CN101934559B - Mortar feed device with pressure regulation mechanism - Google Patents
Mortar feed device with pressure regulation mechanism Download PDFInfo
- Publication number
- CN101934559B CN101934559B CN201010251675.5A CN201010251675A CN101934559B CN 101934559 B CN101934559 B CN 101934559B CN 201010251675 A CN201010251675 A CN 201010251675A CN 101934559 B CN101934559 B CN 101934559B
- Authority
- CN
- China
- Prior art keywords
- mortar
- tank body
- pressure regulating
- regulating mechanism
- gland
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004570 mortar (masonry) Substances 0.000 title claims abstract description 42
- 230000008844 regulatory mechanism Effects 0.000 title abstract 2
- 210000004907 gland Anatomy 0.000 claims description 35
- 230000007246 mechanism Effects 0.000 claims description 19
- 238000007906 compression Methods 0.000 claims description 17
- 230000006835 compression Effects 0.000 claims description 16
- 230000001105 regulatory effect Effects 0.000 claims description 12
- 238000003466 welding Methods 0.000 claims description 4
- 239000013078 crystal Substances 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 8
- 239000012530 fluid Substances 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 229910000831 Steel Inorganic materials 0.000 abstract description 2
- 239000010959 steel Substances 0.000 abstract description 2
- 238000005507 spraying Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
- 230000008569 process Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/005—Devices for the automatic drive or the program control of the machines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D3/00—Axial-flow pumps
- F04D3/02—Axial-flow pumps of screw type
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention relates to the technical field of a device which can lift the mortar from a storage tank to a cutting steel wire through the spraying of a pipeline in the procedure of processing the crystal bars or crystal ingots to wafers by a multiwire saw cutting machine in the processing of the semiconducting crystal. The device comprises an electrical machine and a pump, and is mainly characterized in that the outlet of the pump body is communicated with a mortar tank through a connection pipe, the mortar tank is provided with a mortar outlet, and the mortar tank is further provided with a mechanical automatic pressure regulation mechanism. The pump body is provided with a barrel with a columniform inner chamber, the inner of the barrel with the columniform inner chamber is provided with a rotating wheel which is in a spiral groove auger structure. When being used to feed the mortar used in the cutting of the multiwire saw cutting machine, the device can greatly enhance the feeding continuity, reduce the volatility and improve the uniformity of the pressure to facilitate the improvement of the yield and the efficiency. The device of the invention is particularly suitable for the lifting of the mortar for the multiwire saw cutting machine in the semiconductor industry, and can also be used in other industries in which the fluid with high viscosity and high density needs to be lifted.
Description
Technical field
The present invention relates in the semiconductor crystal process, adopt the multi-wire saw cutting machine to be processed in the wafer process by crystal bar or crystal ingot, mortar is promoted the device technique field that sprays by the road on the cutting steel wire from holding vessel.
Background technology
Because multi-wire saw cutting machine processing semiconductor crystal bar or crystal ingot cut into wafer, it is higher to have working (machining) efficiency, and the characteristics that yield rate is higher are so obtained being widely used.Yet the inhomogeneities of mortar flow comes out gradually, and the inhomogeneities of mortar flow affects the further raising of yield rate.Cause the inhomogeneous main cause of flow to have: the runner of mortar pump promotes the variation that fluctuation and pressure are arranged in the mortar process.Along with the increase of semiconductor crystal bar or crystal ingot size, what material itself was worth improves constantly, and by improving or guaranteeing that the processed finished products rate cuts down finished cost, reduces economic loss, has become a problem anxious to be resolved.
Summary of the invention
The purpose of this invention is to provide a kind of mortar feedway with pressure regulating mechanism, improve continuity during the mortar feed that multi-line cutting machine cutting can be used with this device, reduce fluctuation, improve the uniformity of pressure, be conducive to improve yield rate and efficient; The present invention is specially adapted in the multi-line cutting machine of semicon industry the lifting to mortar.Also can be applicable in other the industry that high viscosity, highdensity fluid need to be promoted.
The main technical schemes of apparatus of the present invention is: a kind of mortar feedway with pressure regulating mechanism, comprise motor, pump, it is characterized in that having the mechanical compression governor motion, this mechanical compression governor motion structure is: the outlet of the pump housing is communicated with by connecting leg and tank body, tank body is provided with the mortar outlet, also has the mechanical compression self-regulation structure on the tank body.
Described mechanical compression self-regulation structure can be: tank body outer suitable for reading is installed and is fastened with elastic diaphragm, and the top of elastic diaphragm is provided with the lid formula gland of protection elastic diaphragm, and lid formula gland is enclosed within on the tank body, and lid formula gland links to each other with spring reset and guiding mechanism.Its sealing is fine, and it is highly stable, reliable to work.
But described mechanical compression self-regulation structure is piston cylinder operator etc. also, and piston rod and Gai Shi gland are twisted together.
Described lid formula gland has to the spherical crown surface of convex better, more is conducive to improve durability and life-span and its normal operation of assurance of elastic diaphragm.Face with other shapes also can, but not as good as to the spherical crown surface of convex for well.
Described lid formula gland can have the strip hole of avoiding the mortar outlet when endwisely slipping.
The structure of described spring reset and guiding mechanism can for: have at least 3 guide holes that are slidingly matched with the guide pillar that is fixed on the tank body connecting plate on the lid formula gland, guide hole is located on the guide hole plate that covers formula gland bottom, is provided with compression spring on the guide pillar between the spacing fixed head on guide hole plate and the guide pillar.
The structure of described spring reset and guiding mechanism also can be used tension spring formula structure etc.
Described tank body is cylindric better, and the bottom is the inverted round stage shape, the top UNICOM of connecting leg and inverted round stage.Its volume compact, slurry flow more smooth and easy.
It is columniform barrel that the described pump housing preferably has inner chamber, and inner chamber is to be provided with the runner with helicla flute auger type structure in the columniform barrel.
The described interior installation of runner with helicla flute auger type structure preferably has rectangular block is arranged, and is provided with the square opening that is connected with rotating shaft in the rectangular block, and rotating shaft is provided with rectangular block and has the position limiting structure of the runner of helicla flute auger type structure.
Bearing for the location fixed rotating shaft is installed in the holder of the described pump housing, and bearing is fixed by gland, bearing washer respectively; Inner chamber is columniform barrel and holder welding.
Good effect of the present invention is: the invention solves in the prior art that the people that always exist want to solve and unsolved problem always; Utilize this device, improve continuity during the mortar feed that multi-line cutting machine cutting can be used, reduce fluctuation, improve the uniformity of pressure, be conducive to improve yield rate and efficient.The present invention is specially adapted in the multi-line cutting machine of semicon industry the lifting of mortar also be can be applicable in other industries that high viscosity, highdensity fluid need to be promoted.
Patent of the present invention is applied to helical groove structure on the runner of mortar pump lifting mortar, make mortar in lifting process, have continuity, reduce fluctuation, increased simultaneously and had along with pressure changes and device that volume can expand and shrink comes the fluctuation of absorption pressure, make pressure even, guarantee that flow is even.
Below in conjunction with one preferably embodiment and accompanying drawing thereof be described further, but present embodiment can not be as limitation of the invention.
Description of drawings
Fig. 1 is the preferably structural representation of embodiment of one of the present invention.
Fig. 2 is the top view of Fig. 1.
Fig. 3 is the A-A revolved sectional view among Fig. 2.
Fig. 4 is the perspective view that has the runner 11 of helicla flute auger type structure among Fig. 1.
Fig. 5 is the B-B profile of runner 11 among Fig. 4.
Fig. 6 is the profile of rectangular block 13 among Fig. 1.
Number in the figure explanation: 1-frame plate, 2-holder, 3-bolt, 4-shaft coupling, the 5-gland, 6-bearing block, 7, the 8-bearing washer, the 9-screw, the 10-inner chamber is columniform barrel, and 11-has the runner of helicla flute auger type structure, 12-rotating shaft, 13-rectangular block, the 14-nut, 15-cavity, 16-connection, 17-bearing, the 18-screw, 19-locknut, 20-strip hole, 21-nut, 22-lid formula gland, 23-guide pillar, 24-compression spring, the spacing fixed head of 25-, the 26-screw, 27-motor, 28-screw, 29-annular gland, 30-elastic diaphragm, 31-tank body, the 32-connecting plate, 33-connecting leg, 34 helicla flutes, 35-is to the spherical crown surface of convex, 36-bolt, the outlet of 37-mortar.
The specific embodiment
Referring to Fig. 1～Fig. 5, this has the mortar feedway of pressure regulating mechanism, comprise motor 27, pump, it is characterized in that having the mechanical compression governor motion, this mechanical compression governor motion structure is: the outlet of the pump housing is communicated with by connecting leg 33 and tank body 31, tank body 31 is provided with mortar outlet 37, also has the mechanical compression self-regulation structure on the slurry tank.This mechanical compression self-regulation structure is: tank body 31 outers suitable for reading are installed and are fastened with elastic diaphragm 30; the top of elastic diaphragm 30 is provided with the lid formula gland 22 of protection elastic diaphragm 30; lid formula gland 22 is enclosed within on the tank body 31, and lid formula gland 22 links to each other with spring reset and guiding mechanism.Lid formula gland 22 has the spherical crown surface 35 to convex.The structure of spring reset and guiding mechanism is: have at least the guide hole that is slidingly matched with 3 guide pillars 23 that are fixed on tank body 31 connecting plates 32 on the lid formula gland 22, guide hole is located on the guide hole plate that covers formula gland 22 bottoms, is provided with compression spring 24 on the guide pillar 23 between the spacing fixed head 25 on guide hole plate and the guide pillar 23.Tank body 31 is cylindric, and the bottom is the inverted round stage shape, the top UNICOM of connecting leg 33 and inverted round stage.Lid formula gland 22 has the strip hole 20 of avoiding the mortar outlet when endwisely slipping.It is columniform barrel 10 that the described pump housing has inner chamber, and inner chamber is to be provided with the runner 11 with helicla flute auger type structure in the columniform barrel 10.Have in the runner 11 of helicla flute auger type structure rectangular block 13 is installed, be provided with the square opening that is connected with rotating shaft 12 in the rectangular block 13, rotating shaft 12 is provided with rectangular block (13) and has the position limiting structure of the runner 11 of helicla flute auger type structure.Bearing 17 for location fixed rotating shaft 12 is installed in the holder 2 of the pump housing, and bearing 17 is fixed by gland 5, bearing washer 7,8 respectively; Inner chamber is columniform barrel 10 and holder 2 welding.
Other structures are described as follows: frame plate 1 is by screw fastening mounted motor 27, motor 27 is installed shaft coupling 4 and is connected with rotating shaft 12, frame plate 1 is fastenedly connected holder 2 through bolt 3, holder 2 is interior to be fastenedly connected bearing block 6 through screw 9, and the bearing block 6 interior bearings 17 of having installed are fixedly connected with screw 18 with bearing washer 8 and through gland 5 with bearing washer 7.Rotating shaft 12 is fastenedly connected through locknut 19 and bearing 17, inner chamber is columniform barrel 10 and holder 2 welding, runner 11 interior close installation rectangular blocks 13, rotating shaft 12 is mounted to one through nut 14 with runner 11 and rectangular block 13, runner 11 is that columniform barrel 10 comprises by inner chamber, and formation cavity 15, connection 16 and inner chamber are that columniform barrel 10 is connected and communicates with cavity 15, connecting leg 33 is connected with the taper tank body with connection 16 and is connected, taper tank body 31 is fastenedly connected with frame plate 1 through bolt 36 and nut 21, and guide pillar 23 is connected with bolt 36, and spacing fixed head 25 is fastenedly connected through screw 26 and guide pillar 23, stage clip 24 is enclosed within on the guide pillar 23, by fixed head 25 location.The lid formula gland 22 porose guide pillars 23 that are installed in are pushed by stage clip 24 lower surfaces.Press-fited in taper tank body 31 upper surfaces elastic diaphragm 30 is fastening by annular gland 29 and screw 26.Lid formula gland 22 is under stage clip 24 and Gravitative Loads, be pressed on the elastic diaphragm 30, elastic diaphragm 30 is fastenedly connected on taper tank body 31 through annular gland 28, when the fluid pressure in the tank body is large, and elastic diaphragm 30 effect of being under pressure, deformable is expanded, push away moving-cover type gland 22 and move up, stage clip 24 is subject to covering the active force of formula gland 22 and shrinks stored energy, when the pressure decreased in the cavity, stage clip 24 releases energy, and thrust cap formula gland 22 replenishes the pressure of taper tank body 31 inner fluids.
The particular representative embodiment that has that shows in the accompanying drawing describes structure of the present invention.The mortar that structure of the present invention and method can effectively be used high viscosity, highdensity fluid such as multi-line cutting machine cutting promotes and keeps continuity, reduction fluctuation, guarantees simultaneously the uniformity of pressure.Of the present invention have in the mortar feedway of pressure compensation structure and the multi-line cutting machine that using method can be applied to semicon industry thereof an industry that high viscosity, highdensity fluid need to be promoted that the lifting of mortar also be may be used on other simultaneously.
The above only is preferred embodiment of the present invention, not in order to limiting the present invention, all any modifications of doing within the spirit and principles in the present invention, is equal to replace and improves etc., all should be included within protection scope of the present invention.
Claims (8)
1. mortar feedway with pressure regulating mechanism, comprise motor (27), pump, it is characterized in that having the mechanical compression governor motion, the structure of this mechanical compression governor motion is: the outlet of the pump housing is communicated with by connecting leg (33) and tank body (31), tank body (31) is provided with mortar outlet (37), and tank body has the mechanical compression self-regulation structure on (31); Described mechanical compression self-regulation structure is: tank body (31) outer suitable for reading is installed and is fastened with elastic diaphragm (30); the top of elastic diaphragm (30) is provided with the lid formula gland (22) of protection elastic diaphragm (30); lid formula gland (22) is enclosed within on the tank body (31), and lid formula gland (22) links to each other with spring reset and guiding mechanism.
2. the mortar feedway with pressure regulating mechanism according to claim 1 is characterized in that described lid formula gland (22) has the spherical crown surface (35) to convex.
3. the mortar feedway with pressure regulating mechanism according to claim 1 is characterized in that described lid formula gland (22) has the strip hole (20) of avoiding the mortar outlet when endwisely slipping.
4. the mortar feedway with pressure regulating mechanism according to claim 1, the structure that it is characterized in that described spring reset and guiding mechanism is: have at least the guide hole that is slidingly matched with 3 guide pillars (23) that are fixed on tank body (31) connecting plate (32) on lid formula gland (22), guide hole is located on the guide hole plate that covers formula gland (22) bottom, and guide pillar (23) is upper to be provided with compression spring (24) between the spacing fixed head (25) on guide hole plate and the guide pillar (23).
5. the mortar feedway with pressure regulating mechanism according to claim 1 is characterized in that described tank body (31) for cylindric, and the bottom is the inverted round stage shape, the top UNICOM of connecting leg (33) and inverted round stage.
6. according to claim 1,2,3,4 or 5 described mortar feedwaies with pressure regulating mechanism, it is characterized in that it is columniform barrel (10) that the described pump housing has inner chamber, inner chamber is to be provided with the runner (11) with helicla flute auger type structure in the columniform barrel (10).
7. want 6 described mortar feedwaies with pressure regulating mechanism according to right, it is characterized in that in the described runner (11) with helicla flute auger type structure rectangular block (13) being installed, be provided with the square opening that is connected with rotating shaft (12) in the rectangular block (13), rotating shaft (12) is provided with rectangular block (13) and has the position limiting structure of the runner (11) of helicla flute auger type structure.
8. the mortar feedway with pressure regulating mechanism according to claim 6, it is characterized in that being equipped with in the holder (2) of the described pump housing bearing (17) for location fixed rotating shaft (12), bearing (17) is fixing by gland (5), bearing washer (7,8) respectively; Inner chamber is columniform barrel (10) and holder (2) welding.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010251675.5A CN101934559B (en) | 2010-08-12 | 2010-08-12 | Mortar feed device with pressure regulation mechanism |
| GB1301165.5A GB2495666B (en) | 2010-08-12 | 2010-11-10 | Mortar supplying apparatus having a pressure adjusting mechanism |
| PCT/CN2010/001802 WO2012019332A1 (en) | 2010-08-12 | 2010-11-10 | Mortar feeding device with pressure regulating structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010251675.5A CN101934559B (en) | 2010-08-12 | 2010-08-12 | Mortar feed device with pressure regulation mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101934559A CN101934559A (en) | 2011-01-05 |
| CN101934559B true CN101934559B (en) | 2013-04-17 |
Family
ID=43388251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010251675.5A Expired - Fee Related CN101934559B (en) | 2010-08-12 | 2010-08-12 | Mortar feed device with pressure regulation mechanism |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN101934559B (en) |
| GB (1) | GB2495666B (en) |
| WO (1) | WO2012019332A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103252841B (en) * | 2013-04-22 | 2015-05-13 | 三一汽车制造有限公司 | Device for preventing additive from being added excessively and mixing plant |
| CN103991142B (en) * | 2014-05-22 | 2016-02-24 | 海润光伏科技股份有限公司 | The quantitative turnaround system of mortar |
| CN105201185B (en) * | 2014-06-27 | 2017-08-29 | 李伟 | A kind of pulse constant current mortar goes out sizing process and its equipment |
| CN107639756B (en) * | 2017-10-31 | 2023-07-28 | 河南省博宇新能源有限公司 | Mortar stirring and spraying system of squaring machine |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19516753A1 (en) * | 1995-05-06 | 1996-11-07 | Applitec Vertrieb Service | Method for spraying plaster or mortar |
| CN2378550Y (en) * | 1999-04-27 | 2000-05-17 | 周忠元 | Piston type cement plaster pump |
| EP1065033A2 (en) * | 1999-07-02 | 2001-01-03 | m-tec mathis technik gmbh | Process and device for preparing a binder , in particular a dry or pulverulent binding building material |
| CN201433869Y (en) * | 2009-06-16 | 2010-03-31 | 郑州知信机电科技开发有限公司 | Pressure controllable mortar pump |
| CN201502514U (en) * | 2009-08-18 | 2010-06-09 | 赵大洋 | Pressure stabilizing device for pneumatic diaphragm pump |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6605597B1 (en) * | 1999-12-03 | 2003-08-12 | Cv Therapeutics, Inc. | Partial or full A1agonists-N-6 heterocyclic 5′-thio substituted adenosine derivatives |
| JP5125047B2 (en) * | 2006-09-28 | 2013-01-23 | 新東工業株式会社 | Granule supply on-off valve and air blast device, and powder supply method and air blast method |
| CN201089117Y (en) * | 2007-08-30 | 2008-07-23 | 宁波科宁达工业有限公司 | Sand spraying gear for multi-wire cutting machine |
-
2010
- 2010-08-12 CN CN201010251675.5A patent/CN101934559B/en not_active Expired - Fee Related
- 2010-11-10 WO PCT/CN2010/001802 patent/WO2012019332A1/en active Application Filing
- 2010-11-10 GB GB1301165.5A patent/GB2495666B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19516753A1 (en) * | 1995-05-06 | 1996-11-07 | Applitec Vertrieb Service | Method for spraying plaster or mortar |
| CN2378550Y (en) * | 1999-04-27 | 2000-05-17 | 周忠元 | Piston type cement plaster pump |
| EP1065033A2 (en) * | 1999-07-02 | 2001-01-03 | m-tec mathis technik gmbh | Process and device for preparing a binder , in particular a dry or pulverulent binding building material |
| CN201433869Y (en) * | 2009-06-16 | 2010-03-31 | 郑州知信机电科技开发有限公司 | Pressure controllable mortar pump |
| CN201502514U (en) * | 2009-08-18 | 2010-06-09 | 赵大洋 | Pressure stabilizing device for pneumatic diaphragm pump |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2495666B (en) | 2016-02-03 |
| WO2012019332A1 (en) | 2012-02-16 |
| CN101934559A (en) | 2011-01-05 |
| GB201301165D0 (en) | 2013-03-06 |
| GB2495666A (en) | 2013-04-17 |
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