WO2010070907A1 - 高分子アクチュエータとこれを用いたバルブ並びに軸封構造 - Google Patents
高分子アクチュエータとこれを用いたバルブ並びに軸封構造 Download PDFInfo
- Publication number
- WO2010070907A1 WO2010070907A1 PCT/JP2009/006948 JP2009006948W WO2010070907A1 WO 2010070907 A1 WO2010070907 A1 WO 2010070907A1 JP 2009006948 W JP2009006948 W JP 2009006948W WO 2010070907 A1 WO2010070907 A1 WO 2010070907A1
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- Prior art keywords
- electrode
- polymer actuator
- valve
- driving body
- actuator
- Prior art date
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- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 2
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Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L75/00—Compositions of polyureas or polyurethanes; Compositions of derivatives of such polymers
- C08L75/04—Polyurethanes
- C08L75/08—Polyurethanes from polyethers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/218—Means to regulate or vary operation of device
- Y10T137/2202—By movable element
- Y10T137/2213—Electrically-actuated element [e.g., electro-mechanical transducer]
Definitions
- the present invention relates to a polymer actuator using a polymer material, and more particularly to a valve and a shaft seal structure suitable for opening and closing a flow path and controlling a flow rate using the polymer actuator.
- a shaft seal device using a seal member is usually used.
- the seal member in this shaft seal device for example, an annular O-ring or packing ring having a substantially circular cross section is used in order to seal various fluids such as air, water, oil, and gas.
- These sealing members are required to have high sealing performance because their main function is to seal fluid.
- the seal member is usually mounted on a member on one side of the shaft seal device in a groove having a substantially rectangular cross section in the axial direction formed in the same plane in the radial direction of the shaft or hole, and the member on the other side.
- the crushing allowance is compressed by the groove shape.
- the O-ring is compressed by this crushing margin to generate a repulsive force, and the rebound force exerts a sealing property by the contact surface pressure to seal the shaft.
- the sealing member is usually formed of various synthetic rubbers, but this material exerts an appropriate compressive stress within a range in which abnormal deformation does not occur. It is necessary to satisfy characteristics such as strain, weather resistance, wear resistance, heat resistance, cold resistance, oil resistance, chemical resistance, and the like.
- a material is selected according to each field (use) and a crushing cost is selected. In order to ensure the shaft seal function, durability, insertability, and compression should be ensured regardless of whether the shaft seal moves or the shaft seal moves. It is also necessary to prevent cracking.
- the normal shaft seal device has a first purpose of enhancing the sealing function by the seal member, the seal member and the fluid sealing region are usually set at predetermined positions. For this reason, the internal structure of a device incorporating a sealing device is complicated.
- the sealing member of the sealing region It is necessary to provide another operation mechanism at the mounting site such as the housing and the housing.
- the operation mechanism include a screw feed mechanism, a piston / cylinder mechanism, and a rotation mechanism. In order to operate these mechanisms, it is necessary to use some power means such as human power, electricity, air, hydraulic pressure, and a spring. There is also.
- Patent Document 1 there is a valve using a polymer actuator in order to switch the sealing region to an open / closed state (see, for example, Patent Document 1).
- the valve of Patent Document 1 uses so-called artificial muscle as a valve body, and has a polymer actuator that switches the flow path without using complicated power means by deforming the valve body itself.
- the artificial muscle is made of a film-type electrostrictive stretchable polymer, and is deformed by turning on and off the voltage and is brought into contact with and separated from the valve seat directly or through a sealing material to open and close the flow path.
- a rubbery thin polymer film (elastomer) is sandwiched between stretchable electrodes, and a voltage is applied between the electrodes to extend the polymer film in the surface direction (diameter in the circumferential direction).
- EPAM Electroactive Polymer Polymer Artificial Muscle
- an electrode is provided over the entire application region of the polymer film to increase the amount of charge injection.
- the O-ring seal part wears around the entire circumference, it is easy to cause fluid leakage due to pressure drop or external damage of the contact part. In this case, due to external factors such as rough sliding surface and insufficient lubrication , Wear may have accelerated more. Further, when local wear occurs on the sliding surface of the O-ring, fluid leakage is likely to occur, and if the O-ring sliding surface is damaged, the wear may be further accelerated. In particular, when the motion speed of the operating mechanism is fast, the motion is performed in an eccentric state, the surface of the sliding surface is rough, or the lubrication is insufficient, the O-ring may be twisted. . For these reasons, the shaft seal structure using the O-ring cannot sufficiently secure the sealing performance, and is not a structure suitable for opening and closing the flow path and controlling the flow rate. It is difficult to use as.
- Patent Document 1 eliminates a complicated power mechanism by making the valve body itself a polymer actuator made of EPAM.
- the fluid pressure is reduced at the time of fluid sealing. It is received by the pressure receiving area of the entire EPAM, and the EPAM requires a large pressure resistance and a large sealing force.
- a separate seal mechanism is required in the main body, or a valve seat portion for seating must be provided.
- EPAM is applied to the valve body itself because of the strength of EPAM and the stress characteristics associated with deformation. Is not reasonable because it is not used as it is.
- this valve has a structure in which electrodes are arranged over the entire application region of the polymer film, for example, when this polymer film is used as a movable part such as a valve body of a valve or an actuator of a valve body, it is constant. The amount of deformation is limited under the applied energy. For this reason, when considering a desired flow rate adjusting ability and a sealing ability when the valve is closed, it can be used only for a relatively small-diameter valve, which is not practical. Thus, this valve is not suitable for use as various drive sources.
- the present invention has been developed as a result of diligent research in view of the above circumstances, and the object of the present invention is that the polymer actuator can be used for various drive sources, and in particular, the deformation amount of the polymer actuator. Is to be able to be used sufficiently for valves and shaft seal devices.
- the invention according to claim 1 is directed to a driving body that is deformed through an electrical external stimulus, and a positive and negative electrical external stimulus that is disposed opposite to the upper and lower surfaces of the driving body.
- This electrode has a different application region, and the stress distribution generated in the drive body by this application region is unevenly distributed in one of positive and negative, and is driven to the side where there is no opposing application region.
- a polymer actuator having an electric field distribution that bends and deforms a body.
- a driving body that is deformed via an electrical external stimulus, and a positive and negative electrical external stimulus are applied to the driving body in a planar manner by being fixed to be opposed to the upper and lower surfaces of the driving body.
- the fixed electrode has different application areas, the stress distribution generated in the drive body by this application area is unevenly distributed in one of positive and negative, and the drive body is bent to the side where there is no opposite application area. It is a polymer actuator having an electric field distribution to be deformed.
- the invention according to claim 3 deforms integrally with the driving body in a process in which the driving body is bent and deformed at a relative or non-relative position between the fixed electrode on the wide application region side and the driving body.
- the polymer actuator is formed by depositing a flexible deposition electrode for applying an electrical external stimulus to the driver.
- the electrode on the wide application area side among the electrodes on the upper and lower surface sides is deformed integrally with the driving body in the process of bending and deforming the driving body, and an electrical external stimulus is applied to the driving body.
- It is a polymer actuator in which a flexible vapor deposition electrode to be applied is used and the vapor deposition electrode is embedded in a driving body.
- the driving body returns to the old position when the electrical external stimulus is stopped, and on the other hand, when the electrical external stimulus is applied, the electrical stimuli in which a part other than the part is bent and deformed.
- It is a polymer actuator that is a polymer material.
- the invention according to claim 6 is the polymer actuator in which the electrode on one side of the fixed electrode is an inclined surface that is enlarged and discrete from the driving body toward the outer end radial direction of the driving body.
- the invention according to claim 7 uses a polymer actuator in which a polymer actuator is disposed as a valve body in a body having a plurality of flow paths, and the flow paths are opened and closed or the flow rate is adjusted by the valve body. It is a valve.
- the invention according to claim 8 uses a polymer actuator in which a shaft sealing portion is provided inside the main body, and a polymer actuator is applied to the shaft sealing portion to cause a fluid leakage phenomenon by deformation of the polymer actuator. It is a shaft seal structure.
- the first aspect of the present invention it is possible to provide a polymer actuator capable of controlling the flow rate by increasing the amount of deformation of the EPAM, that is, the electrostimulatory polymer material at the time of applying or stopping the application.
- the fluid can be flowed by switching the open / close state with a simple internal structure while maintaining high sealing performance.
- the amount of deformation of the drive body with an external electrical signal, etc., and adjusting the contact surface pressure to control the flow rate the flow rate from a small flow rate to a large flow rate can be controlled with high accuracy and used for any application .
- the polymer actuator of the present invention can be used for various drive sources or valves such as air actuators and electromagnetic valves, and further, by controlling the amount of minute leakage when the flow path is closed. It can be applied to various technical fields.
- the third aspect of the invention it is possible to assist voltage application from the fixed electrode, and voltage application to the drive body can be maintained even when the drive body is separated from the fixed electrode. This makes it possible to increase the amount of deformation of the drive body.
- the tip of the outer end of the fixed electrode causes the driver to bend along the inclined surface without disturbing the deformation of the driver, and the displacement is larger than that of a flat electrode. Can be obtained.
- the polymer actuator can be used as a switching valve having an unprecedented structure capable of switching between a plurality of flow paths, which can be formed with a simple structure and provided with a simple structure.
- a valve using can be provided.
- it can be formed by increasing or decreasing the number of flow paths according to the mode to be implemented, and even when provided in a multi-way valve mode, the open / close state and flow rate of each flow path can be controlled with high accuracy, so it can be applied to various technical fields. It becomes possible.
- FIG. 1 It is a schematic diagram which shows the polymer actuator of this invention.
- A is a schematic diagram which shows distribution of the electric field to a polymer actuator.
- B is a schematic diagram which shows the generation
- C is a schematic diagram which shows the state which the polymer actuator deform
- (B) is the A section enlarged view in (a). It is a schematic diagram which shows electric field vector distribution to a polymer actuator. It is an expansion schematic diagram which shows the principal part of FIG. It is a schematic diagram which shows stress vector distribution in FIG. It is an expansion schematic diagram which shows the principal part of FIG. It is a schematic diagram which shows electric field vector distribution to a shaft sealing body. It is an expansion schematic diagram which shows the principal part of FIG. It is a schematic diagram which shows stress vector distribution in FIG. It is an expansion schematic diagram which shows the principal part of FIG. It is a schematic diagram which shows the generation
- (A) is a schematic diagram which shows the generation
- region is equal.
- (B) is a schematic diagram which shows the generation
- (A) is a schematic diagram which shows the generation
- (B) is a schematic diagram which shows the generation
- (A) is a schematic diagram which shows the bending state of a shaft-seal body.
- (B) is a schematic diagram which shows the bending state of a drive body. It is a schematic diagram which shows the other example of a polymeric material. It is a schematic diagram which shows the generation
- (A) is a schematic diagram which shows the deformation
- (B) is a schematic diagram which shows the deformation
- (C) is a schematic diagram which shows the bending state of a shaft sealing body. It is a schematic sectional drawing of the open state which shows the other example which used the polymer actuator in this invention for the valve
- FIG. 1 shows an embodiment of the polymer actuator of the present invention.
- a polymer actuator main body (hereinafter referred to as actuator main body) 10 has a driving body 11, electrodes 12 and 13, and a vapor deposition electrode 14.
- the driving body 11 is made of a material that can be deformed through electrical stimulation.
- the driving body 11 returns to the old position when the electrical external stimulation is stopped, while the electrical external stimulation is applied.
- the portion other than the portion is made of an electrostimulating polymer material that bends and deforms.
- the deformation in the present invention is defined as changing the shape regardless of the increase or decrease of the volume change of the driving body 11. That is, the “deformation” of the present invention includes both cases where the driving body 11 expands and contracts with a volume change or changes its shape without a volume change.
- FIG. 2 shows the characteristics of the electrostimulatory polymer material in which parts other than the part are deformed when electrical stimulation is applied in the present invention.
- the electrostimulant polymer material constituting the driving body 11 in FIG. 1 for example, polyether urethane is available.
- the material is formed by mixing a main agent and a curing agent, and the main agent contains at least styrene, a nitrile compound, BHT (butylhydroxytoluene), and a phthalate ester.
- the curing agent contains at least phthalic acid, diphenylmethane diisocyanate, and phthalic acid ester.
- Specific examples of the electrostimulating polymer material containing each component include a human skin (registered trademark) gel sheet manufactured by EXCIR Corporation.
- the electrically stimulable polymer material may be a thin film silicon, and in this case, the same functions and characteristics as described above can be exhibited. Furthermore, materials other than those described above may be used as long as they can exhibit the same functions and characteristics.
- polyurethane elastomer is used as the electrostimulant polymer material.
- the electrodes 12 and 13 are disposed opposite to the upper and lower surfaces of the drive body 11 so as to sandwich the drive body 11 locally, and are electrically connected from this position to the outside. With this structure, the electrodes 12 and 13 can apply positive and negative electrical stimuli to the driving body in a planar manner. Further, the electrode has a side having a wide application region, that is, an electrode 12 that is formed long on the side of the driving body 11, and a side having a narrow application region, that is, the electrode 13 that is formed short on the side of the driving body 11. There are different application areas in this way. Further, these electrodes 12 and 13 are fixed electrodes respectively fixed to fixing portions 15 and 16 for fixing the electrodes.
- Electrodes 12, 13 are differently applied areas, and the stress distribution generated in the driving body 11 at the time of application is unevenly distributed to one of the positive and negative sides, that is, the electrode 13 on the side where there is no opposing application area, that is, the electrode 13 formed short.
- the electric field distribution causes the driver 11 to bend and deform in the direction of. Also, when the driving body 11 is bent and deformed, it is disposed at a position hidden from the outside.
- the vapor deposition electrode 14 has flexibility and is vapor-deposited on the driving body 11 at a wide application region side, that is, at a relative or non-relative position with respect to the electrode 12 between the electrode 12 and the driving body 11. 11 is provided integrally.
- the vapor deposition electrode 14 applies an electrical external stimulus to the driving body 11 while being deformed integrally with the driving body 11 in the process of bending and deforming the driving body 11.
- the deposition electrode 14 is deposited on the fixed electrode 12 on the wide application region side of the fixed electrodes 12 and 13.
- the vapor deposition electrode 14 may be provided as an electrode on the wide application region side, and the fixed electrode 12 may be omitted.
- the vapor deposition electrode 14 is buried from the outside so as to be embedded in the driving body 11, the liquid contacts the vapor deposition electrode 14 when the fluid passing through the actuator body 10 is a liquid.
- the vapor deposition electrode 14 is concealed inside the driving body 11, for example, the vapor deposition electrode is placed on a thin driving body, and the driving body is folded back so as to be wound to provide a predetermined thickness.
- the electrode can be embedded in the fixed electrode.
- this shaft seal device is provided with a shaft seal body 1 and fixed electrode portions 2 and 3 inside.
- the shaft seal body 1 is made of a polymer material that expands through an electrical external stimulus, and is made of, for example, a polyurethane elastomer.
- the fixed electrode portions 2 and 3 are formed to have an equal length and are disposed on the upper and lower sides of the shaft seal body 1. When an electric field is applied to the fixed electrode portions 2 and 3, the shaft seal body 1 is deformed, and due to this deformation, a leaking fluid flows through a flow path (not shown).
- the shaft seal 1 when an electric field is applied to the fixed electrode portions 2 and 3 in FIG. 30, due to the stress generated by the electric field, the shaft seal 1 has a relative portion of the fixed electrode portions 2 and 3, or In the portion of the shaft sealing body 1 protruding from the fixed electrode portion 2, as shown in FIG. 30 (a), (1) a dielectric polyol or a polyol having a dipole moment is oriented by an electric field, The structure of the molecular chain changes and a stress is generated in which the electric field vector is distributed. At this time, as shown in FIG.
- the shaft seal 1 is deformed by the three actions (1) to (3) described above.
- the stress generated in the shaft seal 1 is generated by the electric field distribution between the opposed fixed electrode portions 2 and 3, and the shaft seal body between the fixed electrode portions 2 and 3 and the outer periphery of the fixed electrode portion.
- a vector from the high potential side to the low potential side is formed.
- the magnitude of this vector is the largest at the outer peripheral portion of the fixed electrode portions 2 and 3, and in the radial direction (plane direction) that is a non-contact portion with the fixed electrode portions 2 and 3, a distribution that gradually attenuates toward the outer peripheral side.
- These stresses act in a direction in which the shaft sealing body 1 is bent from the high potential side to the low potential side.
- the outer peripheral portion of the fixed electrode portion 3 on the low potential side acts as a fulcrum for bending deformation.
- the envelope 1 is bent.
- the electrostimulant polymer material (for example, polyurethane elastomer) to be the driving body 11 is sandwiched between the electrodes 12 and 13 having different lengths, or further, the vapor deposition electrode 14 is provided on the long electrode 12. It is in a state sandwiched between the vapor deposition electrode 14 and the short side electrode 13.
- the driving body 11 includes a portion sandwiched between the electrodes 12 and 13 and a portion extended outward without contacting the electrodes 12 and 13.
- the stress value is the shaft sealing body in the case of the electrodes 2 and 3 in FIG.
- the amount of deformation at this time is larger than that in the above case because the moment length of the surface on which the stress acts is large.
- the drive body 11 When an electric field is applied to the electrodes 12, 13, as in the case of the shaft seal body 1 sandwiched between the fixed electrode portions 2, 3 having the same application area, the drive body 11 has the structure shown in FIG. (4) When a dielectric polyol or a polyol having a dipole moment is oriented by an electric field, the structure of the polymer chain is changed, and a stress in which an electric field vector is distributed is generated. At this time, as shown in FIG. 1B, (5) the width in the thickness direction of the driving body 1 is reduced by the Coulomb effect due to the electric fields of the electrodes 12 and 13 and their peripheral parts. , Extending in the thickness direction and the longitudinal plane direction of 90 ° direction. Further, as shown in FIG. 1C, (6) due to the injection and uneven distribution of electric charges, an asymmetric volume change is induced on both pole sides, so that stress is generated.
- the driving body 11 is deformed by the stresses (4) to (6).
- the electric field is generated on the electrode 12 side, the electrode 13 side of the driving body 11, the vapor deposition electrode 14 side, and the non-electrode peripheral portion without the electrode 13. Is attenuated and distributed in the outer radial direction (plane direction) of the drive body 11 with the outer peripheral portions of the electrodes 14 and 13 being the maximum value.
- the electric field acts in a concentrated manner from the outer peripheral portion of the vapor deposition electrode 14 and the portion where the vapor deposition electrode 14 and the electrode 13 do not overlap in the driving body 11 toward the outer circumferential portion where the electrode 13 contacts, the driving body 11
- transforms acts effectively.
- a bending stress vector V acting in the bending direction is generated at the outer peripheral portion of the electrode 13, and due to these stresses, the driving body 11 uses the portion supported on the end side of the electrode 13 as a fulcrum C as a moment length M. As a result of this, the bending force increases, and it becomes possible to bend and deform significantly.
- the actuator body 10 of the present invention is an improvement of the shaft seal body 1 having electrodes having the same application area, and has electrodes 12 and 13 having different application areas, and the stress distribution generated in the drive body 11 by this application area is positive or negative.
- 30 is provided with an electric field distribution that bends and deforms the driving body 11 on the side where there is no opposing application region, that is, on the electrode 13 side. Compared to 1, it can be dramatically increased. For this reason, the polymer actuator of the present invention can be applied to a pipeline having a flow path suitable for a drive source, a valve, or the like.
- FIG. 3 shows a state in which the valve main body 20 is configured using the actuator main body 10.
- the valve main body 20 includes an actuator main body 10, a body 21, and a power supply circuit 22.
- the actuator body 10 includes a drive unit 23 including a drive body 11 and electrodes 12, 13, a column holder 24, and a cylindrical holder 25.
- the drive body 11 is formed in a hollow cylindrical shape with an appropriate thickness. Electrodes 12 and 13 having different polarities are arranged oppositely on the upper and lower surfaces of the drive body 11, and the electrodes 12 and 13 are disposed between the column holder 24 and the cylindrical holder 25, respectively. 11 extends from the upper and lower surfaces of the body 11 to the outside of the body and is connected to the power supply circuit 22.
- the cylindrical holder 24 has a cylindrical portion 26 and an enlarged diameter flange portion 27 having a diameter larger than that of the cylindrical portion 26.
- the cylindrical holder 25 has an insertion portion 28 having a slightly larger diameter than the column portion 26 of the column holder 24, and the column portion 26 can be inserted into the insertion portion 28.
- a diameter-enlarged fitting engagement portion 29 is formed on the upper side of the cylindrical holder 25, on the upper side of the cylindrical holder 25, a diameter-enlarged fitting engagement portion 29 is formed.
- the electrode 12 is provided on the bottom surface side of the cylindrical holder 25 through the patterning portion 30 on the surface side of the insertion portion 28 of the cylindrical holder 25, while the electrode 13 is on the surface side of the cylindrical portion 26 of the cylindrical holder 24. It is provided on the upper surface side of the enlarged diameter flange portion 27 through the patterning portion 31.
- both the electrode 12 and the electrode 13 are fixed as fixed electrodes.
- the electrode 12 is formed longer in the radial direction, while the electrode 13 is formed shorter than the electrode 12 in the radial direction.
- the electrode 12 and the electrode 13 have different application areas, that is, the electrode 12 has a wide application area, and the electrode 13 has a narrow application area.
- the actuator body 10 inserts the cylindrical portion 26 into the insertion portion 28 in a state where the driving body 11 is disposed between the cylindrical holder 24 and the cylindrical holder 25 in which the electrodes 12 and 13 are previously provided. By doing so, it is configured integrally. At this time, the driving body 11 is positioned and fixed between these holders 24 and 25 with the bottom side sandwiched between the top surface side of the enlarged diameter flange portion 27 and the top surface side sandwiched between the bottom surface side of the cylindrical holder 25. With this configuration, an electric field can be applied by the electrode 12 and the electrode 13 from the upper and lower surfaces of the driving body 11.
- the body 21 is formed in a substantially cylindrical shape, and a mounting portion 32, a plurality of flow channels 33 and 34, and a valve seat 35 are formed on the inner peripheral side.
- the mounting portion 32 is formed on the upper side of the body 21 so that the actuator body 10 can be disposed as a valve body, and the fitting locking portion 29 of the cylindrical holder 25 is located slightly behind the inlet side of the mounting portion 32.
- a locking projection 36 that can be locked is formed.
- a seat surface 37 is provided on the lower side of the mounting portion 32 at a position where the front end surface 11 a of the driving body 11 abuts.
- the two flow channels 33 and 34 are formed on the lower side of the body 21 below the seating surface 37 so as to communicate with the outside.
- the two flow channels 33 and 34 are formed by drilling in directions orthogonal to each other.
- the valve seat 35 protrudes from the flow channel 34 side and is formed in an annular shape between the flow channel 33 and the flow channel 34.
- appropriate flow paths such as joints and pipes are connected to the flow channels 33 and 34.
- the actuator body 10 is inserted into the mounting portion 32, and is integrated with the body 21 in a state in which the fitting locking portion 29 is fitted to the locking protrusion 36. By this integration, the flow passages 33 and 34 are integrated.
- the drive unit 23 is disposed on the front side.
- the power supply circuit 22 has a power supply 38 and a switch 39 and is connected to the electrodes 12 and 13.
- the power supply circuit 22 applies an electric field to the electrodes 12 and 13 by turning on and off the switch 39 to apply an electrical external stimulus to the driver 11 or to stop.
- the drive body 11 of the valve body 20 in this embodiment stops the electrical external stimulus
- the drive body 11 returns to the old position while being deformed to the old position, and when the electrical external stimulus is applied.
- other parts have the property that the part other than the part is deformed and the valve is closed, other than this, when an electrical external stimulus is applied, the part other than the part is deformed.
- the valve may be closed, and when the electrical external stimulus is stopped, the valve may be restored to the old position and returned to the valve open state. The same applies to a shaft seal structure using a polymer actuator described later.
- the switch 39 is in an off state, and no electric field is applied from the power source 38 to the driver 11.
- the driving body 11 returns while being deformed to the old position, and the tip end surface 11 a is tightly sealed to the seating surface 37.
- the flow channel 33 and the flow channel 34 communicate with each other and are in a valve open state.
- the switch 39 when the switch 39 is turned on, electric fields of different polarities are applied from the power supply circuit 38 to the upper and lower surfaces of the driver 11 via the electrodes 12 and 13.
- the electrode 12 has an application region wider than the electrode 13, so that the driving body 11 is bent and deformed downward with the distal end surface 11 a side away from the seat surface 37 and contacts the valve seat 35. Close contact. For this reason, the drive body 11 closes the space between the flow channel 33 and the flow channel 34, and the valve is closed.
- the deformation amount and the deformation response time of the driving body 11 are adjusted to adjust the pressing force (contact) to the seat surface 37.
- the voltage is gradually increased to adjust the deformation of the driving body 11 to adjust the deformation of the driving body 11 from a high level flow rate to a very small flow rate at which the driving body 11 is greatly deformed. It is also possible to control the flow rate.
- the switch 39 is switched from this state to the off state again, the application of voltage is stopped, and the driving body 11 returns to the state shown in FIG. 3 to reopen the valve.
- the valve body 20 is configured such that the actuator body 10 is disposed as a valve body, and the flow paths 33 and 34 are opened / closed or the flow rate is adjusted by the valve body.
- bulb using the actuator of this invention is shown.
- the same parts as those in the above embodiments are denoted by the same reference numerals, and the description thereof is omitted.
- the vapor deposition electrode 14 is disposed in a state of being embedded and concealed on the electrode 12 side of the driver 11, and is electrically connected to the electrode 12. Further, the vapor deposition electrode 14 is formed to be long in the radial direction of the driver 11, and an application region wider than the electrode of the valve body 20 of FIG. 3 is formed on the vapor deposition electrode 14 side.
- valve body 40 As shown in FIG. 6, when an electric field is applied by switching the switch 39 to the on state, the voltage is transmitted to the vapor deposition electrode 14 through the electrode 12. At this time, since the vapor deposition electrode 14 has a wider application area, the driver 11 can be largely bent and deformed by the vapor deposition electrode 14. Moreover, voltage application to the drive body 11 is maintained by the vapor deposition electrode 14 even when the drive body 11 is about to leave the bottom surface side of the cylindrical holder 25. For this reason, the valve body 20 can bend and deform the driving body 11 to a greater extent, thereby forming a large-diameter valve having a larger flow path diameter when the flow flow paths 33 and 34 are opened.
- FIG. 7 shows an example in which the actuator body 10 constitutes a three-way switching valve 41.
- the body 42 is formed with three flow passages 43, 44 and 45.
- the two flow channels 43, 44 are formed on the lower side of the body 42 below the seating surface 37 and communicated with the outside in directions orthogonal to each other.
- the flow channel 45 is formed to communicate with the outside from the mounting portion 32.
- the switch 39 in an OFF state, and at the time of tight sealing to the seating surface 37 of the driver 11, the flow channel 43 and the flow channel 44 communicate with each other. It is in a state of being blocked by the driving body 11. As a result, the fluid flows between the flow channel 43 and the flow channel 44.
- the three-way switching valve 41 has a structure for switching the three flow passages 43, 44, and 45 by applying an electric field or switching to a stopped state.
- FIG. 9 and 10 show an example in which the vapor deposition electrode 14 is provided in the three-way switching valve of FIG.
- the three-way switching valve 46 in this example can bend and deform the driving body 11 greatly by the wide application region of the vapor deposition electrode 14 as in the case of the valve main body 40 of FIG. For this reason, in FIG. 10, a large flow path is ensured when the driving body 11 is bent and deformed, and a large-diameter three-way switching valve 46 can be provided.
- the safety valve 50 in FIG. 11 is equipped with the polymer actuator of the present invention.
- the safety valve 50 includes an actuator body 51, a housing 52, a pipe 53, a pressure sensor 54, and a switch circuit 55. Yes.
- the actuator body 51 is housed in the housing 52 and has an appropriate shape that can be deformed in the circumferential direction by applying an electric field or by stopping the electric field.
- the actuator body 51 has, for example, the same structure as the actuator body 10 described above, and includes a drive unit 23 including a drive body 11 and electrodes 12 and 13.
- the housing 52 is attached in a state where an internal flow path 56 communicates with the pipe 53, and a pressure sensor 54 is attached in the pipe 53.
- the pressure sensor 54 detects the pressure change in the pipe 53 by transmitting the pressure fluctuation in the pipe 53 as a voltage.
- the switch circuit 55 is provided between the pressure sensor 54 and the actuator main body 51 so that the electric field to the actuator main body 51 can be stopped according to the fluctuation of the pressure of the pressure sensor 54.
- the reference voltage value for sealing the actuator body 51 is provisionally stored in the switch circuit 55 until the actuator body 51 reaches a predetermined pressure value when the initial pressure is filled in the pipe 53. Is applied.
- the safety valve 50 when the pressure value in the pipe 53 is detected by the pressure sensor 54 and the pressure value becomes a predetermined value or more, the application of voltage is stopped by the switch circuit 55. Subsequently, when the application of voltage is stopped, the actuator main body 51 is deformed from the normal state to the contraction side, and the front end side of the driving body (not shown) is separated from the inner peripheral surface of the housing 52 and the actuator main body 51 and the housing A gap (not shown) is formed between The flow path 56 is communicated by this gap, and the pressure in the pipe 53 is lowered by the pressure briefing. Further, when the pressure returns to the specified value or less after this pressure briefing, the voltage of the pressure sensor 54 at this time is applied to the actuator body 51 from the switch circuit 55. As a result, the actuator body 51 is deformed to the expansion side, the distal end side of the driving body is brought into close contact with the inner peripheral surface of the housing 52, the flow path 56 is closed, and the pressure leakage is sealed.
- FIG. 12 shows an example in which the polymer actuator of the present invention is used in a piston / cylinder driving mechanism (hereinafter referred to as a driving mechanism).
- the drive mechanism 60 has four actuator bodies 61, 62, 63, 64, a housing 65, and a cylinder portion 66.
- the actuator main bodies 61, 62, 63, 64 have the same structure as the actuator main body 10, and are housed in the housing 65 and can be deformed in the circumferential direction.
- the housing 65 is provided with flow paths 67, 68, 69, 70 and 71.
- the flow path 67 is arranged so that compressed air from the outside can be supplied into the drive mechanism 60, and the flow paths 68, 69 are arranged so that the compressed air in the drive mechanism 60 can be discharged to the outside.
- the flow paths 70 and 71 are connected to a cylinder portion 66, and compressed air from the drive mechanism 60 is supplied to and exhausted from the cylinder portion 66.
- Each actuator body 61, 62, 63, 64 is disposed between a flow path 68 and a flow path 71, a flow path 71 and a flow path 67, a flow path 67 and a flow path 70, and a flow path 70 and a flow path 69, respectively.
- a voltage is applied to the actuator bodies 61, 62, 63, 64, each of them is expanded and contracted and deformed so that the shafts can be sealed between the flow paths.
- FIG. 12B by applying a voltage to the actuator bodies 61 and 63, they are deformed to the enlarged diameter side, and by applying voltage to the actuator bodies 62 and 64, they are reduced. If controlled to be deformed to the radial side, the flow path 67 and the flow path 71, the flow path 70 and the flow path 69 communicate with each other, and the flow path 71 and the flow path 68, and the flow path 67 and the flow path 70, respectively. Each is closed.
- the polymer actuator by providing the polymer actuator with a material or internal structure that can withstand the chemical solution, it is possible to provide a device that can supply the chemical solution while sealing the chemical solution or controlling the flow rate state of the chemical solution. From this, for example, the polymer actuator can be applied to some devices such as liquid crystal manufacturing and semiconductor precision plants. In this case, it is also possible to change the applied fluid by freely selecting the material of the pipe connected to the inlet / outlet side of the apparatus.
- the amount of deformation of the actuator body can be increased, so that a large flow rate can be controlled.
- the electrode is not exposed to the fluid, and the portion without the electrode can be bent, so that there is no leakage of charges to the outside and the device can be used safely. is doing.
- a shaft seal structure can be formed using the polymer actuator of the present invention.
- a shaft sealing portion is provided inside the body main body having a flow passage on the inside, and the actuator main body 10 is applied to the shaft sealing portion.
- the deformation of the actuator main body 10 causes a fluid leakage phenomenon. It only has to be generated. With this configuration, it is possible to seal the fluid by shaft-sealing the flow path, or to control the leakage flow rate to a minute level from this sealed state. Furthermore, it is possible to control so-called minute leakage that causes leakage while maintaining the shaft seal state.
- FIG. 31 and FIG. 32 the same parts as those in the schematic sectional views shown in FIG. 3 and FIG. FIG. 31 shows another example in which the polymer actuator according to the present invention is used for a valve.
- FIG. 31 is a schematic cross-sectional view when the valve is in an open state
- FIG. 32 is a schematic cross-sectional view when the valve is in the closed state.
- the fixed electrodes 12A and 13A the fixed electrode 13A is provided with an inclined surface 13a that expands and separates from the drive body 11 toward the outer end radial direction of the drive body 11.
- the deformation of the driving body 11 is not hindered by the tip portion of the electrode 13A.
- the driver 11 bends naturally along the inclined surface 13a, and can obtain a large displacement as compared with a flat electrode. And by applying a voltage, the drive body 11 will deform
- the displacement measuring device 75 is capable of moving a stand 77 for fixing a measurement object (human skin (registered trademark) gel sheet, product number H0-1) 76, which is an electrically stimulable polymer material, and the stand 77. And a movable stage 78. Further, a high-voltage power source (manufactured by Matsusada Precision Co., Ltd., model HJPQ-30P1) 79 is included. It is possible to apply an electric field. Further, a laser displacement meter (manufactured by Keyence Corporation, model LJ-G080) 80 is provided. This laser displacement meter 80 irradiates the measurement object 76 with the laser L, and the bending displacement of the measurement object 76. The amount can be measured.
- a measurement object human skin (registered trademark) gel sheet, product number H0-1
- a high-voltage power source manufactured by Matsusada Precision Co., Ltd., model HJPQ-30P1
- a laser displacement meter 80 manufactured
- the measurement object 76 When measuring with the displacement measuring device 75, first, the measurement object 76 is sandwiched between fixed electrodes (not shown) of the displacement measuring device 75 and fixed to the stand 77 before the measurement. Further, the distance between the measurement object 76 and the laser displacement meter 80 is adjusted by the moving stage 78.
- FIG. 14A shows a current state when a voltage is applied.
- FIG. 15 shows the operation of the measurement object 76 when a voltage is applied.
- the device under test 76 is bent and deformed from the base toward the negative pole side by applying a voltage.
- the distance from the end surface 76a of the measurement object 76 when no voltage is applied (0 V application) to the corner portion 76b when the voltage is applied is defined as a bending displacement amount ⁇ .
- the transition of the displacement amount ⁇ is shown in the graph of FIG.
- FIG. 14 confirmed that the measured object 76 was displaced when the applied voltage was 4 kV or higher. Further, when the applied voltage reached 7 kV, the displacement amount ⁇ was approximately 1.15 mm, and the displacement amount at this time was maximized. Further, it was confirmed that when the applied voltage was lowered from the state where the voltage of 7 kV was applied to the state where the applied voltage was not applied (0 V applied), the measured object 76 returned to the initial shape (before the voltage was applied).
- the electrostimulatory polymer material that is the measurement object 76 has a large maximum deformation amount of 1.15 mm under the above conditions, and thus is suitable as the polymer material used in the polymer actuator of the present invention. It can be judged that. In this case, the object to be measured 76 is bent toward the negative electrode when a voltage is applied, but when the polarity is reversed, it is confirmed that the bending direction is opposite (the positive electrode side). Thereby, in actual use, it can be bent in a desired bending direction depending on the conditions. In the above case, the object to be measured 76 is bent and deformed when a voltage is applied, and a gap is formed by a displacement amount ⁇ . NC (normally closed) type sealing device can be configured.
- the electrostimulable polymer material is formed into a bent shape in the initial state, and on the other hand, by providing in advance so as to be deformed into a planar shape when a voltage is applied, the so-called NO, which is normally open, is provided. It is also possible to constitute a (normally open) type sealing device.
- the distribution of the electric field vector when a voltage was applied to the polymer actuator of the present invention was analyzed by simulation. For comparison, this simulation was also performed for a polymer material (shaft seal) 1 sandwiched between fixed electrode portions having the same application region, which is the shaft seal structure shown in FIG.
- the electrostimulatory polymer material (driving body) 11 of the present invention sandwiched between electrodes having different application areas was respectively implemented. This simulation was performed by analyzing the distribution of electric field vectors generated inside each electrostimulatory polymer material when an electric field was applied to the electrodes.
- the dimensions of the electrode portions 2 and 3 are the outer diameter ⁇ 5 mm, the thickness 1 mm, and the dimensions of the polymer material 1.
- the outer diameter was 10 mm, the thickness was 2 mm, and +1 V was applied to the electrode part 2 and ⁇ 1 V was applied to the electrode part 3.
- the electrode 12 on the wide side of the application region has an outer diameter of 5 mm and a thickness of 1 mm
- the electrode 13 on the narrow side of the application region has an outer diameter of 3 mm.
- the thickness of the electrostimulatory polymer material 11 was 1 mm
- the outer diameter was 10 mm
- the thickness was 2 mm
- +1 V was applied to the electrode 12
- ⁇ 1 V was applied to the electrode 13.
- the maximum electric field strength is 4012 V / m in the electric field vector distribution shown in FIG. As shown in FIG. 21, it became the outer peripheral part of each electrode part 2, 3 which opposes. Further, as shown in the generated electric field vector diagram of FIG. 24A, a vector is formed in a direction in which the polymer material 1 in a non-contact portion is bent from the region sandwiched between the electrode portions 2 and 3. Distribution was confirmed.
- the maximum stress is 9.5 ⁇ 10 ⁇ 11 N, and the location where the maximum stress is generated is It became the outer peripheral part of each electrode part 2 and 3 which opposes.
- the non-contact portion with the electrode portions 2 and 3 is set as the maximum generated stress, and the outer peripheral portion of the electrode portion 3 on the low potential side is set to the polymer material 1. It was confirmed that stress distribution occurred in the direction of bending toward the low potential side as a fulcrum.
- the maximum electric field strength is 5090 V / m in the electric field vector distribution shown in FIG. As shown in FIG. 17, the outer peripheral portion of the electrode 13 was formed.
- the region 12 sandwiched between the electrodes 12 and 13 is bent in the direction in which the electrostimulatory polymer material 11 in a non-contact portion with the electrodes 12 and 13 is bent. Vector distribution was confirmed.
- the maximum stress is 1.3 ⁇ 10 ⁇ 10 N and the location where the maximum stress is generated. Became the outer peripheral portion of the electrode 13.
- the non-contact portion with the electrode 13 is the maximum generated stress
- the electrostimulating polymer material 11 is the fulcrum of the outer peripheral portion of the low potential side electrode 13. It was confirmed that stress distribution was generated in the direction of bending toward the low potential side.
- the electrostimulatory polymer material (driving body) 81 has a hollow ring shape whose outer peripheral surface is a substantially hemispherical shape.
- An upper surface side electrode 82 and a lower surface side electrode 83 are disposed on the upper and lower sides of the driving body 81.
- the contact portion of the driver 81 with the upper surface side electrode 82 is a flat surface portion on the upper surface side
- the contact portion with the lower surface side electrode 83 is a flat surface portion on the lower surface side and a curved surface portion on the inner peripheral side.
- the outer peripheral surface side of the driving body 81 comes into contact with the wall surface of the flow path to increase the sealing force when the valve is closed. Therefore, it is possible to control the flow rate from a high level to a very low level. Further, when the polymer actuator equipped with the drive body 81 is applied to the shaft seal device, the outer peripheral surface side of the drive body 81 comes into contact with the shaft seal portion to control the leakage amount of the flow rate with high accuracy, or in the shaft seal state. The amount of minute leakage can be controlled.
- the electrodes 82 and 83 are built in the portion constituting the polymer actuator, so that the electrodes 82 and 83 are prevented from being exposed to the fluid side.
- Actuator body 11
- Driver electrically stimulating polymer material
- Front end surface 12
- Electrode 14 Deposition electrode 21
- Body 23 Drive unit 33
- Flow channel 35
- Valve seat 37 Seat surface
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Abstract
Description
このように、通常の軸封装置は、シール部材により封止機能を高めることを第1の目的としているため、通常はシール部材や流体の封止領域が所定の位置に定められている。そのため、封止装置を内蔵した装置は、内部構造が複雑化している。
また、封止状態と非封止状態を切り換える際には、動作機構を構成する部品相互の接触や摺動を伴うことになるため、この接触や摺動により動作機構を構成する部品が磨耗したり、摺動する部材が磨耗することがあった。しかも、シール部材自体も、封止領域の相手封止部材と接触・加圧状態のまま移動するため、摺動に伴う磨耗が生じていた。Oリングによる封止部分は、全周に亘って磨耗が発生すると接触部分の圧力低下や外傷により流体漏れを起こし易く、この場合、摺動面が粗い、潤滑が不十分などの外的要因により、磨耗がより加速することがあった。また、Oリングの摺動面に局部的な磨耗が生じた場合にも流体漏れが起こりやすくなり、Oリングの摺動面に傷があると磨耗がより加速することもあった。特に、動作機構の運動速度が速かったり、運動が偏心状態で行われたり、摺動する面の面粗さが粗かったり、潤滑が不十分の場合には、Oリングがねじれることもあった。これらのために、Oリングを用いた軸封構造は、そのシール性を十分に確保することもできず、流路の開閉や流量制御を行なう上で適した構造ではないため、各種の駆動源として利用することは難しい。
図1においては、本発明の高分子アクチュエータの一実施形態を示している。同図において、高分子アクチュエータ本体(以下、アクチュエータ本体)10は、駆動体11と、電極12、13と、蒸着電極14とを有している。
本発明における、電気刺激を加えたときに当該部位以外の部位が変形する電気刺激性高分子材料の特性を図2に示す。
この実施形態においては、電気刺激性高分子材料としてポリウレタン・エラストマーを使用している。
軸封体1は、電気的外部刺激を介して膨張する高分子材料製から成っており、例えば、ポリウレタン・エラストマーから成っている。また、固定電極部2、3は、均等な長さに形成されて軸封体1の上下部側に配設されている。そして、固定電極部2、3に電場を加えると、軸封体1が変形し、この変形によって図示しない流路に漏れ流体が流れるようになっている。
このベクトルの大きさは固定電極部2、3の外周部位で最大となり、この固定電極部2、3と非接触部位となる半径方向(平面方向)では外周側に向けて徐々に減衰する分布となる。これらの応力は、軸封体1を高電位側から低電位側へ屈曲する方向に作用し、このとき、低電位側の固定電極部3の外周周辺部が屈曲変形の支点として作用して軸封体1が屈曲する。
この場合、駆動体11となる電気刺激性高分子材料(例えば、ポリウレタン・エラストマー)は、長さの異なる電極12、13によって挟まれるか、更に、長い側の電極12に蒸着電極14を設け、この蒸着電極14と短い側の電極13とにより挟まれた状態になっている。駆動体11は、電極12、13に挟まれた部分と、電極12、13に接することなく外側に延長された部分とがある。
図3においては、アクチュエータ本体10を用いてバルブ本体20を構成した状態を示している。このバルブ本体20は、アクチュエータ本体10と、ボデー21と、電源回路22とを有している。
駆動体11は、適宜の厚さにより中空円筒状に形成される。この駆動体11の上下面側には異なる極性の電極12、13が対向配置され、この電極12、13は、それぞれ円柱ホルダ24と筒状ホルダ25との間に配設された状態で駆動体11の上下面側からボデーの外部まで延設されて電源回路22と繋がっている。
アクチュエータ本体10は、装着部32に装入され、嵌合係止部29が係止突部36に嵌合した状態でボデー21と一体化され、この一体化により流れ流路33、34の間に駆動部23が配設される。
図3の状態においては、スイッチ39がオフの状態であり、電源38から駆動体11に対して電場が加わっていない状態になっている。この場合、駆動体11は、旧位に変形しながら復帰してその先端面11aが座面37に密着シールしている。これにより、流れ流路33と流れ流路34とが連通して弁開状態になっている。
この状態から再度スイッチ39をオフの状態に切り換えると、電圧の印加が停止して駆動体11が図3の状態に復帰して再び弁開状態となる。
このように、バルブ本体20は、アクチュエータ本体10が弁体として配設され、この弁体で流路33、34を開閉、又は、流量調整するようになっている。
このバルブ本体40において、蒸着電極14は、駆動体11の電極12側に埋め込まれて隠蔽された状態で配設され、かつ、この電極12と電気的に接続した状態になっている。また、蒸着電極14は、駆動体11の半径方向に長く形成されており、この蒸着電極14側には図3のバルブ本体20の電極よりも広い印加領域が形成されている。
同図の3方切換弁41において、ボデー42には3つの流れ流路43、44、45が形成されている。この3つの流れ流路43、44、45のうち、2つの流れ流路43、44は、座面37よりも下方側のボデー42の下部側に互いに直交する方向に外部と連通して形成され、また、流れ流路45は、装着部32から外部に連通して形成されている。
更に、この圧力ブリーフ後に圧力が規定値以下に復帰した際には、スイッチ回路55よりこのときの圧力センサ54の電圧がアクチュエータ本体51に印加される。これにより、アクチュエータ本体51が膨張側に変形し、駆動体の先端側がハウジング52内周面に密着して流路56が閉止状態になり、圧力漏れが封止される。
このように、駆動機構60において、各アクチュエータ本体61、62、63、64への電圧の印加を制御することにより流路を切換え、流路67から圧縮エアを供給することでピストン66aを往復動させることができる。
図31は、本発明における高分子アクチュエータをバルブに用いた他例を示し、バルブが開状態である場合の概略断面図であり、図32は、同上の閉状態である場合の概略断面図である。
図31、図32において、固定電極12A、13Aのうち、固定電極13Aには、駆動体11の外端径方向に向けて当該駆動体11から拡大離散していく傾斜面13aを設けている。
そして、電圧を印加することにより、駆動体11が傾斜面13aを有する電極13A側に変形するので、バルブは図32に示すように確実に閉状態となる。その後、電圧を停止させると、駆動体11は旧位に変形しながら復帰して、バルブは図31に示すように、開状態となる。
この場合、被測定体76は、電圧印加時にマイナス電極側に屈曲しているが、極性を反転した場合、屈曲方向が反対(プラス電極側)となることが確認された。これにより、実際の使用に際しては、その条件等により所望の屈曲方向に屈曲させることができる。
また、上記の場合、被測定体76が電圧印加時に屈曲変形し、変位量δによる隙間を形成することで、この電気刺激性高分子材料を利用して、通常時に閉じた状態にある、いわゆる、NC(ノーマリークローズ)タイプのシール装置を構成できる。更に、この電気刺激性高分子材料を初期状態において屈曲した形状に成形し、一方、電圧を印加したときには平面形状に変形するように予め設けることにより、通常に開いた状態にある、いわゆる、NO(ノーマリーオープン)タイプのシール装置を構成することも可能である。
また、この構成により、電極82、83が高分子アクチュエータを構成する部位に内蔵されるため、電極82、83が流体側に暴露することが防がれる。
11 駆動体(電気刺激性高分子材料)
11a 先端面
12、13 電極
14 蒸着電極
21 ボデー
23 駆動部
33、34 流れ流路
35 弁座
37 座面
Claims (8)
- 電気的外部刺激を介して変形する駆動体と、この駆動体の上下面側に対向配置して正負の電気的外部刺激を前記駆動体に平面的に印加する電極とを有し、この電極は、異なる印加領域を有し、この印加領域により前記駆動体内に生じる応力分布を正負の一方に偏在させて、対向する印加領域が無い側に前記駆動体を屈曲変形させる電場分布を有することを特徴とする高分子アクチュエータ。
- 電気的外部刺激を介して変形する駆動体と、この駆動体の上下面側に対向して固定して正負の電気的外部刺激を前記駆動体に平面的に印加する固定電極とを有し、この固定電極は、異なる印加領域を有し、この印加領域により前記駆動体内に生じる応力分布を正負の一方に偏在させて、対向する印加領域が無い側に前記駆動体を屈曲変形させる電場分布を有することを特徴とする高分子アクチュエータ。
- 前記固定電極のうち、広い印加領域側となる固定電極と前記駆動体との間の相対又は非相対位置に、前記駆動体が屈曲変形する過程でこの駆動体と一体に変形してこの駆動体に電気的外部刺激を印加する可撓性の蒸着電極を蒸着した請求項2に記載の高分子アクチュエータ。
- 前記上下面側の電極のうち、広い印加領域側の電極を、前記駆動体が屈曲変形する過程でこの駆動体と一体に変形してこの駆動体に電気的外部刺激を印加する可撓性の蒸着電極とし、この蒸着電極を前記駆動体内に埋設した請求項1に記載の高分子アクチュエータ。
- 前記駆動体は、電気的外部刺激を停止したときに旧位に復帰し、一方、電気的外部刺激を加えたときに当該部位以外の部位が屈曲変形する電気刺激性高分子材料である請求項1乃至4の何れか1項に記載の高分子アクチュエータ。
- 前記固定電極の一方側の電極には、前記駆動体の外端径方向に向けて当該駆動体から拡大離散していく傾斜面を設けた請求項1乃至5の何れか1項に記載の高分子アクチュエータ。
- 複数の流路を有するボデー内に、前記高分子アクチュエータを弁体として配設し、この弁体で前記流路を開閉又は流量調整するようにした請求項1乃至6の何れか1項に記載の高分子アクチュエータを用いたバルブ。
- 本体内部に軸封部を設け、この軸封部に前記高分子アクチュエータを適用してこの高分子アクチュエータの変形により流体の漏れ現象を生じさせた請求項1乃至6の何れか1項に記載の高分子アクチュエータを用いた軸封構造。
Priority Applications (4)
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JP2010516719A JP4951708B2 (ja) | 2008-12-18 | 2009-12-17 | 高分子アクチュエータとこれを用いたバルブ並びに軸封構造 |
CN200980108193.XA CN101960710B (zh) | 2008-12-18 | 2009-12-17 | 高分子致动器和使用了该致动器的阀以及轴封结构 |
EP09833214.1A EP2226927B1 (en) | 2008-12-18 | 2009-12-17 | Polymer actuator, and valve and shaft sealing structure using the same |
US12/866,123 US8413953B2 (en) | 2008-12-18 | 2009-12-17 | Polymer actuator, and valve and shaft-sealing structure each using the same |
Applications Claiming Priority (2)
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JP2008322573 | 2008-12-18 | ||
JP2008-322573 | 2008-12-18 |
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WO2010070907A1 true WO2010070907A1 (ja) | 2010-06-24 |
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PCT/JP2009/006948 WO2010070907A1 (ja) | 2008-12-18 | 2009-12-17 | 高分子アクチュエータとこれを用いたバルブ並びに軸封構造 |
Country Status (6)
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US (1) | US8413953B2 (ja) |
EP (1) | EP2226927B1 (ja) |
JP (1) | JP4951708B2 (ja) |
KR (1) | KR101215527B1 (ja) |
CN (1) | CN101960710B (ja) |
WO (1) | WO2010070907A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013133229A1 (ja) * | 2012-03-07 | 2013-09-12 | 本田技研工業株式会社 | バルブ装置 |
GB2495251B (en) * | 2010-07-22 | 2017-09-20 | Baker Hughes Inc | Smart seals and other elastomer systems for health and pressure monitoring |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7758223B2 (en) | 2005-04-08 | 2010-07-20 | Toshiba Lighting & Technology Corporation | Lamp having outer shell to radiate heat of light source |
US8678618B2 (en) | 2009-09-25 | 2014-03-25 | Toshiba Lighting & Technology Corporation | Self-ballasted lamp having a light-transmissive member in contact with light emitting elements and lighting equipment incorporating the same |
JP5257622B2 (ja) | 2010-02-26 | 2013-08-07 | 東芝ライテック株式会社 | 電球形ランプおよび照明器具 |
DE112011100006T5 (de) * | 2010-03-11 | 2012-05-16 | Kitz Corporation | Polymeraktuator und diesen verwendendes ventil |
DE102010046343A1 (de) * | 2010-09-23 | 2012-03-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Dielektrische Polymere mit erhöhter Permittivität, Verfahren zu deren Herstellung sowie Verwendungszwecke hiervon |
CN103444069B (zh) * | 2011-10-11 | 2015-12-02 | 住友理工株式会社 | 转换器 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3501216B2 (ja) | 2000-03-31 | 2004-03-02 | 慶和 劉 | 電歪伸縮材を利用した駆動装置 |
JP2005171870A (ja) * | 2003-12-11 | 2005-06-30 | Daikin Ind Ltd | 圧縮機 |
JP2007120737A (ja) * | 2005-09-30 | 2007-05-17 | Gel-Design:Kk | 水供給弁 |
JP2008245509A (ja) * | 2007-02-27 | 2008-10-09 | Konica Minolta Holdings Inc | 高分子アクチュエータおよび光学ユニット |
JP2008253058A (ja) * | 2007-03-30 | 2008-10-16 | Japan Aviation Electronics Industry Ltd | アクチュエータ及び入力デバイス |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATA228987A (de) | 1987-09-09 | 1993-07-15 | Pickhard Ewald | Injektionsvorrichtung mit einer verformbaren ampulle |
US5977685A (en) * | 1996-02-15 | 1999-11-02 | Nitta Corporation | Polyurethane elastomer actuator |
GB9611147D0 (en) * | 1996-05-29 | 1996-07-31 | Flight Refueling Ltd | A flapper valve |
US7320457B2 (en) * | 1997-02-07 | 2008-01-22 | Sri International | Electroactive polymer devices for controlling fluid flow |
CN101680548A (zh) * | 2007-06-19 | 2010-03-24 | 株式会社开滋 | 轴封装置和使用该轴封装置的阀结构 |
-
2009
- 2009-12-17 CN CN200980108193.XA patent/CN101960710B/zh not_active Expired - Fee Related
- 2009-12-17 EP EP09833214.1A patent/EP2226927B1/en not_active Not-in-force
- 2009-12-17 US US12/866,123 patent/US8413953B2/en not_active Expired - Fee Related
- 2009-12-17 WO PCT/JP2009/006948 patent/WO2010070907A1/ja active Application Filing
- 2009-12-17 JP JP2010516719A patent/JP4951708B2/ja active Active
- 2009-12-17 KR KR1020107017899A patent/KR101215527B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3501216B2 (ja) | 2000-03-31 | 2004-03-02 | 慶和 劉 | 電歪伸縮材を利用した駆動装置 |
JP2005171870A (ja) * | 2003-12-11 | 2005-06-30 | Daikin Ind Ltd | 圧縮機 |
JP2007120737A (ja) * | 2005-09-30 | 2007-05-17 | Gel-Design:Kk | 水供給弁 |
JP2008245509A (ja) * | 2007-02-27 | 2008-10-09 | Konica Minolta Holdings Inc | 高分子アクチュエータおよび光学ユニット |
JP2008253058A (ja) * | 2007-03-30 | 2008-10-16 | Japan Aviation Electronics Industry Ltd | アクチュエータ及び入力デバイス |
Non-Patent Citations (1)
Title |
---|
See also references of EP2226927A4 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2495251B (en) * | 2010-07-22 | 2017-09-20 | Baker Hughes Inc | Smart seals and other elastomer systems for health and pressure monitoring |
WO2013133229A1 (ja) * | 2012-03-07 | 2013-09-12 | 本田技研工業株式会社 | バルブ装置 |
Also Published As
Publication number | Publication date |
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JP4951708B2 (ja) | 2012-06-13 |
CN101960710B (zh) | 2014-10-15 |
EP2226927A4 (en) | 2013-07-17 |
JPWO2010070907A1 (ja) | 2012-05-24 |
KR20100134559A (ko) | 2010-12-23 |
EP2226927B1 (en) | 2016-03-09 |
KR101215527B1 (ko) | 2012-12-26 |
US20100313983A1 (en) | 2010-12-16 |
EP2226927A1 (en) | 2010-09-08 |
US8413953B2 (en) | 2013-04-09 |
CN101960710A (zh) | 2011-01-26 |
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