WO2011161818A1 - Dispositif de récupération de solvant et méthode de récupération de solvant - Google Patents

Dispositif de récupération de solvant et méthode de récupération de solvant Download PDF

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Publication number
WO2011161818A1
WO2011161818A1 PCT/JP2010/060858 JP2010060858W WO2011161818A1 WO 2011161818 A1 WO2011161818 A1 WO 2011161818A1 JP 2010060858 W JP2010060858 W JP 2010060858W WO 2011161818 A1 WO2011161818 A1 WO 2011161818A1
Authority
WO
WIPO (PCT)
Prior art keywords
solvent
treatment tank
vapor
sewage
heating medium
Prior art date
Application number
PCT/JP2010/060858
Other languages
English (en)
Japanese (ja)
Inventor
光治郎 大川
Original Assignee
Ookawa Koujiro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ookawa Koujiro filed Critical Ookawa Koujiro
Priority to JP2012521244A priority Critical patent/JP5621099B2/ja
Priority to PCT/JP2010/060858 priority patent/WO2011161818A1/fr
Publication of WO2011161818A1 publication Critical patent/WO2011161818A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/222—In rotating vessels; vessels with movable parts
    • B01D1/228—In rotating vessels; vessels with movable parts horizontally placed cylindrical container or drum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids

Definitions

  • the present invention relates to a solvent recovery apparatus that separates and recovers a solvent from a sewage or a waste liquid used when cleaning an object to be cleaned such as a semiconductor or an electronic device.
  • ⁇ Precision equipment such as semiconductors and electronic equipment or workpieces that can be cut may be affected by oil or dust, and the cleaning process is performed using a solvent in the manufacturing process.
  • the sewage used for cleaning in the cleaning process contains a solvent that can be reused if recovered in addition to oil and dust. Therefore, from the viewpoint of cost reduction and recycling, a solvent recovery device that separates and recovers the solvent from the sewed liquid is used.
  • the waste liquid used in the cleaning process is heated to evaporate the solvent contained in the waste liquid, the solvent vapor is cooled in the recovery liquid tank, and the solvent is condensed and liquefied to separate and recover the solvent.
  • the solvent recovery apparatuses in which various ideas are made in order to promote the evaporation and evaporation of the heated solvent and efficiently recover it.
  • the waste liquid stored in the waste liquid treatment tank is continuously run on a spiral blade of a screw that is exposed to the liquid surface, and the waste liquid developed in a thin film is heated to a temperature close to the boiling point of the solvent and lower than the boiling point.
  • a solvent recovery device has been proposed that can separate and recover the solvent contained in the sewage used in the cleaning process by continuous heating (see Patent Document 1).
  • an object of the present invention is to provide a solvent recovery apparatus and a solvent recovery method that can efficiently separate and recover a solvent.
  • the present invention includes a sewage treatment tank for storing sewage mixed with an oil and a solvent used for cleaning treatment, and a heat treatment conducted in the sewage treatment tank formed along the outer surface of the sewage treatment tank.
  • a heating medium storage unit for storing the heating medium to be heated, a heating unit for heating the heating medium, a recovery path for recovering the solvent vapor from the waste liquid treatment tank, and condensing and storing the recovered solvent vapor
  • a solvent recovery apparatus comprising a recovery liquid tank and a steam cooling unit that cools the solvent vapor to a temperature at which the solvent vapor supplied to the recovery liquid tank condenses and liquefies.
  • a rotating body that at least the lower part is buried in the waste liquid in the waste liquid treatment tank and lifts the waste liquid to an upper space by rotation, and a rotation drive unit that rotationally drives the rotary body. It is a solvent recovery device.
  • the solvent is composed of, for example, a chlorinated solvent such as dichloromethane, trichlorethylene, perchlorethylene, HCFC (141b or 255), or an inert organic solvent such as HFC or HFE.
  • a chlorinated solvent such as dichloromethane, trichlorethylene, perchlorethylene, HCFC (141b or 255), or an inert organic solvent such as HFC or HFE.
  • the heating medium has a boiling point higher than that of the solvent, and can be a fluid such as oil or mixed liquid, water, etc. having good heat storage and thermal conductivity.
  • the surface area of the sewage can be increased so that the solvent is easily evaporated by being lifted by the rotating body into the space above the sewage treatment tank.
  • the solvent mixed with the sewage lifted in the space above the sewage treatment tank can be evaporated and evaporated in the vicinity of the upper part of the sewage treatment tank, so even a solvent with high gas specific gravity is supplied to the recovery path. It can be easily separated and recovered efficiently.
  • the sewage stored in the sewage treatment tank can be lifted to the upper space in the sewage treatment tank by the rotating body even if the amount thereof decreases. .
  • the rotating body may include a brush portion in which a plurality of linear members are fixed on the circumferential surface of the rotating shaft in the radial direction of the rotating shaft.
  • the rotating body can lift the sewage into the upper space in the sewage treatment tank.
  • the brush portion may be arranged such that the plurality of linear materials are spirally arranged on the rotation shaft.
  • the linear material is arranged without a gap in the longitudinal direction of the rotating rotating shaft, and the filth can be evenly lifted to the upper space of the sewage treatment tank.
  • the linear material can be formed in a corrugated shape extending in the radial direction while corrugating.
  • the linear material can increase the surface area, and more sewage can be lifted to the upper space in the sewage treatment tank.
  • the present invention stores the sewage in which the oil and the solvent used for the cleaning process in the sewage treatment tank are mixed, and is stored in the heating medium storage part formed along the outer surface of the sewage treatment tank.
  • the heating medium that conducts heat into the waste liquid treatment tank is heated by a heating unit, and the vapor of the solvent is recovered from the waste liquid treatment tank to the recovery liquid tank through a recovery path, and is recovered in the recovery liquid tank.
  • a solvent recovery method for separating and recovering the solvent by cooling the solvent vapor to a temperature at which the solvent vapor is condensed and liquefied in a vapor cooling section, wherein at least the lower part of the rotating body rotating on a substantially horizontal rotating shaft is It is a solvent recovery method that is buried in the waste liquid in the waste liquid treatment tank, rotates the rotating body by a rotation drive unit, lifts the waste liquid to an upper space, and promotes evaporation and evaporation of the solvent. It is characterized by.
  • the solvent mixed in the sewage can be evaporated and evaporated at the upper part of the sewage treatment tank, and the solvent can be efficiently separated and recovered even if the specific gravity of the evaporated solvent is heavy.
  • FIG. 5 is a cross-sectional view taken along the line BB in FIG.
  • FIG. 1 is a front view (partially sectional view) showing an appearance of the solvent recovery device 100
  • FIG. 2 is a right side view (partially sectional view) showing the appearance of the solvent recovery device 100
  • FIG. 4 is a front view showing the outer appearance of the rotating brush 103
  • FIG. 4 is a right side view showing the outer appearance of the rotating brush 103
  • FIG. 5 is a cross-sectional view taken along the line BB in FIG. It is sectional drawing shown by.
  • the solvent recovery apparatus 100 includes a heating medium storage unit 101, a sewage treatment tank 102, a rotating brush 103, a heating unit 104, a heater 104a, a heating medium 105, and a gear unit 106.
  • the refrigerating machine 107, the moving caster 108 provided on the lower surface of the refrigerating machine 107, the sewage inlet 109, the oil filler 110, the recovery path 111, the motor 113, and the belt 114.
  • the heating medium storage unit 101 is formed in a substantially box shape and fixed on the upper surface of the refrigerator 107. Further, the sewage treatment tank 102 is formed in a substantially box shape that is slightly smaller than the heating medium storage unit 101, and the front surface, the back surface, the left and right side surfaces, and the bottom surface are separated from the opposing surfaces of the heating medium storage unit 101. Thus, the heating medium 105 can be filled between the heating medium storage unit 101 and the sewage treatment tank 102.
  • the inside of the sewage treatment tank 102 is in a normal pressure atmosphere, and is configured not to perform processing such as pressurization.
  • the collection path 111 is provided at a position slightly higher than the upper end of the rotary brush 103 with respect to the heating medium storage unit 101 and at the approximate center in the axial direction of the rotary brush 103. Thereby, the vapor
  • the heater 104 a is connected to the heating unit 104 through the heating medium storage unit 101.
  • the heating unit 104 and the heating heater 104a are arranged on the left side of the heating medium storage unit 101 so that the heating heater 104a can be accommodated in the front, back, and bottom spaces formed by the heating medium storage unit 101 and the sewage treatment tank 102. (See FIG. 2).
  • the heating medium storage unit 101 is filled with an amount of heating medium 105 that fills the entire interior.
  • the dirty liquid inlet 109 is connected to the middle height of the left side of the heating medium reservoir 101 via a connection pipe 109a.
  • a connection pipe 109a In the middle of the connection pipe 109a, an open / close valve 109b for sending the sewage L stored in the sewage inlet 109 into the sewage treatment tank 102 is connected.
  • the oil filler port 110 is connected to the left end of the upper surface of the heating medium storage unit 101 by a connection pipe 110a.
  • the oil supply port 110 is for replenishing and refueling the heating medium 105 as appropriate.
  • the motor 113 has a substantially vertical rotation axis and is fixedly installed on the upper surface of the heating medium storage unit 101. The rotation of the motor 113 is transmitted to the gear unit 106 via the belt 114 to rotate the rotating brush 103.
  • the gear unit 106 has a drive gear 106a having a substantially vertical rotation axis connected to the motor 113 via a belt 114, and a substantially horizontal rotation axis orthogonal to the substantially vertical rotation axis of the drive gear 106a. It is comprised by the passive gear 106b fixed to the right end of the rotating shaft part 103b of the rotating brush 103, and meshing with the drive gear 106a. The rotation of the substantially vertical axis of the motor 113 is transmitted to the drive gear 106a via the belt 114, and is converted into the rotation of the substantially horizontal axis by the passive gear 106b.
  • the gear portion 106 can be, for example, a bevel gear or a worm gear.
  • the rotating brush 103 includes a brush portion 103a and a rotating shaft portion 103b.
  • the rotating brush 103 even if the brush portion 103a does not contact the inner wall of the sewage treatment tank 102, and the amount of the sewage L stored in the sewage treatment tank 102 decreases, the lower end of the brush portion 103a has the sewage L It is formed in a diameter that can be buried in.
  • the rotating shaft 103b is attached to the middle height in the sewage treatment tank 102 so that the center of the rotating shaft is substantially horizontal. Further, a passive gear 106b is fixed to the right end of the rotating shaft portion 103b.
  • the brush portion 103a is wound around the rotating shaft portion 103b in a spiral manner and fixed by welding or the like so as not to move relative to the rotating shaft portion 103b.
  • the brush portion 103 a is corrugated so that the heat of the sewage L heated so that the solvent S is easily evaporated can be stored, and more sewage L can be lifted.
  • a channel brush having a stainless steel linear material 103c is preferable.
  • a recovery liquid tank 115 is fixedly installed on the upper surface of the refrigerator 107 and on the rear surface of the heating medium storage unit 101. Further, the inside of the waste liquid treatment tank 102 and the inside of the recovery liquid tank 115 are connected by a recovery path 111.
  • the cooling coil 116 is installed in the recovered liquid tank 115 and connected to the refrigerator 107.
  • the recovery path 111 is connected to protrude into the recovery liquid tank 115 at a position slightly higher than the cooling coil 116.
  • the sewage L mixed with the solvent S is put into the sewage inlet 109 or directly into the sewage treatment tank 102 so that at least the lower part of the rotary brush 103 is buried.
  • the tank 102 is filled.
  • the heat of the heating medium 105 heated by the heater 104 a is conducted to the sewage L through the sewage treatment tank 102. At this time, the temperature of the dirty liquid L is adjusted by the temperature of the heating medium 105. Further, the heating medium 105 is heated by the heater 104 a to an appropriate temperature according to the processing purpose of the solvent recovery apparatus 100.
  • the heating medium 105 is heated by the heater 104a so that the temperature of the heating medium 105 is about 10 ° C. higher than the normal-pressure boiling point temperature of the solvent S. Thereby, high-speed processing can be performed with priority given to processing speed.
  • the heating medium 105 may be set lower than the normal pressure boiling point of the solvent S to give priority to purity. In this case, by setting the temperature close to the boiling point of the solvent S and lower than the boiling point of the solvent S, the treatment can be performed as soon as possible while maintaining the purity.
  • the temperature of the heating medium 105 is adjusted within a temperature range in which the solvent S contained in the dirty liquid L is not decomposed.
  • the heaters 104a provided at the three locations are independently controlled so that the temperature of the heating medium 105 does not vary. In particular, until the temperature of the heating medium 105 is stabilized, heat convection occurs in the heating medium 105 in the heating medium storage unit 101 and the temperature is likely to vary. For this reason, the medium 105 quickly rises to a target temperature and is kept at a constant temperature by, for example, turning on and heating from the heater 104a at the bottom of the heating medium reservoir 101.
  • the heating upper limit temperature of the heating medium 105 is set to 70 ° C.
  • heating of the heating medium 105 is started from the heater 104a at the bottom of the heating medium storage unit 101, and heating is performed until the temperature of the heating medium 105 reaches 70 ° C. while adjusting the three heaters 104a. To do.
  • the heating of the heating medium 105 by the heater 104a is stopped.
  • the heater 104a resumes heating so that the temperature of the heating medium 105 is kept constant.
  • the solvent S contained in the heated sewage L is promoted to evaporate from the liquid surface of the sewage L.
  • the filth L can maintain a fixed temperature and can prevent decomposition
  • the filth L heated by the rotation of the rotary brush 103 is lifted to a space above the sewage treatment tank 102, and the surface area of the liquid surface can be increased so that the solvent S is easily evaporated. .
  • the solvent S contained in the sewage liquid L is evaporated and evaporated in the vicinity of the recovery path 111 in the upper part of the sewage treatment tank 102 by lifting the sewage L in the space above the sewage treatment tank 102. Further, even if the sewage L stored in the sewage treatment tank 102 decreases, the sewage L is lifted to the upper space by the rotating brush 103, so that it can always evaporate in the vicinity of the recovery path 111.
  • the inside of the recovered liquid tank 115 is cooled by the cooling coil 116, and further, the pressure is lowered by condensing and liquefying the vapor G of the solvent S. Therefore, both the temperature and the pressure are lowered with respect to the inside of the waste liquid treatment tank 102.
  • the vapor G of the solvent S filled in the sewage treatment tank 102 due to the pressure and temperature difference generated in the sewage treatment tank 102 and the recovery liquid tank 115 is supplied to the recovery liquid tank 115 through the recovery path 111. Thereby, it is not necessary to forcibly supply the vapor G of the solvent S to the recovery liquid tank 115 with a blower or a pump.
  • the inside of the recovered liquid tank 115 is cooled to a temperature suitable for condensing and liquefying the vapor G of the solvent S into the liquid solvent S by the cooling coil 116.
  • the vapor G of the solvent S supplied to the recovery liquid tank 115 is condensed and liquefied by the cooling action of the cooling coil 116 itself, or indirectly condensed and liquefied on the inner wall of the recovery liquid tank 115 cooled by the cooling coil 116.
  • the condensed solvent S is stored by dropping or flowing down to the bottom of the recovery liquid tank 115.
  • the liquid solvent S thus obtained can be reused for the cleaning treatment.
  • the rotating brush 103 that rotates on the substantially horizontal rotating shaft in this way, a large amount of the sewage L is attached to the surface of the rotating brush 103 in a thin film state in the upper space of the sewage treatment tank 102. Can be lifted. Thereby, the solvent S contained in the raised sewage L can be evaporated in the vicinity of the recovery path 111. In this way, the evaporation of the solvent S can be promoted by making the dirty liquid L into a thin film. Since the rotating brush 103 lifts the sewage L from the bottom of the sewage treatment tank 102, the rotary brush 103 is hardly affected even if the amount of the sewage L stored in the sewage treatment tank 102 decreases, and the specific gravity of the gas is heavy. Even with the solvent S, efficient solvent recovery that is easily supplied to the recovery liquid tank 115 through the recovery path 111 can be realized.
  • the motor 113 does not need to directly connect to the rotating brush 103 through the heating medium storage portion 101 and the sewage treatment tank 102, and the rotating brush 103 having an orthogonal rotating shaft is provided. Can be rotated.
  • the solvent recovery apparatus 100 can maintain its separation and recovery capability by making the rotary brush 103 a size suitable for the sewage treatment tank 102.
  • the rotation of the substantially vertical axis as in the prior art reduces the portion of the sewage L that is lifted from the liquid surface to the upper portion of the sewage treatment tank 102, but only about a half of the liquid level by the rotation of the substantially horizontal axis.
  • the sewage can be lifted from the water and can be efficiently evaporated.
  • the rotating body of the present invention corresponds to the rotating brush 103 of the embodiment
  • the rotating shaft corresponds to the rotating shaft portion 103b
  • the heating unit corresponds to the heating unit 104 and the heater 104a
  • the steam cooling unit corresponds to the refrigerator 107 and the cooling coil 116
  • the rotational drive unit corresponds to the motor 113, the belt 114, and the gear unit 106
  • the present invention can be applied to an apparatus for distilling and recovering a reusable solvent from waste liquid or waste liquid.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)

Abstract

La présente invention concerne un dispositif de récupération de solvant (100) muni d'un réservoir de traitement de liquides usagés (102) pour la conservation d'un liquide usagé (L) dans lequel sont mélangés de l'huile et un solvant (S) employés pour un traitement de lavage, une unité de stockage de moyen de chauffage (101) pour le stockage d'un moyen de chauffage (105) permettant de conduire de la chaleur jusqu'au réservoir de traitement de liquides usagés (102), un réchauffeur (104a) pour chauffer le moyen de chauffage (105), une voie de récupération (111) pour récupérer la vapeur (G) du solvant (S) depuis le réservoir de traitement de liquides usagés (102), un réservoir de liquide récupéré (115) pour convertir la vapeur (G) du solvant récupéré (S) en un liquide condensé et pour stocker le liquide, et un réfrigérant (116) pour refroidir la vapeur (G) du solvant (S) jusqu'à une température à laquelle la vapeur (G) du solvant (S) distribué au niveau du réservoir de liquide récupéré (115) est convertie en le liquide condensé, ledit dispositif de récupération de solvant (100) étant caractérisé en ce qu'il est doté d'une brosse rotative (103) mise en rotation par une pièce de type arbre rotatif approximativement horizontal (103b) permettant de plonger au moins sa partie inférieure dans le liquide usagé (L) au sein du réservoir de traitement de liquides usagés (102) et de soulever le liquide usagé (L) jusqu'à un espace supérieur par rotation, ainsi qu'un moteur (113), une courroie (114) et une pièce de type engrenage (106) permettant de faire tourner la brosse rotative (103).
PCT/JP2010/060858 2010-06-25 2010-06-25 Dispositif de récupération de solvant et méthode de récupération de solvant WO2011161818A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012521244A JP5621099B2 (ja) 2010-06-25 2010-06-25 溶剤回収装置および溶剤回収方法
PCT/JP2010/060858 WO2011161818A1 (fr) 2010-06-25 2010-06-25 Dispositif de récupération de solvant et méthode de récupération de solvant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2010/060858 WO2011161818A1 (fr) 2010-06-25 2010-06-25 Dispositif de récupération de solvant et méthode de récupération de solvant

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WO2011161818A1 true WO2011161818A1 (fr) 2011-12-29

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014038032A1 (fr) * 2012-09-06 2014-03-13 タカギ冷機株式会社 Dispositif de traitement de déchets liquides et procédé de production de dispositif de traitement de déchets liquides
CN113663346A (zh) * 2021-09-14 2021-11-19 经纬精细化工(南通)有限公司 一种乙醇提取废液乙醇回收装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049901U (ja) * 1983-09-14 1985-04-08 日立化成工業株式会社 廃液溶剤蒸発装置
JP2000158000A (ja) * 1998-11-30 2000-06-13 Kansai Paint Co Ltd 廃棄物処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3985606A (en) * 1974-08-02 1976-10-12 Artisan Industries Inc. Low-pressure deentrainment evaporator
FR2788590B1 (fr) * 1999-01-14 2001-06-08 Sirven Echangeur de chaleur, notamment pour le prechauffage de lisier
JP4157804B2 (ja) * 2003-06-16 2008-10-01 光治郎 大川 溶剤回収装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049901U (ja) * 1983-09-14 1985-04-08 日立化成工業株式会社 廃液溶剤蒸発装置
JP2000158000A (ja) * 1998-11-30 2000-06-13 Kansai Paint Co Ltd 廃棄物処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014038032A1 (fr) * 2012-09-06 2014-03-13 タカギ冷機株式会社 Dispositif de traitement de déchets liquides et procédé de production de dispositif de traitement de déchets liquides
CN113663346A (zh) * 2021-09-14 2021-11-19 经纬精细化工(南通)有限公司 一种乙醇提取废液乙醇回收装置

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JPWO2011161818A1 (ja) 2013-08-19
JP5621099B2 (ja) 2014-11-05

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