WO2010109976A1 - Dispositif d'entraînement - Google Patents

Dispositif d'entraînement Download PDF

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Publication number
WO2010109976A1
WO2010109976A1 PCT/JP2010/052163 JP2010052163W WO2010109976A1 WO 2010109976 A1 WO2010109976 A1 WO 2010109976A1 JP 2010052163 W JP2010052163 W JP 2010052163W WO 2010109976 A1 WO2010109976 A1 WO 2010109976A1
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WO
WIPO (PCT)
Prior art keywords
drive shaft
axial direction
drive device
movable body
drive
Prior art date
Application number
PCT/JP2010/052163
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English (en)
Japanese (ja)
Inventor
直樹 三ツ木
淳一郎 米竹
幸宏 尾関
Original Assignee
コニカミノルタオプト株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コニカミノルタオプト株式会社 filed Critical コニカミノルタオプト株式会社
Priority to JP2011505928A priority Critical patent/JPWO2010109976A1/ja
Publication of WO2010109976A1 publication Critical patent/WO2010109976A1/fr

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages

Definitions

  • the present invention relates to a drive device.
  • a drive device hereinafter referred to as a SIDM device
  • a smooth impact drive mechanism Smooth Impact Drive Mechanism
  • a drive device that reciprocates while controlling a moving body on the order of nanometers.
  • a smooth impact drive mechanism (Smooth Impact Drive Mechanism) as a drive device that reciprocates while controlling a moving body on the order of nanometers.
  • Minolta Opto Corporation has been proposed (see, for example, Patent Documents 1 and 2).
  • such an SIDM apparatus supports the piezoelectric element 100 that expands and contracts when a voltage is applied, the drive shaft 101 that is displaced by the expansion and contraction of the piezoelectric element 100, and the piezoelectric element 100 or the drive shaft 101.
  • a support member 102 and a moving body 103 that is frictionally engaged with the drive shaft 101 and moves in the axial direction of the drive shaft 101, and the like.
  • the moving body 103 is moved in the axial direction of the drive shaft 101 using inertial force and frictional force.
  • the moving body 103 includes a substantially U-shaped moving body main body 104 provided with a groove 104A extending in the axial direction of the drive shaft 101, and the drive shaft 101 as a groove 104A.
  • the plate spring 105 that urges the bottom surface of the groove 104A and the coil spring 106 that urges the drive shaft 101 toward the side wall surface of the groove 104A.
  • plate-like sliding plates 107 and 108 that slide with respect to the drive shaft 101 are interposed between the plate spring 105 and the drive shaft 101 and between the coil spring 106 and the drive shaft 101.
  • JP-A-8-29658 Japanese Patent Laid-Open No. 11-18447
  • An object of the present invention is to provide a driving device capable of reducing the manufacturing cost as compared with the conventional one.
  • a piezoelectric element that expands and contracts by application of voltage
  • a columnar drive shaft displaced by expansion and contraction of the piezoelectric element
  • a movement restricting portion that supports the piezoelectric element so as to be stretchable while restricting movement of the piezoelectric element
  • a moving body that is frictionally engaged with the drive shaft and moves in the axial direction of the drive shaft;
  • the moving body is A movable body having a sliding surface that slides relative to the drive shaft; While being fixed to the movable body main body so as to surround the drive shaft in the circumferential direction in cooperation with the movable body main body, while abutting on the drive shaft and urging the drive shaft against the sliding surface, And an urging member that slides with respect to the drive shaft.
  • the mobile body is A plate-like member having only one planar sliding surface;
  • the biasing member is A leaf spring in which a cross section perpendicular to the axial direction is formed in a substantially M shape, a substantially V shape or a substantially U shape; It is preferable that both ends of the cross section are fixed to the movable body main body, and the drive shaft is biased to the sliding surface in the middle.
  • the biasing member is It is preferable that the drive shaft bends between the both end portions and the midway portion in the cross section and contacts the drive shaft.
  • the drive shaft is It is formed in a semi-cylindrical shape and abuts on the flat surface portion of the side peripheral surface against the sliding surface,
  • the biasing member is A cross section perpendicular to the axial direction may be formed in a substantially V shape or a substantially U shape, and relative movement of the movable body relative to the drive shaft in the cross section perpendicular to the axial direction may be restricted.
  • the mobile body is Having a groove extending in the axial direction;
  • the groove is It is preferable that the bottom surface is the sliding surface, and the relative movement of the movable body relative to the drive shaft in a cross section perpendicular to the axial direction is regulated by the inner wall surface.
  • the mobile body is A substantially L-shaped member having two planar sliding surfaces;
  • the biasing member is A leaf spring having a substantially L-shaped cross section perpendicular to the axial direction; It is preferable that both ends of the cross section are fixed to the movable body main body, and the drive shaft is urged to each sliding surface in the middle.
  • the mobile body is A substantially U-shaped member having a groove portion extending in the axial direction and having three planar sliding surfaces on the bottom surface and inner wall surface of the groove portion,
  • the biasing member is A leaf spring in which a cross section perpendicular to the axial direction is formed in a substantially M shape; It is preferable that both ends of the cross section are fixed to the movable body main body, and the drive shaft is biased toward the bottom surface of the groove portion in the middle portion.
  • the biasing member is It is a leaf spring, and it is preferable that, in the sliding region with respect to the drive shaft, an end region in the axial direction has an inclined portion that moves away from the drive shaft from the inside toward the end side along the axial direction.
  • the biasing member is It is a leaf spring, and the sliding area with respect to the drive shaft is preferably coated with DLC, titanium or carbon.
  • the biasing member is It is a leaf
  • the urging member is preferably a leaf spring formed of SUS, beryllium copper or phosphor bronze.
  • the biasing member is It is preferable to contact the drive shaft along the axial direction.
  • the biasing member is It is preferable to make point contact with the drive shaft in a cross section perpendicular to the axial direction.
  • the urging member that urges the drive shaft against the sliding surface abuts on the drive shaft and slides relative to the drive shaft.
  • the number of parts and the labor of assembly can be reduced, and the manufacturing cost can be reduced.
  • the drive device can be reduced in size as compared with the prior art.
  • the biasing member is fixed to the movable body main body so as to surround the drive shaft in the circumferential direction in cooperation with the movable body main body, the biasing member functions as a guide member for guiding the sliding of the movable body. Can be held on the body. Therefore, the manufacturing cost can be reduced and the SIDM device can be downsized as compared with the case where the moving body and the guide member are separately manufactured and assembled.
  • FIG. 1 It is a conceptual diagram which shows schematic structure of a light source unit. It is a figure which shows a SIDM apparatus. It is a figure which shows the mobile body and drive shaft of a SIDM apparatus. It is a figure which shows the inclination part of a leaf
  • FIG. 1 is a conceptual diagram showing a schematic configuration of a light source unit 100 in the present embodiment.
  • a light source unit 100 includes an infrared semiconductor laser 11 that irradiates laser light inside a package 10 and an optical element (collimator lens) that converts the laser light from the infrared semiconductor laser 11 into a parallel beam. 12, an optical element (condensing lens) 13 that condenses the light beam from the optical element 12, and a PPLN (Periodically Polluted Lithium Niobate) waveguide 14 as a SHG (Second Harmonic Generation) element.
  • the shaded portion in the figure indicates the luminous flux.
  • the light source unit 100 has a maximum length of 10 mm or less, and the optical elements 12 and 13 have a maximum diameter of 10 mm or less.
  • the PPLN waveguide 14 is provided with a temperature control plate 16 for controlling the temperature of the PPLN waveguide 14.
  • these members in the light source unit 100 for example, those disclosed in the following documents 1 and 2 can be used.
  • the SIDM devices 1A and 1B are ultra-compact and high-precision actuators that use a piezoelectric element as a drive source.
  • the optical element 12 is the Z-axis direction in the figure
  • the optical element 13 is the Y-axis in the figure. It is possible to move in the direction.
  • the SIDM apparatus 1A may move the optical element 12 in the Y-axis direction
  • the SIDM apparatus 1B may move the optical element 13 in the Z-axis direction
  • the SIDM apparatuses 1A and 1B may move in the Z-axis direction and the Y-axis direction.
  • the optical elements 12 and 13 may be moved in the X-axis direction. Details of the SIDM devices 1A and 1B will be described later.
  • a control unit (not shown) is connected to the SIDM devices 1A and 1B.
  • the control unit drives the SIDM devices 1A and 1B to move the optical elements 12 and 13, respectively, so that the optical axes of the optical elements 12 and 13 are set to the incident end faces of the infrared semiconductor laser 11 and the PPLN waveguide 14. It can be adjusted (aligned).
  • the light source unit 100 as described above can be used as a green light source in a conventionally known image projection apparatus, for example.
  • SIDM devices 1A and 1B will be described in detail.
  • FIG. 2 is a diagram showing a schematic configuration of SIDM devices 1A and 1B (hereinafter referred to as SIDM device 1) as drive devices according to the present invention.
  • the SIDM device 1 includes a piezoelectric element 2, a drive shaft 3, a collar member 4, a moving body 5, and the like.
  • a piezoelectric element 2 As shown in this figure, the SIDM device 1 includes a piezoelectric element 2, a drive shaft 3, a collar member 4, a moving body 5, and the like.
  • illustration of the movable body 5 and the like is omitted in FIG. 2A, and illustration of the color member 4 and the like is omitted in FIG. 2B and the illustration of the movable body 5 is simplified. ing.
  • the piezoelectric element 2 expands and contracts when a voltage is applied, and is a piezo element in the present embodiment.
  • the expansion / contraction direction of the piezoelectric element 2 is the Z-axis direction in the SIDM apparatus 1A and the Y-axis direction in the SIDM apparatus 1B. Further, a voltage is applied to the piezoelectric element 2 from a control device (not shown).
  • the drive shaft 3 is a columnar member, which is a quadrangular columnar member in the present embodiment, and is fixed to one end of the piezoelectric element 2 and is displaced by the expansion and contraction of the piezoelectric element 2.
  • the drive shaft 3 is made of a carbon-containing material.
  • the drive shaft 3 is made of a mixed material (carbon composite) of carbon fiber and resin.
  • the displacement direction of the drive shaft 3 is the Z-axis direction in the SIDM apparatus 1A and the Y-axis direction in the SIDM apparatus 1B.
  • the drive shaft 3 is not limited to a carbon-containing material, and ceramic, metal, carbon alone, etc. can be used.
  • the collar member 4 is a movement restricting portion in the present invention, and is formed in a substantially U shape as shown in FIG.
  • the collar member 4 is fixed to the bracket 18 on the side surface and is fixed to the side peripheral surface of the drive shaft 3 on the inner side surface, and supports the piezoelectric element 2 via the drive shaft 3.
  • the bracket 18 has two holes 180 and 181 that are recessed in the Z-axis direction and the Y-axis direction, and the piezoelectric element 2 is accommodated in the holes 180 and 181.
  • the movable body 5 slides relative to the drive shaft 3 in the axial direction of the drive shaft 3 (Z-axis direction in the SIDM apparatus 1A, Y-axis direction in the SIDM apparatus 1B, hereinafter referred to as the axial direction J). And is frictionally engaged with the drive shaft 3.
  • the movable body 5 includes a movable body main body 50 and a leaf spring 61 as an urging member in the present invention.
  • the urging direction of the urging member toward the drive shaft 3 is indicated by a white arrow.
  • the movable body 50 is a plate-like member formed with a sliding surface 51 that slides with respect to the drive shaft 3, more specifically, a flat plate-like member on both sides. Of the four side peripheral surfaces of the drive shaft 3, the side surface 3 a comes into contact. Two engaging holes 50 b and 50 c that engage with the leaf spring 61 are provided at both ends (left and right ends in the figure) of the movable body 50.
  • the mobile body 50 is made of zinc or SUS. Further, as shown in FIG.
  • the optical element 12 (or 13) is fixed to the movable body 50 via a lens barrel (not shown), and the optical element 12 ( Or, the optical axis direction of 13) is the X-axis direction in both of the SIDM apparatuses 1A and 1B.
  • the leaf spring 61 is fixed to the movable body main body 50 so as to surround the drive shaft 3 in the circumferential direction in cooperation with the movable body main body 50, and abuts the drive shaft 3 to slide the drive shaft 3. While being urged to 51, it slides with respect to the drive shaft 3.
  • the leaf spring 61 has a substantially M-shaped cross section perpendicular to the axial direction J, and has two engaging portions 61b and 61c at both ends in the cross section. And this leaf
  • plate spring 61 is being fixed to the mobile body main body 50 by engaging the engaging parts 61b and 61c with the engagement holes 50b and 50c of the mobile body main body 50, and the drive shaft 3 is fixed by the midway part 61a.
  • the sliding surface 51 While urging the sliding surface 51, the sliding surface 51 is slid with respect to the drive shaft 3.
  • the engaging portions 61b and 61c are formed by bending the leaf spring 61 at both ends. Further, the leaf spring 61 is in contact with the drive shaft 3 along the axial direction J of the drive shaft 3, and preferably makes point contact with the drive shaft 3 in a cross section perpendicular to the axial direction J.
  • the end region in the axial direction J of the drive shaft 3 includes the axial direction as shown in FIG. 4 (a) or 4 (b).
  • An inclined portion 62 that is separated from the drive shaft 3 is formed from the inside to the end side of J.
  • the above-described leaf spring 61 is made of SUS, beryllium copper or phosphor bronze, and preferably the sliding region is formed thicker than other regions.
  • the sliding area is coated with DLC (Diamond Like Carbon), titanium, or carbon.
  • a sawtooth wave drive pulse that gently rises and rapidly falls is applied to the piezoelectric element 2.
  • the piezoelectric element 2 gently expands, and the drive shaft 3 moves as a result of gently moving in the positive direction of the Z axis (or Y axis) (see FIG. 2B).
  • the body 5 moves in the positive direction of the Z axis (or Y axis) together with the drive shaft 3 by the frictional engagement force with the drive shaft 3.
  • the waveform of the sawtooth wave drive pulse applied to the piezoelectric element 2 is rapidly raised.
  • the waveform may fall slowly.
  • the applied drive waveform is not limited to the sawtooth drive pulse shown here, but a rectangular wave having a duty ratio suitable for driving, or a waveform having rise / fall characteristics suitable for other driving is applied. It is also possible to do.
  • the leaf spring 61 that biases the drive shaft 3 against the sliding surface 51 is fixed to the movable body main body 50 so as to surround the drive shaft 3 in the circumferential direction in cooperation with the movable body main body 50.
  • the number of parts can be reduced as compared with the conventional case in which a sliding plate is interposed between the leaf spring 61 and the drive shaft 3. It is possible to reduce the labor of assembly and reduce the manufacturing cost.
  • the SIDM apparatus 1 can be reduced in size compared with the past.
  • the plate spring 61 functions as a guide member for guiding the sliding of the moving body 5.
  • the spring 61 and the movable body 50 can be provided. Therefore, compared with the case where the moving body 5 and the guide member are separately manufactured and assembled, the manufacturing cost can be reduced and the SIDM device 1 can be downsized.
  • the mobile body 50 is a plate-like member having only one flat sliding surface 51, the mobile body 50 is compared with the conventional case where the mobile body 50 is substantially U-shaped. Can be facilitated. Therefore, the manufacturing cost can be further reduced.
  • the leaf spring 61 contacts the drive shaft 3 along the axial direction J, the drive shaft 3 can be stably urged against the sliding surface 51.
  • the leaf spring 61 is in point contact with the drive shaft 3 within a cross section perpendicular to the axial direction J, the sliding area with respect to the driving shaft 3 can be reduced. Even when the sliding area is made thick, the manufacturing cost of the leaf spring 61, and hence the manufacturing cost of the SIDM device 1, can be reduced.
  • the plate spring 61 is fixed to the movable body main body 50 by engaging the engaging portions 61b and 61c with the engagement holes 50b and 50c of the movable body main body 50, the plate spring 61 is easily fixed to the movable body. It can be fixed to the main body 50. Therefore, the manufacturing of the SIDM device 1 can be facilitated and the manufacturing cost can be reduced.
  • the leaf spring 61 has an inclined portion 62 that moves away from the drive shaft 3 in the end region in the axial direction J from the inner side to the end side in the axial direction J of the sliding region with respect to the drive shaft 3.
  • the leaf spring 61 slides with respect to the shaft 3, it is possible to prevent the drive shaft 3 from being scraped at the end of the leaf spring 61. Therefore, the product life of the SIDM device 1 can be extended.
  • the sliding region of the leaf spring 61 with respect to the drive shaft 3 is coated with DLC, titanium or carbon, the leaf spring 61 is worn when the leaf spring 61 slides with respect to the drive shaft 3. Can be prevented. Therefore, the product life of the SIDM device 1 can be further extended.
  • the sliding region of the leaf spring 61 with respect to the drive shaft 3 is formed thicker than other regions, even if the leaf spring 61 slides and wears against the drive shaft 3.
  • the product life of the SIDM device 1 can be further extended.
  • the leaf spring 61 is made of SUS, beryllium copper, or phosphor bronze, it is possible to prevent the leaf spring 61 from being worn when the leaf spring 61 slides with respect to the drive shaft 3. . Therefore, the product life of the SIDM device 1 can be further extended.
  • the cross section of the leaf spring 61 perpendicular to the axial direction J has been described as being substantially M-shaped, but may be substantially V-shaped or substantially U-shaped.
  • the movable body 50 has been described as a plate-like member having both flat surfaces, as shown in FIG. 3C, a plate-like member having a groove portion 52 extending in the axial direction J at the center portion may be used.
  • the groove portion 52 has a bottom surface serving as a sliding surface 51 with respect to the drive shaft 3, and restricts relative movement of the movable body 50 with respect to the drive shaft 3 in a cross section perpendicular to the axial direction J by the inner wall surface. It becomes. According to this, the function as a guide member for guiding the sliding of the moving body 5 can be surely given to the moving body main body 50.
  • the drive shaft 3 has been described as a quadrangular columnar member, it may be a semi-cylindrical member as shown in FIG. Furthermore, in this case, as shown in FIGS. 5C and 5D, the drive shaft 3 is preferably in contact with the sliding surface 51 of the movable body 50 at the flat portion of the side circumferential surface,
  • the leaf spring 61 has a substantially V-shaped or U-shaped cross section perpendicular to the axial direction J, and abuts the drive shaft 3 at least at two points in the cross section, thereby driving the drive shaft in the cross section. It is preferable to restrict the relative movement of the movable body 50 with respect to 3.
  • the leaf spring 61 can surely have a function as a guide member for guiding the sliding of the movable body 5.
  • the manufacturing apparatus for manufacturing the cylindrical drive shaft is highly versatile, the manufacturing cost of the SIDM apparatus 1 can be reduced because the semi-cylindrical drive shaft 3 can be manufactured by using such a manufacturing apparatus. It can be cheaper.
  • the leaf spring 61 has been described as contacting the drive shaft 3 at the midway portion 61a and urging the drive shaft 3 against the sliding surface 51 of the movable body 50, as shown in FIG. Further, it may be bent toward the drive shaft 3 between the engaging portions 61b, 61c and the midway portion 61a in the cross section perpendicular to the drive shaft 3, and may contact the drive shaft 3. According to this, since the relative movement of the movable body 50 with respect to the drive shaft 3 in the cross section perpendicular to the axial direction J can be regulated by the leaf spring 61, the guide member that guides the sliding of the movable body 5.
  • the leaf spring 61 can surely have the function as
  • the movable body main body in this invention was demonstrated as the plate-shaped movable body main body 50, as shown to Fig.6 (a), (b), the planar sliding surface which slides with respect to the drive shaft 3 is shown. It is good also as the substantially L-shaped moving body main body 55 which has two 55a.
  • the leaf spring 62 having a substantially L-shaped cross section perpendicular to the axial direction J as the biasing member in the present invention.
  • the leaf spring 62 is fixed to the engagement holes 55b and 55c of the movable body 55 by the engagement portions 62b and 62c at both ends in the cross section perpendicular to the axial direction J, and the drive shaft 3 by the two midway portions 62a.
  • the operation state can be stabilized because the contact state in the sliding surface between the drive shaft 3 and the movable body 55 can be dispersed as designed. it can. Further, since the inertial force generated between the movable body main body 50 and the drive shaft 3 when it slides on the drive shaft 3 is concentrated on the protrusion 55d, the surface of the drive shaft 3 is "turned up” by the carbon fiber. Even in the case of being present, the operation can be further stabilized by the amount that the protrusion 55d can move over the “sackle”. In addition, foreign matters such as wear pieces are unlikely to collect between the drive shaft 3 and the moving body 55, so that the operation can be further stabilized.
  • the mobile body in the present invention is not a plate-like mobile body 50, but has a groove portion 57a extending in the axial direction J as shown in FIG.
  • a substantially U-shaped movable body main body 56 having a total of three on the bottom surface 57b and the inner wall surfaces 57c and 57d of 57a may be used.
  • the leaf spring 63 is fixed to the movable body 56 by engaging portions 63b and 63c at both ends in a cross section perpendicular to the axial direction J, and the drive shaft 3 is biased to the bottom surface 57b of the groove portion 57a by the midway portion 63a.
  • the guide member that guides the sliding of the movable body 5 can be surely provided with the function as described above.
  • the protruding portion 56d that slides with respect to the drive shaft 3 may be provided so as to protrude from the bottom surface 57b of the groove portion 57a.

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention porte sur un dispositif d'entraînement, dont le coût de fabrication est réduit par comparaison à un dispositif classique. Le dispositif SIDM (1) comprend : un élément piézoélectrique (2) qui se dilate et se contracte en réponse à une tension appliquée ; un axe d'entraînement colonnaire (3) fait d'un matériau comprenant du carbone et déplacé par la dilatation et la contraction de l'élément piézoélectrique (2) ; un élément de collier (4) pour, tout en limitant le mouvement de l'élément piézoélectrique (2), supporter l'élément piézoélectrique (2) pour qu'il puisse se dilater et se contracter ; et un corps mobile (5) solidarisé par friction à l'axe d'entraînement (3) et se déplaçant dans la direction axiale (J) de l'axe d'entraînement (3). Le corps mobile (5) comprend : un corps principal de corps mobile (50) sur lequel une surface de glissement (51) glissant par rapport à l'axe d'entraînement (3) est formée ; et un ressort à lame (61) fixé au corps principal de corps mobile (50) de façon à entourer l'axe d'entraînement (3) dans la direction périphérique en coopération avec le corps principal de corps mobile (50) et glissant par rapport à l'axe d'entraînement (3) tout en touchant l'axe d'entraînement (3) et en poussant l'axe d'entraînement (3) vers la surface de glissement (51).
PCT/JP2010/052163 2009-03-24 2010-02-15 Dispositif d'entraînement WO2010109976A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011505928A JPWO2010109976A1 (ja) 2009-03-24 2010-02-15 駆動装置

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Application Number Priority Date Filing Date Title
JP2009-071688 2009-03-24
JP2009071688 2009-03-24

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WO2010109976A1 true WO2010109976A1 (fr) 2010-09-30

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002095274A (ja) * 2000-09-14 2002-03-29 Minolta Co Ltd 電気−機械変換素子を用いた駆動装置
JP2007236011A (ja) * 2005-03-31 2007-09-13 Fujinon Corp 駆動装置、撮影装置及び携帯電話
JP2007274776A (ja) * 2006-03-30 2007-10-18 Fujinon Corp 駆動装置
JP2007282448A (ja) * 2006-04-11 2007-10-25 Fujinon Corp 駆動装置
JP2009050142A (ja) * 2007-07-26 2009-03-05 Mitsumi Electric Co Ltd 駆動装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002095274A (ja) * 2000-09-14 2002-03-29 Minolta Co Ltd 電気−機械変換素子を用いた駆動装置
JP2007236011A (ja) * 2005-03-31 2007-09-13 Fujinon Corp 駆動装置、撮影装置及び携帯電話
JP2007274776A (ja) * 2006-03-30 2007-10-18 Fujinon Corp 駆動装置
JP2007282448A (ja) * 2006-04-11 2007-10-25 Fujinon Corp 駆動装置
JP2009050142A (ja) * 2007-07-26 2009-03-05 Mitsumi Electric Co Ltd 駆動装置

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