WO2011046802A2 - Système de stockage et de distribution de matériau et procédé à ensemble de dégazage - Google Patents

Système de stockage et de distribution de matériau et procédé à ensemble de dégazage Download PDF

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Publication number
WO2011046802A2
WO2011046802A2 PCT/US2010/051786 US2010051786W WO2011046802A2 WO 2011046802 A2 WO2011046802 A2 WO 2011046802A2 US 2010051786 W US2010051786 W US 2010051786W WO 2011046802 A2 WO2011046802 A2 WO 2011046802A2
Authority
WO
WIPO (PCT)
Prior art keywords
evacuable
material receiving
chamber
receiving chamber
fluid
Prior art date
Application number
PCT/US2010/051786
Other languages
English (en)
Other versions
WO2011046802A3 (fr
WO2011046802A9 (fr
Inventor
Glenn Tom
Kevin T. O'dougherty
Original Assignee
Advanced Technology Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials, Inc. filed Critical Advanced Technology Materials, Inc.
Publication of WO2011046802A2 publication Critical patent/WO2011046802A2/fr
Publication of WO2011046802A3 publication Critical patent/WO2011046802A3/fr
Publication of WO2011046802A9 publication Critical patent/WO2011046802A9/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0036—Flash degasification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D83/00—Containers or packages with special means for dispensing contents
    • B65D83/0055—Containers or packages provided with a flexible bag or a deformable membrane or diaphragm for expelling the contents

Definitions

  • the present disclosure relates to improved material storage and/or dispensing systems and methods. More particularly, the present disclosure relates to improved material storage and/or dispensing systems and methods equipped with a degassing assembly.
  • the present disclosure in one embodiment, relates to a degassing apparatus which includes a material receiving chamber, plenum, bladder, bag, pouch, compartment, or the like configured to receive a material, for example but not limited to, a fluid containing medium, such as but not limited to, photoresist, etchant, dopant, chemical vapor deposition reagent, solvent, wafer or tool cleaning formulation, chemical mechanical polishing composition, etc., and an evacuable chamber, plenum, bladder, bag, pouch, compartment, or the like configured to have vacuum applied thereto.
  • the system can be constructed or implemented such that the material receiving and evacuable chambers are in at least partial contacting relationship or in a non-contacting relationship. However, other suitable configurations may be employed.
  • the present disclosure in another embodiment, relates to a material storage and/or dispensing system having the above-mentioned degassing apparatus.
  • the present disclosure in yet a further embodiment, relates to a method of degassing a fluid and/or reducing formation of microbubbles in, for example but not limited to, a fluid, such as but not limited to, photoresist, etchant, dopant, chemical vapor deposition reagent, solvent, wafer or tool cleaning formulation, chemical mechanical polishing composition, etc.
  • the method may include disposing a sleeve in a fluid-tight, leak-tight, or seal-tight manner around, or covering at least, a portion of a material receiving chamber and drawing a vacuum on or evacuating the sleeve.
  • the over sleeve may enclose at least a portion of the material receiving chamber and can be arranged in such a manner so as to expose or subject an outer surface or wall of the material receiving chamber to vacuum.
  • the over sleeve can include a side wall which is in contact or selective gas transfer relationship with an outer surface or wall (or a portion thereof) of the material receiving chamber and may extend peripherally and continuously (or non-continuously) around the material receiving chamber.
  • the inner wall of the over sleeve may create an additional barrier across which gas must travel to reach the evacuable cavity of the over sleeve.
  • FIG. 1 is a side sectional view of one embodiment of a material storage and/or dispensing system of the present disclosure.
  • FIG. 2 is a side sectional view of another embodiment of a material storage and/or dispensing system of the present disclosure.
  • FIG. 3 is a top sectional view of one embodiment of fitment assemblies of the embodiment of a material storage and/or dispensing system of FIG. 2.
  • the present disclosure relates to novel and advantageous material storage and/or dispensing systems and methods. Particularly, the present disclosure relates to novel and advantageous material storage and/or dispensing systems and methods equipped with a degassing assembly.
  • the various embodiments of the present disclosure may be particularly useful in pressure dispense systems or applications for reducing or eliminating microbubble formation, reducing or eliminating unwanted diffusion of gas into the material being stored/dispensed, and/or removing at least a portion of gas or air bubbles entrained or dissolved in the material.
  • a system 10 for storing and/or dispensing a material can comprise an overpack 11, container, vessel, tank, reactor, receptacle, or the like having an annular space 17 therein for receiving or accommodating a material receiving chamber 18 and an evacuable or degassing chamber 16.
  • the evacuable chamber 16 may include an interstitial space, which can be placed under vacuum. Although the use of vacuum can be desirable, in some embodiments, it is also contemplated that the degassing effect can be achieved by venting the evacuable chamber 16 to the ambient atmosphere or environment.
  • evacuable chamber 16 may be joined to a periphery of the material receiving chamber 18 generally at or near its access opening 20.
  • Access opening 20 can permit passage of materials and can be coupled to an outlet port of the overpack 11.
  • the access opening 20 can be attached to a fitment assembly 13, which in turn can be secured to the outlet port of the overpack 1 1.
  • any of a variety of other suitable techniques or mechanisms for securing the material receiving chamber 18 to a material discharge opening on the overpack 1 1 may be used, including with or without the use of a retainer 12 or fitment assembly 13.
  • a pressurization port 21 may be provided on the overpack 1 1 for filling the annular space 17 with a pressurizing fluid, for example but not limited to, air, nitrogen, gas, water, oil, etc., to compress the material receiving chamber 18 and thereby displace the material retained therein through the access opening 20 (or effect pressure dispensing of material). Additionally or alternatively, a pressurization port 21 may be provided on the overpack 1 1 for venting the annular space 17 to remove pressurizing fluid to, e.g., fill the material receiving chamber 18. The pressurization port 21 may be positioned in any suitable location on the overpack 11.
  • a pressurizing fluid for example but not limited to, air, nitrogen, gas, water, oil, etc.
  • a vacuum line 22 may be connected to the evacuable chamber 16, for example but not limited to, via a fitment assembly 15 for evacuating or drawing a vacuum in the interstitial space thereof to reduce or prevent ingress of gas or pressurizing fluid into the material receiving chamber 18 and/or allow egress of gas from within chamber 18.
  • the vacuum line 22 can pass through the pressurization port 21 or through another opening on the overpack 11 provided for that purposes for connection with a vacuum source, for example but not limited to, a vacuum pump, in-house vacuum supply, vacuum generating system, venturi, etc. In the case of the latter configuration, the vacuum line 22 can be sealingly passed through a separately formed opening.
  • a spacing member such as a porous insert or sheet of material can be disposed in the interstitial space of the evacuable chamber 16 or between the material receiving chamber 18 and evacuable chamber 16 to maintain a separation distance and thereby avoid or minimize choke-off.
  • at least one of the opposing walls of chamber 18 and chamber 16 may be provided with surface features including, for example but not limited to, surface roughness, protrusions, channels/grooves, depressions, etc., for minimizing or preventing choke-off, for example, when evacuating the evacuable chamber 16.
  • Material receiving chamber 18 and evacuable chamber 16 may each be constructed of a pliable or collapsible material, which can be compressed to a collapsed state by application of external force and can be expanded to a normally expanded state when compressive force is relieved or removed.
  • Material receiving chamber 18 and evacuable chamber 16 may each be constructed of a non-permeable, semi-permeable, or permeable material. Examples of suitable materials that can be used to fabricate the material receiving chamber 18 and/or the evacuable chamber 16 are described in, for example, published patent application WO 2006/1 16389, entitled “Material Storage and Dispensing Packages and Methods," the subject matter of which is hereby incorporated by reference herein in its entirety for all purposes.
  • Such materials may include, but are not limited to, polyethylene, polypropylene, polyvinylchloride, polyurethane, polymide, polytetrafluoroethylene, and compatible copolymers of monomers thereof, and laminates including at least one layer of such polymers or copolymers.
  • a system 30 for storing and/or dispensing a material can comprise an overpack 31, container, vessel, tank, reactor, receptacle, or the like having an annular space 37 therein for receiving or accommodating a material receiving chamber 38 and an evacuable or degassing chamber 36.
  • the evacuable chamber 36 may include an interstitial space, which can be placed under vacuum. Although the use of vacuum can be desirable, in some embodiments, it is also contemplated that the degassing effect can be achieved by venting the evacuable chamber 36 to the ambient atmosphere or environment.
  • At least a portion of the material receiving chamber 38 may be located or enclosed within the evacuable chamber 36 with the evacuable chamber 36 being secured or otherwise directly coupled to the overpack 31, for example but not limited to, via a separate fitment assembly 43 (see also FIG. 3) and correspondingly separate retaining mechanism(s) 42 disposed on the overpack 31.
  • Access opening 40 can permit passage of materials and can be coupled to an outlet port of the overpack 31.
  • the access opening 40 can be attached to a fitment assembly 33, which in turn can be secured to the outlet port of the overpack 31.
  • any of a variety of other suitable techniques or mechanisms for securing the material receiving chamber 38 to a material discharge opening on the overpack 31 may be used, including with or without the use of a retainer 32 or fitment assembly 33.
  • a pressurization port 41 may be provided on the overpack 31 for filling the annular space 37 with a pressurizing fluid, for example but not limited to, air, nitrogen, gas, water, oil, etc., to compress the material receiving chamber 38 and thereby displace the material retained therein through the access opening 40 (or effect pressure dispensing of material). Additionally or alternatively, a pressurization port 41 may be provided on the overpack 31 for venting the annular space 37 to remove pressurizing fluid to, e.g., fill the material receiving chamber 38. The pressurization port 41 may be positioned in any suitable location on the overpack 11.
  • a pressurizing fluid for example but not limited to, air, nitrogen, gas, water, oil, etc.
  • the evacuable chamber 36 can be evacuated or partially evacuated
  • a spacing member such as a porous insert or sheet of material can be disposed in the interstitial space of the evacuable chamber 36 or between the material receiving chamber 38 and evacuable chamber 36 to maintain a separation distance and thereby avoid or minimize choke-off.
  • a spacing member such as a porous insert or sheet of material can be disposed in the interstitial space of the evacuable chamber 36 or between the material receiving chamber 38 and evacuable chamber 36 to maintain a separation distance and thereby avoid or minimize choke-off.
  • at least one of the opposing walls of chamber 38 and chamber 36 may be provided with surface features including, for example but not limited to, surface roughness, protrusions, channels/grooves, depressions, etc., for minimizing or preventing choke-off, for example, when evacuating the evacuable chamber 36.
  • Material receiving chamber 38 and evacuable chamber 36 may each be constructed of a pliable or collapsible material, which can be compressed to a collapsed state by application of external force and can be expanded to a normally expanded state when compressive force is relieved or removed.
  • Material receiving chamber 18 and evacuable chamber 16 may each be constructed of a non-permeable, semi -permeable, or permeable material. Examples of suitable materials that can be used to fabricate the material receiving chamber 38 and/or the evacuable chamber 36 are described in, for example, published patent application WO 2006/1 16389, entitled “Material Storage and Dispensing Packages and Methods," the subject matter of which is hereby incorporated by reference herein in its entirety for all purposes.
  • Such materials may include, but are not limited to, polyethylene, polypropylene, polyvinylchloride, polyurethane, polymide, polytetrafluoroethylene, and compatible copolymers of monomers thereof, and laminates including at least one layer of such polymers or copolymers.
  • inventive embodiments described herein can be used to reduce the concentration of gas in the fluid containing medium as compared with pressure dispense systems or processes where in-situ degassing is not performed. It is also contemplated that one may reduce or eliminate the influx of gas into the fluid containing medium by as compared with pressure dispense systems or processes where in-situ degassing is not performed.
  • Psat may be used herein to describe the levels of gas in the fluid containing medium.
  • a Psat value of one (1) atmosphere means that the gas at one (1) atmosphere pressure is in equilibrium with the liquid.
  • the tendency to form new bubbles from the fluid containing medium or to change the size of bubbles in the fluid containing medium is substantially non-existent.
  • the gas used to drive the fluid from the overpack and bubbles for example, within the interstitial space and trapped in the folds of the liner, tend to dissolve into the liquid increasing the Psat level.
  • the various embodiments herein can lower the Psat level by extracting the gas and bubbles through the permeable internal liner and into the interstitial space between the material chamber and the evacuable chamber.
  • the greater the volume of the head space in the material chamber the greater the likelihood that the overlying gas will become entrained and/or solubilized in the fluid containing medium of the material chamber, since the fluid containing medium may be subjected to sloshing, splashing, and translation in the material receiving chamber, as well as impact of the material receiving chamber against the rigid surrounding container during transportation of the container.
  • This circumstance will in turn result in the formation of bubbles, microbubbles, and particulates in the fluid containing medium, which degrade the fluid containing medium, and render it potentially unsuitable for its intended purpose.
  • head space from the material receiving chamber can be removed before dispensing by applying a vacuum to the evacuable chamber.
  • Removing head space from the material receiving chamber can be done after filling the material receiving chamber and/or before dispensing the fluid containing medium from the material receiving chamber.

Abstract

La présente invention se rapporte à des systèmes et à des procédés qui comprennent une chambre de réception de matériau destinée à recevoir un matériau (par exemple, un agent contenant un fluide) et une chambre évacuable conçue pour y appliquer un vide, et qui sont conçus pour éliminer ou au moins réduire la formation de microbulles, pour éliminer au moins réduire la diffusion non souhaitée de gaz dans l'agent contenant un fluide stocké/distribué, et/ou pour retirer au moins une partie des bulles de gaz ou d'air entraînées ou dissoutes dans l'agent contenant un fluide. L'invention se rapporte également à des procédés consistant à commander ou à réduire la concentration de gaz dans le matériau qui peut être soumis à une pression extérieure au cours du stockage et/ou distribution.
PCT/US2010/051786 2009-10-14 2010-10-07 Système de stockage et de distribution de matériau et procédé à ensemble de dégazage WO2011046802A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US25143009P 2009-10-14 2009-10-14
US61/251,430 2009-10-14

Publications (3)

Publication Number Publication Date
WO2011046802A2 true WO2011046802A2 (fr) 2011-04-21
WO2011046802A3 WO2011046802A3 (fr) 2011-09-22
WO2011046802A9 WO2011046802A9 (fr) 2011-11-10

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Country Status (2)

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TW (1) TW201124311A (fr)
WO (1) WO2011046802A2 (fr)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8733598B2 (en) 2009-12-30 2014-05-27 Advanced Technology Materials, Inc. Closure/connector for liner-based dispense containers
US9062828B2 (en) 2010-10-27 2015-06-23 Advanced Technology Materials, Inc. Liner-based assembly for removing impurities
US9126749B2 (en) 2010-10-15 2015-09-08 Advanced Technology Materials, Inc. Connectors for liner-based dispense containers
US9637300B2 (en) 2010-11-23 2017-05-02 Entegris, Inc. Liner-based dispenser
US9695985B2 (en) 2012-02-24 2017-07-04 Entegris, Inc. Fluid delivery system and method
US9937687B2 (en) 2012-02-17 2018-04-10 Entegris, Inc. Polymer-based multilayer gas barrier film
US10155649B2 (en) 2013-10-18 2018-12-18 Entegris, Inc. Dip tube assemblies
WO2019005726A1 (fr) * 2017-06-26 2019-01-03 3M Innovative Properties Company Système de distribution d'additif liquide et procédés pour garantir sensiblement que seul un liquide est disposé à l'intérieur d'un récipient
US10245609B2 (en) 2013-11-26 2019-04-02 Entegris, Inc. Fitment and fitment adapter for dispensing systems and methods for manufacturing same
US10494169B2 (en) 2014-10-17 2019-12-03 Entegris, Inc. Packaging for dip tubes
USD898868S1 (en) 2018-09-12 2020-10-13 3M Innovative Properties Company Liquid delivery system lid
USD918339S1 (en) 2018-09-12 2021-05-04 3M Innovative Properties Company Liquid delivery system cup
USD919045S1 (en) 2018-09-12 2021-05-11 3M Innovative Properties Company Liquid delivery system coupler

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5957328A (en) * 1992-09-11 1999-09-28 Now Technologies, Inc. Liquid chemical dispensing and recirculating system
US6168048B1 (en) * 1998-09-22 2001-01-02 American Air Liquide, Inc. Methods and systems for distributing liquid chemicals
AU2001266617A1 (en) * 2000-05-29 2001-12-11 Fluoroware, Inc. Quick connect fill system
US20030168479A1 (en) * 2002-03-11 2003-09-11 Technology Resource International Corporation Method and apparatus for dispensing a fluid
DE10345818A1 (de) * 2003-09-30 2005-04-28 Boehringer Ingelheim Micropart Verfahren und Vorrichtung zum Separieren und Abführen von Gasblasen aus Flüssigkeiten
WO2006116389A2 (fr) * 2005-04-25 2006-11-02 Advanced Technology Materials, Inc. Conditionnements et methodes de stockage et de distribution de matieres
EP2388233B1 (fr) * 2005-06-06 2017-02-08 Advanced Technology Materials, Inc. Systèmes de stockage et de distribution de combustible et procédés

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8733598B2 (en) 2009-12-30 2014-05-27 Advanced Technology Materials, Inc. Closure/connector for liner-based dispense containers
US9126749B2 (en) 2010-10-15 2015-09-08 Advanced Technology Materials, Inc. Connectors for liner-based dispense containers
US9062828B2 (en) 2010-10-27 2015-06-23 Advanced Technology Materials, Inc. Liner-based assembly for removing impurities
US9631774B2 (en) 2010-10-27 2017-04-25 Entegris, Inc. Liner-based assembly for removing impurities
US9637300B2 (en) 2010-11-23 2017-05-02 Entegris, Inc. Liner-based dispenser
US9937687B2 (en) 2012-02-17 2018-04-10 Entegris, Inc. Polymer-based multilayer gas barrier film
US10495259B2 (en) 2012-02-24 2019-12-03 Entegris, Inc. Fluid delivery system and method
US9695985B2 (en) 2012-02-24 2017-07-04 Entegris, Inc. Fluid delivery system and method
US10155649B2 (en) 2013-10-18 2018-12-18 Entegris, Inc. Dip tube assemblies
US10245609B2 (en) 2013-11-26 2019-04-02 Entegris, Inc. Fitment and fitment adapter for dispensing systems and methods for manufacturing same
US10494169B2 (en) 2014-10-17 2019-12-03 Entegris, Inc. Packaging for dip tubes
WO2019005726A1 (fr) * 2017-06-26 2019-01-03 3M Innovative Properties Company Système de distribution d'additif liquide et procédés pour garantir sensiblement que seul un liquide est disposé à l'intérieur d'un récipient
US11207810B2 (en) 2017-06-26 2021-12-28 3M Innovative Properties Company Liquid additive delivery system and methods for ensuring substantially only a liquid is disposed within a container
USD898868S1 (en) 2018-09-12 2020-10-13 3M Innovative Properties Company Liquid delivery system lid
USD918339S1 (en) 2018-09-12 2021-05-04 3M Innovative Properties Company Liquid delivery system cup
USD919045S1 (en) 2018-09-12 2021-05-11 3M Innovative Properties Company Liquid delivery system coupler

Also Published As

Publication number Publication date
TW201124311A (en) 2011-07-16
WO2011046802A3 (fr) 2011-09-22
WO2011046802A9 (fr) 2011-11-10

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