JP2011033689A - Application method, application unit and pattern correction device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an application unit capable of uniformizing the thickness of a correction liquid. <P>SOLUTION: The application unit includes an application part 10 for applying a correction ink 14 to a white defect 6a of a liquid crystal color filter substrate 1, and a solvent vapor supply part 15 for supplying vapor of a solvent 18 of the correction ink 14 to the correction ink 14 applied to the white defect 6a. Hence, the correction ink 14 applied to the white defect 6a absorbs the vapor of the solvent 18 for enhancing fluidity of the correction ink 14, and thickness of the correction ink 14 is uniformized. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a coating method, a coating unit, and a pattern correction device, and more particularly to a coating method, a coating unit, and a pattern correction device that apply a correction liquid to a defective portion of a fine pattern formed on a substrate. More specifically, the present invention relates to a coating method, a coating unit, and a pattern correcting device for applying a correction liquid to a white defect of a liquid crystal color filter generated in a manufacturing process of a liquid crystal display.

  In recent years, in flat panel displays such as a liquid crystal display, a plasma display, and an EL display, the screen has been increased in size and definition, and the number of pixels on the screen tends to increase. Along with this, there is a high probability that a defect exists on the screen, and a technique for correcting the defect is required in order to improve the yield.

  For example, as a method of correcting a white defect (defect portion) in which a part of a colored layer of a liquid crystal color filter is missing, after applying correction ink (correction liquid) to the tip of the needle, the tip of the application needle There are a method of applying correction ink to the white defect and a method of applying correction ink to the white defect using a microdispenser (for example, see Patent Documents 1 and 2).

  There is also a method of applying a correction ink after irradiating a white defect of arbitrary shape with laser light to process the white defect into a rectangle. In this method, the corner of the rectangular white defect remains unfilled with correction ink, the center of the correction ink applied to the white defect swells and becomes higher, or the correction ink is drawn around the white defect. The thickness of the correction ink applied to the white defect is likely to be non-uniform, such as a depression in the center. Therefore, there is a method in which a gas is jetted from above onto the correction ink applied to the white defect to flatten the surface of the correction ink (for example, see Patent Document 3).

JP 9-236933 A JP 2006-145786 A JP 2008-3287 A

  Recently, since the size of one pixel of the color filter has increased with the increase in the size of the screen of the liquid crystal display, the uneven color within one pixel after correction has become conspicuous. In order to prevent this color unevenness, there is a method in which, even when only a part of a pixel has a white defect, the correction ink is applied after the entire pixel is made a white defect. However, in this method, coating is performed in multiple times while changing the position of the coating needle in a large white defect, so that the thickness of the applied correction ink becomes uneven and color unevenness occurs in the pixel. End up.

  When the thickness of the correction ink is made uniform by jetting the gas from above in the state where the color unevenness is generated in this way, if the pressure of the gas is high, the correction ink is pushed out around the defective pixel, It is also assumed that it protrudes. On the contrary, if the gas pressure is low, it is difficult to make the thickness of the correction ink uniform. In addition, since the step of flattening by jetting gas is added to the step of applying the correction ink, the correction time becomes longer.

  Therefore, a main object of the present invention is to provide a coating method, a coating unit, and a pattern correction device capable of making the thickness of the correction liquid uniform without extruding the correction liquid around the defect portion. is there.

  A coating method according to the present invention is a coating method in which a correction liquid is applied to a defective portion of a fine pattern formed on a substrate, the first step of applying the correction liquid to the defective portion, and a coating applied to the defective portion. And a second step of supplying the correction fluid solvent vapor to the correction fluid.

Preferably, the second step is performed while performing the first step.
The coating unit according to the present invention is a coating unit that applies a correction liquid to a defective part of a fine pattern formed on a substrate, and is applied to the defective part and a coating part that applies the correction liquid to the defective part. And a solvent vapor supply section for supplying the solvent vapor of the correction liquid to the correction liquid.

  Preferably, the solvent vapor supply unit supplies the vapor of the solvent to the correction liquid applied to the defective part during a period in which the correction liquid is applied to the defective part by the application unit.

  Preferably, the solvent vapor supply unit includes a first container into which a solvent is injected, and a lid of the first container, and the first container or the lid contains the solvent generated in the first container. A solvent vapor discharge hole for discharging the vapor out of the first container is formed.

  Preferably, the application part has a through-hole formed in the bottom thereof, has the same diameter as that of the second container into which the correction liquid is injected, and the correction liquid attached to the tip of the defective part. And a driving means for causing the tip of the application needle to protrude below the second container through the through-hole, and to attach the correction liquid to the tip of the application needle. The second containers are fixed to each other or integrally formed.

  Preferably, the solvent vapor supply unit has a first container into which a solvent is injected, and a solvent vapor generation unit that generates the solvent vapor, and a solvent vapor generated in the solvent vapor generation unit is applied to the defective portion. An injection unit that injects the corrected fluid.

  Preferably, the application part has a through-hole formed in the bottom thereof, has the same diameter as the second container into which the correction liquid is injected, and the correction liquid attached to the tip part of the second container. An applicator needle for applying to the first container, and a driving means for causing the tip of the applicator needle to protrude below the second container through the through-hole and to attach the correction liquid to the tip of the applicator needle, The second containers are fixed to each other or integrally formed.

  Preferably, the solvent vapor supply unit includes a sheet accommodated in the first container and having absorbed the solvent.

  Further, another coating unit according to the present invention is a coating unit for applying a correction liquid to a defective portion of a fine pattern formed on a substrate, a through hole is formed in the bottom, and the correction liquid is injected. A container, a coating needle having substantially the same diameter as the through-hole, and applying a correction liquid adhering to the tip to the defective part, and the tip of the coating needle projecting under the container through the through-hole, And a driving means for attaching the correction liquid to the tip of the coating needle. In this coating unit, a passage for supplying the vapor of the solvent of the correction liquid generated in the container to the lower side of the container is formed in the container.

  Still another application unit according to the present invention is an application unit for applying a correction liquid to a defective portion of a fine pattern formed on a substrate, and a first through-hole is formed in the bottom of the application unit. , A coating needle having substantially the same diameter as the first through hole, and applying a correction liquid adhering to the tip of the container to the defective part, and an application needle through the first through hole And a driving means for causing the correction liquid to adhere to the tip of the coating needle. In this coating unit, a second through hole is formed in the vicinity of the first through hole at the bottom of the container, and the correction liquid injected into the container is also filled into the second through hole. The solvent vapor of the correction liquid generated from the correction liquid is supplied to the lower part of the container.

  The pattern correction apparatus according to the present invention includes the coating unit and positioning means for moving the coating unit above a desired position on the surface of the substrate.

  In the coating method, the coating unit, and the pattern correction apparatus according to the present invention, the correction liquid is applied to the defective part, and the solvent vapor of the correction liquid is supplied to the correction liquid applied to the defective part. Therefore, the correction liquid applied to the defective portion can suck the solvent vapor to improve the fluidity of the correction liquid, and the thickness of the correction liquid can be made uniform without pushing the correction liquid around the defective portion.

FIG. 1 is a plan view showing white defects of a liquid crystal color filter substrate. It is the II-II sectional view taken on the line of FIG. It is sectional drawing which shows the structure of the principal part of the coating unit by Embodiment 1 of this invention, and its operation | movement. It is another sectional view showing the operation of the coating unit shown in FIG. FIG. 10 is still another cross-sectional view showing the operation of the coating unit shown in FIG. 3. 3 is a cross-sectional view showing a comparative example of the first embodiment. FIG. It is a figure which shows the problem of the comparative example shown in FIG. It is a top view which shows the case where one whole pixel shown in FIG. 1 is a white defect. It is a figure which shows the method of apply | coating correction ink to the white defect shown in FIG. It is sectional drawing which shows the problem in the case of apply | coating correction ink to the white defect shown in FIG. It is sectional drawing which shows the effect of this invention. FIG. 10 is a cross-sectional view showing a modification of the first embodiment. It is sectional drawing which shows the structure of the principal part of the coating unit by Embodiment 2 of this invention, and its operation | movement. It is sectional drawing which shows the structure of the principal part of the coating unit by Embodiment 3 of this invention. It is sectional drawing which shows the whole structure of the coating unit containing the container shown in FIG. It is a perspective view which shows the whole structure of the pattern correction apparatus provided with the coating unit shown in FIG. FIG. 10 is a cross-sectional view showing a modified example of the third embodiment. It is sectional drawing which shows the other example of a change of Embodiment 3. FIG. 12 is a cross-sectional view showing still another modification of the third embodiment.

[Embodiment 1]
1 and 2, the liquid crystal color filter substrate 1 includes a glass substrate 2. A grid-like black matrix 3 is formed on the surface of the glass substrate 2, and R pixels 4, G pixels 5, and B pixels 6 are formed in a plurality of regions surrounded by the black matrix 3 at a constant cycle. . The R pixel 4, the G pixel 5, and the B pixel 6 are respectively composed of red, green, and blue colored layers. FIGS. 1 and 2 show a state in which a rectangular white defect 6 a exists in a part of the B pixel 6. The rectangular white defect 6a is formed by irradiating a rectangular region including a white defect or a foreign substance defect having an arbitrary shape generated in the B pixel 6 with a laser beam.

  FIG. 3 is a cross-sectional view showing a main part of the coating unit. In FIG. 3, the application unit includes an application unit 10, and the application unit 10 includes a container 11, a lid 12, and an application needle 13. A first hole 11 a is opened at the bottom of the container 11, and correction ink 14 is injected into the container 11. The upper opening of the container 11 is closed by a lid 12. A second hole 12 a is opened at the center of the lid 12. A taper portion whose cross-sectional area gradually decreases toward the tip is formed at the tip of the application needle 13, and a circular flat surface is formed at the tip of the application needle 13.

  The application needle 13 has substantially the same diameter as the first and second holes 11a and 12a. The tip 13 a of the application needle 13 penetrates the second hole 12 a and is immersed in the correction ink 14. Since the diameters of the first and second holes 11a and 12a are slightly larger than the diameter of the application needle 13 penetrating the first and second holes 11a and 12a, the first and second holes 11a and 12a are small. There is almost no leakage of the correction ink 14 from the hole 11a. For example, the diameter of the first hole 11a is 1 mm or less.

  The application needle 13 is supported by a linear motion bearing (not shown) so as to be able to advance and retract in the vertical direction. When the tip portion 13 a of the application needle 13 contacts the color filter substrate 1, the weight of the movable member including the application needle 13 is applied to the color filter substrate 1. Even when the tip 13a of the application needle 13 comes into contact with the color filter substrate 1, even if the application needle 13 is further lowered, the movable portion including the application needle 13 is retracted upward, and the tip 13a is damaged. Avoided.

  The hole for injecting the correction ink 14 in the container 11 has a tapered shape in which the cross-sectional area becomes smaller as the hole approaches the hole 11a. Therefore, the tip 13a of the application needle 13 can be immersed with a small amount of correction ink 14, which is economical. The amount of the correction ink 14 is, for example, 20 μl (microliter). Some of the correction inks 14 do not last for a long time, and the container 11 is periodically replaced. Alternatively, the used container 11 can be reused after washing. In order to simplify the attachment and detachment of the container 11, usability is improved by making the structure easy to grasp by hand.

  The coating unit further includes a solvent vapor supply unit 15, and the solvent vapor supply unit 15 includes a container 16 and a lid 17. The container 16 is fixed to the side surface of the container 11. The container 11 and the container 16 may be integrally formed. A solvent 18 of the correction ink 14 is injected into the container 16. The upper opening of the container 16 is closed with a lid 17. A hole 17 a is opened at the center of the lid 17.

  The container 16 is filled with the vapor (vaporized gas) of the solvent 18, and the vapor of the solvent 18 is gradually discharged around the hole 17a. The solvent 18 is a solvent contained in the correction ink 14 (for example, a solvent that disperses the pigment contained in the correction ink 14) or a solvent capable of diluting the correction ink 14. For example, when the diluent of the correction ink 14 is PGMEA (propylene glycol monomethyl ether acetate), PGMEA is injected into the container 16 as the solvent 18. PGMEA is a high boiling point solvent having a boiling point as high as 146 ° C., and therefore can remain in the container 16 for a long time.

  The solvent 18 may be gelled so that the solvent 18 does not leak from the holes 17a when the container 16 moves, or a sheet 19 that has absorbed the solvent 18 is accommodated in the container 16. Also good.

  Next, an application process for applying the correction ink 14 to the white defect 6a will be described. First, as shown in FIG. 3, the coating unit 9 and the color filter substrate 1 are relatively moved by a positioning device (not shown), and the tip of the coating needle 13 and the white defect 6a are opposed to each other with a predetermined gap. Next, as shown in FIG. 4, the application needle 13 is lowered by a driving device (not shown), and the distal end portion 13 a of the application needle 13 is projected below the container 11 through the first hole 11 a, and the distal end portion 13 a. The correction ink 14 adhering to is applied to the white defect 6a.

  Next, as shown in FIG. 5, the application needle 13 is returned upward by a driving device (not shown), and one application is completed. At this time, the tip end portion 13a of the application needle 13 is immersed in the correction ink 14 in the container 11 (the same state as FIG. 3). Further, the correction ink 14 applied to the white defect 6 a during the application process shown in FIGS. 3 and 4 absorbs the vapor of the solvent 18 leaking from the solvent vapor generation unit 15. Thereby, the fluidity of the correction ink 14 is improved, and the surface of the correction ink 14 applied to the white defect 6a is flattened. In addition, since the correction ink 14 also flows in the corner portion of the white defect 6a, a uniform correction layer can be obtained without leaving an unfilled portion in the corner portion of the white defect 6a. Further, since the vapor of the solvent 18 is absorbed while the correction ink 14 is applied to the white defect 6a, there is no need to perform a flattening step after the application. Therefore, it is possible to perform correction with good quality without extending the correction tact time.

  FIG. 6 is a diagram showing a comparative example of the first embodiment, and is a diagram contrasted with FIG. In FIG. 6, in this comparative example, the container 11 and the solvent vapor supply unit 15 are not provided, the correction ink 14 is attached to the tip of the application needle 13, and the tip of the application needle 13 is brought into contact with the white defect 6a. Then, the correction ink 14 is applied to the white defect 6a (see Patent Document 1).

  FIG. 7 is a diagram showing a state in which the correction ink 14 is applied to the white defect 6a by the method shown in FIG. As shown in FIG. 7, the correction ink 14 applied to the white defect 6a is not filled in the entire area of the white defect 6a, and the unfilled portion of the correction ink 14 remains at the corner of the white defect 6a. Further, the thickness of the correction ink 14 applied to the white defect 6a becomes non-uniform, and for example, the central portion may be higher than the surrounding area.

  Next, a modified example of the first embodiment will be described. The recent color filter substrate 1 has a size of one pixel as the screen size increases. When the white defect 6 a is present only in a part of the large pixel 6, when the correction ink 14 is applied to the white defect 6 a, color unevenness may occur in the pixel 6. Therefore, in order to prevent color unevenness in the pixel 6, as shown in FIG. 8, the correction ink 14 may be applied after irradiating the entire pixel 6 with laser light to convert the entire pixel 6 into white defects 6a. is there. When the correction ink 14 is applied to such a large white defect 6a, as shown in FIG. 9, the correction ink 14 is applied in multiple times while changing the position of the application needle 13 in the white defect 6a.

  FIG. 10 is a cross-sectional view showing a state in which the correction ink 14 is applied in multiple steps while shifting the application position of the application needle 13 by the method shown in FIG. In FIG. 10, the correction ink 14 applied to the white defect 6a does not have a uniform thickness when the fluidity is poor or the viscosity is high, and the surface is uneven. In particular, when the number of times of application increases, the thickness of the correction ink 14 tends to be non-uniform.

  On the other hand, if the white defect 6a is corrected using the coating unit shown in FIG. 3, the surface of the correction ink 14 applied in the white defect 6a as shown in FIG. Has already been flattened, and it is not necessary to add a flattening process after coating.

  After the correction ink 14 is applied to the white defect 6a, the correction ink 14 is cured. If the correction ink 14 is an ultraviolet curing type, the correction ink 14 is cured by irradiating with ultraviolet rays. Further, if necessary, a baking treatment is performed thereafter. Recently, the firing process may be omitted to shorten the correction time.

  In the modified example of FIG. 12, the hole 17 a of the lid 17 is closed, the hole 16 a is opened at the bottom of the container 16, and the sheet 19 that has absorbed the solvent 18 is accommodated in the container 16. If the hole 16a is small and the solvent 18 does not leak from the hole 16a, the solvent 18 may be injected into the container 16. In this modified example, since the distance between the hole 16a for supplying the solvent vapor and the white defect 6a is shorter than that in the first embodiment, the correction ink 14 applied to the white defect 6a can easily absorb the vapor of the solvent 18. The correction ink 14 is flattened in a short time.

[Embodiment 2]
FIG. 13 is a cross-sectional view showing the main part of the coating unit according to Embodiment 2 of the present invention, which is compared with FIG. In FIG. 13, this coating unit is different from the coating unit of FIG. 4 in that the solvent vapor supply unit 15 is replaced with a solvent vapor generation unit 21 and a gas injection unit 30.

  The solvent vapor generation unit 21 includes a regulator (R) 22, an electromagnetic valve (V) 23, a timer (T) 24, a pipe 25, and a container 26. A gas supply source (G) 20 is connected to the inlet of the regulator 22. As the gas, for example, nitrogen gas is used, but compressed air may be used as long as the solvent 18 used does not deteriorate. The regulator 22 sets the gas pressure to a predetermined value. The outlet of the regulator 22 is connected to the inlet of the electromagnetic valve 23. The timer 24 controls the opening / closing timing of the electromagnetic valve 23. The electromagnetic valve 23 may be controlled by a control computer or PLC (Programmable Logic Controller) without providing the timer 24.

  One end of the pipe 25 is connected to the outlet of the electromagnetic valve 23, and the other end passes through the upper end of the side wall of the container 26 and is bent to the bottom side of the container 26. An outlet 26 a is provided at the upper end of the side wall of the container 26, and the outlet 26 a of the container 26 is connected to one end of the pipe 28.

  The solvent 18 of the correction ink 14 is injected into the container 26, and the container 26 is filled with the vapor of the solvent 18. For example, solvent 18 is PGMEA. Note that one end of the pipe 25 may be placed in the liquid of the solvent 18 to generate bubbles and promote the evaporation of the solvent 18. Further, a heater (not shown) may be disposed in the container 26 to warm the solvent 18 and increase the solvent vapor.

  In addition, when the container 26 into which the solvent 18 has been injected moves along with the defect correction, it is assumed that the liquid level of the solvent 18 shakes and the solvent 18 flows from the outlet 26a. In order to prevent the solvent 18 from flowing from the outlet 26 a, a filter 27 may be provided in the container 26 so as to cover the outlet 26 a from the inside of the container 26, the solvent 18 may be gelled, or the solvent 18. The sheet 19 having absorbed therein may be put in the container 26.

  The gas injection unit 30 includes a housing 31 and a joint 32. The housing 31 is fixed to the side surface of the container 11. The housing 31 and the container 11 may be integrally formed. An air supply port 31a is formed at the upper end of the housing 31, and an outlet of the joint 32 is coupled to the air supply port 31a. The inlet of the joint 32 is connected to the other end of the pipe 28. At the lower end portion of the housing 31, an injection port 31b communicating with the air supply port 31a is formed. The injection port 31b is provided to face a position where the tip portion 13a of the application needle 13 and the white defect 6a are in contact with each other during application.

  When the white defect 6a is corrected using this coating unit, the correction ink 14 is applied to the white defect 6a while jetting a gas containing the vapor of the solvent 18 from the ejection port 31b to a range including the white defect 6a. Specifically, for example, the injection of the gas containing the vapor of the solvent 18 is started slightly before applying the correction ink 14 to the white defect 6a, and the application of the correction ink 14 to the white defect 6a is completed. Gas injection is stopped when the needle 13 returns to the container 11.

  The correction ink 14 is applied to the white defect 6 a and simultaneously sucks the vapor of the solvent 18. Thereby, the viscosity of the correction ink 14 is lowered, and the fluidity of the correction ink 14 is increased. When the fluidity of the correction ink 14 becomes high, even if the correction ink 14 applied to the white defect 6a is smeared, for example, even if there is a region where the correction ink 14 is not applied, the correction ink 14 flows over the entire area and the uneven coating is repaired. As a result, the thickness of the correction ink 14 becomes uniform throughout the white defect 6a.

  The gas injection time is changed according to the dimension of the white defect 6 a and the like, and is set in the timer 24. Further, if the gas pressure is too high, the correction ink 14 applied to the white defect 6a may be scattered. Therefore, it is preferable to make the gas pressure as small as possible. Further, since the fluidity of the correction ink 14 varies depending on the viscosity and the ink characteristics, it is preferable to set the gas ejection time after confirming the correction status in advance.

  In addition, when the area of one white defect 6a is large and application is performed a plurality of times while shifting the application position, the gas injection is started before the correction is started as described above, and the gas injection is stopped simultaneously with the completion of all the applications. Alternatively, the gas may be injected only before and after the last application.

[Embodiment 3]
FIG. 14 is a cross-sectional view showing a main part of a coating unit according to Embodiment 3 of the present invention. In FIG. 14, the application unit includes a container 41. A first hole 41 a is opened at the bottom of the container 41, and the correction ink 14 is injected into the container 41. The opening at the upper end of the container 41 is closed with a lid 42. A second hole 42 a is opened at the center of the lid 42.

  An application needle 43 is inserted into the first and second holes 41a and 42a. The distal end side of the application needle 43 is formed thinner than the proximal end side. The distal end side of the application needle 43 is formed to have substantially the same diameter as the first hole 41a, and the proximal end side of the application needle 43 is formed to have approximately the same diameter as the second hole 42a. The tip 43a of the application needle 43 penetrates the second hole 42a and is immersed in the correction ink 14.

  A groove 41b is formed on the bottom surface around the first hole 41a of the container 41, and a sheet 44 that has absorbed the solvent 18 is accommodated in the groove 41b. The sheet 44 is, for example, a cylindrical sponge or a nonwoven fabric. The opening of the groove 41 b is closed with a lid 45, and a hole 45 a is formed in the lid 45. The vapor of the solvent 18 generated in the groove 41b flows out below the container 41 through the hole 45a. A protrusion 41c is provided on the side surface of the container 41, and a pin 46 of a magnetic material is fixed upward on the protrusion 41c.

  FIG. 15 is a diagram illustrating the overall configuration of the coating unit 50. In FIG. 15, the proximal end portion of the application needle 43 is fixed to the distal end portion of the application needle fixing plate 51. A magnet 52 is fixed to the lower surface of the base end portion of the application needle fixing plate 51, and a magnet 54 is fixed to the upper surface of the distal end portion of the arm 53. The base end portions of the application needle fixing plate 51 are magnets 52, 54. It is fixed to the tip of the arm 53 with the suction force.

  The arm 53 is formed in an L shape, and the base end portion thereof is coupled to the support base 56 via the linear motion guide member 55. The arm 53 is supported by the linear motion guide member 55 so as to be movable up and down with respect to the support base 56. Stoppers 57 and 58 are provided above and below the linear motion guide member 55, and the vertical movement of the arm 53 is limited by the stoppers 57 and 58.

  The container 41 is fixed to the tip of another arm 59 via a pin 46. A magnet 60 is fixed to the lower surface of the distal end portion of the arm 59, and the container 41 is fixed to the distal end portion of the arm 59 by the attractive force of the pin 46 and the magnet 60. The arm 59 is formed in an L shape, and the base end portion thereof is coupled to the arm 53 via the linear motion guide member 61. The arm 59 is supported by the linear motion guide member 61 so as to be movable up and down with respect to the arm 53.

  Each of the linear motion guide members 55 and 61 has a rolling guide configuration in which a rolling element (such as a ball) is interposed between the rail portion and the slide portion, and the rail portion and the slide portion can be freely operated with an extremely light force. It is a linear guide that can move linearly. In order to improve application accuracy, a light preload may be applied.

  The amount of relative movement of the arms 53 and 59 in the vertical direction is limited by the pin 62 fixedly supported by the arm 53 and the notch hole 59 b provided in the arm 59. That is, the relative movement range is a range in which the pin 62 can move in the notch hole 59b, so that the linear motion guide member 61 does not have to be provided with a stopper for preventing the removal. The lower stopper 58 also serves as a stopper that limits the operating range of the arm 59. Due to the stoppers 57 and 58, the pin 62, and the notch hole 59b, the relative movement amount of the arm 59 with respect to the arm 53 is limited to a range smaller than the vertical movement amount of the arm 53.

  An air cylinder 63 is provided on the opposite side of the support base 56 from the arms 53 and 59 with the output shaft 63a facing downward. A driving plate 64 having a pin 64a fixed to the tip is fixed horizontally at the tip of the output shaft 63a of the air cylinder 63, and the driving plate 64 moves up and down integrally with the output shaft 63a. The pin 64a is in contact with a notch provided at the base end portion of the arm 53 from below, and has a function of moving the arm 53 up and down by the vertical movement of the output shaft 63a of the air cylinder 63.

  In FIG. 15, the output shaft 63a of the air cylinder 63 is on the upper side (in this example, the output shaft 63a is retracted), the arm 53 is positioned at the upper end, and the arm 59 is suspended from the pin 62, that is, The pin 62 is in contact with the upper end of the cutout hole 59b. At this time, the tip end portion 43 a of the application needle 43 is immersed in the correction ink 14 placed in the container 41. As described above, the distal end including the container 41 is configured to be thin in the vertical direction, and the distal end is disposed below the air cylinder 63. Therefore, the distal end of the drive unit 50 is connected to the objective lens 65 of the observation optical system (not shown). It can also be inserted between the substrate 1.

  In this application unit 50, since the mechanism for moving the container 41 containing the correction ink 14 up and down is provided, the container 41 can be held upward at the standby position, and the distance between the container 41 and the color filter substrate 1 is sufficiently large. Can be opened. Therefore, even if the correction ink 14 leaks from the container 41 during standby, the color filter substrate 1 and the container are arranged as shown in FIG. 15 so that the color filter substrate 1 is not contaminated by the leaked correction ink 14. It is also possible to provide a shielding plate 66 between 41 and 41. The shielding plate 66 is fixed to a sub Z stage of a sub XYZ stage (not shown) and moves up and down by the sub Z stage.

  At the time of application, the application unit 50 is moved to position the application needle 43 above the white defect 6a. The shielding plate 66 is not moved and is fixed at the standby position. Next, the output shaft 63a of the air cylinder 63 is extended downward, and the arms 53 and 59 are lowered. When the arms 53 and 59 are lowered, first, the base end portion of the arm 59 hits the stopper 58 and the lowering of the arm 59 is stopped, and the arm 53 continues to descend. Thereby, the descent of the container 41 is stopped, and the application needle 43 penetrates the first hole 41a and projects below the bottom of the container 41. At this time, the correction ink 14 is attached to the tip end portion 43 a of the application needle 43.

  When the output shaft 63a of the air cylinder 63 is extended downward to the lowest end, the downward movement of the arm 53 stops when the lower end of the arm 53 comes into contact with the stopper 58. In this state, when the entire coating unit 50 is lowered by a certain distance using a driving means (not shown), the correction ink 14 at the tip 43a of the coating needle 43 is applied to the white defect 6a. Further, the vapor of the solvent 18 generated in the groove 41b flows out of the container 41 through the hole 45a and is absorbed by the correction ink 14 applied to the white defect 6a. As a result, the viscosity of the correction ink 14 decreases and the fluidity increases.

  Next, the entire coating unit 50 is raised, and the tip portion 43a of the coating needle 43 is separated from the white defect 6a. At this time, since the fluidity of the correction ink 14 is high, the surface of the correction ink 14 is flattened.

  Thereafter, when the output shaft 63a of the air cylinder 63 is contracted upward, the pin 64a comes into contact with the proximal end portion of the arm 53, the arm 53 is raised, and the pin 62 fixed to the arm 53 is the notch hole of the arm 59. The upper end of 59b is contacted and the arms 53 and 59 are raised. At this time, the tip end portion 43 a of the application needle 43 returns to the inside of the container 41 and is immersed again in the correction ink 14.

  FIG. 16 is a perspective view showing the overall configuration of the pattern correction apparatus 70 including the coating unit 50. In FIG. 16, in this pattern correction device 70, a chuck 71 for fixing the color filter substrate 1 is mounted horizontally on the lower base of the pattern correction device 70. A gantry-type XY stage 72 is provided so as to straddle the chuck 71. The XY stage 72 includes an X-axis stage 72a that can move in the X direction in the drawing, and a portal-shaped Y-axis stage 72b that can move in the Y direction in the drawing. The X axis stage 72a is mounted on the Y axis stage 72b.

  A Z-axis stage 73 that is movable up and down is fixed to the X-axis stage 72a. An observation optical system 74 and a laser device 75 are mounted on the Z-axis stage 73. The observation optical system 74 and the laser device 75 have a common optical axis. By driving the XY stage 72 and the Z-axis stage 73, the observation optical system 74 and the laser device 75 can be focused on a desired position on the surface of the color filter substrate 1. The observation optical system 74 includes the objective lens 65 shown in FIG. With this observation optical system 74, the surface of the color filter substrate 1 can be enlarged and observed. The laser device 75 irradiates the surface of the color filter substrate 1 with laser light through the observation optical system 74, and shapes the shape of the white defect 6a.

  Further, the sub XYZ stage 76 is fixed to the Z axis stage 73, and the coating unit 50 is mounted on the sub XYZ stage 76. By driving the XY stage 72, the Z-axis stage 73, and the sub XYZ stage 76, the correction ink 14 can be applied to a desired position on the surface of the color filter substrate 1.

  In the pattern correction device 70, the correction ink 14 is applied to the white defect 6a and the thickness of the correction ink 14 is corrected uniformly. Therefore, the quality of the correction portion can be improved and the correction tact can be shortened.

  FIG. 17 is a diagram showing a modification of the third embodiment and is a diagram contrasted with FIG. In FIG. 17, in this modified example, an injection port 41d is formed on the bottom surface around the first hole 41a of the container 41 instead of the groove 41b. A joint 47 is fixed to the side surface of the container 41. The outlet of the joint 47 communicates with the injection port 41d through a hole passing through the inside of the side wall of the container 41. The inlet of the joint 47 is connected to the outlet 26a of the container 26 of the solvent vapor generator 21 shown in FIG. When a gas containing the vapor of the solvent 18 is supplied from the solvent vapor generation unit 21 at the time of correction, the gas containing the vapor of the solvent 18 is supplied from the injection port 41d to the contact portion between the tip portion 13a of the application needle 13 and the white defect 6a. It is injected toward. Even in this modified example, the same effect as in the third embodiment can be obtained.

  Further, in the modified example of FIG. 18, passages 41 e and 41 f are formed in the container 41 instead of the grooves 41 b. The passage 41 e penetrates the container 41 in the lateral direction at a position above the liquid level of the correction ink 14. At least one passage 41f is formed in the vertical direction outside the hole in the container 41 (two in FIG. 18). The upper end portion of the passage 41 f communicates with the passage 41 e, and the lower end of the passage 41 f opens at the bottom surface of the container 41. If necessary, the end portion of the passage 41e is filled with a stopper 49 to prevent the vapor of the solvent 18 from flowing in the lateral direction. The vapor of the solvent 18 generated from the correction ink 14 in the container 41 passes through the passages 41e and 41f, flows out below the container 41, and is absorbed by the correction liquid 14 applied to the white defect 6a. Even in this modified example, the same effect as in the third embodiment can be obtained. In addition, since the solvent vapor generated from the correction ink 14 is used, the configuration can be simplified as compared with a case where a means for generating the solvent vapor is separately provided.

  In the modified example of FIG. 19, a plurality of through holes 41g are formed around the first hole 41a at the bottom of the container 41, and the correction ink 14 is exposed to the bottom of the container 41 through the through hole 41g. The inner diameter of the through hole 41g is, for example, about 1 mm or less, and the correction ink 14 does not leak from the through hole 41g due to the surface tension of the correction ink 14 or the liquid repellency with the container 41. When the correction ink 14 is applied to the white defect 6a using this coating unit, the correction ink 14 applied in the white defect 6a and the through holes 41a and 41g are close to each other, and the surface of the through holes 41a and 41g is exposed. The solvent vapor generated from the ink 14 is absorbed by the correction ink 14 applied to the white defect 6a. Thereby, the fluidity of the correction ink 14 applied to the white defect 6a is increased, and the surface thereof is flattened. In order to further promote flattening, the bottom of the container 41 may be kept close to the correction ink 14 applied to the white defect 6a for a certain time after the application of the correction ink 14 to the white defect 6a is completed.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  DESCRIPTION OF SYMBOLS 1 Liquid crystal color filter substrate, 2 Glass substrate, 3 Black matrix, 4 R pixel, 5 G pixel, 6 B pixel, 6a White defect, 10 coating part, 11, 16, 26, 41 Container, 11a, 41a 1st hole , 12, 17, 42, 45 Lid, 12a, 42a Second hole, 16a, 17a, 41g, 45a hole, 13, 43 Coating needle, 13a, 43a Tip, 14 Correction ink, 15 Liquid vapor supply unit, 18 Solvent, 19, 44 Sheet, 20 Gas supply source, 21 Solvent vapor generation unit, 22 Regulator, 23 Electromagnetic valve, 24 Timer, 25, 28 Piping, 27 Filter, 30 Gas injection unit, 31 Housing, 31a Air supply port, 31b , 41d injection port, 32, 47 joint, 41b groove, 41c protrusion, 41e, 41d passage, 41g through hole, 46, 6 2,64a pin, 49 stopper, 50 coating unit, 51 coating needle fixing plate, 52, 54, 60 magnet, 53, 59 arm, 55, 61 linear motion guide member, 56 support base, 57, 58 stopper, 59b notch Hole, 63 Air cylinder, 63a Output shaft, 64 Drive plate, 65 Objective lens, 66 Shield plate, 70 Pattern correction device, 71 Chuck, 72 XY stage, 72a X axis stage, 72b Y axis stage, 73 Z axis stage, 74 Observation optical system, 75 laser device, 76 sub XYZ stage.

Claims (12)

An application method for applying a correction liquid to a defective portion of a fine pattern formed on a substrate,
A first step of applying the correction liquid to the defective portion;
And a second step of supplying a vapor of the solvent of the correction liquid to the correction liquid applied to the defect portion.   The coating method according to claim 1, wherein the second step is performed while performing the first step. An application unit for applying a correction liquid to a defective portion of a fine pattern formed on a substrate,
An application part for applying the correction liquid to the defective part;
An application unit, comprising: a solvent vapor supply unit configured to supply a vapor of the solvent of the correction liquid to the correction liquid applied to the defect part.   The solvent vapor supply unit supplies vapor of the solvent to the correction liquid applied to the defective part during a period in which the correction liquid is applied to the defective part by the application unit. The coating unit described. The solvent vapor supply unit includes a first container filled with the solvent, and a lid of the first container,
The solvent vapor discharge hole for discharging the vapor of the solvent generated in the first container to the outside of the first container is formed in the first container or the lid. The coating unit according to claim 4. The application part is
A second container in which a through-hole is formed at the bottom and the correction liquid is injected;
An applicator needle having substantially the same diameter as the through hole and for applying the correction liquid adhering to the tip portion to the defect portion;
Driving means for causing the tip of the application needle to protrude under the second container through the through-hole and attaching the correction liquid to the tip of the application needle;
The application unit according to claim 5, wherein the first and second containers are fixed to each other or integrally formed. The solvent vapor supply unit is
A first container filled with the solvent, and a solvent vapor generating section for generating the solvent vapor;
The coating unit according to claim 3, further comprising: an injection unit that injects the solvent vapor generated in the solvent vapor generation unit onto the correction liquid applied to the defect portion. The application part is
A second container in which a through-hole is formed at the bottom and the correction liquid is injected;
An applicator needle having substantially the same diameter as the through hole and for applying the correction liquid adhering to the tip portion to the defect portion;
Driving means for causing the tip of the application needle to protrude under the second container through the through-hole and attaching the correction liquid to the tip of the application needle;
The coating unit according to claim 7, wherein the spray unit and the second container are fixed to each other or integrally formed.   The said solvent vapor | steam supply part is a coating unit in any one of Claim 5-8 containing the sheet | seat accommodated in the said 1st container and having absorbed the said solvent. An application unit for applying a correction liquid to a defective portion of a fine pattern formed on a substrate,
A through hole is formed in the bottom of the container, and the correction liquid is injected therein;
An applicator needle for applying the correction liquid attached to the tip portion to the defect portion, which has substantially the same diameter as the through hole;
Driving means for causing the tip of the application needle to protrude under the container through the through-hole and attaching the correction liquid to the tip of the application needle;
The coating unit, wherein a passage for supplying a vapor of the solvent of the correction liquid generated in the container to the lower side of the container is formed in the container. An application unit for applying a correction liquid to a defective portion of a fine pattern formed on a substrate,
A first through hole is formed in the bottom of the container, and the correction liquid is injected into the container;
An applicator needle having substantially the same diameter as the first through hole and for applying the correction liquid adhered to the tip of the defect to the defect portion;
Driving means for causing the tip of the application needle to protrude under the container through the first through hole and attaching the correction liquid to the tip of the application needle;
A second through hole is formed in the vicinity of the first through hole at the bottom of the container;
The correction liquid injected into the container is also filled in the second through hole,
The coating unit, wherein a vapor of the solvent of the correction liquid generated from the correction liquid in the second through hole is supplied below the container. An application unit according to any one of claims 1 to 11,
A pattern correction apparatus comprising positioning means for moving the coating unit above a desired position on the surface of the substrate.

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