WO2012139502A1 - 压电泵和压电陶瓷片保护方法 - Google Patents

压电泵和压电陶瓷片保护方法 Download PDF

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Publication number
WO2012139502A1
WO2012139502A1 PCT/CN2012/073872 CN2012073872W WO2012139502A1 WO 2012139502 A1 WO2012139502 A1 WO 2012139502A1 CN 2012073872 W CN2012073872 W CN 2012073872W WO 2012139502 A1 WO2012139502 A1 WO 2012139502A1
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WIPO (PCT)
Prior art keywords
piezoelectric
sheet
pump
piezoelectric pump
piezoelectric ceramic
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PCT/CN2012/073872
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English (en)
French (fr)
Inventor
林淑媛
曹孝平
曹伟祥
Original Assignee
Lin Shuyuan
Cao Xiaoping
Cao Weixiang
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Application filed by Lin Shuyuan, Cao Xiaoping, Cao Weixiang filed Critical Lin Shuyuan
Publication of WO2012139502A1 publication Critical patent/WO2012139502A1/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

Definitions

  • the present invention relates to a micropump, and more particularly to a piezoelectric pump using a piezoelectric ceramic sheet as an energy conversion device and a ceramic sheet protection method therefor.
  • Piezoelectric pumps are a new type of fluid drive. It does not require an additional drive motor, but uses the piezoelectric effect of the piezoelectric ceramic to deform the piezoelectric vibrator, and then the volume change of the pump chamber is caused by the deformation to realize the fluid output or the piezoelectric vibrator is used to generate the fluctuation to transmit the liquid.
  • the pump combines the driving source part, the transmission part and the pump body of the conventional pump to realize the single structure, small volume, light weight, low energy consumption, no noise, no electromagnetic interference, and can be controlled according to the applied voltage or frequency.
  • Output small flow can be widely used in small mobile devices, CPUs and video cards, game consoles, notebooks, blade servers, photovoltaic cells, LED lights, home appliances, medical equipment, petrochemical equipment, biomedical, automotive and aviation Product support for fluid delivery technology solutions such as electronic equipment.
  • the piezoelectric pump consists of a piezoelectric vibrator, a pump valve and a pump body.
  • the working principle is: When the alternating current power source U is applied to both ends of the piezoelectric vibrator, the piezoelectric vibrator is radially compressed under the action of an electric field, and a tensile stress is generated inside, thereby causing the piezoelectric vibrator to bend and deform.
  • the pump chamber volume increases, the fluid pressure in the chamber decreases, the fluid inlet pump valve opens, the fluid outlet pump valve closes, and the liquid enters the pump chamber;
  • the pump The volume of the chamber is reduced, the fluid pressure in the chamber is increased, the fluid inlet pump valve is closed, the fluid outlet pump valve is opened, and the pump chamber liquid is squeezed out to form a gentle continuous directional flow.
  • Cisoelectric pump and its piezoelectric ceramic sheet protection method Chinese Patent No. 02114467.2 adopts a polyester fluorine-based pressure-resistant insulating film on the surface of the metal substrate, and the ceramic surface is filled with 1-3 mm insulating silicon rubber to treat the piezoelectric ceramic.
  • the protection and safety of the film first of all, the polyester fluorine-based pressure-resistant insulating film can not be mechanized, the cost is high, the output is low; the second is the potting of 1-3 mm insulating silicon rubber raw materials, the potting curing time is long, the same is High cost and low output, the process is difficult to industrialize.
  • Piezoelectric pump is an emerging industrial field. There are many patents for piezoelectric pumps, but there are only a few that can be industrialized, and the performance indicators are all good and less. There are still many difficulties in the field of piezoelectric pumps, such as complex production processes, easy to burn of piezoelectric ceramic sheets, and low pressure flow.
  • the object of the present invention is to provide a novel piezoelectric pump and piezoelectric ceramic sheet for piezoelectric pump protection. Method.
  • a piezoelectric pump having a structural process cartridge, a flow rate increase, and a piezoelectric ceramic sheet (transducer) is provided.
  • a piezoelectric pump comprising a pump body formed by sealing connection between an upper casing and a lower casing, a pump chamber disposed in the pump body, and a sealing jaw, a transducer sheet and a valve plate disposed in the pump body are disposed at
  • the water inlet and the water outlet of the pump body are connected by screws or ultrasonic welding, and the inner flange of the upper shell 1 presses against the upper surface of the transducer sheet, and the outer circle of the transducer sheet is closely matched with the inner wall of the lower shell.
  • the valve inlet of the lower casing is provided with a valve plate, and the sealing jaw is installed at the maximum circumference or the maximum circumference of the transducer sheet.
  • the sealing jaw is installed close to the maximum outer diameter of the transducer sheet, which is beneficial to maximize the vibration amplitude of the transducer sheet, thereby increasing the output flow of the pump; the inlet of the pump is at or near the center of the transducer sheet, where the fluid
  • the compression ratio is the largest, and the water outlet is made at the maximum outer circumference of the transducer sheet or near the maximum outer circumference.
  • the fluid here has the smallest compression ratio, the fluid compression ratio is the maximum, the compression ratio is the smallest, and the speed and pressure changes are gradually. Ground, can reduce energy loss due to sudden change of direction, and help to improve the energy conversion efficiency of the pump.
  • the ceramic surface of the piezoelectric ceramic sheet (transducing sheet) is not exposed to water in particular, and it is blackened and damaged by water; the piezoelectric ceramic sheet substrate is made of a metal conductive material, and the surface of the conventional piezoelectric ceramic sheet is not surface-insulated. Contact with water during power-on is likely to cause injury.
  • FIG. 1 is a front sectional view showing a piezoelectric pump according to an embodiment of the present invention.
  • Fig. 2 is a bottom view of a piezoelectric pump according to an embodiment of the present invention.
  • Fig. 3 is a front elevational view of a piezoelectric ceramic sheet of a piezoelectric pump according to an embodiment of the present invention.
  • Fig. 4 is a bottom plan view showing a piezoelectric ceramic sheet of a piezoelectric pump according to an embodiment of the present invention. detailed description
  • FIG. 1 and 2 show an embodiment of the piezoelectric pump of the present invention, which is composed of an upper casing 1, a transducer sheet 2, a valve plate 3, a sealing jaw 4 and a lower casing 5.
  • the upper shell 1 and the lower shell 5 are integrally connected by screwing or ultrasonic welding, and the inner flange of the upper shell 1 presses against the upper surface of the transducer sheet 2, and the outer circle of the transducer sheet 2 is tightly fitted with the inner wall of the lower shell 5, and the lower shell 5 is positioned.
  • the water inlet 104 is provided with a valve plate 3, and the sealing jaw 4 is installed at the maximum circumference or the maximum circumference of the transducer sheet 2, and assembled to form a complete piezoelectric pump.
  • the sealing jaw 4 is mounted at the maximum circumference or the maximum circumference of the transducer sheet 2, which corresponds to the fulcrum of the lever to the maximum circumference, and the resistance arm is shortened, which is advantageous for effectively utilizing the maximum amplitude of the transducer sheet 2.
  • the fluid flows in the direction of the arrow shown in Figure 1, from the water inlet 104 or fluid flow to the marker 102.
  • 3 and 4 show an embodiment of a method of protecting a piezoelectric ceramic sheet in the present invention.
  • the conductive surface of the solder joint 202, the piezoelectric ceramic 203 and the metal substrate 204 on the transducer sheet 2 are all coated with a thin insulating protective film which is insulated by a normal temperature surface treatment method of less than 100 degrees. Sprayed, coated or printed, thin and uniform, easy to operate, low cost. Its labor and material saving effects are obvious.
  • the normal temperature surface treatment method of less than 100 degrees does not damage the internal structure of the transducer sheet 2; the insulating film of less than 0.15 mm thick does not waste material, and does not have a large influence on the amplitude of the transducer sheet 2.
  • the power line 201 of Fig. 4 is the power line 201 of the transducing sheet 2.
  • the valve plate can be installed as a double valve pump at the water outlet.
  • the single valve pump does not self-prime, it needs to be filled with water and exhaust; the double valve pump has self-priming function.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Description

压电泵和压电陶瓷片保护方法 技术领域
本发明涉及微型泵， 尤其涉及一种以压电陶瓷片为能量转换装置的压电泵 及其陶瓷片保护方法。 背景技术
压电泵是种新型流体驱动器。 它不需要附加驱动电机， 而是利用压电 陶瓷的压电效应使压电振子产生变形， 再由变形产生泵腔的容积变化实现 流体输出或者利用压电振子产生波动来传输液体， 由于压电泵将传统泵的 驱动源部分、 传动部分及泵体三者合为一体， 实现结构筒单、 体积小、 重 量轻、 耗能低、 无噪声、 无电磁干扰， 并可根据施加电压或频率控制输出 微小流量， 可广泛应用于小型移动设备、 CPU及显示卡、 游戏机控制板、 笔记本电脑、 刀片服务器、 光生伏打电池、 LED灯、 家电、 医疗器械、 石 化设备、 生物医学、 汽车和航空电子设备等流体输送技术方案的产品配套。
压电泵由压电振子、 泵阀和泵体组成。 其工作原理是； 当压电振子两 端施加交流电源 U时，压电振子在电场作用下径向压缩， 内部产生拉应力， 从而使压电振子弯曲变形。 当压电振子正向弯曲时， 泵腔容积增大， 腔内 流体压力减小， 流体进口泵阀打开， 流体出口泵阀关闭， 液体进入泵腔； 当压电振子向反向弯曲时， 泵腔容积减小， 腔内流体压力增大， 流体进口 泵阀关闭， 流体出口泵阀打开， 泵腔液体被挤压排出， 形成平緩的连续不 断的定向流动。
在压电泵和其压电陶瓷片保护方法方面， 中国专利号 02114467.2采取在金 属基片表面贴聚酯氟类耐压绝缘薄膜， 陶瓷表面灌封 1-3毫米绝缘硅橡胶来处 理压电陶瓷片的保护和安全问题，首先是贴聚酯氟类耐压绝缘薄膜不能机械化， 成本高、 产量低； 其次是灌封 1-3毫米绝缘硅橡胶原材料消耗多、 灌封固化时 间长， 同样是高成本、 低产量， 该工艺方法难以产业化。
压电泵是一个新兴的产业领域， 压电泵专利不少， 真正能够产业化的却 4艮 少， 同时性能指标各方面都不错的更少。压电泵领域还有不少需要突破的难关， 如生产工艺复杂、 压电陶瓷片粘水易烧毁、 压力流量偏低等等。
因此， 现有的压电泵领域还存在改进的空间。 发明内容
本发明的目的在于提供一种新型的压电泵和压电泵用的压电陶瓷片保护 方法。
根据本发明的一个方面， 提供一种结构工艺筒单、 流量提升、 压电陶瓷片 (换能片）安全可靠的压电泵。
本发明的技术方案如下： 一种压电泵， 包括上壳、 下壳密封连接形成的泵 体， 设置在泵体内的泵腔， 设置在泵体内的密封圏、 换能片、 阀片设置于泵体 的进水口和出水口， 上下壳用螺釘连接或超声波焊接成一体， 上壳 1的内凸缘 压住换能片的上表面， 换能片的外圓与下壳的内壁紧配合定位， 下壳的进水口 处装有阀片， 密封圏安装在换能片接近最大圓周处或最大圓周处。 密封圏安装 在接近换能片最大外径处， 有利于换能片的震动幅度最大化， 从而提升泵的输 出流量； 泵的进水口做在换能片中心处或接近中心处， 此处流体压缩比最大， 出水口做在换能片最大外经处或接近最大外经处， 流体在此处压缩比最小， 流 体压缩比最大处进、 压缩比最小处出， 其速度和压力变化是逐渐地， 能减少因 突然变向等能量损耗， 有利于提高泵的能量转化效率。 压电陶瓷片 （换能片） 的陶瓷面通电状态特别不能沾水， 沾水就烧黑受损； 压电陶瓷片基材为金属导 电材料， 传统的压电陶瓷片表面不做表面绝缘处理， 通电时接触水易造成伤人 事故。 为此， 我们把压电陶瓷片的棵露导电表面用喷涂、 涂覆、 印刷等 100度 以下低温处理工艺方法涂上一层小于 0.15毫米的、 薄薄的、 均匀的绝缘涂料， 筒单有效地解决了压电陶瓷片保护和安全问题。 附图说明
图 1是本发明一实施例的压电泵的主剖视图。
图 2是本发明一实施例的压电泵的仰视图。
图 3是本发明一实施例的压电泵的压电陶瓷片主视图。
图 4是本发明一实施例的压电泵的压电陶瓷片仰视图。 具体实施方式
以下结合附图和具体实施方式， 对本发明进行更详细地说明。
图 1和图 2是本发明中压电泵的一个实施例， 由上壳 1、换能片 2、 阀片 3、 密封圏 4和下壳 5组成。 上壳 1和下壳 5用螺釘连接或超声波焊接成一体， 上 壳 1的内凸缘压住换能片 2上表面， 换能片 2外圓与下壳 5内壁紧配合定位， 下壳 5的进水口 104处装有阀片 3 , 密封圏 4安装在换能片 2接近最大圓周处 或最大圓周处， 组装后构成一个完整的压电泵。
密封圏 4安装在换能片 2接近最大圓周处或最大圓周处， 相当于杠杆的支 点往最大圓周处靠， 阻力臂变短， 有利于有效利用换能片 2的最大振幅。 在工 作过程中，流体按图 1所示的箭头方向流动，从进水口 104或流体流向标识 102 流入，从出水口 103或流体流向标识 101流出，进水口 104处于泵腔的中心处， 出水口 103在泵腔的边缘处， 流体从泵腔中心向四周均匀的散开，最后在高压、 高速状态下从边缘处流出， 流体压力、 流速无突变， 泵腔内流体流动的损失少， 泵的效率提高。
图 3和图 4是本发明中压电陶瓷片保护方法实施例。换能片 2上的焊点 202、 压电陶瓷 203和金属基片 204棵露导电表面全部涂覆一层薄薄的绝缘保护膜， 该保护膜是用小于 100度的常温表面处理方法绝缘涂料喷涂、涂覆或印刷而得， 薄而均匀、 操作筒单、 成本低廉。 其人工和材料节省效果明显。 小于 100度的 常温表面处理方法， 不会损坏换能片 2的内部组织； 小于 0.15毫米厚的绝缘薄 膜， 一不会浪费材料， 二不会对换能片 2的振幅产生大的影响。 图 4的电源线 201为换能片 2的电源线 201。
根据本发明的另一实施例， 在出水口装阀片即可成为双阀泵。 单阀泵不自 吸， 需灌水排气； 双阀泵有自吸功能。

Claims

权利要求书
1、 一种压电泵， 其特征在于： 包括上壳 （1)、 下壳 （5) 密封连接形成的 泵体， 设置在泵体内的密封圏 （4)、 换能片 （2)、 阀片 （3), 所述阀片 （3)设 置于泵体的进水口 （104), 所述的密封圏 （4)安装在换能片 （2)接近最大圓 周处或最大圓周处。
2、 根据权利要求 1所述的压电泵， 其特征在于： 进水口 （104)处于换能 片 （2) 的圓心处或接近于圓心处。
3、 根据权利要求 1所述的压电泵， 其特征在于： 出水口 （103)处于换能 片 （2) 的最大圓周处或接近于最大圓周处。
4、 根据权利要求 1所述的压电泵用的压电陶瓷片保护方法， 其特征在于： 在换能片 （2)上的焊点（202)、 陶瓷（203 )和金属基片 （204)的棵露导电表 面涂覆绝缘保护膜。
5、 根据权利要求 4所述的压电泵用的压电陶瓷片保护方法， 其特征在于： 绝缘保护膜是厚度低于 0.15毫米的均匀的薄膜。
6、 根据权利要求 4所述的压电泵用的压电陶瓷片保护方法， 其特征在于： 绝缘保护膜是在低于 100度的作业温度下用喷涂、 涂覆、 印刷制作。
PCT/CN2012/073872 2011-04-12 2012-04-12 压电泵和压电陶瓷片保护方法 WO2012139502A1 (zh)

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