WO2010023766A1 - Capteur de déplacement - Google Patents

Capteur de déplacement Download PDF

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Publication number
WO2010023766A1
WO2010023766A1 PCT/JP2008/065692 JP2008065692W WO2010023766A1 WO 2010023766 A1 WO2010023766 A1 WO 2010023766A1 JP 2008065692 W JP2008065692 W JP 2008065692W WO 2010023766 A1 WO2010023766 A1 WO 2010023766A1
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WO
WIPO (PCT)
Prior art keywords
electrode
capacitance
displacement
displacement sensor
movable structure
Prior art date
Application number
PCT/JP2008/065692
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English (en)
Japanese (ja)
Inventor
昌弘 石杜
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パイオニア株式会社
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Publication date
Application filed by パイオニア株式会社 filed Critical パイオニア株式会社
Priority to PCT/JP2008/065692 priority Critical patent/WO2010023766A1/fr
Publication of WO2010023766A1 publication Critical patent/WO2010023766A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Definitions

  • the present invention relates to a displacement sensor that measures the displacement of a movable part based on a change in capacitance.
  • Non-Patent Document 1 describes a capacitance-type displacement sensor in which comb-shaped electrodes in which linear electrodes are periodically arranged are formed below the movable structure.
  • Patent Document 1 describes a technique for realizing a capacitor by forming concave and convex grooves in a movable structure.
  • Non-Patent Document 1 may cause a phase error or a capacitance error due to processing variations or misalignment. In this case, the displacement sensor is affected by these errors, and the accuracy (sensitivity) of displacement measurement decreases. Further, since the cycle of the electrodes used in this displacement sensor is set to be equal to or greater than the maximum displacement of the movable structure, it is impossible to detect a highly sensitive displacement when the maximum displacement is large. Non-Patent Document 1 does not describe any of these problems.
  • Patent Document 1 the capacitor described in Patent Document 1 is used only as an actuator and is not used as a sensor.
  • Examples of problems to be solved by the present invention include the above. It is an object of the present invention to realize high-resolution detection even for large displacements while reducing phase errors and capacitance errors caused by processing variations and misalignment in a capacitance type displacement sensor. And
  • a displacement sensor that measures displacement based on a change in capacitance, the first electrode having comb teeth formed on the same surface according to a predetermined period, and the first electrode A second electrode having comb teeth that are alternately arranged on the same plane as the comb teeth of the electrode, and a facing surface parallel to the first and second electrodes at a predetermined interval, and the surface of the facing surface A movable structure that is displaced inwardly, the movable structure being adjacent to the first region and the first region arranged at the predetermined period on the facing surface. And a second region formed alternately with each other, and the capacitance per unit area of the capacitor formed by the first region and the first electrode is the second region. Different from the capacitance per unit area of the capacitor formed by the first electrode And wherein the door.
  • a displacement sensor that measures displacement based on a change in capacitance, the first electrode having comb teeth formed on the same surface according to a predetermined period, and the first electrode A second electrode having comb teeth that are alternately arranged on the same plane as the comb teeth of the electrode, and a facing surface parallel to the first and second electrodes at a predetermined interval, and within the surface of the facing surface A movable structure that is displaced in a direction, wherein the movable structure has a first region that is arranged at the predetermined period on the facing surface, and is adjacent to the first region and the first region. Second regions formed alternately, and the capacitance per unit area of the capacitor formed by the first region and the first electrode is the second region and the second region. It differs from the capacitance per unit area of the capacitor formed by the first electrode.
  • the above displacement sensor has a first electrode, a second electrode, and a movable structure, and detects the displacement of the movable structure.
  • the first electrode has a plurality of comb teeth formed on the same surface according to a predetermined cycle.
  • the second electrode has comb teeth that are alternately arranged on the same plane as the comb teeth of the first electrode.
  • the movable structure has a facing surface parallel to the first and second electrodes at a predetermined interval, and is displaced in the in-plane direction.
  • the movable structure is formed on the opposite side, the first region arranged at the same period as the period of the comb teeth of the first electrode, adjacent to the first region, and alternately arranged with the first region. And a second region.
  • the first and second electrodes form a capacitor with the first and second regions.
  • the capacitance per unit area of the capacitor formed by the first region and the first electrode is different from the capacitance per unit area of the capacitor formed by the second region and the first electrode. .
  • the capacitance per unit area of the capacitor formed by the first region and the second electrode is equal to the capacitance per unit area of the capacitor formed by the second region and the second electrode.
  • the displacement sensor can differentially detect the displacement based on the capacitance detected from the first electrode and the capacitance detected from the second electrode. Further, by performing differential detection, in-phase noise based on temperature fluctuations, vibrations, and the like can be removed. Furthermore, by arranging the comb teeth of the first electrode and the comb teeth of the second electrode alternately, the displacement sensor also reduces phase errors and capacitance errors due to processing variations and misalignment. can do.
  • the facing surface has a concavo-convex structure
  • the first region is a convex portion of the concavo-convex structure
  • the second region is a concave portion of the concavo-convex structure.
  • the convex portion and the concave portion are the same member.
  • the capacitance of the capacitor is inversely proportional to the distance between the pair of electrodes constituting the capacitor. Therefore, according to this aspect, the displacement sensor has a capacitance per unit area of the capacitor formed by the first region and the first electrode, and a unit of the capacitor formed by the second region and the first electrode. A difference can be provided between the capacitance per area.
  • the first region is defined by an electrode foil formed on the movable structure.
  • the electrode foil is periodically formed on the surface facing the first and second electrodes of the movable structure.
  • This electrode foil is formed, for example, by a method such as vapor deposition of metal particles through a mask, sputtering, or etching.
  • the displacement sensor can perform differential detection by making the movable structure an insulator.
  • the rate of change in capacitance with respect to the displacement can be increased. That is, the displacement sensor can perform differential detection with high sensitivity.
  • the predetermined period is smaller than the maximum displacement of the movable structure in the direction in which the comb teeth are arranged.
  • the period of the comb teeth is reduced, and the rate of change in capacitance with respect to the amount of displacement is increased.
  • the displacement sensor can perform differential detection with high sensitivity.
  • the first capacitance that is electrically connected to the first and second electrodes and is detected from the first electrode, and the detection is performed from the second electrode.
  • a detection unit that detects the amount of displacement of the movable structure based on the second capacitance.
  • the detection unit converts the first capacitance and the second capacitance into voltage values and differentially amplifies the output voltage values. Based on this, the amount of displacement is detected.
  • the detection unit calculates the output voltage value by converting the first capacitance and the second capacitance into voltage values and differentially amplifying them. This output voltage value changes periodically based on the amount of displacement. Further, the cycle of the output voltage value has a correspondence relationship with the cycle of the voltage line arrangement. Therefore, the detection unit can appropriately detect the displacement amount by monitoring the output voltage value.
  • the detection unit detects a displacement based on the number of fluctuation periods of the output voltage value and the output voltage value. By doing in this way, the detection part can detect a displacement appropriately also with respect to the large displacement more than the period of the arrangement
  • FIG. 1 shows an example of an exploded perspective view of a displacement sensor 100 in the present embodiment.
  • FIG. 2 shows an example of a cross-sectional view taken along a cutting plane AA ′ of the displacement sensor 100.
  • the displacement sensor 100 includes a movable structure 1, a support substrate 2, a frame portion 3, a support spring 4, and an electrode pair 10.
  • the displacement sensor 100 is a sensor that detects the displacement of the movable structure 1 in the x-axis direction.
  • the displacement sensor 100 performs differential detection based on the capacitance detected from the electrode pair 10 as will be described later.
  • the movable structure 1 is a member (electrode) that can be displaced in the x-axis direction and the y-axis direction shown in FIG.
  • the movable structure 1 is connected to the support spring 4 and is displaced within the space defined by the frame portion 3.
  • the movable structure 1, the frame portion 3, and the support spring 4 are made of, for example, a silicon substrate, and more specifically, are formed by performing MEMS (Micro Electro Mechanical Systems) processing on the silicon substrate.
  • MEMS Micro Electro Mechanical Systems
  • An uneven portion 11 is formed on the lower surface of the movable structure 1, that is, on the surface (facing the surface) facing the electrode pair 10 and the support substrate 2.
  • the concavo-convex portion 11 includes a convex portion 11a and a concave portion 11b.
  • the concavo-convex part 11 is arranged so as to face the electrode pair 10 in parallel, that is, to face each other. Thereby, the uneven part 11 and the electrode pair 10 form a capacitor. That is, the concavo-convex portion 11 made of a silicon material functions as a capacitor electrode.
  • the concavo-convex portion 11 is made of the same member as the movable structure 1.
  • the convex part 11a corresponds to the 1st area
  • the recessed part 11b corresponds to the 2nd area
  • the frame 3 is connected to the support spring 4 and is formed so as to surround the movable structure 1. As shown in FIG. 2, the frame portion 3 is joined to the support substrate 2 so that the concavo-convex portion 11 and the electrode pair 10 face each other. Specifically, the frame portion 3 and the support substrate 2 are bonded using a bonding technique such as anodic bonding, fusion bonding, direct bonding, or plasma activated bonding.
  • a bonding technique such as anodic bonding, fusion bonding, direct bonding, or plasma activated bonding.
  • the support substrate 2 is made of glass, for example, and has a rectangular recess (indentation) 7 on the upper surface portion facing the movable structure 1.
  • the recess 7 of the support substrate 2 has a larger area than the lower surface of the movable structure 1 as shown in FIG.
  • the electrode pair 10 is disposed in the recess 7.
  • the electrode pair 10 includes a first electrode 10a and a second electrode 10b.
  • the first electrode 10a has a comb-tooth structure. That is, the surface of the first electrode 10a has a plurality of comb teeth 10ax that are located in parallel with the xy plane in FIG. 1 and extend in the negative direction of the y-axis.
  • the second electrode 10b Similar to the first electrode 10a, the second electrode 10b has a comb-tooth structure. That is, the surface of the second electrode 10b has a plurality of comb teeth 10bx that are located in parallel with the xy plane in FIG. 1 and extend in the positive direction of the y-axis.
  • the comb teeth 10ax of the first electrode 10a and the comb teeth 10bx of the second electrode 10b are alternately arranged on the same plane (xy plane), that is, comb each other. It arrange
  • the electrode pair 10 is made of, for example, platinum and chromium, or aluminum, or platinum and titanium.
  • FIG. 3 is an example of an enlarged view of a part of the capacitor formed by the electrode pair 10 and the uneven portion 11.
  • FIG. 3 for convenience of illustration, only the convex portion 11a of the concave and convex portion 11 is illustrated.
  • the plurality of comb teeth 10 ax of the first electrode 10 a are formed with a predetermined period P.
  • the plurality of comb teeth 10bx of the second electrode 10b are formed with the same period P.
  • the comb teeth 10ax of the first electrode 10a and the comb teeth 10bx of the second electrode 10b are arranged alternately in the x direction on the same plane.
  • the concavo-convex portion 11 is formed with a period P as shown in FIG.
  • the convex portion 11a faces the comb teeth 10ax in a state where the movable structure 1 is not displaced. That is, each convex part 11a has the largest overlap (opposite area) in the xy plane with the comb teeth 10ax of the first electrode 10a. And the recessed part 11b opposes the comb-tooth 10bx of the 2nd electrode 10b in the state without a displacement.
  • the capacitor formed by the electrode pair 10 and the concavo-convex portion 11 has a predetermined capacitance.
  • first capacitance C1 the capacitance of the capacitor formed by the first electrode 10a and the concavo-convex portion 11
  • second capacitance C2 the capacitance of the capacitor formed by the second electrode 10b and the concavo-convex portion 11
  • FIG. 4A shows an example of a graph of changes in the first capacitance C1 and the second capacitance C2 due to the displacement of the movable structure 1.
  • a horizontal axis shows the displacement amount of the movable structure 1
  • shaft shows an electrostatic capacitance.
  • the “displacement amount” indicates a value (distance) by which the movable structure 1 is displaced in the detection direction, that is, the x-axis direction in which the comb teeth 10ax and 10bx are arranged.
  • the distance between the electrode pair 10 and the convex portion 11a is smaller than the distance between the electrode pair 10 and the concave portion 11b.
  • the electrostatic capacity is inversely proportional to the distance between the pair of electrodes constituting the capacitor, and the convex portion 11a is the same member as the concave portion 11b. Accordingly, the capacitance per unit area of the capacitor formed by the convex portion 11 a and the electrode pair 10 is larger than the capacitance per unit area of the capacitor formed by the concave portion 11 b and the electrode pair 10.
  • the first electrode 10a faces the convex portion 11a and forms a capacitor with the convex portion 11a in a state where there is no displacement.
  • the first capacitance C1 takes the maximum value “Cmax” as shown in FIG. 4A in a state where there is no displacement.
  • the second electrode 10b is opposed to the recess 11b and forms a capacitor with the recess 11b. Therefore, the second capacitance C2 takes the minimum value “Cmin” in a state where there is no displacement. Note that the phases of the capacitances C1 and C2 in a state where there is no displacement are not limited to those in FIG. 4 and may be set to any state.
  • the area of the capacitor formed by the first electrode 10a and the recess 11b increases, and the first The area of the capacitor formed by the electrode 10a and the convex portion 11a (that is, the area where the first electrode 10a and the plurality of concave portions 11b face each other) decreases. Therefore, the first capacitance C1 decreases until the displacement amount reaches P / 2, that is, until the area where the comb teeth 10ax of the first electrode 10a face the recess 11b is maximized.
  • the first capacitance C1 takes the minimum value Cmin when the displacement is P / 2. Then, as shown in FIG.
  • the first capacitance C1 alternately takes a maximum value Cmax and a minimum value Cmin every time the displacement amount increases by P / 2.
  • the second capacitance C2 alternately takes the maximum value Cmax and the minimum value Cmin every time the displacement amount increases by P / 2. Therefore, as shown in FIG. 4A, the first capacitance C1 is 180 degrees out of phase with the second capacitance C2.
  • FIG. 5 shows an example of a system for calculating the displacement amount.
  • the detection unit 15 is arranged in the system.
  • the detector 15 is electrically connected to the first electrode 10a and electrically connected to the second electrode 10b.
  • the detection unit 15 detects the first capacitance C1 from the first electrode 10a, and detects the second capacitance C2 from the second electrode 10b.
  • the detection unit 15 calculates the displacement amount of the movable structure 1 based on the detected first capacitance C1 and second capacitance C2. That is, the detection unit 15 differentially detects the displacement amount of the movable structure 1 based on the first capacitance C1 and the second capacitance C2.
  • FIG. 4B shows a graph in which the first capacitance C1 and the second capacitance C2 shown in FIG. 4A are converted into voltage values (CV conversion).
  • the voltage value calculated from the first capacitance C1 is expressed as a voltage value “V1”
  • the voltage value calculated from the second capacitance C2 is expressed as a voltage value “V2”.
  • the voltage value is inversely proportional to the capacitance. Accordingly, as shown in FIG. 4B, when the first capacitance C1 is larger than the second capacitance C2, the voltage value V1 becomes smaller than the voltage value V2. Similarly, when the second capacitance C1 is smaller than the second capacitance C2, the voltage value V1 is larger than the voltage value V2.
  • FIG. 6A shows a voltage value obtained by differential amplification after converting the first capacitance C1 and the second capacitance C2 into voltage values (hereinafter simply referred to as “output voltage value”).
  • output voltage value a voltage value obtained by differential amplification after converting the first capacitance C1 and the second capacitance C2 into voltage values
  • the first capacitance C1 takes the maximum value Cmax, and the second capacitance C2 takes the minimum value Cmin. That is, in this case, the voltage value V1 takes the minimum value, and the voltage value V2 takes the maximum value. Therefore, the output voltage value takes the minimum value “Vmin” in a state where there is no displacement.
  • the first capacitance C1 decreases and the second capacitance C2 increases until the amount of displacement reaches P / 2 from the state where there is no displacement. That is, the voltage value V1 increases and the voltage value V2 decreases. Therefore, in this case, the output voltage value increases.
  • the displacement amount is P / 2
  • the output voltage value takes the maximum value “Vmax”.
  • the output voltage value decreases again, and takes the minimum value Vmin when the displacement amount is P.
  • the output voltage value has a maximum value Vmax and a minimum value every time the displacement amount changes by P / 2.
  • the value Vmin is alternately taken. That is, the output voltage value periodically changes as the displacement amount changes.
  • the output voltage value changes periodically every time the displacement amount changes by the period P.
  • the detection unit 15 stores a map of the output voltage value and the displacement as shown in FIG. 6A in the memory in advance, and estimates the displacement amount by comparing with the detected output voltage value. Can do.
  • the detection unit 15 performs differential detection based on the first capacitance C1 and the second capacitance C2, it removes common-mode noise caused by temperature fluctuations, vibrations, changes in airflow, and the like. be able to. That is, the detection unit 15 can measure the displacement by performing differential detection without being affected by the common-mode noise.
  • the detection unit 15 detects an error (hereinafter referred to as “alignment error”) caused by a positional relationship deviation (alignment deviation) between the electrode pair 10 and the concavo-convex part 11 that occurs during manufacturing by the above-described differential detection. Can be reduced.
  • an error hereinafter referred to as “alignment error”
  • a positional relationship deviation (alignment deviation) between the electrode pair 10 and the concavo-convex part 11 that occurs during manufacturing by the above-described differential detection. Can be reduced.
  • FIG. 7 is an example showing the positional relationship between the electrode pair 10 and the concavo-convex portion 11 when alignment misalignment occurs.
  • the first electrode 10a and the second electrode 10b are arranged close to each other without being close to each other (hereinafter referred to as “comparative example”).
  • phase between the capacitances C1 and C2 and the phase of the output voltage value in a state where there is no displacement may be set arbitrarily. For example, in addition to the case where the phase difference is 180 ° as described above, an arbitrary phase difference can be provided in consideration of the offset. In this case, it is necessary to consider that a phase offset is necessary and that the output voltage value is reduced. However, the phase may be set within a possible range where an output voltage value necessary for detection can be obtained.
  • the electrode pair 10 is shifted by the inclination ⁇ with respect to the concavo-convex portion 11.
  • the convex portion 11a and the first electrode 10a which should originally completely face each other, are caused by the misalignment rather than the area where the first electrode 10a is no longer opposed on the xy plane.
  • the area where the convex portion 11a and the second electrode 10b, which should not be opposed to each other, are opposed to each other in the xy plane is larger.
  • the displacement sensor 100 forms a reverse phase in which the first capacitance C1 and the second capacitance C2 are shifted by 180 degrees even when there is an alignment shift compared to the comparative example.
  • the difference between the maximum value Cmax and the minimum value Cmin can be increased. Therefore, the displacement sensor 100 can reduce alignment errors.
  • the displacement sensor 100 is configured by alternately arranging the comb teeth 10ax of the first electrode 10a and the comb teeth 10bx of the second electrode 10b in the x-axis direction, thereby processing the electrode pair 10 in the manufacturing process. Variation is reduced. Specifically, when the electrode pair 10 is manufactured using a process technique such as photolithography, the comb teeth 10ax of the first electrode 10a and the comb teeth 10bx of the second electrode 10b are alternately arranged. Thus, the electrode pair 10 is simultaneously formed using one mask. As a result, variations in processing occur in the first electrode 10a and the second electrode 10b substantially the same.
  • the displacement sensor 100 can reduce the influence of processing variations in displacement detection by performing differential detection using the electrode pair 10 manufactured in this way.
  • the period P of the comb teeth 10ax and 10bx is created within a range of 50 ⁇ m, for example, by MEMS (Micro Electro Mechanical Systems) processing, it is possible to manufacture the displacement sensor 100 with high accuracy.
  • the period P is set to be equal to or less than the maximum displacement amount (hereinafter simply referred to as “maximum displacement”) in the x-axis direction (detection direction) in which the comb teeth are arranged.
  • maximum displacement is constrained by the space or the like partitioned by the frame portion 3 as described above.
  • the detection unit 15 can, for example, determine the number of times the minimum value Vmin is reached again, that is, the number of fluctuation periods of the output voltage value and the final output voltage value. Based on this, it is possible to detect a large displacement of the period P or more.
  • the detection unit 15 can also measure the large displacement of the movable structure 1 by counting the number of fluctuation periods of the output voltage value. Therefore, the displacement sensor 100 can be used as a linear encoder.
  • the detection unit 15 can measure the large displacement of the movable structure 1 with high resolution by making the period P smaller than the maximum displacement.
  • FIG. 6B shows a graph of the actual measurement value of the output voltage value with respect to the displacement amount of the movable structure 1.
  • FIG. 6B shows the measurement by moving the movable structure 1 every 20 nm, and the period P of the comb teeth 10ax of the first electrode 10a and the comb teeth 10bx of the second electrode 10b at this time is 20 ⁇ m. It is.
  • the displacement sensor according to the present invention includes the first electrode, the second electrode, and the movable structure, and detects the displacement of the movable structure.
  • the first electrode has a so-called comb tooth structure, and has a plurality of comb teeth formed on the same surface according to a predetermined cycle.
  • the second electrode has a comb-tooth structure, and has a plurality of comb teeth that are alternately arranged on the same plane as the comb teeth of the first electrode.
  • the movable structure has a facing surface parallel to the first and second electrodes at a predetermined interval, and is displaced in the in-plane direction.
  • a movable structure has a convex part arrange
  • the first and second electrodes form a concavo-convex portion and a capacitor.
  • the capacitance per unit area of the capacitor formed by the convex portion and the first electrode is different from the capacitance per unit area of the capacitor formed by the concave portion and the first electrode.
  • the capacitance per unit area of the capacitor formed by the convex portion and the second electrode is different from the capacitance per unit area of the capacitor formed by the concave portion and the second electrode.
  • the displacement sensor can differentially detect the displacement based on the capacitance detected from the first electrode and the capacitance detected from the second electrode. Further, by performing differential detection, in-phase noise based on temperature fluctuations, vibrations, and the like can be removed. Furthermore, by arranging the comb teeth of the first electrode and the comb teeth of the second electrode alternately, the displacement sensor also reduces phase errors and capacitance errors due to processing variations and misalignment. can do.
  • the support substrate 2 has a recess 7 having a larger area than the lower surface of the movable structure 1.
  • the configuration of the displacement sensor 100 to which the present invention is applicable is not limited to this.
  • FIG. 8 is a cross-sectional view of the displacement sensor 100a according to the second embodiment.
  • the upper surface of the support substrate 2 (the surface on the side facing the movable structure 1) is flat, and does not have the concave portion 7 as in the first embodiment.
  • the support substrate 2 is connected to the frame portion 3 at the edge of the upper surface.
  • An electrode pair 10 is disposed on the upper surface of the support substrate 2.
  • the movable structure 1 and the support spring 4 are arranged with a predetermined distance with respect to the support substrate 2 and the electrode pair 10. That is, the lower surface of the movable structure 1 and the support spring 4, that is, the surface facing the support substrate 2 is recessed from the lower surface of the frame portion 3. Even in such a configuration, the displacement sensor 100a can detect the displacement of the movable structure 1 appropriately.
  • Example 3 In the displacement sensor 100 of Example 1, only one pair of electrode pairs 10 is arranged on the support substrate 2.
  • the configuration of the displacement sensor 100 to which the present invention can be applied is not limited to this, and the displacement sensor 100 may include a plurality of electrode pairs 10.
  • FIG. 9 shows an example of an exploded perspective view of the displacement sensor according to the third embodiment.
  • FIG. 9A shows an exploded perspective view of a displacement sensor 100b in which two pairs of electrodes 10 for measuring the amount of displacement in the x-axis direction are arranged.
  • FIG. 9B shows an exploded perspective view of a displacement sensor 100c in which two pairs of electrodes 10x that measure the amount of displacement in the x-axis direction and two pairs of electrodes 10y that measure the amount of displacement in the y-axis direction are arranged. .
  • the displacement sensor 100b includes a plurality of electrode pairs 10 that detect the amount of displacement in the same axial direction, whereby a higher-resolution sensor can be configured. Further, for example, one electrode pair 10 is used for measuring the positive direction of the x-axis and the other electrode pair 10 is used for measuring the negative direction of the x-axis. It is also detected whether it is displaced in the negative direction.
  • the displacement sensor 100c includes an electrode pair 10x for detecting the displacement amount in the x-axis direction and an electrode pair 10y for detecting the displacement amount in the y-axis direction. Have both. Thereby, the displacement sensor 100c can measure the displacement amount of the movable structure 1 in the x-axis direction and the y-axis direction which is the vertical direction.
  • the movable structure 1 has the concavo-convex portion 11 on the lower surface, and the concavo-convex portion 11 and the electrode pair 10 form a capacitor.
  • the configuration of the displacement sensor 100 to which the present invention can be applied is not limited to this, and the movable structure 1 does not necessarily have the uneven portion 11.
  • FIG. 10 shows an example of an enlarged view of the capacitor portion of the displacement sensor in the fourth embodiment.
  • the movable structure 1 does not have an uneven portion on its lower surface.
  • the movable structure 1 is formed with electrode foils 20 such as metal thin films that form electrodes on the lower surface thereof in a predetermined cycle.
  • the electrode foil 20 is formed in a region corresponding to a convex portion, and can be specifically formed by evaporating metal particles through a mask. Further, it can be formed by etching after the lift-off method or metal thin film formation. Thereby, the 1st area
  • the electrode foil 20 is disposed so as to face the first electrode 10a in a state where there is no displacement. Therefore, the electrode foil 20 is arranged for each period P.
  • the movable structure 1 is an insulator such as lead zirconate titanate.
  • the first electrode 10a and the second electrode 10b form a capacitor with the electrode foil 20 and have a capacitance.
  • the first electrode 10 a and the second electrode 10 b do not have a capacitance with the movable structure 1. Therefore, as shown in FIG. 10A, in the state where there is no displacement, the first electrode 10a is opposed to the electrode foil 20, so that a capacitor is formed and a predetermined capacitance is generated.
  • the second electrode 10b does not oppose the electrode foil 20, but opposes the movable structure 1 made of an insulator member, so that the capacitance is zero.
  • the displacement sensor 100d can perform differential detection based on the first electrostatic capacitance C1 and the second electrostatic capacitance C2. Further, by appropriately selecting the member of the electrode foil 20, the displacement sensor 100d can increase the maximum value Cmax of the capacitance, and the difference between the maximum value Cmax and the minimum value Cmin (here, 0) is obtained. Can be bigger. Therefore, the displacement sensor 100d can detect the displacement amount with higher accuracy.
  • the displacement sensor 100e in FIG. 10B a concave space for fitting the electrode foil 20 is formed on the lower surface of the movable structure 1 in accordance with a predetermined cycle. Therefore, the lower surface of the movable structure 1 and the lower surface portion of the electrode foil 20 are configured on the same surface. Therefore, the movable structure 1 and the electrode foil 20 do not have a concavo-convex structure facing the movable structure 1. Even if comprised in this way, the displacement sensor 100e can detect differentially based on the 1st electrostatic capacitance C1 and the 2nd electrostatic capacitance C2 similarly to the displacement sensor 100d.
  • the present invention can be used for a displacement sensor for detecting a displacement amount. Further, it can be widely applied to acceleration sensors, pressure sensors, force sensors and the like.

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Pressure Sensors (AREA)

Abstract

L’invention concerne un capteur de déplacement qui comprend une première électrode, une seconde électrode et une structure mobile, et qui détecte le déplacement de la structure mobile. La première électrode comprend des dents en peigne formées selon un cycle prédéterminé sur une même surface. La seconde électrode comprend des dents en peigne alternant avec les dents en peigne de la première électrode sur la même surface. La structure mobile possède une surface opposée parallèle aux première et seconde électrodes à des intervalles prédéterminés, et se déplace dans une direction située dans un plan. La structure mobile, sur la surface opposée, comprend des premières zones à chaque cycle égales au cycle, ainsi que des secondes zones qui sont adjacentes aux premières zones et sont disposées en alternance par rapport aux premières zones. Les première et seconde électrodes forment des condensateurs avec les premières et secondes zones. La capacitance par zone unitaire d’un condensateur formé par la première zone et la première électrode est différente de celle par zone unitaire d’un condensateur formé par la seconde zone et la première électrode.
PCT/JP2008/065692 2008-09-01 2008-09-01 Capteur de déplacement WO2010023766A1 (fr)

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PCT/JP2008/065692 WO2010023766A1 (fr) 2008-09-01 2008-09-01 Capteur de déplacement

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PCT/JP2008/065692 WO2010023766A1 (fr) 2008-09-01 2008-09-01 Capteur de déplacement

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WO2010023766A1 true WO2010023766A1 (fr) 2010-03-04

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013130421A (ja) * 2011-12-20 2013-07-04 Nippon Telegr & Teleph Corp <Ntt> 振動センサ
WO2014117158A1 (fr) * 2013-01-28 2014-07-31 Si-Ware Systems Auto-étalonnage destiné au positionnement d'un miroir dans des interféromètres optiques mems
US9658053B2 (en) 2010-03-09 2017-05-23 Si-Ware Systems Self calibration for mirror positioning in optical MEMS interferometers
EP3246667A1 (fr) * 2016-05-17 2017-11-22 Université Grenoble Alpes Dispositif de détection capacitive et dispositif de mesure l'incluant
JP2018084453A (ja) * 2016-11-22 2018-05-31 キヤノン株式会社 変位検出装置およびこれを備えたレンズ鏡筒、撮像装置

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JPS4934850A (fr) * 1972-07-24 1974-03-30
JPH03125917A (ja) * 1989-10-12 1991-05-29 Tokin Corp 静電容量式リニアエンコーダ
JPH095111A (ja) * 1995-06-12 1997-01-10 Hewlett Packard Co <Hp> 位置検出装置、位置決め装置、およびメディア移動型メモリ装置
JP2003009502A (ja) * 2001-05-31 2003-01-10 Hewlett Packard Co <Hp> 超小型電気機械システム素子の位置検出
JP2008125231A (ja) * 2006-11-10 2008-05-29 Olympus Corp 慣性駆動アクチュエータ

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JPS4934850A (fr) * 1972-07-24 1974-03-30
JPH03125917A (ja) * 1989-10-12 1991-05-29 Tokin Corp 静電容量式リニアエンコーダ
JPH095111A (ja) * 1995-06-12 1997-01-10 Hewlett Packard Co <Hp> 位置検出装置、位置決め装置、およびメディア移動型メモリ装置
JP2003009502A (ja) * 2001-05-31 2003-01-10 Hewlett Packard Co <Hp> 超小型電気機械システム素子の位置検出
JP2008125231A (ja) * 2006-11-10 2008-05-29 Olympus Corp 慣性駆動アクチュエータ

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9658053B2 (en) 2010-03-09 2017-05-23 Si-Ware Systems Self calibration for mirror positioning in optical MEMS interferometers
JP2013130421A (ja) * 2011-12-20 2013-07-04 Nippon Telegr & Teleph Corp <Ntt> 振動センサ
WO2014117158A1 (fr) * 2013-01-28 2014-07-31 Si-Ware Systems Auto-étalonnage destiné au positionnement d'un miroir dans des interféromètres optiques mems
CN105103030A (zh) * 2013-01-28 2015-11-25 斯维尔系统 用于光学mems干涉仪中的反射镜定位的自校准
CN105103030B (zh) * 2013-01-28 2018-07-06 斯维尔系统 自校准的微机电系统设备
EP3246667A1 (fr) * 2016-05-17 2017-11-22 Université Grenoble Alpes Dispositif de détection capacitive et dispositif de mesure l'incluant
FR3051553A1 (fr) * 2016-05-17 2017-11-24 Univ Grenoble Alpes Dispositif de detection capacitive et dispositif de mesure l'incluant
US10697818B2 (en) 2016-05-17 2020-06-30 Université Grenoble Alpes Capacitive detection device and measuring device including same
JP2018084453A (ja) * 2016-11-22 2018-05-31 キヤノン株式会社 変位検出装置およびこれを備えたレンズ鏡筒、撮像装置
WO2018097105A1 (fr) * 2016-11-22 2018-05-31 キヤノン株式会社 Dispositif de détection de déplacement, barillet d'objectif équipé de ce dernier, et dispositif de capture d'image

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