Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
  • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
  • H01J37/222—Image processing arrangements associated with the tube
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/244—Detectors; Associated components or circuits therefor
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
  • H01J37/261—Details
  • H01J37/263—Contrast, resolution or power of penetration
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
  • H01J37/261—Details
  • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
  • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
  • H01J37/3045—Object or beam position registration
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/245—Detection characterised by the variable being measured
  • H01J2237/24571—Measurements of non-electric or non-magnetic variables
  • H01J2237/24578—Spatial variables, e.g. position, distance
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/25—Tubes for localised analysis using electron or ion beams
  • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
  • H01J2237/2511—Auger spectrometers
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/25—Tubes for localised analysis using electron or ion beams
  • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
  • H01J2237/2555—Microprobes, i.e. particle-induced X-ray spectrometry
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/30—Electron or ion beam tubes for processing objects
  • H01J2237/304—Controlling tubes
  • H01J2237/30455—Correction during exposure

Definitions

• the invention relates to methods and systems for material analysis of a microscopic element.
• Integrated circuits are manufactured by a highly complex manufacturing process.
• Various manufacturing process faults can result in the deposition of microscopic elements on the integrated circuits. Solving these various manufacturing faults can be assisted by determining the materials from which these microscopic elements are made of.
• Various material analysis methods focus a charged particle beam (such as an electron beam or an ion beam) or an X-ray beam onto a microscopic element of interest .
• This charged particle beam typically charges the microscopic element and additionally or alternatively, specimen portions that are proximate to that microscopic element. This charging can deflect the charged particle beam from the microscopic element. Thus, after a certain period the charged particle beam can totally miss the element of interest and the material analysis will not reflect the materials from which the microscopic element is made of.
• Figure 1 illustrates microscopic element 8 and a displacement of a charged particle beam over time. At a beginning of the illumination charged particle beam
• the charged particle beam charges a portion 20 of specimen (illustrated by a horizontal dashed line below microscopic element 8) .
• the charged portion 20 generated an electrical field that displaces the charged particle beam.
• the charged particle beam (illustrated by dashed line 14) is directed towards the surrounding of the microscopic element and does not interact with microscopic element 8.
• Figure 2 illustrates the microscopic element and various areas that are scanned during different points in time, due to the displacement of the charge particle beam.
• the displacement results e.g. from the charging of the specimen (or a portion thereof) .
• the scanning starts microscopic element 8 is located at the center or area 30.
• the scanning electron microscope is directed towards another area 32 and microscopic element 8 is not located at the center to this area.
• microscopic element 8 is completely outside area 36 that is scanned by the charged electron beam. It is noted that this displacement, which in this example resulted from charging effects, is not the result of a deliberate alteration of a parameter of a charged particle beam optics.
• Figure 3 illustrates an example of the displacement (drift) of an electron beam measured in a blanket silicon glass wafer that was tilted at about forty five degrees in relation to a scanning electron microscope column.
• the drift rate along the Y axis was about 1.4 nanometers per second while the drift rate along the X axis was lower. It is expected that if a small microscopic element area is to be scanned by electron beam (for example, electron beam spot placed within microscopic element of 30nmX30nm) for material analysis, then after about 10 seconds the microscopic element will be out of the electron beam spot. It is further expected that the drift rate will be much faster when scanning more easily charging specimen such as those made of low K dielectric materials.
• Figure 1 illustrates a prior art microscopic element and a displacement of a charged particle beam over time
• Figure 2 illustrates a prior art microscopic element and various areas that are scanned during different points in time, due to the displacement of the charge particle beam;
• Figure 3 illustrates a displacement rate (drift) of an electron beam
• Figure 4 illustrates in a schematic manner a microscopic element and a displacement compensated charged electron beam according to an embodiment of the invention
• Figure 5 illustrates the microscopic element and areas that are scanned during material evaluation periods according to an embodiment of the invention
• Figure 6 illustrates a method for material analysis according to an embodiment of the invention
• Figure 7 is a timing diagram that illustrated the timing of various stages of the method of figure 6, according to an embodiment of the invention.
• Figure 8 illustrates a system according to an embodiment of the invention.
• a method for material analysis of a microscopic element comprising: illuminating an area that includes at least a portion of the microscopic element by a charged particle beam, detecting particles that are generated in the area in response to the charged particle beam and analyzing the detected particles to provide an indication about a material characteristic of the microscopic element, wherein the operation of illumination is implemented as a sequence of displacement compensation determination periods, each provided between consecutive material analysis periods, the method further comprising evaluating during a displacement compensation determination period, a displacement of the charged particle beam with respect to the microscopic element and during a consecutive material analysis period applying a spatial adjustment measure as required, thereby compensating for a drift of the charged particle beam.
• the operation of evaluating a displacement of the charged particle beam with respect to the microscopic element comprises assessing a change in a detected location of the microscopic element before and after one or more material analysis periods.
• the length of an area illuminated during one or more the displacement compensation determination period is one of the following: (1) large enough to include a substantial portion of the microscopic element despite the drift of the charged particle beam; (2) larger by about a factor of 10 than a length of an area illuminated during one or more the material analysis periods; (3) larger by about a factor of 10 than a width of the microscopic element; (4) between 250nm to lOOOnm, and a length of an area illuminated during one or more the material analysis periods is between 30nm to 40nm.
• the illumination is provided in spot mode of charged particle beam optics during the material analysis periods and in scan mode of charged particle beam optics during the displacement compensation determination periods.
• the method further comprises calculating a displacement rate of the charged particle beam, and determining a desired length of the material analysis periods so that a significant portion of the microscopic element is illuminated throughout the material analysis periods.
• the application of the spatial adjustment during a material analysis period comprises providing compensation signals to a charged electron beam optics to thereby directing the charged particle beam towards the area that includes the microscopic element during a significant portion of that material analysis period.
• the method further comprises determining the length of the material analysis period in response to an expected displacement rate of the charged particle beam and in response to a spatial characteristic of the spatial compensation insignificant area.
• the method comprises determining a length of the displacement compensation determination period in response to the displacement of the charged particle beam during the first material analysis period.
• a system for material analysis of a microscopic element comprising: a charged particle optics including a deflecting element for illuminating an area with a charged particle beam in a sequence of displacement compensation determination periods, each provided between consecutive material analysis periods and for deflecting the charged particle beam in response to a control signal provided by a voltage supply unit; a material analysis detector for detecting particles generated in the area in response to the charged particle beam; a processor unit coupled to the material analysis detector and the voltage supply unit and configured to analyze the particles detected by the material analysis detector to provide an indication about a material characteristic of the microscopic element, the processing unit further configured to evaluate, during a displacement compensation determination period, a displacement of the charged particle beam with respect to the microscopic element and during a consecutive material analysis period, to provide compensation signals to the voltage supply unit, thereby compensating for a drift of the charged particle beam.
• the processor is adapted in evaluating the displacement, to assessing a change in a detected location of the microscopic element before and after one or more material analysis periods.
• the processing unit is further configured to control the length of one or more of the material analysis period and/or one or more of the displacement compensation determination periods.
• the processing unit is further configured to control the length of an area illuminated during one or more of the material analysis period and/or one or more of the displacement compensation determination periods.
• the processing unit is further configured to calculate a displacement rate of the charged particle beam and determine a desired length of the material analysis periods so that a significant portion of the microscopic element is illuminated throughout the material analysis periods.
• the processing unit is adapted to determine the length of the material analysis period in response to an expected displacement rate of the charged particle beam and in response to a spatial characteristic of the spatial compensation insignificant area. According to yet another embodiment, the processing unit is adapted to determine a length of the displacement compensation determination period in response to the displacement of the charged particle beam during the first material analysis period.
• system and a method for material analysis of a microscopic element includes: illuminating, during a material analysis period, by a charged particle beam at least one spatial compensation insignificant area that comprise a portion (here significant lateral area is not necessary) of the microscopic element and detecting particles that are generated in response to an interaction between the at least one spatial compensation insignificant area and the charged particle beam; wherein the illuminating results in a displacement of the charged particle beam in relation to the microscopic element; illuminating, during at least a portion of a displacement compensation determination period, at least one spatial compensation significant area that comprises at least a significant portion of the microscopic element by the charged particle beam and detecting particles that are generated in response to an interaction between the least one spatial compensation significant area and the charged particle beam; determining a spatial adjustment measure of the charged particle beam required for at least partially compensating for the displacement of the charged particle beam during the illumination of the at least one spatial compensation insignificant area; illuminating, during another
• spatial compensation insignificant area means an area that its image can not assist in determining a spatial compensation required for compensating for a charged particle beam displacement. Conveniently this area is smaller than a minimal area that when imaged can provide information that can assist in determining the spatial compensation.
• a spatial compensation insignificant area is illuminated during a spot mode of charged particle beam optics.
• the spatial compensation insignificant area is not substantially larger than the microscopic particle of interest.
• a charged particle beam that is initially directed towards such a spatial compensation insignificant area is displaced (e.g. due to charging effects) so that it eventually (at the end of the short period) does not illuminate the spatial compensation insignificant area.
• the length of such a compensation insignificant area can be few nanometers.
• such an area is illuminated when a charged particle beam optic operates in a spot mode - the charged particle beam is not scanned.
• a spatial compensation insignificant area can be few tenths of nanometer long (for example about 30nmX30nm till 40nmX40nm) but this is not necessarily so.
• the spot size can be few nanometers wide (for example 4-10nm wide) .
• spatial compensation significant area means an area that its image can assist in determining ' a spatial compensation required for compensating for a charged particle beam displacement.
• a spatial compensation significant area is larger and even is significantly larger than a spatial compensation insignificant area. It is large enough to include at least a significant, substantial portion of the microscopic element of interest despite the displacement of the charged electron beam.
• the length of such a compensation significant area can be few tens of nanometers.
• a spatial compensation significant area can be few hundreds of nanometer long (for example about 250nmX250nm till lOOOnmXIOOOnm) but this is not necessarily so.
• the spot size can be few nanometers wide (for example 4-10nm wide) . Images can be acquired at a rate of few tents of hertz (for example 30 millisecond per frame) and few frames can be acquired per a portion of a spatial compensation determination period.
• material characteristic means any characteristic that can assist in determining a material from which an element is made.
• Figures 4 and 5 illustrate an example of an appliance of spatial compensation measure. Such a measure is applied by executing method 100 or at least some stage of method 600.
• FIG 4 illustrates microscopic element 8 and displacement compensated charged electron beam according to an embodiment of the invention.
• charged particle beam 12 is directed towards microscopic element 8.
• the charged particle beam charges a portion 20 of specimen.
• the charged portion 20 generated an electrical field that displaces the charged particle beam during at least the material analysis period (as illustrated by dashed line 16) .
• This material analysis period is followed by a displacement compensation determination period and an appliance of a spatial adjustment measure. This measure causes the charged particle beam to be directed onto microscopic element 8 despite the mentioned above displacement, as illustrated by curved line 18.
• Figure 5 illustrates microscopic element 8 and areas 32 and 36 that are scanned during material evaluation periods according to an embodiment of the invention.
• a displacement compensation determination period starts and a spatial adjustment measure is applied. This measure causes the charged particle beam to be directed onto spatial compensation insignificant area 36 wherein microscopic element 8 is located at the center of that area.
• Figure 6 illustrates method 100 for material analysis according to an embodiment of the invention.
• Method 100 starts by stage 105 of locating the microscopic element of interest.
• Method 100 can also start by one or more additional initialization stages such as but not limited to stages 110 and 115.
• Stage 110 includes determining the length of one or more material analysis periods so that the significant portion of the microscopic element is illuminated throughout each material analysis periods.
• Stage 115 includes determining spatial characteristics of the first and the second spatial compensation insignificant areas and of the spatial compensation significant area in response to a desired length of a material analysis process. [0045] Stages 110 and 115 are followed by stage 120 of: (i) illuminating, during a material analysis period, by a charged particle beam, at least one spatial compensation insignificant area that includes at least a significant portion of the microscopic element and (ii) detecting particles that are generated in response to an interaction between the at least one spatial compensation insignificant area and the charged particle beam. The illuminating results in a displacement (due to charging effects) of the charged particle beam in relation to the microscopic element.
• more than one spatial compensation insignificant area can be illuminated due to the displacement of the charged particle beam.
• the detection can involve detecting x-rays, auger electrons, backscattered electrons, photons and the like.
• One or more detectors (of one or more types) can be used.
• stage 120 includes activating charged particle beam optics at a spot mode, as illustrated by box 122.
• Stage 120 is followed by stage 140 of (i) illuminating, during at least a portion of a displacement compensation determination period, at least one spatial compensation significant area that includes at least a significant portion of the microscopic element by the charged particle beam and (ii) detecting particles that are generated in response to an interaction between the least one spatial compensation significant area and the charged particle beam.
• Stage 140 can be followed by either one of stages 130, 135, 150 and 160.
• stage 120 is immediately followed by stage 160 then either one of stages 130, 135, 150 and even 170 is executed in parallel to stage 160.
• one of more stages out of stages 130, 135 and especially 150 are executed during a portion of another material analysis period while stage 170 is executed during another portion of the other material analysis period.
• the last scenario is illustrated in the timing diagram of figure 7.
• a material analysis period 191 at least one spatial compensation insignificant area is illuminated. Once that period ends first portion 192' of a displacement compensation determination period 192 starts.
• first portion 192' at least one spatial compensation significant area is illuminated and images of one or more spatial compensation significant areas are acquired.
• second portion 192" the images that were acquired during first portion 192' are processed in order to determine the spatial compensation measure to be applied during second portion 193" of other material analysis period 193.
• the other material analysis period and the displacement compensation determination period do not overlap.
• Stage 130 includes calculating a displacement rate of the charged particle beam.
• Stage 135 includes determining a length of the other material analysis period in response to the displacement of the charged particle beam during the material analysis period.
• Stage 150 includes determining the length of the other material analysis period in response to an expected displacement rate of the charged particle beam and in response to a spatial characteristic of at least one spatial compensation insignificant area.
• Stage 160 includes determining a spatial adjustment measure of the charged particle beam required for at least partially compensating for the displacement of the charged particle beam during at the illumination of the at least one spatial compensation insignificant area.
• Stage 160 is followed by stages 170 and 180.
• Stage 180 includes illuminating, during another material analysis period, at least one spatial compensation insignificant area that includes at least a significant portion of the microscopic element, by the charged particle beam and detecting particles that are generated in response to an interaction between the at least one spatial compensation significant area and the charged particle beam.
• An analysis of particles detected in response to an illumination of at least one spatial compensation insignificant area provides an indication about a material characteristic of the microscopic element.
• Stage 170 includes applying the spatial adjustment measure during at least a portion of the other material analysis period.
• Stage 170 can include stage 172 of providing compensation signals to a charged electron beam optics that directs the charged particle beam towards the second spatial compensation insignificant area.
• bias voltages can introduce a X and Y shifts that will compensate for charged particle beam displacement.
• a material analysis process can require a repetition of multiple stages out of the mentioned above stages and multiple material analysis periods and multiple displacement compensation determination periods will be required before enough information is gained for performing the material analysis.
• Stages 170 and 180 are followed by stage 190 of determining a material characteristic of the microscopic element in response to particles detected during multiple material analysis periods.
• the result of one displacement compensation determination period can be compared to more than one result or more than one previous displacement compensation determination period.
• a comparison can be made to one or more results or even older displacement compensation determination periods so as to ignore unreasonable results.
• other reasons can trigger a comparison between results of more than two displacement compensation determination periods.
• the comparison can include assigning weights to each result and comparing the weighted results.
• various analysis methods can be applied on multiple results of multiple displacement compensation determination periods in order to determine the required spatial compensation measure .
• Figure 8 illustrate system 200 according to an embodiment of the invention.
• system 200 is a scanning electron microscope (SEM) and that the charged electron beam is an electron beam.
• SEM scanning electron microscope
• Electron beam optics includes electron source 202, various electrons and magnetic lenses such as 204, 206, 214, 230 and 234.
• Objective lens 234 is preceded by deflecting coils 230. These deflecting coils are adapted to scan the charged particle beam 111. These deflecting coils can receive a bias signal (from voltage supply unit 208) that shifts the charged electrical beam so that it illuminates a microscopic element. Voltage supply unit 208 also provides a signal that causes the charged particle beam to scan an area.
• System 200 includes a so-called in-lens detector 232 that includes an aperture through which the charged particle beam and some particles that are scattered from an illuminated area pass.
• a material analysis detector 220 can receive some of these particles and generates detection signals that are provided to interface 206.
• Interface 206 can store these signals or otherwise provide these signals to processor 204.
• processor 204 can include multiple computerized entities such as a controller, a material analyzer and the like.
• the charged particle beam optics illuminates a first spatial compensation insignificant area that comprises at least a significant portion of the microscopic element, by a charged particle beam, at least one detector (such as detector 220) detects particles that are generated in response to an interaction between the first spatial compensation insignificant area and the charged particle beam; wherein the illumination results in a displacement of the charged particle beam in relation to the microscopic element.
• the charged particle beam optics illuminates a spatial compensation significant area that comprises at least a significant portion of the microscopic element, by the charged particle beam, the at least one detector (such as detector 220) detects particles that are generated in response to an interaction between the spatial compensation significant area and the charged particle beam.
• Processor 204 determines a spatial adjustment of the charged particle beam required for at least partially compensating for the displacement of the charged particle beam during the material analysis period. The determination is based upon image processing and especially upon the assessment of the change in the relative location of the microscopic element before and after the material analysis period.
• system 200 applies a spatial adjustment measure.
• the charged particle beam optics illuminates a second spatial compensation insignificant area that comprises at least a significant portion of the microscopic element, by the charged particle beam and the at least one detector (such as detector 220) detects particles that are generated in response to an interaction between the second spatial compensation significant area and the charged particle beam.
• an analysis of particles detected during the first and the second material analysis periods provides an indication about a material characteristic of the microscopic element.
• processor 204 is adapted to determine the length of the material analysis period in response to an expected displacement rate of the charged particle beam and in response to a spatial characteristic of the spatial compensation insignificant area.
• processor 204 is adapted to determine the length of the material analysis period so that at least a significant portion of the microscopic element is illuminated throughout the material analysis period. [0072] Conveniently, processor 204 is adapted to calculate a displacement rate of the charged particle beam. [0073] Conveniently, system 200 is adapted to apply the spatial adjustment by providing compensation signals to the charged electron beam optics.
• processor 204 is adapted to determine spatial characteristics of each spatial compensation significant area and of each spatial compensation insignificant area in response to a desired length of a material analysis process.
• the material analysis period is much longer than the displacement compensation determination period.
• processor 204 is adapted to determine a length of the displacement compensation determination period in response to the displacement of the charged particle beam during the first material analysis period.
• the charged particle beam optics is activated at a spot mode during the material analysis period.
• processor 204 is further adapted to determine a material characteristic of the microscopic element in response to particles detected during the material analysis periods.

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• 2009
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