WO2009142390A3 - 표면형상 측정장치 - Google Patents

표면형상 측정장치 Download PDF

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Publication number
WO2009142390A3
WO2009142390A3 PCT/KR2009/001611 KR2009001611W WO2009142390A3 WO 2009142390 A3 WO2009142390 A3 WO 2009142390A3 KR 2009001611 W KR2009001611 W KR 2009001611W WO 2009142390 A3 WO2009142390 A3 WO 2009142390A3
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WO
WIPO (PCT)
Prior art keywords
measured
monochrome
light source
monochromatic light
monochromatic
Prior art date
Application number
PCT/KR2009/001611
Other languages
English (en)
French (fr)
Other versions
WO2009142390A2 (ko
Inventor
유영웅
최영진
조철훈
Original Assignee
(주)펨트론
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)펨트론 filed Critical (주)펨트론
Priority to JP2011510413A priority Critical patent/JP5162702B2/ja
Priority to EP09750712.3A priority patent/EP2282163A4/en
Priority to US12/598,578 priority patent/US8487999B2/en
Priority to CN2009801028726A priority patent/CN101970981A/zh
Publication of WO2009142390A2 publication Critical patent/WO2009142390A2/ko
Publication of WO2009142390A3 publication Critical patent/WO2009142390A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509—Color coding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)

Abstract

본 발명은 측정대상물의 표면의 2D 이미지를 촬상하는 표면형상 측정장치에 관한 것이다. 본 발명에 따른 표면형상 측정장치는 제1 단색광을 상기 측정대상물의 표면에 조사하는 제1 광원과; 상기 제1 단색광과 상이한 색상의 제2 단색광을 상기 측정대상물의 표면에 조사하는 제2 광원과; 상기 제1 광원 및 상기 제2 광원으로부터 조사되어 상기 측정대상물의 표면으로부터 반사된 상기 제1 단색광 및 상기 제2 단색광을 촬상하는 흑백 카메라와; 상기 제1 단색광 및 상기 제2 단색광이 상기 측정대상물의 표면에 각각 조사되는 상태에서 상기 제1 단색광 및 상기 제2 단색광에 각각 대응하는 제1 흑백 이미지 데이터 및 제2 흑백 이미지 데이터가 획득되도록 상기 제1 광원, 상기 제2 광원 및 상기 흑백 카메라를 제어하며, 상기 제1 흑백 이미지 데이터 및 상기 제2 흑백 이미지 데이터를 이용하여 상기 측정대상물의 표면에 대한 합성 컬러 이미지를 생성하는 제어부를 포함하는 것을 특징으로 한다. 이에 따라, 저비용의 흑백 카메라를 이용하여 컬러 2D 이미지를 획득 가능하게 되고, 컬러 카메라보다 처리 속도가 빠른 흑백 카메라를 이용함으로써 처리 속도 또한 향상시킬 수 있다.
PCT/KR2009/001611 2008-05-19 2009-03-30 표면형상 측정장치 WO2009142390A2 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011510413A JP5162702B2 (ja) 2008-05-19 2009-03-30 表面形状測定装置
EP09750712.3A EP2282163A4 (en) 2008-05-19 2009-03-30 DEVICE FOR MEASURING A SURFACE PROFILE
US12/598,578 US8487999B2 (en) 2008-05-19 2009-03-30 Apparatus for measurement of surface profile
CN2009801028726A CN101970981A (zh) 2008-05-19 2009-03-30 表面轮廓测量设备

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0046004 2008-05-19
KR1020080046004A KR100902170B1 (ko) 2008-05-19 2008-05-19 표면형상 측정장치

Publications (2)

Publication Number Publication Date
WO2009142390A2 WO2009142390A2 (ko) 2009-11-26
WO2009142390A3 true WO2009142390A3 (ko) 2010-01-21

Family

ID=40982599

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/001611 WO2009142390A2 (ko) 2008-05-19 2009-03-30 표면형상 측정장치

Country Status (7)

Country Link
US (1) US8487999B2 (ko)
EP (1) EP2282163A4 (ko)
JP (1) JP5162702B2 (ko)
KR (1) KR100902170B1 (ko)
CN (1) CN101970981A (ko)
TW (1) TWI414749B (ko)
WO (1) WO2009142390A2 (ko)

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CN102305600B (zh) * 2011-05-17 2013-04-24 东莞市神州视觉科技有限公司 一种贴片印刷锡膏快速三维测量方法
CN103476324B (zh) * 2011-11-11 2015-09-02 奥林巴斯医疗株式会社 色彩信号传输装置、无线影像传输系统以及发送装置
CN103292703A (zh) * 2012-02-24 2013-09-11 天津三星电机有限公司 一种基于Labview的贴片电容电极宽度测量方法
US9074886B2 (en) * 2012-07-09 2015-07-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Line-width measurement device and measurement method using the same
KR101394436B1 (ko) 2012-08-20 2014-05-13 (주) 루켄테크놀러지스 3차원 표면 형상 측정장치 및 3차원 표면 형상 측정방법
CN102980526B (zh) * 2012-08-23 2016-08-24 杭州先临三维科技股份有限公司 用黑白相机获取彩色图像的三维扫描仪及其扫描方法
CN103115589B (zh) * 2013-02-01 2017-08-25 厦门思泰克智能科技股份有限公司 一种红绿蓝三色led光测量装置
CN103234476B (zh) * 2013-04-01 2014-04-02 廖怀宝 物体二维轮廓识别方法
CN103499296A (zh) * 2013-10-21 2014-01-08 东华大学 基于机器视觉的批量零件自动检测系统及方法
MX364011B (es) * 2014-05-05 2019-04-11 Arconic Inc Aparato y metodo de medicion de soldadura.
CN104155307A (zh) * 2014-08-27 2014-11-19 昆山元崧电子科技有限公司 应用于aoi检测的3d视觉复检设备
CN106168467A (zh) * 2015-05-20 2016-11-30 上海沸谷自动化科技有限公司 一种三维检测装置及方法
CN104949632A (zh) * 2015-07-07 2015-09-30 北京博维恒信科技发展有限公司 物体表面形状三维扫描系统
JP6917762B2 (ja) * 2017-05-09 2021-08-11 株式会社キーエンス 画像検査装置
JP6857079B2 (ja) * 2017-05-09 2021-04-14 株式会社キーエンス 画像検査装置
CN110475036B (zh) * 2019-06-28 2021-08-27 佛山市景瞳科技有限公司 一种多谱段陶瓷光谱还原系统及方法
CN113032919B (zh) * 2021-03-12 2022-03-04 奥特斯科技(重庆)有限公司 部件承载件制造方法、处理系统、计算机程序和系统架构

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Also Published As

Publication number Publication date
US20100289893A1 (en) 2010-11-18
JP2011521256A (ja) 2011-07-21
EP2282163A4 (en) 2013-09-04
KR100902170B1 (ko) 2009-06-10
JP5162702B2 (ja) 2013-03-13
EP2282163A2 (en) 2011-02-09
TW200951398A (en) 2009-12-16
US8487999B2 (en) 2013-07-16
WO2009142390A2 (ko) 2009-11-26
CN101970981A (zh) 2011-02-09
TWI414749B (zh) 2013-11-11

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