WO2010011088A3 - 솔라셀 패널 제조장치 및 제조방법 - Google Patents

솔라셀 패널 제조장치 및 제조방법 Download PDF

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Publication number
WO2010011088A3
WO2010011088A3 PCT/KR2009/004090 KR2009004090W WO2010011088A3 WO 2010011088 A3 WO2010011088 A3 WO 2010011088A3 KR 2009004090 W KR2009004090 W KR 2009004090W WO 2010011088 A3 WO2010011088 A3 WO 2010011088A3
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WIPO (PCT)
Prior art keywords
substrate
laser
support table
solar cell
cell panel
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PCT/KR2009/004090
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English (en)
French (fr)
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WO2010011088A2 (ko
Inventor
백광수
강현구
이병국
김병겸
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(주)미래컴퍼니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by (주)미래컴퍼니 filed Critical (주)미래컴퍼니
Priority to CN2009801258751A priority Critical patent/CN102084495A/zh
Publication of WO2010011088A2 publication Critical patent/WO2010011088A2/ko
Publication of WO2010011088A3 publication Critical patent/WO2010011088A3/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Sustainable Energy (AREA)
  • Photovoltaic Devices (AREA)
  • Laser Beam Processing (AREA)

Abstract

솔라셀 패널 제조장치 및 제조방법이 개시된다. 복수의 에어 분사구가 형성되어 로딩되는 기판을 부상시키는 지지 테이블과, 지지 테이블의 상부에 위치하며, 기판에 레이저를 조사하는 레이저 가공부와, 지지 테이블의 하부에 위치하며, 레이저에 의해 기판으로부터 발생하는 파티클을 수집하는 석션부를 포함하는 솔라셀 패널 제조장치는, 솔라셀 패널을 지지 테이블 상에 부상시켜 로딩 및 이송함으로써 기판이 테이블에 물리적으로 접촉하지 않아 증착층의 스크래치(scratch)나 데미지(damage) 등의 손상을 미연에 방지할 수 있고, 증착층이 아래를 향하도록 기판을 로딩하고 그 상부에서 레이저를 조사하고 그 하부에서 파티클을 석션함으로써 레이저 식각에 의해 발생하는 파티클을 효과적으로 제거하여 패턴 간의 쇼트가 발생하지 않고 제품의 수율을 향상시킬 수 있다.
PCT/KR2009/004090 2008-07-24 2009-07-23 솔라셀 패널 제조장치 및 제조방법 WO2010011088A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009801258751A CN102084495A (zh) 2008-07-24 2009-07-23 太阳能电池板制造装置及其制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080072006A KR101006747B1 (ko) 2008-07-24 2008-07-24 솔라셀 패널 제조장치 및 제조방법
KR10-2008-0072006 2008-07-24

Publications (2)

Publication Number Publication Date
WO2010011088A2 WO2010011088A2 (ko) 2010-01-28
WO2010011088A3 true WO2010011088A3 (ko) 2010-05-06

Family

ID=41570734

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PCT/KR2009/004090 WO2010011088A2 (ko) 2008-07-24 2009-07-23 솔라셀 패널 제조장치 및 제조방법

Country Status (3)

Country Link
KR (1) KR101006747B1 (ko)
CN (1) CN102084495A (ko)
WO (1) WO2010011088A2 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101829848B (zh) * 2010-01-29 2013-04-10 东莞晨真光伏有限公司 激光刻线除尘设备及除尘方法
KR101278643B1 (ko) * 2011-02-08 2013-06-25 엘아이지에이디피 주식회사 기판의 에어 부상을 이용한 자동 검사 장치 및 방법
KR102016871B1 (ko) * 2011-08-09 2019-08-30 카티바, 인크. 하향 인쇄 장치 및 방법
KR102006878B1 (ko) * 2012-12-27 2019-08-05 삼성디스플레이 주식회사 기판 검사식각 복합장치 및 이를 구비하는 기판 처리장치
KR101595005B1 (ko) * 2014-06-02 2016-02-17 주식회사 에스에프에이 인라인 방식의 열증착 장치
CN108649103B (zh) * 2018-05-16 2019-11-01 江苏悦阳光伏科技有限公司 一种非晶硅太阳能电池生产工艺
CN110672629A (zh) * 2019-11-07 2020-01-10 江苏上达电子有限公司 一种避免外观检查时cof产品产生背面划伤的方法
KR102302901B1 (ko) * 2020-01-30 2021-09-17 주식회사 제이스텍 디스플레이 사이드 레이저 패턴설비의 스테이지 백업구조
KR102442419B1 (ko) * 2020-06-05 2022-09-14 한국과학기술연구원 탠덤 태양전지 및 그 제조방법
CN112230454B (zh) * 2020-09-22 2022-08-09 福建华佳彩有限公司 一种避免基板刮伤的方法和装置
CN116936422B (zh) * 2023-09-15 2023-11-17 江苏永达电力金具有限公司 光伏电池片自动化切割分离设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100584837B1 (ko) * 2005-03-29 2006-05-30 주식회사 이오테크닉스 레이저 전극 절단장치의 워킹 테이블
KR20070048616A (ko) * 2005-11-04 2007-05-09 가부시키가이샤 오크세이사쿠쇼 레이저 빔·자외선조사 주변노광장치 및 그 방법
KR20070059955A (ko) * 2005-12-06 2007-06-12 아사히 가라스 가부시키가이샤 레이저 패터닝용 투명 도전막이 형성된 기판 및 그 제조방법
KR20070101917A (ko) * 2006-04-12 2007-10-18 엘지전자 주식회사 박막형 태양전지와 그의 제조방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100584837B1 (ko) * 2005-03-29 2006-05-30 주식회사 이오테크닉스 레이저 전극 절단장치의 워킹 테이블
KR20070048616A (ko) * 2005-11-04 2007-05-09 가부시키가이샤 오크세이사쿠쇼 레이저 빔·자외선조사 주변노광장치 및 그 방법
KR20070059955A (ko) * 2005-12-06 2007-06-12 아사히 가라스 가부시키가이샤 레이저 패터닝용 투명 도전막이 형성된 기판 및 그 제조방법
KR20070101917A (ko) * 2006-04-12 2007-10-18 엘지전자 주식회사 박막형 태양전지와 그의 제조방법

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Publication number Publication date
KR20100010985A (ko) 2010-02-03
KR101006747B1 (ko) 2011-01-10
WO2010011088A2 (ko) 2010-01-28
CN102084495A (zh) 2011-06-01

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