WO2010109912A1 - Cible pour dispositifs de génération de rayons x et son procédé d'usinage - Google Patents

Cible pour dispositifs de génération de rayons x et son procédé d'usinage Download PDF

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Publication number
WO2010109912A1
WO2010109912A1 PCT/JP2010/002204 JP2010002204W WO2010109912A1 WO 2010109912 A1 WO2010109912 A1 WO 2010109912A1 JP 2010002204 W JP2010002204 W JP 2010002204W WO 2010109912 A1 WO2010109912 A1 WO 2010109912A1
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WO
WIPO (PCT)
Prior art keywords
target
line
ray generator
ray
grooves
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Application number
PCT/JP2010/002204
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English (en)
Japanese (ja)
Inventor
野々口雅弘
青木省三
田村巧
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株式会社リガク
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Filing date
Publication date
Application filed by 株式会社リガク filed Critical 株式会社リガク
Priority to JP2011505897A priority Critical patent/JP5548189B2/ja
Publication of WO2010109912A1 publication Critical patent/WO2010109912A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry

Definitions

  • the present invention relates to an X-ray generator for emitting X-rays, and more particularly to a target of an X-ray generator capable of emitting striped X-rays (multi-line X-rays) and a processing method thereof.
  • An apparatus using X-rays is widely used in various fields for the purpose of analyzing and analyzing a subject (sample) and further inspecting it.
  • a device that emits striped X-rays (multi-line X-rays) is used together with a normal point-like X-ray source, depending on the application.
  • Patent Document 1 in order to enable the generated X-rays to converge on the spot, a means having a convergence / divergence effect of radiation composed of a Fresnel zone plate on a target that collides charged particles.
  • the ones that have been given are already known.
  • X-rays capable of forming striped X-rays (multiline X-rays) having a desired size (line width) with high contrast. It is an object of the present invention to provide a target suitable for a generator and a processing method thereof.
  • an electron beam disposed opposite to an electron source that generates an electron beam in a tube body that is configured to be evacuated and emitted from the electron source Is a target for generating multi-line X-rays by irradiating, and on the surface of the member constituting the target, a plurality of minute-width linear targets sandwich a minute-width groove,
  • the electron beam from the electron source is repeatedly formed and arranged so as to be irradiated at a predetermined angle from a direction perpendicular to the extending direction of the groove, and the electron beam from the electron source is Multi-line X-rays from a plurality of line-shaped targets that are irradiated so as to straddle a plurality of the grooves and are formed between the grooves are configured to be emitted from a predetermined extraction angle.
  • Target for the X-ray generator wherein the door is provided.
  • the target in the target of the X-ray generator described above, is a stationary target or a rotary target, and further, an electron beam is irradiated into the target. It is preferable to provide a pipe for cooling the target.
  • the linear target is formed by repeatedly forming a plurality of the grooves having the minute width on the surface of the target member, or on the surface of the target member. It is preferably formed by repeatedly embedding a plurality of minute-width line targets.
  • the inside of the groove is filled with a low atomic number element, or the inner side surface of the groove is coated with a low atomic number element.
  • the linear target is formed by forming a target metal layer on a surface of a target member in which a plurality of grooves are formed. Also good.
  • a part close to the surface of the plurality of line-shaped targets may be formed so as to protrude in the X-ray extraction direction, and further, the bottom of the groove may be formed in a curved cross section.
  • a method for processing the target of the X-ray generator described above and a method for processing the target for forming the plurality of grooves on the surface of the target member by diamond cutter processing, Alternatively, a target processing method for forming the plurality of grooves on the surface of the target member by wire electric discharge machining is provided.
  • a target suitable for an X-ray generator capable of forming a striped X-ray (multi-line X-ray) having a micro width having a size (line width) on the order of ⁇ m.
  • a method for processing such a target which is extremely effective in practice.
  • FIG. 7 is a partial cross-sectional view showing a configuration around a target in a modified example of the X-ray generator (Example 1) shown in FIG. 6. It is a side view which shows the whole structure of the X-ray generator (Example 2) provided with the rotary target to which the said multi-line target is applied.
  • FIG. 10 is a partially enlarged perspective view showing a configuration around a rotary target in the X-ray generator of FIG. 9. It is a figure explaining the other modification of the multiline-shaped target mentioned above, especially the cross-sectional shape of the groove
  • FIG. 1 shows a main part constituting an X-ray generator according to an embodiment of the present invention.
  • reference numeral 3b denotes a metal target provided on the surface of a target member 31 made of a metal plate and formed with a plurality of minute width grooves 110. That is, a line target having a very small width is formed between the plurality of grooves 110 having a very small width.
  • this metal plate is formed from the material of copper (Cu) or molybdenum (Mo), for example,
  • the surface (pitch: P), width (W), and depth (D) are on the surface.
  • the groove 110 extends in the X direction in the figure and is continuously repeated in the Y-axis direction.
  • the surface of the metal target 3b described above is irradiated with an electron beam emitted from an electron gun (filament) 21 constituting an electron source.
  • the electron gun 21 has a direction perpendicular to the direction (X-axis direction in the figure) in which the electron beam is above the metal target 3b and the electron beam is formed on the target surface and the plurality of minute width grooves 110.
  • the Y-axis in the figure) is disposed at a position where the light is incident at an angle ⁇ .
  • the electron beam emitted from the electron gun 21 is focused by an electron lens as necessary, and a plurality of minute grooves 110 (or a plurality of line targets) are formed on the surface of the metal target 3b.
  • the light is incident at a predetermined angle ⁇ .
  • the angle ⁇ may be 90 ° as in a normal X-ray tube.
  • X-rays are extracted at the extraction angle ⁇ .
  • X-rays emitted from the line-shaped target surface (line-shaped target) 11U formed between the grooves 110 are emitted as they are at the extraction angle ⁇ .
  • the X-rays emitted from the bottom surface 11B of the groove 110 are attenuated at the side surface 11S.
  • the depth (D) of the groove 110 formed on the surface of the metal target 3b is set to a depth sufficient to attenuate the X-rays emitted from the bottom surface 11B (D> W ⁇ tan ⁇ ).
  • the intensity distribution I of the multi-line X-ray obtained as described above is shown.
  • the X-ray intensity is in the fringe (line) direction. It can be seen that it continuously changes while increasing or decreasing periodically in a direction perpendicular to the direction.
  • the line width of the multi-line X-ray obtained by this is D ⁇ sin ⁇ . That is, the line width of the multi-line X-ray obtained by the above-described configuration is such that the interval (D) between the grooves 110 formed on the surface of the metal target 3b and the X-ray extraction angle ( ⁇ ) are set to appropriate values.
  • the metal target 3b irradiated with the electron beam emitted from the electron gun (filament) 21 is irradiated with a line-like shape on the surface.
  • the targets 11B may be configured to be periodically and continuously arranged. In the following description, the target having such a configuration is simply referred to as “multi-line target 100”.
  • the principle of the present invention described above is described.
  • the same effect can also be obtained by forming a plurality of grooves by embedding (including embedding or the like).
  • FIG. 3A for example, after a plurality of grooves 110 are formed on the surface of a copper (Cu) target member 31, molybdenum (Mo) or tungsten (W) is further formed on the surface (upper surface) 11U. ) Layer 111 is formed as a linear target 3b to obtain Mo characteristic X-rays or W characteristic X-rays (however, in the case of W, continuous X-rays in a specific range are included).
  • a molybdenum (Mo) or tungsten (W) layer is formed on the surface (upper surface) of a copper (Cu) target member 31, a plurality of layers are formed on the surface of the target member.
  • a linear target 3b may be formed.
  • the inside of the groove 110 is filled 112 with an element having a low atomic number such as carbon (C), or as shown in FIG.
  • the side surface may be coated with a low atomic number element 113.
  • the end portion 114 of each groove 110 is formed in a curved or tapered cross section (shown by a dotted line in the drawing), and the resulting multi-line X The contrast of the line may be adjusted.
  • a different metal coating for example, Ni: 10 ⁇ m thick
  • the cross-sectional shape of the groove 110 is a “U” shape shown in the attached FIG. 4A or a “V” shape shown in FIG. May be.
  • the side surface 11S may be filled or coated with an element having a low atomic number as described above.
  • the inclination angle ⁇ can be set to various other values. For example, as shown in the attached FIG. 5, the inclination angle ⁇ can be reduced to about 6 °.
  • a low atomic number element is applied to a part of the inner wall of the groove 110 (in this example, the upper end of the left inner wall of the groove) seen from the X-ray extraction direction (right side in the figure).
  • a suitable multi-line X-ray having a high contrast ratio can be obtained.
  • FIG. 6 attached hereto is a perspective view showing an encapsulated X-ray generator having a stationary metal target according to the present invention
  • FIG. 7 attached is a partially enlarged sectional view including the metal target. .
  • an electron source 2 an anode (target) 3, and a stainless steel X-ray tube main body 1 configured to be evacuated.
  • the electron source 2 is heated by a current supplied from the filament power supply 41 to emit thermoelectrons (electron beams).
  • the so-called cathode 21 constituting the cathode and the emitted electron beams converge to a desired diameter.
  • the electronic lens 22 is configured. In the present invention, the electron lens 22 is not always necessary. As described above, the emitted electron beam is formed on the multi-line target formed on the surface of the target, so that a plurality of line-shaped targets are used.
  • Reference numeral 42 in the figure indicates a bias voltage
  • reference numeral 4 indicates a high voltage power source for applying a high voltage between the filament 21 and the anode 3.
  • said anode is comprised from the base material 3a with the target member 31, and the metal target 3b which formed the multi-line-shaped target mentioned above on it.
  • thermoelectrons (electron beam) emitted from the filament 21 constituting the cathode are irradiated to the anode (target) 3, and as a result, from the surface of the metal target 3 b forming the multiline target 100 described above.
  • the X-rays generated at the extraction angle ( ⁇ ) are emitted in the direction of the X-ray extraction window 34, and the plurality of striped X-rays (multiline X-rays) described above are extracted from the X-ray generator and used. Is done.
  • Mo molybdenum
  • Au gold
  • silver Ag
  • tungsten gold
  • Ni tungsten
  • Ni nickel
  • Cr chromium
  • a copper material having high thermal conductivity is used as the base material 3a and a tungsten film is formed on the surface thereof, for example, molybdenum (Mo), gold ( A line-shaped member having a thickness and width (W) of about several tens to several hundreds ⁇ m formed from Au), silver (Ag), copper (Cu), nickel (Ni), chromium (Cr), or the like,
  • Mo molybdenum
  • Au A line-shaped member having a thickness and width (W) of about several tens to several hundreds ⁇ m formed from Au
  • silver Ag
  • Cu copper
  • Ni nickel
  • Cr chromium
  • a flow path for flowing a coolant (for example, cooling water) 5 is provided on the back surface of the base material 3a of the target 3 so that heat generated in the base material 3a can be removed to the outside. It is like that.
  • a coolant for example, cooling water
  • the heat is conducted to the heat conducting ceramics 36 provided in the lower portion thereof and removed by the refrigerant 5 flowing in the pipe wound around the ceramics.
  • Example 1 since the metal target 3b in which the multiline target 100 described above is formed on the surface of the base material 3a of the target 3, the metal is irradiated by electron beam irradiation.
  • the multi-line X-ray characteristic X-ray is extracted from the X-ray extraction window 34.
  • the characteristic X-ray is determined for each metal. For example, when the same copper (Cu) as that of the substrate 3a is used, the characteristic X-ray (K ⁇ ) of 8.04 keV is used, or when molybdenum is used. In this case, the characteristic X-ray (K ⁇ ) 17.4 keV of molybdenum (Mo) is extracted.
  • the width (W) of the line-shaped member and the metal forming the multi-line target are A plurality of striped X-rays (multi-line X-rays) having a desired size (line width) in the order of ⁇ m by appropriately setting the pitch (interval: D) and further the take-out angle ( ⁇ ). Can be easily obtained.
  • FIG. 9 is a cross-sectional view showing the whole of a so-called rotating anti-cathode X-ray tube, which is an X-ray generator provided with a rotating target (cathode), and FIG. It is a whole perspective view which shows the detail of the rotary metal target.
  • a filament 21 that is an electron source 2 is placed inside a stainless steel X-ray tube main body 1 that can be evacuated.
  • a rotary anode (target) 3 ′ is provided.
  • Reference numeral 36 in the figure denotes a drive unit having a motor or the like as means for rotating and driving a rotary target whose structure will be described in detail below.
  • the drive unit 37 also includes a refrigerant.
  • a pipe for cooling the rotating target is provided in the interior thereof.
  • the rotary anode (target) 3 ′ has a cylindrical outer shape, and the multi-line target 100 described above is formed on the outer peripheral surface thereof.
  • this rotary target 3 ' is rotating at high speed, for example, in the direction of the arrow in the figure, and thermoelectrons (electron beams) emitted from the filament 21 provided below the rotary target 3' are rotated by the rotary target 3 '.
  • the lower outer peripheral surface is irradiated under the predetermined conditions described above.
  • X-rays generated at the extraction angle ( ⁇ ) from the surface of the metal target 3 b forming the multiline target 100 described above are emitted in the direction of the X-ray extraction window 34. That is, the plurality of striped X-rays (multi-line X-rays) described above are taken out from the X-ray generator (rotary anti-cathode X-ray tube).
  • the X-ray generator (rotary anti-cathode X-ray tube) including the rotary target according to the second embodiment described above also has the width of the line-shaped member together with the metal forming the multi-line target 100.
  • W pitch
  • ⁇ extraction angle
  • the second embodiment since the rotary target is provided, the electron beam always hits the cooled target surface, so that it is particularly easy to obtain a multi-line X-ray having a high output.
  • the high-speed rotation of the target prevents the peak width of the multiline X-ray obtained by removing the fluctuation of the target surface from being widened, thereby obtaining a multiline X-ray having a high contrast. It becomes possible.
  • FIG. 11A shows an example in which the groove 110 formed on the target surface is inclined to the right side of the drawing, and as a result, the cross-sectional shape of the groove 110 is a parallelogram. That is, the surface (upper surface) 11U of the target protrudes (overhangs) in the X-ray extraction direction (right direction in the figure). According to the structure of this modification, a multi-line X-ray with high contrast can be obtained by reducing the collision of the electron beam (primary electrons) with the side wall 110R on the X-ray extraction side (right side).
  • the width of the groove 110 is increased as it goes downward (that is, away from the surface of the target), whereby the surface (upper surface) 11U of the target.
  • the surface (upper surface) 11U of the target In addition to protrusion (overhang) in the X-ray extraction direction, it is possible to secure a larger surface (upper surface) 11U of the target, and to the vertical side wall 110L on the opposite side (left side) from the X-ray extraction side. It is possible to reduce the collision of electron beams. According to this, a multi-line X-ray with higher contrast can be obtained.
  • FIG. 11C shows a cross-sectional shape of the groove 110 suitable for taking out X-rays on both sides (left and right in the figure). That is, as is apparent from the drawing, the groove 110 formed on the surface (upper surface) 11U of the target becomes larger on both sides as it goes downward. As a result, the electron beam is applied to the side walls 110L and 110R on both sides. Therefore, high-contrast multi-line X-rays are obtained on both sides (the left-right direction in the figure).
  • FIG. 11D shows a groove shape particularly suitable for wire electric discharge machining.
  • the cross-sectional shape of the groove 110 formed on the target surface is formed so that the corner portion 110C of the groove 110 has a curved shape (R shape).
  • R shape a curved shape
  • a high-contrast multiline X-ray can be obtained by protruding (overhanging) the surface (upper surface) 11U of the target in the X-ray extraction direction, It is possible to efficiently transfer the heat of the target surface (upper surface) 11U, which is heated by electron beam irradiation, to a coolant such as cooling water (Wa) flowing below the curved corner portion 110D of the groove 110.
  • a coolant such as cooling water (Wa) flowing below the curved corner portion 110D of the groove 110.
  • SYMBOLS 1 ... X-ray tube main body, 2 ... Electron source, 3 ... Anode, 4 ... High voltage power supply, 11 ... X-ray generator, 21 ... Filament, 22 ... Electron lens, 23 ... Electron beam, 24 ... Electron beam irradiation part, 25 ... Position variation of electron beam, 31 ... Target member, 3a ... Base material, 3b ... Metal target, 36 ... Thermally conductive ceramics, 41 ... Filament power source, 42 ... Bias power source, S ... Sample, 100 ... Multi-line target, 110 ... Groove, 11U ... Linear target.

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  • X-Ray Techniques (AREA)

Abstract

La présente invention a trait à une cible adaptée de façon préférable aux dispositifs de génération de rayons X permettant de former des rayons X en bande (rayons X multilignes) ayant une petite largeur d'environ plusieurs micromètres, ainsi qu'à son procédé d'usinage. La cible est disposée dans un corps de tube dont l'intérieur peut être mis sous vide, à l'opposé d'une source d'électrons permettant de générer un faisceau d'électrons, et conçue pour générer des rayons X multilignes lorsqu'elle est exposée au faisceau d'électrons émis à partir de la source d'électrons. La cible est configurée comme suit. La cible multiligne de petite largeur a des lignes formées de façon répétitive parmi des rainures de petite largeur. La cible est disposée de manière à être exposée au faisceau d'électrons provenant de la source d'électrons, de la direction perpendiculaire à la direction dans laquelle les rainures s'étendent à un angle prédéterminé (α) de façon oblique. Le faisceau d'électrons provenant de la source d'électrons est appliqué à un éventail de certaines des rainures. Les rayons X multilignes provenant de la cible multiligne ayant des lignes formées parmi les rainures sont émis selon un angle de sortie prédéterminé (β).
PCT/JP2010/002204 2009-03-27 2010-03-26 Cible pour dispositifs de génération de rayons x et son procédé d'usinage WO2010109912A1 (fr)

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JP2009-078591 2009-03-27

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022149309A1 (fr) * 2021-01-05 2022-07-14 浜松ホトニクス株式会社 Cible de génération de rayons x, générateur de rayons x et système d'imagerie par rayons x

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188092A (ja) * 1992-12-17 1994-07-08 Hitachi Ltd Ｘ線発生用タ−ゲットとｘ線源とｘ線撮像装置
JP2003014894A (ja) * 2001-06-27 2003-01-15 Rigaku Corp Ｘ線分光方法及びｘ線分光装置
JP2005158474A (ja) * 2003-11-26 2005-06-16 Rigaku Corp Ｘ線管
JP2006222031A (ja) * 2005-02-14 2006-08-24 Toho Kinzoku Co Ltd Ｘ線管ターゲットの製造方法
JP2008545981A (ja) * 2005-06-06 2008-12-18 パウル・シェラー・インスティトゥート 非干渉性多色ｘ線源を用いた定量的位相コントラスト画像法及び断層撮影法のための干渉計
JP2009195349A (ja) * 2008-02-20 2009-09-03 Univ Of Tokyo Ｘ線撮像装置、及び、これに用いるｘ線源

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188092A (ja) * 1992-12-17 1994-07-08 Hitachi Ltd Ｘ線発生用タ−ゲットとｘ線源とｘ線撮像装置
JP2003014894A (ja) * 2001-06-27 2003-01-15 Rigaku Corp Ｘ線分光方法及びｘ線分光装置
JP2005158474A (ja) * 2003-11-26 2005-06-16 Rigaku Corp Ｘ線管
JP2006222031A (ja) * 2005-02-14 2006-08-24 Toho Kinzoku Co Ltd Ｘ線管ターゲットの製造方法
JP2008545981A (ja) * 2005-06-06 2008-12-18 パウル・シェラー・インスティトゥート 非干渉性多色ｘ線源を用いた定量的位相コントラスト画像法及び断層撮影法のための干渉計
JP2009195349A (ja) * 2008-02-20 2009-09-03 Univ Of Tokyo Ｘ線撮像装置、及び、これに用いるｘ線源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022149309A1 (fr) * 2021-01-05 2022-07-14 浜松ホトニクス株式会社 Cible de génération de rayons x, générateur de rayons x et système d'imagerie par rayons x

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