WO2011063894A4 - Photovoltaik-modulstruktur und verfahren zum herstellen einer elektrisch leitenden verbindung zwischen zwei voneinander beabstandeten kontaktschichten, insbesondere in der photovoltaik-modulstruktur - Google Patents
Photovoltaik-modulstruktur und verfahren zum herstellen einer elektrisch leitenden verbindung zwischen zwei voneinander beabstandeten kontaktschichten, insbesondere in der photovoltaik-modulstruktur Download PDFInfo
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- WO2011063894A4 WO2011063894A4 PCT/EP2010/006841 EP2010006841W WO2011063894A4 WO 2011063894 A4 WO2011063894 A4 WO 2011063894A4 EP 2010006841 W EP2010006841 W EP 2010006841W WO 2011063894 A4 WO2011063894 A4 WO 2011063894A4
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- 238000000034 method Methods 0.000 title claims abstract 3
- 238000004519 manufacturing process Methods 0.000 claims abstract 3
- 239000000463 material Substances 0.000 claims 5
- 230000007704 transition Effects 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 229910004613 CdTe Inorganic materials 0.000 claims 1
- 239000000945 filler Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000002966 varnish Substances 0.000 claims 1
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- H—ELECTRICITY
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/142—Energy conversion devices
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03923—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIBIIICVI compound materials, e.g. CIS, CIGS
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
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- H—ELECTRICITY
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0465—PV modules composed of a plurality of thin film solar cells deposited on the same substrate comprising particular structures for the electrical interconnection of adjacent PV cells in the module
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/073—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising only AIIBVI compound semiconductors, e.g. CdS/CdTe solar cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/543—Solar cells from Group II-VI materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
Claims
19
IN ARTIKEL 19 (1) GENANNTE ERKLÄRUNG
Die DE 43 24 318 Cl (Dl) verwendet einen ersten Strukturierungsprozess für die Frontelektrodenschicht FE (vgl. Sp. 3, Z. 33-39), anschließend erfolgt eine erste Laserbestrahlung Wl zur Erzeugung eines Strukturgrabens SG und daran anschließend eine zweite Laserbestrahlung W2, wodurch über eine Phasenumwandlung des Halbleitermaterials im bestrahlten Bereich ein niederohmiger Bereich NB entsteht (vgl. Sp. 3, Z. 65 bis Sp. 4, Z. 58). Daraus ergibt sich dann die in Fig. 3 gezeigte Struktur. Außerdem offenbart die Dl in Sp. 6, Z. 19-27, dass der zweite Laserstrukturierungsschritt W2 mit einer Breite von 50 bis 100 μπι durchgeführt wird, woraus sich in erster Näherung eine Dicke der vertikalen Schicht NB von mindestens 50 um ergibt.
Die Dl offenbart somit nur elektrische Leitungsverbindungen mit einer Breite von minimal 50 um und diese minimale Breite wird benötigt, um während der Laserbestrahlung eine Phasenumwandlung zur Herstellung der Leitungsverbindung zu bewirken (vgl. Spalte 6, Zeilen 19 bis 27).
Zwar mag zur Verlustvermeidung grundsätzlich eine geringere Breite der elektrischen Leitungsverbindung wünschenswert zu sein, jedoch ist diese mit dem Verfahren der Dl nicht herstellbar. Erst mit dem erfindungsgemäßen Verfahren nach dem neuen Anspruch 8 lässt sich eine solch dünne e- lektrische Leitungs Verbindung mit Breiten von 0,01 um bis 40 um verwirklichen. Dies erfolgt dadurch, dass sich Elektrodenmaterial an der vertikalen Strukturierungskante während des asymmetrischen Strukturierungsschrittes anlagert.
Die US 4,517,403 A (D2) verwendet ebenfalls drei Strukturierungsschritte, wobei zum einen die transparente leitfähige Schicht 29 mittels Laserstrukturierung unterteilt wird (vgl. Sp. 5, letzter Abs.), danach eine schon strukturierte Rückseitenelektrode 22 aufgedruckt wird (vgl. Sp. 6, Z. 24- 28) und schließlich sowohl die Rückelektrode 22 als auch die photovoltaisch aktive Schicht mittels des Laserstrahls 56 erhitzt werden, wodurch Elektrodenmaterial in die aktive Schicht eindiffundiert und eine leitende Schicht 56 ausgebildet wird (vgl. Sp. 7, Z. 33-40).
Zur Vermeidung von Verunreinigungsproblemen bzw. Kurzschlussausbildungen schlägt die KR 2009 0067351 A (D3) ein Verfahren gemäß Fig. 4 vor, wo zwei Laserstrukturierungsschritte und ein Druckverfahren so angewendet werden, dass in einem ersten Laserstrukturierungsschritt die Front- 20 elektrode 120 strukturiert wird und in einem zweiten Laserstrukturierungsschritt gleichzeitig die Ausnehmungen 170 und 172 geschaffen werden, wobei im Druckverfahren dann nur die Ausnehmung 170 mit Material der Rückseitenelektrode verfüllt wird. Zur Durchführung des zweiten Laser- strukturierungsschrittes wird ein geteilter Laserstrahl entsprechend der Figuren 5 und 6 verwendet, der ggf. entsprechend der Figur 7 noch einer Strahlformung unterzogen wird. Die Strukturgrößen aus Anspruch 1 lassen sich mit dem Verfahren der D3 nicht erzeugen.
Hinsichtlich des Verfahrens scheinen im schriftlichen Bescheid die Verfahrensschritte der Figur 4 mit dem erzeugten Produkt nach Fig. 8 vermengt worden zu sein. In Fig. 8 besteht zwar ein direktes Angrenzen der Leitungsverbindung mit einer elektrischen Leitungsunterbrechung und in Fig. 4e liegt ein asymmetrischer Laserstrukturierungsschritt dahingehend vor, dass die Breite des Bereiches 170 größer zu sein scheint als die Breite des Bereiches 172. Allerdings lässt sich mit dem Verfahren nach Fig. 4 nicht der Gegenstand nach Fig. 8 herstellen und im Übrigen erfolgt auch keine gleichzeitig Erzeugung der elektrischen Leitungsverbindung und der elektrischen Leitungsunterbrechung, wie es von Anspruch 8 gefordert wird. Außerdem erfolgt beim erfindungsgemäßen Verfahren kein zusätzlicher Maskendruckschritt, sondern es werden ausschließlich zwei Laserstrukturierungsschritte vorgenommen. Im Übrigen weist die Lehre der D3 ausdrücklich von Kurzschlüsse erzeugendem Material weg, was aber in der vorliegenden Patentanmeldung gerade vorteilhaft zur Ausbildung der Leitungsverbindung genutzt wird.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/512,134 US9202966B2 (en) | 2009-11-25 | 2010-11-10 | Photovoltaic module structure and method for producing an electrically conductive connection |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009055675.3A DE102009055675B4 (de) | 2009-11-25 | 2009-11-25 | Photovoltaik-Modulstruktur für die Dünnschichtphotovoltaik mit einer elektrischen Leitungsverbindung und Verfahren zur Herstellung der elektrischen Leitungsverbindung |
DE102009055675.3 | 2009-11-25 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
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US13/391,589 A-371-Of-International US8896629B2 (en) | 2009-08-18 | 2010-08-13 | Method for representing virtual information in a real environment |
US14/502,366 Continuation US20150015611A1 (en) | 2009-08-18 | 2014-09-30 | Method for representing virtual information in a real environment |
Publications (3)
Publication Number | Publication Date |
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WO2011063894A2 WO2011063894A2 (de) | 2011-06-03 |
WO2011063894A3 WO2011063894A3 (de) | 2011-10-20 |
WO2011063894A4 true WO2011063894A4 (de) | 2011-12-15 |
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PCT/EP2010/006841 WO2011063894A2 (de) | 2009-11-25 | 2010-11-10 | Photovoltaik-modulstruktur und verfahren zum herstellen einer elektrisch leitenden verbindung zwischen zwei voneinander beabstandeten kontaktschichten, insbesondere in der photovoltaik-modulstruktur |
Country Status (3)
Country | Link |
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US (1) | US9202966B2 (de) |
DE (1) | DE102009055675B4 (de) |
WO (1) | WO2011063894A2 (de) |
Families Citing this family (2)
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DE102011104020A1 (de) * | 2011-06-11 | 2012-12-13 | Forschungszentrum Jülich GmbH | Verfahren zur Herstellung einer Kontaktschicht eines Solarmoduls und auf diese Weise hergestelltes Solarmodul |
WO2019232034A1 (en) * | 2018-05-30 | 2019-12-05 | Erten Eser | Thin-film photovoltaic device structure and method of monolithically interconnecting photovoltaic cells in modules utilizing such structure |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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US4517403A (en) * | 1983-05-16 | 1985-05-14 | Atlantic Richfield Company | Series connected solar cells and method of formation |
US4954181A (en) * | 1984-10-05 | 1990-09-04 | Fuji Electric Company Ltd. | Solar cell module and method of manufacture |
US4968354A (en) * | 1987-11-09 | 1990-11-06 | Fuji Electric Co., Ltd. | Thin film solar cell array |
DE4324318C1 (de) * | 1993-07-20 | 1995-01-12 | Siemens Ag | Verfahren zur Serienverschaltung einer integrierten Dünnfilmsolarzellenanordnung |
JP3653800B2 (ja) | 1995-06-15 | 2005-06-02 | 株式会社カネカ | 集積化薄膜太陽電池の製造方法 |
DE19934560B4 (de) * | 1999-07-22 | 2005-12-22 | Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg | Photovoltaikmodul mit integriert serienverschalteten Zellen und Herstellungsverfahren hierfür |
US20080047599A1 (en) * | 2006-03-18 | 2008-02-28 | Benyamin Buller | Monolithic integration of nonplanar solar cells |
WO2009076403A1 (en) * | 2007-12-13 | 2009-06-18 | First Solar, Inc. | Systems and methods of parallel interconnection of photovoltaic modules |
KR101368903B1 (ko) * | 2007-12-21 | 2014-03-04 | 주성엔지니어링(주) | 박막형 태양전지 및 그 제조방법 |
TWI426615B (zh) * | 2007-12-21 | 2014-02-11 | Jusung Eng Co Ltd | 薄膜型太陽能電池及其製造方法 |
-
2009
- 2009-11-25 DE DE102009055675.3A patent/DE102009055675B4/de not_active Expired - Fee Related
-
2010
- 2010-11-10 US US13/512,134 patent/US9202966B2/en not_active Expired - Fee Related
- 2010-11-10 WO PCT/EP2010/006841 patent/WO2011063894A2/de active Application Filing
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Publication number | Publication date |
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US9202966B2 (en) | 2015-12-01 |
US20120280349A1 (en) | 2012-11-08 |
DE102009055675B4 (de) | 2016-05-19 |
WO2011063894A2 (de) | 2011-06-03 |
WO2011063894A3 (de) | 2011-10-20 |
DE102009055675A1 (de) | 2011-05-26 |
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