WO2009119155A1 - 塗布膜形成方法及び塗布膜形成装置 - Google Patents
塗布膜形成方法及び塗布膜形成装置 Download PDFInfo
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- WO2009119155A1 WO2009119155A1 PCT/JP2009/051468 JP2009051468W WO2009119155A1 WO 2009119155 A1 WO2009119155 A1 WO 2009119155A1 JP 2009051468 W JP2009051468 W JP 2009051468W WO 2009119155 A1 WO2009119155 A1 WO 2009119155A1
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- WIPO (PCT)
- Prior art keywords
- coating
- coating film
- liquid
- tank
- dip tank
- Prior art date
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 239000007788 liquid Substances 0.000 claims abstract description 170
- 238000000576 coating method Methods 0.000 claims description 323
- 239000011248 coating agent Substances 0.000 claims description 322
- 230000002093 peripheral effect Effects 0.000 claims description 44
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000007599 discharging Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 25
- 239000011148 porous material Substances 0.000 description 12
- 239000002243 precursor Substances 0.000 description 8
- 238000000926 separation method Methods 0.000 description 7
- 239000012528 membrane Substances 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 6
- 230000000630 rising effect Effects 0.000 description 6
- 229920001187 thermosetting polymer Polymers 0.000 description 6
- 238000012856 packing Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000009719 polyimide resin Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 230000010349 pulsation Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/06—Tubular membrane modules
- B01D63/066—Tubular membrane modules with a porous block having membrane coated passages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/021—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/42—Details of membrane preparation apparatus
Definitions
- the present invention relates to a method and an apparatus for forming a coating film having various functions on the surface of an object.
- a filter for separating a specific gas or liquid from a mixture of a plurality of types of gases or liquids a filter having a separation membrane formed on the surface of a porous body is known.
- the separation membrane is formed by applying a solution of the separation membrane precursor to the surface of the porous body on which the separation membrane is to be formed to form a coating membrane (film formation), and then drying and heat-treating it. Made.
- the production of the printed circuit board includes a step of forming a resist film having a uniform thickness on the surface of the substrate, and the formation of the resist film is performed by applying a resist solution to the surface of the substrate.
- a liquid (coating liquid) for forming the film is applied to the surface of a predetermined object (application object).
- the dip method has been widely used as a method.
- the object to be coated is immersed in a coating solution filled in a container (dip tank), and after a certain amount of time, the coating object is applied to the coating solution. It is performed in the procedure of pulling up.
- the present invention has been made in view of such conventional circumstances, and the object of the present invention is that a large-scale device for moving the application object is not required, and the application object is simpler and safer.
- Another object of the present invention is to provide a coating film forming method and a coating film forming apparatus capable of forming a coating film.
- the following coating film forming method and coating film forming apparatus are provided.
- a coating object for forming a coating film is placed in a dip tank, and a coating liquid for forming the coating film is fed into the dip tank to form a coating film for the coating object. After raising the liquid level of the coating liquid until the uppermost part of the part to be immersed in the coating liquid, by discharging the coating liquid out of the dip tank and lowering the liquid level of the coating liquid.
- a rise in the liquid level due to the feeding of the coating liquid into the dip tank and a drop in the liquid level due to the discharge of the coating liquid to the outside of the dip tank are divided into a solution tank containing the coating liquid and the dip tank.
- the coating film forming method according to [1] which is performed by a pump provided on a communicating conduit.
- a coating film forming apparatus for forming a coating film by coating a coating liquid on at least a part of the surface of a coating target, a dip tank for storing the coating target, and the coating liquid
- a coating film forming apparatus (first) comprising: a solution tank to be accommodated; an elevating device for raising and lowering the solution tank; a conduit communicating the solution tank and the dip tank; and a valve provided on the conduit. Coating film forming apparatus).
- a coating film forming apparatus for forming a coating film by applying a coating liquid to at least a part of the surface of a coating object, the dip tank accommodating the coating object, and the coating liquid
- a coating film forming apparatus (second coating film forming apparatus) comprising: a solution tank to be stored; a conduit communicating the solution tank and the dip tank; and a pump provided on the conduit.
- a pressurized gas supply device for supplying pressurized gas to a space formed by the inner peripheral surface of the dip tank, the outer peripheral surface of the application target, and the seal member [8] ]
- the coating-film formation apparatus of description
- an operation for forming a coating film on a coating object can be performed by moving the coating liquid up and down without moving the coating object.
- a large-scale apparatus for moving the object is not necessary, and there is no danger associated with the movement of the large application object, and a simple and safe coating film can be formed.
- the liquid level lowering speed is constant, a film having a uniform thickness can be formed regardless of the weight and shape of the object to be coated.
- by installing a plurality of coating objects in the dip tank it is possible to form a coating film on the plurality of coating objects at the same time, thereby shortening the operation time.
- the coating film forming method of the present invention can be easily carried out, and the effect obtained by the coating film forming method can be enjoyed.
- the coating object is a tube shape or monolith shape having an internal space communicating with the outside
- the coating object is to be formed only when the coating film is formed only on the inner surface surrounding the internal space.
- a pressurized gas is introduced into a space formed by the inner peripheral surface of the dip tank, the outer peripheral surface of the application target, and the seal member. If the coating liquid is fed in while supplying the pressurized gas to the space, the pressurized gas flows into the pores of the porous body and the inside of the pores is pressurized. Thus, it is possible to prevent the coating liquid from penetrating into the pores, and a coating film having a uniform thickness can be formed on the inner surface. Furthermore, if a solution tank with adjustable internal pressure is used, the inside of the solution tank can be pressurized when the coating solution is fed to increase the feeding rate to the dip tank. The penetration into the hole can be suppressed.
- the apparatus when a pump is used for raising and lowering the liquid level of the coating liquid, there is a possibility that the liquid level lowering speed slightly varies due to the pulsation of the pump, but there is an advantage that the apparatus can be downsized.
- the device when using the raising and lowering of the solution tank for raising and lowering the liquid level of the coating solution, the device is slightly larger than when using a pump, but there is no pulsation like a pump, so It is easy to keep the descent speed of the surface constant, and it is easy to form a coating film having a uniform thickness.
- a pump since a pump is not used, it is advantageous in terms of safety and durability when an organic solvent having high solubility, volatility, and flammability or a highly corrosive solution such as acid or alkali is used as a coating solution.
- FIG.1 and FIG.2 It is a schematic diagram which shows an example of embodiment of the 1st coating film forming apparatus of this invention. It is a schematic diagram which shows an example of embodiment of the 2nd coating film forming apparatus of this invention. It is the schematic showing the inside of the dip tank of the coating film forming apparatus shown in FIG.1 and FIG.2. It is a perspective view which shows an example of the coating target object in this invention. It is a perspective view which shows another example of the application target object in this invention.
- the object to be coated is formed in a dip tank, and the coating liquid for forming the coating film is sent into the dip tank.
- the coating solution is discharged out of the dip tank and then the coating solution By lowering the liquid level, a coating film is formed on the coating object.
- the coating film forming method of the present invention includes a series of coating film forming steps (film forming steps) in which an object to be coated is immersed in a coating solution and then separated from the coating solution above the liquid surface. This is not performed by the vertical movement of the object to be coated as in the prior art described above, but by raising and lowering the liquid level of the coating liquid.
- the coating film can be formed without moving the coating object, a large apparatus for moving the coating object becomes unnecessary. Moreover, even if the application target is large, there is no danger associated with the moving operation. Furthermore, if the lowering speed when the liquid level of the coating liquid is lowered is constant, a film having a uniform thickness can be formed regardless of the weight and shape of the object to be coated. Also, when it is desired to form a coating film on a plurality of coating objects at the same time, there is no need to support and move each coating object up and down as in the past, and a plurality of coating objects are installed in the dip tank. Then, since the coating film can be formed by exactly the same operation as that for forming the coating film on one coating object, it is not time-consuming and the working time can be shortened.
- the rising of the liquid level due to the feeding of the coating liquid into the dip tank and the lowering of the liquid level due to the discharge of the coating liquid outside the dip tank may be performed by any method, but it is preferable.
- a coating liquid is accommodated and moved up and down a solution tank connected to a dip tank by a conduit.
- the solution tank is kept until the liquid level of the coating solution in the solution tank reaches the height of the uppermost part of the part where the coating film of the coating object to be formed in the dip tank is to be formed. Go up. As a result, the coating liquid is fed into the dip tank from the solution tank through the conduit, but the liquid level of the solution tank in communication with the coating liquid in the dip tank is the same at atmospheric pressure. The liquid level of the applied coating solution also reaches the height of the uppermost portion. After the part where the coating film of the coating object is to be formed is immersed in the coating liquid, the solution tank is kept until the level of the coating liquid in the solution tank reaches below the lowest part of the coating object. Go down. As a result, the liquid level of the coating liquid in the dip tank also reaches below from the lowermost part, and a coating film is formed on the coating object by the lowering of the liquid level.
- the liquid level may be raised and lowered by a pump provided on a conduit that connects a solution tank containing a coating solution and a dip tank. That is, by first rotating the pump (forward rotation), the coating liquid in the solution tank is sent to the dip tank through the conduit, and the liquid level of the coating liquid in the dip tank is set in the dip tank. The coating film is raised until reaching the top of the part to be formed. After that, by rotating the pump in reverse, the coating liquid in the dip tank is discharged, and the liquid level of the coating liquid in the dip tank is lowered until it reaches below the lowermost part of the coating object installed in the dip tank. Let A coating film is formed on the coating object by the lowering of the liquid level.
- the speed at which the liquid level of the coating liquid is raised is not particularly limited.
- the coating target is a porous body
- the coating liquid penetrates into the pores. Since it may be difficult to form a coating film with a smooth surface and a uniform thickness, in such a case, the time during which the coating object comes into contact with the coating solution is shortened to prevent penetration into the pores. From this point of view, it is preferable that the time required for the liquid surface to reach the uppermost part of the site where the coating film is to be formed from the lowermost part of the object to be coated is about 10 to 60 seconds.
- this time may be controlled by the rising speed of the solution tank when the liquid level is raised and lowered by raising and lowering the solution tank as described above, but on the conduit that connects the solution tank and the dip tank.
- the rising speed of the liquid level in the dip tank You may make it speed up.
- a separate conduit for feeding the liquid is provided and the above operation is performed by pressurizing the solution tank, or the time is adjusted by adjusting the output of the pump. Can be controlled.
- the speed at which the liquid level of the coating liquid is lowered is not particularly limited, but this speed affects the thickness of the coating film formed on the coating object, so that the intended coating is performed. It is preferable to set appropriately within a range of about 0.1 to 20 cm / min depending on the thickness of the film.
- This lowering speed can be controlled by the lowering speed of the solution tank, for example, when the liquid level is raised and lowered by raising and lowering the solution tank as described above. Further, when the liquid level is raised and lowered using the pump as described above, it can be controlled by adjusting the output of the pump. In order to make the thickness of the coating film uniform, it is preferable to make the descending speed constant. From this viewpoint, the liquid level is raised and lowered by raising and lowering the solution tank that does not generate pulsation such as a pump. Is desirable.
- the object to be coated has a shape having an internal space communicating with the outside, such as a tube shape or a monolith shape
- the coating object is placed in the dip tank in such a direction that the coating liquid can rise and fall within the internal space.
- the application target 1 is a monolith shape having a plurality of cells (through holes) 2 or a tube shape having a hollow portion 3
- the components of the coating solution may be appropriately selected depending on the function of the film to be formed.
- a carbon film precursor heat treatment is performed.
- a resin such as a resin that carbonizes when applied can be used as a coating solution.
- FIG. 1 is a schematic diagram showing an example of an embodiment of a first coating film forming apparatus of the present invention
- FIG. 2 is a schematic diagram showing an example of an embodiment of a second coating film forming apparatus of the present invention
- FIG. 3 is a schematic view showing the inside of the dip tank of the coating film forming apparatus shown in FIGS. 1 and 2.
- the illustrated embodiment shows an example in which a monolithic porous body having a plurality of cells 2 is used as the coating object 1, and a coating film is formed only on the inner peripheral surface of the cell 2.
- the coating object and the coating target part in the coating film forming apparatus of the present invention are not limited to this.
- the first coating film forming apparatus 10 of the present invention is for forming a coating film by applying the coating liquid 5 to at least a part of the surface of the coating object 1 and contains the coating object 1.
- a solution tank 11 for storing the coating solution 5, an elevating device 12 for raising and lowering the solution tank 11, a conduit 13 communicating the solution tank 11 and the dip vessel 30, and the like.
- a valve 14 for controlling the flow of the coating liquid 5 to at least a part of the surface of the coating object 1 and contains the coating object 1.
- the conduit 13 is preferably made of a flexible rubber hose or SUS flexible tube so that it can be bent freely as the solution tank 11 moves up and down.
- an air supply pipe 15 and a valve 16 for supplying pressurized gas are provided at the upper part of the solution tank 11, and the pressurized gas is supplied through the air supply pipe 15.
- the internal pressure of the solution tank 11 can be adjusted by supplying it to increase the pressure in the solution tank 11 or by reducing the increased pressure by opening the valve 16.
- the pressure in the solution tank 11 is monitored by a pressure gauge 17.
- a packing is provided as a seal member 31 that seals between the upper and outer peripheral surfaces of the application object 1 and the inner peripheral surface of the dip tank 30, whereby the inner peripheral surface of the dip tank 30 is provided.
- the coating liquid 5 fed into the dip tank 30 does not flow into the space 32 formed by the outer peripheral surface of the application target 1 and the seal member 31.
- the dip tank 30 is provided with an air supply hole 33 for supplying a pressurized gas to the space 32, and a pressurization provided outside is provided through an air supply pipe 34 connected to the air supply hole 33.
- a pressurized gas can be supplied to the space 32 from a gas supply device.
- an adjustment valve 35 for adjusting the pressure of the pressurized gas to be supplied and a pressure gauge 36 for monitoring the pressure are provided on the air supply pipe 34.
- the coating object 1 is placed in the dip tank 30.
- the monolithic porous body which is the coating object 1 of the present embodiment, is intended to be used as a liquid separation filter by forming a separation membrane on the inner peripheral surface of the cell, as shown in FIG.
- the glass seal 4 for preventing liquid leakage is applied to the end surface and the outer peripheral portion in the vicinity of the end surface.
- the coating liquid 5 can be prevented from adhering.
- a sealing member 31 is not necessary.
- the opening end of the cell 2 is closed with a mask material or the like so that the coating liquid does not flow into the cell 2. It installs in the dip tank 30 as a state.
- the solution tank 11 is filled with the coating solution 5 with the valve 14 closed, and the solution tank 11 is raised until the liquid level 41 reaches above the height of the upper end of the coating object 1.
- the coating solution 5 in the solution tank 11 is sent into the dip tank 30.
- the raising of the solution tank 11 may be performed with the valve 14 opened.
- the pressurized gas is supplied from the air feed pipe 15 into the solution tank 11 before the valve 14 is opened to increase the internal pressure. You can leave it.
- the coating liquid 5 thus fed into the dip tank 30 flows into the cell 2 from the lower end of the cell 2 of the coating object 1 and gradually raises its liquid level 42, so that the coating liquid in the solution tank 11. 5 reaches the same height as the liquid level 41, that is, above the height of the upper end of the application target 1.
- the pressurized gas is supplied to the solution tank 11 and the internal pressure is increased, the heights of the two liquid surfaces 41 and 42 are the same in a state where the pressure in the solution tank 11 is released and the pressure is set to atmospheric pressure. become.
- the coating object 1 is a monolithic porous body having a plurality of cells 2 as in the present embodiment
- the coating installed in the dip tank 30 while supplying pressurized gas to the space 32.
- the pressurized gas supplied to the space 32 flows into the pores of the porous body and pressurizes the pores. It does not penetrate so much into the pores, and most of them adhere only to the inner peripheral surface surrounding the cell 2, and as a result, a coating film having a smooth surface and a uniform thickness can be obtained.
- the pressure of the pressurized gas to be supplied is preferably 1 to 1000 kPa as a value measured by the pressure gauge 35. As a result, the pressure in the pores of the application object 1 is also approximately 1 to 1000 kPa.
- the solution tank 11 is lowered.
- the valve 16 is opened to release the pressure in the solution tank 11 and then the solution tank 11 is lowered.
- the solution tank 11 is lowered as described above, the liquid level 41 of the coating solution 5 in the solution tank 11 is also lowered, and the coating solution in the dip tank 30 (coating in the cell of the coating object) is followed. Since the liquid level 42 of the liquid 5 also descends in the same manner, when the solution tank 11 is lowered until the liquid level 42 comes below the lower end of the coating object 1, the coating object 1 is removed from the coating liquid 5 in the liquid tank 42. It will be in the state which left
- the coating film is formed on the entire inner peripheral surface of the cell 2 by lowering the liquid level 42 of the coating solution 5.
- the structure of the raising / lowering device 12 for raising and lowering the solution tank 11 is not particularly limited. From the viewpoint of uniforming the thickness of the coating film, the raising / lowering apparatus 12 can be raised and lowered while maintaining a constant speed. The ones made are preferred.
- the lifting device 12 in this embodiment includes a support portion 51 that supports the solution tank 11 and a drive device (not shown) that lifts and lowers the support portion 51 along a support column 52 that is erected in the vertical direction.
- an inverter type variable speed motor or the like is preferably used.
- the second coating film forming apparatus 20 of the present invention is for forming a coating film by applying the coating liquid 5 to at least a part of the surface of the coating object 1 and contains the coating object 1.
- the structure of the dip tank 30 in this embodiment is the same as the structure of the dip tank 30 in embodiment of said 1st coating film forming apparatus 10, including a secondary component, about the detail Description of is omitted.
- the coating object 1 is placed in the dip tank 30 in the same manner as in the embodiment using the first coating film forming apparatus 10. To do.
- the coating liquid 5 filled in the solution tank 21 is fed into the dip tank 30 through the conduit 23 by rotating the pump 24 (forward rotation).
- the coating liquid 5 thus fed into the dip tank 30 flows into the cell 2 from the lower end of the cell 2 of the coating object 1 and gradually raises the liquid level 42 thereof.
- the feeding of the coating liquid 5 by the pump 24 is performed until the liquid level 42 reaches above the height of the upper end of the coating object 1.
- the application target object 1 is a monolithic porous body having a plurality of cells 2, as in the embodiment of the first coating film forming apparatus 10,
- the cell 2 of the coating object 1 installed in the dip tank 30 while supplying pressurized gas to the space 32 formed by the inner circumferential surface, the outer circumferential surface of the coating object 1, and the seal member (packing) 31.
- the pressurized gas supplied into the space 32 flows into the pores of the porous body and pressurizes the pores, so that the coating liquid permeates the pores very little.
- most of them adhere only to the inner peripheral surface surrounding the cell, and a coating film having a smooth surface and a uniform thickness can be obtained.
- the pump 24 is rotated in the reverse direction, whereby the coating liquid in the dip tank 30 (coating object) The coating liquid 5) is discharged and the liquid level 42 is lowered.
- the coating liquid 5 is discharged by the reverse rotation of the pump 24 until the liquid level 42 comes below the lower end of the coating object 1, and the coating object 1 is detached from the coating liquid 5 above the liquid level 42. It is assumed that Thus, the coating film is formed on the entire inner peripheral surface of the cell 2 by lowering the liquid level of the coating liquid 5.
- Example 1 A monolithic porous body having a cylindrical outer shape (a diameter of 180 mm, a length of 1000 mm, and a glass seal on the end face) is used as a coating object, and a thermosetting polyimide is formed on the inner peripheral surface of the cell.
- a coating member 1 is placed in a dip tank 30 of the coating film forming apparatus 10 shown in FIG. . Further, the solution tank 11 is filled with the solution of the thermosetting polyimide resin precursor with the valve 14 closed, and the solution tank 11 is raised until the liquid level reaches above the height of the upper end of the application target 1. At the same time, pressurized gas was supplied into the solution tank 11 to pressurize the inside of the solution tank 11.
- the liquid level of the solution in the solution tank 11 is applied to the solution tank 11 at a speed of 5 cm / min. It was lowered until it reached below the lower end of the object 1. Thereby, the liquid level of the solution in the dip tank 30 (the solution in the cell of the coating object) also followed and descended at the same speed, and a coating film was formed on the inner peripheral surface of the cell 2. After forming the coating film in this manner, the surface of the coating film was preliminarily dried at 120 ° C. and further cured by heating at 300 ° C. The obtained film had a smooth surface and a substantially uniform thickness.
- Example 2 A monolithic porous body having a cylindrical outer shape (a diameter of 180 mm, a length of 1000 mm, and a glass seal on the end face) is used as a coating object, and a thermosetting polyimide is formed on the inner peripheral surface of the cell.
- a coating member 1 is installed in a dip tank 30 of the coating film forming apparatus 20 shown in FIG. .
- thermosetting polyimide resin precursor filled in 21 was fed into the dip tank 30 by rotating the pump 24 (forward rotation).
- the solution thus fed into the dip tank 30 reaches the lower end of the object 1 to be applied from the lower part (bottom part) of the dip tank 30 and further flows into the cell 2 to gradually raise its liquid level.
- the pump was stopped when the liquid level rose slightly above the upper end of the object 1.
- the time from when the liquid level reached the lower end of the object 1 to the upper end was 60 seconds.
- the pump 24 is rotated in the reverse direction to discharge the solution in the dip tank 30 (solution in the coating target cell), thereby lowering the liquid level at a rate of 5 cm / min.
- a coating film was formed on the peripheral surface. After forming the coating film in this manner, the surface of the coating film was preliminarily dried at 120 ° C. and further cured by heating at 300 ° C. The obtained film had a smooth surface and a substantially uniform thickness.
- Example 3 The coating shown in FIG. 1 is used in order to simultaneously form a coating film made of a thermosetting polyimide resin precursor on the outer peripheral surface of 15 porous tubes (outer diameter: 10 mm, length: 1000 mm). These 15 coating objects were placed in the dip tank 30 of the film forming apparatus 10 in a state where the opening portions at both ends were closed with a mask material. Further, the solution tank 11 is filled with the solution of the thermosetting polyimide resin precursor in a state in which the valve 14 is closed, and the solution tank 11 is raised until the liquid level reaches above the height of the upper end of the application target. At the same time, pressurized gas was supplied into the solution tank 11 to pressurize the inside of the solution tank 11.
- the valve 14 was opened, and the solution in the solution tank 11 was sent into the dip tank 30.
- the solution thus fed into the dip tank 30 reaches the lower end of the object to be applied from the lower part (bottom part) of the dip tank 30, and further gradually raises the liquid level, and finally from the upper end of the object to be applied.
- the liquid level rose slightly upward, and the entire outer peripheral surface of the application object was immersed in the solution.
- the time from when the liquid level reached the lower end of the coated object to the upper end was 40 seconds.
- the liquid level of the solution in the solution tank 11 is applied to the solution tank 11 at a speed of 5 cm / min. It was lowered until it reached below the bottom of the object. Thereby, the liquid level of the solution in the dip tank 30 also followed and descended at the same speed, and a coating film was formed on the outer peripheral surface of the coating target. After forming the coating film in this manner, the surface of the coating film was preliminarily dried at 120 ° C. and further cured by heating at 300 ° C. The obtained film had a smooth surface and a substantially uniform thickness.
- the present invention can be suitably used as a method and apparatus for forming a coating film having various functions on the surface of an object.
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Abstract
Description
外形が円柱状で複数のセルを有するモノリス形状の多孔質体(直径180mm、長さ1000mmで、端面にガラスシールを施したもの)を塗布対象物とし、そのセル内周面に熱硬化性ポリイミド樹脂前駆体からなる塗布膜を形成すべく、図1に示す塗布膜形成装置10のディップ槽30内に、図3のようにシール部材(パッキン)31を配して塗布対象物1を設置した。また、弁14を閉じた状態で溶液タンク11内に熱硬化性ポリイミド樹脂前駆体の溶液を満たしておき、その液面が塗布対象物1の上端の高さより上方に達するまで溶液タンク11を上昇させるとともに、溶液タンク11内に加圧ガスを供給して溶液タンク11内部を加圧した。
外形が円柱状で複数のセルを有するモノリス形状の多孔質体(直径180mm、長さ1000mmで、端面にガラスシールを施したもの)を塗布対象物とし、そのセル内周面に熱硬化性ポリイミド樹脂前駆体からなる塗布膜を形成すべく、図2に示す塗布膜形成装置20のディップ槽30内に、図3のようにシール部材(パッキン)31を配して塗布対象物1を設置した。
15本のチューブ形状の多孔質体(外径10mm、長さ1000mm)を塗布対象物とし、その外周面に熱硬化性ポリイミド樹脂前駆体からなる塗布膜を同時に形成すべく、図1に示す塗布膜形成装置10のディップ槽30内に、これら15本の塗布対象物を、その両端開口部をマスク材で塞いだ状態で設置した。また、弁14を閉じた状態で溶液タンク11内に熱硬化性ポリイミド樹脂前駆体の溶液を満たしておき、その液面が塗布対象物の上端の高さより上方に達するまで溶液タンク11を上昇させるとともに、溶液タンク11内に加圧ガスを供給して溶液タンク11内部を加圧した。
Claims (10)
- 塗布膜を形成しようとする塗布対象物をディップ槽内に設置し、前記塗布膜を形成するための塗布液を前記ディップ槽内に送り込んで、前記塗布対象物の塗布膜を形成しようとする部位の最上部が前記塗布液に浸かるまで前記塗布液の液面を上昇させた後、前記塗布液を前記ディップ槽外に排出して前記塗布液の液面を下降させて行くことにより、前記塗布対象物に塗布膜を形成する塗布膜形成方法。
- 前記塗布液のディップ槽内への送り込みによる液面の上昇及び前記塗布液のディップ槽外への排出による液面の下降を、前記塗布液を収容し、導管により前記ディップ槽と連通された溶液タンクの昇降により行う請求項1に記載の塗布膜形成方法。
- 前記塗布液のディップ槽内への送り込みによる液面の上昇及び前記塗布液のディップ槽外への排出による液面の下降を、前記塗布液を収容した溶液タンクと前記ディップ槽とを連通する導管上に設けられたポンプにより行う請求項1に記載の塗布膜形成方法。
- 前記塗布液の液面を一定の速度で下降させて行く請求項1に記載の塗布膜形成方法。
- 塗布対象物の表面の少なくとも一部に塗布液を塗布することにより塗布膜を形成するための塗布膜形成装置であって、
前記塗布対象物を収容するディップ槽と、
前記塗布液を収容する溶液タンクと、
前記溶液タンクを昇降させる昇降装置と、
前記溶液タンクと前記ディップ槽とを連通する導管と、
前記導管上に設けられた弁と、
を備えた塗布膜形成装置。 - 塗布対象物の表面の少なくとも一部に塗布液を塗布することにより塗布膜を形成するための塗布膜形成装置であって、
前記塗布対象物を収容するディップ槽と、
前記塗布液を収容する溶液タンクと、
前記溶液タンクと前記ディップ槽とを連通する導管と、
前記導管上に設けられたポンプと、
を備えた塗布膜形成装置。 - 前記溶液タンクが、その内部圧力を調節可能なものである請求項5に記載の塗布膜形成装置。
- 前記塗布対象物の上端外周面及び下端外周面と前記ディップ槽の内周面との間をシールするシール部材を備えた請求項5~7の何れか一項に記載の塗布膜形成装置。
- 前記ディップ槽の内周面と、前記塗布対象物の外周面と、前記シール部材とにより形成される空間に、加圧ガスを供給するための加圧ガス供給装置を備えた請求項8に記載の塗布膜形成装置。
- 前記塗布対象物がモノリス形状の多孔質体である請求項5~9の何れか一項に記載の塗布膜形成装置。
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CA2689186A CA2689186C (en) | 2008-03-24 | 2009-01-29 | Coating membrane forming method and coating membrane forming apparatus |
EP09725642.4A EP2255891B1 (en) | 2008-03-24 | 2009-01-29 | Coat film forming method |
CN200980000495.5A CN101687214B (zh) | 2008-03-24 | 2009-01-29 | 涂敷膜形成方法以及涂敷膜形成装置 |
JP2010505421A JP5547060B2 (ja) | 2008-03-24 | 2009-01-29 | 塗布膜形成装置 |
US12/627,092 US8623465B2 (en) | 2008-03-24 | 2009-11-30 | Coat film forming method and coat film forming apparatus |
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EP (1) | EP2255891B1 (ja) |
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JP2015525126A (ja) * | 2012-06-05 | 2015-09-03 | コーニング インコーポレイテッド | 多孔質支持体上にポリマー薄膜を調製する方法 |
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ES2402367T3 (es) * | 2006-12-20 | 2013-05-03 | Homag Holzbearbeitungssysteme Ag | Dispositivo y procedimiento para recubrir piezas |
CN102430503A (zh) * | 2011-11-24 | 2012-05-02 | 广东生益科技股份有限公司 | 玻纤布浸胶方法及其装置 |
DE102013216113A1 (de) | 2013-08-14 | 2015-03-05 | Homag Holzbearbeitungssysteme Gmbh | Beschichtungsaggregat |
CN103706512B (zh) * | 2013-12-23 | 2016-01-27 | 珠海天威技术开发有限公司 | 感光鼓的涂层涂覆方法及涂覆装置 |
DE102021105087A1 (de) | 2021-03-03 | 2022-09-08 | Dyemansion Gmbh | Oberflächenbehandlungsvorrichtung und Verfahren zur Oberflächenbehandlung |
CN113058804B (zh) * | 2021-04-02 | 2022-04-01 | 广东百合医疗科技股份有限公司 | 一种含药导管涂敷装置 |
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JP5547060B2 (ja) | 2014-07-09 |
EP2255891A1 (en) | 2010-12-01 |
EP2255891B1 (en) | 2018-10-03 |
CN101687214B (zh) | 2014-04-16 |
CN101687214A (zh) | 2010-03-31 |
CA2689186C (en) | 2014-11-25 |
EP2255891A4 (en) | 2014-04-16 |
CA2689186A1 (en) | 2009-10-01 |
US8623465B2 (en) | 2014-01-07 |
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JPWO2009119155A1 (ja) | 2011-07-21 |
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