WO2010060337A1 - Dispositif de mise sous vide multi-fonctionnel - Google Patents

Dispositif de mise sous vide multi-fonctionnel Download PDF

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Publication number
WO2010060337A1
WO2010060337A1 PCT/CN2009/074746 CN2009074746W WO2010060337A1 WO 2010060337 A1 WO2010060337 A1 WO 2010060337A1 CN 2009074746 W CN2009074746 W CN 2009074746W WO 2010060337 A1 WO2010060337 A1 WO 2010060337A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
valve
vacuum pump
support
working chamber
Prior art date
Application number
PCT/CN2009/074746
Other languages
English (en)
Chinese (zh)
Inventor
温晋轩
Original Assignee
Wen Jinxuan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wen Jinxuan filed Critical Wen Jinxuan
Publication of WO2010060337A1 publication Critical patent/WO2010060337A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps

Definitions

  • the present invention relates to an apparatus for evacuating an electric light source cavity, and more particularly to a multifunctional vacuuming apparatus for an electric light source cavity. Background technique
  • a method for controlling a plurality of vacuum processing chambers is disclosed. Pressure, vacuum, and equipment and methods to provide removal. This system can be used in semiconductor manufacturing.
  • a plurality of turbomachined chambers are vented into a common removal chamber by a plurality of turbo pumps, and a primary purge pump maintains the common removal chamber at a pressure below atmospheric pressure.
  • the pressure in the processing chambers is independently controlled.
  • the internal volume of the removal device provides a buffer that reduces the effects of pressure changes within one processing chamber on pressure in other chambers.
  • the existing vacuum pumping device for the electric light source cavity operates in the following manner:
  • the power source working pump is connected to a break-off working valve, which controls the start-stop of the vacuuming operation of the electric light source cavity.
  • the valve comprises a cylinder with two equal halves of the same number of through holes, and the two halves of the cylinder rotate relative to each other; wherein the through holes on one half are respectively connected to the working pump, and the through holes on the other half are respectively connected to each other.
  • Vacuum suctioning the workpiece when the through holes on the two halves are butted, the suction workpiece starts to evacuate the electric light source cavity, and when the through holes on the two halves are staggered and do not conduct each other, the workpiece is sucked to the electric light source cavity Stop vacuuming.
  • the technical problem to be solved by the present invention is to provide a multi-functional vacuuming device which can start and stop as needed and adjust the pressure at random according to the vacuuming degree of each workpiece.
  • a multi-functional vacuuming device comprising a vacuum pump and a vacuum valve connected thereto, the working valve being connected to the vacuum through a communication pipe; wherein the vacuum pump is first connected to the working chamber, and the working chamber is provided with at least a vacuum passage, the vacuum passage is connected to the vacuum through a communication pipe; the gas pressure gauge is also communicated with the vacuum valve through a communication pipe; the foregoing components are located on the support member; the programmable controller is controlled by the electromagnetic valve Vacuum pump, vacuum valve and working valve.
  • the working chamber includes a high vacuum working chamber and a low vacuum working chamber, the vacuum pump including a high vacuum pump and a low vacuum pump, the vacuum passage including a high vacuum passage and a low vacuum passage.
  • the work includes cleaning gas, charging gas, and vacuuming valves.
  • the support member includes a vacuum valve support platform, a vacuum pump support platform and a base, the vacuum valve support platform and the vacuum pump support platform are fixedly connected by at least three fixed support columns; the bottom of the vacuum pump support platform is connected with at least three rotating support columns The upper end is fixedly connected, the lower end of the rotating support column is connected with a universal wheel leg; the bottom of the base is provided with a mechanical rotating transmission component, and the mechanical rotating transmission component is fixedly connected with the central axis through the central axle seat, and the central axis is in turn a fixed connection with the vacuum valve support platform and the vacuum pump support platform and the working chamber; a support base is further disposed between the base and the vacuum pump support platform, the support base is fixedly connected with the base, and the central shaft can be Free rotation within the support seat.
  • the mechanical rotary transmission member is also coupled to a cooling water swivel joint.
  • the center axle seat is in communication with an exhaust gas outlet.
  • the high vacuum pump and the low vacuum pump are each at least two.
  • the top of the high vacuum working chamber is also provided with an electric guiding and gas outlet and a gas swivel joint.
  • the multifunctional vacuuming device of the invention uses the PLC program control to make the machine operation more convenient, and can start and stop as needed; since the working valve chamber is connected with the pressure gauge, the pressure can be detected at any time, so randomly according to each workpiece The vacuum is required to adjust the pressure; further, since the working chambers are isolated from each other, the pressure change of one working chamber has no influence on the pressure in other chambers.
  • Figure 1 is a schematic perspective view of the present invention
  • Figure 2 is a cross-sectional structural view of the working chamber
  • Figure 3 is a partial enlargement of Part A in Figure 1.
  • Figure 4 is a schematic diagram of electrical control of the present invention.
  • Supporting parts 41 Vacuum valve support platform 42. Vacuum pump support platform 43.
  • Base 411 Fixed support column 412, sealed gas balance barrel 421, rotating support column 422, support base 51, central shaft
  • Vacuum valve 61 high vacuum valve 62, low vacuum valve 63, working valve 64, gas pressure gauge (positive and negative pressure). detailed description
  • the multifunctional vacuuming apparatus includes a working chamber 1, a vacuum pump, a support member 4, a mechanical transmission member 5, a vacuum valve 6, and a working valve 63.
  • the working chamber 1 includes a high vacuum working chamber 11 and a low vacuum worker.
  • the chamber 12 is provided with a high vacuum passage 1 1 1 and a low vacuum passage 1 21, respectively.
  • the support member 4 includes a vacuum valve support platform 41, a vacuum pump support platform 42 and a base 43.
  • the vacuum pump includes a high vacuum pump 2, a low vacuum pump 3;
  • the working valve 63 includes a purge gas valve, a charge gas valve, and a vacuum valve.
  • the gas pressure gauge 64 is also in communication with the vacuum valve through a communication tube; the programmable controller controls the vacuum pump, the vacuum valve, and the working valve through a solenoid valve.
  • the vacuum valve support platform 41 and the vacuum pump support platform 42 are fixedly connected by at least four fixed support columns 41 1 ; the bottom of the vacuum pump support platform 42 is fixedly connected to the upper ends of the four rotary support columns 421 , and the lower end of the rotary support column 421 is connected with 10,000 To the wheel support, the upper part of the vacuum pump support platform 42 of the entire apparatus can be swung and moved on the base 43; the bottom of the base 43 is provided with a mechanical rotary transmission component 5, which is fixed by the central axle seat 54 and the central axle 51.
  • the central shaft 51 is fixedly connected to the vacuum valve support platform 41 and the vacuum pump support platform 42 and the working chamber 1 in sequence; between the base 43 and the vacuum pump support platform 42 , a support base 422 , a support base 422 and a base 43 are further disposed. The fixed connection, the central shaft 51 is free to rotate within the support base 422.
  • high vacuum pumps 2 and low vacuum pumps 3 are fixedly mounted on the vacuum pump support platform 42. At least two of them can meet the requirements of one spare one, and four are better.
  • Rotating the support column 421 and the fixed support column 41 1 can determine the support of one plane.
  • the four are only for symmetry and aesthetics, and the simple function requires three.
  • the top of the high vacuum working chamber 11 is also provided with an electric guide 13 and a gas outlet 14 and a gas swivel joint.
  • the invention can overcome the defects that the vacuum pumping device can not continuously continuously evacuate during the intermittent operation of the vacuuming device in the prior art, and shorten the distance between the vacuum pump and the workpiece to be vacuumed, thereby achieving the efficiency of effectively utilizing the vacuum pump.
  • the use of PLC program control makes the machine operation more convenient.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne un dispositif de mise sous vide multi-fonctionnel qui comporte une soupape de travail reliée à une soupape de dépression par un tuyau de communication. Des pompes à vide (2,3) sont en communication avec une cellule de travail (1) comprenant au moins un canal sous vide qui communique avec la soupape de dépression par un tuyau de communication. Un manomètre à gaz (64) communique avec la soupape de dépression par un tuyau de communication. Les pompes à vide et la cellule de travail sont situées dans une structure de support (4). La pompe à vide, la soupape de dépression et la soupape de travail sont commandées par un boîtier électronique de commande programmable par l'intermédiaire d'une électrovanne.
PCT/CN2009/074746 2008-11-25 2009-11-02 Dispositif de mise sous vide multi-fonctionnel WO2010060337A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN2008101808180A CN101397986B (zh) 2008-11-25 2008-11-25 多功能抽空真空设备
CN200810180818.0 2008-11-25

Publications (1)

Publication Number Publication Date
WO2010060337A1 true WO2010060337A1 (fr) 2010-06-03

Family

ID=40516768

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2009/074746 WO2010060337A1 (fr) 2008-11-25 2009-11-02 Dispositif de mise sous vide multi-fonctionnel

Country Status (2)

Country Link
CN (1) CN101397986B (fr)
WO (1) WO2010060337A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108591028A (zh) * 2018-03-30 2018-09-28 嘉兴市华鼎日用品有限公司 一种抽真空机

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201344287Y (zh) * 2008-10-20 2009-11-11 温晋轩 连续式抽真空设备的真空阀
CN101397986B (zh) * 2008-11-25 2010-10-13 温晋轩 多功能抽空真空设备
CN101963794B (zh) * 2009-07-21 2013-09-04 康准电子科技（昆山）有限公司 薄膜真空贴附控制方法
CN102674668A (zh) * 2012-05-23 2012-09-19 天津森宇玻璃制造有限公司 一种真空玻璃的常温抽真空方法
CN109224322B (zh) * 2018-10-29 2020-08-18 合肥中科离子医学技术装备有限公司 一种应用于质子治疗装置的真空控制系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4725204A (en) * 1986-11-05 1988-02-16 Pennwalt Corporation Vacuum manifold pumping system
US5469885A (en) * 1993-10-27 1995-11-28 Masako Kiyohara Block valve with tank chamber
CN1420526A (zh) * 2001-11-19 2003-05-28 旺宏电子股份有限公司 调整半导体反应室真空系统的排气压力的装置及方法
EP1577559A1 (fr) * 2004-03-15 2005-09-21 VARIAN S.p.A. Dispositif de pompage à vide
CN200940713Y (zh) * 2006-08-01 2007-08-29 肇庆市科润真空设备有限公司 双通高真空阀门装置
CN101397986A (zh) * 2008-11-25 2009-04-01 温晋轩 多功能抽空真空设备

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4725204A (en) * 1986-11-05 1988-02-16 Pennwalt Corporation Vacuum manifold pumping system
US5469885A (en) * 1993-10-27 1995-11-28 Masako Kiyohara Block valve with tank chamber
CN1420526A (zh) * 2001-11-19 2003-05-28 旺宏电子股份有限公司 调整半导体反应室真空系统的排气压力的装置及方法
EP1577559A1 (fr) * 2004-03-15 2005-09-21 VARIAN S.p.A. Dispositif de pompage à vide
CN200940713Y (zh) * 2006-08-01 2007-08-29 肇庆市科润真空设备有限公司 双通高真空阀门装置
CN101397986A (zh) * 2008-11-25 2009-04-01 温晋轩 多功能抽空真空设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108591028A (zh) * 2018-03-30 2018-09-28 嘉兴市华鼎日用品有限公司 一种抽真空机

Also Published As

Publication number Publication date
CN101397986B (zh) 2010-10-13
CN101397986A (zh) 2009-04-01

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