WO2011018821A1 - Elément d’un dispositif de pressage d’un corps plat - Google Patents

Elément d’un dispositif de pressage d’un corps plat Download PDF

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Publication number
WO2011018821A1
WO2011018821A1 PCT/JP2009/003858 JP2009003858W WO2011018821A1 WO 2011018821 A1 WO2011018821 A1 WO 2011018821A1 JP 2009003858 W JP2009003858 W JP 2009003858W WO 2011018821 A1 WO2011018821 A1 WO 2011018821A1
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WO
WIPO (PCT)
Prior art keywords
roller
pressing
flat body
pressing means
metal
Prior art date
Application number
PCT/JP2009/003858
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English (en)
Japanese (ja)
Inventor
松田清義
三田和彦
佐久間優
田中満生
Original Assignee
株式会社 ディムコ
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Priority to PCT/JP2009/003858 priority Critical patent/WO2011018821A1/fr
Priority to JP2011526642A priority patent/JPWO2011018821A1/ja
Publication of WO2011018821A1 publication Critical patent/WO2011018821A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/22—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length
    • B29C43/222—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/34—Feeding the material to the mould or the compression means
    • B29C2043/3433—Feeding the material to the mould or the compression means using dispensing heads, e.g. extruders, placed over or apart from the moulds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/3642—Bags, bleeder sheets or cauls for isostatic pressing
    • B29C2043/3652—Elastic moulds or mould parts, e.g. cores or inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/44—Compression means for making articles of indefinite length
    • B29C43/48—Endless belts
    • B29C2043/486—Endless belts cooperating with rollers or drums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/44—Compression means for making articles of indefinite length
    • B29C43/46—Rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts

Definitions

  • the present invention relates to an apparatus element for forming, transferring, printing or laminating flat bodies to one another, and in particular, an apparatus for pressing flat elements used in an optical film forming apparatus, a nanoimprint apparatus, a printing apparatus and a laminating apparatus.
  • an apparatus for pressing flat elements used in an optical film forming apparatus, a nanoimprint apparatus, a printing apparatus and a laminating apparatus.
  • a pair of rollers consisting of a metal rigid roller having a mirror surface and a flexible metal roller or a metal rigid roller having a mirror surface
  • Method of manufacturing an optical film such as retardation film by nipping a molten resin sheet using a metal belt and a metal mold and flexibility of a metal rigid roller provided with a concavo-convex pattern on the surface
  • an optical film such as a diffusion film by a metal roller or a flexible metal belt.
  • the film temperature may be controlled at the time of molding in order to obtain a highly transparent film with little optical film orientation, or to improve the transfer ratio of the concavo-convex pattern. It is carried out (for example, patent documents 1, patent documents 2).
  • Nanoimprint is a technology that performs transfer of a fine pattern shape with an imprint mold, and forms a pattern shape by intermittently pressing the imprint mold surface onto a transfer target.
  • a transfer device Since a continuous process can not be performed and productivity is poor, a transfer device has been developed which transfers a shape continuously onto a transfer target while providing a mold on the surface of a cylindrical roller and rotating it (for example, Patent Document 4).
  • a laminate used for producing printed wiring boards of various electronic components includes a long metal foil wound in a roll shape and a long resin film wound in a roll shape as well. It supplies continuously in the state which piled up mutually, and then it bonds together with a heating welding apparatus.
  • this heat welding device there is a roller pressure bonding method using an upper roller and a lower roller (for example, Patent Document 5).
  • a pair of rollers consisting of a metal rigid roller having a mirror surface and a rubber roller is used (for example, Patent Document 6).
  • JP-A-11-235747 Japanese Patent Application Laid-Open No. 2006-315295 JP 10-217658 A Japanese Patent Application Publication No. 2007-203576 Japanese Patent Application Publication No. 2005-280153 JP-A-10-138447
  • the above techniques have the following problems. That is, (1) In the case of a pair of roller systems using only metal rigid rollers, the contact of the metal rigid roller, which is a transfer target, the mold, and the opposing roller is line contact. Therefore, if continuous processing is performed, the contact time is short, the resin pressing time is short, and the cooling time is short, so problems such as incapability of speeding up, unevenness in thickness, and formation of a transparent film, and transfer receiving There is a problem that the mold and the transferred body are separated before the body is cured, and the transferred shape on the transferred body is broken.
  • the pressing means is mainly a roller, and since the contact area is small, the pressing time is short, and there is a possibility that sufficient pressing can not be performed.
  • a highly rigid metal roller is used with its surface being mirror-finished or given a fine pattern, but if the surface is wrinkled during use, the entire roller needs to be replaced Also, since it is necessary to prepare a roller for each different pattern shape, the running cost is increased.
  • the flat body can be sufficiently pressed, the uneven shape can be accurately formed without the transfer shape and the print shape being broken, and even if the surface of the roller is wrinkled, the whole roller is replaced. It is an object of the present invention to provide a flat body pressing device element which is unnecessary.
  • the flat-body pressing device element according to claim 1 of the present invention is thin-walled flexible to run while being stretched between a driving roller that is driven to rotate and a driven roller that is driven by the driving roller.
  • a metal endless belt, a pressure roller rotating at a peripheral speed synchronized with the traveling speed of the metal endless belt and pressing a flat body on the metal endless belt, and the pressure roller facing the pressure roller via the metal endless belt When one or more sets of pressing means (hereinafter referred to as two or more sets of pressing means) comprising a backup board supporting the pressing force of the pressing roller (hereinafter referred to as “first And the second pressing means”).
  • a flat body pressing device element is the flat body pinching device element according to the first aspect, wherein the pressing roller is a thin metal outer cylinder having flexibility, and a fluid flow space.
  • a double rigid cylinder comprising a thin rigid metal cylinder and a highly rigid cylindrical roller body internally fitted in the same axial center, and the backup disk has a fluid flow passage inside thereof. It is characterized by In the flat body pressing device element according to claim 3 of the present invention, the thin metal outer cylinder and the both end portions of the roller main body are detachably attached to the outer cylinder fixing ring so that the circulation space becomes airtight via a sealing material.
  • the thin-walled metal outer cylinder can be attached to and detached from the metal inner cylinder by externally fitting the outer cylinder fixing ring.
  • the flat body pressing device element according to claim 4 of the present application is the flat body pressing device element according to any one of claims 1 to 3, and the flat body is a molten resin film, and the pressing means Fluid is the cooling fluid,
  • the surface of the pressure roller and the metal endless belt is a mirror surface, or the surface of the pressure roller and / or the metal endless belt is a fine uneven pattern engraved, and the flat body is smoothed by the pressure means. It is characterized in that it is molded and cooled, or a fine concavo-convex pattern is transferred and cooled on its surface.
  • a flat body pressing device element is the flat body pressing device element according to any one of claims 1 to 3, and the flat body is a multilayer composed of a combination of a molten resin film and an iron plate.
  • the fluid of the pressing means is a cooling fluid
  • the surface of the pressing roller is a mirror surface
  • the flat member is pressed and formed while the molten resin film is welded to the iron plate by the pressing roller. It is characterized by being cooled and cooled.
  • a flat body pressing device element according to claim 6 of the present application is the flat body pressing device element according to any one of claims 1 to 3, and the flat body is a combination of a resin sheet and a copper foil.
  • the fluid of the first pressing means is a heating medium
  • the fluid of the second pressing means is a cooling medium
  • the surface of the pressing roller is a mirror surface
  • the flat body is characterized in that the surface is pressure-formed and heated together with the pressure roller so as to be welded together and then cooled by the second pressure means.
  • a flat body pressing device element is the flat body pressing device element according to any one of claims 1 to 3, wherein the flat body is a resin sheet, and The fluid of the first pressing means is a heating fluid, the fluid of the second pressing means is a cooling fluid, and the surfaces of the pressing roller and the endless metal belt of the first pressing means are mirror surfaces, the second The surface of the pressing roller and / or the endless metal belt of the pressing means is a fine uneven pattern engraved, and the flat body is heated by the first pressing means and the surface thereof by the second pressing means It is characterized in that the fine asperity pattern is transferred to and cooled.
  • a flat body pressing device element is the flat body pressing device element according to any one of claims 1 to 3, and the flat body is a resin sheet, a paper or a metal plate.
  • the fluid of the first pressing means is a cooling fluid, and the surface of the pressing roller or the endless metal belt has a fine concavo-convex pattern engraved thereon, and the flat body is put on the surface by the pressing means. It is characterized in that a fine uneven pattern is printed and cooled.
  • the present invention exhibits the following effects. That is, (1) The flat body is sandwiched between a metal endless belt supported by a backup board and a pressing roller, and the pressing roller comprises a flexible thin metal outer cylinder and a highly rigid cylindrical roller body.
  • the pressure roller is in flat contact with the flat body and is pressed because the double cylinder is provided with the circulation space which becomes an elastic deformation layer therebetween.
  • both the backup board and the pressing roller have fluid flow means, it is possible to press while cooling or heating the flat body. For this reason, processing such as transfer, printing or lamination can be performed continuously with sufficient pressing force, and since the pressing force is vertical, a transfer shape having a large aspect ratio can be obtained without the fine pattern shape being broken. Becomes easy.
  • the flat body When the first pressing means and the second pressing means are installed in series with respect to the traveling direction of the metal endless belt, the flat body may be heated and then cooled or cooled and further cooled. Since it can be done, continuous processing can be performed at high speed. Furthermore, if the flow paths of the backup board are two systems, it is possible to finely adjust the cooling temperature or the heating temperature. (3) When the metal outer cylinder of the pressure roller is made removable, even if there is a wrinkle on the surface of the pressure roller, only the metal outer cylinder needs to be replaced, so the running cost is lowered and the productivity is improved. Also improve.
  • reference numeral 1 denotes a flat body pressing device element according to the embodiment
  • reference numeral 3 denotes a pressing means
  • reference numeral 3a denotes a first pressing means
  • reference numeral 3b denotes a second pressing means
  • reference numeral 5 denotes a metal.
  • Endless belt 10 is a pressure roller
  • 11 is a thin metal outer cylinder
  • 13 is a roller body
  • 15 is a circulation space
  • 17 is a passage
  • 19 is a seal material
  • 21 is an outer cylinder fixing ring
  • Reference numeral 23 is a sliding ring
  • 25 is a seal tightening bolt
  • 27 is an outer cylinder fixed ring screw bolt
  • 29 is a pressure control valve
  • 31 is a backup board
  • 33 is a preheating board
  • 51 is a drive roller
  • 53 is a driven roller
  • 7 is a flat body
  • 73 is a T-die
  • 75 is an elastic roller
  • 77 is a rigid roller.
  • the pressing roll 10 of the first pressing means 3a may be the pressing roll 10a
  • the pressing roll 10 of the second pressing means 3b may be the pressing roll 10b.
  • the flat body pressing device element 1 is stretched between the driving roller 51 and the driven roller 53 driven by the driving roller 51, and the metal endless belt 5 travels along the traveling of the metal endless belt 5.
  • the pressing means 3 for pressing the traveling flat body 7 or the first pressing means 3a and the second pressing means 3b as two sets of pressing means, the pressing means 3, the first pressing means 3a and The second pressing means 3 b includes a pressing roller 10 and a backup board 31 installed opposite to the pressing roller 10 via the metal endless belt 5.
  • the metal endless belt 5 is formed in an annular shape (when the diameter is larger than the width) or a tube (when the diameter is smaller than the width) by a metal thin film which can be elastically deformed, such as stainless steel or nickel. It is processed by the drawing method, the electric casting method, etc. and the thing without a joint on the surface is used. However, it is a matter of course that an endless belt manufactured by a welding method may be used as long as there is no problem even if it has a welded joint. Similarly, the dimensions of the metal endless belt 5 are also determined by the specifications of the intended device.
  • the metal endless belt 5 is stretched and travels between the driving roller 51 and the driven roller 53, and a tension adjusting roller capable of adjusting the tension of the metal endless belt 5 is inserted as needed. It is good.
  • the metal endless belt 5 travels at a speed synchronized with the peripheral speed of the pressure roller 10 described later.
  • the pressure roller 10 includes a flexible thin metal outer cylinder 11 and a highly rigid roller main body 13 which holds the fluid flow space 15 and is fitted in the same axial center as the thin metal outer cylinder 11. It is done.
  • the middle portion of the roller body 13 made of metal or synthetic rubber is a cylinder, and both ends thereof are formed one size larger than the middle portion, and the difference between the diameters of the middle portion and both ends is the fluid
  • the distribution space 15 which distributes is formed. That is, the thin metal outer cylinder 11 is detachably fixed to the roller main body 13 via the outer cylinder fixing ring 21 so that the thin metal outer cylinder 11 abuts on the peripheral portions of both ends of the roller main body 13.
  • the gap of the main body 13 is a distribution space 15.
  • the sealing material 19 is tightened so that the circular cross section is deformed into an elliptical cross section, and the thin metal outer cylinder 11 is pressed from the inside to seal it.
  • the seal material 19 in the embodiment is an O-ring of heat-resistant rubber such as silicone rubber, fluorine rubber, urethane rubber, neoprene rubber, etc. and has a hardness of 40 to 90 Shore A and has heat resistance and medium resistance. Use what you are doing.
  • the seal fastening bolt 25 is loosened, the seal material 19 returns from the oval cross section to a circular cross section, and the outer cylinder fixing ring 21 is removed to remove the thin metal outer cylinder 11. It can be removed easily.
  • the flow passage 17 is connected to a temperature adjusting heat exchanger (not shown) for adjusting the temperature of the fluid and sealed at a predetermined pressure.
  • the fluid flowing through the flow space 15 and the flow passage 17 is a fluid such as air, water, polyethylene glycol, oil or the like, and in the case of air alone, the case of only liquid such as water or polyethylene glycol, oil or air It may be a mixture of water and oil. That is, when the cooling or heating effect is enhanced by the pressure roller 10, the fluid whose temperature is controlled from the rotary shaft connected to the temperature control heat exchanger through the rotary joint is circulated in the roller body 13 using only the liquid. It flows into the passage 17. When the contact area between the pressing roller 10 and the metal endless belt 5 is increased, only air or a mixture of air and liquid is used. In addition, when the fluid is set to a predetermined pressure, adjustment is possible by the pressure control valve 29.
  • the thin-walled metal outer cylinder 11 having flexibility is formed in a cylindrical shape from a thin metal film which can be elastically deformed, such as stainless steel or nickel, and is processed by a spinning method, a drawing method, an electric casting method or the like. The one with no seams on its surface is used. However, as long as there is no problem even if it has a welded joint, it is natural that the surface may have a welded joint. Further, the dimensions of the thin-walled metal outer cylinder 11 are also determined by the specifications of the intended device.
  • the thin metal outer cylinder 11 has a thickness of about 0.08 mm to 0.3 mm, a diameter of about 100 mm to about 1000 mm, and a width of about 200 mm to about 2000 mm.
  • Lead to The diameter and length are set to appropriate sizes according to the specifications of the film forming apparatus and other intended apparatus.
  • the surface roughness of Ry 0.5 ⁇ m or less can be used, and preferably, the surface roughness is Ry 0.2 ⁇ m or less.
  • the surface of the thin-walled metal outer cylinder 11 may be polished to a mirror finish, or may be engraved with a quadrangular pyramid, a gutter, a lattice, a cylindrical hole fine pattern by a diamond tool, a laser, a resist method or the like.
  • the fine pattern has a height of several ⁇ m or more, the surface can be subjected to DLC (diamond like carbon) treatment or Cr plating treatment to increase the surface hardness.
  • the height of the fine pattern is 1 ⁇ m or less, for example, the fine pattern may be formed after plating with a nickel-phosphorus alloy.
  • the pressure roll having the thin metal outer cylinder may be used not only as opposed to the flat body on the metal endless belt as in the present invention, but also as opposed to the rigid roll as in the prior art. Also in this case, naturally, the thin metal outer cylinder can be attached and detached, and the cost reduction effect of the pressure roll is large.
  • the backup board 31 is installed on the opposite side across the metal endless belt 5 so as to directly support the pressing force of the pressing roller 10.
  • the backup board 31 is a metal case, and the surface in contact with the metal endless belt 5 is smooth. Furthermore, in order to reduce the frictional resistance between the backup board 31 and the metal endless belt 5, the surface of the backup board 31 may be coated with a fluorine resin, DLC (diamond like carbon) or ultrahigh density polyethylene resin.
  • a fluid flow passage is provided inside the metal casing, and the flat body 7 can be cooled or heated via the metal endless belt 5. Further, the flow passage of the fluid in the backup board 31 can be not only one system but also two or more systems.
  • the cooling rate or heating rate of the flat body 7 can be arbitrarily controlled.
  • the fluid is the same as the fluid flowing through the flow space 15 and the flow passage 17.
  • the preheating board 33 may be configured the same as the backup board 31 or may be another heating means such as halogen heater heating, high frequency induction heating, hot air heating and the like.
  • the flat body may be heated by other means in advance.
  • the bearing portion of the rotating shaft is slidable along the guide, so that the pressing force on the flat body 7 can be adjusted.
  • the conventional flat body pressing device element is configured to insert the flat body 7 between the elastic roller 75 and the rigid roller 77, but in this case, the elastic roller Since the pressing roller 75 presses the rigid roller 77, the pressing surface is a curved surface.
  • the pressing roller 10 presses the metal endless belt 5 supported by the flat backup disc 31 in the flat body pressing device element 1, the pressing surface of the flat body 7 is flat.
  • the pressing force acts radially on the flat body 7, and therefore, the pressing force and the peeling force act on the fine pattern on the surface of the rigid roller 77 from the inclined direction.
  • the shape of the fine pattern may be broken.
  • the flat body 7 is pressed with a flat surface, since the pressing force is perpendicular to the flat body 7, it becomes easy to obtain a transfer shape having a large aspect ratio without the fine pattern pattern shape being broken.
  • the method for producing a thermoplastic resin optical film includes a melting step of melt-kneading a thermoplastic resin to make a molten resin, a forming step of discharging the molten resin from a T-die 73 and forming it into a film, and forming it into a film
  • the molten resin, which is the flat body 7 is pressed by the pressing roller 10 and the metal endless belt 5 supported by the backup disk 31, and the cooling process is performed to cool and solidify.
  • the extruder (not shown) extrudes the injected thermoplastic resin while melting and kneading it, and conveys the molten resin melt-kneaded to the T-die 73 to the molten resin conveyed from the extruder in the lateral direction. It has a manifold for spreading inside. Further, the T-die 73 is provided at its lower portion with a discharge port for discharging the molten resin spread in the lateral direction by the manifold. Therefore, the molten resin discharged from the discharge port of the T-die 73 is formed into a film shape. When the film-like molten resin is solidified by the pressure roller 10 and the metal endless belt 5, it becomes a thermoplastic resin film.
  • thermoplastic resin film becomes a thermoplastic resin optical film in this state or after being subjected to a stretching treatment or the like after that.
  • a fine pattern is applied to the surface of the pressure roller 10 or the surfaces of the pressure roller 10 and the metal endless belt 5, a fine pattern is formed on one side or both sides of the film.
  • the thickness of the thermoplastic resin film is defined by the distance between the pressing roller 10 and the metal endless belt 5 constituting the first pressing means 3a and the traveling speed, the discharge amount of the molten resin discharged from the T-die 73, and the like.
  • a mechanism for controlling the cooling temperature of the molten resin film at the same time as pressing the molten resin by the backup board 31 is provided.
  • the thin-walled metal outer cylinder 11 of the pressure roller 10 is flexibly deformed to press the molten resin film flatly against the metal endless belt 5.
  • a liquid such as water, oil, glycerin or the like and compressed air of 1 atmospheric pressure or more are enclosed.
  • This pressure is the thickness, diameter, width and traveling speed at the time of molding of the thin metal outer cylinder 11.
  • the pressing force is determined by the pressing area.
  • the thickness of the molten resin is about 350 ⁇ m to 500 ⁇ m
  • the internal pressure of the pressing roller 10 (fluid filling pressure) is 12 to 30 N / cm. It is preferably about 2 . If the internal pressure of the pressure roller 10 is less than 12 N / cm 2 , the elasticity of the pressure roller 10 is too low, and it tends to be difficult to uniformly press the flat body in the width direction.
  • the surface pressure between the pressure roller 10 and the metal endless belt 5 is adjusted by, for example, a surface pressure adjustment mechanism that biases the forming roller rotation shaft toward the pressure belt side.
  • This surface pressure adjustment mechanism Can be configured by a pressing cylinder, and the surface pressure can be arbitrarily set by adjusting the driving force of the pressing cylinder.
  • the processing speed of the thermoplastic resin film is faster as the speed of cooling and solidifying the molten resin, ie, the diameter of the pressure roller 10 is larger. Since the contact area between the pressure roller 10 and the metal endless belt 5 is extremely large, the film cooling rate also increases.
  • the pressing surface is a curved surface, the pressing force is not perpendicular to the film surface, and it is difficult to form a fine pattern. Since the pressing force is perpendicular to the film surface in the flat body pressing device element 1, it is particularly advantageous for forming a pattern having a large aspect ratio.
  • the method of pressing with a press while moving intermittently and the method of pressing with a fluid pressure surrounded by a seal body have been adopted. Production can improve productivity and eliminate the problem of liquid leakage.
  • Example 1 The applicant conducted two demonstration experiments on Example 1 and the experimental results will be described.
  • the propylene-based resin was melt-kneaded with a 50 mm ⁇ extruder, and a molten propylene-based resin film was discharged from the discharge port of the T-die 73.
  • the temperature of the molten resin at the discharge port portion of the T-die 73 was 248 ° C.
  • the molten resin was sandwiched by a flat body pressing device element 1 with a sandwiching width of 150 mm and a linear pressure of 30 N / cm, and was cooled and solidified to obtain a thermoplastic resin film having a thickness of 130 ⁇ m.
  • the thin metal outer cylinder 11 used is 250 mm in diameter, 300 mm in width, and 0.1 mm in thickness
  • the metal endless belt 5 is 300 mm in diameter, 200 mm in width, and 0.1 mm in thickness.
  • the thin metal outer cylinder 11 and the metal endless belt 5 were both formed of stainless steel of SUS304 by spinning, and the surface was lapped and the surface roughness was Ry 0.1 ⁇ m.
  • the thin metal outer cylinder of the pressing roll is flattened while rotating, heated in contact with the molten resin, and subjected to repeated bending stress in the state of heating and cooling that the inside is cooled.
  • the most suitable is stainless steel, which has excellent durability performance in the condition. Water thermostated at 15 ° C.
  • thermoplastic resin film from the pressure roller 10 and the molding stability were good, and both the surface properties and the transparency were good.
  • a 50 ⁇ m thick nickel-phosphorus alloy is plated on the surface of the flexible metal outer cylinder, and a 60 ⁇ m deep groove is provided with a 90 ⁇ m pitch toroidal lens-like fine pattern with a diamond tool.
  • the film is nipped by the pressure roller 10 and the metal endless belt 5.
  • the forming roll was pressed under a linear pressure of 30 N / cm. As a result of observing the formed film with a digital microscope, it was possible to confirm the formation of a good pattern.
  • the flat body pressing device element 1 used in the thermal nanoimprint apparatus has a first pressing means 3 a, a second pressing means 3 b and a preheating disc 33.
  • a thermoplastic resin which is a flat body 7 was used as the substrate film, and for the pattern transfer, the substrate film was heated using the pressing roller 10b having the fine pattern for imprinting imprinted on the surface. Done in the state.
  • the set temperature needs to be in the range of not less than the glass transition temperature of the substrate film and not more than the melting point.
  • the polymer in the base film is transferred from the glass state to the rubber state above the glass transition temperature, the molecular mobility becomes high, and an arbitrary pattern can be transferred.
  • imprinting at a temperature 20 to 40 ° C. higher than the glass transition temperature is preferred. If the set temperature exceeds the melting point, the base film is less likely to be peeled off from the pressure roller 10b at the time of imprinting, and the workability is unfavorably lowered. Also, above the melting point, the pattern is deformed or peeled off at the time of peeling from the pressure roller 10, and the shape of the target sub-wavelength grating structure can not be obtained.
  • the preheating disc 33 is installed in the zone immediately before the substrate film contacts the pressing roller 10a to heat the film, and the substrate film between the pressing roller 10a and the metal endless belt 5 is When the flat body 7) passes, a temperature in a predetermined range is reached. If the pressure roller 10a and the metal endless belt 5 are covered with a heating hood so that the temperature of the pressure roller 10a also becomes the processing temperature, the operation can be performed more stably. Further, the backup board 31 may preferably perform heating by circulating warm water or steam for preheating the metal endless belt 5.
  • the pressing roller 10b is for fine pattern application, and after nickel-phosphorus alloy plating after surface polishing, various known techniques such as electron beam lithography, holographic lithography, focused ion beam (FIB), laser processing, etc. It is used to form a negative or positive pattern.
  • various known techniques such as electron beam lithography, holographic lithography, focused ion beam (FIB), laser processing, etc. It is used to form a negative or positive pattern.
  • the pressure required for the substrate film to be completely filled in the sub-wavelength structure is the smallest when the aspect ratio of the pattern used is 1.0, and is smaller even if the aspect ratio is larger than that. Even high pressure is required.
  • the linear pressure (nip pressure) of the pressure roller 10 may be set to 20 N / cm to 5 kN / cm, preferably 500 N / cm to 1000 N / cm.
  • the traveling speed of the metal endless belt 5 is preferably 1 m / min to 20 m / min. If the traveling speed is too fast, the pressing time will not be sufficient and the plastic deformation of the substrate film will be insufficient. If it is too slow, the productivity will decrease, so adjust appropriately according to the set temperature and the material of the substrate film. There is a need. In order to facilitate peeling after imprinting and to prevent the shape from being broken, cooling is performed.
  • the backup board 31 of the second pressing means 3b uses a fluid for cooling.
  • Example 2 The dimensions and shape of the pressure roller 10 are the same as in Experimental Examples 1 and 2 in Example 1, but a wavy fine pattern with a pitch of 115 nm and a height of 130 nm was engraved on the surface of the thin metal outer cylinder 11.
  • a polycarbonate having a width of 135 mm and a film thickness of 100 ⁇ m was used as the substrate film of the flat body 7, the substrate film feed rate was 2 m / min, and the temperature of the substrate film was heated to 175 ° C.
  • a fine pattern is transferred, cured and fixed on the base film with the traveling speed of the metal endless belt 5 being 2 m / min and the linear pressure of the pressing roller 10 being 50 N / cm, and then the transferred base film is The fine pattern was confirmed by a scanning electron microscope (SEM). As a result, it was confirmed that the fine pattern of the thin-walled metal outer cylinder 11 was correctly transferred onto the substrate film without losing its shape.
  • SEM scanning electron microscope
  • Example 3 in which the flat body pressing device element 1 is used for a manufacturing apparatus of a long copper foil / resin film multilayer body will be described mainly with reference to FIG.
  • the means includes the first pressing means 3a, the second pressing means 3b, the third pressing means (not shown) and the fourth pressing means (not shown) in this order from the upstream side in the traveling direction of the metal endless belt 5.
  • a set of pressing means is arranged.
  • the manufacturing method of a long copper foil / resin film multilayer body is a double belt press method which has been conventionally performed, and continuously manufactures a long multilayer body consisting of copper foil / resin film / copper foil. It is a method.
  • a copper foil, a resin film, and a lower copper foil are wound on the upstream side of the flat body pressing device element 1 in order to manufacture an elongated multilayer body having a copper foil / resin film / copper foil configuration, not shown
  • the upper copper foil roll, the resin film roll and the lower copper foil roll are disposed.
  • the copper foil is an electrolytic copper foil or a rolled copper foil
  • the resin film is a thermocompression-bondable multilayer aromatic polyimide film.
  • the thermocompression-bondable multilayer aromatic polyimide film is a film comprising a non-thermobondable aromatic polyimide film and a thermocompression-bondable aromatic polyimide layer formed on one or both surfaces thereof.
  • the resin film is not particularly limited as long as it can be crimped to the copper foil under heating conditions.
  • a resin film which can be used according to the purpose a single-layer thermocompression-bond aromatic polyimide film, a thermocompression-bond polyester film, a thermocompression-bond polyamide film (thermo-compression-bond aramid film), a thermocompression-bond A vinyl ester film, a thermocompression-bonding fluororesin film, etc. can be mentioned.
  • the thickness of the thermocompression-bonding film and the thermocompression-bonding layer is not particularly limited, but the thickness is usually 10 to 150 ⁇ m, preferably 10 to 100 ⁇ m, and more preferably 10 to 50 ⁇ m.
  • the thickness of the copper foil is not particularly limited, but a copper foil in the range of 8 to 35 ⁇ m for rolled copper foil and 5 to 35 ⁇ m for electrolytic copper foil is preferable.
  • the thin metal sleeve 11 used for the pressure roller 10 is a 250 mm diameter, 0.15 mm thick, 200 mm wide flexible metal sleeve made of SUS304, and the metal endless belt 5 is 1,000 mm in diameter.
  • the heating temperatures of the first pressing means 3a, the second pressing means 3b, the third pressing means (not shown) and the fourth pressing means (not shown) are sequentially 300 ° C., 300 ° C., 300 ° C., 150 ° C.
  • Set to The running speed of the belt is 0.5 m / min, and the pressing force is 1000 N / cm 2 .
  • the resin film used a polyimide film (Ube Industries, Ltd., UPIREX, thickness 25 ⁇ m) and a copper foil (Nippon Electrolytic Co., thickness 18 ⁇ m). As a result, it was possible to obtain a flexible laminate free from defects such as wrinkles in appearance.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)

Abstract

L’invention concerne un élément d’un dispositif de pressage capable de presser un corps plat suffisamment et de créer avec précision une forme irrégulière sans dégradation de la forme de transfert ou de la forme d’impression, et qui ne nécessite pas qu’un rouleau soit remplacé si la surface dudit rouleau est rayée. L’élément d’un dispositif de pressage d’un corps plat comprend une courroie sans fin métallique flexible mince avançant entre un rouleau menant et un rouleau mené tout en étant tendue, et un ou plusieurs ensembles de moyens de pressage constitués d’un rouleau de pressage qui tourne à une vitesse circonférentielle synchronisée avec la vitesse d’avance de la courroie sans fin métallique et presse un corps plat sur la courroie sans fin métallique, et d’une plaque d’appui qui est placée de manière à faire face au rouleau de pressage et qui supporte la force de pressage du rouleau de pressage par l’intermédiaire de la courroie sans fin métallique, le rouleau de pressage et la plaque d’appui étant respectivement munis d’un canal de distribution d’un fluide.
PCT/JP2009/003858 2009-08-11 2009-08-11 Elément d’un dispositif de pressage d’un corps plat WO2011018821A1 (fr)

Priority Applications (2)

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PCT/JP2009/003858 WO2011018821A1 (fr) 2009-08-11 2009-08-11 Elément d’un dispositif de pressage d’un corps plat
JP2011526642A JPWO2011018821A1 (ja) 2009-08-11 2009-08-11 平面体押圧装置要素

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2009/003858 WO2011018821A1 (fr) 2009-08-11 2009-08-11 Elément d’un dispositif de pressage d’un corps plat

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Cited By (5)

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Publication number Priority date Publication date Assignee Title
JP2016000528A (ja) * 2014-01-14 2016-01-07 株式会社シーエンジ 立体網状構造体の製造方法および立体網状構造体の製造装置
ES2695756A1 (es) * 2017-07-04 2019-01-10 Quinorgan S L Conjunto de moldeo por inyeccion y procedimiento de fabricacion
CN111629878A (zh) * 2017-12-21 2020-09-04 维尔克有限公司 用于形成连续结构的模制设备和方法
CN113631398A (zh) * 2019-03-26 2021-11-09 黑田刚司 热塑性合成树脂制的带状立体装饰片的制造方法及其制造装置
JP7471702B1 (ja) 2023-06-14 2024-04-22 若水技研株式会社 樹脂シートの矯正方法および製造方法ならびに樹脂シートの矯正装置

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JPS56159039A (en) * 1980-05-09 1981-12-08 Dainippon Printing Co Ltd Manufacture of transparent television screen
JPS58174686A (ja) * 1982-04-05 1983-10-13 株式会社クラレ エンボス装置
JPH0934291A (ja) * 1995-05-16 1997-02-07 Fuji Xerox Co Ltd 画像定着装置
WO1997028950A1 (fr) * 1996-02-09 1997-08-14 Modern Machinery Co., Ltd. Rouleau, machine et procede de formation d'une feuille avec film mince
JP2006251620A (ja) * 2005-03-14 2006-09-21 Fuji Xerox Co Ltd 定着装置、ゴムロール及びロール部材
JP2007083577A (ja) * 2005-09-22 2007-04-05 Toshiba Mach Co Ltd シート・フィルム成形ロール、金属製弾性外筒およびシート・フィルム成形装置
JP2008173914A (ja) * 2007-01-22 2008-07-31 Toppan Printing Co Ltd 微細凹凸パターンの転写方法及び転写箔

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Publication number Priority date Publication date Assignee Title
JPS56159039A (en) * 1980-05-09 1981-12-08 Dainippon Printing Co Ltd Manufacture of transparent television screen
JPS58174686A (ja) * 1982-04-05 1983-10-13 株式会社クラレ エンボス装置
JPH0934291A (ja) * 1995-05-16 1997-02-07 Fuji Xerox Co Ltd 画像定着装置
WO1997028950A1 (fr) * 1996-02-09 1997-08-14 Modern Machinery Co., Ltd. Rouleau, machine et procede de formation d'une feuille avec film mince
JP2006251620A (ja) * 2005-03-14 2006-09-21 Fuji Xerox Co Ltd 定着装置、ゴムロール及びロール部材
JP2007083577A (ja) * 2005-09-22 2007-04-05 Toshiba Mach Co Ltd シート・フィルム成形ロール、金属製弾性外筒およびシート・フィルム成形装置
JP2008173914A (ja) * 2007-01-22 2008-07-31 Toppan Printing Co Ltd 微細凹凸パターンの転写方法及び転写箔

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016000528A (ja) * 2014-01-14 2016-01-07 株式会社シーエンジ 立体網状構造体の製造方法および立体網状構造体の製造装置
ES2695756A1 (es) * 2017-07-04 2019-01-10 Quinorgan S L Conjunto de moldeo por inyeccion y procedimiento de fabricacion
CN111629878A (zh) * 2017-12-21 2020-09-04 维尔克有限公司 用于形成连续结构的模制设备和方法
CN111629878B (zh) * 2017-12-21 2022-09-27 维克罗知识产权控股有限责任公司 用于形成连续结构的模制设备和方法
US11981057B2 (en) 2017-12-21 2024-05-14 Velcro Ip Holdings Llc Molding resin to form continuous structures
CN113631398A (zh) * 2019-03-26 2021-11-09 黑田刚司 热塑性合成树脂制的带状立体装饰片的制造方法及其制造装置
JP7471702B1 (ja) 2023-06-14 2024-04-22 若水技研株式会社 樹脂シートの矯正方法および製造方法ならびに樹脂シートの矯正装置

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