WO2009057195A1 - 弾性波素子、デュープレクサ、通信モジュール、および通信装置 - Google Patents

弾性波素子、デュープレクサ、通信モジュール、および通信装置 Download PDF

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Publication number
WO2009057195A1
WO2009057195A1 PCT/JP2007/071128 JP2007071128W WO2009057195A1 WO 2009057195 A1 WO2009057195 A1 WO 2009057195A1 JP 2007071128 W JP2007071128 W JP 2007071128W WO 2009057195 A1 WO2009057195 A1 WO 2009057195A1
Authority
WO
WIPO (PCT)
Prior art keywords
power feeding
piezoelectric substrate
wave element
elastic wave
interconnection portion
Prior art date
Application number
PCT/JP2007/071128
Other languages
English (en)
French (fr)
Inventor
Kazunori Inoue
Takashi Matsuda
Michio Miura
Suguru Warashina
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to KR1020107003829A priority Critical patent/KR101115185B1/ko
Priority to CN200780100414XA priority patent/CN101796723B/zh
Priority to JP2009538871A priority patent/JP4775978B2/ja
Priority to PCT/JP2007/071128 priority patent/WO2009057195A1/ja
Publication of WO2009057195A1 publication Critical patent/WO2009057195A1/ja
Priority to US12/712,144 priority patent/US8222972B2/en

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02897—Means for compensation or elimination of undesirable effects of strain or mechanical damage, e.g. strain due to bending influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02929—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02937—Means for compensation or elimination of undesirable effects of chemical damage, e.g. corrosion
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02984—Protection measures against damaging
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

　本発明の弾性波素子は、弾性波を励振する電極を含む共振器２と、共振器２を電気的に接続するように配された給電配線部３と、共振器２及び給電配線部３が表面に形成された圧電基板４と、圧電基板４上において共振器２を覆うように形成された第２の媒質５と、圧電基板４上において少なくとも第２の媒質５及び給電配線部３を覆うように形成された第３の媒質６とを備え、給電配線部３は、圧電基板４の表面に接している側面３４と圧電基板４の表面４ａとでなす第１の角度θが、鈍角に形成されている。このような構成により、腐食が発生せず、かつ給電配線部における電気抵抗が低い信頼性に優れた弾性波素子を実現することができる。
PCT/JP2007/071128 2007-10-30 2007-10-30 弾性波素子、デュープレクサ、通信モジュール、および通信装置 WO2009057195A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020107003829A KR101115185B1 (ko) 2007-10-30 2007-10-30 탄성파 소자, 듀플렉서, 통신 모듈, 및 통신 장치
CN200780100414XA CN101796723B (zh) 2007-10-30 2007-10-30 弹性波元件、双工器、通信模块、以及通信装置
JP2009538871A JP4775978B2 (ja) 2007-10-30 2007-10-30 弾性波素子、デュープレクサ、通信モジュール、および通信装置
PCT/JP2007/071128 WO2009057195A1 (ja) 2007-10-30 2007-10-30 弾性波素子、デュープレクサ、通信モジュール、および通信装置
US12/712,144 US8222972B2 (en) 2007-10-30 2010-02-24 Acoustic wave element, duplexer, communication module, and communication apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/071128 WO2009057195A1 (ja) 2007-10-30 2007-10-30 弾性波素子、デュープレクサ、通信モジュール、および通信装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/712,144 Continuation US8222972B2 (en) 2007-10-30 2010-02-24 Acoustic wave element, duplexer, communication module, and communication apparatus

Publications (1)

Publication Number Publication Date
WO2009057195A1 true WO2009057195A1 (ja) 2009-05-07

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/071128 WO2009057195A1 (ja) 2007-10-30 2007-10-30 弾性波素子、デュープレクサ、通信モジュール、および通信装置

Country Status (5)

Country Link
US (1) US8222972B2 (ja)
JP (1) JP4775978B2 (ja)
KR (1) KR101115185B1 (ja)
CN (1) CN101796723B (ja)
WO (1) WO2009057195A1 (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010034782A (ja) * 2008-07-28 2010-02-12 Fujitsu Ltd 弾性境界波デバイスおよびその製造方法、デュープレクサの製造方法
JP2011049991A (ja) * 2009-08-28 2011-03-10 Kyocera Corp 弾性波装置
WO2011036980A1 (ja) * 2009-09-28 2011-03-31 太陽誘電株式会社 弾性波フィルタ
JP2011151552A (ja) * 2010-01-20 2011-08-04 Murata Mfg Co Ltd 弾性波デュプレクサ
JP2011151553A (ja) * 2010-01-20 2011-08-04 Murata Mfg Co Ltd 弾性波デュプレクサ
WO2013118532A1 (ja) * 2012-02-06 2013-08-15 株式会社村田製作所 フィルタ装置
JP2014112921A (ja) * 2014-02-03 2014-06-19 Kyocera Corp 弾性波装置および回路基板
JP2015146523A (ja) * 2014-02-03 2015-08-13 京セラ株式会社 弾性波素子および弾性波装置
JP2016007057A (ja) * 2015-08-26 2016-01-14 京セラ株式会社 弾性波装置および回路基板
JP2017506866A (ja) * 2014-02-18 2017-03-09 スカイワークスフィルターソリューションズジャパン株式会社 弾性波素子とこれを用いたラダーフィルタ
JP2017201835A (ja) * 2017-08-02 2017-11-09 京セラ株式会社 弾性波装置および回路基板

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015098694A1 (ja) * 2013-12-26 2015-07-02 株式会社村田製作所 弾性波装置及びその製造方法
US10056878B2 (en) * 2014-12-12 2018-08-21 Taiyo Yuden Co., Ltd. Acoustic wave device and method of fabricating the same
KR102095213B1 (ko) * 2016-06-07 2020-03-31 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
WO2019049830A1 (ja) * 2017-09-05 2019-03-14 株式会社村田製作所 フィルタ装置およびフィルタ装置の製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1141054A (ja) * 1997-07-16 1999-02-12 Toshiba Corp 弾性表面波素子、弾性表面波素子の製造方法および接続装置
JP2002026686A (ja) * 2000-07-13 2002-01-25 Murata Mfg Co Ltd 弾性表面波素子及びその製造方法
JP2005203889A (ja) * 2004-01-13 2005-07-28 Fujitsu Media Device Kk 弾性表面波デバイス
JP2006279609A (ja) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk 弾性境界波素子、共振子およびラダー型フィルタ

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WO1998052279A1 (fr) 1997-05-12 1998-11-19 Hitachi, Ltd. Dispositif a onde elastique
JP2001168671A (ja) 1999-12-07 2001-06-22 Matsushita Electric Ind Co Ltd 弾性表面波デバイスとその製造方法
GB2358081B (en) * 2000-01-07 2004-02-18 Seiko Epson Corp A thin-film transistor and a method for maufacturing thereof
EP1239588A2 (en) 2001-03-04 2002-09-11 Kazuhiko Yamanouchi Surface acoustic wave substrate and surface acoustic wave functional element
JP4109877B2 (ja) 2001-03-04 2008-07-02 和彦 山之内 弾性表面波機能素子
EP1460759A4 (en) 2001-12-28 2009-09-02 Panasonic Corp SURFACE ACOUSTIC WAVE PROCESSING DEVICE, ELECTRONIC COMPONENT USING THE SAME, AND COMPOSITE MODULE
JP3841053B2 (ja) * 2002-07-24 2006-11-01 株式会社村田製作所 弾性表面波装置及びその製造方法
JP3865712B2 (ja) * 2003-05-26 2007-01-10 富士通メディアデバイス株式会社 弾性表面波デバイス
CN1938946A (zh) * 2004-03-29 2007-03-28 株式会社村田制作所 声界面波装置的制造方法以及声界面波装置
JP4518877B2 (ja) * 2004-08-26 2010-08-04 京セラ株式会社 弾性表面波装置
JP4975377B2 (ja) * 2006-06-06 2012-07-11 太陽誘電株式会社 弾性境界波素子、共振器およびフィルタ
JP4917396B2 (ja) * 2006-09-25 2012-04-18 太陽誘電株式会社 フィルタおよび分波器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1141054A (ja) * 1997-07-16 1999-02-12 Toshiba Corp 弾性表面波素子、弾性表面波素子の製造方法および接続装置
JP2002026686A (ja) * 2000-07-13 2002-01-25 Murata Mfg Co Ltd 弾性表面波素子及びその製造方法
JP2005203889A (ja) * 2004-01-13 2005-07-28 Fujitsu Media Device Kk 弾性表面波デバイス
JP2006279609A (ja) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk 弾性境界波素子、共振子およびラダー型フィルタ

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010034782A (ja) * 2008-07-28 2010-02-12 Fujitsu Ltd 弾性境界波デバイスおよびその製造方法、デュープレクサの製造方法
JP2011049991A (ja) * 2009-08-28 2011-03-10 Kyocera Corp 弾性波装置
US9231553B2 (en) 2009-09-28 2016-01-05 Taiyo Yuden Co., Ltd. Acoustic wave filter
WO2011036980A1 (ja) * 2009-09-28 2011-03-31 太陽誘電株式会社 弾性波フィルタ
JP2011071912A (ja) * 2009-09-28 2011-04-07 Taiyo Yuden Co Ltd 弾性波フィルタ
JP2011151552A (ja) * 2010-01-20 2011-08-04 Murata Mfg Co Ltd 弾性波デュプレクサ
JP2011151553A (ja) * 2010-01-20 2011-08-04 Murata Mfg Co Ltd 弾性波デュプレクサ
US8525615B2 (en) 2010-01-20 2013-09-03 Murata Manufacturing Co., Ltd. Elastic wave duplexer having a sealing member that includes a recess
WO2013118532A1 (ja) * 2012-02-06 2013-08-15 株式会社村田製作所 フィルタ装置
JPWO2013118532A1 (ja) * 2012-02-06 2015-05-11 株式会社村田製作所 フィルタ装置
US9692390B2 (en) 2012-02-06 2017-06-27 Murata Manufacturing Co., Ltd. Filter device having a wiring electrode located in a different acoustic portion
JP2014112921A (ja) * 2014-02-03 2014-06-19 Kyocera Corp 弾性波装置および回路基板
JP2015146523A (ja) * 2014-02-03 2015-08-13 京セラ株式会社 弾性波素子および弾性波装置
JP2017506866A (ja) * 2014-02-18 2017-03-09 スカイワークスフィルターソリューションズジャパン株式会社 弾性波素子とこれを用いたラダーフィルタ
JP2018170765A (ja) * 2014-02-18 2018-11-01 スカイワークスフィルターソリューションズジャパン株式会社 弾性波素子の接続配線における電気損失を低減する方法
JP2016007057A (ja) * 2015-08-26 2016-01-14 京セラ株式会社 弾性波装置および回路基板
JP2017201835A (ja) * 2017-08-02 2017-11-09 京セラ株式会社 弾性波装置および回路基板

Also Published As

Publication number Publication date
JP4775978B2 (ja) 2011-09-21
CN101796723B (zh) 2013-07-17
KR20100046024A (ko) 2010-05-04
US8222972B2 (en) 2012-07-17
JPWO2009057195A1 (ja) 2011-03-10
CN101796723A (zh) 2010-08-04
US20100148890A1 (en) 2010-06-17
KR101115185B1 (ko) 2012-02-24

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