WO2009016715A1 - Testing apparatus, testing method, and manufacturing method of device - Google Patents

Testing apparatus, testing method, and manufacturing method of device Download PDF

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Publication number
WO2009016715A1
WO2009016715A1 PCT/JP2007/064885 JP2007064885W WO2009016715A1 WO 2009016715 A1 WO2009016715 A1 WO 2009016715A1 JP 2007064885 W JP2007064885 W JP 2007064885W WO 2009016715 A1 WO2009016715 A1 WO 2009016715A1
Authority
WO
WIPO (PCT)
Prior art keywords
terminal
signal
signal output
testing
response signal
Prior art date
Application number
PCT/JP2007/064885
Other languages
French (fr)
Japanese (ja)
Inventor
Nobusuke Seki
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to PCT/JP2007/064885 priority Critical patent/WO2009016715A1/en
Priority to TW097128833A priority patent/TW200907385A/en
Publication of WO2009016715A1 publication Critical patent/WO2009016715A1/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
    • G01R31/31932—Comparators

Abstract

A testing apparatus capable of correctly determining read/write switching characteristics of a device to be tested. The testing apparatus for testing the device to be tested includes a signal output part connected via a first line to a terminal of the device to be tested for applying a test signal to the terminal, a signal detection part connected via the first line shared with the signal output part to the terminal for detecting a response signal output from the terminal, and a determination part for determining whether or not the response signal is good based on results of comparing the response signal with an expected value. The signal output part applies the test signal to the terminal concurrently with the response signal output from the terminal propagating to the signal detection part via the first line. The determination part inhibits the determination of a failure for a part overlapping the test signal in the response signal detected by the signal detection part.
PCT/JP2007/064885 2007-07-30 2007-07-30 Testing apparatus, testing method, and manufacturing method of device WO2009016715A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2007/064885 WO2009016715A1 (en) 2007-07-30 2007-07-30 Testing apparatus, testing method, and manufacturing method of device
TW097128833A TW200907385A (en) 2007-07-30 2008-07-30 Test apparatus, test method, and manufacturing method of a device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/064885 WO2009016715A1 (en) 2007-07-30 2007-07-30 Testing apparatus, testing method, and manufacturing method of device

Publications (1)

Publication Number Publication Date
WO2009016715A1 true WO2009016715A1 (en) 2009-02-05

Family

ID=40303960

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/064885 WO2009016715A1 (en) 2007-07-30 2007-07-30 Testing apparatus, testing method, and manufacturing method of device

Country Status (2)

Country Link
TW (1) TW200907385A (en)
WO (1) WO2009016715A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010257513A (en) * 2009-04-23 2010-11-11 Fujitsu Ltd Defective cell detecting device, defective cell detecting method, and defective cell detecting program

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115424658B (en) * 2022-11-01 2023-01-31 南京芯驰半导体科技有限公司 Storage unit testing method and device, electronic equipment and storage medium

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990066A (en) * 1982-11-15 1984-05-24 Usac Electronics Ind Co Ltd Testing device for logical circuit
JPH03152485A (en) * 1989-11-08 1991-06-28 Mitsubishi Electric Corp Semiconductor evaluating apparatus
JPH04262440A (en) * 1991-02-18 1992-09-17 Nec Corp Semiconductor integrated circuit
JPH10123218A (en) * 1996-10-24 1998-05-15 Sharp Corp Method and device for testing logic integrated circuit
JP2004198191A (en) * 2002-12-17 2004-07-15 Renesas Technology Corp Interface circuit
JP3555934B2 (en) * 2000-02-14 2004-08-18 Ｎｅｃエレクトロニクス株式会社 Test device and test method
JP2007170940A (en) * 2005-12-21 2007-07-05 Elpida Memory Inc Test method of semiconductor element and semiconductor test device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990066A (en) * 1982-11-15 1984-05-24 Usac Electronics Ind Co Ltd Testing device for logical circuit
JPH03152485A (en) * 1989-11-08 1991-06-28 Mitsubishi Electric Corp Semiconductor evaluating apparatus
JPH04262440A (en) * 1991-02-18 1992-09-17 Nec Corp Semiconductor integrated circuit
JPH10123218A (en) * 1996-10-24 1998-05-15 Sharp Corp Method and device for testing logic integrated circuit
JP3555934B2 (en) * 2000-02-14 2004-08-18 Ｎｅｃエレクトロニクス株式会社 Test device and test method
JP2004198191A (en) * 2002-12-17 2004-07-15 Renesas Technology Corp Interface circuit
JP2007170940A (en) * 2005-12-21 2007-07-05 Elpida Memory Inc Test method of semiconductor element and semiconductor test device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010257513A (en) * 2009-04-23 2010-11-11 Fujitsu Ltd Defective cell detecting device, defective cell detecting method, and defective cell detecting program

Also Published As

Publication number Publication date
TW200907385A (en) 2009-02-16

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