WO2011002252A3 - 초단파장 노광기를 이용한 고체 촬상 소자용 컬러 필터의 제조방법, 그 방법에 의해 제조된 컬러 필터 및 이를 포함하는 고체 촬상 소자 - Google Patents

초단파장 노광기를 이용한 고체 촬상 소자용 컬러 필터의 제조방법, 그 방법에 의해 제조된 컬러 필터 및 이를 포함하는 고체 촬상 소자 Download PDF

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Publication number
WO2011002252A3
WO2011002252A3 PCT/KR2010/004299 KR2010004299W WO2011002252A3 WO 2011002252 A3 WO2011002252 A3 WO 2011002252A3 KR 2010004299 W KR2010004299 W KR 2010004299W WO 2011002252 A3 WO2011002252 A3 WO 2011002252A3
Authority
WO
WIPO (PCT)
Prior art keywords
imaging device
color filter
solid state
state imaging
same
Prior art date
Application number
PCT/KR2010/004299
Other languages
English (en)
French (fr)
Other versions
WO2011002252A2 (ko
Inventor
이상행
김상태
성시진
김성현
이승노
온정훈
전지민
Original Assignee
동우화인켐
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 동우화인켐 filed Critical 동우화인켐
Publication of WO2011002252A2 publication Critical patent/WO2011002252A2/ko
Publication of WO2011002252A3 publication Critical patent/WO2011002252A3/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

본 발명은 초단파장 노광기를 이용한 고체 촬상 소자용 컬러 필터의 제조방법, 그 방법에 의해 제조된 컬러 필터 및 이를 포함하는 고체 촬상 소자에 관한 것으로서, 본 발명에 따르면 초단파장 노광기와 높은 개구수를 통해 안료분산형 착색 감광성 수지 조성물을 이용하여 초미세화된 착색 패턴이 구현된 컬러 필터를 제조할 수 있으며, 따라서 상기 제조방법에 의해 제조되는 컬러 필터는 고체 촬상 소자에 유용하게 적용될 수 있다.
PCT/KR2010/004299 2009-07-02 2010-07-02 초단파장 노광기를 이용한 고체 촬상 소자용 컬러 필터의 제조방법, 그 방법에 의해 제조된 컬러 필터 및 이를 포함하는 고체 촬상 소자 WO2011002252A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0060146 2009-07-02
KR1020090060146A KR101573937B1 (ko) 2009-07-02 2009-07-02 초단파장 노광기를 이용한 고체 촬상 소자용 컬러 필터의 제조방법, 그 방법에 의해 제조된 컬러 필터 및 이를 포함하는 고체 촬상 소자

Publications (2)

Publication Number Publication Date
WO2011002252A2 WO2011002252A2 (ko) 2011-01-06
WO2011002252A3 true WO2011002252A3 (ko) 2011-03-31

Family

ID=43411626

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/004299 WO2011002252A2 (ko) 2009-07-02 2010-07-02 초단파장 노광기를 이용한 고체 촬상 소자용 컬러 필터의 제조방법, 그 방법에 의해 제조된 컬러 필터 및 이를 포함하는 고체 촬상 소자

Country Status (2)

Country Link
KR (1) KR101573937B1 (ko)
WO (1) WO2011002252A2 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6899220B2 (ja) * 2017-01-11 2021-07-07 株式会社ダイセル レジスト除去用組成物
KR20200122356A (ko) 2018-03-26 2020-10-27 후지필름 가부시키가이샤 감광성 조성물
JPWO2019188653A1 (ja) 2018-03-26 2021-02-18 富士フイルム株式会社 感光性組成物
TW202208891A (zh) * 2020-07-29 2022-03-01 日商富士軟片股份有限公司 濾光器的製造方法及固體攝像元件的製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030072323A (ko) * 2000-08-17 2003-09-13 미쓰비시 가가꾸 가부시키가이샤 컬러필터용 조성물 및 컬러필터
EP1959276A2 (en) * 2007-02-14 2008-08-20 FUJIFILM Corporation Color Filter and Method of Manufacturing the same, and Solid-State Image Pickup Element
KR20090032003A (ko) * 2007-09-26 2009-03-31 후지필름 가부시키가이샤 고체 촬상 소자용 착색 감광성 조성물, 고체 촬상 소자용 컬러 필터 및 그 제조 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4725108B2 (ja) 2005-01-11 2011-07-13 凸版印刷株式会社 カラー固体撮像素子
JP2009102532A (ja) 2007-10-24 2009-05-14 Fujifilm Corp 着色組成物、着色光硬化性組成物、カラーフィルタ、液晶表示装置、及び固体撮像素子

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030072323A (ko) * 2000-08-17 2003-09-13 미쓰비시 가가꾸 가부시키가이샤 컬러필터용 조성물 및 컬러필터
EP1959276A2 (en) * 2007-02-14 2008-08-20 FUJIFILM Corporation Color Filter and Method of Manufacturing the same, and Solid-State Image Pickup Element
KR20090032003A (ko) * 2007-09-26 2009-03-31 후지필름 가부시키가이샤 고체 촬상 소자용 착색 감광성 조성물, 고체 촬상 소자용 컬러 필터 및 그 제조 방법

Also Published As

Publication number Publication date
KR20110002605A (ko) 2011-01-10
WO2011002252A2 (ko) 2011-01-06
KR101573937B1 (ko) 2015-12-03

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