WO2010007768A1

WO2010007768A1 - Roll device

Info

Publication number: WO2010007768A1
Application number: PCT/JP2009/003312
Authority: WO
Inventors: 佐藤光
Original assignee: オイレス工業株式会社
Priority date: 2008-07-17
Filing date: 2009-07-14
Publication date: 2010-01-21
Also published as: KR20110017927A; JP5169570B2; TW201016996A; JP2010025208A; CN102089538B; KR101183697B1; TWI393823B; CN102089538A

Abstract

A roll device (1) is provided with a hollow roll body (2), a shaft body (4) inserted through the hollow in the roll body (2) with a gap (3) around the shaft body, and a pair of static pressure gas bearings (7, 8) arranged at opposite ends (5, 6), respectively, of the roll body (2) and individually located between the roll body (2) and the shaft body (4). The static pressure gas bearing (7) has a radial bearing surface (32) and thrust bearing surfaces (35, 40), and the static pressure gas bearing (8) has a radial bearing surface (92).

Description

Roll device

The present invention relates to a roll apparatus used for coating a plastic sheet or film, manufacturing a film-like electronic device (roll-to-roll method), and transporting the sheet, film or the like.

For example, Patent Document 1 proposes a roll apparatus using a static pressure gas bearing in the radial direction and the thrust direction.

JP-A-11-190338

By the way, such a roll device is used for coating plastic sheets and films, manufacturing electronic devices in a film form (roll-to-roll method), and transporting the sheets and films. Higher rotational accuracy such as 1 μm or less, reduction of rotational friction, and improvement of rotational speed are required.

The present invention has been made in view of the above-described points, and an object of the present invention is to provide a roll apparatus that can achieve higher rotational accuracy, reduced rotational friction, and improved rotational speed.

The roll device of the present invention is arranged in a hollow roll body, a shaft body that is inserted through the hollow portion of the roll body with a gap and has both end portions protruding from the roll body, and both end portions of the roll body. And a pair of hydrostatic gas bearings interposed between the roll body and the shaft body, and one hydrostatic gas bearing faces the inner peripheral surface of the roll body with a bearing clearance. A radial bearing surface and a thrust bearing surface facing with a bearing clearance to one surface of a hollow disk-shaped plate fixed to one end of the roll body and fixed to the shaft body The other bearing body fixed to the shaft body and having a thrust bearing surface facing the other surface of the plate with a bearing clearance, and the plate and the shaft. Interposed between the body An annular coupling body that connects one bearing body and the other bearing body, gas to be supplied to the bearing gap from the radial bearing surface of one bearing body, bearing from the thrust bearing surface of one bearing body It is formed in one bearing body, the other bearing body, and the coupling body so that the gas to be supplied to the gap and the gas to be supplied to the bearing gap can be supplied from the thrust bearing surface of the other bearing body. The gas supplied to the bearing gap from the radial bearing surface of the air supply passage and one bearing body is exhausted to one end of the shaft body, and the gas supplied to the bearing gap from the thrust bearing surface of one bearing body One exhaust passage formed in the plate and the gas supplied to the bearing clearance from the thrust bearing surface of the one bearing body so that the exhaust can be exhausted from the outer peripheral side of the bearing clearance to the one end side of the shaft body. Of the bearing clearance The gas exhausted from the peripheral side to the one end portion side of the shaft body and the gas supplied from the thrust bearing surface of the other bearing body to the bearing clearance can be exhausted from the inner peripheral side of the bearing clearance to the one end portion side of the shaft body. As described above, the other exhaust passage formed in the coupling body and the other bearing body is provided, and the other static pressure gas bearing faces the inner peripheral surface of the roll body with a bearing gap. A bearing body that has a radial bearing surface and is fixed to the shaft body, and a gas that should be supplied to the bearing gap from the radial bearing surface of the bearing body is formed on the bearing body. The supply air passage, the gas supplied to the bearing gap from the radial bearing surface of the bearing body, and the gas supplied to the bearing gap from the radial bearing surface of one bearing body of the one hydrostatic gas bearing You can exhaust to the other end side of In addition, an exhaust passage formed in the bearing body of the other hydrostatic gas bearing is provided.

According to the roll device of the present invention, in particular, since the one static pressure gas bearing and the other static pressure gas bearing described above are provided, the rotation accuracy of the roll body can be increased, and the weight of the roll body can be increased. It can be lightened to reduce the rotational friction and improve the rotational speed, and the bearing diameter in the radial direction of one static pressure gas bearing and the other static pressure gas bearing can be increased. In the pressurized gas bearing, since the roll body is supported in the thrust direction in a non-contact manner, the influence of the thermal expansion of the shaft body and the like can be reduced. The non-contact support in the radial direction by the static pressure gas bearing of this type can free the part on the other static pressure gas bearing side of the roll body and reduce the influence of thermal expansion in the axial direction. In addition, the gas (compressed gas) supplied to the bearing gap can be smoothly exhausted to the outside of the roll device, and the rotational accuracy of the roll body is reduced due to unstable exhaust of the gas, and the rotational friction. And increase in rotation speed can be prevented.

In a preferred example of the roll device of the present invention, the exhaust passage is adjacent to the bearing gap to which gas is supplied from the radial bearing surface of one of the hydrostatic gas bearings in the longitudinal direction of the shaft body and on one surface of the plate. An annular passage formed, and a communication passage formed in the plate so as to communicate with the annular passage and open on the other surface of the plate are provided.

In a preferred example of the roll device of the present invention, the exhaust passage is formed through an annular gap formed between the inner peripheral surface of the plate and the outer peripheral surface of the connecting body, and the connecting body and the plate. A passage opening on the other surface and a communication passage communicating with the passage and opening at the annular gap are provided.

According to the present invention, it is possible to provide a roll device that can achieve higher rotational accuracy, reduced rotational friction, and improved rotational speed.

FIG. 1 is a partially omitted cross-sectional explanatory view of an example of an embodiment of the present invention. FIG. 2 is an explanatory view taken along the line II-II in the example shown in FIG. 3 is an explanatory view taken along the line III-III of the example shown in FIG. 4 is an explanatory view taken along the line IV-IV in the example shown in FIG. FIG. 5 is an explanatory view taken along the line VV of the example shown in FIG. 6 is an explanatory view taken along the line VI-VI in the example shown in FIG.

Next, the present invention will be described in more detail on the basis of examples of preferred embodiments shown in the drawings. The present invention is not limited to these examples.

1 to 6, a roll apparatus 1 of this example includes a hollow roll body 2, a shaft body 4 inserted through a hollow portion of the roll body 2 with a gap 3, and both end portions 5 and 6 of the roll body 2. And a pair of static

pressure gas bearings

7 and 8 respectively interposed between the roll body 2 and the shaft body 4.

In the roll body 2, a cylindrical main body 11 and an outer peripheral surface 13 are fixed to a portion of the inner peripheral surface 12 in one end portion 5 of the cylindrical main body 11, and an inner peripheral surface 14 is a bearing with respect to the static pressure gas bearing 7. The cylindrical body 15 facing with a gap 31 and the outer peripheral surface 16 are fixed to a portion of the inner peripheral surface 12 at the other end 6 of the cylindrical main body 11 and the inner peripheral surface 17 is against the static pressure gas bearing 8. A cylindrical body 18 facing each other with a bearing gap 91, and a hollow disk-like plate 20 fixed to an annular end face 19 of the cylindrical body 15 located on the one end 21 side of the shaft body 4. Yes. The thicknesses of the

cylinders

15 and 18 are equal to each other. The plate 20 is fixed to one end portion 5 of the cylindrical main body 11 via the cylindrical body 15.

The columnar or cylindrical shaft body 4 is inserted into the roll body 2 with a gap 3 with respect to the cylindrical main body 11, the

cylindrical bodies

15 and 18, and the plate 20. Both

end portions

21 and 22 of the shaft body 4 protrude from both end portions 5 and 6 of the roll body 2, and are fixedly supported on the frame or the like by the both

end portions

21 and 22. The shaft body 4 includes a large diameter shaft portion 23 positioned between the

cylindrical bodies

15 and 18 with respect to the longitudinal direction of the shaft body 4, small

diameter shaft portions

24 and 25 positioned on both sides of the large diameter shaft portion 23, and a large diameter shaft. Step

portions

27 and 28 formed at the connecting portion between the portion 23 and the small

diameter shaft portions

24 and 25 are provided. The diameters of the small

diameter shaft portions

24 and 25 are equal to each other in this example, but may be different from each other.

The hydrostatic gas bearing 7 faces the radial bearing surface 32 facing the inner peripheral surface 14 with a bearing gap 31 and the surface 33 of the plate 20 located on the other end 22 side with the bearing gap 34. A cylindrical bearing body 36 having a thrust bearing surface 35 and fixed to the shaft body 4 is opposed to a surface 38 of the plate 20 located on the one end 21 side with a bearing gap 39. A hollow disc-like bearing body 41 having a thrust bearing surface 40 and fixed to the shaft body 4, and interposed between the plate 20 and the shaft body 4 and a bearing body 36. , 41, the gas to be supplied from the radial bearing surface 32 to the bearing gap 31, the gas to be supplied from the thrust bearing surface 35 to the bearing gap 34, and the bearing gap from the thrust bearing surface 40. Supplied to the bearing gap 31 from the air supply passage 44 formed in the bearing body 36, the bearing body 41 and the coupling body 42, and the radial bearing surface 32 so that the gas to be supplied to 39 can be supplied. It is formed in the plate 20 so that the gas can be exhausted to the one end 21 side and the gas supplied from the thrust bearing surface 35 to the bearing gap 34 can be exhausted from the outer peripheral side of the bearing gap 34 to the one end 21 side. The gas supplied to the bearing gap 34 from the one exhaust passage 45 and the thrust bearing surface 35 is exhausted from the inner peripheral side of the bearing gap 34 to the one end 21 side and supplied from the thrust bearing surface 40 to the bearing gap 39. The connecting body 42 and the other exhaust passage 46 formed in the bearing body 41 are provided so that the generated gas can be exhausted from the inner peripheral side of the bearing gap 39 to the one end 21 side. It is.

The bearing

bodies

36 and 41 are arranged to face each other with the plate 20 in between. The

bearing bodies

36 and 41 are connected to the connecting body 42 via screws or the like.

The bearing body 36 is fixed to the small diameter shaft portion 24 at the inner peripheral surface 51 and is fixed to the step portion 27 at the end surface 53 on the large diameter shaft portion 23 side, and the outer peripheral surface of the main body 55. As a porous body joined to a cylindrical porous metal sintered layer 56 joined to 52 and an annular groove 58 formed on the end face 54 of the main body 55 on the plate 20 side. And an annular porous metal sintered layer 57.

Each of the porous metal sintered

layers

56 and 57 has a large number of pores that open at a large number of disordered portions on the entire surface and communicate with each other in a random manner. The radial bearing surface 32 has an outer peripheral surface exposed to the cylindrical body 15 to be supported by the porous metal sintered layer 56, and the thrust bearing surface 35 has the plate 20 to be supported by the porous metal sintered layer 57. The surface on the plate 20 side exposed to face. The thrust bearing surface 35 is flush with the end surface 54 in this example, but may be disposed on one side or the other side with respect to the end surface 54 in the lateral direction, for example. Each of the sintered

porous metal layers

56 and 57 includes 4% by weight to 10% by weight tin, 10% by weight to 40% by weight nickel, and 0.1% by weight to less than 0.5% by weight. Phosphorus, 2% by weight or more and 10% by weight or less of inorganic substance particles, and the balance may be made of copper. The inorganic substance particles dispersedly contained in the porous metal sintered

layers

56 and 57 are made of at least one of graphite, boron nitride, graphite fluoride, calcium fluoride, aluminum oxide, silicon oxide, and silicon carbide. Also good.

The bearing body 41 disposed on the one end 21 side with respect to the bearing body 36 includes a hollow disc-shaped main body 62 fixed to the small diameter shaft portion 24 with an inner peripheral surface 61, and a surface of the main body 62 on the plate 20 side. And an annular porous metal sintered layer 64 as a porous body joined to an annular groove 65 formed in 63. The thrust bearing surface 40 is composed of a surface on the plate 20 side exposed to face the plate 20 to be supported by the porous metal sintered layer 64. The thrust bearing surface 40 is flush with the surface 63. The porous metal sintered layer 64 is formed in the same manner as the porous metal sintered layer 57 and is disposed so as to face each other with the plate 20 in between.

The air supply passage 44 is formed on a plurality of

annular passages

71, 72, and 73 formed on the outer peripheral surface 52 of the main body 55, an annular passage 74 formed on the bottom surface of the annular groove 58, and a bottom surface of the annular groove 65. The annular passage 75 is formed through the main body 55, the coupling body 42, and the main body 62, and communicates with each of the annular passages 71 to 75 and opens at the outer peripheral surface of the main body 62. It is equipped with. In such an air supply passage 44, the gas (compressed gas) supplied from the opening is caused to flow into each of the annular passages 71 to 75 via the communication passage 76, and the introduced gas is supplied to the porous sintered metal layer 56, The gas is supplied to the bearing

gaps

31, 34 and 39, respectively.

As shown particularly in FIG. 6, the exhaust passage 45 is adjacent to the bearing gap 31 in the longitudinal direction of the shaft body 4 and communicates with the annular passage 81 formed in the surface 33 of the plate 20. And a communication passage 82 formed in the plate so as to open at the surface 38 of the plate 20. In the exhaust passage 45, the gas supplied to the bearing gap 31 is exhausted from the plate 20 side, and the gas supplied to the bearing gap 34 is exhausted from the outer peripheral side of the bearing gap 34. Of the gas supplied to the bearing gap 39, the gas discharged to the outer peripheral side is exhausted to the outside of the roll device 1 as it is.

As shown particularly in FIG. 6, the exhaust passage 46 is formed through the annular gap 87 formed between the inner peripheral surface 85 of the plate 20 and the outer peripheral surface 86 of the connecting body 42, and the connecting body 42 and the main body 62. And a passage 88 opened on the surface 66 on the one end 21 side of the main body 62, and a communication passage 89 communicating with the passage 88 and opening with an annular gap 87. In the exhaust passage 46, the gas supplied to the bearing gap 34 is exhausted from the inner peripheral side of the bearing gap 34 and the gas supplied to the bearing gap 39 is exhausted from the inner peripheral side of the bearing gap 39.

The hydrostatic gas bearing 8 has a radial bearing surface 92 facing the inner peripheral surface 17 with a bearing gap 91 and is fixed to the shaft body 4, and a radial of the bearing body 93. An air supply passage 94 formed in the bearing body 93 and a gas supplied from the radial bearing surface 92 to the bearing gap 91 so that the gas to be supplied from the bearing surface 92 to the bearing gap 91 can be supplied. And the gas supplied to the bearing gap 31 from the radial bearing surface 32, that is, the gas between the static

pressure gas bearings

7 and 8, is formed in the bearing body 93 so as to be exhausted to the other end 22 side. And an exhaust passage 95.

The bearing body 93 is fixed to the small diameter shaft portion 25 at the inner peripheral surface 101 and is fixed to the step portion 28 at the end surface 103 on the large diameter shaft portion 23 side, and the outer peripheral surface of the main body 105. And a cylindrical porous metal sintered layer 106 as a porous body joined to 102. The radial bearing surface 92 is composed of an outer peripheral surface exposed to face the cylindrical body 18 to be supported by the porous metal sintered layer 106. The porous metal sintered layer 106 is formed in the same manner as the porous metal sintered layer 56.

As shown in FIG. 1 in particular, the air supply passage 94 communicates with each of the plurality of

annular passages

111, 112, and 113 formed on the outer peripheral surface 102 of the main body 105, and the annular passages 111 to 113, and the main body 105. And a communication passage 114 formed in the main body 105 so as to open at the end face 104 on the other end 22 side. In such an air supply passage 94, the gas (compressed gas) supplied from the opening is caused to flow into each of the annular passages 111 to 113 through the communication passage 114, and the introduced gas is supplied to the porous metal sintered layer 106. Then, the gas is supplied to the bearing gap 91.

The exhaust passage 95 is formed by a passage formed in the main body 105 by opening at each of the end faces 103 and 104, as shown in FIG. In such an exhaust passage 95, the gas discharged to the hollow portion of the roll body 2 out of the gas supplied to the bearing

gaps

31 and 91 is introduced from the opening in the end face 103, and the introduced gas is supplied to the end face 104 side. Exhaust through the opening. In addition, the gas discharged | emitted by the other end part 22 side among the gas supplied to the bearing clearance 91 will be exhausted as it is outside the roll apparatus 1 as it is.

Reference numeral 120 denotes a tightening tool with a slit that presses against the shaft body 4 by tightening a bolt 121, and each of the tightening tools 120 is used to fix the static

pressure gas bearings

7 and 8 to the shaft body 4. Used.

In the roll apparatus 1, the radial bearing surfaces 32 and 92 and the thrust bearing surfaces 35 and 40 are supplied by supplying air to the porous metal sintered layers 56, 57, 64 and 106 from the

supply passages

44 and 94, respectively. Gas is supplied to the bearing

gaps

31, 34, 39, and 91 from each, and is thus supported by the static

pressure gas bearings

7 and 8 so as to be rotatable in the R direction without contact with the roll body 2. Misalignment of the roll body 2 in the lateral direction is prohibited by non-contact support in the bearing

gaps

34 and 39. The gas supplied to each of the bearing

gaps

31, 34, 39 and 91 is exhausted from the

exhaust passages

45, 46 and 95 as described above.

According to the roll apparatus 1 of this example, the hollow roll body 2 and the shaft body 4 that is inserted through the hollow portion of the roll body 2 with a gap 3 and both end

portions

21 and 22 project from the roll body 2; A pair of static

pressure gas bearings

7 and 8 are provided at both ends 5 and 6 of the roll body 2 and are interposed between the roll body 2 and the shaft body 4, respectively. The gas bearing 7 has one of a radial bearing surface 32 facing the inner peripheral surface 14 of the roll body 2 with a bearing gap 31 and a hollow disk-like plate 20 fixed to one end portion 5 of the roll body 2. A thrust bearing surface 35 facing the surface 33 with a bearing gap 34 and one bearing body 36 fixed to the shaft body 4, and the other surface 38 of the plate 20. Slurry facing the bearing gap 39 The other bearing body 41 having a bearing surface 40 and fixed to the shaft body 4, and interposed between the plate 20 and the shaft body 4 and one bearing body 36 and the other bearing. An annular coupling body 42 that couples the body 41, a gas to be supplied from the radial bearing surface 32 of one bearing body 36 to the bearing gap 31, and a thrust bearing surface 35 of one bearing body 36 to the bearing gap 34. The one bearing body 36, the other bearing body 41, and the coupling body 42 are supplied so that the gas to be supplied and the gas to be supplied to the bearing gap 39 from the thrust bearing surface 40 of the other bearing body 41 can be supplied. The gas supplied to the bearing gap 31 from the formed air supply passage 44 and the radial bearing surface 32 of one bearing body 36 is exhausted to the one end 21 side of the shaft body 4 and the thrust bearing of one bearing body 36 is exhausted. Bearing from surface 35 One exhaust passage 45 formed in the plate 20 and one bearing so that the gas supplied to the space 34 can be exhausted from the outer peripheral side of the bearing gap 34 to the one end 21 side of the shaft body 4. The gas supplied to the bearing gap 34 from the thrust bearing surface 35 of the body 36 is exhausted from the inner peripheral side of the bearing gap 34 to the one end portion 21 side of the shaft body 4 and from the thrust bearing surface 40 of the other bearing body 41 to the bearing. The other side formed on the coupling body 42 and the other bearing body 41 so that the gas supplied to the gap 39 can be exhausted from the inner peripheral side of the bearing gap 39 to the one end 21 side of the shaft body 4. The other hydrostatic gas bearing 8 has a radial bearing surface 92 facing the inner peripheral surface 17 of the roll body 2 with a bearing gap 91 and a shaft body. Bearing body fixed to 4 93, an air supply passage 94 formed in the bearing body 93, and the bearing body 93 so that the gas to be supplied to the bearing gap 91 from the radial bearing surface 92 of the bearing body 93 can be supplied. The gas supplied to the bearing gap 91 from the radial bearing surface 92 and the gas supplied to the bearing gap 31 from the radial bearing surface 32 of one bearing body 36 of the one hydrostatic gas bearing 7 are supplied to the other end of the shaft body 4. Since the exhaust passage 95 formed in the bearing body 93 of the other static pressure gas bearing 8 is provided so that the air can be exhausted to the 22 side, the rotation accuracy of the roll body 2 can be improved. The weight of the roll body 2 can be reduced, the rotational friction can be reduced and the rotational speed can be improved, and the bearing diameter in the radial direction of the one static pressure gas bearing 7 and the other static pressure gas bearing 8 is increased. Can also Since the roll body 2 is supported in a non-contact manner in the thrust direction in one of the static pressure gas bearings 7, the influence of the thermal expansion of the shaft body 4 and the like can be reduced. The non-contact support in the radial direction by the other static pressure gas bearing 8 and the non-contact support in the radial direction by the other static pressure gas bearing 8 can free the portion of the roll body 2 on the other static pressure gas bearing 8 side. The influence of expansion can be reduced, and the gas supplied to each of the bearing

gaps

31, 34, 39, and 91 can be smoothly exhausted to the outside of the roll device 1, so that the gas is unstablely exhausted. It is possible to prevent a decrease in rotational accuracy, an increase in rotational friction, and a decrease in rotational speed of the roll body 2 on the basis of.

Claims

A hollow roll body, a shaft body that is inserted through the hollow portion of the roll body with a gap and whose both ends protrude from the roll body, and a roll body and a shaft body that are respectively disposed at both ends of the roll body And a pair of static pressure gas bearings interposed between the radial bearing surface and the roll facing each other with a bearing gap with respect to the inner peripheral surface of the roll body. One bearing body having a thrust bearing surface facing the one surface of a hollow disk-like plate fixed to one end of the body with a bearing gap and fixed to the shaft body; The other bearing body having a thrust bearing surface facing the other surface of the plate with a bearing gap and being fixed to the shaft body, and interposed between the plate and the shaft body And one bearing The annular coupling body that connects the other bearing body, the gas that should be supplied to the bearing gap from the radial bearing surface of one bearing body, and the gas that should be supplied to the bearing gap from the thrust bearing surface of one bearing body And an air supply passage formed in one of the bearing bodies, the other bearing body, and the coupling body so that the gas to be supplied to the bearing gap can be supplied from the thrust bearing surface of the other bearing body, The gas supplied to the bearing gap from the radial bearing surface of the bearing body is exhausted to one end portion side of the shaft body, and the gas supplied to the bearing gap from the thrust bearing surface of one bearing body from the outer peripheral side of the bearing gap One exhaust passage formed in the plate and the gas supplied to the bearing gap from the thrust bearing surface of the one bearing body so that the exhaust can be exhausted to one end of the shaft body, the inner circumference of the bearing gap One end of the shaft from the side So that the gas supplied to the bearing gap from the thrust bearing surface of the other bearing body can be exhausted from the inner peripheral side of the bearing gap to the one end portion side of the shaft body. And the other hydrostatic gas bearing has a radial bearing surface facing the inner peripheral surface of the roll body with a bearing clearance. A bearing body fixed to the shaft body, an air supply passage formed in the bearing body so that gas to be supplied from the radial bearing surface of the bearing body to the bearing gap can be supplied, and The gas supplied to the bearing gap from the radial bearing surface of the bearing body and the gas supplied to the bearing gap from the radial bearing surface of one bearing body of the one hydrostatic gas bearing are exhausted to the other end side of the shaft body. The other hydrostatic gas shaft so that A roll device comprising an exhaust passage formed in the bearing body of the receiver.
The exhaust passage is adjacent to the bearing gap to which gas is supplied from the radial bearing surface of one of the hydrostatic gas bearings in the longitudinal direction of the shaft body and is formed on one surface of the plate, and the annular passage The roll apparatus according to claim 1, further comprising a communication path formed in the plate so as to communicate with the path and open on the other surface of the plate.
The exhaust passage includes an annular gap formed between the inner peripheral surface of the plate and the outer peripheral surface of the connecting body, a passage that is formed through the connecting body and the plate, and is open on the other surface of the plate; The roll device according to claim 1, further comprising a communication passage communicating with the passage and opening at the annular gap.