WO2011126307A3 - Pad pattern repair apparatus - Google Patents

Pad pattern repair apparatus Download PDF

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Publication number
WO2011126307A3
WO2011126307A3 PCT/KR2011/002423 KR2011002423W WO2011126307A3 WO 2011126307 A3 WO2011126307 A3 WO 2011126307A3 KR 2011002423 W KR2011002423 W KR 2011002423W WO 2011126307 A3 WO2011126307 A3 WO 2011126307A3
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
stage
repair apparatus
substrate
present
Prior art date
Application number
PCT/KR2011/002423
Other languages
French (fr)
Other versions
WO2011126307A2 (en
Inventor
Seon Joo Kim
Woo Jin Kim
Sung Hun Park
Hyo Sung Lee
Original Assignee
Cowindst Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cowindst Co., Ltd. filed Critical Cowindst Co., Ltd.
Priority to CN201180018013.6A priority Critical patent/CN102939544B/en
Priority to JP2013503677A priority patent/JP5529335B2/en
Publication of WO2011126307A2 publication Critical patent/WO2011126307A2/en
Publication of WO2011126307A3 publication Critical patent/WO2011126307A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13458—Terminal pads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/32—Additional lead-in metallisation on a device or substrate, e.g. additional pads or pad portions, lines in the scribe line, sacrificed conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136259—Repairing; Defects

Abstract

The present invention relates to a pad pattern repair apparatus. The present invention provides an apparatus for repairing defects in pad electrodes equipped for applying signals to one of multiple substrates, comprising a stage into the reference surface of which the substrate is loaded; a chamber where a first exhaust, a shield gas outlet, and a second exhaust are formed sequentially in the lower surface of the chamber with respect to a laser light emission hole being equipped on the stage and moving to the defect position of the pad electrode and having structure to discharge purifying gas and raw gas in the middle of the hole; and a clamp being installed on the stage and supporting the opposite surface of a substrate adhered closely to the reference surface, the gap between the substrate and the lower surface of the chamber varying in the inside and outside of the lower surface of the chamber. A pad pattern repair apparatus according to the present invention maintains the pressure in the area where repairing a defect is carried out at a constant level, improving a process yield.
PCT/KR2011/002423 2010-04-08 2011-04-06 Pad pattern repair apparatus WO2011126307A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201180018013.6A CN102939544B (en) 2010-04-08 2011-04-06 Pad pattern repair apparatus
JP2013503677A JP5529335B2 (en) 2010-04-08 2011-04-06 Pad pattern repair device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100032185A KR101069809B1 (en) 2010-04-08 2010-04-08 Pad pattern repair apparatus
KR10-2010-0032185 2010-04-08

Publications (2)

Publication Number Publication Date
WO2011126307A2 WO2011126307A2 (en) 2011-10-13
WO2011126307A3 true WO2011126307A3 (en) 2011-12-29

Family

ID=44763409

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/002423 WO2011126307A2 (en) 2010-04-08 2011-04-06 Pad pattern repair apparatus

Country Status (5)

Country Link
JP (1) JP5529335B2 (en)
KR (1) KR101069809B1 (en)
CN (1) CN102939544B (en)
TW (1) TWI450372B (en)
WO (1) WO2011126307A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102661935B1 (en) * 2016-10-31 2024-04-26 엘지디스플레이 주식회사 Atmosphereic pressure plasma irradiation apparatus, method of manufacturing display panel using the same and display panel
KR102067626B1 (en) * 2016-12-14 2020-01-17 국민대학교산학협력단 Laser chemical vapor deposition apparatus and method for forming thin film using the same
KR101876961B1 (en) * 2017-03-14 2018-07-10 주식회사 에이치비테크놀러지 Thin film forming apparatus
KR101876960B1 (en) * 2017-03-14 2018-07-10 주식회사 에이치비테크놀러지 Thin film forming apparatus
KR101876963B1 (en) * 2017-03-14 2018-07-10 주식회사 에이치비테크놀러지 Thin film forming apparatus
JP7292138B2 (en) * 2019-07-23 2023-06-16 株式会社ジャパンディスプレイ Display device repair system
CN111710301A (en) * 2020-07-13 2020-09-25 京东方科技集团股份有限公司 Display panel, preparation method and repair method thereof, and display device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080017767A (en) * 2006-08-22 2008-02-27 삼성전자주식회사 Apparatus of coating photoresist
KR20090028347A (en) * 2007-09-14 2009-03-18 주식회사 코윈디에스티 Flat panel display repair apparatus and flat panel display array inspection/repair apparatus
KR20090068824A (en) * 2007-12-24 2009-06-29 주식회사 코윈디에스티 Repair method for photo mask and apparatus of photo mask repair

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4334308B2 (en) * 2003-09-24 2009-09-30 オムロンレーザーフロント株式会社 Wiring correction device
JP2005109223A (en) * 2003-09-30 2005-04-21 Sanyo Electric Co Ltd Semiconductor device and display unit
JP4596118B2 (en) * 2003-12-08 2010-12-08 ソニー株式会社 Laser CVD equipment
JP2005179705A (en) * 2003-12-17 2005-07-07 Sony Corp Laser cvd apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080017767A (en) * 2006-08-22 2008-02-27 삼성전자주식회사 Apparatus of coating photoresist
KR20090028347A (en) * 2007-09-14 2009-03-18 주식회사 코윈디에스티 Flat panel display repair apparatus and flat panel display array inspection/repair apparatus
KR20090068824A (en) * 2007-12-24 2009-06-29 주식회사 코윈디에스티 Repair method for photo mask and apparatus of photo mask repair

Also Published As

Publication number Publication date
CN102939544A (en) 2013-02-20
KR101069809B1 (en) 2011-10-04
WO2011126307A2 (en) 2011-10-13
TW201203484A (en) 2012-01-16
CN102939544B (en) 2016-09-28
TWI450372B (en) 2014-08-21
JP5529335B2 (en) 2014-06-25
JP2013524018A (en) 2013-06-17

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