WO2011018847A1 - Punch unit and tcp handling device - Google Patents

Punch unit and tcp handling device Download PDF

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Publication number
WO2011018847A1
WO2011018847A1 PCT/JP2009/064250 JP2009064250W WO2011018847A1 WO 2011018847 A1 WO2011018847 A1 WO 2011018847A1 JP 2009064250 W JP2009064250 W JP 2009064250W WO 2011018847 A1 WO2011018847 A1 WO 2011018847A1
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WO
WIPO (PCT)
Prior art keywords
tcp
punch
punched
collection case
sorting member
Prior art date
Application number
PCT/JP2009/064250
Other languages
French (fr)
Japanese (ja)
Inventor
寿 村野
崇之 鴫原
則男 神田
Original Assignee
株式会社アドバンテスト
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社アドバンテスト filed Critical 株式会社アドバンテスト
Priority to PCT/JP2009/064250 priority Critical patent/WO2011018847A1/en
Publication of WO2011018847A1 publication Critical patent/WO2011018847A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means

Definitions

  • the present invention collectively refers to devices manufactured by TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter, TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC devices.
  • TCP Transmission Carrier Package
  • COF Chip On Film
  • the present invention relates to a TCP handling device used for testing and a punch unit used for punching out TCP in the TCP handling device.
  • a test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter also referred to as “TCP handler”).
  • TCP handler transports a carrier tape in which a plurality of TCPs are formed on a tape (including the concept of film; the same applies hereinafter), and a pusher unit is attached to a probe of a probe card electrically connected to a test head. Is provided with a function of sequentially applying a plurality of TCPs to the test by pressing the carrier tape and bringing a TCP test pad into contact with the probe.
  • the TCP handler is provided with a punch unit for punching out a TCP that has been determined to be a defective product as a result of the test, after the pusher unit, and this punch unit removes the defective TCP from the carrier tape. ing.
  • the conventional punch unit 7P includes a punch drive source 71 such as an air cylinder, a punch 72, a die 73 through which the carrier tape 5 passes, and a device collection box 78P.
  • a punch drive source 71 such as an air cylinder
  • the punch 72 when the TCP to be removed comes to the punch unit 7P, the punch drive source 71 lowers the punch 72 to punch out the TCP, and the punched TCP is dropped into the device recovery box 78P and recovered. To do.
  • the present invention has been made in view of such a situation, and an object of the present invention is to provide a punch unit and a TCP handling device that can classify and collect punched TCP without providing a plurality of punch units.
  • the present invention is a TCP handling that transports a plurality of carrier tapes on which TCP is formed, sequentially applies the TCP to the test, and punches the TCP from the carrier tape based on the information of the test result.
  • a punch unit used in the apparatus comprising: a punch device for punching out TCP; and a recovery device for recovering TCP punched out by the punch device, wherein the recovery device moves the recovery case and the recovery case
  • a drive device that can handle, the collection case is provided with a plurality of accommodating portions for accommodating the TCP punched out by the punch device, by moving the collection case by the drive device, The TCP punched out by the punching device is classified and collected by the plurality of storage units. Providing a punch unit to symptoms (invention 1).
  • the punched TCP can be classified and recovered by moving the recovery case by the driving device without providing a plurality of punch units.
  • the drive device is a device that reciprocates a drive object
  • the collection case is provided to reciprocate by the drive device
  • the plurality of storage portions are:
  • the collection cases are provided side by side in the reciprocating direction, and the collection cases are reciprocated by the driving device, so that the punches punched out by the punch device are classified by the plurality of accommodating portions. You may make it collect
  • the drive device may be capable of vibrating the collection case (Invention 3).
  • the state in which the punched TCP is stacked on the housing portion of the recovery case can be eliminated by vibrating the recovery case by the driving device, and the punched TCP is bitten into the punch device. Can be prevented.
  • the drive device is a device that rotates and moves the object to be driven, the collection case is rotated by the drive device, and the rotation shaft of the rotation movement is
  • the punching device is provided so as to be perpendicular to a plane including the carrier tape, and the plurality of storage portions are provided in a circumferential direction in the rotating collection case, and the collection case is
  • the TCP punched out by the punching device may be classified and collected by the plurality of receiving units by rotating the driving device (invention 4), and the driving device rotates the driving object.
  • the recovery case is rotated by the drive device, and the rotational axis of the rotation is the punch device.
  • the plurality of accommodating portions are arranged in a circumferential direction in the rotating collection case, and the collection case is disposed in the drive device.
  • the TCPs punched out by the punching device may be classified and collected by the plurality of accommodating portions by rotating and moving according to (Invention 5).
  • the recovery device includes a cylindrical housing that covers the recovery case and has an opening through which the punched TCP can pass, and the recovery case is disposed inside the housing. It is preferable to rotate (Invention 6).
  • the present invention is a punch unit used in a TCP handling apparatus that transports a carrier tape on which a plurality of TCPs are formed, sequentially applies the TCP to a test, and punches the TCP from the carrier tape based on the information of the test result.
  • the collection case is provided with a plurality of accommodating portions for accommodating the TCP punched by the punch device. Punching by the punch device by moving by the driving device It was TCP provides a punching unit and recovering classified by the plurality of accommodating portions (invention 7).
  • the punched TCP can be classified and recovered by moving the sorting member by the driving device without providing a plurality of punch units.
  • the drive device is a device that reciprocates a drive object, and the sorting member is provided so as to reciprocate by the drive device,
  • the collection cases are arranged in the direction of the reciprocating movement, and the sorting members are reciprocated by the driving device to classify the TCP punched out by the punching device in the plurality of accommodating portions. You may make it collect
  • the sorting member may include at least one guide path capable of guiding TCP from the punch device side to the collection case side (Invention 9).
  • the sorting member may include a holding mechanism capable of temporarily holding the TCP punched out by the punching device in the sorting member (Invention 10).
  • the present invention is a TCP handling device that transports a carrier tape on which a plurality of TCPs are formed, sequentially applies the TCP to the test, and punches the TCP from the carrier tape by a punch device based on the information of the test result.
  • a TCP handling device comprising a plurality of receiving portions for collecting the TCP punched out by the punch device, and classifying and collecting the punched TCPs by moving the plurality of receiving portions; (Invention 11)
  • the punched TCPs can be classified and recovered by moving the plurality of accommodating portions without providing a plurality of punch devices.
  • the plurality of accommodating portions are provided in a movable collection case, and the punched TCP is classified by the plurality of accommodating portions by moving the collection case. It is preferable to collect (Invention 12).
  • the recovery case can be moved by a driving device, and the recovery case can be automatically moved by driving the driving device based on information of a test result.
  • Preferred Invention 13
  • the driving device is driven in advance in synchronism with the driving of the punch device or before the punch device is driven (Invention 14).
  • the present invention is a TCP handling device that transports a plurality of TCP carrier tapes, sequentially applies the TCP to a test, and punches the TCP from the carrier tape by a punch device based on the test result information.
  • a TCP handling device is provided that classifies and collects the punched TCP (Invention 15).
  • the punched TCP can be classified and recovered by moving the sorting member without providing a plurality of punch devices.
  • the sorting member can be moved by a driving device, and the sorting member can be automatically moved by driving the driving device based on information of a test result.
  • Preferred Invention 16).
  • the present invention is a TCP handling apparatus that transports a carrier tape on which a plurality of TCPs are formed, sequentially applies the TCP to the test, and punches out the TCP from the carrier tape based on the information of the test result, the punch unit
  • a TCP handling device comprising (Inventions 1 to 10) is provided (Invention 17).
  • the punched TCP can be classified and recovered without providing a plurality of punch units.
  • Such a TCP handling device is advantageous in terms of cost and space as compared with the case where a plurality of punch units are provided, and is easy to maintain and set.
  • FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to an embodiment of the present invention.
  • FIG. 2 is a side view of the punch unit in the TCP handler according to the embodiment.
  • FIG. 3 is a plan view of the punch unit recovery apparatus according to the embodiment.
  • FIG. 4 is a side view of a punch unit according to another embodiment.
  • FIG. 5 is a plan view of the punch unit recovery apparatus according to the embodiment.
  • FIG. 6 is a side view of a punch unit according to another embodiment.
  • FIG. 7 is a cross-sectional view (a cross-sectional view taken along the line AA in FIG. 8) of the punch unit recovery apparatus according to the embodiment.
  • FIG. 8 is a plan view of the punch unit recovery apparatus according to the embodiment.
  • FIG. 10A is a plan view of the sorting member of the punch unit according to the embodiment
  • FIG. 10B is a cross-sectional view of the sorting member (BB sectional view in FIG. 10A).
  • FIG. 11 is a side view of a punch unit according to still another embodiment.
  • FIG. 12 is a side view of a punch unit in a conventional TCP handler.
  • FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to the first embodiment of the present invention
  • FIG. 2 is a side view of a punch unit in the TCP handler according to the embodiment
  • 3 is a plan view of the punch unit recovery apparatus in the embodiment.
  • the TCP test apparatus 1 includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler 2 provided on the upper side of the test head 10.
  • the TCP handler 2 sequentially attaches each TCP formed on the carrier tape 5 to the test.
  • the X axis indicates the transport direction (left and right direction in FIG. 1) of the carrier tape 5 on the test head 10
  • the Y axis is a direction orthogonal to the X axis on the horizontal plane ( 1 indicates a direction penetrating the paper surface in FIG. 1
  • the Z axis indicates a vertical direction (vertical direction in FIG. 1).
  • the TCP handler 2 includes an unwinding reel 21 and a winding reel 22, and a carrier tape 5 before the test is wound around the unwinding reel 21.
  • the carrier tape 5 is unwound from the unwinding reel 21 and is wound around the winding reel 22 after being subjected to the test.
  • Each spacer roll 23a, 23b, 23c is vertically movable so that the tension of the protective tape 51 can be adjusted.
  • a tape guide 24a, an unwinding limit roller 25a, an in-side sub sprocket 25b, and an in-side guide roller 25c are provided below the unwinding reel 21, and the carrier tape 5 unwound from the unwinding reel 21 is While being guided by the tape guide 24a, it is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the in-side sub sprocket 25b, and the in-side guide roller 25c.
  • a tape guide 24b, a take-up limit roller 25f, an out-side sub-sprocket 25e, and an out-side guide roller 25d are provided below the take-up reel 22, and the carrier tape 5 after being subjected to the test is After being guided by the tape guide 24b through the out-side guide roller 25d, the out-side sub-sprocket 25e, and the take-up limit roller 25f, the take-up reel 22 is wound.
  • a pusher unit 3 is provided between the in-side guide roller 25c and the out-side guide roller 25d.
  • a servo motor 31 capable of rotating the ball screw 32 is attached to a frame (pusher frame) 36 of the pusher unit 3 via a bracket 361, and a pusher main body 33 to which the ball screw 32 is screwed.
  • LM guides linear motion guides
  • the pusher main body 33 is movable in the Z-axis direction while being guided by the LM guide 37 by driving the servo motor 31.
  • a suction plate 34 that can suck and hold the carrier tape 5 by sucking air.
  • a tension sprocket 35a is provided on the front side (upper side in FIG. 1) of the pusher main body 33, and a main sprocket 35b is provided on the rear side (lower side in FIG. 1) of the pusher main body 33.
  • the carrier tape 5 is held with a desired tension.
  • a probe card 8 is installed below the pusher unit 3 and above the test head 10.
  • the probe card 8 includes a plurality of probes 81 that come into contact with TCP external terminals (test pads), and each probe 81 is electrically connected to the tester body via the test head 10.
  • a punch unit 7 is provided at the subsequent stage of the pusher unit 3.
  • the punch unit 7 punches out a TCP that is determined to be defective as a result of the test.
  • the servo motor 31 of the pusher unit 3 is driven, and the suction plate 34 that sucks the carrier tape 5 is moved downward through the pusher main body portion 33.
  • the TCP on the tape 5 is pressed against the probe 81 of the probe card 8.
  • the punch unit 7 in the present embodiment includes a punch device 70 and a recovery device 74, and the punch device 70 includes a punch drive source 71, a punch 72, and a die 73.
  • the punch drive source 71 for example, an air cylinder, a hydraulic cylinder, other actuators or the like are used, and the punch 72 is reciprocated in the Z-axis direction.
  • the die 73 in this embodiment has a U-shape when viewed from the side, and the carrier tape 5 passes through the hollow portion.
  • the die 73 is formed with a through hole 731 into which the driven punch 72 is fitted.
  • the TCP punched out by fitting between the driven punch 72 and the through hole 731 of the die 73 is the through hole 731. Discharged from.
  • the collection device 74 in this embodiment includes a collection case 75 and a drive device 76 that moves the collection case 75.
  • the drive device 76 for example, an air cylinder, a hydraulic cylinder, a solenoid, another actuator, or the like is used.
  • the collection case 75 is reciprocated in the Y-axis direction via the piston 761 of the drive device 76.
  • the drive device 76 in the present embodiment has a function capable of vibrating the collection case 75.
  • the collection case 75 in this embodiment has a rectangular shape in plan view.
  • the collection case 75 is provided with a plurality (three in this embodiment) of accommodating portions 751 arranged in the reciprocating direction (Y-axis direction).
  • the collection case 75 reciprocates in the Y-axis direction.
  • the present invention is not limited to this, and the collection device 74 is provided so that the collection case 75 reciprocates in the X-axis direction. May be.
  • the TCP determined to be defective (a punching target) as a result of the test is categorized into three categories according to the type of defect.
  • the test result and the category information that it is defective are returned to the TCP handler 2 from the tester body, and transmitted to the control device of the punch unit 7 (the punch drive source 71 of the punch device 70 and the drive device 76 of the recovery device 74). Is done.
  • the punch device 70 When the punching target TCP arrives at the punch unit 7, the punch device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP.
  • the driving device 76 of the collection device 74 In synchronism with the driving of the punching device 70 or prior to the driving of the punching device 70, the driving device 76 of the collection device 74 is driven, and the accommodating portion 751 corresponding to a predetermined category is formed in the through hole 731 of the die 73.
  • the collection case 75 is moved so as to be positioned below. As a result, the punched predetermined category of TCP falls from the through hole 731 to the predetermined accommodating portion 751 and is accommodated.
  • the punched TCPs are classified by one punch unit 7 without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
  • the punched TCP gradually accumulates in the accommodating portion 751, and this pile of TCP is deep in the accommodating portion. Exceeding this may cause the TCP punched between the punch 72 and the through-hole 731 of the die 73 to bite and cause an operation error.
  • the collection case 75 is vibrated by the driving device 76 and the piles of the stacked TCP are broken to punch out between the punch 72 and the through hole 731 of the die 73. TCP is prevented from biting.
  • a vibration generating device different from the driving device 76 may be provided, and the collection case 75 may be vibrated by the vibration generating device.
  • FIG. 4 is a side view of the punch unit according to the second embodiment of the present invention
  • FIG. 5 is a plan view of the punch unit recovery apparatus according to the embodiment.
  • the punch unit 7A includes the same punching device 70 as the punching unit 7 in the first embodiment and a recovery device 74A.
  • the collection device 74A in the present embodiment includes a collection case 75A and a drive device 76A that rotates and moves the collection case 75A.
  • a rotating device such as a stepping motor or a servo motor is used, and in this embodiment, the collection case 75A is rotated and moved at a predetermined rotation angle via the rotating shaft 762A of the driving device 76A.
  • the collection case 75A in the present embodiment has a circular shape in plan view.
  • partition plates are provided in the radial direction, and thus a plurality (four in this embodiment) of fan-shaped accommodation portions 751A arranged side by side in the circumferential direction.
  • the collection device 74A in the present embodiment is provided so that the rotation shaft 762A of the drive device 76A is perpendicular to the plane including the carrier tape 5 in the punch unit 7A, that is, positioned in the Z-axis direction. ing.
  • TCP determined to be defective (punching target) as a result of the test is categorized into four categories according to the type of defect.
  • the test result and the category information that it is defective are returned to the TCP handler 2 from the tester body, and transmitted to the control device of the punch unit 7A (the punch drive source 71 of the punch device 70 and the drive device 76A of the recovery device 74A). Is done.
  • the punching device 70 When the punching target TCP has arrived at the punch unit 7A, the punching device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP.
  • the driving device 76A of the collecting device 74A In synchronism with the driving of the punching device 70 or before the driving of the punching device 70, the driving device 76A of the collecting device 74A is driven, and the accommodating portion 751A corresponding to a predetermined category is formed in the through hole 731 of the die 73.
  • the collection case 75A is rotationally moved so as to be positioned below. Thereby, the punched predetermined category of TCP falls from the through hole 731 and is accommodated in the predetermined accommodating portion 751A.
  • the punched TCP is classified by one punch unit 7A without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
  • FIG. 6 is a side view of a punch unit according to the third embodiment of the present invention
  • FIG. 7 is a cross-sectional view (AA cross-sectional view of FIG. 8) of the punch unit recovery apparatus according to the same embodiment.
  • FIG. 8 is a plan view of the punch unit recovery apparatus according to the embodiment.
  • the punch unit 7B includes the same punching device 70 as the punching unit 7 in the first embodiment and a recovery device 74B.
  • the recovery device 74B in the present embodiment includes a recovery case 75B, a drive device 76B that rotates the recovery case 75B, and a housing 77B that covers the recovery case 75B. .
  • the driving device 76B for example, a rotating device such as a stepping motor or a servo motor is used, and in this embodiment, the collection case 75B is rotated and moved at a predetermined rotation angle via the rotating shaft 762B of the driving device 76B.
  • the collection case 75B in the present embodiment is circular when viewed from the side.
  • a partition plate is provided in the collection case 75B in the radial direction, and a plurality of (four in the present embodiment) side-view fan-shaped accommodation portions 751B are arranged in the circumferential direction.
  • the collection device 74B in the present embodiment is provided so that the rotation shaft 762B of the drive device 76B is parallel to the plane including the carrier tape 5 in the punch unit 7B and is positioned in the X-axis direction. ing. However, the present invention is not limited to this, and the rotation shaft 762B of the driving device 76B is parallel to the plane including the carrier tape 5 in the punch unit 7B and is positioned in the Y-axis direction.
  • a recovery device 74B may be provided.
  • the housing 77B has a cylindrical shape, and the collection case 75B is configured to rotate inside the housing 77B.
  • the housing 77B is formed with an opening 771B through which the punched TCP can pass, and the collection device 74B is provided so that the opening 771B is located below the through hole 731 of the die 73.
  • TCP determined to be defective (punching target) as a result of the test is categorized into four categories according to the type of defect.
  • the test result and the category information that it is defective are returned to the TCP handler 2 from the tester body, and transmitted to the control device of the punch unit 7B (the punch drive source 71 of the punch device 70 and the drive device 76B of the recovery device 74B). Is done.
  • the punch device 70 When the punching target TCP comes to the punch unit 7B, the punch device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP.
  • the driving device 76B of the collecting device 74B In synchronism with the driving of the punching device 70 or prior to the driving of the punching device 70, the driving device 76B of the collecting device 74B is driven, and the accommodating portion 751B corresponding to a predetermined category becomes the through hole 731 ( The collection case 75B is rotated so as to be positioned below the opening 771B) of the housing 77B.
  • the punched predetermined category of TCP falls from the through hole 731 and the opening 771B to the predetermined accommodating portion 751B and is accommodated. Even if the collection case 75B containing the TCP rotates, the TCP does not fall out of the collection case 75B because of the housing 77B.
  • the punched TCPs are classified by one punch unit 7B without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
  • FIG. 10A, 9B, and 9C are side views of a punch unit according to the fourth embodiment of the present invention
  • FIG. 10A is a sorting member of the punch unit according to the embodiment
  • FIG. 10B is a cross-sectional view of the sorting member (a cross-sectional view taken along the line BB in FIG. 10A).
  • the punch unit 7C includes the same punch device 70 as the punch unit 7 in the first embodiment and a recovery device 74C.
  • the collection device 74C in this embodiment includes a collection case 75C, a sorting member 79C, and a drive device 76C that moves the sorting member 79C.
  • the collection case 75C and the drive device 76C in the present embodiment are the same as the collection case 75 and the drive device 76 in the first embodiment.
  • the sorting member 79C in the present embodiment is provided so as to be positioned between the die 73 of the punching device 70 and the collection case 75C.
  • the sorting member 79C has a rectangular shape in plan view.
  • the sorting member 79C has an inverted V-shaped (mountain) guide wall in side view.
  • Two parts 790C are provided. By these two guide wall portions 790C, three guide paths 791C capable of guiding the TCP punched out by the punching device 70 to the housing portion 751C are formed.
  • All the three guide paths 791C are formed so that the opening area gradually decreases from the punch device 70 side toward the collection case 75C side.
  • the opening 792C on the bottom surface of the guide path 791C has the same size as the upper surface opening of the housing portion 751C so that the TCP punched out by the punching device 70 can be reliably guided to the housing portion 751C corresponding to a predetermined category, or The size is smaller than that.
  • the slope constituting the guide wall portion 790C is formed with a large inclination toward the central opening 792C (close to the vertical) and a small inclination toward both the opening 792C at both ends (close to the horizontal). .
  • the guide wall portion 790C in this way, the TCP can be guided to the predetermined accommodating portion 751C even if the moving amount of the sorting member 79C is small. Therefore, the sorting member 79C can be moved in a short time.
  • three guide paths 791C are provided in accordance with the number of accommodating portions 751C provided in the collection case.
  • the guide paths 791C are not necessarily provided as such, and in this embodiment as well, sorting is performed.
  • the entire upper surface of the member 79C is open, the cross-sectional area is gradually narrowed toward the collection case 75C, and the opening 792C on the bottom surface is the same size as or smaller than the upper surface opening of the housing portion 751C. Only one such guiding path may be provided.
  • the sorting member 79C reciprocates in the Y-axis direction, but the present invention is not limited to this, and the collection device 74C is provided so that the sorting member 79C reciprocates in the X-axis direction. May be.
  • the TCP determined to be defective (a punching target) as a result of the test is categorized into three categories according to the type of defect.
  • the test result and the category information that it is defective are returned to the TCP handler 2 from the tester body and transmitted to the control unit of the punch unit 7C (the punch drive source 71 of the punch device 70 and the drive device 76C of the recovery device 74C). Is done.
  • the punch device 70 When the punching target TCP comes to the punch unit 7C, the punch device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP.
  • the driving device 76C of the collecting device 74C In synchronization with the driving of the punching device 70 or before the driving of the punching device 70, the driving device 76C of the collecting device 74C is driven, and the TCP that is punched from the through-hole 731 of the die 73 and falls is The sorting member 79C is moved so as to be guided to the accommodating portion 751C corresponding to the predetermined category through the guide path 791C.
  • the opening at the bottom surface of the guiding path 791C at the center of the sorting member 79C is moved so that 792C is positioned above the central accommodating portion 751C of the collection case 75C.
  • the opening 792C on the bottom surface of the left guiding path 791C of the sorting member 79C is formed.
  • the sorting member 79C is moved so as to be positioned above the accommodation portion 751C on the left side of the collection case 75C. Further, when the TCP that has been punched and dropped is accommodated in the right accommodating portion 751C of the collection case 75C, as shown in FIG. 9C, an opening in the bottom surface of the right guiding path 791C of the sorting member 79C. The sorting member 79C is moved so that 792C is positioned on the accommodation portion 751C on the right side of the collection case 75C.
  • the punched predetermined category of TCP falls from the through hole 731 of the die 73 to the predetermined accommodating portion 751C and is accommodated.
  • the punched TCP is classified by one punch unit 7 without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
  • FIG. 11 is a side view of a punch unit according to the fifth embodiment of the present invention.
  • the punch unit 7D includes the same punching device 70 as the punching unit 7 in the first embodiment and a recovery device 74D.
  • the collection device 74D in this embodiment includes a collection case 75D, a sorting member 79D, and a drive device 76D that moves the sorting member 79D.
  • the collection case 75D in the present embodiment is the same as the collection case 75 in the first embodiment.
  • the sorting member 79D is provided so as to be positioned between the die 73 of the punching device 70 and the collection case 75D.
  • the sorting member 79D in the present embodiment is formed in a box shape with the top opened, and a shutter 794D that can be opened and closed by sliding is provided at the bottom.
  • the shutter 794D forms the bottom of the sorting member 79D, and when the shutter 794D is opened, a through hole 793D through which the punched and falling TCP passes is formed.
  • the driving device 76D for example, an air cylinder, a hydraulic cylinder, a solenoid, and other actuators are used.
  • the sorting member 79D is reciprocated in the Y-axis direction via the piston 761D of the driving device 76D.
  • the shutter 794D is opened and closed through an arm (not shown).
  • the sorting member 79D reciprocates in the Y-axis direction, but the present invention is not limited to this, and a collection device 74D is provided so that the sorting member 79D reciprocates in the X-axis direction. Also good.
  • the TCP determined to be defective (a punching target) as a result of the test is categorized into three categories according to the type of defect.
  • the test result and the category information that it is defective are returned to the TCP handler 2 from the tester body, and transmitted to the control device of the punch unit 7D (the punch drive source 71 of the punch device 70 and the drive device 76D of the recovery device 74D). Is done.
  • the punch device 70 When the punching target TCP comes to the punch unit 7D, the punch device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP.
  • the punched TCP falls into the sorting member 79D with the shutter 794D closed.
  • the sorting member 79D is driven by the driving device 76D, and the sorting member 79D moves onto a predetermined accommodating portion 751D.
  • the shutter 794D is opened by the driving device 76D, and the punched TCP is dropped from the through hole 793D of the sorting member 79D into the predetermined accommodating portion 751D and accommodated.
  • the shutter 794D is closed by the driving device 76D, and the sorting member 79D is moved again below the through hole 731 of the die 73 of the punch device 70 to prepare for the next TCP to be punched. .
  • the punched TCP is classified by one punch unit 7 without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
  • the sorting member 79D only needs to have a mechanism capable of temporarily holding TCP, and the mechanism is not limited to the shutter 794D.
  • a rotatable member may be provided instead of the sliding shutter 794D.
  • the shutter 794D may not be provided, and the sorting member 79D itself may be rotatable.
  • a driving device for example, the driving devices 76A and 76B
  • the driving devices 76A and 76B that rotationally moves the driving object may be used instead of the driving device that reciprocates the driving object.
  • a mechanism that converts rotational motion into linear motion is used.
  • a driving device for example, the driving devices 76, 76C, and 76D
  • a driving device that reciprocally moves the driving object
  • a mechanism that converts linear motion into rotational motion is used.
  • rotation shafts 761A and 761B of the drive devices 76A and 76B and the rotation shafts of the collection cases 75A and 75B do not have to be in a straight line, and may be in parallel positions via gears or the like. You may do it.
  • the TCP handling device is useful for performing failure analysis and the like on the punched TCP based on the test results.

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Abstract

A punch unit (7) used for a TCP handler (2) which conveys a carrier tape (5) on which a plurality of TCPs are formed for testing the TCPs in order and which punches out the TCPs from the carrier tape (5) according to the information on the test results.  The punch unit comprises a punch device (70) for punching out the TCPs and a collection device (74) for collecting the TCPs punched out by the punch device (70).  The collection device (74) comprises a collection case (75) and a drive device (76) capable of moving the collection case (75).  A plurality of storage sections (751) for storing the TCPs punched out by the punch device (74) are formed in the collection case (75).  By moving the collection case (75) by the drive device (76), the TCPs punched out by the punch device (70) can be selectively collected by the plurality of storage sections (751).

Description

パンチユニットおよびＴＣＰハンドリング装置Punch unit and TCP handling device
　本発明は、ＩＣデバイスの１種であるＴＣＰ（Tape Carrier Package）やＣＯＦ（Chip On Film）（以下、ＴＣＰ、ＣＯＦ、その他ＴＡＢ（Tape Automated Bonding）実装技術によって製造されたデバイスを纏めて「ＴＣＰ」という。）を試験するのに用いられるＴＣＰハンドリング装置、および当該ＴＣＰハンドリング装置においてＴＣＰを打ち抜くのに使用されるパンチユニットに関するものである。 The present invention collectively refers to devices manufactured by TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter, TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC devices. The present invention relates to a TCP handling device used for testing and a punch unit used for punching out TCP in the TCP handling device.
　ＩＣデバイス等の電子部品の製造過程においては、最終的に製造されたＩＣデバイスやその中間段階にあるデバイス等の性能や機能を試験する電子部品試験装置が必要であり、ＴＣＰの場合には、ＴＣＰ用の試験装置が使用される。 In the manufacturing process of electronic components such as IC devices, an electronic component testing apparatus that tests the performance and functions of the finally manufactured IC devices and devices in its intermediate stage is necessary. In the case of TCP, A test apparatus for TCP is used.
　ＴＣＰ用の試験装置は、一般的にテスタ本体と、テストヘッドと、ＴＣＰハンドリング装置（以下「ＴＣＰハンドラ」という場合がある。）とから構成される。このＴＣＰハンドラは、テープ（フィルムの概念も含むものとする。以下同じ。）上にＴＣＰが複数形成されたキャリアテープを搬送して、テストヘッドに電気的に接続されているプローブカードのプローブにプッシャユニットによりキャリアテープを押圧し、ＴＣＰのテストパッドをプローブにコンタクトさせることにより、複数のＴＣＰを順次試験に付す機能を備えている。 A test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter also referred to as “TCP handler”). This TCP handler transports a carrier tape in which a plurality of TCPs are formed on a tape (including the concept of film; the same applies hereinafter), and a pusher unit is attached to a probe of a probe card electrically connected to a test head. Is provided with a function of sequentially applying a plurality of TCPs to the test by pressing the carrier tape and bringing a TCP test pad into contact with the probe.
　上記ＴＣＰハンドラは、プッシャユニットの後段に、試験の結果不良品であると判断されたＴＣＰを打ち抜くためのパンチユニットを備えており、このパンチユニットによって、不良品であるＴＣＰをキャリアテープから排除している。 The TCP handler is provided with a punch unit for punching out a TCP that has been determined to be a defective product as a result of the test, after the pusher unit, and this punch unit removes the defective TCP from the carrier tape. ing.
　図９に示すように、従来のパンチユニット７Ｐは、エアシリンダ等のパンチ駆動源７１と、パンチ７２と、キャリアテープ５が通過するダイ７３と、デバイス回収箱７８Ｐとを備えている。このパンチユニット７Ｐにおいては、除去対象のＴＣＰがパンチユニット７Ｐに来たときに、パンチ駆動源７１がパンチ７２を下降させて当該ＴＣＰを打ち抜き、打ち抜いたＴＣＰをデバイス回収箱７８Ｐに落下させて回収する。 As shown in FIG. 9, the conventional punch unit 7P includes a punch drive source 71 such as an air cylinder, a punch 72, a die 73 through which the carrier tape 5 passes, and a device collection box 78P. In this punch unit 7P, when the TCP to be removed comes to the punch unit 7P, the punch drive source 71 lowers the punch 72 to punch out the TCP, and the punched TCP is dropped into the device recovery box 78P and recovered. To do.
　ところで、あるＴＣＰについて試験の結果不良であると判断した場合、当該ＴＣＰの不良の種類にも色々ある。その不良の解析等を行うために、打ち抜いたＴＣＰを試験結果に基づいて分類して回収したいという要求がある。 By the way, when it is determined that a certain TCP is defective as a result of the test, there are various types of TCP defects. In order to analyze the failure and the like, there is a demand for sorting and collecting the punched TCP based on the test result.
　しかしながら、上記従来のパンチユニット７Ｐでは、打ち抜かれた全てのＴＣＰが一つのデバイス回収箱７８Ｐに入るため、打ち抜き対象のＴＣＰを試験結果に基づいてカテゴライズした場合でも、各カテゴリーに属するＴＣＰがデバイス回収箱７８Ｐ中で混ざってしまう。 However, in the conventional punch unit 7P, all punched TCPs enter one device collection box 78P. Therefore, even when the TCPs to be punched are categorized based on the test results, the TCPs belonging to each category are recovered by the device. It will be mixed in the box 78P.
　打ち抜いたＴＣＰが混ざるのを避けるために、それぞれのカテゴリーについて別個のパンチユニット７Ｐを設置することが考えられる。すなわち、一基のパンチユニット７Ｐにつき一つのカテゴリーを設定し、複数のパンチユニット７Ｐにより、各カテゴリーに属するＴＣＰを分けて回収することが考えられる。しかしながら、このように複数のパンチユニット７Ｐを設置する場合、コストが高くなり、メンテナンスや設定にも手間がかかることとなる。また、スペース的にもＴＣＰハンドラに設置できるパンチユニット７Ｐの数には制限がある。 In order to avoid mixing the punched TCP, it is conceivable to install a separate punch unit 7P for each category. That is, it is conceivable that one category is set for one punch unit 7P, and TCPs belonging to each category are separately collected by a plurality of punch units 7P. However, when a plurality of punch units 7P are installed in this manner, the cost increases, and maintenance and setting are troublesome. Also, the number of punch units 7P that can be installed in the TCP handler is limited in terms of space.
　本発明は、このような実状に鑑みてなされたものであり、パンチユニットを複数設けなくても、打ち抜いたＴＣＰを分類して回収することのできるパンチユニットおよびＴＣＰハンドリング装置を提供することを目的とする。 The present invention has been made in view of such a situation, and an object of the present invention is to provide a punch unit and a TCP handling device that can classify and collect punched TCP without providing a plurality of punch units. And
　上記目的を達成するために、第１に本発明は、ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいてキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置において用いられるパンチユニットであって、ＴＣＰを打ち抜くパンチ装置と、前記パンチ装置によって打ち抜いたＴＣＰを回収する回収装置とを備えており、前記回収装置は、回収ケースと、前記回収ケースを移動させることのできる駆動装置とを備えており、前記回収ケースには、前記パンチ装置によって打ち抜いたＴＣＰを収容する収容部が複数設けられており、前記回収ケースを前記駆動装置によって移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収することを特徴とするパンチユニットを提供する（発明１）。 In order to achieve the above object, first, the present invention is a TCP handling that transports a plurality of carrier tapes on which TCP is formed, sequentially applies the TCP to the test, and punches the TCP from the carrier tape based on the information of the test result. A punch unit used in the apparatus, comprising: a punch device for punching out TCP; and a recovery device for recovering TCP punched out by the punch device, wherein the recovery device moves the recovery case and the recovery case A drive device that can handle, the collection case is provided with a plurality of accommodating portions for accommodating the TCP punched out by the punch device, by moving the collection case by the drive device, The TCP punched out by the punching device is classified and collected by the plurality of storage units. Providing a punch unit to symptoms (invention 1).
　上記発明（発明１）によれば、パンチユニットを複数設けなくても、回収ケースを駆動装置によって移動させることにより、打ち抜いたＴＣＰを分類して回収することができる。 According to the above invention (Invention 1), the punched TCP can be classified and recovered by moving the recovery case by the driving device without providing a plurality of punch units.
　上記発明（発明１）において、前記駆動装置は、駆動対象物を往復移動させる装置であり、前記回収ケースは、前記駆動装置によって往復移動するように設けられており、前記複数の収容部は、前記回収ケースにおいて前記往復移動の方向に並べられて設けられており、前記回収ケースを前記駆動装置によって往復移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収するようにしてもよい（発明２）。 In the above invention (Invention 1), the drive device is a device that reciprocates a drive object, the collection case is provided to reciprocate by the drive device, and the plurality of storage portions are: The collection cases are provided side by side in the reciprocating direction, and the collection cases are reciprocated by the driving device, so that the punches punched out by the punch device are classified by the plurality of accommodating portions. You may make it collect | recover (invention 2).
　上記発明（発明２）において、前記駆動装置は、前記回収ケースを振動させることが可能となっていてもよい（発明３）。 In the above invention (Invention 2), the drive device may be capable of vibrating the collection case (Invention 3).
　上記発明（発明３）によれば、回収ケースを駆動装置によって振動させることにより、打ち抜いたＴＣＰが回収ケースの収容部に積み重なった状態を解消することができ、打ち抜いたＴＣＰがパンチ装置に咬み込まれることを防止することができる。 According to the above invention (invention 3), the state in which the punched TCP is stacked on the housing portion of the recovery case can be eliminated by vibrating the recovery case by the driving device, and the punched TCP is bitten into the punch device. Can be prevented.
　上記発明（発明１）において、前記駆動装置は、駆動対象物を回転移動させる装置であり、前記回収ケースは、前記駆動装置によって回転移動するように、かつ、当該回転移動の回転軸が、前記パンチ装置におけるキャリアテープを含む平面に対して垂直になるように設けられており、前記複数の収容部は、前記回転する回収ケースにおいて周方向に並べられて設けられており、前記回収ケースを前記駆動装置によって回転移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収するようにしてもよいし（発明４）、前記駆動装置は、駆動対象物を回転移動させる装置であり、前記回収ケースは、前記駆動装置によって回転移動するように、かつ、当該回転移動の回転軸が、前記パンチ装置におけるキャリアテープを含む平面に対して平行になるように設けられており、前記複数の収容部は、前記回転する回収ケースにおいて周方向に並べられて設けられており、前記回収ケースを前記駆動装置によって回転移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収するようにしてもよい（発明５）。 In the above invention (Invention 1), the drive device is a device that rotates and moves the object to be driven, the collection case is rotated by the drive device, and the rotation shaft of the rotation movement is The punching device is provided so as to be perpendicular to a plane including the carrier tape, and the plurality of storage portions are provided in a circumferential direction in the rotating collection case, and the collection case is The TCP punched out by the punching device may be classified and collected by the plurality of receiving units by rotating the driving device (invention 4), and the driving device rotates the driving object. The recovery case is rotated by the drive device, and the rotational axis of the rotation is the punch device. The plurality of accommodating portions are arranged in a circumferential direction in the rotating collection case, and the collection case is disposed in the drive device. The TCPs punched out by the punching device may be classified and collected by the plurality of accommodating portions by rotating and moving according to (Invention 5).
　上記発明（発明５）において、前記回収装置は、前記回収ケースをカバーするとともに、前記打ち抜いたＴＣＰが通過できる開口部を有する円筒状のハウジングを備えており、前記回収ケースは、前記ハウジング内を回転移動することが好ましい（発明６）。 In the above invention (Invention 5), the recovery device includes a cylindrical housing that covers the recovery case and has an opening through which the punched TCP can pass, and the recovery case is disposed inside the housing. It is preferable to rotate (Invention 6).
　第２に本発明は、ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいてキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置において用いられるパンチユニットであって、ＴＣＰを打ち抜くパンチ装置と、前記パンチ装置によって打ち抜いたＴＣＰを回収する回収装置とを備えており、前記回収装置は、回収ケースと、前記パンチ装置によって打ち抜いたＴＣＰを前記回収ケースに仕分けする仕分け部材と、前記仕分け部材を移動させることのできる駆動装置とを備えており、前記回収ケースには、前記パンチ装置によって打ち抜いたＴＣＰを収容する収容部が複数設けられており、前記仕分け部材を前記駆動装置によって移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収することを特徴とするパンチユニットを提供する（発明７）。 Secondly, the present invention is a punch unit used in a TCP handling apparatus that transports a carrier tape on which a plurality of TCPs are formed, sequentially applies the TCP to a test, and punches the TCP from the carrier tape based on the information of the test result. A punching device for punching out the TCP and a recovery device for recovering the TCP punched out by the punching device, wherein the recovery device sorts the recovery case and the TCP punched out by the punching device into the recovery case A sorting member; and a driving device capable of moving the sorting member. The collection case is provided with a plurality of accommodating portions for accommodating the TCP punched by the punch device. Punching by the punch device by moving by the driving device It was TCP provides a punching unit and recovering classified by the plurality of accommodating portions (invention 7).
　上記発明（発明７）によれば、パンチユニットを複数設けなくても、仕分け部材を駆動装置によって移動させることにより、打ち抜いたＴＣＰを分類して回収することができる。 According to the above invention (Invention 7), the punched TCP can be classified and recovered by moving the sorting member by the driving device without providing a plurality of punch units.
　上記発明（発明７）において、前記駆動装置は、駆動対象物を往復移動させる装置であり、前記仕分け部材は、前記駆動装置によって往復移動するように設けられており、前記複数の収容部は、前記回収ケースにおいて前記往復移動の方向に並べられて設けられており、前記仕分け部材を前記駆動装置によって往復移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収するようにしてもよい（発明８）。 In the above invention (Invention 7), the drive device is a device that reciprocates a drive object, and the sorting member is provided so as to reciprocate by the drive device, The collection cases are arranged in the direction of the reciprocating movement, and the sorting members are reciprocated by the driving device to classify the TCP punched out by the punching device in the plurality of accommodating portions. You may make it collect | recover (invention 8).
　上記発明（発明７，８）において、前記仕分け部材は、前記パンチ装置側から前記回収ケース側にＴＣＰを誘導することのできる誘導路を、少なくとも一つ備えていてもよい（発明９）。 In the above inventions (Inventions 7 and 8), the sorting member may include at least one guide path capable of guiding TCP from the punch device side to the collection case side (Invention 9).
　上記発明（発明７，８，９）において、前記仕分け部材は、前記パンチ装置によって打ち抜いたＴＣＰを、前記仕分け部材において一時的に保持することができる保持機構を備えてもよい（発明１０）。 In the above inventions (Inventions 7, 8, and 9), the sorting member may include a holding mechanism capable of temporarily holding the TCP punched out by the punching device in the sorting member (Invention 10).
　第３に本発明は、ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいて、パンチ装置によりキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置であって、前記パンチ装置によって打ち抜いたＴＣＰを回収する収容部が複数設けられており、前記複数の収容部を移動させることにより、前記打ち抜いたＴＣＰを分類して回収することを特徴とするＴＣＰハンドリング装置を提供する（発明１１）。 Thirdly, the present invention is a TCP handling device that transports a carrier tape on which a plurality of TCPs are formed, sequentially applies the TCP to the test, and punches the TCP from the carrier tape by a punch device based on the information of the test result. A TCP handling device comprising a plurality of receiving portions for collecting the TCP punched out by the punch device, and classifying and collecting the punched TCPs by moving the plurality of receiving portions; (Invention 11)
　上記発明（発明１１）によれば、パンチ装置を複数設けなくても、複数の収容部を移動させることにより、打ち抜いたＴＣＰを分類して回収することができる。 According to the above invention (Invention 11), the punched TCPs can be classified and recovered by moving the plurality of accommodating portions without providing a plurality of punch devices.
　上記発明（発明１１）において、前記複数の収容部は、移動可能な回収ケースに設けられており、前記回収ケースを移動させることにより、前記打ち抜いたＴＣＰを前記複数の収容部にて分類して回収することが好ましい（発明１２）。 In the above invention (invention 11), the plurality of accommodating portions are provided in a movable collection case, and the punched TCP is classified by the plurality of accommodating portions by moving the collection case. It is preferable to collect (Invention 12).
　上記発明（発明１２）において、前記回収ケースは、駆動装置によって移動可能となっており、試験結果の情報に基づいて前記駆動装置を駆動することにより、前記回収ケースは自動的に移動することが好ましい（発明１３）。 In the above invention (Invention 12), the recovery case can be moved by a driving device, and the recovery case can be automatically moved by driving the driving device based on information of a test result. Preferred (Invention 13).
　上記発明（発明１３）において、前記駆動装置は、前記パンチ装置の駆動と同期して、または前記パンチ装置の駆動前に事前に駆動することが好ましい（発明１４）。 In the above invention (Invention 13), it is preferable that the driving device is driven in advance in synchronism with the driving of the punch device or before the punch device is driven (Invention 14).
　第４に本発明は、ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいて、パンチ装置によりキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置であって、前記パンチ装置によって打ち抜いたＴＣＰを回収する収容部が複数設けられているとともに、前記パンチ装置によって打ち抜いたＴＣＰを前記収容部に仕分けする仕分け部材が設けられており、前記仕分け部材を移動させることにより、前記打ち抜いたＴＣＰを分類して回収することを特徴とするＴＣＰハンドリング装置を提供する（発明１５）。 Fourthly, the present invention is a TCP handling device that transports a plurality of TCP carrier tapes, sequentially applies the TCP to a test, and punches the TCP from the carrier tape by a punch device based on the test result information. A plurality of receiving portions for collecting the TCP punched out by the punching device, and a sorting member for sorting the TCP punched out by the punching device into the containing portion, and moving the sorting member Thus, a TCP handling device is provided that classifies and collects the punched TCP (Invention 15).
　上記発明（発明１５）によれば、パンチ装置を複数設けなくても、仕分け部材を移動させることにより、打ち抜いたＴＣＰを分類して回収することができる。 According to the above invention (Invention 15), the punched TCP can be classified and recovered by moving the sorting member without providing a plurality of punch devices.
　上記発明（発明１５）において、前記仕分け部材は、駆動装置によって移動可能となっており、試験結果の情報に基づいて前記駆動装置を駆動することにより、前記仕分け部材は自動的に移動することが好ましい（発明１６）。 In the above invention (Invention 15), the sorting member can be moved by a driving device, and the sorting member can be automatically moved by driving the driving device based on information of a test result. Preferred (Invention 16).
　第５に本発明は、ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいてキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置であって、前記パンチユニット（発明１～１０）を備えたことを特徴とするＴＣＰハンドリング装置を提供する（発明１７）。 Fifthly, the present invention is a TCP handling apparatus that transports a carrier tape on which a plurality of TCPs are formed, sequentially applies the TCP to the test, and punches out the TCP from the carrier tape based on the information of the test result, the punch unit A TCP handling device comprising (Inventions 1 to 10) is provided (Invention 17).
　本発明のパンチユニットおよびＴＣＰハンドリング装置によれば、パンチユニットを複数設けなくても、打ち抜いたＴＣＰを分類して回収することができる。かかるＴＣＰハンドリング装置は、パンチユニットを複数設ける場合と比較して、コスト面でもスペース面でも有利であり、また、メンテナンスや設定も容易である。 According to the punch unit and the TCP handling device of the present invention, the punched TCP can be classified and recovered without providing a plurality of punch units. Such a TCP handling device is advantageous in terms of cost and space as compared with the case where a plurality of punch units are provided, and is easy to maintain and set.
図１は、本発明の一実施形態に係るＴＣＰハンドラを用いたＴＣＰ試験装置を示す正面図である。FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to an embodiment of the present invention. 図２は、同実施形態に係るＴＣＰハンドラにおけるパンチユニットの側面図である。FIG. 2 is a side view of the punch unit in the TCP handler according to the embodiment. 図３は、同実施形態におけるパンチユニットの回収装置の平面図である。FIG. 3 is a plan view of the punch unit recovery apparatus according to the embodiment. 図４は、他の実施形態に係るパンチユニットの側面図である。FIG. 4 is a side view of a punch unit according to another embodiment. 図５は、同実施形態に係るパンチユニットの回収装置の平面図である。FIG. 5 is a plan view of the punch unit recovery apparatus according to the embodiment. 図６は、別の実施形態に係るパンチユニットの側面図である。FIG. 6 is a side view of a punch unit according to another embodiment. 図７は、同実施形態に係るパンチユニットの回収装置の断面図（図８におけるＡ－Ａ断面図）である。FIG. 7 is a cross-sectional view (a cross-sectional view taken along the line AA in FIG. 8) of the punch unit recovery apparatus according to the embodiment. 図８は、同実施形態に係るパンチユニットの回収装置の平面図である。FIG. 8 is a plan view of the punch unit recovery apparatus according to the embodiment. 図９（ａ）～（ｃ）は、さらに別の実施形態に係るパンチユニットの側面図である。9A to 9C are side views of a punch unit according to still another embodiment. 図１０（ａ）は、同実施形態に係るパンチユニットの仕分け部材の平面図、図１０（ｂ）は、同仕分け部材の断面図（図１０（ａ）におけるＢ－Ｂ断面図）である。FIG. 10A is a plan view of the sorting member of the punch unit according to the embodiment, and FIG. 10B is a cross-sectional view of the sorting member (BB sectional view in FIG. 10A). 図１１は、さらに別の実施形態に係るパンチユニットの側面図である。FIG. 11 is a side view of a punch unit according to still another embodiment. 図１２は、従来のＴＣＰハンドラにおけるパンチユニットの側面図である。FIG. 12 is a side view of a punch unit in a conventional TCP handler.
１…ＴＣＰ試験装置
２…ＴＣＰハンドラ（ＴＣＰハンドリング装置）
５…キャリアテープ
７，７Ａ，７Ｂ，７Ｃ，７Ｄ，７Ｐ…パンチユニット
　７０…パンチ装置
　７４，７４Ａ，７４Ｂ，７４Ｃ，７４Ｄ…回収装置
　　７５，７５Ａ，７５Ｂ，７５Ｃ，７５Ｄ…回収ケース
　　７５１，７５１Ａ，７５１Ｂ，７５１Ｃ，７５１Ｄ…収容部
　　７６，７６Ａ，７６Ｂ，７６Ｃ，７６Ｄ…駆動装置
　　７７Ｂ…ハウジング
　　７９Ｃ，７９Ｄ…仕分け部材 DESCRIPTION OF SYMBOLS 1 ... TCP test apparatus 2 ... TCP handler (TCP handling apparatus)
5 ... Carrier tape 7, 7A, 7B, 7C, 7D, 7P ... Punch unit 70 ... Punch device 74, 74A, 74B, 74C, 74D ... Collection device 75, 75A, 75B, 75C, 75D ... Collection case 751, 751A, 751B, 751C, 751D ... Housing portion 76, 76A, 76B, 76C, 76D ... Drive device 77B ... Housing 79C, 79D ... Sorting member
　以下、本発明の実施形態を図面に基づいて詳細に説明する。
〔第１の実施形態〕
　図１は、本発明の第１の実施形態に係るＴＣＰハンドラを用いたＴＣＰ試験装置を示す正面図であり、図２は、同実施形態に係るＴＣＰハンドラにおけるパンチユニットの側面図であり、図３は、同実施形態におけるパンチユニットの回収装置の平面図である。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[First Embodiment]
FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to the first embodiment of the present invention, and FIG. 2 is a side view of a punch unit in the TCP handler according to the embodiment. 3 is a plan view of the punch unit recovery apparatus in the embodiment. FIG.
　ＴＣＰ試験装置１は、図示しないテスタ本体と、テスタ本体に電気的に接続されたテストヘッド１０と、テストヘッド１０の上側に設けられたＴＣＰハンドラ２とから構成される。ＴＣＰハンドラ２は、キャリアテープ５上に複数形成された各ＴＣＰを順次試験に付すものである。 The TCP test apparatus 1 includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler 2 provided on the upper side of the test head 10. The TCP handler 2 sequentially attaches each TCP formed on the carrier tape 5 to the test.
　なお、本実施形態に係るＴＣＰハンドラ２において、Ｘ軸は、テストヘッド１０上のキャリアテープ５の搬送方向（図１中左右方向）を示し、Ｙ軸は、水平面においてＸ軸と直交する方向（図１中紙面を貫通する方向）を示し、Ｚ軸は、垂直方向（図１中上下方向）を示す。 In the TCP handler 2 according to the present embodiment, the X axis indicates the transport direction (left and right direction in FIG. 1) of the carrier tape 5 on the test head 10, and the Y axis is a direction orthogonal to the X axis on the horizontal plane ( 1 indicates a direction penetrating the paper surface in FIG. 1, and the Z axis indicates a vertical direction (vertical direction in FIG. 1).
　ＴＣＰハンドラ２は、巻出リール２１と巻取リール２２とを備えており、巻出リール２１には試験前のキャリアテープ５が巻き取られている。キャリアテープ５は、巻出リール２１から巻き出され、試験に付された後に巻取リール２２に巻き取られる。 The TCP handler 2 includes an unwinding reel 21 and a winding reel 22, and a carrier tape 5 before the test is wound around the unwinding reel 21. The carrier tape 5 is unwound from the unwinding reel 21 and is wound around the winding reel 22 after being subjected to the test.
　巻出リール２１と巻取リール２２との間には、キャリアテープ５から剥離した保護テープ５１を巻出リール２１から巻取リール２２に架け渡す３個のスペーサロール２３ａ，２３ｂ，２３ｃが設けられている。各スペーサロール２３ａ，２３ｂ，２３ｃは、保護テープ５１の張力を調整することができるように、それぞれ上下可動となっている。 Between the unwinding reel 21 and the take-up reel 22, three spacer rolls 23 a, 23 b, and 23 c are provided that bridge the protective tape 51 peeled from the carrier tape 5 from the unwinding reel 21 to the take-up reel 22. ing. Each spacer roll 23a, 23b, 23c is vertically movable so that the tension of the protective tape 51 can be adjusted.
　巻出リール２１の下側には、テープガイド２４ａ、巻出リミットローラ２５ａ、イン側サブスプロケット２５ｂおよびイン側ガイドローラ２５ｃが設けられており、巻出リール２１から巻き出されたキャリアテープ５は、テープガイド２４ａによってガイドされつつ、巻出リミットローラ２５ａ、イン側サブスプロケット２５ｂおよびイン側ガイドローラ２５ｃを経てプッシャユニット３に搬送される。 A tape guide 24a, an unwinding limit roller 25a, an in-side sub sprocket 25b, and an in-side guide roller 25c are provided below the unwinding reel 21, and the carrier tape 5 unwound from the unwinding reel 21 is While being guided by the tape guide 24a, it is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the in-side sub sprocket 25b, and the in-side guide roller 25c.
　また、巻取リール２２の下側には、テープガイド２４ｂ、巻取リミットローラ２５ｆ、アウト側サブスプロケット２５ｅおよびアウト側ガイドローラ２５ｄが設けられており、試験に付された後のキャリアテープ５は、アウト側ガイドローラ２５ｄ、アウト側サブスプロケット２５ｅおよび巻取リミットローラ２５ｆを経て、テープガイド２４ｂによってガイドされつつ、巻取リール２２に巻き取られる。 A tape guide 24b, a take-up limit roller 25f, an out-side sub-sprocket 25e, and an out-side guide roller 25d are provided below the take-up reel 22, and the carrier tape 5 after being subjected to the test is After being guided by the tape guide 24b through the out-side guide roller 25d, the out-side sub-sprocket 25e, and the take-up limit roller 25f, the take-up reel 22 is wound.
　イン側ガイドローラ２５ｃと、アウト側ガイドローラ２５ｄとの間には、プッシャユニット３が設けられている。プッシャユニット３のフレーム（プッシャフレーム）３６には、ボールねじ３２を回転させることのできるサーボモータ３１がブラケット３６１を介して取り付けられているとともに、ボールねじ３２が螺合しているプッシャ本体部３３が２本のＺ軸方向のリニアモーションガイド（以下「ＬＭガイド」という。）３７を介して取り付けられている。このプッシャ本体部３３は、サーボモータ３１を駆動させることにより、ＬＭガイド３７にガイドされながらＺ軸方向に移動可能となっている。 A pusher unit 3 is provided between the in-side guide roller 25c and the out-side guide roller 25d. A servo motor 31 capable of rotating the ball screw 32 is attached to a frame (pusher frame) 36 of the pusher unit 3 via a bracket 361, and a pusher main body 33 to which the ball screw 32 is screwed. Are attached via two linear motion guides (hereinafter referred to as “LM guides”) 37 in the Z-axis direction. The pusher main body 33 is movable in the Z-axis direction while being guided by the LM guide 37 by driving the servo motor 31.
　このプッシャ本体部３３の下端部には、エアを吸引することによりキャリアテープ５を吸着保持することのできる吸着プレート３４が設けられている。 At the lower end of the pusher body 33, there is provided a suction plate 34 that can suck and hold the carrier tape 5 by sucking air.
　プッシャ本体部３３の前段側（図１中上側）には、テンションスプロケット３５ａが設けられており、プッシャ本体部３３の後段側（図１中下側）には、メインスプロケット３５ｂが設けられており、所望の張力でキャリアテープ５を保持するようになっている。 A tension sprocket 35a is provided on the front side (upper side in FIG. 1) of the pusher main body 33, and a main sprocket 35b is provided on the rear side (lower side in FIG. 1) of the pusher main body 33. The carrier tape 5 is held with a desired tension.
　一方、図１に示すように、プッシャユニット３の下側であって、テストヘッド１０の上部には、プローブカード８が設置されている。プローブカード８は、ＴＣＰの外部端子（テストパッド）と接触するプローブ８１を複数備えており、各プローブ８１は、テストヘッド１０を介してテスタ本体に電気的に接続されている。 On the other hand, as shown in FIG. 1, a probe card 8 is installed below the pusher unit 3 and above the test head 10. The probe card 8 includes a plurality of probes 81 that come into contact with TCP external terminals (test pads), and each probe 81 is electrically connected to the tester body via the test head 10.
　また、図１に示すように、プッシャユニット３の後段には、パンチユニット７が設けられている。パンチユニット７は、試験の結果不良品であると判断されたＴＣＰを打ち抜くものである。 Further, as shown in FIG. 1, a punch unit 7 is provided at the subsequent stage of the pusher unit 3. The punch unit 7 punches out a TCP that is determined to be defective as a result of the test.
　試験を行う際には、プッシャユニット３のサーボモータ３１が駆動し、プッシャ本体部３３を介して、キャリアテープ５を吸着した吸着プレート３４をＺ軸下方向に移動させ、吸着プレート３４は、キャリアテープ５上のＴＣＰをプローブカード８のプローブ８１に対して押圧する。 When the test is performed, the servo motor 31 of the pusher unit 3 is driven, and the suction plate 34 that sucks the carrier tape 5 is moved downward through the pusher main body portion 33. The TCP on the tape 5 is pressed against the probe 81 of the probe card 8.
　ＴＣＰのテストパッドがプローブ８１にコンタクトしたら、ＴＣＰにはテスタ本体からテストヘッド１０を通じてテスト信号が印加され、ＴＣＰから読み出された応答信号は、テストヘッド１０を通じてテスタ本体に送られる。これによりＴＣＰの性能や機能等が試験され、その試験結果に基づいて、パンチユニット７が駆動することとなる。 When the TCP test pad contacts the probe 81, a test signal is applied to the TCP from the tester body through the test head 10, and the response signal read from the TCP is sent to the tester body through the test head 10. As a result, the performance, function, etc. of the TCP are tested, and the punch unit 7 is driven based on the test result.
　本実施形態におけるパンチユニット７は、図２に示すように、パンチ装置７０と、回収装置７４とを備えており、パンチ装置７０は、パンチ駆動源７１と、パンチ７２と、ダイ７３とを備えている。パンチ駆動源７１としては、例えば、エアシリンダ、油圧シリンダ、その他のアクチュエータ等が使用され、パンチ７２をＺ軸方向に往復移動させる。 As shown in FIG. 2, the punch unit 7 in the present embodiment includes a punch device 70 and a recovery device 74, and the punch device 70 includes a punch drive source 71, a punch 72, and a die 73. ing. As the punch drive source 71, for example, an air cylinder, a hydraulic cylinder, other actuators or the like are used, and the punch 72 is reciprocated in the Z-axis direction.
　本実施形態におけるダイ７３は、図２に示すように、側面視コの字状になっており、その中空部分をキャリアテープ５が通過するようになっている。ダイ７３には、駆動されたパンチ７２が嵌合する貫通穴７３１が形成されており、駆動されたパンチ７２とダイ７３の貫通穴７３１との嵌合によって打ち抜かれたＴＣＰは、当該貫通穴７３１から排出される。 As shown in FIG. 2, the die 73 in this embodiment has a U-shape when viewed from the side, and the carrier tape 5 passes through the hollow portion. The die 73 is formed with a through hole 731 into which the driven punch 72 is fitted. The TCP punched out by fitting between the driven punch 72 and the through hole 731 of the die 73 is the through hole 731. Discharged from.
　本実施形態における回収装置７４は、図１および図２に示すように、回収ケース７５と、その回収ケース７５を移動させる駆動装置７６とを備えている。駆動装置７６としては、例えば、エアシリンダ、油圧シリンダ、ソレノイド、その他のアクチュエータ等が使用され、本実施形態では駆動装置７６のピストン７６１を介して回収ケース７５をＹ軸方向に往復移動させる。また、本実施形態における駆動装置７６は、回収ケース７５を振動させることのできる機能を有する。 As shown in FIGS. 1 and 2, the collection device 74 in this embodiment includes a collection case 75 and a drive device 76 that moves the collection case 75. As the drive device 76, for example, an air cylinder, a hydraulic cylinder, a solenoid, another actuator, or the like is used. In this embodiment, the collection case 75 is reciprocated in the Y-axis direction via the piston 761 of the drive device 76. Further, the drive device 76 in the present embodiment has a function capable of vibrating the collection case 75.
　本実施形態における回収ケース７５は、平面視矩形となっている。この回収ケース７５には、複数（本実施形態では３つ）の収容部７５１が、上記往復移動の方向（Ｙ軸方向）に並べられて設けられている。 The collection case 75 in this embodiment has a rectangular shape in plan view. The collection case 75 is provided with a plurality (three in this embodiment) of accommodating portions 751 arranged in the reciprocating direction (Y-axis direction).
　なお、本実施形態では、回収ケース７５はＹ軸方向に往復移動するが、本発明はこれに限定されることなく、回収ケース７５がＸ軸方向に往復移動するように、回収装置７４が設けられてもよい。 In this embodiment, the collection case 75 reciprocates in the Y-axis direction. However, the present invention is not limited to this, and the collection device 74 is provided so that the collection case 75 reciprocates in the X-axis direction. May be.
　本実施形態では、試験の結果不良（打ち抜き対象）と判断したＴＣＰを、不良の種類に応じて３つの分類にカテゴライズするものとする。不良であるとの試験結果およびそのカテゴリーの情報は、テスタ本体からＴＣＰハンドラ２に戻され、パンチユニット７（パンチ装置７０のパンチ駆動源７１および回収装置７４の駆動装置７６）の制御装置に伝達される。 In this embodiment, it is assumed that the TCP determined to be defective (a punching target) as a result of the test is categorized into three categories according to the type of defect. The test result and the category information that it is defective are returned to the TCP handler 2 from the tester body, and transmitted to the control device of the punch unit 7 (the punch drive source 71 of the punch device 70 and the drive device 76 of the recovery device 74). Is done.
　その打ち抜き対象のＴＣＰがパンチユニット７に来たときに、パンチ装置７０は駆動し、パンチ駆動源７１がパンチ７２を下降させて、当該ＴＣＰを打ち抜く。このパンチ装置７０の駆動と同期して、またはパンチ装置７０の駆動前に事前に、回収装置７４の駆動装置７６が駆動し、所定のカテゴリーに対応する収容部７５１がダイ７３の貫通穴７３１の下に位置するように、回収ケース７５を移動させる。これにより、打ち抜かれた所定のカテゴリーのＴＣＰは、貫通穴７３１から所定の収容部７５１に落下して収容される。 When the punching target TCP arrives at the punch unit 7, the punch device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP. In synchronism with the driving of the punching device 70 or prior to the driving of the punching device 70, the driving device 76 of the collection device 74 is driven, and the accommodating portion 751 corresponding to a predetermined category is formed in the through hole 731 of the die 73. The collection case 75 is moved so as to be positioned below. As a result, the punched predetermined category of TCP falls from the through hole 731 to the predetermined accommodating portion 751 and is accommodated.
　上記のようにして、各カテゴリーに属するＴＣＰは、それぞれ対応する収容部７５１に収容されるため、従来のように複数のパンチユニットを要することなく、一つのパンチユニット７で、打ち抜いたＴＣＰを分類して回収することができ、これにより、不良解析等を簡便に行うことができる。 As described above, since the TCPs belonging to each category are accommodated in the corresponding accommodating portions 751, the punched TCPs are classified by one punch unit 7 without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
　また、打ち抜いたＴＣＰを所定の収容部７５１に落下させて収容することを繰り返すことにより、徐々に打ち抜かれたＴＣＰが収容部７５１に積み重なっていくが、この積み重なったＴＣＰの山が収容部の深さを超えると、パンチ７２とダイ７３の貫通穴７３１との間に打ち抜かれたＴＣＰが咬み込み、動作エラーが発生することがある。 Further, by repeatedly dropping the punched TCP into the predetermined accommodating portion 751 and accommodating it, the punched TCP gradually accumulates in the accommodating portion 751, and this pile of TCP is deep in the accommodating portion. Exceeding this may cause the TCP punched between the punch 72 and the through-hole 731 of the die 73 to bite and cause an operation error.
　その状況を回避するため、本実施形態においては、駆動装置７６により回収ケース７５を振動させ、積み重なったＴＣＰの山を崩すことにより、パンチ７２とダイ７３の貫通穴７３１との間に打ち抜かれたＴＣＰが咬み込むことを防止するようにしている。なお、駆動装置７６とは別の振動発生装置を設け、回収ケース７５を当該振動発生装置により振動させてもよい。 In order to avoid this situation, in the present embodiment, the collection case 75 is vibrated by the driving device 76 and the piles of the stacked TCP are broken to punch out between the punch 72 and the through hole 731 of the die 73. TCP is prevented from biting. Note that a vibration generating device different from the driving device 76 may be provided, and the collection case 75 may be vibrated by the vibration generating device.
〔第２の実施形態〕
　図４は、本発明の第２の実施形態に係るパンチユニットの側面図であり、図５は、同実施形態に係るパンチユニットの回収装置の平面図である。 [Second Embodiment]
FIG. 4 is a side view of the punch unit according to the second embodiment of the present invention, and FIG. 5 is a plan view of the punch unit recovery apparatus according to the embodiment.
　本実施形態に係るパンチユニット７Ａは、図４に示すように、第１の実施形態におけるパンチユニット７と同じパンチ装置７０と、回収装置７４Ａとを備えている。 As shown in FIG. 4, the punch unit 7A according to this embodiment includes the same punching device 70 as the punching unit 7 in the first embodiment and a recovery device 74A.
　本実施形態における回収装置７４Ａは、図４および図５に示すように、回収ケース７５Ａと、その回収ケース７５Ａを回転移動させる駆動装置７６Ａとを備えている。駆動装置７６Ａとしては、例えば、ステッピングモータ、サーボモータ等の回転装置が使用され、本実施形態では駆動装置７６Ａの回転軸７６２Ａを介して、回収ケース７５Ａを所定の回転角で回転移動させる。 As shown in FIGS. 4 and 5, the collection device 74A in the present embodiment includes a collection case 75A and a drive device 76A that rotates and moves the collection case 75A. As the driving device 76A, for example, a rotating device such as a stepping motor or a servo motor is used, and in this embodiment, the collection case 75A is rotated and moved at a predetermined rotation angle via the rotating shaft 762A of the driving device 76A.
　本実施形態における回収ケース７５Ａは、平面視円形となっている。この回収ケース７５Ａには、仕切板が径方向に設けられており、もって複数（本実施形態では４つ）の平面視扇型の収容部７５１Ａが周方向に並べられて設けられている。 The collection case 75A in the present embodiment has a circular shape in plan view. In the collection case 75A, partition plates are provided in the radial direction, and thus a plurality (four in this embodiment) of fan-shaped accommodation portions 751A arranged side by side in the circumferential direction.
　なお、本実施形態における回収装置７４Ａは、駆動装置７６Ａの回転軸７６２Ａが、パンチユニット７Ａにおけるキャリアテープ５を含む平面に対して垂直になるように、すなわちＺ軸方向に位置するように設けられている。 The collection device 74A in the present embodiment is provided so that the rotation shaft 762A of the drive device 76A is perpendicular to the plane including the carrier tape 5 in the punch unit 7A, that is, positioned in the Z-axis direction. ing.
　本実施形態では、試験の結果不良（打ち抜き対象）と判断したＴＣＰを、不良の種類に応じて４つの分類にカテゴライズするものとする。不良であるとの試験結果およびそのカテゴリーの情報は、テスタ本体からＴＣＰハンドラ２に戻され、パンチユニット７Ａ（パンチ装置７０のパンチ駆動源７１および回収装置７４Ａの駆動装置７６Ａ）の制御装置に伝達される。 In this embodiment, it is assumed that TCP determined to be defective (punching target) as a result of the test is categorized into four categories according to the type of defect. The test result and the category information that it is defective are returned to the TCP handler 2 from the tester body, and transmitted to the control device of the punch unit 7A (the punch drive source 71 of the punch device 70 and the drive device 76A of the recovery device 74A). Is done.
　その打ち抜き対象のＴＣＰがパンチユニット７Ａに来たときに、パンチ装置７０は駆動し、パンチ駆動源７１がパンチ７２を下降させて、当該ＴＣＰを打ち抜く。このパンチ装置７０の駆動と同期して、またはパンチ装置７０の駆動前に事前に、回収装置７４Ａの駆動装置７６Ａが駆動し、所定のカテゴリーに対応する収容部７５１Ａがダイ７３の貫通穴７３１の下に位置するように、回収ケース７５Ａを回転移動させる。これにより、打ち抜かれた所定のカテゴリーのＴＣＰは、貫通穴７３１から落下して所定の収容部７５１Ａに収容される。 When the punching target TCP has arrived at the punch unit 7A, the punching device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP. In synchronism with the driving of the punching device 70 or before the driving of the punching device 70, the driving device 76A of the collecting device 74A is driven, and the accommodating portion 751A corresponding to a predetermined category is formed in the through hole 731 of the die 73. The collection case 75A is rotationally moved so as to be positioned below. Thereby, the punched predetermined category of TCP falls from the through hole 731 and is accommodated in the predetermined accommodating portion 751A.
　上記のようにして、各カテゴリーに属するＴＣＰは、それぞれ対応する収容部７５１Ａに収容されるため、従来のように複数のパンチユニットを要することなく、一つのパンチユニット７Ａで、打ち抜いたＴＣＰを分類して回収することができ、これにより、不良解析等を簡便に行うことができる。 As described above, since the TCPs belonging to each category are accommodated in the corresponding accommodating portions 751A, the punched TCP is classified by one punch unit 7A without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
〔第３の実施形態〕
　図６は、本発明の第３の実施形態に係るパンチユニットの側面図であり、図７は、同実施形態に係るパンチユニットの回収装置の断面図（図８のＡ－Ａ断面図）であり、図８は、同実施形態に係るパンチユニットの回収装置の平面図である。 [Third Embodiment]
FIG. 6 is a side view of a punch unit according to the third embodiment of the present invention, and FIG. 7 is a cross-sectional view (AA cross-sectional view of FIG. 8) of the punch unit recovery apparatus according to the same embodiment. FIG. 8 is a plan view of the punch unit recovery apparatus according to the embodiment.
　本実施形態に係るパンチユニット７Ｂは、図６に示すように、第１の実施形態におけるパンチユニット７と同じパンチ装置７０と、回収装置７４Ｂとを備えている。 As shown in FIG. 6, the punch unit 7B according to the present embodiment includes the same punching device 70 as the punching unit 7 in the first embodiment and a recovery device 74B.
　本実施形態における回収装置７４Ｂは、図６～図８に示すように、回収ケース７５Ｂと、その回収ケース７５Ｂを回転移動させる駆動装置７６Ｂと、回収ケース７５Ｂをカバーするハウジング７７Ｂとを備えている。 As shown in FIGS. 6 to 8, the recovery device 74B in the present embodiment includes a recovery case 75B, a drive device 76B that rotates the recovery case 75B, and a housing 77B that covers the recovery case 75B. .
　駆動装置７６Ｂとしては、例えば、ステッピングモータ、サーボモータ等の回転装置が使用され、本実施形態では駆動装置７６Ｂの回転軸７６２Ｂを介して、回収ケース７５Ｂを所定の回転角で回転移動させる。 As the driving device 76B, for example, a rotating device such as a stepping motor or a servo motor is used, and in this embodiment, the collection case 75B is rotated and moved at a predetermined rotation angle via the rotating shaft 762B of the driving device 76B.
　本実施形態における回収ケース７５Ｂは、側面視円形となっている。この回収ケース７５Ｂには、仕切板が径方向に設けられており、もって複数（本実施形態では４つ）の側面視扇型の収容部７５１Ｂが周方向に並べられて設けられている。 The collection case 75B in the present embodiment is circular when viewed from the side. A partition plate is provided in the collection case 75B in the radial direction, and a plurality of (four in the present embodiment) side-view fan-shaped accommodation portions 751B are arranged in the circumferential direction.
　なお、本実施形態における回収装置７４Ｂは、駆動装置７６Ｂの回転軸７６２Ｂが、パンチユニット７Ｂにおけるキャリアテープ５を含む平面に対して平行になるように、かつＸ軸方向に位置するように設けられている。ただし、本発明はこれに限定されることなく、駆動装置７６Ｂの回転軸７６２Ｂが、パンチユニット７Ｂにおけるキャリアテープ５を含む平面に対して平行になるように、かつＹ軸方向に位置するように、回収装置７４Ｂが設けられてもよい。 The collection device 74B in the present embodiment is provided so that the rotation shaft 762B of the drive device 76B is parallel to the plane including the carrier tape 5 in the punch unit 7B and is positioned in the X-axis direction. ing. However, the present invention is not limited to this, and the rotation shaft 762B of the driving device 76B is parallel to the plane including the carrier tape 5 in the punch unit 7B and is positioned in the Y-axis direction. A recovery device 74B may be provided.
　ハウジング７７Ｂは円筒状となっており、その内部にて回収ケース７５Ｂが回転するように構成されている。また、ハウジング７７Ｂには、打ち抜いたＴＣＰが通過できる開口部７７１Ｂが形成されており、この開口部７７１Ｂがダイ７３の貫通穴７３１の下に位置するように、回収装置７４Ｂは設けられている。 The housing 77B has a cylindrical shape, and the collection case 75B is configured to rotate inside the housing 77B. The housing 77B is formed with an opening 771B through which the punched TCP can pass, and the collection device 74B is provided so that the opening 771B is located below the through hole 731 of the die 73.
　本実施形態では、試験の結果不良（打ち抜き対象）と判断したＴＣＰを、不良の種類に応じて４つの分類にカテゴライズするものとする。不良であるとの試験結果およびそのカテゴリーの情報は、テスタ本体からＴＣＰハンドラ２に戻され、パンチユニット７Ｂ（パンチ装置７０のパンチ駆動源７１および回収装置７４Ｂの駆動装置７６Ｂ）の制御装置に伝達される。 In this embodiment, it is assumed that TCP determined to be defective (punching target) as a result of the test is categorized into four categories according to the type of defect. The test result and the category information that it is defective are returned to the TCP handler 2 from the tester body, and transmitted to the control device of the punch unit 7B (the punch drive source 71 of the punch device 70 and the drive device 76B of the recovery device 74B). Is done.
　その打ち抜き対象のＴＣＰがパンチユニット７Ｂに来たときに、パンチ装置７０は駆動し、パンチ駆動源７１がパンチ７２を下降させて、当該ＴＣＰを打ち抜く。このパンチ装置７０の駆動と同期して、またはパンチ装置７０の駆動前に事前に、回収装置７４Ｂの駆動装置７６Ｂが駆動し、所定のカテゴリーに対応する収容部７５１Ｂがダイ７３の貫通穴７３１（ハウジング７７Ｂの開口部７７１Ｂ）の下に位置するように、回収ケース７５Ｂを回転移動させる。これにより、打ち抜かれた所定のカテゴリーのＴＣＰは、貫通穴７３１および開口部７７１Ｂから所定の収容部７５１Ｂに落下して収容される。なお、ＴＣＰを収容した回収ケース７５Ｂが回転しても、ハウジング７７Ｂがあるため、ＴＣＰは回収ケース７５Ｂから脱落することはない。 When the punching target TCP comes to the punch unit 7B, the punch device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP. In synchronism with the driving of the punching device 70 or prior to the driving of the punching device 70, the driving device 76B of the collecting device 74B is driven, and the accommodating portion 751B corresponding to a predetermined category becomes the through hole 731 ( The collection case 75B is rotated so as to be positioned below the opening 771B) of the housing 77B. As a result, the punched predetermined category of TCP falls from the through hole 731 and the opening 771B to the predetermined accommodating portion 751B and is accommodated. Even if the collection case 75B containing the TCP rotates, the TCP does not fall out of the collection case 75B because of the housing 77B.
　上記のようにして、各カテゴリーに属するＴＣＰは、それぞれ対応する収容部７５１Ｂに収容されるため、従来のように複数のパンチユニットを要することなく、一つのパンチユニット７Ｂで、打ち抜いたＴＣＰを分類して回収することができ、これにより、不良解析等を簡便に行うことができる。 As described above, since the TCPs belonging to each category are accommodated in the corresponding accommodating portions 751B, the punched TCPs are classified by one punch unit 7B without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
〔第４の実施形態〕
　図９（ａ）、（ｂ）および（ｃ）は、本発明の第４の実施形態に係るパンチユニットの側面図であり、図１０（ａ）は、同実施形態に係るパンチユニットの仕分け部材の平面図であり、図１０（ｂ）は、同仕分け部材の断面図（図１０（ａ）のＢ－Ｂ断面図）である。 [Fourth Embodiment]
9A, 9B, and 9C are side views of a punch unit according to the fourth embodiment of the present invention, and FIG. 10A is a sorting member of the punch unit according to the embodiment. FIG. 10B is a cross-sectional view of the sorting member (a cross-sectional view taken along the line BB in FIG. 10A).
　本実施形態に係るパンチユニット７Ｃは、図９（ａ）～（ｃ）に示すように、第１の実施形態におけるパンチユニット７と同じパンチ装置７０と、回収装置７４Ｃとを備えている。 As shown in FIGS. 9A to 9C, the punch unit 7C according to the present embodiment includes the same punch device 70 as the punch unit 7 in the first embodiment and a recovery device 74C.
　本実施形態における回収装置７４Ｃは、図９（ａ）～（ｃ）に示すように、回収ケース７５Ｃと、仕分け部材７９Ｃと、その仕分け部材７９Ｃを移動させる駆動装置７６Ｃとを備えている。なお、本実施形態における回収ケース７５Ｃおよび駆動装置７６Ｃは、第１の実施形態における回収ケース７５および駆動装置７６と同じものである。 As shown in FIGS. 9A to 9C, the collection device 74C in this embodiment includes a collection case 75C, a sorting member 79C, and a drive device 76C that moves the sorting member 79C. Note that the collection case 75C and the drive device 76C in the present embodiment are the same as the collection case 75 and the drive device 76 in the first embodiment.
　本実施形態における仕分け部材７９Ｃは、パンチ装置７０のダイ７３と回収ケース７５Ｃとの間に位置するように設けられている。図１０（ａ）に示すように、仕分け部材７９Ｃは平面視矩形であり、図１０（ｂ）に示すように、仕分け部材７９Ｃの中に、側面視逆Ｖ字型（山型）の誘導壁部７９０Ｃが２つ設けられている。この２つの誘導壁部７９０Ｃによって、パンチ装置７０によって打ち抜かれたＴＣＰを収容部７５１Ｃに誘導することのできる３つの誘導路７９１Ｃが形成されている。 The sorting member 79C in the present embodiment is provided so as to be positioned between the die 73 of the punching device 70 and the collection case 75C. As shown in FIG. 10A, the sorting member 79C has a rectangular shape in plan view. As shown in FIG. 10B, the sorting member 79C has an inverted V-shaped (mountain) guide wall in side view. Two parts 790C are provided. By these two guide wall portions 790C, three guide paths 791C capable of guiding the TCP punched out by the punching device 70 to the housing portion 751C are formed.
　３つの誘導路７９１Ｃは、いずれもパンチ装置７０側から回収ケース７５Ｃ側に向かって漸次開口面積が小さくなるように形成されている。誘導路７９１Ｃの底面における開口部７９２Ｃは、パンチ装置７０によって打ち抜かれたＴＣＰを確実に所定のカテゴリーに対応する収容部７５１Ｃに誘導できるように、収容部７５１Ｃの上面開口部と同じ大きさか、もしくは、それ以下の大きさとなるように形成されている。 All the three guide paths 791C are formed so that the opening area gradually decreases from the punch device 70 side toward the collection case 75C side. The opening 792C on the bottom surface of the guide path 791C has the same size as the upper surface opening of the housing portion 751C so that the TCP punched out by the punching device 70 can be reliably guided to the housing portion 751C corresponding to a predetermined category, or The size is smaller than that.
　本実施形態における誘導壁部７９０Ｃを構成する斜面は、中央の開口部７９２Ｃに向かう斜度は大きく（垂直寄り）、両端の開口部７９２Ｃに向かう斜度は小さく（水平寄りに）形成されている。このように誘導壁部７９０Ｃを形成することで、仕分け部材７９Ｃの移動量が小さくても、ＴＣＰを所定の収容部７５１Ｃに誘導することができるようになっている。したがって、短時間で仕分け部材７９Ｃを移動させることが可能である。 In the present embodiment, the slope constituting the guide wall portion 790C is formed with a large inclination toward the central opening 792C (close to the vertical) and a small inclination toward both the opening 792C at both ends (close to the horizontal). . By forming the guide wall portion 790C in this way, the TCP can be guided to the predetermined accommodating portion 751C even if the moving amount of the sorting member 79C is small. Therefore, the sorting member 79C can be moved in a short time.
　なお、本実施形態においては、誘導路７９１Ｃを、回収ケースに設けられた収容部７５１Ｃの数に合わせて３つ設けているが、必ずしもそのように設ける必要はなく、本実施形態においても、仕分け部材７９Ｃの上面全体が開口しており、回収ケース７５Ｃ側に向かって徐々に断面積を狭め、底面における開口部７９２Ｃが収容部７５１Ｃの上面開口部と同じ大きさか、もしくは、それ以下の大きさとなるような誘導路を一つのみ設けても構わない。 In the present embodiment, three guide paths 791C are provided in accordance with the number of accommodating portions 751C provided in the collection case. However, the guide paths 791C are not necessarily provided as such, and in this embodiment as well, sorting is performed. The entire upper surface of the member 79C is open, the cross-sectional area is gradually narrowed toward the collection case 75C, and the opening 792C on the bottom surface is the same size as or smaller than the upper surface opening of the housing portion 751C. Only one such guiding path may be provided.
　さらに、本実施形態では、仕分け部材７９ＣはＹ軸方向に往復移動するが、本発明はこれに限定されることなく、仕分け部材７９ＣがＸ軸方向に往復移動するように、回収装置７４Ｃが設けられてもよい。 Furthermore, in this embodiment, the sorting member 79C reciprocates in the Y-axis direction, but the present invention is not limited to this, and the collection device 74C is provided so that the sorting member 79C reciprocates in the X-axis direction. May be.
　本実施形態では、試験の結果不良（打ち抜き対象）と判断したＴＣＰを、不良の種類に応じて３つの分類にカテゴライズするものとする。不良であるとの試験結果およびそのカテゴリーの情報は、テスタ本体からＴＣＰハンドラ２に戻され、パンチユニット７Ｃ（パンチ装置７０のパンチ駆動源７１および回収装置７４Ｃの駆動装置７６Ｃ）の制御装置に伝達される。 In this embodiment, it is assumed that the TCP determined to be defective (a punching target) as a result of the test is categorized into three categories according to the type of defect. The test result and the category information that it is defective are returned to the TCP handler 2 from the tester body and transmitted to the control unit of the punch unit 7C (the punch drive source 71 of the punch device 70 and the drive device 76C of the recovery device 74C). Is done.
　その打ち抜き対象のＴＣＰがパンチユニット７Ｃに来たときに、パンチ装置７０は駆動し、パンチ駆動源７１がパンチ７２を下降させて、当該ＴＣＰを打ち抜く。このパンチ装置７０の駆動と同期して、またはパンチ装置７０の駆動前に事前に、回収装置７４Ｃの駆動装置７６Ｃが駆動し、ダイ７３の貫通穴７３１から打ち抜かれて落下してくるＴＣＰが、誘導路７９１Ｃを通って所定のカテゴリーに対応する収容部７５１Ｃに誘導されるように、仕分け部材７９Ｃを移動させる。 When the punching target TCP comes to the punch unit 7C, the punch device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP. In synchronization with the driving of the punching device 70 or before the driving of the punching device 70, the driving device 76C of the collecting device 74C is driven, and the TCP that is punched from the through-hole 731 of the die 73 and falls is The sorting member 79C is moved so as to be guided to the accommodating portion 751C corresponding to the predetermined category through the guide path 791C.
　例えば、打ち抜かれて落下してくるＴＣＰを回収ケース７５Ｃの中央の収容部７５１Ｃに収容させるときは、図９（ａ）に示すように、仕分け部材７９Ｃの中央の誘導路７９１Ｃの底面における開口部７９２Ｃが、回収ケース７５Ｃの中央の収容部７５１Ｃの上に来るように仕分け部材７９Ｃを移動させる。打ち抜かれて落下してくるＴＣＰを回収ケース７５Ｃの左側の収容部７５１Ｃに収容させるときは、図９（ｂ）に示すように、仕分け部材７９Ｃの左の誘導路７９１Ｃの底面における開口部７９２Ｃが、回収ケース７５Ｃの左側の収容部７５１Ｃの上に来るように仕分け部材７９Ｃを移動させる。また、打ち抜かれて落下してくるＴＣＰを回収ケース７５Ｃの右側の収容部７５１Ｃに収容させるときは、図９（ｃ）に示すように、仕分け部材７９Ｃの右の誘導路７９１Ｃの底面における開口部７９２Ｃが、回収ケース７５Ｃの右側の収容部７５１Ｃの上に来るように仕分け部材７９Ｃを移動させる。 For example, when the TCP that has been punched and dropped is accommodated in the central accommodating portion 751C of the collection case 75C, as shown in FIG. 9A, the opening at the bottom surface of the guiding path 791C at the center of the sorting member 79C. The sorting member 79C is moved so that 792C is positioned above the central accommodating portion 751C of the collection case 75C. When the punched and dropped TCP is accommodated in the left accommodating portion 751C of the collection case 75C, as shown in FIG. 9B, the opening 792C on the bottom surface of the left guiding path 791C of the sorting member 79C is formed. Then, the sorting member 79C is moved so as to be positioned above the accommodation portion 751C on the left side of the collection case 75C. Further, when the TCP that has been punched and dropped is accommodated in the right accommodating portion 751C of the collection case 75C, as shown in FIG. 9C, an opening in the bottom surface of the right guiding path 791C of the sorting member 79C. The sorting member 79C is moved so that 792C is positioned on the accommodation portion 751C on the right side of the collection case 75C.
　これにより、打ち抜かれた所定のカテゴリーのＴＣＰは、ダイ７３の貫通穴７３１から所定の収容部７５１Ｃに落下して収容される。 Thereby, the punched predetermined category of TCP falls from the through hole 731 of the die 73 to the predetermined accommodating portion 751C and is accommodated.
　上記のようにして、各カテゴリーに属するＴＣＰは、それぞれ対応する収容部７５１Ｃに収容されるため、従来のように複数のパンチユニットを要することなく、一つのパンチユニット７で、打ち抜いたＴＣＰを分類して回収することができ、これにより、不良解析等を簡便に行うことができる。 As described above, since the TCPs belonging to each category are accommodated in the corresponding accommodating portions 751C, the punched TCP is classified by one punch unit 7 without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
〔第５の実施形態〕
　図１１は、本発明の第５の実施形態に係るパンチユニットの側面図である。 [Fifth Embodiment]
FIG. 11 is a side view of a punch unit according to the fifth embodiment of the present invention.
　本実施形態に係るパンチユニット７Ｄは、図１１に示すように、第１の実施形態におけるパンチユニット７と同じパンチ装置７０と、回収装置７４Ｄとを備えている。 As shown in FIG. 11, the punch unit 7D according to the present embodiment includes the same punching device 70 as the punching unit 7 in the first embodiment and a recovery device 74D.
　本実施形態における回収装置７４Ｄは、図１１に示すように、回収ケース７５Ｄと、仕分け部材７９Ｄと、その仕分け部材７９Ｄを移動させる駆動装置７６Ｄとを備えている。なお、本実施形態における回収ケース７５Ｄは、第１の実施形態における回収ケース７５と同じものである。 As shown in FIG. 11, the collection device 74D in this embodiment includes a collection case 75D, a sorting member 79D, and a drive device 76D that moves the sorting member 79D. Note that the collection case 75D in the present embodiment is the same as the collection case 75 in the first embodiment.
　図１１に示すように、仕分け部材７９Ｄは、パンチ装置７０のダイ７３と回収ケース７５Ｄとの間に位置するように設けられている。本実施形態における仕分け部材７９Ｄは、上部が開口した箱形状に形成されており、底部にはスライドによって開閉自在のシャッター７９４Ｄが設けられている。このシャッター７９４Ｄが閉じた状態では、シャッター７９４Ｄは仕分け部材７９Ｄの底部を構成し、シャッター７９４Ｄが開くと、打ち抜かれて落下してくるＴＣＰが通過する貫通穴７９３Ｄが形成される。 As shown in FIG. 11, the sorting member 79D is provided so as to be positioned between the die 73 of the punching device 70 and the collection case 75D. The sorting member 79D in the present embodiment is formed in a box shape with the top opened, and a shutter 794D that can be opened and closed by sliding is provided at the bottom. When the shutter 794D is closed, the shutter 794D forms the bottom of the sorting member 79D, and when the shutter 794D is opened, a through hole 793D through which the punched and falling TCP passes is formed.
　駆動装置７６Ｄとしては、例えば、エアシリンダ、油圧シリンダ、ソレノイド、その他のアクチュエータ等が使用され、本実施形態では駆動装置７６Ｄのピストン７６１Ｄを介して仕分け部材７９ＤをＹ軸方向に往復移動させるとともに、図示しないアームを介してシャッター７９４Ｄを開閉する。 As the driving device 76D, for example, an air cylinder, a hydraulic cylinder, a solenoid, and other actuators are used. In this embodiment, the sorting member 79D is reciprocated in the Y-axis direction via the piston 761D of the driving device 76D. The shutter 794D is opened and closed through an arm (not shown).
　本実施形態では、仕分け部材７９ＤはＹ軸方向に往復移動するが、本発明はこれに限定されることなく、仕分け部材７９ＤがＸ軸方向に往復移動するように、回収装置７４Ｄが設けられてもよい。 In this embodiment, the sorting member 79D reciprocates in the Y-axis direction, but the present invention is not limited to this, and a collection device 74D is provided so that the sorting member 79D reciprocates in the X-axis direction. Also good.
　本実施形態では、試験の結果不良（打ち抜き対象）と判断したＴＣＰを、不良の種類に応じて３つの分類にカテゴライズするものとする。不良であるとの試験結果およびそのカテゴリーの情報は、テスタ本体からＴＣＰハンドラ２に戻され、パンチユニット７Ｄ（パンチ装置７０のパンチ駆動源７１および回収装置７４Ｄの駆動装置７６Ｄ）の制御装置に伝達される。 In this embodiment, it is assumed that the TCP determined to be defective (a punching target) as a result of the test is categorized into three categories according to the type of defect. The test result and the category information that it is defective are returned to the TCP handler 2 from the tester body, and transmitted to the control device of the punch unit 7D (the punch drive source 71 of the punch device 70 and the drive device 76D of the recovery device 74D). Is done.
　その打ち抜き対象のＴＣＰがパンチユニット７Ｄに来たときに、パンチ装置７０は駆動し、パンチ駆動源７１がパンチ７２を下降させて、当該ＴＣＰを打ち抜く。打ち抜かれたＴＣＰはシャッター７９４Ｄを閉めた状態の仕分け部材７９Ｄ中に落下する。 When the punching target TCP comes to the punch unit 7D, the punch device 70 is driven, and the punch driving source 71 lowers the punch 72 to punch out the TCP. The punched TCP falls into the sorting member 79D with the shutter 794D closed.
　ＴＣＰが落下した後、駆動装置７６Ｄにより仕分け部材７９Ｄが駆動され、所定の収容部７５１Ｄの上に仕分け部材７９Ｄが移動する。移動が完了したところで、駆動装置７６Ｄによりシャッター７９４Ｄを開き、打ち抜かれたＴＣＰを、仕分け部材７９Ｄの貫通穴７９３Ｄから所定の収容部７５１Ｄに落下させて収容する。 After the TCP is dropped, the sorting member 79D is driven by the driving device 76D, and the sorting member 79D moves onto a predetermined accommodating portion 751D. When the movement is completed, the shutter 794D is opened by the driving device 76D, and the punched TCP is dropped from the through hole 793D of the sorting member 79D into the predetermined accommodating portion 751D and accommodated.
　打ち抜かれたＴＣＰが収容された後、駆動装置７６Ｄによりシャッター７９４Ｄを閉じるとともに、仕分け部材７９Ｄを再びパンチ装置７０のダイ７３の貫通穴７３１の下に移動させ、次のＴＣＰが打ち抜かれることに備える。 After the punched TCP is received, the shutter 794D is closed by the driving device 76D, and the sorting member 79D is moved again below the through hole 731 of the die 73 of the punch device 70 to prepare for the next TCP to be punched. .
　上記のようにして、各カテゴリーに属するＴＣＰは、それぞれ対応する収容部７５１Ｄに収容されるため、従来のように複数のパンチユニットを要することなく、一つのパンチユニット７で、打ち抜いたＴＣＰを分類して回収することができ、これにより、不良解析等を簡便に行うことができる。 As described above, since the TCPs belonging to each category are accommodated in the corresponding accommodating portions 751D, the punched TCP is classified by one punch unit 7 without requiring a plurality of punch units as in the prior art. Thus, failure analysis or the like can be easily performed.
　なお、仕分け部材７９Ｄは一時的にＴＣＰを保持できる機構を備えていればよく、その機構はシャッター７９４Ｄだけには限られない。例えば、スライドするシャッター７９４Ｄの替わりに、回動可能な部材が設けられていてもよい。あるいは、シャッター７９４Ｄがなく、仕分け部材７９Ｄ自体が回転可能となっていてもよい。 The sorting member 79D only needs to have a mechanism capable of temporarily holding TCP, and the mechanism is not limited to the shutter 794D. For example, a rotatable member may be provided instead of the sliding shutter 794D. Alternatively, the shutter 794D may not be provided, and the sorting member 79D itself may be rotatable.
　以上説明した実施形態は、本発明の理解を容易にするために記載されたものであって、本発明を限定するために記載されたものではない。したがって、上記実施形態に開示された各要素は、本発明の技術的範囲に属する全ての設計変更や均等物をも含む趣旨である。 The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.
　例えば、駆動装置７６，７６Ｃ，７６Ｄとして、駆動対象物を往復移動させる駆動装置ではなく、駆動対象物を回転移動させる駆動装置（例えば駆動装置７６Ａ，７６Ｂ）を使用してもよい。この場合、回転運動を直線運動に変換する機構を利用することとなる。 For example, as the driving devices 76, 76C, and 76D, a driving device (for example, the driving devices 76A and 76B) that rotationally moves the driving object may be used instead of the driving device that reciprocates the driving object. In this case, a mechanism that converts rotational motion into linear motion is used.
　反対に、駆動装置７６Ａ，７６Ｂとして、駆動対象物を回転移動させる駆動装置ではなく、駆動対象物を往復移動させる駆動装置（例えば駆動装置７６，７６Ｃ，７６Ｄ）を使用してもよい。この場合、直線運動を回転運動に変換する機構を利用することとなる。 Conversely, as the driving devices 76A and 76B, a driving device (for example, the driving devices 76, 76C, and 76D) that reciprocally moves the driving object may be used instead of the driving device that rotationally moves the driving object. In this case, a mechanism that converts linear motion into rotational motion is used.
　また、駆動装置７６Ａ，７６Ｂの回転軸７６１Ａ，７６１Ｂと、回収ケース７５Ａ，７５Ｂの回転軸とは、一直線上になくてもよく、ギア等を介して平行の位置にあってもよいし、直交していてもよい。 Further, the rotation shafts 761A and 761B of the drive devices 76A and 76B and the rotation shafts of the collection cases 75A and 75B do not have to be in a straight line, and may be in parallel positions via gears or the like. You may do it.
　本発明に係るＴＣＰハンドリング装置は、打ち抜いたＴＣＰについて、試験結果に基づいて不良解析等を行うのに有用である。 The TCP handling device according to the present invention is useful for performing failure analysis and the like on the punched TCP based on the test results.

Claims (17)

  1. 　ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいてキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置において用いられるパンチユニットであって、
    　ＴＣＰを打ち抜くパンチ装置と、
    　前記パンチ装置によって打ち抜いたＴＣＰを回収する回収装置と
    を備えており、
    　前記回収装置は、回収ケースと、前記回収ケースを移動させることのできる駆動装置とを備えており、
    　前記回収ケースには、前記パンチ装置によって打ち抜いたＴＣＰを収容する収容部が複数設けられており、
    　前記回収ケースを前記駆動装置によって移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収する
    ことを特徴とするパンチユニット。     A punch unit used in a TCP handling apparatus that transports a plurality of TCP carrier tapes, sequentially applies the TCP to a test, and punches out the TCP from the carrier tape based on the test result information,
    A punching device for punching TCP;
    A recovery device for recovering the TCP punched by the punch device;
    The collection device includes a collection case and a drive device that can move the collection case,
    The collection case is provided with a plurality of accommodating portions for accommodating TCP punched out by the punch device,
    The punch unit, wherein the recovery case is moved by the driving device, and the TCP punched out by the punch device is classified and recovered by the plurality of accommodating portions.
  2. 　前記駆動装置は、駆動対象物を往復移動させる装置であり、
    　前記回収ケースは、前記駆動装置によって往復移動するように設けられており、
    　前記複数の収容部は、前記回収ケースにおいて前記往復移動の方向に並べられて設けられており、
    　前記回収ケースを前記駆動装置によって往復移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収する
    ことを特徴とする請求項１に記載のパンチユニット。     The drive device is a device for reciprocating a drive object,
    The collection case is provided to reciprocate by the drive device,
    The plurality of accommodating portions are arranged in the reciprocating direction in the collection case,
    2. The punch unit according to claim 1, wherein TCPs punched out by the punching device are classified and collected by the plurality of accommodating portions by reciprocating the collecting case by the driving device. 3.
  3. 　前記駆動装置は、前記回収ケースを振動させることが可能となっていることを特徴とする請求項２に記載のパンチユニット。 3. The punch unit according to claim 2, wherein the driving device is capable of vibrating the collection case.
  4. 　前記駆動装置は、駆動対象物を回転移動させる装置であり、
    　前記回収ケースは、前記駆動装置によって回転移動するように、かつ、当該回転移動の回転軸が、前記パンチ装置におけるキャリアテープを含む平面に対して垂直になるように設けられており、
    　前記複数の収容部は、前記回転する回収ケースにおいて周方向に並べられて設けられており、
    　前記回収ケースを前記駆動装置によって回転移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収する
    ことを特徴とする請求項１に記載のパンチユニット。     The drive device is a device that rotates and moves a drive object;
    The collection case is provided so as to be rotated by the drive device, and a rotation axis of the rotation is perpendicular to a plane including the carrier tape in the punch device,
    The plurality of accommodating portions are arranged in the circumferential direction in the rotating collection case,
    2. The punch unit according to claim 1, wherein TCPs punched out by the punching device are classified and collected by the plurality of receiving portions by rotating the recovery case by the driving device. 3.
  5. 　前記駆動装置は、駆動対象物を回転移動させる装置であり、
    　前記回収ケースは、前記駆動装置によって回転移動するように、かつ、当該回転移動の回転軸が、前記パンチ装置におけるキャリアテープを含む平面に対して平行になるように設けられており、
    　前記複数の収容部は、前記回転する回収ケースにおいて周方向に並べられて設けられており、
    　前記回収ケースを前記駆動装置によって回転移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収する
    ことを特徴とする請求項１に記載のパンチユニット。     The drive device is a device that rotates and moves a drive object;
    The collection case is provided so as to be rotated by the drive device, and a rotation axis of the rotation is parallel to a plane including the carrier tape in the punch device,
    The plurality of accommodating portions are arranged in the circumferential direction in the rotating collection case,
    2. The punch unit according to claim 1, wherein TCPs punched out by the punching device are classified and collected by the plurality of receiving portions by rotating the recovery case by the driving device. 3.
  6. 　前記回収装置は、前記回収ケースをカバーするとともに、前記打ち抜いたＴＣＰが通過できる開口部を有する円筒状のハウジングを備えており、
    　前記回収ケースは、前記ハウジング内を回転移動することを特徴とする請求項５に記載のパンチユニット。     The recovery device includes a cylindrical housing that covers the recovery case and has an opening through which the punched TCP can pass,
    The punch unit according to claim 5, wherein the collection case rotates in the housing.
  7. 　ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいてキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置において用いられるパンチユニットであって、
    　ＴＣＰを打ち抜くパンチ装置と、
    　前記パンチ装置によって打ち抜いたＴＣＰを回収する回収装置と
    を備えており、
    　前記回収装置は、回収ケースと、前記パンチ装置によって打ち抜いたＴＣＰを前記回収ケースに仕分けする仕分け部材と、前記仕分け部材を移動させることのできる駆動装置とを備えており、
    　前記回収ケースには、前記パンチ装置によって打ち抜いたＴＣＰを収容する収容部が複数設けられており、
    　前記仕分け部材を前記駆動装置によって移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収する
    ことを特徴とするパンチユニット。     A punch unit used in a TCP handling apparatus that transports a plurality of TCP carrier tapes, sequentially applies the TCP to a test, and punches out the TCP from the carrier tape based on the test result information,
    A punching device for punching TCP;
    A recovery device for recovering the TCP punched by the punch device;
    The collection device includes a collection case, a sorting member that sorts the TCP punched out by the punch device into the collection case, and a drive device that can move the sorting member,
    The collection case is provided with a plurality of accommodating portions for accommodating TCP punched out by the punch device,
    A punch unit, wherein the sorting member is moved by the drive device, and the TCP punched out by the punch device is classified and collected by the plurality of accommodating portions.
  8. 　前記駆動装置は、駆動対象物を往復移動させる装置であり、
    　前記仕分け部材は、前記駆動装置によって往復移動するように設けられており、
    　前記複数の収容部は、前記回収ケースにおいて前記往復移動の方向に並べられて設けられており、
    　前記仕分け部材を前記駆動装置によって往復移動させることにより、前記パンチ装置によって打ち抜いたＴＣＰを前記複数の収容部にて分類して回収する
    ことを特徴とする請求項７に記載のパンチユニット。     The drive device is a device for reciprocating a drive object,
    The sorting member is provided to reciprocate by the driving device,
    The plurality of accommodating portions are arranged in the reciprocating direction in the collection case,
    8. The punch unit according to claim 7, wherein the sorting member is reciprocated by the driving device to classify and collect the TCP punched out by the punching device in the plurality of storage units. 9.
  9. 　前記仕分け部材は、前記パンチ装置側から前記回収ケース側にＴＣＰを誘導することのできる誘導路を、少なくとも一つ備えることを特徴とする請求項７または８に記載のパンチユニット。 9. The punch unit according to claim 7 or 8, wherein the sorting member includes at least one guide path capable of guiding TCP from the punch device side to the collection case side.
  10. 　前記仕分け部材は、前記パンチ装置によって打ち抜いたＴＣＰを、前記仕分け部材において一時的に保持することができる保持機構を備えることを特徴とする請求項７～９のいずれかに記載のパンチユニット。 The punch unit according to any one of claims 7 to 9, wherein the sorting member includes a holding mechanism capable of temporarily holding the TCP punched out by the punching device in the sorting member.
  11. 　ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいて、パンチ装置によりキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置であって、
    　前記パンチ装置によって打ち抜いたＴＣＰを回収する収容部が複数設けられており、
    　前記複数の収容部を移動させることにより、前記打ち抜いたＴＣＰを分類して回収する
    ことを特徴とするＴＣＰハンドリング装置。     A TCP handling device that transports a plurality of TCP carrier tapes, sequentially applies the TCP to the test, and punches the TCP from the carrier tape by a punch device based on the information of the test results,
    A plurality of accommodating portions for collecting the TCP punched by the punch device are provided,
    A TCP handling device characterized in that the punched TCP is classified and collected by moving the plurality of accommodating portions.
  12. 　前記複数の収容部は、移動可能な回収ケースに設けられており、前記回収ケースを移動させることにより、前記打ち抜いたＴＣＰを前記複数の収容部にて分類して回収することを特徴とする請求項１１に記載のＴＣＰハンドリング装置。 The plurality of storage units are provided in a movable recovery case, and the punched TCP is classified and recovered by the plurality of storage units by moving the recovery case. Item 12. The TCP handling device according to Item 11.
  13. 　前記回収ケースは、駆動装置によって移動可能となっており、
    　試験結果の情報に基づいて前記駆動装置を駆動することにより、前記回収ケースは自動的に移動する
    ことを特徴とする請求項１２に記載のＴＣＰハンドリング装置。     The collection case is movable by a driving device,
    The TCP handling device according to claim 12, wherein the recovery case is automatically moved by driving the drive device based on information of a test result.
  14. 　前記駆動装置は、前記パンチ装置の駆動と同期して、または前記パンチ装置の駆動前に事前に駆動することを特徴とする請求項１３に記載のＴＣＰハンドリング装置。 14. The TCP handling device according to claim 13, wherein the driving device is driven in advance in synchronization with the driving of the punching device or before the driving of the punching device.
  15. 　ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいて、パンチ装置によりキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置であって、
    　前記パンチ装置によって打ち抜いたＴＣＰを回収する収容部が複数設けられているとともに、前記パンチ装置によって打ち抜いたＴＣＰを前記収容部に仕分けする仕分け部材が設けられており、
    　前記仕分け部材を移動させることにより、前記打ち抜いたＴＣＰを分類して回収する
    ことを特徴とするＴＣＰハンドリング装置。     A TCP handling device that transports a plurality of TCP carrier tapes, sequentially applies the TCP to the test, and punches the TCP from the carrier tape by a punch device based on the information of the test results,
    A plurality of accommodating portions for collecting the TCP punched by the punch device are provided, and a sorting member for sorting the TCP punched by the punch device into the accommodating portion is provided,
    A TCP handling apparatus, wherein the punched TCP is classified and collected by moving the sorting member.
  16. 　前記仕分け部材は、駆動装置によって移動可能となっており、
    　試験結果の情報に基づいて前記駆動装置を駆動することにより、前記仕分け部材は自動的に移動する
    ことを特徴とする請求項１５に記載のＴＣＰハンドリング装置。     The sorting member is movable by a driving device,
    16. The TCP handling device according to claim 15, wherein the sorting member is automatically moved by driving the driving device based on information of a test result.
  17. 　ＴＣＰが複数形成されたキャリアテープを搬送してＴＣＰを順次試験に付し、試験結果の情報に基づいてキャリアテープからＴＣＰを打ち抜くＴＣＰハンドリング装置であって、
    　請求項１～１０のいずれかに記載のパンチユニットを備えたことを特徴とするＴＣＰハンドリング装置。     A TCP handling device that transports a plurality of TCP carrier tapes, sequentially applies the TCP to the test, and punches out the TCP from the carrier tape based on the test result information,
    A TCP handling device comprising the punch unit according to any one of claims 1 to 10.
PCT/JP2009/064250 2009-08-12 2009-08-12 Punch unit and tcp handling device WO2011018847A1 (en)

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JPH08152457A (en) * 1994-11-29 1996-06-11 Nec Corp Sorting and classifying apparatus for electronic components

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WO2020050710A1 (en) * 2018-09-03 2020-03-12 Besi Netherlands B.V. Method and device for selectively separating electronic components from a frame with electronic components
NL2021552B1 (en) * 2018-09-03 2020-04-30 Besi Netherlands Bv Method and device for selective separating electronic components from a frame with electronic components
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JP7361764B2 (en) 2018-09-03 2023-10-16 ベシ ネーデルランズ ビー．ヴイ． Method and apparatus for selectively separating electronic components from a frame containing electronic components
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