WO2010060337A1

WO2010060337A1 - Multifunctional vacuumizing device

Info

Publication number: WO2010060337A1
Application number: PCT/CN2009/074746
Authority: WO
Inventors: 温晋轩
Original assignee: Wen Jinxuan
Priority date: 2008-11-25
Filing date: 2009-11-02
Publication date: 2010-06-03
Also published as: CN101397986B; CN101397986A

Abstract

A multifunctional vacuumizing device has a working valve connected to a vacuum valve by a communicating pipe. Vacuum pumps (2,3) are communicated with a working chamber (1) comprising at least one vacuum channel that is communicated with the vacuum valve by a communicating pipe. A gas manometer (64) is communicated with the vacuum valve by a communicating pipe. The vacuum pumps and the working chamber are located in a supporting structure (4). The vacuum pump, the vacuum valve and the working valve are controlled by a programmable logic controller via an electromagnetic valve.

Description

Multifunctional vacuum pumping equipment

The present invention relates to an apparatus for evacuating an electric light source cavity, and more particularly to a multifunctional vacuuming apparatus for an electric light source cavity. Background technique

In the invention of CN1637283 and the apparatus and method for control, suction and removal of a vacuum processing chamber disclosed on July 13, 2005, a method for controlling a plurality of vacuum processing chambers is disclosed. Pressure, vacuum, and equipment and methods to provide removal. This system can be used in semiconductor manufacturing. A plurality of turbomachined chambers are vented into a common removal chamber by a plurality of turbo pumps, and a primary purge pump maintains the common removal chamber at a pressure below atmospheric pressure. The pressure in the processing chambers is independently controlled. The internal volume of the removal device provides a buffer that reduces the effects of pressure changes within one processing chamber on pressure in other chambers.

The pressure variations in the processing chamber in this solution have an effect on the pressure in other chambers.

In addition, the existing vacuum pumping device for the electric light source cavity operates in the following manner: The power source working pump is connected to a break-off working valve, which controls the start-stop of the vacuuming operation of the electric light source cavity. The valve comprises a cylinder with two equal halves of the same number of through holes, and the two halves of the cylinder rotate relative to each other; wherein the through holes on one half are respectively connected to the working pump, and the through holes on the other half are respectively connected to each other. Vacuum suctioning the workpiece; when the through holes on the two halves are butted, the suction workpiece starts to evacuate the electric light source cavity, and when the through holes on the two halves are staggered and do not conduct each other, the workpiece is sucked to the electric light source cavity Stop vacuuming.

The existing techniques described above have the following disadvantages:

1) The working mode is not continuous and cannot be started and stopped as needed;

2) The working pressure cannot be adjusted randomly according to the vacuum degree requirements of each workpiece. Work under unified working pressure;

3) For the electric light source cavity that needs to be sucked, the final pressure of the vacuum suction cannot be displayed at any time. Summary of the invention

The technical problem to be solved by the present invention is to provide a multi-functional vacuuming device which can start and stop as needed and adjust the pressure at random according to the vacuuming degree of each workpiece.

In order to solve the above technical problem, the present invention adopts the following technical solutions:

a multi-functional vacuuming device, comprising a vacuum pump and a vacuum valve connected thereto, the working valve being connected to the vacuum through a communication pipe; wherein the vacuum pump is first connected to the working chamber, and the working chamber is provided with at least a vacuum passage, the vacuum passage is connected to the vacuum through a communication pipe; the gas pressure gauge is also communicated with the vacuum valve through a communication pipe; the foregoing components are located on the support member; the programmable controller is controlled by the electromagnetic valve Vacuum pump, vacuum valve and working valve.

The working chamber includes a high vacuum working chamber and a low vacuum working chamber, the vacuum pump including a high vacuum pump and a low vacuum pump, the vacuum passage including a high vacuum passage and a low vacuum passage.

The work includes cleaning gas, charging gas, and vacuuming valves.

The support member includes a vacuum valve support platform, a vacuum pump support platform and a base, the vacuum valve support platform and the vacuum pump support platform are fixedly connected by at least three fixed support columns; the bottom of the vacuum pump support platform is connected with at least three rotating support columns The upper end is fixedly connected, the lower end of the rotating support column is connected with a universal wheel leg; the bottom of the base is provided with a mechanical rotating transmission component, and the mechanical rotating transmission component is fixedly connected with the central axis through the central axle seat, and the central axis is in turn a fixed connection with the vacuum valve support platform and the vacuum pump support platform and the working chamber; a support base is further disposed between the base and the vacuum pump support platform, the support base is fixedly connected with the base, and the central shaft can be Free rotation within the support seat.

The mechanical rotary transmission member is also coupled to a cooling water swivel joint.

The center axle seat is in communication with an exhaust gas outlet.

The high vacuum pump and the low vacuum pump are each at least two. The top of the high vacuum working chamber is also provided with an electric guiding and gas outlet and a gas swivel joint.

The multifunctional vacuuming device of the invention uses the PLC program control to make the machine operation more convenient, and can start and stop as needed; since the working valve chamber is connected with the pressure gauge, the pressure can be detected at any time, so randomly according to each workpiece The vacuum is required to adjust the pressure; further, since the working chambers are isolated from each other, the pressure change of one working chamber has no influence on the pressure in other chambers. DRAWINGS

The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

Figure 1 is a schematic perspective view of the present invention;

Figure 2 is a cross-sectional structural view of the working chamber;

Figure 3 is a partial enlargement of Part A in Figure 1.

Figure 4 is a schematic diagram of electrical control of the present invention.

Reference numerals: 1. Working chamber 11 , high vacuum working chamber

111, high vacuum channel 12, low vacuum working chamber 121, low vacuum channel

1 3, electric guide 14, gas outlet 2, high vacuum pump 21, high vacuum connecting pipe 3, low vacuum pump 31, high vacuum connecting pipe

4. Supporting parts 41 Vacuum valve support platform 42. Vacuum pump support platform 43. Base 411 Fixed support column 412, sealed gas balance barrel 421, rotating support column 422, support base 51, central shaft

52, exhaust gas outlet 53, cooling water rotary joint 54, central axle seat

5. Mechanical rotary transmission components 6. Vacuum valve 61, high vacuum valve 62, low vacuum valve 63, working valve 64, gas pressure gauge (positive and negative pressure). detailed description

As shown in Fig. 1, the multifunctional vacuuming apparatus includes a working chamber 1, a vacuum pump, a support member 4, a mechanical transmission member 5, a vacuum valve 6, and a working valve 63.

Referring to FIG. 2, the working chamber 1 includes a high vacuum working chamber 11 and a low vacuum worker. The chamber 12 is provided with a high vacuum passage 1 1 1 and a low vacuum passage 1 21, respectively.

The support member 4 includes a vacuum valve support platform 41, a vacuum pump support platform 42 and a base 43. Referring to Fig. 3, the vacuum pump includes a high vacuum pump 2, a low vacuum pump 3; the working valve 63 includes a purge gas valve, a charge gas valve, and a vacuum valve. The gas pressure gauge 64 is also in communication with the vacuum valve through a communication tube; the programmable controller controls the vacuum pump, the vacuum valve, and the working valve through a solenoid valve.

The vacuum valve support platform 41 and the vacuum pump support platform 42 are fixedly connected by at least four fixed support columns 41 1 ; the bottom of the vacuum pump support platform 42 is fixedly connected to the upper ends of the four rotary support columns 421 , and the lower end of the rotary support column 421 is connected with 10,000 To the wheel support, the upper part of the vacuum pump support platform 42 of the entire apparatus can be swung and moved on the base 43; the bottom of the base 43 is provided with a mechanical rotary transmission component 5, which is fixed by the central axle seat 54 and the central axle 51. The central shaft 51 is fixedly connected to the vacuum valve support platform 41 and the vacuum pump support platform 42 and the working chamber 1 in sequence; between the base 43 and the vacuum pump support platform 42 , a support base 422 , a support base 422 and a base 43 are further disposed. The fixed connection, the central shaft 51 is free to rotate within the support base 422.

Four high vacuum pumps 2 and low vacuum pumps 3 are fixedly mounted on the vacuum pump support platform 42. At least two of them can meet the requirements of one spare one, and four are better.

Rotating the support column 421 and the fixed support column 41 1 can determine the support of one plane. The four are only for symmetry and aesthetics, and the simple function requires three.

As shown in Figures 1 and 2, the top of the high vacuum working chamber 11 is also provided with an electric guide 13 and a gas outlet 14 and a gas swivel joint.

The invention can overcome the defects that the vacuum pumping device can not continuously continuously evacuate during the intermittent operation of the vacuuming device in the prior art, and shorten the distance between the vacuum pump and the workpiece to be vacuumed, thereby achieving the efficiency of effectively utilizing the vacuum pump. In addition, the use of PLC program control makes the machine operation more convenient.

Claims

A multi-function vacuuming device comprising a vacuum pump and a vacuum valve connected thereto, the working valve being connected to the vacuum valve through a communication tube; wherein the vacuum pump is first connected to the working chamber (1), The working chamber (1) is provided with at least one vacuum passage, and the vacuum passage is connected to the vacuum through a communication tube; the gas pressure gauge (64) is also communicated with the vacuum through the communication tube; The support member (4); the programmable controller controls the vacuum pump, the vacuum valve and the working valve through a solenoid valve.

2. The multifunctional vacuuming device according to claim 1, wherein the working chamber (1) comprises a high vacuum working chamber (11) and a low vacuum working chamber (21), the vacuum pump comprising A high vacuum pump (2) and a low vacuum pump (3), the vacuum passage including a high vacuum passage (111) and a low vacuum passage (121).

3. The multi-function vacuuming apparatus according to claim 2, wherein the working valve comprises a purge gas valve, a charge gas valve, and a vacuum valve.

The multifunctional vacuuming device according to claim 2 or 3, wherein the support member (4) comprises a vacuum valve support platform (41), a vacuum pump support platform (42) and a base (43), The vacuum valve support platform (41) and the vacuum pump support platform (42) are fixedly connected by at least three fixed support columns (411); the bottom of the vacuum pump support platform (42) is at least with the upper ends of three rotating support columns (421) Fixed connection, the lower end of the rotating support column (421) is connected with a universal wheel leg; the bottom of the base (43) is provided with a mechanical rotating transmission component (5), and the mechanical rotating transmission component (5) passes through the central axle seat ( 54) fixedly coupled to the central shaft (51), the central shaft (51) being in fixed connection with the vacuum valve support platform (41) and the vacuum pump support platform (42) and the working chamber (1); (43) and a vacuum pump support platform (42) is further provided with a support base (422), the support base (422) is fixedly connected with the base (43), and the central shaft (51) can be supported by the support Free rotation inside the seat ( 422 )

The multi-function vacuuming device according to claim 4, characterized in that the mechanical rotary transmission member (5) is also connected to a cooling water swivel joint (53).

The multi-function vacuuming apparatus according to claim 5, wherein the center shaft seat (54) is in communication with the exhaust gas outlet (52).

7. The multifunctional vacuuming device according to claim 2 or 3, characterized in that the high vacuum pump (2) and the low vacuum pump (3) are each at least two.

8. The multi-function vacuuming apparatus according to claim 4, wherein the high vacuum pump (2) and the low vacuum pump (3) are each at least two.

9, according to claim 4, wherein the multi-functional vacuum apparatus, characterized in that the top of the high vacuum working chamber (11) is further provided with an electrical guide (I ³⁾ and a gas outlet (L and a gas rotary Connect