of the pressure spring 24. The elastic diaphragm 30 is tixedly pressed to the surface of upper end of a tapered tank 31 hy an annular pressing sleeve 29 and screw 26. The cover type pressing sleeve 22 is pressed on elastic diaphragm 30 by the guide pole 24 and its deadweight, the elastic diaphragm 30 is fastened to the tapered tank 31 tbrough screxv 28, the elastic diaphragm 30 may he inflated under pressures when the fluid pressure xvithin the tank is high, so as to push the cover type pressing sleeve 22 to move upward, the pressure spring 24 forced by the cover type pressing sleeve 22 is contracted to store energy, the pressure spring 24 release the energy to push the cover type pressing sleeve 22 and complement the fluid pressure within the tank 31 when the pressure within the cavi is reduced.
The specific representative embodiments shown in the figures describe the structures of the presetit invention. The structures and methods of this invention may effectively lift fluids with high viscosity and high density, such as mortar used for the cuttings of multi-wire cutting machines, and they maintain the continuity, reduce the fluctuations, and ensure the consistency of the pressure. The mortar supplying apparatus having a pressure compensating mechanism and the method thereof of the piesent invention may he applied in lifting mortar by mull-wire cutting machines in the semiconductor industry, and a'so may be used in other industries which need lifting fluids with high viscosity and high density.
Above are just preferred embodiments of the present invention, the present invention is not limited to such embodiments, and any modifications, ecjually effective replacements and improvements made within the spirits and principles of the present invention are intended to he included within the protection scope of the present invention.

Claims (1)

  1. <claim-text>CLMMSI. A mortar supplying apparatus having a pressure adjusting mechanism, comprising a motor (27), a pump, wherein the apparatus is provided with a mechanical pressure adjusting mechanism, of which the structure is that: a pump exit is communicated with a tank (31) through a tube (33), and a mortar exit (37) is disposed on the tank (3t), the tank (31) is provided with a mechanical automattc pressure adjusting mechanism.</claim-text> <claim-text>2. The mortar supplying apparatus having a pressure adjusting mechanism of claim 1, wherein the structure of said mechanical automatic pressure adjusting mechanism is that: an elastic diaphragm (30) is fastened along the outer edge of the top of the tank (31), a cover type pressing sleeve (22) for protecting the elastic diaphragm (30) is disposed in above the elastic diaphragm (30), the cover type pressing sleeve (22) is sleeved on the tank 31), the cover type pressing sleeve (22) is connected to a spritig returning and adjusting mechanism.</claim-text> <claim-text>3. The mortar supplying apparatus having a pressure adjusting mechanism of claim 2, wherein said cover type pressing sleeve (22) is provided with an inward spherical crown surface (35).</claim-text> <claim-text>4. The mortar supplying apparatus having a pressure adjusting mechanism of claim 2, wherein a longitudinal hole (20) avoiding the mortar exit during axial slides is disposed on said cover type pressing sleeve (22).</claim-text> <claim-text>5. The mortar supplying apparatus having a pressure adjusting mechanism of claim 2, wherein the structure of said spring returning and adjusting mechanism is that: guide holes slidably fit with at least three guide poles (23) fixed on a junctLon plate (32) of the tank (31) are provided on the cover type pressing sleeve (22), the guide holes are disposed on the guide plate located in the lower part of the cover type pressing sleeve (22), a pressure spring (24) is disposed on the guide pole (23) between the guide plate and a stopping fixed plate (25) of the guide pole (23).</claim-text> <claim-text>6. The mortar supplying apparatus having a pressure adjusting mechanism of claim 2, wherein said tank (31) is cylindrical and its bottom is of the shape of an inverted truncated cone, the tube (33) is communicated with the top of the inverted truncated cone.</claim-text> <claim-text>7. The mortar supplying apparatus having a pressure adjusting mechanism of claim 1, or 2, or 3, or 4, or 5, or 6, wherein said pump has a working barrel having cylindrical inner cavity (10), and a runner with a spiral groove auger structure (11) is provided in the working barrel having cylindrical inner cavity (10).</claim-text> <claim-text>8. The mortar supplying apparatus having a pressure adjusting mechanism of claim 7, wherein a rectangular box 13 is installed in said runner with a spiral grove auger structure (11), a square hole fittingly connected to a shaft (12) is provided in the rectangular box (13), the shaft (12) is provided with a stopping structure of the rectangular box (13) and the runner with a spiral groove auger structure (11).</claim-text> <claim-text>9. The m rtar supplying apparatus having a pressure adjusting mechanism of claim 7, \vherein a bearing (17) for positioning and fixing the shaft (12) is installed in a holder (2) of said pump, the hearing (17) is fixed by a gland (5) and hearing \vashers (7, 8) respectively; the working barrel having cylindrical inner cavity (10) is welded to the holder (2).</claim-text>
GB1301165.5A 2010-08-12 2010-11-10 Mortar supplying apparatus having a pressure adjusting mechanism Expired - Fee Related GB2495666B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN 201010251675 CN101934559B (en) 2010-08-12 2010-08-12 Mortar feed device with pressure regulation mechanism
PCT/CN2010/001802 WO2012019332A1 (en) 2010-08-12 2010-11-10 Mortar feeding device with pressure regulating structure

Publications (3)

Publication Number Publication Date
GB201301165D0 GB201301165D0 (en) 2013-03-06
GB2495666A true GB2495666A (en) 2013-04-17
GB2495666B GB2495666B (en) 2016-02-03

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Family Applications (1)

Application Number Title Priority Date Filing Date
GB1301165.5A Expired - Fee Related GB2495666B (en) 2010-08-12 2010-11-10 Mortar supplying apparatus having a pressure adjusting mechanism

Country Status (3)

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CN (1) CN101934559B (en)
GB (1) GB2495666B (en)
WO (1) WO2012019332A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103252841B (en) * 2013-04-22 2015-05-13 三一汽车制造有限公司 Device for preventing additive from being added excessively and mixing plant
CN103991142B (en) * 2014-05-22 2016-02-24 海润光伏科技股份有限公司 The quantitative turnaround system of mortar
CN105201185B (en) * 2014-06-27 2017-08-29 李伟 A kind of pulse constant current mortar goes out sizing process and its equipment
CN107639756B (en) * 2017-10-31 2023-07-28 河南省博宇新能源有限公司 Mortar stirring and spraying system of squaring machine

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19516753A1 (en) * 1995-05-06 1996-11-07 Applitec Vertrieb Service Method for spraying plaster or mortar
EP1065033A2 (en) * 1999-07-02 2001-01-03 m-tec mathis technik gmbh Process and device for preparing a binder , in particular a dry or pulverulent binding building material
JP2008081289A (en) * 2006-09-28 2008-04-10 Sinto Brator Co Ltd Opening and closing valve for supplying powder and granular material
CN201089117Y (en) * 2007-08-30 2008-07-23 宁波科宁达工业有限公司 Sand spraying gear for multi-wire cutting machine
CN201433869Y (en) * 2009-06-16 2010-03-31 郑州知信机电科技开发有限公司 Pressure controllable mortar pump
CN201502514U (en) * 2009-08-18 2010-06-09 赵大洋 Pressure stabilizing device for pneumatic diaphragm pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2378550Y (en) * 1999-04-27 2000-05-17 周忠元 Piston type cement plaster pump
US6605597B1 (en) * 1999-12-03 2003-08-12 Cv Therapeutics, Inc. Partial or full A1agonists-N-6 heterocyclic 5′-thio substituted adenosine derivatives

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19516753A1 (en) * 1995-05-06 1996-11-07 Applitec Vertrieb Service Method for spraying plaster or mortar
EP1065033A2 (en) * 1999-07-02 2001-01-03 m-tec mathis technik gmbh Process and device for preparing a binder , in particular a dry or pulverulent binding building material
JP2008081289A (en) * 2006-09-28 2008-04-10 Sinto Brator Co Ltd Opening and closing valve for supplying powder and granular material
CN201089117Y (en) * 2007-08-30 2008-07-23 宁波科宁达工业有限公司 Sand spraying gear for multi-wire cutting machine
CN201433869Y (en) * 2009-06-16 2010-03-31 郑州知信机电科技开发有限公司 Pressure controllable mortar pump
CN201502514U (en) * 2009-08-18 2010-06-09 赵大洋 Pressure stabilizing device for pneumatic diaphragm pump

Also Published As

Publication number Publication date
CN101934559B (en) 2013-04-17
WO2012019332A1 (en) 2012-02-16
GB201301165D0 (en) 2013-03-06
GB2495666B (en) 2016-02-03
CN101934559A (en) 2011-01-05

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PCNP Patent ceased through non-payment of renewal fee

Effective date: 20181110