WO2010047496A2 - Conveying device having a high spraying force, and a production method for a conveying plate used in the same - Google Patents

Conveying device having a high spraying force, and a production method for a conveying plate used in the same Download PDF

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Publication number
WO2010047496A2
WO2010047496A2 PCT/KR2009/005950 KR2009005950W WO2010047496A2 WO 2010047496 A2 WO2010047496 A2 WO 2010047496A2 KR 2009005950 W KR2009005950 W KR 2009005950W WO 2010047496 A2 WO2010047496 A2 WO 2010047496A2
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WO
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Prior art keywords
air
conveying
plate
air holes
air hole
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PCT/KR2009/005950
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French (fr)
Korean (ko)
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WO2010047496A3 (en
Inventor
이재성
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Lee Jae Sung
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Publication of WO2010047496A2 publication Critical patent/WO2010047496A2/en
Publication of WO2010047496A3 publication Critical patent/WO2010047496A3/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Definitions

  • the present invention relates to a conveying apparatus, and more particularly, to a conveying apparatus and a manufacturing method thereof capable of generating a high ejection power by forming a fine gap in which air is ejected in the conveying plate.
  • in-line FPD automatic optical inspection captures an image of an inspection object using an optical lens and a CCD camera while guiding a display panel such as a TFT LCD panel, a PDP, a color filter, etc. It is a device that detects various defects that a user wants to find by applying an image processing algorithm.
  • the inline inspection equipment is largely divided into a scan section, a review section and an unlaod section for detecting a defect. It is important for these inspection equipment to accurately identify the location and size of the detected defects in order to function as an inspection system, but it guides the carrier (test object) from the scan section to the unlaod section. The role of the conveying means is also an important factor.
  • the conveying means has been disclosed a contact conveying means for conveying the carrier by the rotational force of the roller (roller), which is carried out by the rotational force of the roller, not only does not cause stains due to scratches and roller rotation in the carrier If the friction force is small or the rotational force is weak, there is a problem that smooth conveyance is difficult because the carrier is slipped.
  • non-contact conveying means for supplying compressed air to a plurality of fine air holes and floatingly conveying the aeronautical carrier body ejected from the air holes has recently been used.
  • the lower plate 10 is formed with a chamber for guiding the flow of air therein, and the compressed air flowing into the chamber is coupled to the upper portion of the lower plate 10 is ejected
  • the upper plate 20 having an air hole 21 is formed. That is, an air connector 11 for applying compressed air is formed in the lower part of the lower plate 10, and the compressed air is branched into each line in the chamber to be ejected into the air hole 21 of the upper plate 20. . Therefore, the glass placed on the upper plate 20 is floated to a certain height to be conveyed in a non-contact manner.
  • the air holes usually have a diameter of 0.3 to 0.5 mm, but these air holes appear to be small diameters, but are not so small considering that the air is ejected. Therefore, the blowing pressure of the air is lowered, which causes a problem that the force to lift the carrier also drops.
  • the present invention has been made to solve the above problems, to provide a conveying device that allows the air of the high pressure to be ejected by forming a gap of 5 / 1,000 ⁇ 1 / 100mm in the air hole.
  • the present invention provides a manufacturing method for forming a tolerance in the air hole formed in advance to form a gap as described above.
  • the present invention is a transport apparatus including a lower plate having a chamber formed therein, and a conveying plate having a plurality of air holes in contact with the upper side of the lower plate to eject the air introduced into the chamber to the upper side;
  • the lower part of the air hole is formed with a fastening portion having a larger diameter than the air hole, the fastening portion is made of a wire is inserted into the spring pin consisting of the pin portion and the coil portion, the pin portion is inserted into the air hole to form a fine gap, the coil portion is fastened
  • a conveying apparatus which is inserted into the unit.
  • the fastening portion may be formed with a female screw so that the coil portion of the spring pin is screwed.
  • the fine gap is preferably 5 / 1,000 ⁇ 1 / 100mm.
  • a process for producing a conveying plate wherein a desired air hole is processed in a desired portion of the conveying plate, and the conveying plate is acid-treated to cause tolerances in the air hole.
  • the conveying apparatus has the advantage of forming a high ejection pressure by ejecting the air into the fine gap between the pin and the air hole by fastening the spring pin to the air hole.
  • the present invention is a method of forming a tolerance in the air hole by processing a plurality of air holes and immersed in the mountain for a certain time, the tolerance of all air holes is uniform so that the air ejection of the conveying device appears uniformly throughout.
  • FIG. 1 is an exploded perspective view showing a conveying apparatus according to the prior art
  • FIG. 2 is an exploded perspective view showing a conveying apparatus according to the present invention
  • FIG. 3 is a cross-sectional view showing a conveying apparatus according to the present invention.
  • FIG. 4 is an enlarged view of a portion A of FIG. 3.
  • FIG. 2 is an exploded perspective view showing a conveying apparatus according to the present invention
  • FIG. 3 is a cross-sectional view showing the conveying apparatus according to the present invention
  • FIG. 4 is an enlarged view of portion A of FIG.
  • the conveying apparatus includes a lower plate 110, a conveying plate 120, and a spring pin 130.
  • the lower plate 110 has an air connector 101 formed on the lower surface of the lower plate 110 so that an external air supply device (not shown) is connected. And the inside of the lower plate 110 is formed a chamber to distribute the introduced air evenly.
  • the chamber is composed of an air movement passage 111 and an air branch groove 112.
  • the air moving passage 111 extends to penetrate the inner center of the lower plate 110 in left and right directions, and both ends of the air moving passage 111 are provided with a closing cap or a connection cap. That is, if the lower plate 110 is only one conveying device is to prevent the outflow of air by mounting a closing cap, the lower plate 110 may be connected to the air movement path of the other lower plate adjacent. Alternatively, since it is difficult to form the air movement path 111 to penetrate both sides in the lower plate 110, it may be for preventing after passing through for convenience in processing.
  • a plurality of air branch grooves 112 are formed on the upper surface of the lower plate 110 to cross the air movement path 110 over the entire period.
  • the air branch groove 112 communicates with the air movement path 111 and is formed so as not to penetrate to the edge side of the lower plate 110. That is, the air branch groove 112 takes the air of the air moving passage 111 and branched, and then serves to send it to the conveying plate (120).
  • the conveying plate 120 is a conveying plate which is coupled to overlap the upper plate 110 so as to be in close contact with the upper plate 110 and floats the conveying body to the upper portion thereof, and a plurality of air holes 121 are formed in the conveying plate 120. .
  • the air hole 121 receives the air ejected from the air branch groove 112 of the lower plate 110 and serves to eject more strongly upward.
  • the lower plate 110 and the conveying plate 120 formed as described above are structures commonly seen in ordinary conveying devices, and in the present invention, the spring pin 130 is disposed on the lower surface of the air hole 121 formed in the conveying plate 120. ) So that a minute gap is formed.
  • the air hole 121 must be processed so that two diameters form a step.
  • the fastening portion 122 is formed at a lower diameter than the air hole 121 at the lower side of the air hole 121, and a female thread is formed by tapping the inner surface of the fastening portion 122.
  • the air branch groove 112 supports the lower side of the spring pin 130 so that the conveying plate 120 ) And the lower plate 110 is combined does not need to consider the spring pin 130 falling.
  • the spring pin 130 is inserted into the air hole 121.
  • the reason why the spring pin 130 is used is that, since the pin itself is straight in the case of a simple pin, the pin is inserted into the air hole 121 and thus cannot be used because it cannot be fixed. Accordingly, when the spring pin 130 is used, the coil part 132 is screwed into the female thread of the fastening part 122 while the pin part 131 of the spring pin 130 is inserted into the air hole 121 to form a fine tolerance. Is coupled to it so that the spring pin 130 is not separated from the air hole 121.
  • the pin portion 131 and the air hole 121 of the spring pin 130 as described above has a tolerance of 5 / 1,000 ⁇ 1 / 100mm.
  • the micro tolerance is smaller than 5 / 1,000, it is difficult to smoothly eject air due to too small gaps, and when it is larger than 1/100, the ejection pressure is low, so that the ejection pressure is not superior to conventional conveying devices.
  • the air hole 121 wider than the diameter of the fin portion 131 may be processed.
  • the fin portion 131 which is narrower than the diameter of the air hole 121 may be processed.
  • the acid treatment is a process of coating or scraping the surface of the metal, and according to the acid treatment law according to the material of the metal, the acid concentration and time can be appropriately selected to form tolerances as desired. do.
  • the conveying plate 120 is drilled by the desired number of 0.5mm diameter on the portion to form the air hole 121.
  • the 5mm fastening part 122 is drilled in the lower part of the air hole 121, and the fastening part 122 is tapped to form a screw thread.
  • the spring pin 130 is made of a 0.5mm wire, it is produced by forming the coil portion 132 to have an elongated pin portion 131 and the outer diameter of 5mm.
  • the conveying plate 120 having the air hole 121 is placed in a tube containing acid, and immersed for a predetermined time, and subjected to acid treatment to produce a desired tolerance.
  • the condition of acid treatment is
  • the acid used in the present invention is nitric acid (NHO 3 ), and the acid concentration is prepared by adding 15 g of nitric acid per liter of water, the acid treatment temperature is 60 ° C, and the immersion time is 3 to 6 minutes.
  • the spring pin 130 is inserted below the air hole 121 of the acid plated conveying plate 120 so that the pin part 131 is inserted into the air hole 121, and then the spring pin 130 is rotated.
  • a portion 132 is to be screwed to the female screw of the fastening portion (122).
  • the spring pin 130 coupled as described above was initially an air hole 121 and a fin part 131 having the outer diameter and the inner diameter of the same dimension, but the tolerance is generated by acid treatment of the air hole 121, so that the minute clearance as much as the tolerance is achieved. Is formed.
  • the air ejection of the conveying apparatus 100 according to the present invention is ejected into a fine gap of 5 / 1,000 ⁇ 1 / 100mm, so that the ejection speed is faster and the floating force of the carrier is more excellent.

Abstract

The present invention relates to a conveying device which can spray high-pressure air by having gaps of from 5/1,000 to 1/100 mm formed at air holes, and relates to a production method for the same. The conveying device according to the present invention comprises: a lower plate having a chamber formed on the inside; a conveying plate which is hermetically attached to the upper side of the lower plate, and which has a plurality of air holes for the upward spraying of air which has flowed into the chamber; and a spring pin which is inserted from below the air holes. Here, formed on the lower part of the air holes there is a fastening part which is larger than the diameter of the air holes. The fastening part which is inserted may be a spring pin which is made of wire and which comprises a pin part and a coil part, and the pin part is inset into the air hole to form a very fine gap while the coil part is inserted into the fastening part. Meanwhile, in a production method for the conveying plate which is used in the conveying device, the desired air holes are processed into a target portion of the conveying plate, and the conveying plate is subjected to acid processing so as to produce a tolerance in the air holes.

Description

높은 분출력을 갖는 반송장치 및 이 반송장치에 사용되는 반송플레이트의 제조방법A conveying apparatus having a high split power and a method of manufacturing a conveying plate used in the conveying apparatus
본 발명은 반송장치에 관한 것으로, 더욱 상세하게는 반송판에 에어가 분출되는 미세한 틈새를 임의로 형성하여 높은 분출력을 발생시킬 수 있는 반송장치 및 이의 제조방법에 관한 것이다.The present invention relates to a conveying apparatus, and more particularly, to a conveying apparatus and a manufacturing method thereof capable of generating a high ejection power by forming a fine gap in which air is ejected in the conveying plate.
일반적으로, 인라인 검사장비(In-Line FPD Automatic Optical Inspection)는 TFT LCD 패널이나 PDP, 컬러필터 등의 디스플레이 패널(display panel) 등을 안내하면서 광학렌즈와 CCD 카메라를 사용하여 검사 대상물의 이미지를 캡쳐한 후 이미지 프로세싱 알고리즘을 적용하여 사용자가 찾아내고자 하는 각종 결함을 검출해 내는 장비이다.In general, in-line FPD automatic optical inspection captures an image of an inspection object using an optical lens and a CCD camera while guiding a display panel such as a TFT LCD panel, a PDP, a color filter, etc. It is a device that detects various defects that a user wants to find by applying an image processing algorithm.
이러한 인라인 검사장비는 크게 불량을 검출하는 스캔섹션(scan section), 리뷰섹션(review section) 및 언로딩 섹션(unlaod section)으로 분할된다. 이러한 검사장비는 검사시스템으로서의 역할을 다하기 위해서는 검출한 결함의 위치와 크기를 정확하게 알아내는 것도 중요하지만, 스캔섹션(scan section)에서부터 언로딩 섹션(unlaod section)까지 피 운반체(검사대상물)를 안내하는 반송수단의 역할 또한 중요한 요소로 작용한다.The inline inspection equipment is largely divided into a scan section, a review section and an unlaod section for detecting a defect. It is important for these inspection equipment to accurately identify the location and size of the detected defects in order to function as an inspection system, but it guides the carrier (test object) from the scan section to the unlaod section. The role of the conveying means is also an important factor.
종래 반송수단으로는 롤러(roller)의 회전력에 의해서 피 운반체를 반송하는 접촉식 반송수단이 개시된 바 있으나, 이는 롤러의 회전력에 의해서 반송이 이루어지므로 피 운반체에 스크래치 및 롤러 회전으로 인한 얼룩이 발생할 뿐만 아니라 마찰력이 작거나 회전력이 약하면 피 운반체가 미끄러지기 때문에 원활한 반송이 어려운 문제점이 있었다.Conventionally, the conveying means has been disclosed a contact conveying means for conveying the carrier by the rotational force of the roller (roller), which is carried out by the rotational force of the roller, not only does not cause stains due to scratches and roller rotation in the carrier If the friction force is small or the rotational force is weak, there is a problem that smooth conveyance is difficult because the carrier is slipped.
전술한 문제점을 해결하고자 최근에는 미세한 다수의 에어홀에 압축에어를 공급하고 에어홀에서 분출되는 에어로 피 운반체를 부상 반송하는 비접촉식 반송수단이 이용되고 있다.In order to solve the above-mentioned problems, non-contact conveying means for supplying compressed air to a plurality of fine air holes and floatingly conveying the aeronautical carrier body ejected from the air holes has recently been used.
비접촉식 반송 플레이트의 구성을 간략하게 살펴보면, 도 1에서 보는 바와 같이 내부에 에어의 흐름을 안내하는 챔버가 형성된 하판(10)과, 하판(10)의 상부에 결합되어 챔버로 유입되는 압축에어를 분출하는 에어홀(21)을 갖는 상판(20)으로 구성된다. 즉, 하판(10)의 하부에는 압축에어를 인가시키기 위한 에어커넥터(11)가 형성되고, 이 압축에어를 챔버에서 각 라인으로 분기시켜 상판(20)의 에어홀(21)로 분출시키게 되는 것이다. 따라서 상판(20)위에 얹혀진 글라스가 일정 높이로 부상되어 비접촉식 반송되게 된다.Looking at the configuration of the non-contact conveying plate briefly, as shown in Figure 1, the lower plate 10 is formed with a chamber for guiding the flow of air therein, and the compressed air flowing into the chamber is coupled to the upper portion of the lower plate 10 is ejected The upper plate 20 having an air hole 21 is formed. That is, an air connector 11 for applying compressed air is formed in the lower part of the lower plate 10, and the compressed air is branched into each line in the chamber to be ejected into the air hole 21 of the upper plate 20. . Therefore, the glass placed on the upper plate 20 is floated to a certain height to be conveyed in a non-contact manner.
여기에서, 통상 에어홀의 직경은 0.3~0.5mm를 갖게 이러한 에어홀은 작은 직경으로 보이지만 에어가 분출되는 것을 고려하면 그리 작은 홀은 아니게 된다. 따라서 에어의 분출 압력이 낮아지게 되고, 이로 인해 반송체를 부상시키는 힘도 떨어지게 되는 문제가 발생된다.Here, the air holes usually have a diameter of 0.3 to 0.5 mm, but these air holes appear to be small diameters, but are not so small considering that the air is ejected. Therefore, the blowing pressure of the air is lowered, which causes a problem that the force to lift the carrier also drops.
또는, 에어홀에 암나사를 형성하고, 이 에어홀에 분출볼트를 나사 결합시켜 수나사와 암나사의 틈새로 에어를 분출시키는 방법이 제시된 바 있으나, 이러한 나사산의 틈새로 에어를 분출시키는 방법은 나사산의 공차에 의해 때로는 막히는 현상이 발생되기도 하고, 때로는 과다한 에어가 분출되기도 하는 문제점이 있었다. Alternatively, a method of forming a female thread in the air hole and screwing the ejection bolt into the air hole to eject the air into the gap between the male thread and the female thread has been proposed.However, the method of ejecting the air through the gap between the thread has a thread tolerance. There is a problem that sometimes clogging occurs, and sometimes excess air is ejected.
본 발명은 상기와 같은 문제점을 해결하기 위해 안출된 것으로, 에어홀에 5/1,000 ~ 1/100mm의 틈새가 형성되도록 하여 고압의 에어가 분출되도록 할 수 있는 반송장치를 제공하는데 있다.The present invention has been made to solve the above problems, to provide a conveying device that allows the air of the high pressure to be ejected by forming a gap of 5 / 1,000 ~ 1 / 100mm in the air hole.
또한, 상기와 같은 틈새를 형성하기 위해 기형성된 에어홀에 공차를 형성시키는 제조방법을 제공하는데 있다.In addition, the present invention provides a manufacturing method for forming a tolerance in the air hole formed in advance to form a gap as described above.
상기와 같은 과제를 해결하기 위해 본 발명은, 내부에 챔버가 형성된 하판과, 하판의 상측에 밀착되어 챔버내로 유입된 에어를 상측으로 분출시키도록 다수의 에어홀을 갖는 반송플레이트를 포함하는 반송장치에 있어서,In order to solve the above problems, the present invention is a transport apparatus including a lower plate having a chamber formed therein, and a conveying plate having a plurality of air holes in contact with the upper side of the lower plate to eject the air introduced into the chamber to the upper side; To
에어홀의 하부에는 에어홀의 구경보다 더 큰 구경을 갖는 체결부가 형성되고, 체결부로는 와이어로 제작되어 핀부와 코일부로 구성된 스프링핀이 삽입되되, 핀부는 에어홀로 끼워져 미세틈새를 형성시키며, 코일부는 체결부에 삽입됨을 특징으로 하는 반송장치를 제공한다.The lower part of the air hole is formed with a fastening portion having a larger diameter than the air hole, the fastening portion is made of a wire is inserted into the spring pin consisting of the pin portion and the coil portion, the pin portion is inserted into the air hole to form a fine gap, the coil portion is fastened Provided is a conveying apparatus which is inserted into the unit.
이때, 체결부에는 스프링핀의 코일부가 나사결합되도록 암나사가 형성될 수 있다.At this time, the fastening portion may be formed with a female screw so that the coil portion of the spring pin is screwed.
그리고 미세틈새는 5/1,000 ~ 1/100mm 임이 바람직하다.And the fine gap is preferably 5 / 1,000 ~ 1 / 100mm.
또는, 상기와 같은 반송장치에 사용되는 반송플레이트의 제조방법에 있어서,Or in the manufacturing method of the conveying plate used for the above conveying apparatus,
반송플레이트의 원하는 부분에 목적하는 에어홀을 가공하고, 반송플레이트를 산처리하여 에어홀에 공차가 생기도록 함을 특징으로 하는 반송플레이트의 제조방법을 제공한다.A process for producing a conveying plate is provided, wherein a desired air hole is processed in a desired portion of the conveying plate, and the conveying plate is acid-treated to cause tolerances in the air hole.
전술한 바와 같이 본 발명에 따른 반송장치는 스프링핀을 에어홀에 체결하여 핀과 에어홀의 미세 틈새로 에어를 분출시켜 높은 분출압을 형성시킬 수 있는 잇점이 있다.As described above, the conveying apparatus according to the present invention has the advantage of forming a high ejection pressure by ejecting the air into the fine gap between the pin and the air hole by fastening the spring pin to the air hole.
또한, 본 발명은 다수의 에어홀을 가공한 뒤 산에 일정시간 침지시켜 에어홀에 공차를 형성하는 방법으로, 모든 에어홀의 공차가 균일하여 반송장치의 에어분출이 전구간에 걸쳐 균일하게 나타나도록 할 수 있는 잇점이 있게 된다.In addition, the present invention is a method of forming a tolerance in the air hole by processing a plurality of air holes and immersed in the mountain for a certain time, the tolerance of all air holes is uniform so that the air ejection of the conveying device appears uniformly throughout There are advantages to it.
또한, 에어홀의 공차 형성이 간단한 방법으로 이루어지므로 반송장치의 제작시간이 단축되고, 제작비용이 절감되는 잇점이 뒤따르게 된다.In addition, since the formation of the tolerance of the air hole is made in a simple manner, the manufacturing time of the conveying apparatus is shortened, and the manufacturing cost is reduced.
도 1은 종래기술에 따른 반송장치를 나타낸 분해사시도이고,1 is an exploded perspective view showing a conveying apparatus according to the prior art,
도 2는 본 발명에 따른 반송장치를 나타낸 분해사시도이고,2 is an exploded perspective view showing a conveying apparatus according to the present invention,
도 3은 본 발명에 따른 반송장치를 나타낸 단면도이며, 그리고3 is a cross-sectional view showing a conveying apparatus according to the present invention, and
도 4는 도 3의 A부분 확대도이다.4 is an enlarged view of a portion A of FIG. 3.
이하, 첨부된 도면들을 참조하여 본 발명의 바람직한 실시예에 따른 반송장치 및 이의 제조방법을 설명한다.Hereinafter, a conveying apparatus and a manufacturing method thereof according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings.
도 2는 본 발명에 따른 반송장치를 나타낸 분해사시도이고, 도 3은 본 발명에 따른 반송장치를 나타낸 단면도이며, 그리고 도 4는 도 3의 A부분 확대도이다.2 is an exploded perspective view showing a conveying apparatus according to the present invention, FIG. 3 is a cross-sectional view showing the conveying apparatus according to the present invention, and FIG. 4 is an enlarged view of portion A of FIG.
도 2 내지 도 4를 참고하면, 본 발명에 따른 반송장치는 하판(110), 반송플레이트(120) 및 스프링핀(130)을 포함한다.2 to 4, the conveying apparatus according to the present invention includes a lower plate 110, a conveying plate 120, and a spring pin 130.
하판(110)은 외부의 에어공급장치(도시되지 않음)가 연결되도록 하판(110)의 하부면상에 에어커넥터(101)가 형성된다. 그리고 하판(110)의 내부에는 유입된 에어를 골고루 분포되게 해주는 챔버가 형성된다. 바람직하게는 챔버는 에어이동통로(111)와 에어분기홈(112)으로 구성된다.The lower plate 110 has an air connector 101 formed on the lower surface of the lower plate 110 so that an external air supply device (not shown) is connected. And the inside of the lower plate 110 is formed a chamber to distribute the introduced air evenly. Preferably, the chamber is composed of an air movement passage 111 and an air branch groove 112.
에어이동통로(111)는 하판(110)의 내부 중앙을 좌우방향으로 관통되도록 연장되는 것으로, 에어이동통로(111)의 양단에는 마감캡이나 연결캡이 장착된다. 즉, 하판(110)이 하나로만 된 반송장치일 경우에는 마감캡을 장착하여 에어의 유출을 막는 것이고, 하판(110)이 여러 개일 경우에는 이웃한 다른 하판의 에어이동통로와 연결될 수도 있는 것이다. 또는, 하판(110)의 내부에 양측으로 관통되도록 에어이동통로(111)를 형성시키기 어려우므로 가공상 편리하도록 관통시킨 후, 막기 위함일 수도 있다.The air moving passage 111 extends to penetrate the inner center of the lower plate 110 in left and right directions, and both ends of the air moving passage 111 are provided with a closing cap or a connection cap. That is, if the lower plate 110 is only one conveying device is to prevent the outflow of air by mounting a closing cap, the lower plate 110 may be connected to the air movement path of the other lower plate adjacent. Alternatively, since it is difficult to form the air movement path 111 to penetrate both sides in the lower plate 110, it may be for preventing after passing through for convenience in processing.
한편, 하판(110)의 상부면상에는 에어이동통로(110)와 교차하도록 전구간에 걸쳐 다수의 에어분기홈(112)이 형성된다. 이 에어분기홈(112)은 에어이동통로(111)와 연통되며, 하판(110)의 모서리측으로 관통되지 않게 형성된다. 즉, 에어분기홈(112)은 에어이동통로(111)의 에어를 이어 받아 분기시킨후, 반송플레이트(120)로 올려 보내주는 역할을 수행한다.On the other hand, a plurality of air branch grooves 112 are formed on the upper surface of the lower plate 110 to cross the air movement path 110 over the entire period. The air branch groove 112 communicates with the air movement path 111 and is formed so as not to penetrate to the edge side of the lower plate 110. That is, the air branch groove 112 takes the air of the air moving passage 111 and branched, and then serves to send it to the conveying plate (120).
반송플레이트(120)는 하판(110)의 상부에 밀착되도록 겹쳐지게 결합되어 그 상부로 반송체를 부상시켜 이송시켜주는 반송플레이트로서, 반송플레이트(120)에는 다수의 에어홀(121)이 형성된다. 이러한 에어홀(121)은 하판(110)의 에어분기홈(112)에서 분출되는 에어를 이어 받아 상측으로 더욱 강력하게 분출시켜주는 역할을 수행한다.The conveying plate 120 is a conveying plate which is coupled to overlap the upper plate 110 so as to be in close contact with the upper plate 110 and floats the conveying body to the upper portion thereof, and a plurality of air holes 121 are formed in the conveying plate 120. . The air hole 121 receives the air ejected from the air branch groove 112 of the lower plate 110 and serves to eject more strongly upward.
상기와 같이 형성된 하판(110) 및 반송플레이트(120)는 보통의 반송장치에서 흔히 볼 수 있는 구조이며, 본 발명에서는 반송플레이트(120)에 형성된 에어홀(121)의 하부면상에 스프링핀(130)을 장착하여 미세한 틈새가 형성되도록 하는 것이 특징이다.The lower plate 110 and the conveying plate 120 formed as described above are structures commonly seen in ordinary conveying devices, and in the present invention, the spring pin 130 is disposed on the lower surface of the air hole 121 formed in the conveying plate 120. ) So that a minute gap is formed.
즉, 스프링핀(130)이 장착되기 위해 에어홀(121)은 두개의 직경이 단차를 이루도록 가공되어야 한다. 다시 말해 에어홀(121)의 하측에는 에어홀(121)보다 넓은구경으로 체결부(122)를 형성하고, 체결부(122)의 내면상에 탭가공을 하여 암나사를 형성한다. 이때, 암나사를 형성시키지 않아도 스프링핀(130)의 결합에는 아무런 문제가 없게 된다. 즉, 스프링핀(130)의 나사체결은 스프링핀(130)이 자중에 의해 낙하되는 것을 방지하기 위함이지만, 스프링핀(130)의 하측을 에어분기홈(112)이 받쳐주기 때문에 반송플레이트(120) 및 하판(110)이 결합된 후에는 스프링핀(130)의 낙하를 고려하지 않아도 된다.That is, in order for the spring pin 130 to be mounted, the air hole 121 must be processed so that two diameters form a step. In other words, the fastening portion 122 is formed at a lower diameter than the air hole 121 at the lower side of the air hole 121, and a female thread is formed by tapping the inner surface of the fastening portion 122. At this time, there is no problem in the coupling of the spring pin 130 even if the female screw is not formed. That is, although the screwing of the spring pin 130 is to prevent the spring pin 130 from falling by its own weight, the air branch groove 112 supports the lower side of the spring pin 130 so that the conveying plate 120 ) And the lower plate 110 is combined does not need to consider the spring pin 130 falling.
이러한 에어홀(121)에 스프링핀(130)을 삽입한다. 여기에서, 굳이 스프링핀(130)을 사용하는 이유는, 단순한 핀일 경우에는 핀 자체가 일자형이기 때문에 핀이 에어홀(121)에 삽입된 후, 고정되지 못하고 빠지기 때문에 사용될 수 없는 것이다. 따라서 스프링핀(130)을 사용하게 되면, 스프링핀(130)의 핀부(131)가 에어홀(121)에 삽입되어 미세공차를 형성하면서 코일부(132)가 체결부(122)의 암나사에 나사결합되어 스프링핀(130)을 에어홀(121)로부터 이탈되지 않도록 할 수 있는 것이다.The spring pin 130 is inserted into the air hole 121. In this case, the reason why the spring pin 130 is used is that, since the pin itself is straight in the case of a simple pin, the pin is inserted into the air hole 121 and thus cannot be used because it cannot be fixed. Accordingly, when the spring pin 130 is used, the coil part 132 is screwed into the female thread of the fastening part 122 while the pin part 131 of the spring pin 130 is inserted into the air hole 121 to form a fine tolerance. Is coupled to it so that the spring pin 130 is not separated from the air hole 121.
이와 같은 스프링핀(130)의 핀부(131)와 에어홀(121)은 5/1,000 ~ 1/100mm의 공차를 갖는다. 여기에서 미세공차가 5/1,000보다 작게 되면, 너무 미세한 틈새로 인해 원활한 에어분출이 어렵게 되고, 1/100보다 크게 되면 분출압력이 낮아 기존의 반송장치들에 비해 월등한 분출압력을 갖지 않게 된다.The pin portion 131 and the air hole 121 of the spring pin 130 as described above has a tolerance of 5 / 1,000 ~ 1 / 100mm. In this case, when the micro tolerance is smaller than 5 / 1,000, it is difficult to smoothly eject air due to too small gaps, and when it is larger than 1/100, the ejection pressure is low, so that the ejection pressure is not superior to conventional conveying devices.
이러한 공차를 형성하기 위한 방법으로는, 핀부(131)의 직경보다 공차만큼의 넓은 에어홀(121)을 가공하면된다. 또는, 에어홀(121)의 직경보다 공차만큼의 좁은 핀부(131)를 가공하면 된다.As a method for forming such a tolerance, the air hole 121 wider than the diameter of the fin portion 131 may be processed. Alternatively, the fin portion 131 which is narrower than the diameter of the air hole 121 may be processed.
그러나 위와 같은 제시는 흔히 발상해 낼 수 없는 부분이면서도 그 목적을 달성하기 위해서는 정밀가공을 통해서만 이루어지기 때문에 막대한 제작비용이 소요되게 된다.However, the above presentation is often a part that cannot be conceived, but in order to achieve the purpose is made only through precision processing, it requires a huge production cost.
따라서 본 발명자는 이와 같은 공차의 형성방법을 산처리에 의해 제작하는 것을 고려하여 달성하게 되었다.Accordingly, the inventors have achieved this in consideration of the production of such tolerances by acid treatment.
즉, 산처리는 금속의 표면에 피막을 입히거나, 표면을 깎아 낼 수 있는 공정으로, 금속의 재질에 따른 산처리 법칙에 의해 산의 농도와 시간을 적절히 선택하여 원하는 만큼의 공차를 형성시킬 수 있게 된다.In other words, the acid treatment is a process of coating or scraping the surface of the metal, and according to the acid treatment law according to the material of the metal, the acid concentration and time can be appropriately selected to form tolerances as desired. do.
일예를 들어보면,For example,
반송플레이트(120)의 제조방법은 에어홀(121)을 형성하고자 하는 부분에 0.5mm의 구경으로 원하는 개수만큼 드릴링 가공한다.In the manufacturing method of the conveying plate 120 is drilled by the desired number of 0.5mm diameter on the portion to form the air hole 121.
그리고 에어홀(121)의 하부에 5mm의 체결부(122)를 드릴링하고, 다시 체결부(122)에 탭가공을 하여 나사산을 형성한다.Then, the 5mm fastening part 122 is drilled in the lower part of the air hole 121, and the fastening part 122 is tapped to form a screw thread.
또한, 스프링핀(130)은 0.5mm의 와이어로 제작하되, 길쭉한 핀부(131)와 5mm의 외경을 갖도록 코일부(132)를 형성하여 제작된다.In addition, the spring pin 130 is made of a 0.5mm wire, it is produced by forming the coil portion 132 to have an elongated pin portion 131 and the outer diameter of 5mm.
다음은 에어홀(121)이 형성된 반송플레이트(120)를 산이 담겨진 통속에 넣고 일정시간 침지시켜 원하는 공차가 생기도록 산처리한다.Next, the conveying plate 120 having the air hole 121 is placed in a tube containing acid, and immersed for a predetermined time, and subjected to acid treatment to produce a desired tolerance.
산처리의 조건은,The condition of acid treatment is
본 발명에서 사용되는 산은 질산(NHO3)이고, 산의 농도는 물1ℓ당 질산15g을 첨가하여 준비하고, 산처리 온도는 60℃이며, 침지 시간은 3~6분이다.The acid used in the present invention is nitric acid (NHO 3 ), and the acid concentration is prepared by adding 15 g of nitric acid per liter of water, the acid treatment temperature is 60 ° C, and the immersion time is 3 to 6 minutes.
이와 같이 산처리된 반송플레이트(120)의 에어홀(121)하부에 스프링핀(130)을 끼워 핀부(131)가 에어홀(121)로 삽입되도록 한 후, 스프링핀(130)을 회전시켜 코일부(132)가 체결부(122)의 암나사에 나사결합되도록 한다.The spring pin 130 is inserted below the air hole 121 of the acid plated conveying plate 120 so that the pin part 131 is inserted into the air hole 121, and then the spring pin 130 is rotated. A portion 132 is to be screwed to the female screw of the fastening portion (122).
이와 같이 결합된 스프링핀(130)은 최초에는 동일한 치수의 외경과 내경을 갖는 에어홀(121)과 핀부(131)였지만, 에어홀(121)의 산처리에 의해 공차가 생겨 공차만큼의 미세한 틈새가 형성된 것이다.The spring pin 130 coupled as described above was initially an air hole 121 and a fin part 131 having the outer diameter and the inner diameter of the same dimension, but the tolerance is generated by acid treatment of the air hole 121, so that the minute clearance as much as the tolerance is achieved. Is formed.
따라서 본 발명에 따른 반송장치(100)의 에어분출은 5/1,000 ~ 1/100mm의 미세틈새로 분출되기 때문에 분출속도가 빨라 반송체의 부상력이 더욱 뛰어나게 된다.Therefore, the air ejection of the conveying apparatus 100 according to the present invention is ejected into a fine gap of 5 / 1,000 ~ 1 / 100mm, so that the ejection speed is faster and the floating force of the carrier is more excellent.
상기에서는 본 발명의 바람직한 실시예를 참조하여 설명하였지만, 해당기술분야의 숙련된 당업자는 특허청구범위에 기재된 본 발명의 사상 및 영역으로부터 벗어나지 않는 범위내에서 본 발명을 다양하게 수정 및 변경시킬 수 있음을 이해할 수 있을 것이다.Although described above with reference to a preferred embodiment of the present invention, those skilled in the art can be variously modified and changed within the scope of the invention without departing from the spirit and scope of the invention described in the claims You will understand.

Claims (3)

  1. 내부에 챔버가 형성된 하판(110)과, 상기 하판(110)의 상측에 밀착되어 상기 챔버내로 유입된 에어를 상측으로 분출시키도록 다수의 에어홀(121)을 갖는 반송플레이트(120)를 포함하는 반송장치에 있어서,A lower plate 110 having a chamber formed therein, and a conveying plate 120 having a plurality of air holes 121 to be in close contact with an upper side of the lower plate 110 to eject air introduced into the chamber to an upper side thereof. In the conveying apparatus,
    상기 에어홀(121)의 하부에는 상기 에어홀(121)의 구경보다 더 큰 구경을 갖는 체결부(122)가 형성되고, 상기 체결부(122)로는 와이어로 제작되어 핀부(131)와 코일부(132)로 구성된 스프링핀(130)이 삽입되되, 상기 핀부(131)는 상기 에어홀(121)로 끼워져 미세틈새를 형성시키며, 상기 코일부(132)는 상기 체결부(122)에 삽입됨을 특징으로 하는 반송장치.The lower portion of the air hole 121 is formed with a fastening portion 122 having a larger diameter than the aperture of the air hole 121, the fastening portion 122 is made of a wire to the pin portion 131 and the coil portion Spring pin 130 is composed of 132 is inserted, the pin portion 131 is inserted into the air hole 121 to form a fine gap, the coil portion 132 is inserted into the fastening portion 122 Characterized in that the conveying apparatus.
  2. 제 1 항에 있어서, 상기 체결부(122)에는 상기 스프링핀(130)의 코일부(132)가 나사결합되도록 암나사가 형성됨을 특징으로 하는 반송장치.The conveying apparatus according to claim 1, wherein the fastening part (122) is formed with a female screw to screw the coil part (132) of the spring pin (130).
  3. 제 1 항에 있어서, 상기 미세틈새는 5/1,000 ~ 1/100mm 임을 특징으로 하는 반송장치.The conveying apparatus of claim 1, wherein the fine gap is 5 / 1,000 to 1/100 mm.
PCT/KR2009/005950 2008-10-22 2009-10-15 Conveying device having a high spraying force, and a production method for a conveying plate used in the same WO2010047496A2 (en)

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PCT/KR2009/005950 WO2010047496A2 (en) 2008-10-22 2009-10-15 Conveying device having a high spraying force, and a production method for a conveying plate used in the same

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KR101403978B1 (en) * 2012-07-03 2014-06-17 주식회사 에스씨씨에스 Apparatus for relaying communication signal to protecting building
KR101577750B1 (en) * 2014-02-24 2015-12-16 오케이통신 (주) System of emergency call based on IP PBX
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KR100757203B1 (en) * 2006-04-27 2007-09-10 (주) 티피씨 메카트로닉스 Positioning for air floating device
KR100886968B1 (en) * 2008-10-22 2009-03-09 이재성 A conveying plate and manufacturing method of thereof

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KR20100044538A (en) 2010-04-30
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