WO2011017862A1 - 用于电子产品及cpu散热冷却系统的压电陶瓷泵 - Google Patents

用于电子产品及cpu散热冷却系统的压电陶瓷泵 Download PDF

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Publication number
WO2011017862A1
WO2011017862A1 PCT/CN2009/075052 CN2009075052W WO2011017862A1 WO 2011017862 A1 WO2011017862 A1 WO 2011017862A1 CN 2009075052 W CN2009075052 W CN 2009075052W WO 2011017862 A1 WO2011017862 A1 WO 2011017862A1
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WIPO (PCT)
Prior art keywords
valve
pump
cantilever beam
pump body
inlet
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PCT/CN2009/075052
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English (en)
French (fr)
Inventor
胡军
Original Assignee
杨竹君
林大伟
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Application filed by 杨竹君, 林大伟 filed Critical 杨竹君
Publication of WO2011017862A1 publication Critical patent/WO2011017862A1/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Definitions

  • the present invention relates to a fluid pump, and more particularly to a miniature piezoelectric ceramic pump.
  • the piezoelectric pump utilizes the tensile bending deformation of the piezoelectric ceramic sheet to cause a change in the volume of the pump chamber, and squeezes the liquid in the chamber to suck and discharge the liquid. Its working principle determines the high requirements for the design, manufacture and assembly of such pumps.
  • the patent number previously filed by the applicant is 02114470.2, and the bulletin number is CN1160514C.
  • the name is "Ultra-miniature hydraulic electronic pump" is one of them.
  • the patent solves the problems that the check valve of the prior art solution is easy to block, easy to relieve pressure, and has poor working stability, which prolongs the service life of the pump and increases the output pressure and flow rate of the pump.
  • the pump has a small flow, large volume and large noise, and is not suitable for the aerospace industry, household appliances, notebook computers, desktop computer CPU cooling, instrumentation, precision metering, medical equipment, biomedicine and other fields.
  • the object of the present invention is to overcome the deficiencies of the above prior art, and to provide a piezoelectric device suitable for CPU cooling system with large flow rate, small volume, low noise, good self-priming performance, fast reaction speed and simple structure. Ceramic pump.
  • This solution like the prior art, includes a pot-shaped pump body, an inlet pipe and an outlet pipe, a pump cover, and a pump body respectively communicating with the pump body cavity.
  • the check valve is provided with a piezoelectric ceramic transducer sheet in the pump chamber formed by assembling the pump body and the pump cover; and an insulating pressure protection layer coated or wrapped or pasted on the upper and lower surfaces of the piezoelectric ceramic transducer sheet , an elastic sealant layer is attached on the outer surface of the insulating pressure protection layer, and the improvement is: the pump body cavity includes a liquid inlet cavity and a liquid discharge a cavity, and the liquid inlet cavity communicates with the liquid inlet pipe, and the liquid discharge cavity communicates with the liquid discharge pipe; further comprising: a valve seat disk, the valve seat disk being assembled in the pump body cavity, wherein the liquid inlet cavity is provided a communicating inlet valve hole and an outlet valve hole communicating with the outlet chamber; the one-way
  • the cantilever beam valve contacts one side of the inlet valve hole or the outlet valve hole, and a layer of silicone elastic film is attached, and the cantilever beam valve and the valve hole plane are attached.
  • the contact ⁇ is sealed; further comprising: a waterproof insulating seal disposed on the outer circumference of the valve seat disc; the piezoelectric ceramic transducer sheet being mounted between the elastic seal ⁇ and the pump cover.
  • the piezoelectric ceramic transducer sheet undergoes tensile bending deformation and causes a change in the volume of the pump chamber.
  • the piezoelectric ceramic sheet is bent downward, the pressure in the inlet chamber is lowered, and the liquid is sucked through the inlet tube.
  • the liquid inlet chamber, and then the cantilever beam valve under the inlet valve hole enters the space between the valve seat disk and the piezoelectric ceramic transducer sheet; when the piezoelectric ceramic transducer sheet is bent upward, the liquid is compressed and passed out
  • the cantilever beam valve above the liquid valve hole enters the liquid discharge chamber and is finally discharged by the liquid discharge tube. Due to the continuous high frequency vibration of the piezoelectric ceramic transducer sheet, the liquid absorption and drainage are continuously performed.
  • the pump has a large flow rate due to the good sealing effect of the pump body and the pump cover and the check valve and the valve seat.
  • the cooling effect of the PU cooling system is more ideal
  • This pump has a wide range of applications and can be used in aerospace industry, automobile manufacturing, liquid fuel, fine chemicals, home smart accessories, household appliances, electronic products, laptops and desktop computers. Instruments, precision metrology, medical devices, biomedical, inkjet printing, industrial automation, agricultural spray drip irrigation and other fields.
  • FIG. 1 is a perspective view showing the outer appearance of a first embodiment of the present invention.
  • Figure 2 is an exploded perspective view of the components of the structure of Figure 1.
  • Figure 3 is a bottom view of the pump body of Figure 2.
  • Fig. 4 is an enlarged schematic cross-sectional view taken along line A-A of Fig. 1.
  • Fig. 5 is an exploded perspective view showing the components of the second embodiment of the present invention.
  • Figure 6 is a cross-sectional view taken along line A-A of Figure 5;
  • Figure 7 is a bottom plan enlarged view of the pump body of Figure 5.
  • Fig. 8 is an exploded perspective view showing the components of the embodiment 3 of the present invention.
  • Figure 9 is a cross-sectional view taken along line A-A of Figure 8.
  • Fig. 10 is a bottom plan enlarged view of the pump body of Fig. 8.
  • Figure 11 is a bottom plan enlarged view of the single cantilever beam valve of Figure 8 mounted on a valve seat disk.
  • Figure 12 is a top plan enlarged view of the single cantilever beam valve of Figure 8 mounted on a valve seat disk.
  • Fig. 13 (a) is a front elevational view showing the double cantilever beam valve piece in the above embodiment;
  • Fig. 13 (b) is an enlarged partial cross-sectional view taken along line B-B of Fig. 13 (a).
  • Fig. 14 (a) is a front elevational view showing a single cantilever beam valve piece in the above embodiment; and Fig. 14 (b) is an enlarged partial cross-sectional view taken along line A-A of Fig. 14 (a).
  • Fig. 15 is an enlarged schematic view showing the piezoelectric ceramic piece and the adhesion layer thereof in the above embodiment.
  • the pump B1 of the present embodiment includes a pump body 11, a liquid inlet pipe 111 and a liquid outlet pipe 112 respectively communicating with the pump body cavity, a pump cover 17 and a check valve, and a pump formed after the pump body 11 and the pump cover 17 are assembled.
  • a piezoelectric ceramic transducer sheet 16 is mounted in the cavity; an insulating pressure-resistant protective layer 16.1 is sprayed or wrapped or pasted on the upper and lower surfaces of the piezoelectric ceramic transducer sheet 16, and an elastic layer is attached to the outside of the insulating pressure-resistant protective layer. Sealant layer 16.2 (see Figure 15).
  • the top surface of the pump body cavity is recessed upward to form a large dimple, and the large dimple includes a lateral narrow groove 116.
  • the narrow groove 116 divides the large dimple into a liquid inlet chamber 115 and a liquid outlet chamber.
  • the inlet chamber 115 is in communication with the inlet tube 111
  • the outlet chamber 114 is in communication with the outlet tube 112
  • the inlet tube 111 and the outlet tube 112 are disposed on the same side of the pump body 11;
  • a disc 13 the valve seat disc 13 is assembled in a pump body cavity, and is provided thereon
  • the valve hole is elongated; the outer diameter of the valve seat disk 13 is slightly smaller than the inner diameter of the pump body cavity.
  • the upper surface is provided with a transverse rib 132, which can be inserted into the narrow groove 116; the inlet valve hole 134 and the outlet valve hole 131 are respectively disposed on both sides of the transverse rib 132.
  • the check valve in this embodiment is two double cantilever beam valves 12 and 14, one of which is mounted below the inlet valve bore 134 of the valve seat disk and the other 12 is mounted to the valve seat disk.
  • the upper surface of the liquid outlet valve hole 131; the cantilever beam valve is a copper piece or a spring steel piece having a thickness of 0.1 mm to 0.2 mm, and one end thereof is fixed to the pin 135 at one end away from the inlet valve hole 134 or the outlet valve hole 131.
  • the other end is respectively covered under the inlet valve hole 134 and above the outlet valve hole 131, and the cantilever beam valves 12 and 14 are in contact with one side of the inlet valve hole or the outlet valve hole, and a layer of silicone elastic film is attached (Fig.
  • the cantilever beam valve is in sealing state with the valve hole plane; in fact, the side of the inlet valve hole or the outlet valve hole contacting the cantilever valve corresponds to a valve seat.
  • the structure of the double cantilever valve plate 12 can be as shown in Fig. 13, wherein the middle portion is a rectangle 12.4, and the middle portion of the rectangle includes a punched hollow portion 12.2, thereby forming a double cantilever beam of the valve piece, and two rectangular shapes.
  • the ends are respectively connected with a semicircular shape 12.3; at the end of the valve plate away from the water inlet hole or the water outlet hole, two circular small through holes 12.1 are provided, and the two small through holes 12.1 are fitted on the valve seat disk 13
  • the two cylinders 135 are arranged to match (see Fig. 2), and the end of the valve plate is fixed around the two cylinders with an adhesive.
  • the structure of the double cantilever beam valve 14 is the same as that of the double cantilever beam valve 12.
  • waterproof insulating seal 15 which is fitted over the outer circumference of the seat disk 13.
  • the upper and lower portions of the waterproof insulating sealing jaw 15 of the present embodiment are respectively provided with a concave opening (see FIG. 4), wherein the diameter of the upper opening is equal to the outer diameter of the valve seat disk 13, and the depth of the opening is The thickness of the edge of the valve seat disk 13 is equal; the diameter of the lower opening is equal to the outer diameter of the piezoelectric ceramic transducer sheet 16, and the depth of the opening is equal to the thickness of the edge of the piezoelectric ceramic transducer sheet 16;
  • the transducer sheet 16 is mounted in the lower stop, that is, between the waterproof insulating seal 15 and the pump cover 17.
  • venting holes 172 may be provided on the pump cover, which has been shown to improve pump performance.
  • a pumping groove 113, 173 is respectively disposed corresponding to one end of the pump body 11 and the pump cover 17 away from the inlet and outlet pipes.
  • the piezoelectric ceramic is The external wire 18 of the transducer sheet 16 can be passed through the wireway.
  • two positioning pins 171 can be disposed between the pump body 11 and the pump cover 17 joint surface, which ensures accurate positioning of the assembly jaws, making the assembly more efficient and simple.
  • Embodiment 2 referring to Figs. 4-7, and Fig. 14.
  • the pump B2 of the embodiment is basically the same as the structure of the first embodiment, and the difference is that: the inner cavity of the pump body 21 is provided with an upwardly recessed inlet chamber 214 and an outlet chamber 215; wherein the inlet chamber 214 The outer end is open to the inlet pipe 212, and the inner end is semicircular.
  • the center of the semicircle is at the center of the pump body 21; the outlet chamber 215 is located at one side of the inlet chamber 214, and its shape Slightly larger than the outer contour of the single cantilever beam valve 22; the lower surface of the liquid inlet chamber 214 and the liquid outlet chamber 215 are located on the same plane, and three locating pin blind holes 213 are also disposed on the plane;
  • the outer diameter of the valve seat disk 23 is slightly smaller than the inner diameter of the inner cavity of the pump body 21.
  • the upper surface is provided with three positioning pins 232 corresponding to the three positioning pin blind holes 213, and the outer edge of the lower surface is provided with a positioning pin 232.
  • the boss 236 has a height slightly higher than the thickness of the single cantilever beam valve 24; the inlet valve hole 231 on the valve seat disk 23 is disposed at the center of the disk 23, and the liquid outlet valve hole 232 is disposed On the inner side of the disc boss 236.
  • the cantilever beam valve is two single cantilever beam valves 22 and 24, and the structure thereof is a single cantilever beam valve piece 9 shown in Fig. 14.
  • One end of the valve includes a rectangular small through hole 19.1, and One end has a circular shape of 19.3, and the diameter of the circular shape 19.3 is slightly larger than the diameters of the inlet valve hole 231 and the outlet valve hole 232.
  • the two ends are connected by a narrow strip-shaped single cantilever 19.2 in the middle;
  • the hole 19.1 is fitted over the stud 235 of the rectangular cross section provided on the seat disk 23, and the end of the valve piece 19 is fixed around the stud with an adhesive.
  • the waterproof insulating seal ⁇ 25 is a "0"-shaped cymbal that fits over the outer circumference of the seat disk 23.
  • the piezoelectric ceramic transducer sheet 26 is mounted between the waterproof insulating seal 25 and the pump cover 27.
  • Embodiment 3 see Figs. 8-12.
  • the pump B3 of the present embodiment is basically the same as that of the embodiment 2, and the difference is that the angle between the liquid inlet tube 311 and the liquid outlet tube 312 in this embodiment is 90°. Of course, it is also possible that the angle is other angles.
  • the top surface of the inner surface of the pump body 31 is provided with two blind holes, one blind hole 314 is located at the center of the pump body 31, and the other 315 is located at one side of the central blind hole 314.
  • the pump body 31 The top surface of the inner chamber is further provided with a shallow dimple 316 having a shape slightly larger than the outer contour of the single cantilever beam valve 32.
  • the center of the shallow dimple 316 corresponding to the free end of the single cantilever beam valve 32 and the central blind hole 314 is coincident, the depth of the shallow dimple 316 is slightly larger than the thickness of the cantilever beam valve 32;
  • the inlet chamber is a section of the groove 317 disposed in the pump body, the outer end of which is in communication with the inlet tube 311, and the inner end thereof is
  • the central blind hole 314 is in communication;
  • the liquid discharge chamber is also a short groove 318 disposed in the pump body, the outer end of which is communicated with the liquid outlet tube 312, and the inner end is blind to the side surface
  • the holes 315 are in communication.
  • the outer diameter of the valve seat disk 33 is slightly smaller than the inner diameter of the inner cavity of the pump body 31, and the outer edge of the lower surface is provided with a cymbal boss 332, the The height is slightly higher than the thickness of the valve single cantilever beam valve 34; the inlet valve hole 331 on the valve seat disk 33 is disposed at the center of the disk 33, and the liquid outlet valve hole 334 is disposed inside the boss of the disk 33.
  • the positions of the studs 335 and 336 of the single cantilever beam valve are also shown in Figures 11 and 12.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Description

说明书
Title of Invention:用于电子产品及 CPU散热冷却系统的压电陶瓷泵 技术领域
技术领域
[1] 本发明涉及一种流体泵， 尤其是一种微型的压电陶瓷泵。
背景技术
背景技术
[2] 压电泵是利用压电陶瓷片的拉伸弯曲变形导致泵腔容积的变化， 对腔体内的液 体产生挤压作用而吸入和排出液体。 其工作原理决定了对该类泵的设计、 制造 和装配有较高的要求。 本专利申请人在先申请的专利号为 02114470.2， 公告号为 CN1160514C, 名称为 "超微型液压式电子泵"即是其中的一种。 该专利解决了先 前技术方案泵的单向阀易堵塞、 易泄压， 工作稳定性差等问题， 延长了泵的使 用寿命， 提高了泵的输出压力和流量。 但是， 该泵存在着流量小、 体积大和噪 音大的不足， 而不适于航空航天工业、 家用电器、 笔记本电脑、 台式计算机 CPU 冷却、 仪器仪表、 精密计量、 医疗器械、 生物医学等领域。
对发明的公开
技术问题
[3] 本发明的目的是克服以上现有技术存在的不足， 而提供一种流量大、 体积小、 噪音小自吸性能好、 反应速度快且结构简单的、 适用于 CPU冷却系统的压电陶瓷 泵。
技术解决方案
[4] 为了实现上述的目的， 可以釆用以下的技术方案： 本方案与现有技术一样， 包 括盆状的泵体、 与泵体内腔分别相通的进液管和出液管、 泵盖和单向阀， 在泵 体和泵盖装配后构成的泵腔中装有压电陶瓷换能片； 压电陶瓷换能片的上面和 下面附着有一喷涂或包裹或粘贴上的绝缘耐压保护层， 在绝缘耐压保护层的外 面附着有一弹性密封胶层， 其改进是： 所说的泵体内腔包括一进液腔和一出液 腔， 并且进液腔与进液管相通， 出液腔与出液管相通； 还包括： 一阀座圆盘， 该阀座圆盘装配在泵体内腔中， 其上设有一与进液腔相通的进液阀孔和一与出 液腔相通的出液阀孔； 所述的单向阀为两个悬臂梁阀， 其中一个装在阀座圆盘 的进液阀孔的下面， 另一个装在阀座圆盘的出液阀孔的上面； 悬臂梁阀是厚度 为 0.1_0.2毫米的铜片或弹簧钢片， 其一端固定在远离进液阀孔或出液阀孔的一 端， 另一端分别覆盖在进液阀孔的下面和出液阀孔的上面， 悬臂梁阀接触进液 阀孔或出液阀孔的一面， 附着有一层硅胶弹性薄膜片， 悬臂梁阀与阀孔平面接 触吋呈密封状态； 还包括： 一防水绝缘密封圏套装在阀座圆盘的外圆上； 所述 的压电陶瓷换能片装在弹性密封圏和泵盖之间。
[5] 启动本泵后， 压电陶瓷换能片发生拉伸弯曲变形并导致泵腔容积变化， 当压电 陶瓷片向下弯曲吋， 进液腔的压力降低， 通过进液管将液体吸入进液腔， 然后 顶开进液阀孔下面的悬臂梁阀进入阀座圆盘和压电陶瓷换能片间的空间中； 当 压电陶瓷换能片向上弯曲吋， 液体被压缩， 通过出液阀孔上面的悬臂梁阀进入 出液腔， 最后由出液管排出； 由于压电陶瓷换能片连续高频的震动， 使吸液和 排液亦连续地进行。
有益效果
[6] 本发明的有益效果是：
[7] 1、 由于本泵的单向阀为悬臂梁阀， 其阀体和阀座的设计更为薄和小， 机构更 加紧凑， 因此泵的体积大大缩小；
[8] 2、 本泵由于泵体和泵盖以及单向阀和阀座密封效果好， 所以其流量大， 用于 C
PU冷却系统吋的冷却效果更为理想；
[9] 3、 本泵釆用的悬臂梁阀片后， 其噪音大大降低；
[10] 4、 本泵使用范围宽， 可应用于航空航天工业、 汽车制造业、 液体燃料、 精细 化工、 家庭智能饰品配套、 家用电器、 电子产品、 笔记本电脑和台式计算机的 C PU冷却、 仪器仪表、 精密计量、 医疗器械、 生物医学、 喷墨打印、 工业自动化 、 农用喷淋滴灌等领域。
附图说明
[11] 图 1是本发明的实施例 1的外形结构立体示意图。 [12] 图 2是图 1结构中的零部件的分解立体示意图。
[13] 图 3是图 2中的泵体之仰视示意图。
[14] 图 4是图 1的 A-A剖视放大示意图。
[15] 图 5是本发明的实施例 2中的零部件之分解立体示意图。
[16] 图 6是图 5的 A-A剖视示意图。
[17] 图 7是图 5中的泵体之仰视放大示意图。
[18] 图 8是本发明的实施例 3中的零部件之分解立体示意图。
[19] 图 9是图 8的 A-A剖视示意图。
[20] 图 10是图 8中的泵体之仰视放大示意图。
[21] 图 11是图 8中的单悬臂梁阀装在阀座圆盘上之仰视放大示意图。
[22] 图 12是图 8中的单悬臂梁阀装在阀座圆盘上之俯视放大示意图。
[23] 图 13 (a) 是上述实施例中的双悬臂梁阀片的主视示意图； 图 13(b)是图 13 (a) 的 B-B局部剖面放大图。
[24] 图 14 (a) 是上述实施例中的单悬臂梁阀片的主视示意图； 图 14(b)是图 14 (a) 的 A-A局部剖面放大图。
[25] 图 15是上述实施例中的压电陶瓷片和其附着层的放大示意图。
本发明的实施方式
[26] 为了使本发明便于理解和更加清晰， 下面通过附图和实施例对其作进一步说明
[27] 实施例 1， 参看图 1-图 4和图 13-图 15。 本实施例的泵 B1包括括泵体 11、 与泵体 内腔分别相通的进液管 111和出液管 112、 泵盖 17和单向阀， 在泵体 11和泵盖 17 装配后构成的泵腔中装有压电陶瓷换能片 16; 压电陶瓷换能片 16的上面和下面 附着有一喷涂或包裹或粘贴上的绝缘耐压保护层 16.1， 在绝缘耐压保护层的外面 附着有一弹性密封胶层 16.2 (见图 15) 。
[28] 泵体内腔的顶面向上凹陷形成一个大凹窝， 该大凹窝中包含一个横向的窄槽 11 6， 该窄槽 116将大凹窝分割成一进液腔 115和一出液腔 114， 并且进液腔 115与进 液管 111相通， 出液腔 114与出液管 112相通， 进液管 111和出液管 112设置在泵体 11的同侧； 还包括： 一阀座圆盘 13， 该阀座圆盘 13装配在泵体内腔中， 其上设 有一与进液腔 115相通的进液阀孔 134和一与出液腔 114相通的出液阀孔 131， 阀 孔为长条形； 阀座圆盘 13的外径略小于泵体内腔的内径， 其上表面设置有一个 横筋板 132， 该横筋板 132可插入上述的窄槽 116中； 进液阀孔 134和出液阀孔 131 分别设置在该横筋板 132的两边。
[29] 本实施例中的单向阀为两个双悬臂梁阀 12和 14， 其中一个 14装在阀座圆盘的进 液阀孔 134的下面， 另一个 12装在阀座圆盘的出液阀孔 131的上面； 悬臂梁阀是 厚度为 0.1_0.2毫米的铜片或弹簧钢片， 其一端固定在远离进液阀孔 134或出液 阀孔 131的一端之销柱 135上， 另一端分别覆盖在进液阀孔 134的下面和出液阀孔 131的上面， 悬臂梁阀 12和 14接触进液阀孔或出液阀孔的一面， 附着有一层硅胶 弹性薄膜片 （图中未示出） ， 悬臂梁阀与阀孔平面接触吋呈密封状态； 实际上 ， 进液阀孔或出液阀孔与悬臂梁阀接触的一面相当于一个阀座。 双悬臂梁阀片 1 2的结构可以如图 13所示， 其中部为一个矩形 12.4， 该矩形的中部包含一个冲切 出的空心部 12.2， 从而形成该阀片的双悬臂梁， 矩形的两端分别连有一个半圆形 12.3； 在该阀片远离进水孔或出水孔的一端设有两个圆形的小通孔 12.1， 该两个 小通孔 12.1套装在阀座圆盘 13上设置的、 与其相配合的两个圆柱 135上 （见图 2) ， 并用粘接剂将该阀片的此端固定在两个圆柱的周围。 双悬臂梁阀片 14的结构 与双悬臂梁阀片 12的结构相同。
[30] 另外还有一防水绝缘密封圏 15， 它套装在阀座圆盘 13的外圆上。 本实施例的防 水绝缘密封圏 15的上部和下部分别设有一个内凹的止口 （见图 4) ， 其中上部止 口的直径与阀座圆盘 13的外径相等， 该止口的深度与阀座圆盘 13边缘的厚度相 等； 下部止口的直径与压电陶瓷换能片 16的外径相等， 该止口的深度与压电陶 瓷换能片 16边缘的厚度相等； 压电陶瓷换能片 16装在该下部止口中， 即在防水 绝缘密封圏 15和泵盖 17之间。
[31] 另外， 在泵盖上可以设置有多个透气孔 172， 实验证明这样可以改善泵的性能
[32] 其次， 在泵体 11和泵盖 17远离进、 出液管的一端分别对应的设置有一个通线槽 113、 173， 当泵体和泵盖扣合后， 所述的压电陶瓷换能片 16之外接电线 18则可 从该通线槽中穿出。 [33] 再次， 在泵体 11和泵盖 17结合面之间可以设置 2个定位销 171， 这样可以保证装 配吋的准确定位， 使装配更加高效和简单。
[34] 实施例 2， 参看图 4_图7和图 14。 本实施例的泵 B2与实施例 1的结构基本相同， 其区别点在于： 所述的泵体 21内腔中设置有一向上凹陷的进液腔 214和一出液腔 215； 其中进液腔 214为弯曲状， 其外端与进液管 212相通， 其内端为半圆形， 该 半圆形的圆心在泵体 21的中心； 出液腔 215位于进液腔 214的一侧， 其外形略大 于下述的单悬臂梁阀 22的外廓； 该进液腔 214和出液腔 215的下表面位于同一平 面上， 在该平面上还设置有 3个定位销盲孔 213; 所述的阀座圆盘 23的外径略小 于泵体 21内腔的内径， 其上表面上设置有 3个与上述 3个定位销盲孔 213相对应的 定位销 232， 其下表面的外缘设置有一圏凸台 236， 该凸台 236的的高度略高于单 悬臂梁阀 24的厚度； 阀座圆盘 23上的进液阀孔 231设置在该圆盘 23的中心， 出液 阀孔 232设置在该圆盘凸台 236的内侧。
[35] 所述的悬臂梁阀为 2个单悬臂梁阀 22和 24， 其结构即图 14所示的单悬臂梁阀片 1 9, 该阀的一端包含一个矩形的小通孔 19.1， 另一端为圆形 19.3， 该圆形 19.3的直 径略大于进液阀孔 231和出液阀孔 232的直径， 该两端靠中间的一个窄条形的单 悬臂 19.2连接起来； 阀一端的小通孔 19.1套装在阀座圆盘 23设置的、 与其相配合 的矩形截面的凸柱 235上， 并用粘接剂将该阀片 19的此端固定在凸柱的周围。
[36] 防水绝缘密封圏 25为一个 "0"形圏， 它套装在阀座圆盘 23的外圆上。 压电陶瓷 换能片 26装在防水绝缘密封圏 25和泵盖 27之间。
[37] 实施例 3， 参看图 8_图12。 本实施例的泵 B3与实施例 2基本相同， 其区别点在 于： 本实施例中的进液管 311和出液管 312之间的夹角为 90°。 当然其夹角为其它 角度也是可以的。 所述的泵体 31内腔之顶面向上设置有两个盲孔， 其中一个盲 孔 314位于泵体 31的中心， 另一个 315位于中心盲孔 314的一侧； 同吋， 该泵体 31 内腔之顶面向上还设置有一外形略大于单悬臂梁阀 32的外廓的浅凹窝 316， 该浅 凹窝 316中与单悬臂梁阀 32自由端相对应的一端之中心与中心盲孔 314相重合， 浅凹窝 316的深度略大于悬臂梁阀 32的厚度； 所述的进液腔为设在泵体内的一段 槽 317， 其外端与进液管 311相通， 其内端与上述中心盲孔 314相通； 出液腔也是 设在泵体内的一段短槽 318， 其外端与出液管 312相通， 其内端与上述侧面的盲 孔 315相通。
[38] 与实施例类似的是， 所述的阀座圆盘 33的外径略小于泵体 31内腔的内径， 其下 表面的外缘设置有一圏凸台 332， 该凸台 332的的高度略高于阀单悬臂梁阀 34的 厚度； 阀座圆盘 33上的进液阀孔 331设置在该圆盘 33的中心， 出液阀孔 334设置 在该圆盘 33凸台的内侧。 在图 11和 12中也示出了装配单悬臂梁阀的凸柱 335和 33 6的位置。
[39] 以上仅为本发明之较佳实施例， 但其并不限制本发明的实施范围， 例如 3个实 施例中的单悬臂梁阀和双悬臂梁阀均可以适用， 只要将细节结构稍作变化即可
， 因此不偏离本发明的权利要求所作之等同变化与修饰， 仍应属于本发明之保 护范围。

Claims

权利要求书
[Claim 1] 一种用于电子产品及 CPU散热冷却系统的压电陶瓷泵， 包括盆状 的泵体、 与泵体内腔分别相通的进液管和出液管、 泵盖和单向阀 ， 在泵体和泵盖装配后构成的泵腔中装有压电陶瓷换能片； 压电 陶瓷换能片的上面和下面附着有一喷涂或包裹或粘贴上的绝缘耐 压保护层， 在绝缘耐压保护层的外面附着有一弹性密封胶层， 其 特征是： 所说的泵体内腔包括一进液腔和一出液腔， 并且进液腔 与进液管相通， 出液腔与出液管相通； 还包括： 一阀座圆盘， 该 阀座圆盘装配在泵体内腔中， 其上设有一与进液腔相通的进液阀 孔和一与出液腔相通的出液阀孔； 所述的单向阀为两个悬臂梁阀 ， 其中一个装在阀座圆盘的进液阀孔的下面， 另一个装在阀座圆 盘的出液阀孔的上面； 悬臂梁阀是厚度为 0.1_0.2毫米的铜片或弹 簧钢片， 其一端固定在远离进液阀孔或出液阀孔的一端， 另一端 分别覆盖在进液阀孔的下面和出液阀孔的上面， 悬臂梁阀接触进 液阀孔或出液阀孔的一面， 附着有一层硅胶弹性薄膜片， 悬臂梁 阀与阀孔平面接触吋呈密封状态； 还包括： 一防水绝缘密封圏套 装在阀座圆盘的外圆上； 所述的压电陶瓷换能片装在防水绝缘密 封圏和泵盖之间。
[Claim 2] 根据权利要求 1所述的用于电子产品及 CPU散热冷却系统的压电陶 瓷泵， 其特征是： 所述的进液管和出液管设置在泵体的同侧； 所 述的悬臂梁阀为双悬臂梁阀； 所述的泵体内腔的顶面向上凹陷形 成一个大凹窝， 该大凹窝中包含一个横向的窄槽， 该窄槽将大凹 窝分割成所说的一进液腔和一出液腔； 所述的阀座圆盘的外径略 小于泵体内腔的内径， 其上表面设置有一个横筋板， 该横筋板可 插入上述的窄槽中； 所述的进液阀孔和出液阀孔分别设置在该横 筋板的两边。
[Claim 3] 根据权利要求 1所述的用于电子产品及 CPU散热冷却系统的压电陶 瓷泵， 其特征是： 所述的进水管和出水管设置在泵体的同侧； 所 述的悬臂梁阀为单悬臂梁阀； 所述的泵体内腔中设置有一向上凹 陷的进液腔和一出液腔； 其中进液腔为弯曲状， 其外端与进液管 相通， 其内端为半圆形， 该半圆形的圆心在泵体的中心； 出液腔 位于进液腔的一侧， 其外形略大于悬臂梁阀的外廓； 该进液腔和 出液腔的下表面位于同一平面上， 在该平面上还设置有 3个定位销 盲孔； 所述的阀座圆盘的外径略小于泵体内腔的内径， 其上表面 上设置有 3个与上述 3个定位销盲孔相对应的定位销， 其下表面的 外缘设置有一圏凸台， 该凸台的的高度略高于阀悬臂梁阀的厚度 ； 阀座圆盘上的进液阀孔设置在该圆盘的中心， 出液阀孔设置在 该圆盘凸台的内侧。
[Claim 4] 根据权利要求 1所述的用于电子产品及 CPU散热冷却系统的压电陶 瓷泵， 其特征是： 所述的悬臂梁阀为单悬臂梁阀； 所述的泵体内 腔之顶面向上设置有两个盲孔， 其中一个盲孔位于泵体的中心， 另一个位于中心盲孔的一侧； 同吋， 该泵体内腔之顶面向上还设 置有一外形略大于悬臂梁阀的外廓的浅凹窝， 该凹窝中与悬臂梁 阀自由端相对应的一端之中心与中心盲孔相重合， 浅凹窝的深度 略大于悬臂梁阀的厚度； 所述的进液腔的外端与进液管相通， 其 内端与上述中心盲孔相通； 出液腔的外端与出液管相通， 其内端 与上述侧面的盲孔相通； 所述的阀座圆盘的外径略小于泵体内腔 的内径， 其下表面的外缘设置有一圏凸台， 该凸台的的高度略高 于阀悬臂梁阀的厚度； 阀座圆盘上的进液阀孔设置在该圆盘的中 心， 出液阀孔设置在该圆盘凸台的内侧。
[Claim 5] 根据权利要求 1_4其中之一所述的用于 CPU冷却系统的压电陶瓷 泵， 其特征是在所述的泵盖上设置有多个透气孔。
[Claim 6] 根据权利要求 5所述的用于 CPU冷却系统的压电陶瓷泵， 其特征是 在所述的泵体和泵盖的一侧分别对应的设置有一个通线槽， 当泵 体和泵盖扣合后， 所述的压电陶瓷换能片之外接电线可从该通线 槽中穿出。
[Claim 7] 根据权利要求 6其中之一所述的用于 CPU冷却系统的压电陶瓷泵， 其特征是所述的悬臂梁阀是单悬臂梁阀。
[Claim 8] 根据权利要求 6其中之一所述的用于 CPU冷却系统的压电陶瓷泵， 其特征是所述的悬臂梁阀是双悬臂梁阀。
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