WO2010082273A1 - Hollow needle and method of manufacturing same - Google Patents
Hollow needle and method of manufacturing same Download PDFInfo
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- WO2010082273A1 WO2010082273A1 PCT/JP2009/006830 JP2009006830W WO2010082273A1 WO 2010082273 A1 WO2010082273 A1 WO 2010082273A1 JP 2009006830 W JP2009006830 W JP 2009006830W WO 2010082273 A1 WO2010082273 A1 WO 2010082273A1
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- hollow needle
- liquid
- needle
- hole
- holding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
Definitions
- a method of applying a liquid repellent treatment to the inner and outer surfaces of the needle by a photolithography process at the tip of the hollow glass needle (hereinafter referred to as a liquid volume regulating hollow needle method) is a non-patent document. 1 is proposed.
- a liquid volume regulating hollow needle method By soaking the tip of the needle in a liquid tank, the liquid is wetted by capillary action and is always filled in the needle as long as the liquid repellent treatment inside the hole is not performed. If the liquid is ejected after filling, the liquid can be applied to the object without causing liquid residue by the liquid repellent treatment on the outer surface of the needle.
- the conventional method sometimes has a problem in supplying a small amount of coating without variation.
- the amount of liquid material to be applied is extremely small, and there may be a case where a coating amount of several picoliters to several hundred picoliters is required.
- a liquid material filled in a syringe is pressurized by a piston or screw and discharged from a hollow needle.
- the discharge amount is controlled by the movement amount of the piston, for example, when 100 picoliter is discharged when the inner diameter of the syringe is 5 mm, the movement amount of the piston is about 5 nm, which is difficult to realize.
- the needle diameter is 50 ⁇ m and the material filled in the needle is pushed out by pulse air or the like, the change of about 50 ⁇ m is controlled at the liquid filling position in the needle, and it is difficult to ensure the discharge accuracy.
- a tiny amount of liquid can be applied by applying a lyophilic process to the tip of the pin and a liquid repellent process in addition to it.
- a lyophilic process to the tip of the pin and a liquid repellent process in addition to it.
- the size of the meniscus of the liquid material formed at the tip of the pin changes, and it is difficult to suppress variation in the coating amount with good reproducibility.
- Mass-produced products such as syringes, needles, pistons and supply control devices used in the dispensing method are commercially available and can be obtained at low cost.
- inkjet heads and the like are relatively easily available.
- a needle in the pin transfer system may require a film forming process when performing a liquid repellent treatment or the like, but can be manufactured relatively easily if the process is performed on the outer surface of the pin.
- the liquid volume regulating hollow needle method requires a plurality of needle film forming steps.
- the liquid when the tip of the hollow needle is attached to the liquid tank, the liquid is sucked up by a capillary phenomenon generated in the lyophilic hole of the holding portion provided at the tip of the hollow needle, and the liquid repellent film outside the hole
- a certain amount of droplets can be automatically secured accurately.
- the liquid by supplying air to the inside of the hollow needle, it is possible to stably transfer the filled accurate amount of liquid to the application target.
- FIG. 1 shows a cross-sectional view of a coating needle showing one embodiment of the present invention, and a filling method and a coating method of a liquid material 4.
- a liquid volume regulating needle 10 is constituted by a glass needle body 1 that is a hollow pipe and a cylindrical holding portion 2 that holds the liquid material 4.
- the needle body 1 may be selected in any way other than glass as long as sufficient strength and durability can be obtained, such as a metal material, a resin material, and ceramics.
- this hole has a diameter of several ⁇ m and an aspect ratio of less than 10, it can be precisely machined with a drill.
- the filling amount of the liquid material 6 can be managed by the length of 2.
- the surface of the holding part 2 other than the through-hole 4 is provided with a liquid-repellent film 3a, but this film 3a may be omitted as shown in FIG.
- the holding part 2 is inserted inside the needle body 1.
- chamfering may be performed on the hole opening and the upper portion of the holding member as shown in FIG. 5.
- an adhesive may be used as long as the liquid material 6 does not cause a chemical reaction.
- the outer diameter of the holding portion 2 can be made larger than the inner diameter of the needle body 1, and can be fixed by shrink fitting or cold fitting.
- the needle body 1 may be temporarily softened by heating or the like and the holding portion 2 may be fused.
- the fixing of both is airtight so that the holding part 2 does not pop out due to pressure when air is finally poured into the needle body 1 or the compressed air 8 does not leak from the fitting part (fixing part) of both. If it is, it does not need to be based on said fixing method.
- the through hole 4 penetrates both sides of the fixing part.
- the holding unit 2 be fixed to a region including the tip of the hollow needle body 1 because the liquid can be easily filled.
- the use of the liquid volume regulating needle 10 according to the present invention will be described.
- the liquid quantity regulating needle 10 When the liquid quantity regulating needle 10 is immersed in a liquid tank (not shown) in which a liquid material is stored, the liquid rises through the hole 4 by capillary action, and a meniscus 7 is formed on the upper portion of the holding part 2.
- the difference between the contact angle of the liquid repellent coating 3 inside the needle body 1 and the contact angle of the holding portion 2 is 90 ° or more.
- the size (diameter and length) of the through-hole 4 is a size that fills the entire inside of the through-hole 4 by capillary action, and is specifically several hundred nm to 1 ⁇ m. By doing so, the liquid material 6 wetted by the capillary phenomenon does not rise from the holding part 2 to the needle body 1, and the liquid amount is automatically regulated.
- the liquid material 6 filled in the liquid volume regulating needle 10 by blowing compressed air (air) 9 into the needle body 1.
- a liquid repellent film 3 a may be applied to the upper and lower end faces of the holding part 2.
- the hole 4 may be opened after the liquid repellent coating 3a is formed on the entire outer surface of the holding portion 2.
- the liquid repellent coating 3a also reduces the upper and lower meniscuses of the holding member 2, the amount of the liquid material 8 filled in the holes becomes more dominant.
- a liquid repellency part and a lyophilic part can be incorporated into a hollow needle body that has been subjected to liquid repellency as a whole without using a complicated photolithography process.
- By controlling the processing accuracy of only the size of the holding part it is possible to manufacture a liquid volume-regulated hollow needle with little individual difference, and the liquid volume can be accurately measured.
- an opaque material other than glass can be selected as the material for the hollow needle.
- the liquid repellent treatment is applied to the outer surface of the hollow needle, it is possible to suppress the wetting of the liquid and to apply an accurate amount.
- the holding part is also subjected to a liquid repellent treatment other than the holes, liquid separation is improved during application, and application accuracy is further improved.
- the liquid can be filled more stably. if a material such as lyophilic ceramics is selected as the material for the holding member and the end surface of the hollow needle or holding part is coated with fluorine-based organic matter or plating, the liquid can be filled more stably. .
- Embodiment of the liquid quantity regulation needle 10 concerning Example 2 is shown.
- Example 1 since the needle body 1 is subjected to water repellency treatment on the surface, it is effective when it is formed of a material that does not have liquid repellency or lacks liquid repellency.
- the needle body 1 is formed of a material having strong liquid repellency such as Teflon (registered trademark) resin or a resin or metal kneaded with such a material, as shown in FIG. The same effect can be obtained without applying the protective film 3 to the surface.
- Teflon registered trademark
- FIG. 7A the defect 31 on the substrate 30 is detected and laser processing is performed.
- FIG. 7B film formation is performed on the portion 33 subjected to laser processing.
- basic control according to the program is performed by the main control device 50, and for individual operations and device control, a positioning control unit 52, an image detection unit 53, a laser processing unit 54, which are positioned below the main control device 50, The pneumatic control unit 55 performs this.
- the substrate 30 is mounted on the surface plate 40 and fixed.
- a positioning pin or the like is provided on the surface plate 40, and rough positioning is performed by pressing the end face of the substrate.
- the substrate may be fixed by providing holes or grooves that can be vacuum-adsorbed on the surface plate.
- the laser processing unit controls the operation of the laser transmitter 18 and the diaphragm 17 to adjust the optimum wavelength, output, and irradiation range for each material and thickness of the film to be processed.
- the laser irradiation range 33 needs to be within a range where defects can be accommodated or wider than that, and should be within a range that can be properly applied with a single application liquid amount of the liquid amount regulating needle 10. Considering the wetting and spreading of the liquid material 6, it is better to have a circular shape. After removing the defective portion 31 and its periphery by laser irradiation, the liquid material 6 shown in FIG. 7B is applied.
- the liquid amount regulating needle of the present invention is useful for pinpoint application of liquefied material in, for example, correction of wiring patterns of PDP panels, correction of TFT patterns of liquid crystal panels, organic EL panels, or color filters of liquid crystal panels. It is.
Abstract
A hollow needle (10) configured in such a manner that a circular column-like holding section (2) which is provided with a through-hole (4) having a lyophilic inner surface is provided at the tip of a hollow needle body (1). Immersing the tip of the hollow needle (10) into a liquid pot allows a fixed amount of liquid to be held in the through-hole (4) in the holding section (2), and injecting compressed air into the hollow needle (10) discharges the liquid held in the through-hole (4) to apply the liquid to an object.
Description
本発明は、液晶パネル等の表示装置の製造工程において、パターンの欠陥個所の修正を行う際に微小な領域に液状材料を一定量安定供給する手段である中空ニードルを低コストかつ安定的に提供するものである。これにより修正個所に液体材料を塗布し、適宜乾燥させることで、局所成膜するものである。
The present invention stably and inexpensively provides a hollow needle that is a means for stably supplying a certain amount of a liquid material to a minute area when correcting a defective portion of a pattern in a manufacturing process of a display device such as a liquid crystal panel. To do. In this way, a liquid material is applied to the corrected portion and dried appropriately to form a local film.
テレビ用途の液晶パネル等の表示装置では、市場の要求により、対角寸法で３０，４０インチ以上のパネルの面積が拡大してきている。一方、成膜段階でのパネル面積当たりの不良発生率を劇的に削減することは現状難しい。このため、安定した液晶パネルの供給には成膜段階での製品不良の救済策が不可欠である。
In display devices such as liquid crystal panels for television, the area of panels with diagonal dimensions of 30,40 inches or more has been expanded due to market demands. On the other hand, it is currently difficult to dramatically reduce the defect occurrence rate per panel area at the film formation stage. For this reason, a remedy for product defects at the film formation stage is indispensable for supplying a stable liquid crystal panel.
液晶パネルの場合を例に示すと、不良個所のパターンの修正を施し、不良製品の救済を施す方法として、特許文献１に示されるような方法が提案されている。フォトリソ工程で生じた画素パターンの欠陥部にレーザ光を照射し欠陥部とその周辺部分の膜を除去する。その後、レーザ照射個所に対して、液状化した薄膜材料を滴下、乾燥させて、局所的に成膜する。この液状化材料は一般的に薄膜材料を溶媒に溶かして作られる。
Taking the case of a liquid crystal panel as an example, a method as disclosed in Patent Document 1 is proposed as a method of correcting a defective portion pattern and repairing a defective product. The defective portion of the pixel pattern generated in the photolithography process is irradiated with laser light to remove the film of the defective portion and its peripheral portion. Thereafter, the liquefied thin film material is dropped and dried on the laser irradiation site to form a film locally. This liquefied material is generally made by dissolving a thin film material in a solvent.
液状材料を塗布する際に、大きく分けて３つの方法が普及している。１つは、特許文献２で提案されるようなシリンジに蓄えられた材料に圧力をかけ、中空ニードルから材料を供給するディスペンス方式である。もう一つは特許文献１または３で提案されるような微小な液滴をヘッドで形成し、放出するインクジェット方式である。他の方法として、特許文献４で提案されるようなニードルの先端に液溜りを作り、ニードルを基板に接触させることで、液を基板に転写するピン転写方式がある。
When applying a liquid material, three methods are widely used. One is a dispensing system in which pressure is applied to a material stored in a syringe as proposed in Patent Document 2 and the material is supplied from a hollow needle. The other is an ink jet method that forms fine droplets with a head and emits them as proposed in Patent Document 1 or 3. As another method, there is a pin transfer method in which a liquid pool is formed at the tip of the needle as proposed in Patent Document 4 and the liquid is transferred to the substrate by bringing the needle into contact with the substrate.
その他の方法として、中空ガラスニードルの先端において、孔の所定深さの領域を除き、ニードルの内外面にフォトリソプロセスで撥液処理を施す方式（以下、液量規定中空ニードル方式）が非特許文献１に提案されている。このニードルの先端を液壷に浸すことにより、液は孔内部の撥液処理を施されていない範囲で、毛細管現象で液の濡れ上がり、常にニードル内部に充填される。充填後、液を噴出せばニードル外面の撥液処理により、液残りを生じず、対象に液を塗布することができる。
As another method, a method of applying a liquid repellent treatment to the inner and outer surfaces of the needle by a photolithography process at the tip of the hollow glass needle (hereinafter referred to as a liquid volume regulating hollow needle method) is a non-patent document. 1 is proposed. By soaking the tip of the needle in a liquid tank, the liquid is wetted by capillary action and is always filled in the needle as long as the liquid repellent treatment inside the hole is not performed. If the liquid is ejected after filling, the liquid can be applied to the object without causing liquid residue by the liquid repellent treatment on the outer surface of the needle.
液体塗布の対象となる表示パネルは高精細化が進み、日増しに露光パターンの微細化が進んでいる。このため、欠陥修正時のレーザ光による除去加工領域及び液状材料の塗布領域も微細化が要求され、数～数百ピコリットル程度の塗布量も必要となるケースが生じてくる。なお、レーザでパターンの除去加工を行った領域に対して過剰な液状材料の塗布を行った場合、乾燥後に除去する必要が生じたり、逆に不足する場合は、断線等の不具合が生じる。また、液を塗布する位置が正確でないと濡れ広がる時にレーザ加工した部分を全て覆いきれない、あるいは、目的以外の場所に膜を形成し、後で除去しなくてはならないなどの不具合が生じる。以上に述べたように、表示パネルの修正では（１）微少量の液滴を、ばらつきを抑えて供給すること、（２）必要な位置に正確に塗布することが求められる。さらに、（３）上記を達成する手段が、単純な製作方法で効率よく製作できることも必要である。
The display panel that is the target of liquid application is becoming more precise and the exposure pattern is becoming increasingly finer day by day. For this reason, the removal processing area by the laser beam at the time of defect correction and the application area of the liquid material are required to be miniaturized, and the application amount of several to several hundred picoliters is required. When an excessive liquid material is applied to a region where the pattern has been removed by laser, it is necessary to remove after drying, or conversely, if it is insufficient, problems such as disconnection occur. In addition, if the position where the liquid is applied is not accurate, the laser-processed part cannot be entirely covered when it spreads wet, or a film is formed at a place other than the intended purpose and must be removed later. As described above, correction of the display panel requires (1) supplying a small amount of liquid droplets while suppressing variations, and (2) accurately applying to a required position. Furthermore, (3) it is necessary that the means for achieving the above can be efficiently manufactured by a simple manufacturing method.
基板上の薄膜パターンの欠陥修正を行う際に、液状材料の塗布可能な量を基準にレーザを照射し、その後液状材料を塗布して修正する場合について従来の方法での技術課題を示す。
When correcting defects in a thin film pattern on a substrate, a technical problem in the conventional method will be described in the case of irradiating a laser with reference to the amount of liquid material that can be applied and then applying and correcting the liquid material.
従来の方法では微量な塗布量をばらつき無く供給することに問題が生じることもあった。精細なパターンに対する修正において、塗布する液状材料は極めて微量であり、数ピコリットル～数１00ピコリットルの塗布量が要求されるケースも考えられる。
The conventional method sometimes has a problem in supplying a small amount of coating without variation. In correcting a fine pattern, the amount of liquid material to be applied is extremely small, and there may be a case where a coating amount of several picoliters to several hundred picoliters is required.
ディスペンス方式ではシリンジに充填された液状材料をピストンまたはスクリューにより圧力を付加し、中空のニードルから吐出するものである。ピストンの移動量で吐出量を制御する場合、例えば、シリンジの内径が５ｍｍで１００ピコリットルを吐出する場合、ピストンの移動量は５ｎｍ程度となり、実現が困難である。また、ニードル径を５０μｍとして、ニードルに充填した材料を、パルスエア等で押し出す方法にしても、ニードル内の液充填位置で５０μｍ程度の変化を制御することになり、吐出精度の確保が難しい。
In the dispensing method, a liquid material filled in a syringe is pressurized by a piston or screw and discharged from a hollow needle. When the discharge amount is controlled by the movement amount of the piston, for example, when 100 picoliter is discharged when the inner diameter of the syringe is 5 mm, the movement amount of the piston is about 5 nm, which is difficult to realize. Further, even when the needle diameter is 50 μm and the material filled in the needle is pushed out by pulse air or the like, the change of about 50 μm is controlled at the liquid filling position in the needle, and it is difficult to ensure the discharge accuracy.
ピン転写方式では、ピンの先端に親液加工、それ以外に撥液加工を施すことにより、微小量の液を塗布することが可能になる。しかし、液壷へのピンの浸し方により、ピン先端に形成される液状材料のメニスカスの大きさが変化し、再現性よく、塗布量のばらつきを抑えることが困難であった。
In the pin transfer method, a tiny amount of liquid can be applied by applying a lyophilic process to the tip of the pin and a liquid repellent process in addition to it. However, depending on how the pin is immersed in the liquid tank, the size of the meniscus of the liquid material formed at the tip of the pin changes, and it is difficult to suppress variation in the coating amount with good reproducibility.
この点、インクジェット方式や液量規定ニードル方式は微量の液滴を一定量供給することは可能である。
In this regard, the ink jet method and the liquid amount regulating needle method can supply a small amount of a small amount of droplets.
次に、従来の方式における塗布位置に関する課題を以下に示す。
Next, problems related to the application position in the conventional method are shown below.
基本的にディスペンス方式、ピン転写方式、液量規定中空ニードル方式は塗布位置を画像処理等で計測後、ｘｙｚステージなどの手段により、目標位置に液供給手段を移動し、ニードルやピンを塗布対象の基板に接近または接触させて液体を塗布する。この時のステージ移動精度、つまり塗布位置の精度は一般に高精度を実現しやすい。一方、インクジェット方式では、液滴を放出する際、放出角度のばらつきや、供給ヘッド周辺の気流等の影響を受け、精度が劣化し易いという問題があった。
Basically, the dispensing method, pin transfer method, and liquid volume regulation hollow needle method measure the application position by image processing etc., then move the liquid supply means to the target position by means of xyz stage etc., and apply needle and pin The liquid is applied by approaching or contacting the substrate. The stage moving accuracy at this time, that is, the accuracy of the application position is generally easy to achieve. On the other hand, the ink jet method has a problem that accuracy is easily deteriorated due to the influence of variation in the discharge angle and airflow around the supply head when the droplet is discharged.
最後に従来の方式における液供給手段の製作方法についての課題を示す。
Finally, the problem about the manufacturing method of the liquid supply means in the conventional method is shown.
ディスペンス方式に用いるシリンジ，ニードル，ピストンや供給制御機器などは量産品が市販されており、安価に入手可能である。同様にインクジェットヘッドなども比較的容易に入手可能である。ピン転写方式でのニードルは撥液処理などを施す場合、成膜工程が必要になる場合があるが、ピンの外面への処理であれば、比較的容易に製作可能である。しかし、液量規定中空ニードル方式では、ニードルの複数回の成膜工程が必要である。細いガラス管を作る際、ガラス管を加熱、溶解させ、軸方向に引っ張り、切断する。こうして得られた細いガラス管の先端は、数°程度の傾きを有するテーパー状になる。この状態で成膜し、露光しようとすると、露光光をガラス面に対して直角に入射させることが困難で、斜めに入射した露光光波はガラスの中を広い範囲で伝播するため、感光性レジストにマスキングを掛けて露光範囲の限定が困難である。つまり、撥液性を持たせない領域の範囲にばらつきを生じる可能性がある。すなわち、１本のニードルでは充填する液滴のばらつきを低減できても、ニードル自体に個体差があり、ニードル交換毎に調整が必要となる問題が生じた。
Mass-produced products such as syringes, needles, pistons and supply control devices used in the dispensing method are commercially available and can be obtained at low cost. Similarly, inkjet heads and the like are relatively easily available. A needle in the pin transfer system may require a film forming process when performing a liquid repellent treatment or the like, but can be manufactured relatively easily if the process is performed on the outer surface of the pin. However, the liquid volume regulating hollow needle method requires a plurality of needle film forming steps. When making a thin glass tube, the glass tube is heated and melted, pulled in the axial direction, and cut. The tip of the thin glass tube thus obtained has a tapered shape with an inclination of several degrees. If the film is formed and exposed in this state, it is difficult to make the exposure light incident at a right angle to the glass surface, and the exposure light wave incident obliquely propagates in a wide range in the glass. It is difficult to limit the exposure range by masking. That is, there is a possibility that the range of the region that does not have liquid repellency varies. In other words, even if the variation in droplets to be filled with one needle can be reduced, there is an individual difference in the needle itself, and there is a problem that adjustment is required every time the needle is replaced.
そこで、本発明では、ディスペンス方式やピン転写方式のようにステージ精度で塗布位置の高精度化を図れる塗布方法において、微少量塗布する液体を安定して一定量供給し、部材の個体差を生じない塗布手段を提供することを目的とする。
Therefore, in the present invention, in a coating method such as a dispensing method or a pin transfer method that can achieve high precision of the coating position with stage accuracy, a small amount of liquid to be applied is stably supplied in a constant amount, resulting in individual differences in members. The object is to provide no application means.
本発明は、上記課題を解決するための、中空の中空ニードル本体と、前記中空ニードルの中空内に設けられ、孔内の表面が親液性である貫通孔を有する保持部とを備えた中空ニードルを提供する。
The present invention provides a hollow hollow needle body for solving the above-described problems, and a hollow portion provided in the hollow of the hollow needle, and a holding portion having a through hole whose surface in the hole is lyophilic. Providing a needle.
本発明によれば、中空ニードルの先端を液壷に付ければ、中空ニードルの先端に設けた保持部の親液性の孔で生じる毛細管現象での液の吸い上げ、孔の外部の撥液皮膜によりメニスカス形成により、自動的に一定量の液滴を正確に確保することができる。その後、中空ニードルの内部にエアを供給することで、充填した正確な量の液を塗布対象に安定して移すことが可能である。
According to the present invention, when the tip of the hollow needle is attached to the liquid tank, the liquid is sucked up by a capillary phenomenon generated in the lyophilic hole of the holding portion provided at the tip of the hollow needle, and the liquid repellent film outside the hole By forming the meniscus, a certain amount of droplets can be automatically secured accurately. Thereafter, by supplying air to the inside of the hollow needle, it is possible to stably transfer the filled accurate amount of liquid to the application target.
以下では本発明に係る実施例を図を用いて説明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図１は、本発明の１形態を示す塗布用ニードルの断面図と、液状材料４の充填、塗布方法を示す。中空パイプであるガラス製のニードル本体１と液状材料４を保持する円柱状の保持部２より液量規定ニードル１０が構成される。
FIG. 1 shows a cross-sectional view of a coating needle showing one embodiment of the present invention, and a filling method and a coating method of a liquid material 4. A liquid volume regulating needle 10 is constituted by a glass needle body 1 that is a hollow pipe and a cylindrical holding portion 2 that holds the liquid material 4.
ニードル本体１はガラス以外に、金属材料，樹脂材料，セラミックスなど、十分な強度と耐久性が得られれば、どのように選んでも構わない。
The needle body 1 may be selected in any way other than glass as long as sufficient strength and durability can be obtained, such as a metal material, a resin material, and ceramics.
ニードル本体１に対しては、端面も含めた全面にわたり、撥液性の皮膜３を形成する。皮膜３の形成方法としては、その分子にフッ素を含む有機物を溶媒に溶き、それをニードル本体１に塗布またはその溶液にニードル本体１を漬け込み、乾燥させて行う。また、表面の皮膜３にめっきを用いても良い。撥液性皮膜３は強い撥液性を示すものであればフッ素を含む有機物にこだわらなくてもよい。また、皮膜３はニードル本体１全体ではなくても、液状材料４が接触しうる箇所（例えば、ニードル本体１の先端付近のみや、ニードル本体１が保持部２に接している部分を除く部分など）に形成していれば足りる。
For the needle body 1, a liquid repellent film 3 is formed over the entire surface including the end face. The film 3 is formed by dissolving an organic substance containing fluorine in its molecule in a solvent and applying it to the needle body 1 or immersing the needle body 1 in the solution and drying it. Further, the surface film 3 may be plated. The liquid repellent coating 3 may not be obsessed with organic substances containing fluorine as long as it exhibits strong liquid repellency. Further, the coating 3 is not the entire needle body 1, but can be contacted with the liquid material 4 (for example, only the vicinity of the tip of the needle body 1 or a portion excluding the portion where the needle body 1 is in contact with the holding part 2). ) Is sufficient.
保持部２の材質は液状材料６（例えば、アルコール，アセトン，ヘキサン，ＮＭＰ，ペグミアなどの有機溶剤で希釈したフォトレジスト，配向膜材料，塗布ＩＴＯ液，金属錯体など溶液）に対して親液性であり接触角が小さいことが望ましい。この条件に適合すれば、ニードル本体１と同じ材質であることにこだわらず、どのような材質を用いても構わない。例えば、アルミナやジルコニアなどのセラミックス材料を用いてもよいし、金属材料で製作しても構わない。保持部２には少なくとも１つ以上、両底面を貫く孔４を設ける。この孔に液状材料が充填されることになるが、この孔は数μｍの直径でアスペクト比１０未満であればドリルで精密に加工することが可能であり、孔４の数や直径，保持部２の長さにより液状材料６の充填量を管理できる。保持部２の貫通孔４以外の表面には、發液性の皮膜３ａが施されているが、図２に示すようにこの皮膜３ａは省略してもよい。
The material of the holding unit 2 is lyophilic with respect to the liquid material 6 (for example, a photoresist diluted with an organic solvent such as alcohol, acetone, hexane, NMP, pegemia, alignment film material, coated ITO solution, metal complex solution). It is desirable that the contact angle is small. Any material can be used as long as the material is the same as that of the needle body 1 as long as this condition is met. For example, a ceramic material such as alumina or zirconia may be used, or a metal material may be used. The holding portion 2 is provided with at least one hole 4 penetrating both bottom surfaces. This hole will be filled with a liquid material. If this hole has a diameter of several μm and an aspect ratio of less than 10, it can be precisely machined with a drill. The filling amount of the liquid material 6 can be managed by the length of 2. The surface of the holding part 2 other than the through-hole 4 is provided with a liquid-repellent film 3a, but this film 3a may be omitted as shown in FIG.
ニードル本体１に対して保持部２は内側に挿入されている。ニードル本体１に保持部２を挿入し易くするために、図５のようにニードル本体１の孔口及び保持部材上部に面取り加工を施しても構わない。両者の固定は液状材料６が化学反応を起こさなければ、接着剤を用いても構わない。接着剤を用いない場合、ニードル本体１の内径よりも保持部２の外径を大きくし、焼きばめ、冷やしばめ等によって固定することができる。また、ニードル本体１を加熱等により一旦軟化させ保持部２を融着しても良い。両者の固定は、最終的にニードル本体１にエアを流し込んだ時に圧力で保持部２が飛び出さない、もしくは、両者のはめあい部分（固定部）から圧空８が漏れ出さないように気密性がとれていれば、上記の固定方法によらなくても良い。保持部２を固定したとき、貫通孔４は固定部の両側に貫通するようになっている。また、保持部２は、中空ニードル本体１の先端を含む領域に固定すると、液の充填がしやすくなるので望ましい。
The holding part 2 is inserted inside the needle body 1. In order to facilitate the insertion of the holding portion 2 into the needle body 1, chamfering may be performed on the hole opening and the upper portion of the holding member as shown in FIG. 5. For fixing them, an adhesive may be used as long as the liquid material 6 does not cause a chemical reaction. When an adhesive is not used, the outer diameter of the holding portion 2 can be made larger than the inner diameter of the needle body 1, and can be fixed by shrink fitting or cold fitting. Alternatively, the needle body 1 may be temporarily softened by heating or the like and the holding portion 2 may be fused. The fixing of both is airtight so that the holding part 2 does not pop out due to pressure when air is finally poured into the needle body 1 or the compressed air 8 does not leak from the fitting part (fixing part) of both. If it is, it does not need to be based on said fixing method. When the holding part 2 is fixed, the through hole 4 penetrates both sides of the fixing part. In addition, it is desirable that the holding unit 2 be fixed to a region including the tip of the hollow needle body 1 because the liquid can be easily filled.
本発明の中空ニードルの製造方法について説明する。まず、保持部２の基材となる親液性の部材を用意する。この親液性の部材の表面に、必要に応じて撥液性の皮膜３ａを成膜し、成膜後に貫通孔４をあけ、保持部２が作製される。表面が發液性または發液処理を行った中空ニードル本体１を用意し、保持部２をニードル本体１の内部に挿入して固定すると、液量規定ニードル１０が完成する。
The method for producing the hollow needle of the present invention will be described. First, a lyophilic member serving as a base material for the holding unit 2 is prepared. A liquid-repellent film 3a is formed on the surface of the lyophilic member as necessary, and the through hole 4 is formed after the film formation, whereby the holding portion 2 is manufactured. When the hollow needle main body 1 whose surface has been subjected to liquid-liquid or liquid-liquid treatment is prepared and the holding portion 2 is inserted into the needle main body 1 and fixed, the liquid volume regulating needle 10 is completed.
本発明にかかる液量規定ニードル１０の使用について説明する。液量規定ニードル１０を液状材料が納められた液壷（図示せず）に浸けた時に、毛細管現象で孔４を液が濡れ上がり、保持部２上部にメニスカス７を形成する。取り扱う液状材料６において、ニードル本体１の内部の撥液皮膜３の接触角と保持部２の接触角の差が９０°以上あることが望ましい。また、貫通孔４の大きさ（径及び長さ）は、毛細管現象により貫通孔４内全体に液が充填される大きさであり、具体的には数１００ｎｍ～１μｍとなる。このようにすることで、毛細管現象で濡れあがった液状材料６は保持部２からニードル本体１への濡れ上がりが生じず、液量の規定が自動的に行われる。
The use of the liquid volume regulating needle 10 according to the present invention will be described. When the liquid quantity regulating needle 10 is immersed in a liquid tank (not shown) in which a liquid material is stored, the liquid rises through the hole 4 by capillary action, and a meniscus 7 is formed on the upper portion of the holding part 2. In the liquid material 6 to be handled, it is desirable that the difference between the contact angle of the liquid repellent coating 3 inside the needle body 1 and the contact angle of the holding portion 2 is 90 ° or more. The size (diameter and length) of the through-hole 4 is a size that fills the entire inside of the through-hole 4 by capillary action, and is specifically several hundred nm to 1 μm. By doing so, the liquid material 6 wetted by the capillary phenomenon does not rise from the holding part 2 to the needle body 1, and the liquid amount is automatically regulated.
この機能を有効に活かすためには、液壷への液量規定ニードル１０の浸け方も影響する。液量規定ニードル１０を液壷に深く浸け過ぎると、水頭差の影響で液量を自動的に規定できなくなるので、液量規定ニードル１０の先端が液面に接触する程度、もしくは保持部材２の高さよりも浅く浸ける必要がある。こうすることで、液量規定ニードル１０内に毛細管現象を利用して充填する液量を常に一定量に規定することができる。
In order to make effective use of this function, the way in which the liquid volume regulating needle 10 is immersed in the liquid tank is also affected. If the liquid volume regulating needle 10 is immersed too deeply in the liquid tank, the liquid volume cannot be automatically defined due to the effect of the head difference, so that the tip of the liquid volume regulating needle 10 is in contact with the liquid surface, or the holding member 2 It is necessary to immerse shallower than the height. By doing so, it is possible to always regulate the amount of liquid to be filled in the liquid amount regulating needle 10 by utilizing the capillary phenomenon.
液壷から液量規定ニードル１０を引き上げた時に、保持部２の下部にもメニスカス７を形成する。しかし、ニードル本体１の外側にも撥液皮膜３を施しておけば、液状材料６が濡れ上がることもなく、保持部２の下部に形成するメニスカス７の大きさも一定の大きさになる。保持部２の上下に形成するメニスカス７と孔部に充填した液状材料８の量の合計が、液量規定ニードル１０に充填される液の総量となる。
When the liquid volume regulating needle 10 is pulled up from the liquid tank, the meniscus 7 is also formed in the lower part of the holding part 2. However, if the liquid repellent coating 3 is also provided on the outside of the needle body 1, the liquid material 6 does not get wet, and the size of the meniscus 7 formed at the lower portion of the holding portion 2 becomes constant. The total amount of the meniscus 7 formed above and below the holding portion 2 and the amount of the liquid material 8 filled in the hole portion is the total amount of the liquid filled in the liquid amount regulating needle 10.
液状材料６を充填後、液量規定ニードル１０の先端を塗布対象に近付けて位置決め後、ニードル本体１の内部に圧空（空気）９を吹き込むことで、液量規定ニードル１０に充填した液状材料６を塗布する。保持部２下端からの液離れを良くするために、保持部２の上下の端面に撥液皮膜３ａを施してもよい。この場合、製作を単純化させるために、保持部２の外面全体に撥液性皮膜３ａを形成した後、孔４を開けるようにしてもよい。また、この撥液性皮膜３ａにより、保持部材２の上下のメニスカスも小さくなるので、孔に充填された液状材料８の量がより支配的になる。保持部材２の底面の面積に比べて孔開口部の総面積が比較的大きい場合には、図２に示すように保持部２の外面に撥液性皮膜３ａを施さなくても構わない。この場合には、上下のメニスカスよりも、孔に充填された液状材料８の量がより支配的になる。
After filling the liquid material 6, after positioning the tip of the liquid volume regulating needle 10 close to the object to be coated, the liquid material 6 filled in the liquid volume regulating needle 10 by blowing compressed air (air) 9 into the needle body 1. Apply. In order to improve the liquid separation from the lower end of the holding part 2, a liquid repellent film 3 a may be applied to the upper and lower end faces of the holding part 2. In this case, in order to simplify the production, the hole 4 may be opened after the liquid repellent coating 3a is formed on the entire outer surface of the holding portion 2. In addition, since the liquid repellent coating 3a also reduces the upper and lower meniscuses of the holding member 2, the amount of the liquid material 8 filled in the holes becomes more dominant. When the total area of the hole openings is relatively large compared to the area of the bottom surface of the holding member 2, the liquid repellent coating 3a may not be applied to the outer surface of the holding part 2 as shown in FIG. In this case, the amount of the liquid material 8 filled in the holes becomes more dominant than the upper and lower meniscuses.
以上に示した図１，図２ではニードル本体１の先端に対して保持部材２の突出はないが、図３，図４に示すように、保持部２を突出させても構わない。また、図４に示すように突出した保持部２に面取りを施しても構わない。なお、保持部２を突出させる場合、その外面に撥液性皮膜３ａを施すことが望ましい。
1 and 2 shown above, the holding member 2 does not protrude from the tip of the needle body 1, but the holding portion 2 may protrude as shown in FIGS. Further, as shown in FIG. 4, the protruding holding portion 2 may be chamfered. In addition, when making the holding | maintenance part 2 protrude, it is desirable to give the liquid repellent film 3a to the outer surface.
本実施例によれば、中空ニードルの先端を液壷に付ければ、中空ニードルの先端に設けた保持部の親液性の孔で生じる毛細管現象での液の吸い上げ、孔の外部の撥液皮膜によりメニスカス形成により、自動的に一定量の液滴を正確に確保することができる。その後、中空ニードルの内部にエアを供給することで、充填した正確な量の液を塗布対象に安定して移すことが可能である。
According to this embodiment, if the tip of the hollow needle is attached to the liquid tank, the liquid is sucked up by the capillary phenomenon generated in the lyophilic hole of the holding portion provided at the tip of the hollow needle, and the liquid repellent film outside the hole Thus, a certain amount of droplets can be automatically secured accurately by forming the meniscus. Thereafter, by supplying air to the inside of the hollow needle, it is possible to stably transfer the filled accurate amount of liquid to the application target.
また、撥液性を示す部分と親液性示す部分を複雑なフォトリソ工程を用いずに、撥液性を全体に施した中空ニードル本体に、撥液性でない部材を組み込むようにできるので、液保持部の大きさのみの加工精度管理で、個体差の少ない液量規制中空ニードルが製作可能であり、正確に液量を計測することができる。更に、中空ニードルの材料としてガラス以外の不透明な材料を選択することも可能になる。塗布時においては、中空ニードルの外面に撥液処理が施されているため、液の濡れ上がりを抑えることが可能になり正確な量の塗布が可能である。また、本発明で言及するように、保持部においても孔以外に撥液処理を施せば、塗布時に液離れが良くなり、塗布精度も更に向上する。
In addition, a liquid repellency part and a lyophilic part can be incorporated into a hollow needle body that has been subjected to liquid repellency as a whole without using a complicated photolithography process. By controlling the processing accuracy of only the size of the holding part, it is possible to manufacture a liquid volume-regulated hollow needle with little individual difference, and the liquid volume can be accurately measured. Furthermore, an opaque material other than glass can be selected as the material for the hollow needle. At the time of application, since the liquid repellent treatment is applied to the outer surface of the hollow needle, it is possible to suppress the wetting of the liquid and to apply an accurate amount. Further, as mentioned in the present invention, if the holding part is also subjected to a liquid repellent treatment other than the holes, liquid separation is improved during application, and application accuracy is further improved.
保持部材の材料として、親液性のあるセラミクス等の材料を選定し、中空ニードルや保持部の端面にフッ素系の有機物やめっきなどが施してあれば、さらに安定した液の充填が可能となる。
If a material such as lyophilic ceramics is selected as the material for the holding member and the end surface of the hollow needle or holding part is coated with fluorine-based organic matter or plating, the liquid can be filled more stably. .
液の塗布量を変更する場合には、中空ニードル内部に組み込む保持部材の長さを変更する、つまり孔の長さを変更することにより対応可能である。
When changing the application amount of the liquid, it is possible to change the length of the holding member incorporated in the hollow needle, that is, by changing the length of the hole.
実施例２にかかる液量規定ニードル１０の実施形態を示す。実施例１ではニードル本体１は、表面に撥水処理を施すので、撥液性を持たないか撥液性が不足している材料で形成されている場合に有効である。しかし、テフロン（登録商標）樹脂などの強力な撥液性を示す材料やそのような材料が混錬された樹脂や金属などでニードル本体１を形成する場合、図６に示すように、撥液性皮膜３を表面に施さなくても同様な効果が得られる。
Embodiment of the liquid quantity regulation needle 10 concerning Example 2 is shown. In Example 1, since the needle body 1 is subjected to water repellency treatment on the surface, it is effective when it is formed of a material that does not have liquid repellency or lacks liquid repellency. However, when the needle body 1 is formed of a material having strong liquid repellency such as Teflon (registered trademark) resin or a resin or metal kneaded with such a material, as shown in FIG. The same effect can be obtained without applying the protective film 3 to the surface.
実施例１または２に示した液量規定ニードル１０を用いた、基板３０上に形成された薄膜の修正を行う装置の一実施例を図７に示す。
FIG. 7 shows an embodiment of an apparatus for correcting a thin film formed on the substrate 30 using the liquid volume regulating needle 10 shown in Embodiment 1 or 2.
図７（ａ）では、基板３０上の欠陥３１を検出し、レーザ加工を行う。図７（ｂ）では、レーザ加工を行った個所３３に対して、膜形成を行う。この実施例では、プログラムに従った基本的な制御は主制御装置５０がおこない、個々の動作や機器の制御についてはその下部に位置する位置決め制御ユニット５２、画像検出ユニット５３、レーザ加工ユニット５４、圧空制御ユニット５５が行う。
7A, the defect 31 on the substrate 30 is detected and laser processing is performed. In FIG. 7B, film formation is performed on the portion 33 subjected to laser processing. In this embodiment, basic control according to the program is performed by the main control device 50, and for individual operations and device control, a positioning control unit 52, an image detection unit 53, a laser processing unit 54, which are positioned below the main control device 50, The pneumatic control unit 55 performs this.
まず、図７（ａ）での処理方法を以下に示す。
First, the processing method in FIG.
最初に定盤４０上に基板３０を載せ固定する。基板３０の姿勢をほぼ一定にするため、定盤４０には位置決めピンなどを設け、基板の端面を押付けて粗位置決めをしておくとよい。基板の固定は定盤に真空吸着できるような孔または溝を設け、固定すると良い。
First, the substrate 30 is mounted on the surface plate 40 and fixed. In order to make the posture of the substrate 30 substantially constant, a positioning pin or the like is provided on the surface plate 40, and rough positioning is performed by pressing the end face of the substrate. The substrate may be fixed by providing holes or grooves that can be vacuum-adsorbed on the surface plate.
その後、画像検知ユニット５３は、カメラ１３の画像から、基板３０上に形成したアライメントマーク３２を画像認識し、アライメントマーク３２を基準とした座標系の構成を行う。その後、カメラ１３で基板３０上に形成したパターンをスキャンし、パターンの欠陥３１を画像検出ユニット５３で検知し、欠陥個所３１の位置情報を主制御装置５０を介して記憶装置５１に記録する。
Thereafter, the image detection unit 53 recognizes the image of the alignment mark 32 formed on the substrate 30 from the image of the camera 13 and constructs a coordinate system based on the alignment mark 32. Thereafter, the pattern formed on the substrate 30 is scanned by the camera 13, the defect 31 of the pattern is detected by the image detection unit 53, and the position information of the defect location 31 is recorded in the storage device 51 via the main controller 50.
一通りスキャンが終了した後、パターンの欠陥３１が生じている個所にカメラを移動し、レーザ照射を行う。レーザ発信機１８や絞り１７の操作についてはレーザ加工ユニットが制御を行い、加工対象となる膜の材質、厚さ毎に最適な波長、出力、照射範囲を調整する。レーザの照射範囲３３は欠陥が収まるかそれよりも広い範囲とし、液量規定ニードル１０の一回の塗布液量で適正に塗布できる範囲とする必要がある。液状材料６の濡れ広がりを考慮すると、円形であると更に良い。レーザ照射により、欠陥個所３１およびその周辺を除去したあと、図７（ｂ）に示す液状材料６の塗布を行う。
After the scanning is completed, the camera is moved to the place where the pattern defect 31 is generated, and laser irradiation is performed. The laser processing unit controls the operation of the laser transmitter 18 and the diaphragm 17 to adjust the optimum wavelength, output, and irradiation range for each material and thickness of the film to be processed. The laser irradiation range 33 needs to be within a range where defects can be accommodated or wider than that, and should be within a range that can be properly applied with a single application liquid amount of the liquid amount regulating needle 10. Considering the wetting and spreading of the liquid material 6, it is better to have a circular shape. After removing the defective portion 31 and its periphery by laser irradiation, the liquid material 6 shown in FIG. 7B is applied.
図７（ｂ）では図７（ａ）に示した装置と別のステーションで処理する方法と、ヘッドのみを別にして同じ定盤４０上で処理する方法が考えられる。以下では、どちらの場合にも当てはまるように説明する。
7B, a method of processing at a station different from the apparatus shown in FIG. 7A and a method of processing on the same surface plate 40 except for the head can be considered. In the following, description will be made so as to apply to both cases.
液量規定ニードル１０を液壷２５液面に接触させ液状材料６充填する。液壷２５は液状材料６の有機溶媒が揮発し、濃度変化が起きないように、液量規定ニードル１０が出し入れできる孔が設けられた蓋２６を設けることが望ましい。非稼動時には、液量規定ニードル１０は液壷の蓋２６の孔に差し込まれた状態とし、先端部の乾燥を抑える様にする。
The liquid volume regulating needle 10 is brought into contact with the liquid surface of the liquid tank 25 and the liquid material 6 is filled. The liquid tank 25 is desirably provided with a lid 26 provided with a hole through which the liquid volume regulating needle 10 can be taken in and out so that the organic solvent of the liquid material 6 is volatilized and the concentration does not change. When not in operation, the liquid volume regulating needle 10 is inserted into the hole of the liquid lid 26 so as to suppress drying of the tip.
記憶装置５１の情報に従い、位置決めユニット５２はステージ３７．３８を駆動し、液量規定ニードル１０をレーザ修正範囲３３の中心上方に移動する。そこで、基板との高さを光学的に測定する高さセンサ３９で、液量規定ニードル１０先端と基板３０の間隔を狭めて行く。所定の間隔に達したら圧空制御ユニットはバルブ２３を開放し、圧空９を液量規定ニードル１０内部に送り込む。液離れを良くするために、圧空９を送りながらｚステージ３８を上昇させるとよい。
In accordance with the information stored in the storage device 51, the positioning unit 52 drives the stage 37.38 and moves the liquid amount regulating needle 10 to the upper center of the laser correction range 33. Therefore, the distance between the tip of the liquid volume regulating needle 10 and the substrate 30 is narrowed by a height sensor 39 that optically measures the height of the substrate. When the predetermined interval is reached, the compressed air control unit opens the valve 23 and sends the compressed air 9 into the liquid amount regulating needle 10. In order to improve the liquid separation, the z stage 38 may be raised while sending the compressed air 9.
以上に示したように液状材料６の塗布が終了後、定盤４０に基板を固定したまま温風を吹き付けて、塗布個所３４を乾燥させるか、基板３０の固定を解除し、基板３０を炉に入れて乾燥させる。
As described above, after the application of the liquid material 6 is completed, hot air is blown while the substrate is fixed to the surface plate 40 to dry the application portion 34 or the substrate 30 is released, and the substrate 30 is removed from the furnace. And let it dry.
本発明の液量規定ニードルは、例えばＰＤＰパネルの配線パターンの修正や液晶パネル，有機ＥＬパネルのＴＦＴパターンあるいは液晶パネルのカラーフィルタの修正において液状化させた材料をピンポイントで塗布するのに有用である。
The liquid amount regulating needle of the present invention is useful for pinpoint application of liquefied material in, for example, correction of wiring patterns of PDP panels, correction of TFT patterns of liquid crystal panels, organic EL panels, or color filters of liquid crystal panels. It is.
１…ニードル本体，２…保持部，３…撥液性皮膜，４…貫通孔，６…液状材料，７…メニスカス，８…孔部に充填された液状材料，９…圧空，１０…液量規定ニードル，１１…圧空供給手段，１３…カメラ，１４…ハーフミラー，１５…フィルタ，１６…照明，１７…絞り，１８…レーザ発信機，１９…レンズ，２１…コンプレッサ，２２…レギュレータ，２３…バルブ，２５…液壷，２６…蓋，３０…基板，３１…欠陥，３２…アライメントマーク，３３…レーザ照射範囲，３４…塗布範囲，３７…ｘｙステージ，３８…ｚステージ，３９…高さセンサ，４０…定盤，５０…主制御装置，５１…記憶装置，５２…位置決めユニット，５３…画像検出ユニット，５４…レーザ加工制御ユニット，５５…圧空制御ユニット，６０…シリンジ，６１…ピストン，６２…蓋，６３…中空ニードル，７０…塗布針，７１…撥液性皮膜非形成部，７２…平坦部，７３…液球，８０…インクジェットヘッド，８１…液状材料タンク，８２…射出した液滴。
DESCRIPTION OF SYMBOLS 1 ... Needle body, 2 ... Holding part, 3 ... Liquid repellent film, 4 ... Through-hole, 6 ... Liquid material, 7 ... Meniscus, 8 ... Liquid material with which the hole was filled, 9 ... Pressure air, 10 ... Liquid quantity Specified needle, 11 ... Pressure air supply means, 13 ... Camera, 14 ... Half mirror, 15 ... Filter, 16 ... Illumination, 17 ... Aperture, 18 ... Laser transmitter, 19 ... Lens, 21 ... Compressor, 22 ... Regulator, 23 ... Valve, 25 ... Liquid tank, 26 ... Lid, 30 ... Substrate, 31 ... Defect, 32 ... Alignment mark, 33 ... Laser irradiation range, 34 ... Application range, 37 ... xy stage, 38 ... z stage, 39 ... Height sensor , 40 ... Surface plate, 50 ... Main controller, 51 ... Storage device, 52 ... Positioning unit, 53 ... Image detection unit, 54 ... Laser processing control unit, 55 ... Pressure control unit, 60 ... Syringe, 6 ... Piston, 62 ... Lid, 63 ... Hollow needle, 70 ... Application needle, 71 ... Liquid repellent coating non-formation part, 72 ... Flat part, 73 ... Liquid ball, 80 ... Inkjet head, 81 ... Liquid material tank, 82 ... Ejected droplets.
Claims (12)
- 中空ニードル本体と、
前記中空ニードル端部に設けられ、孔内の表面が親液性である貫通孔を有する保持部とを備えた中空ニードル。 A hollow needle body;
The hollow needle provided with the holding | maintenance part which is provided in the said hollow needle edge part and has the through-hole whose surface in a hole is lyophilic. - 請求項１に記載の中空ニードルであって、
前記中空ニードル本体と前記保持部とは、前記ニードル本体の内周側と前記保持部の外周側との間に気密性を有して接続され、
前記貫通孔は、前記保持部の当該接続された部分の両側の面を貫通していることを特徴とする中空ニードル。 The hollow needle according to claim 1,
The hollow needle body and the holding part are connected with airtightness between the inner peripheral side of the needle body and the outer peripheral side of the holding part,
The hollow needle characterized in that the through-hole penetrates both surfaces of the connected portion of the holding portion. - 請求項１または請求項２に記載の中空ニードルであって、
前記中空ニードル本体の内面及び外面が撥液性を有することを特徴とする中空ニードル
。 The hollow needle according to claim 1 or 2,
A hollow needle characterized in that an inner surface and an outer surface of the hollow needle body have liquid repellency. - 請求項１～３のいずれかに記載の中空ニードルであって、
前記保持部は、前記貫通孔以外の表面に撥液性を有することを特徴とする中空ニードル
。 The hollow needle according to any one of claims 1 to 3,
The hollow needle characterized in that the holding part has liquid repellency on the surface other than the through hole. - 請求項１～４のいずれかに記載の中空ニードルであって、
前記保液部材がセラミクッスで形成されていることを特徴とする中空ニードル。 The hollow needle according to any one of claims 1 to 4,
A hollow needle, wherein the liquid retaining member is formed of ceramics. - 請求項１～５のいずれかに記載の中空ニードルであって、
前記中空ニードル本体は、撥液性を有する材料で形成されていることを特徴とする中空ニードル。 The hollow needle according to any one of claims 1 to 5,
The hollow needle body is formed of a material having liquid repellency. - 請求項１～５のいずれかに記載の中空ニードルであって、
中空ニードル本体の内面及び外面にフッ素を有する有機物でコーティングすることを特徴とする中空ニードル。 The hollow needle according to any one of claims 1 to 5,
A hollow needle characterized in that an inner surface and an outer surface of a hollow needle body are coated with an organic substance having fluorine. - 請求項７において、
前記中空ニードルに対して前記コーティングしたフッ素を有する有機物の層をめっきで形成することを特徴とする中空ニードル。 In claim 7,
A hollow needle characterized in that the coated fluorine-containing organic layer is formed on the hollow needle by plating. - 請求項１～８のいずれかに記載の中空ニードルであって、
前記保持部は、前記中空ニードル本体の先端を含む領域に設けられていることを特徴とする中空ニードル。 The hollow needle according to any one of claims 1 to 8,
The holding needle is provided in a region including a tip of the hollow needle main body. - 請求項１～９のいずれかに記載の中空ニードルであって、
前記貫通孔は、毛細管現象により、その内部の全体に液を充填可能な大きさであることを特徴とする中空ニードル。 The hollow needle according to any one of claims 1 to 9,
A hollow needle characterized in that the through-hole has a size capable of filling the entire inside thereof with a capillary phenomenon. - 親水性を有する材料で形成された部材の表面に撥水処理を施す工程と、
前記撥水処理を施した部材に貫通孔を形成し、保持部とする工程と、
表面に發液性を有する中空ニードル本体の中空内に、前記保持部を挿入する工程とを含む中空ニードルの製造方法。 A step of subjecting the surface of a member formed of a hydrophilic material to a water repellent treatment;
Forming a through-hole in the water-repellent member and forming a holding portion;
And a step of inserting the holding portion into the hollow of the hollow needle main body having a liquid-liquid property on the surface. - 請求項１１において、
前記保液部材は、前記中空ニードル本体に気密性を有するように接続され、
前記貫通孔は、前記保持部の前記接続された部分の両側に貫通するように設けられていることを特徴とする中空ニードルの製造方法。 In claim 11,
The liquid retaining member is connected to the hollow needle body so as to be airtight,
The method of manufacturing a hollow needle, wherein the through hole is provided so as to penetrate both sides of the connected portion of the holding portion.
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| JP2009006208A JP2010162470A (en) | 2009-01-15 | 2009-01-15 | Hollow needle and method of manufacturing the same |
| JP2009-006208 | 2009-01-15 |
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| WO2010082273A1 true WO2010082273A1 (en) | 2010-07-22 |
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| WO (1) | WO2010082273A1 (en) |
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| JP6242122B2 (en) * | 2013-02-01 | 2017-12-06 | Ntn株式会社 | Coating unit, coating apparatus and coating method using the same |
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