WO2011066700A1 - 同步传输装置及具有该装置的直线传输系统和控制方法 - Google Patents

同步传输装置及具有该装置的直线传输系统和控制方法 Download PDF

Info

Publication number
WO2011066700A1
WO2011066700A1 PCT/CN2009/076071 CN2009076071W WO2011066700A1 WO 2011066700 A1 WO2011066700 A1 WO 2011066700A1 CN 2009076071 W CN2009076071 W CN 2009076071W WO 2011066700 A1 WO2011066700 A1 WO 2011066700A1
Authority
WO
WIPO (PCT)
Prior art keywords
transmission
carrier
sensor
roller
linear
Prior art date
Application number
PCT/CN2009/076071
Other languages
English (en)
French (fr)
Inventor
杨明生
刘惠森
范继良
雷振宇
王曼媛
王勇
Original Assignee
东莞宏威数码机械有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 东莞宏威数码机械有限公司 filed Critical 东莞宏威数码机械有限公司
Publication of WO2011066700A1 publication Critical patent/WO2011066700A1/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path

Definitions

  • the present invention relates to a synchronous transmission device for a linear production apparatus, and more particularly to a synchronous transmission device applied to a linear organic light-emitting display device and a linear thin film solar energy production device, and a linear transmission system and control method therewith .
  • the fabrication of small-sized semiconductor devices such as integrated circuits is generally performed using a cluster production system, as shown in FIG. 1, using a plurality of transport chambers 502 having circumferential telescopic robots in a polygonal shape, and A plurality of processing chambers are disposed around the transfer chamber 502, and the film forming step unit includes: a transfer chamber 504 that transports the substrate to each processing chamber; a substrate feed port that feeds the substrate into the transfer chamber; and a cleaning chamber 505 that cleans the substrate; A plurality of film forming chambers 503 formed on the substrate, a later packaging chamber 506, a drying chamber 507, a finished product conveying chamber 508, and the like, and these processing chambers are disposed around the transport chamber by a plurality of gate valves.
  • the vacuum is pumped between the chambers for a long time, and the cavity is frequently opened to make the film escape, which results in the film formation which is not suitable for large-area substrate, low utilization rate of the coating material, and production cycle.
  • Longer problems, so inline semiconductor manufacturing equipment has been proposed.
  • a plurality of film forming chambers having independently controllable degrees of vacuum are linearly disposed in the same vacuum vessel, and gate valves between the film forming chambers are not required, and are different in each processing chamber. Under the conditions, the processing for achieving the respective purposes can be performed.
  • the substrate is continuously transported over the plurality of film forming chambers by the transport means for continuously transporting the substrate while forming a film, thereby shortening the time for substrate transport and adjusting the degree of vacuum, thereby shortening the production time.
  • the linear transmission device generally used is a plurality of transmission shafts with a plurality of rollers arranged in parallel along the longitudinal direction of the substrate, and the friction of the rollers on the transmission shaft and the substrate drives the substrate to travel throughout the process. At the same time, it also supports the substrate; as the size of the substrate continues to increase, the glass substrate for amorphous silicon thin film solar panels has a size of 1100 mm X 1400 mm, and, for example, the substrate of the LCD liquid crystal display. Size 1000mm X 1200mm has also been widely used, so it is more designed for the size of the drive shaft. Long, so the ratio of diameter to length will be smaller, and the design of the drive shaft is usually supported at both ends.
  • Another common linear transmission method of the substrate is similar to the above-mentioned transmission method.
  • a plurality of rollers made of a material such as silica gel are arranged in parallel in the longitudinal direction of the substrate, and the support by the roller and the substrate and the roller are arranged. The friction between the substrates is transmitted to and from the linear process unit.
  • Both of the above methods can be applied to the atmospheric environment and the vacuum environment, and when applied to a vacuum environment, it is necessary to add a vacuum sealing device such as a magnetic fluid between the power source and the transmission device.
  • a vacuum sealing device such as a magnetic fluid between the power source and the transmission device.
  • the film layer of the display device is generally a patterned film layer formed by the mask, and the film thickness is only a few ⁇ m (see Patent The application number is "CN200410026550. 5", "another patent of the applicant of a linear organic light-emitting display manufacturing system", so it is necessary to ensure that the substrate does not deviate during the process.
  • the above-mentioned prior art substrate transfer is performed by the friction between the substrate and the transport device.
  • the substrate of the display device is thin and the surface finish requirement is required.
  • High, at the same time in the substrate transfer process is not obvious, it is prone to deviation and other phenomena, if the substrate deviation phenomenon occurs in the coating process, the patterned film layer can not be formed completely, affecting the yield.
  • the transmission device is applied in the vacuum system, if the substrate is damaged or the device itself is faulty, it will be difficult to repair and maintain, and the presence of friction will prevent the occurrence of wear debris and affect the cleanliness of the vacuum environment.
  • One of the objects of the present invention is to provide a compact overall structure, convenient maintenance, high cleanliness and transmission.
  • Another object of the present invention is to provide a linear transmission system that is smooth, collimated, and highly stable. It is still another object of the present invention to provide a linear transmission control method which ensures high stability of a linear transmission system.
  • the technical solution of the present invention is: providing a carrier body for carrying a device, a positioning guide rail, a base, a sliding mechanism, and a plurality of corresponding driving mechanisms and transmission mechanisms, the driving mechanism and the driving mechanism
  • the transmission mechanism is connected, the transmission mechanism is pivotally connected to the base, the transmission mechanism is distributed on one side of the carrier body and meshes with the carrier body, and the positioning guide rail is laid in parallel on the base
  • the two sides of the seat are located under the carrier, and the sliding mechanism is a roller structure.
  • the sliding mechanism is disposed on the carrier and slidably engaged with the positioning guide rail.
  • the positioning guide rail has a first track surface and a second track surface, and the first track surface is connected to the second track surface and perpendicular to each other, and the first track faces of the two tracks are located on the same plane.
  • the second track faces of the two tracks are parallel to each other, and the sliding mechanism is located between the two track faces.
  • the first track surface is used for guiding the forward transmission of the carrier body, and the second track surface is for positioning the carrier body, so that the carrier body advances smoothly and collimated during the transmission process.
  • the sliding mechanism in the form of a roller comprises a first roller and a second roller which are alternately arranged at a distance and are symmetrically distributed on both sides of the carrier.
  • the sliding mechanism further includes a first roller shaft and a second roller. a shaft, the first roller shaft is fixed on the carrier body and pivotally connected to the first roller, and the second roller shaft is fixed on the carrier body and pivotally connected to the second roller, An axial direction of the first roller shaft is parallel to the first track surface, an axial direction of the second roller shaft is parallel to the second track surface, and the first roller is in contact with the first track surface, The second roller is in surface contact with the second track.
  • the first roller causes the carrier to be carried on the positioning guide rail and linearly advances along the first track surface, and the carrier is positioned on the two second track surfaces by the contact of the second roller with the second track surface There will be no deviations.
  • the first roller and the second roller are elastic plastic rollers.
  • the elastic plastic has anti-slip and abrasion resistance, which makes the transmission more stable.
  • the transmission mechanism includes a plurality of mutually corresponding transmission gears, a transmission shaft, a timing belt, and a pulley, one end of the corresponding transmission shaft is pivotally connected to the base, and the other end of the transmission shaft fixes a corresponding transmission gear and a pulley, and one of the plurality of transmission shafts is further coupled to the drive
  • the mechanism is fixedly connected, the transmission shafts are parallel to each other and on the same straight line, the pulleys on the adjacent transmission shafts are connected by the timing belt, and the carrier body is provided with a rack that meshes with the transmission gears.
  • the transmission mechanism converts the circular motion of the driving mechanism into a linear motion of the carrier body.
  • the timing belt is a ⁇ belt. Synchronization between the drive gears is achieved by the shackles, making the transmission smoother and more consistent.
  • the driving mechanism is a DC servo motor with a gear box
  • the motor is provided with the same steering and rotating speed
  • the DC servo motor has a fast response speed and high precision, and can smoothly and quickly convert the input control voltage signal into The mechanical output provides smooth power for the linear transmission system.
  • the motors have the same steering and speed, and the motor steps are consistent with each other, making the transmission smooth and coherent.
  • the present invention provides a linear transmission system including a synchronous transmission device, a programmable logic controller and a plurality of sensing receivers, the synchronous transmission device including a carrier for carrying the device, a positioning guide track, and a base a sliding mechanism and a plurality of mutually corresponding driving mechanisms and transmission mechanisms, wherein the driving mechanism is mounted on the base, the driving mechanism is coupled to the transmission mechanism, and the transmission mechanism is pivotally connected to the base.
  • the transmission mechanism is disposed on one side of the carrier and engages with the carrier.
  • the positioning guide rails are laid in parallel on both sides of the base and below the carrier, and the sliding mechanism is a roller structure.
  • the sliding mechanism is disposed on the carrier body and is slidably engaged with the positioning guide rail.
  • the front end and the rear end of the carrier body in the forward direction are respectively fixedly disposed to cooperate with the sensing receiver.
  • the transmission mechanism is correspondingly disposed between two adjacent sensor receivers, and the distance between two adjacent transmission mechanisms is smaller than the length of the carrier body in the forward direction, a programmable logic controller electrically coupled to the sensing receiver and the driving mechanism, respectively, the sensing receiver receiving a position signal transmitted by a first sensing transmitter or a second sensing transmitter nearest thereto Feedback to a programmable logic controller that controls the operating state of the drive mechanism.
  • the sensing receiver is a fiber-optic sensor, which utilizes the characteristics of sensitive, accurate, adaptable, compact and intelligent fiber, and more effectively and quickly acquires and feeds back the position information of the carrier.
  • the linear transmission system has at least two carriers, and the distance between two adjacent carriers is greater than the distance between two adjacent driving mechanisms to prevent adjacent carriers from colliding with each other. Affect the transmission process.
  • the linear transmission system further includes a self-locking control device, wherein the self-locking control device is electrically connected to the driving mechanism, and the self-locking control device controls two of the three consecutively distributed driving mechanisms.
  • the driving mechanism has different working states from the remaining driving mechanism.
  • the self-locking control device is composed of a relay, and the relay not only has a long service life, high reliability and high sensitivity, small control power, good electromagnetic compatibility, and can quickly convert and control the working state of the driving mechanism.
  • the present invention also provides a linear transmission control method for a linear transmission system as described above, comprising the steps of: receiving the sensor receiver of a position signal transmitted by the first sensor transmitter The position signal is fed back to the programmable logic controller, and the programmable logic controller controls the driving mechanism located in front of the sensing receiver that feeds back the position signal according to the position signal fed back by the sensing receiver. Receiving, by the sensor receiver, the position signal transmitted by the second sensor transmitter, the position signal to the programmable logic controller, the programmable logic controller receiving according to the sensor The position signal fed back by the device controls the operation of the drive mechanism in front of the sensor receiver that feeds back the position signal and the drive mechanism in the rear stops working.
  • the linear transmission system has at least two carriers, and the distance between two adjacent carriers is greater than the distance between two adjacent driving mechanisms to prevent adjacent carriers from colliding with each other and affecting the transmission process.
  • the method further includes the step of providing a self-locking control device electrically connected to the drive mechanism, the self-locking control device controlling two of the three consecutively distributed drive mechanisms
  • the driving mechanism has different working states from the remaining driving mechanism, and by monitoring and controlling the three consecutively distributed driving mechanisms, the adjacent carriers are prevented from colliding with each other, thereby realizing long distance self. Dynamic control linear transmission.
  • the self-locking control device is composed of a relay, and the relay not only has long service life, high reliability and high sensitivity, small control power, good electromagnetic compatibility, and can quickly switch the working state of the control driving mechanism.
  • the transmission mechanism is pivotally connected to the base, and the transmission mechanism is distributed on one side of the carrier and engaged with the carrier, positioning
  • the guiding rails are laid in parallel on both sides of the base and under the bearing body, and the sliding mechanism is disposed on the bearing body and slidably engaged with the positioning guiding rails, and the structure is simple and compact, and the maintenance and the maintenance are convenient.
  • the carrier carries the device to be transported, and the driving mechanism supplies power to the synchronous transmission device, and the carrier transmits the power through the meshing of the transmission mechanism and the carrier, and the sliding mechanism disposed on the carrier causes the carrier to follow the
  • the positioning guide track is slidably transmitted, and the positioning guide track simultaneously constrains the traveling path of the positioning carrier, so that the device realizes a smooth straight line transmission, and the whole process has high collimation degree, and is not applied to the vacuum system by the device itself. Source of pollution, with high cleanliness. Accordingly, the linear transmission system of the present invention can also maintain a smooth linear transmission of the device and a high degree of collimation, and the corresponding linear transmission control method controls the device to be smoothly and highly collimated in the linear transmission system.
  • FIG. 1 is a schematic structural view of a conventional cluster type production system.
  • FIG. 2 is a schematic plan view of a synchronous transmission device of the present invention.
  • Figure 3 is a partially enlarged schematic view of the synchronous transmission device shown in Figure 2.
  • Figure 4 is a cross-sectional view taken along line A-A of Figure 3.
  • Fig. 5 is a schematic structural view of a transmission mechanism of the synchronous transmission device of the present invention.
  • Figure 6 is a schematic diagram of the principle of the linear transmission system of the present invention.
  • Figure 7 is a schematic block diagram of a linear transmission system of the present invention. detailed description
  • the present invention discloses a synchronous transmission device 10 including a carrier 110 for a carrier device, a positioning guide track 120, a base 130, a sliding mechanism 140, and a plurality of mutually corresponding drive mechanisms and transmission mechanisms 160.
  • the driving mechanism is connected to the transmission mechanism 160.
  • the transmission mechanism 160 is pivotally connected to the base 130.
  • the transmission mechanism 160 is distributed on one side of the carrier 110 and meshes with the carrier 110.
  • the positioning guide rails 120 are disposed on the two sides of the base 130 in parallel and below the carrier body 110.
  • the sliding mechanism 140 has a roller structure, and the sliding mechanism 140 is disposed on the carrier body 110.
  • the sliding guide rail 120 is slidably coupled to the positioning guide rail 120.
  • the structure is simple and compact, convenient for maintenance and maintenance, and has high cleanliness.
  • the carrier 110 carries the device (not shown) that needs to be transported during the entire transmission process.
  • the driving mechanism provides power to the synchronous transmission device 10, and the transmission force is transmitted through the meshing of the transmission mechanism 160 with the carrier 110 to cause the carrier 110 to travel forward.
  • the sliding mechanism 140 disposed on the body 110 slidably transports the carrier 110 along the positioning guiding track 120, and the positioning guiding track 120 is placed on the carrier 110 to facilitate the carrier 110 along the positioning guiding track 120. Go on.
  • the positioning guide track 120 simultaneously positions and constrains the travel path of the carrier 110, thereby enabling the device to achieve smooth linear transmission and controlling its high degree of collimation.
  • the synchronous transmission device 10 When the synchronous transmission device 10 is applied to a vacuum system, it does not cause a pollution source due to the device itself, and is suitable for substrate transmission of various linear production equipments, and is particularly suitable for the base of organic light-emitting display devices and linear thin-film solar energy production equipment. Slice transfer.
  • the positioning guide rail 120 has a first track surface 121 and a second track surface 122.
  • the first track surface 121 is connected to the second track surface 122 and perpendicular to each other.
  • the first track faces 121 of the 120 are located on the same plane, and the two track faces 122 are parallel to each other, and the sliding mechanism 140 is located between the two track faces 122.
  • the first track surface 121 is used for guiding the forward transmission of the carrier 110
  • the second track surface 122 is used for positioning the carrier 110, so that the carrier 110 is smoothly and collimated during the transmission process. .
  • the sliding mechanism 140 having a roller structure includes a first roller 141 and a second roller 142 which are alternately arranged at intervals and symmetrically distributed on both sides of the carrier 110.
  • the sliding mechanism 122 further includes a first roller shaft 143 and a second roller shaft 144.
  • the first roller shaft 143 is fixed on the carrier body 110 by a locking screw 145 and pivotally connected to the first roller 141.
  • the second roller shaft 144 is fixed on the carrier 110 and pivotally connected to the second roller 142.
  • the axial direction of the first roller shaft 143 is parallel to the first track surface 121 and the axial direction of the second roller shaft 144.
  • the first roller 141 is in contact with the first track surface 121, and the second roller 142 is in contact with the second track surface 122.
  • the first roller 141 carries the carrier 110 on the positioning guide rail 120 and advances along the first track surface 121.
  • the second roller 141 is in contact with the second track surface 122 to position the carrier 110.
  • the first roller 141 and the second roller 142 are elastic plastic rollers.
  • the first roller 141 and the second roller 142 of the elastic plastic have the characteristics of anti-slip and wear resistance, and the transmission is more stable.
  • the roller has a bearing, and the roller is wound around the roller shaft through the cooperation of the bearing and the roller shaft. Free to rotate. It can be understood that the sliding mechanism 140 and the positioning guide rail 120 can be engaged and slidably connected by the sliding slot slider to achieve the guiding positioning of the carrier 110.
  • the driving mechanism is a DC servo motor 150 with a gear box.
  • the plurality of motors 150 of the synchronous transmission device 10 have the same steering and rotating speed, and the DC servo motor has a fast response speed and high precision.
  • the input control voltage signal is smoothly and quickly converted into mechanical output.
  • the motor needs to set the same steering and rotation speed, and the motor keeps pace with each other to make the transmission smooth and continuous.
  • the transmission mechanism 160 includes four mutually corresponding transmission gears 161, a transmission shaft 162, a timing belt 163 and a pulley 164, and one end of the transmission shaft 162 corresponding to each other is
  • the base 130 is pivotally connected, and the other end of the drive shaft 162 is fixed to the corresponding transmission gear 161 and the pulley 164.
  • One of the plurality of transmission shafts 162 is also fixedly connected to the DC servo motor 150.
  • the drive shafts 162 are parallel to each other and on the same straight line.
  • the pulleys 164 on the adjacent drive shafts 162 are connected by the timing belt 163.
  • the carrier 110 is provided with a rack 116 that meshes with the transmission gears 161.
  • the timing belt 163 is a braided belt. Synchronization between the transmission gears 161 is achieved by the shackles, making the transmission smoother and more continuous.
  • the transmission mechanism 160 converts the circular motion of the DC servo motor 150 into a linear motion of the carrier 110, and the DC servo motor 150 drives a transmission shaft 162 to rotate, and cooperates with the timing belt 163 through the corresponding pulley 164. Make other drive shafts 162 Synchronous rotation causes the carrier 110 to travel forward by the engagement of the transmission gear 161 with the rack 116 to realize the transmission of the carrier device.
  • the gear transmission is a preferred link mode
  • the transmission mechanism of the present invention can also use a worm drive, a pulley belt drive, and the transmission mechanism is used to link the DC servo motor 150 and the carrier 110.
  • the power of the drive mechanism 150 is transmitted to the carrier 110 and the circular motion of the drive mechanism 150 can be converted into a linear motion of the carrier 110.
  • the transmission mechanism 160 can also step on the two sides of the carrier 110 to advance the carrier 110 by simultaneously engaging the carrier 110 on both sides.
  • the working principle of the synchronous transmission device of the present invention is further described below.
  • the transmission gear 161 fixed to the transmission shaft 162 is driven by the transmission shaft 162, and the transmission gear 161 passes through the carrier.
  • the engagement of the rack 116 on the 110 pushes the carrier 110 forward, and the other transmission gears 161 operate synchronously under the cooperation of the pulley 164 and the timing belt 163, respectively meshing with the rack 116, pushing the carrier 110 forward.
  • the first roller 141 of the sliding mechanism 140 abuts the first track surface 121 to travel the carrier 110 along the first track surface 121 while the second roller 142 abuts the second track surface 122
  • the carrier 110 is limited to slide between the two second track faces 122.
  • the synchronous transmission device 10 is simple and compact in structure, convenient in maintenance and maintenance, can effectively realize smooth linear transmission of the device, and has high collimation degree in the whole process, and is not used as a pollution source when the vacuum system is used. High cleanliness.
  • the linear transmission system of the present invention includes the synchronous transmission device 10, the programmable logic controller 30, and the plurality of sensor receivers 20.
  • the front end and the rear end of the carrier 110 are respectively fixedly disposed and forwarded along the forward direction.
  • the first sensor transmitter 111 and the second sensor transmitter 112 (shown in FIG. 6) cooperate with the receiver 20, and the first sensor transmitter 111 and the second sensor generator 112 transmit position signals.
  • the sensor receivers 20 are equally spaced on the pedestal 130 and arranged in a line, and the transmission mechanism 160 is disposed between the adjacent two sensor receivers 20, The distance between the two adjacent transmission mechanisms 160 is less than the length of the carrier 110 in the forward direction, so that the transmission mechanism 160 can be continuously meshed with the carrier 110.
  • the programmable logic controller 30 is electrically connected to the sensing receiver 20 and the DC servo motor 150, respectively, and the sensing receiver 20 receives the first sensing transmitter 111 or the second transmission nearest thereto. Sensing the position signal transmitted by the transmitter 112 and feeding back to the programmable logic The controller 30 controls the operating state of the DC servo motor 150.
  • the programmable logic controller 30, the plurality of DC servo motors 150, the sensor receivers 20, and the sensor transmitters 111, 112 constitute a closed self-feedback control loop, and the programmable logic controller 30 receives signals, analyzes, and transmits corresponding signals. Signal, control device smooth transmission, automatic control.
  • the linear transmission system has simple mechanism, stable transmission, high degree of collimation, convenient installation and maintenance, can be applied to device transmission in an atmospheric environment, can also be applied to a vacuum system for device transmission, and can be applied in a vacuum environment. Minimize the pollution source from the system itself to the vacuum environment, with high cleanliness.
  • the sensor receiver 20 is a fiber-optic sensor, which utilizes the characteristics of sensitive, accurate, adaptable, compact, and intelligent fiber to more effectively and quickly acquire and feed back position information of the carrier.
  • the device 20 can also use a limit switch or a combination of the two.
  • the linear transmission system has at least two carriers 110, and the distance between two adjacent carriers 110 is greater than the distance between two adjacent transmission mechanisms 160 to prevent adjacent carriers.
  • the bodies 110 collide with each other, affecting the transmission process.
  • the linear transmission system further includes a self-locking control device 40, wherein the self-locking control device 40 is electrically connected to the DC servo motor 150, and the self-locking control device 40 controls any three consecutively distributed devices.
  • the two motors in the DC servo motor have different working states from the remaining ones. By monitoring and controlling the three continuously distributed DC servo motors, the adjacent carriers are prevented from colliding with each other, and the long distance is automated.
  • Control linear transmission wherein, the self-locking control device is composed of a relay, and the relay not only has long service life, high reliability and high sensitivity, small control power, good electromagnetic compatibility, and can quickly convert and control the working state of the DC servo motor.
  • the present invention also provides a linear transmission control method for a linear transmission system as described above.
  • the principle and control method of the linear transmission system of the present invention are as follows:
  • the first sensing receiver 201, the second sensing receiver 202, the third sensing receiver 203, and the nth sensing receiver are sequentially disposed at equal intervals along the forward direction of the carrier 110 by the front end.
  • a first motor 1501, a second motor 1502, a third motor 1503, ... and an (n-1)th motor are sequentially disposed between every two adjacent sensor receivers, wherein n is greater than Any natural number equal to 2.
  • the first sensor receiver 201 receives the first from The position signal of the sensor transmitter 111 is fed back to the programmable logic controller 30, and the programmable logic controller 30 sends a command to the first motor 1501 at the front end of the first sensor receiver 201 to make the first motor.
  • the 1501 is in an operating state, and the transmission gear 161 is driven to rotate by the transmission shaft 162.
  • the carrier 110 is provided with a rack 116 on the side, and the carrier 110 is guided along the positioning guide rail by the engagement of the rack 116 and the gear 161. 120 advances and travels smoothly in a straight line under the positioning and guiding of the positioning guide track 120.
  • the second sensing The receiver 202 receives the position signal sent by the first sensor transmitter 111 and feeds the position signal to the programmable logic controller 30, and the programmable logic controller 30 sends a command to the second end located at the front end of the sensor receiver 202.
  • the motor 1502 opens the second motor 1502 to be in an operating state, thereby causing the carrier 110 to continuously travel forward.
  • the sensor receiver 203 receives the position signal, the position signal is fed back to the programmable logic controller 30 to operate the third motor 1503 in front of it.
  • the sensor receivers 20 at different locations successively receive position signals from the sensor transmitters 111, 112 disposed on the carrier 110, and then feedback the position The signal is applied to a programmable logic controller 30 that controls the operation of the motor in front of the respective sensor receiver that feeds back the position signal based on the received position signal.
  • the sensing receiver 20 receives the position signal sent by the second sensor transmitter 112, and feeds back the received position signal to the programmable logic controller 30, which is programmable.
  • the logic controller 30 controls the motor that is located behind the respective sensor receiver 20 that feeds back the position signal to suspend operation based on the received position signal.
  • the second sensor receiver 202 receives the position signal transmitted by the second sensor transmitter 112, and feeds back to the programmable logic controller 30, and the programmable logic controller 30 sends a corresponding command to the second sensor receiver.
  • the first motor 1501 at the rear of the 202 stops the first motor 1501 from being operated.
  • the third sensor receiver 203 receives the position signal transmitted by the second sensor transmitter 112, it is fed back to the programmable logic controller 30 again.
  • the programming logic controller 30 sends a command to the second motor 1502 located behind the sensor receiver 203 to stop the second motor 1502 from operating.
  • the distance between two adjacent carriers 110 should be greater than the distance between two adjacent transmission mechanisms 160 to prevent adjacent carriers 110 from colliding with each other and affecting the transmission process.
  • the specific control method is: when the programmable logic controller 30 detects that the number of status signals from the same sensor receiver 20 is an odd number, sending a signal to the motor 150 located in front of the sensor receiver 20 to make the motor 150 When the programmable logic controller 30 detects that the number of status signals of the same sensor receiver 20 is an even number, sends a signal to the motor 150 located behind the sensor receiver 20, so that the motor 150 is at Stop state.
  • the linear transmission control method further includes the step of providing a self-locking control device 40, the self-locking control device 40 being composed of a relay and electrically connected to the DC servo motor 150.
  • the self-locking control device 40 controls two of the three motors that are continuously distributed by the relay to have different operating states from the remaining one of the motors, that is, the three motors that are adjacent to each other cannot be simultaneously operated by the relay, and at the same time, The first two motors in the three motors cannot be operated at the same time, and the distance between the two adjacent carriers 110 is at least two motors.
  • the first sensing receiver 201 disposed at the foremost end of the synchronous transmission device 10 and the nth sensing receiver at the rearmost end are provided with a motor because of the corresponding rear and corresponding front, and the programmable logic controller When receiving the position signal of the first sensor receiver 201, it is only necessary to send a signal to the motor 1501 located behind the sensor receiver 201 to control its working state, when the programmable logic controller 30 receives the nth of the last end.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Non-Mechanical Conveyors (AREA)

Description

同步传输装置及具有该装置的直线传输系统和控制方法 技术领域
本发明涉及一种直线型生产设备的同步传输装置， 更具体地涉及一种应用 于直线型有机发光显示设备和直线型薄膜太阳能生产设备的同步传输装置及具 有该装置的直线传输系统和控制方法。 背景技术
在半导体加工行业， 集成电路等小尺寸的半导体器件的制造通常釆用集群 型 （cluster )生产系统， 如附图一所示， 利用多个具有周向伸缩机械手的输送室 502呈多边形形状， 并在输送室 502的周围设有多个处理室， 其成膜工序单元具 有： 向各处理室输送基板的输送室 504; 将基板送入输送室的基板送入口； 清洗 基板的清洗室 505; 在基板上成膜的多个成膜室 503以及后期的封装室 506、 干 燥室 507、成品输送室 508等， 这些处理室通过多个闸门阀配置在输送室的周围 等结构。
由于这种设备腔体结构不宜过大、 各腔室间抽放真空时间久、 频繁开启腔 体使膜材逸出， 导致其具有不适应大面积基板成膜、 镀膜材料利用率低、 生产 周期长等问题， 因此直线型 （inline )半导体制造设备就被提出了。 直线型的半 导体生产设备，将多个具有可独立控制真空度的成膜室呈直线地设置在同一真 空容器内， 且不需要这些成膜室间的闸门阀， 在各处理室， 在不同的条件下， 可执行达到各自目的的规定的处理。 成膜时， 基板通过连续输送基板的输送 装置在多个成膜室的上方连续输送同时形成膜， 以此来缩短基板输送和调整真 空度的时间， 进而缩短生产时间。
一般釆用的直线传输装置为釆用多个沿基片纵向平行布置的带有多个滚轮 的传动轴， 利用所述传动轴上的滚轮与基片的摩擦力带动基片在整个制程中行 进， 同时也对基片具有支撑作用； 随着基片尺寸的不断变大， 如非晶硅薄膜太 阳能电池板用的玻璃基片已有 1100mm X 1400mm的尺寸，再如， LCD液晶显示 的基片尺寸 1000mm X 1200mm也已广见， 这样为了传动轴的尺寸就要设计的更 长， 因此其直径与长度比值将会更小， 同时这种传动轴的方式设计通常为两端 支撑， 基于上述原因， 容易因为基片重量及基片制程中的受力， 如基片清洗时 的流体冲击力、 基片镀膜时粒子撞击力等导致长而窄的传动轴过载变形， 影响 制程效果， 为了避免这一问题的出现， 专利申请号为 CN200410039014.0的 "一 种用于平面显示器的基片加工系统中的基片传输设备" 提出了一种有效的解决 办法；
另外一种常见的基片直线传输方式类似于上述的传输方式， 在基板的纵向 方向上平行排布多条釆用硅胶等材质制成的辊轮， 通过辊轮的支撑及基片与辊 轮间的摩擦力将基片传入、 传出直线制程装置。
上述两种方式均可应用于大气环境和真空环境， 当应用到真空环境时还需 要在动力源与传输装置之间添加如磁流体等真空密封装置。 在基片传输过程中， 尤其是显示器件的基片镀膜制程中， 因为显示器件的膜层一般为通过掩膜板形 成的图案化膜层， 且膜层厚度仅为几 μ m (可参见专利申请号为 CN200810026550 . 5的 "一种直线型有机发光显示器制造系统"的本申请人的另 外一个专利）， 所以必须保证在制程过程中的基片不跑偏。
上述现有技术的基板传递都利用基板与传输装置间的摩擦力进行， 除上述 一些问题外， 还存在使被传输的基板出现划痕、 破损问题， 尤其是显示装置的 基板薄而且表面光洁度要求高， 同时在基板传输过程中导向不明显， 容易出现 跑偏等现象， 如果在镀膜制程中出现基板跑偏现象那么图案化的膜层就不能完 整的形成， 影响成品率。 同时， 如果传输装置应用真空系统内， 如果出现基片 破损或装置本身故障， 将很难维修和维护， 同时摩擦力的存在避免不了会出现 磨屑， 影响真空环境的清洁度。
因此， 有必要提供一种整体结构紧凑、 传输平稳、 准直度高、 维修方便且 具有较高清洁度的同步传输装置及具有该装置的直线传输系统和控制方法。 发明内容
本发明的目的之一是提供一种整体结构紧凑、 维修方便、 清洁度高且传输 本发明的另一目的是提供一种传输平稳、 准直且稳定性高的直线传输系统。 本发明的又一目的是提供一种保证直线传输系统具有较高稳定性的直线传 输控制方法。
为实现上述目的，本发明的技术方案为： 提供一种包括用于承载器件的承载 体、 定位导向轨道、 基座、 滑动机构及若干相互对应的驱动机构和传动机构， 所述驱动机构与所述传动机构连接， 所述传动机构与所述基座枢接， 所述传动 机构分布于所述承载体的一侧且与所述承载体啮合 , 所述定位导向轨道平行地 铺设于所述基座两侧并位于所述承载体下方， 所述滑动机构呈滚轮结构， 所述 滑动机构设置在所述承载体上并与所述定位导向轨道滑动地卡合连接。
其中， 所述定位导向轨道具有第一轨道面与第二轨道面， 所述第一轨道面 与所述第二轨道面连接并相互垂直， 两所述轨道的第一轨道面位于同一平面上， 两所述轨道的第二轨道面相互平行， 所述滑动机构位于两所述第二轨道面之间。 所述第一轨道面用于导向所述承载体的前进传输， 所述第二轨道面用于定位所 述承载体， 从而使承载体在传输过程中平稳、 准直地前进。
较佳地， 呈滚轮结构的所述滑动机构包括相互间隔交错设置并对称分布在 所述承载体两侧的第一滚轮与第二滚轮， 所述滑动机构还包括第一滚轮轴与第 二滚轮轴， 所述第一滚轮轴固定在所述承载体上并与所述第一滚轮枢接， 所述 第二滚轮轴固定在所述承载体上并与所述第二滚轮枢接， 所述第一滚轮轴的轴 向平行于所述第一轨道面， 所述第二滚轮轴的轴向平行于所述第二轨道面， 所 述第一滚轮与所述第一轨道面接触， 所述第二滚轮与所述第二轨道面接触。 所 述第一滚轮使承载体承载在所述定位导向轨道上并沿所述第一轨道面直线前 进， 通过第二滚轮与第二轨道面的接触， 使承载体定位在两第二轨道面之间而 不会跑偏。
较佳地， 所述第一滚轮及第二滚轮均为弹性塑胶的滚轮。 所述弹性塑胶防 滑、 耐磨性强， 使传输更平稳。
较佳地， 所述传动机构包括若干相互对应的传动齿轮、 传动轴、 同步带及 带轮， 相互对应的所述传动轴的一端与所述基座枢接， 所述传动轴的另一端固 定相互对应的传动齿轮及带轮， 若干所述传动轴中的一个还与所述驱动机构固 定连接， 所述传动轴相互平行且位于同一直线上， 相邻的传动轴上的带轮由所 述同步带连接， 所述承载体设有与所述传动齿轮相啮合的齿条。 所述传动机构 将驱动机构的圓周运动转化为所述承载体的直线运动， 通过齿轮与齿条的啮合， 齿轮与同步带的配合将驱动机构的动力传递到承载体上， 从而使承载体向前行 进， 实现传输承载器件。 其中， 所述同步带为锲形带。 通过锲形带实现传动齿 轮之间的同步， 使传输更为平稳连贯。
同样较佳地， 所述驱动机构为带有波箱的直流伺服电机， 所述电机设置相 同的转向和转速， 直流伺服电机响应速度快、 精度高， 能将输入的控制电压信 号平稳快速转换为机械输出量， 为直线传输系统提供平稳动力， 所述电机具有 相同的转向和转速， 相互之间的电机步调一致， 使传输平稳连贯。
相应地， 本发明提供了一种直线传输系统， 包括同步传输装置、 可编程逻 辑控制器及若干传感接收器， 所述同步传输装置包括用于承载器件的承载体、 定位导向轨道、 基座、 滑动机构及若干相互对应的驱动机构和传动机构， 所述 驱动机构安装于所述基座上， 所述驱动机构与所述传动机构连接， 所述传动机 构与所述基座枢接， 所述传动机构分布于所述承载体的一侧且与所述承载体啮 合， 所述定位导向轨道平行地铺设于所述基座两侧并位于所述承载体下方， 所 述滑动机构呈滚轮结构， 所述滑动机构设置在所述承载体上并与所述定位导向 轨道滑动地卡合连接， 所述承载体沿前进方向的前端及后端分别固定设有与所 述传感接收器配合的第一传感发射器与第二传感发射器， 所述第一传感发射器 及第二传感发生器发射位置信号， 所述传感接收器等间距的安装于所述基座上， 所述传动机构相应设置在相邻的两传感接收器之间， 相邻两所述传动机构的距 离小于所述承载体沿前进方向的长度， 所述可编程逻辑控制器分别与所述传感 接收器及所述驱动机构电连接， 所述传感接收器接收与其最邻近的第一传感发 射器或第二传感发射器发射的位置信号并反馈给可编程逻辑控制器， 所述可编 程逻辑控制器控制所述驱动机构的工作状态。 较佳地， 所述传感接收器为光纤传感器， 利用光纤灵敏、 精确、 适应性强、 小巧和智能化的特点， 更有效快速的获取并反馈承载体的位置信息。
在本发明的一个实施例中， 所述直线传输系统具有至少两个承载体， 相邻 两所述承载体的距离大于两相邻的所述驱动机构的距离， 防止相邻承载体相互 碰撞， 影响传输进程。
较佳地， 所述直线传输系统还包括自锁控制装置， 所述自锁控制装置分别 与所述驱动机构电连接， 所述自锁控制装置控制连续分布的三个所述驱动机构 中的两个驱动机构与剩余的另一驱动机构具有不同的工作状态， 通过对连续分 布的三个所述驱动机构的监测控制， 防止相邻承载体相互碰撞， 实现长距离的 自动化控制直线传输。 其中， 所述自锁控制装置由继电器组成， 继电器不仅使 用寿命长， 可靠性高且灵敏度高， 控制功率小， 电磁兼容性好， 能快速转换控 制驱动机构的工作状态。
相应地， 本发明还提供了一种如上所述的直线传输系统的直线传输控制方 法， 包括以下步骤： 接收到所述第一传感发射器发射的位置信号的所述传感接 收器将所述位置信号反馈给所述可编程逻辑控制器， 所述可编程逻辑控制器根 据所述传感接收器反馈的位置信号控制位于反馈所述位置信号的所述传感接收 器前方的驱动机构工作； 接收到所述第二传感发射器发射的位置信号的所述传 感接收器将所述位置信号反馈给所述可编程逻辑控制器， 所述可编程逻辑控制 器根据所述传感接收器反馈的位置信号控制位于反馈所述位置信号的所述传感 接收器的前方的驱动机构工作及后方的驱动机构停止工作。
较佳地， 所述直线传输系统具有至少两个承载体， 相邻两所述承载体的距 离大于两相邻的所述驱动机构的距离， 防止相邻承载体相互碰撞， 影响传输进 程。
较佳地， 还包括提供一个自锁控制装置的步骤， 所述自锁控制装置分别与 所述驱动机构电连接， 所述自锁控制装置控制连续分布的三个所述驱动机构中 的两个驱动机构与剩余的另一驱动机构具有不同的工作状态， 通过对连续分布 的三个所述驱动机构的监测控制， 防止相邻承载体相互碰撞， 实现长距离的自 动化控制直线传输。 其中， 所述自锁控制装置由继电器组成， 继电器不仅使用 寿命长， 可靠性高且灵敏度高， 控制功率小， 电磁兼容性好， 能快速转换控制 驱动机构的工作状态。
与现有技术相比， 由于本发明的同步传输装置的驱动机构与传动机构连接， 传动机构枢接在基座上， 该传动机构分布于承载体的一侧且与所述承载体啮合， 定位导向轨道平行地铺设于基座两侧并位于所述承载体下方， 滑动机构设置在 所述承载体上并与所述定位导向轨道滑动地卡合连接， 其结构简单紧凑， 维修 与维护方便， 通过承载体承载需要传输的器件， 驱动机构为同步传输装置提供 动力， 通过传动机构与承载体的啮合传递动力使承载体向前行进， 承载体上设 置的滑动机构使所述承载体沿所述定位导向轨道滑动传输， 而定位导向轨道同 时约束定位承载体的行进路径， 从而使器件实现平稳的直线传输， 且整个过程 准直度高， 同时应用于真空系统时不会因装置本身而带来污染源， 具有较高清 洁度。 相应地， 本发明的直线传输系统也能保持器件直线传输平稳、 准直度高， 相应的直线传输控制方法控制器件在直线传输系统中平稳且具有高准直度地传 输。 附图说明
图 1为现有的集束型生产系统的结构示意图。
图 2为本发明的同步传输装置的平面示意图。
图 3为图 2所示同步传输装置的部分放大示意图。
图 4为沿图 3 中 A-A线的剖视图。
图 5为本发明的同步传输装置的传动机构的结构示意图。
图 6为本发明直线传输系统的原理示意图。
图 7为本发明直线传输系统的原理方框图。 具体实施方式
为了详细说明本发明的技术内容、 构造特征， 以下结合实施方式并配合附 图作进一步说明， 其中不同图中相同的标号代表相同的部件。 参考图 2-4, 本发 明公开了一种同步传输装置 10, 包括用于承载器件的承载体 110、 定位导向轨 道 120、 基座 130、 滑动机构 140及若干相互对应的驱动机构和传动机构 160, 所述驱动机构与所述传动机构 160连接， 所述传动机构 160与所述基座 130枢 接， 所述传动机构 160分布于所述承载体 110的一侧且与所述承载体 110啮合， 所述定位导向轨道 120平行地铺设于所述基座 130两侧并位于所述承载体 110 下方， 所述滑动机构 140呈滚轮结构， 所述滑动机构 140设置在所述承载体 110 上并与所述定位导向轨道 120滑动地卡合连接。 其结构简单紧凑， 维修与维护 方便， 具有较高清洁度。 通过承载体 110承载整个传输过程中需要传输的器件 (图未示）， 驱动机构为同步传输装置 10提供动力， 通过传动机构 160与承载 体 110的啮合传递动力使承载体 110向前行进， 承载体 110上设置的滑动机构 140使所述承载体 110沿所述定位导向轨道 120滑动传输，定位导向轨道 120置 于所述承载体 110上， 方便所述承载体 110沿所述定位导向轨道 120行进。 所 述定位导向轨道 120同时对承载体 110的行进路径进行定位约束， 从而使器件 实现平稳的直线传输， 控制其具有高准直度。 所述同步传输装置 10应用于真空 系统时不会因装置本身而带来污染源， 适用于各种直线型生产设备的基片传输， 尤其适用于有机发光显示设备和直线型薄膜太阳能生产设备的基片传输。
配合参考图 4, 所述定位导向轨道 120具有第一轨道面 121与第二轨道面 122, 所述第一轨道面 121与所述第二轨道面 122连接并相互垂直， 两所述定位 导向轨道 120的第一轨道面 121位于同一平面上， 两所述第二轨道面 122相互 平行， 所述滑动机构 140位于两所述第二轨道面 122之间。 所述第一轨道面 121 用于导向所述承载体 110的前进传输， 所述第二轨道面 122用于定位所述承载 体 110, 从而使承载体 110在传输过程中平稳、 准直地前进。
参考图 3及图 4,呈滚轮结构的所述滑动机构 140包括相互间隔交错设置并 对称分布在所述承载体 110两侧的第一滚轮 141与第二滚轮 142,所述滑动机构 122还包括第一滚轮轴 143与第二滚轮轴 144, 所述第一滚轮轴 143通过锁紧螺 钉 145固定在所述承载体 110上并与所述第一滚轮 141枢接， 所述第二滚轮轴 144固定在所述承载体 110上并与所述第二滚轮 142枢接， 所述第一滚轮轴 143 的轴向平行于所述第一轨道面 121 ,所述第二滚轮轴 144的轴向平行于所述第二 轨道面 122, 所述第一滚轮 141与所述第一轨道面 121接触， 所述第二滚轮 142 与所述第二轨道面 122接触。 所述第一滚轮 141使承载体 110承载在所述定位 导向轨道 120上并沿所述第一轨道面 121直线前进， 通过第二滚轮 141与第二 轨道面 122的接触， 使承载体 110定位在两第二轨道面 122之间而不会跑偏。 较佳地， 所述第一滚轮 141及第二滚轮 142均为弹性塑胶的滚轮。 所述弹性塑 胶的第一滚轮 141及第二滚轮 142具有防滑、 耐磨性强的性能， 使传输更平稳， 所述滚轮具有轴承， 通过轴承与滚轮轴的配合， 使滚轮绕所述滚轮轴自由旋转。 可以理解地， 所述滑动机构 140与定位导向轨道 120可以釆用滑槽滑块配合的 形式卡合滑动连接， 实现对承载体 110的导向定位。
较佳地， 所述驱动机构为带有波箱的直流伺服电机 150, 所述同步传输装置 10的多个所述电机 150具有相同的转向和转速， 直流伺服电机响应速度快、 精 度高， 能将输入的控制电压信号平稳快速转换为机械输出量， 为直线传输系统 所述电机需设置相同的转向和转速， 相互之间的电机保持步调一致， 使传输平 稳连续。
参考图 5 , 在本发明的实施例中， 所述传动机构 160包括四个相互对应的传 动齿轮 161、 传动轴 162、 同步带 163及带轮 164, 相互对应的所述传动轴 162 的一端与所述基座 130枢接， 所述传动轴 162的另一端固定相互对应的传动齿 轮 161及带轮 164,若干所述传动轴 162中的一个还与所述直流伺服电机 150固 定连接， 所述传动轴 162相互平行且位于同一直线上， 相邻的传动轴 162上的 带轮 164由所述同步带 163连接， 所述承载体 110设有与所述传动齿轮 161相 啮合的齿条 116。 较佳地， 所述同步带 163为锲形带。 通过锲形带实现传动齿轮 161之间的同步， 使传输更为平稳连续。 所述传动机构 160将直流伺服电机 150 的圓周运动转化为所述承载体 110的直线运动， 所述直流伺服电机 150带动其 一传动轴 162旋转，通过相应的带轮 164跟同步带 163的配合使其他传动轴 162 同步转动， 通过传动齿轮 161与齿条 116的啮合使承载体 110向前行进， 实现 传输承载器件。 可以理解地， 齿轮传动为优选的链接方式， 本发明的传动机构 还可釆用涡轮蜗杆传动、 带轮皮带传动， 所述传动机构用于链接所述直流伺服 电机 150与所述承载体 110, 将所述驱动机构 150的动力传递到所述承载体 110 且能够将所述驱动机构 150的圓周运动转化为所述承载体 110的直线运动。 所 述传动机构 160亦可以分步在承载体 110的两侧，通过在两侧同时与承载体 110 啮合推动所述承载体 110前进。
以下对本发明的同步传输装置的工作原理作进一步阐述：直流伺服电机 150 工作时， 通过传动轴 162驱动固定在所述传动轴 162上的传动齿轮 161 , 所述传 动齿轮 161通过与所述承载体 110上的齿条 116的啮合推动所述承载体 110前进， 其他传动齿轮 161在带轮 164和同步带 163的配合作用下同步运转， 分别与齿 条 116啮合， 推动承载体 110向前行进。 所述滑动机构 140的第一滚轮 141 紧 贴所述第一轨道面 121使所述承载体 110沿所述第一轨道面 121行进， 同时第 二滚轮 142紧贴所述第二轨道面 122使所述承载体 110限位在两所述第二轨道 面 122之间滑行。 所述同步传输装置 10结构简单紧凑， 维修与维护方便， 能有 效实现器件的平稳地直线传输， 且整个过程准直度高， 应用于真空系统时不会 因装置本身而带来污染源， 具有较高清洁度。
本发明的直线传输系统， 包括所述同步传输装置 10、 可编程逻辑控制器 30 及若干传感接收器 20, 所述承载体 110沿前进方向的前端及后端分别固定设有 与所述传感接收器 20配合的第一传感发射器 111与第二传感发射器 112(如图 6 所示）， 所述第一传感发射器 111及第二传感发生器 112发射位置信号。 如图 2 所示， 所述传感接收器 20等间距的安装于所述基座 130上且排列成一条直线， 所述传动机构 160相应设置在相邻的两传感接收器 20之间， 相邻两所述传动机 构 160的距离小于所述承载体 110沿前进方向的长度， 从而使传动机构 160得 以与所述承载体 110连贯啮合。 所述可编程逻辑控制器 30分别与所述传感接收 器 20及所述直流伺服电机 150电连接， 所述传感接收器 20接收与其最邻近的 第一传感发射器 111或第二传感发射器 112发射的位置信号并反馈给可编程逻辑 控制器 30, 所述可编程逻辑控制器 30控制所述直流伺服电机 150的工作状态。 所述可编程逻辑控制器 30、 多个直流伺服电机 150、 传感接收器 20、 传感发射 器 111、 112构成闭合自反馈控制回路， 通过可编程逻辑控制器 30接收信号、 分 析、 发送相应信号， 控制器件的平稳传输， 实现自动化控制。 所述直线传输系 统机构简单、 传输平稳、 准直度高、 安装和维修都比较方便， 可应用于大气环 境中的器件传输， 也可应用于真空系统中进行器件传输， 且应用真空环境中能 够尽量减少来自系统本身带给真空环境的污染源， 具有较高清洁度。
较佳地， 所述传感接收器 20为光纤传感器， 利用光纤灵敏、 精确、 适应性 强、 小巧和智能化的特点， 更有效快速的获取并反馈承载体的位置信息， 所述 传感接收器 20亦可以釆用限位开关或釆用两者的结合。
在本发明的一个实施例中， 所述直线传输系统具有至少两个承载体 110, 相 邻两所述承载体 110的距离大于两相邻的所述传动机构 160的距离， 以防止相 邻承载体 110相互碰撞， 影响传输进程。 较佳地， 所述直线传输系统还包括自 锁控制装置 40, 所述自锁控制装置 40分别与所述直流伺服电机 150电连接， 所 述自锁控制装置 40控制连续分布的任意三个所述直流伺服电机中的两个电机与 剩余的另一电机具有不同的工作状态， 通过对连续分布的三个所述直流伺服电 机的监测控制， 防止相邻承载体相互碰撞， 实现长距离的自动化控制直线传输。 其中， 所述自锁控制装置由继电器组成， 继电器不仅使用寿命长， 可靠性高且 灵敏度高， 控制功率小， 电磁兼容性好， 能快速转换控制直流伺服电机的工作 状态。
本发明还提供了一种如上所述的直线传输系统的直线传输控制方法， 配合 参考图 6及图 7, 本发明的直线传输系统的原理及控制方法如下所述： 所述基座 130 的一侧由前端沿承载体 110前进方向等间距地依次设置有第一传感接收器 201、 第二传感接收器 202、 第三传感接收器 203...及第 n个传感接收器， 相应 地，每两相邻传感接收器之间按顺序依次设置有第一电机 1501、第二电机 1502、 第三电机 1503...及第 （n-1 )个电机， 其中， n为大于等于 2的任意自然数。 承 载体 110刚进入定位导向轨道 120上时， 第一传感接收器 201接收到来自第一 传感发射器 111的位置信号并反馈给可编程逻辑控制器 30, 可编程逻辑控制器 30相应发送指令给位于所述第一传感接收器 201的前端的第一电机 1501 , 使第 一电机 1501处于工作状态， 通过传动轴 162带动传动齿轮 161转动， 所述承载 体 110由于侧边设有齿条 116,通过齿条 116与齿轮 161的啮合使所述承载体 110 沿所述定位导向轨道 120前进， 并在所述定位导向轨道 120的定位与导向作用 下直线平稳地行进。 当所述承载体 110行进至两传动机构之间的区域时即到达 与第一传感接收器 201相邻的第二传感接收器 202可接收传感信号的区域内时， 第二传感接收器 202接收到第一传感器发射器 111发送的位置信号并将该位置 信号反馈给可编程逻辑控制器 30,可编程逻辑控制器 30相应发送指令给位于传 感接收器 202的前端的第二电机 1502, 开启第二电机 1502使其处于工作状态， 从而使所述承载体 110连续地向前行进。 同理， 当传感接收器 203接收到位置 信号时， 反馈位置信号给可编程逻辑控制器 30使其前方的第三电机 1503工作。 随着所述承载体 110的不断向前行进， 不同位置上的传感接收器 20陆续接收到 来自设置在所述承载体 110上的传感发射器 111、 112发射的位置信号， 然后反 馈位置信号给可编程逻辑控制器 30,可编程逻辑控制器 30根据接收到的位置信 号控制位于反馈所述位置信号的相应传感接收器的前方的电机工作。 而同时随 着承载体 110的向前行进， 传感接收器 20相应接收到第二传感发射器 112发送 的位置信号， 并将接收到的位置信号反馈给可编程逻辑控制器 30, 可编程逻辑 控制器 30根据接收到的位置信号控制位于反馈所述位置信号的相应传感接收器 20的后方的电机暂停工作。 例如， 第二传感接收器 202接收到第二传感发射器 112发射的位置信号， 再次反馈给可编程逻辑控制器 30, 可编程逻辑控制器 30 相应发送指令给位于第二传感接收器 202的后方的第一电机 1501 , 使第一电机 1501停止工作， 当第三传感接收器 203接收到第二传感发射器 112发射的位置 信号， 再次反馈给可编程逻辑控制器 30, 可编程逻辑控制器 30相应发送指令给 位于传感接收器 203的后方的第二电机 1502,使第二电机 1502停止工作。 通过 传感接收发射器的相互配合， 实现系统的自动化控制， 节省时间同时减少成本。
当所述直线传输系统上具有至少两个承载体 110 时即同时传输多个器件 时， 相邻两所述 载体 110的距离应大于相邻两所述传动机构 160的距离， 以 防止相邻承载体 110相互碰撞， 影响传输进程。 具体控制方法为： 当所述可编 程逻辑控制器 30检测到来自同一传感接收器 20的状态信号次数为奇数时， 发 送信号至位于该传感接收器 20前方的电机 150使所述电机 150处于工作状态； 当所述可编程逻辑控制器 30检测到同一传感接收器 20的状态信号次数为偶数 时， 发送信号至位于该传感接收器 20后方的电机 150, 使所述电机 150处于停 止状态。 为了防止相邻承载体 110相互碰撞， 所述直线传输控制方法还包括提 供一个自锁控制装置 40的步骤， 所述自锁控制装置 40 由继电器组成并与所述 直流伺服电机 150电连接， 所述自锁控制装置 40通过继电器控制连续分布的三 个电机中的两个电机与剩余的另一电机具有不同的工作状态， 即通过继电器限 制任意相邻的三个电机不能同时运转， 同时， 所述三个电机中首尾两个电机也 不能同时运转， 保证两相邻承载体 110 间至少有两电机间隔的距离。 通过对连 续分布的三个所述电机的监测控制， 防止相邻承载体 110相互碰撞， 从而实现 长距离的自动化控制直线传输。 设置在同步传输装置 10最前端的第一个传感接 收器 201及最尾端的第 n个传感接收器， 由于其相应的后方及相应的前方无相 对设置有电机， 当可编程逻辑控制器 30收到第一个传感接收器 201的位置信号 时只需对位于传感接收器 201的后方的电机 1501发送信号控制其工作状态， 当 可编程逻辑控制器 30收到最尾端的第 n个传感接收器的位置信号时只需对位于 该传感接收器前方的最后一个电机即第（n-1 )个电机发送信号控制其工作状态。 所述电机 150、 相应的传动机构 160、 传感接收器 20等的数量根据实际需要设 置。
以上所揭露的仅为本发明的较佳实例而已， 当然不能以此来限定本发明之 权利范围， 因此依本发明权利要求所作的等同变化， 仍属于本发明所涵盖的范 围。

Claims

权 利 要 求
1. 一种同步传输装置， 其特征在于， 包括用于承载器件的承载体、 定位导 向轨道、 基座、 滑动机构及若干相互对应的驱动机构和传动机构， 所述驱动机 构与所述传动机构连接， 所述传动机构与所述基座枢接， 所述传动机构分布于 所述承载体的一侧且与所述承载体啮合， 所述定位导向轨道平行地铺设于所述 基座两侧并位于所述承载体下方， 所述滑动机构呈滚轮结构， 所述滑动机构设 置在所述承载体上并与所述定位导向轨道滑动地卡合连接。
2. 如权利要求 1所述的同步传输装置， 其特征在于， 所述定位导向轨道具 有第一轨道面与第二轨道面， 所述第一轨道面与所述第二轨道面连接并相互垂 直， 两所述轨道的第一轨道面位于同一平面上， 两所述轨道的第二轨道面相互 平行， 所述滑动机构位于两所述第二轨道面之间。
3. 如权利要求 2所述的同步传输装置， 其特征在于， 呈滚轮结构的所述滑 动机构包括相互间隔交错设置并对称分布在所述承载体两侧的第一滚轮与第二 滚轮， 所述滑动机构还包括第一滚轮轴与第二滚轮轴， 所述第一滚轮轴固定在 所述承载体上并与所述第一滚轮枢接， 所述第二滚轮轴固定在所述承载体上并 与所述第二滚轮枢接， 所述第一滚轮轴的轴向平行于所述第一轨道面， 所述第 二滚轮轴的轴向平行于所述第二轨道面 , 所述第一滚轮与所述第一轨道面接触 , 所述第二滚轮与所述第二轨道面接触。
4. 如权利要求 3所述的同步传输装置， 其特征在于， 所述第一滚轮及第二 滚轮均为弹性塑胶的滚轮。
5. 如权利要求 1所述的同步传输装置， 其特征在于， 所述传动机构包括若 干相互对应的传动齿轮、 传动轴、 同步带及带轮， 相互对应的所述传动轴的一 端与所述基座枢接， 所述传动轴的另一端固定相互对应的传动齿轮及带轮， 若 干所述传动轴中的一个还与所述驱动机构固定连接， 所述传动轴相互平行且位 于同一直线上， 相邻的传动轴上的带轮由所述同步带连接， 所述承载体设有与 所述传动齿轮相啮合的齿条。
6. 如权利要求 5所述的同步传输装置， 其特征在于， 所述同步带为锲形带。
7. 如权利要求 1所述的同步传输装置， 其特征在于， 所述驱动机构为带有 波箱的直流伺服电机， 所述电机设置相同的转向和转速。
8. 一种直线传输系统， 其特征在于， 包括同步传输装置、 可编程逻辑控制 器及若干传感接收器， 所述同步传输装置包括用于承载器件的承载体、 定位导 向轨道、 基座、 滑动机构及若干相互对应的驱动机构和传动机构， 所述驱动机 构安装于所述基座上， 所述驱动机构与所述传动机构连接， 所述传动机构与所 述基座枢接， 所述传动机构分布于所述承载体的一侧且与所述承载体啮合， 所 述定位导向轨道平行地铺设于所述基座两侧并位于所述承载体下方， 所述滑动 机构呈滚轮结构， 所述滑动机构设置在所述承载体上并与所述定位导向轨道滑 动地卡合连接， 所述承载体沿前进方向的前端及后端分别固定设有与所述传感 接收器配合的第一传感发射器与第二传感发射器， 所述第一传感发射器及第二 传感发生器发射位置信号， 所述传感接收器等间距的安装于所述基座上， 所述 传动机构相应设置在相邻的两传感接收器之间， 相邻两所述传动机构的距离小 于所述承载体沿前进方向的长度， 所述可编程逻辑控制器分别与所述传感接收 器及所述驱动机构电连接， 所述传感接收器接收与其最邻近的第一传感发射器 或第二传感发射器发射器的位置信号并反馈给可编程逻辑控制器， 所述可编程 逻辑控制器控制所述驱动机构的工作状态。
9. 如权利要求 8所述的直线传输系统， 其特征在于， 所述传感接收器为光 纤传感器。
10. 如权利要求 8所述的直线传输系统， 其特征在于， 所述直线传输系统具 有至少两个承载体， 相邻两所述承载体的距离大于两相邻的所述传动机构的距 离。
11. 如权利要求 8所述的直线传输系统， 其特征在于， 所述直线传输系统还 包括自锁控制装置， 所述自锁控制装置分别与所述驱动机构电连接， 所述自锁 控制装置控制连续分布的三个所述驱动机构中的两个驱动机构与剩余的另一驱 动机构具有不同的工作状态。
12. 如权利要求 11所述的直线传输系统， 其特征在于， 所述自锁控制装置 由继电器组成。
13. 一种如权利要求 8所述的直线传输系统的直线传输控制方法，其特征在 于， 包括以下步骤：
接收到所述第一传感发射器发射的位置信号的所述传感接收器将所述位置 信号反馈给所述可编程逻辑控制器， 所述可编程逻辑控制器根据所述传感接收 器反馈的位置信号控制位于反馈所述位置信号的所述传感接收器前方的驱动机 构工作；
接收到所述第二传感发射器发射的位置信号的所述传感接收器将所述位置 信号反馈给所述可编程逻辑控制器， 所述可编程逻辑控制器根据所述传感接收 器反馈的位置信号控制位于反馈所述位置信号的所述传感接收器的前方的驱动 机构工作及后方的驱动机构停止工作。
14. 如权利要求 13所述的直线传输控制方法， 其特征在于， 所述直线传输 系统具有至少两个承载体， 相邻两所述承载体的距离大于两相邻的所述驱动机 构的距离。
15. 如权利要求 13所述的直线传输控制方法， 其特征在于， 还包括提供一 个自锁控制装置的步骤， 所述自锁控制装置分别与所述驱动机构电连接， 所述 自锁控制装置控制连续分布的三个所述驱动机构中的两个驱动机构与剩余的另 一驱动机构具有不同的工作状态。
16. 如权利要求 15所述的直线传输控制方法， 其特征在于， 所述自锁控制
PCT/CN2009/076071 2009-12-01 2009-12-25 同步传输装置及具有该装置的直线传输系统和控制方法 WO2011066700A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN200910246915.X 2009-12-01
CN200910246915XA CN101814451B (zh) 2009-12-01 2009-12-01 同步传输装置及具有该装置的直线传输系统和控制方法

Publications (1)

Publication Number Publication Date
WO2011066700A1 true WO2011066700A1 (zh) 2011-06-09

Family

ID=42621659

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2009/076071 WO2011066700A1 (zh) 2009-12-01 2009-12-25 同步传输装置及具有该装置的直线传输系统和控制方法

Country Status (2)

Country Link
CN (1) CN101814451B (zh)
WO (1) WO2011066700A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104880054B (zh) * 2015-05-21 2018-05-04 深圳市信宇人科技股份有限公司 隧道式烘烤线物料同步传输方法及装置
CN105059334A (zh) * 2015-07-23 2015-11-18 深圳市信宇人科技有限公司 真空烘烤线锂电池的装载方法、装载工具及装载盘
DE102015116167A1 (de) 2015-09-24 2017-03-30 Espera-Werke Gmbh Fördervorrichtung zum Transport von einzelnen Produkten
CN106328564B (zh) * 2016-09-25 2020-09-04 合肥芯谷微电子有限公司 一种集成电路封装生产线设备
CN112811090A (zh) * 2021-02-01 2021-05-18 无锡新松机器人自动化有限公司 剑栅输送设备及用于双侧板链精密传动的周期清零方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0121920A2 (de) * 1983-04-12 1984-10-17 Geppert, Helmut, Dipl.-Ing. Bandfördervorrichtung
FR2564809A1 (fr) * 1984-05-23 1985-11-29 Gallet Sa Convoyeur a rouleaux permettant l'accumulation a distance des charges et leur avance pas a pas
CN2347934Y (zh) * 1998-08-28 1999-11-10 广运机械工程股份有限公司 改进滚轮机构的滚轮输送机
EP1710176A2 (de) * 2005-04-08 2006-10-11 MiniTec Maschinenbau GmbH & Co. KG Gurtförderer
CN101195437A (zh) * 2006-11-17 2008-06-11 日本阿西斯特技术株式会社 轨道传送装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101670942B (zh) * 2009-09-03 2012-02-29 东莞宏威数码机械有限公司 基片运载装置
CN201611649U (zh) * 2009-12-01 2010-10-20 东莞宏威数码机械有限公司 同步传输装置及具有该装置的直线传输系统

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0121920A2 (de) * 1983-04-12 1984-10-17 Geppert, Helmut, Dipl.-Ing. Bandfördervorrichtung
FR2564809A1 (fr) * 1984-05-23 1985-11-29 Gallet Sa Convoyeur a rouleaux permettant l'accumulation a distance des charges et leur avance pas a pas
CN2347934Y (zh) * 1998-08-28 1999-11-10 广运机械工程股份有限公司 改进滚轮机构的滚轮输送机
EP1710176A2 (de) * 2005-04-08 2006-10-11 MiniTec Maschinenbau GmbH & Co. KG Gurtförderer
CN101195437A (zh) * 2006-11-17 2008-06-11 日本阿西斯特技术株式会社 轨道传送装置

Also Published As

Publication number Publication date
CN101814451B (zh) 2012-07-25
CN101814451A (zh) 2010-08-25

Similar Documents

Publication Publication Date Title
WO2011066700A1 (zh) 同步传输装置及具有该装置的直线传输系统和控制方法
US9187243B2 (en) Plate-shaped member transfer facility
US8397896B2 (en) Multi-mode and multi-pitch conveyor system
CN203959163U (zh) 碗坯间歇自动移位装置
KR20050040222A (ko) 기판 운반시스템 및 운반방법
JP2007530394A (ja) 差動式駆動型螺旋形蓄積装置
WO2018196305A1 (zh) 倍速链输送线移载机构
CN210682050U (zh) 一种输送线宽度调节装置
CN209506934U (zh) 一种宽度可调的直角输送线
CN105800311A (zh) 一种用于pcb生产设备的aoi自动收放板机
JP2010189094A (ja) 搬送物品の一時保管装置
WO2018192187A1 (zh) 一种输送定位系统及方法
CN113394147B (zh) 一种载板传送装置
JPS63295730A (ja) 粗糸ボビン搬送装置
US9267584B2 (en) Stacking machine
CN201611649U (zh) 同步传输装置及具有该装置的直线传输系统
CN108341266B (zh) 用于平板玻璃换向传送的装置及方法及自动分拣系统
KR101346912B1 (ko) 기어 감속형을 이용한 지능형 무인 반송 장치
JP7230430B2 (ja) 搬送装置
JP2009184422A (ja) 無人搬送台車
CN101419927A (zh) 小片传送方法及其装置
KR100991821B1 (ko) 대면적 기판 처리 시스템의 기판 이송 장치
CN202272530U (zh) 用于输送模板的模板滚取装置
CN220284204U (zh) 载板传输装置及pvd设备
JP2008282996A (ja) ワークのカセット間移載装置及び方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09851800

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 09851800

Country of ref document: EP

Kind code of ref document: A1