WO2009044522A1 - 慣性力センサ - Google Patents

慣性力センサ Download PDF

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Publication number
WO2009044522A1
WO2009044522A1 PCT/JP2008/002702 JP2008002702W WO2009044522A1 WO 2009044522 A1 WO2009044522 A1 WO 2009044522A1 JP 2008002702 W JP2008002702 W JP 2008002702W WO 2009044522 A1 WO2009044522 A1 WO 2009044522A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
inertia sensor
angular velocity
weight portion
vibrate
Prior art date
Application number
PCT/JP2008/002702
Other languages
English (en)
French (fr)
Inventor
Hiroyuki Aizawa
Satoshi Ohuchi
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to JP2009535960A priority Critical patent/JPWO2009044522A1/ja
Publication of WO2009044522A1 publication Critical patent/WO2009044522A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

　慣性力センサは、保持体と、支持部と、支持部から互いに反対の方向に延びて保持体に結合する第１と第２のアームと、支持部から延びるＵ次形状を実質的に有する第３から第６のアームと、第３から第６のアームにそれぞれ接続された第１から第４の錘部と、第１から第４の錘部をそれぞれ振動させる第１から第４の駆動電極と、第１から第４の錘部に加えられた角速度により第３のアームに生じる歪みを検出する感知電極とを備える。第２と第３のアームは第１と第４のアームと反対の方向に振動する。この慣性力センサは所定の軸の周りの角速度を検出する場合でも、その軸に沿った高さを小さくすることができる。
PCT/JP2008/002702 2007-10-01 2008-09-29 慣性力センサ WO2009044522A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009535960A JPWO2009044522A1 (ja) 2007-10-01 2008-09-29 慣性力センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007257300 2007-10-01
JP2007-257300 2007-10-01

Publications (1)

Publication Number Publication Date
WO2009044522A1 true WO2009044522A1 (ja) 2009-04-09

Family

ID=40525954

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002702 WO2009044522A1 (ja) 2007-10-01 2008-09-29 慣性力センサ

Country Status (2)

Country Link
JP (1) JPWO2009044522A1 (ja)
WO (1) WO2009044522A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011093077A1 (ja) * 2010-01-29 2011-08-04 パナソニック株式会社 角速度センサ
WO2013076942A1 (ja) * 2011-11-22 2013-05-30 パナソニック株式会社 角速度センサとそれに用いられる検出素子

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0367177A (ja) * 1989-08-07 1991-03-22 Nippondenso Co Ltd 半導体加速度センサ
JPH05264577A (ja) * 1992-03-19 1993-10-12 Hitachi Ltd 加速度センサ及びそれを使用したエアバッグ装置並びに車体制御装置
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
JP2001050751A (ja) * 1999-08-05 2001-02-23 Matsushita Electric Ind Co Ltd 角速度センサ
JP2001082963A (ja) * 1999-09-13 2001-03-30 Yoshiaki Kato 運動センサ振動体および振動ジャイロスコープ
WO2007086337A1 (ja) * 2006-01-24 2007-08-02 Matsushita Electric Industrial Co., Ltd. 慣性力センサ
JP2007198779A (ja) * 2006-01-24 2007-08-09 Matsushita Electric Ind Co Ltd 慣性力センサ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0367177A (ja) * 1989-08-07 1991-03-22 Nippondenso Co Ltd 半導体加速度センサ
JPH05264577A (ja) * 1992-03-19 1993-10-12 Hitachi Ltd 加速度センサ及びそれを使用したエアバッグ装置並びに車体制御装置
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
JP2001050751A (ja) * 1999-08-05 2001-02-23 Matsushita Electric Ind Co Ltd 角速度センサ
JP2001082963A (ja) * 1999-09-13 2001-03-30 Yoshiaki Kato 運動センサ振動体および振動ジャイロスコープ
WO2007086337A1 (ja) * 2006-01-24 2007-08-02 Matsushita Electric Industrial Co., Ltd. 慣性力センサ
JP2007198779A (ja) * 2006-01-24 2007-08-09 Matsushita Electric Ind Co Ltd 慣性力センサ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011093077A1 (ja) * 2010-01-29 2011-08-04 パナソニック株式会社 角速度センサ
JPWO2011093077A1 (ja) * 2010-01-29 2013-05-30 パナソニック株式会社 角速度センサ
US8991248B2 (en) 2010-01-29 2015-03-31 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor
WO2013076942A1 (ja) * 2011-11-22 2013-05-30 パナソニック株式会社 角速度センサとそれに用いられる検出素子
JPWO2013076942A1 (ja) * 2011-11-22 2015-04-27 パナソニックＩｐマネジメント株式会社 角速度センサとそれに用いられる検出素子
US9400180B2 (en) 2011-11-22 2016-07-26 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor and detection element used therein

Also Published As

Publication number Publication date
JPWO2009044522A1 (ja) 2011-02-03

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