CN207178244U - A kind of pipeline configuration of vacuum equipment - Google Patents
A kind of pipeline configuration of vacuum equipment Download PDFInfo
- Publication number
- CN207178244U CN207178244U CN201721076073.4U CN201721076073U CN207178244U CN 207178244 U CN207178244 U CN 207178244U CN 201721076073 U CN201721076073 U CN 201721076073U CN 207178244 U CN207178244 U CN 207178244U
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- CN
- China
- Prior art keywords
- pipeline
- rearmounted
- vacuum
- preposition
- convex edge
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Abstract
The utility model is a kind of pipeline configuration of vacuum equipment, has following progressive part using this technical scheme：Turbomolecular pump is directly installed on the removable top cover of vacuum chamber, is avoided the problem of connecting pipe is installed between turbomolecular pump and removable top cover, is improved and vacuumize efficiency, directly vacuumize the reliability that can improve overall vacuum equipment；Turbomolecular pump is divided into preposition pipeline and rearmounted pipeline with the pipeline that fore vacuum equipment connects, it is interconnected by the convex edge on flange, flange uses in pairs, when vacuum chamber deflation vacuum breaker, preposition pipeline and rearmounted pipeline separate with flange, so preposition pipeline and rearmounted pipeline in use will not be by the pulling force of any direction, therefore the service life of preposition pipeline and rearmounted pipeline extends, and preposition pipeline and rearmounted pipeline further increase the reliability for vacuumizing state of preposition pipeline and rearmounted pipeline enclosure with flange integrally connected.
Description
Technical field
It the utility model is related to technical field of vacuum equipment, more particularly to a kind of pipeline configuration of vacuum equipment.
Background technology
Turbomolecular pump is that MOMENTUM TRANSMISSION is allowed to obtain directed velocity to gas molecule using the rotor of high speed rotation,
So as to be compressed, by trend exhaust outlet, then a kind of vavuum pump taken away by prime.Turbomolecular pump is used as true for forming superelevation
The vavuum pump of dummy status and be attached to various processing unit (plant)s, various analytical equipments and the electronic display that such as semiconductor manufacturing is representative
Micro mirror etc..Turbomolecular pump and vacuum chamber are used in combination, and generally turbomolecular pump is installed without sufficient space on vacuum chamber body, because
This turbomolecular pump is generally connected between vacuum chamber by pipeline, or turbomolecular pump is installed in the movable top of vacuum chamber
Cover.
Turbomolecular pump is connected with vacuum chamber by pipeline, can be influenceed the evacuation rate of turbomolecular pump, be increased simultaneously
Connection member, reduces vacuum-packed reliability.Turbomolecular pump is directly installed on the removable top cover of vacuum chamber, turbine
Molecular pump coordinates prime mechanical pump to be used together due to needing, therefore soft usually using vacuum between turbomolecular pump and mechanical pump
Pipe connects, but vacuum chamber opens the vacuum breaker that must all deflate every time, and this will necessarily bring the distortion of vacuum hose, therefore meeting
Influence the sealing of vacuum hose.A kind of pipeline configuration is needed to avoid this problem now, increase turbomolecular pump uses
During pipeline vacuum use reliability and service life.
Utility model content
The purpose of this utility model is in view of the shortcomings of the prior art, there is provided a kind of pipeline configuration of vacuum equipment.
A kind of pipeline configuration of vacuum equipment, including vacuum chamber, the vacuum chamber bottom connection turntable rotating shaft and motor subtract
Fast case, the vacuum chamber top are equiped with removable top cover, turbomolecular pump, the vacuum chamber are fixed with the removable top cover
Connected with the removable top cover flange, the flange side stretches out to form convex edge, the convex edge lower surface integrally formed with
The head end of preposition pipeline, the convex edge upper surface is integrally formed with the end of rearmounted pipeline, and the convex edge is hollow, the preposition pipe
The end of the head end in road and the rearmounted pipeline communicates, the end connection fore vacuum equipment of the preposition pipeline, described rearmounted
The head end of pipeline connects the turbomolecular pump.
In one of the embodiments, the preposition pipeline and the rearmounted pipeline are Circular Rigid pipeline.
In one of the embodiments, the preposition pipeline and the rearmounted pipeline are stainless steel.
In one of the embodiments, the head end of the preposition pipeline is perpendicular to the convex edge.
In one of the embodiments, the head end of the rearmounted pipeline is perpendicular to the turbomolecular pump, the rearmounted pipe
The ending vertical in road is in the convex edge.
In one of the embodiments, the ratio between cross section of the preposition pipeline and rearmounted pipeline is 4-1.5:1.
In one of the embodiments, the vacuum meter of test vacuum is provided with the rearmounted pipeline.
In one of the embodiments, it is provided with safety valve between the rearmounted pipe end and the vacuum meter.
In summary, use above technology has following progressive part：Turbomolecular pump is directly installed in the work of vacuum chamber
On dynamic top cover, the problem of connecting pipe is installed between turbomolecular pump and removable top cover is avoided, improves and vacuumizes efficiency, directly
Connect the reliability for vacuumizing and can improving overall vacuum equipment；Before turbomolecular pump is divided into the pipeline that fore vacuum equipment connects
Pipeline and rearmounted pipeline to be put, is interconnected by the convex edge on flange, flange uses in pairs, when vacuum chamber deflation vacuum breaker,
Preposition pipeline and rearmounted pipeline are separated with flange, and so preposition pipeline and rearmounted pipeline will not be taken office in use
Where to pulling force, therefore the service life of preposition pipeline and rearmounted pipeline extend, and preposition pipeline and rearmounted pipeline with
Flange integrally connected, further increase the reliability for vacuumizing state of preposition pipeline and rearmounted pipeline enclosure.
Brief description of the drawings
Fig. 1 is the positive structure diagram of the embodiment of the utility model one；
Fig. 2 is the overlooking the structure diagram of the embodiment of the utility model one.
Embodiment
Below in conjunction with the accompanying drawings and embodiment is described in further detail to the utility model.
As depicted in figs. 1 and 2, a kind of pipeline configuration of vacuum equipment, including vacuum chamber 1, the bottom of vacuum chamber 1 connection
Turntable rotating shaft and motor reduction gearbox, the top of vacuum chamber 1 are equiped with removable top cover 2, whirlpool are fixed with the removable top cover 2
Molecular pump 3 is taken turns, the vacuum chamber 1 and the flange 4 of the removable top cover 2 connect, and the side of flange 4 stretches out to form convex edge 5,
The lower surface of convex edge 5 is integrally formed with the head end of preposition pipeline 6, and the upper surface of convex edge 5 is integrally formed with rearmounted pipeline 7
End, the convex edge 5 is hollow, and the head end of the preposition pipeline 6 and the end of the rearmounted pipeline 7 communicate, the preposition pipeline 6
End connection fore vacuum equipment 8, the head end of the rearmounted pipeline 7 connects the turbomolecular pump 3.Turbomolecular pump 3 is straight
Tipping avoids the problem of connecting pipe is installed between turbomolecular pump 3 and removable top cover 2, improves and take out on removable top cover 2
Vacuum efficiency, directly vacuumize the reliability that can improve overall vacuum equipment；Turbomolecular pump 3 and fore vacuum equipment 8 connect
The pipeline connect is divided into preposition pipeline 6 and rearmounted pipeline 7, is interconnected by the convex edge 5 on flange 4, flange 4 uses in pairs, very
During 1 vacuum breaker of empty room, preposition pipeline 6 and rearmounted pipeline 7 separate with flange 4, and so preposition pipeline 6 and rearmounted pipeline 7 make
Will not be by the pulling force of any direction during, therefore the service life of preposition pipeline 6 and rearmounted pipeline 7 extends, and
Preposition pipeline 6 and rearmounted pipeline 7 with the integrally connected of flange 4, further increase vacuumizing between preposition pipeline 6 and rearmounted pipeline 7
The reliability of state.Fore vacuum equipment 8 is usually using mechanical pump.
In one of the embodiments, the preposition pipeline 6 and the rearmounted pipeline 7 are Circular Rigid pipeline.It is preposition
Pipeline 6 and rearmounted pipeline 7 are respectively with the integrally connected of flange 4, and during the use of turbomolecular pump 3 and vacuum chamber 1 breaks null process
In, will not be by the pulling force of any direction, therefore preposition pipeline 6 and rearmounted pipeline 7 do not interfere with equipment using rigid conduit
Use, while the vacuum reliability of preposition pipeline 6 and rearmounted pipeline 7 and equipment junction can be increased, increased the service life.
Preposition pipeline 6 and rearmounted pipeline 7 use circular pipe, then in pumping process, pressure is uniform everywhere for inner-walls of duct, is advantageous to prolong
Grow the service life of preposition pipeline 6 and rearmounted pipeline 7 and maintain easily maintenance.
In one of the embodiments, the preposition pipeline 6 and the rearmounted pipeline 7 are stainless steel.Preposition pipe
The unique media passage that road 6 and rearmounted pipeline 7 are vacuumized or deflated to vacuum chamber 1 as turbomolecular pump 3, it is reliable to its material
The comprehensive consideration of property and cost, preposition pipeline 6 and rearmounted is can also ensure that generally from stainless steel, while control cost
The service life of pipeline 7.
In one of the embodiments, the head end of the preposition pipeline 6 is perpendicular to the convex edge 5, the rearmounted pipeline 7
Head end is perpendicular to the turbomolecular pump 3, and the ending vertical of the rearmounted pipeline 7 is in the convex edge 5.The head end of preposition pipeline 6
It is vertically installed on the convex edge 5 of flange 4 with the end of rearmounted pipeline 7, preposition pipeline 6 and rearmounted pipeline 7 pass through on convex edge 5
Through hole connects, and is vertically arranged and facilitates connecting between preposition pipeline 6 and rearmounted pipeline 7, in addition, being vertically arranged makes preposition pipeline 6
With the junction each point uniform force of convex edge 5, be advantageous to the structural stability and sealing between preposition pipeline 6 and convex edge 5, it is similarly right
In rearmounted pipeline 7.
In one of the embodiments, the ratio between cross section of the preposition pipeline 6 and rearmounted pipeline 7 is 4-1.5:1.It is rearmounted
Pipeline 7 needs to monitor the vacuum in rearmounted pipeline 7 in real time, therefore close to turbomolecular pump 3 in vacuum
The cross section more preposition pipeline 6 of design of rearmounted pipeline 7 is small, is advantageous to the measurement accuracy of the vacuum of rearmounted pipeline 7.
In one of the embodiments, the vacuum meter 9 of test vacuum is provided with the rearmounted pipeline 7.Vacuum meter 9 can
It is convenient that the vacuum in rearmounted pipeline 7 is detected at any time using Pirani vacuum meters 9.After Pirani vacuum meters 9 are shown
The vacuum for putting pipeline 7 is less than after the preposition boundary vacuum of turbomolecular pump 3, and turbomolecular pump 3 starts, and starts to vacuum chamber
1 progress essence is taken out.
In one of the embodiments, it is provided with safety valve 10 between the end of rearmounted pipeline 7 and the vacuum meter 9.
In vacuum equipment start-up course, fore vacuum equipment 8 is evacuated to preposition pipeline 6, the rearmounted pipeline connected with preposition pipeline 6
7 reach certain vacuum degree after safety valve 10 automatically open up, now the gas in vacuum chamber 1 can be by turbomolecular pump 3, before
Level vacuum equipment 8 is discharged；When equipment downtime vacuum breaker process, safety valve 10 can be put to the front end of rearmounted pipeline 7 automatically
Gas, prevent preevacuating mechanical pump oil from blowing back into preposition pipeline 6 and polluting.
A specific embodiment of the present utility model is the foregoing is only, but architectural feature of the present utility model is not limited to
This, for any those skilled in the art in field of the present utility model, the change or modification made are encompassed by this practicality newly
In the scope of the claims of type.
Claims (8)
1. a kind of pipeline configuration of vacuum equipment, including vacuum chamber, the vacuum chamber bottom connection turntable rotating shaft and decelerating through motor
Case, it is characterised in that：Removable top cover is equiped with the top of the vacuum chamber, turbomolecular pump is fixed with the removable top cover,
The vacuum chamber connects with the removable top cover flange, and the flange side stretches out to form convex edge, the convex edge lower surface
Integrally formed with the head end of preposition pipeline, integrally formed with the end of rearmounted pipeline, the convex edge is hollow for the convex edge upper surface,
The end of the head end of the preposition pipeline and the rearmounted pipeline is communicated, and the end connection fore vacuum of the preposition pipeline is set
Standby, the head end of the rearmounted pipeline connects the turbomolecular pump.
A kind of 2. pipeline configuration of vacuum equipment according to claim 1, it is characterised in that：The preposition pipeline and it is described after
It is Circular Rigid pipeline to put pipeline.
A kind of 3. pipeline configuration of vacuum equipment according to claim 2, it is characterised in that：The preposition pipeline and it is described after
It is stainless steel to put pipeline.
A kind of 4. pipeline configuration of vacuum equipment according to claim 2, it is characterised in that：The head end of the preposition pipeline hangs down
Directly in the convex edge.
A kind of 5. pipeline configuration of vacuum equipment according to claim 2, it is characterised in that：The head end of the rearmounted pipeline hangs down
Directly in the turbomolecular pump, the ending vertical of the rearmounted pipeline is in the convex edge.
A kind of 6. pipeline configuration of vacuum equipment according to claim 2, it is characterised in that：The preposition pipeline and rearmounted pipe
The ratio between the cross section in road is 4-1.5:1.
A kind of 7. pipeline configuration of vacuum equipment according to claim 1, it is characterised in that：It is provided with the rearmounted pipeline
The vacuum meter of measurement of vacuum.
A kind of 8. pipeline configuration of vacuum equipment according to claim 7, it is characterised in that：The rearmounted pipe end and institute
State and be provided with safety valve between vacuum meter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721076073.4U CN207178244U (en) | 2017-08-25 | 2017-08-25 | A kind of pipeline configuration of vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721076073.4U CN207178244U (en) | 2017-08-25 | 2017-08-25 | A kind of pipeline configuration of vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207178244U true CN207178244U (en) | 2018-04-03 |
Family
ID=61738169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721076073.4U Withdrawn - After Issue CN207178244U (en) | 2017-08-25 | 2017-08-25 | A kind of pipeline configuration of vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207178244U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107489630A (en) * | 2017-08-25 | 2017-12-19 | 宏基领先科技有限公司 | A kind of pipeline configuration of vacuum equipment |
-
2017
- 2017-08-25 CN CN201721076073.4U patent/CN207178244U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107489630A (en) * | 2017-08-25 | 2017-12-19 | 宏基领先科技有限公司 | A kind of pipeline configuration of vacuum equipment |
| CN107489630B (en) * | 2017-08-25 | 2019-05-24 | 宏基领先科技有限公司 | A kind of pipeline configuration of vacuum equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180403 Effective date of abandoning: 20190524 |