WO2009028279A1 - エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにそれを含むエア浮上搬送装置 - Google Patents

エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにそれを含むエア浮上搬送装置 Download PDF

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Publication number
WO2009028279A1
WO2009028279A1 PCT/JP2008/063276 JP2008063276W WO2009028279A1 WO 2009028279 A1 WO2009028279 A1 WO 2009028279A1 JP 2008063276 W JP2008063276 W JP 2008063276W WO 2009028279 A1 WO2009028279 A1 WO 2009028279A1
Authority
WO
WIPO (PCT)
Prior art keywords
air
conveyor apparatus
wire gauge
floating conveyor
floating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/063276
Other languages
English (en)
French (fr)
Inventor
Junichi Shiotani
Norihiro Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sintokogio Ltd
Meikikou Corp
Original Assignee
Sintokogio Ltd
Meikikou Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008033881A external-priority patent/JP2009073660A/ja
Application filed by Sintokogio Ltd, Meikikou Corp filed Critical Sintokogio Ltd
Priority to CN200880100544A priority Critical patent/CN101778787A/zh
Publication of WO2009028279A1 publication Critical patent/WO2009028279A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

【課題】メンテナンスが容易なエア浮上搬送装置の空気吹出し構造体を提供する。 【解決手段】薄板としてのガラス基板４を空気によって浮上させて搬送するエア浮上搬送装置の空気吹出し構造体において、構造体の最上部に配置される織金網３と、該織金網３の下部に配置される多孔性を有する補強部材２とからなる。織金網３として、平織金網や、綾織金網、平畳織金網、綾畳織金網などを用いることができる。また、前記補強部材２には単層または多層構造がある。
PCT/JP2008/063276 2007-08-24 2008-07-24 エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにそれを含むエア浮上搬送装置 Ceased WO2009028279A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200880100544A CN101778787A (zh) 2007-08-24 2008-07-24 空气悬浮输送装置的空气吹出构造体和空气吹出单元、以及包含这些部件的空气悬浮输送装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007218205 2007-08-24
JP2007-218205 2007-08-24
JP2008033881A JP2009073660A (ja) 2007-08-24 2008-02-15 エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにエア浮上搬送装置
JP2008-033881 2008-02-15

Publications (1)

Publication Number Publication Date
WO2009028279A1 true WO2009028279A1 (ja) 2009-03-05

Family

ID=40387008

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/063276 Ceased WO2009028279A1 (ja) 2007-08-24 2008-07-24 エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにそれを含むエア浮上搬送装置

Country Status (1)

Country Link
WO (1) WO2009028279A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010232415A (ja) * 2009-03-27 2010-10-14 Tokyo Electron Ltd 基板熱処理装置
EP2343266A1 (en) * 2010-01-11 2011-07-13 Glaston Services Ltd. Oy Method and apparatus for supporting and heating glass sheets on a hot gas cushion
CN102234023A (zh) * 2010-04-30 2011-11-09 株式会社太星技研 空气供应装置
CN108423465A (zh) * 2018-06-04 2018-08-21 广东顺德华焯机械科技有限公司 一种led灯带分条设备
CN115995414A (zh) * 2023-02-28 2023-04-21 广东利元亨智能装备股份有限公司 一种输送装置及硅片输送方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002103264A (ja) * 2000-10-02 2002-04-09 Fuji Filter Kogyo Kk 吸引チャックプレート
JP2004345744A (ja) * 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
JP2005029359A (ja) * 2003-07-08 2005-02-03 Daifuku Co Ltd 板状体搬送装置
JP2005154040A (ja) * 2003-11-21 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd 基板搬送装置
JP2007106521A (ja) * 2005-10-11 2007-04-26 Nippon Sekkei Kogyo:Kk 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002103264A (ja) * 2000-10-02 2002-04-09 Fuji Filter Kogyo Kk 吸引チャックプレート
JP2004345744A (ja) * 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
JP2005029359A (ja) * 2003-07-08 2005-02-03 Daifuku Co Ltd 板状体搬送装置
JP2005154040A (ja) * 2003-11-21 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd 基板搬送装置
JP2007106521A (ja) * 2005-10-11 2007-04-26 Nippon Sekkei Kogyo:Kk 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010232415A (ja) * 2009-03-27 2010-10-14 Tokyo Electron Ltd 基板熱処理装置
EP2343266A1 (en) * 2010-01-11 2011-07-13 Glaston Services Ltd. Oy Method and apparatus for supporting and heating glass sheets on a hot gas cushion
US8997521B2 (en) 2010-01-11 2015-04-07 Glaston Services Ltd. Oy Method and apparatus for supporting and heating glass sheets on a hot gas cushion
CN102234023A (zh) * 2010-04-30 2011-11-09 株式会社太星技研 空气供应装置
CN108423465A (zh) * 2018-06-04 2018-08-21 广东顺德华焯机械科技有限公司 一种led灯带分条设备
CN108423465B (zh) * 2018-06-04 2024-05-03 广东顺德华焯机械科技有限公司 一种led灯带分条设备
CN115995414A (zh) * 2023-02-28 2023-04-21 广东利元亨智能装备股份有限公司 一种输送装置及硅片输送方法

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