WO2011126232A3 - 원자현미경 - Google Patents

원자현미경 Download PDF

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Publication number
WO2011126232A3
WO2011126232A3 PCT/KR2011/002185 KR2011002185W WO2011126232A3 WO 2011126232 A3 WO2011126232 A3 WO 2011126232A3 KR 2011002185 W KR2011002185 W KR 2011002185W WO 2011126232 A3 WO2011126232 A3 WO 2011126232A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
scan head
head unit
unit
stage unit
Prior art date
Application number
PCT/KR2011/002185
Other languages
English (en)
French (fr)
Other versions
WO2011126232A2 (ko
Inventor
홍재완
송원영
Original Assignee
(주)나노포커스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)나노포커스 filed Critical (주)나노포커스
Publication of WO2011126232A2 publication Critical patent/WO2011126232A2/ko
Publication of WO2011126232A3 publication Critical patent/WO2011126232A3/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

본 발명은 대면적 기판을 고속으로 렌덤하게 스캐닝할 수 있는 원자현미경을 개시한다. 그의 현미경은, 기판을 지지하여 수평으로 이동시키는 기판 스테이지부와, 상기 기판 스테이지부에 대향되는 상기 기판의 상부를 탐침 및 캔틸레버로 스캐닝하는 스캔 헤드부와, 상기 스캔 헤드부를 지지하는 프레임과, 상기 프레임에 상기 스캔 헤드부를 탈부착시키고, 상기 스캔 헤드부에서 상기 탐침 및 상기 캔틸레버가 교체될 때 상기 기판에 수직하는 방향으로 상기 스캔 헤드부를 이동시키는 거동 스테이지부와, 상기 거동 스테이지부 및 상기 스캔 헤드부를 연결하고, 상기 스캔 헤드부의 스캐닝 시 상기 탐침을 상기 기판의 표면으로 접근시키고, 상기 기판 스테이지부에 의한 상기 기판의 수평 이동 시에 상기 기판의 표면으로부터 상기 탐침을 이격시키는 미동 스테이지부를 포함한다.
PCT/KR2011/002185 2010-04-05 2011-03-30 원자현미경 WO2011126232A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0030726 2010-04-05
KR1020100030726A KR101218177B1 (ko) 2010-04-05 2010-04-05 원자현미경

Publications (2)

Publication Number Publication Date
WO2011126232A2 WO2011126232A2 (ko) 2011-10-13
WO2011126232A3 true WO2011126232A3 (ko) 2012-03-15

Family

ID=44763361

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/002185 WO2011126232A2 (ko) 2010-04-05 2011-03-30 원자현미경

Country Status (2)

Country Link
KR (1) KR101218177B1 (ko)
WO (1) WO2011126232A2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101402973B1 (ko) * 2012-12-10 2014-06-03 김용균 미세 시료용 프로브 고정홀더 및 이를 구비한 미세 시료 채취 장치
KR101469365B1 (ko) * 2013-05-30 2014-12-08 안동대학교 산학협력단 프로브의 회전이 가능한 원자현미경 및 이를 이용한 스캐닝 방법
KR20140147589A (ko) 2013-06-20 2014-12-30 삼성전자주식회사 주사 탐침 현미경 및 그의 구동 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05180616A (ja) * 1992-01-08 1993-07-23 Canon Inc プローブ保持機構
US6201227B1 (en) * 1997-04-09 2001-03-13 Seiko Instruments Inc. Scanning probe microscope
JP2003194699A (ja) * 2001-12-27 2003-07-09 Canon Inc 信号検出装置、及び信号検出装置を用いた非接触型原子間力顕微鏡
US20070214864A1 (en) * 2006-02-23 2007-09-20 Asylum Research Corporation Active Damping of High Speed Scanning Probe Microscope Components

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW369603B (en) 1997-04-10 1999-09-11 Sii Nanotechnology Inc Apparatus for machining, recording, and reproducing, using scanning probe microscope

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05180616A (ja) * 1992-01-08 1993-07-23 Canon Inc プローブ保持機構
US6201227B1 (en) * 1997-04-09 2001-03-13 Seiko Instruments Inc. Scanning probe microscope
JP2003194699A (ja) * 2001-12-27 2003-07-09 Canon Inc 信号検出装置、及び信号検出装置を用いた非接触型原子間力顕微鏡
US20070214864A1 (en) * 2006-02-23 2007-09-20 Asylum Research Corporation Active Damping of High Speed Scanning Probe Microscope Components

Also Published As

Publication number Publication date
KR101218177B1 (ko) 2013-01-18
KR20110111581A (ko) 2011-10-12
WO2011126232A2 (ko) 2011-10-13

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